JP6282944B2 - WIRING BOARD AND HIGH FREQUENCY DEVICE USING THE SAME - Google Patents
WIRING BOARD AND HIGH FREQUENCY DEVICE USING THE SAME Download PDFInfo
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Description
本発明は、高周波信号を伝送させるプリント基板、回路基板、フレキシブル配線基板等の高周波信号用の配線基板に関するものである。 The present invention relates to a high-frequency signal wiring board such as a printed board, a circuit board, or a flexible wiring board that transmits a high-frequency signal.
高周波用配線基板の一つに、コプレナー型高周波線路を用いた配線基板がある。コプレナー型の配線基板には、表面に配置された線路導体の両側に接地導体が形成されている。 One of high frequency wiring boards is a wiring board using a coplanar type high frequency line. In the coplanar wiring board, ground conductors are formed on both sides of a line conductor disposed on the surface.
図8は、従来のコプレナー型線路を有する配線基板の例を示す平面図である(例えば、特許文献1)。配線基板101の表面には、直線部および屈曲部を有する帯状の線路導体102が設けられている。また、線路導体102の両側には、線路導体102に沿って所定間隔を空けて接地導体103が配置され、コプレナー線路が形成されている。線路導体102の両側の接地導体103との間隔は均等な所定間隔となるように設計されている。 FIG. 8 is a plan view showing an example of a wiring board having a conventional coplanar type line (for example, Patent Document 1). On the surface of the wiring substrate 101, a strip-shaped line conductor 102 having a straight portion and a bent portion is provided. In addition, on both sides of the line conductor 102, ground conductors 103 are arranged at predetermined intervals along the line conductor 102 to form a coplanar line. The distance between the line conductor 102 and the ground conductor 103 on both sides is designed to be an equal predetermined distance.
そして、コプレナー線路は、線路導体102の屈曲部において、線路導体102と接地導体103との間の間隔W12を直線部における間隔W11よりも広くするように形成されている。図8に示されたコプレナー線路では、線路導体102の屈曲部の角を切り取り、外側の接地導体103との間の間隔W12を広くしてある。 The coplanar line is formed so that the interval W12 between the line conductor 102 and the ground conductor 103 is wider than the interval W11 in the straight line portion at the bent portion of the line conductor 102. In the coplanar line shown in FIG. 8, the corner of the bent portion of the line conductor 102 is cut off, and the interval W12 between the outer ground conductor 103 is widened.
コプレナー線路によって高周波信号を良好に伝播させるために、コプレナー線路に沿った特性インピーダンスができるだけ一定となるようにされる。図8に示すコプレナー線路においては、屈曲部において線路導体102と接地導体103との間隔を広くし、屈曲部における容量成分が小さくなるようにしている。これによって、屈曲部における特性インピーダンスを調整し、屈曲部において高周波信号に反射が生じるのを避けるようにしている。 In order to successfully propagate a high frequency signal through the coplanar line, the characteristic impedance along the coplanar line is made as constant as possible. In the coplanar line shown in FIG. 8, the distance between the line conductor 102 and the ground conductor 103 is increased at the bent portion so that the capacitance component at the bent portion is reduced. As a result, the characteristic impedance at the bent portion is adjusted to avoid reflection of the high-frequency signal at the bent portion.
この例のように、屈曲させる必要がある高周波信号線路の屈曲部において高周波信号を良好に伝播させるのは容易ではない。屈曲部においては、高周波信号に付随する電磁界が乱れ、どうしても反射損失や挿入損失が生じてしまうという問題があった。 As in this example, it is not easy to propagate a high-frequency signal satisfactorily in a bent portion of a high-frequency signal line that needs to be bent. In the bent portion, the electromagnetic field accompanying the high-frequency signal is disturbed, and there is a problem that reflection loss and insertion loss are inevitably caused.
本発明は、上記の課題に鑑みてなされたものであり、その目的は、高周波信号線路の屈曲部において生じる高周波損失等を低減する配線基板を提供することにある。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a wiring board that reduces high-frequency loss and the like generated in a bent portion of a high-frequency signal line.
