JP5464536B1 - Charged particle beam apparatus and operation display method of charged particle beam apparatus - Google Patents

Abstract

The present invention relates to a charged particle beam apparatus capable of grasping the flow of observation operation even for beginners of the charged particle beam apparatus and easily performing a series of observation operations and an operation display method thereof.
The present invention provides a first operation region in which a sample image display start button is arranged by irradiating a charged particle beam to a sample, a second operation region in which a sample image observation magnification setting button is arranged, a sample image A third operation area in which an automatic brightness adjustment button, a specimen image focus automatic adjustment button, and a button for returning the brightness and focus of the specimen image are arranged, a button for increasing the charged particle beam scanning speed, and a charged particle beam scanning speed A fourth operation area in which a button for slowing down, a button for narrowing the charged particle beam scanning range, a charged particle beam scanning stop and a sample image display maintenance button are arranged, and a button for saving the sample image to the storage device are arranged The fifth operation area is displayed on the image display device from top to bottom in the order of the first operation area, the second operation area, the third operation area, the fourth operation area, and the fifth operation area.
[Selection] Figure 1

Description

  The present invention relates to a charged particle beam apparatus.

  In recent years, the use and frequency of use of charged particle beam devices typified by scanning electron microscopes have expanded, but it cannot be said that there are many users who have specialized knowledge to cope with them. For this reason, the number of users who cannot fully use the functions of the charged particle beam apparatus is increasing.

  In order to solve the above problems, Patent Documents 1 and 2 describe the following techniques. In other words, imaging is performed under a plurality of simple observation conditions before the actual imaging. The obtained plurality of simple observation images are displayed as a list on the display unit (e preview).

  Subsequently, when the user selects a desired simple observation image from a plurality of displayed simple observation images, the computer sets the observation conditions for the selected simple observation image.

  Thereafter, the necessary manual adjustment is performed on the simple observation image selected by the user, and photographing is performed. As a result of this shooting, an image obtained is displayed on the display unit.

Japanese Patent No. 4014916 Japanese Patent No. 4014917

  In the techniques described in Patent Documents 1 and 2, as described above, the user selects a desired simple observation image from among a plurality of displayed simple observation images.

  However, when the user is a beginner, it may not be possible to recognize which one of the plurality of displayed simple observation images is good. No consideration has been given.

  In addition, when a user is a beginner, there is a case where it is impossible to obtain a correct observation image without knowing which function is used and in what order when operating a charged particle beam. However, the above technique is not considered in this respect.

  An object of the present invention is to realize a charged particle beam apparatus and an operation display method for the charged particle beam apparatus that enable even a beginner to operate a charged particle beam apparatus to grasp the flow of observation operations and easily perform a series of observation operations. About doing.

  In the present invention, for example, a first operation region in which a button for starting display of a sample image by irradiating a sample with a charged particle beam and a button for setting an observation magnification of the sample image are arranged. A third operation region in which an operation region, a button for automatically adjusting the brightness of the sample image, a button for automatically adjusting the focus of the sample image, and a button for returning the brightness and focus of the sample image are arranged A button for increasing the scanning speed of the charged particle beam, a button for decreasing the scanning speed of the charged particle beam, a button for narrowing the scanning range of the charged particle beam, and stopping the scanning of the charged particle beam to A fourth operation area in which a button for maintaining the display is arranged, and a fifth operation area in which a button for saving the sample image in the storage device are arranged from the first operation area to the second operation area, 3rd operation area, 4th operation area, 5th In order work area, a charged particle beam device to be displayed on the image display apparatus from top to bottom.

  According to the present invention, a charged particle beam apparatus capable of grasping the flow of observation operations even for beginners of charged particle beam apparatuses and easily performing a series of observation operations and an operation display method of the charged particle beam apparatus are realized. can do.

1 is a schematic configuration diagram illustrating an example of a charged particle beam apparatus according to a first embodiment. 3 is a flowchart illustrating an operation procedure of the electron microscope according to the first embodiment. 6 is a diagram illustrating a screen example of an operation screen according to Embodiment 1. FIG. FIG. 6 is a diagram illustrating an arrangement of operation panels on an operation screen according to the first embodiment. FIG. 6 is a diagram illustrating an arrangement of operation panels on an operation screen according to the first embodiment. FIG. 10 is a schematic diagram illustrating an example in which some operation items on an operation screen according to the second embodiment are freely arranged. FIG. 10 is a schematic diagram illustrating an example in which buttons of important items on an operation screen according to a third embodiment are highlighted. FIG. 10 is a schematic diagram illustrating another example in which buttons of important items on the operation screen according to the third embodiment are highlighted. FIG. 10 is a schematic diagram illustrating still another example in which buttons of important items on an operation screen according to the third embodiment are highlighted.

