JP6583730B2 - CMM measuring method, measuring control device, and measuring program - Google Patents

Description

  The present invention relates to a measurement method, a measurement control device, and a measurement program of a coordinate measuring machine that measures a plurality of measurement elements formed on a measurement object.

  Conventionally, it has a drive unit that displaces the position and orientation of the probe, and by contacting the probe with a plurality of measurement elements (for example, circular holes) formed on the object to be measured, the dimensions and shape of the measurement elements, etc. A three-dimensional measuring machine that performs various measurements is known.

  In such a three-dimensional measuring machine, each measurement element of the object to be measured is displaced while displacing the position and orientation of the probe based on the measurement path (part program) created in advance according to the measurement position and measurement order of the plurality of measurement elements. Is measured (see, for example, Patent Document 1). The measurement order is usually sorted so that the measurement path is the shortest.

  Further, the coordinate measuring machine described in Patent Document 1 is already created regardless of the position and orientation of the measurement object on the table by detecting the position and orientation of the measurement object set on the table. Each measurement element of the object to be measured can be measured using the measured path.

Japanese Patent Laying-Open No. 2015-222196

  By the way, when the object to be measured is, for example, a polyhedron and the measurement elements formed on the individual surfaces are measured with a probe, it is matched with the direction of the normal vector of the measurement elements formed on the individual surfaces. It is necessary to rotate the posture of the probe. Therefore, when measuring a plurality of measurement elements having different normal vector directions, it is necessary to rotate the posture of the probe in accordance with the direction of the normal vector for each measurement element.

  FIG. 13 is an explanatory diagram for explaining a problem when measuring a plurality of measurement elements E (1) to E (10) of the DUT 9 with the shortest measurement path. Here, the plurality of measurement elements E (1) to E (10) are circular holes.

  As shown in FIG. 13, the measurement order when measuring each of the measurement elements E (1) to E (10) with the shortest measurement path is as shown by the arrow in the figure, the measurement element E (10) → measurement. Element E (7) → Measurement element E (2) → Measurement element E (6) → Measurement element E (5) → Measurement element E (1) → Measurement element E (3) → Measurement element E (4) → Measurement element E (8) → Measurement element E (9). In this case, between the measurement element E (7) and the measurement element E (2), between the measurement element E (2) and the measurement element E (6), and between the measurement element E (5) and the measurement element E (1). ) And between the measurement element E (4) and the measurement element E (8), it is necessary to rotate the posture of the probe.

  Here, although the rotation of the probe posture takes more time than the movement of the probe (for example, 10 seconds or more), the number of rotations of the probe posture is not considered in the conventional sorting of the measurement order of the measurement elements. For this reason, the coordinate measuring machine described in Patent Document 1 has room for improvement in terms of measurement efficiency (measurement time) because the posture of the probe rotates many times during measurement.

  Further, when the posture of the probe is rotated, the probe rotation error may affect the measurement accuracy of the measurement element. For this reason, the coordinate measuring machine described in Patent Document 1 in which the posture of the probe is rotated many times during the measurement has room for improvement in terms of measurement accuracy.

  The present invention has been made in view of such circumstances, and a measuring method of a three-dimensional measuring machine capable of improving the measurement efficiency and measurement accuracy when measuring a plurality of measurement elements formed on a measurement object, and An object is to provide a measurement control device and a measurement program.

  A measuring method of a coordinate measuring machine for achieving the object of the present invention is a measuring method of a coordinate measuring machine for measuring a plurality of measuring elements formed on an object to be measured with a probe whose position and posture are freely movable. A normal vector detection step for detecting the normal vector of the measurement element, a grouping step for grouping the measurement elements in each direction of the normal vector based on the detection result of the normal vector detection step, and a measurement order of the measurement elements Measurement order determining step for determining the order of measurement for each group grouped in the grouping step, position and orientation measurement step for measuring the position and orientation of the object to be measured in the coordinate measuring machine, and position and orientation measurement step Based on the measurement results, the measurement elements are measured by the probe according to the measurement order determined in the measurement order determination step. And a constant component measuring step.

  According to this method, when measuring a plurality of measurement elements formed on an object to be measured, the number of rotations of the probe can be minimized, and further, the rotation number of the probe can be reduced by reducing the number of rotations. Can be reduced.

  In the measurement method of the coordinate measuring machine according to another aspect of the present invention, the measurement element measurement step includes a rotation process for rotating the posture of the probe in accordance with the direction of the normal vector of the group to be measured, and the rotation process. The calibration processing for calibrating the posture of the probe and the intra-group measurement processing for measuring the measurement element in the measurement target group by the calibrated probe are repeated for each group. Here, rotating the probe's posture in accordance with the direction of the normal vector of the group to be measured means that the probe is rotated to a posture in which the tip of the probe faces the group to be measured and is parallel to the normal vector. It is to let you. According to this other aspect, since the rotation error when the posture of the probe is rotated can be calibrated, it is possible to improve the measurement accuracy when measuring a plurality of measurement elements formed on the object to be measured. it can.

  In the measurement method of the coordinate measuring machine according to another aspect of the present invention, the measurement order determining step includes performing a first sort process for sorting the measurement elements in the group in the order in which the probe moving distance is the shortest for each group. The measurement order is determined, and the in-group measurement process measures the measurement elements in the group according to the order of the measurement elements sorted in the first sort process. Thereby, since the measurement time of the measurement element for every group can be shortened, measurement efficiency can be improved more.

  In the measurement method of the coordinate measuring machine according to another aspect of the present invention, the measurement order determination step has the direction of the normal vector closer to the group to be measured first for each group generated in the grouping step. A measurement order is determined by performing a second sort process for sorting in order, and the measurement element measurement step performs measurement for each group according to the order of the groups sorted in the second sort process. Thereby, since the rotation angle of the probe rotated before performing the measurement of the next group can be minimized, the measurement time can be shortened and the measurement efficiency can be further improved.

  In the measuring method of the coordinate measuring machine according to another aspect of the present invention, a workpiece coordinate system setting step for setting a workpiece coordinate system based on the object to be measured, a workpiece coordinate system set in the workpiece coordinate system setting step, A measurement path setting step for setting the measurement path of the probe based on the measurement object based on the measurement order determined in the measurement order determination step. In the measurement element measurement step, the measurement path setting step is set. Based on the measured path and the measurement result of the position and orientation measurement step, the measurement element is measured for each group by the probe. As a result, regardless of the position and orientation of the object to be measured in the coordinate measuring machine, measurement elements can be measured using a common measurement path.

  In the measuring method of the coordinate measuring machine according to another aspect of the present invention, in the workpiece coordinate system setting step, the workpiece coordinate system is set based on the design drawing of the object to be measured. Accordingly, the work coordinate system can be set without measuring the object to be measured with the coordinate measuring machine, and the operator's work can be reduced.

  In the measuring method of the CMM according to another aspect of the present invention, the normal vector detecting step detects the normal vector based on the design drawing of the object to be measured. As a result, the normal vector can be detected without measuring the object to be measured with the coordinate measuring machine, and the operator's work can be reduced.

  A measurement control apparatus for a coordinate measuring machine for achieving the object of the present invention is a measurement control apparatus for a coordinate measuring machine that measures a plurality of measurement elements formed on an object to be measured by a probe whose position and orientation are freely displaceable. , A normal vector detection unit for detecting a normal vector of the measurement element, a grouping unit for grouping the measurement elements for each direction of the normal vector based on a detection result of the normal vector detection unit, and a measurement element A measurement order determining unit that determines the measurement order for each group that the grouping unit groups, a position / orientation measuring unit that measures the position and orientation of the object to be measured in the coordinate measuring machine, and a position / orientation A measurement element measurement unit that measures the measurement elements for each group according to the measurement order determined by the measurement order determination unit based on the measurement result of the measurement unit.

