JP5686294B2 - Surface coated cutting tool with excellent chipping resistance due to hard coating layer - Google Patents
Surface coated cutting tool with excellent chipping resistance due to hard coating layer Download PDFInfo
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この発明は、特に各種の鋼や鋳鉄などの被削材の切削加工を、高熱発生を伴うとともに、切れ刃に対して、衝撃的かつ断続的高負荷が作用する高速断続切削条件で行った場合にも、硬質被覆層が長期の使用にわたってすぐれた耐チッピング性を発揮する表面被覆切削工具（以下、被覆工具という）に関するものである。 This invention is especially when cutting of various materials such as steel and cast iron is performed under high-speed intermittent cutting conditions with high heat generation and impact and intermittent high load acting on the cutting edge. In particular, the present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) in which a hard coating layer exhibits excellent chipping resistance over a long period of use.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層として、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなるＴｉ化合物層、
（ｂ）上部層として、酸化アルミニウム層、
上記（ａ）、（ｂ）からなる硬質被覆層を蒸着形成してなる被覆工具が良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) As a lower layer, Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer, carbon oxide (hereinafter referred to as TiCO) A Ti compound layer comprising one or more of a layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer,
(B) As an upper layer, an aluminum oxide layer,
A coated tool formed by vapor-depositing a hard coating layer comprising the above (a) and (b) is well known.
上記従来の被覆工具において、その工具性能の向上を図るため種々の提案がなされている。 In the conventional coated tool, various proposals have been made to improve the tool performance.
例えば、特許文献１に示すように、上記（ｂ）の酸化アルミニウム層を、平均粒径が１μｍ以下の微粒κ型Ａｌ２Ｏ３粒子からなる下側Ａｌ２Ｏ３層と、平均粒径が２μｍ以上の粗粒α型Ａｌ２Ｏ３粒子からなる上側Ａｌ２Ｏ３層との多層構造として形成した被覆工具が知られており、この被覆工具によれば、断続切削等の過酷な切削条件においても、下部層とＡｌ２Ｏ３層との間での剥離が抑制され、耐欠損性、耐摩耗性に優れ長寿命化が図られることが知られている。 For example, as shown in Patent Document 1, the aluminum oxide layer (b) described above is composed of a lower Al 2 O 3 layer made of fine κ-type Al 2 O 3 particles having an average particle size of 1 μm or less, and an average particle size. A coated tool formed as a multilayer structure with an upper Al 2 O 3 layer composed of coarse α-type Al 2 O 3 particles of 2 μm or more is known. According to this coated tool, severe cutting conditions such as intermittent cutting are known. Also, it is known that peeling between the lower layer and the Al 2 O 3 layer is suppressed, and it is excellent in chipping resistance and wear resistance, thereby extending the life.
また、例えば、特許文献２に示すように、上記（ｂ）の酸化アルミニウム層の形成に際し、高温強度と機械的・熱的にすぐれた耐衝撃性を有するＺｒ含有κ型Ａｌ２Ｏ３層と、すぐれた高温硬さと耐熱性を備える加熱変態α型Ａｌ２Ｏ３層とを交互に積層することで上部層を形成すると、切れ刃に大きな負荷が作用する重切削加工において、耐チッピング性、耐摩耗性の向上が図られることが知られている。 For example, as shown in Patent Document 2, when forming the aluminum oxide layer of (b) above, a Zr-containing κ-type Al 2 O 3 layer having high-temperature strength and excellent mechanical and thermal impact resistance; When the upper layer is formed by alternately laminating heat-transformed α-type Al 2 O 3 layers having excellent high-temperature hardness and heat resistance, chipping resistance in heavy cutting work in which a large load acts on the cutting edge, It is known that the wear resistance can be improved.
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工はますます高速化される傾向にあるが、上記の従来被覆工具においては、これを鋼や鋳鉄などの通常の条件での連続切削に用いた場合には問題はないが、特にこれを、高い発熱を伴うとともに、切れ刃に断続的かつ衝撃的負荷が作用する高速断続切削条件に用いた場合には、硬質被覆層、特に、上部層の耐衝撃性が十分ではないため、チッピング、欠損の発生等を原因として、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting equipment has been remarkable. On the other hand, there is a strong demand for labor-saving and energy-saving in cutting work, and cost reduction. In conventional coated tools, there is no problem when this is used for continuous cutting under normal conditions such as steel and cast iron. However, this is accompanied by high heat generation and is intermittent and shocking to the cutting edge. When used in high-speed interrupted cutting conditions where a load is applied, the impact strength of the hard coating layer, especially the upper layer, is insufficient, so the service life is relatively short due to chipping and chipping. Is the current situation.
そこで、本発明者等は、上述のような観点から、硬質被覆層の耐衝撃性を高めるべく鋭意研究を行った結果、次のような知見を得た。 Therefore, the present inventors have earnestly studied to improve the impact resistance of the hard coating layer from the above viewpoint, and as a result, obtained the following knowledge.
まず、本発明者等は、高速断続切削において、硬質被覆層、特にＡｌ２Ｏ３層からなる上部層に作用する衝撃的かつ断続的負荷を緩和することによって、耐チッピング性の向上を図るべく、このような硬質被覆層の層構造について検討を進めたところ、κ型Ａｌ２Ｏ３層とα型Ａｌ２Ｏ３層を、その層厚方向に順次積層して構成した多層構造を備えた上記従来被覆工具に比して、図１（ａ）、（ｂ）に示されるような、α−κ混合組織構造からなるＡｌ２Ｏ３層を備えた被覆工具のほうが、高熱発生を伴い、かつ、切れ刃に衝撃的かつ断続的高負荷が作用する高速断続切削条件で用いた場合には、耐摩耗性の低下を招くことなく、すぐれた耐チッピング性を発揮することを見出したのである。 First, the present inventors aim to improve chipping resistance by reducing the impact and intermittent load acting on the hard coating layer, particularly the upper layer made of the Al 2 O 3 layer, in high-speed intermittent cutting. As a result of studying the layer structure of such a hard coating layer, a multilayer structure in which a κ-type Al 2 O 3 layer and an α-type Al 2 O 3 layer were sequentially laminated in the layer thickness direction was provided. Compared to the conventional coated tool, the coated tool provided with an Al 2 O 3 layer having an α-κ mixed structure structure as shown in FIGS. 1A and 1B is accompanied by higher heat generation. And when it was used under high-speed intermittent cutting conditions in which impact and intermittent high load act on the cutting edge, it was found that it exhibits excellent chipping resistance without causing a decrease in wear resistance. .
