JP5671850B2 - Method for producing glass particulate deposit - Google Patents

Method for producing glass particulate deposit Download PDF

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JP5671850B2
JP5671850B2 JP2010145345A JP2010145345A JP5671850B2 JP 5671850 B2 JP5671850 B2 JP 5671850B2 JP 2010145345 A JP2010145345 A JP 2010145345A JP 2010145345 A JP2010145345 A JP 2010145345A JP 5671850 B2 JP5671850 B2 JP 5671850B2
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JP2012006799A (en
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雅之 櫻井
雅之 櫻井
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Sumitomo Electric Industries Ltd
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/0144—Means for after-treatment or catching of worked reactant gases

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Description

本発明は、複数本のガラス合成用バーナを用いた多バーナ多層付け法に用いて好適なガラス微粒子堆積体の製造方法に関する。   The present invention relates to a method for producing a glass fine particle deposit suitable for use in a multi-burner multi-layering method using a plurality of glass synthesis burners.

光ファイバなどのガラス製品を製造するためのガラス母材の製造方法として、複数本のガラス微粒子合成用バーナで構成されたバーナ列と反応容器内に長手方向の軸線を固定して支持され軸回りに回転する棒状の出発材とを相対的に往復移動させ、各ガラス微粒子合成用バーナで合成されたガラス微粒子をそれぞれ出発材上に堆積させ、かつ隣合うバーナにてガラス微粒子を堆積させた（スス付けした）範囲が連続して一つのガラス微粒子堆積体を形成するガラス母材の製造方法（ＭＭＤ法；多バーナ多層付け法）が知られている（例えば特許文献１，２参照）。   As a method of manufacturing a glass base material for manufacturing glass products such as optical fibers, a longitudinal axis is supported by fixing a longitudinal axis in a burner array composed of a plurality of glass fine particle synthesis burners and a reaction vessel. The rod-shaped starting material rotating in a reciprocating manner was relatively reciprocated to deposit the glass particles synthesized by each glass particle synthesizing burner on each starting material, and the glass particles were deposited by the adjacent burner ( A glass base material manufacturing method (MMD method; multi-burner multi-layering method) is known (see, for example, Patent Documents 1 and 2).

ＭＭＤ法では、反応容器のガラス微粒子合成用バーナ側の壁面に開口した空気導入口より反応容器内にクリーンエアを流し、クリーンエアを反応容器の空気導入口と対向する壁面に開口した排気口から排気する。この際、クリーンエアの風速が遅いと、反応容器内に余剰のガラス微粒子（浮遊スス）が充満し、レーザを用いた制御などでスス付けを制御している場合、レーザが受光できず、安定したスス付けができなくなる。クリーンエアの風速を速めるためには、第一にクリーンエアの導入・排出量を増やす、第二に反応容器全体をコンパクトにすることが考えられるが、クリーンエアの導入・排出量を増やすには設備の大型化が必要になるとともに、導入・排出量を増やせば本来堆積すべきススの剥がれが生じたりする。また、反応容器全体をコンパクトにすれば、熱源となるスス体やバーナ火炎に容器内壁が接近することとなり、反応容器の劣化など設備に大きな熱負荷がかかる。   In the MMD method, clean air is allowed to flow into the reaction vessel from the air inlet opening on the wall of the reaction vessel on the side of the glass particle synthesis burner, and the clean air is discharged from the outlet opening on the wall facing the air inlet of the reaction vessel. Exhaust. At this time, if the wind speed of clean air is slow, excess glass particles (floating soot) will be filled in the reaction vessel, and if the sooting is controlled by control using a laser, the laser will not be able to receive light and stable. I can't do soot. In order to increase the wind speed of clean air, it is conceivable to increase the amount of clean air introduced and discharged first, and secondly to make the entire reaction vessel compact, but to increase the amount of clean air introduced and discharged It is necessary to increase the size of the equipment, and if the amount of introduction and discharge is increased, the soot that should be deposited may be peeled off. Further, if the entire reaction vessel is made compact, the inner wall of the vessel approaches a soot body or burner flame that becomes a heat source, and a large heat load is applied to the equipment such as deterioration of the reaction vessel.