  In the measurement control apparatus of the coordinate measuring machine according to another aspect of the present invention, the measurement element measurement unit rotates the probe posture in accordance with the direction of the normal vector of the measurement element in the measurement target group. Then, a calibration process for calibrating the orientation of the probe subjected to the rotation process and an intra-group measurement process for measuring the measurement element in the measurement target group by the probe subjected to the calibration process are repeated for each group.

  A measurement program for achieving the object of the present invention is a measurement program in a three-dimensional measuring machine for measuring a plurality of measurement elements formed on an object to be measured by a probe whose position and orientation are freely displaceable. A normal vector detection step for detecting a vector, a grouping step for grouping measurement elements for each direction of the normal vector based on the detection result of the normal vector detection step, and a grouping step for the measurement order of the measurement elements Based on the measurement results of the measurement order determination step for determining the order of measurement for each group grouped in step 3, the position and orientation measurement step for measuring the position and orientation of the object to be measured in the coordinate measuring machine, and the position and orientation measurement step Measure the measurement elements by group according to the measurement order determined in the measurement order determination step. A measuring element measuring step that causes the computer to execute.

  In the measurement program according to another aspect of the present invention, the measurement element measurement step includes a rotation process for rotating the probe attitude in accordance with the direction of the normal vector of the measurement target group, and the attitude of the probe subjected to the rotation process. The calibration process for calibration and the intra-group measurement process for measuring the measurement elements in the measurement target group by the calibrated probe are repeated for each group.

  According to the measurement method, the measurement control device, and the measurement program of the coordinate measuring machine of the present invention, it is possible to improve the measurement efficiency and measurement accuracy when measuring a plurality of measurement elements formed on the object to be measured.

It is an external perspective view of a three-dimensional measuring machine. It is an external appearance perspective view of a probe head. It is a functional block diagram of a computer. It is explanatory drawing of the space correction by a workpiece | work coordinate system setting part. It is explanatory drawing of the origin setting by a workpiece | work coordinate system setting part. It is explanatory drawing of the reference axis setting by a workpiece coordinate system setting part. It is explanatory drawing for demonstrating the normal vector detection process by a normal vector detection part, the grouping process by a grouping part, and the 1st sort process by a sort part, respectively. It is explanatory drawing for demonstrating the other Example of the 2nd sort process by a sort part. It is explanatory drawing for demonstrating the measurement of the position and attitude | position of the to-be-measured object set on the table. It is explanatory drawing for demonstrating the measurement element measurement by a measurement element measurement part. It is a flowchart which shows the flow of the measurement process of the measurement element of a to-be-measured object. It is a flowchart which shows the flow of the sort process of step S4 in FIG. It is explanatory drawing for demonstrating the subject in the case of measuring the several measurement element of a to-be-measured object by the shortest measurement path | route.

[Overall configuration of CMM]
FIG. 1 is an external perspective view of a coordinate measuring machine (CMM: Coordinate Measuring Machine) 10. The coordinate measuring machine 10 displaces the position and orientation of the probe 24a while measuring the coordinate value (the coordinate value in the X-axis direction, the Y-axis direction) of the measurement object 9 (also referred to as a workpiece, see FIG. 13 described above). And a coordinate value in the Z-axis direction), which is also referred to as a coordinate measuring machine or a three-dimensional coordinate measuring machine. Note that the X axis, the Y axis, and the Z axis in FIG. 1 are a machine coordinate system that is a coordinate system determined based on a machine coordinate origin unique to the coordinate measuring machine 10. Moreover, in this example, although the to-be-measured object 9 shown in above-mentioned FIG. 13 is measured, the kind of to-be-measured object 9 to be measured is not specifically limited.

  The device under test 9 is a polyhedron as shown in FIG. 13 described above, and a plurality of measurement elements E (1) to E (10) are formed on each surface of the device under test 9. Hereinafter, the measurement elements E (1) to E (10) are appropriately abbreviated as “measurement element E”. Here, the measurement element E is a hole (circular hole), a convex portion, a groove, or the like formed in the object 9 to be measured, and the object 9 to be measured includes a plurality of measurement elements E. In this example, a circular hole is measured as the measurement element E. Note that the measurement element E may include the outer shape of the DUT 9.

  As shown in FIG. 1, the coordinate measuring machine 10 includes a gantry 12, a table 14 (surface plate) provided on the gantry 12, and a right Y carriage 16 </ b> R and a left Y that are erected on both ends of the table 14. A carriage 16L and an X guide 18 for connecting the upper portions of the right Y carriage 16R and the left Y carriage 16L are provided. The portal frame 26 is configured by the right Y carriage 16R, the left Y carriage 16L, and the X guide 18.

  Sliding surfaces on which the right Y carriage 16R and the left Y carriage 16L slide along the Y-axis direction are formed on the upper surface and side surfaces of both ends of the table 14. The right Y carriage 16R and the left Y carriage 16L are provided with air bearings (not shown) at positions facing the sliding surface of the table 14. As a result, the right Y carriage 16R and the left Y carriage 16L are movable together with the X guide 18 in the Y-axis direction.

  An X carriage 20 is attached to the X guide 18. A sliding surface on which the X carriage 20 slides is formed in the X guide 18 along the X-axis direction. The X carriage 20 is provided with an air bearing (not shown) at a position facing the sliding surface of the X guide 18. Thereby, the X carriage 20 is movable in the X-axis direction.

  A Z carriage (also referred to as a Z spindle) 22 is attached to the X carriage 20. The X carriage 20 is provided with an air bearing (not shown) for guiding the Z carriage 22 in the Z axis direction. Thus, the Z carriage 22 is held by the X carriage 20 so as to be movable in the Z-axis direction.

  A probe head 24 is attached to the lower end of the Z carriage 22.

  FIG. 2 is an external perspective view of the probe head 24. As shown in FIG. 2, the probe head 24 is, for example, a 5-axis simultaneous control probe head having a stepless positioning mechanism, and holds the base end of the probe 24a of the contact touch trigger. The proximal end of the stylus 24b is attached to the distal end of the probe 24a. A contact 24c is attached to the tip of the stylus 24b. The stylus 24b and the contact 24c constitute a probe for the probe 24a. The type of the probe 24a is not particularly limited.

  The probe head 24 is provided with a first drive unit 35 (see FIG. 3) such as a motor that rotates the probe 24a around two rotation axes A and B (see FIG. 1) orthogonal to each other. . Thereby, the rotation angle φ around the rotation axis A of the probe 24a and the rotation angle θ around the rotation axis B of the probe 24a can be adjusted steplessly. As a result, the probe 24a (stylus) 24b) can be arbitrarily displaced (rotated).

  Returning to FIG. 1, although not shown, the coordinate measuring machine 10 includes a Y-axis drive unit that moves the portal frame 26 in the Y-axis direction and an X-axis drive unit that moves the X carriage 20 in the X-axis direction. And a second drive unit 36 (see FIG. 3) including a Z-axis drive unit that moves the Z carriage 22 in the Z-axis direction. Thereby, the probe head 24 and the probe 24a can be moved in the triaxial directions (XYZ directions) orthogonal to each other. The position and posture of the probe 24a can be freely displaced by the first drive unit 35 and the second drive unit 36, and the probe 24a can be arbitrarily displaced (moved and rotated).

  A Y-axis direction position detection linear scale (not shown) is provided at the end of the table 14 on the right Y carriage 16R side. The X guide 18 is provided with an X-axis direction position detecting linear scale (not shown), and the Z carriage 22 is provided with a Z-axis direction position detecting linear scale (not shown).

  On the other hand, the right Y carriage 16R is provided with a Y-axis direction position detection head (not shown) that reads the Y-axis direction position detection linear scale. Further, the X carriage 20 has an X-axis direction position detection head (not shown) and a Z-axis direction position detection head (not shown) for reading the X-axis direction position detection linear scale and the Z-axis direction position detection linear scale, respectively. ) And are provided. Further, the probe head 24 is provided with a rotation angle detector (not shown) such as a rotary encoder that detects the rotation angles θ and φ of the probe 24a. Based on the detection result of the XYZ axial direction detection head and the detection result of the rotation angle detection unit, the measurement position XYZ when the contact 24c at the tip of the probe 24a (stylus 24b) contacts the measurement position of the object 9 to be measured. Axial coordinate values can be detected.

