JP7308498B2 - Plasma processing apparatus and plasma processing method - Google Patents

Description

An exemplary embodiment of the present disclosure relates to a plasma processing apparatus and a plasma processing method.

Plasma processing apparatuses are used in the manufacture of electronic devices. Patent Literature 1 discloses a technology related to a plasma processing apparatus. A plasma processing apparatus includes a vacuum vessel, a processing chamber, a support electrode, an antenna and a radiation port, and magnetic field forming means. The processing chamber is provided inside the vacuum vessel and is supplied with gas. The support electrode is provided inside the processing chamber and supports the object to be processed. The antenna and radiating port provide radio frequency in the very high frequency (VHF) band or ultra high frequency (UHF) band to the processing chamber. The magnetic field forming means forms a magnetic field in the processing chamber. A plasma processing apparatus includes an electric field control space. The electric field control space is composed of a dielectric and a metal partition plate or disk-shaped metal surrounding the dielectric. The VHF band is a frequency band in the range of approximately 30 to 300 [MHz]. The UHF band is a frequency band in the range of approximately 300 [MHz] to 3 [GHz].

JP-A-2003-243376

The present disclosure provides a technique capable of improving plasma uniformity in a parallel plate type plasma processing apparatus with a plasma excitation frequency in the VHF band or UHF band.

In an exemplary embodiment, a plasma processing apparatus is provided. A plasma processing apparatus includes a processing container, a stage, a dielectric plate, an upper electrode, a waveguide, and an end portion of the waveguide. A stage is provided in the processing container. The dielectric plate is provided above the upper surface of the stage via a space inside the processing container. The upper electrode is provided above the dielectric plate. The waveguide guides high frequency waves in the VHF band or UHF band. The end of the waveguide is positioned facing the space and radiates high frequencies into the space. A gap is provided between the upper electrode and the dielectric plate. The width of the air gap is non-uniform in the extending direction of the dielectric plate.

According to the present disclosure, the present disclosure provides a technique capable of improving plasma uniformity in a parallel plate type plasma processing apparatus in which the plasma excitation frequency is in the VHF band or UHF band.

It is a figure which illustrates the structure of the plasma processing apparatus which concerns on exemplary embodiment. It is a figure which illustrates the structure of the plasma processing apparatus which concerns on another exemplary embodiment. 3 is a diagram showing in detail a portion of the configuration shown in FIG. 2; FIG. Figure 4 shows in more detail a portion of the arrangement shown in Figures 2 and 3; Figure 4 shows in more detail another configuration that can be used in place of the configuration shown in Figure 3; It is a figure which illustrates the structure of the plasma processing apparatus which concerns on another exemplary embodiment. It is a figure which shows an example of the shape of the lower surface of the upper electrode shown in each of FIG.1, 2, and 6. FIG. FIG. 4 is a diagram showing an example of the shape of a gap between an upper electrode and a dielectric plate; FIG. 10 is a diagram showing another example of the shape of the gap between the upper electrode and the dielectric plate; FIG. 11 illustrates a stage according to another exemplary embodiment; FIG. 11 illustrates a stage according to another exemplary embodiment;

Various exemplary embodiments are described below. In an exemplary embodiment, a plasma processing apparatus is provided. A plasma processing apparatus includes a processing container, a stage, a dielectric plate, an upper electrode, a waveguide, and an end portion of the waveguide. A stage is provided in the processing container. A dielectric plate is provided above the stage via a space in the processing container. The upper electrode is provided above the dielectric plate. The waveguide guides high frequency waves in the VHF band or UHF band. The end of the waveguide is positioned facing the space and radiates high frequencies into the space. A gap is provided between the upper electrode and the dielectric plate. The width of the air gap is non-uniform in the extending direction of the dielectric plate.

In the case of high frequencies in the VHF band or UHF band, the generation of standing waves can reduce plasma uniformity in the extending direction of the lower surface of the dielectric plate. However, according to an exemplary embodiment, the presence of the air gap may suppress the generation of standing waves and reduce the gradient of the electric field in the space near the top electrode (more specifically the dielectric plate). Thus, plasma uniformity can be improved. Also, according to an exemplary embodiment, the width of the air gap is non-uniform in the direction in which the dielectric plate extends (the direction in which the air gap extends). That is, the width of the air gap can be adjusted to suppress the generation of standing waves. In particular, the width of the air gap can be adjusted when high frequencies in the VHF band or UHF band are radiated into the space. By this adjustment, the wavelength of the surface wave (radio wave) propagating between the upper electrode (more specifically, the dielectric plate) and the plasma generated in the space during plasma generation can be preferably extended. Therefore, plasma uniformity can be further improved.

In the plasma processing apparatus according to the exemplary embodiment, the edge of the dielectric plate and the edge of the upper electrode are connected to each other by pressing via the elastic member. Therefore, even if each part thermally expands due to heat input from the plasma, problems such as cracking of the dielectric plate can be avoided.

In the plasma processing apparatus according to the exemplary embodiment, the width of the air gap increases from the edge to the center of each of the upper electrode and the dielectric plate. Thus, the generation of standing waves by surface waves can be avoided.

In the plasma processing apparatus according to the exemplary embodiment, the width of the air gap decreases from the edge to the center of each of the upper electrode and the dielectric plate. Therefore, attenuation of surface waves can be suppressed.

In the plasma processing apparatus according to the exemplary embodiment, the lower surface of the upper electrode exposed in the gap has a wavy shape. Therefore, the influence of harmonics caused by the nonlinear current-voltage characteristics of the plasma sheath can be reduced.

A plasma processing apparatus according to an exemplary embodiment further comprises a dielectric rod positioned between the upper electrode and the dielectric plate. The air gap is defined by the separation of the top electrode and the dielectric plate with the edges of the top electrode and the dielectric plate in close contact with each other. Therefore, the air gap can be stably provided by the dielectric rod.

The plasma processing apparatus according to the exemplary embodiment further includes a driving mechanism for moving the dielectric rod in a reference direction intersecting the lower surface of the upper electrode exposed in the air gap. A dielectric rod is connected or joined to the dielectric plate or formed integrally with the dielectric plate. As the dielectric rod moves, the dielectric plate approaches or separates from the upper electrode. Therefore, fine adjustment of the width of the air gap is possible by moving the dielectric rod.

In the plasma processing apparatus according to the exemplary embodiment, the drive mechanism drives the dielectric rod in the reference direction to expand or contract the width of the air gap.

In the plasma processing apparatus according to an exemplary embodiment, the drive mechanism comprises a motor, a first pulley, an insulating shaft, a belt and a drive. A motor is provided on the upper electrode. The first pulley, belt and drive are provided within the upper electrode. An insulated shaft connects to the motor. A first pulley connects the insulating shaft and the belt. The driving unit connects the dielectric rod and the belt, and drives the dielectric rod in the reference direction using power of the motor transmitted through the insulating shaft and the belt. The drive includes a second pulley and a shaft. A second pulley connects the belt and the shaft. The shaft connects to the dielectric rod via a floating joint.

In the plasma processing apparatus according to the exemplary embodiment, the drive mechanism moves the dielectric rod along the reference direction so as to separate the upper electrode and the dielectric plate, thereby increasing the width of the gap.

In the plasma processing apparatus according to an exemplary embodiment, the drive mechanism comprises a motor, a first pulley, an insulating shaft, a belt and a drive. A motor is provided on the upper electrode. The first pulley, belt and drive are provided within the upper electrode. An insulated shaft connects to the motor. A first pulley connects the insulating shaft and the belt. The driving unit connects the dielectric rod and the belt, and drives the dielectric rod in the reference direction using power of the motor transmitted through the insulating shaft and the belt. The drive includes a second pulley and a shaft. A second pulley connects the belt to the shaft. The shaft connects to the dielectric rod.

In the plasma processing apparatus according to the exemplary embodiment, the dielectric plate is a shower plate. Therefore, since the dielectric plate is a shower plate, gas can be supplied to the space from the lower surface of the dielectric plate.

In the plasma processing apparatus according to the exemplary embodiment, the upper electrode has a plurality of first gas ejection holes. The dielectric plate has a plurality of second gas ejection holes. The plurality of first gas ejection holes and the plurality of second gas ejection holes communicate with each other through gaps. At least a portion of the plurality of first gas ejection holes and a portion of the plurality of second gas ejection holes are provided so as to overlap each other. Therefore, since the plurality of first gas ejection holes and the plurality of second gas ejection holes are provided with the first gas ejection holes and the second gas ejection holes overlapping each other, the flow from the upper electrode and the dielectric plate into the space Gas flow can be good.

In the plasma processing apparatus according to the exemplary embodiment, the air gap communicates with a gas pipe connected to an external gas supply.

In a plasma processing apparatus according to an exemplary embodiment, a stage includes a body and a conductive layer. The body is formed from an insulator. A conductive layer is provided within the body. The conductive layer has the shortest distance from the upper surface of the stage among the one or more conductive layers provided in the stage and is formed in a ring shape. In this way, among the one or more conductive layers provided within the stage, the conductive layer having the shortest distance from the upper surface of the stage is formed in a ring shape, so that the conductive layer is applied to the substrate placed on the stage. High frequency bias can be suppressed.

