JP6965709B2 - Electric actuator - Google Patents

Description

The present invention relates to an electric actuator.

The rotary actuator of Patent Document 1 includes a motor for rotationally driving the input shaft, a speed reducer for decelerating the rotation of the input shaft and transmitting the speed to the output shaft, and a case for accommodating the motor and the speed reducer.

Japanese Unexamined Patent Publication No. 2013-247798

In the rotary actuator as described above, it is conceivable to hold a rotation sensor for detecting the rotation of the output shaft in the case. However, in this case, due to the difference in the coefficient of thermal expansion between the rotation sensor and the case, the amount of thermal deformation of the rotation sensor and the amount of thermal deformation of the case are different, and stress may be applied to the sensor chip of the rotation sensor. In this case, the sensor chip may be distorted or damaged, and the detection accuracy of the rotation sensor may decrease.

In view of the above circumstances, one object of the present invention is to provide an electric actuator having a structure capable of suppressing a decrease in detection accuracy of a rotation sensor.

One aspect of the electric actuator of the present invention is via a motor having a motor shaft extending in the axial direction, a deceleration mechanism connected to the motor shaft, a case accommodating the motor and the deceleration mechanism, and the deceleration mechanism. An output unit for transmitting the rotation of the motor shaft, a first rotation sensor for detecting the rotation of the output unit, an accommodating unit provided in the case for accommodating the first rotation sensor, and the first rotation. A holding member for holding the sensor in the housing portion is provided. The accommodating portion includes a first recess that is recessed on one side in the first direction, and a support surface that faces the other side in the first direction and is arranged on the other side in the first direction with respect to the bottom surface of the first recess. Have. The first rotation sensor has a sensor chip, and has a sensor body housed in the first recess and a protrusion protruding from the sensor body in a second direction orthogonal to the first direction. The protrusion is supported by the support surface from one side in the first direction. The sensor body is arranged away from the bottom surface of the first recess on the other side in the first direction.

According to one aspect of the present invention, there is provided an electric actuator having a structure capable of suppressing a decrease in detection accuracy of a rotation sensor.

FIG. 1 is a cross-sectional view showing an electric actuator of the present embodiment. FIG. 2 is a perspective view showing a part of the rotation detection device of the present embodiment. FIG. 3 is a view of a part of the rotation detection device of the present embodiment as viewed from above. FIG. 4 is a view of a part of the rotation detection device of the present embodiment viewed along the longitudinal direction. FIG. 5 is a diagram showing a part of the rotation detection device of the present embodiment, and is a sectional view taken along line VV in FIG. FIG. 6 is a diagram showing a part of the rotation detection device of the present embodiment, and is a sectional view taken along line VI-VI in FIG. FIG. 7 is a top view of an example of a case where the rotation detection device is erroneously assembled. FIG. 8 is a view taken along the longitudinal direction as an example of a case where the rotation detection device is erroneously assembled.

In each figure, the Z-axis direction is a vertical direction in which the positive side is the upper side and the negative side is the lower side. The axial direction of the central axis J1 shown in each figure is parallel to the Z-axis direction, that is, the vertical direction. The X-axis direction is the Z-axis direction, that is, the direction orthogonal to the axial direction Z. The Y-axis direction is a direction orthogonal to both the axial direction Z and the X-axis direction. In the following description, the direction parallel to the axial direction of the central axis J1 is simply referred to as "axial direction Z", the direction parallel to the X-axis direction is referred to as "longitudinal direction X", and the direction parallel to the Y-axis direction is referred to as "longitudinal direction X". It is called "short direction Y". Further, the radial direction centered on the central axis J1 is simply referred to as the "diameter direction", and the circumferential direction centered on the central axis J1 is simply referred to as the "circumferential direction".

In this embodiment, the axial direction Z corresponds to the first direction. The lateral direction Y corresponds to the second direction and the third direction. Further, the lower side corresponds to one side in the first direction, and the upper side corresponds to the other side in the first direction. The upper side and the lower side are simply names for explaining the relative positional relationship of each part, and the actual arrangement relationship and the like may be an arrangement relationship and the like other than the arrangement relationship and the like indicated by these names. ..

As shown in FIGS. 1 to 3, the electric actuator 10 of the present embodiment includes a case 11, a motor 20 having a motor shaft 21 extending in the axial direction Z of the central axis J1, a control unit 24, and a connector unit 80. , The deceleration mechanism 30, the output unit 40, the rotation detection device 60, the first wiring member 91, the second wiring member 92, the first bearing 51, the second bearing 52, the third bearing 53, and the bush. 54 and. The first bearing 51, the second bearing 52, and the third bearing 53 are, for example, ball bearings.

As shown in FIG. 1, the case 11 houses the motor 20 and the speed reduction mechanism 30. The case 11 includes a motor case 12 for accommodating the motor 20 and a deceleration mechanism case 13 for accommodating the deceleration mechanism 30. The motor case 12 includes a case cylinder portion 12a, an upper lid portion 12c, an annular plate portion 12b, a bearing holding portion 12e, a control board accommodating portion 12f, a terminal holding portion 12d, and a first wiring holding portion 14. Has.

The case cylinder portion 12a has a cylindrical shape extending in the axial direction Z about the central axis J1. The case cylinder portion 12a opens on both sides in the axial direction Z. The case cylinder portion 12a has a first opening portion 12g that opens downward. That is, the motor case 12 has a first opening 12g. The case cylinder portion 12a surrounds the radial outer side of the motor 20. The ring plate portion 12b has a ring plate shape that extends inward in the radial direction from the inner peripheral surface of the case cylinder portion 12a. The annular plate portion 12b covers the upper side of the stator 23, which will be described later, of the motor 20. The bearing holding portion 12e is provided at the radial inner edge portion of the annular plate portion 12b. The bearing holding portion 12e holds the third bearing 53.

The control board accommodating portion 12f is a portion accommodating the control substrate 70 described later. The control board accommodating portion 12f is formed inside the upper portion of the case cylinder portion 12a in the radial direction. The bottom surface of the control board accommodating portion 12f is the upper surface of the annular plate portion 12b. The control board accommodating portion 12f opens upward. The upper lid portion 12c is a plate-shaped lid that closes the upper end opening of the control substrate accommodating portion 12f. The terminal holding portion 12d projects radially outward from the case cylinder portion 12a. The terminal holding portion 12d has a cylindrical shape that opens outward in the radial direction. The terminal holding portion 12d holds the terminal 81, which will be described later.