効率的な排気を目的として、特許文献１に開示される技術はガラス微粒子堆積体を通過し、このガラス微粒子堆積体を挟んでバーナと反対側へ流れる流体の流速を、２ｍ／秒以上４ｍ／秒以下とし、特許文献２に開示される技術はガラス母材の近傍におけるガスの流速を０．１ｍ／秒以上としているが、設備能力としてここまで風速を速くできなかったり、また、この風速にしても安定したスス付けができなかったりする場合があった。   For the purpose of efficient evacuation, the technique disclosed in Patent Document 1 passes through the glass particulate deposit, and the flow rate of the fluid flowing to the opposite side of the burner across the glass particulate deposit is 2 m / second or more to 4 m / second. In the technology disclosed in Patent Document 2, the gas flow velocity in the vicinity of the glass base material is set to 0.1 m / second or more. However, there were cases where stable sooting was not possible.

特開２００８−１７９５１８号公報JP 2008-179518 A 特開２００６−１６０５５１号公報JP 2006-160551 A

本発明は上記状況に鑑みてなされたもので、その目的は、設備全体を必要以上に大きくすることなく、余剰ガラス微粒子を効率的に排気できるガラス微粒子堆積体の製造方法を提供することにある。   The present invention has been made in view of the above situation, and an object of the present invention is to provide a method for producing a glass fine particle deposit capable of efficiently exhausting excess glass fine particles without making the entire facility unnecessarily large. .

本発明に係る上記目的は、下記構成により達成される。
（１） 回転する出発ロッドに対向して複数本のガラス微粒子合成用バーナを配置し、
前記出発ロッドと前記ガラス微粒子合成用バーナとを該出発ロッドの軸方向に相対的に往復移動させ、
前記ガラス微粒子合成用バーナで合成されるガラス微粒子を前記出発ロッドの表面に順次堆積させるガラス微粒子堆積体の製造方法であって、
反応容器の前記ガラス微粒子合成用バーナ側の壁面に開口した空気導入口より該反応容器内にクリーンエアを流し、
前記クリーンエアを含む気体を前記反応容器の空気導入口と対向する壁面に開口した排気口から排気し、その際、前記排気口が設けられた高さ位置において、前記出発ロッドの中心位置から前記排気口側の空間における最も前記気体の流速が速くなる位置での製造開始から終了までの前記気体の平均速度を、０．８８ｍ／ｓ以上２ｍ／ｓ未満とすることを特徴とするガラス微粒子堆積体の製造方法。 The above object of the present invention is achieved by the following configuration.
(1) Arrange a plurality of glass fine particle synthesis burners facing the rotating starting rod,
Reciprocally moving the starting rod and the glass fine particle synthesis burner in the axial direction of the starting rod;
A method for producing a glass particulate deposit, wherein glass particulates synthesized by the glass particulate synthesis burner are sequentially deposited on the surface of the starting rod,
Clean air is allowed to flow into the reaction vessel from the air inlet opening in the wall surface of the reaction vessel on the glass fine particle synthesis burner side,
The gas containing the clean air is exhausted from an exhaust port opened on a wall surface facing the air inlet of the reaction vessel, and at that time, at a height position where the exhaust port is provided, the center position of the starting rod is The glass fine particle deposition characterized in that the average velocity of the gas from the start to the end of the production at the position where the flow velocity of the gas is highest in the space on the exhaust port side is 0.88 m / s or more and less than 2 m / s. Body manufacturing method.

このガラス微粒子堆積体の製造方法によれば、排気口が設けられた高さ位置において、出発ロッドの中心位置から排気口側の空間における最もクリーンエアの流速が速くなる位置での製造開始から終了までのクリーンエアの平均速度を規定することで、反応容器内に滞留する余剰ススを効率よく排気することができる。   According to this method for producing a glass particulate deposit, from the start of production at a position where the flow velocity of clean air is highest in the space on the exhaust port side from the center position of the starting rod at the height position where the exhaust port is provided, the process ends. By defining the average speed of clean air up to this point, surplus soot retained in the reaction vessel can be efficiently exhausted.