In the plasma processing apparatus according to the exemplary embodiment, the conductive layer has an outer diameter smaller than the diameter of the substrate placed on the stage.

In the plasma processing apparatus according to the exemplary embodiment, the conductive layer includes an electrode for generating electrostatic attraction between the substrate placed on the stage and the stage, an electrode to which a high frequency is supplied, and a ground. any of the electrodes.

In the plasma processing apparatus according to the exemplary embodiment, the conductive layer is formed in a mesh shape.

In an exemplary embodiment, a plasma processing method is provided. A plasma processing method performs plasma processing on an object to be processed using a plasma processing apparatus. A plasma processing apparatus includes a processing container, an upper electrode, a dielectric plate, a waveguide, and a stage. A stage is provided within the processing vessel. A dielectric plate is provided above the stage through the space of the processing container. An upper electrode is provided above the dielectric plate. The waveguide guides high frequency waves in the VHF band or UHF band used for plasma processing. The end of the waveguide is directed toward the space and radiates high frequency into the space. In this method, plasma processing is performed in a state in which the width of the gap provided between the upper electrode and the dielectric plate is non-uniform in the extending direction of the dielectric plate.

In such a plasma processing method, the existence of the air gap can suppress the generation of standing waves and reduce the gradient of the electric field in the vicinity of the upper electrode (more specifically, the dielectric plate) in the space. Thus, plasma uniformity can be improved. Also, according to an exemplary embodiment, the width of the air gap is non-uniform in the direction in which the dielectric plate extends (the direction in which the air gap extends). That is, the width of the air gap can be adjusted to suppress the generation of standing waves. In particular, the width of the air gap can be adjusted when high frequencies in the VHF band or UHF band are radiated into the space. By this adjustment, the wavelength of the surface wave (radio wave) propagating between the upper electrode (more specifically, the dielectric plate) and the plasma generated in the space during plasma generation can be preferably extended. Therefore, plasma uniformity can be further improved.

Various exemplary embodiments are described in detail below with reference to the drawings. In addition, suppose that the same code|symbol is attached|subjected to the part which is the same or equivalent in each drawing. In the present disclosure, “contact” represents a state in which both of the targets are not fixed, and “connection” represents a state in which both of the targets may or may not be fixed, “Joined” means a state in which both objects are fixed.

The configuration of the plasma processing apparatus 1A shown in FIG. 1 will be described. The plasma processing apparatus 1A includes a processing container CS. The plasma processing apparatus 1A includes a space SP, a waveguide wall UA1, an upper electrode UA21, a cavity UA22, and a waveguide UA31. The plasma processing apparatus 1A includes an insulating member UA4, a support ring UA51, a dielectric plate UA6, a dielectric rod UA7, a sealing member UA82, a pipe UA9, a gap UB1, and a gas pipe UC31.

The plasma processing apparatus 1A includes a side wall DA11, an exhaust port DA11a, a sealing member DA13, a common mode filter DB61a, a common mode filter DB61b, a heater power supply DB62a, and a heater power supply DB62b.

The plasma processing apparatus 1A includes a stage MA11 and a baffle member MB1.

The processing container CS has a substantially cylindrical shape. The processing container CS extends along the vertical direction.

The center axis of the processing container CS is the axis AX extending in the vertical direction. The processing container CS includes a waveguide wall UA1, a side wall DA11, and a waveguide UA31.

In the present disclosure, the direction in which axis AX extends is referred to as a reference direction. In other words, the reference direction is a direction intersecting the lower surface UAf of the upper electrode UA21 exposed in the air gap UB1.

The ceiling portion of the waveguide wall UA1 extends (substantially horizontally) in a plane that intersects the axis AX. A side portion of the waveguide wall UA1 extends perpendicularly to the ceiling portion of the waveguide wall UA1 along the axis AX. The waveguide wall UA1 surrounds the upper electrode UA21 of the plasma processing apparatus 1A.

The material of the waveguide wall UA1 can be a conductive material such as aluminum or an aluminum alloy. The waveguide wall UA1 is grounded.

The waveguide UA31 is defined by the space between the waveguide wall UA1 and the upper electrode UA21. The waveguide UA31 guides high frequencies in the VHF band or UHF band and introduces the high frequencies into the space SP. In the present disclosure, high frequency means high frequency in the VHF band or UHF band.

The waveguide UA31 has an end UA32 from which high frequencies are radiated. The end UA32 is arranged facing the space SP.

The end portion UA32 radiates high frequencies into the space SP via the insulating member UA4 and the insulating support ring UA51. A space SP is a space between the dielectric plate UA6 and the stage MA11.

The sidewall DA11 extends along the axis AX below the side of the waveguide wall UA1. The side wall DA11 extends along the axis AX below the waveguide wall UA1.

The material of sidewall DA11 can be a conductive material such as aluminum or aluminum alloy. Side wall DA11 is grounded.

The side wall DA11 has a protrusion DA12. The protrusion DA12 of the side wall DA11 is provided at the end of the side wall DA11 (the portion connected to the side of the waveguide wall UA1) and extends toward the axis AX in a direction crossing the axis AX. The protrusion DA12 is connected to the insulating member UA4 via the sealing member DA13. The sealing member DA13 is a member for vacuum sealing, and may be an O-ring, for example.

The protrusion DA12 is connected to the support ring UA51 via the elastic member DA10. A support ring UA51 is provided on the protrusion DA12. The elastic member DA10 is provided for pressing.

The insulating member UA4 is arranged between the end UA32, the support ring UA51 and the space SP. The insulating member UA4 and the upper electrode UA21 are connected via a sealing member UA82. The material of the insulating member UA4 can be an insulating material such as aluminum nitride or aluminum oxide. The sealing member UA82 is a member for vacuum sealing and may be an O-ring, for example.

The upper electrode UA21 is provided above the dielectric plate UA6. The upper electrode UA21 is housed within the waveguide wall UA1. The upper electrode UA21 is arranged under the ceiling of the waveguide wall UA1 and is surrounded by the sides of the waveguide wall UA1.

The upper electrode UA21 is provided above the upper surface MA13 of the stage MA11 via the space SP in the processing container CS and the dielectric plate UA6. The upper electrode UA21 is electrically connected to a high frequency power supply UC1 via a matching box UC2.

The material of the upper electrode UA21 can be a conductive material such as aluminum or aluminum alloy. A corrosion-resistant film is formed on the surface of the upper electrode UA21. The corrosion-resistant film can be an aluminum oxide film, a yttrium oxide film, or a ceramic film containing aluminum oxide, yttrium oxide, or the like.

The high frequency power supply UC1 is a power supply that generates the high frequency described above. Matching box UC2 includes a matching circuit for matching the impedance of the load of high frequency power supply UC1 to the output impedance of high frequency power supply UC1.

The upper electrode UA21 has a cavity UA22. The upper electrode UA21 has a plurality of gas ejection holes UA22a (first gas ejection holes). Cavity UA22 communicates with gas supply unit UC3 via gas pipe UC31.

The cavity UA22 communicates with a plurality of gas ejection holes UA22a. The cavity UA22 communicates with the space SP via a plurality of gas ejection holes UA22a, an air gap UB1, and a plurality of gas ejection holes UB2 of the dielectric plate UA6.

A dielectric plate UA6 is provided directly below the upper electrode UA21. The dielectric plate UA6 is provided above the upper surface MA13 of the stage MA11 via a space SP within the processing container CS.

The dielectric plate UA6 has a plurality of gas ejection holes UB2 (second gas ejection holes). In one embodiment, dielectric plate UA6 is a shower plate.

The plurality of gas ejection holes UA22a and the plurality of gas ejection holes UB2 communicate with each other through gaps UB1. At least some of the plurality of gas ejection holes UA22a and some of the plurality of gas ejection holes UB2 are provided so as to overlap each other when viewed from above the upper electrode UA21 (in the direction of the axis AX). For example, the smaller the width of the gap UB1, the more overlapping the gas ejection holes UA22a and UB2.

The end of the dielectric plate UA6 is brought into close contact with the end of the upper electrode UA21 by a support ring UA51. Dielectric plate UA6 faces upper surface MA13 of stage MA11 via space SP.

A central axis of the dielectric plate UA6 substantially coincides with the axis AX. A plurality of gas ejection holes UB2 are arranged in the dielectric plate UA6 so that the gas is uniformly supplied to the entire surface of the substrate W (object to be processed) placed on the upper surface MA13 of the stage MA11.

The vertical distance (the width of the space SP) between the lower surface of the dielectric plate UA6 and the upper surface MA13 of the stage MA11 can be, for example, 5 [cm] or more and 30 [cm] or less.

The dielectric plate UA6 is flat and flexible. The material of the dielectric plate UA6 can be a dielectric such as aluminum nitride or aluminum oxide. The thickness of the dielectric plate UA6 can be substantially uniform. The dielectric plate UA6 has a substantially disk shape. The dielectric plate UA6 is made of aluminum nitride, aluminum oxide, yttrium oxide, or a dielectric containing aluminum nitride, aluminum oxide, yttrium oxide, or the like. A corrosion-resistant film may be formed on the surface of the dielectric plate UA6 (in particular, the lower surface UA61). The corrosion-resistant film can be a yttrium oxide film, a yttrium oxide fluoride film, a yttrium fluoride film, or a ceramic film including yttrium oxide, yttrium fluoride, or the like.

