JP6070530B2 - Method for penetrating fine holes into cavity provided in member and method for producing gas releasing metal roll using the same - Google Patents

Description

  The present invention relates to a method for penetrating a fine hole into a cavity provided in a member, and a method for producing a gas releasing metal roll having a gas releasing hole on an outer peripheral surface by using this penetrating method.

  In electronic devices such as liquid crystal panels, notebook computers, digital cameras, and mobile phones, flexible wiring boards are used in which wiring having a predetermined pattern is formed on a heat-resistant resin film. This flexible wiring board can be obtained by patterning wiring on a resin film with a metal film that has a metal film formed on one or both sides of a heat-resistant resin film. In recent years, however, the wiring pattern has become increasingly more delicate and dense. Along with this, a smooth film without wrinkles is required for the resin film with metal film.

  As a manufacturing method of this kind of resin film with a metal film, conventionally, a method of manufacturing a metal foil by attaching it to a heat resistant resin film with an adhesive (manufacturing method of a three-layer substrate), a heat resistant resin solution is applied to the metal foil. After coating, a method of producing by drying (casting method), a method of producing a metal film on a heat-resistant resin film by a vacuum film forming method alone or by a combination of a vacuum film forming method and a wet plating method ( Metallizing method) is known. Examples of the vacuum film forming method used for the metalizing method include a vacuum deposition method, a sputtering method, an ion plating method, and an ion beam sputtering method.

  For example, with respect to the metalizing method, Patent Document 1 describes a method of forming a conductor layer by sputtering copper after sputtering a chromium layer on a polyimide insulating layer. Patent Document 2 discloses a flexible film in which a first metal thin film formed by sputtering using a copper nickel alloy as a target and a second metal thin film formed by sputtering using a copper as a target are formed on a polyimide film in this order. Circuit board materials are disclosed. In addition, when producing a resin film with a metal film by performing vacuum film formation on a heat-resistant resin film such as the polyimide film described above, a film forming apparatus generally called a sputtering web coater is used.

  By the way, in the vacuum film-forming method mentioned above, although sputtering method is generally excellent in adhesive force, it is said that the heat load given to a heat resistant resin film is large compared with vacuum evaporation method. It is also known that when a large heat load is applied to the heat resistant resin film during film formation, the film is likely to be wrinkled. In order to prevent the generation of this wrinkle, in the above-described sputtering web coater, a state in which a long heat-resistant resin film conveyed by a roll-to-roll method is wound around a metal roll also called a can roll having a refrigerant circulation path inside In this case, the heat of the long heat-resistant resin film generated by the film formation is cooled from the back side.

  For example, Patent Document 3 discloses an unwinding type (roll-to-roll type) vacuum sputtering apparatus which is an example of a sputtering web coater. This unwinding / winding-type vacuum sputtering apparatus is equipped with a cooling roll that plays the role of the above metal roll, and further has a long heat resistance by a sub-roll provided on at least the film feeding side or the feeding side of the cooling roll. Control is performed so that the resin film is in close contact with the outer peripheral surface of the cooling roll.

  However, as described in Non-Patent Document 1, since the outer peripheral surface of the metal roll is not flat when viewed microscopically, the outer peripheral surface of the metal roll and the long heat-resistant resin film wound around and conveyed There is a gap (gap part) that is separated via a vacuum space. For this reason, it cannot be said that the heat of the long heat-resistant resin film generated during film formation is efficiently transferred to the metal roll, which may cause wrinkling of the film.

  Then, the technique which introduce | transduces gas from the outer peripheral surface side of a metal roll to the gap part between the outer peripheral surface of a metal roll and a elongate heat resistant resin film is proposed. For example, in Patent Document 4, a large number of fine holes serving as gas discharge holes are provided on the outer peripheral surface of the metal roll, and gas is introduced into the gap portion from the outer peripheral surface side of the metal roll through these fine holes. A technique for increasing the thermal conductivity compared to vacuum is disclosed.

According to Non-Patent Document 2, when the introduced gas is argon gas and the introduced gas pressure is 500 Pa, when the distance between the outer peripheral surface of the metal roll and the heat resistant resin film is a molecular flow region of about 40 μm or less, The thermal conductance of the gap portion is assumed to be 250 (W / m ² · K).

Japanese Patent Laid-Open No. 2-98994 Japanese Patent No. 3447070 Japanese Patent Laid-Open No. 62-247073 International Publication No. 2005/001157 pamphlet

"Vacuum Heat Transfer Models for Web Substrates: Review of Theory and Experimental Heat Transfer Data," 2000 Society of Vacuum Coaters, 43rd. Annual Technical Conference Proceeding, Denver, April 15-20, 2000, p.335 "Improvement of Web Condition by the Deposition Drum Design," 2000 Society of Vacuum Coaters, 50th. Annual Technical Conference Proceeding (2007), p.749

  The so-called gas releasing metal roll for introducing gas from the gas releasing holes provided on the outer peripheral surface as shown in Patent Document 4 described above has a thermal conductance of the gap portion between the outer peripheral surface and the heat resistant resin film wound around the outer peripheral surface. Since it can be increased, it is a very effective means as a method for suppressing the generation of wrinkles. In such a gas release metal roll, generally, a plurality of gas introduction paths are provided at substantially equal intervals over the entire circumference in a thick portion of a cylindrical member constituting the metal roll, and each of the plurality of gas introduction paths is provided. A plurality of gas discharge holes opened on the outer peripheral surface communicate with each other.