The first wiring holding portion 14 projects radially outward from the case cylinder portion 12a. In FIG. 1, the first wiring holding portion 14 projects from the case cylinder portion 12a to the positive side in the longitudinal direction X. The first wiring holding portion 14 extends in the axial direction Z. The axial position of the upper end portion of the first wiring holding portion 14 is substantially the same as the axial position of the annular plate portion 12b. The circumferential position of the first wiring holding portion 14 is different from, for example, the circumferential position of the connector portion 80.

The speed reduction mechanism case 13 has a bottom wall portion 13a, a tubular portion 13b, a protruding tubular portion 13c, and a second wiring holding portion 15. The bottom wall portion 13a has an annular plate shape centered on the central axis J1. The bottom wall portion 13a covers the lower side of the speed reduction mechanism 30. The tubular portion 13b has a cylindrical shape that projects upward from the radial outer edge portion of the bottom wall portion 13a. The tubular portion 13b opens upward. The upper end of the cylinder 13b is fixed in contact with the lower end of the case cylinder 12a. The protruding tubular portion 13c has a cylindrical shape that protrudes from the radial inner edge portion of the bottom wall portion 13a to both sides in the axial direction. The protruding cylinder portion 13c opens on both sides in the axial direction. The upper end of the protruding cylinder 13c is located below the upper end of the cylinder 13b.

Inside the protruding cylinder portion 13c, a cylindrical bush 54 extending in the axial direction Z is arranged. The bush 54 is fitted into the protruding cylinder portion 13c and fixed in the protruding cylinder portion 13c. The bush 54 has a flange portion protruding outward in the radial direction at the upper end portion. The flange portion of the bush 54 comes into contact with the upper end portion of the protruding cylinder portion 13c from above.

The second wiring holding portion 15 projects radially outward from the tubular portion 13b. In FIG. 1, the second wiring holding portion 15 projects from the tubular portion 13b to the positive side in the longitudinal direction X. The second wiring holding portion 15 is arranged below the first wiring holding portion 14. The second wiring holding portion 15 is, for example, hollow and has a box shape that opens upward. The inside of the second wiring holding portion 15 is connected to the inside of the tubular portion 13b. The speed reduction mechanism case 13 has a second opening 13h. In the present embodiment, the second opening 13h is composed of an upper opening of the tubular portion 13b and an upper opening of the second wiring holding portion 15.

As shown in FIG. 4, the speed reduction mechanism case 13 has a first fixed convex portion 17 and a second fixed convex portion 18. The first fixed convex portion 17 and the second fixed convex portion 18 are columnar shapes protruding upward from the bottom wall portion 13a. The first fixed convex portion 17 and the second fixed convex portion 18 are arranged apart from each other in the circumferential direction. The first fixed convex portion 17 is arranged radially inside the second fixed convex portion 18.

The upper surface of the first fixed convex portion 17 is the first case side fixed surface 17a. The upper surface of the second fixed convex portion 18 is the second case side fixed surface 18a. That is, the case 11 has a first case-side fixing surface 17a and a second case-side fixing surface 18a. The first case-side fixing surface 17a and the second case-side fixing surface 18a are surfaces on which the accommodating portion 100, which will be described later, is fixed.

The first case-side fixed surface 17a and the second case-side fixed surface 18a are flat surfaces orthogonal to the axial direction Z. The first case-side fixed surface 17a and the second case-side fixed surface 18a are arranged at different positions in the axial direction Z. The first case-side fixing surface 17a is arranged above the second case-side fixing surface 18a. The first fixed convex portion 17 has a first female screw hole 17b that is recessed downward from the first case side fixing surface 17a. The second fixed convex portion 18 has a second female screw hole 18b that is recessed downward from the second case side fixing surface 18a.

As shown in FIG. 1, the motor case 12 and the speed reduction mechanism case 13 are fixed to each other with the first opening 12g and the second opening 13h facing each other in the axial direction Z. In the present embodiment, the lower end of the motor case 12 includes the lower end of the case cylinder 12a and the lower end of the first wiring holding portion 14. In the present embodiment, the upper end portion of the speed reduction mechanism case 13 includes the upper end portion of the tubular portion 13b and the upper end portion of the second wiring holding portion 15. In a state where the motor case 12 and the speed reduction mechanism case 13 are fixed to each other, the inside of the first opening 12g and the inside of the second opening 13h are connected to each other.

The motor 20 includes a motor shaft 21, a rotor 22, and a stator 23. The motor shaft 21 is rotatably supported around the central axis J1 by the first bearing 51, the second bearing 52, and the third bearing 53. The upper end portion of the motor shaft 21 penetrates the bearing holding portion 12e in the axial direction Z and projects upward from the annular plate portion 12b. The eccentric shaft portion 21a, which is a portion of the motor shaft 21 supported by the second bearing 52, extends about the eccentric shaft J2 which is parallel to the central shaft J1 and eccentric with respect to the central shaft J1.

The rotor 22 has a cylindrical rotor core fixed to the outer peripheral surface of the motor shaft 21 and a magnet fixed to the outer peripheral surface of the rotor core. The stator 23 has an annular stator core that surrounds the radial outer side of the rotor 22 and a plurality of coils mounted on the stator core. The stator 23 is fixed to the inner peripheral surface of the case cylinder portion 12a. As a result, the motor 20 is held in the motor case 12.

The control unit 24 includes a control board 70, a second mounting member 73, a second magnet 74, and a second rotation sensor 71. That is, the electric actuator 10 includes a control board 70, a second mounting member 73, a second magnet 74, and a second rotation sensor 71.

The control board 70 has a plate shape extending in a plane orthogonal to the axial direction Z. The control board 70 is housed in the motor case 12. More specifically, the control board 70 is housed in the control board housing portion 12f and is arranged away from the ring plate portion 12b on the upper side. The control board 70 is a board that is electrically connected to the motor 20. The coil of the stator 23 is electrically connected to the control board 70. The control board 70 controls, for example, the current supplied to the motor 20. That is, for example, an inverter circuit is mounted on the control board 70.

The second mounting member 73 has an annular shape centered on the central axis J1. The inner peripheral surface of the second mounting member 73 is fixed to the outer peripheral surface of the upper end portion of the motor shaft 21. The second mounting member 73 is arranged above the third bearing 53 and the bearing holding portion 12e. The second mounting member 73 is made of, for example, a non-magnetic material. The second mounting member 73 may be made of a magnetic material.