  The coordinate measuring machine 10 controls the first drive unit 35 and the second drive unit 36 to control the movement of the probe head 24, that is, the displacement of the position and posture of the probe 24 a (stylus 24 b). I have. Here, the coordinate measuring machine 10 has an automatic measurement mode in which measurement is performed automatically and a manual measurement mode in which measurement is performed manually. Accordingly, in the automatic measurement mode, the drive controller 28 controls the first drive unit 35 and the second drive unit 36 under the control of the computer 32 described later to displace the position and posture of the probe 24a.

  The drive controller 28 is provided with a probe operation unit 28a such as a joystick for manually operating the displacement of the position and posture of the probe 24a (stylus 24b). Accordingly, in the manual measurement mode, the drive controller 28 controls the first drive unit 35 and the second drive unit 36 according to the operation input to the probe operation unit 28a, thereby displacing the position and posture of the probe 24a.

  The drive controller 28 is connected to the contact detection sensor (not shown) of the probe 24a of the contact touch trigger described above, the XYZ axial direction detection head, and the rotation angle detection unit. The drive controller 28 detects each of the XYZ axial direction detection head and the rotation angle detection unit at the moment when the contact detection sensor detects that the probe 24a (contact 24c) has contacted the measurement position of the object 9 to be measured. A result is acquired and the coordinate value of the measurement position of the XYZ-axis direction is detected. The coordinate values of the measurement position in the XYZ axis directions are output from the drive controller 28 to the computer 32.

  The computer 32 is connected to the drive controller 28 via a various communication interface 30 such as a LAN (Local Area Network) so as to allow data communication. The computer 32 functions as a measurement control device of the coordinate measuring machine of the present invention together with the drive controller 28 described above.

  The computer 32 is installed with a software program 32a corresponding to the measurement program of the present invention. The computer 32 executes the software program 32a to represent the measurement path of the probe 24a [for example, the coordinate value indicating the measurement position of the measurement element E, the measurement order of the measurement position, and the coordinate value of the intermediate point of the measurement position]. A part program 37 (see FIG. 3) is created. The computer 32 drives (controls) the first drive unit 35 and the second drive unit 36 via the drive controller 28 based on the part program 37 when the coordinate measuring machine 10 is in the automatic measurement mode. The object to be measured 9 is automatically measured by the probe 24a.

  On the other hand, the computer 32 displays the measurement position of the measurement element E on the display unit 38 based on the part program 37 when the coordinate measuring machine 10 is in the manual measurement mode. Thereby, the operator can drive the first drive unit 35 and the second drive unit 36 via the drive controller 28 by the probe operation unit 28a and manually measure the object 9 to be measured using the probe 24a.

  The display unit 38 is connected to the computer 32. The computer 32 causes the display unit 38 to display various information in the coordinate measuring machine 10, for example, a measurement position by the probe 24a and an operation instruction in the manual measurement mode (or in the automatic measurement mode).

[Computer functions]
FIG. 3 is a functional block diagram of the computer 32. As shown in FIG. 3, the control unit 40 including a CPU (Central Processing Unit) and a memory of the computer 32 executes a software program 32a. Thus, the control unit 40 includes a display control unit 42, a storage unit 43, a CAD (computer aided design) data acquisition unit 44, a work coordinate system setting unit 45, an element and task creation unit 46, and a normal vector. It functions as a detection unit 47, a grouping unit 48, a sorting unit 49, a part program creation unit 50, a workpiece coordinate system measurement unit 51, and a measurement element measurement unit 52.

  The display control unit 42 controls the display on the display unit 38. In addition to the software program 32a and the part program 37 described above, the storage unit 43 stores various types of information related to the measurement of the object 9 to be measured by the coordinate measuring machine 10 such as a work coordinate system 57 described later in detail. Yes.

  The CAD data acquisition unit 44 acquires CAD data 55 corresponding to the design drawing of the DUT 9 of the present invention from outside via various interfaces (communication interfaces) not shown. In the CAD data 55, design information of the device under test 9 indicating the shape and dimensions of the device under test 9 and the arrangement of the measurement elements E is recorded. When the CAD data 55 of the DUT 9 exists, the CAD data acquisition unit 44 acquires the CAD data 55 from the outside and outputs the CAD data 55 to the workpiece coordinate system setting unit 45 and the normal vector detection unit 47, respectively.

  The workpiece coordinate system setting unit 45, the element and task creation unit 46, the normal vector detection unit 47, the grouping unit 48, the sort unit 49, and the part program creation unit 50 are based on the object 9 to be measured. A part program 37 indicating the measured path is created. The measurement path based on the object to be measured here is a measurement path based on the origin of the object to be measured 9 and the reference axis (XYZ axis: see FIG. 13), that is, a workpiece of the object to be measured 9 described later. This is a measurement path based on the coordinate system 57. Therefore, if the position and orientation of the measurement object 9 on the table 14 are detected, the measurement of the measurement object 9 can be performed according to the part program 37 (measurement path based on the measurement object 9). .

  When the CAD data acquisition unit 44 cannot acquire the CAD data 55 of the object 9 to be measured, the part program 37 is created based on the result of actual measurement of the object 9 to be measured by the coordinate measuring machine 10. Further, when the CAD data acquisition unit 44 acquires the CAD data 55 of the device under test 9, the CAD data 55 is created on the computer 32 using the CAD data 55.

<Part program creation: No CAD data>
When the CAD data acquisition unit 44 cannot acquire the CAD data 55 of the device under test 9, the work coordinate system setting unit 45 is based on the result of actual measurement of the device under test 9 with the coordinate measuring machine 10. A workpiece coordinate system 57 with reference to is set. The workpiece coordinate system 57 sets the origin of the object 9 and the reference axis (XYZ axis).

  The setting of the work coordinate system 57 is roughly divided into spatial correction, origin setting, and reference axis setting. Hereinafter, description will be made in the order of spatial correction, origin setting, and reference axis setting. In order to prevent complication of the drawing, the setting of the workpiece coordinate system 57 of the measured object 9A (see FIG. 4) different from the measured object 9 will be described as an example.

  Before starting the spatial correction, the probe 24a (stylus 24b) attached to the probe head 24 of the coordinate measuring machine 10 is created or selected, and the probe 24a (stylus 24b) is calibrated. Note that the calibration of the probe 24a is performed in detail under the control of the measurement element measurement unit 52 described later, and a specific description thereof is omitted here.

FIG. 4 is an explanatory diagram of space correction by the work coordinate system setting unit 45. In the figure, the X ₀ Y ₀ Z ₀ axis is the reference axis of the machine coordinate system of the coordinate measuring machine 10, and the reference numeral 406 is the origin of the machine coordinate system. As shown in FIG. 4, in the spatial correction, an arbitrary plane 400 in the measurement object 9A is first measured. Specifically, the operator operates (probes) three or more points on the plane 400 with the probe 24a by operating the probe operation unit 28a. The measurement result (coordinate value) of the plane 400 by the probe 24 a is input to the work coordinate system setting unit 45 via the drive controller 28. The work coordinate system setting unit 45 determines the intersection 402 between the plane 400 and the Z ₀ axis and the normal vector 404 of the plane 400 based on the measurement result of the plane 400.

Then, the workpiece coordinate system setting unit 45 in parallel to the normal vector 404 of the plane 400 and the _{Z 0} axis. As a result, the X ₀ Y ₀ Z ₀ coordinate system represented by the solid line in the drawing is subjected to spatial correction processing to the X ₁ Y ₁ Z ₁ coordinate system represented by the broken line in the drawing.