  Therefore, in the production of such a gas releasing metal roll, first, a gas introduction path is first drilled in the thick part of the cylindrical member using a gun drill, and the laser is irradiated from the outer peripheral surface toward the gas introduction path to release the gas. Fine holes that become holes are penetrated. However, it has been difficult to determine that the gas discharge hole has penetrated the gas introduction path in such laser processing. Further, when the metal roll is viewed from the central axis direction, the gas discharge hole is not necessarily drilled from the normal direction of the outer peripheral surface toward the gas introduction path, and may be drilled from a direction inclined from the normal line. In this case, it is even more difficult to determine that it has penetrated.

  In particular, when drilling at the center of the metal roll in the width direction, it occurs at the moment of penetration because the penetration state of the position behind the opening of the gas introduction path located at the end of the metal roll is confirmed. It is difficult to determine penetration with plasma light (assist gas plasma). Moreover, as long as the gas discharge hole penetrates, the smaller the inner diameter is, the more desirable it is. Laser irradiation is performed with the minimum amount of energy, so it is easy to confirm the penetration by setting the energy higher. Is not desirable.

  The present invention has been made in view of such conventional problems, and it is easily determined that a fine hole has been penetrated when drilling by laser processing into a cavity provided inside a metal member. And a method for producing a gas releasing metal roll for use in a sputtering web coater that uses a roll-to-roll method to perform a process such as film formation on a long resin film substrate. The purpose is to do.

In order to achieve the above object, the method for penetrating a microhole according to the present invention includes a step of providing a hollow portion extending in one direction from an end surface of the thick portion of the metal member in the thickness direction. a method through which the micropores of the inner diameter 30μm~1000μm extending in a direction crossing to the one direction relative to the cavity in the laser processing from the outer surface of the member, an opening in the end face of the cavity After the laser processing is performed with the fluororesin rod inserted from the part, the penetration of the fine hole is confirmed by examining the laser mark of the rod.

The method for producing a gas releasing metal roll according to the present invention includes a gas releasing metal roll in which a plurality of gas releasing holes having an inner diameter of 30 μm to 1000 μm are arranged on the outer peripheral surface of a metal cylindrical body that rotates about a central axis. In the manufacturing method, the step of providing a plurality of gas introduction paths extending in the central axis direction at substantially equal intervals in the circumferential direction over the entire circumference in the central portion in the thickness direction of the thick portion of the cylindrical body And a step of penetrating a plurality of gas discharge holes opened on the outer peripheral surface side of the cylindrical body by laser processing with respect to each of the plurality of gas introduction paths, and the target gas in the laser processing It is characterized in that to check the penetration of the plurality of gas discharge holes by examining the laser marks of fluororesin rod which had been inserted into the introduction path.

  According to the present invention, it is possible to very easily and surely confirm that a fine hole has been penetrated during drilling by laser processing into a cavity provided inside a metal member. Further, since laser processing is performed after the fluororesin rod is inserted into the cavity, it is possible to prevent the inner wall surface of the cavity other than the through hole from being damaged by the laser.

It is a schematic sectional drawing which shows one specific example of the gas discharge | release metal roll which can be produced using the penetration method of the fine hole of this invention. It is a typical perspective view of the outer cylinder part which the gas discharge | release metal roll of FIG. 1 has. It is a fragmentary perspective view explaining the preparation procedure of the outer cylinder part of FIG. It is a perspective view which shows a mode that the rod made from a fluororesin is inserted in the case of preparation of the outer cylinder part of FIG. It is a fragmentary perspective view which shows a mode that the laser processing is performed in the state which inserted the rod made from a fluororesin in the case of preparation of the outer cylinder part of FIG. It is a fragmentary perspective view which shows the other specific example of the outer cylinder part which the gas discharge | release metal roll of FIG. 1 has. It is a schematic diagram which shows one specific example of the film-forming apparatus of the long heat resistant resin film by the roll-to-roll system to which the gas discharge | release metal roll of FIG. 1 is applied suitably.