The support ring UA51 is a member that brings the dielectric plate UA6 into close contact with the upper electrode UA21. The support ring UA51 is connected to the insulating member UA4. The material of the support ring UA51 can be an insulating material such as aluminum nitride or aluminum oxide.

The insulating member UA4 and the support ring UA51 are juxtaposed on the protrusion DA12 of the side wall DA11. The insulating member UA4 and the support ring UA51 are sandwiched between the protrusion DA12 and the outer peripheral portion UA24 of the upper electrode UA21.

A dielectric rod UA7 is arranged between the upper electrode UA21 and the dielectric plate UA6. The dielectric rod UA7 can be arranged on the axis AX. The dielectric rod UA7 extends along the axis AX.

The dielectric rod UA7 is connected to the upper electrode UA21. The dielectric rod UA7 is in contact with the dielectric plate UA6 or joined (fixed) to the dielectric plate UA6. The material of the dielectric rod UA7 can be a dielectric such as aluminum nitride, aluminum oxide.

An air gap UB1 may be provided between the upper electrode UA21 and the dielectric plate UA6. The air gap UB1 can be formed by the separation between the upper electrode UA21 and the dielectric plate UA6. Air gap UB1 is defined by lower surface UAf of upper electrode UA21 and upper surface UAg of dielectric plate UA6. The lower surface UAf of the upper electrode UA21 may be an upwardly convex curved surface. The width of the air gap UB1 is a function of radial position (roughly a cosine or Gaussian function).

The gap UB1 is defined by separating the upper electrode UA21 and the dielectric plate UA6 in a state where the end of the upper electrode UA21 (outer peripheral portion UA24) and the end of the dielectric plate UA6 are in close contact with each other.

The upper electrode UA21 and the dielectric plate UA6 are separated the most from the axis AX on which the dielectric rod UA7 is arranged. The width of the air gap UB1 (the distance between the lower surface UAf of the upper electrode UA21 and the upper surface UAg of the dielectric plate UA6) is uniform (constant) in the extending direction of the dielectric plate UA6 (and the dielectric plate UA6a described later). ) and can be non-uniform. Thus, when the air gap UB1 is provided between the upper electrode UA21 and the plasma, the high-frequency current flowing from the plasma is reduced and the plasma excitation is suppressed. Uniform plasma can be generated above the substrate W by optimizing the width of the air gap UB1 in the plane of the upper electrode UA21 as in this embodiment.

The stage MA11 includes a main body MA11a and a conductive layer MA15. Stage MA11 is provided in processing container CS. The stage MA11 is configured to substantially horizontally support the substrate W placed on the upper surface MA13 of the stage MA11.

Stage MA11 has a substantially disk shape. The central axis of stage MA11 substantially coincides with axis AX.

The conductive layer MA15 functions as a heater (resistive heating element) that heats the substrate W placed on the upper surface MA13 of the stage MA11 via the upper surface MA13. The conductive layer MA15 comprises a heater member MA15a and a heater member MA15b. The material of the conductive layer MA15 can be a metal such as tungsten or molybdenum.

The heater member MA15a and the heater member MA15b are embedded inside the main body MA11a. The heater member MA15a and the heater member MA15b are not in contact with each other. The material of the main body MA11a is an insulator such as aluminum nitride or aluminum oxide.

The heating area of stage MA11 is divided radially into two zones. Heating of each zone is provided by a conductive layer MA15.

Heater member MA15a heats a zone in the center of body MA11a. The heater member MA15b heats a zone on the outer periphery of the main body MA11a.

A common mode filter DB61a is electrically connected to the heater member MA15a. A heater power source DB 62b is electrically connected to the common mode filter DB 61a.

A common mode filter DB61b is electrically connected to the heater member MA15b. A heater power source DB 62b is electrically connected to the common mode filter DB 61b. A common mode filter DB61a is provided between the heater member MA15a and the heater power source DB62a, and a common mode filter DB61b is provided between the heater member MA15b and the heater power source DB62b.

Common mode filter DB61a and common mode filter DB61b each have a relatively high common mode impedance at the plasma excitation frequency. Therefore, the electrical coupling between the heater members MA15a and MA15b can be weakened. As a result, the electrical coupling between the plasma and the heater members MA15a and MA15b is suppressed at the outer peripheral portion and the central portion of the main body MA11a of the stage MA11, and the high frequency applied between the central portion and the edge portion of the substrate W is suppressed. Electric fields can be suppressed.

Baffle member MB1 extends between stage MA11 and side wall DA11. The baffle member MB1 is a substantially annular plate member. The material of the baffle member 13 can be, for example, an insulator such as aluminum nitride or aluminum oxide.

A plurality of through holes are formed in the baffle member MB1. The plurality of through holes penetrate the baffle member MB1 in its thickness direction.

A region under the rear surface MA14 of the stage MA11 communicates with the exhaust port DA11a. The exhaust port DA11a is connected to an external exhaust device. The evacuation system may include a pressure control valve and a vacuum pump such as a turbomolecular pump and/or a dry pump.

A gas supply unit UC3 is connected to the plasma processing apparatus 1A. The gas supply unit UC3 is protected from high frequencies by an insulating pipe UA9 and connected to a gas pipe UC31 communicating with a cavity UA22 in the upper electrode UA21.

Gas from the gas supply unit UC3 is supplied to the space SP through the gas pipe UC31, the cavity UA22, the plurality of gas ejection holes UA22a, the gap UB1, and the plurality of gas ejection holes UB2 in this order. The gas supply UC3 contains one or more gas sources used for processing the substrate W. FIG. Gas supply UC3 includes one or more flow controllers for respectively controlling the flow of gases from one or more gas sources.

A gas pipe UC31 communicating between the gas supply unit UC3 and the cavity UA22 is covered by an insulating tube UA9 inside the waveguide UA31, and is protected from high frequencies in the waveguide UA31 by the tube UA9. The material of the tube UA9 can be an insulating material such as aluminum nitride, aluminum oxide.

In the plasma processing apparatus 1A, the area of the inner wall surface of the processing container CS (more specifically, the side wall DA11) extending above the baffle member MB1 is equal to the surface area of the dielectric plate UA6 (the area of the lower surface UA61) on the space SP side. Almost equal. That is, among the surfaces defining the space SP, the area of the surface set to the ground potential (ground surface) is substantially the same as the area of the surface provided by the dielectric plate UA6 among the surfaces defining the space SP. With such a configuration, plasma is generated with a uniform density in the area immediately below the dielectric plate UA6 and the area around the ground plane. As a result, the in-plane uniformity of the plasma processing of the substrate W is improved.

In the plasma processing apparatus 1A, high frequency waves are introduced into the space SP from the end UA32 of the waveguide UA31 toward the axis AX. When high frequency waves are introduced into the space SP, the gas is excited within the space SP and plasma is generated from the gas. Plasma is generated with a uniform density distribution in the circumferential direction within the space SP. A substrate W on stage MA11 is processed by chemical species from the plasma.

A plasma processing apparatus 1B according to another exemplary embodiment will now be described with reference to FIG. The vertical distance (the width of the space SP) between the lower surface UA61 of the dielectric plate UA6 and the upper surface MA13 of the stage MA11 in the plasma processing apparatus 1B is shorter than that in the plasma processing apparatus 1A. ] or more and 15 [mm] or less. The configuration of the plasma processing apparatus 1B and the configuration of the plasma processing apparatus 1A differ according to the difference in the width of the space SP.

The plasma processing apparatus 1B includes a processing container CS. The plasma processing apparatus 1B includes a space SP, a waveguide wall UA1, an upper electrode UA21, a cavity UA22, a waveguide UA31, an insulating member UA4, a support ring UA51, a cover ring UA52, a dielectric plate UA6, an elastic member UA81, and a sealing member UA82. , with tube UA9. The plasma processing apparatus 1B includes an air gap UB1, a gas pipe UC31, and a driving mechanism UD10.

The plasma processing apparatus 1B includes a stage MA11, a conductive portion MA21, a conductive plate MA22, a conductive elastic member MA23, an exhaust chamber MA31, a wall portion MA32, and a ventilation hole MA33.

The plasma processing apparatus 1B includes a sealing member DA13, an inlet/outlet DA2, a support DB11, an exhaust pipe DB12, a bellows DB21, a bellows DB22, a spring DB3, and a water cooling plate DB4.

The processing container CS includes a waveguide wall UA1, a side wall DA11, and a waveguide UA31.

Hereinafter, the description of the plasma processing apparatus 1B will mainly be made only for the configuration different from that of the plasma processing apparatus 1A.

The protrusion DA12 of the side wall DA11 is provided at the end of the side wall DA11 (the portion connected to the side of the waveguide wall UA1) and extends toward the axis AX in a direction crossing the axis AX.