The second magnet 74 is an annular shape centered on the central axis J1. The second magnet 74 is fixed to the upper end surface of the radial outer edge portion of the second mounting member 73. The method of fixing the second magnet 74 to the second mounting member 73 is not particularly limited, and is, for example, adhesion with an adhesive. The second mounting member 73 and the second magnet 74 rotate together with the motor shaft 21. The second magnet 74 is arranged above the third bearing 53 and the bearing holding portion 12e. The second magnet 74 has north poles and south poles that are alternately arranged along the circumferential direction. The upper surface of the second magnet 74 is covered with a magnet cover.

The second rotation sensor 71 is a sensor that detects the rotation of the motor 20. The second rotation sensor 71 is attached to the lower surface of the control board 70. The second rotation sensor 71 faces the second magnet 74 and the magnet cover covering the upper surfaces of the second magnet 74 in the axial direction Z via a gap. The second rotation sensor 71 detects the magnetic field generated by the second magnet 74. The second rotation sensor 71 is, for example, a Hall element. Although not shown, a plurality of, for example, three second rotation sensors 71 are provided along the circumferential direction. The rotation of the motor shaft 21 can be detected by detecting the change in the magnetic field generated by the second magnet 74 rotating together with the motor shaft 21 by using the second rotation sensor 71.

The connector portion 80 is a portion where the connection with the electrical wiring outside the case 11 is performed. The connector portion 80 is provided on the motor case 12. The connector unit 80 has the terminal holding unit 12d and the terminal 81 described above. The terminal 81 is embedded and held in the terminal holding portion 12d. One end of the terminal 81 is fixed to the control board 70. The other end of the terminal 81 is exposed to the outside of the case 11 via the inside of the terminal holding portion 12d. In this embodiment, the terminal 81 is, for example, a bus bar.

An external power source is connected to the connector portion 80 via electrical wiring (not shown). More specifically, an external power supply is attached to the terminal holding portion 12d, and the electrical wiring of the external power supply is electrically connected to the portion of the terminal 81 protruding into the terminal holding portion 12d. As a result, the terminal 81 electrically connects the control board 70 and the electrical wiring. Therefore, in the present embodiment, power is supplied from the external power source to the coil of the stator 23 via the terminal 81 and the control board 70.

The speed reduction mechanism 30 is arranged on the outer side in the radial direction of the lower portion of the motor shaft 21. The speed reduction mechanism 30 is housed inside the speed reduction mechanism case 13. The speed reduction mechanism 30 is arranged between the bottom wall portion 13a and the motor 20 in the axial direction Z. The reduction gear 30 includes an external tooth gear 31, an internal tooth gear 33, and an annular portion 43.

The external tooth gear 31 has a substantially annular plate shape extending in a plane orthogonal to the axial direction Z with the eccentric shaft J2 of the eccentric shaft portion 21a as the center. A gear portion is provided on the radial outer surface of the external tooth gear 31. The external tooth gear 31 is connected to the motor shaft 21 via a second bearing 52. As a result, the speed reduction mechanism 30 is connected to the motor shaft 21. The external tooth gear 31 is fitted to the outer ring of the second bearing 52 from the outside in the radial direction. As a result, the second bearing 52 connects the motor shaft 21 and the external tooth gear 31 so as to be relatively rotatable around the eccentric shaft J2.

The external tooth gear 31 has a plurality of pins 32. The pin 32 is a columnar shape protruding downward. Although not shown, the plurality of pins 32 are arranged at equal intervals over one circumference along the circumferential direction centered on the eccentric axis J2.

The internal tooth gear 33 is fixed so as to surround the radial outer side of the external tooth gear 31, and meshes with the external tooth gear 31. The internal tooth gear 33 is an annular shape centered on the central axis J1. The radial outer edge portion of the internal tooth gear 33 is arranged and fixed at a step portion provided on the inner peripheral surface of the tubular portion 13b and recessed outward in the radial direction. As a result, the speed reduction mechanism 30 is held in the speed reduction mechanism case 13. A gear portion is provided on the inner peripheral surface of the internal tooth gear 33. The gear portion of the internal tooth gear 33 meshes with the gear portion of the external tooth gear 31. More specifically, the gear portion of the internal tooth gear 33 meshes with the gear portion of the external tooth gear 31 in a part thereof.

The ring portion 43 is a part of the output portion 40. The annular portion 43 is arranged below the external tooth gear 31. The annular portion 43 has an annular plate shape that extends in the radial direction about the central axis J1. The annulus 43 comes into contact with the flange of the bush 54 from above. The annular portion 43 has a plurality of holes 43a penetrating the annular portion 43 in the axial direction Z. Although not shown, the shape seen along the axial direction Z of the hole 43a is a circular shape. The inner diameter of the hole 43a is larger than the outer diameter of the pin 32. A plurality of pins 32 provided in the external tooth gear 31 are passed through the plurality of holes 43a. The outer peripheral surface of the pin 32 is inscribed with the inner peripheral surface of the hole 43a. The inner peripheral surface of the hole 43a supports the external tooth gear 31 so as to be swingable around the central axis J1 via the pin 32.

The output unit 40 is a portion that outputs the driving force of the electric actuator 10. The output unit 40 has an annular portion 43, a cylindrical portion 42, and an output shaft portion 41. The cylindrical portion 42 has a cylindrical shape extending downward from the inner edge of the annular portion 43. The cylindrical portion 42 has a cylindrical shape having a bottom portion and opening upward. The cylindrical portion 42 is fitted inside the bush 54 in the radial direction. The first bearing 51 is fixed to the inner peripheral surface of the cylindrical portion 42. As a result, the first bearing 51 connects the motor shaft 21 and the output unit 40 so as to be relatively rotatable with each other. The lower end of the motor shaft 21 is located inside the cylindrical portion 42. The lower end surface of the motor shaft 21 faces the upper surface of the bottom portion of the cylindrical portion 42 via a gap.

The output shaft portion 41 extends in the axial direction Z and is arranged below the motor shaft 21. In the present embodiment, the output shaft portion 41 has a columnar shape centered on the central axis J1. The output shaft portion 41 extends downward from the bottom portion of the cylindrical portion 42. The output shaft portion 41 is passed through the inside of the protruding cylinder portion 13c. The lower end of the output shaft portion 41 projects below the protruding cylinder portion 13c. Another member that outputs the driving force of the electric actuator 10 is attached to the lower end of the output shaft portion 41. In this embodiment, the output unit 40 is a single member.

