JP5376793B2 - Photocurable resin composition, cured product pattern thereof, and printed wiring board comprising the cured product pattern - Google Patents
Photocurable resin composition, cured product pattern thereof, and printed wiring board comprising the cured product pattern Download PDFInfo
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- JP5376793B2 JP5376793B2 JP2007289996A JP2007289996A JP5376793B2 JP 5376793 B2 JP5376793 B2 JP 5376793B2 JP 2007289996 A JP2007289996 A JP 2007289996A JP 2007289996 A JP2007289996 A JP 2007289996A JP 5376793 B2 JP5376793 B2 JP 5376793B2
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- 239000011342 resin composition Substances 0.000 title claims abstract description 43
- 229920005989 resin Polymers 0.000 claims abstract description 66
- 239000011347 resin Substances 0.000 claims abstract description 66
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 62
- 150000001875 compounds Chemical class 0.000 claims abstract description 51
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims abstract description 33
- 239000003513 alkali Substances 0.000 claims abstract description 20
- 239000000203 mixture Substances 0.000 claims abstract description 20
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 16
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 4
- -1 oxime ester Chemical class 0.000 claims description 61
- 125000000217 alkyl group Chemical group 0.000 claims description 31
- 239000004593 Epoxy Substances 0.000 claims description 29
- 238000000576 coating method Methods 0.000 claims description 28
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 26
- 239000011248 coating agent Substances 0.000 claims description 25
- 125000006165 cyclic alkyl group Chemical group 0.000 claims description 23
- 239000003999 initiator Substances 0.000 claims description 23
- 229920001187 thermosetting polymer Polymers 0.000 claims description 18
- 150000008065 acid anhydrides Chemical group 0.000 claims description 17
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 17
- 238000011161 development Methods 0.000 claims description 14
- 230000018109 developmental process Effects 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 13
- 125000005843 halogen group Chemical group 0.000 claims description 13
- 238000001035 drying Methods 0.000 claims description 11
- 125000003700 epoxy group Chemical group 0.000 claims description 11
- 239000003086 colorant Substances 0.000 claims description 10
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 10
- 125000002252 acyl group Chemical group 0.000 claims description 9
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 claims description 9
- 125000004122 cyclic group Chemical group 0.000 claims description 8
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 8
- 125000003545 alkoxy group Chemical group 0.000 claims description 7
- 125000003118 aryl group Chemical group 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 230000007261 regionalization Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- HEQOJEGTZCTHCF-UHFFFAOYSA-N 2-amino-1-phenylethanone Chemical compound NCC(=O)C1=CC=CC=C1 HEQOJEGTZCTHCF-UHFFFAOYSA-N 0.000 claims description 4
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 4
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 4
- 125000005011 alkyl ether group Chemical group 0.000 claims description 3
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 3
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 238000005476 soldering Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract description 34
- 229910000679 solder Inorganic materials 0.000 abstract description 22
- 230000035945 sensitivity Effects 0.000 abstract description 17
- 238000007747 plating Methods 0.000 abstract description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052737 gold Inorganic materials 0.000 abstract description 7
- 239000010931 gold Substances 0.000 abstract description 7
- 150000001733 carboxylic acid esters Chemical group 0.000 abstract 1
- 239000000049 pigment Substances 0.000 description 91
- 229920000647 polyepoxide Polymers 0.000 description 60
- 239000003822 epoxy resin Substances 0.000 description 56
- 239000010408 film Substances 0.000 description 44
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 27
- 239000000758 substrate Substances 0.000 description 22
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 22
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 20
- 238000006243 chemical reaction Methods 0.000 description 19
- 239000007787 solid Substances 0.000 description 19
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 18
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 18
- 229920003986 novolac Polymers 0.000 description 18
- 239000000243 solution Substances 0.000 description 17
- 239000002253 acid Substances 0.000 description 15
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 15
- 238000011156 evaluation Methods 0.000 description 13
- 238000002156 mixing Methods 0.000 description 13
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 12
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 12
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 12
- 238000003786 synthesis reaction Methods 0.000 description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 11
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 11
- 239000000047 product Substances 0.000 description 11
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 10
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 150000004056 anthraquinones Chemical class 0.000 description 9
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- PTBDIHRZYDMNKB-UHFFFAOYSA-N 2,2-Bis(hydroxymethyl)propionic acid Chemical compound OCC(C)(CO)C(O)=O PTBDIHRZYDMNKB-UHFFFAOYSA-N 0.000 description 8
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 8
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 8
- 238000013508 migration Methods 0.000 description 8
- 230000005012 migration Effects 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 7
- 150000004292 cyclic ethers Chemical group 0.000 description 7
- 238000004090 dissolution Methods 0.000 description 7
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- FVCSARBUZVPSQF-UHFFFAOYSA-N 5-(2,4-dioxooxolan-3-yl)-7-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C(C(OC2=O)=O)C2C(C)=CC1C1C(=O)COC1=O FVCSARBUZVPSQF-UHFFFAOYSA-N 0.000 description 6
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 6
- 239000003054 catalyst Substances 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 6
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 6
- 125000000524 functional group Chemical group 0.000 description 6
- DCUFMVPCXCSVNP-UHFFFAOYSA-N methacrylic anhydride Chemical compound CC(=C)C(=O)OC(=O)C(C)=C DCUFMVPCXCSVNP-UHFFFAOYSA-N 0.000 description 6
- 150000007519 polyprotic acids Polymers 0.000 description 6
- 239000011541 reaction mixture Substances 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 5
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 5
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 5
- 238000002845 discoloration Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 5
- 229910052753 mercury Inorganic materials 0.000 description 5
- NYGZLYXAPMMJTE-UHFFFAOYSA-M metanil yellow Chemical group [Na+].[O-]S(=O)(=O)C1=CC=CC(N=NC=2C=CC(NC=3C=CC=CC=3)=CC=2)=C1 NYGZLYXAPMMJTE-UHFFFAOYSA-M 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 230000035515 penetration Effects 0.000 description 5
- 239000003208 petroleum Substances 0.000 description 5
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical group S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 239000002966 varnish Substances 0.000 description 5
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical group CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 4
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- 239000012965 benzophenone Substances 0.000 description 4
- 229930003836 cresol Natural products 0.000 description 4
- 150000004294 cyclic thioethers Chemical group 0.000 description 4
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 4
- 239000000975 dye Substances 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- 239000000945 filler Substances 0.000 description 4
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 4
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 3
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Natural products CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- BAPJBEWLBFYGME-UHFFFAOYSA-N acrylic acid methyl ester Natural products COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 3
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 3
- 239000000038 blue colorant Substances 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 229960000956 coumarin Drugs 0.000 description 3
- 235000001671 coumarin Nutrition 0.000 description 3
- 125000004663 dialkyl amino group Chemical group 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 239000000040 green colorant Substances 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 230000000977 initiatory effect Effects 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 125000003566 oxetanyl group Chemical group 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 3
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical compound C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 3
- 239000001062 red colorant Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 229910000029 sodium carbonate Inorganic materials 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 229940014800 succinic anhydride Drugs 0.000 description 3
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical class C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- BRKORVYTKKLNKX-UHFFFAOYSA-N 2,4-di(propan-2-yl)thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC(C(C)C)=C3SC2=C1 BRKORVYTKKLNKX-UHFFFAOYSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
- LCHAFMWSFCONOO-UHFFFAOYSA-N 2,4-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC(C)=C3SC2=C1 LCHAFMWSFCONOO-UHFFFAOYSA-N 0.000 description 2
- HHOJVZAEHZGDRB-UHFFFAOYSA-N 2-(4,6-diamino-1,3,5-triazin-2-yl)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1=NC(N)=NC(N)=N1 HHOJVZAEHZGDRB-UHFFFAOYSA-N 0.000 description 2
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 2
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 description 2
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- 229920002799 BoPET Polymers 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical class C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical class CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- UMLWXYJZDNNBTD-UHFFFAOYSA-N alpha-dimethylaminoacetophenone Natural products CN(C)CC(=O)C1=CC=CC=C1 UMLWXYJZDNNBTD-UHFFFAOYSA-N 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- MYONAGGJKCJOBT-UHFFFAOYSA-N benzimidazol-2-one Chemical compound C1=CC=CC2=NC(=O)N=C21 MYONAGGJKCJOBT-UHFFFAOYSA-N 0.000 description 2
- 150000008641 benzimidazolones Chemical class 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 230000001851 biosynthetic effect Effects 0.000 description 2
- QDVNNDYBCWZVTI-UHFFFAOYSA-N bis[4-(ethylamino)phenyl]methanone Chemical compound C1=CC(NCC)=CC=C1C(=O)C1=CC=C(NCC)C=C1 QDVNNDYBCWZVTI-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
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Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F20/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide or nitrile thereof
- C08F20/02—Monocarboxylic acids having less than ten carbon atoms, Derivatives thereof
- C08F20/10—Esters
- C08F20/12—Esters of monohydric alcohols or phenols
- C08F20/16—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms
- C08F20/18—Esters of monohydric alcohols or phenols of phenols or of alcohols containing two or more carbon atoms with acrylic or methacrylic acids
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
- C08F290/06—Polymers provided for in subclass C08G
- C08F290/064—Polymers containing more than one epoxy group per molecule
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
- C08G59/42—Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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Abstract
Description
本発明は、活性エネルギー線に対する感度に優れ、且つ、ソルダーレジストとして有用なアルカリ現像型の光硬化性樹脂組成物に関するものである。 The present invention relates to an alkali-developable photocurable resin composition that is excellent in sensitivity to active energy rays and is useful as a solder resist.
最近プリント配線板用ソルダーレジストの露光手段として、優れた位置合わせ精度の観点からレーザー走査露光が普及している。レーザー露光はフォトマスクを使用せずパターン形成された配線板上のソルダーレジストを走査しながら画像形成するものであるが、従来からあるソルダーレジストではその適正露光量が200mJ/cm2以上であるため露光に非常に時間がかかるという欠点を有しており、レーザー露光に対応するソルダーレジストには非常に高感度化が要求されている。 Recently, laser scanning exposure has become widespread as an exposure means for printed wiring board solder resist from the viewpoint of excellent alignment accuracy. In laser exposure, an image is formed while scanning a solder resist on a patterned wiring board without using a photomask, but a conventional solder resist has an appropriate exposure amount of 200 mJ / cm 2 or more. There is a drawback that it takes a very long time for exposure, and a solder resist corresponding to laser exposure is required to have very high sensitivity.
このような背景から高い光重合能力を発揮することができる感光性組成物の提案がなされてきた(例えば、特許文献1、及び特許文献2参照)。しかしながら、これまで提案されてきた感光性組成物の中には確かに高い光重合能力を発揮することができるものが存在するが、レーザーダイレクト露光が施されるには感度が必ずしも充分とはいえず、また感光性組成物に求められる感度以外の諸特性においても必ずしも充分とはいえない。具体的には、特許文献1に開示されている組成物は、カルボキシル基含有感光性樹脂の形成に用いる1分子中に環状エーテル基とエチレン性不飽和基を併せ持つ化合物としてグリシジルメタアクリレートのみ例示されているが、感度が不充分なだけでなく付加量を多くすると現像性が悪くなる傾向があった。一方、特許文献2で提案されている、アクリレートに対しε−カプロラクトンを連鎖的に反応させ分子伸長したカプロラクトン変性アクリレートを使用する場合は、感度が高くなるが指触乾燥性が極めて悪く、はんだ耐熱性も不充分であった。 From such a background, a photosensitive composition capable of exhibiting high photopolymerization ability has been proposed (see, for example, Patent Document 1 and Patent Document 2). However, some of the photosensitive compositions that have been proposed so far can certainly exhibit high photopolymerization ability, but the sensitivity is not necessarily sufficient for laser direct exposure. In addition, the properties other than the sensitivity required for the photosensitive composition are not necessarily sufficient. Specifically, in the composition disclosed in Patent Document 1, only glycidyl methacrylate is exemplified as a compound having both a cyclic ether group and an ethylenically unsaturated group in one molecule used for forming a carboxyl group-containing photosensitive resin. However, not only is the sensitivity insufficient, but there is a tendency for the developability to deteriorate when the added amount is increased. On the other hand, when using caprolactone-modified acrylate, which is proposed in Patent Document 2 and chain-reacted with ε-caprolactone and molecularly extended, the sensitivity is high, but the dryness to touch is extremely poor, and the solder heat resistance is high. Sex was also insufficient.
さらにアルカリ現像型のフォトソルダーレジストは、耐久性の点ではまだまだ問題がある。すなわち従来の熱硬化型、溶剤現像型のものに比べてアルカリ現像型のフォトソルダーレジストは耐薬品性、耐水性、耐熱性等が劣る。これは、アルカリ現像型フォトソルダーレジストはアルカリ現像可能とするために親水性基を有するものが主成分となっていることに起因する。これにより、薬液、水、水蒸気等が浸透しやすく、耐薬品性の低下やレジスト皮膜と銅との密着性を低下させる。結果として耐薬品性としてのアルカリ耐性が弱く、特にBGAやCSP等の半導体パッケージにおいては特に耐湿熱性ともいうべき耐PCT性(耐プレッシャークッカーテスト性)が必要であるがこのような厳しい条件下においては数時間〜十数時間程度しかもたないのが現状である。また、PCT条件下電圧を印加した状態でのPCBT試験ではほとんどの場合、数時間でマイグレーションの発生による不良が確認されているのが現状である。
本発明は、上記問題点に鑑み開発されたものであり、活性エネルギー線に対して高感度であって、その直接描画による露光硬化性に優れ、且つ、現像性、指触乾燥性、はんだ耐熱性、無電解金めっき性、耐アルカリ性、PCT及びPCBT耐性に優れソルダーレジストとして有用なアルカリ現像型の光硬化性樹脂組成物を提供することを課題とする。 The present invention has been developed in view of the above-mentioned problems, is highly sensitive to active energy rays, has excellent exposure curability by direct drawing, and developability, touch drying property, solder heat resistance. It is an object of the present invention to provide an alkali development type photo-curable resin composition that is excellent in resistance, electroless gold plating property, alkali resistance, PCT and PCBT resistance, and is useful as a solder resist.
本発明者等は、上記課題を解決すべく鋭意研究した結果、感光性樹脂として特定構造を含むカルボン酸含有感光性樹脂を用い、これに他の成分を組み合わせてなる光硬化性樹脂組成物により上記課題が解決されることを見出し本発明を完成するに至った。 As a result of diligent research to solve the above-mentioned problems, the present inventors have used a photocurable resin composition comprising a carboxylic acid-containing photosensitive resin containing a specific structure as a photosensitive resin and combining this with other components. The inventors have found that the above problems can be solved and have completed the present invention.
すなわち、本発明は、(A)一般式(I)で表される構造を含むカルボン酸含有感光性樹脂、(B)光重合開始剤、(C)1分子中に2個以上のエチレン性不飽和基を有する化合物を含有することを特徴とするアルカリ現像可能な光硬化性樹脂組成物である:
一般式(I)中、R1は水素原子もしくはメチル基、R2は炭素数2〜6の直鎖状、分岐状又は環状のアルキル基、R3は水素原子もしくは有機酸エステル残基を表す。 In general formula (I), R 1 represents a hydrogen atom or a methyl group, R 2 represents a linear, branched or cyclic alkyl group having 2 to 6 carbon atoms, and R 3 represents a hydrogen atom or an organic acid ester residue. .
ここで、一般式(I)中のR3は、一態様において、酸無水物残基であり得、あるいは、(メタ)アクリル酸残基であり得る。 Here, R 3 in the general formula (I) may be an acid anhydride residue or a (meth) acrylic acid residue in one embodiment.
また、(B)光重合開始剤は、一般式(II)で表される構造を含むオキシムエステル系光重合開始剤、一般式(III)で表される構造を含むアミノアセトフェノン系光重合開始剤、及び一般式(IV)で表される構造を含むアシルホスフィンオキサイド系光重合開始剤からなる群から選ばれる1種、又は2種以上の混合物であり得る:
一般式(II)〜(IV)中、R1は、水素原子、フェニル基(炭素数1〜6のアルキル基、フェニル基、若しくはハロゲン原子で置換されていてもよい)、炭素数1〜20の直鎖状、分岐状又は環状のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基またはベンゾイル基(炭素数1〜6のアルキル基若しくはフェニル基で置換されていてもよい)を表し、
R2は、フェニル基(炭素数1〜6のアルキル基、フェニル基若しくはハロゲン原子で置換されていてもよい)、炭素数1〜20の直鎖状、分岐状又は環状のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基またはベンゾイル基(炭素数が1〜6のアルキル基若しくはフェニル基で置換されていてもよい)を表し、
R3およびR4は、それぞれ独立に、炭素数1〜12の直鎖状、分岐状又は環状のアルキル基またはアリールアルキル基を表し、
R5およびR6は、それぞれ独立に、水素原子、炭素数1〜6の直鎖状、分岐状又は環状のアルキル基を表し、またはR5およびR6は結合して環状アルキルエーテル基を形成してもよく、
R7およびR8は、それぞれ独立に、炭素数1〜10の直鎖状、分岐状又は環状のアルキル基、アルコキシ基、シクロヘキシル基、シクロペンチル基、アリール基(ハロゲン原子、アルキル基、若しくはアルコキシ基で置換されていてもよい)、またはR−C(=O)−基(ここでRは、炭素数1〜20の炭化水素基)を表す。但し、R7およびR8の双方がR−C(=O)−基である場合を除く。
In General Formulas (II) to (IV), R 1 is a hydrogen atom, a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group, or a halogen atom), or 1 to 20 carbon atoms. A linear, branched or cyclic alkyl group (which may be substituted with one or more hydroxyl groups, and may have one or more oxygen atoms in the middle of the alkyl chain), 5 to 5 carbon atoms An cycloalkyl group having 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, or a benzoyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group);
R 2 is a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms (one Which may be substituted with the above hydroxyl groups and may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, or Represents a benzoyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group);
R 3 and R 4 each independently represents a linear, branched or cyclic alkyl group or arylalkyl group having 1 to 12 carbon atoms,
R 5 and R 6 each independently represent a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, or R 5 and R 6 are bonded to form a cyclic alkyl ether group. You may,
R 7 and R 8 are each independently a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an alkoxy group, a cyclohexyl group, a cyclopentyl group, an aryl group (halogen atom, alkyl group, or alkoxy group). Or an R—C (═O) — group (where R is a hydrocarbon group having 1 to 20 carbon atoms). However, the case where both R 7 and R 8 are R—C (═O) — groups is excluded.
また、本発明の樹脂組成物は、更に(D)熱硬化性成分を含み得る。
また、本発明の樹脂組成物は、更に(E)着色剤を含有してなるソルダーレジストであり得る。
Further, the resin composition of the present invention may further contain (D) a thermosetting component.
