JP6876207B1 - Inspection equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device suitable for three-dimensional analysis capable of accurately detecting minute irregularities on a surface. SOLUTION: A first fiber optic plate 20 having a light source 10 that emits light having different wavelengths, a plurality of optical fibers in which light emitted from the light source 10 is incident on the core and travels in the core, and a first fiber. A fiber optic plate having an optical member 40 in which light emitted from the core of the optic plate 20 is incident on the normal line of the incident surface at a predetermined angle and emits light at different angles depending on the wavelength of the light, and a plurality of optical fibers. Therefore, the light emitted from the optical member 40 is incident and travels inside in the direction intersecting the optical axis of the optical fiber in the first direction D1, which is different from the first direction D1 from the surface S to be inspected. Of the second fiber optic plate 22 in which the reflected light reflected in the second direction D2 is incident on the core of the optical fiber and travels in the core, and the light emitted from the core of the second fiber optic plate 22. A third fiber optic plate 24 having a plurality of optical fibers in which only light of a predetermined wavelength is incident on the core and travels in the core, and an image sensor 50 in which light emitted from the core of the third fiber optic plate 24 is incident. Provided is an inspection device 22 in which the maximum light receiving angle of the third fiber optic plate 24 is smaller than the maximum light receiving angle of the second fiber optic plate 22. [Selection diagram] Fig. 1

Description

The present invention relates to an inspection device capable of detecting minute irregularities on a surface.

An inspection device capable of detecting minute irregularities on a surface is known. In such an inspection device, a holographic diffraction optical element is used to irradiate the surface to be inspected with light at an irradiation angle different depending on the color of the light, detect the reflected light, and change the color of the irradiated surface. A surface inspection device for inspecting unevenness has been proposed (see, for example, Patent Document 1).

JP-A-2018-91770

However, in the surface inspection apparatus described in Patent Document 1, since the light emitted from the white light source is only incident on the incident surface of the holographic grating optical element as it is from the normal direction, the emitted light from the holographic grating optical element is emitted. There is a possibility that the emission angle cannot be sufficiently different for each color of light. Therefore, there is a risk that minute irregularities on the surface cannot be detected accurately. Further, since the light incident on the lens built in the camera is detected, the captured image has a striped gradation in which red, green, and blue continuously change. In other words, even if the surface is flat, the reflected light will have different colors in different places. Therefore, it is not suitable for three-dimensional analysis because it takes a huge amount of analysis time to detect unevenness due to color change.

The present invention has been made in view of the above problems, and an object of the present invention is to provide an inspection device suitable for three-dimensional analysis capable of accurately detecting minute irregularities on a surface.

One aspect of the present invention is
A light source that emits light of different wavelengths,
A first fiber optic plate having a plurality of optical fibers in which light emitted from the light source enters the core and travels through the core.
An optical member in which light emitted from the core of the first fiber optic plate is incident on the normal of the incident surface at a predetermined angle and emits light at a different angle depending on the wavelength of the light.
A fiber optic plate having a plurality of optical fibers, in which light emitted from the optical member is incident and travels inside in a direction intersecting the optical axis of the optical fiber, which is the first direction, and is described from the surface to be inspected. A second fiber optic plate in which reflected light reflected in a second direction different from the first direction is incident on the core of the optical fiber and travels in the core.
Of the light emitted from the core of the second fiber optic plate, a third fiber optic plate having a plurality of optical fibers in which only light of a predetermined color enters the core and travels through the core.
An image sensor in which light emitted from the core of the third fiber optic plate is incident, and an image sensor
With
This is an inspection device in which the maximum light receiving angle of the third fiber optic plate is smaller than the maximum light receiving angle of the second fiber optic plate.

Another aspect of the present invention is
A light source that emits light of different wavelengths,
A fourth fiber optic plate having a plurality of optical fibers in which light emitted from the light source enters the core and travels through the core.
An optical member in which light emitted from the core of the fourth fiber optic plate is incident on the normal of the incident surface at a predetermined angle and emits light at a different angle depending on the wavelength of the light.
A fifth fiber optic plate having a plurality of optical fibers in which the light emitted from the optical member is incident on the core and travels through the core, and the light emitted from the core is incident on the first surface to be inspected of the sample.
A sixth having a plurality of optical fibers in which light incident on the first surface to be inspected travels in the sample, and light emitted from the second surface to be inspected of the sample enters the core and travels in the core. Fiber optic plate and
Of the light emitted from the core of the sixth fiber optic plate, a seventh fiber optic plate having a plurality of optical fibers in which only light having a predetermined wavelength is incident on the core and travels in the core.
An image sensor in which light emitted from the core of the seventh fiber optic plate is incident, and an image sensor.
With
This is an inspection device in which the maximum light receiving angle of the seventh fiber optic plate is smaller than the maximum light receiving angle of the sixth fiber optic plate.

As described above, in the above aspect, it is possible to provide an inspection device suitable for three-dimensional analysis that can accurately detect minute irregularities on a surface.

It is a schematic diagram which shows the outline of the inspection apparatus which concerns on 1st Embodiment of this invention. It is a schematic diagram for demonstrating the outline of the method of detecting the unevenness of the surface to be inspected of a sample. It is a schematic diagram which shows the outline of the inspection apparatus which concerns on 2nd Embodiment of this invention. It is a schematic diagram which shows the outline of the inspection apparatus which concerns on 3rd Embodiment of this invention. It is a schematic diagram which shows the outline of the inspection apparatus which concerns on 4th Embodiment of this invention. It is a figure which shows typically the case where the inspection apparatus 2 is applied to the process of reforming a thin film by irradiation of a pulse laser.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. In each drawing, corresponding members having the same function are designated by the same reference numerals. Although the embodiments may be shown separately for convenience in consideration of the explanation of the main points or the ease of understanding, partial replacement or combination of the configurations shown in the different embodiments is possible. In the embodiment described later, the description of the matters common to the above-described embodiment will be omitted, and only the differences will be described. In particular, similar actions and effects with the same configuration will not be mentioned sequentially for each embodiment.