The projecting portion DA12 is connected to the wall portion MA32 of the exhaust chamber MA31 via the conductive elastic member MA23. The conductive elastic member MA23 is an elastic body and may be, for example, a spiral ring. The material of the conductive elastic member MA23 is, for example, metal such as stainless steel, inconel, nickel, tungsten, tantalum, copper alloy, or molybdenum. The conductive elastic member MA23 may be covered with a protective film of nickel, aluminum, stainless steel, gold, or the like.

The insulating member UA4 is arranged between the end UA32 of the waveguide UA31 and the space SP.

The support ring UA51 is connected to the insulating member UA4 via an elastic member UA81. The elastic member UA81 may be, for example, a stainless steel spring.

The end of the dielectric plate UA6 and the end of the upper electrode UA21 (outer peripheral portion UA24) are connected to each other by pressing via an elastic member UA81 or the like.

The cover ring UA52 is a member that prevents plasma from being generated near the side surface of the stage MA11. The material of the cover ring UA52 can be an insulating material such as aluminum nitride, aluminum oxide.

The plasma processing apparatus 1B further includes a driving mechanism UD10. The drive mechanism UD10 includes a motor UD11, an insulating shaft UD12, a pulley UD13 (first pulley), a belt UD14, and a drive unit UD15a.

A motor UD11 is provided on the waveguide wall UA1. The pulley UD13, the belt UD14, and the drive unit UD15a (and the drive unit UD15b shown in FIG. 5, which will be described later) are provided in the upper electrode UA21.

The insulating shaft UD12 is connected to the motor UD11. A pulley UD13 connects the insulating shaft UD12 and the belt UD14.

The insulating shaft UD12 rotates according to the rotational drive of the motor UD11. Pulley UD13 converts rotary movement of insulating shaft UD12 into linear movement of belt UD14.

The linear movement of the belt UD14 is transmitted to the drive unit UD15a, and the movement of the dielectric rod UD15a9 (described later with reference to FIGS. 3 and 4) of the drive unit UD15a (movement in the reference direction intersecting the lower surface UAf of the upper electrode UA21) ) can be performed. The configuration of the drive unit UD15a will be detailed later.

The air gap UB1 is formed by the separation between the upper electrode UA21 and the dielectric plate UA6. The width of the air gap UB1 (the distance between the upper electrode UA21 and the dielectric plate UA6) can be adjusted by the drive mechanism UD10. The upper electrode UA21 and the dielectric plate UA6 can be separated the most at the axis AX along which the driving part UD15a having the dielectric rods UD15a9 is arranged.

The material of the stage MA11 of the plasma processing apparatus 1B can be a conductive material such as aluminum or aluminum alloy. A protective film such as yttrium oxide, yttrium oxyfluoride, or aluminum oxide may be provided on the surface of the stage MA11.

The exhaust chamber MA31 comprises a conductive wall MA32. Exhaust chamber MA31 extends from the periphery of outer peripheral portion MA12 toward side wall DA11.

The wall MA32 is provided with vents MA33. The exhaust chamber MA31 communicates with the space SP. The space SP communicates with the exhaust chamber MA31 through the ventilation hole MA33. The exhaust chamber MA31 communicates with the exhaust pipe DB12.

The material of wall MA32 can be a conductive material such as aluminum or an aluminum alloy.

The exhaust pipe DB12 is connected to an external exhaust device. The evacuation system may include a pressure control valve and a vacuum pump such as a turbomolecular pump and/or a dry pump.

The gas in the space SP can move to the exhaust chamber MA31 through the ventilation hole MA33 and be exhausted to the outside through the exhaust pipe DB12.

The conductive portion MA21 extends between the outer peripheral portion MA12 of the stage MA11 and the side wall DA11 of the processing vessel CS. The conductive part MA21 is electrically connected to the conductive layer of the stage MA11 and the side wall DA11 of the processing container CS.

The conductive portion MA21 extends from the outer peripheral portion MA12 toward the side wall DA11 so that the high frequency emitted from the end UA32 of the waveguide UA31 is introduced into the space SP. The conductive portion MA21 includes a conductive plate MA22. The conductive portion MA21 includes a portion of the wall portion MA32.

Conductive plate MA22 is in electrical contact with rear surface MA14 of stage MA11 at outer peripheral portion MA12. The conductive plate MA22 is joined (fixed) to the rear surface of the outer peripheral portion MA12 and the upper surface of the wall portion MA32 by screws (not shown).

The conductive plate MA22 is a flexible thin plate. The material of the conductive plate MA22 is, for example, a conductive material such as aluminum, aluminum alloy, stainless steel, inconel, nickel, tungsten, tantalum, copper alloy or molybdenum. The conductive plate MA22 may be covered with a protective film such as aluminum oxide, yttrium oxide, yttrium oxide fluoride, yttrium fluoride, nickel, aluminum, stainless steel, or gold.

The side wall DA11 has an inlet/outlet DA2. The substrate W is loaded into and unloaded from the processing container CS through the inlet/outlet DA2.

Support DB11 is connected to stage MA11. Stage MA11 is provided on support portion DB11. The stage MA11 is vertically moved by vertically moving the support part DB11 (moving toward the upper electrode UA21 or moving away from the upper electrode UA21; the same applies hereinafter).

A water cooling plate DB4 is arranged below the support part DB11. The support part DB11 is in contact with the water cooling plate DB4. The heat of stage MA11 can be discharged to the outside via support part DB11 and water cooling plate DB4.

The exhaust pipe DB12 is connected to the wall portion MA32 and communicates with the exhaust chamber MA31. The wall portion MA32 is provided on the exhaust pipe DB12. The gas in the exhaust chamber MA31 can be discharged to the outside via the exhaust pipe DB12.

By vertically moving the exhaust pipe DB12 via the spring DB3, the exhaust chamber MA31 and the wall portion MA32 are vertically moved.

The material of the bellows DB22 can be a conductive material such as stainless steel. The material of spring DB3 can be a conductive material such as stainless steel.

The wall portion MA32 can be stably arranged on the upper electrode UA21 side (above) due to the elasticity of the spring DB3. As a result, the outer peripheral portion of the wall portion MA32 is in close contact with the rear surface of the projection portion DA12. Furthermore, the elasticity of the conductive elastic member MA23 enables stable electrical contact between the outer peripheral portion of the wall portion MA32 and the projection portion DA12.

In the plasma processing apparatus 1B, high frequency waves are introduced into the space SP from the end UA32 of the waveguide UA31 through the insulating member UA4 toward the axis AX. When high frequency waves are introduced into the space SP, the gas is excited within the space SP and plasma is generated from the gas. Plasma is generated with a uniform density distribution in the circumferential direction within the space SP. A substrate W on stage MA11 is processed by chemical species from the plasma. In addition, the insulating member UA4 can suppress discharge to the periphery of the space SP.

The configuration of the drive unit UD15a will be described below with reference to FIGS. 3 and 4. FIG. The driving unit UD15a includes a pulley UD15a1 (second pulley), an adjusting screw UD15a2, a container UD15a3, a shaft UD15a4, and a spring UD15a5. The material of the spring UD15a5 can be, for example, stainless steel.

The driving portion UD15a further includes an O-ring UD15a6, a floating joint male portion UD15a8, and a dielectric rod UD15a9. The material of the dielectric rod UD15a9 can be a dielectric such as aluminum nitride, aluminum oxide.

The dielectric rod UD15a9 is arranged between the upper electrode UA21 and the dielectric plate UA6. Dielectric rod UD15a9 may be arranged on axis AX.

The dielectric rod UD15a9 is formed integrally with the dielectric plate UA6, or is connected or joined (fixed) to the dielectric plate UA6.

In a state in which the end of the dielectric plate UA6 is brought into close contact with the end of the upper electrode UA21 (outer peripheral portion UA24) by the support ring UA51, the dielectric rod UD15a9 fills the space (gap UB1 width).

A drive mechanism UD10 having a drive unit UD15a drives a dielectric rod UD15a9 in the reference direction to expand or contract the width of the air gap UB1. The drive unit UD15a connects the dielectric rod UD15a9 and the belt UD14, and drives the dielectric rod UD15a9 in the reference direction using the power of the motor UD11 transmitted through the insulating shaft UD12 and the belt UD14.

The pulley UD15a1 has an adjusting screw UD15a2. Pulley UD15a1 connects belt UD14 and shaft UD15a4. The shaft UD15a4 has a female portion UD15a7 of a floating joint.

The central axes of the adjusting screw UD15a2 and the shaft UD15a4 substantially coincide with the axis AX. Each of the adjusting screw UD15a2 and the shaft UD15a4 can move linearly along the axis AX.

The shaft UD15a4 is connected to the dielectric rod UD15a9 via a floating joint (a floating joint female portion UD15a7 and a floating joint male portion UD15a8).

The central axes of the floating joint female part UD15a7, the floating joint male part UD15a8, and the dielectric rod UD15a9 substantially coincide with the axis AX. Each of the floating joint female part UD15a7, the floating joint male part UD15a8, and the dielectric rod UD15a9 can move linearly along the axis AX.

Pulley UD15a1 is connected to belt UD14. Pulley UD15a1 converts linear movement of belt UD14 into rotational movement of adjusting screw UD15a2 about axis AX and linear movement of adjusting screw UD15a2 along axis AX.