The resin composition of the present invention may be a solder resist further containing (E) a colorant.
本発明は、他の態様において、上記本発明の光硬化性樹脂組成物を、キャリアフィルムに塗布し乾燥して得られる光硬化性のドライフィルムである。 In another aspect, the present invention is a photocurable dry film obtained by applying the photocurable resin composition of the present invention to a carrier film and drying it.
また、本発明は、他の態様において、上記光硬化性樹脂組成物からなる樹脂層を用いて形成された硬化物パターンであって、パターン形成が活性エネルギー線照射により行われたものである硬化物パターである。ここで、活性エネルギー線照射によるパターン形成は、波長350nm〜410nmの活性エネルギー線を用いた直接描画によるものであり得る。 In another aspect, the present invention is a cured product pattern formed using a resin layer comprising the photocurable resin composition, wherein the pattern formation is performed by irradiation with active energy rays. It is a thing putter. Here, the pattern formation by active energy ray irradiation may be by direct drawing using active energy rays having a wavelength of 350 nm to 410 nm.
また、本発明は、他の態様において、上記硬化物パターンを銅層上に具備するプリント配線板である。 Moreover, this invention is a printed wiring board which comprises the said hardened | cured material pattern on a copper layer in another aspect.
なお、本明細書において(メタ)アクリル酸とは、アクリル酸及び/又はメタクリル酸を表す用語として用いられ、他の類似の表現についても同様である。 In this specification, (meth) acrylic acid is used as a term representing acrylic acid and / or methacrylic acid, and the same applies to other similar expressions.
以下、本発明の光硬化性樹脂組成物の各構成成分について詳しく説明する。
本発明の光硬化性樹脂組成物に含まれるカルボン酸含有感光性樹脂(A)は、一般式(I)で表される構造を含み、さらに分子中にカルボン酸を含有している。
The carboxylic acid-containing photosensitive resin (A) contained in the photocurable resin composition of the present invention includes a structure represented by the general formula (I), and further contains a carboxylic acid in the molecule.
式中、R1は水素原子もしくはメチル基、R2は炭素数2〜6の直鎖状、分岐状又は環状のアルキル基、R3は水素原子もしくは有機酸エステル残基を表す。
ここで、R3により表される有機酸エステル残基としては、酸無水物残基、又は(メタ)アクリル酸残基が挙げられ、酸無水物残基の具体例としては、後述する(b)不飽和基含有酸無水物および(d))多塩基酸無水物などが挙げられる。
In the formula, R 1 represents a hydrogen atom or a methyl group, R 2 represents a linear, branched or cyclic alkyl group having 2 to 6 carbon atoms, and R 3 represents a hydrogen atom or an organic acid ester residue.
Here, the organic acid ester residue represented by R 3 includes an acid anhydride residue or a (meth) acrylic acid residue, and specific examples of the acid anhydride residue will be described later (b And unsaturated group-containing acid anhydrides and (d) polybasic acid anhydrides.
本発明のカルボン酸含有感光性樹脂(A)は、(a)1分子中に少なくとも2個の水酸基と1個のカルボキシル基を有する化合物、(b)不飽和基含有酸無水物、(c)1分子中に少なくとも2個以上のエポキシ基を有するエポキシ化合物、及び(d)多塩基酸無水物を用い、以下に示す手順(1)〜(3)に従い得ることができるが、これに限定されるものではない。 The carboxylic acid-containing photosensitive resin (A) of the present invention comprises (a) a compound having at least two hydroxyl groups and one carboxyl group in one molecule, (b) an unsaturated group-containing acid anhydride, (c) Although it can be obtained according to the following procedures (1) to (3) using an epoxy compound having at least two epoxy groups in one molecule and (d) a polybasic acid anhydride, it is not limited thereto. It is not something.
すなわち、
(1) 1分子中に少なくとも2個の水酸基と1個のカルボキシル基を有する化合物(a)に対して不飽和基含有酸無水物(b)を反応させ、一分子中に二つの(メタ)アクリル基と一つのカルボキシル基を有する化合物を合成する。得られる化合物に対し、1分子中に少なくとも2個以上のエポキシ基を有するエポキシ化合物(c)を反応させた後、更に多塩基酸無水物(d)を反応させることにより得られる。
That is,
(1) An unsaturated group-containing acid anhydride (b) is reacted with a compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule, and two (meth) in one molecule. A compound having an acrylic group and one carboxyl group is synthesized. It can be obtained by reacting the resulting compound with an epoxy compound (c) having at least two epoxy groups in one molecule and further reacting with a polybasic acid anhydride (d).
(1)の系における特徴としては、感光性基の濃度アップにより高感度化に有効であることが挙げられる。また詳細は明らかではないが、現像性の向上も確認された。これは樹脂中のアクリル基濃度の向上に伴い、カルボキシル基を含有していない他の成分との親和性が高くなることによりエマルジョン効果が高くなったためと考えられる。更には架橋密度の上昇に伴う耐アルカリ性、疎水性向上に伴うPCTおよびPCBT耐性の向上も確認された。 A feature of the system (1) is that it is effective for increasing the sensitivity by increasing the concentration of the photosensitive group. Although details are not clear, improvement in developability was also confirmed. This is presumably because the emulsion effect was enhanced by increasing the affinity with other components not containing a carboxyl group as the acrylic group concentration in the resin increased. Furthermore, it was confirmed that the alkali resistance accompanying the increase in the crosslinking density and the PCT and PCBT resistances accompanying the improvement in hydrophobicity were improved.
(2)1分子中に少なくとも2個の水酸基と1個のカルボキシル基を有する化合物(a)に対して不飽和基含有酸無水物(b)を反応させ、一分子中に二つの(メタ)アクリル基と一つのカルボキシル基を有する化合物を合成する。得られる化合物に対し、1分子中に少なくとも2個以上のエポキシ基を有するエポキシ化合物(c)を反応させる。得られる化合物に対し、更に1分子中に少なくとも2個の水酸基と1個のカルボキシル基を有する化合物(a)を反応させた後、更に多塩基酸無水物を反応させることにより得られる。 (2) An unsaturated group-containing acid anhydride (b) is reacted with a compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule, and two (meth) in one molecule. A compound having an acrylic group and one carboxyl group is synthesized. The resulting compound is reacted with an epoxy compound (c) having at least two epoxy groups in one molecule. The compound obtained can be obtained by further reacting a compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule, and further reacting with a polybasic acid anhydride.
(2)の系における特徴としては、(1)同様、感光性基の濃度アップにより高感度化に有効であることが挙げられる。また更なる(2)の系の特徴としては、感光性ユニット(アクリル基)と現像性ユニット(カルボキシル基)が完全に別々であることが挙げられる。この効果により(1)と同等の感度を有したまま(1)より最大現像ライフが延びる結果が確認された。また(1)同様、現像性の向上、PCTおよびPCBT耐性の向上も確認された。 The feature of the system (2) is that, as in (1), it is effective in increasing the sensitivity by increasing the concentration of the photosensitive group. Further, as a further feature of the system (2), the photosensitive unit (acrylic group) and the developing unit (carboxyl group) are completely separate. With this effect, it was confirmed that the maximum development life was extended from (1) while maintaining the same sensitivity as (1). Moreover, the improvement of developability and the improvement of PCT and PCBT tolerance were also confirmed similarly to (1).
(3)1分子中に少なくとも2個以上のエポキシ基を有するエポキシ化合物(c)と1分子中に少なくとも2個の水酸基と1個のカルボキシル基を有する化合物(a)とを反応させる。得られる化合物に対して不飽和基含有酸無水物(b)を反応させた後、更に多塩基酸無水物(d)を反応させることにより得られる。 (3) The epoxy compound (c) having at least two epoxy groups in one molecule is reacted with the compound (a) having at least two hydroxyl groups and one carboxyl group in one molecule. It is obtained by reacting the unsaturated group-containing acid anhydride (b) with the resulting compound and then further reacting with a polybasic acid anhydride (d).
(3)の系における特徴としては、(1)、(2)同様、感光性基の濃度アップにより高感度化に有効であることが挙げられる。また(3)についても、(1)及び(2)と同様、現像性の向上も確認された。但し、(2)とは異なり、感光性ユニット(アクリル基)と現像性ユニット(カルボキシル基)がランダムになる結果、樹脂構造を完全に制御することが困難となる傾向が見られる。 As a feature of the system (3), as in (1) and (2), it is effective to increase the sensitivity by increasing the concentration of the photosensitive group. As for (3), as in (1) and (2), improvement in developability was also confirmed. However, unlike (2), the photosensitive unit (acrylic group) and the developing unit (carboxyl group) become random, and as a result, it tends to be difficult to completely control the resin structure.
これら(1)〜(3)の系はそれぞれ優れた特徴を有しているが、感光性、現像性のバランス、更には得られた硬化物の特性から(2)もしくは(1)が特に好ましいと考えられる。 Each of these systems (1) to (3) has excellent characteristics, but (2) or (1) is particularly preferable from the viewpoint of the balance between photosensitivity and developability and the properties of the obtained cured product. it is conceivable that.
上記(1)から(3)に記載した(A)カルボン酸含有感光性樹脂の合成に用いられる、(a)1分子中に少なくとも2個の水酸基と1個のカルボキシル基を有する化合物の具体例としては、例えば、ジメチロールプロピオン酸、ジメチロール酢酸、ジメチロール酪酸、ジメチロール吉草酸、ジメチロールカプロン酸等のポリヒドロキシ含有モノカルボン酸類を挙げることができる。特に好ましいものとしては、例えばジメチロールプロピオン酸等を挙げることができる。 Specific examples of (a) compounds having at least two hydroxyl groups and one carboxyl group in one molecule, which are used for the synthesis of (A) a carboxylic acid-containing photosensitive resin described in (1) to (3) above. Examples thereof include polyhydroxy-containing monocarboxylic acids such as dimethylolpropionic acid, dimethylolacetic acid, dimethylolbutyric acid, dimethylolvaleric acid, and dimethylolcaproic acid. Particularly preferable examples include dimethylolpropionic acid.
(b)不飽和基含有酸無水物としては、アクリル酸無水物、メタクリル酸無水物が挙げられ、これらを単独で又は2種以上を組み合わせて使用することができる。 (B) As an unsaturated group containing acid anhydride, an acrylic acid anhydride and a methacrylic acid anhydride are mentioned, These can be used individually or in combination of 2 or more types.
(c)1分子中に少なくとも2個のエポキシ基を有するエポキシ化合物としては、公知慣用の各種エポキシ樹脂、例えばビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、臭素化ビスフェノールA型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、ビフェノール型エポキシ樹脂、ビキシレノール型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、臭素化フェノールノボラック型エポキシ樹脂、ビスフェノールAのノボラック型エポキシ樹脂などのグリシジルエーテル化合物;テレフタル酸ジグリシジルエステル、ヘキサヒドロフタル酸ジグリシジルエステル、ダイマー酸ジグリシジルエステルなどのグリシジルエステル化合物;トリグリシジルイソシアヌレート、N,N,N’,N’−テトラグリシジルメタキシレンジアミン、N,N,N’,N’−テトラグリシジルビスアミノメチルシクロヘキサン、N,N−ジグリシジルアニリンなどのグリシジルアミン化合物が用いられる。中でも、フェノールノボラック型エポキシ樹脂、及びクレゾールノボラック型エポキシ樹脂が、高感度で耐熱性に優れる硬化塗膜を提供できることから好ましい。さらに、軟化点が60℃以上のクレゾールノボラック型エポキシ樹脂が、指触乾燥性にも優れることからより好ましい。これらの多官能エポキシ化合物は、単独で又は2種類以上を併用して用いることもできる。 (C) Examples of the epoxy compound having at least two epoxy groups in one molecule include various known and commonly used epoxy resins such as bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, and brominated bisphenol A. Type epoxy resin, hydrogenated bisphenol A type epoxy resin, biphenol type epoxy resin, bixylenol type epoxy resin, phenol novolac type epoxy resin, cresol novolak type epoxy resin, brominated phenol novolak type epoxy resin, bisphenol A novolak type epoxy resin Glycidyl ether compounds such as terephthalic acid diglycidyl ester, hexahydrophthalic acid diglycidyl ester, and dimer acid diglycidyl ester; Glycidylamine compounds such as ricidyl isocyanurate, N, N, N ′, N′-tetraglycidylmetaxylenediamine, N, N, N ′, N′-tetraglycidylbisaminomethylcyclohexane, N, N-diglycidylaniline Is used. Among these, a phenol novolac type epoxy resin and a cresol novolac type epoxy resin are preferable because they can provide a cured coating film having high sensitivity and excellent heat resistance. Furthermore, a cresol novolac type epoxy resin having a softening point of 60 ° C. or higher is more preferable because it is excellent in dryness to touch. These polyfunctional epoxy compounds can be used alone or in combination of two or more.
(d)多塩基酸無水物としては、無水コハク酸、無水マレイン酸、無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、無水イタコン酸、メチルエンドメチレンテトラヒドロ無水フタル酸、無水トリメリット酸、無水ピロメリット酸等が挙げられ、これらを単独で又は2種以上を組み合わせて使用することができる。 (D) Polybasic acid anhydrides include succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylhexahydrophthalic anhydride, itaconic anhydride, methylendomethylenetetrahydrophthalic anhydride An acid, trimellitic anhydride, pyromellitic anhydride, etc. are mentioned, These can be used individually or in combination of 2 or more types.
また、(1)〜(3)で得られたカルボン酸含有感光性樹脂(A)に対して、更に(e)1分子中に環状エーテル基とエチレン性不飽和基を併せ持つ化合物を反応させて得られる樹脂を用いても良い。 In addition, the carboxylic acid-containing photosensitive resin (A) obtained in (1) to (3) is further reacted with (e) a compound having both a cyclic ether group and an ethylenically unsaturated group in one molecule. The obtained resin may be used.
前記(e)1分子中に環状エーテル基とエチレン性不飽和基を併せ持つ化合物としては、2−ヒドロキシエチル(メタ)アクリレートグリシジルエーテル、2−ヒドロキシプロピル(メタ)アクリレートグリシジルエーテル、3ーヒドロキシプロピル(メタ)アクリレートグリシジルエーテル、2ーヒドロキシブチル(メタ)アクリレートグリシジルエーテル、4−ヒドロキシブチル(メタ)アクリレートグリシジルエーテル、2ーヒドロキシペンチル(メタ)アクリレートグリシジルエーテル、6ーヒドロキシヘキシル(メタ)アクリレートグリシジルエーテルもしくはグリシジル(メタ)アクリレートなどのエポキシ基含有エチレン性不飽和モノマー類が挙げられ、これらを単独で又は2種以上を組み合わせて使用することができる。このようなエポキシ基含有エチレン性不飽和モノマー類の中で、特に4−ヒドロキシブチル(メタ)アクリレートグリシジルエーテル、グリシジル(メタ)アクリレートが、適度な生産性、光硬化性を持つため好ましい。 Examples of the compound (e) having both a cyclic ether group and an ethylenically unsaturated group in one molecule include 2-hydroxyethyl (meth) acrylate glycidyl ether, 2-hydroxypropyl (meth) acrylate glycidyl ether, 3-hydroxypropyl ( (Meth) acrylate glycidyl ether, 2-hydroxybutyl (meth) acrylate glycidyl ether, 4-hydroxybutyl (meth) acrylate glycidyl ether, 2-hydroxypentyl (meth) acrylate glycidyl ether, 6-hydroxyhexyl (meth) acrylate glycidyl ether or Examples include epoxy group-containing ethylenically unsaturated monomers such as glycidyl (meth) acrylate, and these can be used alone or in combination of two or more. Among such epoxy group-containing ethylenically unsaturated monomers, 4-hydroxybutyl (meth) acrylate glycidyl ether and glycidyl (meth) acrylate are particularly preferable because they have moderate productivity and photocurability.
このような(e)1分子中に環状エーテル基とエチレン性不飽和基を併せ持つ化合物の付加量は、酸無水物残基に対して好ましくは5%当量から40%当量であり、更に好ましくは10%当量から30%当量である。付加量が5%当量以上であることは、感度上昇や無電金めっき耐性の向上の観点から好ましく、一方40%当量超えると最大現像ライフが短くなったり、指触乾燥性が悪くなる場合があり好ましくない。これらの化合物(e)による変性は架橋密度向上による更なる高感度化、耐アルカリ性、PCT並びにPCBT耐性に相乗の効果が確認された。 The addition amount of the compound (e) having both a cyclic ether group and an ethylenically unsaturated group in one molecule is preferably 5% equivalent to 40% equivalent, more preferably equivalent to the acid anhydride residue. 10% equivalent to 30% equivalent. An addition amount of 5% equivalent or more is preferable from the viewpoint of increasing sensitivity and improving electroless gold plating resistance. On the other hand, if it exceeds 40% equivalent, the maximum development life may be shortened or the dryness to touch may be deteriorated. It is not preferable. Modification by these compounds (e) was confirmed to have a synergistic effect on further sensitivity enhancement by improving the crosslinking density, alkali resistance, PCT and PCBT resistance.
上記カルボキシル基含有樹脂(A)の酸価は、好ましくは40〜200mgKOH/gの範囲であり、より好ましくは80〜120mgKOH/gの範囲である。カルボキシル基含有樹脂の酸価が40mgKOH/g未満であるとアルカリ現像が困難となり、一方、200mgKOH/gを超えると現像液による露光部の溶解が進むために、必要以上にラインが痩せたり、場合によっては、露光部と未露光部の区別なく現像液で溶解剥離してしまい、正常なレジストパターンの描画が困難となるので好ましくない。 The acid value of the carboxyl group-containing resin (A) is preferably in the range of 40 to 200 mgKOH / g, more preferably in the range of 80 to 120 mgKOH / g. When the acid value of the carboxyl group-containing resin is less than 40 mgKOH / g, alkali development becomes difficult. On the other hand, when the acid value exceeds 200 mgKOH / g, dissolution of the exposed area by the developer proceeds and the line becomes thinner than necessary. Depending on the case, the exposed portion and the unexposed portion are not distinguished from each other by dissolution and peeling with a developer, which makes it difficult to draw a normal resist pattern.
また、上記カルボキシル基含有樹脂(A)の重量平均分子量は、樹脂骨格により異なるが、一般的に2000〜50000、さらには5000〜20000の範囲にあるものが好ましい。重量平均分子量が2000未満であると、タックフリー性能が劣ることがあり、露光後の塗膜の耐湿性が悪く現像時に膜減りが生じ、解像度が大きく劣ることがある。一方、重量平均分子量が50000を超えると、現像性が著しく悪くなることがあり、貯蔵安定性が劣ることがある。 Moreover, although the weight average molecular weight of the said carboxyl group containing resin (A) changes with resin frame | skeleton, generally what is in the range of 2000-50000, Furthermore, 5000-20000 is preferable. If the weight average molecular weight is less than 2,000, tack-free performance may be inferior, the moisture resistance of the coated film after exposure may be poor, film thickness may be reduced during development, and resolution may be greatly inferior. On the other hand, when the weight average molecular weight exceeds 50,000, the developability may be remarkably deteriorated, and the storage stability may be inferior.