  Hereinafter, with respect to an embodiment of the fine hole penetrating method according to the present invention, the case where the penetrating method is applied to manufacture of a gas releasing metal roll mounted on a vacuum film forming apparatus (sputtering web coater) to be described later is taken as an example. explain. Such a gas releasing metal roll generally has a metal outer tube portion 1 that rotates about a central axis O as shown in FIG. 1, and a thick portion thereof has a plurality of portions extending in the direction of the central axis O. And a plurality of gas discharge holes 6 communicating with each of the plurality of gas introduction paths 5 and opening on the outer peripheral surface of the outer cylinder portion 1 are provided.

  First, the structure of the gas releasing metal roll will be described in detail with reference to FIG. In this gas releasing metal roll, a plurality of gas introduction passages 5 extending in the direction of the central axis O are formed in the thick portion of the metal outer cylinder portion 1 over the entire circumference with substantially equal intervals in the circumferential direction. Is provided. A plurality of gas discharge holes 6 that open on the outer peripheral surface of the outer cylinder portion 1 communicate with each of the plurality of gas introduction paths 5. The plurality of gas discharge holes 6 communicating with each gas introduction path 5 are arranged at substantially equal intervals along the extending direction of the gas introduction path 5.

  A cylindrical inner cylinder portion 2 is provided concentrically with respect to the outer cylinder portion 1 inside the outer cylinder portion 1. Moreover, the disc-shaped 1st cover part 3a and the 2nd cover part 3b are attached to the both ends of the outer cylinder part 1, respectively. A space defined by the outer cylinder portion 1, the inner cylinder portion 2, and the first lid portion 3a and the second lid portion 3 is a refrigerant circulation path 4 through which a refrigerant such as cooling water flows. Such a double pipe structure composed of the outer cylinder part 1 and the inner cylinder part 2 is called a jacket roll structure.

  The structure of the refrigerant circulation path 4 is not limited to such a jacket roll structure, and may be a structure in which a pipe is spirally wound inside the outer cylinder portion 1. The refrigerant in the refrigerant circulation path 4 can be circulated through a flow path in the shaft provided in the central axis O portion with a refrigerant cooling apparatus (not shown) provided outside the vacuum film forming apparatus. Thus, the temperature of the outer cylinder portion 1 of the gas releasing metal roll can be adjusted.

  A gas rotary joint 7 is provided at one end of the outer cylinder 1, and a gas supply path 8 for supplying gas generated by a gas supply device (not shown) outside the vacuum film forming apparatus is connected to the gas rotary joint 7. doing. Thereby, the gas distributed by the gas rotary joint 7 is supplied to the plurality of gas introduction paths 5 described above. The gas supplied to the plurality of gas introduction paths 5 is discharged from the outer peripheral surface of the outer cylinder portion 1 through the plurality of gas discharge holes 6 that communicate with each other. Since a long heat resistant resin film is wound around the outer peripheral surface of the outer cylindrical portion 1 as described later, gas is introduced into the gap portion between the outer peripheral surface of the outer cylindrical portion 1 and the long heat resistant resin film. I can do it.

  A long heat-resistant resin film is wound around the outer peripheral surface of the outer cylinder part 1 in terms of the number of the gas introduction paths 5 provided in the outer cylinder part 1 and the number of gas discharge holes 6 communicated with each gas introduction path 5. It can be determined as appropriate according to the angle range (also referred to as a holding angle), the tension of the long heat-resistant resin film when wound around the outer cylindrical portion 1, the amount of gas released into the gap portion, and the like. Further, the inner diameter of each gas discharge hole 6 is not particularly limited as long as it is a size capable of satisfactorily introducing gas into the gap portion between the outer peripheral surface of the outer cylinder portion 1 and the long heat-resistant resin film. If the inner diameter of the hole 6 exceeds 1000 μm, the cooling efficiency in the vicinity of the hole 6 may be reduced. Therefore, generally, the inner diameter of the gas discharge hole 6 is preferably about 30 to 1000 μm.

  As for a plurality of gas discharge holes 6 communicating with each gas introduction path 5, it is possible to arrange a large number of gas discharge holes 6 having a small inner diameter with a narrow pitch so that the thermal conductivity is uniform over the entire surface of the outer cylinder portion 1. It is preferable in that it can be performed. This is because the outer circumferential surface of the outer cylinder portion 1 and the long heat-resistant resin film are most separated from each other just above the gas discharge hole 6 as viewed microscopically, and the thermal conductivity is lowered at this place. . However, since a processing technique in which a large number of gas discharge holes 6 having a small inner diameter are provided at a narrow pitch is difficult, it is practically preferable to arrange the gas discharge holes 6 having an inner diameter of about 100 to 500 μm at a pitch of 5 to 10 mm.

  The gas rotary joint 7 is provided with a mechanism for shutting off the supply of gas to the gas introduction path 5 located outside the so-called holding angle around which the long heat-resistant resin film is wound, among the plurality of gas introduction paths 5. It is preferable. This is because, for example, a gas supply restriction means such as a valve that operates electrically or electromagnetically is provided in each distributed flow path formed in the gas rotary joint 7, and the gas introduction located at a position other than the holding angle is provided. This can be realized by operating the gas supply restricting means corresponding to the path 5 to the closed position.

