JP7370753B2 - Light source unit, light source device and optical fiber laser - Google Patents

Description

The present invention relates to a semiconductor laser module, a light source unit, a light source device, and an optical fiber laser.

Conventionally, a laser module is known that includes a semiconductor laser element housed in a package housing and a condensing optical system that couples the laser beam output from the semiconductor laser element to the light incident end face of an optical fiber (for example, (See Patent Document 1).

In such a laser module, the fast axis direction and the slow axis direction of the laser beam are respectively collimated using, for example, an FAC lens or a SAC lens. Since a collimating lens such as an FAC lens is disposed outside the package housing, it is not possible to shorten the focal length, and the collimated beam width becomes wide, resulting in an increase in system size.

Japanese Patent Application Publication No. 2004-253783

By incorporating a collimating lens inside the package housing, the collimated beam width can be narrowed, making it possible to downsize the system. However, when the collimating lens is fixed within the package housing, the fixing agent may deteriorate due to laser beam irradiation, which may adversely affect the reliability of the semiconductor laser device.

The present invention has been made in view of the above, and an object of the present invention is to provide a semiconductor laser module, a light source unit, a light source device, and an optical fiber laser that are highly reliable and can be miniaturized.

In order to solve the above-mentioned problems and achieve the objects, a semiconductor laser module according to the present invention includes a semiconductor laser element that outputs a multimode laser beam, and a paraboloid that collimates the laser beam in the vertical direction. a package casing having a reflector, a mounting surface for mounting the semiconductor laser element, and a window through which the laser beam collimated by the reflector is transmitted, the semiconductor laser of the package casing is mounted; The mounting surface is a heat radiation surface, and the window portion is provided on a surface facing the mounting surface.

Furthermore, the semiconductor laser module according to the present invention is characterized in that the package housing is hermetically sealed.

Further, in the semiconductor laser module according to the present invention, in the above invention, at least one side surface of the package housing perpendicular to the mounting surface is a heat radiation surface.

Furthermore, the semiconductor laser module according to the present invention is characterized in that, in the above invention, the reflector is mounted on the mounting surface.

Further, the semiconductor laser module according to the present invention is characterized in that, in the above invention, the reflector is made of a glass material whose mounting surface is metallized, and is bonded to the mounting surface of the package housing by solder. do.

Further, a light source unit according to the present invention includes the semiconductor laser module according to any one of the above, an SAC element that horizontally collimates a laser beam output from the semiconductor laser module, the semiconductor laser module, and the semiconductor laser module. It is characterized by comprising a condenser lens that condenses a beam collimated in the vertical and horizontal directions by an SAC lens, and an optical fiber that optically couples the beam condensed by the condenser lens.

Moreover, the light source unit according to the present invention is characterized in that, in the above invention, the SAC element is a lens or a mirror.

Further, the light source unit according to the present invention includes a plurality of semiconductor laser modules according to any one of the above, and a plurality of first reflection mirrors that respectively reflect the laser beams output from the semiconductor laser modules. a plurality of SAC lenses that horizontally collimate the laser beams output from the semiconductor laser module, and a plurality of SAC lenses that respectively reflect the beams collimated in the vertical and horizontal directions by the semiconductor laser module and the SAC lenses. a second reflecting mirror, a condensing lens that condenses the laser beam from the second reflective mirror, an optical fiber that optically couples the beam condensed by the condensing lens, and the semiconductor laser module. a mounting member for mounting the semiconductor laser module on the mounting surface of the element, the mounting surface of the semiconductor laser module of the mounting member has a stepped shape, one of the semiconductor laser modules is arranged on each step, and one step The laser beams output from the semiconductor laser modules respectively disposed in the parts are reflected or collimated via the plurality of first reflection mirrors, the plurality of SAC lenses, and the plurality of second reflection mirrors. , the condenser lens condenses a group of laser beams each reflected by the plurality of second reflection mirrors.