このようなカルボキシル基含有樹脂(A)の配合率は、樹脂組成物の全質量に対し好ましくは20〜60質量%であり、より好ましくは30〜50質量%である。上記範囲より少ない場合、塗膜強度が低下することがあるので好ましくない。一方、上記範囲より多い場合、粘性が高くなったり、レジスト塗布性などが低下することがあるので好ましくない。 The blending ratio of such a carboxyl group-containing resin (A) is preferably 20 to 60% by mass and more preferably 30 to 50% by mass with respect to the total mass of the resin composition. When the amount is less than the above range, the coating film strength may decrease, which is not preferable. On the other hand, when the amount is larger than the above range, the viscosity may increase or the resist coating property may decrease, which is not preferable.
本発明においては、上記カルボン酸含有感光性樹脂(A)に加え、更に公知慣用のカルボン酸樹脂、特に好ましくは感光性カルボン酸樹脂を加えることができる。 In the present invention, in addition to the carboxylic acid-containing photosensitive resin (A), a known and commonly used carboxylic acid resin, particularly preferably a photosensitive carboxylic acid resin, can be added.
次に、光重合開始剤(B)について説明する。
光重合開始剤(B)としては、下記一般式(II)で表される構造を含むオキシムエステル系光重合開始剤(B−1)、下記一般式(III)で表される構造を含むα−アミノアセトフェノン系光重合開始剤(B−2)、および下記式(IV)で表される構造を含むアシルホスフィンオキサイド系光重合開始剤(B−3)からなる群から選択される1種、又は2種以上の光重合開始剤を使用することが好ましい。
As the photopolymerization initiator (B), an oxime ester photopolymerization initiator (B-1) containing a structure represented by the following general formula (II), an α containing a structure represented by the following general formula (III) -1 type selected from the group which consists of an amino acetophenone type photoinitiator (B-2) and the acyl phosphine oxide type photoinitiator (B-3) containing the structure represented by following formula (IV), Or it is preferable to use 2 or more types of photoinitiators.
一般式(II)〜(IV)中、
R1は、水素原子、フェニル基(炭素数1〜6のアルキル基、フェニル基、若しくはハロゲン原子で置換されていてもよい)、炭素数1〜20の直鎖状、分岐状又は環状のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基またはベンゾイル基(炭素数が1〜6のアルキル基若しくはフェニル基で置換されていてもよい)を表し、
R2は、フェニル基(炭素数1〜6のアルキル基、フェニル基若しくはハロゲン原子で置換されていてもよい)、炭素数1〜20の直鎖状、分岐状又は環状のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基またはベンゾイル基(炭素数が1〜6のアルキル基若しくはフェニル基で置換されていてもよい)を表し、
R3およびR4は、それぞれ独立に、炭素数1〜12の直鎖状、分岐状又は環状のアルキル基またはアリールアルキル基を表し、
R5およびR6は、それぞれ独立に、水素原子、炭素数1〜6の直鎖状、分岐状又は環状のアルキル基、またはR5およびR6は結合して環状アルキルエーテル基を形成してもよく、
R7およびR8は、それぞれ独立に、炭素数1〜10の直鎖状、分岐状又は環状のアルキル基、アルコキシ基、シクロヘキシル基、シクロペンチル基、アリール基(ハロゲン原子、アルキル基、若しくはアルコキシ基で置換されていてもよい)、またはR−C(=O)−基(ここでRは、炭素数1〜20の炭化水素基)を表す。但し、R7およびR8の双方がR−C(=O)−基である場合を除く。
In general formulas (II) to (IV),
R 1 is a hydrogen atom, a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group, or a halogen atom), a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms. A group (which may be substituted with one or more hydroxyl groups and may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, or 2 to 20 carbon atoms Alkanoyl group or benzoyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group),
R 2 is a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms (one Which may be substituted with the above hydroxyl groups and may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, or Represents a benzoyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group);
R 3 and R 4 each independently represents a linear, branched or cyclic alkyl group or arylalkyl group having 1 to 12 carbon atoms,
R 5 and R 6 are each independently a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, or R 5 and R 6 are bonded to form a cyclic alkyl ether group. Well,
R 7 and R 8 are each independently a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an alkoxy group, a cyclohexyl group, a cyclopentyl group, an aryl group (halogen atom, alkyl group, or alkoxy group). Or an R—C (═O) — group (where R is a hydrocarbon group having 1 to 20 carbon atoms). However, the case where both R 7 and R 8 are R—C (═O) — groups is excluded.
前記一般式(II)で表される基を有するオキシムエステル系光重合開始剤(B−1)としては、好ましくは、下記式(V)で表される2−(アセチルオキシイミノメチル)チオキサンテン−9−オン:
下記一般式(VI)で表される化合物:
(式中、
R9は、水素原子、ハロゲン原子、炭素数1〜12の直鎖状、分岐状又は環状のアルキル基、シクロペンチル基、シクロヘキシル基、フェニル基、ベンジル基、ベンゾイル基、炭素数2〜12のアルカノイル基、炭素数2〜12のアルコキシカルボニル基(アルコキシル基を構成するアルキル基の炭素数が2以上の場合、アルキル基は1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、またはフェノキシカルボニル基を表し、
R10、R12は、それぞれ独立に、フェニル基(炭素数1〜6のアルキル基、フェニル基若しくはハロゲン原子で置換されていてもよい)、炭素数1〜20の直鎖状、分岐状又は環状のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基またはベンゾイル基(炭素数が1〜6のアルキル基若しくはフェニル基で置換されていてもよい)を表し、
R11は、水素原子、フェニル基(炭素数1〜6のアルキル基、フェニル基若しくはハロゲン原子で置換されていてもよい)、炭素数1〜20の直鎖状、分岐状又は環状のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基またはベンゾイル基(炭素数が1〜6のアルキル基若しくはフェニル基で置換されていてもよい)を表す。);及び
下記一般式(VII)で表される化合物:
R 9 is a hydrogen atom, a halogen atom, a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms, a cyclopentyl group, a cyclohexyl group, a phenyl group, a benzyl group, a benzoyl group, or an alkanoyl group having 2 to 12 carbon atoms. Group, an alkoxycarbonyl group having 2 to 12 carbon atoms (when the alkyl group constituting the alkoxyl group has 2 or more carbon atoms, the alkyl group may be substituted with one or more hydroxyl groups, and 1 in the middle of the alkyl chain) Which may have more than one oxygen atom), or a phenoxycarbonyl group,
R 10 and R 12 are each independently a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), a linear or branched chain having 1 to 20 carbon atoms, or A cyclic alkyl group (which may be substituted with one or more hydroxyl groups and may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, a carbon number Represents an alkanoyl group having 2 to 20 carbon atoms or a benzoyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group);
R 11 is a hydrogen atom, a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms. (It may be substituted with one or more hydroxyl groups, and may have one or more oxygen atoms in the middle of the alkyl chain), a C5-C8 cycloalkyl group, a C2-C20 An alkanoyl group or a benzoyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group) is represented. And a compound represented by the following general formula (VII):
(式中、
R13、R14およびR19は、それぞれ独立に、炭素数1〜12の直鎖状、分岐状又は環状のアルキル基を表し、
R15、R16、R17およびR18は、それぞれ独立に、水素原子又は炭素数1〜6の直鎖状、分岐状又は環状のアルキル基を表し、
Mは、O、S又はNHを表し、
m及びnは、それぞれ独立に、0〜5の整数を表す。)
が挙げられる。
(Where
R 13 , R 14 and R 19 each independently represent a linear, branched or cyclic alkyl group having 1 to 12 carbon atoms,
R 15 , R 16 , R 17 and R 18 each independently represents a hydrogen atom or a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms,
M represents O, S or NH;
m and n each independently represents an integer of 0 to 5. )
Is mentioned.
中でも、式(V)で表される2−(アセチルオキシイミノメチル)チオキサンテン−9−オン、および式(VI)で表される化合物がより好ましい。市販品としては、チバ・スペシャルティ・ケミカルズ社製のCGI−325、イルガキュアー OXE01、イルガキュアー OXE02等が挙げられる。これらのオキシムエステル系光重合開始剤は、単独で又は2種以上を組み合わせて用いることができる。 Among these, 2- (acetyloxyiminomethyl) thioxanthen-9-one represented by formula (V) and a compound represented by formula (VI) are more preferable. Examples of commercially available products include CGI-325, Irgacure OXE01, and Irgacure OXE02 manufactured by Ciba Specialty Chemicals. These oxime ester photopolymerization initiators can be used alone or in combination of two or more.
一般式(III)で表される構造を含むα−アミノアセトフェノン系光重合開始剤(B−2)としては、2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノプロパノン−1、2−ベンジル−2−ジメチルアミノ−1−(4−モルホリノフェニル)−ブタン−1−オン、2−(ジメチルアミノ)−2−[(4−メチルフェニル)メチル]−1−[4−(4−モルホリニル)フェニル]−1−ブタノン、N,N−ジメチルアミノアセトフェノンなどが挙げられる。市販品としては、チバ・スペシャルティ・ケミカルズ社製のイルガキュアー907、イルガキュアー369、イルガキュアー379などが挙げられる。 As the α-aminoacetophenone photopolymerization initiator (B-2) having a structure represented by the general formula (III), 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone- 1,2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone, N, N-dimethylaminoacetophenone and the like. Examples of commercially available products include Irgacure 907, Irgacure 369, and Irgacure 379 manufactured by Ciba Specialty Chemicals.
一般式(IV)で表される構造を含むアシルホスフィンオキサイド系光重合開始剤(B−3)としては、2,4,6−トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2,4,6−トリメチルベンゾイル)−フェニルホスフィンオキサイド、ビス(2,6−ジメトキシベンゾイル)−2,4,4−トリメチル−ペンチルホスフィンオキサイドなどが挙げられる。市販品としては、BASF社製のルシリンTPO、チバ・スペシャルティ・ケミカルズ社製のイルガキュアー819などが挙げられる。 Examples of the acylphosphine oxide photopolymerization initiator (B-3) having a structure represented by the general formula (IV) include 2,4,6-trimethylbenzoyldiphenylphosphine oxide and bis (2,4,6-trimethylbenzoyl). ) -Phenylphosphine oxide, bis (2,6-dimethoxybenzoyl) -2,4,4-trimethyl-pentylphosphine oxide, and the like. Examples of commercially available products include Lucilin TPO manufactured by BASF and Irgacure 819 manufactured by Ciba Specialty Chemicals.
このような光重合開始剤(B)の配合率は、前記カルボン酸含有感光性樹脂(A)100質量部に対して、好ましくは0.01〜30質量部、より好ましくは0.5〜15質量部の範囲から選ぶことができる。0.01質量部未満であると、銅上での光硬化性が不足し、塗膜が剥離したり、耐薬品性等の塗膜特性が低下するので好ましくない。一方、30質量部を超えると、光重合開始剤(B)のソルダーレジスト塗膜表面での光吸収が激しくなり、深部硬化性が低下する傾向があるために好ましくない。 The blending ratio of such a photopolymerization initiator (B) is preferably 0.01 to 30 parts by mass, more preferably 0.5 to 15 parts with respect to 100 parts by mass of the carboxylic acid-containing photosensitive resin (A). It can be selected from the range of parts by mass. If it is less than 0.01 parts by mass, the photocurability on copper is insufficient, and the coating film is peeled off or the coating film properties such as chemical resistance are deteriorated. On the other hand, if it exceeds 30 parts by mass, light absorption on the surface of the solder resist coating film of the photopolymerization initiator (B) becomes violent and the deep curability tends to decrease, which is not preferable.
なお、前記式(II)で表される構造を含むオキシムエステル系光重合開始剤の場合、その配合量は、前記カルボン酸含有樹脂(A)100質量部に対して、好ましくは0.01〜20質量部、より好ましくは0.01〜5質量部の範囲から選ぶことが望ましい。 In the case of the oxime ester photopolymerization initiator including the structure represented by the formula (II), the blending amount is preferably 0.01 to 100 parts by mass of the carboxylic acid-containing resin (A). It is desirable to select from 20 parts by mass, more preferably from 0.01 to 5 parts by mass.
本発明の組成物には、上述した化合物以外の光重合開始剤や、光重合開始助剤及び増感剤を使用することができ、例えば、ベンゾイン化合物、アセトフェノン化合物、アントラキノン化合物、チオキサントン化合物、ケタール化合物、ベンゾフェノン化合物、キサントン化合物、および3級アミン化合物等を挙げることができる。 In the composition of the present invention, photopolymerization initiators other than the above-mentioned compounds, photopolymerization initiation assistants, and sensitizers can be used, for example, benzoin compounds, acetophenone compounds, anthraquinone compounds, thioxanthone compounds, ketals. Examples thereof include compounds, benzophenone compounds, xanthone compounds, and tertiary amine compounds.
ベンゾイン化合物の具体例を挙げると、例えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテルである。
アセトフェノン化合物の具体例を挙げると、例えば、アセトフェノン、2,2−ジメトキシ−2−フェニルアセトフェノン、2,2−ジエトキシ−2−フェニルアセトフェノン、1,1−ジクロロアセトフェノンである。
Specific examples of the benzoin compound include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether.
Specific examples of the acetophenone compound include acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, and 1,1-dichloroacetophenone.
アントラキノン化合物の具体例を挙げると、例えば、2−メチルアントラキノン、2−エチルアントラキノン、2−t−ブチルアントラキノン、1−クロロアントラキノンである。
チオキサントン化合物の具体例を挙げると、例えば、2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジイソプロピルチオキサントンである。
Specific examples of the anthraquinone compound include 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, and 1-chloroanthraquinone.
Specific examples of the thioxanthone compound include 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone.
ケタール化合物の具体例を挙げると、例えば、アセトフェノンジメチルケタール、ベンジルジメチルケタールである。
ベンゾフェノン化合物の具体例を挙げると、例えば、ベンゾフェノン、4−ベンゾイルジフェニルスルフィド、4−ベンゾイル−4’−メチルジフェニルスルフィド、4−ベンゾイル−4’−エチルジフェニルスルフィド、4−ベンゾイル−4’−プロピルジフェニルスルフィドである。
Specific examples of the ketal compound include acetophenone dimethyl ketal and benzyl dimethyl ketal.
Specific examples of the benzophenone compound include, for example, benzophenone, 4-benzoyldiphenyl sulfide, 4-benzoyl-4′-methyldiphenyl sulfide, 4-benzoyl-4′-ethyldiphenyl sulfide, 4-benzoyl-4′-propyldiphenyl. Sulfide.
3級アミン化合物の具体例を挙げると、例えば、エタノールアミン化合物、ジアルキルアミノベンゼン構造を有する化合物、例えば、4,4’−ジメチルアミノベンゾフェノン(日本曹達社製ニッソキュアーMABP)、4,4’−ジエチルアミノベンゾフェノン(保土ヶ谷化学社製EAB)などのジアルキルアミノベンゾフェノン、7−(ジエチルアミノ)−4−メチル−2H−1−ベンゾピラン−2−オン(7−(ジエチルアミノ)−4−メチルクマリン)等のジアルキルアミノ基含有クマリン化合物、4−ジメチルアミノ安息香酸エチル(日本化薬社製カヤキュアーEPA)、2−ジメチルアミノ安息香酸エチル(インターナショナルバイオ−シンセエティックス社製Quantacure DMB)、4−ジメチルアミノ安息香酸(n−ブトキシ)エチル(インターナショナルバイオ−シンセエティックス社製Quantacure BEA)、p−ジメチルアミノ安息香酸イソアミルエチルエステル(日本化薬社製カヤキュアーDMBI)、4−ジメチルアミノ安息香酸2−エチルヘキシル(Van Dyk社製Esolol 507)、4,4’−ジエチルアミノベンゾフェノン(保土ヶ谷化学社製EAB)である。 Specific examples of the tertiary amine compound include, for example, an ethanolamine compound, a compound having a dialkylaminobenzene structure, such as 4,4′-dimethylaminobenzophenone (Nisso Cure MABP manufactured by Nippon Soda Co., Ltd.), 4,4′-diethylamino. Dialkylamino benzophenone such as benzophenone (EAB manufactured by Hodogaya Chemical Co.), and dialkylamino groups such as 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (diethylamino) -4-methylcoumarin) Containing coumarin compound, ethyl 4-dimethylaminobenzoate (Kayacure EPA manufactured by Nippon Kayaku Co., Ltd.), ethyl 2-dimethylaminobenzoate (Quantacure DMB manufactured by International Bio-Synthetics), 4-dimethylaminobenzoic acid ( -Butoxy) ethyl (Quantacure BEA, manufactured by International Bio-Synthetics), p-dimethylaminobenzoic acid isoamyl ethyl ester (Kayacure DMBI, manufactured by Nippon Kayaku Co., Ltd.), 2-ethylhexyl 4-dimethylaminobenzoate (manufactured by Van Dyk) Esolol 507), 4,4′-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co., Ltd.).
上記した中でも、チオキサントン化合物および3級アミン化合物が好ましい。チオキサントン化合物が含まれることは、深部硬化性の面から好ましく、中でも、2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジイソプロピルチオキサントン等のチオキサントン化合物が好ましい。 Of the above, thioxanthone compounds and tertiary amine compounds are preferred. The inclusion of a thioxanthone compound is preferable from the viewpoint of deep curable properties, and among these, thioxanthone compounds such as 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone are preferable.
このようなチオキサントン化合物の配合率としては、上記カルボン酸含有感光性樹脂(A)100質量部に対して、好ましくは20質量部以下、より好ましくは10質量部以下の割合である。チオキサントン化合物の配合率が多すぎると、厚膜硬化性が低下して、製品のコストアップに繋がるので、好ましくない。 The mixing ratio of such a thioxanthone compound is preferably 20 parts by mass or less, more preferably 10 parts by mass or less with respect to 100 parts by mass of the carboxylic acid-containing photosensitive resin (A). If the mixing ratio of the thioxanthone compound is too large, the thick film curability is lowered and the cost of the product is increased, which is not preferable.