この発明の上記α−κ混合組織構造からなるＡｌ２Ｏ３層（上部層）は、例えば、以下のような、下部中間層と上部中間層からなる中間層を介して、この上にＡｌ２Ｏ３層を成膜することによって形成することができる。 The Al 2 O 3 layer consisting of the alpha-kappa mixed organizational structure of the present invention (upper layer), for example, such as the following, via an intermediate layer consisting of lower intermediate layer and the upper intermediate layer, Al 2 thereon It can be formed by depositing an O 3 layer.
つまり、工具基体表面に、下部層としてのＴｉ化合物層を形成した後、まず、所定Ｚｒ含有割合のＺｒ含有κ型Ａｌ２Ｏ３層を下部中間層として蒸着形成し、次いで、上部中間層としてのＺｒＯ２薄層を下部中間層の表面に部分的に形成し、その後、下部中間層と上部中間層からなる中間層の上に、Ａｌ２Ｏ３層を蒸着することによって、上記α−κ混合組織構造からなるＡｌ２Ｏ３層（上部層）を形成することができる。 That is, after forming a Ti compound layer as a lower layer on the surface of the tool base, first, a Zr-containing κ-type Al 2 O 3 layer with a predetermined Zr content ratio is deposited as a lower intermediate layer, and then as an upper intermediate layer The ZrO 2 thin layer is partially formed on the surface of the lower intermediate layer, and then the Al 2 O 3 layer is vapor-deposited on the intermediate layer composed of the lower intermediate layer and the upper intermediate layer. An Al 2 O 3 layer (upper layer) having a mixed structure can be formed.
上記α−κ混合組織構造からなるＡｌ２Ｏ３層（上部層）の垂直断面を観察すると、例えば、図１（ａ）に示されるように、中間層のＺｒＯ２薄層が形成されていない表面部分（即ち、ＺｒＯ２薄層によって覆われていないＺｒ含有κ型Ａｌ２Ｏ３層（下部中間層）が露出する表面部分）に連続して形成されているκ型Ａｌ２Ｏ３相と、ＺｒＯ２薄層上に連続して形成されたα型Ａｌ２Ｏ３相のα−κ混合組織が観察され、さらに、上部層の最表面を観察すると、例えば、図１（ｂ）に示されるように、α型Ａｌ２Ｏ３相の周囲をκ型Ａｌ２Ｏ３相が恰も囲繞しているかのようなα−κ網目状混合組織が観察される。 When the vertical cross section of the Al 2 O 3 layer (upper layer) having the α-κ mixed structure is observed, for example, as shown in FIG. 1A, the ZrO 2 thin layer of the intermediate layer is not formed. A κ-type Al 2 O 3 phase continuously formed on a surface portion (that is, a surface portion where a Zr-containing κ-type Al 2 O 3 layer (lower intermediate layer) not covered with a ZrO 2 thin layer is exposed); The α-κ mixed structure of α-type Al 2 O 3 phase continuously formed on the ZrO 2 thin layer was observed, and the outermost surface of the upper layer was observed, for example, as shown in FIG. as, alpha-type Al 2 O 3 phase of such alpha-kappa reticulated mixed structure surrounding the kappa type Al 2 O 3 phase is surrounded as if is observed.
この発明の上部層は、上記のごとき特異な組織構造を備え、そして、この組織構造によって、α型Ａｌ２Ｏ３の備える耐熱性、高硬度を損なうことなく、κ型Ａｌ２Ｏ３相の備える高靭性が発揮されるため、高熱発生を伴い、かつ、切れ刃に衝撃的かつ断続的高負荷が作用する高速断続切削において、従来被覆工具に比して、一段とすぐれた耐チッピング性を示すとともに、長期の使用にわたってすぐれた耐摩耗性を発揮することを、本発明者らは見出したのである。
この発明は、上記の知見に基づいてなされたものであって、
「（１） 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、下部層と中間層と上部層からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
（ａ）下部層は、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの合計層厚を有するＴｉ化合物層からなり、
（ｂ）中間層は、下部中間層と上部中間層からなり、
下部中間層は、０．５〜３μｍの層厚を有しκ型結晶構造のＡｌ２Ｏ３層にＺｒを０．００４〜０．１２％（ただし、全体組成に対するＺｒの割合を原子％で示す）含むＺｒ含有κ型Ａｌ２Ｏ３層であり、
上部中間層は、０．０２〜０．５μｍの層厚を有し、下部中間層の表面に部分的に形成されたＺｒＯ２薄層であり、
（ｃ）上部層は、１〜１５μｍの層厚を有するＡｌ２Ｏ３層からなり、該Ａｌ２Ｏ３層は、上部層の垂直断面を観察した場合、κ型Ａｌ２Ｏ３相と上記ＺｒＯ２薄層上に形成されたα型Ａｌ２Ｏ３相のα−κ混合組織を有し、さらに、上部層の表面研磨面を観察した場合、α型Ａｌ２Ｏ３相の周囲をκ型Ａｌ２Ｏ３相が囲繞するα−κ網目状混合組織を有する、
ことを特徴とする表面被覆切削工具。
The upper layer of the present invention has a unique structure as described above, and by this structure, the heat resistance and high hardness of α-type Al 2 O 3 are not impaired, and the κ-type Al 2 O 3 phase is not damaged. Since the high toughness provided is demonstrated, high-speed intermittent cutting with high heat generation and impact and intermittent high load acts on the cutting edge shows much better chipping resistance than conventional coated tools At the same time, the present inventors have found that they exhibit excellent wear resistance over a long period of use.
This invention has been made based on the above findings,
“(1) In a surface-coated cutting tool in which a hard coating layer composed of a lower layer, an intermediate layer, and an upper layer is deposited on the surface of a tool base composed of a tungsten carbide-based cemented carbide or a titanium carbonitride-based cermet,
(A) The lower layer is composed of one or more of a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride layer, and a total layer of 3 to 20 μm A Ti compound layer having a thickness;
(B) The intermediate layer consists of a lower intermediate layer and an upper intermediate layer,
The lower intermediate layer has a layer thickness of 0.5 to 3 μm and an Al 2 O 3 layer having a κ-type crystal structure with 0.004 to 0.12% Zr (however, the ratio of Zr to the total composition is atomic%) Zr-containing κ-type Al 2 O 3 layer
The upper intermediate layer is a ZrO 2 thin layer partially formed on the surface of the lower intermediate layer, having a layer thickness of 0.02 to 0.5 μm,
(C) The upper layer is composed of an Al 2 O 3 layer having a layer thickness of 1 to 15 μm, and the Al 2 O 3 layer has a κ-type Al 2 O 3 phase and the above when the vertical cross section of the upper layer is observed. When the α-κ mixed structure of α-type Al 2 O 3 phase formed on the ZrO 2 thin layer is present and the surface polished surface of the upper layer is observed, the periphery of the α-type Al 2 O 3 phase is κ An α-κ network mixed structure surrounded by a type Al 2 O 3 phase,
A surface-coated cutting tool characterized by that.
