JP7337016B2 - Light source device and ozone generator - Google Patents

Description

The present invention relates to a light source device and an ozone generator equipped with an excimer lamp.

In an excimer lamp, an excimer discharge is formed in a discharge space filled with a discharge gas by applying a high frequency and high voltage to electrodes with a dielectric interposed therebetween, thereby emitting ultraviolet rays. Ozone is generated by irradiating the air with ultraviolet rays.

An excimer lamp having a discharge vessel made of quartz emits visible light together with ultraviolet rays by adjusting the type of quartz, treatment conditions during manufacturing, the type of discharge gas, and the like. In order to allow the user to confirm that the lamp is on, for example, a window through which visible light is transmitted is provided in the casing of the ozone generator so that the user can see it (see Patent Document 1).

JP 2019-043786 A

Ozone generation by ultraviolet irradiation using an excimer lamp does not generate harmful nitrogen oxides. Therefore, it is required not only to be used in unmanned spaces such as sterilization in hospital rooms and semiconductor cleaning in factories, but also in spaces where people are present, such as homes, hotel rooms, restaurants, and public facilities. .

A light source device used in such an environment exposed to the general public is required to be excellent not only in function but also in its lighting design in order to meet people's psychological and physiological desires. However, conventional commercial and industrial excimer lamps have not been developed and designed in consideration of lighting design including psychological and physiological effects on humans.

Therefore, it is required to provide a light source device and an ozone generator with excellent lighting design in consideration of psychological and physiological effects.

The light source device of the present invention comprises an excimer lamp capable of emitting ultraviolet rays by means of electric discharge that repeats occurrence and disappearance in the frequency range of 1 kHz to 500 kHz, and the visible light emitted from the excimer lamp together with the ultraviolet rays has a frequency in the range of 1 Hz to 60 Hz. has a 1/f fluctuation. Here, "1/f fluctuation" indicates that visible light is accompanied by a time-series light intensity change in which the power spectrum and frequency have an inversely proportional relationship. Also includes 1/f fluctuation measured for

Considering visual characteristics, the visible light in the wavelength range including the wavelength of 550 nm should be configured to have 1/f fluctuation in the frequency range of 4 Hz to 30 Hz. For example, in visible light in a wavelength range including a wavelength of 550 nm, when the power spectrum is P and the frequency is F with respect to the integrated illuminance, the vertical axis is the logarithm of P and the horizontal axis is the logarithm of F. Represents the relationship between P and F. The slope of the straight line can be made to have an under-fluctuation waveform in the range of -1.2 to -1.0.

The light source device can be provided with a tubular member that surrounds the excimer lamp and does not transmit ultraviolet rays emitted from the excimer lamp but transmits visible light emitted from the excimer lamp. For example, the tubular member is disposed between the excimer lamp and the excimer lamp at a distance equal to or larger than the transmission distance at which visible light emitted from the excimer lamp reaches but ultraviolet rays emitted from the excimer lamp do not reach due to attenuation.

It is also possible to provide a translucent member that at least partially surrounds the excimer lamp and transmits light having a longer wavelength than the ultraviolet rays emitted from the excimer lamp. For example, the translucent member is arranged with a distance between it and the excimer lamp that is equal to or less than the transmission distance of ultraviolet rays emitted from the excimer lamp, and blocks the ultraviolet rays emitted from the excimer lamp.

An auxiliary light source may be provided that emits light having a longer wavelength than the ultraviolet rays emitted from the excimer lamp toward the excimer lamp. It is also possible to provide a color rendering auxiliary light source that emits visible light having a wavelength included in the wavelength range of visible light emitted from the excimer lamp toward the excimer lamp. It is also possible to provide an electrode facing the exposed portion of the discharge vessel of the excimer lamp for generating a discharge within the discharge vessel.

In addition, if it is considered that the above-described configurations of the tubular member, the translucent member, the auxiliary ultraviolet light source, the auxiliary light source for color rendering, and the electrodes solve the technical problems peculiar to each, each configuration can It is possible to derive inventions characterized by elements.