本発明に係るガラス微粒子堆積体の製造方法によれば、ＭＭＤ法でスス付けする際、反応容器内の特定の領域を通過するクリーンエアの平均速度を規定することで余剰ススを効率的に排出でき、安定にスス付けを行うことができる。   According to the method for producing a glass particulate deposit according to the present invention, when sooting is performed by the MMD method, excess soot is efficiently discharged by defining an average speed of clean air passing through a specific region in the reaction vessel. And stable sooting.

本発明に係る製造方法に用いられる装置の概念を模式的に表した構成図である。It is a block diagram which represented typically the concept of the apparatus used for the manufacturing method which concerns on this invention. 図１に示した反応容器の内部を模式的に表した平面図である。It is the top view which represented typically the inside of the reaction container shown in FIG.

以下、本発明の実施の形態を図面を参照して説明する。
図１は本発明に係る製造方法に用いられる装置の概念を模式的に表した構成図である。
ガラス母材製造装置３１の主要部は、複数本（この例では８本）のガラス微粒子合成用バーナ（バーナ）１３からなるバーナ列と、空気導入口２１と、排気口２５を有する反応容器１９で構成されている。このガラス母材製造装置３１において出発ロッド１１の上下を支持棒３３，３３で保持して、トラバース装置３５，３５により回転させつつ上下に往復移動させながら、出発ロッド１１の周囲にバーナ１３で生成されるガラス微粒子を堆積させて（スス付けして）ガラス微粒子堆積体１７を製造する。バーナ１３にはガス供給装置３７が接続され、ガス供給装置３７はバーナ１３に原料ガス（ＳｉＣｌ4など）や可燃性・助燃性ガス（Ｈ2、Ｏ2）、不活性ガス、などのガスを供給する。排気口２５からは所定量のガスの排気を行い、反応容器１９内に浮遊する、ガラス微粒子堆積体１７に堆積しなかったガラス微粒子（浮遊スス）を排出しながら堆積を行うようになされている。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration diagram schematically showing the concept of an apparatus used in the manufacturing method according to the present invention.
The main part of the glass base material manufacturing apparatus 31 is a reaction vessel 19 having a plurality of (in this example, 8) burner rows composed of glass fine particle synthesis burners (burners) 13, an air inlet 21, and an exhaust port 25. It consists of In this glass base material manufacturing apparatus 31, the upper and lower sides of the starting rod 11 are held by the support bars 33, 33, and are generated by the burner 13 around the starting rod 11 while being reciprocated up and down while being rotated by the traverse devices 35, 35. The glass fine particles deposited body 17 is manufactured by depositing (sooting) the glass fine particles. A gas supply device 37 is connected to the burner 13, and the gas supply device 37 supplies a gas such as a raw material gas (such as SiCl 4 ), flammable / combustible gas (H 2 , O 2 ), or an inert gas to the burner 13. Supply. A predetermined amount of gas is exhausted from the exhaust port 25, and deposition is performed while discharging glass fine particles (floating soot) floating in the reaction vessel 19 and not deposited on the glass fine particle deposition body 17. .

各バーナ１３の近傍には外径センサ３９が取り付けられ、外径センサ３９はガラス微粒子堆積体１７の主としてそのバーナ１３で生成されたガラス微粒子が堆積している部分（各バーナ１３によるガラス微粒子の堆積部）の外径を検出する。外径センサ３９は、ガラス微粒子堆積体１７の外径を光学的に測定する。例えば、レーザ等の光線をガラス微粒子堆積体１７に側方から照射し、反射光の変位位置（センサ３９とガラス微粒子堆積体１７との距離）からガラス微粒子堆積体１７の外径を求める。   An outer diameter sensor 39 is attached in the vicinity of each burner 13, and the outer diameter sensor 39 is a portion of the glass fine particle deposit 17 in which glass fine particles generated mainly by the burner 13 are deposited (glass fine particles produced by each burner 13. The outer diameter of the accumulation part) is detected. The outer diameter sensor 39 optically measures the outer diameter of the glass fine particle deposit 17. For example, a light beam such as a laser is irradiated on the glass particulate deposit 17 from the side, and the outer diameter of the glass particulate deposit 17 is obtained from the displacement position of the reflected light (the distance between the sensor 39 and the glass particulate deposit 17).

