JP5307554B2 - Multilayer ceramic capacitor - Google Patents
Multilayer ceramic capacitor Download PDFInfo
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- JP5307554B2 JP5307554B2 JP2008550070A JP2008550070A JP5307554B2 JP 5307554 B2 JP5307554 B2 JP 5307554B2 JP 2008550070 A JP2008550070 A JP 2008550070A JP 2008550070 A JP2008550070 A JP 2008550070A JP 5307554 B2 JP5307554 B2 JP 5307554B2
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- 239000003985 ceramic capacitor Substances 0.000 title claims abstract description 35
- 239000000919 ceramic Substances 0.000 claims abstract description 58
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 24
- 230000015556 catabolic process Effects 0.000 claims abstract description 12
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 9
- 230000005684 electric field Effects 0.000 claims description 6
- 229910052684 Cerium Inorganic materials 0.000 claims description 3
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 3
- 229910052691 Erbium Inorganic materials 0.000 claims description 3
- 229910052693 Europium Inorganic materials 0.000 claims description 3
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 3
- 229910052689 Holmium Inorganic materials 0.000 claims description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 3
- 229910052772 Samarium Inorganic materials 0.000 claims description 3
- 229910052771 Terbium Inorganic materials 0.000 claims description 3
- 229910052775 Thulium Inorganic materials 0.000 claims description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- 229910052727 yttrium Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 abstract description 9
- 239000000843 powder Substances 0.000 description 55
- 239000002002 slurry Substances 0.000 description 13
- 239000000203 mixture Substances 0.000 description 10
- 239000007858 starting material Substances 0.000 description 9
- 239000002994 raw material Substances 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 229910010413 TiO 2 Inorganic materials 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052765 Lutetium Inorganic materials 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- 229910017493 Nd 2 O 3 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- -1 carbonate compound Chemical class 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 238000010532 solid phase synthesis reaction Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Abstract
Description
この発明は、積層セラミックコンデンサに関するもので、特に、高い電界下で用いるのに適した積層セラミックコンデンサに関するものである。 The present invention relates to a product layer ceramic capacitors, particularly, to a product layer ceramic capacitor suitable for use under a high electric field.
積層セラミックコンデンサにおいては、たとえば250〜1000Vという高い電圧下において使用されるものがある。この場合、誘電体セラミック層の1層当たり、その厚みによっては、電界にして、25〜100kV/mmという高い電圧がかかる。そのため、このような中高圧用途の積層セラミックコンデンサでは、誘電体セラミック層が絶縁破壊する懸念がある。 Some multilayer ceramic capacitors are used under a high voltage of 250 to 1000 V, for example. In this case, depending on the thickness of each dielectric ceramic layer, a high voltage of 25 to 100 kV / mm is applied as an electric field. Therefore, there is a concern that the dielectric ceramic layer may be dielectrically broken in such a multilayer ceramic capacitor for medium and high voltage applications.
上述した背景からわかるように、中高圧用途に向けられる積層セラミックコンデンサにおいては、絶縁破壊電圧(BDV:単位はkV/mm)が重要な指標となる。BDVは、電界を上昇させていった際に絶縁破壊が生じる電界の値を言い、負荷試験における寿命とは全く異なる現象によるものである。 As can be seen from the background described above, the dielectric breakdown voltage (BDV: the unit is kV / mm) is an important index for multilayer ceramic capacitors intended for medium and high voltage applications. BDV refers to the value of an electric field that causes dielectric breakdown when the electric field is raised, and is due to a phenomenon that is completely different from the life in a load test.
この発明にとって興味ある誘電体セラミックとして、たとえば特許第3323801号公報(特許文献1)に記載されたものがある。特許文献1には、(Ca,Sr,Ba)(Zr,Ti)O3系の誘電体セラミックが開示されている。この誘電体セラミックは、耐還元性を有し、容量温度特性の直線性と品質係数Qの向上を図りながら、BDVの向上を達成している。For example, Japanese Patent No. 3323801 (Patent Document 1) discloses a dielectric ceramic of interest to the present invention. Patent Document 1 discloses a (Ca, Sr, Ba) (Zr, Ti) O 3 -based dielectric ceramic. This dielectric ceramic has reduction resistance and achieves an improvement in BDV while improving the linearity of capacity-temperature characteristics and the quality factor Q.