本発明の一態様の配線基板は、誘電体から成る基板と、この基板の表面に形成された線路導体と、この線路導体の両側に間隔を隔てて配された接地導体とを備えたコプレナー線
路を有する配線基板において、前記コプレナー線路は、曲線状に屈曲する曲線部を有し、前記曲線部の曲がる方向と反対方向側において、前記線路導体と前記接地導体との間隔を広く、前記曲線部の曲がる方向と同じ方向側において、前記線路導体と前記接地導体との間隔を狭くして形成されており、前記線路導体は、前記曲線部において、前記曲線部の曲がる方向と反対方向側が切り欠かれて形成されているとともに、前記曲線部の曲がる方向と同じ方向側を突出させて形成されて、前記曲線部において全体が前記曲線部の曲がる方向に一定距離シフトしていることを特徴とする。
A wiring board according to an aspect of the present invention is a coplanar line including a dielectric substrate, a line conductor formed on the surface of the substrate, and a ground conductor disposed on both sides of the line conductor at intervals. The coplanar line has a curved portion that bends in a curved shape, and on the side opposite to the direction in which the curved portion bends, the interval between the line conductor and the ground conductor is wide, and the curved portion In the same direction as the bending direction, the gap between the line conductor and the grounding conductor is narrowed, and the line conductor is cut away at the curved portion in the direction opposite to the bending direction of the curved portion. together are formed by him, the same direction as the direction of bending of the curved portion is formed by projecting the entire in the curved portion by a certain distance shifted in the direction of bending of the curved portion Iruko The features.
また、前記曲線部において、前記曲線部の曲がる方向と同じ方向側の前記接地導体が突出させて形成されていてもよい。 Moreover, in the said curve part, the said ground conductor of the same direction side as the direction where the said curve part bends may protrude and be formed.
また、前記曲線部において、前記曲線部の曲がる方向と反対方向側の前記接地導体が切り欠かれて形成されていてもよい。 In the curved portion, the ground conductor on the side opposite to the direction in which the curved portion bends may be cut out.
本発明の一態様の高周波装置は、上記配線基板と、この配線基板の前記コプレナー線路に接続された高周波半導体素子とを備えていることを特徴とする。 A high-frequency device according to one embodiment of the present invention includes the wiring board and a high-frequency semiconductor element connected to the coplanar line of the wiring board.
本発明の一態様の配線基板によれば、コプレナー線路が、曲線部の曲がる方向と反対方向側において、線路導体と接地導体との間隔を広くし、曲線部の曲がる方向と同じ方向側において、線路導体と接地導体との間隔を狭くして形成されていることから、曲線部において生成される電磁界が変化し、反射損失を低減することができる。 According to the wiring board of one aspect of the present invention, the coplanar line is wide on the side opposite to the direction in which the curved portion is bent, and the distance between the line conductor and the ground conductor is widened, on the same direction side as the direction in which the curved portion is bent. Since the distance between the line conductor and the ground conductor is narrowed, the electromagnetic field generated in the curved portion changes, and the reflection loss can be reduced.
上述配線基板において、線路導体が、曲線部の曲がる方向と反対方向側が切り欠かれて形成されていると、曲線部の曲がる方向と反対方向側における線路導体と接地導体との間の間隔を広くすることができる。 In the above wiring board, when the line conductor is formed by cutting away the side opposite to the direction in which the curved portion is bent, the distance between the line conductor and the ground conductor on the side opposite to the direction in which the curved portion is bent is increased. can do.
また、線路導体が、曲線部の曲がる方向と同じ方向側を突出させて形成されていると、曲線部の曲がる方向と同じ方向側における線路導体と接地導体との間の間隔を狭くすることができる。 Further, if the line conductor is formed so as to protrude in the same direction as the direction in which the curved portion is bent, the distance between the line conductor and the ground conductor on the same direction side as the direction in which the curved portion is bent may be reduced. it can.
また、曲線部において、曲線部の曲がる方向と同じ方向側の記接地導体が突出させて形成されていると、線路導体と接地導体との間の間隔を狭くすることができる。 Further, if the ground conductor on the same direction side as the direction in which the curved portion bends is formed in the curved portion, the distance between the line conductor and the ground conductor can be reduced.
また、曲線部において、前記曲線部の曲がる方向と反対方向側の前記接地導体が切り欠かれて形成されていると、線路導体と接地導体との間の間隔を広くすることができる。 Further, in the curved portion, when the ground conductor on the side opposite to the direction in which the curved portion is bent is formed by being cut away, the distance between the line conductor and the ground conductor can be widened.