空気導入口２１には反応容器１９の中に清浄化ガスであるクリーンエア２３を供給するための不図示のクリーンエア供給装置（清浄化ガス供給手段）が接続される。ガラス母材製造装置３１では、反応容器１９のバーナ１３側の壁面に開口した空気導入口２１より反応容器１９内にクリーンエア２３を流し、クリーンエア２３を含んだ気体２９を反応容器１９の空気導入口２１と対向する壁面に開口した排気口２５から排気する。排気口２５は、図中に実線で描いたように上下方向に複数（この例では３つ）としても、単一としてもよい。また、空気導入口２１は、上下方向、或いは左右方向（図１の紙面垂直方向）に複数のものを配設してよく、図中に二点鎖線で示したように上下方向に連続するスリット状の開口としてもよい。   A clean air supply device (cleaning gas supply means) (not shown) for supplying clean air 23 as a cleaning gas into the reaction vessel 19 is connected to the air inlet 21. In the glass base material manufacturing apparatus 31, clean air 23 is caused to flow into the reaction container 19 from the air inlet 21 opened on the wall surface of the reaction container 19 on the burner 13 side, and the gas 29 including the clean air 23 is supplied to the air in the reaction container 19. It exhausts from the exhaust port 25 opened on the wall surface facing the introduction port 21. The exhaust port 25 may be plural (three in this example) in the vertical direction as depicted by a solid line in the drawing, or may be single. Also, a plurality of air inlets 21 may be arranged in the vertical direction or in the horizontal direction (perpendicular to the plane of the drawing in FIG. 1), and as shown by the two-dot chain line in the figure, the slits are continuous in the vertical direction. It is good also as a shape-like opening.

図２は図１に示した反応容器の内部を模式的に表した平面図である。
ガラス母材製造装置３１では、排気口２５が設けられた高さ（排気口の中心部の高さ、排気口が複数ある場合についても排気口毎に同様に考える）位置において、反応容器内のガラス微粒子堆積体１７の中心位置より排気口２５側の領域２７での最も気体の流速が速くなる位置における気体２９の平均速度が、特定の範囲に規定されている。図２の場合、この領域２７は、ガラス微粒子堆積体１７を挟み左右対称に形成されている。 FIG. 2 is a plan view schematically showing the inside of the reaction vessel shown in FIG.
In the glass base material manufacturing apparatus 31, at the height at which the exhaust port 25 is provided (the height of the central portion of the exhaust port, the case where there are a plurality of exhaust ports is considered similarly for each exhaust port), The average velocity of the gas 29 at a position where the flow velocity of the gas is highest in the region 27 on the exhaust port 25 side from the center position of the glass particulate deposit 17 is defined in a specific range. In the case of FIG. 2, the region 27 is formed symmetrically with the glass fine particle deposit 17 interposed therebetween.

反応容器１９は、図２に示す平面視でガラス微粒子堆積体１７の中心Ｏがほぼ中央に位置するように配置される。クリーンエア２３は、空気導入口２１から反応容器１９内へ導入され、ガラス微粒子堆積体１７の両側Ｒ，Ｌを通り、合流して排気口２５から排気される。   The reaction vessel 19 is arranged so that the center O of the glass particulate deposit 17 is located substantially at the center in a plan view shown in FIG. The clean air 23 is introduced into the reaction vessel 19 from the air introduction port 21, passes through both sides R and L of the glass particulate deposit 17, joins, and is exhausted from the exhaust port 25.

空気導入口２１から排気口２５までの間に一様な流れが形成されている場合、その中に平面視円形の物体、すなわちガラス微粒子堆積体１７が配置されると、クリーンエア２３は、ガラス微粒子堆積体の周囲に沿って流れることになる。クリーンエア２３の流れが非常に遅い場合、浮遊ススの搬送作用が十分に得られず、その結果、反応容器１９内の浮遊ススが増大してしまうこととなる。スス付けでは、上記したようなレーザを用いた制御などを行っている場合があるが、浮遊ススが増加すると、レーザが受光できず、安定したスス付けができない。   In the case where a uniform flow is formed between the air inlet 21 and the exhaust outlet 25, when a circular object in plan view, that is, the glass particulate deposit 17 is disposed therein, the clean air 23 is made of glass. It will flow along the periphery of the particulate deposit. When the flow of the clean air 23 is very slow, the floating soot transfer function cannot be sufficiently obtained, and as a result, the floating soot in the reaction vessel 19 increases. In sooting, control using a laser as described above may be performed. However, if floating soot increases, the laser cannot receive light and stable sooting cannot be performed.