一般に、BDVの高い材料は、誘電率εが低い。上記特許文献1に記載された誘電体セラミックにあっても例外ではなく、120kV/mm以上のBDVを達成している一方、誘電率εが100前後と低い。このため、積層セラミックコンデンサの小型化にとって不利である。 In general, a material having a high BDV has a low dielectric constant ε. The dielectric ceramic described in Patent Document 1 is no exception and achieves a BDV of 120 kV / mm or more, while the dielectric constant ε is as low as about 100. For this reason, it is disadvantageous for miniaturization of the multilayer ceramic capacitor.
したがって、BDVおよび誘電率εの双方について高い値を与えることができる誘電体セラミックの開発が望まれる。
そこで、この発明の目的は、高い絶縁破壊電圧ばかりでなく、高い誘電率εを有する、誘電体セラミックを用いて構成される、中高圧用途に適した積層セラミックコンデンサを提供しようとすることである。 SUMMARY OF THE INVENTION An object of the present invention is to provide a multilayer ceramic capacitor suitable not only for a high dielectric breakdown voltage but also for a medium-to-high-voltage application, which has a high dielectric constant ε and is composed of a dielectric ceramic. .
この発明は、積層された複数の誘電体セラミック層および誘電体セラミック層間の特定の界面に沿って形成された内部電極を含む積層体と、内部電極の特定のものに電気的に接続されるように積層体の外表面上に形成された外部電極とを備える、積層セラミックコンデンサに向けられる。ここで、誘電体セラミックは、上述した技術的課題を解決するため、(Ba1−xCax)mTiO3(0.30≦x≦0.50、0.950≦m≦1.025)を主成分とし、さらに、Y、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、YbおよびLuから選ばれる少なくとも1種の希土類元素が、上記主成分100モル部に対して、1〜14モル部含まれるとともに、Mn、MgおよびSiを、それぞれ、上記主成分100モル部に対して、0.1〜3.0モル部、0.5〜5.0モル部および1.0〜5.0モル部含むことを特徴としている。また、内部電極はNiを主成分としている。 The present invention provides a multilayer body including a plurality of laminated dielectric ceramic layers and internal electrodes formed along a specific interface between the dielectric ceramic layers, and is electrically connected to a specific one of the internal electrodes. And an external electrode formed on the outer surface of the multilayer body. Here, in order to solve the technical problem described above , the dielectric ceramic is (Ba 1-x Ca x ) m TiO 3 (0.30 ≦ x ≦ 0.50, 0.950 ≦ m ≦ 1.025). And at least one rare earth element selected from Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu, 1 to 14 mol parts are contained with respect to 100 mol parts of the components, and Mn, Mg and Si are added in an amount of 0.1 to 3.0 mol parts, 0.5 to It is characterized by containing 5.0 mol parts and 1.0-5.0 mol parts . The internal electrode is mainly composed of Ni.
この発明は、特に、使用電界が25〜100kV/mmであり、保証絶縁破壊電圧が90kV/mmより大きい、積層セラミックコンデンサに対して有利に適用される。 The present invention is particularly advantageously applied to a multilayer ceramic capacitor in which the electric field used is 25 to 100 kV / mm and the guaranteed breakdown voltage is greater than 90 kV / mm.
