JP6964715B1 - Waveguide of microwave heating device and microwave heating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a waveguide of a microwave heating device capable of uniformly heating a high microwave absorber and a microwave heating device provided with the waveguide. A microwave heating device comprising a waveguide 10, two microwave emitting modules 20, a transport module 30, and the waveguide 10 forming a traveling wave path and at least one. It has a transport opening pair and at least one waveguide pair, and the transport opening pair has two waveguide openings formed on opposite side walls along the transport direction in the waveguide 10. The pair comprises two waveguides provided in the waveguide 10 as well as on the top and bottom walls of the waveguide 10, and the two microwave emission modules 20 respectively travel in the waveguide 10. Provided at both ends facing each other along the waveguide, the transport module 30 penetrates the transport opening pair in the transport direction. [Selection diagram] Fig. 1

Description

The present invention relates to an apparatus that uses microwaves for heating, and in particular, a waveguide of a microwave heating apparatus capable of uniformly heating both a high microwave absorber and a low microwave absorber. It relates to a microwave heating device.

Microwave heating devices in the prior art can be mainly classified into the following three types.

1. 1. Closed resonance chamber. The principle of this closed resonance chamber is to reduce uneven heating of the object to be heated due to microwave hot spots and cold spots in the resonance chamber by moving or rotating the object to be heated in the closed resonance chamber. To do.

2. Open resonance chamber. The principle of this open resonance chamber is similar to that of a closed resonance chamber, in which the object to be heated is passed through a standing wave hotspot in the chamber by a method of continuously flowing the object to be heated, and the object to be heated is ionized. It is mainly used for the generation of light sources (for example, sulfur lamps) and waste treatment.

3. 3. Traveling wave heater. The principle of this traveling wave heater is to heat the object to be heated with a traveling wave along the microwave transmission path, thereby preventing uneven heating caused by standing wave hot spots and cold spots.

The closed resonance chamber and the open resonance chamber use a standing wave to heat the object to be heated, but the standing wave forms remarkable hot spots and cold spots in the space to make the heated object uniform. Cannot heat. Therefore, in practice, it can only be used in low-priced markets such as dehydration of wood and drying of tobacco.

Since the traveling wave heater does not form conspicuous hot spots and cold spots, when the object to be heated is a low microwave absorber, the traveling wave heater can uniformly heat the object to be heated. However, when the object to be heated is a high microwave absorber, the microwave energy is rapidly absorbed by the object to be heated near the heating source, so that the object to be heated far from the heating source is not sufficiently heated. , The object to be heated is not heated uniformly.

Therefore, there is room for improvement in the microwave heating device in the prior art.

In view of the above-mentioned drawbacks and deficiencies in the prior art, the present invention provides a waveguide of a microwave heating device capable of uniformly heating a high microwave absorber and a microwave heating device provided with the waveguide. The purpose is to do.

The technical means used in the present invention to achieve the above object of the invention relates to a microwave heating device.
The microwave heating device includes a waveguide, two microwave emission modules, and a transfer module.
The waveguide forms a traveling wave path and has at least one heating section, at least one transport aperture pair, and at least one waveguide pair.
The at least one heating section includes a front opening wall, a rear opening wall provided together with the front opening wall at intervals in the transport direction, a front opening wall, and a top wall connected to the rear opening wall. It has a bottom wall that is connected to the front opening wall and the back opening wall and is provided so as to face the top wall.
The at least one transport opening pair has two transport openings formed on the front opening wall and the rear opening wall of the at least one heating section, respectively.
The at least one waveguide pair is provided in the at least one heating section, and the position in the traveling wave path corresponds to the position in the traveling wave path of the at least one transport opening pair, and further. Two waveguides, each made of alumina ceramic, aluminum nitride ceramic, or boron nitride ceramic, connected to the top and bottom walls of the at least one heating section and extending along the traveling wave path, respectively. Prepare,
The two microwave emission modules are provided at both ends facing each other along the traveling wave path of the waveguide.
The transport module penetrates at least one transport opening pair of the waveguide in the transport direction.

In order to achieve the object of the above invention, the present invention further provides a waveguide of the microwave heating device, and the waveguide of the microwave heating device is provided.
It has at least one heating section, at least one transport opening pair, and at least one waveguide pair.
The at least one heating section includes a front opening wall, a rear opening wall provided together with the front opening wall at intervals in the transport direction, a front opening wall, and a top wall connected to the rear opening wall. It has a bottom wall that is connected to the front opening wall and the back opening wall and is provided so as to face the top wall.
The at least one transport opening pair has two elongated transport openings extending along the traveling wave path, the two transport openings being formed in the front opening wall and the rear opening wall of the at least one heating section, respectively. ,
The at least one waveguide pair is provided in the waveguide, and the position of the waveguide in the longitudinal direction corresponds to the position of the at least one transport opening pair in the longitudinal direction of the waveguide. Further, two waveguides made of alumina ceramic, aluminum nitride ceramic, or boron nitride ceramic, all connected to the top and bottom walls of the at least one heating section and extending along the traveling wave path. Has a board.

Further, in the microwave heating device, each transport opening of the waveguide has a top side peripheral edge and a bottom side peripheral edge, and the distance between the top side peripheral edge and the bottom side peripheral edge is the opening width of the transport opening. The widths of the openings at both ends facing each other along the traveling wave path of each of the transport openings are reduced.

Further, in the microwave heating device, each transport opening of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each transport opening are formed on both sides of the center line, respectively. The top peripheral edge of each transport opening extends along the traveling wave path, and two first upper straight lines located on both sides of the top body facing each other along the traveling wave path. Two first lower portions having a bottom side peripheral edge of each of the transport openings, which are located on both sides of the bottom main body extending along the traveling wave path and facing each other along the traveling wave path of the bottom main body. The first upper straight line portion and the first lower straight line portion at either one end of both ends facing the traveling wave path of each of the transport openings extend toward the center line. At the same time, the ends of the first upper straight line portion and the first lower straight line portion are connected to each other.

Further, in the microwave heating device, the top peripheral edge of each transport opening is located between the corresponding first upper straight line portion and the top body portion at both opposite ends of the transport opening. (2) An upper straight portion is further formed, and the bottom peripheral edge of each transport opening is located between the corresponding first lower straight portion and the bottom main body portion at both ends of the transport opening facing each other. 2 The lower straight line portion is further formed, and the angle between the first upper straight line portion and the center line is larger than the angle between the extension line of the second upper straight line portion and the center line, and the first lower straight line portion is formed. The angle between the center line and the center line is larger than the angle between the extension line of the second lower straight line portion and the center line.