Then, the work coordinate system setting unit 45 translates the origin 406 to the intersection point 402. Then, the X ₁ Y ₁ Z ₁ coordinate system is an X ₂ Y ₂ Z ₂ coordinate system represented by a long broken line in the drawing. Through the above processing, the workpiece coordinate system setting unit 45 determines the Z-axis direction of the workpiece coordinate system 57 and the origin of the workpiece coordinate system 57.

  FIG. 5 is an explanatory diagram of the origin setting by the workpiece coordinate system setting unit 45. As shown in FIG. 5, when the origin is set, the operator operates the probe operation unit 28a to measure the circular hole 410 formed in the plane 400 with the probe 24a (measures a portion necessary for measuring the center of the circular hole 410). To do. This measurement result is input to the work coordinate system setting unit 45 via the drive controller 28. The work coordinate system setting unit 45 obtains the center 412 of the circular hole 410 based on the measurement result of the circular hole 410 input from the drive controller 28.

Next, the workpiece coordinate system setting unit 45 translates the origin 406 to the center of the circular hole 410. As a result, the X ₂ Y ₂ Z ₂ coordinate system represented by the solid line in the figure is corrected to the X ₃ Y ₃ Z ₃ coordinate system represented by the broken line in the figure. Through the above processing, the origin of the XY axes of the workpiece coordinate system 57 is set as the origin of the X ₃ Y ₃ Z ₃ coordinate system.

  FIG. 6 is an explanatory diagram of the reference axis setting by the work coordinate system setting unit 45. As shown in FIG. 6, in setting the reference axis, the operator operates the probe operation unit 28a and measures the circular hole 420 formed in the plane 400 with the probe 24a (measures the portion necessary for measuring the center of the circular hole 420). ) This measurement result is input to the work coordinate system setting unit 45 via the drive controller 28. The work coordinate system setting unit 45 obtains the center 422 of the circular hole 420 based on the measurement result of the circular hole 420 input from the drive controller 28.

Then, the workpiece coordinate system setting unit 45 rotates the _{X 3} axis to a position passing through the center 422 of the circular hole 420. Here sign α in the figure represents the angle of rotating the X ₃ axis. As a result, the X ₃ Y ₃ coordinate system represented by the solid line in the drawing is corrected to the X ₄ Y ₄ coordinate system represented by the broken line in the drawing. Through the above processing, the X ₄ Y ₄ coordinate system in the figure is determined as the direction of the XY axes of the work coordinate system 57.

Thus, through the space correction, the origin setting, and the reference axis setting, X ₄ axis in the figure is the X-axis in the workpiece coordinate system 57. Further, Y ₄ axes in the drawing is the Y-axis workpiece coordinate system 57. Further, the Z ₃ axis shown in FIG. 4 is the Z axis of the workpiece coordinate system 57. Thus, the setting of the work coordinate system 57 is completed.

  The workpiece coordinate system setting unit 45 sets the workpiece coordinate system 57 of the workpiece 9 through the above-described spatial correction, origin setting, and reference axis setting, and stores information on the workpiece coordinate system 57 in the storage unit 43. . Note that the setting method of the workpiece coordinate system 57 described here is an example, and other known methods applicable to the coordinate measuring machine 10 may be adopted as the setting method of the workpiece coordinate system 57.

  In addition, when the workpiece coordinate system 57 of the workpiece 9 has already been set by another device, the workpiece coordinate system setting unit 45 stores information on the workpiece coordinate system 57 via an interface (not shown) ( Information on the work coordinate system 57 may be acquired from a storage medium (including a server on the Internet) or a storage medium, and the work coordinate system 57 may be set based on the acquired information.

  Returning to FIG. 3, the element and task creation unit 46 creates information on the measurement element E to be measured among the plurality of measurement elements E formed on the DUT 9 (that is, measurement of the measurement object). Element E is selected) and a measurement task (measurement content) is created.

  Specifically, the operator operates the probe operation unit 28a to measure the measurement element E (here, the measurement element) to be measured among the plurality of measurement elements E formed on each surface of the object 9 to be measured by the probe 24a. Probing E (1) -E (10)). This probing is performed on the position where the position coordinates of the measurement element E and the normal vector 60 (see FIG. 7) can be measured. The result of the probing measurement of the measurement element E is input to the element and task creation unit 46 and the normal vector detection unit 47 described later via the drive controller 28.

  The element and task creation unit 46 detects the position coordinates of the measurement element E based on the result of probing measurement of the measurement element E, and determines the measurement element E (measurement elements E (1) to E (10)) to be measured. Measurement element information indicating position coordinates and the like is created, and this measurement element information is output to a normal vector detection unit 47, a sort unit 49, and a part program creation unit 50 described later.

  In addition, the element and task creation unit 46 receives the task (measurement content) when measuring the measurement element E from the operator, and receives the measurement element E (measurement elements E (1) to E (10)) to be measured. ) Create an assignment. For example, problems when the measurement element E is a circular hole include measurement of the position coordinates of the center of the circular hole and measurement of the roundness of the circular hole. Then, the element and task creation unit 46 outputs task information indicating the task of the measurement element E to be measured to the part program creation unit 50.

  FIG. 7 is an explanatory diagram for explaining the normal vector detection processing by the normal vector detection unit 47, the grouping processing by the grouping unit 48, and the first sort processing by the sorting unit 49 shown in FIG. . Note that the XYZ axes in the figure are reference axes of the workpiece coordinate system 57.

  As shown in FIG. 7, the normal vector detection unit 47 is based on the measurement element information input from the element and task generation unit 46 and the probing measurement result of the measurement element E input via the drive controller 28. The normal vectors 60 of the measurement elements E (measurement elements E (1) to E (10)) to be measured are detected. As described above, since the probing of the measurement element E is performed on a portion where the normal vector 60 of the measurement element E can be measured, the normal vector detection unit 47 calculates the method of the measurement element E to be measured. Line vector 60 can be detected. Then, the normal vector detection unit 47 outputs the detection result of the normal vector 60 of the measurement element E to be measured to the grouping unit 48.

  Based on the detection result of the normal vector 60 input from the normal vector detection unit 47, the grouping unit 48 converts the measurement element E (measurement elements E (1) to E (10)) to be measured into the normal vector. Group by 60 directions. That is, the grouping unit 48 generates groups (groups G1 to G3 in this example) configured by measurement elements E in which the normal vectors 60 have the same direction (including substantially the same direction). Note that the number of groups increases or decreases according to the number and arrangement of measurement elements E to be measured in the DUT 9.

  The group G1 is composed of measurement elements E (1) to E (4) formed on the Z surface 62 of the DUT 9. The group G2 includes measurement elements E (5) and E (6) formed on the Y surface 63 of the object 9 to be measured. The group G3 includes measurement elements E (7) to E (10) formed on the X surface 64 of the DUT 9. Then, the grouping unit 48 outputs group information indicating the result of grouping (for example, information indicating the number of groups and measurement elements E constituting each group) to the sorting unit 49.

  The sort unit 49 corresponds to the measurement order determination unit of the present invention, and determines the measurement order of the measurement element E to be measured. The sorting unit 49 determines the measurement order of the measurement elements E to be measured based on the group information input from the grouping unit 48 in the order of measurement for each of the groups G1 to G3. That is, the sorting unit 49 first measures the measurement element E included in any one of the groups G1 to G3, and then measures the measurement element E included in one of the remaining two groups. Finally, the measurement order of the measurement elements E to be measured is determined so that the measurement elements E included in the remaining one group are measured.

  Next, the sorting unit 49 performs a first sort process for sorting the measurement order of the measurement elements E in each group in the order in which the moving distance of the probe 24a is the shortest for each of the groups G1 to G3. The position coordinates of the measurement element E in the groups G1 to G3 can be determined based on the elements described above and the measurement element information input from the task creation unit 46. Therefore, the sorting unit 49 of this example determines the order in which the moving distance of the probe 24a is the shortest based on the measurement element information. Thereby, the sort part 49 performs a 1st sort process for every group G1-G3, and determines the measurement order of the measurement element E in the groups G1-G3 as shown by the arrow in a figure.