Further, the light source unit according to the present invention includes a plurality of semiconductor laser modules according to any one of the above, and a plurality of first reflection mirrors that respectively reflect the laser beams output from the semiconductor laser modules. a plurality of SAC lenses that vertically collimate the laser beams output from the semiconductor laser module, and a plurality of SAC lenses that respectively reflect the beams collimated in the vertical and horizontal directions by the semiconductor laser module and the SAC lenses. a second reflective mirror, a condensing lens that condenses the laser beam from the second reflective mirror, an optical fiber that optically couples the beam condensed by the condensing lens, and the semiconductor laser module. a mounting member mounted on the mounting surface of the element, the plurality of semiconductor laser modules are mounted on the same plane of the mounting member, and the laser beam output from the semiconductor laser module is mounted on the plurality of first from the first reflective mirror, the SAC lens, and the second reflective mirror so as to be reflected or collimated through the reflective mirror, the plurality of SAC lenses, and the plurality of second reflective mirrors, respectively. a set of optical systems arranged at different heights, and the condenser lens condenses a group of laser beams respectively reflected by the plurality of second reflection mirrors arranged at different heights. It is characterized by

Moreover, the light source unit according to the present invention is characterized in that, in the above invention, the SAC lenses are respectively disposed between the semiconductor laser module and the first reflection mirror.

Further, a light source unit according to the present invention includes a plurality of semiconductor laser modules according to any one of the above, and a plurality of SAC lenses that horizontally collimate the laser beams output from the semiconductor laser modules, respectively. a second reflection mirror that reflects the beams collimated in the vertical and horizontal directions by the semiconductor laser module and the SAC lens; and a condenser lens that focuses the laser beam from the second reflection mirror. , an optical fiber for optically coupling the beam condensed by the condenser lens, and a mounting member for mounting the semiconductor laser module on a side surface perpendicular to a mounting surface of the semiconductor laser element, The mounting surface of the laser module has a step-like shape, and one set of the semiconductor laser module, the SAC lens, and the second reflection mirror are arranged on one step, and the semiconductor laser module The laser beam output from the module is arranged so as to be parallel to the step, and the condenser lens collects a group of laser beams reflected by the plurality of second reflection mirrors arranged at each step. It is characterized by being luminous.

Further, a light source device according to the present invention is characterized in that it includes at least one light source unit described in any one of the above.

Furthermore, an optical fiber laser according to the present invention is characterized by comprising the light source device described above and an optical amplification fiber that is optically pumped by the laser light output from the light source unit.

According to the present invention, it is possible to realize a semiconductor laser module, a light source unit, a light source device, and an optical fiber laser that are downsized and highly reliable.

FIG. 1 is a schematic partially cutaway view of a semiconductor laser module according to Embodiment 1 of the present invention. FIG. 2 is a schematic plan view of a light source unit using the semiconductor laser module of FIG. 1. FIG. 3 is a schematic partially cutaway view showing a side surface of the light source unit shown in FIG. 2. FIG. FIG. 4 is a diagram showing the arrangement of a semiconductor laser module and an optical system in the light source unit shown in FIG. 2. FIG. FIG. 5 is a schematic diagram of a light source device using the light source unit of FIG. 2. FIG. 6 is a schematic diagram of an optical fiber laser using the light source unit of FIG. 2. FIG. 7 is a diagram showing another example of the arrangement of the semiconductor laser module and the optical system in the light source unit shown in FIG. 2. FIG. 8 is a schematic partially cutaway view showing a side surface of an optical unit according to Embodiment 2 of the present invention. FIG. 9 is a schematic plan view of a light source unit according to Embodiment 3 of the present invention. FIG. 10 is a schematic partially cutaway view showing a side surface of the light source unit shown in FIG. 9. FIG. FIG. 11 is a diagram showing the arrangement of a semiconductor laser module and an optical system in the light source unit shown in FIG. 9.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a semiconductor laser module, an optical unit, a light source device, and an optical fiber laser according to the present invention will be described below with reference to the drawings. Note that the present invention is not limited to this embodiment. Further, in the description of the drawings, the same or corresponding elements are given the same reference numerals as appropriate. Furthermore, it should be noted that the drawings are schematic, and the dimensional relationship of each element, the ratio of each element, etc. may differ from reality. Drawings may also include portions that differ in dimensional relationships and ratios.

(Embodiment 1)
First, the configuration of a semiconductor laser module according to an embodiment of the present invention will be described. FIG. 1 is a schematic partially cutaway view of a semiconductor laser module according to an embodiment of the present invention. The semiconductor laser module 10 includes a semiconductor laser element 11 that outputs a multimode laser beam, a reflector 13 having a paraboloid 13a that collimates the laser beam in the vertical direction, and a package housing 15 that houses the semiconductor laser element 11. It is equipped with.