Further, in the traveling wave heating device, each transport opening of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each transport opening are formed on both sides of the center line, respectively. , The top peripheral edge of each transport opening extends along the traveling wave path, and two first upper arc lines located on both sides of the top body facing each other along the traveling wave path. Two second portions having a portion and having a bottom side peripheral edge of each of the transport openings located on both sides of the bottom main body portion extending along the traveling wave path and facing each other along the traveling wave path of the bottom main body portion. The first upper arc line portion and the first lower arc line portion at either one end of both ends facing the traveling wave path of each of the transport openings having one lower arc line portion are at the center thereof, respectively. As it extends toward the line, the ends of the first upper arc line portion and the first lower arc line portion are connected to each other.

Further, in the microwave heating device, each transport opening of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each transport opening are formed on both sides of the center line, respectively. The top peripheral edge of each of the transport openings has a top body extending along the traveling wave path and two upper steps located on both sides of the top body facing the traveling wave path, respectively. Then, the bottom peripheral edge of each of the transport openings is located on both sides of the bottom main body, which is provided corresponding to the top main body, and the bottom main body, which are opposed to each other along the traveling wave path. The upper step portion and the lower step portion at either one end of both ends of each of the transport openings facing each other along the traveling wave path extend toward the center line and are above the step portion. The stepped portion and the ends of the lower stepped portion are connected to each other.

Further, in the microwave heating device, the thickness of the plates at both ends of each waveguide of the at least one waveguide pair is reduced.

Further, the microwave heating device has a close contact plane extending along the traveling wave path on the side of each waveguide connected to the waveguide, and on the other side of the waveguide, the said wave guide. A main body surface that extends along the traveling wave path and whose length in the traveling wave path is shorter than the length in the traveling wave path of the close contact plane, and both sides of the main body surface facing each other along the traveling wave path. It has two first slopes that are located and each extend from opposite sides of the main body surface to the close contact plane to form two opposing edges along the traveling wave path of the waveguide.

Further, in the microwave heating device, each waveguide further has two second slopes, each of which is located between one of the first slopes and the main body surface. The degree of inclination of the second slope of each waveguide with respect to the close contact plane is smaller than the degree of inclination of the first slope with respect to the close contact plane.

Further, the microwave heating device has a close contact plane extending along the traveling wave path on the side of each waveguide connected to the waveguide, and on the other side of the waveguide, the said wave guide. A main body surface that extends along the traveling wave path and whose length along the traveling wave path is shorter than the length along the traveling wave path of the close contact plane, and along the traveling wave path of the main body surface, respectively. It is located on both opposite sides and has two arcuate surfaces that extend from the opposite sides of the main body surface to the close contact plane to form two opposite edges along the traveling wave path of the waveguide. ..

Further, the microwave heating device has a close contact plane extending along the traveling wave path on the side of each waveguide connected to the waveguide, and on the other side of the waveguide, the said wave guide. A main body surface that extends along the traveling wave path and whose length in the traveling wave path is shorter than the length in the traveling wave path of the close contact plane, and both sides of the main body surface facing each other along the traveling wave path. It is located and has two stepped surfaces that form two opposite edges along the traveling wave path of the waveguide by extending from both opposite sides of the main body surface to the close contact plane.

Further, the microwave heating device further includes an bleeding module that communicates with the internal space of the waveguide and whose outside is covered with a heating layer.

Further, in the microwave heating device, the bleed air module has a water collecting tank.

Further, the microwave heating device further has at least one microwave isolation module, the microwave isolation module has a base body and a plurality of microwave suppression members, and the base body is the waveguide. The plurality of microwave suppression members are formed on the outer surface of the base body by being connected to the above and forming a passage that surrounds the outside of the transfer module and communicates with one of the transfer openings of the waveguide. Both ends of the pierced, tubular body and the microwave suppression member are an open end projecting out of the base body and a closed end located in the passage, respectively.

Further, in the microwave heating device, the direction of the microwave electric field between the two waveguides of the at least one waveguide pair is parallel to the transport direction.

Further, in the waveguide of the microwave heating device, each transport opening of the waveguide has a top side peripheral edge and a bottom side peripheral edge, and the distance between the top side peripheral edge and the bottom side peripheral edge is the transport. It is defined as the opening width of the opening, and the opening widths at both ends of each transport opening facing each other along the traveling wave path are reduced.

Further, in the waveguide of the microwave heating device, each transport opening of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each transport opening have both sides of the center line, respectively. The top side peripheral edge of each transport opening is located on both sides of the top body portion extending along the traveling wave path and on both sides of the top body portion facing each other along the traveling wave path. 2 which has an upper straight portion, and the bottom peripheral edge of each of the transport openings is located on both sides of the bottom main body extending along the traveling wave path and facing each other along the traveling wave path of the bottom main body. The first upper straight line portion and the first lower straight line portion at any one end of both ends facing the traveling wave path of each of the transport openings, respectively, have the first lower straight line portion. As well as extending toward, the ends of the first upper straight line portion and the first lower straight line portion are connected to each other.

Further, in the waveguide of the microwave heating device, the top peripheral edge of each transport opening is located between the corresponding first upper straight line portion and the top body portion at both opposite ends of the transport opening. A second upper straight line portion located at is further formed, and the bottom peripheral edge of each transport opening is located between the corresponding first lower straight line portion and the bottom main body portion at both opposite ends of the transport opening. A second lower straight line portion located at is further formed, and the angle between the first upper straight line portion and the center line is larger than the angle between the extension line of the second upper straight line portion and the center line, and the first The eclipse angle between the 1 lower straight line portion and the center line is larger than the eclipse angle between the extension line of the second lower straight line portion and the center line.

Further, in the waveguide of the microwave heating device, each transport opening of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each transport opening have the center line, respectively. Two athi. 1 It has an upper arc line portion, and the bottom peripheral edge of each of the transport openings is located on both sides of the bottom main body extending along the traveling wave path and facing each other along the traveling wave path of the bottom main body. The first upper arc line portion and the first lower arc line portion at either one end of both ends facing each other along the traveling wave path of each of the traveling openings have two first lower arc line portions. Each extends toward the center line, and the ends of the first upper arc line portion and the first lower arc line portion are connected to each other.

Further, in the waveguide of the microwave heating device, each transport opening of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each transport opening have the center line, respectively. Two tops formed on both sides, the top peripherals of each transport opening are located on both sides of the top body extending along the traveling wave path and on both sides of the top body facing the traveling wave path, respectively. It has a stepped portion, and the bottom peripheral edge of each of the transport openings is located on both sides of the bottom main body, which is provided corresponding to the top main body, and which faces each other along the traveling wave path of the bottom main body. The upper step portion and the lower step portion at either one end of both ends facing each other along the traveling wave path of each of the transport openings extend toward the center line. At the same time, the ends of the upper step portion and the lower step portion are connected to each other.

Further, in the waveguide of the microwave heating device, the thickness of the plates at both ends of each waveguide of the at least one waveguide pair is reduced.

Further, the waveguide of the microwave heating device has a close contact plane extending along the traveling wave path on the side of each waveguide connected to the waveguide, and the other of the waveguides. On the side, along the traveling waveguide, the main surface whose length in the traveling wave path is shorter than the length in the traveling waveguide of the close contact plane, and along the traveling waveguide of the main body surface, respectively. Two first slopes located on both opposite sides and extending from the opposite sides of the main body surface to the close contact plane to form two opposite edges along the traveling wave path of the waveguide. Have.