The ozone generator of the present invention, which is another aspect of the present invention, comprises an excimer lamp capable of emitting ultraviolet rays having a peak wavelength of 200 nm or less by means of electric discharge that repeats generation and extinction in the frequency range of 1 kHz to 500 kHz; and an excimer lamp. and a tubular member that does not transmit ultraviolet rays emitted from the excimer lamp but transmits visible light emitted from the excimer lamp, wherein the fluid containing oxygen flowing through the spatial region surrounded by the tubular member is exposed to the ultraviolet rays. visible light emitted from the excimer lamp together with ultraviolet rays has 1/f fluctuation in the frequency range of 1 Hz to 60 Hz.

For example, the tubular member is disposed between the excimer lamp and the excimer lamp at a distance equal to or greater than the transmission distance at which visible light emitted from the excimer lamp reaches and ultraviolet rays emitted from the excimer lamp do not reach due to attenuation.

According to the present invention, it is possible to provide a light source device and an ozone generator having an excellent lighting design with psychological and physiological effects.

1 is a schematic configuration diagram of a light source device according to a first embodiment; FIG. FIG. 2 is a schematic configuration diagram of an ozone generator that is a second embodiment; It is a schematic partial block diagram of the ozone generator as viewed from above. 4 is a graph showing emission spectra of light emitted from an excimer lamp and an auxiliary light source; 4 is a graph showing that measured visible light has 1/f fluctuation.

Embodiments of the present invention are described below with reference to the drawings.

FIG. 1 is a schematic configuration diagram of the light source device of the first embodiment.

The light source device 10 includes an excimer lamp 20, a lamp cover (tubular member) 30, and a power supply section 40, and is configured as an illumination device having an ozone generation function. The lamp cover 30 is configured here as a cylindrical tube and accommodates the excimer lamp 20 . The lamp cover 30 is arranged with one open end 30A downward and an open end 30B upward, and is supported by a support member (not shown). The excimer lamp 20 is arranged coaxially so that its lamp axis E coincides with the vertical tube axis of the lamp cover 30 .

The excimer lamp 20 is configured here as a double tube structure lamp, and includes an internal electrode provided inside an inner tube (not shown) and an external electrode 25 wound around the outer surface of the discharge vessel 20S of the excimer lamp 20, A discharge gas is enclosed in the discharge space. A power supply unit (not shown) arranged in the housing applies a high voltage at a high frequency between the internal electrode and the external electrode 25 . As a result, instantaneous generation and extinction of discharge are repeated, and ultraviolet rays (for example, wavelength 172 nm) are emitted. The light emission control unit 45 controls lighting of the excimer lamp 20, and controls frequency, applied voltage, and the like.

The lamp cover 30 is made of a transparent material that transmits visible light but does not transmit ultraviolet light. be. The lamp cover 30 is a tube having a circular cross section here, and both ends 30A and 30B are open to the atmosphere. When the excimer lamp 20 is turned on and ultraviolet rays are emitted, ozone is generated in the lamp cover 30 and released from the opening ends 30A and 30B of the lamp cover 30 to the outside of the apparatus.

As described above, while the excimer lamp 20 is on, a discharge is generated in the discharge vessel 20S of the excimer lamp 20 along the radial direction, and generation and extinction are repeated. At this time, by adjusting the type of quartz tube constituting the discharge vessel 20S, the heat treatment conditions, and the type of discharge gas (the wavelength of the ultraviolet rays emitted by the discharge), visible light is emitted to the outside of the excimer lamp 20 together with the ultraviolet rays. . Ozone generation etc. are performed by emitted ultraviolet rays.

The excimer lamp 20 can emit, for example, visible light in the wavelength ranges of 400 nm to 500 nm and 500 nm to 650 nm, and can emit reddish purple light by light in the blue and green to red wavelength ranges. can. It can also emit green light with a wavelength around 545 nm. Since the frequency of the applied voltage is set in the range of 1 kHz to 500 kHz, the momentary generation and disappearance of discharge cannot be visually observed under the condition that visible light is emitted.