The semiconductor laser element 11 is a multimode laser and is mounted on a submount 12. The semiconductor laser element 11 outputs a laser beam in the direction of the reflector 13 on the right side of the paper. The semiconductor laser element 11 is a high-output semiconductor laser element whose output laser light has an optical intensity of 1 W or more, and further, 10 W or more. In this embodiment, the light intensity of the laser light output from the semiconductor laser element 11 is, for example, 11W. Furthermore, the semiconductor laser element 11 outputs laser light having a wavelength of 900 nm to 1000 nm, for example.

The reflector 13 is made of a glass material, and the mounting surface 13b is metallized. The reflector 13 is arranged at a position where the output light of the semiconductor laser element 11 is made into substantially parallel light in the vertical direction. The mounting surface 13b of the reflector 13 is bonded to the bottom surface portion 15a, which is the mounting surface of the package housing 15, via solder 14. The reflector 13 may be made of a metal material such as aluminum in addition to a glass material, and the paraboloid 13a may be coated with an aluminum coating, a silver coating, or a gold coating with or without a protective film. There is. It is also possible to bond the mounting surface 13b to the bottom surface 15a with an adhesive or the like without metalizing the mounting surface 13b, but from the viewpoint of deterioration of the adhesive that is the fixing material, the mounting surface 13b is metalized and the solder 14 is used. Bonding is preferred.

The package housing 15 has a substantially rectangular parallelepiped shape, and includes a bottom surface 15a that is a mounting surface, and side surfaces 15b, 15c, 15d, and 15e perpendicular to the bottom surface 15a (15e is not cut out in FIG. 1). (not shown (see FIG. 4)) and an upper surface portion 15f. The package housing 15 is attached to a box portion consisting of a bottom portion 15a and side portions 15b, 15c, 15d, and 15e, with the top portion 15f hermetically sealed. The bottom surface portion 15a on which the semiconductor laser element 11 is mounted via the submount 12 is a heat radiation surface. The submount 12 and the bottom portion 15a are preferably made of a material with good thermal conductivity, and may be a metal member made of various metals, or a ceramic with high thermal conductivity such as aluminum nitride or beryllium oxide. Further, a window portion 16 that transmits the laser beam is provided on the top surface portion 15f, which is a surface facing the bottom surface portion 15a.

In the semiconductor laser module 10, when the semiconductor laser element 11 outputs a laser beam in the direction of the reflector 13, the reflector 13 collimates the laser beam in the vertical direction with respect to the bottom surface 15a of the package housing 15. It is reflected in the direction of the upper surface portion 15f where the window portion 16 is provided. In the semiconductor laser module 10, since the reflector 13 is provided inside the package housing 15, the width of the beam collimated and reflected by the reflector 13 can be narrowed, and the system can be made smaller. Further, the reflector 13 is bonded to the bottom surface 15a of the package housing 15, and the paraboloid 13a is coated with metal, so that the beam irradiated from the semiconductor laser element 11 does not reach the reflector 13. Since the mounting surface of the semiconductor laser element 11 is not irradiated, deterioration of the fixing material can be prevented, and the reliability of the semiconductor laser element 11 will not be adversely affected by deterioration of the fixing material.

Next, an optical unit using the semiconductor laser module 10 will be explained. FIG. 2 is a schematic plan view of a light source unit using the semiconductor laser module of FIG. 1. FIG. 3 is a schematic partially cutaway view showing a side surface of the light source unit shown in FIG. 2. FIG. FIG. 4 is a diagram showing the arrangement of a semiconductor laser module and an optical system in the light source unit shown in FIG. 2. FIG.

The light source unit 100 includes six semiconductor laser modules 10-1 to 10-6 and six first reflection mirrors 20-1 that respectively reflect the laser beams output from the semiconductor laser modules 10-1 to 10-6. ~20-6, six SAC lenses 30-1 to 30-6 that horizontally collimate the laser beams output from the semiconductor laser modules 10-1 to 10-6, and semiconductor laser modules 10-1 to 20-6. 10-6 and SAC lenses 30-1 to 30-6, second reflecting mirrors 40-1 to 40-6 reflect the beams collimated in the vertical direction and the horizontal direction, respectively, and the second reflecting mirror 40 Condensing lenses 60 and 62 that condense the laser beams from -1 to 40-6, an optical filter 61, an optical fiber 66 that optically couples the beams condensed by the condensing lenses 60 and 62, and a semiconductor laser module. A mounting member 52 for mounting 10-1 to 10-6 is provided.