(Inspection device according to the first embodiment)
First, the inspection device according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic view showing an outline of an inspection device according to a first embodiment of the present invention.
The inspection device 2 according to the present embodiment is a small device that can be carried to the site and can detect minute irregularities on the surface. FIG. 1 shows a place where the inspection device 2 is brought into contact with the surface S to be inspected of the sample 100 to detect minute irregularities existing on the surface. The inspection device 2 according to the first embodiment, the second embodiment described later, and the modified examples 1 and 2 thereof is adapted to detect unevenness by using the reflected light of the surface S to be inspected.

The inspection device 2 is connected to the light source 10, the first fiber optic plate 20 connected to the light source 10, the optical member 40 connected to the first fiber optic plate 20, and the optical member 40 in the order of light traveling. The second fiber optic plate 22 is provided, the third fiber optic plate 24 connected to the second fiber optic plate 22, and the image sensor 50 connected to the third fiber optic plate 24 are provided.

<Light source>
As the light source 10, a light source that emits light having an arbitrary wavelength that can be detected by the image sensor 50 can be adopted. Examples of the light emitted from the light source 10 include ultraviolet rays, visible light, near infrared rays, and infrared rays.

In the present embodiment, as the light source 10, a white light source including an LED chip that emits light of the three primary colors of blue, green, and red is used. However, the present invention is not limited to this, and a light source having LED chips of two colors of blue, green, and red, or a combination of an LED chip that emits blue light and a phosphor that emits yellow light when blue light is incident. It is also possible to use a white light source or a light source in which an arbitrary number of LED chips and a phosphor are combined. Further, it is also possible to use a light source that emits not only visible light but also ultraviolet rays, near infrared rays, mid infrared rays, far infrared rays and the like. In particular, as will be described later, when a photonic crystal element is used as the optical member 40, the angle at which light travels can be significantly changed in a narrow wavelength band, so that a single-color LED chip (for example, a near-infrared LED) can be used. Only can be used. In order to improve the directivity of the emitted light, a light source having a reflecting surface on the emitting side of the LED chip is preferable. It is also possible to use a laser diode (LD), in which case an emitted light with high directivity can be obtained. Further, the light source is not limited to a surface light source, and a combination of a point light source and a lens or a fiber optic plate can also be used.

<First fiber optic plate>
A fiber optic plate is an optical member composed of a bundle of a plurality of optical fibers in which a core glass is covered with clad glass and an absorbent glass that fills the space between the optical fibers. Each optical fiber extends in the same direction. Light within the maximum light receiving angle of the optical fiber causes total internal reflection at the boundary between the core (glass) and the cladding (glass), so that the light is transmitted through the core with high transmission efficiency. Light that exceeds the maximum light receiving angle does not enter the core, but is absorbed by the absorbent glass, so there is no risk of affecting other optical fibers.

The incident surface of the first fiber optic plate 20 is in contact with the exit surface of the light source 10. The direction of the optical axis of the light source 10 and the direction of the optical axis of each optical fiber constituting the first fiber optic plate 20 are substantially the same. The first fiber optic plate 20 according to the present embodiment preferably has a large maximum light receiving angle so that light of all wavelengths emitted from the light source 10 enters the core. In this embodiment, a maximum light receiving angle of 180 degrees (full angle) (numerical aperture NA = 1.0) is used. The light that enters the core travels through the core, increasing the directivity of the light.
The exit surface of the first fiber optic plate 20 is in contact with the entrance surface of the optical member 40. It should be noted that the optical axis of each optical fiber constituting the first fiber optic plate 20 has a predetermined angle with respect to the normal of the incident surface of the optical member 40. That is, the light emitted from each optical fiber constituting the first fiber optic plate 20 is obliquely incident on the incident surface of the optical member 40.

<Optical member>
In this embodiment, a photonic crystal element is used as the optical member 40. When light is obliquely incident on the surface of a photonic crystal, the direction of the light transmitted through the crystal changes extremely sensitively depending on the wavelength and angle of incidence of the light, so the ability to decompose light is 100 to 1000 times that of glass. It can be nearly doubled. This is also called the super prism effect.
As described above, since the light emitted from the first fiber optic plate 20 is obliquely incident on the optical member 40 which is a photonic crystal element, the super prism effect causes the light to have a different angle for each color (wavelength). It can be emitted from the exit surface of the optical member 40. In the present embodiment, blue light (B), green light (G), and red light (R) are emitted from the exit surface of the optical member 40 at different angles. As for the angle, the difference between the angles of blue light and red light is the largest, and green light is an intermediate angle. Light of the same color (wavelength) is emitted almost in parallel. Here, blue light, green light, and red light are used for explanation, but in the photonic crystal element, the refraction angle changes by about 60 degrees only by changing the wavelength of light by 10 nm, so that light in a narrow wavelength band can be used. It can also be used.

In the present embodiment, the photonic crystal element is used as the optical member 40, but the present invention is not limited to this. For example, a holographic diffraction optical element can be used as the optical member 40. Even if the holographic diffractive optical element is used, blue light, green light, and red light can be emitted from the exit surface of the optical member 40 at different angles in the same manner as described above.