The lamp cover 30 surrounds the excimer lamp 20 all around the lamp. The user can visually recognize the excimer lamp 20 through the lamp cover 30 from any circumferential direction of 360 degrees. Moreover, the user can visually recognize the visible light emitted from the excimer lamp 20 while the excimer lamp 20 is on. On the other hand, the lamp cover 30 does not transmit the ultraviolet rays emitted from the excimer lamp 20, and the ultraviolet rays are not emitted to the outside of the apparatus.

Visible light emitted from the excimer lamp 20 has "1/f fluctuation". That is, visible light is emitted with a time-series light intensity change in which the power spectrum and frequency have an inversely proportional relationship. The lighting control unit 45 can control the frequency, the applied voltage, etc. so that the illuminance of visible light changes over time with 1/f fluctuation. Considering the characteristics of human vision, 1/f fluctuation in the frequency range of 4 Hz to 30 Hz should be derived from the change over time of the integrated illuminance in the wavelength range including the wavelength of 550 nm of visible light.

In general, if both axes of a graph representing an inversely proportional relationship between a power spectrum with 1/f fluctuation and frequency are converted into logarithms and represented on a graph, the power spectrum and frequency will have a linear relationship, and k = -1. It can be represented by an approximation of a straight line with a slope, a slope larger than that, or a slope with a smaller slope.

A slope of k=-1 is said to have a "moderately fluctuating" waveform. If the slope k is smaller than -1 (the slope is more vertical and steeper), there will be "too small fluctuations" with less abrupt changes and regular fluctuation waveforms. On the other hand, when the slope k is larger than -1 (the slope is more horizontal and gentle), there are many sudden changes and the fluctuations become "excessive fluctuations" with complex waveforms. make you feel uncomfortable.

The light emission control unit 45 controls the frequency, the applied voltage, and the like so as to provide a waveform with excessive fluctuation when k<-1, or moderate fluctuation when k=-1. As described above, in a discharge that repeats momentary generation and extinction, the frequency of the applied voltage is high, so the generation and extinction itself cannot be visually recognized. looks like This gives a psychological rush. However, by giving the visible light a moderate fluctuation waveform or an excessively small fluctuation waveform, the user can visually recognize the visible light in a psychologically comfortable manner.

As described above, according to the present embodiment, in the light source device 10 having the excimer lamp 20, the lamp cover 30 accommodates the excimer lamp 20, and the excimer lamp 20 emits visible light with 1/f fluctuation as well as ultraviolet rays. do. It is possible to generate ozone and the like while suppressing ultraviolet irradiation to the outside of the device, and to provide lighting that has a psychologically soothing effect.

By the way, the vacuum ultraviolet rays of a specific peak wavelength are easily absorbed in the atmosphere, and the ultraviolet rays emitted from the excimer lamp 20 are attenuated in the process of traveling, resulting in a decrease in the intensity of the ultraviolet rays. The degree of this attenuation follows the magnitude of the absorption coefficient of ultraviolet rays in the atmosphere. For example, in the case of ultraviolet rays with a wavelength of 172 nm, the ultraviolet intensity ratio is attenuated to 50% or less when traveling about 3 mm, 20% or less at about 6 mm, and all the ultraviolet rays are absorbed at about 30 mm.

If the traveling distance of ultraviolet rays when attenuated to a predetermined ultraviolet intensity ratio is expressed as a transmission distance L (see FIG. 1), the transmission distance L is, under an actual measurement environment, an ultraviolet ray having sensitivity in the wavelength range of vacuum ultraviolet rays. It is a distance that can be grasped as attenuation of the ultraviolet intensity ratio from the state in which the illuminometer is brought close to the outer surface of the discharge vessel.