  The embodiment includes a charged particle source that emits a charged particle beam, a charged particle optical system that irradiates the sample with the charged particle beam, a detector that detects signal electrons generated from the sample by the irradiation of the charged particle beam, and a sample. A sample stage for holding and moving a sample, a sample chamber in which the sample stage is arranged, an image display device for displaying a sample image formed based on signal electrons, a charged particle source, a charged particle optical system, and a detector , A sample stage, a sample chamber, and a control unit for controlling the image display device, wherein the control unit is arranged with a button for irradiating the sample with a charged particle beam to start displaying a sample image A second operation area in which a button for setting an observation magnification of the sample image is arranged, a button for automatically adjusting the brightness of the sample image, a button for automatically adjusting the focus of the sample image, and the sample image Brightness and scorching A third operation area in which a button for returning the particle size is disposed, a button for increasing the scanning speed of the charged particle beam, a button for decreasing the scanning speed of the charged particle beam, and a scanning range of the charged particle beam A fourth operation region in which a button and a button for stopping the scanning of the charged particle beam and maintaining the display of the sample image are arranged, and a fifth operation region in which a button for saving the sample image in the storage device is arranged Charged particle beam apparatus that displays the image from the top to the bottom in the order of the first operation area, the second operation area, the third operation area, the fourth operation area, and the fifth operation area. Is disclosed.

  The embodiment also includes a charged particle source that emits a charged particle beam, a charged particle optical system that irradiates the sample with the charged particle beam, a detector that detects signal electrons generated from the sample by the irradiation of the charged particle beam, A sample stage for holding a sample and moving the sample; a sample chamber in which the sample stage is arranged; an image display device for displaying a sample image formed based on signal electrons; a charged particle source; a charged particle optical system; A detector, a sample stage, a sample chamber, and a control unit for controlling the image display device. The control unit is provided with a start button for irradiating the sample with a charged particle beam to start displaying a sample image. A first operation region, a second operation region in which a button for setting the observation magnification of the sample image is arranged, a button for automatically adjusting the brightness of the sample image, and a button for automatically adjusting the focus of the sample image , Bright sample image And a third operation area in which a button for returning the focus is arranged, and a fifth operation area in which a button for saving the sample image in the storage device are arranged from the first operation area to the second operation area. A button for increasing the scanning speed of the charged particle beam and a button for decreasing the scanning speed of the charged particle beam, which are displayed on the image display device from top to bottom in the order of the area, the third operation area, and the fifth operation area. A fourth operation region in which a button for narrowing the scanning range of the charged particle beam and a button for stopping the scanning of the charged particle beam and maintaining the display of the sample image are arranged at a desired position of the image display device. Discloses a charged particle beam apparatus.

  In addition, the embodiment discloses that the control unit displays on the first operation area an operation area in which a button for expanding the operation area capable of controlling the sample chamber is arranged.

  In addition, the embodiment discloses that the control unit displays an operation region in which a button for opening the sample chamber to the atmosphere and a button for evacuating the sample chamber are arranged on the first operation region.

  Further, the embodiment discloses that a stop button for stopping irradiation of the charged particle beam to the sample is arranged in the first operation region.

  Further, the embodiment discloses that a stop button for stopping irradiation of the charged particle beam to the sample is arranged in the first operation region. Further, it is disclosed that the start button and the stop button are highlighted.

  The embodiment also discloses that a button for moving the sample stage is arranged in the second operation area.

  In addition, the embodiment discloses that an image for displaying the position of the sample stage is displayed in the second operation region.

  The example also discloses that the save button is highlighted.

  The embodiment also includes a charged particle source that emits a charged particle beam, a charged particle optical system that irradiates the sample with the charged particle beam, a detector that detects signal electrons generated from the sample surface by the irradiation of the charged particle beam, and A sample stage on which the sample is arranged and moved, a command input unit, an image display unit, an image display region for displaying a sample image formed based on signal electrons detected by the detector, and charged particles An operation item for photographing a sample with an optical system and a detector is displayed on the display unit with an operation panel area that displays operation items from top to bottom in the order of operation, and according to a command from the command input unit, Disclosed is a charged particle beam apparatus including a charged particle source, a charged particle optical system, a detector, a sample stage, and a control unit that controls operations of an image display unit.