<Second fiber optic plate>
The exit surface of the optical member 40 is in contact with the entrance surface 22A of the second fiber optic plate 22. However, the entrance surface 22A of the second fiber optic plate 22 is not in contact with the entrance surface of the core of the second fiber optic plate 22. The second fiber optic plate 22 further has an entrance surface 22B in contact with the surface S to be inspected of the sample 100 and an exit surface 22C in contact with the entrance surface of the third fiber optic plate 24. As a result, it has a substantially triangular side shape. The entrance / exit surface 22B in contact with the surface to be inspected S is in contact with the entrance surface of the core of the second fiber optic plate 22. Further, the exit surface of the core of the second fiber optic plate 22 is in contact with the incident surface of the core of the third fiber optic plate 24.

The light emitted from the optical member 40 travels from the upper right to the lower left in the drawing which is the direction in which the inside of the second fiber optic plate 22 intersects the optical axis of the optical fiber. This direction is referred to as the first direction (see arrow D1). The light emitted from the optical member 40 travels at different angles depending on the color of the light, but generally travels in the first direction indicated by the arrow D1.
By appropriately adjusting the amount of the absorbent added to the absorbent glass of the second fiber optic plate 22, the function of the fiber optic plate is fulfilled, and the light enters the second fiber optic plate 22 in the first direction D1. You can move forward.

The emitted light from the optical member 40 travels in the second fiber optic plate 22 in the first direction D1 and is obliquely incident on the surface S to be inspected from the incident surface 22B in contact with the surface S to be inspected of the sample 100. To do. As the surface S to be inspected of the sample 100, a flat surface such as a wall surface can be exemplified. The light incident on the surface to be inspected S is obliquely reflected by the surface to be inspected S and is incident on the core of the second fiber optic plate 22 from the incident surface 22B. In the second fiber optic plate 22 according to the present embodiment, the blue light (B), the green light (G), and the red light (R) emitted from the surface S to be inspected and having different advancing angles all enter the core. It is preferable to have a large maximum light receiving angle. In the present embodiment, the maximum light receiving angle of the second fiber optic plate 22 is 180 degrees (full-width). The light incident on the core of the third fiber optic plate 24 travels in the core, and the directivity of the light is enhanced.

In order to prevent the emitted light from the optical member 40 from directly entering the image sensor 50 without hitting the surface S to be inspected of the sample 100, the sizes of the incident surface 22A, the incident surface 22B, and the exit surface 22C. The placement angle and core angle are adjusted appropriately. Further, the outer surface of the second fiber optic plate 22 that is not in contact with other members is sealed with a member 60 so that light does not leak to the outside.

<Third fiber optic plate>
Light traveling through the core of the second fiber optic plate 22 reaches the entrance surface of the third fiber optic plate 24 in contact with the exit surface of the second fiber optic plate 22.
Here, the third fiber optic plate 24 has a smaller maximum light receiving angle than the second fiber optic plate 22. For example, as the maximum light receiving angle of the third fiber optic plate 24, about 51 degrees (opening value NA = 0.43) can be exemplified.

Of the three colors of light reflected from the flat surface of the surface S to be inspected, the green light (G) in the center is within the maximum light receiving angle of the core, so that it is incident on the core. However, since the blue light (B) and the red light (R) on both sides thereof exceed the maximum light receiving angle of the core, they do not enter the core and are basically absorbed by the absorbing glass. Since the directivity of the light of each color is increased while advancing through the core of the second fiber optic plate 22, only the light of a predetermined color (here, green light (G)) is selectively selected. It can be incorporated into the fiber optic plate 24 of 3.

If the surface S to be inspected has irregularities, the angle of travel of the reflected light is different, so that the green light (G) does not enter the core, and conversely, the blue light (B) and the red light (R) are emitted. It may be incident on the core, or light of any color may not be incident on the core. By utilizing this, the unevenness of the surface S to be inspected can be detected. This will be described in detail later.
The maximum light receiving angle of the third fiber optic plate 24 is not limited to about 51 degrees, and is optimally maximum light received according to the difference in the wavelength of the selected light and the difference in the traveling angle of the light due to the optical member. It is preferable to use a fiber optic plate having angles.

<Image sensor>
When only light of a predetermined color (for example, green light (G)) from the second fiber optic plate 22 enters the incident surface of the third fiber optic plate 24, it travels through the core and emits light from the core. Is incident on the light receiving surface of the image sensor 50 in contact with the third fiber optic plate 24. Image data for inspection can be obtained from the light incident on the image sensor 50 from the third fiber optic plate 24. As the image sensor 50, any light receiving element such as CMOS and CCD can be used.

The following is a summary of how light travels in the inspection device 2 having the above configuration.
The light emitted from the light source 10 enters the core of the first fiber optic plate 20, travels through the core, and is obliquely incident on the incident surface of the optical member 40. Then, blue light (B), green light (G), and red light (R) are emitted from the exit surface of the optical member 40 at different angles for each color of light. The blue light (B), green light (G), and red light (R) travel in the second fiber optic plate 22 in the direction intersecting the optical axis of the optical fiber, which is the first direction, and the sample 100 is inspected. It is obliquely incident on the surface S.

The reflected light (blue light (B), green light (G), red light (R)) from the surface S to be inspected enters the core of the second fiber optic plate 22 and travels in the core. Then, in the third fiber optic plate 24, only light of a predetermined color (green light (G)) is incident on the core, and light of other colors is absorbed by the absorbing glass. As a result, only light of a predetermined color (green light (G)) is incident on the light receiving surface of the image sensor 50.