Semiconductor laser modules 10-1 to 10-6, first reflection mirrors 20-1 to 20-6, SAC lenses 30-1 to 30-6, second reflection mirrors 40-1 to 40-6, condenser lens 60 and 62 are housed within the housing 51. The housing 51 includes a lid 51a as shown in FIG. 3, but the lid of the package 51a is not shown in FIG. 2. The light source unit 100 also includes lead pins 53 for injecting current into the semiconductor laser modules 10-1 to 10-6.

As shown in FIG. 3, the mounting surface of the mounting member 52 has a step-like shape, and one semiconductor laser module 10-1 (or 10-2, . . . , 10-6) is arranged in each step. has been done. The semiconductor laser modules 10-1 to 10-6 are arranged inside the casing 51 with a difference in level by a mounting member 52. Furthermore, a set of first reflecting mirrors 20-1 (or 20-2, . . . , 20-6), SAC lenses 30-1 (or 30-2, . . . , 30-6), As shown in FIG. 4, the second reflecting mirror 40-1 (or 40-2, . At the same height as the semiconductor laser module 10-1 (or 10-2, ..., 10-6) so that the laser beam output from the semiconductor laser module 10-6) can be reflected or transmitted and collimated. placed at the top. Semiconductor laser modules 10-1 to 10-6, first reflection mirrors 20-1 to 20-6, SAC lenses 30-1 to 30-6, second reflection mirrors 40-1 to 40-6, condenser lens 60, 62, and the optical filter 61 are each fixed inside the housing 51.

One end of the optical fiber 66 on the side into which the laser beam is incident is housed inside the housing 51 . A loose tube 65 is provided at the insertion portion of the optical fiber 66 into the housing 51, and a boot 64 is fitted onto a portion of the housing 51 so as to cover a portion of the loose tube 65 and the insertion portion. ing.

Further, as shown in FIG. 3, the optical fiber 66 is inserted into a glass capillary 67 as an optical component. The optical fiber 66 includes a coating portion 66a, but the coating portion 66a is removed from the portion of the optical fiber 66 that is inserted into the glass capillary 67. Further, the optical fiber 66 includes a protrusion 66b protruding from the glass capillary 67 on a part of the input side. The outer periphery of the glass capillary 67 is covered with a light absorber 68. The light absorber 68 is fixed to the housing 51.

The housing 51 is preferably made of a material with good thermal conductivity in order to suppress an increase in internal temperature, and may be a metal member made of various metals. Furthermore, as shown in FIG. 3, the bottom surface of the casing 51 is preferably spaced apart from the surface on which the light source unit 100 is installed in the region where the glass capillary 67 is arranged. Thereby, when fixing the housing 51 with screws or the like, the influence of warping of the bottom surface of the housing 51 can be reduced.

As described above, the mounting member 52 is fixed within the housing 51, and adjusts the height of the semiconductor laser modules 10-1 to 10-6 so that the semiconductor laser modules 10-1 to 10-6 output. The optical paths of the laser beams are prevented from interfering with each other. Note that the mounting member 52 may be configured integrally with the housing 51.

Optical system consisting of semiconductor laser modules 10-1 to 10-6, first reflection mirrors 20-1 to 20-6, SAC lenses 30-1 to 30-6, and second reflection mirrors 40-1 to 40-6. There may be a plurality of systems like the light source unit 100 according to the embodiment, or there may be one system, and the number is not particularly limited.

The lead pins 35 supply power to the semiconductor laser modules 10-1 to 10-6 via bonding wires (not shown). The supplied power may be a constant voltage or may be a modulated voltage.

The first reflecting mirrors 20-1 to 20-6 may be mirrors provided with various metal films or dielectric films, and at the wavelength of the laser light output from the semiconductor laser modules 10-1 to 10-6. The higher the reflectance, the better. Further, the first reflecting mirrors 20-1 to 20-6 reflect the laser beams from the corresponding semiconductor laser modules 10-1 to 10-6 onto the SAC lenses 30-1 to 30-6.