The adjusting screw UD15a2 is held in the container UD15a3. The container UD15a3 is joined (fixed) inside the upper electrode UA21. The container UD15a3 accommodates the upper end of the shaft UD15a4 and the spring UD15a5.

The lower end of the adjusting screw UD15a2 contacts the upper end of the shaft UD15a4. The lower end of the adjusting screw UD15a2 is brought into close contact with the upper end of the shaft UD15a4 by the elastic force of the spring UD15a5. The shaft UD15a4 linearly moves along the axis AX in accordance with the linear movement of the adjusting screw UD15a2 along the axis AX.

The O-ring UD15a6 can stabilize the placement of the shaft UD15a4 in the upper electrode UA21 and seal the air gap UB1.

The lower end of the shaft UD15a4 has a female part UD15a7 of a floating joint. A male portion UD15a8 of the floating joint is fitted into the female portion UD15a7 of the floating joint. The male part UD15a8 of the floating joint moves linearly along the axis AX in accordance with the linear movement of the shaft UD15a4 along the axis AX.

The lower end of the male part UD15a8 of the floating joint is connected to the dielectric rod UD15a9. The dielectric rod UD15a9 moves linearly along the axis AX in accordance with the linear movement along the axis AX of the male portion UD15a8 of the floating joint.

That is, the rotational movement of the insulating shaft UD12 by the motor UD11 allows the dielectric rod UD15a9 to move linearly along the axis AX. More specifically, the dielectric rod UD15a9 can receive power from the motor UD11 through a floating joint. Therefore, even if the axes of the shaft UD15a4 and the dielectric rod UD15a9 are slightly misaligned, the dielectric plate UA6 and the upper electrode UA21 can be separated from each other by driving the dielectric rod UD15a9.

In addition, since the rotational movement of the insulating shaft UD12 by the motor UD11 can be transmitted to the adjustment screw UD15a2 by the belt UD14, the motor UD11 can be provided on the ceiling of the waveguide wall UA1 at a location away from the axis AX. Therefore, the arrangement position of the motor UD11 can be selected relatively flexibly on the waveguide wall UA1.

The drive mechanism UD10 may include a drive unit UD15b shown in FIG. 5 instead of the drive unit UD15a described above. The drive unit UD15b is arranged in the upper electrode UA21 in the same manner as the drive unit UD15a.

The drive unit UD15b includes a pulley UD15b1 (second pulley), an adjusting screw UD15b2, a container UD15b3, a ball UD15b4, a shaft UD15b5, a bellows UD15b6, and a dielectric rod UD15b7.

Dielectric rod UD15b7 is arranged between upper electrode UA21 and dielectric plate UA6. Dielectric rod UD15b7 may be arranged on axis AX.

A lower portion of the dielectric rod UD15b7 is fitted in a hole provided in the upper surface UAg of the dielectric plate UA6. The material of the dielectric rod UD15b7 can be a dielectric such as aluminum nitride, aluminum oxide.

The driving mechanism UD10 having the driving part UD15b can linearly move the dielectric rod UD15b7 along the reference direction so as to separate the upper electrode UA21 and the dielectric plate UA6, thereby widening the width of the air gap UB1.

The drive unit UD15b connects the dielectric rod UD15b7 and the belt UD14, and drives the dielectric rod UD15b7 in the reference direction using power of the motor UD11 transmitted via the insulating shaft UD12 and the belt UD14.

The pulley UD15b1 has an adjusting screw UD15b2. A pulley UD15b1 connects the belt UD14 to the shaft UD15b5. Shaft UD15b5 connects to dielectric rod UD15b7.

The central axes of the adjusting screw UD15b2, the shaft UD15b5, and the dielectric rod UD15b7 substantially coincide with the axis AX. Each of the adjusting screw UD15b2, the shaft UD15b5, and the dielectric rod UD15b7 can move linearly along the axis AX.

Pulley UD15b1 is connected to belt UD14. Pulley UD15b1 converts linear movement of belt UD14 into rotational movement of adjusting screw UD15b2 about axis AX and linear movement of adjusting screw UD15b2 along axis AX.

The adjusting screw UD15b2 is held in the container UD15b3. The container UD15b3 is connected to the upper electrode UA21. A ball UD15b4, an upper end of a shaft UD15b5, and a bellows UD15b6 are accommodated in the container UD15a3.

The lower end of adjusting screw UD15b2 is connected to the upper end of shaft UD15b5 via ball UD15b4. The upper end of the shaft UD15b5 is brought into close contact with the lower end of the adjusting screw UD15b2 via the ball UD15b4 by the elastic force of the bellows UD15b6. The lower end of the adjusting screw UD15b2 is in close contact with the ball UD15b4 while the ball UD15b4 is pressed by the adjusting screw UD15b2. The shaft UD15b5 linearly moves along the axis AX in accordance with the linear movement of the adjusting screw UD15b2 along the axis AX.

In this way, the adjusting screw UD15b2 and the shaft UD15b5 are not joined (fixed) (connected via the ball UD15b4), so they can be separated from each other.

A bellows UD15b6 may seal the air gap UB1. The material of the bellows UD15b6 can be stainless steel, aluminum alloy, or the like.

The lower end of shaft UD15b5 is connected to the upper end of dielectric rod UD15b7. A lower end of the dielectric rod UD15b7 is connected to the dielectric plate UA6. The dielectric rod UD15b7 moves linearly along the axis AX in response to the linear movement of the shaft UD15b5 along the axis AX.

That is, the rotational movement of the insulating shaft UD12 by the motor UD11 allows the dielectric rod UD15b7 to move linearly along the axis AX. More specifically, driving the dielectric rod UD15b7 can separate the dielectric plate UA6 and the upper electrode UA21.

In addition, since the rotational movement of the insulating shaft UD12 by the motor UD11 can be transmitted to the adjustment screw UD15b2 by the belt UD14, the motor UD11 can be provided on the ceiling of the waveguide wall UA1 at a location away from the axis AX. Therefore, the arrangement position of the motor UD11 can be selected relatively flexibly on the waveguide wall UA1.

A plasma processing apparatus 1C according to another exemplary embodiment will now be described with reference to FIG. The plasma processing apparatus 1C includes a processing container CS. The plasma processing apparatus 1C includes a space SP, a waveguide wall UA1, an upper electrode UA21a, a waveguide UA31, an insulating member UA4, a dielectric plate UA6a, a sealing member UA82, a sealing member UA83, a pipe UA9, an air gap UB1, and a gas pipe UC31. Prepare.

The plasma processing apparatus 1C includes a side wall DA11, an exhaust port DA11a, a sealing member DA13, and an elastic member DA14.

The plasma processing apparatus 1C includes a stage MA11 and a plasma shield MB2.

The processing container CS includes a waveguide wall UA1, a side wall DA11, and a waveguide UA31.

Hereinafter, the description of the plasma processing apparatus 1C will mainly be made only for the configuration different from the plasma processing apparatuses 1A and 1B.

The side wall DA11 includes a gas chamber MA41, a wall portion MA42, and a plurality of gas release grooves MA43.

The gas chamber MA41, the wall portion MA42, and the gas discharge groove MA43 are provided at the end portion of the side wall DA11 (the portion connected to the side portion of the waveguide wall UA1), and extend toward the axis line AX in a direction intersecting the axis line AX. extends to Wall portion MA42 is connected to insulating member UA4 via sealing member DA13.

A gas supplier UD2 is connected to the gas chamber MA41, and the gas supplied from the gas supplier UD2 can be stored in the gas chamber MA41. A gas discharge groove MA43 is connected to the gas chamber MA41, and the gas stored in the gas chamber MA41 is supplied to the upper side of the space SP (immediately below the lower surface UA61 of the dielectric plate UA6a) through the gas discharge groove MA43.

The upper electrode UA21a is provided above the dielectric plate UA6a. The upper electrode UA21a is accommodated within the waveguide wall UA1. The upper electrode UA21a is arranged under the ceiling of the waveguide wall UA1 and is surrounded by the sides of the waveguide wall UA1.

The upper electrode UA21a is provided above the upper surface MA13 of the stage MA11 via the space SP in the processing container CS and the dielectric plate UA6a. The upper electrode UA21a is electrically connected to a high frequency power supply UC1 via a matching box UC2.

The material of the upper electrode UA21a can be a conductive material such as aluminum or aluminum alloy. A corrosion-resistant film is formed on the surface of the upper electrode UA21a. The corrosion-resistant film can be an aluminum oxide film, a yttrium oxide film, or a ceramic film containing aluminum oxide, yttrium oxide, or the like.

The dielectric plate UA6a is a dielectric cover and is provided directly below the upper electrode UA21a within the space SP. The dielectric plate UA6a is provided above the upper surface MA13 of the stage MA11 via a space SP within the processing container CS.

An end portion of the dielectric plate UA6a is brought into close contact with an end portion (outer peripheral portion UA24) of the upper electrode UA21a by an insulating member UA4. An end portion of the dielectric plate UA6a is connected to the upper electrode UA21a via the elastic member DA14 and is connected to the insulating member UA4 via the sealing member UA83. The sealing member UA83 is a member for vacuum sealing, and may be an O-ring, for example. The sealing member UA83 can prevent the gas above the dielectric plate UA6a from leaking into the space SP.