3級アミン化合物としては、ジアルキルアミノベンゼン構造を有する化合物が好ましく、中でも、ジアルキルアミノベンゾフェノン化合物、最大吸収波長が350〜410nmにあるジアルキルアミノ基含有クマリン化合物が特に好ましい。ジアルキルアミノベンゾフェノン化合物としては、4,4’−ジエチルアミノベンゾフェノンが、毒性も低く好ましい。最大吸収波長が350〜410nmにあるジアルキルアミノ基含有クマリン化合物は、最大吸収波長が紫外線領域にあるため、着色が少なく、無色透明な感光性組成物はもとより、着色顔料を用い、着色顔料自体の色を反映した着色ソルダーレジスト膜を提供することが可能となる。特に、7−(ジエチルアミノ)−4−メチル−2H−1−ベンゾピラン−2−オンが波長400〜410nmのレーザー光に対して優れた増感効果を示すことから好ましい。 As the tertiary amine compound, a compound having a dialkylaminobenzene structure is preferable, and among them, a dialkylaminobenzophenone compound and a dialkylamino group-containing coumarin compound having a maximum absorption wavelength of 350 to 410 nm are particularly preferable. As the dialkylaminobenzophenone compound, 4,4'-diethylaminobenzophenone is preferable because of its low toxicity. The dialkylamino group-containing coumarin compound having a maximum absorption wavelength of 350 to 410 nm has a maximum absorption wavelength in the ultraviolet region, so that it is less colored and uses a colored pigment as well as a colorless and transparent photosensitive composition. A colored solder resist film reflecting the color can be provided. In particular, 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferable because it exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.
このような3級アミン化合物の配合率としては、上記カルボン酸含有樹脂(A)100質量部に対して、好ましくは0.1〜20質量部、より好ましくは0.1〜10質量部の割合である。3級アミン化合物の配合率が0.1質量部未満であると、十分な増感効果を得ることができない傾向にある。20質量部を超えると、3級アミン化合物による乾燥ソルダーレジスト塗膜の表面での光吸収が激しくなり、深部硬化性が低下する傾向がある。 As a compounding ratio of such a tertiary amine compound, the ratio of 0.1 to 20 parts by mass, more preferably 0.1 to 10 parts by mass, with respect to 100 parts by mass of the carboxylic acid-containing resin (A). It is. When the mixing ratio of the tertiary amine compound is less than 0.1 parts by mass, a sufficient sensitizing effect tends not to be obtained. When the amount exceeds 20 parts by mass, light absorption on the surface of the dried solder resist coating film by the tertiary amine compound becomes intense, and the deep curability tends to decrease.
これらの光重合開始剤、光重合開始助剤および増感剤は、単独で又は2種類以上の混合物として使用することができる。 These photopolymerization initiators, photopolymerization initiation assistants, and sensitizers can be used alone or as a mixture of two or more.
このような光重合開始剤(B)、光重合開始助剤、および増感剤の総量は、前記カルボン酸含有樹脂(A)100質量部に対して35質量部以下となる範囲であることが好ましい。35質量部を超えると、これらの光吸収により深部硬化性が低下する傾向にある。 The total amount of such photopolymerization initiator (B), photopolymerization initiation assistant, and sensitizer may be in a range of 35 parts by mass or less with respect to 100 parts by mass of the carboxylic acid-containing resin (A). preferable. When it exceeds 35 parts by mass, the deep curability tends to decrease due to light absorption.
次に、分子中に2個以上のエチレン性不飽和基を有する化合物(C)について説明する。 Next, the compound (C) having two or more ethylenically unsaturated groups in the molecule will be described.
本発明の光硬化性樹脂組成物に用いられる分子中に2個以上のエチレン性不飽和基を有する化合物(C)は、活性エネルギー線照射により、光硬化して、前記エチレン性不飽和基含有カルボン酸含有感光性樹脂(A)を、アルカリ水溶液に不溶化、又は不溶化を助けるものである。このような化合物としては、エチレングリコール、メトキシテトラエチレングリコール、ポリエチレングリコール、プロピレングリコールなどのグリコールのジアクリレート類;ヘキサンジオール、トリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリス−ヒドロキシエチルイソシアヌレートなどの多価アルコール又はこれらのエチレオキサイド付加物もしくはプロピレンオキサイド付加物などの多価アクリレート類;フェノキシアクリレート、ビスフェノールAジアクリレート、及びこれらのフェノール類のエチレンオキサイド付加物もしくはプロピレンオキサイド付加物などの多価アクリレート類;グリセリンジグリシジルエーテル、グリセリントリグリシジルエーテル、トリメチロールプロパントリグリシジルエーテル、トリグリシジルイソシアヌレートなどのグリシジルエーテルの多価アクリレート類;及びメラミンアクリレート、及び/又は上記アクリレートに対応する各メタクリレート類などが挙げられる。 The compound (C) having two or more ethylenically unsaturated groups in the molecule used in the photocurable resin composition of the present invention is photocured by irradiation with active energy rays and contains the ethylenically unsaturated groups. The carboxylic acid-containing photosensitive resin (A) is insolubilized or assists insolubilization in an alkaline aqueous solution. Examples of such compounds include glycol diacrylates such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, and propylene glycol; hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tris-hydroxyethyl isocyanurate, and the like. Polyhydric acrylates such as polyhydric alcohols or their ethylene oxide adducts or propylene oxide adducts; Phenoxy acrylate, bisphenol A diacrylate, and polyhydric acrylates such as ethylene oxide adducts or propylene oxide adducts of these phenols Glycerin diglycidyl ether, glycerin triglycidyl ether, trimethylolpropane triglycy Ethers, polyvalent acrylates of glycidyl ethers such as triglycidyl isocyanurate; and melamine acrylate, and / or the like each methacrylates corresponding to the acrylates.
さらに、クレゾールノボラック型エポキシ樹脂などの多官能エポキシ樹脂に、アクリル酸を反応させたエポキシアクリレート樹脂や、さらにそのエポキシアクリレート樹脂の水酸基に、ペンタエリスリトールトリアクリレートなどのヒドロキシアクリレートとイソホロンジイソシアネートなどのジイソシアネートのハーフウレタン化合物を反応させたエポキシウレタンアクリレート化合物などが挙げられる。このようなエポキシアクリレート系樹脂は、指触乾燥性を低下させることなく、光硬化性を向上させることができる。 Further, an epoxy acrylate resin obtained by reacting acrylic acid with a polyfunctional epoxy resin such as a cresol novolac type epoxy resin, and further a hydroxy acrylate such as pentaerythritol triacrylate and a diisocyanate such as isophorone diisocyanate on the hydroxyl group of the epoxy acrylate resin. Examples thereof include an epoxy urethane acrylate compound obtained by reacting a half urethane compound. Such an epoxy acrylate resin can improve photocurability without deteriorating the touch drying property.
このような分子中に2個以上のエチレン性不飽和基を有する化合物(C)の配合率は、前記カルボン酸含有感光性樹脂(A)100質量部に対して、好ましくは1〜100質量部、より好ましくは5〜70質量部の割合である。前記配合率が1質量部未満の場合、光硬化性が低下し、活性エネルギー線照射後のアルカリ現像によるパターン形成が困難となるので好ましくない。一方、100質量部を超える場合、アルカリ水溶液に対する溶解性が低下して塗膜が脆くなる傾向があるので好ましくない。 The compounding ratio of the compound (C) having two or more ethylenically unsaturated groups in the molecule is preferably 1 to 100 parts by mass with respect to 100 parts by mass of the carboxylic acid-containing photosensitive resin (A). The ratio is more preferably 5 to 70 parts by mass. When the blending ratio is less than 1 part by mass, the photocurability is lowered, and pattern formation by alkali development after irradiation with active energy rays becomes difficult, which is not preferable. On the other hand, when it exceeds 100 mass parts, since the solubility with respect to aqueous alkali solution falls and a coating film tends to become weak, it is unpreferable.
次に、熱硬化性成分(D)について説明する。
本発明の光硬化性樹脂組成物には、耐熱性を付与するために、熱硬化性成分(D)を加えることができる。特に好ましいのは分子中に2個以上の環状エーテル基及び/又は環状チオエーテル基(以下、環状(チオ)エーテル基と略す)を有する熱硬化性成分(D)である。
Next, the thermosetting component (D) will be described.
A thermosetting component (D) can be added to the photocurable resin composition of the present invention in order to impart heat resistance. Particularly preferred is a thermosetting component (D) having two or more cyclic ether groups and / or cyclic thioether groups (hereinafter abbreviated as cyclic (thio) ether groups) in the molecule.
このような分子中に2つ以上の環状(チオ)エーテル基を有する熱硬化性成分(D)うとしては、分子中に3、4または5員環の環状エーテル基、又は環状チオエーテル基のいずれか一方又は2種類の基を2個以上有する化合物を挙げることができ、例えば、分子内に少なくとも2つ以上のエポキシ基を有する化合物、すなわち多官能エポキシ化合物(D−1)、分子内に少なくとも2つ以上のオキセタニル基を有する化合物、すなわち多官能オキセタン化合物(D−2)、分子内に2個以上の環状チオエーテル基を有する化合物、すなわちエピスルフィド化合物(D−3)などが挙げられる。 Examples of the thermosetting component (D) having two or more cyclic (thio) ether groups in the molecule include any of 3, 4, or 5-membered cyclic ether groups or cyclic thioether groups in the molecule. Examples thereof include compounds having two or more of one or two kinds of groups. For example, a compound having at least two epoxy groups in the molecule, that is, a polyfunctional epoxy compound (D-1), at least in the molecule. Examples thereof include a compound having two or more oxetanyl groups, that is, a polyfunctional oxetane compound (D-2), a compound having two or more cyclic thioether groups in the molecule, that is, an episulfide compound (D-3).
前記多官能エポキシ化合物(D−1)としては、例えば、ジャパンエポキシレジン社製のエピコート828、エピコート834、エピコート1001、エピコート1004、大日本インキ化学工業社製のエピクロン840、エピクロン850、エピクロン1050、エピクロン2055、東都化成社製のエポトートYD−011、YD−013、YD−127、YD−128、ダウケミカル社製のD.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、チバ・スペシャルティ・ケミカルズ社のアラルダイド6071、アラルダイド6084、アラルダイドGY250、アラルダイドGY260、住友化学工業社製のスミ−エポキシESA−011、ESA−014、ELA−115、ELA−128、旭化成工業社製のA.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等(何れも商品名)のビスフェノールA型エポキシ樹脂;ジャパンエポキシレジン社製のエピコートYL903、大日本インキ化学工業社製のエピクロン152、エピクロン165、東都化成社製のエポトートYDB−400、YDB−500、ダウケミカル社製のD.E.R.542、チバ・スペシャルティ・ケミカルズ社製のアラルダイド8011、住友化学工業社製のスミ−エポキシESB−400、ESB−700、旭化成工業社製のA.E.R.711、A.E.R.714等(何れも商品名)のブロム化エポキシ樹脂;ジャパンエポキシレジン社製のエピコート152、エピコート154、ダウケミカル社製のD.E.N.431、D.E.N.438、大日本インキ化学工業社製のエピクロンN−730、エピクロンN−770、エピクロンN−865、東都化成社製のエポトートYDCN−701、YDCN−704、チバ・スペシャルティ・ケミカルズ社製のアラルダイドECN1235、アラルダイドECN1273、アラルダイドECN1299、アラルダイドXPY307、日本化薬社製のEPPN−201、EOCN−1025、EOCN−1020、EOCN−104S、RE−306、住友化学工業社製のスミ−エポキシESCN−195X、ESCN−220、旭化成工業社製のA.E.R.ECN−235、ECN−299等(何れも商品名)のノボラック型エポキシ樹脂;大日本インキ化学工業社製のエピクロン830、ジャパンエポキシレジン社製エピコート807、東都化成社製のエポトートYDF−170、YDF−175、YDF−2004、チバ・スペシャルティ・ケミカルズ社製のアラルダイドXPY306等(何れも商品名)のビスフェノールF型エポキシ樹脂;東都化成社製のエポトートST−2004、ST−2007、ST−3000(商品名)等の水添ビスフェノールA型エポキシ樹脂;ジャパンエポキシレジン社製のエピコート604、東都化成社製のエポトートYH−434、チバ・スペシャルティ・ケミカルズ社製のアラルダイドMY720、住友化学工業社製のスミ−エポキシELM−120等(何れも商品名)のグリシジルアミン型エポキシ樹脂;チバ・スペシャルティ・ケミカルズ社製のアラルダイドCY−350(商品名)等のヒダントイン型エポキシ樹脂;ダイセル化学工業社製のセロキサイド2021、チバ・スペシャルティ・ケミカルズ社製のアラルダイドCY175、CY179等(何れも商品名)の脂環式エポキシ樹脂;ジャパンエポキシレジン社製のYL−933、ダウケミカル社製のT.E.N.、EPPN−501、EPPN−502等(何れも商品名)のトリヒドロキシフェニルメタン型エポキシ樹脂;ジャパンエポキシレジン社製のYL−6056、YX−4000、YL−6121(何れも商品名)等のビキシレノール型もしくはビフェノール型エポキシ樹脂又はそれらの混合物;日本化薬社製EBPS−200、旭電化工業社製EPX−30、大日本インキ化学工業社製のEXA−1514(商品名)等のビスフェノールS型エポキシ樹脂;ジャパンエポキシレジン社製のエピコート157S(商品名)等のビスフェノールAノボラック型エポキシ樹脂;ジャパンエポキシレジン社製のエピコートYL−931、チバ・スペシャルティ・ケミカルズ社製のアラルダイド163等(何れも商品名)のテトラフェニロールエタン型エポキシ樹脂;チバ・スペシャルティ・ケミカルズ社製のアラルダイドPT810、日産化学工業社製のTEPIC等(何れも商品名)の複素環式エポキシ樹脂;日本油脂社製ブレンマーDGT等のジグリシジルフタレート樹脂;東都化成社製ZX−1063等のテトラグリシジルキシレノイルエタン樹脂;新日鉄化学社製ESN−190、ESN−360、大日本インキ化学工業社製HP−4032、EXA−4750、EXA−4700等のナフタレン基含有エポキシ樹脂;大日本インキ化学工業社製HP−7200、HP−7200H等のジシクロペンタジエン骨格を有するエポキシ樹脂;日本油脂社製CP−50S、CP−50M等のグリシジルメタアクリレート共重合系エポキシ樹脂;さらにシクロヘキシルマレイミドとグリシジルメタアクリレートの共重合エポキシ樹脂;エポキシ変性のポリブタジエンゴム誘導体(例えばダイセル化学工業製PB−3600等)、CTBN変性エポキシ樹脂(例えば東都化成社製のYR−102、YR−450等)等が挙げられるが、これらに限られるものではない。これらのエポキシ樹脂は、単独で又は2種以上を組み合わせて用いることができる。これらの中でも特にノボラック型エポキシ樹脂、複素環式エポキシ樹脂、ビスフェノールA型エポキシ樹脂又はそれらの混合物が好ましい。 Examples of the polyfunctional epoxy compound (D-1) include, for example, Epicoat 828, Epicoat 834, Epicoat 1001, Epicoat 1004, Epicron 840, Epicron 850, Epicron 1050, manufactured by Dainippon Ink & Chemicals, Inc. Epicron 2055, Epototo YD-011, YD-013, YD-127, YD-128 manufactured by Toto Kasei Co., Ltd., D.C. E. R. 317, D.E. E. R. 331, D.D. E. R. 661, D.D. E. R. 664, Ciba Specialty Chemicals' Araldide 6071, Araldide 6084, Araldide GY250, Araldide GY260, Sumitomo Chemical Industries Sumi-Epoxy ESA-011, ESA-014, ELA-115, ELA-128, Asahi Kasei Kogyo Co., Ltd. A. E. R. 330, A.I. E. R. 331, A.I. E. R. 661, A.I. E. R. Bisphenol A type epoxy resin such as 664 (all trade names); Epicoat YL903 manufactured by Japan Epoxy Resin, Epicron 152, Epicron 165 manufactured by Dainippon Ink and Chemicals, Epototo YDB-400, YDB- manufactured by Tohto Kasei Co., Ltd. 500, D.C. E. R. 542, Araldide 8011 manufactured by Ciba Specialty Chemicals, Sumi-epoxy ESB-400, ESB-700 manufactured by Sumitomo Chemical Co., Ltd., and A.D. E. R. 711, A.I. E. R. Brominated epoxy resins such as 714 (all trade names); Epicoat 152 and Epicoat 154 manufactured by Japan Epoxy Resin Co., Ltd., D.C. E. N. 431, D.D. E. N. 438, Epicron N-730, Epicron N-770, Epicron N-865, Etototo YDCN-701, YDCN-704 from Toto Kasei Co., Ltd., Araldide ECN1235 from Ciba Specialty Chemicals, Araldide ECN1273, Araldide ECN1299, Araldide XPY307, EPPN-201, EOCN-1025, EOCN-1020, EOCN-104S, RE-306 manufactured by Nippon Kayaku Co., Ltd., Sumi-epoxy ESCN-195X, ESCN- manufactured by Sumitomo Chemical 220, manufactured by Asahi Kasei Corporation. E. R. Novolak type epoxy resins such as ECN-235, ECN-299, etc. (both trade names); Epicron 830 manufactured by Dainippon Ink & Chemicals, Epicoat 807 manufactured by Japan Epoxy Resin, Epototo YDF-170 manufactured by Toto Kasei Co., YDF -175, YDF-2004, bisphenol F type epoxy resin such as Araldide XPY306 manufactured by Ciba Specialty Chemicals (all are trade names); Epotot ST-2004, ST-2007, ST-3000 manufactured by Tohto Kasei Hydrogenated bisphenol A type epoxy resin such as EPOCOAT 604 manufactured by Japan Epoxy Resin Co., Ltd., Epotot YH-434 manufactured by Tohto Kasei Co., Ltd., Araldide MY720 manufactured by Ciba Specialty Chemicals Co., Ltd., Sumitomo Chemical Industries Epoxy ELM-120 etc. All are trade names) glycidylamine type epoxy resin; Hydantoin type epoxy resins such as Araldide CY-350 (trade name) manufactured by Ciba Specialty Chemicals; Celoxide 2021 manufactured by Daicel Chemical Industries, Ciba Specialty Chemicals Alicyclic epoxy resins such as Araldide CY175, CY179, etc. (both trade names) manufactured by YL-933 manufactured by Japan Epoxy Resin Co., Ltd. E. N. , EPPN-501, EPPN-502, etc. (all trade names) trihydroxyphenylmethane type epoxy resin; Japan Epoxy Resin YL-6056, YX-4000, YL-6121 (all trade names), etc. Xylenol type or biphenol type epoxy resin or a mixture thereof; bisphenol S type such as EBPS-200 manufactured by Nippon Kayaku Co., Ltd., EPX-30 manufactured by Asahi Denka Kogyo Co., Ltd., EXA-1514 manufactured by Dainippon Ink & Chemicals, Inc. Epoxy resin; Bisphenol A novolac type epoxy resin such as Epicoat 157S (trade name) manufactured by Japan Epoxy Resin; Epicoat YL-931 manufactured by Japan Epoxy Resin, Araldide 163 manufactured by Ciba Specialty Chemicals, etc. Name) Tetraphenylolethane type Poxy resin; Araldide PT810 manufactured by Ciba Specialty Chemicals, TEPIC manufactured by Nissan Chemical Industries, Ltd. (both are trade names); Diglycidyl phthalate resin such as Bremer DGT manufactured by Nippon Oil &Fats; Tetraglycidylxylenoylethane resin such as ZX-1063 manufactured by Nippon Steel; ESN-190 and ESN-360 manufactured by Nippon Steel Chemical Co., Ltd. Naphthalene groups such as HP-4032, EXA-4750, and EXA-4700 manufactured by Dainippon Ink & Chemicals, Inc. Epoxy resin; Epoxy resin having dicyclopentadiene skeleton such as HP-7200 and HP-7200H manufactured by Dainippon Ink &Chemicals; Glycidyl methacrylate copolymer epoxy resin such as CP-50S and CP-50M manufactured by Nippon Oil &Fats; In addition, cyclohexylmaleimide and glycidyl Methacrylate copolymerized epoxy resins; epoxy-modified polybutadiene rubber derivatives (for example, PB-3600 manufactured by Daicel Chemical Industries, Ltd.), CTBN-modified epoxy resins (for example, YR-102, YR-450 manufactured by Tohto Kasei Co., Ltd.), etc. However, it is not limited to these. These epoxy resins can be used alone or in combination of two or more. Among these, a novolac type epoxy resin, a heterocyclic epoxy resin, a bisphenol A type epoxy resin or a mixture thereof is particularly preferable.