  The sorting unit 49 determines the measurement order between the groups G1 to G3. Specifically, the sorting unit 49 performs a second sort process for sorting the groups G1 to G3 in the order in which the direction of the normal vector 60 is closer to the first group to be measured. Here, since the normal vectors 60 of the groups G1 to G3 in this example are orthogonal to each other, the measurement order between the groups G1 to G3 is not particularly limited. For example, in the case of the group G3 to be measured first, the sorting unit 49 performs the 2nd sort process in the order of group G3-> group G2-> group G1 or the order of group G3-> group G1-> group G2, and determines the measurement order between the groups G1-G3.

  FIG. 8 is an explanatory diagram for explaining another example of the second sort process by the sort unit 49. Here, as an example, there is a measurement element E (group) to be measured on the cut surface 65 and the X surface 66 of the DUT 9 and the first group to be measured is the group G1 of the Z surface 62. explain. In this case, as shown in FIG. 8, the sorting unit 49 assigns each group to the group G1 in the descending order of the direction of the normal vector 60 with respect to the group G1, as indicated by parenthesized numbers (1) to (5) in the figure. 2 sort processing is performed, and the measurement order between each group is determined.

  Note that the group to be measured first in the second sort process is not particularly limited. However, when the measurement start posture of the probe 24a is a posture having a rotation angle φ = 0 ° (a posture parallel to the Z axis), the group G1 is selected. It is preferable to determine the group to be measured first. Thereby, the measurement of the measurement element E of the group G1 can be started without rotating the probe 24a. When the group G1 of the Z plane 62 does not exist, the group that can measure the rotation of the probe 24a with the minimum rotation angle is determined as the group to be measured first. That is, the group to be measured first is determined according to the posture of the probe 24a at the start of measurement (initial state). Thereby, measurement time can be shortened.

  Through the first sort process and the second sort process by the sort unit 49, the measurement order of the measurement elements E (measurement elements E (1) to E (10)) to be measured is determined. Then, the sort unit 49 outputs measurement order information indicating the measurement order of the measurement element E to the part program creation unit 50.

  Returning to FIG. 3, the part program creation unit 50 creates the part program 37 by receiving an input of a programming operation from an operator or by executing an automatic creation program. Specifically, the part program creation unit 50 uses the device under test 9 as a reference based on the measurement element information and task information input from the element and task creation unit 46 and the measurement order information input from the sort unit 49. The measurement path of the probe 24a is set, and a part program 37 indicating this measurement path is created. The measurement path of the probe 24a is set to a path that does not cause the probe 24a to collide with the object 9 to be measured, that is, a path in which the probe 24a is retracted from the object 9 to be measured. It is also referred to as surface setting.

  The part program creation unit 50 stores the created part program 37 in the storage unit 43. Thus, the creation of the part program 37 when the CAD data acquisition unit 44 cannot acquire the CAD data 55 of the device under test 9 is completed.

  When the part program 37 corresponding to the device under test 9 has already been created by another device, the part program creation unit 50 stores the information of the part program 37 via an interface (not shown) or storage. The part program 37 may be acquired from the medium and stored in the storage unit 43.

<Part program creation: CAD data available>
On the other hand, when the CAD data acquisition unit 44 acquires the CAD data 55 of the object 9 to be measured, the position coordinates, shape, normal vector 60 and the like of the measurement element E to be measured can be acquired from the CAD data 55. Therefore, the work coordinate system 57 is set by the work coordinate system setting unit 45 described above, the measurement element information and task information are created by the element and task creation unit 46, and the normal vector 60 is detected by the normal vector detection unit 47. Can be performed on the computer 32. That is, from the setting of the work coordinate system 57 to the detection of the normal vector 60 by the computer 32 in the off-line state without measuring the object 9 to be measured (including selection and calibration of the probe 24a) by the coordinate measuring machine 10. It can be carried out.

  The above-mentioned CAD data 55 cannot be acquired for the generation of group information by the grouping unit 48, the generation of measurement order information by the sorting unit 49, and the creation and storage of the part program 37 by the part program creation unit 50. This is the same as the case.

[Configuration for measuring the object to be measured]
The workpiece coordinate system measurement unit 51 constitutes the position / orientation measurement unit of the present invention, and before the measurement of the measurement element E of the measurement object 9 set on the table 14 of the coordinate measuring machine 10 is started, 14, the position and orientation of the object 9 to be measured set on 14 are measured. The work coordinate system measurement unit 51 first controls the display control unit 42 to display a display that prompts probing for the Z plane 62, the Y plane 63, and the X plane 64 (or any other three planes) of the object 9 to be measured. It is displayed on the display unit 38.

  FIG. 9 is an explanatory diagram for explaining the measurement of the position and posture of the DUT 9 set on the table 14. The operator operates the probe operation unit 28a to probe any three or more points on the Z plane 62 of the object 9 to be measured with the probe 24a. The posture of the probe 24a at this time is a posture parallel to the Z-axis at the start of measurement (initial state). Then, the result of the probing measurement of the Z plane 62 is input to the work coordinate system measurement unit 51 via the drive controller 28.

  Next, the operator operates the probe operation unit 28a to probe any two or more points on the Y plane 63 of the object to be measured 9 with the probe 24a without rotating the posture of the probe 24a. The result of the probing measurement of the Y plane 63 is input to the work coordinate system measurement unit 51 via the drive controller 28. The work coordinate system measurement unit 51 determines the Y origin and the X-axis direction of the object 9 to be measured on the table 14 based on the probing measurement results of the Z plane 62 and the Y plane 63.

  Then, the operator operates the probe operation unit 28a to probe one or more arbitrary points on the X plane 64 of the measurement object 9 with the probe 24a without rotating the posture of the probe 24a. The result of the probing measurement of the X plane 64 is input to the work coordinate system measurement unit 51 via the drive controller 28. The work coordinate system measurement unit 51 determines the X origin of the object 9 to be measured on the table 14 and the directions of the Y axis and the Z axis based on the results of the probing measurement on the Z plane 62, the Y plane 63, and the X plane 64. To do. Thereby, the workpiece coordinate system measurement unit 51 can measure the position and orientation of the object 9 on the table 14 and outputs the measurement result of the position and orientation of the object 9 to the measurement element measurement unit 52. .

  Note that the method for measuring the position and orientation of the DUT 9 set on the table 14 of the coordinate measuring machine 10 is not limited to the method described above. For example, a method of analyzing an image obtained by imaging the measurement object 9 on the table 14 with a camera provided in the coordinate measuring machine 10, and detection of a position sensor and a posture sensor provided in the measurement object 9. You may measure the position and attitude | position of the to-be-measured object 9 using various methods, such as the method of acquiring a result.

  Returning to FIG. 3, the measurement element measurement unit 52 executes the part program 37 read from the storage unit 43 based on the measurement result of the position and orientation of the DUT 9 input from the workpiece coordinate system measurement unit 51. Thereby, the measurement element measurement which measures the measurement element E of the measuring object 9 of the DUT 9 for each of the groups G1 to G3 in the measurement order determined by the sorting unit 49 is executed.

  FIG. 10 is an explanatory diagram for explaining measurement element measurement by the measurement element measurement unit 52. This measurement element measurement includes rotation processing, calibration processing, and in-group measurement processing.

<Rotation processing>
As shown in FIG. 10, the rotation processing is performed by changing the orientation of the probe 24 a (stylus 24 b) to the normal vector 60 (measurement element E) of the measurement target group (hereinafter referred to as measurement target group) among the groups G1 to G3. This is a process of rotating according to the direction of FIG. That is, the posture (orientation) of the probe 24a is a posture in which the contact 24c at the tip of the probe 24a faces the measurement element E of the measurement target group and is parallel to the normal vector 60 of the measurement element E (hereinafter referred to as a parallel posture). ) To rotate.