When the surface S to be inspected of the sample 100 is a flat surface without unevenness, the image obtained by the image sensor 50 is shown in green. On the other hand, when the first surface S to be inspected has irregularities, the angle at which the light travels changes, so that blue light (B) or red light (R) is incident on the image sensor 50, or any light is an image sensor. There may be cases where it does not enter 50. Therefore, in the region having unevenness, the color of the image obtained by the image sensor 50 is different from the color of the region without unevenness (for example, blue, red, black), and the unevenness can be detected by the color.

(Method of detecting unevenness)
Next, with reference to FIG. 2, an outline of a method for detecting unevenness of the surface S to be inspected, which is a substantially flat surface of the sample 100, will be described using the above-mentioned inspection device 2. FIG. 2 is a schematic diagram for explaining an outline of a method for detecting unevenness on the surface to be inspected of a sample. (A) is a side view schematically showing how light travels, and (b) is a plan view showing an image obtained by an image sensor.

As described above, the light emitted from the optical member 40 is obliquely incident on the surface S to be inspected of the sample 100 at different angles of blue light (B), green light (G), and red light (R). When the surface S to be inspected is incident on a flat surface Sa having no unevenness, the blue light (B), the green light (G), and the red light (R) are reflected at different angles, but the second fiber optic plate Since the maximum light receiving angle of 22 is 180 degrees (full angle), all of them enter the core of the second fiber optic plate 22 and proceed into the core. When the incident surface of the third fiber optic plate 24 is reached, the maximum light receiving angle of the third fiber optic plate 24 is about 51 degrees, so only the green light (G) in the center is among the three colors of light having different traveling angles. Is incident on the core. Light of other colors is absorbed by the absorbent glass without entering the core. Therefore, since only green light (G) is incident on the light receiving surface of the image sensor 50, as shown in FIG. 2B, a green image can be obtained on the surface to be inspected Sa having no unevenness.

FIG. 2 shows irregularities having a triangular side cross-sectional shape existing on the surface S to be inspected of the sample 100. Here, when blue light (B), green light (G), and red light (R) are incident on the obliquely raised surface Sb, the red light (R) is reflected from the surface to be inspected Sa without unevenness. The case where the light is reflected in a direction almost parallel to the traveling direction is shown. Therefore, when the blue light (B), the green light (G), and the red light (R) reflected by the surface to be inspected Sa reach the incident surface of the third fiber optic plate 24, the three colors have different traveling angles. Of the light, red light (R) is incident on the core because it is within the maximum light receiving angle of the core, but other blue light (B) and green light (G) are absorbed by the absorbing glass without entering the core. Therefore, since only red light is incident on the light receiving surface of the image sensor 50, as shown in FIG. 2B, a red image can be obtained on the obliquely raised surface Sb to be inspected.

In FIG. 2, when blue light (B), green light (G), and red light (R) are incident on the obliquely raised surface Sc, the blue light (B) is reflected from the surface to be inspected Sa having no unevenness. The case where the green light is reflected in a direction almost parallel to the traveling direction is shown. Therefore, when the blue light (B), the green light (G), and the red light (R) reflected by the surface Sc to be inspected reach the incident surface of the third fiber optic plate 24, the three colors travel at different angles. Of the light, blue light (B) is incident on the core because it is within the maximum light receiving angle of the core, but other green-blue (G) light and red light (R) are absorbed by the absorbing glass without entering the core. .. Therefore, since only blue light (B) is incident on the light receiving surface of the image sensor 50, a blue image can be obtained on the obliquely raised surface Sc to be inspected, as shown in FIG. 2B.

As described above, as shown in FIG. 2B, the unevenness existing on the flat surface to be inspected S can be easily detected by the change in color. In the example shown in FIG. 2, for the sake of simplicity, a convex portion formed of an obliquely inclined flat surface is illustrated as an unevenness, but any other convex portion including a convex portion having a curved surface may also be used. , There can be any shape of recess with a concave plane. When blue light (B), green light (G), and red light (R) are incident on such protrusions or recesses, the reflected light of any color is transferred to the core of the second fiber optic plate 22. It may not be incident. In that case, it is shown in black on the image obtained by the image sensor 50. Even in such a case, the unevenness existing on the flat surface to be inspected S can be easily detected.

In the above description, the case where the unevenness is detected by using the light of the three primary colors having a large wavelength difference is described, but the present invention is not limited to this. Unevenness can also be detected using light in a narrower wavelength range. For example, if the difference in wavelength of light is 10 nm, the angle of travel by the optical member 40, which is a photonic crystal element, can be changed by about 60 degrees. The maximum light receiving angle of the second fiber optic plate 22 is 180 degrees, whereas the maximum light receiving angle of the third fiber optic plate 24 is about 51 degrees, so the half angle changes from 90 ° to about 25.5 °. Therefore, even if light having a narrow wavelength band such as a wavelength difference of 10 nm is used, only light having a predetermined wavelength can be selected by the third fiber optic plate 24. As described above, even with light having a narrow wavelength band, unevenness can be detected by selectively sending the light to the image sensor 50 by the third fiber optic plate 24. Since light in a wide wavelength range and light in a narrow wavelength range can be applied, the optimum wavelength band can be selected according to the absorption property of the surface to be inspected.

(Inspection device according to the second embodiment)
Next, the inspection device according to the second embodiment of the present invention will be described with reference to FIG. FIG. 3 is a schematic view showing an outline of the inspection device according to the second embodiment of the present invention. This embodiment differs from the first embodiment in that an additional light source 12 is provided on the back side of the image sensor 50. Other configurations are basically the same as those in the first embodiment.
The image sensor 50 of the present embodiment is formed of a member having translucency. The image sensor 50 is attached to the back surface of the image sensor 50 on the opposite side of the light receiving surface so that the exit surface of the light source 12 is in contact with the back surface. As a further light source 12, a white light source using an LED can be exemplified.