前記多官能オキセタン化合物(D−2)としては、ビス[(3−メチル−3−オキセタニルメトキシ)メチル]エーテル、ビス[(3−エチル−3−オキセタニルメトキシ)メチル]エーテル、1,4−ビス[(3−メチル−3−オキセタニルメトキシ)メチル]ベンゼン、1,4−ビス[(3−エチル−3−オキセタニルメトキシ)メチル]ベンゼン、(3−メチル−3−オキセタニル)メチルアクリレート、(3−エチル−3−オキセタニル)メチルアクリレート、(3−メチル−3−オキセタニル)メチルメタクリレート、(3−エチル−3−オキセタニル)メチルメタクリレートやそれらのオリゴマー又は共重合体等の多官能オキセタン類の他、オキセタンアルコールとノボラック樹脂、ポリ(p−ヒドロキシスチレン)、カルド型ビスフェノール類、カリックスアレーン類、カリックスレゾルシンアレーン類、又はシルセスキオキサンなどの水酸基を有する樹脂とのエーテル化物などが挙げられる。その他、オキセタン環を有する不飽和モノマーとアルキル(メタ)アクリレートとの共重合体なども挙げられる。 Examples of the polyfunctional oxetane compound (D-2) include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, bis [(3-ethyl-3-oxetanylmethoxy) methyl] ether, 1,4-bis [(3-Methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3-ethyl-3-oxetanylmethoxy) methyl] benzene, (3-methyl-3-oxetanyl) methyl acrylate, (3- In addition to polyfunctional oxetanes such as ethyl-3-oxetanyl) methyl acrylate, (3-methyl-3-oxetanyl) methyl methacrylate, (3-ethyl-3-oxetanyl) methyl methacrylate and oligomers or copolymers thereof, oxetane Alcohol and novolak resin, poly (p-hydroxystyrene), cardo type Scan phenols, calixarenes, calix resorcin arenes, or the like ethers of a resin having a hydroxyl group such as silsesquioxane and the like. In addition, a copolymer of an unsaturated monomer having an oxetane ring and an alkyl (meth) acrylate is also included.
前記エピスルフィド化合物(D−3)としては、例えば、ジャパンエポキシレジン社製のビスフェノールA型エピスルフィド樹脂 YL7000などが挙げられる。また、同様の合成方法を用いて、ノボラック型エポキシ樹脂のエポキシ基の酸素原子を硫黄原子に置き換えたエピスルフィド樹脂なども用いることができる。 Examples of the episulfide compound (D-3) include bisphenol A type episulfide resin YL7000 manufactured by Japan Epoxy Resin Co., Ltd. Moreover, episulfide resin etc. which replaced the oxygen atom of the epoxy group of the novolak-type epoxy resin with the sulfur atom using the same synthesis method can be used.
前記分子中に2つ以上の環状(チオ)エーテル基を有する熱硬化性成分(D)の配合率は、前記カルボン酸含有感光性樹脂(A)のカルボキシル基1当量に対して、好ましくは0.6〜2.5当量、より好ましくは、0.8〜2.0当量となる範囲である。分子中に2つ以上の環状(チオ)エーテル基を有する熱硬化性成分(D)の配合量が0.6当量未満である場合、ソルダーレジスト膜にカルボキシル基が残る原因となり、その場合には耐熱性、耐アルカリ性、電気絶縁性などが低下するので、好ましくない。一方、2.5当量を超える場合、低分子量の環状(チオ)エーテル基が乾燥塗膜に残存することにより、塗膜の強度などが低下する場合があるので好ましくない。 The blending ratio of the thermosetting component (D) having two or more cyclic (thio) ether groups in the molecule is preferably 0 with respect to 1 equivalent of the carboxyl group of the carboxylic acid-containing photosensitive resin (A). .6 to 2.5 equivalents, and more preferably 0.8 to 2.0 equivalents. When the blending amount of the thermosetting component (D) having two or more cyclic (thio) ether groups in the molecule is less than 0.6 equivalent, it causes a carboxyl group to remain in the solder resist film. Since heat resistance, alkali resistance, electrical insulation, etc. will fall, it is not preferable. On the other hand, when the amount exceeds 2.5 equivalents, the low molecular weight cyclic (thio) ether group remains in the dry coating film, which is not preferable because the strength of the coating film may decrease.
本願発明の光硬化性樹脂組成物に熱硬化性成分(D)を使用する場合、熱硬化触媒を併用することが好ましい。そのような熱硬化触媒としては、例えば、イミダゾール、2−メチルイミダゾール、2−エチルイミダゾール、2−エチル−4−メチルイミダゾール、2−フェニルイミダゾール、4−フェニルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、1−(2−シアノエチル)−2−エチル−4−メチルイミダゾール等のイミダゾール誘導体;ジシアンジアミド、ベンジルジメチルアミン、4−(ジメチルアミノ)−N,N−ジメチルベンジルアミン、4−メトキシ−N,N−ジメチルベンジルアミン、4−メチル−N,N−ジメチルベンジルアミン等のアミン化合物、アジピン酸ジヒドラジド、セバシン酸ジヒドラジド等のヒドラジン化合物;トリフェニルホスフィン等のリン化合物など、また市販されているものとしては、例えば四国化成工業社製の2MZ−A、2MZ−OK、2PHZ、2P4BHZ、2P4MHZ(いずれもイミダゾール系化合物の商品名)、サンアプロ社製のU−CAT3503N、U−CAT3502T(いずれもジメチルアミンのブロックイソシアネート化合物の商品名)、DBU、DBN、U−CATSA102、U−CAT5002(いずれも二環式アミジン化合物及びその塩)などが挙げられる。特に、これらに限られるものではなく、エポキシ樹脂やオキセタン化合物の熱硬化触媒、もしくはエポキシ基及び/又はオキセタニル基とカルボキシル基の反応を促進するものであればよく、単独で又は2種以上を混合して使用してもかまわない。また、グアナミン、アセトグアナミン、ベンゾグアナミン、メラミン、2,4−ジアミノ−6−メタクリロイルオキシエチル−S−トリアジン、2−ビニル−2,4−ジアミノ−S−トリアジン、2−ビニル−4,6−ジアミノ−S−トリアジン・イソシアヌル酸付加物、2,4−ジアミノ−6−メタクリロイルオキシエチル−S−トリアジン・イソシアヌル酸付加物等のS−トリアジン誘導体を用いることもでき、好ましくはこれら密着性付与剤としても機能する化合物を前記熱硬化触媒と併用する。 When using a thermosetting component (D) for the photocurable resin composition of this invention, it is preferable to use a thermosetting catalyst together. Examples of such thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole. Imidazole derivatives such as 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N -Amine compounds such as dimethylbenzylamine, 4-methyl-N, N-dimethylbenzylamine, hydrazine compounds such as adipic acid dihydrazide and sebacic acid dihydrazide; phosphorus compounds such as triphenylphosphine, and those that are commercially available ,example 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (all trade names of imidazole compounds) manufactured by Shikoku Kasei Kogyo Co., Ltd., U-CAT3503N, U-CAT3502T (all dimethylamine block isocyanate compounds manufactured by San Apro) Product names), DBU, DBN, U-CATSA102, U-CAT5002 (both bicyclic amidine compounds and salts thereof), and the like. In particular, it is not limited to these, as long as it is a thermosetting catalyst for epoxy resins or oxetane compounds, or a catalyst that promotes the reaction of epoxy groups and / or oxetanyl groups with carboxyl groups, either alone or in combination of two or more. Can be used. Also, guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-2,4-diamino-S-triazine, 2-vinyl-4,6-diamino S-triazine derivatives such as -S-triazine and isocyanuric acid adducts and 2,4-diamino-6-methacryloyloxyethyl-S-triazine and isocyanuric acid adducts can also be used. A compound that also functions in combination with the thermosetting catalyst.
これら熱硬化触媒の配合率は、通常の量的割合で充分であり、例えばカルボン酸含有感光性樹脂(A)または熱硬化性成分(D)100質量部に対して、好ましくは0.1〜20質量部、より好ましくは0.5〜15.0質量部である。 The blending ratio of these thermosetting catalysts is sufficient at a normal quantitative ratio, and for example, preferably 0.1 to 100 parts by mass of the carboxylic acid-containing photosensitive resin (A) or thermosetting component (D). It is 20 mass parts, More preferably, it is 0.5-15.0 mass parts.
次に、本発明の光硬化性樹脂組成物において用いることができる着色剤(E)について説明する。
本発明の光硬化性樹脂組成物には、着色剤を配合することができる。着色剤としては、赤、青、緑、黄、黒などの慣用公知の着色剤を使用することができ、顔料、染料、色素のいずれでもよい。但し、環境負荷低減並びに人体への影響の観点からハロゲンおよびアゾ化合物を含有しないことが好ましい。
Next, the colorant (E) that can be used in the photocurable resin composition of the present invention will be described.
A coloring agent can be mix | blended with the photocurable resin composition of this invention. As the colorant, conventionally known colorants such as red, blue, green, yellow and black can be used, and any of pigments, dyes and dyes may be used. However, it is preferable not to contain a halogen and an azo compound from the viewpoint of reducing environmental burden and affecting the human body.
青色着色剤:
青色着色剤としてはフタロシアニン系、アントラキノン系があり、顔料系はピグメント(Pigment)に分類されている化合物、具体的には、下記のようなカラーインデックス(C.I.;ザ ソサイエティ オブ ダイヤーズ アンド カラリスツ(The Society of Dyers and Colourists)発行)番号が付されているものを挙げることができる:Pigment Blue 15、Pigment Blue 15:1、Pigment Blue 15:2、Pigment Blue 15:3、Pigment Blue 15:4、Pigment Blue 15:6、Pigment Blue 16、Pigment Blue 60。
Blue colorant:
Blue colorants include phthalocyanine-based and anthraquinone-based compounds, and pigment-based compounds classified as Pigment, specifically, the following color index (CI; The Society of Dyers and Colorists) (Issued by The Society of Dyers and Colorists) can be listed with numbers: Pigment Blue 15, Pigment Blue 15: 1, Pigment Blue 15: 2, Pigment Blue 15: 3, Pigment Blue 15: 4 , Pigment Blue 15: 6, Pigment Blue 16, Pigment Blue 60.
染料系としては、Solvent Blue 35、Solvent Blue 63、Solvent Blue 68、Solvent Blue 70、Solvent Blue 83、Solvent Blue 87、Solvent Blue 94、Solvent Blue 97、Solvent Blue 122、Solvent Blue 136、Solvent Blue 67、Solvent Blue 70等を使用することができる。上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。 The dye systems include Solvent Blue 35, Solvent Blue 63, Solvent Blue 68, Solvent Blue 70, Solvent Blue 83, Solvent Blue 87, Solvent Blue 94, Solvent Blue 97, Solvent Blue 122, Solvent Blue 136, Solvent Blue 67, Solvent Blue 70 etc. can be used. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
緑色着色剤:
緑色着色剤としては、同様にフタロシアニン系、アントラキノン系があり、具体的にはPigment Green 7、Pigment Green 36、Solvent Green 3、Solvent Green 5、Solvent Green 20、Solvent Green 28等を使用することができる。上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。
Green colorant:
Similarly, as the green colorant, there are phthalocyanine type and anthraquinone type, and specifically, Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 5, Solvent Green 20, Solvent Green 28, etc. can be used. . In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
黄色着色剤:
黄色着色剤としてはモノアゾ系、ジスアゾ系、縮合アゾ系、ベンズイミダゾロン系、イソインドリノン系、アントラキノン系等があり、具体的には以下のものが挙げられる。
Yellow colorant:
Examples of yellow colorants include monoazo, disazo, condensed azo, benzimidazolone, isoindolinone, anthraquinone, and the like.
アントラキノン系:Solvent Yellow 163、Pigment Yellow 24、Pigment Yellow 108、Pigment Yellow 193、Pigment Yellow 147、Pigment Yellow 199、Pigment Yellow 202。 Anthraquinone series: Solvent Yellow 163, Pigment Yellow 24, Pigment Yellow 108, Pigment Yellow 193, Pigment Yellow 147, Pigment Yellow 199, Pigment Yellow 202.
イソインドリノン系:Pigment Yellow 110、Pigment Yellow 109、Pigment Yellow 139、Pigment Yellow 179、Pigment Yellow 185。 Isoindolinone type: Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, Pigment Yellow 179, Pigment Yellow 185.
縮合アゾ系:Pigment Yellow 93、Pigment Yellow 94、Pigment Yellow 95、Pigment Yellow 128、Pigment Yellow 155、Pigment Yellow 166、Pigment Yellow 180。 Condensed azo series: Pigment Yellow 93, Pigment Yellow 94, Pigment Yellow 95, Pigment Yellow 128, Pigment Yellow 155, Pigment Yellow 166, Pigment Yellow 180.
ベンズイミダゾロン系:Pigment Yellow 120、Pigment Yellow 151、Pigment Yellow 154、Pigment Yellow 156、Pigment Yellow 175、Pigment Yellow 181。 Benzimidazolone series: Pigment Yellow 120, Pigment Yellow 151, Pigment Yellow 154, Pigment Yellow 156, Pigment Yellow 175, Pigment Yellow 181.
モノアゾ系:Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62:1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116, 167, 168, 169, 182, 183。 Monoazo: Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116 , 167, 168, 169, 182, 183.
ジスアゾ系:Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198。 Disazo: Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198.
赤色着色剤:
赤色着色剤としてはモノアゾ系、ジズアゾ系、アゾレーキ系、ベンズイミダゾロン系、ペリレン系、ジケトピロロピロール系、縮合アゾ系、アントラキノン系、キナクリドン系などがあり、具体的には以下のものが挙げられる。
Red colorant:
Examples of red colorants include monoazo, diazo, azo lake, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone. It is done.
モノアゾ系:Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151, 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269。 Monoazo: Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151 , 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269.
ジスアゾ系:Pigment Red 37, 38, 41。 Disazo: Pigment Red 37, 38, 41.
モノアゾレーキ系:Pigment Red 48:1, 48:2, 48:3, 48:4, 49:1, 49:2, 50:1, 52:1, 52:2, 53:1, 53:2, 57:1, 58:4, 63:1, 63:2, 64:1,68。 Monoazo lakes: Pigment Red 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53: 1, 53: 2, 57 : 1, 58: 4, 63: 1, 63: 2, 64: 1,68.
ベンズイミダゾロン系:Pigment Red 171、Pigment Red 175、Pigment Red 176、Pigment Red 185、Pigment Red 208。 Benzimidazolone series: Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208.
ぺリレン系:Solvent Red 135、Solvent Red 179、Pigment Red 123、Pigment Red 149、Pigment Red 166、Pigment Red 178、Pigment Red 179、Pigment Red 190、Pigment Red 194、Pigment Red 224。 Perylene series: Solvent Red 135, Solvent Red 179, Pigment Red 123, Pigment Red 149, Pigment Red 166, Pigment Red 178, Pigment Red 179, Pigment Red 190, Pigment Red 194, Pigment Red 224.
ジケトピロロピロール系:Pigment Red 254、Pigment Red 255、Pigment Red 264、Pigment Red 270、Pigment Red 272。 Diketopyrrolopyrrole series: Pigment Red 254, Pigment Red 255, Pigment Red 264, Pigment Red 270, Pigment Red 272.
縮合アゾ系:Pigment Red 220、Pigment Red 144、Pigment Red 166、Pigment Red 214、Pigment Red 220、Pigment Red 221、Pigment Red 242。 Condensed azo series: Pigment Red 220, Pigment Red 144, Pigment Red 166, Pigment Red 214, Pigment Red 220, Pigment Red 221 and Pigment Red 242.
アンスラキノン系:Pigment Red 168、Pigment Red 177、Pigment Red 216、Solvent Red 149、Solvent Red 150、Solvent Red 52、Solvent Red 207。 Anthraquinone series: Pigment Red 168, Pigment Red 177, Pigment Red 216, Solvent Red 149, Solvent Red 150, Solvent Red 52, Solvent Red 207.
キナクリドン系:Pigment Red 122、Pigment Red 202、Pigment Red 206、Pigment Red 207、Pigment Red 209。
その他、色調を調整する目的で紫、オレンジ、茶色、黒などの着色剤を加えても良い。
Kinacridone series: Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209.
In addition, colorants such as purple, orange, brown, and black may be added for the purpose of adjusting the color tone.
具体的に例示すれば、Pigment Violet 19、23、29、32、36、38、42、Solvent Violet 13、36、C.I.ピグメントオレンジ1、C.I.ピグメントオレンジ5、C.I.ピグメントオレンジ13、C.I.ピグメントオレンジ14、C.I.ピグメントオレンジ16、C.I.ピグメントオレンジ17、C.I.ピグメントオレンジ24、C.I.ピグメントオレンジ34、C.I.ピグメントオレンジ36、C.I.ピグメントオレンジ38、C.I.ピグメントオレンジ40、C.I.ピグメントオレンジ43、C.I.ピグメントオレンジ46、C.I.ピグメントオレンジ49、C.I.ピグメントオレンジ51、C.I.ピグメントオレンジ61、C.I.ピグメントオレンジ63、C.I.ピグメントオレンジ64、C.I.ピグメントオレンジ71、C.I.ピグメントオレンジ73、C.I.ピグメントブラウン23、C.I.ピグメントブラウン25、C.I.ピグメントブラック1、C.I.ピグメントブラック7等がある。 Specifically, Pigment Violet 19, 23, 29, 32, 36, 38, 42, Solvent Violet 13, 36, CI Pigment Orange 1, CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 14, CI CI Pigment Orange 16, CI Pigment Orange 17, CI Pigment Orange 24, CI Pigment Orange 34, CI Pigment Orange 36, CI Pigment Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, CI CI Pigment Orange 51, CI Pigment Orange 61, CI Pigment Orange 63, CI Pigment Orange 64, CI Pigment Orange 71, CI Pigment Orange 73, CI Pigment Brown 23, CI Pigment Brown 25, CI Pigment Rack 1, there is a C.I. Pigment Black 7 and the like.