このため、クリーンエア２３の流れを速くする必要が生じる。流速を速めるためには、クリーンエアの導入・排出量を増やすのが簡単であるが、クリーンエアの導入・排出量を増やすには設備の大型化が必要になり、また速くしすぎると乱流などが発生して本来堆積すべきススの剥がれが生じたり、バーナの火炎を乱したりしてしまう。反応容器全体をコンパクトにして流速を上げる方法も考えられるが、熱源となるスス体やバーナ火炎に容器内壁を近づけすぎると、反応容器が劣化してしまうことがある。このため、設備能力を必要以上に大きくすることなく、また、反応容器を必要以上にスス体に近づけることなく、クリーンエアを含む気体の流速を速くすることが求められる。   For this reason, it is necessary to make the flow of the clean air 23 faster. In order to increase the flow velocity, it is easy to increase the amount of clean air introduced and discharged. However, to increase the amount of clean air introduced and discharged, it is necessary to increase the size of the equipment. May occur, causing the soot to peel off, and disturbing the burner flame. Although a method of increasing the flow rate by making the entire reaction container compact is conceivable, if the inner wall of the container is too close to a soot body or a burner flame as a heat source, the reaction container may be deteriorated. For this reason, it is required to increase the flow rate of the gas containing clean air without increasing the facility capacity more than necessary and without bringing the reaction vessel closer to the soot body than necessary.

そこで、本ガラス母材製造装置３１では、余剰ススを効率的に排気口２５へ搬送できるように構成したことを特徴としている。すなわち、反応容器内のガラス微粒子堆積体１７の周囲を通過して排気口２５に達する、排気口側の空間領域２７におけるクリーンエア２３を含む気体２９の平均速度を特定の範囲に設定している。特に、排気口側のこの領域での流速を速くすることにより、排気口２５に向かってスムースな流れができるので、効率よく余剰ススを排出することができる。   Therefore, the present glass base material manufacturing apparatus 31 is characterized in that it is configured so that surplus soot can be efficiently conveyed to the exhaust port 25. That is, the average velocity of the gas 29 including the clean air 23 in the space region 27 on the exhaust port side passing through the periphery of the glass particulate deposit 17 in the reaction vessel and reaching the exhaust port 25 is set to a specific range. . In particular, by increasing the flow velocity in this region on the exhaust port side, a smooth flow can be made toward the exhaust port 25, so that excess soot can be efficiently discharged.