Further, in the waveguide of the microwave heating device, each waveguide further has two second slopes, and each of the second slopes is formed by one of the first slopes and the main body surface. Located in between, the degree of inclination of the second slope of each waveguide with respect to the close contact plane is smaller than the degree of inclination of the first slope with respect to the close contact plane.

Further, the waveguide of the microwave heating device has a close contact plane extending along the traveling wave path on the side of each waveguide connected to the waveguide, and the other of the waveguides. On the side, a main body surface that extends along the traveling wave path and whose length along the traveling wave path is shorter than the length along the traveling wave path of the close contact plane, and the traveling wave of the main body surface, respectively. Two located on both sides facing each other along the path and extending from the opposing sides of the main body surface to the close contact plane to form two opposing edges along the traveling wave path of the waveguide. It has an arc surface.

Further, the waveguide of the microwave heating device has a close contact plane extending along the traveling wave path on the side of each waveguide connected to the waveguide, and the other of the waveguides. On the side, along the traveling waveguide, the main surface whose length in the traveling wave path is shorter than the length in the traveling waveguide of the close contact plane, and along the traveling waveguide of the main body surface, respectively. It is located on both opposite sides and has two stepped surfaces that extend from both opposite sides of the main body surface to the close contact plane to form two opposite edges along the traveling wave path of the waveguide. ..

Further, in the waveguide of the microwave heating device, the direction of the microwave electric field between the two waveguides of the at least one waveguide pair is parallel to the transport direction.

The advantages of the present invention are as follows.

First, the object to be heated is conveyed by the transport module, fed into the waveguide, and heated in the waveguide by the microwave emitted by the microwave radiation module. The present invention further improves the uniformity of heating of the high microwave absorber in the waveguide by installing one microwave emission module at each of the opposite ends of the waveguide.

Secondly, by providing the waveguide pair of a dielectric material in the waveguide, it is possible to treat a material having a strong microwave absorption characteristic or a material to be heated having a metal material, and further, the present invention. Expands the range of materials that can be heated. Therefore, conventional microwaves such as circuit boards containing moisture, various electronic products containing metal components, semiconductor wafers containing metal, solar wafers containing metal wires, and clothing containing moisture containing metal parts. It is possible to treat a high unit price object to be heated that could not be treated by the heating device, and the value of the present invention is improved.

It is an external perspective view which shows Embodiment 1 of the microwave heating apparatus of this invention. It is an exploded view of a part part in Embodiment 1 of the microwave heating apparatus of this invention. It is an exploded view of another part part in Embodiment 1 of the microwave heating apparatus of this invention. It is sectional drawing of the partial part in Embodiment 1 of the microwave heating apparatus of this invention. It is sectional drawing of the heating section in Embodiment 1 of the microwave heating apparatus of this invention. It is a front view schematic view of the heating section in Embodiment 1 of the microwave heating apparatus of this invention. It is a front view schematic view of the heating section in Embodiment 2 of the microwave heating apparatus of this invention. It is a partially enlarged view of FIG. It is a front view schematic view of the heating section in Embodiment 3 of the microwave heating apparatus of this invention. It is a front view schematic view of the heating section in Embodiment 4 of the microwave heating apparatus of this invention. It is sectional drawing of the microwave suppression member in Embodiment 1 of the microwave heating apparatus of this invention. It is an external perspective view which shows the waveguide of Embodiment 5 of the microwave heating apparatus of this invention. It is a component exploded view of the waveguide of Embodiment 5 of the microwave heating apparatus of this invention. It is sectional drawing of the waveguide of Embodiment 5 of the microwave heating apparatus of this invention. It is a microwave electric field pattern diagram in the waveguide of FIG. It is a graph which shows the relationship between the reflection coefficient and the frequency of mode conversion impedance matching in the waveguide pair section of the waveguide of this invention. It is a graph which shows the relationship between the transmission coefficient and the frequency of mode conversion impedance matching in the waveguide pair section of the waveguide of this invention.

Hereinafter, the technical means adopted by the present invention to achieve the intended object will be further described with reference to the drawings and preferred embodiments of the present invention.

As shown in FIGS. 1 to 4, the microwave heating device of the present invention includes a waveguide 10, two microwave emission modules 20 and a transfer module 30, and in the present embodiment, the bleeding module 40 and microwaves. An isolation module 50 is further provided.

In the present embodiment, the waveguide 10 is formed by connecting a plurality of heating sections 11 and a plurality of communication sections 12, and the heating sections 11 are arranged in parallel and in order in the transport direction D, and the communication is provided. The section 12 is connected between the heating sections 11. The heating section 11 in the present embodiment is a straight pipe, the communication section 12 is a curved pipe, and the waveguide 10 is formed into a substantially S-shaped tube by the heating section 11 and the communication section 12. The waveguide 10 is formed in an S-shaped traveling wave path as well as being formed. The waveguide 10 may be a tube in which openings at both ends communicate with each other. For example, the waveguide 10 is a straight tube. May be only the heating section 11 of

から最小値

を減じ、平均値

で除した値を均一度と定義する。即ち、均一度（％）は以下のとおりである。 The two microwave emitting modules 20 are provided at both ends of the waveguide 10 facing each other along the traveling wave path of the waveguide 10, and the waveguides 10 are micros emitted from the respective microwave emitting modules 20. Waves are transmitted from one end of the waveguide 10 to the other end of the waveguide 10 along the traveling wave path, respectively. As a result, the object to be heated (not shown) in the waveguide 10 receives the heating power of the microwave emission module 20 received by each object to be heated because the distance from one of the microwave emission modules 20 is different. Even if there is a difference, the difference can be complemented with the other microwave emitting module 20, so that the total heating power received by each object to be heated can be made more uniform. Specifically, the percentage of microwave energy absorbed by the material to be heated is defined as usage efficiency (%), and the maximum value at which the object to be heated absorbs microwave energy along the traveling wave path.

From the minimum value

Mind and average

The value divided by is defined as uniformity. That is, the uniformity (%) is as follows.

As can be seen from the calculation results in Table 1, when the usage efficiency is the same, the uniformity of heating can be significantly improved by using the two microwave emission modules 20.

Table 1: Relationship between uniformity and usage efficiency when there is one microwave emission module 20 and when there are two microwave emission modules 20

In the present embodiment, the microwave emitting module 20 emits a microwave having a frequency of 2450 megahertz toward the waveguide 10, and the cross-sectional shape of the waveguide 10 is adjusted to the microwave having the frequency. , The WR340 rectangular section defined by the Electronic Industries Alliance (EIA) is adopted, and this section _{can work microwaves in TE 10} mode, thus reducing complexity. However, the frequency of the microwave emitted by the microwave emission module 20 is not limited to 2450 MHz.