When the ultraviolet intensity ratio is attenuated to 20% or less, it can be considered that the ultraviolet rays do not exert a large influence on positions further away. Therefore, if the distance D (see FIG. 1) between the outer surface of the excimer lamp 20 and the inner tube wall 30T of the lamp cover 30 is longer than the transmission distance L at which the ultraviolet intensity ratio attenuates until it reaches 20%, the lamp cover 30 The amount of ultraviolet rays reaching the lamp is very small, and the lamp cover 30 can reliably prevent the ultraviolet rays from leaking out of the device.

Next, a second embodiment will be described with reference to FIGS. 2-4. In the second embodiment, an auxiliary light source and a translucent member (optical member) that transmits light from the auxiliary light source are provided, and the ozone generator is configured. The same reference numerals are used for the same components as in the first embodiment.

FIG. 2 is a schematic configuration diagram of an ozone generator according to a second embodiment. FIG. 3 is a schematic partial configuration diagram of the ozone generator viewed from above.

The ozone generator 100 has an excimer lamp 20 and is housed in a flow tube 300 . As in the first embodiment, the flow tube 300 is arranged vertically with the open end 30A facing downward and the opening end 30B facing upward, and is spatially connected to a housing (not shown). As in the first embodiment, the channel tube 300 is configured as a cylindrical tube having a circular cross-section that transmits only visible light and does not transmit ultraviolet rays. are strategically placed.

A blower (not shown) that is spatially connected to the flow pipe 300 is provided inside the housing. It flows into the end 30A and is discharged from the open end 30B of the channel tube 300 into the inside of the housing (processing chamber). It should be noted that the channel tube 300 may be connected to another channel tube and discharged to the outside of the device.

A distance D from the surface of the discharge vessel 20S of the excimer lamp 20 to the inner wall 300T of the passage tube 300 is determined so as not to hinder the flow of the raw material gas and to ensure a sufficient ozone generation region. Specifically, the distance D is determined to be equal to or greater than the transmission distance at which the ultraviolet intensity ratio is attenuated to 80%. Preferably, the passage tube 300 is arranged with a distance between the excimer lamp 20 and the excimer lamp 20 that is equal to or greater than the transmission distance at which the visible light emitted from the excimer lamp 20 reaches and the ultraviolet rays emitted from the excimer lamp do not reach due to attenuation. good.

Below the excimer lamp 20 are an auxiliary light source (lighting auxiliary light source) 70 that emits light with a longer wavelength than the ultraviolet rays emitted from the excimer lamp, and an auxiliary light source (color rendering auxiliary light source) that emits visible light in a specific wavelength range. Auxiliary light source 80 is provided. The auxiliary light source 70 emits light with a peak wavelength around 400 nm here.

On the other hand, the auxiliary light source 80 is an auxiliary light source for starting lighting of the excimer lamp 20 and emits visible light in a wavelength range included in the wavelength range of visible light emitted from the excimer lamp 20 . The auxiliary light sources 70 and 80 here are composed of LEDs having directivity in the light distribution of emitted light, and the visible light emitted from the auxiliary light source 80 has no 1/f fluctuation. Here, visible light having a wavelength of 400 to 650 nm and a luminous flux of 30 (1 m) or less is emitted.

A light guide 50 is provided around the excimer lamp 20 . The light guide 50 is made of a transparent light-transmitting member that transmits visible light and only ultraviolet light in a partial wavelength range. Specifically, the light guide 50 does not transmit the ultraviolet rays emitted from the excimer lamp 20 but only the light emitted from the auxiliary light source 70 . For example, the light guide 50 is composed of an optical lens or the like.

The light guide 50 is formed in a columnar shape and arranged so that the central axis along its longitudinal direction coincides with the lamp axis E. As shown in FIG. Further, the light guide 50 is formed with a rectangular opening 50</b>S for accommodating the excimer lamp 20 . The excimer lamp 20 is spaced apart from the side surface 50T of the opening 50S along the lamp axis E by a distance D'. They face each other and are partially in contact. A housing space 50S for the excimer lamp 20 is formed by the electrodes 60A, 60B and the light guide 50. As shown in FIG.