  Further, in the embodiment, a sample image formed based on signal electrons generated from the surface of the sample by irradiation of the charged particle beam of the charged particle beam apparatus is displayed on the image display area of the image display unit, and the sample is photographed. An operation display method for a charged particle beam apparatus is disclosed in which an image display unit displays a screen having an operation panel area for displaying operation items from top to bottom in order of operation.

  Also, the embodiment discloses that the control unit moves a specific operation item among the operation items displayed in the operation panel area to a designated position on the screen input from the operation input unit. Further, it is disclosed that the specific operation item is an operation item for confirming the visual field and the image.

  In addition, the embodiment discloses that the control unit highlights a specific operation item among the operation items displayed in the operation panel area as compared with other operation items. Further, it is disclosed that the specific operation items are an operation item for observing a sample and setting an observation purpose, an operation item for confirming a visual field and an image, and an operation item for storing an image. To do.

  In the embodiment, in the operation panel area, the first operation item for setting the observation of the sample and the observation purpose, the second operation item for grasping the display location of the sample, and the image quality are adjusted. A third operation item for confirming, a fourth operation item for confirming the field of view and the image, and a fifth operation item for storing the image are displayed. From the first operation item, the second operation item is displayed. It is disclosed that the operation items, the third operation item, the fourth operation item, and the fifth operation item are displayed in order from the top to the bottom.

  Embodiments of the present invention will be described below with reference to the drawings. Although an electron microscope will be described as an example of a charged particle beam apparatus, the present invention is applicable to charged particle beam apparatuses in general such as an appearance inspection apparatus and a focused ion beam apparatus using an electron beam in addition to an electron microscope. be able to.

Example 1
FIG. 1 is a schematic configuration diagram of an electron microscope according to the first embodiment. In the electron microscope (charged particle beam apparatus, sample observation system) 101 shown in FIG. 1, a primary electron beam 2 emitted from an electron gun (charged particle beam source) 1 is converged by a converging lens 3 and an objective lens 8, The sample 9 is scanned by the upper deflector 6 and the lower deflector 7.

  The sample 9 is placed on the sample stage 24, and signal electrons generated from the sample 9 are detected by the detector 10, and a computer (image display processing unit, operation control unit) 19 is connected via circuits 11 to 17 described later. To be supplied. Then, a signal recorded corresponding to the scanning position processed by the computer 19 is displayed on the image display device 18. The signal electrons include secondary electrons, reflected electrons, and transmitted electrons. It is also possible to perform elemental analysis by detecting characteristic X-rays generated from the sample 9 with an X-ray detector.

  The sample stage 24 is disposed in a sample observation chamber (not shown). In order to open or evacuate the sample observation chamber, the sample observation chamber is connected to an evacuation system including a vacuum pump (not shown).

  An X-direction astigmatism corrector 4 for performing focus X adjustment and a Y-direction astigmatism corrector 5 for performing focus Y adjustment are disposed in order to focus the primary electron beam 2 on the sample 9 in a point shape. The computer 19 adjusts and controls the focus X adjustment and the focus Y adjustment (astigmatism correction). Further, the computer 19 can adjust and control the excitation intensity of the converging lens 3 or the objective lens 8 to adjust the focus on the sample 9.

  The above charged particle optical system (electron gun 1, converging lens 3, X-direction astigmatism corrector 4, Y-direction astigmatism corrector 5, upper deflector 6, lower deflector 7, objective lens 8, and detector 10) It is housed in an electron microscope column (charged particle beam apparatus) 100.

  The electron optical system includes a high voltage control circuit 11, a focusing lens control circuit 12, an X direction astigmatism corrector control circuit 13, a Y direction astigmatism corrector control circuit 14, a deflector control circuit 15, and an objective lens control circuit. 16. As described above, the computer 19 is controlled via the detection signal control circuit 17 by a computer 19 such as a CPU (Central Processing Unit). The sample stage 24 and the vacuum exhaust system are also controlled by the computer 19.

  Each control circuit 11-17 may be provided independently independently, and may be provided in one board | substrate. Further, the operation of each of the control circuits 11 to 17 is performed by the computer 19 so that each of the control circuits 11 to 17 may be included in the computer 19 as a function.