Further, each of the microwave emission modules 20 in the present embodiment includes a microwave source 21, a circulator 22, a directional coupler 23, and a water loader 24. The microwave source 21 and the directional coupler 23 are located at both ends of the microwave emission module 20, respectively, and the circulator 22 is connected to the microwave source 21 and the directional coupler 23 to load the water. The vessel 24 is connected to one side surface of the circulator 22, and the directional coupler 23 is connected to one end of the waveguide 10. The circulator 22 can control the microwaves to be transmitted in a specific direction by utilizing the magnetic rotation phenomenon, and can further protect the microwave source 21. The directional coupler 23 measures the microwave power transmitted by the microwave emitting module 20 to the waveguide 10 and the microwave power transmitted by the waveguide 10 to the microwave emitting module 20. Can be done.

As shown in FIGS. 3, 5 and 6, each of the heating sections 11 of the waveguide 10 is formed with a transport opening pair 13, and each transport opening pair 13 is along a traveling wave path. It has two transport openings 131 that extend, and the two transport openings 131 are formed on two side walls that face each other along the transport direction D of the corresponding heating section 11. Specifically, each heating section 11 of the waveguide 10 has a front opening wall 111, a back opening wall 112, a top wall 113 and a bottom wall 114, and the front opening wall 111 and the back opening wall 112 are The top wall 113 and the bottom wall 114 are both connected to the front opening wall 111 and the rear opening wall 112, and are provided so as to face each other. The two transport openings 131 of the transport openings pair 13 of each heating section 11 are formed on the front opening wall 111 and the rear opening wall 112 of the heating section 11, respectively.

The transport module 30 penetrates each transport opening pair 13 of the waveguide 10 in the transport direction D. The transfer module 30 is preferably a transfer belt, and the object to be heated is sequentially passed from the transfer opening pair 13 to each heating section 11 of the waveguide 10 along the transfer direction D, and the object to be heated is transferred. In the process of passing through the heating section 11, the microwave energy emitted from the microwave emitting module 20 is absorbed and heated.

In the present embodiment, each of the waveguide openings 131 of the waveguide 10 has a center line 1311, a top side peripheral edge 1312, and a bottom side peripheral edge 1313, and the top side peripheral edge 1312 and the bottom side peripheral edge 1313, respectively. The distance between the top side peripheral edge 1312 and the bottom side peripheral edge 1313 formed on both sides of the center line 1311 is defined as the opening width of the transport opening 131, and faces each other along the traveling waveguide of the transport opening 131. By reducing the opening widths at both ends, the effect of impedance matching in the transmission path of the microwave in the waveguide 10 is improved, and the object to be heated in the waveguide 10 is heated more uniformly. ..

The specific shapes of the opposite ends of each of the transport openings 131 are as follows. The top peripheral edge 1312 of each of the transport openings 131 has a top body 61 extending along the traveling wave path and two superior contractions connected to both sides of the top body 61 facing each other along the traveling wave path. Have. The bottom peripheral edge 1313 of each of the transport openings 131 includes a bottom main body 62 extending along the traveling wave path and two lower contraction portions located on both sides of the bottom main body 62 facing each other along the traveling wave path. Has. The upper contraction portion and the lower contraction portion at either end of both ends facing each other along the traveling wave path of each of the transport openings 131 extend toward the corresponding center line 1311 and the upper contraction portion, respectively. The mouth portion and the ends of the lower contraction portion are connected to each other, and the upper contraction portion and the lower contraction portion form an end portion of the transport opening 131. In order to further adjust the impedance matching, the shape of the upper contraction portion and the lower contraction portion may be one of the following four types.

1. 1. Linear gradient: Each of the contracted portions (that is, the upper contracted portion and the lower contracted portion) is a straight line. That is, each of the upper contraction portions is the first upper straight portion 63, and each of the lower contraction portions is the first lower straight portion 64.

2. Polygonal structure: Each of the contracted portions (that is, the upper contracted portion and the lower contracted portion) has two or more straight portions connected to each other. For example, in the second embodiment of the present invention (shown in FIGS. 7 and 8), each upper contraction portion has a first upper straight line portion 63A and a second upper straight line portion 65A, and the second upper straight line portion 65A. The portion 65A is located between the corresponding first upper straight portion 63A and the top main body portion 61A, and the angle θ ₁ between the first upper straight portion 63A and the center line 1311A is the second upper straight portion. The width angle between the extension line of 65A and the center line 1311A _{is larger than θ 2} , and each lower contraction portion has a first lower straight line portion 64A and a second lower straight line portion 66A, and the second lower straight line portion 66A. The portion 66A is located between the corresponding first lower straight line portion 64A and the bottom main body portion 62A, and the angle between the first lower straight line portion 64A and the center line 1311A is the second lower straight line portion 66A. It is larger than the angle between the extension line of the above and the center line 1311A. Here, the ends of the first upper straight line portion 63A and the second upper straight line portion 65A are connected to each other so as to extend toward the center line 1311A. The length of each straight portion and the angle with respect to the center line 1311A in the present embodiment can be designed based on the theory of the Chebyshev Multi-section Matching Transformer, thereby increasing the size of the system. On the premise of reducing the size, the optimum matching effect is obtained within the frequency band used.

3. 3. Curvature gradient: Each of the contracted portions (that is, the upper contracted portion and the lower contracted portion) is an arc. For example, in the third embodiment (shown in FIG. 9) of the present invention, each upper contraction portion is the first upper arc line portion 63B, and the first upper arc line portion 63B is outside the transport opening 131B. It is preferable that each of the lower contracted openings is a first lower arc line portion 64B, and the first lower arc line portion 64B protrudes to the outside of the transport opening 131B.

4. Step structure: Each of the contracted portions (that is, the upper contracted portion and the lower contracted portion) has a stepped shape. For example, in the fourth embodiment of the present invention (shown in FIG. 10), each upper contraction portion is an upper step portion 63C, each lower contraction portion is a lower step portion 64C, and the upper step portion 63C. The distance between the lower step portion 64C and the lower step portion 64C decreases in the direction away from the center of the transport opening 131C. Each of the stepped portions in the present embodiment forms a plurality of right-angled portions, but each of the stepped portions may form only one right-angled portion. Each step portion can be designed based on the theory of the Chebyshev impedance matching converter, and an optimum matching effect can be obtained within the frequency band used on the premise that the size of the system is reduced.

In each of the above embodiments, the shapes and positions of the upper contracted portion and the lower contracted portion of each of the transport openings 131 are symmetrical with each other, but the present invention is not limited thereto.