The elastic member DA14 may be an O-ring or the like. Dielectric plate UA6a faces upper surface MA13 of stage MA11 via space SP. The central axis of the dielectric plate UA6a substantially coincides with the axis AX.

The dielectric plate UA6a has flexibility. The dielectric plate UA6a is made of aluminum nitride, aluminum oxide, yttrium oxide, or a dielectric containing aluminum nitride, aluminum oxide, yttrium oxide, or the like. A corrosion-resistant film may be formed on the surface of the dielectric plate UA6a (in particular, the lower surface UA61). The corrosion-resistant film can be a yttrium oxide film, a yttrium oxide fluoride film, a yttrium fluoride film, or a ceramic film including yttrium oxide, yttrium fluoride, or the like. The thickness of the dielectric plate UA6a can be substantially uniform.

The dielectric plate UA6a has a substantially disk shape. The vertical distance (the width of the space SP) between the lower surface of the dielectric plate UA6a and the upper surface MA13 of the stage MA11 can be, for example, 5 [cm] or more and 10 [cm] or less. The insulating member UA4 brings the dielectric plate UA6a into close contact with the upper electrode UA21a.

The air gap UB1 is formed by the separation between the upper electrode UA21a and the dielectric plate UA6a. More specifically, the air gap UB1 is a space between the lower surface UAf of the upper electrode UA21a and the upper surface UAg of the dielectric plate UA6a, and is defined by the lower surface UAf and the upper surface UAg. In a state in which the edge of the dielectric plate UA6a is in close contact with the edge of the upper electrode UA21a (outer peripheral portion UA24) by the insulating member UA4, the upper electrode UA21a and the dielectric plate UA6a can be separated from each other the most along the axis AX.

A gas pipe UC31 connected to an external gas supply unit UC3 is connected to the gap UB1, and the gap UB1 communicates with the gas pipe UC31. Gas supplied from the gas supply unit UC3 flows into the gap UB1 through the gas pipe UC31. The inflow of gas adjusts the pressure in the air gap UB1, thereby adjusting the width of the air gap UB1 (the length between the lower surface UAf of the upper electrode UA21a and the upper surface UAg of the dielectric plate UA6).

Stage MA11 of plasma processing apparatus 1C has the same configuration as stage MA11 of plasma processing apparatus 1B.

In one embodiment, the plasma processing apparatus 1C may further include a plasma shield MB2. Plasma shield MB2 extends between stage MA11 and side wall DA11. The plasma shielding plate MB2 is a substantially annular plate material. The material of the plasma shielding plate MB2 can be aluminum oxide, quartz, or the like, for example.

One peripheral edge (outer diameter) of the plasma shielding plate MB2 is connected to the side wall DA11. A gap is provided between the other peripheral edge (inner diameter) of the plasma shielding plate MB2 and the stage MA11 (furthermore, the substrate W placed on the upper surface MA13 of the stage MA11). The gas in the space SP flows through this gap through the space below the stage MA11, and can be discharged to the outside through the exhaust port DA11a.

In the plasma processing apparatus 1C, the area of the inner wall surface of the processing container CS (for example, the inner wall surface of the side wall DA11) extending above the plasma shielding plate MB2 is substantially equal to the surface area of the dielectric plate UA6 on the space SP side. That is, among the surfaces defining the space SP, the area of the surface set to the ground potential (ground surface) is substantially the same as the area of the surface provided by the dielectric plate UA6a among the surfaces defining the space SP. With this configuration, plasma is generated with a uniform density in the area immediately below the dielectric plate UA6a and the area around the ground plane. As a result, the in-plane uniformity of the plasma processing of the substrate W is improved.

In the plasma processing apparatus 1C, high frequency waves are introduced into the space SP from the end UA32 of the waveguide UA31 toward the axis AX. When high frequency waves are introduced into the space SP, the gas is excited within the space SP and plasma is generated from the gas. Plasma is generated with a uniform density distribution in the circumferential direction within the space SP. A substrate W on stage MA11 is processed by chemical species from the plasma.

Next, a specific example of the shape of the gap UB1 will be described. The shape of the air gap UB1 is defined by the lower surface UAf and the upper surface UAg, as described above. As shown in FIGS. 1, 2, and 6, the shape of the lower surface UAf may be, for example, a relatively smooth upwardly convex curved surface.

Other shapes of the lower surface UAf may be, for example, a wavy curved surface (wave-shaped curved surface), a stepped surface, or the like (applicable to the upper electrode UA21a shown in each of FIGS. 1, 2, and 6). . In this case, the wavy shape of the lower surface UAf can be adjusted to a shape that can reduce the influence of harmonics caused by nonlinear current-voltage characteristics of the plasma sheath. The wavy shape of the lower surface UAf may be the shape of the lower surface UAf shown in FIG. 7 as a specific example. Further, the stepped shape of the lower surface UAf can be effective in order to avoid processing the lower surface UAf of the upper electrode UA21 into a curved surface.

As shown in FIG. 7, the upper electrode UA21 may comprise a lower layer UA211. The lower layer UA211 comprises the lower surface UAf of the upper electrode UA21. The lower layer UA211 is detachable from the upper electrode UA21, and can be prepared according to the shape of each of the plurality of lower surfaces UAf. Although the preferred cross-sectional shape of the lower surface UAf may differ depending on the plasma excitation conditions, replacing the entire upper electrode UA21 according to the plasma excitation conditions can be costly and labor-intensive. In this regard, since the lower layer UA211 having the desired shape of the lower surface UAf can be attached to the upper electrode UA21 according to the plasma excitation conditions, the cost and labor required for replacement can be reduced.

Another specific example of the shape of the air gap UB1 is shown in FIGS. Specific examples of the gap UB1 shown in FIGS. 8 and 9 can be applied to the gap UB1 of each of the plasma processing apparatus 1A shown in FIG. 1 and the plasma processing apparatus 1C shown in FIG.

The width of the air gap UB1 shown in FIG. 8 increases from the respective ends of the upper electrode UA21 and the dielectric plate UA6 toward the central portion (the portion intersecting the axis AX). The width of the air gap UB1 shown in FIG. 8 is the largest at the central portion of the upper electrode UA21 and the dielectric plate UA6.

1, 2, 6 and 7, the frequency of the surface wave (radio wave) is in the VHF band, and 1/4 of the wavelength of this surface wave is on the surface of the dielectric plate UA6 (opposite side of the top surface UAg). surface) can be suitably used. This surface wave is, as described above, an electric wave propagating between the upper electrode UA21 and the plasma generated within the space SP when the plasma is generated.

As described above, the width of the air gap UB1 shown in FIG. 8 increases from the respective ends of the upper electrode UA21 and the dielectric plate UA6 toward the center (the portion intersecting the axis AX). Therefore, the generation of standing waves due to surface waves is suppressed, and the increase (non-uniformity) of the high-frequency voltage generated between the dielectric plate UA6 and the plasma generated in the space SP during plasma generation can be suppressed.

In another specific example of the air gap UB1, the width of the air gap UB1 (the distance between the lower surface UAf and the upper surface UAg) is approximately It is constant and can increase from the boundary with the first region toward the axis AX in the second region near the axis AX. Thus, when the thickness of the air gap UB1 is relatively large in the second region, the propagation of the surface wave is suppressed, and the concentration of the surface wave in the vicinity (central portion) of the axis AX can also be suppressed. Examples of such an air gap UB1 can be applied to the air gap UB1 shown in each of FIGS.

The air gap UB1 shown in FIG. 9 is defined using an upper electrode UA21b instead of the upper electrode UA21. The upper electrode UA21b is provided above the dielectric plate UA6.

In the upper electrode UA21b, a gap UA23 is provided in the central portion of the lower surface UAf intersected by the axis AX, and the gap UA23 is filled with an insulator portion UA23a. The upper electrode UA21b has a plurality of gas ejection holes UA22a.

The material of the upper electrode UA21b can be similar to the material of the upper electrode UA21. The material of the insulator part UA23a can be an insulating material such as aluminum nitride or aluminum oxide. A corrosion-resistant film is formed on the surface of the upper electrode UA21b. The corrosion-resistant film can be an aluminum oxide film, a yttrium oxide film, or a ceramic film containing aluminum oxide, yttrium oxide, or the like.

The width of the air gap UB1 shown in FIG. 9 decreases from the respective ends of the upper electrode UA21b and the dielectric plate UA6 toward the central portion (the portion intersecting the axis AX). The width of the air gap UB1 shown in FIG. 9 is the largest on the edge side of the upper electrode UA21b and the dielectric plate UA6.

In the air gap UB1 shown in FIG. 9, the frequency of surface waves (radio waves) is in the VHF band to the UHF band, and 1/4 of the wavelength of the surface waves is on the surface of the dielectric plate UA6 (the surface opposite to the top surface UAg). It can be preferably used when it is smaller than the radius.

As described above, the width of the air gap UB1 shown in FIG. 9 decreases from the ends of the upper electrode UA21b and the dielectric plate UA6 toward the center (the portion intersecting the axis AX). Therefore, attenuation of surface waves (radio waves) propagating between the dielectric plate UA6 and the plasma generated in the space SP during plasma generation is suppressed.