The SAC lenses 30-1 to 30-6 are, for example, cylindrical lenses with a focal length of 5 mm. The SAC lenses 30-1 to 30-6 collimate the output lights from the semiconductor laser modules 10-1 to 10-6 in the horizontal direction, respectively. The SAC lenses 30-1 to 30-6 are arranged at positions where the output lights from the semiconductor laser modules 10-1 to 10-6 are made into substantially parallel lights.

The second reflection mirrors 40-1 to 40-6 may be mirrors provided with various metal films or dielectric films, and at the wavelength of the laser light output from the semiconductor laser modules 10-1 to 10-6, The higher the reflectance, the better. Further, the second reflection mirrors 40-1 to 40-6 finely adjust the reflection direction so as to suitably couple the laser beams from the corresponding one of the semiconductor laser modules 10-1 to 10-6 to the optical fiber 66. can do.

The condensing lenses 60 and 62 are cylindrical lenses whose curvatures are perpendicular to each other, and output from the semiconductor laser modules 10-1 to 10-6, and the plurality of second reflection mirrors 40-1 to 40-1 arranged at each step. The laser beam reflected by 40-6 is focused and suitably coupled to optical fiber 66. The positions of the condensing lenses 60 and 62 with respect to the optical fiber 66 are adjusted so that, for example, the coupling efficiency of the laser beams outputted by the semiconductor laser modules 10-1 to 10-6 to the optical fiber 66 is 85% or more. There is.

The optical filter 61 is, for example, a low-pass filter that reflects light with a wavelength of 1060 nm to 1080 nm and transmits light with a wavelength of 900 nm to 1000 nm. As a result, the optical filter 61 transmits the laser light output from the semiconductor laser modules 10-1 to 10-6, and also prevents light with a wavelength of 1060 nm to 1080 nm from being irradiated onto the semiconductor laser modules 10-1 to 10-6 from the outside. Prevent this from happening. Further, the optical filter 61 prevents the output laser beams of the semiconductor laser modules 10-1 to 10-6 that have been slightly reflected by the optical filter 61 from returning to the semiconductor laser modules 10-1 to 10-6. It is placed at an angle to the optical axis.

The optical fiber 66 may be a multimode optical fiber having a core diameter of 105 μm and a cladding system of 125 μm, for example, but may also be a single mode optical fiber. The NA of the optical fiber 112 may be, for example, 0.15 to 0.22.

In the light source unit 100, each of the semiconductor laser modules 10-1 to 10-6 arranged with a step difference is supplied with power from the lead pin 53 and outputs laser light. Each of the output laser beams is collimated in the vertical direction by the reflector 13 in each of the semiconductor laser modules 10-1 to 10-6, and passes through the window 16 to the first reflecting mirror 20-1 to 20-6. is output to. The output laser light is bent by 90 degrees by the first reflecting mirrors 20-1 to 20-6 and reflected in the direction of the SAC lenses 30-1 to 30-6, respectively. are collimated horizontally. Next, each laser beam is reflected in the direction of the optical fiber 66 by the second reflecting mirrors 40-1 to 40-6, and each laser beam is condensed by the condensing lens 60 and the condensing lens 62. It is coupled to optical fiber 66 . The laser light coupled to the optical fiber 66 is guided to the outside of the light source unit 100 by the optical fiber 66 and output. The light source unit 100 prevents unnecessary loss of laser light due to the steps of the semiconductor laser modules 10-1 to 10-6 arranged on the stepped portion of the mounting member 52. In this embodiment, assuming that the light intensity of the output light of each of the semiconductor laser modules 10-1 to 10-6 is 11 W and the coupling efficiency is 85%, the light output of the light source unit 100 is The intensity is 56W.

The light source unit 100 can be used for a light source device. FIG. 5 is a schematic diagram of a light source device using the light source unit of FIG. 2.

The light source device 110 includes a plurality of light source units 100 and includes a combiner 90 as an optical coupling section. The light source device 110 uses the light source unit 100 as an excitation light source. In the plurality of light source units 100 included in the light source device 110, the light is propagated to the combiner 90 through the optical fiber 66. The output ends of the optical fibers 66 are respectively coupled to a plurality of input ports of a combiner 90 with multiple inputs and one output. Note that the light source device 110 is not limited to having a plurality of light source units 100, but only needs to have at least one light source unit 100.