  Specifically, if the CMM 10 is in the automatic measurement mode, the measurement element measurement unit 52 performs the first drive via the drive controller 28 based on the part program 37 before starting measurement of the measurement element E of the measurement target group. The unit 35 is driven to rotate the probe 24a to a parallel posture corresponding to the direction of the normal vector 60 of the measurement element E of the measurement target group. The rotation process of the probe 24a is performed at a position retracted from the object 9 to be measured.

  Further, when the coordinate measuring machine 10 is in the manual measurement mode, the measurement element measurement unit 52 controls the display control unit 42 based on the part program 37 to start measurement before starting measurement of the measurement element E of the measurement target group. Information on the parallel posture corresponding to the measurement element E of the target group is displayed on the display unit 38. As a result, the operator operates the probe operation unit 28a to rotate the posture of the probe 24a to a parallel posture corresponding to the measurement element E of the measurement target group at the position retracted from the object 9 to be measured. In the automatic measurement mode, as in the manual measurement mode, the posture of the probe 24a may be rotated by an operator's manual operation.

<Calibration process>
The calibration process is a process of calibrating the attitude of the probe 24a (stylus 24b), and is performed after the rotation process and before the measurement of the measurement element E of the measurement target group. Here, the calibration of the posture is to correct this displacement when the posture of the probe 24a deviates from the parallel posture corresponding to the measurement element E of the measurement target group.

  The measurement element measurement unit 52 controls the display control unit 42 after the rotation process and before the measurement of the measurement element E of the measurement target group in the automatic measurement mode and the manual measurement mode of the coordinate measuring machine 10, thereby A display for prompting calibration is displayed on the display unit 38. When the display prompting the calibration of the probe 24a is displayed on the display unit 38, the operator sets a reference sphere (not shown) for calibration on the table 14 and then operates the probe operation unit 28a. Then, a predetermined reference point of the reference sphere is probed with the probe 24a. The result of the probing measurement of the reference sphere is input to the measurement element measurement unit 52 via the drive controller 28.

  The measurement element measurement unit 52 inputs the result of the probing measurement of the reference sphere to the probe calibration program and calculates the posture of the probe 24a. When the calculated posture of the probe 24a is deviated from the above-described parallel posture, The first drive unit 35 is driven via the drive controller 28 to calibrate (rotate) the probe 24a to a parallel posture.

  The calibration method of the probe 24a described here is an example, and other calibration methods applicable to the coordinate measuring machine 10 may be adopted as a calibration method of the posture of the probe 24a.

<In-group measurement process>
The in-group measurement process is a process for measuring the measurement element E in the measurement target group according to the measurement order determined by the sort unit 49 in the first sort process. If the coordinate measuring machine 10 is in the automatic measurement mode, the measurement element measurement unit 52 executes the part program 37 based on the position and orientation measurement results from the workpiece coordinate system measurement unit 51, and performs the first through the drive controller 28. The first drive unit 35 and the second drive unit 36 are driven. As a result, the measurement element E in the measurement target group can be automatically measured by the probe 24a in accordance with the measurement order and the tasks defined in the part program 37. The measurement result (coordinate value) of this automatic measurement is input to the measurement element measurement unit 52 via the drive controller 28.

  Further, when the coordinate measuring machine 10 is in the manual measurement mode, the measurement element measurement unit 52 controls the display control unit 42 based on the position and orientation measurement results from the workpiece coordinate system measurement unit 51 and the part program 37. Then, information indicating the position of the measurement element E in the measurement target group, the measurement order, and the task is displayed on the display unit 38. The operator operates the probe operation unit 28a according to the display content of the display unit 38, and manually measures the measurement element E in the measurement target group with the probe 24a. The measurement result (coordinate value) of this manual measurement is input to the measurement element measurement unit 52 via the drive controller 28.

[Operation of CMM]
Next, the measurement process (measurement method) of the measurement element E of the DUT 9 by the coordinate measuring machine 10, the drive controller 28, and the computer 32 having the above-described configuration will be described with reference to FIGS.

  FIG. 11 is a flowchart showing the flow of the measurement process of the measurement element E of the object 9 to be measured. FIG. 12 is a flowchart showing the flow of the sorting process in step S4 in FIG. Here, the description will be made assuming that the workpiece coordinate system 57 is not set in advance and the part program 37 is not created in advance. When the work coordinate system 57 is set and stored in advance, the process starts from step S3. When the part program 37 is created and stored in advance, the process starts from step S7.

<Create part program>
As shown in FIG. 11, first, the operator starts creating the part program 37. If the CAD data 55 of the object 9 to be measured does not exist, the operator creates or selects the probe 24a (stylus 24b) used for measuring the object 9 and then attaches the probe 24a to the probe head 24. (Step S1).

  Next, the operator sets a reference sphere for calibration on the table 14, and then operates the probe operation unit 28a to probe a predetermined reference point of the reference sphere with the probe 24a. The result of the probing measurement of the reference sphere is input to the measurement element measurement unit 52 via the drive controller 28. As a result, the probe 24a is calibrated by the measurement element measuring unit 52 (step S1). The calibration performed here is not limited to the calibration of the posture of the probe 24a, and other calibrations such as the shape (diameter) of the contact 24c may be performed.

  After calibrating the probe 24 a, the operator sets the workpiece 9 for setting the workpiece coordinate system 57 on the table 14. Then, the operator operates the probe operation unit 28a to perform the spatial correction, the origin setting, and the reference axis setting described with reference to FIGS. Thereby, the workpiece coordinate system setting unit 45 sets the workpiece coordinate system 57 of the workpiece 9 and stores the information of the workpiece coordinate system 57 in the storage unit 43 (step S2, workpiece coordinate system setting step of the present invention). Equivalent).

  After setting the workpiece coordinate system 57, the operator operates the probe operation unit 28a to measure the measurement element E (this example) among the plurality of measurement elements E formed on the measurement target 9 with the probe 24a (this example). Then, the measurement elements E (1) to E (10)) are probed. As a result, the result of probing measurement of the measurement element E is input to the element and task creation unit 46 and the normal vector detection unit 47 via the drive controller 28, respectively.

  The element and task creation unit 46 that has received the result of the probing measurement creates measurement element information indicating the measurement element E to be measured, and uses this measurement element information as a normal vector detection unit 47, a sort unit 49, and a part. It outputs to the program creation part 50 (step S3). In addition, the element and task creation unit 46 creates task information in response to an input of a measurement task (measurement content) from the operator, and outputs this task information to the part program creation unit 50 (step S3).

  As shown in FIG. 12, after the measurement element information and the task information are created, the measurement element E sorting process for determining the measurement order of the measurement element E to be measured is started (step S4).

  As described above with reference to FIG. 7, the normal vector detection unit 47 includes the measurement element information input from the element and task generation unit 46 and the probing measurement result of the measurement element E input from the drive controller 28. Based on the above, the normal vector 60 of the measurement element E to be measured is detected (step S4A). This step S4A corresponds to the normal vector detecting step of the present invention. Then, the normal vector detection unit 47 outputs the detection result of the normal vector 60 to the grouping unit 48.

  The grouping unit 48 that has received the detection result of the normal vector 60 from the normal vector detection unit 47 has the same (substantially the same) direction of the normal vector 60 as described with reference to FIG. Groups (groups G1 to G3 in this example) configured by the measurement element E are generated (step S4B). This step S4B corresponds to the grouping step of the present invention. Then, the grouping unit 48 outputs group information indicating the grouping result to the sorting unit 49.

  The sort unit 49 that has received the group information input from the grouping unit 48 refers to the measurement element information input from the element and task creation unit 46, and performs the first sort process for each of the groups G1 to G3 (step S4C). ). As a result, as described with reference to FIG. 7 described above, the measurement order of the measurement elements E in the individual groups G1 to G3 is sorted in the order in which the moving distance of the probe 24a is the shortest. As a result, the measurement time for each of the groups G1 to G3 can be shortened.