この発明に係る積層セラミックコンデンサを構成するために用いられる誘電体セラミックにおいて、BamTiO3とCamTiO3とは、全率固溶せず、2相に分離することがある。ここで、BamTiO3は、単独では、その絶縁破壊電圧が低いが、誘電率εについては高い。他方、CamTiO3は、単独では、その絶縁破壊電圧が高いが、誘電率εについては低い。これらの存在モル比であるxを上記のように0.30≦x≦0.50の範囲に選ぶと、BamTiO3とCamTiO3との単なる平均ではなく、相乗効果により、両者の長所を併せ持った特性を引き出すことができる。その結果、この誘電体セラミックを用いて積層セラミックコンデンサを構成すれば、たとえば、誘電率εについては500以上の値を得ながら、90kV/mmより大きい絶縁破壊電圧を保証することができる。 In the dielectric ceramic used to constitute the multilayer ceramic capacitor according to the present invention, Ba m TiO 3 and Ca m TiO 3 may not be completely dissolved but may be separated into two phases. Here, Ba m TiO 3 alone has a low dielectric breakdown voltage, but has a high dielectric constant ε. On the other hand, Ca m TiO 3 alone has a high dielectric breakdown voltage, but has a low dielectric constant ε. When x, which is the molar ratio of these, is selected in the range of 0.30 ≦ x ≦ 0.50 as described above, it is not a mere average of Ba m TiO 3 and Ca m TiO 3 , It is possible to draw out characteristics that have both advantages. As a result, by forming the multilayer ceramic capacitor using Yuden ceramic of this, for example, the dielectric constant ε can while obtaining a value of 500 or more, to ensure 90 kV / mm is greater than the breakdown voltage.
また、この発明に係る積層セラミックコンデンサにおいて用いられる誘電体セラミックは、前述したように、所定量の希土類元素をさらに含んでいるので、BamTiO3とCamTiO3との相乗効果をより高めることができ、たとえば、500以上の誘電率εを実現しながら、100kV/mm以上の絶縁破壊電圧を保証することができる。 The dielectric ceramic for use in multilayer ceramic capacitor according to the present invention, as described above, since further includes a rare earth element of a predetermined amount, increase the synergy with Ba m TiO 3 and Ca m TiO 3 For example, it is possible to guarantee a dielectric breakdown voltage of 100 kV / mm or more while realizing a dielectric constant ε of 500 or more.
さらに、この発明に係る積層セラミックコンデンサにおいて用いられる誘電体セラミックは、前述したように、さらに、Mn、MgおよびSiを所定量含んでいるので、還元性雰囲気での焼成によっても、上述したような誘電率εおよび絶縁破壊電圧を得ることができる。したがって、この発明に係る積層セラミックコンデンサのように、Niを主成分とする内部電極を備える積層セラミックコンデンサにおいても、良好な信頼性を確保することができる。 Further, the dielectric ceramic used in the multilayer ceramic capacitor of the present invention, as described above, further, Mn, since the Mg and Si are Nde predetermined amount including, by firing in a reducing atmosphere, as described above A dielectric constant ε and a breakdown voltage can be obtained. Therefore, good reliability can be ensured even in a multilayer ceramic capacitor having an internal electrode mainly composed of Ni , such as the multilayer ceramic capacitor according to the present invention .
1 積層セラミックコンデンサ
2 積層体
3 誘電体セラミック層
4,5 内部電極
8,9 外部電極DESCRIPTION OF SYMBOLS 1 Multilayer
図1は、この発明の一実施形態による積層セラミックコンデンサ1を示す断面図である。 FIG. 1 is a cross-sectional view showing a multilayer ceramic capacitor 1 according to an embodiment of the present invention.
積層セラミックコンデンサ1は、積層体2を備えている。積層体2は、積層された複数の誘電体セラミック層3と、複数の誘電体セラミック層3間の特定の複数の界面に沿ってそれぞれ形成された複数の内部電極4および5とをもって構成されている。
The multilayer ceramic capacitor 1 includes a
内部電極4および5は、好ましくは、Niを主成分としている。内部電極4および5は、積層体2の外表面にまで到達するように形成されるが、積層体2の一方の端面6にまで引き出される内部電極4と他方の端面7にまで引き出される内部電極5とが、積層体2の内部において交互に配置されている。
The
積層体2の外表面であって、端面6および7上には、それぞれ、外部電極8および9が形成されている。外部電極8および9は、たとえば、Cuを主成分とする導電性ペーストを塗布し、焼付けることによって形成される。一方の外部電極8は、端面6上において、内部電極4と電気的に接続され、他方の外部電極9は、端面7上において、内部電極5と電気的に接続される。
外部電極8および9上には、はんだ付け性を良好にするため、必要に応じて、Niなどからなる第1のめっき膜10および11、さらにその上に、Snなどからなる第2のめっき膜12および13がそれぞれ形成される。
On the
このような積層セラミックコンデンサ1において、誘電体セラミック層3は、(Ba1−xCax)mTiO3(0.30≦x≦0.50、0.950≦m≦1.025)を主成分とする、誘電体セラミックから構成される。 In such a multilayer ceramic capacitor 1, the dielectric ceramic layer 3 is mainly composed of ( Ba 1−x Ca x ) m TiO 3 (0.30 ≦ x ≦ 0.50, 0.950 ≦ m ≦ 1.025). It is composed of a dielectric ceramic as a component.