（２） Ｚｒ含有κ型Ａｌ２Ｏ３層からなる下部中間層の表面に部分的に形成されたＺｒＯ２薄層は、下部中間層と上部中間層の界面の垂直断面において、４０〜８０％の線分割合で形成されていることを特徴とする前記（１）に記載の表面被覆切削工具。 (2) The ZrO 2 thin layer partially formed on the surface of the lower intermediate layer composed of the Zr-containing κ-type Al 2 O 3 layer is 40 to 80% in the vertical cross section of the interface between the lower intermediate layer and the upper intermediate layer The surface-coated cutting tool according to (1), wherein the surface-coated cutting tool is formed at a line segment ratio of
（３） 上部層において、α型Ａｌ２Ｏ３相との合量に占めるκ型Ａｌ２Ｏ３相の占有割合は、上部層の垂直断面において、２０〜６０面積％、また、上部層の表面研磨面において、２０〜５５面積％であることを特徴とする前記（１）または（２）に記載の表面被覆切削工具。」
に特徴を有するものである。
(3) In the upper layer, the occupation ratio of the κ-type Al 2 O 3 phase in the total amount with the α-type Al 2 O 3 phase is 20 to 60 area% in the vertical cross section of the upper layer, The surface-coated cutting tool according to (1) or (2), wherein the surface-polished surface is 20 to 55 area%. "
It has the characteristics.
以下に、この発明の被覆工具の硬質被覆層について、詳細に説明する。
下部層：
Ｔｉの炭化物（ＴｉＣ）層、窒化物（ＴｉＮ）層、炭窒化物（ＴｉＣＮ）層、炭酸化物（ＴｉＣＯ）層および炭窒酸化物（ＴｉＣＮＯ）層のうちの１層または２層以上で構成されたＴｉ化合物層からなる下部層は、自身の具備するすぐれた高温強度によって硬質被覆層の高温強度向上に寄与するほか、工具基体と中間層（特に、Ｚｒ含有κ型Ａｌ２Ｏ３層からなる下部中間層）のいずれにも強固に密着し、硬質被覆層の工具基体に対する密着性を向上させる作用を有する。
Below, the hard coating layer of the coated tool of this invention is demonstrated in detail.
Lower layer:
It is composed of one or more of Ti carbide (TiC) layer, nitride (TiN) layer, carbonitride (TiCN) layer, carbonate (TiCO) layer and carbonitride oxide (TiCNO) layer. The lower layer made of the Ti compound layer contributes to improving the high temperature strength of the hard coating layer by its excellent high temperature strength, and also comprises a tool base and an intermediate layer (particularly, a Zr-containing κ-type Al 2 O 3 layer). It firmly adheres to any of the lower intermediate layers) and has the effect of improving the adhesion of the hard coating layer to the tool substrate.
下部層の合計層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方、その合計層厚が２０μｍを越えると、特に高熱発生を伴う高速断続切削ではチッピング、欠損を発生しやすくなることから、その合計層厚は３〜２０μｍと定めた。
中間層：
下部中間層（Ｚｒ含有κ型Ａｌ２Ｏ３層）と上部中間層（ＺｒＯ２薄層）からなる中間層は、例えば、以下の方法で形成することができる。
If the total layer thickness of the lower layer is less than 3 μm, the above-mentioned effect cannot be fully exerted. On the other hand, if the total layer thickness exceeds 20 μm, chipping and chipping occur particularly in high-speed intermittent cutting with high heat generation. Since it becomes easy, the total layer thickness was determined to be 3 to 20 μm.
Middle layer:
The intermediate layer composed of the lower intermediate layer (Zr-containing κ-type Al 2 O 3 layer) and the upper intermediate layer (ZrO 2 thin layer) can be formed, for example, by the following method.
通常の化学蒸着装置により、初期段階の１〜１２０分を、
反応ガス組成（容量％）：ＡｌＣｌ３：２〜５％、Ｈ2：残り
反応雰囲気温度：９３０〜９８０ ℃、
反応雰囲気圧力：５〜８ ｋＰａ、
の雰囲気中で下部層の処理を行い、続いて、
下部中間層（Ｚｒ含有κ型Ａｌ２Ｏ３層）は、上記処理を施した下部層（Ｔｉ化合物層）の表面に、
反応ガス組成（容量％）：ＡｌＣｌ３：３〜６％、ＺｒＣｌ４：０．６〜１．８％、ＣＯ２：６〜１０％、ＨＣｌ：１．０〜３．０％、Ｈ2Ｓ：０．１〜０．１８％、Ｈ2：残り、
反応雰囲気温度：９３０〜９８０ ℃、
反応雰囲気圧力：５〜８ ｋＰａ、
の条件で成膜することによって、形成することができる。
With an ordinary chemical vapor deposition device, the initial stage of 1 to 120 minutes
Reaction gas composition (volume%): AlCl 3 : 2 to 5%, H 2 : remaining reaction atmosphere temperature: 930 to 980 ° C.,
Reaction atmosphere pressure: 5 to 8 kPa,
The lower layer is processed in the atmosphere of
The lower intermediate layer (Zr-containing κ-type Al 2 O 3 layer) is formed on the surface of the lower layer (Ti compound layer) subjected to the above treatment,
Reaction gas composition (volume%): AlCl 3 : 3 to 6%, ZrCl 4 : 0.6 to 1.8%, CO 2 : 6 to 10%, HCl: 1.0 to 3.0%, H 2 S : 0.1~0.18%, H 2: remainder,
Reaction atmosphere temperature: 930-980 ° C.
Reaction atmosphere pressure: 5 to 8 kPa,
It can form by forming into a film on these conditions.
上記蒸着で成膜されたＺｒ含有κ型Ａｌ２Ｏ３層は、化学蒸着した状態でκ型の結晶（Ｚｒ含有κ型Ａｌ２Ｏ３結晶粒）構造を有し、高温強度にすぐれ、また、機械的・熱的にすぐれた耐衝撃性を具備する。 The Zr-containing κ-type Al 2 O 3 layer formed by the above-described deposition has a κ-type crystal (Zr-containing κ-type Al 2 O 3 crystal grain) structure in the state of chemical vapor deposition, and has excellent high-temperature strength. Has excellent mechanical and thermal shock resistance.