Further light emitted from the light source 12 enters the core of the third fiber optic plate 24 and travels into the core. Although the maximum light receiving angle of the third fiber optic plate 24 is not large, the light emitted from the further light source 12 does not pass through the optical member 40, so that all wavelengths of light are emitted from the third fiber optic plate 24. It is incident on the core. Then, it is incident on the core of the second fiber optic plate 22, advances in the core, and is obliquely incident on the surface S to be inspected of the sample 100.

The incident light is obliquely reflected by the surface S to be inspected, but since the maximum light receiving angle of the second fiber optic plate 22 is 180 degrees (full-width), almost all the reflected light is the core of the second fiber optic plate 22. It enters the core and travels 180 degrees opposite to that at the time of incidence. Then, it enters the core of the third fiber optic plate 24 and proceeds into the core. Although the maximum light receiving angle of the third fiber optic plate 24 is not large, since it does not pass through the optical member 40, light of all wavelengths is incident on the core of the third fiber optic plate 24. The white light incident on the core of the third fiber optic plate 24 travels in the core and is incident on the light receiving surface of the image sensor 50.

Thereby, a plane color image of the surface S to be inspected of the sample 100 obtained by irradiating with white light can be obtained. As described above, in the present embodiment, it is possible to obtain a flat color image of the surface S to be inspected together with an image showing unevenness existing on the surface S to be inspected due to a change in color in one shooting. As in the example shown in FIG. 2, when blue light (B), green light (G), and red light (R) are incident on the image sensor 50 depending on the region via the second fiber optic plate 22. , It is also possible to obtain a normal map of the surface S to be inspected by using known image software.

As an application example using the inspection device 2 according to the above embodiment, it is relatively easy to bring the inspection device 2 to a site for visual inspection of infrastructure such as a tunnel, which can exemplify a clutch inspection of a tunnel plane or the like. it can. In addition to detecting the unevenness of the wall surface by the light source 10, it is possible to acquire a plane color map by the light source 12, so that it is possible to quickly determine whether the unevenness of the wall surface is due to scratches or cracks, deposits, or the like. You will be able to distinguish.

Further, for example, by detecting unevenness using a light source 10 that emits near infrared rays, it can be applied to high-definition fingerprint authentication. Even in this case, the normal map by the light source 12 can be effectively used.

Further, the inspection device 2 according to the above embodiment can be applied to the thin film modification step as described in Japanese Patent No. 4208941 which is a registered patent of the applicant of the present application. This will be described with reference to FIG. FIG. 6 is a diagram schematically showing a case where the inspection device 2 is applied to the thin film reforming step by irradiating a pulse laser.
As shown in FIG. 6, the thin film 100 can be modified by irradiating the thin film 100 of the liquid crystal polymer with a pulsed laser beam from the laser diode (LD) 200. Irradiation with a pulsed laser creates a randomly cross-linked structure between the polymers, which increases mechanical strength and electromagnetic (light) sealing performance.

At this time, as shown in FIG. 6, the inspection device 2 can be installed on the surface of the thin film 200 opposite to the laser irradiation surface, and changes in the surface structure of the thin film 100 can be detected. By using an appropriate wavelength band, the inspection device 2 can obtain a photographed image of the three-dimensional structure and capture the change in the optical characteristics of the thin film 100 caused by the irradiation of the pulse laser in real time.

(General inspection equipment that reflects light on the surface to be inspected)
Combining the first and second embodiments described above, the inspection device 2 that reflects light on the surface S to be inspected is
A first fiber optic plate 20 having a light source 10 that emits light of different wavelengths, a plurality of optical fibers in which light emitted from the light source 10 enters the core and travels in the core, and a first fiber optic plate 20. An optical member 40 in which light emitted from the core is incident on the normal line of the incident surface at a predetermined angle and emits light at different angles depending on the wavelength of the light, and a fiber optic plate having a plurality of optical fibers. Light emitted from the optical member 40 is incident and travels inside in a direction intersecting the optical axis of the optical fiber in the first direction D1, and is in a second direction different from the first direction D1 from the surface S to be inspected. Of the light emitted from the core of the second fiber optic plate 22 and the core of the second fiber optic plate 22, the reflected light reflected by D2 is incident on the core of the optical fiber and travels in the core, and has a predetermined wavelength. A third fiber optic plate 24 having a plurality of optical fibers in which only light enters the core and travels in the core, and an image sensor 50 in which light emitted from the core of the third fiber optic plate 24 is incident. , The maximum light receiving angle (for example, 51 degrees) of the third fiber optic plate 24 is smaller than the maximum light receiving angle (for example, 180 degrees) of the second fiber optic plate 22.

Since the inspection device 2 is a device that combines a light source 10, an image sensor 50, and optical members 20, 40, 22, 24, a compact and lightweight device can be realized. Further, since the third fiber optic plate 24 having a small maximum light receiving angle can capture only light having a predetermined wavelength (for example, green light (G)) into the image sensor 50, the image obtained by the image sensor 50 can be captured. By changing the color (wavelength) of, it is possible to detect minute irregularities existing on the surface S to be inspected. Regardless of where it is on the surface, if the structure (angle) of the defect is the same, the reflected light of the same color (wavelength) can be captured. Therefore, since the change in the color (wavelength) of the image obtained by the image sensor 50 is uniquely caused only by the surface structure, three-dimensional restoration can be performed more easily. Therefore, it is possible to provide an inspection device 2 suitable for three-dimensional analysis that can accurately detect minute irregularities on a surface.