着色剤の具体的な配合比率は、用いる着色剤の種類や他の添加剤等の種類にも影響されるので一概には言えないが、本発明の感光性樹脂組成物のカルボン酸含有感光性樹脂100質量部に対して0質量部から5質量部配合することが好ましい。より好ましくは0.05質量部から3質量部で用いることができる特に好ましい着色剤は、青と緑はフタロシアニン系、アントラキノン系、黄はアントラキノン系、赤はジケトピロロピロール系、アントラキノン系で、且つハロゲン原子を含まないものである。また、顔料系の青および緑は耐熱性の観点から好ましく、染料系の青、緑、及び赤色着色剤は感度及び解像性の観点で好ましい。 Although the specific blending ratio of the colorant is influenced by the type of the colorant used and the type of other additives, it cannot be generally stated, but the carboxylic acid-containing photosensitivity of the photosensitive resin composition of the present invention. It is preferable to mix 0 to 5 parts by mass with respect to 100 parts by mass of the resin. Particularly preferable colorants that can be used in an amount of 0.05 to 3 parts by weight are blue and green phthalocyanine, anthraquinone, yellow anthraquinone, red diketopyrrolopyrrole, anthraquinone, And it does not contain a halogen atom. Further, pigment-based blue and green are preferable from the viewpoint of heat resistance, and dye-based blue, green, and red colorants are preferable from the viewpoint of sensitivity and resolution.
本発明の光硬化性樹脂組成物は、その塗膜の物理的強度等を上げるために、必要に応じて、フィラーを配合することができる。このようなフィラーとしては、公知慣用の無機又は有機フィラーを使用することができるが、特に硫酸バリウム、球状シリカおよびタルクが好ましく用いられる。さらに、1個以上のエチレン性不飽和基を有する化合物や前記多官能エポキシ樹脂(D−1)にナノシリカを分散したHanse−Chemie社製のNANOCRYL(商品名) XP 0396、XP 0596、XP 0733、XP 0746、XP 0765、XP 0768、XP 0953、XP 0954、XP 1045(何れも製品グレード名)や、Hanse−Chemie社製のNANOPOX(商品名)XP 0516、XP 0525、XP 0314(何れも製品グレード名)なども使用できる。これらを単独で又は2種以上配合して使用することができる。 The photocurable resin composition of the present invention can be blended with a filler as necessary in order to increase the physical strength of the coating film. As such a filler, publicly known and commonly used inorganic or organic fillers can be used, and barium sulfate, spherical silica and talc are particularly preferably used. Furthermore, NANOCRYL (trade name) XP 0396, XP 0596, XP 0733 manufactured by Hanse-Chemie, in which nano silica is dispersed in the compound having one or more ethylenically unsaturated groups or the polyfunctional epoxy resin (D-1), XP 0746, XP 0765, XP 0768, XP 0953, XP 0954, XP 1045 (all product grade names) and NANOOX (trade name) XP 0516, XP 0525, XP 0314 (all product grades) manufactured by Hanse-Chemie Name) etc. can also be used. These may be used alone or in combination of two or more.
これらフィラーの配合率は、上記カルボン酸含有感光性樹脂(A)100質量部に対して、好ましくは300質量部以下、より好ましくは0.1〜300質量部、特に好ましくは、0.1〜150質量部である。フィラーの配合率が、300質量部を超える場合、感光性組成物の粘度が高くなり印刷性が低下したり、硬化物が脆くなる場合があるので好ましくない。 The blending ratio of these fillers is preferably 300 parts by mass or less, more preferably 0.1 to 300 parts by mass, and particularly preferably 0.1 to 100 parts by mass with respect to 100 parts by mass of the carboxylic acid-containing photosensitive resin (A). 150 parts by mass. When the blending ratio of the filler exceeds 300 parts by mass, the viscosity of the photosensitive composition is increased, the printability may be lowered, and the cured product may be brittle, which is not preferable.
さらに、本発明の光硬化性樹脂組成物は、上記カルボン酸含有感光性樹脂(A)の合成や組成物の調製のため、又は基板やキャリアフィルムに塗布するための粘度調整のため、有機溶剤を使用することができる。 Further, the photocurable resin composition of the present invention is an organic solvent for the synthesis of the carboxylic acid-containing photosensitive resin (A) and for the preparation of the composition, or for adjusting the viscosity for application to a substrate or carrier film. Can be used.
このような有機溶剤としては、ケトン類、芳香族炭化水素類、グリコールエーテル類、グリコールエーテルアセテート類、エステル類、アルコール類、脂肪族炭化水素、石油系溶剤などが挙げることができる。より具体的には、メチルエチルケトン、シクロヘキサノン等のケトン類;トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類;セロソルブ、メチルセロソルブ、ブチルセロソルブ、カルビトール、メチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールジエチルエーテル、トリエチレングリコールモノエチルエーテル等のグリコールエーテル類;酢酸エチル、酢酸ブチル、ジプロピレングリコールメチルエーテルアセテート、プロピレングリコールメチルエーテルアセテート、プロピレングリコールエチルエーテルアセテート、プロピレングリコールブチルエーテルアセテートなどのエステル類;エタノール、プロパノール、エチレングリコール、プロピレングリコール等のアルコール類;オクタン、デカン等の脂肪族炭化水素;石油エーテル、石油ナフサ、水添石油ナフサ、ソルベントナフサ等の石油系溶剤などが挙げられる。このような有機溶剤は、単独で又は2種以上の混合物として用いられる。 Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like. More specifically, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; cellosolve, methyl cellosolve, butyl cellosolve, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl Glycol ethers such as ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether; ethyl acetate, butyl acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate , Esters such as propylene glycol butyl ether acetate; ethanol, propano , Ethylene glycol, alcohols such as propylene glycol; octane, aliphatic hydrocarbons decane; petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha, and petroleum solvents such as solvent naphtha. Such organic solvents are used alone or as a mixture of two or more.
本発明の光硬化性樹脂組成物は、さらに必要に応じて、ハイドロキノン、ハイドロキノンモノメチルエーテル、t−ブチルカテコール、ピロガロール、フェノチアジンなどの公知慣用の熱重合禁止剤、微粉シリカ、有機ベントナイト、モンモリロナイトなどの公知慣用の増粘剤、シリコーン系、フッ素系、高分子系などの消泡剤及び/又はレベリング剤、イミダゾール系、チアゾール系、トリアゾール系等のシランカップリング剤、酸化防止剤、防錆剤などのような公知慣用の添加剤類を配合することができる。 The photocurable resin composition of the present invention may further include, as necessary, known and commonly used thermal polymerization inhibitors such as hydroquinone, hydroquinone monomethyl ether, t-butylcatechol, pyrogallol, and phenothiazine, finely divided silica, organic bentonite, and montmorillonite. Known and commonly used thickeners, silicone-based, fluorine-based and polymer-based antifoaming agents and / or leveling agents, imidazole-based, thiazole-based, triazole-based silane coupling agents, antioxidants, rust inhibitors, etc. The known and conventional additives such as can be blended.
本発明の光硬化性樹脂組成物は、例えば前記有機溶剤で塗布方法に適した粘度に調整し、基材上に、ディップコート法、フローコート法、ロールコート法、バーコーター法、スクリーン印刷法、カーテンコート法等により塗布した後、約60〜100℃の温度で組成物中に含まれる有機溶剤を揮発乾燥(仮乾燥)させることにより、タックフリーの塗膜に形成される。また、本発明の樹脂組成物をキャリアフィルム上に塗布し、乾燥させてドライフィルムとし、これを巻き取ったものを基材上に張り合わせることにより、樹脂絶縁層を形成できる。 The photocurable resin composition of the present invention is adjusted to a viscosity suitable for a coating method using, for example, the organic solvent, and on a substrate, a dip coating method, a flow coating method, a roll coating method, a bar coater method, a screen printing method. After coating by a curtain coating method or the like, a tack-free coating film is formed by volatile drying (temporary drying) of an organic solvent contained in the composition at a temperature of about 60 to 100 ° C. Moreover, a resin insulation layer can be formed by apply | coating the resin composition of this invention on a carrier film, making it dry and making a dry film, and laminating | stacking what wound up this on a base material.
上記のようにして得られた塗膜、又はキャリアフィルム上の樹脂層(前記「塗膜」と共にこれらを「樹脂層」と称する。)を、活性エネルギー線の照射により露光し、露光部(活性エネルギー線により照射された部分)を硬化させる。 The coating film obtained as described above, or the resin layer on the carrier film (along with the “coating film”, these are referred to as “resin layer”) is exposed by irradiation with active energy rays, and an exposed portion (active The portion irradiated by the energy rays is cured.
具体的には、接触式(又は非接触方式)により、パターンを形成したフォトマスクを通して選択的に活性エネルギー線により露光もしくはレーザーダイレクト露光機等を用い活性エネルギー線の直接描画によりパターン露光し、未露光部を希アルカリ水溶液(例えば0.3〜3%炭酸ソーダ水溶液)により現像してレジストパターンが形成される。さらに、例えば約140〜180℃の温度に加熱して熱硬化させることにより、前記カルボン酸含有樹脂(A)のカルボキシル基と、分子中に2個以上の環状エーテル基及び/又は環状チオエーテル基を有する熱硬化性成分が反応し、耐熱性、耐薬品性、耐吸湿性、密着性、電気特性などの諸特性に優れた硬化塗膜を形成することができる。 Specifically, by a contact type (or non-contact type), pattern exposure is performed by selective exposure using an active energy ray or direct drawing of an active energy ray using a laser direct exposure machine through a photomask on which a pattern is formed. The exposed portion is developed with a dilute alkaline aqueous solution (for example, 0.3 to 3% sodium carbonate aqueous solution) to form a resist pattern. Furthermore, for example, by heating to a temperature of about 140 to 180 ° C. and thermosetting, the carboxyl group of the carboxylic acid-containing resin (A) and two or more cyclic ether groups and / or cyclic thioether groups in the molecule are obtained. The thermosetting component which it has reacts and can form the cured coating film excellent in various characteristics, such as heat resistance, chemical resistance, moisture absorption resistance, adhesiveness, and an electrical property.
上記基材としては、紙フェノール、紙エポキシ、ガラス布エポキシ、ガラスポリイミド、ガラス布/不繊布エポキシ、ガラス布/紙エポキシ、合成繊維エポキシ、フッ素・ポリエチレン・PPO・シアネートエステル等を用いた高周波回路用銅張積層版等の材質を用いたもので全てのグレード(FR−4等)の銅張積層版、その他ポリイミドフィルム、PETフィルム、ガラス基板、セラミック基板、ウエハ板等を挙げることができる。 High frequency circuit using paper phenol, paper epoxy, glass cloth epoxy, glass polyimide, glass cloth / non-woven cloth epoxy, glass cloth / paper epoxy, synthetic fiber epoxy, fluorine / polyethylene / PPO / cyanate ester, etc. Examples include materials such as copper clad laminates, and copper graded laminates of all grades (FR-4, etc.), other polyimide films, PET films, glass substrates, ceramic substrates, wafer plates and the like.
本発明の光硬化性樹脂組成物を塗布した後に行う揮発乾燥としては、熱風循環式乾燥炉、IR炉、ホットプレート、コンベクションオーブンなど(蒸気による空気加熱方式の熱源を備えたものを用い乾燥機内の熱風を向流接触せしめる方法およびノズルより支持体に吹き付ける方式)を用いて行うことができる。 The volatile drying performed after the application of the photocurable resin composition of the present invention includes a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven, etc. And a method of spraying the hot air against the support from a nozzle).
上記活性エネルギー線照射に用いられる露光機としては、紫外線照射装置、及び直接描画装置(例えばコンピューターからのCADデータにより直接レーザーで画像を描くレーザーダイレクトイメージング装置)を用いることができる。活性エネルギー線としては、最大波長が350〜410nmの範囲にあるレーザー光を用いていればガスレーザー、固体レーザーどちらでもよい。また、その露光量は膜厚等によって異なるが、一般には5〜200mJ/cm2、好ましくは5〜100mJ/cm2、さらに好ましくは5〜50mJ/cm2の範囲内とすることができる。上記直接描画装置としては、例えば日本オルボテック社製、ペンタックス社製等のものを使用することができ、最大波長が350〜410nmのレーザー光を発振する装置であればいずれの装置を用いてもよい。 As an exposure apparatus used for the active energy ray irradiation, an ultraviolet irradiation apparatus and a direct drawing apparatus (for example, a laser direct imaging apparatus that directly draws an image with a laser using CAD data from a computer) can be used. As the active energy ray, either a gas laser or a solid laser may be used as long as laser light having a maximum wavelength in the range of 350 to 410 nm is used. Further, the exposure amount varies depending the thickness or the like, typically 5 to 200 mJ / cm 2, preferably from 5 to 100 mJ / cm 2, more preferably be in the range of 5~50mJ / cm 2. As the direct drawing device, for example, those manufactured by Nippon Orbotech, Pentax, etc. can be used, and any device may be used as long as it oscillates laser light having a maximum wavelength of 350 to 410 nm. .
前記現像方法としては、ディッピング法、シャワー法、スプレー法、ブラシ法等によることができ、現像液としては、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、アンモニア、アミン類などのアルカリ水溶液が使用できる。 The developing method can be a dipping method, a shower method, a spray method, a brush method or the like, and as a developer, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, Alkaline aqueous solutions such as ammonia and amines can be used.
以下に実施例を示して本発明について具体的に説明するが、本発明が下記実施例に限定されるものではないことはもとよりである。 Hereinafter, the present invention will be described in detail with reference to examples. However, the present invention is not limited to the following examples.
<カルボン酸含有感光性樹脂(A)の合成>
樹脂合成例1(A−1)
ジエチレングリコールモノエチルエーテルアセテート600gにジメチロールプロピオン酸442.2部(3.3モル)、無水メタクリル酸1031.8部(6.7モル)、メチルハイドロキノン3.0部、トリフェニルフォスフィン8.5部を加え95℃で8時間反応を行った。次いでジエチレングリコールモノエチルエーテルアセテート800g、オルソクレゾールノボラック型エポキシ樹脂〔大日本インキ化学工業株式会社製、EPICLON N−695、軟化点95℃、エポキシ当量214、平均官能基数7.6〕2140g(グリシジル基数(芳香環総数):10.0モル)、メチルハイドロキノン3.0部、カルビトールアセテート1000部を仕込み、攪拌しながら90℃に加熱し、反応混合物を溶解した。次いで反応液を60℃まで冷却し、トリフェニルフォスフィン10.0部を仕込み、100℃に加熱し、約30時間反応を行った。次に、これにテトラヒドロ無水フタル酸912部(6.0モル)を仕込み、95℃に加熱し、約6時間反応を行った後、これを冷却し、固型分の酸価が74mgKOH/gの固型分濃度65%のカルボン酸含有感光性樹脂(ワニスA−1)を得た。
<Synthesis of carboxylic acid-containing photosensitive resin (A)>
Resin synthesis example 1 (A-1)
600 g of diethylene glycol monoethyl ether acetate, 442.2 parts (3.3 mol) of dimethylolpropionic acid, 1031.8 parts (6.7 mol) of methacrylic anhydride, 3.0 parts of methylhydroquinone, 8.5 parts of triphenylphosphine Part was added and reacted at 95 ° C. for 8 hours. Next, 800 g of diethylene glycol monoethyl ether acetate, orthocresol novolak type epoxy resin [manufactured by Dainippon Ink & Chemicals, EPICLON N-695, softening point 95 ° C., epoxy equivalent 214, average functional group number 7.6] 2140 g (number of glycidyl groups ( The total number of aromatic rings): 10.0 mol), 3.0 parts of methylhydroquinone and 1000 parts of carbitol acetate were charged and heated to 90 ° C. with stirring to dissolve the reaction mixture. Next, the reaction solution was cooled to 60 ° C., 10.0 parts of triphenylphosphine was charged, heated to 100 ° C., and reacted for about 30 hours. Next, 912 parts (6.0 mol) of tetrahydrophthalic anhydride was added thereto, heated to 95 ° C., reacted for about 6 hours, then cooled, and the acid value of the solid component was 74 mgKOH / g. A carboxylic acid-containing photosensitive resin (varnish A-1) having a solid content concentration of 65% was obtained.
樹脂合成例2(A−2)
ジエチレングリコールモノエチルエーテルアセテート800gにジメチロールプロピオン酸442.2部(3.3モル)、無水メタクリル酸1031.8部(6.7モル)、メチルハイドロキノン3.0部、トリフェニルフォスフィン8.5部を加え95℃で8時間反応を行った。次いでジエチレングリコールモノエチルエーテルアセテート1000g、オルソクレゾールノボラック型エポキシ樹脂〔大日本インキ化学工業株式会社製、EPICLON N−695、軟化点95℃、エポキシ当量214、平均官能基数7.6〕2846.2g(グリシジル基数(芳香環総数):13.3モル)、ジメチロールプロピオン酸442.2部(3.3モル)、メチルハイドロキノン3.0部、カルビトールアセテート1300部を仕込み、攪拌しながら90℃に加熱し、反応混合物を溶解した。次いで反応液を60℃まで冷却し、トリフェニルフォスフィン12.0部を仕込み、100℃に加熱し、約25時間反応を行った。次に、これにテトラヒドロ無水フタル酸1064部(7.0モル)を仕込み、95℃に加熱し、約6時間反応を行った後、これを冷却し、固型分の酸価が67mgKOH/gの固型分濃度65%のカルボン酸含有感光性樹脂(ワニスA−2)を得た。
Resin synthesis example 2 (A-2)
To 800 g of diethylene glycol monoethyl ether acetate, 442.2 parts (3.3 moles) of dimethylolpropionic acid, 1031.8 parts (6.7 moles) of methacrylic anhydride, 3.0 parts of methylhydroquinone, 8.5 parts of triphenylphosphine Part was added and reacted at 95 ° C. for 8 hours. Next, 1000 g of diethylene glycol monoethyl ether acetate, orthocresol novolak type epoxy resin [Dainippon Ink & Chemicals, EPICLON N-695, softening point 95 ° C., epoxy equivalent 214, average functional group number 7.6] 2846.2 g (glycidyl) Base number (total number of aromatic rings): 13.3 mol), 442.2 parts (3.3 mol) of dimethylolpropionic acid, 3.0 parts of methylhydroquinone, and 1300 parts of carbitol acetate were heated to 90 ° C. with stirring. The reaction mixture was dissolved. Next, the reaction solution was cooled to 60 ° C., charged with 12.0 parts of triphenylphosphine, heated to 100 ° C., and reacted for about 25 hours. Next, 1064 parts (7.0 mol) of tetrahydrophthalic anhydride was added thereto, heated to 95 ° C., reacted for about 6 hours, then cooled, and the acid value of the solid component was 67 mgKOH / g. A carboxylic acid-containing photosensitive resin (varnish A-2) having a solid content concentration of 65% was obtained.