ここで、上記成膜した下部中間層（Ｚｒ含有κ型Ａｌ２Ｏ３層）において、全体組成に占めるＺｒの含有割合（Ｚｒ／（Ａｌ＋Ｚｒ＋Ｏ）×１００％の値）は、原子％で、０．００４％〜０．１２％を満足することが必要である。
これは、Ｚｒの含有割合が０．００４％未満では、上部層のα型Ａｌ２Ｏ３層を成長時に、その高い反応温度によりκ型Ａｌ２Ｏ３層がα型Ａｌ２Ｏ３層に加熱変態し、一方、０．１２％を超えると、κ型Ａｌ２Ｏ３層中にＺｒＯ２が形成されてしまい、ＺｒＯ２相のつくる粒界があることで、κ型Ａｌ２Ｏ３相全体としての粒界強度が低下するという理由による。
また、下部中間層（Ｚｒ含有κ型Ａｌ２Ｏ３層）の層厚は、０．５〜３μｍであることが必要である。これは、層厚が０．５μｍ未満では、前記で述べたような優れた高温強度、また、機械的・熱的にすぐれた耐衝撃性を十分に発揮することができず、一方、層厚が３μｍを超えると、偏摩耗の原因となる熱塑性変形が発生し易くなり、摩耗が加速するようになることから、層厚を０．５〜３μｍと定めた。
Here, in the formed lower intermediate layer (Zr-containing κ-type Al 2 O 3 layer), the content ratio of Zr in the entire composition (Zr / (Al + Zr + O) × 100% value) is 0% in atomic percent. It is necessary to satisfy 0.004% to 0.12%.
This is because when the content ratio of Zr is less than 0.004%, the α-type Al 2 O 3 layer becomes an α-type Al 2 O 3 layer due to its high reaction temperature when the α-type Al 2 O 3 layer of the upper layer is grown. On the other hand, when it is transformed by heating and exceeds 0.12%, ZrO 2 is formed in the κ-type Al 2 O 3 layer, and there is a grain boundary formed by the ZrO 2 phase, so that the κ-type Al 2 O 3 phase This is because the grain boundary strength as a whole is lowered.
Further, the layer thickness of the lower intermediate layer (Zr-containing κ-type Al 2 O 3 layer) needs to be 0.5 to 3 μm. This is because when the layer thickness is less than 0.5 μm, the excellent high-temperature strength as described above and the excellent mechanical and thermal impact resistance cannot be sufficiently exhibited. When the thickness exceeds 3 μm, thermoplastic deformation that causes uneven wear tends to occur, and wear accelerates. Therefore, the layer thickness is set to 0.5 to 3 μm.
次に、上部中間層のＺｒＯ２薄層を形成するためのＺｒＯ２の核成長処理は、具体的には、例えば、通常の化学蒸着装置により、
反応ガス組成（容量％）：ＺｒＣｌ４：０．１〜０．３％、ＣＯ２：３〜１０％、Ａｒ：２５．０〜３５．０％、Ｈ2：残り、
反応雰囲気温度：８８０〜９８０ ℃、
反応雰囲気圧力：３〜１５ ｋＰａ、
反応時間：１〜３０ｍｉｎ
の条件で成膜することによって、行うことができる。
Next, the ZrO 2 nucleus growth process for forming the ZrO 2 thin layer of the upper intermediate layer is specifically performed by, for example, an ordinary chemical vapor deposition apparatus.
Reaction gas composition (volume%): ZrCl 4 : 0.1 to 0.3%, CO 2 : 3 to 10%, Ar: 25.0 to 35.0%, H 2 : remaining,
Reaction atmosphere temperature: 880-980 ° C.,
Reaction atmosphere pressure: 3 to 15 kPa,
Reaction time: 1-30 min
It can be performed by forming a film under the conditions.
上記の核成長処理によって、下部中間層（Ｚｒ含有κ型Ａｌ２Ｏ３層）の表面には、部分的に、ＺｒＯ２薄層からなる上部中間層が形成される。
上記ＺｒＯ２薄層（上部中間層）の層厚は、０．０２〜０．５μｍであることが必要である。
これは、ＺｒＯ２薄層（上部中間層）の層厚が０．０２μｍ未満であると、下部中間層（Ｚｒ含有κ型Ａｌ２Ｏ３層）の全表面積に対して、目的の面積割合まで覆うことができず、上部層における、κ型Ａｌ２Ｏ３相との合量に占めるα型Ａｌ２Ｏ３相の占有割合が少なくなり、上部層の硬さが減少し、耐摩耗性が低下する。一方、その層厚が０．５μｍを超えると、下部中間層（Ｚｒ含有κ型Ａｌ２Ｏ３層）の全表面積に対して、目的の面積割合以上覆うことになり、上部層における、α型Ａｌ２Ｏ３相との合量に占めるκ型Ａｌ２Ｏ３相の占有割合が少なくなり上部層の靭性、耐衝撃性、耐チッピング性が低下するという理由による。
即ち、ＺｒＯ２薄層（上部中間層）は、下部中間層（Ｚｒ含有κ型Ａｌ２Ｏ３層）の表面全面に形成するわけではなく、好ましくは、下部中間層と上部中間層の界面の垂直断面において、４０〜８０％の線分割合で形成されていることが望ましい。
これは、κ型Ａｌ２Ｏ３相とα型Ａｌ２Ｏ３相の混合組織として構成される上部層において、κ型Ａｌ２Ｏ３相とα型Ａｌ２Ｏ３相の生成比率が、上記ＺｒＯ２薄層（上部中間層）の生成割合（線分割合）に影響されるためである。
例えば、上記ＺｒＯ２薄層（上部中間層）の生成割合（線分割合）が相対的に大きい場合には、上部層における上記κ型Ａｌ２Ｏ３相の生成割合が少なくなり、その結果、上部層の靭性、耐衝撃性、耐チッピング性が低下する。一方、上記ＺｒＯ２薄層（上部中間層）の生成割合（線分割合）が相対的に少ない場合には、上部層における上記α型Ａｌ２Ｏ３相の生成割合が低下し、その結果、上部層の硬さが減少し、耐摩耗性が低下するためである。
By the above nucleus growth treatment, an upper intermediate layer made of a ZrO 2 thin layer is partially formed on the surface of the lower intermediate layer (Zr-containing κ-type Al 2 O 3 layer).
The layer thickness of the ZrO 2 thin layer (upper intermediate layer) needs to be 0.02 to 0.5 μm.
This is because when the layer thickness of the ZrO 2 thin layer (upper intermediate layer) is less than 0.02 μm, the total surface area of the lower intermediate layer (Zr-containing κ-type Al 2 O 3 layer) is up to the target area ratio. The occupying ratio of the α-type Al 2 O 3 phase in the total amount of the κ-type Al 2 O 3 phase in the upper layer is reduced, the hardness of the upper layer is reduced, and the wear resistance is reduced. descend. On the other hand, when the layer thickness exceeds 0.5 μm, the entire surface area of the lower intermediate layer (Zr-containing κ-type Al 2 O 3 layer) covers more than a desired area ratio. toughness of Al 2 O 3 phase and occupying the total amount κ-type Al 2 O 3 phase occupancy is less and less top layer of the impact resistance, by reason that the chipping resistance is lowered.