本発明の一態様の高周波装置は、上記配線基板を備えていることから、高周波性能に優れる高周波装置とすることができる。 Since the high-frequency device of one embodiment of the present invention includes the above-described wiring substrate, the high-frequency device can be a high-frequency device with excellent high-frequency performance.
以下、本発明の一実施形態に係る配線基板10について、図を参照して説明する。なお、図はいずれも模式的なものであって、実際の寸法関係とは異なることがある。また、以下の説明において上下左右表裏という用語は、単に図面上の位置関係を説明するために用いるものであり、実際の使用時における位置関係を意味するものではない。 Hereinafter, a wiring board 10 according to an embodiment of the present invention will be described with reference to the drawings. In addition, all the figures are schematic and may differ from an actual dimensional relationship. Further, in the following description, the terms “upper, lower, left, and right” are merely used for explaining the positional relationship on the drawings, and do not mean the positional relationship in actual use.
図1は本発明の一実施形態の配線基板10を示す平面図である。なお、図において、分かりやすくするために導体部分にハッチングを付している。これらハッチングは断面を示すものではない。 FIG. 1 is a plan view showing a wiring board 10 according to an embodiment of the present invention. In the figure, the conductor portions are hatched for easy understanding. These hatches do not indicate a cross section.
図1に示すように、配線基板10には、誘電体から成る基板1の表面に、線路導体2が形成されている。線路導体2の両側には、所定間隔を隔てて接地導体3が形成されている。線路導体2および両側の接地導体3は、いわゆるコプレナー線路を形成している。なお、配線基板10のコプレナー線路が形成されている部分の裏面に、第2接地導体(不図示)が形成され、いわゆるグランデッドコプレナー線路とされていてもよい。 As shown in FIG. 1, a wiring conductor 10 has a line conductor 2 formed on the surface of a substrate 1 made of a dielectric. Ground conductors 3 are formed on both sides of the line conductor 2 at a predetermined interval. The line conductor 2 and the ground conductors 3 on both sides form a so-called coplanar line. Note that a second ground conductor (not shown) may be formed on the back surface of the portion of the wiring board 10 where the coplanar line is formed, and a so-called grounded coplanar line may be formed.
線路導体2は、例えば蛇行するように配置され、曲線状に屈曲する曲線部Rを有している。線路導体2は、曲線部Rにおいて、曲線の曲がる方向と反対側の側部が一定幅に切り欠かれた切り欠き部2aを有している。典型的な線路導体2の幅は、例えば0.08mmである、また切り欠き部2aの幅は0.01mmである。通常、線路導体2の両側の接地導体3との間隔W1は均等になるように設計される。しかしながら、このことによって線路導体2の曲がる方向と反対側の接地導体3と線路導体2との間隔W2は、曲線部Rでない部分の間隔W1よりも広くなっている。 The line conductor 2 is arranged to meander, for example, and has a curved portion R that bends in a curved shape. The line conductor 2 has a cutout portion 2a in which the side portion on the opposite side to the direction in which the curve bends is cut out at a constant width in the curved portion R. A typical width of the line conductor 2 is, for example, 0.08 mm, and a width of the notch portion 2a is 0.01 mm. Normally, the distance W1 between the ground conductors 3 on both sides of the line conductor 2 is designed to be uniform. However, the distance W2 between the ground conductor 3 and the line conductor 2 on the opposite side to the direction in which the line conductor 2 bends is thereby wider than the interval W1 of the portion that is not the curved portion R.
一方、線路導体2の曲線の曲がる方向と同じ方向側の側部には一定幅に突出する形状の突出部2bが設けられている。典型的な突出部2bの突出幅は、例えば0.01mmである。これによって、線路導体2の曲がる方向と同じ方向側の接地導体3と線路導体2との間隔W3は、曲線部Rでない部分の間隔W1よりも狭くなっている。 On the other hand, a protruding portion 2b having a shape protruding in a constant width is provided on a side portion on the same side as the direction in which the curve of the line conductor 2 is bent. The protrusion width of a typical protrusion 2b is, for example, 0.01 mm. As a result, the interval W3 between the ground conductor 3 and the line conductor 2 on the same direction side as the direction in which the line conductor 2 is bent is narrower than the interval W1 of the portion that is not the curved portion R.