  Next, as described with reference to FIG. 8, the sorting unit 49 performs the second sorting process for sorting the groups G1 to G3 in the order in which the direction of the normal vector 60 is closer to the first group to be measured, The measurement order between the groups G1 to G3 is determined (step S4D). As described above, the measurement time can be shortened by determining the first group to be measured according to the posture of the probe 24a at the start of measurement (initial state).

  Through the processing from step S4A to step S4D described above, the measurement order of the measurement element E to be measured of the object 9 to be measured, that is, the measurement order in which the measurement element E is measured for each group (measurement order within the group and between the groups). Including measurement order). That is, the processing from step S4A to step S4D corresponds to the measurement order determination step of the present invention. Then, the sort unit 49 outputs measurement order information indicating the measurement order of the measurement element E to be measured to the part program creation unit 50.

  Since it is possible to automatically sort measurement elements E that have been performed manually by an operator in the past, it is possible to create a part program 37 (measurement plan) with high measurement efficiency in consideration of the number of rotations of the probe 24a. It can be done automatically. As a result, the operator's work can be reduced.

  When the CAD data 55 of the device under test 9 exists, the CAD data acquisition unit 44 acquires the CAD data 55 of the device under test 9 under the operation of the operator. As a result, the operator can also perform the processing from step S1 to S4A on the computer 32 in the off-line state without measuring the object 9 to be measured by the coordinate measuring machine 10. As a result, the part program 37 can be created more efficiently, and the operator's work can be further reduced.

  Returning to FIG. 11, the part program creation unit 50 sets the device under test 9 based on the measurement element information and task information input from the element and task creation unit 46 and the measurement order information input from the sort unit 49. The reference measurement path (retraction surface) of the probe 24a is set (step S5, corresponding to the measurement path setting step of the present invention). Next, the part program creation unit 50 creates a part program 37 indicating the measurement path of the probe 24a and stores it in the storage unit 43 (step S6). Thus, creation of the part program 37 is completed.

<Measurement of measured object>
After creating and storing the part program 37, measurement of the measurement element E to be measured of the DUT 9 is started. First, the operator sets an object 9 to be measured on the table 14 of the coordinate measuring machine 10 (step S7).

  Next, the operator operates the probe operation unit 28a to probe any three or more points on the Z plane 62 of the DUT 9 with the probe 24a as described with reference to FIG. Then, the operator probes two or more arbitrary points on the Y plane 63 and one or more arbitrary points on the X plane 64 with the probe 24a without rotating the posture of the probe 24a. As a result, the results of the probing measurement on the Z plane 62, the Y plane 63, and the X plane are input to the workpiece coordinate system measurement unit 51 via the drive controller 28.

  The workpiece coordinate system measurement unit 51 measures the position and orientation of the measurement object 9 on the table 14 (that is, the workpiece coordinate system 57) based on the results of the probing measurement on the Z plane 62, the Y plane 63, and the X plane. (Step S8). This step S8 corresponds to the position and orientation measurement step of the present invention. As a result, regardless of the position and orientation of the DUT 9 on the table 14, it is possible to always perform measurement under the same conditions using the common part program 37. The measurement result of the position and orientation of the object 9 to be measured by the work coordinate system measurement unit 51 is input to the measurement element measurement unit 52.

  The measurement element measurement unit 52 that has received the measurement result of the position and orientation from the workpiece coordinate system measurement unit 51 executes the part program 37 read from the storage unit 43 based on the measurement result, and the previously described diagram. As described in FIG. 10, measurement of the measurement element E to be measured of the DUT 9 is started (step S9).

  When the coordinate measuring machine 10 is in the automatic measurement mode, the measurement element measurement unit 52 drives the first drive unit 35 via the drive controller 28 based on the part program 37, and the probe 24a is moved to the first measurement target group. Rotation processing is performed to rotate the measurement element E to a parallel posture corresponding to the direction of the normal vector 60 (step S10).

  On the other hand, if the coordinate measuring machine 10 is in the manual measurement mode, the measurement element measurement unit 52 controls the display control unit 42 based on the part program 37, and the normal vector 60 of the measurement element E of the first measurement target group. Information on the parallel posture corresponding to the direction is displayed on the display unit 38. Thereby, the operator operates the probe operation unit 28a to perform a rotation process for rotating the posture of the probe 24a to a parallel posture at the position retracted from the object 9 to be measured (step S10).

  In the case where the posture of the probe 24a at the start of measurement (initial state) is a posture parallel to the Z axis, and the first group to be measured is the group G1 on the Z plane 62, the probe 24a of the rotation processing described above is performed. The rotation angle is 0 °. That is, the rotation processing of the present invention includes not rotating the posture of the probe 24a when the posture of the probe 24a is parallel to the direction of the normal vector 60 of the measurement element E of the measurement target group.

  Next, the measurement element measurement unit 52 controls the display control unit 42 in both the automatic measurement mode and the manual measurement mode of the coordinate measuring machine 10 to display a display prompting the calibration of the probe 24a on the display unit 38. . In response to this display, the operator sets a reference sphere on the table 14, and then operates the probe operation unit 28a to probe a predetermined reference point of the reference sphere with the probe 24a. The result of the probing measurement of the reference sphere is input to the measurement element measurement unit 52 via the drive controller 28.

  The measurement element measurement unit 52 that has received the result of the probing measurement calculates the posture of the probe 24a. If the calculated posture of the probe 24a is deviated from the above-described parallel posture, the measurement element measurement unit 52 receives the input through the drive controller 28. 1 The drive unit 35 is driven to calibrate the posture of the probe 24a to a parallel posture (step S11). Thereby, even if a rotation error occurs when the posture of the probe 24a is rotated, the rotation error can be calibrated, so that the measurement accuracy can be further improved. The calibration process is not limited to the calibration of the posture of the probe 24a, and other calibrations such as the shape (diameter) of the contact 24c may be performed.

  After the calibration process, the measurement element measurement unit 52 starts an in-group measurement process for measuring the measurement element E in the first measurement target group. If the coordinate measuring machine 10 is in the automatic measurement mode, the measurement element measurement unit 52 executes the part program 37 based on the position and orientation measurement results from the workpiece coordinate system measurement unit 51, and via the drive controller 28. The first drive unit 35 and the second drive unit 36 are driven. As a result, the measurement element E in the first measurement target group is automatically measured by the probe 24a according to the measurement order and tasks defined in the part program 37 (step S12). The measurement result of this automatic measurement is input to the measurement element measurement unit 52 via the drive controller 28.

  On the other hand, if the coordinate measuring machine 10 is in the manual measurement mode, the measurement element measurement unit 52 controls the display control unit 42 based on the position and orientation measurement results from the workpiece coordinate system measurement unit 51 and the part program 37. Then, the information indicating the position of the measurement element E in the first measurement target group, the measurement order, and the task is displayed on the display unit 38. As a result, the operator operates the probe operation unit 28a according to the display content of the display unit 38, and manually measures the measurement element E in the measurement target group with the probe 24a (step S12). The measurement result of this manual measurement is input to the measurement element measurement unit 52 via the drive controller 28.

  In both the automatic measurement mode and the manual measurement mode, the measurement element E in the measurement target group is measured according to the measurement order determined in the first sort process, so that the moving distance of the probe 24a can be minimized. Measurement time can be shortened.

  Thus, the measurement of the measurement element E in the first measurement target group by the measurement element measurement unit 52 is completed. And the measurement element measurement part 52 repeatedly performs the process from the above-mentioned step S10 to step S12 also about the remaining groups of the groups G1-G3 (it is NO at step S13). When measuring the measurement element E for each of the groups G1 to G3, the measurement is performed according to the measurement order of the group determined in the second sort process described above, so the rotation angle of the probe to be rotated before the next group measurement is performed. It can be minimized and the measurement time can be shortened.