That is, the ZrO 2 thin layer (upper intermediate layer) is not formed on the entire surface of the lower intermediate layer (Zr-containing κ-type Al 2 O 3 layer), preferably at the interface between the lower intermediate layer and the upper intermediate layer. In the vertical cross section, it is desirable that it is formed with a line segment ratio of 40 to 80%.
This is in the upper layer composed of a mixed structure of κ-type Al 2 O 3 phase and the α-type Al 2 O 3 phase, production ratio of κ-type Al 2 O 3 phase and the α-type Al 2 O 3 phase, the This is because it is influenced by the generation ratio (line segment ratio) of the ZrO 2 thin layer (upper intermediate layer).
For example, when the generation ratio (line segment ratio) of the ZrO 2 thin layer (upper intermediate layer) is relatively large, the generation ratio of the κ-type Al 2 O 3 phase in the upper layer decreases, and as a result, Lower toughness, impact resistance and chipping resistance of the upper layer. On the other hand, when the generation ratio (line segment ratio) of the ZrO 2 thin layer (upper intermediate layer) is relatively small, the generation ratio of the α-type Al 2 O 3 phase in the upper layer decreases, and as a result, This is because the hardness of the upper layer is reduced and the wear resistance is reduced.
上記ＺｒＯ２薄層（上部中間層）の層厚、割合（線分割合）は、核成長処理における、例えば、反応時間、反応ガス組成におけるＺｒＣｌ４の含有割合によって調整することが可能であり、反応時間を短くした場合、或いは、反応ガス組成におけるＺｒＣｌ４の含有割合を少なくした場合には、層厚が小さい、あるいは、生成割合（線分割合）の少ないＺｒＯ２薄層（上部中間層）が形成される。 The layer thickness and ratio (line segment ratio) of the ZrO 2 thin layer (upper intermediate layer) can be adjusted by, for example, the content of ZrCl 4 in the reaction time and the reaction gas composition in the nuclear growth process, When the reaction time is shortened or when the content ratio of ZrCl 4 in the reaction gas composition is decreased, the ZrO 2 thin layer (upper intermediate layer) having a small layer thickness or a small generation ratio (line segment ratio) Is formed.
上部層：
Ａｌ２Ｏ３層からなる上部層の成膜は、上記の下部中間層と上部中間層からなる中間層の表面に、例えば、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ３：６〜１０％、ＣＯ２：１０〜１５％、ＨＣｌ：３〜５％、Ｈ２Ｓ：０．０５〜０．２％、Ｈ２：残り、
反応雰囲気温度：９６０〜１０００℃、
反応雰囲気圧力：３〜５ｋＰａ、
の条件で蒸着形成することができる。
Upper layer:
The upper layer formed of the Al 2 O 3 layer is formed on the surface of the intermediate layer formed of the lower intermediate layer and the upper intermediate layer, for example, using a normal chemical vapor deposition apparatus.
Reaction gas composition: by volume%, AlCl 3: 6~10%, CO 2: 10~15%, HCl: 3~5%, H 2 S: 0.05~0.2%, H 2: remainder,
Reaction atmosphere temperature: 960 to 1000 ° C.
Reaction atmosphere pressure: 3 to 5 kPa,
It can be formed by vapor deposition under the following conditions.
そして、この条件によってＡｌ２Ｏ３層を成膜した場合、中間層のＺｒＯ２薄層が形成されていない表面部分（即ち、ＺｒＯ２薄層によって覆われていないＺｒ含有κ型Ａｌ２Ｏ３層（下部中間層）が露出する表面部分）からは、κ型Ａｌ２Ｏ３相が成長し、一方、中間層のＺｒＯ２薄層が形成されている上部中間層からは、α型Ａｌ２Ｏ３相が成長するため、上部層組織の垂直断面を観察した場合、図１（ａ）に示されるようなα−κ混合組織が観察される。
さらに、上部層の最表面を観察すると、図１（ｂ）に示されるように、α型Ａｌ２Ｏ３相の周囲をκ型Ａｌ２Ｏ３相が恰も囲繞しているかのようなα−κ網目状混合組織が観察される。
When an Al 2 O 3 layer is formed under these conditions, the surface portion where the ZrO 2 thin layer of the intermediate layer is not formed (that is, the Zr-containing κ-type Al 2 O 3 not covered by the ZrO 2 thin layer). From the surface (the surface portion where the lower intermediate layer is exposed), a κ-type Al 2 O 3 phase grows, while from the upper intermediate layer where the ZrO 2 thin layer of the intermediate layer is formed, α-type Al 2 Since the O 3 phase grows, when a vertical section of the upper layer structure is observed, an α-κ mixed structure as shown in FIG. 1A is observed.
Further, when observing the outermost surface of the upper layer, as shown in FIG. 1B, α− as if the κ-type Al 2 O 3 phase surrounds the α-type Al 2 O 3 phase. A kappa network mixed structure is observed.
上部層組織におけるα型Ａｌ２Ｏ３相とκ型Ａｌ２Ｏ３相の生成割合は、ＺｒＯ２薄層（上部中間層）の生成割合（線分割合）、上部層の層厚によって影響を受け、ＺｒＯ２薄層（上部中間層）の生成割合（線分割合）が相対的に大きいと、α型Ａｌ２Ｏ３相の初期生成割合が大となり、上部層の層厚の増加につれて、上部層に占めるα型Ａｌ２Ｏ３相の占有割合が増加していく。 The generation ratio of α-type Al 2 O 3 phase and κ-type Al 2 O 3 phase in the upper layer structure is affected by the generation ratio (line segment ratio) of the ZrO 2 thin layer (upper intermediate layer) and the layer thickness of the upper layer. In response, when the generation ratio (line segment ratio) of the ZrO 2 thin layer (upper intermediate layer) is relatively large, the initial generation ratio of the α-type Al 2 O 3 phase increases, and as the layer thickness of the upper layer increases, The occupation ratio of the α-type Al 2 O 3 phase in the upper layer increases.