When the motor shaft 21 is rotated around the central axis J1, the eccentric shaft portion 21a revolves around the central axis J1 in the circumferential direction. The revolution of the eccentric shaft portion 21a is transmitted to the external tooth gear 31 via the second bearing 52, and the position where the external tooth gear 31 is inscribed between the inner peripheral surface of the hole 43a and the outer peripheral surface of the pin 32 is changed. Swing. As a result, the position where the gear portion of the external tooth gear 31 and the gear portion of the internal tooth gear 33 mesh with each other changes in the circumferential direction. Therefore, the rotational force of the motor shaft 21 is transmitted to the internal tooth gear 33 via the external tooth gear 31.

Here, in the present embodiment, since the internal tooth gear 33 is fixed, it does not rotate. Therefore, the external tooth gear 31 rotates around the eccentric shaft J2 due to the reaction force of the rotational force transmitted to the internal tooth gear 33. At this time, the rotation direction of the external tooth gear 31 is opposite to the rotation direction of the motor shaft 21. The rotation of the external tooth gear 31 around the eccentric shaft J2 is transmitted to the annular portion 43 via the hole 43a and the pin 32. As a result, the output unit 40 rotates around the central axis J1. In this way, the rotation of the motor shaft 21 is transmitted to the output unit 40 via the speed reduction mechanism 30.

The rotation of the output unit 40 is decelerated with respect to the rotation of the motor shaft 21 by the reduction mechanism 30. Specifically, in the configuration of the reduction mechanism 30 of the present embodiment, the reduction ratio R of the rotation of the output unit 40 with respect to the rotation of the motor shaft 21 is represented by R = − (N2-N1) / N2. The negative sign at the beginning of the equation representing the reduction ratio R indicates that the direction of rotation of the output unit 40 to be decelerated is opposite to the direction of rotation of the motor shaft 21. N1 is the number of teeth of the external gear 31, and N2 is the number of teeth of the internal gear 33. As an example, when the number of teeth N1 of the external gear 31 is 59 and the number of teeth N2 of the internal gear 33 is 60, the reduction ratio R is -1/60.

As described above, according to the reduction mechanism 30 of the present embodiment, the reduction ratio R of the rotation of the output unit 40 with respect to the rotation of the motor shaft 21 can be made relatively large. Therefore, the rotational torque of the output unit 40 can be relatively increased.

The rotation detection device 60 detects the rotation of the output unit 40. At least a part of the rotation detection device 60 is arranged at a position where it overlaps the cylindrical portion 42 in the radial direction. The rotation detection device 60 is housed in the speed reduction mechanism case 13. The rotation detection device 60 includes a first magnet 63, an accommodating portion 100, a first rotation sensor 62, and a holding member 61. That is, the electric actuator 10 includes a first magnet 63, an accommodating portion 100, a first rotation sensor 62, and a holding member 61.

The first magnet 63 has a cylindrical shape centered on the central axis J1. The first magnet 63 is fixed to the lower surface of the annular portion 43. The first magnet 63 is arranged radially outside the protruding cylinder portion 13c, the upper end portion, the cylindrical portion 42, and the bush 54, and surrounds the upper end portion, the cylindrical portion 42, and the bush 54 of the protruding cylinder portion 13c.

The accommodating portion 100 is a member provided in the case 11 and accommodating the first rotation sensor 62. In the present embodiment, the accommodating portion 100 is a separate member from the case 11. Therefore, when the shape of the first rotation sensor 62 is changed, it can be dealt with by replacing only the accommodating portion 100.

As shown in FIG. 2, the accommodating portion 100 includes an accommodating portion main body 110, support convex portions 133, 134, a first fixing portion 121, and a second fixing portion 122. The housing portion main body 110 has a rectangular parallelepiped shape that is long in the longitudinal direction X and flat in the axial direction Z. The accommodating portion main body 110 extends in the radial direction. The accommodating portion main body 110 has a first recess 130 that is recessed downward from the upper surface of the accommodating portion main body 110. That is, the accommodating portion 100 has a first recess 130. As shown in FIG. 3, the inner edge of the first recess 130 and the bottom surface 130a of the first recess 130 have a rectangular shape that is long in the longitudinal direction X when viewed from above. The bottom surface 130a is a flat surface orthogonal to the axial direction Z.

As shown in FIG. 2, the support convex portions 133 and 134 project upward from the bottom surface 130a of the first concave portion 130. The support protrusions 133 and 134 have a rectangular parallelepiped shape. The upper end portions of the support convex portions 133 and 134 are arranged below the upper surface of the accommodating portion main body 110. The support convex portion 133 is connected to the side surface on one side in the lateral direction of the inner side surface of the first concave portion 130. The support convex portion 134 is connected to the side surface of the inner side surface of the first concave portion 130 on the other side in the lateral direction. In the present embodiment, one side in the short direction is the negative side in the short direction Y, and corresponds to one side in the second direction. The other side in the lateral direction is the positive side in the lateral direction Y and corresponds to the other side in the second direction.

As shown in FIG. 3, the support convex portion 133 has a second concave portion 133a that is recessed downward from the upper surface of the support convex portion 133. The support convex portion 134 has a second concave portion 134a that is recessed downward from the upper surface of the support convex portion 134. That is, the accommodating portion 100 has second recesses 133a and 134a. The second recesses 133a and 134a open on at least one side in the lateral direction Y. The second recess 133a opens on the other side in the lateral direction. The second recess 134a opens on one side in the lateral direction.

As shown in FIG. 5, the bottom surface of the second recess 133a is a support surface 133b. The bottom surface of the second recess 134a is a support surface 134b. That is, the accommodating portion 100 has support surfaces 133b and 134b. The support surfaces 133b and 134b face upward and are arranged above the bottom surface 130a of the first recess 130.

As shown in FIG. 3, the dimension of the support convex portion 133 in the lateral direction Y is smaller than the dimension of the support convex portion 134 in the lateral direction Y. Two support convex portions 133 are provided apart from each other in the longitudinal direction X. Two support convex portions 134 are provided apart from each other in the longitudinal direction X. The distance between the two support convex portions 133 in the longitudinal direction X is smaller than the distance between the two support convex portions 134 in the longitudinal direction X. In the longitudinal direction X, the position of the support convex portion 133 and the position of the support convex portion 134 are different from each other. As a result, in the longitudinal direction X, the position of the support surface 133b and the position of the support surface 134b are different from each other.