As shown in FIGS. 3, 5 and 6, in the first embodiment of the present invention, the waveguide 10 further has a plurality of waveguide pairs 14, and the plurality of waveguide pairs 14 are further provided. , Each of which is provided in each of the heating sections 11, that is, the waveguide pair 14 is provided correspondingly to each of the transport opening pairs 13. The positions of each waveguide pair 14 in the traveling wave path correspond to the positions of the transport opening pairs 13 in the same heating section 11 in the traveling wave path. Each waveguide pair 14 is connected to the top wall 113 and the bottom wall 114 of the heating section 11, respectively, and includes two waveguides 141 extending along the traveling wave path. The material of the waveguide 141 is a dielectric material and is preferably alumina ceramic, but is not limited to this, and is an aluminum nitride ceramic or a boron nitride ceramic having better thermal conductivity than the alumina ceramic. May be good. The waveguide pair 14 can adjust the traveling wave mode of the microwave in the waveguide ₁₀ to convert from the original basic mode TE 10 to a specific higher order mode, thereby having the following effects: To get.

1. 1. Even when the object to be heated has strong microwave absorption characteristics, the waveguide pair 14 can uniformly heat the object to be heated.

2. In a conventional waveguide, if there is a metal object inside, all the microwaves in the waveguide are reflected by the metal object and returned to the firing end (that is, the resistance is invalid), and the heated object containing the metal is removed. Could not heat. However, in the object to be heated inside the waveguide 10 of the present embodiment, even if a metal object is mixed, the microwave can bypass the metal object as usual and uniformly heat the heated object.

In the present invention, by providing the waveguide pair 14, it is possible to treat a material having strong microwave absorption characteristics and a material to be heated having a metal material, and further, the range of materials that can be heated by the present invention. Expands. Therefore, conventional microwaves such as circuit boards containing moisture, various electronic products containing metal components, semiconductor wafers containing metal, solar wafers containing metal wires, and clothing containing moisture containing metal parts. It is possible to treat a high unit price object to be heated that could not be treated by the heating device, and the value of the present invention is improved.

In the present embodiment, the positions of the waveguide pair 14 and the transfer opening pair 13 correspond to each other. Specifically, the mass center of each waveguide 141 in each heating section 11 and each of the waveguide openings 141. The shape centers of the transfer openings 131 are all located on the same plane, but the position is not limited to this, and the position of the waveguide 141 and the position of the transfer opening 131 are substantially the same, and the waveguide plate is located. It suffices that 141 can adjust the impedance matching of the waveguide 10 and can uniformly heat the object to be heated passing through the waveguide 10.

であり、マイクロ波の進行方向に沿って、単位距離内で材料がエネルギーを吸収する大きさは、

である。ここで、

は初期入射エネルギーであり、

は減衰係数であり、

値は、材料の誘電率および誘電損失だけでなく、進行波の周波数および使用されるモードによっても決定される。 Specifically, it is a traveling wave heating method, and the magnitude of the microwave energy in the heating material in the traveling direction is

And the magnitude of the material absorbing energy within a unit distance along the direction of microwave travel is

Is. here,

Is the initial incident energy,

Is the damping coefficient

The value is determined not only by the dielectric constant and dielectric loss of the material, but also by the frequency of the traveling wave and the mode used.

As shown in FIGS. 5, 15 and 16, by adding the waveguide pair 14 made of a dielectric material into the waveguide 10, the waveguide pair 14 is set to the traveling wave mode. The original basic mode TE ₁₀ is converted into a parallel electric field mode of one higher order mode in the TE mode, and in the parallel electric field mode, the waveguide electric field direction is parallel to the transport direction D. Specifically, the traveling wave mode between the two waveguides 141 of the waveguide pair 14 _{is completely converted from the basic mode TE 10} to the TE mode shown in FIG. 15, and the corresponding impedance matching reflection S11 The relationship diagram between the parameter (that is, the reflection coefficient) and the frequency is as shown in FIG. The unit on the horizontal axis of FIG. 16 is gigahertz (Ghz), and the unit on the vertical axis is dB. Further, as shown in FIG. 17, in the relationship diagram between the transmission S21 parameter (that is, the transmission coefficient) of impedance matching corresponding to the conversion from _{the basic mode TE 10 to the TE mode of FIG. 15 and the frequency, any of them will occur in all frequency bands.} Is also 0 dB.

The advantage of converting the traveling wave mode from the original basic mode TE ₁₀ to the parallel electric field mode is that the attenuation coefficient can be adjusted, so that the waveguide plate has strong microwave absorption characteristics of the object to be heated. The pair 14 is capable of uniformly heating the object to be heated, and can improve the problem that the conventional microwave heating device can heat only both ends and the front edge of the object to be heated, and the parallel electric field mode can be used. Since the microwave can bypass the metal object, even if the metal object is mixed with the object to be heated, the microwave can bypass the metal object and uniformly heat the object to be heated as usual.

Further, by reducing the thickness of the plate bodies at both ends of the waveguides 141 facing each other in the present embodiment in a direction away from the center of the waveguides 141, impedance matching is further improved, and impedance matching is further performed. In order to adjust, the thickness of the plate bodies at both ends of the waveguide 141 facing each other changes in the following four types, such as the facing ends of the transport opening 131.

1. 1. Linear gradient: The specific shapes of the opposite ends of each waveguide 141 are as follows (as shown in FIG. 6). That is, the side of the waveguide 141 connected to the waveguide 10 has a close contact plane 71 extending along the traveling wave path, and the other side of the waveguide 141 is along the traveling wave path. By extending and extending from the main body surface 72 whose length along the traveling wave path is shorter than the length along the traveling wave path of the close contact plane 71 and from both opposite sides of the main body surface 72 to the close contact plane 71, respectively. It has two first slopes 73 that form two opposite edges along the traveling wave path of the waveguide 141. In the present embodiment, the shape of the waveguide 141 when viewed from the transport direction D is an isosceles trapezoid.

2. Polygonal structure: As shown in FIGS. 7 and 8, in the second embodiment of the present invention, the structure of the waveguide 141A having a polygonal structure at both ends and the structure of the waveguide 141 having slanted linearity at both ends are substantially the same. It is the same, and the differences are as follows. That is, the waveguide 141A further has two second slopes 74A, and each of the second slopes 74A is located between one of the first slopes 73A and the main body surface 72A, and the close contact plane. The inclination of the second slope 74A of each waveguide 141A with respect to 71A is smaller than the inclination of the first slope 73A with respect to the contact plane 71A, that is, the normal line of the second slope 74A and the contact plane 71A. The angle θ ₃ with the normal line of the above is smaller than _{the angle θ 4} between the normal line of the first slope 73A and the normal line of the close contact plane 71A. Further, in another preferred embodiment, a plurality of slopes having different degrees of inclination are connected between the first slope 73A and the main body surface 72A, and a plurality of slopes having different degrees of inclination are connected to the edge of the waveguide 141A of the present embodiment. Corners may be formed. In addition, the dimensions of each slope can be designed based on the theory of the Chebyshev impedance matching transducer, thereby obtaining the optimum matching effect.