一方、ＺｒＯ２薄層（上部中間層）の生成割合（線分割合）が相対的に小さいと、κ型Ａｌ２Ｏ３相の初期生成割合が支配的となるが、上部層の層厚の増加につれて、α型Ａｌ２Ｏ３相の占有割合が増加していくため、結果として、上部層中のκ型Ａｌ２Ｏ３相の占有割合は減少していく。
上部層において、α型Ａｌ２Ｏ３相との合量に占めるκ型Ａｌ２Ｏ３相の占有割合は、上部層の垂直断面において、２０〜６０面積％、また、上部層の表面研磨面において、２０〜５５面積％であることが望ましい。これは、κ型Ａｌ２Ｏ３相の占有割合が、上部層の垂直断面において、２０面積％未満、または、上部層の表面研磨面において、２０面積％未満であると、κ型Ａｌ２Ｏ３相の占有割合が少なくなり上部層の靭性、耐衝撃性、耐チッピング性が低下するためであり、一方、κ型Ａｌ２Ｏ３相の占有割合が、上部層の垂直断面において、６０面積％を超える場合、または、上部層の表面研磨面において、５５面積％を超える場合には、上部層のκ型Ａｌ２Ｏ３相との合量に占めるα型Ａｌ２Ｏ３相の占有割合が少なくなり、上部層の硬さが減少し、耐摩耗性が低下するという理由による。
On the other hand, when the generation ratio (line segment ratio) of the ZrO 2 thin layer (upper intermediate layer) is relatively small, the initial generation ratio of the κ-type Al 2 O 3 phase becomes dominant. As the increase, the occupation ratio of the α-type Al 2 O 3 phase increases, and as a result, the occupation ratio of the κ-type Al 2 O 3 phase in the upper layer decreases.
The occupation ratio of the κ-type Al 2 O 3 phase in the total amount of the α-type Al 2 O 3 phase in the upper layer is 20 to 60 area% in the vertical cross section of the upper layer, and the surface polished surface of the upper layer It is desirable that it is 20-55 area%. This is because if the occupation ratio of the κ-type Al 2 O 3 phase is less than 20 area% in the vertical cross section of the upper layer or less than 20 area% in the surface polishing surface of the upper layer, κ-type Al 2 O This is because the occupancy ratio of the three phases decreases and the toughness, impact resistance, and chipping resistance of the upper layer decrease, while the occupancy ratio of the κ-type Al 2 O 3 phase is 60 area in the vertical section of the upper layer. % Or when the surface polished surface of the upper layer exceeds 55 area%, the proportion of the α-type Al 2 O 3 phase occupying the total amount with the κ-type Al 2 O 3 phase of the upper layer This is because the hardness of the upper layer decreases and the wear resistance decreases.
上記κ型Ａｌ２Ｏ３相とα型Ａｌ２Ｏ３相の混合組織（垂直断面）、網目状混合組織（上部層の表面）からなる上部層は、κ型Ａｌ２Ｏ３相が高強度、高靭性、耐衝撃性を有することから、α型Ａｌ２Ｏ３相の備える耐熱性、硬さを損なうことなく、高熱発生を伴い、しかも、断続的・衝撃的高負荷が作用する高速断続切削加工において、長期の使用にわたってすぐれた耐チッピング性を発揮する。 The upper layer composed of the mixed structure (vertical cross section) of the κ-type Al 2 O 3 phase and the α-type Al 2 O 3 phase and the network mixed structure (surface of the upper layer) has a high strength of the κ-type Al 2 O 3 phase. Because of its high toughness and impact resistance, the heat resistance and hardness of the α-type Al 2 O 3 phase are not impaired, high heat is generated, and high-speed intermittent operation with intermittent and high impact loads is applied. Exhibits excellent chipping resistance over long-term use in cutting.
ただ、上部層の平均層厚が１μｍ未満では、所望のすぐれた耐摩耗性を長期の使用にわたって十分に発揮させることができず、一方その平均層厚が１５μｍを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚は１〜１５μｍと定めた。 However, if the average layer thickness of the upper layer is less than 1 μm, the desired excellent wear resistance cannot be sufficiently exerted over a long period of use, while if the average layer thickness exceeds 15 μm, the chipping will occur. Therefore, the average layer thickness is determined to be 1 to 15 μm.
本発明の被覆工具は、各種の鋼や鋳鉄などの切削を、高熱発生を伴い、しかも、切れ刃に対して断続的・衝撃的高負荷が作用する高速断続切削加工条件で行った場合でも、硬質被覆層、特に上部層が、高硬度と耐熱性に加え、すぐれた靭性、耐衝撃性を有することから、長期の使用にわたってすぐれた耐チッピング性を発揮し、使用寿命の一層の延命化を可能とするものである。 Even when the coated tool of the present invention performs cutting of various steels, cast irons, etc., with high heat generation, and even when performed under high-speed intermittent cutting conditions where intermittent and impact high loads act on the cutting edge, In addition to high hardness and heat resistance, the hard coating layer, especially the upper layer, has excellent toughness and impact resistance, so it exhibits excellent chipping resistance over a long period of use, further extending the service life. It is possible.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有する表１に示される粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｄをそれぞれ作製した。 As raw material powders, the powders shown in Table 1 each having an average particle diameter of 1 to 3 μm were prepared. These raw material powders were blended into the blending composition shown in Table 1, and further wax was added in acetone. After ball mill mixing for a period of time and drying under reduced pressure, the green compact was press-molded into a green compact of a predetermined shape at a pressure of 98 MPa, and this green compact was held at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. WC-based cemented carbide tool base having a throwaway tip shape defined in ISO / CNMG120408 by performing vacuum sintering under the conditions of the above, and performing a honing process of R: 0.07 mm on the cutting edge after sintering A to D were prepared.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有する表２に示される粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４０８のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｄを作製した。 Also, as the raw material powder, the powders shown in Table 2 each having an average particle diameter of 0.5 to 2 μm are prepared, and these raw material powders are blended in the blending composition shown in Table 2 and wetted by a ball mill for 24 hours. After mixing and drying, the green compact was press-molded into a green compact at a pressure of 98 MPa, and the green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour and after sintering. Then, the tool base a to d made of TiCN base cermet having a chip shape of ISO standard / CNMG120408 was manufactured by performing a honing process of R: 0.07 mm on the cutting edge portion.
ついで、これらの工具基体Ａ〜Ｄおよび工具基体ａ〜ｄのそれぞれを、通常の化学蒸着装置に装入し、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表６に示される層厚のＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、
ついで、表４に示される蒸着条件にて、表７に示される層厚、Ｚｒ含有割合のＺｒ含有κ型Ａｌ２Ｏ３層を下部中間層として蒸着形成し、
ついで、表５に示される条件で、Ｚｒ含有κ型Ａｌ２Ｏ３層に存在するＺｒＯ２の核成長処理を施して、表７に示される層厚、生成割合（線分割合）のＺｒＯ２薄層（上部中間層）を形成し、
ついで、表３に示される条件で、上部層としての所定層厚のＡｌ２Ｏ３層を形成することにより、表７に示される本発明被覆工具１〜１２それぞれ製造した。
Next, each of the tool bases A to D and the tool bases a to d was charged into a normal chemical vapor deposition apparatus, and Table 3 (l-TiCN in Table 3 is described in JP-A-6-8010). The conditions for forming a TiCN layer having a vertically elongated crystal structure are shown, and the other conditions are the conditions for forming a normal granular crystal structure). The Ti compound layer is deposited as a lower layer of the hard coating layer,
Then, under the vapor deposition conditions shown in Table 4, the layer thickness shown in Table 7 and the Zr-containing κ-type Al 2 O 3 layer having a Zr content ratio are vapor-deposited as a lower intermediate layer,
Next, the ZrO 2 nucleation treatment present in the Zr-containing κ-type Al 2 O 3 layer was performed under the conditions shown in Table 5, and the layer thickness and generation ratio (line segment ratio) ZrO 2 shown in Table 7 were obtained. Forming a thin layer (upper middle layer),
Subsequently, the coated tools 1 to 12 of the present invention shown in Table 7 were produced by forming an Al 2 O 3 layer having a predetermined layer thickness as an upper layer under the conditions shown in Table 3.