Also, the width of the air gap UB1 shown in FIG. 9 is the smallest at the central portion of the upper electrode UA21 and the dielectric plate UA6. Therefore, it is possible to suppress the decrease in the potential generated between the dielectric plate UA6 and the plasma generated within the space SP during plasma generation. The insulator portion UA23a can have a function of preventing concentration of surface waves in the central portion and discharge in the air gap UB1.

8 or UB1 shown in FIG. 9 is determined by 1/4 of the wavelength .lambda. It can be determined according to the magnitude of the radius L (the radius of the plasma excitation area). The lower surface UA61 having the radius L is a surface on the opposite side of the upper surface UAg and exposed within the space SP.

The wavelength λ [cm] of the surface wave is the value obtained by multiplying the square root of the electron density ne [cm ⁻³ ] in the vicinity of the lower surface UA61 in the space SP by 9.6, and the plasma excitation frequency f [MHz]. Roughly equal to the value obtained by dividing by the square (quotient). The wavelength λ [cm] in this case is, for example, an electron temperature of 3 [eV] in the vicinity of the lower surface UA61 in the space SP, an electron density of 1×10 ¹¹ cm ⁻³ , and a value 15 times the Debye length. It was calculated using the sheath width.

When λ/4>L, a standing wave of a surface wave having an antinode at the axis AX is likely to occur, and attenuation of the surface wave is difficult to occur. If λ/4<L, the surface wave is likely to be attenuated, so the shape of the air gap UB1 shown in FIG. 9 is suitable.

Since λ [cm] described above is inversely proportional to the square of f [MHz], the influence of f [MHz] on propagation of surface waves is relatively large. Therefore, regardless of the shape of the air gap UB1 shown in FIG. 8 or the shape of the air gap UB1 shown in FIG. , the direction in which the dielectric plate UA6 extends) can be adjusted. In order to adjust the radial distribution of the plasma, f [MHz] may be changed continuously, or a plurality of f [MHz] may be applied to change their power ratio. good.

Mainly refer to FIG. 10 below. Each of the plasma processing apparatus 1A and plasma processing apparatus 1C described above may include a stage MA111 instead of the stage MA11. Stage MA111 is provided in processing container CS.

The stage MA111 has a main body MA11a and a conductive layer MA15 like the stage MA11. The conductive layer MA15 is provided within the main body MA11a.

In one embodiment, the conductive layer MA15 can be a heater (resistive heating element). In this embodiment, the conductive layer MA15 can include, for example, heater members MA15a and heater members MA15b as in the case of the plasma processing apparatus 1A. The heater member MA15a is electrically connected to the heater power source DB62a through the common mode filter DB61a. The heater member MA15b is electrically connected to the heater power source DB62b through the common mode filter DB61b.

Stage MA111 further includes a conductive layer MA16. The conductive layer MA16 is provided within the main body MA11a. A DC power supply DB63 is electrically connected to the conductive layer MA16.

The distance between the conductive layer MA15 and the top surface MA13 of the stage MA111 is greater than the distance between the conductive layer MA16 and the top surface MA13 of the stage MA111. That is, the distance between the conductive layer MA16 and the upper surface MA13 of the stage MA111 is the shortest distance among the distances between each of the plurality of conductive layers of the stage MA111 and the upper surface MA13.

The conductive layer MA16 is formed in an annular region within the main body MA11a. The central axis of this annular region substantially coincides with the axis AX. The inner diameter of this annular region is, for example, 1/6 (50 [mm]) or more of the diameter of the substrate W. The outer diameter of this annular region is smaller than the diameter of the substrate W. The conductive layer MA16 may be formed in a mesh shape.

The conductive layer MA16 has the shortest distance from the upper surface MA13 of the stage MA111 among the one or more conductive layers provided in the stage MA111. The conductive layer MA16 is one of an electrode for generating electrostatic attraction between the substrate W placed on the stage MA111 and the stage MA111, an electrode supplied with high frequency, and an electrode grounded. . The conductive layer MA16 is formed in an annular shape.

The material of the main body MA11a can be an insulator (dielectric) such as aluminum nitride or aluminum oxide. The material of the conductive layer MA16 can be a metal such as tungsten or molybdenum.

Mainly refer to FIG. 11 below. The plasma processing apparatus 1A described above may include a focus ring MB3 instead of the baffle member MB1, and a stage MA112 instead of the stage MA11. The plasma processing apparatus 1C described above may include a focus ring MB3 instead of the plasma shielding plate MB2, and a stage MA112 instead of the stage MA11.

Stage MA112 is provided in processing container CS. Stage MA112 has a main body MA11b.

The material of stage MA112 can be a metal such as aluminum or an aluminum alloy. Stage MA112 may have a substantially disk shape. The central axis of stage MA112 substantially coincides with axis AX.

Focus ring MB3 is provided on upper surface MA13 of stage MA112. The focus ring MB3 extends along the periphery of the upper surface MA13. The inner diameter of focus ring MB3 is smaller than the diameter of upper surface MA13 of stage MA112.

The upper surface MA13 of the stage MA112 includes a substrate mounting area MA131 and a focus ring mounting area MA132. The substrate mounting area MA131 is a substantially circular area. The substrate W is mounted on the substrate mounting area MA131. The diameter of the substrate mounting area MA131 is smaller than the diameter of the substrate W.

The focus ring mounting area MA132 extends radially outside the substrate mounting area MA131. The vertical position of the focus ring mounting area MA132 is lower than the vertical position of the substrate mounting area MA131.

A focus ring MB3 is mounted on the focus ring mounting area MA132. The focus ring MB3 has a substantially annular shape and is plate-like.

The material of the focus ring MB3 can be aluminum oxide, quartz, or the like. The focus ring MB3 is mounted on the focus ring mounting area MA132 so that the upper surface of its inner edge faces the lower surface of the substrate W edge.

According to the stage MA112, the focus ring MB3 suppresses the generation of the high-frequency electric field between the central portion and the outer peripheral portion of the stage MA112.

According to the above multiple exemplary embodiments, the upper electrode UA21, the upper electrode UA21a, the upper electrode UA21b, and the plasma generated in the space SP when the plasma is generated (the dielectric plate UA6 provided above the plasma, the dielectric plate UA6a) ) is provided with an air gap UB1. In the case of high frequencies in the VHF band or UHF band, the generation of standing waves can reduce plasma uniformity in the direction in which the dielectric plate UA6 and the lower surface UA61 of the dielectric plate UA6a extend. However, the presence of the air gap UB1 suppresses the generation of the standing wave, and the upper electrode UA21, the upper electrode UA21a, and the upper electrode UA21b (more specifically, the dielectric plate UA6 and the dielectric plate UA6a) in the space SP. Electric field gradients in the vicinity can be reduced. Thus, plasma uniformity can be improved.

Also, the width of the air gap UB1 (the distance between the lower surface UAf and the upper surface UAg) may be non-uniform in the direction in which the dielectric plates UA6 and UA6a extend (the direction in which the air gap UB1 extends). That is, the width of the air gap UB1 can be adjusted so as to suppress the generation of standing waves.

In particular, the width of the air gap UB1 can be adjusted when high frequencies in the VHF band or UHF band are radiated into the space SP. By this adjustment, the surface wave propagating between the upper electrode UA21, the upper electrode UA21a, and the upper electrode UA21b (more specifically, the dielectric plate UA6 and the dielectric plate UA6a) and the plasma generated in the space SP when the plasma is generated The wavelength of (radio waves) can preferably be stretched. Therefore, plasma uniformity can be further improved.

Also, the air gap UB1 can be more stably defined by the dielectric rod UA7, the dielectric rod UD15a9, and the dielectric rod UD15b7.

Further, even if each part thermally expands due to heat input from the plasma or the like, the end of the dielectric plate UA6 and the end of the upper electrode UA21 are connected to each other by pressing via the elastic member UA81 or the like. Problems such as cracking of the dielectric plate UA6 can be avoided.

Also, when the width of the air gap UB1 increases from the ends toward the center of each of the upper electrode UA21, the upper electrode UA21a, the dielectric plate UA6, and the dielectric plate UA6a, the standing wave is generated by the surface wave. , can be avoided.

Also, when the width of the air gap UB1 decreases from the ends toward the center of each of the upper electrode UA21, the upper electrode UA21a, the upper electrode UA21b, the dielectric plate UA6, and the dielectric plate UA6a, the attenuation of the surface wave is can be suppressed.

Further, when the lower surfaces UAf of the upper electrodes UA21 and UA21a exposed in the air gap UB1 have a wavy shape, it is possible to reduce the influence of harmonics caused by the nonlinear current-voltage characteristics of the plasma sheath.

Further, by moving the dielectric rods UD15a9 and UD15b7, the width of the air gap UB1 can be finely adjusted.

Further, since the dielectric plate UA6 is a shower plate, gas can be supplied to the space SP from the lower surface UA61 of the dielectric plate UA6.