  As a result, gas is released only from the gas discharge holes 6 located within the holding angle around which the long heat resistant resin film is wound, and from the gas discharge holes 6 other than the holding angle around which the long heat resistant resin film is not wound. No gas is released. Therefore, most of the gas supplied through the gas supply path 8 can be introduced into the gap formed between the outer peripheral surface of the outer cylinder portion 1 and the long heat-resistant resin film. It becomes easy to control the gas flow rate so as to keep it substantially constant, and it becomes possible to make the thermal conductance between the outer peripheral surface of the outer cylinder part 1 and the long heat-resistant resin film more uniform.

  In addition, the distance which the outer cylinder part 1 and a elongate heat resistant resin film separate differs with the kind and thickness of this resin film, the tension | tensile_strength at the time of conveyance of this resin film, the gas introduction amount, etc. If the separation distance between the outer peripheral surface of the outer cylinder part 1 and the long heat-resistant resin film is about 40 μm, the vacuum film forming apparatus includes gas introduced into the gap part from the gas discharge hole 6 of the outer cylinder part 1. It can be evacuated with a vacuum pump. Therefore, if the gas introduced into the gap is the same as the gas in the sputtering atmosphere, the sputtering atmosphere is not contaminated. As such a gas, for example, argon having a relatively good thermal conductivity is desirable.

  The gas release metal roll described above can be suitably used for plasma processing and ion beam processing in addition to the vacuum film forming apparatus. These plasma treatment and ion beam treatment are performed in a reduced pressure atmosphere in a vacuum chamber for the purpose of surface modification of the long resin film. Become. Therefore, if the gas releasing metal roll as described above is used, the separation distance between the outer peripheral surface of the gas releasing metal roll and the long resin film can be maintained almost constant, and the thermal conductance can be easily made uniform. Therefore, the generation of wrinkles can be suppressed.

  Note that the plasma treatment means that a long plasma is produced by generating an oxygen plasma or a nitrogen plasma by performing discharge in a reduced pressure atmosphere made of a mixed gas of argon and oxygen or a mixed gas of argon and nitrogen by a known plasma processing method. This is a method of treating a resin film. On the other hand, ion beam treatment uses a known ion beam source, generates a plasma discharge with a magnetic field gap to which a strong magnetic field is applied, and irradiates positive ions in the plasma as an ion beam by electrolysis with an anode. A method of processing a film.

  Next, a method for manufacturing the above-described gas releasing metal roll will be described. First, as shown in FIG. 3A, a cylindrical member 100 such as a pipe, a seamless pipe, or a cast pipe joined by butt welding or friction stir welding is prepared as a base material of the outer cylindrical portion 1. As the material of the cylindrical member 100, aluminum, copper, and stainless steel, which are excellent in thermal conductivity and workability, are suitable. After attaching an inner cylinder part and the disk-shaped cover part of both sides inside this cylindrical member 100 previously, as shown in FIG.3 (b) using the gun drill for the thick part, the center of the cylindrical member 100 is shown. A plurality of gas introduction passages 5 extending in the axial direction are provided over the entire circumference at substantially equal intervals in the circumferential direction of the cylindrical member 100.

  The number of the gas introduction paths 5 provided in the cylindrical member 100 may be 360, for example, by setting the pitch of the gas introduction paths 5 in the circumferential direction to 1 °, which is the same as that of the conventional gas releasing metal roll, or the conventional two. 180 may be provided every 2 ° which is a double pitch. The length of each gas introduction path 5 is preferably 50% or more of the width of the cylindrical member 100. If this length is less than 50%, the number of gas discharge holes 6 communicating therewith is insufficient, and a sufficient amount of gas cannot be introduced between the long heat resistant resin film and the outer peripheral surface of the metal roll. It is.

  The gun drill has a practical limit of a depth (drilling length) of about 100 times the diameter, and it is difficult to make a narrow hole long (deep). For example, when considering the productivity of the resin film with a metal film, the width of the metal roll used exceeds 700 mm. If the length (depth) of the gas introduction path 5 to be formed is set to 700 mm, the hole diameter of the gun drill becomes about 7 mm or more. If the hole diameter of the gun drill is made too thick, the width of the thick portion existing between the adjacent gas introduction passages 5 becomes narrow and the thermal conductivity of the outer cylinder portion 1 is lowered, which is not preferable.

  In addition, since the gun drill tends to bend and advance in a thin direction as it is drilled, when the gas introduction path 5 is provided near the outer peripheral surface of the tubular member 100, it does not seem to be close to the outer peripheral surface side. It is necessary to pay attention to. In addition, when said point becomes a problem, you may process from the both ends of the cylindrical member 100. FIG. Alternatively, instead of gun drilling, the outer cylinder portion 1 is constituted by a double pipe, and a groove serving as a gas introduction path 5 extending in parallel to the central axis is carved on the outer peripheral surface of the inner pipe, and the pipe is baked on the outer side It may be fitted.