下部中間層：層中のＺｒ含有割合については、二次イオン質量分析装置を用いて、鏡面研磨加工した断面を測定し、観察倍率１０，０００倍での異なる視野５点の平均値を実測値とした。
Lower intermediate layer: For the Zr content ratio in the layer, a secondary ion mass spectrometer is used to measure a mirror-polished cross section, and an average value of five different fields of view at an observation magnification of 10,000 times is actually measured. It was.
上部中間層：鏡面研磨加工した垂直断面を、オージェ電子分光装置を用いて、観察倍率２０，０００倍で元素マッピングをとり、１μｍの線分の中に占めるＺｒＯ２薄層の長さを測定し、５本の線分での平均値をＺｒＯ２薄層の線分割合として算定した。 Upper intermediate layer: Elemental mapping was performed on a mirror-polished vertical section using an Auger electron spectrometer at an observation magnification of 20,000 times, and the length of the ZrO 2 thin layer occupying in a 1 μm line segment was measured. The average value of the five line segments was calculated as the line segment ratio of the ZrO 2 thin layer.
上部層：上部層の垂直断面におけるα型Ａｌ２Ｏ３相との合量に占めるκ型Ａｌ２Ｏ３相の占有割合は、鏡面研磨加工した断面を、電子線後方散乱回折装置を用いて観察倍率２，０００倍で横方向：２０μｍ×縦方向：上部層の膜厚相当の領域を測定し、α型Ａｌ２Ｏ３相とκ型Ａｌ２Ｏ３相の領域をそれぞれ規定し、それぞれの面積を算出した。 Upper layer: The occupancy ratio of the κ-type Al 2 O 3 phase in the total amount of the α-type Al 2 O 3 phase in the vertical cross section of the upper layer is determined using an electron beam backscattering diffractometer on the mirror-polished cross section. At an observation magnification of 2,000, horizontal direction: 20 μm × longitudinal direction: a region corresponding to the film thickness of the upper layer was measured, and regions of α-type Al 2 O 3 phase and κ-type Al 2 O 3 phase were defined respectively. The area of was calculated.
上部層の表面研磨面におけるα−κ網目状混合組織は、表面を鏡面研磨し、電子線後方散乱回折装置を用いて観察倍率５，０００倍で測定し、その菊池線回折図形から、α型Ａｌ２Ｏ３相とκ型Ａｌ２Ｏ３相の領域をそれぞれ規定し、α−κ網目状混合組織を確認した。α型Ａｌ２Ｏ３相との合量に占めるκ型Ａｌ２Ｏ３相の占有割合は、上記網目状混合組織の測定と同様に行い、測定範囲は縦横１０μｍ四方の範囲とし、５箇所の平均値を実測値とした。 The α-κ network mixed structure on the surface polished surface of the upper layer is mirror-polished on the surface and measured with an electron beam backscatter diffractometer at an observation magnification of 5,000 times. The regions of the Al 2 O 3 phase and the κ-type Al 2 O 3 phase were defined, and an α-κ network mixed structure was confirmed. The occupancy ratio of the κ-type Al 2 O 3 phase in the total amount with the α-type Al 2 O 3 phase is the same as the measurement of the network-like mixed structure, and the measurement range is a 10 μm square in all directions, and is in five locations. The average value was taken as the actual measurement value.
なお、上記の各層の層厚については、走査型電子顕微鏡を用いた縦断面測定により測定した。上部中間層（ＺｒＯ２薄層）については観察倍率２０，０００倍、その他の層については観察倍率２，０００倍にて観察を行い、それらの５点の平均値を層厚とした。 In addition, about the layer thickness of said each layer, it measured by the longitudinal cross-section measurement using the scanning electron microscope. The upper intermediate layer (ZrO 2 thin layer) was observed at an observation magnification of 20,000 times, and the other layers were observed at an observation magnification of 2,000 times. The average value of these five points was defined as the layer thickness.
表７に、これらの値をまとめて示した。 Table 7 summarizes these values.
比較の目的で、上記工具基体Ａ〜Ｄ，ａ〜ｄに対して、表３に示される条件にて、表６に示される層厚のＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、
ついで、表８に示される蒸着条件にて、表１０に示される層厚、Ｚｒ含有割合のＺｒ含有κ型Ａｌ２Ｏ３層を下部中間層として蒸着形成し（一部については、Ｚｒ非含有のκ型Ａｌ２Ｏ３層を成膜した）、
ついで、表９に示される条件で、Ｚｒ含有κ型Ａｌ２Ｏ３層に存在するＺｒＯ２の核成長処理を施して（一部については、核成長処理を行わず）、表１０に示される層厚、面積割合のＺｒＯ２薄層（上部中間層）を形成し（一部については、ＺｒＯ２薄層を形成しない）、
ついで、表３に示される条件で、上部層としての所定層厚のＡｌ２Ｏ３層を形成することにより、表１０に示される比較被覆工具１〜１２それぞれ製造した。
For the purpose of comparison, a Ti compound layer having a layer thickness shown in Table 6 was deposited on the tool bases A to D and a to d as a lower layer of the hard coating layer under the conditions shown in Table 3. ,
Next, under the vapor deposition conditions shown in Table 8, a Zr-containing κ-type Al 2 O 3 layer having a layer thickness and a Zr-containing ratio shown in Table 10 was formed as a lower intermediate layer (for some, Zr-free) Κ-type Al 2 O 3 layer)
Next, under the conditions shown in Table 9, ZrO 2 existing in the Zr-containing κ-type Al 2 O 3 layer was subjected to a nuclear growth treatment (some of which were not subjected to the nuclear growth treatment), and shown in Table 10 A ZrO 2 thin layer (upper intermediate layer) having a layer thickness and area ratio is formed (for some, the ZrO 2 thin layer is not formed)
Subsequently, comparative coated tools 1 to 12 shown in Table 10 were produced by forming an Al 2 O 3 layer having a predetermined thickness as an upper layer under the conditions shown in Table 3.