  An image display device 18, a storage device 21, a memory 22, and an input device 23 are connected to the computer 19. As will be described later, through the operation screen 200 (shown in FIG. 3) displayed on the image display device 18, the user can focus the objective lens 8, the X-direction astigmatism corrector 4, and the Y-direction astigmatism corrector 5. Adjust the astigmatism correction condition.

  In addition, the operation screen 200 according to the first embodiment is stored in advance in the storage device (storage unit) 21 corresponding to each operation stage, as will be described later.

  If the computer 19 is connected to a network, the operation screen 200 may be stored in another storage device connected to the network.

  An operation program 31 is stored in the memory 22, and the operation program 31 is executed by the computer 19. The operation program 31 displays the operation screen 200 on the image display device 18 and controls the above-described units 1 to 17 based on the information input via the input device 23.

  Here, although the operation screen 200 will be described in detail later, the operation screen 200 is each screen displayed according to the user's operation stage.

  FIG. 2 is a flowchart illustrating the operation procedure of the electron microscope according to the first embodiment. FIG. 3 is a diagram illustrating a screen example of the operation screen according to the first embodiment.

  In FIG. 3, the operation screen 200 includes an operation navigation screen 201, an application assist screen 202, an image display screen 203, and an operation panel screen 204.

  The operation navigation screen 201 in FIG. 3 is a screen showing an operation procedure. The operation navigation screen 201 displays the current operation procedure as a main item A1 and a sub item A2 of the main item A1. This makes it easy for beginners to grasp the operation procedure.

  The application assist screen 202 is a screen for displaying advice on changing shooting conditions and adjustment. The image display screen 203 is a screen on which an image captured by an electron microscope is displayed. The operation panel screen 204 is a screen for changing or adjusting the shooting conditions.

  Note that the content displayed on each of the screens 201 to 204 is changed depending on the stage of the operation performed by the user.

  The operation panel screen 204 will be described in detail with reference to FIGS. 4 and 5. 4 and 5 are schematic diagrams illustrating an example in which operation items in the operation panel screen 204 on the operation screen 200 are arranged from top to bottom in the order of operation.

  The operation panel screen 204 is a screen for changing or adjusting the imaging conditions. The “sample exchange / vacuum setting” area 211, the “observing / setting the observation purpose” area 212, and the “display location” are grasped. Items necessary for the observation operation of the charged particle beam apparatus, such as a “perform” area 213, an “automatic image adjustment” area 214, a “display mode change” area 215, and a “save” area 216, are arranged.

  The “sample exchange / vacuum setting” region 211 in FIG. 4 corresponds to step S104 in FIG. 2 and is the first operation performed among the items necessary for the subsequent observation operation. The setting of the sample 9 may be performed after the operation screen 200 is activated, or may be performed before the operation screen 200 is activated. In the “sample exchange / vacuum setting” area 211, an air release / evacuation button 301 is arranged, and a sample 9 containing the sample 9 can be observed by selecting and clicking air release or vacuuming. The room can be opened to the atmosphere or evacuated.

  The operation screen 200 shown in FIG. 4 is provided with a radio button 217 for switching between a high vacuum mode (<1 Pa) and a low vacuum mode (> 1 Pa). A vacuum state or a low vacuum state can be set. In the low vacuum mode, two preset vacuum degrees can be selected depending on the sample to be observed.

  The “observation / set observation purpose” area 212 in FIG. 5 is used in step S105 in FIG. The item of this area 212 is provided with a beam on / stop button 302, which can start and stop observation. In addition, when the observation purpose change button is clicked, the current observation conditions can be confirmed and the observation purpose can be changed.

  5 is used in steps S106 to S109 in FIG. Above this area 213, the current magnification and field width are displayed. Below that, a button for setting the magnification to a low magnification and a button for setting the magnification to a high magnification are arranged. Next to the right side of the button for setting the high magnification, a button for setting the magnification for the button for setting the current magnification to the high magnification is also arranged. Below the region 213, there is a display simulating the sample stage in a substantially circular shape, and the current sample stage position is indicated by the vertical and horizontal lines. There is a stage movement button on the right side of the display, and the sample stage is moved to that position by clicking the desired position on the circular sample stage and then clicking the button. In step S105 in FIG. 2, after the observation is started by clicking the beam on button, the magnification is set to a low magnification in order to search the field of view. Thereafter, a stage operation is performed, the observation position is changed, and the magnification to be observed is set. This operation is repeated, the position where observation is desired is searched, and the magnification at which observation is desired is set.