More specifically, the support convex portion 133 on one side in the longitudinal direction and the support surface 133b thereof among the two support convex portions 133 are the support convex portion 134 on one side in the longitudinal direction and the support surface thereof among the two support convex portions 134. It is arranged on the other side in the longitudinal direction from 134b. Of the two support convex portions 133, the support convex portion 133 on the other side in the longitudinal direction and its support surface 133b are longitudinally longer than the support convex portion 134 on the other side in the longitudinal direction and its support surface 134b among the two support convex portions 134. Placed on one side. In the present embodiment, one side in the longitudinal direction is the negative side in the longitudinal direction X and is inward in the radial direction. The other side in the longitudinal direction is the positive side in the longitudinal direction X and is the outer side in the radial direction.

The first fixing portion 121 projects from the accommodating portion main body 110 to one side in the lateral direction. The dimension of the first fixing portion 121 in the longitudinal direction X becomes smaller as it is separated from the accommodating portion main body 110 in the lateral direction Y. The outer shape of the end portion of the first fixed portion 121 on one side in the lateral direction is an arc shape that is convex on one side in the lateral direction when viewed along the axial direction Z.

As shown in FIG. 4, the first fixing portion 121 has a through hole 121c that penetrates the first fixing portion 121 in the axial direction Z. A cylindrical collar 123a extending in the axial direction Z is fitted into the through hole 121c. The inside of the collar 123a overlaps with the first female screw hole 17b when viewed along the axial direction Z. The first fixing portion 121 is fixed to the first fixing convex portion 17 from the upper side of the collar 123a by a screw 140 that passes through the inside of the collar 123a and is tightened into the first female screw hole 17b. As a result, the first fixing portion 121 is fixed to the case 11.

The lower surface of the first fixing portion 121 is the first accommodating portion side fixing surface 121a. That is, the accommodating portion 100 has a first accommodating portion side fixed surface 121a. The first accommodating portion side fixing surface 121a is fixed in contact with the first case side fixing surface 17a. The first accommodating portion side fixed surface 121a is a flat surface orthogonal to the axial direction Z.

As shown in FIG. 3, the second fixing portion 122 projects from the accommodating portion main body 110 to the other side in the lateral direction. The dimension of the second fixing portion 122 in the longitudinal direction X becomes smaller as it is separated from the accommodating portion main body 110 in the lateral direction Y. The outer shape of the end portion of the second fixed portion 122 on the other side in the lateral direction is an arc shape that is convex toward the other side in the lateral direction when viewed along the axial direction Z.

As shown in FIG. 4, the second fixing portion 122 has a through hole 122c that penetrates the second fixing portion 122 in the axial direction Z. A cylindrical collar 123b extending in the axial direction Z is fitted into the through hole 122c. The inside of the collar 123b overlaps with the second female screw hole 18b when viewed along the axial direction Z. The second fixing portion 122 is fixed to the second fixing convex portion 18 from the upper side of the collar 123b by a screw 140 that passes through the inside of the collar 123b and is tightened into the second female screw hole 18b. As a result, the second fixing portion 122 is fixed to the case 11.

The lower surface of the second fixing portion 122 is the second accommodating portion side fixing surface 122a. That is, the accommodating portion 100 has a second accommodating portion side fixed surface 122a. The second accommodating portion side fixing surface 122a is fixed in contact with the second case side fixing surface 18a. The second accommodating portion side fixed surface 122a is a flat surface orthogonal to the axial direction Z.

As shown in FIG. 3, the position of the first fixing portion 121 and the position of the second fixing portion 122 are different from each other in the longitudinal direction X orthogonal to both the axial direction Z and the lateral direction Y. Therefore, for example, when the accommodating portion 100 is attached to the case 11 in a state of being inverted in the axial direction Z, the extending direction of the accommodating portion main body 110 becomes an inclined posture with respect to the longitudinal direction X, as shown in FIG. As a result, the operator can easily notice that the orientation of the axial direction Z to which the accommodating portion 100 is attached is incorrect. Therefore, it is possible to prevent the accommodating portion 100 from being erroneously assembled to the case 11.

In the present specification, "the position of the first fixing portion and the position of the second fixing portion are different from each other" means that the position of the portion of the first fixing portion that is fixed to the case by a fixing member such as a screw is different. include. That is, in the present embodiment, the position of the through hole 121c of the first fixing portion 121 in the longitudinal direction X and the position of the through hole 122c of the second fixing portion 122 in the longitudinal direction X may be different from each other.

As shown in FIG. 4, the first accommodating portion side fixing surface 121a and the second accommodating portion side fixing surface 122a are arranged at different positions in the axial direction Z. That is, the first case-side fixing surface 17a and the first accommodating portion-side fixing surface 121a that are in contact with each other, and the second case-side fixing surface 18a and the second accommodating portion-side fixing surface 122a that are in contact with each other are in the axial direction Z. They are placed in different positions. Therefore, for example, when the first fixed portion 121 is fixed to the second fixed convex portion 18 and the second fixed portion 122 is to be fixed to the first fixed convex portion 17, one of the accommodating portion side fixed surface and the case side The height with the fixed surface does not match. As a result, it is possible to prevent each fixed portion from being fixed to an erroneous fixed convex portion. Therefore, it is possible to further prevent the accommodating portion 100 from being erroneously assembled to the case 11.

In the present embodiment, the first case-side fixing surface 17a and the first accommodating portion-side fixing surface 121a that come into contact with each other are arranged above the second case-side fixing surface 18a and the second accommodating portion-side fixing surface 122a that come into contact with each other. Will be done. The distance L in the axial direction Z between the first accommodating portion side fixed surface 121a and the second accommodating portion side fixing surface 122a is the upper surface 121b of the first accommodating portion 121 and the upper surface 122b of the second accommodating portion 122. It is different from the distance in the axial direction Z between and. Therefore, for example, when the accommodating portion 100 is attached to the case 11 in a state of being inverted in the axial direction Z, as shown in FIG. 8, the heights of either of the fixed portions and the fixed convex portions do not match, and the accommodating portion 100 is accommodated. The portion 100 cannot be fixed to each fixed convex portion. Therefore, it is possible to further prevent the accommodating portion 100 from being erroneously assembled to the case 11.