なお、曲線の曲がる方向とは、曲線の曲率中心が存在する側であることを意味し、曲線の曲がる方向と反対側とは、この曲率中心が存在する側とは曲線を跨いで反対側であることを意味する。以降説明においては、曲線の曲がる方向と同じ方向を曲線の内側、曲線の曲がる方向と反対側方向を曲線の外側とも称する。 The direction in which the curve bends means the side where the center of curvature of the curve exists, and the side opposite to the direction in which the curve bends is the opposite side across the curve from the side where this center of curvature exists. It means that there is. In the following description, the same direction as the curve bending direction is also referred to as the inside of the curve, and the direction opposite to the curve bending direction is also referred to as the outside of the curve.
図1に示す例においては、曲線部Rにおける線路導体2の外側の側部が切り欠かれ、線路導体2の内側の側部が突出されている。つまり、線路導体2は、曲線部Rにおいて、全体が曲線部Rの内側方向側に一定距離だけシフトさせたような形状に形成されている。 In the example shown in FIG. 1, the outer side portion of the line conductor 2 in the curved portion R is cut out, and the inner side portion of the line conductor 2 is projected. That is, the line conductor 2 is formed in a shape such that the entire curved portion R is shifted by a certain distance toward the inner side of the curved portion R.
曲線部Rの外側方向における線路導体2と接地導体3との間隔W2を広くし、曲線部Rの内側方向における線路導体2と接地導体3との間隔W3を狭くする手段としては、この他にも様々な形態とすることが可能である。 As another means for widening the interval W2 between the line conductor 2 and the ground conductor 3 in the outer direction of the curved portion R and narrowing the interval W3 between the line conductor 2 and the ground conductor 3 in the inner direction of the curved portion R, Can be in various forms.
例えば、図2に示す例は、曲線部Rにおいて、曲線部Rの内側方向側の接地導体3が一定幅に突出させた突出部3aとして形成されている。典型的な突出部3aの突出幅は、例えば0.01mmである。これによって、線路導体2の内側方向の線路導体2と接地導体3との間隔を狭くすることができる。 For example, in the example illustrated in FIG. 2, in the curved portion R, the ground conductor 3 on the inner side of the curved portion R is formed as a protruding portion 3 a that protrudes with a constant width. The protrusion width of the typical protrusion 3a is, for example, 0.01 mm. As a result, the distance between the line conductor 2 and the ground conductor 3 in the inner direction of the line conductor 2 can be reduced.
一方、曲線部Rにおいて、曲線部Rの外側方向側の接地導体3が一定幅切り欠かれた切り欠き部3bを有する形状に形成されている。典型的な切り欠き部3bの切り欠き幅は、例えば0.01mmである。これによって、線路導体2の外側方向の線路導体2と接地導
体3との間隔を広くすることができる。
On the other hand, in the curved portion R, the ground conductor 3 on the outer side of the curved portion R is formed in a shape having a cutout portion 3b cut out by a certain width. The notch width of the typical notch 3b is, for example, 0.01 mm. As a result, the distance between the line conductor 2 and the ground conductor 3 in the outer direction of the line conductor 2 can be increased.
図2に示す例においては、曲線部Rにおいて、曲線部Rの外側方向側に接地導体3全体をシフトさせたような形状に形成されている。これによって、曲線部Rの外側方向側において線路導体2と接地導体3との間隔W2を広くし、曲線部Rの内側方向側において線路導体2と接地導体3との間隔W3を狭くすることができる。 In the example shown in FIG. 2, the curved portion R is formed in a shape such that the entire ground conductor 3 is shifted to the outer side of the curved portion R. As a result, the distance W2 between the line conductor 2 and the ground conductor 3 can be increased on the outer side of the curved portion R, and the distance W3 between the line conductor 2 and the ground conductor 3 can be decreased on the inner side of the curved portion R. it can.
また、上述の手段を組み合わせることによって実現してもよい。例えば、図3に示す例においては、曲線部Rにおいて、線路導体2の外側方向側の側部に切り欠き部2aが設けられている。一方、線路導体2の内側方向側の側部に突出部2bを設ける代わりに、内側方向側の接地導体3の側部に突出部3aが設けられている。これによって、曲線部Rの外側方向側において線路導体2と接地導体3との間隔を広くし、曲線部Rの内側方向側において線路導体2と接地導体3との間隔を狭くしている。 Moreover, you may implement | achieve by combining the above-mentioned means. For example, in the example shown in FIG. 3, in the curved portion R, a notch 2 a is provided on the side portion on the outer side of the line conductor 2. On the other hand, instead of providing the protruding portion 2b on the inner side of the line conductor 2, the protruding portion 3a is provided on the side of the ground conductor 3 on the inner side. Thus, the distance between the line conductor 2 and the ground conductor 3 is increased on the outer side of the curved part R, and the distance between the line conductor 2 and the ground conductor 3 is decreased on the inner side of the curved part R.