  Next, as shown in FIG. 3C, a plurality of gas discharge holes 6 communicating with each gas introduction path 5 are processed by a laser. As described above, in gun drilling, if the wall thickness is thin, there may be a problem in straight advancement. Therefore, after providing the gas introduction path 5 at the center of the thick part of the tubular member 100 in the thickness direction, Before the discharge hole 6 is drilled, the outer peripheral surface side of the cylindrical member 100 is preferably cylindrically ground. Thereby, since the depth from the outer peripheral surface to the gas introduction path 5 becomes shallow, the processing time of the gas discharge hole 6 can be shortened, and the gas discharge hole 6 having a smaller inner diameter can be formed.

  When the gas discharge hole 6 is processed by a laser, as shown in FIG. 4, a fluororesin rod 30 is inserted into the gas introduction path 5 provided in the outer cylinder portion 1 of the gas discharge metal roll. Then, as shown in FIG. 5, the gas discharge hole 6 is drilled by irradiating the laser 31 with the fluororesin rod 30 inserted in the gas introduction path 5. When the laser irradiated from the outer peripheral surface side of the outer cylindrical portion 1 penetrates the gas introduction path 5, laser damage (laser marks) 32 remains on the fluororesin rod 30 inserted therein. Therefore, the penetration can be confirmed by drawing out the fluororesin rod 30 from the gas introduction path 5 and examining the laser damage 32 after the laser processing is completed.

  The reason why the fluororesin is selected as the material of the rod inserted into the gas introduction path 5 is that the laser having a wavelength of 1064 nm has a high transmittance, hardly generates heat, and hardly dissolves. Moreover, even if it dissolves in the gas introduction path 5, it can be easily peeled off without being in close contact with the inner wall of the gas introduction path 5. In addition, by inserting a fluororesin rod into the gas introduction path 5 at the time of laser processing, it becomes possible to prevent the laser from directly irradiating and damaging the inner wall surface of the gas introduction path 5.

  Furthermore, since the metal piece melted by the laser when penetrating can be attached to the fluororesin rod, the melted metal piece was sprayed on the inner wall surface of the gas introduction path 5 located on the opposite side of the through hole. Will not adhere. The metal piece adhering to the fluororesin rod is peeled off and powdered when the fluororesin rod is taken out from the gas introduction path 5 and can be easily taken out from the gas introduction path 5 by simple cleaning.

  After the gas discharge hole 6 is processed by the laser, the melted metal generated during the laser processing may adhere to the outer peripheral surface of the outer cylindrical portion 1 or the outer peripheral surface may not be slightly flat. It is preferable to perform cutting or cylindrical polishing. Furthermore, it is desirable to perform nickel plating, diamond-like carbon coating, tungsten carbide coating, titanium nitride coating, or the like as necessary in order to prevent the outer peripheral surface of the outer cylindrical portion 1 from being damaged. A gas releasing metal roll is completed by attaching the gas rotary joint 7 to the outer cylinder portion 1 thus manufactured.

  As shown in FIG. 6, two rows of gas discharge hole groups 16a and 16b may be communicated with each gas introduction path 15 provided in the cylindrical member 200 along the extending direction. Thereby, while ensuring the circumferential pitch of the gas discharge holes 6 as it is, the pitch between the adjacent gas introduction paths 15 can be made wider than before, and the heat transfer efficiency of the outer cylinder portion 1 can be increased. . Moreover, since the number of the gas introduction paths 15 can be reduced, time-consuming and time-consuming gun drilling can be reduced. When providing a plurality of rows of gas discharge holes in this way, laser irradiation is performed at an angle inclined with respect to the normal line from the outer peripheral surface of the cylindrical member 200 toward the gas introduction path 15.

  In this way, it is very difficult to make a hole in the outer peripheral surface at an angle inclined with respect to the normal line because it is difficult to insert a cutting edge with a micro drill. On the other hand, if it is laser processing, it can open easily. However, if the tilt angle is more than 60 ° from the normal direction, the shape of the opening on the outer peripheral surface of the gas discharge hole becomes an extreme ellipse, and the sharp angle at the opening is a laser. Since it melts and the hole diameter becomes large, it is not preferable. In addition, when connecting two rows of gas discharge hole groups along the extending direction to each of the plurality of gas introduction paths, these gas discharge hole groups may be arranged in a staggered manner.

  The gas release metal roll produced as described above is used as a can roll in a film forming apparatus as shown in FIG. 7, for example. This film forming device is used when continuously forming a film by sputtering on a long heat-resistant resin film conveyed by a roll-to-roll method. The long heat-resistant resin film is wound around a can roll and cooled. However, thermal damage during film formation can be suppressed by forming the film. Hereinafter, a film forming apparatus provided with such a can roll will be described.