As shown in FIG. 4, in the present embodiment, the upper surface 121b of the first fixing portion 121 and the upper surface 122b of the second fixing portion 122 are arranged at the same position in the axial direction Z. Therefore, the distance in the axial direction Z between the upper surface 121b of the first fixing portion 121 and the upper surface 122b of the second fixing portion 122 is zero. According to this configuration, the accommodating portion 100 can be easily formed as compared with the case where the upper surface 121b of the first fixing portion 121 and the upper surface 122b of the second fixing portion 122 are arranged at different positions in the axial direction Z. The dimension of the first fixing portion 121 in the axial direction Z is smaller than the dimension of the second fixing portion 122 in the axial direction Z.

The first rotation sensor 62 detects the rotation of the output unit 40. The first rotation sensor 62 is, for example, a Hall element. As shown in FIG. 3, the first rotation sensor 62 has a sensor main body 64, first protrusions 65a and second protrusions 65b as protrusions, and a plurality of sensor terminals 66a, 66b, 66c. The sensor body 64 has a substantially rectangular parallelepiped shape extending in the longitudinal direction X and flattening in the axial direction Z. The sensor body 64 is housed in the first recess 130. The sensor body 64 has a first portion 64a, a second portion 64b, and a connection portion 64c. The first portion 64a has a substantially square shape when viewed from above. The first portion 64a has a sensor chip 64d inside. That is, the sensor body 64 has a sensor chip 64d.

As shown in FIG. 2, the sensor chip 64d is arranged below the first magnet 63. The sensor chip 64d detects the magnetic field generated by the first magnet 63. By using the sensor chip 64d to detect a change in the magnetic field generated by the first magnet 63 that rotates together with the output unit 40, the first rotation sensor 62 can detect the rotation of the output unit 40.

The second portion 64b is arranged on the other side in the longitudinal direction of the first portion 64a, that is, on the outer side in the radial direction. The second portion 64b has a substantially square shape when viewed from above. Sensor terminals 66a, 66b, 66c are held in the second portion 64b. The connecting portion 64c connects the first portion 64a and the second portion 64b. The connection portion 64c electrically connects the sensor chip 64d and the sensor terminals 66a, 66b, 66c.

As shown in FIG. 3, the first protrusion 65a and the second protrusion 65b project from the sensor body 64 in the lateral direction Y orthogonal to the axial direction Z. The first protrusion 65a projects from the sensor body 64 to one side in the lateral direction. The second protrusion 65b projects from the sensor body 64 to the other side in the lateral direction. The first protrusion 65a and the second protrusion 65b have a plate shape whose plate surface is orthogonal to the axial direction Z.

As shown in FIG. 5, the first protrusion 65a is supported by the support surface 133b from below. The second protrusion 65b is supported by the support surface 134b from below. Since the support surfaces 133b and 134b are arranged above the bottom surface 130a of the first recess 130, each protrusion is supported by the support surfaces 133b and 134b, so that the sensor body 64 can be mounted on the bottom surface of the first recess 130. It is arranged away from the 130a on the upper side. As a result, the sensor main body 64 can be held away from the accommodating portion 100. Therefore, when the coefficient of thermal expansion of the sensor main body 64 and the coefficient of thermal expansion of the accommodating portion 100 are different, even if the sensor main body 64 and the accommodating portion 100 are thermally deformed, stress is unlikely to be applied to the sensor main body 64. Therefore, it is possible to prevent the sensor chip 64d of the sensor body 64 from being distorted or damaged. As described above, according to the present embodiment, the electric actuator 10 having a structure capable of suppressing a decrease in the detection accuracy of the first rotation sensor 62 can be obtained.

Further, according to the present embodiment, since the first protrusion 65a and the second protrusion 65b are provided as the protrusions, the sensor main body 64 can be supported on both sides in the lateral direction Y. Therefore, the sensor body 64 can be more stably held by the accommodating portion 100. As shown in FIG. 3, the first protrusion 65a is fitted into the second recess 133a. The second protrusion 65b is fitted into the second recess 134a. Therefore, the first protrusions 65a and the second protrusions 65b can be positioned in the longitudinal direction X by the second recesses 133a and 134a, and the first rotation sensor 62 can be positioned in the longitudinal direction X.

A plurality of first protrusions 65a and a plurality of second protrusions 65b are provided. Two first protrusions 65a are provided apart from each other in the longitudinal direction X. Each of the two first protrusions 65a protrudes from the first portion 64a and the second portion 64b. Two second protrusions 65b are provided apart from each other in the longitudinal direction X. Each of the two second protrusions 65b protrudes from the first portion 64a and the second portion 64b. In the longitudinal direction X orthogonal to both the axial direction Z and the lateral direction Y, the position of the first protrusion 65a and the position of the second protrusion 65b are different from each other. Therefore, when the first rotation sensor 62 is inverted in the lateral direction Y, the positions of the protrusions and the second recesses in the longitudinal direction X are displaced, and it is difficult to properly fit the protrusions into the second recesses. Become. As a result, it is possible to prevent the first rotation sensor 62 from being placed in the first recess 130 in the wrong direction.

The first protrusion 65a on one side in the longitudinal direction of the two first protrusions 65a is arranged on the other side in the longitudinal direction with respect to the second protrusion 65b on one side in the longitudinal direction of the two second protrusions 65b. .. The first protrusion 65a on the other side in the longitudinal direction of the two first protrusions 65a is arranged on one side in the longitudinal direction with respect to the second protrusion 65b on the other side in the longitudinal direction among the two second protrusions 65b. .. The distance between the first protrusions 65a in the longitudinal direction X and the distance between the second protrusions 65b in the longitudinal direction X are different from each other. Therefore, when the first rotation sensor 62 is inverted in the lateral direction Y, each protrusion cannot be fitted into each second recess. Therefore, it is possible to further suppress the placement of the first rotation sensor 62 in the first recess 130 in the wrong direction. The distance between the first protrusions 65a in the longitudinal direction X is smaller than the distance between the second protrusions 65b in the longitudinal direction X.

The sensor terminals 66a, 66b, 66c extend from the sensor body 64 to the other side in the longitudinal direction, that is, to the outside in the radial direction. The sensor terminals 66a, 66b, 66c are electrically connected to the sensor chip 64d via the connecting portion 64c. The plurality of sensor terminals 66a, 66b, 66c are arranged side by side in the lateral direction Y. The sensor terminal 66b is arranged between the sensor terminal 66a and the sensor terminal 66c in the lateral direction Y. The sensor terminal 66b extends linearly in the longitudinal direction X. The sensor terminals 66a and 66c have a first bent portion that bends from the sensor body 64 toward the other side in the longitudinal direction toward the side away from the sensor terminal 66b in the lateral direction Y, and a sensor on the other side in the longitudinal direction from the first bent portion. Each has a second bent portion that bends toward the terminal 66b.