The electrodes 60A and 60B are thin plate electrodes that do not transmit ultraviolet rays and reflect visible light, respectively, and are connected to the power source section via conductive members (not shown). The electrodes 60A and 60B are formed with slit-shaped openings S1 and S2 aligned with the positions of the opening 50S along the lamp axis, and opening ends 50A and 50B are formed at both ends of the excimer lamp 20, respectively.

By applying a high voltage at a high frequency between the electrodes 60A and 60B, a discharge is formed in the lamp axial direction range where the electrodes 60A and 60B face each other in the discharge vessel 20S. The ultraviolet rays and visible light emitted from the slit-shaped openings S1 and S2 are emitted toward the flow channel tube 300 .

Accordingly, the user can visually recognize the excimer lamp 20 through the slit-shaped openings S1 and S2, and can also visually recognize the excimer lamp 20 from the side surface 50B of the light guide 50. FIG.

FIG. 4 is a graph showing emission spectra of light emitted from the excimer lamp 20 and auxiliary light sources 70 and 80. As shown in FIG.

The emission spectrum of excimer lamp 20 is represented by spectral line L1. The emission spectrum of the light emitted from the auxiliary light source 70 is represented here by a spectral line L2 having a peak wavelength around 400 nm. On the other hand, the emission spectrum of visible light emitted from the auxiliary light source 80 is represented by a spectral line L3 over a wavelength range of approximately 400 nm to 800 nm.

The light guide 50 does not transmit the ultraviolet rays of the spectral line L1, but transmits the ultraviolet rays of the spectral line L2. Therefore, the light emitted from the auxiliary light source 70 passes through the light guide 50 and part of it reaches the excimer lamp 20 . Also, part of the light is reflected by the electrodes 60A and 60B and enters the excimer lamp 20 . As a result, the inside of the discharge vessel 20S is excited at the start of lighting, and excimer discharge is easily started.

Ultraviolet rays emitted from the excimer lamp 20 are blocked by the light guide 50 and the electrodes 60A and 60B, and are emitted toward the flow pipe 300 only from the slit-shaped openings S1 and S2. The amount of ozone generated is adjusted by limiting the spatial region irradiated with ultraviolet rays by the slit-shaped openings S1 and S2.

The surface of the discharge vessel 20S is spatially connected to the channel tube 300 by slit-shaped openings S1 and S2. By adjusting the flow of the source gas containing oxygen such as air in the exposed portion 20E facing the opening side of the excimer lamp 20 (the flow along the surface of the discharge vessel 20S outside the housing space 50S), the amount of ozone generated can be reduced. adjust.

The surface of the discharge vessel 20S may be configured to be spatially connected to the channel tube 300 by an upper opening 50A and a lower opening 50B. When the raw material gas containing oxygen such as air flows upward into the channel tube 300 by the blower, it flows from the channel tube 300 through the opening 50A into the housing space 50S, and the side surface 50T of the opening. and the surface of the discharge vessel 20S, flow from the accommodation space 50S through the opening 50B, and flow out into the channel tube 300 (flow along the surface of the discharge vessel 20S in the accommodation space 50S). to adjust the amount of ozone produced. That is, the ozone generation amount may be adjusted by the opening widths of the slit-shaped openings S1 and S2 and the opening areas of the openings 50A and 50B.

In order to limit the ultraviolet radiation from the excimer lamp 20 only to the slit-shaped openings S1 and S2 and to reduce the amount of ozone generated, the side surface 50T of the light guide 50 and the excimer lamp 20 are brought as close as possible for attenuation. It is preferable that the non-existent ultraviolet rays are blocked by the side surface 50T of the light guide 50. FIG. A distance D′ between the side surface 50T of the light guide 50 and the excimer lamp 20 is set to be shorter than the transmission distance of the ultraviolet rays emitted from the excimer lamp 20 . Preferably, the distance interval is set to be shorter than the transmission distance at which the ultraviolet intensity ratio is attenuated to 20%.