さらに、線路導体2の両側に切り欠き部2aおよび突出部2bを設け、線路導体2の両側の接地導体3に突出部3aと切り欠き部3bとを設けて実現してもよい。例えば、図4は、曲線部Rにおいて、線路導体2の両側に切り欠き部2aと突出部2bとを設け、同時に、接地導体3に突出部3aと切り欠き部3bとを設けた例を示す。 Further, it may be realized by providing notches 2 a and protrusions 2 b on both sides of the line conductor 2, and providing the protrusions 3 a and notches 3 b on the ground conductor 3 on both sides of the line conductor 2. For example, FIG. 4 shows an example in which the cutout portion 2a and the protruding portion 2b are provided on both sides of the line conductor 2 in the curved portion R, and at the same time, the protruding portion 3a and the cutout portion 3b are provided in the ground conductor 3. .
これら、曲線部Rにおいて、線路導体2の外側方向の線路導体2と接地導体3との間隔W2を広くし、内側方向の線路導体2と接地導体3との間隔W3を狭くすることによって、コプレナー線路の反射損失を低くすることができる。 In the curved portion R, the gap W2 between the line conductor 2 and the ground conductor 3 in the outer direction of the line conductor 2 is widened, and the gap W3 between the line conductor 2 and the ground conductor 3 in the inner direction is narrowed. The reflection loss of the line can be reduced.
図5は、周波数を50GHzまで変化させたときのコプレナー線路の反射損失をシミュレートした結果をグラフにした図である。図5において、曲線Aは、図1に示す一方のコプレナー線路Aにおける両側の接地導体3との間隔が直線部と同じ間隔である従来のコプレナー線路とした場合の反射損失をプロットしたものである。曲線Bは、図1に示す例の一方のコプレナー線路Aの反射損失をプロットしたものである。図1に示す例の一方のコプレナー線路Aの反射損失は従来のコプレナー線路の反射損失よりも低くなることが図から判る。 FIG. 5 is a graph showing the result of simulating the reflection loss of the coplanar line when the frequency is changed to 50 GHz. In FIG. 5, curve A is a plot of the reflection loss in the case of a conventional coplanar line in which the distance between the ground conductors 3 on both sides of one coplanar line A shown in FIG. . Curve B is a plot of the reflection loss of one coplanar line A in the example shown in FIG. It can be seen from the figure that the reflection loss of one coplanar line A in the example shown in FIG. 1 is lower than the reflection loss of the conventional coplanar line.
高周波信号が伝播される際、線路導体2に沿って、線路導体2の側部と両側の接地導体3の側部との間に電磁界が生じる。直線部においては線路導体2の両側で対称な電磁界が生じて高周波信号が伝播されるのであるが、曲線部Rにおいては、線路導体2の内側と外側とで位相差が生じることになり、このような電磁界の乱れが反射損失増大等の結果になって現れるのではないかと考えられる。 When the high-frequency signal is propagated, an electromagnetic field is generated along the line conductor 2 between the side of the line conductor 2 and the side of the ground conductor 3 on both sides. In the straight line portion, a symmetrical electromagnetic field is generated on both sides of the line conductor 2 and a high-frequency signal is propagated. However, in the curved portion R, a phase difference occurs between the inside and the outside of the line conductor 2. It is considered that such disturbance of the electromagnetic field appears as a result of an increase in reflection loss.