この誘電体セラミックの主成分となる(Ba1−xCax)mTiO3において、BamTiO3とCamTiO3とは、全率固溶せず、2相に分離することがある。そして、BamTiO3については、単独では、絶縁破壊電圧(BDV)が低いが、誘電率εが高い。他方、CamTiO3については、単独では、BDVが高いが、εが低い。そこで、これら両者の存在モル比であるxを、上記のように、0.30≦x≦0.50の範囲に選ぶと、BamTiO3とCamTiO3との平均ではなく、両者の相乗効果により、両者の長所を併せ持った特性が得られることがわかった。たとえば、εについては500以上の値を得ながら、120kV/mm以上のBDVを実現することができ、最低でも、90kV/mmより大きいBDVを保証することができる。In this dielectric becomes ceramic main component (Ba 1-x Ca x) m TiO 3, and the Ba m TiO 3 and Ca m TiO 3, not all the solid solution, which may be separated into two phases. And, for the Ba m TiO 3, alone, although the breakdown voltage (BDV) is low, a high dielectric constant epsilon. On the other hand, for the Ca m TiO 3, alone, it is high BDV, epsilon is low. Therefore, the x is the presence molar ratio of these two, as described above, selecting the range of 0.30 ≦ x ≦ 0.50, rather than the average of the Ba m TiO 3 and Ca m TiO 3, both It was found that a characteristic that combines the advantages of both was obtained by the synergistic effect. For example, a BDV of 120 kV / mm or more can be realized while obtaining a value of 500 or more for ε, and a BDV greater than 90 kV / mm can be guaranteed at a minimum.
誘電体セラミック層3を構成する誘電体セラミックは、さらに、Y、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、YbおよびLuから選ばれる少なくとも1種の希土類元素を、上述の主成分100モル部に対して、1〜14モル部含む。このような希土類元素は、BamTiO3とCamTiO3とによる前述した相乗効果を高める作用を有していて、希土類元素を所定量加えることにより、高いBDVおよび高いεの両立レベルを大きく向上させることができる。より具体的には、たとえば、εについては500以上の値を得ながら、140kV/mm以上のBDVを実現することができ、最低でも、100kV/mm以上のBDVを保証することができる。 The dielectric ceramic constituting the dielectric ceramic layer 3 is further at least one selected from Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu. of a rare earth element, with respect to 100 moles of the main component parts of the above 1 to 14 molar parts including. Such a rare earth element has an effect of enhancing the above-described synergistic effect of Ba m TiO 3 and Ca m TiO 3, and by adding a predetermined amount of the rare earth element, the compatibility level of high BDV and high ε is greatly increased. Can be improved. More specifically, for example, a BDV of 140 kV / mm or more can be realized while obtaining a value of 500 or more for ε, and a BDV of 100 kV / mm or more can be guaranteed at a minimum.