ついで、上記の比較被覆工具１〜１２について、本発明被覆工具１〜１２場合と同様にして、下部中間層のＺｒ含有割合、ＺｒＯ２薄層（上部中間層）の線分割合、上部層の垂直断面および上部層の表面研磨面において測定した。 Next, for the above-mentioned comparative coated tools 1-12, as in the case of the present coated tools 1-12, the Zr content ratio of the lower intermediate layer, the line segment ratio of the ZrO 2 thin layer (upper intermediate layer), the upper layer The measurement was performed on the vertical cross section and the surface polished surface of the upper layer.
なお、上記の各層の層厚については、走査型電子顕微鏡を用いた縦断面測定により測定し、それらの５点を用いて測定し、それらの平均値を層厚とした。 In addition, about the layer thickness of said each layer, it measured by the longitudinal cross-section measurement using a scanning electron microscope, measured using those 5 points | pieces, and made those average values the layer thickness.
表１０に、これらの値をまとめて示した。 Table 10 summarizes these values.
被削材：ＪＩＳ・Ｓ３０Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度：４２０ｍ／ｍｉｎ、
切り込み：１．５ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ａという）での炭素鋼の湿式高速断続切削試験（通常の切削速度は２５０ｍ／ｍｉｎ）、
被削材：ＪＩＳ・ＳＣＭ４１５の長さ方向等間隔４本縦溝入り丸棒、
切削速度：４００ｍ／ｍｉｎ、
切り込み：２．０ｍｍ、
送り：０．２５ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ｂという）での合金鋼の湿式高速断続切削試験（通常の切削速度は２００ｍ／ｍｉｎ）、
被削材：ＪＩＳ・ＦＣＤ４５０の長さ方向等間隔４本縦溝入り丸棒、
切削速度：４００ｍ／ｍｉｎ、
切り込み：２．５ｍｍ、
送り：０．３２ｍｍ／ｒｅｖ、
切削時間：５分、
の条件（切削条件Ｃという）でのダクタイル鋳鉄の乾式高速断続切削試験（通常の切削速度は１８０ｍ／ｍｉｎ）、
を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。
この測定結果を表１１に示した。
Work material: JIS / S30C lengthwise equal length 4 round bar with round groove,
Cutting speed: 420 m / min,
Incision: 1.5mm,
Feed: 0.3mm / rev,
Cutting time: 5 minutes
Wet high-speed intermittent cutting test of carbon steel under the above conditions (referred to as cutting condition A) (normal cutting speed is 250 m / min),
Work material: JIS / SCM415 lengthwise equidistant 4 round grooved round bars,
Cutting speed: 400 m / min,
Cutting depth: 2.0 mm
Feed: 0.25mm / rev,
Cutting time: 5 minutes
Wet high-speed intermittent cutting test (normal cutting speed is 200 m / min) of alloy steel under the above conditions (referred to as cutting condition B),
Work material: JIS / FCD450 lengthwise equidistant round bars with 4 vertical grooves,
Cutting speed: 400 m / min,
Incision: 2.5mm,
Feed: 0.32mm / rev,
Cutting time: 5 minutes
A dry high-speed intermittent cutting test (normal cutting speed is 180 m / min) of ductile cast iron under the above conditions (referred to as cutting conditions C),
In each cutting test, the flank wear width of the cutting edge was measured.
The measurement results are shown in Table 11.
これに対して、比較被覆工具１〜１２は、高熱発生下での、断続的・衝撃的高負荷により、チッピングを発生するため、短時間で寿命に至ることが明らかである。 On the other hand, it is clear that the comparative coated tools 1 to 12 reach the end of their service life in a short time because they generate chipping due to intermittent / impact high loads under high heat generation.
上述のように、この発明の被覆工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に、高熱発生を伴い、切れ刃に断続的・衝撃的高負荷が作用する高速断続切削加工でも、すぐれた耐チッピング性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated tool of the present invention is not only for continuous cutting and intermittent cutting under normal conditions such as various steels and cast irons, but particularly with high heat generation, the cutting blade is intermittently / impactly loaded. Even in high-speed interrupted cutting with high resistance, it exhibits excellent chipping resistance and exhibits excellent cutting performance over a long period of time. It can cope with cost reduction sufficiently satisfactorily.
Claims (3)
（ａ）下部層は、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの合計層厚を有するＴｉ化合物層からなり、
（ｂ）中間層は、下部中間層と上部中間層からなり、
下部中間層は、０．５〜３μｍの層厚を有し、κ型結晶構造のＡｌ２Ｏ３層にＺｒを０．００４〜０．１２％（ただし、全体組成に対するＺｒの割合を原子％で示す）含むＺｒ含有κ型Ａｌ２Ｏ３層であり、
上部中間層は、０．０２〜０．５μｍの層厚を有し、下部中間層の表面に部分的に形成されたＺｒＯ２薄層であり、
（ｃ）上部層は、１〜１５μｍの層厚を有するＡｌ２Ｏ３層からなり、該Ａｌ２Ｏ３層は、上部層の垂直断面を観察した場合、κ型Ａｌ２Ｏ３相と上記ＺｒＯ２薄層上に形成されたα型Ａｌ２Ｏ３相のα−κ混合組織を有し、さらに、上部層の表面研磨面を観察した場合、α型Ａｌ２Ｏ３相の周囲をκ型Ａｌ２Ｏ３相が囲繞するα−κ網目状混合組織を有する、
ことを特徴とする表面被覆切削工具。 In a surface-coated cutting tool in which a hard coating layer composed of a lower layer, an intermediate layer, and an upper layer is deposited on the surface of a tool base composed of a tungsten carbide-based cemented carbide or a titanium carbonitride-based cermet,
(A) The lower layer is composed of one or more of a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride layer, and a total layer of 3 to 20 μm A Ti compound layer having a thickness;
(B) The intermediate layer consists of a lower intermediate layer and an upper intermediate layer,
The lower intermediate layer has a layer thickness of 0.5 to 3 μm, and Zr is 0.004 to 0.12% in the Al 2 O 3 layer having a κ-type crystal structure (however, the ratio of Zr to the whole composition is atomic%) Zr-containing κ-type Al 2 O 3 layer
The upper intermediate layer is a ZrO 2 thin layer partially formed on the surface of the lower intermediate layer, having a layer thickness of 0.02 to 0.5 μm,
(C) The upper layer is composed of an Al 2 O 3 layer having a layer thickness of 1 to 15 μm, and the Al 2 O 3 layer has a κ-type Al 2 O 3 phase and the above when the vertical cross section of the upper layer is observed. When the α-κ mixed structure of α-type Al 2 O 3 phase formed on the ZrO 2 thin layer is present and the surface polished surface of the upper layer is observed, the periphery of the α-type Al 2 O 3 phase is κ An α-κ network mixed structure surrounded by a type Al 2 O 3 phase,
A surface-coated cutting tool characterized by that.
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