  The “automatic image adjustment” area 214 in FIG. 5 is used in steps S105 to S113 in FIG. Items in this area 214 include an AUTO brightness button, an AUTO focus button, and an undo button. Clicking on the AUTO brightness button automatically adjusts the brightness of the image. Clicking the AUTO focus button automatically adjusts the focus of the image. In addition, by clicking the undo button, it is possible to return to the image before auto image adjustment.

  The “change display mode” area 215 in FIG. 5 is used in steps S106 to S113 in FIG. In this area item, four types of display mode switching buttons are arranged: a visual field search button, an image confirmation button, an image adjustment button, and a pause button. The field search button is used when searching for a target observation field by changing the magnification and the stage position by increasing the scanning speed of the primary electron beam 2. The image confirmation button is used for slowing down the scanning speed of the primary electron beam 2 and confirming the image in more detail than searching for the field of view, or confirmation before acquiring the image. The image adjustment button is used to make it easier to confirm a change in the image during image adjustment by narrowing the scanning range of the primary electron beam 2. The pause button is used when scanning of the primary electron beam 2 is stopped and an image is temporarily confirmed.

  The “save” area 216 in FIG. 5 is used in step S114 in FIG. When an image capture and save button 303 is clicked, the image currently being observed is captured and stored in the storage device 21. Even after the image is stored in the storage device 21, the image can be readjusted by pressing the “AUTO brightness” (auto brightness) button or the like in the “automatic image adjustment” area 214 again.

  The operation items arranged on the operation panel screen 204 shown in FIG. 3 are arranged from top to bottom in the order of operation according to the use stage of the apparatus according to the flow of FIG. Further, it is automatically folded and unfolded according to the use stage of the apparatus, or manually folded and unfolded by the user. Therefore, the user can easily recognize the buttons necessary for the operation, can grasp the series of the observation operation, and can easily perform the observation operation.

  The operation procedure of the electron microscope will be described in detail with reference to FIG.

  First, when a user (operator) starts an operation program (not shown), an operation screen 200 shown in FIG. 4 is displayed on the image display device 18 (step S101). Then, the user selects and clicks “release to atmosphere” on the release / evacuation button 301 to set the sample (steps S102 and S103).

  Next, when the user selects and clicks “evacuation” of the atmosphere release / evacuation button 301, the sample observation chamber is in a high vacuum state or a low vacuum state (step S104). The operation screen 200 is the screen shown in FIG. 5, and the user selects and clicks on the beam on / off button 302 (step S105). Next, the user lowers the magnification on the magnification setting display section in the “understand display location” area 213 ((widens the observation range), step S106). Next, after clicking the desired position for moving the sample stage on the circular sample stage displayed in the “Know the display location” area 213, the stage move button is clicked (step S107).

  Then, the user increases the magnification on the magnification setting display section in the “to grasp the display location” area 213 ((set to a magnification to be observed), step S108). The user confirms the image displayed on the display screen 203 and determines whether or not the field of view is acceptable (step S109). If the field of view is insufficient, the process returns to step S106, and steps S106 to S109 are executed again (visual field search again).

  Next, the user clicks an “AUTO brightness” (auto brightness) button and an “AUTO focus” (auto focus) button in the “auto image adjustment” area 214 of FIG. 5 (steps S110 and S111).

  Subsequently, the user clicks an “confirm image” button in the “change display mode” area 215 of FIG. 5 (step S112).

  The user confirms the image displayed on the display screen 203 and determines whether the image is acceptable (step S113). If the image is insufficient, the process returns to step S110, and steps S110 to S113 are executed again (adjustment and image acquisition again).

  Next, the user clicks a button in the “save” area 216 in FIG. 5 (step S114). As a result, the image currently being observed is captured and stored in the storage device 21. After the user clicks the button in the “save” area 216, the user determines whether or not the saved image is acceptable (step S115). If the image is insufficient, the process returns to step S110, and steps S110 to S115 are executed again (adjustment and image acquisition again).

  If it is determined in step S115 that the image is sufficient, the process ends.

  If the field of view / magnification is also set automatically, the processing in steps S106 to S109 can be omitted.

  The computer 19 scans the sample 9 at any time with the field of view and magnification set in steps S106 to S109, acquires an image, and displays the image on the image display device 18.