In such a detection device 2, the exit surface of the light source 10 is in contact with the entrance surface of the first fiber optic plate 20, and the exit surface of the first fiber optic plate 20 is in contact with the entrance surface of the optical member 40. The exit surface of the optical member 40 and the incident surface 22A of the second fiber optic plate 22 are in contact with each other, and the entrance surface 22B of the second fiber optic plate 22 and the surface S to be inspected are in contact with each other. The exit surface 22C of the optic plate 22 and the incident surface of the third fiber optic plate 24 are in contact with each other, and the exit surface of the third fiber optic plate 24 is in contact with the light receiving surface of the image sensor 50.

As a result, a compact and robust inspection device 2 can be obtained. Furthermore, since outside air does not enter between the exit surface and the entrance surface (light receiving surface), it has excellent dustproof performance and can be used in various wavelengths and environments.

The second embodiment includes an additional light source 12 arranged on the opposite side of the incident surface of the translucent image sensor 50. The direction of the optical axis of the further light source 12 substantially matches the direction of the optical axis of the core of the third fiber optic plate 24, and the emitted light is emitted from the inside of the core of the image sensor 50 and the third fiber optic plate 24. The reflected light that travels through the core of the fiber optic plate 22 of 2 and enters the surface S to be inspected and is reflected from the surface S to be inspected is emitted from the core of the second fiber optic plate 22 to the third fiber optic plate 24. It travels through the core of the image sensor 50 and enters the image sensor 50.

As a result, it is possible to obtain a flat color image by the light source 12 in addition to the image showing the minute unevenness existing on the surface S to be inspected by the light source 10 in color in one shooting. Further, it is possible to determine what the detected unevenness is due to the plane image by the light source 12, so that an effective inspection can be realized by one shooting.

Further, when the optical member 40 is a photonic crystal element, the angle at which the light travels can be greatly changed by a slight difference in the wavelength of the light, so that even if light in a narrow wavelength band is used, the light can be reliably used. Unevenness can be detected.

(Inspection device according to the third embodiment)
Next, the inspection device according to the third embodiment of the present invention will be described with reference to FIG. FIG. 4 is a schematic view showing an outline of the inspection device according to the third embodiment of the present invention.
The inspection device 2 according to the present embodiment is also a small device that can be carried to the site. The inspection device 2 according to the present embodiment and the fourth embodiment described later uses the transmitted light of the sample 100 to detect irregularities on the outer surface of the sample 100, objects existing inside, and the like. ..

The present embodiment differs in that light is transmitted through the sample 100 for inspection, but the majority of the constituent members are the same as those of the first reflection type embodiment described above. Therefore, detailed description of similar components will be omitted.
The inspection device 2 is connected to the light source 10, the fourth fiber optic plate 30 connected to the light source 10, the optical member 40 connected to the fourth fiber optic plate 30, and the optical member 40 in the order of light traveling. A fifth fiber optic plate 32 in contact with the first surface to be inspected S1 of the sample 100, a sixth fiber optic plate 34 in contact with the second surface to be inspected S2 of the sample 100, and a sixth fiber optic plate. It includes a seventh fiber optic plate 36 connected to 34 and an image sensor 50 connected to the seventh fiber optic plate 36.

The fifth fiber optic plate 32 and the sixth fiber optic plate 34 are connecting members (not shown) and are fixed to each other at predetermined intervals. The sample 100 is inserted into the space between the fifth fiber optic plate 32 and the sixth fiber optic plate 34. It is preferable to have a mechanism for changing the distance between the fifth fiber optic plate 32 and the sixth fiber optic plate 34 according to the thickness of the sample 100.

The light source 10 is the same as the above embodiment, and uses a white light source including an LED chip that emits light of the three primary colors of blue, green, and red. The fourth fiber optic plate 30 is the same as the first fiber optic plate 20 described above, and its maximum light receiving angle is 180 degrees (full angle). The optical member 40 is a photonic crystal element similar to the above.
The fifth fiber optic plate 32 and the sixth fiber optic plate 34 are optical members corresponding to the second fiber optic plate 22 described above. The sample 100 has a plate-like shape in which the first surface to be inspected S1 and the second surface to be inspected S2 are substantially parallel to each other.

The fifth fiber optic plate 32 is in contact with the first surface S1 of the sample 100 on the lower side of the drawing, and the sixth fiber optic plate 34 is in contact with the second surface S2 of the sample 100 on the upper side of the drawing. ing. The maximum light receiving angle of the fifth fiber optic plate 32 and the sixth fiber optic plate 34 is 180 degrees (full angle). The directions of the optical axes of the optical fibers of the fifth fiber optic plate 32 and the sixth fiber optic plate 34 are substantially parallel to each other with respect to the normals of the first surface to be inspected S1 and the second surface to be inspected S2. , Has a predetermined angle. However, the present invention is not limited to this, and the optical axis of the optical fiber of the fifth fiber optic plate 32 and the sixth fiber optic plate 34 is the method of the first surface to be inspected S1 and the second surface to be inspected S2. In some cases, the lines are almost the same.
The seventh fiber optic plate 36 is the same as the third fiber optic plate 24 described above, and its maximum light receiving angle is about 51 degrees.

The way light travels in the inspection device 2 having the above configuration will be described. The light emitted from the light source 10 enters the core of the fourth fiber optic plate 30, travels through the core, and is obliquely incident on the incident surface of the optical member 40. Then, blue light (B), green light (G), and red light (R) are emitted from the exit surface of the optical member 40 at different angles for each color of light. The blue light (B), green light (G), and red light (R) enter the core of the fifth fiber optic plate 32, travel through the core, and obliquely approach the first surface to be inspected S1 of the sample 100. Incident. Then, it advances in the sample 100 and exits from the second surface to be inspected S2 of the sample 100.