Further, gas ejection holes UA22a and gas ejection holes UB2 are provided that overlap each other in the plurality of gas ejection holes UA22a and the plurality of gas ejection holes UB2. Therefore, the gas flow from the upper electrode UA21, the upper electrode UA21b, and the dielectric plate UA6 into the space SP can be improved.

10, among the one or more conductive layers (conductive layer MA15, conductive layer MA16, etc.) provided in the stage MA111, the conductive layer having the shortest distance from the upper surface MA13 of the stage MA111 MA16 is formed in an annular shape. Therefore, the high-frequency bias applied unevenly to the substrate W placed on the stage MA111 can be suppressed.

A plasma processing method using the plasma processing apparatuses 1A to 1C will be described. In this method, the width of the gap UB1 provided between the upper electrode UA21 or UA21a and the dielectric plate UA6 or UA6a is non-uniform in the extending direction of the dielectric plate UA6 or UA6a. Plasma treatment is performed in this state.

While various exemplary embodiments have been described above, various omissions, substitutions, and modifications may be made without being limited to the exemplary embodiments described above. Also, elements from different exemplary embodiments can be combined to form other exemplary embodiments.

From the foregoing description, it will be appreciated that various exemplary embodiments of the present disclosure have been set forth herein for purposes of illustration, and that various changes may be made without departing from the scope and spirit of the present disclosure. will be done. Accordingly, the various exemplary embodiments disclosed herein are not intended to be limiting, with a true scope and spirit being indicated by the following claims.

1A... Plasma processing apparatus 1B... Plasma processing apparatus 1C... Plasma processing apparatus AX... Axis line CS... Processing container DA10... Elastic member DA11... Side wall DA11a... Exhaust port DA12... Protrusion DA13... Sealing Member, DA14... Elastic member, DA2... Entrance/exit, DB11... Support part, DB12... Exhaust pipe, DB21... Bellows, DB22... Bellows, DB3... Spring, DB4... Water cooling plate, DB61a... Common mode filter, DB61b... Common mode filter , DB62a...heater power supply, DB62b...heater power supply, DB63...DC power supply, MA11...stage, MA111...stage, MA112...stage, MA11a...main body, MA11b...main body, MA12...peripheral part, MA13...upper surface, MA131...substrate placement Area MA132 Focus ring mounting area MA14 Back surface MA15 Conductive layer MA15a Heater member MA15b Heater member MA16 Conductive layer MA21 Conductive portion MA22 Conductive plate MA23 Conductive elastic member MA31... exhaust chamber, MA32... wall, MA33... vent, MA41... gas chamber, MA42... wall, MA43... gas discharge groove, MB1... baffle member, MB2... plasma shield, MB3... focus ring, SP... space , UA1... waveguide wall, UA21... upper electrode, UA211... lower layer, UA21a... upper electrode, UA21b... upper electrode, UA22... cavity, UA22a... gas discharge hole, UA23... void, UA23a... insulator portion, UA24... outer periphery Part UA31 Waveguide UA32 End UA4 Insulating member UA51 Support ring UA52 Cover ring UA6 Dielectric plate UA6a Dielectric plate UA61 Lower surface UA7 Dielectric rod UA81 Elastic member UA82 Sealing member UA83 Sealing member UA9 Tube UAf Lower surface UAg Upper surface UB1 Air gap UB2 Gas discharge hole UC1 High-frequency power supply UC2 Matching box UC3 Gas supply unit UC31 Gas pipe UD10 Drive mechanism UD11 Motor UD12 Insulated shaft UD13 Pulley UD14 Belt UD15a Drive unit UD15a1 Pulley UD15a2 Adjustment screw UD15a3 Container UD15a4 ...shaft UD15a5...spring UD15a6...O-ring UD15a7...female part UD15a8...male part UD15a9...dielectric rod UD15b...drive part UD15b1...pulley UD15b2...adjusting screw UD15b3...container UD15b4...ball UD15b5... shaft, UD15b6... bellows, UD15b7... dielectric rod, UD2... gas supplier.

Claims (17)

a processing vessel;
a stage provided in the processing container;
an upper electrode provided above the stage;
a dielectric plate provided immediately below the upper electrode;
a waveguide that guides high frequencies in the VHF band or UHF band;
an end of the waveguide disposed facing the plasma generation space and radiating high frequency waves into the plasma generation space;
a dielectric rod disposed between the upper electrode and the dielectric plate;
a driving mechanism for moving the dielectric rod in a reference direction intersecting the lower surface of the upper electrode;
with
A gap is provided between the upper electrode and the dielectric plate,
the lower surface of the upper electrode is exposed to the gap,
the width of the gap is non-uniform in the extending direction of the dielectric plate;
the air gap is maintained by the dielectric rod;
the dielectric rod is connected or joined to the dielectric plate, or formed integrally with the dielectric plate ;
Plasma processing equipment. the end of the dielectric plate and the end of the upper electrode are connected to each other by pressing via an elastic member;
The plasma processing apparatus according to claim 1. the width of the gap increases from the edge to the center of each of the upper electrode and the dielectric plate;
3. The plasma processing apparatus according to claim 1 or 2. the width of the air gap decreases from the edge to the center of each of the upper electrode and the dielectric plate;
3. The plasma processing apparatus according to claim 1 or 2. the lower surface of the upper electrode exposed in the gap has a wavy shape;
The plasma processing apparatus according to any one of claims 1-4. The drive mechanism drives the dielectric rod in the reference direction to expand or contract the width of the gap.
The plasma processing apparatus according to claim 1 . The drive mechanism comprises a motor, a first pulley, an insulating shaft, a belt and a drive,
The motor is provided on the upper electrode,
the first pulley, the belt, and the drive unit are provided in the upper electrode;
the insulated shaft is connected to the motor;
the first pulley connects the insulating shaft and the belt,
The driving unit connects the dielectric rod and the belt, and drives the dielectric rod in the reference direction using power of the motor transmitted through the insulating shaft and the belt,
the drive unit comprises a second pulley and a shaft;
the second pulley connects the belt and the shaft;
the shaft is connected to the dielectric rod via a floating joint;
The plasma processing apparatus according to claim 6 . The drive mechanism moves the dielectric rod along the reference direction so as to separate the upper electrode and the dielectric plate, thereby widening the gap.
The plasma processing apparatus according to claim 1 . The drive mechanism comprises a motor, a first pulley, an insulating shaft, a belt and a drive,
The motor is provided on the upper electrode,
the first pulley, the belt, and the drive unit are provided in the upper electrode;
the insulated shaft is connected to the motor;
the first pulley connects the insulating shaft and the belt,
The driving unit connects the dielectric rod and the belt, and drives the dielectric rod in the reference direction using power of the motor transmitted through the insulating shaft and the belt,
the drive unit comprises a second pulley and a shaft;
the second pulley connects the belt to the shaft;
the shaft connects to the dielectric rod;
The plasma processing apparatus according to claim 8 . The dielectric plate is a shower plate,
The plasma processing apparatus according to any one of claims 1-9 . the upper electrode has a plurality of first gas ejection holes,
the dielectric plate has a plurality of second gas ejection holes,
the plurality of first gas ejection holes and the plurality of second gas ejection holes communicate with each other through the gap,
at least a portion of the plurality of first gas ejection holes and a portion of the plurality of second gas ejection holes are provided so as to overlap each other;
The plasma processing apparatus according to claim 10 . The gap communicates with a gas pipe connected to an external gas supply,
The plasma processing apparatus according to any one of claims 1-9 . The stage is
a body formed from an insulator;
a conductive layer provided within the body;
including
The conductive layer has the shortest distance from the top surface of the stage among the one or more conductive layers provided in the stage and is formed in a ring shape.
The plasma processing apparatus according to any one of claims 1-12 . The conductive layer has an outer diameter smaller than the diameter of the substrate placed on the stage,
The plasma processing apparatus according to claim 13 . The conductive layer is any one of an electrode for generating electrostatic attraction between a substrate placed on the stage and the stage, an electrode to which a high frequency is supplied, and an electrode to be grounded.
15. The plasma processing apparatus according to claim 13 or 14 . The conductive layer is formed in a mesh shape,
The plasma processing apparatus according to any one of claims 13-15 . A plasma processing method for performing plasma processing on an object to be processed using a plasma processing apparatus, the plasma processing apparatus comprising a processing container, an upper electrode, a dielectric plate, a waveguide, a stage , a dielectric rod , and a driving mechanism. , the stage is provided in the processing container, the upper electrode is provided above the stage, the dielectric plate is provided directly below the upper electrode, and the waveguide is in the VHF band used for plasma processing or A high frequency wave in the UHF band is guided, an end of the waveguide is arranged to face the plasma generating space and radiates the high frequency wave to the plasma generating space, and the dielectric rod is between the upper electrode and the dielectric plate. the drive mechanism moves the dielectric rod in a reference direction crossing the lower surface of the upper electrode, a gap is provided between the upper electrode and the dielectric plate, and the a bottom surface exposed to the air gap and the dielectric rod connected or bonded to the dielectric plate or integrally formed with the dielectric plate, the method comprising:
performing plasma treatment in a state in which the width of the air gap maintained by the dielectric rod is non-uniform in the extending direction of the dielectric plate;
Plasma treatment method.

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