  A film forming apparatus 50, also referred to as a sputtering web coater shown in FIG. 7, is provided in a substantially rectangular parallelepiped vacuum chamber 51, and is continuous with the long heat-resistant resin film F unwound from the unwinding roll 52. After a predetermined film forming process is performed on the film, the film is wound up by a winding roll 64. This film forming process is performed in a state where the long heat-resistant resin film F is wound around the outer peripheral surface of the can roll 56 arranged in the middle of the conveyance path from the unwinding roll 52 to the winding roll 64.

  The can roll 56 has a rotation driving motor attached to the central shaft portion thereof, and a temperature-controlled refrigerant circulates inside. Thereby, the elongate heat-resistant resin film F wound around the outer peripheral surface can be cooled from the back surface. In addition, the angle range around which the long heat resistant resin film F is wound around the outer peripheral surface of the can roll 56 may be referred to as a holding angle A.

In the film forming apparatus 50, the pressure inside the vacuum chamber 51 is reduced to an ultimate pressure of about 10 ⁻⁴ Pa during sputtering film formation, and then the pressure is adjusted to about 0.1 to 10 Pa by introducing a sputtering gas. A known gas such as argon is used as the sputtering gas, and a gas such as oxygen is further added according to the purpose. The shape and material of the vacuum chamber 51 are not particularly limited as long as they can withstand the above-described reduced pressure state, and various types can be used. In order to maintain the reduced pressure state in the vacuum chamber 51 described above, the film forming apparatus 50 is provided with various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown).

  In the conveyance path from the unwinding roll 52 to the can roll 56, there are a free roll 53 that guides the long heat resistant resin film F and a tension sensor roll 54 that measures the tension of the long heat resistant resin film F. Arranged in order. The long heat resistant resin film F fed from the tension sensor roll 54 toward the can roll 56 is adjusted with respect to the peripheral speed of the can roll 56 by a motor-driven feed roll 55 provided immediately before the can roll 56. Thus, the long heat resistant resin film F can be brought into close contact with the outer peripheral surface of the can roll 56 and conveyed.

  Also on the conveyance path from the can roll 56 to the take-up roll 64, a motor-driven feed roll 61 that adjusts the peripheral speed of the can roll 56 and a tension sensor that measures the tension of the long heat-resistant resin film F in the same manner as described above. A roll 62 and a free roll 63 for guiding the long heat resistant resin film F are arranged in this order.

  In the unwinding roll 52 and the winding roll 64, the tension balance of the long heat-resistant resin film F is maintained by torque control using a powder clutch or the like. Further, the long heat resistant resin film F is unwound from the unwinding roll 52 by the rotation of the can roll 56 and the motor-driven feed rolls 55 and 61 that rotate in conjunction with the rotation of the can roll 56, and is wound on the winding roll 64. It is supposed to be.

  Four magnetron sputtering cathodes 57, 58 as film forming means are disposed along the transport path on the outer peripheral surface of the can roll 56 around which the long heat resistant resin film F is wound at a position facing the outer peripheral surface of the can roll 56. 59 and 60 are provided in this order. In the case of sputtering a metal film, a plate-like target can be used as shown in FIG. 7, but when a plate-like target is used, nodules (foreign substance growth) are generated on the target. There are things to do. When this becomes a problem, a cylindrical rotary target that does not generate nodules and has high target use efficiency may be used.

  Thereby, for example, a long heat-resistant resin film with a metal film in which a film made of an Ni-based alloy and a Cu film are laminated on the surface of the heat-resistant resin film can be produced. A film made of this Ni alloy or the like is called a seed layer, and Ni—Cr alloy or various known alloys such as Inconel, Constantan, and Monel can be used, but the composition thereof is the electrical insulation of the heat-resistant resin film with a metal film. Is selected according to desired characteristics such as stability and migration resistance.

  Moreover, when it is desired to further increase the thickness of the metal film of the heat-resistant resin film with a metal film, a thick metal film may be formed using a wet plating method. In this case, there are a case where the metal film is formed only by the electroplating process, and an electroless plating process is performed as the primary plating and an electrolytic plating process is performed as the secondary plating. These wet plating processes can employ various conditions of a conventional wet plating method.

  Examples of the heat resistant resin film used for the resin film with a metal film include a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate film, and a liquid crystal polymer film. Etc. These heat-resistant resin films are preferable because they have flexibility as a flexible substrate with a metal film, strength necessary for practical use, and electrical insulation suitable as a wiring material.