3. 3. Curvature gradient: As shown in FIG. 9, in the third embodiment of the present invention, the structure of the waveguide 141B in which the curvature at both ends gradually changes and the structure of the waveguide 141 in which the alignment at both ends gradually changes are substantially the same. It is the same, and the differences are as follows. That is, the two arcuate surfaces 73B are located on both sides facing each other along the traveling wave path of the main body surface 72B, and the two arcuate surfaces 73B extend from both opposite sides of the main body surface 72B to the close contact plane 71B, respectively. , Two opposite edges are formed along the traveling wave path of the waveguide 141B. The arcuate surface 73B preferably protrudes toward the outside of the waveguide 141B.

4. Step structure: As shown in FIG. 10, in the fourth embodiment of the present invention, the structure of the waveguide 141C in which the step structure at both ends gradually changes and the structure of the waveguide 141 in which the alignment at both ends gradually changes. Are almost the same, and the differences are as follows. That is, the two stepped surfaces 73C are located on both sides facing each other along the traveling wave path of the main body surface 72C, and the two stepped surfaces 73C extend from both opposite sides of the main body surface 72C to the close contact plane 71C, respectively. , Two opposite edges are formed along the traveling wave path of the waveguide 141C. Each of the stepped surfaces 73C in the present embodiment forms a plurality of right-angled portions, but each of the stepped surfaces 73C may form only one right-angled portion. The dimensions of each stepped surface 73C can be designed based on the theory of the Chebyshev impedance matching transducer, thereby obtaining the optimum matching effect.

As shown in FIGS. 1, 2 and 5, the bleeding module 40 communicates with the internal space of the waveguide 10 and removes water vapor released by heating a moist object to be heated. The pipe unit 41, the heating layer 42, and the water collecting tank 43 are provided, and the pipe unit 41 is provided above the waveguide 10 and communicates with the internal space of the waveguide 10, and the heating layer 42 is provided. By covering the outside of the pipe unit 41, it is possible to prevent water vapor from condensing and flowing back into the waveguide 10, and the water collecting tank 43 is connected to the waveguide 10 in the pipe unit 41. Is connected to the opposite end to collect the moisture formed by the condensation of water vapor from the waveguide 10.

As shown in FIGS. 1, 5 and 11, the microwave isolation module 50 has two base bodies 51, a plurality of microwave suppression members 52 and a plurality of isolation flanges 53, and the two base bodies 51. Are connected to the heating sections 11 on both sides facing each other along the transport direction D of the waveguide 10 and form a passage 511, which surrounds the outside of the transport module 30 and mutually. It communicates with the outward-facing transport opening 131 of the connected heating section 11. The microwave suppression member 52 is bored on the upper surface of the base body 51, each microwave suppression member 52 is a tube body, and both ends of the microwave suppression member 52 are of the base body 51, respectively. It has an open end 522 protruding from the upper surface and a closed end 521 located in the passage 511. The microwave suppression member 52 can limit the transmission of microwaves in the passage 511, and can prevent the microwaves of the waveguide 10 from leaking to the outside from the transport opening 131. The microwave suppression member 52 is not limited to being bored on the upper surface of the base body 51, and may be bored on any outer surface of the base body 51. The plurality of isolation flanges 53 are each connected between the two adjacent heating sections 11, and the two opposing openings of the isolation flange 53 are the transfer openings 131 facing each other of the two heating sections 11. To prevent microwaves from leaking.

Finally, as shown in FIGS. 12 to 14, in the fifth embodiment of the present invention, the waveguide 10D is a linear tube in which two block bodies 15D are combined, and both ends thereof are described above. It is a mounting end portion 16D to which the microwave emission module 20 is mounted, and the waveguide 10D is provided with a waveguide pair 14D having a polygonal structure, and each waveguide 141D of the waveguide pair 14D is a first. It has one slope 73D and a second slope 74D. The outer peripheral edge of each transport opening 131D projects further outward to form a guide ring wall 17D, and the guide ring wall 17D surrounds the transport opening 131D and has a shielding surface 171D that shields both ends of the transport opening 131D. It is formed, thereby reducing microwave leakage.

As shown in FIGS. 1 and 5, in the present invention, the object to be heated is placed at one end of the waveguide module 30 at the time of use, and the transfer module 30 moves the object to be heated along the waveguide direction D to be heated. An object is sent into the waveguide 10 through the transport opening 131, and the object to be heated absorbs microwave energy in the waveguide 10 to heat the object. In the present invention, when the object to be heated containing moisture is heated and dehydrated, the bleed air module 40 takes out the water vapor released from the object to be heated and stores it in the water collecting tank 43.

As described above, in the present invention, by installing one microwave emission module 20 at each opposite end of the waveguide 10, the uniformity of heating of the high microwave absorber in the waveguide 10 It is possible to heat-treat a high-priced object to be heated.

The above description is merely a preferred embodiment of the present invention and does not impose any formal limitation on the present invention. Although the present invention is disclosed as described above by a preferred embodiment, it is not intended to limit the present invention and is disclosed above to the extent that all skilled workers do not deviate from the technical concept of the present invention. Equivalent embodiments modified and modified using the technical contents and which do not deviate from the contents of the technical concept of the present invention were carried out for the above embodiments based on the technical essence of the present invention. Any simple modifications, equivalent changes and modifications are still within the technical concept of the present invention.

10 Waveguide 11 Heating section 111 Front opening wall 112 Rear opening wall 113 Top wall 114 Bottom wall 12 Communication section 13 Transport opening pair 131 Transport opening 1311 Center line 1312 Top side peripheral edge 1313 Bottom side peripheral edge 61 Top body 62 Bottom body 63 1st upper straight part 64 1st lower straight part 14 Waveguide plate pair 141 Waveguide plate 71 Adhesion plane 72 Main body surface 73 1st slope 20 Microwave emission module 21 Microwave source 22 Circulator 23 Directional coupler 24 Water loader 30 Conveyance module 40 Air extraction module 41 Pipe unit 42 Heating layer 43 Water collection tank 50 Isolation module 51 Base body 511 Passage 52 Waveguide suppression member 521 Closed end 522 Open end 53 Isolation flange D Conveyance direction 131C Conveyance opening 1311A Center line 61A Top body Part 62A Bottom main body 63A 1st upper straight part 64A 1st lower straight part 65A 2nd upper straight part 66A 2nd lower straight part 141A Waveguide plate 71A Adhesion plane 72A Main body surface 73A 1st slope 74A 2nd slope 131B Conveyance opening 63B 1st upper arc line part 64B 1st lower arc line part 141B Waveguide plate 71B Adhesion plane 72B Main body surface 73B Arc surface 63C Upper step part 64C Lower step part 141C Waveguide plate 71C Adhesion plane 72C Main body surface 73C Step surface 10D Waveguide 131D Guided opening 14D Waveguide vs. 141D Waveguide 73D First slope 74D Second slope 15D Block 16D Mounting end 17D Guide ring wall 171D Shielding surface θ ₁ Waveguide θ ₂ Waveguide θ ₃ Waveguide θ ₄ Waveguide

Claims (27)