誘電体セラミック層3を構成する誘電体セラミックは、さらに、Mn、MgおよびSiを、それぞれ、前述の主成分100モル部に対して、0.1〜3.0モル部、0.5〜5.0モル部および1.0〜5.0モル部含む。このように、Mn、MgおよびSiを所定量含むと、還元性雰囲気での焼成が要求される、Niを内部電極4および5の主成分とする積層セラミックコンデンサ1においても、高いBDVおよび高いεを得ることができ、良好な信頼性を確保することができる。
The dielectric ceramic constituting the dielectric ceramic layer 3 further contains Mn, Mg, and Si in an amount of 0.1 to 3.0 mol parts, 0.5 to 5 mol, respectively, with respect to 100 mol parts of the main component. 2.0 molar parts, and 1.0 to 5.0 molar parts including. Thus, when a predetermined amount of Mn, Mg, and Si is included, firing in a reducing atmosphere is required, and even in the multilayer ceramic capacitor 1 having Ni as a main component of the
上述したように、誘電体セラミック層3を構成する誘電体セラミックに、(Ba1−xCax)mTiO3からなる主成分の他に、希土類元素、ならびに/またはMn、MgおよびSiを含有させる場合、誘電体セラミック層3となるべきセラミックグリーンシートを成形するために用意されるスラリーにおいて、BamTiO3粉末およびCamTiO3粉末に加えて、希土類元素の酸化物または炭酸化合物等の粉末ならびに/またはMn、MgおよびSiの酸化物または炭酸化合物等の粉末が添加される。As described above, the dielectric ceramic constituting the dielectric ceramic layer 3 contains a rare earth element and / or Mn, Mg and Si in addition to the main component made of (Ba 1-x Ca x ) m TiO 3. In the slurry prepared for forming the ceramic green sheet to be the dielectric ceramic layer 3, in addition to the Ba m TiO 3 powder and the Ca m TiO 3 powder, a rare earth element oxide or a carbonate compound, etc. Powders and / or powders such as oxides or carbonates of Mn, Mg and Si are added.
この発明に係る誘電体セラミックは、BaおよびCaが、5モル%以下であればSrで置換されてもよく、また、Tiが、5モル%以下であれば、Zrおよび/またはHfで置換されてもよい。 The dielectric ceramic according to the present invention may be substituted with Sr if Ba and Ca are 5 mol% or less, and substituted with Zr and / or Hf if Ti is 5 mol% or less. May be.
次に、この発明による効果を確認するために実施した実験例について説明する。 Next, experimental examples carried out to confirm the effects of the present invention will be described.
[実験例1]
まず、主成分の出発原料として、固相法によって合成したBamTiO3粉末およびCamTiO3粉末を用意した。また、副成分の出発原料として、Y2O3、La2O3、CeO2、Pr6O11,Nd2O3、Sm2O3、Eu2O3、Gd2O3、Tb2O3、Ho2O3、Er2O3、Tm2O3、Yb2O3およびLu2O3といった希土類元素の酸化物粉末を用意するとともに、MgO、MnOおよびSiO2の各粉末を用意した。[Experiment 1]
First, Ba m TiO 3 powder and Ca m TiO 3 powder synthesized by a solid phase method were prepared as starting materials for the main component. Also, as starting materials for the component, Y 2 O 3, La 2 O 3,
次に、上記のように用意されたBamTiO3粉末およびCamTiO3粉末を、表1に示した組成となるように秤量し、これら粉末を混合するとともに、さらに、表1の組成となるように、副成分の出発原料粉末を添加した。表1において、希土類元素、Mg、MnおよびSiの各酸化物粉末の添加量は、主成分100モル部に対するモル部で示している。次いで、上述した混合粉末を、直径2mmのPSZ製メディアを用いて、ボールミルにより水中で16時間混合し、十分に分散させたスラリーを得た。このスラリーを乾燥し、誘電体セラミックの原料粉末を得た。Next, the Ba m TiO 3 powder and the Cam m TiO 3 powder prepared as described above were weighed so as to have the composition shown in Table 1, and these powders were mixed. As a result, the starting material powder of the accessory component was added. In Table 1, the addition amount of each rare earth element, Mg, Mn and Si oxide powder is shown in mole parts relative to 100 mole parts of the main component. Next, the above-mentioned mixed powder was mixed in water for 16 hours with a ball mill using PSZ media having a diameter of 2 mm to obtain a sufficiently dispersed slurry. The slurry was dried to obtain a dielectric ceramic raw material powder.
次に、上記原料粉末に、ポリビニルブチラール系バインダおよびエタノールを加えて、ボールミルにより混合し、セラミックスラリーを得た。このセラミックスラリーをドクターブレード法によってシート成形し、セラミックグリーンシートを得た。 Next, a polyvinyl butyral binder and ethanol were added to the raw material powder and mixed by a ball mill to obtain a ceramic slurry. This ceramic slurry was formed into a sheet by a doctor blade method to obtain a ceramic green sheet.