樹脂合成例3(A−3)
ジエチレングリコールモノエチルエーテルアセテート600gにジメチロールプロピオン酸670部(5.0モル)、メチルハイドロキノン1.5部、トリフェニルフォスフィン7.5部を加え、攪拌しながら80℃に加熱し溶解させた。この中にジエチレングリコールモノエチルエーテルアセテート750gに溶解させた無水メタクリル酸770部(5.0モル)を2時間かけて徐々に滴下し、その後5時間反応を行った。次いでオルソクレゾールノボラック型エポキシ樹脂〔大日本インキ化学工業株式会社製、EPICLON N−695、軟化点95℃、エポキシ当量214、平均官能基数7.6〕2140g(グリシジル基数(芳香環総数):10.0モル)、メチルハイドロキノン3.5部、カルビトールアセテート1100部を仕込み、攪拌しながら90℃に加熱し、反応混合物を溶解した。次いで反応液を60℃まで冷却し、トリフェニルフォスフィン12.0部を仕込み、100℃に加熱し、約25時間反応を行った。次に、これにテトラヒドロ無水フタル酸1064部(7.0モル)を仕込み、95℃に加熱し、約6時間反応を行った後、これを冷却し、固型分の酸価が85mgKOH/gの固型分濃度65%のカルボン酸含有感光性樹脂(ワニスA−3)を得た。
Resin synthesis example 3 (A-3)
To 600 g of diethylene glycol monoethyl ether acetate, 670 parts (5.0 mol) of dimethylolpropionic acid, 1.5 parts of methylhydroquinone and 7.5 parts of triphenylphosphine were added and heated to 80 ° C. with stirring to dissolve. Into this, 770 parts (5.0 mol) of methacrylic anhydride dissolved in 750 g of diethylene glycol monoethyl ether acetate was gradually added dropwise over 2 hours, followed by reaction for 5 hours. Next, orthocresol novolak type epoxy resin [Dainippon Ink Chemical Co., Ltd., EPICLON N-695, softening point 95 ° C., epoxy equivalent 214, average functional group number 7.6] 2140 g (number of glycidyl groups (total number of aromatic rings): 10. 0 mol), 3.5 parts of methylhydroquinone and 1100 parts of carbitol acetate were added and heated to 90 ° C. with stirring to dissolve the reaction mixture. Next, the reaction solution was cooled to 60 ° C., charged with 12.0 parts of triphenylphosphine, heated to 100 ° C., and reacted for about 25 hours. Next, 1064 parts (7.0 mol) of tetrahydrophthalic anhydride was added thereto, heated to 95 ° C., reacted for about 6 hours, then cooled, and the acid value of the solid component was 85 mgKOH / g. A carboxylic acid-containing photosensitive resin (varnish A-3) having a solid content concentration of 65% was obtained.
樹脂合成例4(A−4)
エポキシ当量800、軟化点79℃のビスフェノールF型固型エポキシ樹脂400部をエピクロルヒドリン925部とジメチルスルホキシド462.5部を溶解させた後、攪拌下70℃で98.5%NaOH 81.2部を100分かけて添加した。添加後さらに70℃で3時間反応を行なった。次いで過剰の未反応エピクロルヒドリンおよびジメチルスルホキシドの大半を減圧下に留去し、副生塩とジメチルスルホキシドを含む反応生成物をメチルイソブチルケトン750部に溶解させ、さらに30%NaOH10部を加え70℃で1時間反応させた。反応終了後、水200部で2回水洗を行った。油水分離後、油層よりメチルイソブチルケトンを蒸留回収して、エポキシ当量290、軟化点62℃のエポキシ樹脂(a−1)370部を得た。
Resin synthesis example 4 (A-4)
After dissolving 925 parts of epichlorohydrin and 462.5 parts of dimethyl sulfoxide in 400 parts of bisphenol F type solid epoxy resin having an epoxy equivalent of 800 and a softening point of 79 ° C., 81.2 parts of 98.5% NaOH at 70 ° C. with stirring. Added over 100 minutes. After the addition, the reaction was further carried out at 70 ° C. for 3 hours. Next, most of the excess unreacted epichlorohydrin and dimethyl sulfoxide were distilled off under reduced pressure, and the reaction product containing the by-product salt and dimethyl sulfoxide was dissolved in 750 parts of methyl isobutyl ketone, and further 10 parts of 30% NaOH was added at 70 ° C. The reaction was carried out for 1 hour. After completion of the reaction, washing was performed twice with 200 parts of water. After oil-water separation, methyl isobutyl ketone was recovered from the oil layer by distillation to obtain 370 parts of an epoxy resin (a-1) having an epoxy equivalent of 290 and a softening point of 62 ° C.
次にジエチレングリコールモノエチルエーテルアセテート600gにジメチロールプロピオン酸442.2部(3.3モル)、無水メタクリル酸1031.8部(6.7モル)、メチルハイドロキノン3.0部、トリフェニルフォスフィン8.5部を加え95℃で8時間反応を行った。次いでジエチレングリコールモノエチルエーテルアセテート700g、エポキシ樹脂(a−1)2900部(10モル)、メチルハイドロキノン3.0部、カルビトールアセテート1000部を仕込み、90℃に加熱し撹拌し、反応混合物を溶解した。次いで、反応液を60℃に冷却し、トリフェニルフォスフィン16.7部を仕込み、100℃に加熱し、約32時間反応させた。次に、これに無水コハク酸786部(7.86モル)、カルビトールアセテート450部を仕込み、95℃に加熱し、約6時間反応し、冷却後、固形分の酸価が85mgKOH/gの固形分の濃度65%のカルボン酸含有感光性樹脂(ワニスA−4)を得た。 Next, 600 g of diethylene glycol monoethyl ether acetate, 442.2 parts (3.3 mol) of dimethylolpropionic acid, 1031.8 parts (6.7 mol) of methacrylic anhydride, 3.0 parts of methylhydroquinone, triphenylphosphine 8 .5 parts was added and reacted at 95 ° C. for 8 hours. Next, 700 g of diethylene glycol monoethyl ether acetate, 2900 parts (10 mol) of epoxy resin (a-1), 3.0 parts of methylhydroquinone, and 1000 parts of carbitol acetate were added and heated to 90 ° C. and stirred to dissolve the reaction mixture. . Next, the reaction solution was cooled to 60 ° C., charged with 16.7 parts of triphenylphosphine, heated to 100 ° C., and reacted for about 32 hours. Next, 786 parts (7.86 mol) of succinic anhydride and 450 parts of carbitol acetate were added to this, heated to 95 ° C., reacted for about 6 hours, and after cooling, the acid value of the solid content was 85 mgKOH / g. A carboxylic acid-containing photosensitive resin (varnish A-4) having a solid content of 65% was obtained.
樹脂合成例5(A−5)
ジエチレングリコールモノエチルエーテルアセテート700gにジメチロールプロピオン酸442.2部(3.3モル)、無水メタクリル酸1031.8部(6.7モル)、メチルハイドロキノン3.0部、トリフェニルフォスフィン8.5部を加え95℃で8時間反応を行った。次いでジエチレングリコールモノエチルエーテルアセテート950g、オルソクレゾールノボラック型エポキシ樹脂〔大日本インキ化学工業株式会社製、EPICLON N−695、軟化点95℃、エポキシ当量214、平均官能基数7.6〕2140g(グリシジル基数(芳香環総数):10.0モル)、メチルハイドロキノン3.0部、カルビトールアセテート1000部を仕込み、90℃に加熱し撹拌し、反応混合物を溶解した。次いで反応液を60℃まで冷却し、トリフェニルフォスフィン10.0部を仕込み、100℃に加熱し、約30時間反応を行った。次に、これにテトラヒドロ無水フタル酸1140.0部(7.5モル)を仕込み、95℃に加熱し、約6時間反応を行った。さらに、得られた反応液にグリシジルメタクリレート213.0g(1.5モル)を仕込み、115℃で4時間反応を行い、固型分の酸価が68mgKOH/gの固型分濃度65%のカルボン酸含有感光性樹脂(ワニスA−5)を得た。
Resin synthesis example 5 (A-5)
700 g of diethylene glycol monoethyl ether acetate, 442.2 parts (3.3 moles) of dimethylolpropionic acid, 1031.8 parts (6.7 moles) of methacrylic anhydride, 3.0 parts of methylhydroquinone, 8.5 parts of triphenylphosphine Part was added and reacted at 95 ° C. for 8 hours. Next, 950 g of diethylene glycol monoethyl ether acetate, orthocresol novolac type epoxy resin [manufactured by Dainippon Ink and Chemicals, EPICLON N-695, softening point 95 ° C., epoxy equivalent 214, average functional group number 7.6] 2140 g (glycidyl group number ( Total number of aromatic rings): 10.0 mol), 3.0 parts of methylhydroquinone and 1000 parts of carbitol acetate were charged, heated to 90 ° C. and stirred to dissolve the reaction mixture. Next, the reaction solution was cooled to 60 ° C., 10.0 parts of triphenylphosphine was charged, heated to 100 ° C., and reacted for about 30 hours. Next, 1140.0 parts (7.5 mol) of tetrahydrophthalic anhydride was added thereto, heated to 95 ° C., and reacted for about 6 hours. Further, 213.0 g (1.5 mol) of glycidyl methacrylate was added to the obtained reaction solution, and the reaction was performed at 115 ° C. for 4 hours. The solid content acid value was 68 mgKOH / g, and the solid content concentration was 65%. An acid-containing photosensitive resin (varnish A-5) was obtained.
比較合成例1(R−1)
ジエチレングリコールモノエチルエーテルアセテート600gにオルソクレゾールノボラック型エポキシ樹脂〔大日本インキ化学工業株式会社製、EPICLON N−695、軟化点95℃、エポキシ当量214、平均官能基数7.6〕1070g(グリシジル基数(芳香環総数):5.0モル)、アクリル酸360g(5.0モル)、及びハイドロキノン1.5gを仕込み、100℃に加熱攪拌し、均一な溶液を得た。次いで、トリフェニルホスフィン4.3gを仕込み、110℃に加熱して2時間反応後、120℃に昇温してさらに12時間反応を行った。得られた反応液に芳香族系炭化水素(ソルベッソ150)415g、テトラヒドロ無水フタル酸456.0g(3.0モル)を仕込み、110℃で4時間反応を行い、冷却後、固形分酸価89mgKOH/g、固形分65%の樹脂溶液を得た。これをワニスR−1とする。
Comparative Synthesis Example 1 (R-1)
Orthocresol novolac type epoxy resin (Dainippon Ink & Chemicals, EPICLON N-695, softening point 95 ° C., epoxy equivalent 214, average functional group number 7.6) 1070 g (number of glycidyl groups (fragrance) Total number of rings): 5.0 mol), 360 g of acrylic acid (5.0 mol), and 1.5 g of hydroquinone were charged, and heated and stirred at 100 ° C. to obtain a uniform solution. Next, 4.3 g of triphenylphosphine was charged, heated to 110 ° C. and reacted for 2 hours, then heated to 120 ° C. and reacted for further 12 hours. To the obtained reaction solution, 415 g of aromatic hydrocarbon (Sorvesso 150) and 456.0 g (3.0 mol) of tetrahydrophthalic anhydride were added and reacted at 110 ° C. for 4 hours. After cooling, the solid content acid value 89 mgKOH / G, a resin solution having a solid content of 65% was obtained. This is named Varnish R-1.
比較合成例2(R−2)
ジエチレングリコールモノエチルエーテルアセテート650gにオルソクレゾールノボラック型エポキシ樹脂〔大日本インキ化学工業株式会社製、EPICLON N−695、軟化点95℃、エポキシ当量214、平均官能基数7.6〕1070g(グリシジル基数(芳香環総数):5.0モル)、アクリル酸360g(5.0モル)、及びハイドロキノン1.5gを仕込み、100℃に加熱攪拌し、均一な溶液を得た。次いで、トリフェニルホスフィン4.3gを仕込み、110℃に加熱して2時間反応後、更にトリフェニルホスフィン1.6gを追加し、120℃に昇温してさらに12時間反応を行った。得られた反応液に芳香族系炭化水素(ソルベッソ150)525g、テトラヒドロ無水フタル酸608g(4.0モル)を仕込み、110℃で4時間反応を行った。さらに、得られた反応液にグリシジルメタクリレート142.0g(1.0モル)を仕込み、115℃で4時間反応を行い、固形分酸価77mgKOH/g、固形分65%の樹脂溶液を得た。これをワニスR−2とする。
Comparative Synthesis Example 2 (R-2)
Orthocresol novolac type epoxy resin [Dainippon Ink Chemical Co., Ltd., EPICLON N-695, softening point 95 ° C., epoxy equivalent 214, average functional group number 7.6] 1070 g (diglycol group number (fragrance) Total number of rings): 5.0 mol), 360 g of acrylic acid (5.0 mol), and 1.5 g of hydroquinone were charged, and heated and stirred at 100 ° C. to obtain a uniform solution. Next, 4.3 g of triphenylphosphine was charged, heated to 110 ° C. and reacted for 2 hours, and further 1.6 g of triphenylphosphine was added, and the temperature was raised to 120 ° C. and reacted for another 12 hours. To the obtained reaction solution, 525 g of aromatic hydrocarbon (Sorvesso 150) and 608 g (4.0 mol) of tetrahydrophthalic anhydride were charged and reacted at 110 ° C. for 4 hours. Furthermore, 142.0 g (1.0 mol) of glycidyl methacrylate was added to the obtained reaction solution and reacted at 115 ° C. for 4 hours to obtain a resin solution having a solid content acid value of 77 mgKOH / g and a solid content of 65%. This is named Varnish R-2.
比較合成例3(R−3)
エポキシ当量800、軟化点79℃のビスフェノールF型固型エポキシ樹脂400部をエピクロルヒドリン925部とジメチルスルホキシド462.5部を溶解させた後、攪拌下70℃で98.5%NaOH 81.2部を100分かけて添加した。添加後さらに70℃で3時間反応を行なった。次いで過剰の未反応エピクロルヒドリンおよびジメチルスルホキシドの大半を減圧下に留去し、副生塩とジメチルスルホキシドを含む反応生成物をメチルイソブチルケトン750部に溶解させ、さらに30%NaOH10部を加え70℃で1時間反応させた。反応終了後、水200部で2回水洗を行った。油水分離後、油層よりメチルイソブチルケトンを蒸留回収して、エポキシ当量290、軟化点62℃のエポキシ樹脂(a−1)370部を得た。エポキシ樹脂(a−1)2900部(10当量)、アクリル酸720部(10当量)、メチルハイドロキノン2.8部、カルビトールアセテート1950部を仕込み、90℃に加熱、攪拌し、反応混合物を溶解した。次いで、反応液を60℃に冷却し、トリフェニルフォスフィン16.7部を仕込み、100℃に加熱し、約32時間反応し、酸価が1.0mgKOH/g の反応物を得た。次に、これに無水コハク酸786部(7.86モル)、カルビトールアセテート423部を仕込み、95℃に加熱し、約6時間反応を行い、固形分酸価100mgKOH/g、固形分65%の樹脂溶液を得た。これをワニスR−3とする。
Comparative Synthesis Example 3 (R-3)
After dissolving 925 parts of epichlorohydrin and 462.5 parts of dimethyl sulfoxide in 400 parts of bisphenol F type solid epoxy resin having an epoxy equivalent of 800 and a softening point of 79 ° C., 81.2 parts of 98.5% NaOH at 70 ° C. with stirring. Added over 100 minutes. After the addition, the reaction was further carried out at 70 ° C. for 3 hours. Next, most of the excess unreacted epichlorohydrin and dimethyl sulfoxide were distilled off under reduced pressure, and the reaction product containing the by-product salt and dimethyl sulfoxide was dissolved in 750 parts of methyl isobutyl ketone, and further 10 parts of 30% NaOH was added at 70 ° C. The reaction was carried out for 1 hour. After completion of the reaction, washing was performed twice with 200 parts of water. After oil-water separation, methyl isobutyl ketone was recovered from the oil layer by distillation to obtain 370 parts of an epoxy resin (a-1) having an epoxy equivalent of 290 and a softening point of 62 ° C. 2900 parts (10 equivalents) of epoxy resin (a-1), 720 parts (10 equivalents) of acrylic acid, 2.8 parts of methylhydroquinone, and 1950 parts of carbitol acetate are heated and stirred at 90 ° C. to dissolve the reaction mixture. did. Next, the reaction solution was cooled to 60 ° C., charged with 16.7 parts of triphenylphosphine, heated to 100 ° C., and reacted for about 32 hours to obtain a reaction product having an acid value of 1.0 mg KOH / g. Next, 786 parts (7.86 mol) of succinic anhydride and 423 parts of carbitol acetate were added to this, heated to 95 ° C., reacted for about 6 hours, solid content acid value 100 mg KOH / g, solid content 65% A resin solution was obtained. This is named Varnish R-3.
実施例1
上記合成例の樹脂溶液を用い、表1に示す各種成分を各割合(質量部)にて配合し、攪拌機にて予備混合した後、3本ロールミルで混練し、光硬化性樹脂組成物を調製した。ここで、得られた光硬化性樹脂組成物の分散度をエリクセン社製グラインドメータによる粒度測定にて評価したところ15μm以下であった。
Using the resin solution of the above synthesis example, various components shown in Table 1 were blended in respective proportions (parts by mass), premixed with a stirrer, and then kneaded with a three-roll mill to prepare a photocurable resin composition. did. Here, it was 15 micrometers or less when the dispersion degree of the obtained photocurable resin composition was evaluated by the particle size measurement by the grindometer by an Erichsen company.