As described above, the excimer lamp 20 emits ultraviolet light and visible light having 1/f fluctuations when the lamp is lit. Since the light guide 50 transmits visible light, the visible light with 1/f fluctuation is radiated from the light guide 50 and the flow tube 300 to the outside of the apparatus.

On the other hand, visible light emitted from the auxiliary light source 80 passes through the light guide 50 and illuminates the excimer lamp 20 . Visible light from the auxiliary light source 80 that travels around the excimer lamp 20 is also reflected by the electrodes 60A and 60B and radiated from the light guide 50 and flow tube 300 to the outside of the device.

As a result, the user visually recognizes the visible light with 1/f fluctuation and the visible light emitted from the auxiliary light source 80 . The visible light emitted from the auxiliary light source 80 is light of the spectral line L3 shown in FIG. 4, and its wavelength range is included in the wavelength range of visible light emitted from the excimer lamp 20. By allowing the user to perceive the light with 1/f fluctuation in the warm light, it is possible to provide the user with psychological and physiological effects.

On the other hand, the ultraviolet rays emitted from the excimer lamp 20 are emitted from the slit-shaped openings S1 and S2 by the light guide 50 in an amount necessary for ozone generation. No radiation to the outside of the device. Therefore, sterilization, sterilization, etc. can be performed while preventing the influence of ozone generation outside the apparatus.

Although the light emitted from the auxiliary light source 70 is not blocked by the light guide 50, it does not affect the generation of ozone because it is ultraviolet rays of the spectral line L2 shown in FIG.

The lamp cover 30 and the channel tube 300 shown in the first and second embodiments are not limited to circular cross-sectional tubes, and may be configured by rectangular cross-sectional tubes. Also, the shape of the excimer lamp 20 is arbitrary, and the arrangement of the lamp cover 30 and the flow pipe 300 is also arbitrary. Various configurations can be adopted for the configuration of the ozone generator, and the configuration may be such that only the light guide 50 is provided without the flow pipe 300 in the second embodiment.

An ozone generator that emits visible light with 1/f fluctuation together with ultraviolet rays will be described below.

The ozone generator of the example corresponds to the second embodiment, and Xe gas is charged as a discharge gas into a discharge vessel of an excimer lamp (outer diameter: 6 mm, inner diameter: 4 mm, axial length: 55 mm) (filling pressure: 10 kPa). , a frequency of 60 kHz and a voltage value of 2.5 kV to generate a discharge. The discharge vessel was made of synthetic quartz glass. During discharge (during lamp lighting), the emission spectrum and light intensity frequency of locally generated fine discharge were measured with a spectrum radiometer (manufactured by Otsuka Electronics).

FIG. 5 is a graph showing that the measured visible light has 1/f fluctuations. FIG. 5A is a graph showing temporal changes in integrated illuminance in a wavelength range including 550 nm. FIG. 5B is a graph showing smoothed data obtained by Fourier transforming FIG. 5A, where the vertical axis represents power spectrum (positive square root of amplitude) and the horizontal axis represents frequency. FIG. 5(C) is a graph showing FIG. 5(B) as a double logarithm.

In FIG. 5A, visible light emitted together with ultraviolet rays (for example, wavelength 172 nm) from an excimer lamp in which Xe is enclosed as a discharge gas is shown in a wavelength range (for example, , wavelength range of 530 nm to 560 nm).

Here, when molecular luminescence around a wavelength of 550 nm due to xenon oxide is weak, noise can be removed as a change over time of a value obtained by subtracting the integrated illuminance at a wavelength of 530 nm to 560 nm from the integrated illuminance at a wavelength of 570 nm to 600 nm. As shown in FIG. 5B, the power spectrum can be represented by a curve P that is inversely proportional to the frequency by smoothing the Fourier-transformed data in consideration of the power fluctuation range.