Moreover, the light source unit 100 can be used for an optical fiber laser. FIG. 6 is a schematic diagram of an optical fiber laser using the light source unit of FIG. 2. The optical fiber laser 200 has a plurality of light source units 100, and includes a light source device 110 used as an excitation light source, a combiner 90, a rare earth-doped optical fiber 130, and an output side optical fiber 140. High reflection FBRs (Fiber Bragg Gratings) 120 and 121 are provided at the input end and output end of the rare earth-doped optical fiber 130, respectively.

The input end of the rare earth doped optical fiber 130 is connected to the output end of the combiner 90, and the input end of the exit side optical fiber 140 is connected to the output end of the rare earth doped optical fiber 130. Note that the input section through which the laser beams output from the plurality of light source units 100 are input into the rare earth-doped optical fiber 130 may use another configuration instead of the combiner 90. For example, the optical fibers 66 of the output parts of the plurality of light source units 100 are arranged side by side, and the laser beams output from the plurality of optical fibers 66 are transmitted to the rare earth-doped optical fiber 130 using an incident part such as an optical system including a lens. It may be configured such that the light is input to the input end of the.

The light source unit 100, light source device 110, and optical fiber laser 200 described above can be miniaturized by using the semiconductor laser module 10.

Note that the light source unit 100 may use SAC mirrors instead of the first reflecting mirrors 20-1 to 20-6 and the SAC lenses 30-1 to 30-6. FIG. 7 is a diagram showing another example of the arrangement of the semiconductor laser module and the optical system in the light source unit shown in FIG. 2.

The SAC mirror 70-1 collimates in the horizontal direction while reflecting the laser beam output from the semiconductor laser module 10-1. The second reflecting mirror 40-1 reflects the beam collimated in the vertical and horizontal directions by the semiconductor laser module 10-1 and the SAC mirror 70-1.

Similarly to the light source unit 100, the light source unit including the semiconductor laser module, the SAC mirror, and the second reflection mirror also allows for system miniaturization when used as a light source device or an optical fiber laser.

(Embodiment 2)
Next, Embodiment 2 will be described. FIG. 8 is a schematic partially cutaway view showing a side surface of an optical unit according to Embodiment 2 of the present invention. The main differences between the light source unit 100A according to the second embodiment and the light source unit 100 according to the first embodiment will be explained below.

Like the light source unit 100, the light source unit 100A includes six semiconductor laser modules 10-1 to 10-6 and six semiconductor laser modules that reflect the laser beams output from the semiconductor laser modules 10-1 to 10-6, respectively. 1 reflective mirrors 20-1 to 20-6 and six SAC lenses 30-1 to 30-6 that horizontally collimate the laser beams output from the semiconductor laser modules 10-1 to 10-6, respectively; Second reflecting mirrors 40-1 to 40-6 reflect the beams collimated in the vertical and horizontal directions by the semiconductor laser modules 10-1 to 10-6 and the SAC lenses 30-1 to 30-6, respectively. , condensing lenses 60 and 62 that condense the laser beams from the second reflecting mirrors 40-1 to 40-6, an optical filter 61, and light that optically couples the beams condensed by the condensing lenses 60 and 62. A fiber 66 is provided.

In the light source unit 100A, the semiconductor laser modules 10-1 to 10-6 are mounted on the same plane of the mounting member 52A. In addition, the first reflecting mirror 20-1 (or 20-2, . . . , 20-6), the SAC lens 30-1 (or 30-2, . . . , 30-6), and the second One set of optical system consisting of the reflecting mirror 40-1 (or 40-2, . . . , 40-6) is connected to the semiconductor laser module 10-1 (or 10-2, . . . , 10-6). ), the first reflecting mirror 20-1 (or 20-2,..., 20-6), the SAC lens 30-1 (or 30-2,..., -6) and the second reflective mirror 40-1 (or 40-2, . . . , 40-6), the semiconductor The optical systems are arranged at different heights so that the optical paths of the laser beams output by the laser modules 10-1 to 10-6 do not interfere with each other. Each optical system consisting of first reflecting mirrors 20-1 to 20-6, SAC lenses 30-1 to 30-6, and second reflecting mirrors 40-1 to 40-6 is arranged at different heights. As a result, the output from the semiconductor laser modules 10-1 to 10-6 is output to the first reflecting mirrors 20-1 to 20-6, the SAC lenses 30-1 to 30-6, and the second reflecting mirrors 40-1 to 40-6. The laser beam group reflected by 40-6 can be condensed by condensing lenses 60 and 62 and optically coupled to optical fiber 66 without unnecessary loss.