  If YES in step S13, all the measurement elements E to be measured of the DUT 9 are measured for each of the groups G1 to G3 according to the measurement order determined in step S4 by the probe 24a. That is, step S10 to step S12 correspond to the measurement element measurement step of the present invention. Thus, the measurement of the measurement element E that is the measurement target of the DUT 9 is completed.

[Effect of this embodiment]
As described above, in the present embodiment, the measurement elements E to be measured of the DUT 9 are grouped for each direction of the normal vector 60, and the measurement order of the measurement elements E is determined in the order of measurement for each group. Since the measurement element E to be measured is measured for each group in accordance with the determined measurement order, the number of rotations of the probe 24a can be minimized.

  For example, as described with reference to FIG. 13, when the measurement elements E are sorted so that the measurement path of the probe 24a is the shortest, it is necessary to rotate the probe 24a four times. As described with reference to FIG. 10, in this embodiment, the number of rotations of the probe 24a can be reduced to two. That is, since the number of rotations of the probe 24a that takes longer than the movement of the probe 24a can be reduced, the measurement efficiency (measurement time) can be improved as compared with the conventional case. Furthermore, by reducing the number of rotations of the probe 24a, it is possible to reduce the occurrence of a rotation error when the posture of the probe 24a is rotated, so that the measurement accuracy can be improved. As a result, it is possible to improve the measurement efficiency and measurement accuracy when measuring the measurement element E.

  Further, since the probe 24a is calibrated after the probe 24a is rotated (before the measurement element E is measured), the rotation error when the posture of the probe 24a is rotated can be calibrated, and the measurement of the three-dimensional measuring machine 10 can be performed. The accuracy can be further improved.

[Others]
In the above embodiment, the portal moving type three-dimensional measuring machine 10 has been described as an example. However, the present invention can be applied to various types of three-dimensional measuring machines, and probes used in the three-dimensional measuring machine 10. There is no particular limitation on the type of the. In the above embodiment, the coordinate measuring machine 10, the drive controller 28, and the computer 32 are separate, but the coordinate measuring machine 10, and at least one of the drive controller 28 and the computer 32 are integrated. May be.

  In the above embodiment, the setting of the workpiece coordinate system 57 (creation of the part program 37), the measurement of the position and orientation of the workpiece 9 on the table 14 and the measurement of the measurement element E are performed at different timings. However, when the object 9 to be measured is set on the table 14, these may be performed continuously.

  A measurement program (software program 32a) for functioning as the computer 32 described in the above embodiment is recorded on an optical disk, a magnetic disk, or other computer-readable medium (a tangible non-transitory information storage medium), and through these programs It is possible to provide a measurement program. Instead of providing the measurement program stored in such an information storage medium, the measurement program signal may be provided as a download service using a communication network such as the Internet.

  9 DUT, 10 CMM, 24 probe head, 24a probe, 24b stylus, 24c contactor, 28 drive controller, 32 computer, 32a software program, 37 part program, 45 work coordinate system setting unit, 47 method Line vector detection unit, 48 Grouping unit, 49 Sort unit, 50 Part program creation unit, 51 Work coordinate system measurement unit, 52 Measurement element measurement unit, 57 Work coordinate system, 60 Normal vector

Claims (11)

In a measuring method of a three-dimensional measuring machine that measures a plurality of measuring elements formed on an object to be measured with a probe whose position and posture are freely movable,
A normal vector detection step of detecting a normal vector of the measurement element;
A grouping step for grouping the measurement elements for each direction of the normal vector based on a detection result of the normal vector detection step;
A measurement order determination step for determining the measurement order of the measurement elements in the order of measurement for each group grouped in the grouping step;
A position and orientation measurement step for measuring the position and orientation of the object to be measured in the coordinate measuring machine;
Based on the measurement result of the position and orientation measurement step, the measurement element measurement step of measuring the measurement element by the probe according to the measurement order determined in the measurement order determination step for each group,
A measuring method for a three-dimensional measuring machine. The measuring element measuring step includes
A rotation process for rotating the posture of the probe in accordance with the direction of the normal vector of the group to be measured;
Calibration processing for calibrating the posture of the probe subjected to the rotation processing;
The measuring method of the coordinate measuring machine according to claim 1, wherein an in-group measurement process for measuring the measurement element in the group to be measured by the probe subjected to the calibration process is repeatedly performed for each group. The measurement order determination step performs the first sort process for sorting the measurement elements in the group in the order in which the movement distance of the probe is the shortest, and determines the measurement order by performing the measurement for each group.
The measurement method of the coordinate measuring machine according to claim 2, wherein the in-group measurement process measures the measurement elements in the group according to the order of the measurement elements sorted in the first sort process. The measurement order determining step performs a second sort process in which the individual groups generated in the grouping step are sorted in the order in which the direction of the normal vector is closer to the first group to be measured. Determine the order,
The measurement method of the coordinate measuring machine according to any one of claims 1 to 3, wherein the measurement element measurement step performs measurement for each group according to the order of the groups sorted in the second sort process. A workpiece coordinate system setting step for setting a workpiece coordinate system based on the object to be measured;
Measurement path setting step for setting the measurement path of the probe based on the object to be measured based on the work coordinate system set in the work coordinate system setting step and the measurement order determined in the measurement order determination step And having
The measurement element measurement step measures the measurement element for each group by the probe based on the measurement path set in the measurement path setting step and the measurement result of the position and orientation measurement step. 5. The measuring method of the coordinate measuring machine according to any one of 4 above.   6. The measuring method for a coordinate measuring machine according to claim 5, wherein in the workpiece coordinate system setting step, the workpiece coordinate system is set based on a design drawing of the object to be measured. The measuring method of the coordinate measuring machine according to claim 1, wherein in the normal vector detecting step, the normal vector is detected based on a design drawing of the object to be measured. In a measurement control device of a three-dimensional measuring machine that measures a plurality of measurement elements formed on an object to be measured with a probe whose position and orientation are freely movable,
A normal vector detection unit for detecting a normal vector of the measurement element;
A grouping unit for grouping the measurement elements for each direction of the normal vector based on a detection result of the normal vector detection unit;
A measurement order determination unit that determines the measurement order of the measurement elements in the order of measurement for each group grouped by the grouping unit;
A position and orientation measurement unit for measuring the position and orientation of the object to be measured in the coordinate measuring machine;
Based on the measurement result of the position and orientation measurement unit, the measurement element measurement unit that measures the measurement element by the probe according to the measurement order determined by the measurement order determination unit;
A measurement control device for a coordinate measuring machine. The measurement element measurement unit includes:
A rotation process for rotating the posture of the probe in accordance with the direction of the normal vector of the measurement element in the group to be measured;
Calibration processing for calibrating the posture of the probe subjected to the rotation processing;
The measurement control apparatus for a coordinate measuring machine according to claim 8, wherein an in-group measurement process for measuring the measurement element in the group to be measured by the probe subjected to the calibration process is repeatedly performed for each group. In a measurement program in a three-dimensional measuring machine that measures a plurality of measurement elements formed on an object to be measured with a probe whose position and orientation are freely movable,
A normal vector detection step of detecting a normal vector of the measurement element;
A grouping step for grouping the measurement elements for each direction of the normal vector based on a detection result of the normal vector detection step;
A measurement order determination step for determining the measurement order of the measurement elements in the order of measurement for each group grouped in the grouping step;
A position and orientation measurement step for measuring the position and orientation of the object to be measured in the coordinate measuring machine;
A measurement program for causing a computer to execute a measurement element measurement step for measuring each measurement element for each group according to the measurement order determined in the measurement order determination step by the probe based on the measurement result of the position and orientation measurement step. . The measuring element measuring step includes
A rotation process for rotating the posture of the probe in accordance with the direction of the normal vector of the group to be measured;
Calibration processing for calibrating the posture of the probe subjected to the rotation processing;
The measurement program according to claim 10, wherein an in-group measurement process for measuring the measurement element in the group to be measured by the probe subjected to the calibration process is repeatedly performed for each group.

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