Then, as shown in FIG. 5C, when converted into a graph with both axes of FIG. be able to. Even when similar measurements are made multiple times at different positions in the same discharge vessel, it can be expressed as a straight line with a slope that can approximate the range of -1.2 to -1.0 in the frequency range of 4 Hz to 30 Hz. , was confirmed to be an excessively small fluctuation.

REFERENCE SIGNS LIST 10 light source device 20 excimer lamp 30 lamp cover 50 light guide 60A, 60B electrode 70 auxiliary light source (lighting auxiliary light source)
80 auxiliary light source (color rendering auxiliary light source)
100 ozone generator 300 flow pipe

Claims (12)

Equipped with an excimer lamp capable of emitting ultraviolet rays by a discharge that repeats generation and extinction in the frequency range of 1 kHz to 500 kHz,
A light source device characterized in that visible light emitted from the excimer lamp together with ultraviolet rays has 1/f fluctuations in a frequency range of 1 Hz to 60 Hz. The visible light includes light in a wavelength range including a wavelength of 550 nm,
2. The light source device according to claim 1, having 1/f fluctuation in a frequency range of 4 Hz to 30 Hz. When P is the power spectrum of the change over time of the visible light and F is the frequency, the slope of the straight line representing the relationship between P and F with the logarithm of P on the vertical axis and the logarithm of F on the horizontal axis is -1.2 to 3. The light source device according to claim 1, wherein the waveform has an excessively small fluctuation in the range of -1.0. 4. A tubular member surrounding said excimer lamp, further comprising a tubular member which does not transmit ultraviolet rays emitted from said excimer lamp but transmits visible light emitted from said excimer lamp. A light source device as described. The tubular member is disposed between the excimer lamp and the excimer lamp at a distance equal to or greater than a transmission distance through which visible light emitted from the excimer lamp reaches and ultraviolet rays emitted from the excimer lamp do not reach after being attenuated. 5. The light source device according to claim 4, characterized in that: 6. The light source according to any one of claims 1 to 5, further comprising a translucent member that at least partially surrounds the excimer lamp and transmits light having a longer wavelength than ultraviolet rays emitted from the excimer lamp. Device. The translucent member is arranged with a distance between itself and the excimer lamp that is equal to or smaller than the transmission distance of ultraviolet rays emitted from the excimer lamp, and blocks the ultraviolet rays emitted from the excimer lamp. The light source device according to claim 6. 8. The light source device according to any one of claims 1 to 7, further comprising a lighting auxiliary light source that emits toward said excimer lamp light having a longer wavelength than ultraviolet rays emitted from said excimer lamp. 9. The auxiliary color rendering light source according to any one of claims 1 to 8, further comprising a color rendering auxiliary light source that emits, toward the excimer lamp, visible light having a wavelength included in a wavelength range of visible light emitted from the excimer lamp. The light source device according to . 3. The discharge vessel of the excimer lamp further comprises an electrode facing the exposed portion of the discharge vessel and generating a discharge within the discharge vessel, wherein the electrode reflects visible light emitted from the excimer lamp. 10. The light source device according to any one of 1 to 9. an excimer lamp capable of emitting ultraviolet rays having a peak wavelength of 200 nm or less by means of electric discharge that repeatedly occurs and disappears in a frequency range of 1 kHz to 500 kHz;
a tubular member that surrounds the excimer lamp and does not transmit ultraviolet rays emitted from the excimer lamp but transmits visible light emitted from the excimer lamp;
When the fluid containing oxygen flowing in the space surrounded by the tubular member is irradiated with ultraviolet rays to generate ozone, the visible light emitted from the excimer lamp together with the ultraviolet rays is 1/1 in the frequency range of 1 Hz to 60 Hz. An ozone generator characterized by having f fluctuation. The tubular member is disposed between the excimer lamp and the excimer lamp at a distance equal to or greater than a transmission distance through which visible light emitted from the excimer lamp reaches and ultraviolet rays emitted from the excimer lamp do not reach after being attenuated. The ozone generator according to claim 11, characterized in that:

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