The sensor terminals 66a, 66b, 66c are connected to each of the one end portions 92e of the second wiring member 92, which will be described later. The sensor terminals 66a, 66b, 66c are arranged asymmetrically with respect to the virtual line IL passing through the center of the sensor main body 64 in the lateral direction Y. Therefore, for example, if the first rotation sensor 62 is to be inverted and arranged in the lateral direction Y, the positions of the sensor terminals 66a, 66b, 66c in the lateral direction Y change, and the sensors cannot be connected to each end portion 92e. Therefore, it is possible to further suppress the placement of the first rotation sensor 62 in the first recess 130 in the wrong direction.

In the present embodiment, the sensor terminal 66a is arranged on one side in the lateral direction with respect to the virtual line IL. The sensor terminals 66b and 66c are arranged on the other side in the lateral direction from the virtual line IL. With respect to the sensor terminal 66b, the sensor terminal 66a and the sensor terminal 66c are arranged symmetrically in the lateral direction Y. Of the three sensor terminals 66a, 66b, 66c, one sensor terminal is a signal transmission sensor terminal, the other sensor terminal is a grounding sensor terminal, and the remaining one sensor terminal is a power supply. It is a sensor terminal for.

As shown in FIG. 6, the holding member 61 is a member that holds the first rotation sensor 62 in the accommodating portion 100. The holding member 61 is housed in the first recess 130. The holding member 61 holds the sensor main body 64 on the inner surface of the first recess 130. The holding member 61 is an elastic body that is in close contact with the sensor body 64. Therefore, the difference between the amount of thermal deformation of the first rotation sensor 62 and the amount of thermal deformation of the accommodating portion 100 due to the difference in the thermal expansion rate can be absorbed by the elastic deformation of the holding member 61. As a result, it is possible to further suppress the application of stress to the sensor body 64. Therefore, it is possible to further suppress a decrease in the detection accuracy of the first rotation sensor 62.

In the present specification, "the holding member holds the first rotation sensor in the accommodating portion" includes that the holding member supports at least a part of the surface of the first rotation sensor. For example, the holding member may be a member that supports the lower surface and the side surface of the first rotation sensor. Further, in the present specification, "the holding member holds the sensor body on the inner surface of the first recess" means that the holding member is at least a part of the surface of the sensor body and at least a part of the inner surface of the first recess. Includes contact with both.

In the present embodiment, the holding member 61 is formed by pouring a resin adhesive into the first recess 130 and curing it. That is, the holding member 61 is an elastic body made of an adhesive. Therefore, the holding member 61 can more preferably hold the first rotation sensor 62 in the first recess 130. The holding member 61 is made of resin. The sensor body 64 is embedded in the holding member 61. Therefore, the sensor main body 64 can be protected by the holding member 61, and oil or the like can be suppressed from adhering to the sensor main body 64. The holding member 61 covers the entire first rotation sensor 62. Note that in FIGS. 2 and 3, the holding member 61 is not shown.

The first wiring member 91 and the second wiring member 92 shown in FIG. 1 are electrically connected to the rotation detection device 60. In the present embodiment, the first wiring member 91 and the second wiring member 92 are wiring members for connecting the first rotation sensor 62 of the rotation detection device 60 and the control board 70 of the control unit 24. Although not shown, the first wiring member 91 and the second wiring member 92 are provided with three each in the present embodiment.

In the present embodiment, the first wiring member 91 and the second wiring member 92 are elongated and plate-shaped bus bars. The first wiring member 91 is embedded in the first wiring holding portion 14. One end of the first wiring member 91 projects downward from the first wiring holding portion 14 and is exposed inside the second wiring holding portion 15. The other end of the first wiring member 91 is exposed inside the control board accommodating portion 12f and is connected to the control board 70.

As shown in FIG. 6, a part of the second wiring member 92 is embedded and held in the accommodating portion 100. One end 92e of the second wiring member 92 projects upward from the bottom surface 130a of the first recess 130 and is exposed inside the first recess 130. The upper end portion of the one end portion 92e is arranged below the upper surface of the accommodating portion main body 110. One end 92e is embedded in the holding member 61. As shown in FIG. 2, the upper end of each end 92e is bifurcated, and the sensor terminals 66a, 66b, 66c are fitted into the gaps at the upper ends of each bifurcated end 92e. As a result, the sensor terminals 66a, 66b, 66c are connected to each of the one end portions 92e of the three second wiring members 92, and the first rotation sensor 62 and the second wiring member 92 are electrically connected.

The three end portions 92e are arranged along the circumferential direction. One end 92e arranged in the center of the three end portions 92e in the circumferential direction is arranged on the other side in the longitudinal direction, that is, radially outside the one end portion 92e arranged on both sides in the circumferential direction of the three end portions 92e. Will be done. The other end of each second wiring member 92 projects upward from the other end in the longitudinal direction of the upper surface of the accommodating portion 100. The other ends of the second wiring members 92 are arranged side by side along the lateral direction Y.

As shown in FIG. 1, the other end of the second wiring member 92 is connected to one end of the first wiring member 91 that projects downward from the first wiring holding portion 14. As a result, the first wiring member 91 and the second wiring member 92 are electrically connected, and the first rotation sensor 62 and the control board 70 are electrically connected via the first wiring member 91 and the second wiring member 92. Is connected.

The present invention is not limited to the above-described embodiment, and other configurations may be adopted. The accommodating portion does not have to be a separate member from the case. In this case, for example, the accommodating portion is configured by providing a first recess that is recessed downward on the bottom wall portion of the speed reduction mechanism case. The positions of the first case-side fixed surface and the second case-side fixed surface in the axial direction Z may be the same as each other. The first direction in which the first recess is recessed may be a direction different from the axial direction Z.

The position of the first fixing portion and the position of the second fixing portion in the longitudinal direction X may be the same as each other. The accommodating portion does not have to have a first fixing portion and a second fixing portion. In this case, a part of the lower surface of the main body of the accommodating portion may be a first accommodating portion fixing surface and a second accommodating portion fixing surface. In the above embodiment, the support surface is the bottom surface of the second recess, but the present invention is not limited to this. The support surface may be the edge of the first recess on the upper surface of the main body of the accommodating portion. The support surface may be the upper end surface of the support convex portion. The support convex portion may be arranged away from the inner side surface of the first concave portion. A plurality of protrusions may be supported on one support surface.