The light emitted from the surface to be inspected S2 (blue light (B), green light (G), red light (R)) enters the core of the sixth fiber optic plate 34 and travels in the core. Then, in the seventh fiber optic plate 36, basically only light of a predetermined color (green light (G)) is incident on the core, and light of other colors is absorbed by the absorbing glass. As a result, only a predetermined color (green light (G)) is incident on the light receiving surface of the image sensor 50.

When the first surface to be inspected S1 and the second surface to be inspected S2 of the sample 100 are flat surfaces without unevenness and there is no object that interferes with the progress of light inside the sample 100, the image sensor 50 is used. The resulting image is shown in green. On the other hand, if the first surface to be inspected S1 and the second surface to be inspected S2 have irregularities, or if impurities or the like are present inside the sample 100, the angle at which the light travels changes, so the color is blue or red. A region shown or a region shown in black is generated, whereby unevenness and impurities can be detected.

(Inspection device according to the fourth embodiment)
Next, the inspection device according to the fourth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a schematic view showing an outline of the inspection device according to the fourth embodiment of the present invention.
This embodiment is different from the third embodiment in that an additional light source 12 is provided on the back side of the image sensor 50. Other configurations are basically the same as those in the third embodiment.

The image sensor 50 of the present embodiment is the same as the second embodiment described above, and is formed of a member having translucency. The image sensor 50 is attached to the back surface of the image sensor 50 on the opposite side of the light receiving surface so that the emission surface from the light source 12 is in contact with the back surface. As a further light source 12, a white light source using an LED can be exemplified.
The light emitted from the further light source 12 is reflected by the first surface to be inspected S1 of the sample 100 and is incident on the light receiving surface of the image sensor 50. As a result, a flat color image of the first surface to be inspected S1 can be obtained. Since the path of light for obtaining the plane color image of the first surface to be inspected S1 is the same as that of the second embodiment described above, further detailed description will be omitted.

(General inspection equipment through which light passes through the sample)
Combining the above third and fourth embodiments, the inspection device 2 through which light passes through the sample 100 is
A fourth fiber optic plate 30 having a light source 10 that emits light of different wavelengths, and a plurality of optical fibers in which light emitted from the light source 10 enters the core and travels through the core, and a fourth fiber optic plate 30. The optical member 30 in which the light emitted from the core is incident on the normal line of the incident surface at a predetermined angle and emits light at a different angle depending on the wavelength of the light, and the light emitted from the optical member 30 is incident on the core. Light traveling through the core and incident on a fifth fiber optic plate 32 having a plurality of optical fibers in which light emitted from the core is incident on the first surface to be inspected S1 of the sample 100 and the first surface to be inspected S1. A sixth fiber optic plate 34 having a plurality of optical fibers in which light emitted from the second surface to be inspected S2 of the sample enters the core and travels in the core, and a sixth fiber. Of the light emitted from the core of the optic plate 34, a seventh fiber optic plate 36 having a plurality of optical fibers in which only light of a predetermined wavelength is incident on the core and travels in the core, and a seventh fiber optic plate 36. The maximum light receiving angle of the seventh fiber optic plate 36 (for example, about 51 degrees) is the maximum light receiving angle of the sixth fiber optic plate 34 (for example, for example). It is smaller than 180 degrees).

Since the inspection device 2 is a device that combines a light source 10, an image sensor 50, and optical members 30, 40, 32, 34, and 36, a compact and lightweight device can be realized. Further, since the seventh fiber optic plate 36 having a small maximum light receiving angle can capture only light of a predetermined color (for example, green light (G)) into the image sensor 50, the image obtained by the image sensor 50 can be captured. By changing the color of, it is possible to detect minute irregularities existing on the first and second surfaces S1 and S2 to be inspected and an object existing in the sample 100. In particular, since the change in the color (wavelength) of the image obtained by the image sensor 50 is uniquely caused only by the surface or internal structure, three-dimensional restoration can be performed more easily. Therefore, it is possible to provide an inspection device 2 suitable for three-dimensional analysis that can accurately detect minute irregularities on a surface and an object in a sample.

In such a detection device 2, the exit surface of the light source 10 is in contact with the entrance surface of the fourth fiber optic plate 30, and the exit surface of the fourth fiber optic plate 30 is in contact with the entrance surface of the optical member 40. The exit surface of the optical member 40 and the incident surface of the fifth fiber optic plate 32 are in contact with each other, and the exit surface of the fifth fiber optic plate 32 and the first surface to be inspected S1 are in contact with each other. The inspection surface S2 is in contact with the entrance surface of the sixth fiber optic plate 34, the exit surface of the sixth fiber optic plate 34 is in contact with the entrance surface of the seventh fiber optic plate 36, and the seventh fiber optic is in contact. The exit surface of the plate 36 is in contact with the light receiving surface of the image sensor 50.

As a result, a compact and robust inspection device 2 can be obtained. Furthermore, since outside air does not enter between the exit surface and the entrance surface (light receiving surface), it has excellent dustproof performance and can be used in various wavelengths and environments.

In the fourth embodiment, an additional light source 12 arranged on the side opposite to the incident surface of the translucent image sensor 50 is provided. In the further light source 12, the direction of the optical axis substantially coincides with the direction of the optical axis of the core of the seventh fiber optic plate 36, and the emitted light is emitted from the inside of the core of the image sensor 50 and the seventh fiber optic plate 36. The reflected light that travels through the core of the fiber optic plate 34 of No. 6 and enters the second surface to be inspected S2 and is reflected from the second surface to be inspected S2 is the third from the core of the sixth fiber optic plate 34. It travels through the core 36 of the fiber optic plate of No. 7 and enters the image sensor 50.