It is equipped with a waveguide (10, 10D) , two microwave emission modules (20), and a transfer module (30) .
The waveguides (10, 10D) form a traveling wave path, with at least one heating section (11) , at least one transport opening pair (13) , and at least one waveguide pair (14, 14D)
Wherein the at least one heating section (11), before and aperture wall (111), a front aperture wall (111) with the rear aperture wall provided at intervals in the conveying direction (112), front aperture wall ( The top wall (113) connected to the 111) and the rear opening wall (112) , connected to the front opening wall (111) and the rear opening wall (112) , and opposed to the top wall (113). Has a bottom wall (114) provided to
The at least one transport opening pair (13) has two transport openings (131, 131B, 131C ) formed in the front opening wall (111) and the rear opening wall (112) of the at least one heating section (11), respectively. , 131D)
The at least one waveguide pair (14, 14D) is provided in the at least one heating section (11) , and the position in the traveling wave path is the said of the at least one transport opening pair (13) . Corresponding to the position in the traveling wave path, further connected to the top wall (113) and bottom wall (114) of the at least one heating section (11) and extending along the traveling wave path, both of which are alumina. With two waveguides (141, 141A, 141B, 141C, 141D) made of ceramic, aluminum nitride ceramic, or boron nitride ceramic .
The two microwave emission modules (20) are provided at both ends facing each other along the traveling wave path of the waveguide.
The microwave heating device is characterized in that the transfer module (30) penetrates at least one transfer opening pair (13) of the waveguide (10, 10D) in the transfer direction (D).
Each transport opening of the waveguide has a top-side peripheral edge and a bottom-side peripheral edge, and the distance between the top-side peripheral edge and the bottom-side peripheral edge is defined as the opening width of the transport opening, and the distance between the top-side peripheral edges and the bottom-side peripheral edge is defined as the opening width of the transport openings. The microwave heating device according to claim 1, wherein the opening widths at both ends facing each other along the traveling wave path are reduced. Each transport opening of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each transport opening are formed on both sides of the center line, respectively.
The top peripheral edge of each transport opening extends along the traveling wave path, and two first upper straight portions located on both sides of the top body facing each other along the traveling wave path. Have and
The bottom side peripheral edge of each transport opening has a bottom main body extending along the traveling wave path and two first lower straight lines located on both sides of the bottom main body facing each other along the traveling wave path. Have and
The first upper straight line portion and the first lower straight line portion at either one end of both ends facing the traveling wave path of each of the transport openings extend toward the center line and the first upper straight portion, respectively. The traveling wave heating device according to claim 2, wherein the straight portion and the ends of the first lower straight portion are connected to each other. The top peripheral edge of each transport opening is further formed with a second upper straight portion located between the corresponding first upper straight portion and the top main body portion at both opposite ends of the transport opening.
On the bottom peripheral edge of each transport opening, a second lower straight portion located between the corresponding first lower straight portion and the bottom main body portion is further formed at both ends of the transport opening facing each other.
The angle between the first upper straight line portion and the center line is larger than the angle between the extension line of the second upper straight line portion and the center line.
The microwave heating apparatus according to claim 3, wherein the angle between the first lower straight line portion and the center line is larger than the angle between the extension line of the second lower straight line portion and the center line. .. Each of the waveguide openings of the waveguide has a center line, and the top edge and the bottom edge of each of the waveguides are formed on both sides of the center line, respectively.
The top peripheral edge of each of the transport openings extends along the traveling wave path, and two first upper arc lines located on both sides of the top body facing each other along the traveling wave path. Have,
The bottom side peripheral edge of each of the transport openings extends along the traveling wave path, and two first lower arc line portions located on both sides of the bottom body portion facing each other along the traveling wave path. Have,
The first upper arc line portion and the first lower arc line portion at either one end of both ends facing the traveling wave path of each of the transport openings extend toward the center line and the first 1 The microwave heating device according to claim 2, wherein the upper arc line portion and the ends of the first lower arc line portion are connected to each other. Each of the waveguide openings of the waveguide has a center line, and the top edge and the bottom edge of each of the waveguides are formed on both sides of the center line, respectively.
The top peripheral edge of each transport opening has a top body extending along the traveling wave path and two upper steps located on both sides of the top body facing the traveling wave path, respectively. ,
The bottom peripheral edge of each of the transport openings is a bottom main body provided corresponding to the top main body, and two lower step portions located on both sides of the bottom main body facing each other along the traveling wave path. Have,
The upper step portion and the lower step portion at either end of both ends facing the traveling wave path of each of the transport openings extend toward the center line, and the upper step portion and the lower step portion, respectively. The microwave heating device according to claim 2, wherein the ends of the portions are connected to each other. The microwave heating apparatus according to claim 1, wherein the thickness of the plates at both ends of the respective waveguides of the at least one waveguide pair is reduced. Each waveguide has a close contact plane extending along the traveling wave path on the side connected to the waveguide, and extends along the traveling wave path on the other side of the waveguide. The main body surface whose length in the traveling wave path is shorter than the length in the traveling wave path of the close contact plane is located on both sides of the main body surface facing each other along the traveling wave path, and the main body surfaces are opposed to each other. 7. The seventh aspect of the invention, wherein the waveguide has two first slopes that form two opposite edges along the traveling wave path of the waveguide by extending from both sides to the close contact plane. Microwave heating device. Each waveguide further comprises two second slopes, each of which is located between one of the first slopes and the body surface.
The microwave heating device according to claim 8, wherein the inclination of the second slope of each waveguide with respect to the close contact plane is smaller than the inclination of the first slope with respect to the close contact plane. Each waveguide has a close contact plane extending along the traveling wave path on the side connected to the waveguide, and extends along the traveling wave path on the other side of the waveguide. The main body surface having a length along the traveling wave path shorter than the length along the traveling wave path of the close contact plane is located on both sides of the main body surface facing each other along the traveling wave path. 7. Claim 7 is characterized by having two arcuate surfaces that form two opposite edges along the traveling wave path of the waveguide by extending from both opposite sides of the main body surface to the close contact plane. The waveguide described in. Each waveguide has a close contact plane extending along the traveling wave path on the side connected to the waveguide, and extends along the traveling wave path on the other side of the waveguide. The main body surface whose length in the traveling wave path is shorter than the length in the traveling wave path of the close contact plane is located on both sides of the main body surface facing each other along the traveling wave path, and the main body surfaces are opposed to each other. The micro according to claim 7, wherein the director has two stepped surfaces that form two opposite edges along the traveling wave path of the waveguide by extending from both sides to the contact plane. Waveguide. The microwave heating device according to any one of claims 1 to 11, further comprising an bleeding module whose outside is covered with a heating layer while communicating with the internal space of the waveguide. The microwave heating device according to claim 12, wherein the bleed air module has a water collecting tank. It further comprises at least one microwave isolation module, the microwave isolation module having a base body and a plurality of microwave suppression members.