次に、上記セラミックグリーンシート上に、Niを主成分とする導電性ペーストをスクリーン印刷し、内部電極となるべき導電性ペースト膜を形成した。そして、この導電性ペースト膜が形成された11枚のセラミックグリーンシートを、導電性ペースト膜が引き出される側が互い違いになるように積層し、生の積層体を得た。 Next, a conductive paste mainly composed of Ni was screen-printed on the ceramic green sheet to form a conductive paste film to be an internal electrode. Then, the 11 ceramic green sheets on which the conductive paste film was formed were stacked so that the side from which the conductive paste film was drawn was staggered to obtain a raw laminate.
次に、生の積層体を、窒素雰囲気中において300℃の温度に加熱し、バインダを燃焼させた後、H2−N2−H2Oガスからなる還元性雰囲気中において、1250℃の温度で2時間焼成し、焼結した積層体を得た。この積層体は、セラミックグリーンシートが焼結して得られた誘電体層および導電性ペースト膜が焼結して得られた内部電極を備えているものである。Next, the raw laminate is heated to a temperature of 300 ° C. in a nitrogen atmosphere to burn the binder, and then a temperature of 1250 ° C. in a reducing atmosphere composed of H 2 —N 2 —H 2 O gas. Was fired for 2 hours to obtain a sintered laminate. This laminate includes a dielectric layer obtained by sintering a ceramic green sheet and an internal electrode obtained by sintering a conductive paste film.
次いで、積層体の両端面上に、ガラスフリットを含有するとともにCuを主成分とする導電性ペーストを塗布し、窒素雰囲気中において800℃の温度で焼付け、内部電極と電気的に接続された外部電極を形成し、さらに、外部電極の上に、Niめっき膜およびSnめっき膜を形成し、各試料に係る積層セラミックコンデンサを得た。 Next, a conductive paste containing glass frit and containing Cu as a main component is applied to both end faces of the laminate, and baked at a temperature of 800 ° C. in a nitrogen atmosphere, and externally connected to the internal electrodes. An electrode was formed, and a Ni plating film and a Sn plating film were further formed on the external electrode to obtain a multilayer ceramic capacitor according to each sample.
このようにして得られた積層セラミックコンデンサの外形寸法は、長さ2.0mm、幅1.2mmおよび厚さ0.5mmであり、内部電極間に介在する誘電体セラミック層の厚みは10μmであった。また、静電容量形成に有効な誘電体セラミック層の数は10であり、誘電体セラミック層1層当たりの対向電極面積は1.3mm2であった。The outer dimensions of the multilayer ceramic capacitor thus obtained were 2.0 mm in length, 1.2 mm in width and 0.5 mm in thickness. The thickness of the dielectric ceramic layer interposed between the internal electrodes was 10 μm. It was. Further, the number of dielectric ceramic layers effective for capacitance formation was 10, and the counter electrode area per dielectric ceramic layer was 1.3 mm 2 .
上記の各試料に係る積層セラミックコンデンサにおける誘電体セラミック層を構成する誘電体セラミックの誘電率εを、25℃、1kHz、1Vrmsの条件下で測定した積層セラミックコンデンサの静電容量から求めた。また、誘電体セラミック層を構成する誘電体セラミックの抵抗率ρを、25℃の温度にて300Vの電圧を60秒間チャージして測定した絶縁抵抗から求めた。また、積層セラミックコンデンサに、直流電圧を50V/秒の速さで昇圧しながら印加し、BDV(平均値)を求めた。The dielectric constant ε of the dielectric ceramic constituting the dielectric ceramic layer in the multilayer ceramic capacitor according to each of the above samples was determined from the capacitance of the multilayer ceramic capacitor measured under the conditions of 25 ° C., 1 kHz, and 1 V rms . Further, the resistivity ρ of the dielectric ceramic constituting the dielectric ceramic layer was determined from the insulation resistance measured by charging a voltage of 300 V for 60 seconds at a temperature of 25 ° C. In addition, a DC voltage was applied to the multilayer ceramic capacitor while being boosted at a rate of 50 V / second to obtain BDV (average value).