  As described above, according to the first embodiment of the present invention, the operation items on the operation screen having the operation items of the charged particle beam apparatus are arranged from top to bottom in the order in which the user operates, and the buttons are arranged in that order. A series of observation operations can be performed by clicking and operating.

  Therefore, even a beginner of a charged particle beam apparatus can grasp the flow of the observation operation, and can realize a charged particle beam apparatus and a charged particle beam apparatus operation display method that can easily perform a series of observation operations. .

(Example 2)
Next, a second embodiment of the present invention will be described.

  FIG. 6 is a diagram illustrating an operation screen 200 according to the second embodiment. The example shown in FIG. 6 is an example in which some operation items can be freely arranged.

  In FIG. 6, the “change display mode” area 215 arranged on the operation panel screen 204 can be taken out from the operation panel screen 204 and displayed in the image display screen area 203. Other configurations of the second embodiment are the same as the configurations shown in the first embodiment except that the area 215 can be taken out from the operation panel screen 204 in the image display device 18 and can be freely arranged in the other areas.

  The “change display mode” area 215 includes four types of display switching buttons, a visual field search button, an image confirmation button, an image adjustment button, and a pause button. The optimum display mode is selected automatically at each stage of steps S102 to S115 in FIG. 2 or manually with the button in the “change display mode” area 215.

  The items in the “display mode change” area 215 are used more frequently than the other display area items arranged on the operation panel screen 204, and are therefore used more frequently.

  Further, the operation items in the operation panel screen 204 are automatically folded and unfolded according to the stage of use of the charged particle beam apparatus, or manually folded and unfolded by the user. Therefore, in the second embodiment, the item of the “change display mode” area 215 on the operation panel screen 204 is taken out from the operation panel screen 204 and placed at an arbitrary location in the display screen of the image display device 18. It has a configuration that can.

  By using the configuration of the second embodiment, the item of the “understand display location” area 213 is expanded (executed), and the display mode is changed while confirming the position information of the sample stage 24 having the sample stage. Or changing the display mode while expanding the items in the “automatic image adjustment” area 214 and performing automatic image adjustment, without folding and expanding the operation items on the operation panel screen 204. It is possible to change the mode.

  Also in the second embodiment, the same effect as in the first embodiment can be obtained.

(Example 3)
Next, a third embodiment of the present invention will be described with reference to FIGS. 7 to 9 correspond to FIGS. 4 to 6, but in the third embodiment, there is a highlighted display area in the display screen.

  That is, the “release to atmosphere / evacuation” button 301 arranged on the operation panel screen 204 in FIG. 7, the “beam on / stop” button 302 in FIG. 8, the “load and save image” button 303, and the “ Buttons of important items such as “change display mode” area 215 are highlighted. Except for being highlighted, it is the same as that shown in the first and second embodiments.

  The “release to atmosphere / evacuation” button 301 is used when exchanging the sample. A “beam on / stop” button 302 is used at the start and end of observation. An “image capture and save” button 303 is used to save an image being observed. Further, the “change display mode” region 215 is used throughout each step, as described above.

  The above operation is an operation frequently performed during the observation operation of the charged particle beam apparatus, and is an especially important item in the observation operation. However, when the same notation as other buttons is used, it is difficult for a general user to find a button as well as a beginner.

  Therefore, in the third embodiment, in the operation panel screen 204, an “atmosphere release / evacuation” button 301, a “beam on / stop” button 302, an “image capture and save” button 303, and a “change display mode” area. 215 highlights and highlights to inform the user that it is an important button.

  According to the third embodiment, the user can easily discriminate important buttons, and the observation operation can be performed smoothly.

  In the configuration of the third embodiment, important buttons are not limited to highlighting by color, but may be made conspicuous by increasing the font size or bolding.

  Also in the third embodiment, the same effect as in the first embodiment can be obtained.