The base body is connected to the waveguide and forms a passage that surrounds the outside of the waveguide and communicates with one of the transport openings of the waveguide.
The plurality of microwave suppression members are bored on the outer surface of the base body and are tubular bodies, and both ends of the microwave suppression member are an open end projecting to the outside of the base body and the said. The microwave heating device according to any one of claims 1 to 11, wherein the microwave heating device has a closed end located in a passage. The microwave according to any one of claims 1 to 11, wherein the microwave electric field direction between the two waveguides of the at least one waveguide pair is parallel to the transport direction. Heating device. It has at least one heating section (11) , at least one transport opening pair (13) , and at least one waveguide pair (14, 14D) .
Wherein the at least one heating section (11), before and aperture wall (111), a front aperture wall (111) behind spaced apart in the conveying direction (D) an opening wall (112), front a top wall (113) connected to the aperture wall (111) and rear filter aperture wall (112) is connected to the front aperture wall (111) and rear filter aperture wall (112), said top wall (113 ), And has a bottom wall (114) provided so as to face the
The at least one transport opening pair (13) has two elongated transport openings (131, 131B, 131C, 131D) extending along the traveling wave path, and the two transport openings (131, 131B, 131C, 131D). ) Are formed on the front opening wall (111) and the back opening wall (112) of the at least one heating section (11), respectively.
The at least one waveguide pair (14, 14D) is provided in the waveguide (10, 10D) , and the position of the waveguide (10, 10D) in the longitudinal direction is the at least one transport. Corresponds to the longitudinal position of the waveguide (10, 10D) of the aperture pair (13) and is further connected to the top wall (113) and bottom wall (114) of the at least one heating section (11). It is characterized by having two waveguides (141, 141A, 141B, 141C, 141D) , each of which is made of alumina ceramic, aluminum nitride ceramic, or boron nitride ceramic, which extends along the traveling wave path. The waveguide of the microwave heating device.
Each transport opening of the waveguide has a top-side peripheral edge and a bottom-side peripheral edge, and the distance between the top-side peripheral edge and the bottom-side peripheral edge is defined as the opening width of the transport opening, and the distance between the top-side peripheral edges and the bottom-side peripheral edge is defined as the opening width of the transport openings. The waveguide of the microwave heating device according to claim 16, wherein the opening widths at both ends facing each other along the traveling wave path are reduced. Each transport opening of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each transport opening are formed on both sides of the center line, respectively.
The top peripheral edge of each transport opening extends along the traveling wave path, and two first upper straight portions located on both sides of the top body facing each other along the traveling wave path. Have and
The bottom side peripheral edge of each transport opening has a bottom main body extending along the traveling wave path and two first lower straight lines located on both sides of the bottom main body facing each other along the traveling wave path. Have and
The first upper straight line portion and the first lower straight line portion at either one end of both ends facing the traveling wave path of each of the transport openings extend toward the center line and the first upper straight portion, respectively. The waveguide of the traveling wave heating device according to claim 17, wherein the straight portion and the ends of the first lower straight portion are connected to each other. The top peripheral edge of each transport opening is further formed with a second upper straight portion located between the corresponding first upper straight portion and the top main body portion at both opposite ends of the transport opening.
On the bottom peripheral edge of each transport opening, a second lower straight portion located between the corresponding first lower straight portion and the bottom main body portion is further formed at both ends of the transport opening facing each other.
The angle between the first upper straight line portion and the center line is larger than the angle between the extension line of the second upper straight line portion and the center line.
The microwave heating apparatus according to claim 18, wherein the angle between the first lower straight line portion and the center line is larger than the angle between the extension line of the second lower straight line portion and the center line. Waveguide. Each of the waveguide openings of the waveguide has a center line, and the top edge and the bottom edge of each of the waveguides are formed on both sides of the center line, respectively.
The top peripheral edge of each of the transport openings extends along the traveling wave path, and two first upper arc lines located on both sides of the top body facing each other along the traveling wave path. Have,
The bottom side peripheral edge of each of the transport openings extends along the traveling wave path, and two first lower arc line portions located on both sides of the bottom body portion facing each other along the traveling wave path. Have,
The first upper arc line portion and the first lower arc line portion at either one end of both ends facing the traveling wave path of each of the transport openings extend toward the center line and the first 1. The waveguide of the microwave heating device according to claim 17, wherein the upper arc line portion and the ends of the first lower arc line portion are connected to each other. Each of the waveguide openings of the waveguide has a center line, and the top edge and the bottom edge of each of the waveguides are formed on both sides of the center line, respectively.
The top peripheral edge of each transport opening has a top body extending along the traveling wave path and two upper steps located on both sides of the top body facing the traveling wave path, respectively. ,
The bottom peripheral edge of each of the transport openings is a bottom main body provided corresponding to the top main body, and two lower step portions located on both sides of the bottom main body facing each other along the traveling wave path. Have,
The upper step portion and the lower step portion at either end of both ends facing the traveling wave path of each of the transport openings extend toward the center line, and the upper step portion and the lower step portion, respectively. The waveguide of the microwave heating device according to claim 17, wherein the ends of the portions are connected to each other. The waveguide of a microwave heating device according to claim 16, wherein the thickness of the plates at both ends of the respective waveguides of the at least one waveguide pair is reduced. Each waveguide has a close contact plane extending along the traveling wave path on the side connected to the waveguide, and extends along the traveling wave path on the other side of the waveguide. The main body surface whose length in the traveling wave path is shorter than the length in the traveling wave path of the close contact plane is located on both sides of the main body surface facing each other along the traveling wave path, and the main body surfaces are opposed to each other. 22. Waveguide for microwave heating equipment. Each waveguide further comprises two second slopes, each of which is located between one of the first slopes and the body surface.
23. The induction of the microwave heating device according to claim 23, wherein the inclination of the second slope of each waveguide with respect to the close contact plane is smaller than the inclination of the first slope with respect to the close contact plane. Waveguide. Each waveguide has a close contact plane extending along the traveling wave path on the side connected to the waveguide, and extends along the traveling wave path on the other side of the waveguide. The main body surface having a length along the traveling wave path shorter than the length along the traveling wave path of the close contact plane is located on both sides of the main body surface facing each other along the traveling wave path. 22. The waveguide of the microwave heating device according to. Each waveguide has a close contact plane extending along the traveling wave path on the side connected to the waveguide, and extends along the traveling wave path on the other side of the waveguide. The main body surface whose length in the traveling wave path is shorter than the length in the traveling wave path of the close contact plane is located on both sides of the main body surface facing each other along the traveling wave path, and the main body surfaces are opposed to each other. 22. The micro according to claim 22, wherein the director has two stepped surfaces that form two opposite edges along the traveling wave path of the waveguide by extending from both sides to the contact plane. Waveguide for wave heating equipment. The microwave according to any one of claims 17 to 26, wherein the direction of the microwave electric field between the two waveguides of the at least one waveguide pair is parallel to the transport direction. Waveguide of the heating device.

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