以上のようにして求められた誘電率ε、logρおよびBDVが表2に示されている。なお、表2には、誘電率εとBDVの両立を定量的に判断可能にするための指標としてのε×(BDV)2も示されている。Table 2 shows the dielectric constants ε, log ρ, and BDV obtained as described above. Table 2 also shows ε × (BDV) 2 as an index for making it possible to quantitatively determine the compatibility between the dielectric constant ε and BDV.
試料1〜6は、表1に示すように、希土類元素を含まない組成において、BamTiO3/CamTiO3比を変化させたものである。これら試料1〜6のうち、xが0.30〜0.50の範囲にある試料2〜5によれば、500以上のεおよび120kV/mm以上のBDVであって、中高圧対応の目安である90kV/mm超のBDVが保証される。これに対して、試料1では、xが0.30未満であるため、BDVが80kV/mmであり、中高圧対応の目安である90kV/mm超の保証ができなくなっている。他方、試料6では、εが500未満となり、積層セラミックコンデンサの小型化にとって不利となる。As shown in Table 1, Samples 1 to 6 are compositions in which the ratio of Ba m TiO 3 / Cam m TiO 3 is changed in a composition not including a rare earth element. Among these samples 1 to 6, according to
試料7〜12は、上述した試料1〜6と比較しながら、希土類元素としてのDyの添加の効果を評価したものである。試料7〜12によれば、試料1〜6と比較して、εおよびBDVがともに向上しており、このことは、ε×(BDV)2において顕著に現れている。なお、xが0.30〜0.50の範囲を外れると、試料7および12のように、希土類元素添加の効果が非常に小さくなる。
試料13〜17は、希土類元素Dyの添加量を変化させて、添加量による影響を評価するためのものである。希土類元素の添加量が1〜14モル部の範囲内において、希土類元素を含まない試料2〜5と同等またはそれ以上のεおよびBDVが得られている。
試料18〜21は、mを変化させたものである。mが0.950〜1.025の範囲を外れた試料18および21では、焼結性が悪くなり、ρが低下し、実用的でない。 Samples 18 to 21 are obtained by changing m. In samples 18 and 21 where m is out of the range of 0.950 to 1.025, the sinterability is deteriorated and ρ is lowered, which is not practical.
試料22〜33は、Mg、MnまたはSiの添加量を変化させたものである。Mgについて0.5〜5.0モル部の範囲を外れた試料22および25、Mnについて0.1〜3.0モル部の範囲を外れた試料20および29、ならびにSiについて1.0〜5.0モル部の範囲を外れた試料30および33では、ρが低下し、実用的ではなくなる。 Samples 22 to 33 are obtained by changing the addition amount of Mg, Mn, or Si. Samples 22 and 25 out of the range of 0.5 to 5.0 mole parts for Mg, Samples 20 and 29 out of the range of 0.1 to 3.0 mole parts for Mn, and 1.0 to 5 for Si In the samples 30 and 33 outside the range of 0.0 mol part, ρ decreases and becomes impractical.
試料34〜47は、希土類元素として、Dy以外のものでも適用可能であることを確認したものである。 Samples 34 to 47 have been confirmed to be applicable to other rare earth elements than Dy.
[実験例2]
実験例2は、実験例1における各試料と同じ組成としながら、出発原料の混合方法を変更した場合について実験したものである。すなわち、実験例2において作製した試料101〜147は、それぞれ、実験例1における試料1〜47と同じ組成である。[Experiment 2]
Experimental Example 2 is an experiment in which the starting material mixing method is changed while the composition is the same as each sample in Experimental Example 1. That is, the samples 101 to 147 produced in Experimental Example 2 have the same composition as Samples 1 to 47 in Experimental Example 1, respectively.