  DESCRIPTION OF SYMBOLS 1 ... Electron gun, 2 ... Primary electron beam, 3 ... Condensing lens, 4 ... X direction astigmatism corrector, 5 ... Y direction astigmatism corrector, 6 ... Upper stage deflection 7 ... lower deflector, 8 ... objective lens, 9 ... sample, 10 ... detector, 11 ... high voltage control circuit, 12 ... focusing lens control circuit, 13 ... ..X direction astigmatism control circuit, 14... Y direction astigmatism control circuit, 15... Deflector control circuit, 16. , 18 ... image display device, 19 ... computer (image display unit, processing unit), 21 ... storage device (storage unit), 22 ... memory, 23 ... input device, 24 ... Sample stage, 31 ... operation program, 41 ... observation condition setting table, 100 ... electron microscope column ( Electron beam device), 101 ... Electron microscope (charged particle beam device, charged particle beam device system), 200 ... Operation screen, 201 ... Operation navigation screen, 202 ... Application assist screen, 203. ..Image display screen, 204 ... Operation panel screen

Claims (10)

A charged particle source that emits a charged particle beam;
A charged particle optical system that irradiates the sample with the charged particle beam; and
A detector for detecting signal electrons generated from the sample by irradiation of the charged particle beam;
A sample stage for holding the sample and moving the sample;
A sample chamber in which the sample stage is disposed;
An image display device for displaying a sample image formed based on the signal electrons;
A controller that controls the charged particle source, the charged particle optical system, the detector, the sample stage, the sample chamber, and the image display device;
With
The controller is
A first operation region in which a button for irradiating the sample with the charged particle beam to start displaying the sample image;
A second operation area in which a button for setting an observation magnification of the sample image is disposed;
A third operation region in which a button for automatically adjusting the brightness of the sample image, a button for automatically adjusting the focus of the sample image, and a button for returning the brightness and focus of the sample image are disposed; ,
A button for increasing the scanning speed of the charged particle beam; a button for decreasing the scanning speed of the charged particle beam; a button for narrowing a scanning range of the charged particle beam; A fourth operation area in which a button for maintaining display of the sample image is disposed;
A fifth operation area in which a button for saving the sample image in a storage device is disposed;
From the first operation area, the second operation area, the third operation area, the fourth operation area, and the fifth operation area are displayed on the image display device from top to bottom in order. A charged particle beam apparatus characterized by that. A charged particle source that emits a charged particle beam;
A charged particle optical system that irradiates the sample with the charged particle beam; and
A detector for detecting signal electrons generated from the sample by irradiation of the charged particle beam;
A sample stage for holding the sample and moving the sample;
A sample chamber in which the sample stage is disposed;
An image display device for displaying a sample image formed based on the signal electrons;
A controller that controls the charged particle source, the charged particle optical system, the detector, the sample stage, the sample chamber, and the image display device;
With
The controller is
A first operation region in which a start button is arranged to irradiate the sample with the charged particle beam and start displaying the sample image;
A second operation area in which a button for setting an observation magnification of the sample image is disposed;
A third operation region in which a button for automatically adjusting the brightness of the sample image, a button for automatically adjusting the focus of the sample image, and a button for returning the brightness and focus of the sample image are disposed; ,
A fifth operation area in which a button for saving the sample image in a storage device is disposed;
From the first operation area, the second operation area, the third operation area, and the fifth operation area are displayed on the image display device from top to bottom,
A button for increasing the scanning speed of the charged particle beam; a button for decreasing the scanning speed of the charged particle beam; a button for narrowing a scanning range of the charged particle beam; A fourth operation area in which a button for maintaining display of the sample image is arranged;
A charged particle beam device characterized by displaying at a desired position of the image display device. In the charged particle beam device according to claim 1 or 2,
The charged particle beam apparatus, wherein the control unit displays an operation region in which a button for expanding an operation region capable of controlling the sample chamber is disposed on the first operation region. In the charged particle beam device according to claim 1 or 2,
The control unit displays an operation region in which a button for opening the sample chamber to the atmosphere and a button for evacuating the sample chamber are arranged on the first operation region. Wire device. In the charged particle beam device according to claim 1 or 2,
A charged particle beam apparatus characterized in that a stop button for stopping irradiation of the charged particle beam to the sample is arranged in the first operation region. In the charged particle beam device according to claim 1 or 2,
A charged particle beam apparatus characterized in that a stop button for stopping irradiation of the charged particle beam to the sample is arranged in the first operation region. The charged particle beam apparatus according to claim 6.
The charged particle beam apparatus, wherein the start button and the stop button are highlighted. In the charged particle beam device according to claim 1 or 2,
A charged particle beam apparatus, wherein a button for moving the sample stage is disposed in the second operation area. In the charged particle beam device according to claim 1 or 2,
The charged particle beam apparatus characterized by displaying the image which displays the position of the said sample stage in the said 2nd operation area | region. In the charged particle beam device according to claim 1 or 2,
A charged particle beam apparatus, wherein the save button is highlighted.

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