本発明の一実施形態に係る配線基板10においては、曲線部Rにおいて、線路導体2の内側における接地導体3との間隔が狭い。したがって線路導体2と接地導体3との結合が線路導体2の内側で強くなる。一方、線路導体2の外側における接地導体3との間隔が広い。したがって線路導体2と接地導体3との結合が線路導体2の外側で弱くなる。そこで、高周波信号は主として線路導体2の内側における電磁結合を通じて伝播することになり、曲線部Rの内側と外側との位相差によって生じる電磁界の乱れ等の影響が緩和されることで、高周波特性が改善するのではないかと推測される。 In the wiring board 10 according to an embodiment of the present invention, the distance between the curved conductor R and the ground conductor 3 inside the line conductor 2 is narrow. Therefore, the coupling between the line conductor 2 and the ground conductor 3 is strengthened inside the line conductor 2. On the other hand, the distance from the ground conductor 3 outside the line conductor 2 is wide. Therefore, the coupling between the line conductor 2 and the ground conductor 3 is weak outside the line conductor 2. Therefore, the high-frequency signal propagates mainly through electromagnetic coupling inside the line conductor 2, and the influence of the disturbance of the electromagnetic field caused by the phase difference between the inside and the outside of the curved portion R is alleviated. Is estimated to improve.
基板1には、誘電体、すなわち電気的絶縁材が用いられる。具体的には、ポリイミド樹脂等を用いたフレキシブル基板や、エポキシ樹脂等の樹脂を用いた有機基板、セラミックスまたはガラス等の無機材を用いたリジッド回路基板等、一般的に回路基板に用いられる電気的絶縁材を用いることができる。 A dielectric material, that is, an electrical insulating material is used for the substrate 1. Specifically, electric circuits generally used for circuit boards, such as flexible boards using polyimide resins, organic boards using resins such as epoxy resins, rigid circuit boards using inorganic materials such as ceramics or glass, etc. Insulating material can be used.
これら基板1の表面に、銅や銀,マンガン,モリブデン,その他の金属や合金から成る金属導体をめっき、印刷、蒸着、焼結等することによって、線路導体2,接地導体3が形成される。 A line conductor 2 and a ground conductor 3 are formed on the surface of the substrate 1 by plating, printing, vapor deposition, sintering, or the like on a metal conductor made of copper, silver, manganese, molybdenum, or other metals or alloys.
これら配線基板10は高周波装置30の内部において高周波信号を接続するために用いられる。図6に、配線基板10が用いられる高周波装置30の一例として、半導体パッケージ20に高周波半導体素子24が封止された高周波半導体装置30の例を示す。図7は、図6に示される半導体パッケージ20部の平面図である。 These wiring boards 10 are used to connect a high-frequency signal inside the high-frequency device 30. FIG. 6 shows an example of the high frequency semiconductor device 30 in which the high frequency semiconductor element 24 is sealed in the semiconductor package 20 as an example of the high frequency device 30 in which the wiring substrate 10 is used. FIG. 7 is a plan view of the semiconductor package 20 shown in FIG.
この半導体パッケージ20は、一例を挙げると、筐体21が鉄−ニッケル−コバルト合金等の金属やアルミナセラミックス等のセラミックス材によって形成されている。その筐体21の一側壁を貫通するように、アルミナセラミックス等のセラミックスから成り、半導体パッケージ20の内外を接続する接続導体を備えた入出力端子22が嵌着されたものである。 For example, in the semiconductor package 20, the casing 21 is formed of a metal such as an iron-nickel-cobalt alloy or a ceramic material such as alumina ceramics. An input / output terminal 22 made of ceramics such as alumina ceramics and having connection conductors for connecting the inside and outside of the semiconductor package 20 is fitted so as to penetrate one side wall of the housing 21.
図6,図7に示す例において、配線基板10は、半導体パッケージ20の高周波入出力端子22の一部として用いられている。そして、入出力端子22の枠体21外側部分には、リード端子等(不図示)が接続される。リード端子は、それぞれ入出力端子22上の配線基板10の線路導体2、および接地導体3に電気的に接続される。また、配線基板10の線路導体2の他端および接地導体3の他端には高周波半導体素子24の電極がボンディングワイヤ等を介して接続される。 In the example shown in FIGS. 6 and 7, the wiring substrate 10 is used as a part of the high-frequency input / output terminal 22 of the semiconductor package 20. A lead terminal or the like (not shown) is connected to an outer portion of the input / output terminal 22 on the frame body 21. The lead terminals are electrically connected to the line conductor 2 and the ground conductor 3 of the wiring board 10 on the input / output terminal 22, respectively. In addition, the electrode of the high-frequency semiconductor element 24 is connected to the other end of the line conductor 2 and the other end of the ground conductor 3 of the wiring board 10 through bonding wires or the like.