具体的には、この領域２７においてガラス微粒子堆積体１７と反応容器１９との距離を狭めることで、クリーンエア２３を含む気体２９の風速が空気導入口２１でのクリーンエア２３の供給時よりも上昇するようになされている。このように、バーナとは反対側の、加熱面からは最も遠い排気口側の壁面を接近させ、排気口側の一部の空間を適当な間隔に狭めることで、設備能力を必要以上に大きくせず、また反応容器を劣化させることなく、余剰ススを効率よく排出する。
反応容器１９は、排出口側の形状が導入口側の形状と異なり、ガラス微粒子堆積体１７の下流側直後から左右の内壁１９ａ，１９ｂが略４５°の傾斜角度で接近するようにして狭められ、排気口２５に至る。片側の領域２７を代表例に述べれば、領域２７は、中心Ｏと内壁１９ａの二つの点Ｐ，Ｑを通る二本の線分ＯＰ，ＯＱと、内壁１９ａおよび表面１５とに囲まれた範囲（図２中の斜線部分）となる。ここで、線分ＯＱと仮想線ＣＬとのなす角度θ１は１２°程度、線分ＯＰと仮想線ＣＬとのなす角度θ２は５２°程度となるようにしておくのが望ましい。また、内壁１９ａとガラス微粒子堆積体１７の表面との距離は、最小（スス堆積終了時）で２９０ｍｍ程度になるように設定しておくのがよい。これ以上近づけると、内壁が劣化する可能性が高くなる。 Specifically, by reducing the distance between the glass particulate deposit 17 and the reaction vessel 19 in this region 27, the wind speed of the gas 29 including the clean air 23 is higher than when the clean air 23 is supplied at the air inlet 21. It is made to rise. In this way, by making the wall on the exhaust port side farthest from the heating surface opposite to the burner approach, and narrowing the space on the exhaust port side to an appropriate interval, the facility capacity is increased more than necessary. Without excess and without deteriorating the reaction vessel, the excess soot is discharged efficiently.
The shape of the reaction vessel 19 on the outlet side is different from the shape on the inlet side, and is narrowed so that the left and right inner walls 19a and 19b approach at an inclination angle of about 45 ° immediately after the downstream side of the glass particulate deposit 17. To the exhaust port 25. To describe the region 27 on one side as a representative example, the region 27 is a region surrounded by two line segments OP and OQ passing through two points P and Q of the center O and the inner wall 19a, and the inner wall 19a and the surface 15. (Hatched portion in FIG. 2). Here, it is desirable that the angle θ1 formed by the line segment OQ and the virtual line CL is about 12 °, and the angle θ2 formed by the line segment OP and the virtual line CL is about 52 °. The distance between the inner wall 19a and the surface of the glass fine particle deposit 17 is preferably set to be about 290 mm at the minimum (at the end of soot deposition). When closer than this, the possibility of deterioration of the inner wall increases.

この領域２７が狭められることで、ガラス微粒子堆積体１７の排気側の流路断面が小さくなり、風速が増す。つまり、空気導入口２１からの風量を増やすことなく領域２７での風速が増すようになされている。   By narrowing the region 27, the cross section of the flow path on the exhaust side of the glass particulate deposit 17 is reduced, and the wind speed is increased. That is, the wind speed in the region 27 is increased without increasing the air volume from the air inlet 21.

領域２７は、ガラス微粒子堆積体１７の堆積が進むにつれて外径が大きくなり、領域２７の流路は次第に小さくなる方向に変化する。したがって、導入するクリーンエア流量が同じであれば、製造開始から終了までに流速は変化する。本構成では、領域２７における製造開始から終了までのクリーンエア２３を含む気体２９の平均速度（∫ｖ（ｔ）ｄｔ／∫ｄｔ）が特定の範囲である０．８８ｍ／ｓ以上とするように規定されている。この数値は実際のガラス母材製造装置の運用にて経験値として得られたもので、反応容器内温度、クリーンエア２３を含む気体２９の粘性、ガラス微粒子の質量等との因果関係により定まるものと推察される。なお、領域２７における気体２９の速度の上限は特に設けられないが、あまり速すぎると（２ｍ／ｓを超えると）コスト面（設備容量）で不利になり、また、バーナ１３の火炎が乱れる問題があるため、それほど大きくできない。   The outer diameter of the region 27 increases as the deposition of the glass particulate deposit 17 progresses, and the flow path of the region 27 changes in a direction of gradually decreasing. Therefore, if the flow rate of clean air to be introduced is the same, the flow rate changes from the start to the end of production. In this configuration, the average velocity (∫v (t) dt / ∫dt) of the gas 29 including the clean air 23 from the start to the end in the region 27 is set to a specific range of 0.88 m / s or more. It is prescribed. This numerical value is obtained as an empirical value in the actual operation of the glass base material manufacturing apparatus, and is determined by the causal relationship with the temperature in the reaction vessel, the viscosity of the gas 29 including the clean air 23, the mass of the glass fine particles, etc. It is guessed. In addition, although the upper limit of the velocity of the gas 29 in the region 27 is not particularly provided, if it is too fast (over 2 m / s), it is disadvantageous in terms of cost (equipment capacity), and the flame of the burner 13 is disturbed. Because there is, can not be so large.