The first rotation sensor is not particularly limited as long as it can detect the rotation of the output unit. The first rotation sensor may be a magnetoresistive element. At least one protrusion may be provided, and the number is not limited. The third direction in which the sensor terminals are lined up may be a direction different from the second direction in which the protrusions protrude. The plurality of sensor terminals may be arranged symmetrically with respect to the virtual line IL. The second rotation sensor may be a magnetoresistive element.

The holding member is not particularly limited as long as the first rotation sensor can be held in the accommodating portion. The holding member may cover only a part of the sensor body. The holding member may be composed of a substance other than the adhesive. The configuration of the reduction mechanism is not particularly limited as long as the rotation of the motor shaft can be reduced.

The application of the electric actuator of the present invention is not limited, and the electric actuator of the present invention may be mounted on any device. In addition, the above-mentioned configurations can be appropriately combined within a range that does not contradict each other.

10 ... Electric actuator, 11 ... Case, 17a ... First case side fixed surface, 18a ... Second case side fixed surface, 20 ... Motor, 21 ... Motor shaft, 30 ... Reduction mechanism, 40 ... Output unit, 61 ... Holding member , 62 ... 1st rotation sensor, 64 ... Sensor body, 64d ... Sensor chip, 65a ... 1st protrusion, 65b ... 2nd protrusion, 66a, 66b, 66c ... Sensor terminal, 100 ... Main body, 121 ... 1st fixing portion, 121a ... 1st accommodating portion side fixing surface, 122 ... 2nd fixing portion, 122a ... 2nd accommodating portion side fixing surface, 130 ... 1st recess, 130a ... bottom surface 133a, 134a ... Second recess, 133b, 134b ... Support surface, IL ... Virtual line, Y ... Short direction (second direction, third direction), Z ... Axial direction (first direction)

Claims (14)

A motor with a motor shaft extending in the axial direction and
A deceleration mechanism connected to the motor shaft and
A case accommodating the motor and the deceleration mechanism, and
An output unit to which the rotation of the motor shaft is transmitted via the reduction mechanism, and
The first rotation sensor that detects the rotation of the output unit and
An accommodating portion provided in the case and accommodating the first rotation sensor,
A holding member that holds the first rotation sensor in the housing portion, and
With
The accommodating part
A first recess that is recessed on one side in the first direction,
A support surface that faces the other side in the first direction and is arranged on the other side in the first direction from the bottom surface of the first recess.
Have,
The first rotation sensor is
A sensor body having a sensor chip and housed in the first recess,
A protrusion protruding from the sensor body in the second direction orthogonal to the first direction,
Have,
The protrusion is supported by the support surface from one side in the first direction.
The sensor body is an electric actuator arranged away from the bottom surface of the first recess on the other side in the first direction. The electric actuator according to claim 1, wherein the accommodating portion is a member separate from the case. The accommodating part
The housing unit body having the first recess and
A first fixed portion protruding from the main body of the accommodating portion in one side of the third direction orthogonal to the first direction,
A second fixing portion protruding from the main body of the accommodating portion to the other side in the third direction,
Have,
The first fixing portion and the second fixing portion are fixed to the case.
The electric actuator according to claim 2, wherein the position of the first fixing portion and the position of the second fixing portion are different from each other in a direction orthogonal to both the first direction and the third direction. The case has a first case side fixing surface and a second case side fixing surface on which the accommodating portion is fixed.
The accommodating part
The housing unit body having the first recess and
The first housing portion side fixing surface, which is fixed in contact with the first case side fixing surface,
A second accommodating portion-side fixing surface that is fixed in contact with the second case-side fixing surface,
Have,
The first case-side fixing surface and the first accommodating portion-side fixing surface that are in contact with each other, and the second case-side fixing surface and the second accommodating portion-side fixing surface that are in contact with each other are in contact with each other in the first direction. The electric actuator according to claim 2 or 3, which is arranged at a different position. The accommodating part
A first fixed portion protruding from the main body of the accommodating portion in one side of the third direction orthogonal to the first direction,
A second fixing portion protruding from the main body of the accommodating portion to the other side in the third direction,
Have,
The surface of the first fixing portion on one side in the first direction is the fixing surface on the side of the first accommodating portion.
The surface of the second fixing portion on one side in the first direction is the fixing surface on the second accommodating portion side.
The distance between the first accommodating portion side fixing surface and the second accommodating portion side fixing surface in the first direction is the distance between the other surface of the first accommodating portion in the first direction and the second fixing portion. The electric actuator according to claim 4, which is different from the distance in the first direction from the surface on the other side in the first direction. The fifth aspect of claim 5, wherein the surface of the first fixing portion on the other side in the first direction and the surface of the second fixing portion on the other side in the first direction are arranged at the same position in the first direction. Electric actuator. The holding member is an elastic body housed in the first recess and in close contact with the sensor body, and holds the sensor body on the inner surface of the first recess, according to any one of claims 1 to 6. The described electric actuator. The electric actuator according to claim 7, wherein the elastic body is made of an adhesive. The electric actuator according to claim 7 or 8, wherein the sensor body is embedded in the holding member. The first rotation sensor serves as the protrusion.
A first protrusion protruding from the sensor body to one side in the second direction,
A second protrusion protruding from the sensor body to the other side in the second direction,
The electric actuator according to any one of claims 1 to 9. The electric actuator according to claim 10, wherein the position of the first protrusion and the position of the second protrusion are different from each other in a direction orthogonal to both the first direction and the second direction. A plurality of the first protrusions and the second protrusions are provided.
The electric actuator according to claim 10 or 11, wherein the interval at which the first protrusions are arranged and the interval at which the second protrusions are arranged are different from each other. The accommodating portion has a second recess that is recessed on one side in the first direction.
The support surface is the bottom surface of the second recess.
The electric actuator according to any one of claims 1 to 12, wherein the protrusion is fitted into the second recess. The sensor body has a plurality of sensor terminals that are electrically connected to the sensor chip.
Any one of claims 1 to 13, wherein the plurality of sensor terminals are arranged side by side in the third direction and are arranged asymmetrically with respect to a virtual line passing through the center of the sensor body in the third direction. The electric actuator described in the section.

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