  The above-described heat-resistant resin film with a metal film is processed into a flexible wiring board by a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring substrate by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  Note that the film deposition apparatus 50 in FIG. 7 assumes a sputtering process as a process that applies a thermal load, and therefore, magnetron sputtering cathodes 57, 58, 59, and 60 are illustrated. In the case of other things such as processing, another vacuum film forming means is provided instead of the plate-like target. Other examples of the vacuum film forming process that requires a heat load include CVD (chemical vapor deposition) and vacuum vapor deposition. In addition, as the heat-resistant resin film with a metal film, a structure in which a metal film such as a Ni-Cr alloy or Cu is laminated on a long heat-resistant resin film is exemplified. It is also possible to use a material film, a nitride film, a carbide film, or the like.

  As mentioned above, although the case where embodiment of the penetration method of the fine hole of the present invention was applied to the manufacturing method of an outgassing metal roll was explained, the present invention is not limited to application of the above-mentioned manufacturing method of an outgassing metal roll. For example, the present invention can be suitably applied to a case where a metal pipe is drilled by laser processing from the outer peripheral surface side.

  A Ni—Cr film as a seed layer was formed on the long heat-resistant resin film F using a film forming apparatus (sputtering web coater) 50 as shown in FIG. 7, and a Cu film was formed thereon. For the long heat-resistant resin film F, a heat-resistant polyimide film “UPILEX (registered trademark)” made by Ube Industries, Ltd. having a width of 500 mm, a length of 800 m, and a thickness of 25 μm was used. As the can roll 56 mounted on the film forming apparatus 50, a gas releasing metal roll having a diameter of 800 mm and a width of 750 mm as shown in FIG. 1 was used.

  In order to produce the outer cylinder part 1 of this gas releasing metal roll, first, a stainless seamless pipe having an outer diameter of 806 mm and a thickness of 15 mm is prepared, and the inner cylinder part 2, One jacket 3a and second lid 3b were incorporated to form a jacket roll having a double cylinder structure. Then, 180 gas introducing passages 5 having an inner diameter of 5 mm were formed from both ends using a gun drill at the central portion in the thickness direction of the thick portion of the seamless pipe so that the circumferential pitch was every 2 °.

  Next, the outer peripheral surface of the seamless pipe in which the gas introduction path 5 was formed was cylindrically cut by 3 mm in the thickness direction to finish the outer diameter to 800 mm. Since the gun drill has a characteristic that it bends in the direction where the wall thickness is thin, it is difficult to open the gas introduction path 5 from the beginning along the vicinity of the outer peripheral surface of the seamless pipe with the gun drill. After forming the gas introduction path 5 with a gun drill in the center, the outer peripheral surface was cylindrically cut. As a result, the depth from the outer peripheral surface to the gas introduction path 5 can be reduced, and the processing of the gas discharge hole 6 by the following laser can be facilitated.

  Next, a DuPont fluororesin rod having a diameter of 4 mm and a length of 800 mm is inserted into the gas introduction path 5, and in this state, the inner diameter of each gas discharge hole 6 becomes 200 μm toward the gas introduction path 5. A plurality of gas discharge holes 6 were drilled using a pulsed YAG laser having a wavelength of 1064 nm and an output of 100 W on which a laser head was set. At that time, as shown in FIG. 6, two rows of gas discharge hole groups arranged at a pitch of 7 mm along the extending direction in each gas introduction path 5 were formed. Further, these two rows of gas discharge hole groups were inclined by 31 ° on both sides with respect to a straight line connecting the center of the gas introduction path 5 and the center of the seamless pipe when viewed from the central axis direction of the seamless pipe. As a result, the pitch of the gas discharge holes 6 in the circumferential direction was also 7 mm.

  After the laser processing of the gas discharge hole group in the first row was completed, the fluororesin rod inserted in the gas introduction path was taken out and observed for laser damage, corresponding to the vicinity of the central portion in the width direction of the seamless pipe. Laser damage could not be confirmed on the fluororesin rod at only four positions. As a precaution, when a stainless needle having a diameter of 0.12 mm was put into the gas discharge holes corresponding to these four positions, it was confirmed that the stainless needle was not penetrated. Therefore, the fluororesin rod was inserted again, and laser processing was newly performed in the vicinity of the gas discharge hole that had not been penetrated. It is estimated that the reason why the non-through holes are concentrated in the center portion in the width direction of the seamless pipe is that the gun drill is more easily bent as the gun drill advances.

  In addition, the gas discharge hole 6 was not formed in the area | region from the both ends of a seamless pipe to 20 mm inside of the edge part of the conveyance surface of a resin film, respectively. Then, the outer peripheral surface of the seamless pipe was mirror-polished and then subjected to hard chrome plating, and the gas rotary joint 7 was attached to complete the gas releasing metal roll. This gas releasing metal roll was used as a can roll 56 in a film forming apparatus 50 as shown in FIG.

  In the can roll 56, the angle at which the long heat resistant resin film F is not wound (an angle other than the holding angle A) is about 30 °, and there are 15 gas introduction paths existing within this angle range. Therefore, when each gas introduction path 5 comes within the angle range of about 30 °, the angle range is detected in each flow path inside the gas rotary joint 7 so that the gas is not supplied to the gas introduction path 5. A valve that opens and closes electromagnetically was attached.