次に、上記装置を用いたガラス微粒子堆積体の製造方法について説明する。
ガラス母材製造装置３１では、回転する出発ロッド１１に対向した複数本のバーナ１３を均等間隔に配置し、このバーナ１３を出発ロッド１１と相対移動させる。そして、バーナ１３で合成されるガラス微粒子を出発ロッド１１の周囲に順次堆積させて行く。
その際、排気口２５が設けられた高さ位置において、反応容器内のガラス微粒子堆積体１７の中心位置より排気口２５側の領域２７での最も気体２９の流速が速くなる位置における製造開始から終了までの気体２９の平均速度を、０．８８ｍ／ｓ以上に保ってスス付けを行う。 Next, the manufacturing method of the glass particulate deposit body using the said apparatus is demonstrated.
In the glass base material manufacturing apparatus 31, a plurality of burners 13 facing the rotating starting rod 11 are arranged at equal intervals, and the burner 13 is moved relative to the starting rod 11. Then, glass particles synthesized by the burner 13 are sequentially deposited around the starting rod 11.
At that time, at the height position where the exhaust port 25 is provided, from the start of production at a position where the flow velocity of the gas 29 is highest in the region 27 on the exhaust port 25 side from the center position of the glass particulate deposit 17 in the reaction vessel. Sooting is performed while maintaining the average velocity of the gas 29 until the end at 0.88 m / s or more.

この領域２７での平均速度を規定することで、反応容器内に滞留する余剰ススが低減する。風量を減らすことによりコストを下げることができる（クリーンエア設備能力を下げられる）が、単純に風量を減らしただけでは余剰ススがうまく排気できない。本構成では、ガラス微粒子堆積体１７の特に排気口２５側の風速が重要であることを見出したことによりその実現が可能となっている。   By defining the average speed in this region 27, the excess soot staying in the reaction vessel is reduced. The cost can be reduced by reducing the air volume (the capacity of the clean air facility can be reduced), but the excess soot cannot be exhausted well by simply reducing the air volume. In this configuration, it is possible to realize this by finding that the wind speed of the glass particulate deposit 17 particularly on the exhaust port 25 side is important.

したがって、本実施の形態によるガラス微粒子堆積体１７の製造方法によれば、ＭＭＤ法でスス付けする際、反応容器内の特定の範囲を通過する気体２９の平均速度を特定の範囲に設定することで余剰ススを効率的に排出でき、余剰ススを減らしつつ、安定にスス付けを行うことができる。   Therefore, according to the manufacturing method of the glass particulate deposit 17 according to the present embodiment, when sooting by the MMD method, the average velocity of the gas 29 passing through the specific range in the reaction vessel is set to the specific range. Therefore, surplus soot can be discharged efficiently, and soot can be stably added while reducing surplus soot.

図１に示したガラス母材製造装置３１を用い、上記領域２７におけるクリーンエアを含む気体の平均速度を変えてガラス微粒子の堆積を行った。
出発ロッドに直径４０ｍｍ、長さ２１００ｍｍのコアガラスロッドを使用し、多バーナ多層付け法にて、ガラス原料（四塩化珪素）ガスを投入し、コアガラスロッドの外周にガラス微粒子を堆積させた。その際、最も流速が速くなる位置における気体の平均速度、初速・終速、およびその結果（製品が不良となったかどうか）を表１に示す。 Using the glass base material manufacturing apparatus 31 shown in FIG. 1, glass fine particles were deposited while changing the average velocity of the gas containing clean air in the region 27.
A core glass rod having a diameter of 40 mm and a length of 2100 mm was used as a starting rod, and a glass raw material (silicon tetrachloride) gas was introduced by a multi-burner multi-layering method to deposit glass fine particles on the outer periphery of the core glass rod. Table 1 shows the average gas velocity at the position where the flow velocity becomes the fastest, the initial velocity and the final velocity, and the results (whether the product is defective).

Figure 0005671850
Figure 0005671850

実施例１，２の条件では、浮遊ススの増加が認められず、安定したスス付けが行えた。
比較例１の条件では、浮遊ススにより反応容器中が見渡せなくなり、外径センサの動作不良により、成長速度、外径が変動し、製品が不良となった。 Under the conditions of Examples 1 and 2, no increase in floating soot was observed, and stable sooting could be performed.
Under the conditions of Comparative Example 1, the inside of the reaction vessel could not be looked over due to floating soot, and the growth rate and outer diameter fluctuated due to malfunction of the outer diameter sensor, resulting in a defective product.