性能評価:
<最適露光量>
調製した上記光硬化性樹脂組成物各々を、銅厚35μmの回路パターン基板上に、当該基板をバフロール研磨後、水洗し、乾燥してからスクリーン印刷法により全面に塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させる。乾燥後、最大波長355nmの半導体レーザーを搭載した直接描画装置(オルボテック社製Paragon8000)、高圧水銀灯を搭載した直接描画露光機(超高圧水銀灯ランプ搭載直描露光機大日本スクリーン社製Marculex)または高圧水銀灯搭載の露光装置(水銀ショートアークランプ搭載ORC社製露光機)を用いてステップタブレット(KodakNo2)を介して露光し、現像(30℃、0.2MPa、1質量%炭酸ナトリウム水溶液)を60秒で行った際残存するステップタブレットのパターンが7段の時を最適露光量とした。
Performance evaluation:
<Optimum exposure amount>
Each of the prepared photocurable resin compositions is applied to the entire surface of a circuit pattern substrate having a copper thickness of 35 μm after polishing with buffalo, washed with water, dried, and then screen-printed to circulate at 80 ° C. Dry in an oven for 30 minutes. After drying, direct drawing device (Parbot 8000 made by Orbotech) equipped with a semiconductor laser with a maximum wavelength of 355 nm, direct drawing exposure machine equipped with a high-pressure mercury lamp (direct drawing exposure machine equipped with an ultra-high pressure mercury lamp lamp, Marculex made by Dainippon Screen) or high pressure Exposure through a step tablet (Kodak No 2) using an exposure apparatus equipped with a mercury lamp (ORC Co., Ltd. mounted with a mercury short arc lamp), and development (30 ° C., 0.2 MPa, 1 mass% sodium carbonate aqueous solution) for 60 seconds The amount of exposure of the step tablet remaining at the time of 7 was determined as the optimum exposure amount when the pattern was 7 steps.
<指触乾燥性>
調製した上記光硬化性樹脂組成物各々を、パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、80℃で20分乾燥し、室温まで放冷する。この基板にPET製ネガフィルムを当て、ORC社製(HMW680−GW20)で一分間減圧条件下圧着させ、その後ネガフィルムを剥がしたときのフィルムの張り付き状態を評価した。
<Dry touch dryness>
Each of the prepared photocurable resin compositions is applied onto the patterned copper foil substrate by screen printing, dried at 80 ° C. for 20 minutes, and allowed to cool to room temperature. A negative film made of PET was applied to this substrate, and pressure-bonded under reduced pressure with ORC (HMW680-GW20) for 1 minute, and then the sticking state of the film when the negative film was peeled off was evaluated.
○:フィルムは抵抗無く剥がれる。 ○: The film peels without resistance.
△:フィルムは剥がれるが塗膜に跡が少しついている。 (Triangle | delta): Although a film peels, a trace is attached to the coating film.
×:フィルムを剥がすときに抵抗があり、塗膜に跡がはっきりとついている。 X: There is resistance when the film is peeled off, and the coating film has a clear mark.
<最大現像ライフ>
調製した上記光硬化性樹脂組成物各々を、パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、80℃で乾燥する。当該乾燥開始後20分から80分までの間、10分おきに基板を取り出し室温まで放冷する。この基板に30℃の1%Na2CO3水溶液をスプレー圧2kg/cm2の条件で60秒間現像を行い、残渣が残らない最大許容乾燥時間を最大現像ライフとした。
<Maximum development life>
Each prepared said photocurable resin composition is apply | coated whole surface by screen printing on the copper foil board | substrate with which pattern formation was carried out, and it dries at 80 degreeC. From 20 minutes to 80 minutes after the start of the drying, the substrate is taken out every 10 minutes and allowed to cool to room temperature. The substrate was developed with a 1% Na 2 CO 3 aqueous solution at 30 ° C. under a spray pressure of 2 kg / cm 2 for 60 seconds, and the maximum allowable drying time in which no residue remained was defined as the maximum development life.
特性試験:
(塗膜特性評価基板の作製)
上記光硬化性樹脂組成物各々を、パターン形成された銅箔基板上にスクリーン印刷で全面塗布し、80℃で20分乾燥し、室温まで放冷する。この基板に最大波長355nmの半導体レーザーを搭載した直接描画装置をもちいて最適露光量でソルダーレジストパターンを露光し、30℃の1%Na2CO3水溶液をスプレー圧2kg/cm2の条件で60秒間現像を行い、レジストパターンを得た。この基板を、UVコンベア炉にて積算露光量1000mJ/cm2の条件で紫外線照射した後、150℃で60分加熱して硬化した。得られたプリント基板(評価基板)に対して以下のように特性を評価した。
Characteristic test:
(Preparation of coating film property evaluation board)
Each of the photocurable resin compositions is applied on the entire surface of a patterned copper foil substrate by screen printing, dried at 80 ° C. for 20 minutes, and allowed to cool to room temperature. This substrate is exposed to a solder resist pattern at an optimum exposure amount using a direct writing apparatus equipped with a semiconductor laser having a maximum wavelength of 355 nm, and a 1% Na 2 CO 3 aqueous solution at 30 ° C. is applied under a spray pressure of 2 kg / cm 2. Development was performed for 2 seconds to obtain a resist pattern. This substrate was irradiated with ultraviolet rays under a condition of an integrated exposure amount of 1000 mJ / cm 2 in a UV conveyor furnace, and then cured by heating at 150 ° C. for 60 minutes. The characteristics of the obtained printed circuit board (evaluation board) were evaluated as follows.
<はんだ耐熱性>
ロジン系フラックスを塗布した評価基板を、予め260℃に設定したはんだ槽に浸漬し、変性アルコールでフラックスを洗浄した後、目視によるレジスト層の膨れ・剥がれについて評価した。判定基準は以下のとおりである。
<Solder heat resistance>
The evaluation board | substrate which apply | coated the rosin-type flux was immersed in the solder tank previously set to 260 degreeC, and after washing | cleaning the flux with denatured alcohol, the swelling / peeling of the resist layer by visual observation was evaluated. The judgment criteria are as follows.
○*:10秒間浸漬を6回以上繰り返しても剥がれが認められない。 ○ * : No peeling is observed even after 10 seconds of immersion for 6 or more times.
○:10秒間浸漬を3回以上繰り返しても剥がれが認められない。 ○: No peeling is observed even if the immersion for 10 seconds is repeated 3 times or more.
△:10秒間浸漬を3回以上繰り返すと少し剥がれる。 (Triangle | delta): It peels for a while when immersion for 10 seconds is repeated 3 times or more.
×:10秒間浸漬を3回以内にレジスト層に膨れ、剥がれがある。 X: The resist layer swells and peels off within 3 times for 10 seconds.
<耐無電解金めっき性>
市販品の無電解ニッケルめっき浴及び無電解金めっき浴を用いて、ニッケル0.5μm、金0.03μmの条件でめっきを行い、目視によりレジスト層の剥がれの有無やめっきのしみ込みの有無を評価した後、テープピーリングによりレジスト層の剥がれの有無を評価した。判定基準は以下のとおりである。
<Electroless gold plating resistance>
Using a commercially available electroless nickel plating bath and electroless gold plating bath, plating is performed under the conditions of nickel 0.5 μm and gold 0.03 μm, and the presence or absence of peeling of the resist layer or penetration of the plating is visually confirmed. After the evaluation, the presence or absence of peeling of the resist layer was evaluated by tape peeling. The judgment criteria are as follows.
○*:染み込み、剥がれが見られない。 ○ * : No soaking or peeling is observed.
○:めっき後に少し染み込みが確認されるが、テープピール後は剥がれない。 ○: Slight penetration is confirmed after plating, but does not peel off after tape peeling.
△:めっき後にほんの僅かしみ込みが見られ、テープピール後に剥がれも見られる。 Δ: Slight penetration after plating and peeling after tape peel.
×:めっき後に剥がれが有る。 X: There is peeling after plating.
<耐アルカリ性>
評価基板を10vol%NaOH水溶液に室温で30分間浸漬し、染み込みや塗膜の溶け出しを目視にて確認し、さらにテープビールによる剥がれを確認した。
<Alkali resistance>
The evaluation substrate was immersed in a 10 vol% NaOH aqueous solution at room temperature for 30 minutes, and the infiltration and dissolution of the coating film were visually confirmed. Further, peeling by tape beer was confirmed.
○:染み込みや溶け出しが無く、さらにテープピール後に剥がれが確認されない。 ○: There is no penetration or dissolution, and no peeling is confirmed after the tape peel.
△:染み込みや溶け出しが無く、テープピール後、僅かに剥がれが認められる。 (Triangle | delta): There is no bleed-in and melt-out, and a slight peeling is recognized after a tape peel.
×:染み込み溶け出し、もしくはテープピール後に剥がれがある。 X: Permeation and dissolution, or peeling after tape peeling.
<PCT耐性>
評価基板を、PCT装置(エスペック株式会社製 HAST SYSTEM TPC−412MD)を用いて、121℃、飽和、0.2MPaの条件で50時間処理し、塗膜の状態を目視にて確認し、さらにテープピールによる剥がれを確認した。判定基準は以下の通りである。
<PCT resistance>
The evaluation substrate was treated for 50 hours under the conditions of 121 ° C., saturation and 0.2 MPa using a PCT device (HEST SYSTEM TPC-412MD manufactured by ESPEC CORP.), And the state of the coating film was visually confirmed, and further the tape The peeling due to the peel was confirmed. Judgment criteria are as follows.
○:染み込みや溶け出しが無く、さらにテープピール後に剥がれが確認されない。 ○: There is no penetration or dissolution, and no peeling is confirmed after the tape peel.
△:染み込みや溶け出しが無く、テープピール後、僅かに剥がれが認められる。 (Triangle | delta): There is no bleed-in and melt-out, and a slight peeling is recognized after a tape peel.
×:染み込み溶け出し、もしくはテープピール後に剥がれがある。 X: Permeation and dissolution, or peeling after tape peeling.
<PCBT耐性>
銅箔基板に代えてIPC B−25のクシ型電極Bクーポンを用い、上記の条件で評価基板を作製し、このクシ型電極にDC30Vのバイアス電圧を印加し、PCT装置(エスペック株式会社製 HAST SYSTEM TPC−412MD)を用いて、121℃、湿度97%の条件で96時間処理し、変色、マイグレーションの有無を評価した。判定基準は以下の通りである。
<PCBT resistance>
An evaluation board was produced under the above conditions using IPC B-25 comb-type electrode B coupon instead of the copper foil substrate, and a bias voltage of DC 30 V was applied to the comb-type electrode. System TPC-412MD) was used for 96 hours under the conditions of 121 ° C. and 97% humidity, and the presence or absence of discoloration or migration was evaluated. Judgment criteria are as follows.
○*:変色、マイグレーションが発生していないもの。 ○ * : No discoloration or migration.
○:ほんの僅か変色、マイグレーションが発生しているもの。 ○: Only slight discoloration or migration has occurred.
△:変色、マイグレーションが発生しているもの。 Δ: Discoloration or migration has occurred.
×:変色が著しく、マイグレーションが一方の電極から他の電極まで達しているもの。 X: Discoloration is remarkable and migration reaches from one electrode to the other.
<電気特性>
銅箔基板に代えてIPC B−25のクシ型電極Bクーポンを用い、上記の条件で評価基板を作製し、このクシ型電極にDC100Vのバイアス電圧を印加し、85℃、湿度85%の恒温恒湿槽にて1,000時間後のマイグレーションの有無を確認した。判定基準は以下のとおりである。
<Electrical characteristics>
An evaluation board was prepared under the above conditions using IPC B-25 comb electrode B coupon instead of copper foil substrate, a bias voltage of DC 100 V was applied to the comb electrode, and a constant temperature of 85 ° C. and humidity 85%. The presence or absence of migration after 1,000 hours was confirmed in a constant humidity bath. The judgment criteria are as follows.
○:全く変化が認められないもの。 ○: No change is observed at all.
△:ほんの僅か変化したもの。 Δ: Slightly changed.
×:マイグレーションが発生しているもの。 ×: Migration has occurred.
<塗膜の色>
硬化物の色を目視にて判断した。
<Color of coating film>
The color of the cured product was judged visually.
結果を表2に示す。
実施例2
<ドライフィルム評価>
実施例1において使用した組成物例1をメチルエチルケトンにて希釈し、PETフィルム上に塗布して80℃で30分乾燥し、厚さ20μmの感光性樹脂組成物層を形成した。さらにその上にカバーフィルムを貼り合わせてドライフィルムを得た。その後、カバーフィルムを剥がし、パターン形成された銅箔基板に、フィルムを熱ラミネートし、次いで、実施例1の塗膜特性評価に用いられた基板と同様の条件で露光した。露光後キャリアフィルムを剥がし、150℃の熱風乾燥器で60分加熱硬化を行い、試験基板を作製した。得られた硬化皮膜を有する試験基板について、前述した試験方法及び評価方法にて、各特性の評価試験を行なった。結果を表3に示す。
<Dry film evaluation>
Composition Example 1 used in Example 1 was diluted with methyl ethyl ketone, applied onto a PET film, and dried at 80 ° C. for 30 minutes to form a photosensitive resin composition layer having a thickness of 20 μm. Further, a cover film was laminated thereon to obtain a dry film. Then, the cover film was peeled off, the film was heat-laminated on the patterned copper foil substrate, and then exposed under the same conditions as the substrate used for the coating film property evaluation of Example 1. After the exposure, the carrier film was peeled off, and heat-cured for 60 minutes with a hot air dryer at 150 ° C. to prepare a test substrate. About the test substrate which has the obtained cured film, the evaluation test of each characteristic was done with the test method and evaluation method which were mentioned above. The results are shown in Table 3.
実施例1および2における表2および表3に示された結果からわかるように、本発明のカルボン酸含有感光性樹脂(A)を含有してなる光硬化性樹脂組成物は、従来の樹脂と比較して高感度であり、且つ、現像性、指触乾燥性、はんだ耐熱性、無電解金めっき耐性、耐アルカリ性、PCT耐性、PCBT耐性に優れ、レジスト用インキとして有用である。また、本発明の光硬化性樹脂組成物は、i線やh線などの単色光もしくはレーザー光に対しても、また高圧水銀灯などの紫外線光源に対しても、高感度で対応が可能なことが判る。 As can be seen from the results shown in Tables 2 and 3 in Examples 1 and 2, the photocurable resin composition containing the carboxylic acid-containing photosensitive resin (A) of the present invention is a conventional resin. In comparison, it has high sensitivity and is excellent in developability, dryness to touch, solder heat resistance, electroless gold plating resistance, alkali resistance, PCT resistance, and PCBT resistance, and is useful as a resist ink. In addition, the photocurable resin composition of the present invention can be applied with high sensitivity to monochromatic light such as i-line and h-line or laser light, and also to an ultraviolet light source such as a high-pressure mercury lamp. I understand.
Claims (8)
下記一般式(II)で表される構造を含むオキシムエステル系光重合開始剤、
下記一般式(III)で表される構造を含むアミノアセトフェノン系光重合開始剤、及び
下記一般式(IV)で表される構造を含むアシルホスフィンオキサイド系光重合開始剤からなる群から選ばれる1種、又は2種以上の混合物であることを特徴とする、請求項1に記載のアルカリ現像可能な光硬化性樹脂組成物:
R2は、フェニル基(炭素数1〜6のアルキル基、フェニル基若しくはハロゲン原子で置換されていてもよい)、炭素数1〜20の直鎖状、分岐状又は環状のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基またはベンゾイル基(炭素数が1〜6のアルキル基若しくはフェニル基で置換されていてもよい)を表し、
R3およびR4は、それぞれ独立に、炭素数1〜12の直鎖状、分岐状又は環状のアルキル基またはアリールアルキル基を表し、
R5およびR6は、それぞれ独立に、水素原子、炭素数1〜6の直鎖状、分岐状又は環状のアルキル基を表し、またはR5およびR6は結合して環状アルキルエーテル基を形成してもよく、
R7およびR8は、それぞれ独立に、炭素数1〜10の直鎖状、分岐状又は環状のアルキル基、アルコキシ基、シクロヘキシル基、シクロペンチル基、アリール基(ハロゲン原子、アルキル基、若しくはアルコキシ基で置換されていてもよい)、またはR−C(=O)−基(ここでRは、炭素数1〜20の炭化水素基)を表す。但し、R7およびR8の双方がR−C(=O)−基である場合を除く。 The (B) photopolymerization initiator is
An oxime ester photopolymerization initiator containing a structure represented by the following general formula (II):
1 selected from the group consisting of an aminoacetophenone photopolymerization initiator containing a structure represented by the following general formula (III) and an acylphosphine oxide photopolymerization initiator containing a structure represented by the following general formula (IV) The photocurable resin composition capable of alkali development according to claim 1, wherein the photocurable resin composition is a seed or a mixture of two or more kinds:
R 2 is a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), a linear, branched or cyclic alkyl group having 1 to 20 carbon atoms (one Which may be substituted with the above hydroxyl groups and may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, or Represents a benzoyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group);
R 3 and R 4 each independently represents a linear, branched or cyclic alkyl group or arylalkyl group having 1 to 12 carbon atoms,
R 5 and R 6 each independently represent a hydrogen atom, a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms, or R 5 and R 6 are bonded to form a cyclic alkyl ether group. You may,
R 7 and R 8 are each independently a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an alkoxy group, a cyclohexyl group, a cyclopentyl group, an aryl group (halogen atom, alkyl group, or alkoxy group). Or an R—C (═O) — group (where R is a hydrocarbon group having 1 to 20 carbon atoms). However, the case where both R 7 and R 8 are R—C (═O) — groups is excluded.
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JP2007289996A JP5376793B2 (en) | 2007-11-07 | 2007-11-07 | Photocurable resin composition, cured product pattern thereof, and printed wiring board comprising the cured product pattern |
TW097142869A TWI388927B (en) | 2007-11-07 | 2008-11-06 | A photohardenable resin composition and a hardened pattern, and a printed circuit board |
CN2008101726797A CN101430506B (en) | 2007-11-07 | 2008-11-06 | Photo-curing resin composition, design of cured composition and printed circuit board |
KR1020080109717A KR101451435B1 (en) | 2007-11-07 | 2008-11-06 | Photocurable resin composition, cured product pattern, and printed wiring board |
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JP2018019018A (en) * | 2016-07-29 | 2018-02-01 | ローム・アンド・ハース電子材料株式会社 | Method for plating non-conductive base material surface |
JP2018151628A (en) * | 2017-03-10 | 2018-09-27 | 日本化薬株式会社 | Photosensitive resin composition and cured product of the same, and article |
WO2018169036A1 (en) * | 2017-03-17 | 2018-09-20 | 大阪有機化学工業株式会社 | Photosensitive resin composition |
JP7153991B2 (en) * | 2019-03-12 | 2022-10-17 | 日本化薬株式会社 | Unsaturated group-containing polycarboxylic acid resin, photosensitive resin composition containing same, and cured product thereof |
WO2023218876A1 (en) * | 2022-05-13 | 2023-11-16 | 株式会社日本触媒 | Alkali-soluble resin, photosensitive resin composition, and cured product thereof |
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