  In order to laminate the Ni—Cr film and the Cu film, which are the seed layers, on the above heat-resistant polyimide film, a Ni—Cr target is used as the target of the magnetron sputtering cathode 57 and Cu is used as the target of the magnetron sputtering cathodes 58 to 60. I used the target. Argon gas was introduced at 300 sccm, and the power applied to each cathode was 5 kW. Further, the tension of the unwinding roll and the winding roll was 80 N, and the gas releasing metal roll was temperature controlled at 20 ° C. using water as a refrigerant.

And the said heat resistant polyimide film was set to the unwinding roll, and the front-end | tip part of the heat resistant polyimide film was attached to the winding roll via the can roll. The vacuum chamber was evacuated to 5 Pa with a plurality of dry pumps, and further evacuated to 3 × 10 ⁻³ Pa using a plurality of turbo molecular pumps and cryocoils. Next, after the conveyance speed of the heat-resistant polyimide film was set to 4 m / min, argon gas was introduced into each magnetron sputter cathode and electric power was applied, and 1000 sccm of argon gas was introduced into the gas release metal roll. Formation of a Cr film and a Cu film thereon was started.

  During the film formation, the surface shape of the heat-resistant polyimide film was measured by a laser displacement meter installed between the magnetron sputter cathodes, and it was confirmed that the heat-resistant polyimide film was separated from the gas release metal roll by about 40 μm. It was done. Moreover, when observing from the observation window which can observe the state of the polyimide film surface wound around the outer peripheral surface of the can roll 56 during film formation, it can be confirmed that wrinkles due to the thermal load of sputtering have not occurred. It was.

  Thus, by producing the gas releasing metal roll using the method for penetrating the fine holes of the present invention, the penetration of the gas releasing holes can be easily confirmed in a short time, so that the manufacturing time is shortened as a whole. The production cost could be reduced. Furthermore, when the film-forming process of the long resin film was performed using the produced gas release metal roll, it became difficult to generate wrinkles due to the thermal load of sputtering, and the maximum sputtering power could be increased. As a result, the film conveyance speed for obtaining the film could be increased, and the productivity could be improved.

A holding angle F long heat-resistant resin film O central axis 1 outer cylinder part 2 inner cylinder part 3a first lid part 3b second lid part 4 refrigerant circulation path 5 gas introduction path 6 gas discharge hole 7 gas rotary joint 8 gas supply Path 30 Fluoropolymer rod 31 Laser 32 Laser damage (laser marks)
50 Deposition system (sputtering web coater)
51 Vacuum chamber 52 Unwinding roll 53 Free roll 54 Tension sensor roll 55 Feed roll 56 Can roll 57, 58, 59, 60 Magnetron sputtering cathode 61 Feed roll 62 Tension sensor roll 63 Free roll 64 Winding roll 100, 200 Cylindrical member

Claims (5)

After providing the hollow portion so as to extend from the end face in one direction of the member to the central portion in the thickness direction of the thick portion of the metal member, extending in a direction crossing to the one direction relative to said cavity In this method, a fine hole having an inner diameter of 30 μm to 1000 μm is penetrated from the outer surface of the member by laser processing, and laser processing is performed with a fluororesin rod inserted through the opening in the end face of the cavity. Thereafter, the penetration of the fine hole is confirmed by examining the laser mark of the rod. A method of manufacturing a gas discharge metal roll in which a plurality of gas discharge holes having an inner diameter of 30 μm to 1000 μm are arranged on an outer peripheral surface of a metal cylindrical body that rotates about a central axis, and extends in the direction of the central axis A step of providing a plurality of gas introduction paths at substantially equal intervals in the circumferential direction over the entire circumference in the central portion in the thickness direction of the thick part of the cylindrical body, and for each of the plurality of gas introduction paths It becomes a plurality of gas ejection holes opening at the outer peripheral surface of the cylindrical body and a step of penetrating the laser machining, the laser of fluororesin rod which had been inserted into the gas introducing path to be in the laser processing A method for producing a gas-releasing metal roll, wherein penetration of the plurality of gas-releasing holes is confirmed by examining a trace.   When viewed from the central axis direction, each of the plurality of gas discharge holes extends in a direction inclined by a maximum of 60 ° from a straight line connecting the center of the gas introduction path to which the gas discharge hole communicates and the center of the cylindrical body. The method for producing a gas-releasing metal roll according to claim 2, wherein processing is performed as described above.   The gas discharge metal roll according to claim 2 or 3, wherein at least two rows of gas discharge hole groups arranged along the extending direction are communicated with each of the plurality of gas introduction paths. Production method.   The method for producing a gas releasing metal roll according to any one of claims 2 to 4, wherein the cylindrical body is made of stainless steel or aluminum.

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