As a result, in addition to the image showing the minute unevenness existing on the surface S to be inspected by the light source 10 and the object existing in the sample 100 in color, a plane image by the light source 12 can be obtained by one shooting. .. Further, the plane image by the light source 12 can be used to determine what the detected unevenness or object is, so that an effective inspection can be realized by taking a single image.

Although the embodiments and embodiments of the present invention have been described, the disclosed contents may be changed in the details of the configuration, and the invention in which the embodiments and the combinations and orders of the elements in the embodiments are changed are requested. It can be realized without departing from the scope and ideas of.

2 Inspection device 10 Light source 12 Further light source 20 First fiber optic plate 22 Second fiber optic plate 24 Third fiber optic plate 26 Translucent member 30 Fourth fiber optic plate 32 Fifth fiber optic plate 34 6th fiber optic plate 36 7th fiber optic plate 40 Optical member 50 Image sensor 100 Sample S Surface to be inspected S1 First surface to be inspected S2 Second surface to be inspected

Claims (7)

A light source that emits light of different wavelengths,
A first fiber optic plate having a plurality of optical fibers in which light emitted from the light source enters the core and travels through the core.
An optical member in which light emitted from the core of the first fiber optic plate is incident on the normal of the incident surface at a predetermined angle and emits light at a different angle depending on the wavelength of the light.
A fiber optic plate having a plurality of optical fibers, in which light emitted from the optical member is incident and travels inside in a direction intersecting the optical axis of the optical fiber, which is the first direction, and is described from the surface to be inspected. A second fiber optic plate in which reflected light reflected in a second direction different from the first direction is incident on the core of the optical fiber and travels in the core.
Of the light emitted from the core of the second fiber optic plate, a third fiber optic plate having a plurality of optical fibers in which only light of a predetermined color enters the core and travels through the core.
An image sensor in which light emitted from the core of the third fiber optic plate is incident, and an image sensor
With
An inspection apparatus characterized in that the maximum light receiving angle of the third fiber optic plate is smaller than the maximum light receiving angle of the second fiber optic plate. The exit surface of the light source is in contact with the entrance surface of the first fiber optic plate, the exit surface of the first fiber optic plate is in contact with the entrance surface of the optical member, and the exit surface of the optical member is in contact with the entrance surface of the optical member. The entrance surface of the second fiber optic plate is in contact with the entrance surface of the second fiber optic plate, and the entrance surface of the second fiber optic plate is in contact with the surface to be inspected. The inspection apparatus according to claim 1, wherein the incident surface of the fiber optic plate is in contact with the light-receiving surface of the image sensor, and the exit surface of the third fiber optic plate is in contact with the light-receiving surface of the image sensor. A light source arranged on the opposite side of the incident surface of the image sensor having translucency, the direction of the optical axis of which is substantially the same as the direction of the optical axis of the core of the third fiber optic plate, and the emitted light is emitted. Is incident on the surface to be inspected from the image sensor and the core of the third fiber optic plate through the core of the second fiber optic plate, and the reflected light reflected from the surface to be inspected is the said light source. The inspection apparatus according to claim 1 or 2, further comprising a light source that travels from within the core of the second fiber optic plate through the core of the third fiber optic plate and enters the image sensor. A light source that emits light of different wavelengths,
A fourth fiber optic plate having a plurality of optical fibers in which light emitted from the light source enters the core and travels through the core.
An optical member in which light emitted from the core of the fourth fiber optic plate is incident on the normal of the incident surface at a predetermined angle and emits light at a different angle depending on the wavelength of the light.
A fifth fiber optic plate having a plurality of optical fibers in which the light emitted from the optical member is incident on the core and travels through the core, and the light emitted from the core is incident on the first surface to be inspected of the sample.
A sixth having a plurality of optical fibers in which light incident on the first surface to be inspected travels in the sample, and light emitted from the second surface to be inspected of the sample enters the core and travels in the core. Fiber optic plate and
Of the light emitted from the core of the sixth fiber optic plate, a seventh fiber optic plate having a plurality of optical fibers in which only light having a predetermined wavelength is incident on the core and travels in the core.
An image sensor in which light emitted from the core of the seventh fiber optic plate is incident, and an image sensor.
With
An inspection apparatus characterized in that the maximum light receiving angle of the seventh fiber optic plate is smaller than the maximum light receiving angle of the sixth fiber optic plate. The exit surface of the light source is in contact with the entrance surface of the fourth fiber optic plate, the exit surface of the fourth fiber optic plate is in contact with the entrance surface of the optical member, and the exit surface of the optical member is in contact with the entrance surface. The incident surface of the fifth fiber optic plate is in contact, the exit surface of the fifth fiber optic plate is in contact with the first surface to be inspected, and the second surface to be inspected is in contact with the sixth surface. The entrance surface of the fiber optic plate is in contact with the entrance surface of the sixth fiber optic plate and the entrance surface of the seventh fiber optic plate, and the exit surface of the seventh fiber optic plate is in contact with the image. The inspection device according to claim 4, wherein the light receiving surface of the sensor is in contact with the light receiving surface. A light source arranged on the opposite side of the incident surface of the image sensor having translucency, the direction of the optical axis of which is substantially the same as the direction of the optical axis of the core of the seventh fiber optic plate, and the emitted light is emitted. Is incident on the second surface to be inspected from the image sensor and the core of the seventh fiber optic plate through the core of the sixth fiber optic plate, and is reflected from the second surface to be inspected. 4 or 5 comprising a further light source in which the reflected light travels from within the core of the sixth fiber optic plate through the core of the seventh fiber optic plate and enters the image sensor. The inspection device described in. The inspection device according to any one of claims 1 to 6, wherein the optical member is a photonic crystal element.

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