(Embodiment 3)
Next, Embodiment 3 will be described. FIG. 9 is a schematic plan view of a light source unit according to Embodiment 3 of the present invention. FIG. 10 is a schematic partially cutaway view showing a side surface of the light source unit shown in FIG. 9. FIG. FIG. 11 is a diagram showing the arrangement of a semiconductor laser module and an optical system in the light source unit shown in FIG. 9. The main differences between the light source unit 100B according to the third embodiment and the light source unit 100 according to the first embodiment will be explained below.

The light source unit 100B does not have six first reflection mirrors 20-1 to 20-6 that reflect the laser beams output from the semiconductor laser modules 10-1 to 10-6, respectively. Different from 100. Further, as shown in FIGS. 9 to 11, the semiconductor laser modules 10-1 to 10-6 are mounted on the mounting member 52 at the side surface 15b of the package housing 15.

The mounting surface of the mounting member 52 has a stepped shape, and one set of semiconductor laser modules 10-1 (or 10-2, . . . , 10-6), SAC lens 30-1 (or 30 -2, . . . , 30-6) and a second reflecting mirror 40-1 (or 40-2, . . . , 40-6). The semiconductor laser modules 10-1 to 10-6 are mounted on the mounting member 52 with a side surface (side surface 15b shown in FIG. 1) perpendicular to the mounting surface of the semiconductor element 11. The semiconductor laser modules 10-1 to 10-6 are arranged inside the casing 51 with a difference in level by a mounting member 52. Further, as shown in FIG. 11, the SAC lenses 30-1 to 30-6 and the second reflection mirrors 40-1 to 40-6 output output from one corresponding semiconductor laser module 10-1 to 10-6. They are placed at the same height so that they can transmit or reflect the generated laser beam.

In the light source unit 100B, each of the semiconductor laser modules 10-1 to 10-6 arranged in steps is supplied with power from the lead pin 53 and outputs laser light. Each of the output laser beams is collimated in the vertical direction by the reflector 13 in each of the semiconductor laser modules 10-1 to 10-6, and is directed through the window 16 toward the SAC lenses 30-1 to 30-6. Each is ejected. The SAC lenses 30-1 to 30-6 collimate the laser beams in the horizontal direction, and each collimated laser beam is reflected in the direction of the optical fiber 66 by the second reflection mirrors 40-1 to 40-6. Each laser beam can be optically coupled to the optical fiber 66 by the condensing lens 60 and the condensing lens 62 without unnecessary loss.

Note that the semiconductor laser modules 10-1 to 10-6 use the bottom surface 15a, which is the mounting surface, as a heat radiation surface. You can also use it as When at least one of the side surfaces perpendicular to the bottom surface 15a is used as a heat radiation surface, it is preferable that the side surface 15b, which is the mounting surface to the mounting member 52, is used as the heat radiation surface.

As described above, the semiconductor laser module, light source unit, and light source device according to the present invention are suitable for use mainly in high-power optical fiber lasers.

10, 10-1 to 10-6 semiconductor laser module 11 semiconductor laser element 12 submount 13 reflector 14 solder 15 package housing 16 window 20-1 to 20-6 first reflection mirror 30-1 to 30-6 SAC lens 40-1 to 40-6 Second reflecting mirror 51 Housing 52 Mounting member 53 Lead pins 60, 62 Condensing lens 61 Optical filter 64 Boot 65 Loose tube 66 Optical fiber 67 Glass capillary 68 Light absorber 70-1 SAC Mirror 90 Combiner 100, 100A, 100B Light source unit 110 Light source device 130, 131 High reflection FBG
140 Rare earth doped optical fiber 150 Output side optical fiber 200 Optical fiber laser

Claims (10)