なお、上記の実施の形態では、ＭＭＤ法により多孔質ガラス母材を製造する方法を対象として説明したが、本発明のガラス微粒子堆積体の製造方法は、出発材の両端を把持部で把持して回転させながら、その長手方向に沿ってガラス微粒子合成用のバーナを往復移動させ、回転する出発材の外周面にガラス微粒子を堆積させ、多孔質ガラス母材を成長させていく、所謂ＯＶＤ法によってガラス微粒子堆積体を製造する方法においても同様に採用することができる。   In the above embodiment, the method for producing a porous glass base material by the MMD method has been described. However, in the method for producing a glass fine particle deposit according to the present invention, both ends of the starting material are grasped by grasping portions. A so-called OVD method in which a porous glass base material is grown by reciprocating a burner for synthesizing glass fine particles along its longitudinal direction while rotating the glass fine particles to deposit glass fine particles on the outer peripheral surface of the rotating starting material. In the same manner, the method can be employed in the method for producing the glass fine particle deposit.

本発明は設備全体を必要以上に大きくすることなく、余剰ガラス微粒子を効率的に排気する場合に有効である。安定にスス付けを実施することにより特性の均一なガラス母材を製造でき、例えば光ファイバ母材としての利用が可能であり、本発明を利用した光ファイバにおいては品質安定性が向上する。また、その他の用途のガラス母材の製造方法として広範囲な利用可能性を有するものである。   The present invention is effective in efficiently exhausting excess glass fine particles without making the entire facility unnecessarily large. By carrying out sooting stably, a glass base material with uniform characteristics can be manufactured, and for example, it can be used as an optical fiber base material. In an optical fiber using the present invention, quality stability is improved. Further, it has a wide range of applicability as a method for producing a glass base material for other uses.

１１ 出発ロッド
１３ ガラス微粒子合成用バーナ
１５ 表面
１７ ガラス微粒子堆積体
１９ 反応容器
２１ 空気導入口
２３ クリーンエア
２５ 排気口
２７ 領域 11 Starting rod 13 Burner 15 for glass fine particle synthesis Surface 17 Glass fine particle deposit 19 Reaction vessel 21 Air inlet 23 Clean air 25 Exhaust port 27 Area

Claims (1)

回転する出発ロッドに対向して複数本のガラス微粒子合成用バーナを配置し、
前記出発ロッドと前記ガラス微粒子合成用バーナとを該出発ロッドの軸方向に相対的に往復移動させ、
前記ガラス微粒子合成用バーナで合成されるガラス微粒子を前記出発ロッドの表面に順次堆積させるガラス微粒子堆積体の製造方法であって、
反応容器の前記ガラス微粒子合成用バーナ側の壁面に開口した空気導入口より該反応容器内にクリーンエアを流し、
前記クリーンエアを含む気体を前記反応容器の空気導入口と対向する壁面に開口した排気口から排気し、その際、前記排気口が設けられた高さ位置において、前記出発ロッドの中心位置から前記排気口側の空間における最も前記気体の流速が速くなる位置での製造開始から終了までの前記気体の平均速度を、０．８８ｍ／ｓ以上２ｍ／ｓ未満とすることを特徴とするガラス微粒子堆積体の製造方法。 A plurality of glass fine particle synthesis burners are arranged facing the rotating starting rod,
Reciprocally moving the starting rod and the glass fine particle synthesis burner in the axial direction of the starting rod;
A method for producing a glass particulate deposit, wherein glass particulates synthesized by the glass particulate synthesis burner are sequentially deposited on the surface of the starting rod,
Clean air is allowed to flow into the reaction vessel from the air inlet opening in the wall surface of the reaction vessel on the glass fine particle synthesis burner side,
The gas containing the clean air is exhausted from an exhaust port opened on a wall surface facing the air inlet of the reaction vessel, and at that time, at a height position where the exhaust port is provided, the center position of the starting rod is The glass fine particle deposition characterized in that the average velocity of the gas from the start to the end of the production at the position where the flow velocity of the gas is highest in the space on the exhaust port side is 0.88 m / s or more and less than 2 m / s. Body manufacturing method.
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