図6に示した例の他に、例えば、高周波半導体素子24が搭載される基板23に配線基板10を用いてもよい。この場合、入出力端子22とボンディングワイヤ等を介して配線基板10の線路導体2および接地導体3に接続される。また、高周波半導体素子24が、線路導体2および接地導体3に半田バンプ等を介して接続される。 In addition to the example shown in FIG. 6, for example, the wiring substrate 10 may be used for the substrate 23 on which the high-frequency semiconductor element 24 is mounted. In this case, it is connected to the line conductor 2 and the ground conductor 3 of the wiring substrate 10 via the input / output terminal 22 and bonding wires. Further, the high-frequency semiconductor element 24 is connected to the line conductor 2 and the ground conductor 3 via solder bumps or the like.
このように、配線基板10を用いて外部回路基板と半導体パッケージ20内部の高周波半導体素子24とを接続することによって、高周波入出力信号の高周波特性が改善される。よって、良好な性能を有する高周波半導体装置30とすることができる。 Thus, by connecting the external circuit board and the high-frequency semiconductor element 24 in the semiconductor package 20 using the wiring board 10, the high-frequency characteristics of the high-frequency input / output signals are improved. Therefore, the high frequency semiconductor device 30 having good performance can be obtained.
なお、本発明は上述の実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。 In addition, this invention is not limited to the above-mentioned embodiment, A various change, improvement, etc. are possible in the range which does not deviate from the summary of this invention.
例えば、本実施形態においては、基板1の表面に線路導体2および接地導体3を形成した配線基板10を示したが、これら配線基板10の上層または下層にさらに他の配線基板10を積層し、多層の配線基板10としてもよい。 For example, in the present embodiment, the wiring board 10 in which the line conductor 2 and the ground conductor 3 are formed on the surface of the board 1 is shown. However, another wiring board 10 is laminated on the upper layer or the lower layer of the wiring board 10, A multilayer wiring board 10 may be used.
また、本実施形態では、一本の線路導体2とその両側の接地導体3とから成る一本のコプレナー線路を形成した例を代表として説明したが、これらコプレナー線路を複数並列に配置し、複数のコプレナー線路を有する配線基板10としてもよい。 Further, in the present embodiment, the example in which one coplanar line composed of one line conductor 2 and the ground conductors 3 on both sides thereof is described as a representative example, but a plurality of these coplanar lines are arranged in parallel. It is good also as the wiring board 10 which has this coplanar track | line.
1:基板
2:線路導体
2a:(線路導体の)切り欠き部
2b:(線路導体の)突出部
3:接地導体
3a:(接地導体の)突出部
3b:(接地導体の)切り欠き部
R:曲線部
10:配線基板
20:半導体パッケージ
30:高周波装置
1: Substrate 2: Line conductor 2a: Notched portion 2b (of the line conductor): Protruding portion 3: (of the line conductor): Grounding conductor 3a: Protruding portion 3b (of the grounding conductor): Notched portion R (of the grounding conductor) : Curve portion 10: Wiring substrate 20: Semiconductor package 30: High-frequency device
Claims (5)
前記コプレナー線路は、曲線状に屈曲する曲線部を有し、前記曲線部の曲がる方向と反対方向側において、前記線路導体と前記接地導体との間隔を広く、前記曲線部の曲がる方向と同じ方向側において、前記線路導体と前記接地導体との間隔を狭くして形成されており、前記線路導体は、前記曲線部において、前記曲線部の曲がる方向と反対方向側が切り欠かれて形成されているとともに、前記曲線部の曲がる方向と同じ方向側を突出させて形成されて、前記曲線部において全体が前記曲線部の曲がる方向に一定距離シフトしていることを特徴とする配線基板。 In a wiring board having a coplanar line comprising a substrate made of a dielectric, a line conductor formed on the surface of the substrate, and a ground conductor disposed on both sides of the line conductor with a space therebetween,
The coplanar line has a curved portion that bends in a curved shape, and on the opposite side to the direction in which the curved portion bends, the interval between the line conductor and the ground conductor is wide, and the same direction as the direction in which the curved portion is bent. On the side, the line conductor and the ground conductor are formed with a narrow interval, and the line conductor is formed by cutting away the side of the curved portion in the direction opposite to the bending direction of the curved portion. In addition, the wiring board is formed so as to protrude in the same direction as the bending direction of the curved portion, and the entire curved portion is shifted by a certain distance in the bending direction of the curved portion .
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