A semiconductor laser element that outputs a multimode laser beam, a reflector having a paraboloid that collimates the laser beam in the vertical direction, a mounting surface on which the semiconductor laser element is mounted, and a laser beam collimated by the reflector. a package housing having a window portion through which the semiconductor laser element is mounted; a mounting surface of the package housing on which the semiconductor laser element is mounted is a heat dissipation surface; a plurality of semiconductor laser modules provided in the
a plurality of first reflection mirrors that respectively reflect the laser beams output from the semiconductor laser module;
a plurality of SAC elements that collimate a laser beam output from the semiconductor laser module;
a plurality of second reflection mirrors that respectively reflect the beams collimated by the semiconductor laser module and the plurality of SAC elements;
a condensing lens that condenses the laser beams from the plurality of second reflection mirrors;
an optical fiber that optically couples the beam focused by the focusing lens;
A mounting member for mounting the semiconductor laser module,
The mounting surface of the semiconductor laser module of the mounting member has a stepped shape, one semiconductor laser module is arranged on each step, and the semiconductor laser modules arranged on each step are output. The laser beam is reflected or collimated via the plurality of first reflecting mirrors, the plurality of SAC elements , and the plurality of second reflecting mirrors, respectively,
The light source unit is characterized in that the condenser lens condenses a group of laser beams each reflected by the plurality of second reflection mirrors. A semiconductor laser element that outputs a multimode laser beam, a reflector having a paraboloid that collimates the laser beam in the vertical direction, a mounting surface on which the semiconductor laser element is mounted, and a laser beam collimated by the reflector. a package housing having a window portion through which the semiconductor laser element is mounted; a mounting surface of the package housing on which the semiconductor laser element is mounted is a heat dissipation surface; a plurality of semiconductor laser modules provided in the
a plurality of first reflection mirrors that respectively reflect the laser beams output from the semiconductor laser module;
a plurality of SAC elements that collimate a laser beam output from the semiconductor laser module;
a plurality of second reflection mirrors that respectively reflect the beams collimated by the semiconductor laser module and the plurality of SAC elements ;
a condensing lens that condenses the laser beams from the plurality of second reflection mirrors;
an optical fiber that optically couples the beam focused by the focusing lens;
A mounting member for mounting the semiconductor laser module,
The plurality of semiconductor laser modules are mounted on the same plane of the mounting member, and the laser beams output from the plurality of semiconductor laser modules are directed to the plurality of first reflecting mirrors, the plurality of SAC elements, and the plurality of SAC elements . A set of optical systems consisting of the first reflecting mirror, the plurality of SAC elements , and the plurality of second reflecting mirrors are the same so that they are each reflected or collimated via the plurality of second reflecting mirrors. Each optical system is placed at a different height, and each optical system is placed at a different height.
The light source unit is characterized in that the condenser lens condenses a group of laser beams respectively reflected by the plurality of second reflection mirrors arranged at different heights. 3. The light source unit according to claim 1, wherein the plurality of SAC elements are each arranged between the semiconductor laser module and the first reflection mirror. A semiconductor laser element that outputs a multimode laser beam, a reflector having a paraboloid that collimates the laser beam in the vertical direction, a mounting surface on which the semiconductor laser element is mounted, and a laser beam collimated by the reflector. a package housing having a window portion through which the semiconductor laser element is mounted; a mounting surface of the package housing on which the semiconductor laser element is mounted is a heat dissipation surface; a plurality of semiconductor laser modules provided in the
a plurality of SAC elements that collimate a laser beam output from the semiconductor laser module;
a plurality of second reflection mirrors that respectively reflect the beams collimated by the semiconductor laser module and the plurality of SAC elements ;
a condensing lens that condenses the laser beams from the plurality of second reflection mirrors;
an optical fiber that optically couples the beam focused by the focusing lens;
a mounting member for mounting the semiconductor laser module on a side surface perpendicular to a mounting surface of the semiconductor laser element;
The mounting surface of the semiconductor laser module of the mounting member has a stepped shape, and one set of the semiconductor laser module, the plurality of SAC elements , and the plurality of second reflection mirrors are arranged on one step. , the semiconductor laser module is arranged so that the laser beam output from the semiconductor laser module is parallel to the step part,
The light source unit is characterized in that the condenser lens condenses a group of laser beams reflected by the plurality of second reflection mirrors arranged at each step. The light source unit according to claim 1, wherein the package housing is hermetically sealed. 5. The light source unit according to claim 1, wherein at least one side surface of the package housing perpendicular to the mounting surface is a heat radiation surface. The light source unit according to claim 1, wherein the reflector is mounted on the mounting surface. 8. The light source unit according to claim 7, wherein the reflector is made of a glass material whose mounting surface is metallized, and is bonded to the mounting surface of the package casing by solder. A light source device comprising at least one light source unit according to claim 1. A light source device according to claim 9;
an optical amplification fiber that is optically excited by a laser beam output from the light source unit;
An optical fiber laser characterized by comprising:

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