まず、主成分の出発原料として、BaCO3、CaCO3およびTiO2の各粉末、また、副成分の出発原料として、Y2O3、La2O3、CeO2、Pr6O11、Nd2O3、Sm2O3、Eu2O3、Gd2O3、Tb2O3、Ho2O3、Er2O3、Tm2O3、Yb2O3およびLu2O3といった希土類元素の酸化物粉末を用意するとともに、MgO、MnOおよびSiO2の各粉末を用意した。First, BaCO 3 , CaCO 3 and TiO 2 powders are used as starting materials for the main components, and Y 2 O 3 , La 2 O 3 , CeO 2 , Pr 6 O 11 , Nd 2 are used as starting materials for the subcomponents. Rare earth elements such as O 3 , Sm 2 O 3 , Eu 2 O 3 , Gd 2 O 3 , Tb 2 O 3 , Ho 2 O 3 , Er 2 O 3 , Tm 2 O 3 , Yb 2 O 3 and Lu 2 O 3 In addition to the oxide powders, MgO, MnO and SiO 2 powders were prepared.
次に、BaCO3粉末、TiO2粉末、希土類元素の酸化物粉末およびMgO粉末のみを秤量し、調合粉末Aを得た。同様に、別途、CaCO3粉末、TiO2粉末、希土類元素の酸化物粉末およびMgO粉末のみを秤量し、調合粉末Bを得た。このとき、調合粉末AのBa成分と調合粉末BのCa成分との含有比は、実験例1における表1に記載のxの値を満たすようにした。調合粉末AまたはBにおけるTi成分の含有比は、それぞれのBa成分またはCa成分と比較して実験例1における表1に記載のmの値を満たすようにした。希土類成分の含有比に関しては、実験例1における表1に記載の含有量を、調合粉末A:調合粉末B=1−x:xとなるよう分割した。Mg成分の含有比に関しても、希土類成分と同様の方法にて調合粉末AとBに分割した。Next, only BaCO 3 powder, TiO 2 powder, rare earth oxide powder, and MgO powder were weighed to obtain compounded powder A. Similarly, only CaCO 3 powder, TiO 2 powder, rare earth element oxide powder and MgO powder were weighed separately to obtain a blended powder B. At this time, the content ratio of the Ba component of the blended powder A and the Ca component of the blended powder B was set to satisfy the value of x described in Table 1 in Experimental Example 1. The content ratio of the Ti component in the prepared powder A or B was set to satisfy the value of m described in Table 1 in Experimental Example 1 as compared with each Ba component or Ca component. Regarding the content ratio of the rare earth component, the contents shown in Table 1 in Experimental Example 1 were divided so that the ratio of the blended powder A: the blended powder B = 1-x: x. Regarding the content ratio of the Mg component, it was divided into mixed powders A and B in the same manner as the rare earth component.
次いで、調合粉末AおよびBを、それぞれ、直径2mmのPSZ製メディアを用いて、ボールミルにより水中で16時間混合し、十分に分散させたスラリーAおよびBを得た。これらスラリーAおよびBを、それぞれ乾燥したものに対して、900〜1100℃の温度にて仮焼を行ない、それぞれ、仮焼粉末AおよびBを得た。 Next, the prepared powders A and B were mixed in water for 16 hours by a ball mill using PSZ media having a diameter of 2 mm to obtain fully dispersed slurries A and B, respectively. These slurries A and B were calcined at a temperature of 900 to 1100 ° C., respectively, to obtain calcined powders A and B, respectively.
次に、仮焼粉末Aと仮焼粉末Bとを混合させ、さらに副成分であるMnOおよびSiO2の粉末を、実験例1と同じ組成になるよう添加し、直径2mmのPSZ製メディアを用いて、ボールミルにより水中で16時間混合し、十分に分散させたスラリーを得た。このスラリーを乾燥し、各試料に係る誘電体セラミックの原料粉末を得た。Next, the calcined powder A and the calcined powder B are mixed, and powders of MnO and SiO 2 which are subcomponents are added so as to have the same composition as in Experimental Example 1, and a PSZ medium having a diameter of 2 mm is used. Then, it was mixed in water for 16 hours by a ball mill to obtain a sufficiently dispersed slurry. This slurry was dried to obtain a dielectric ceramic raw material powder according to each sample.
そして、上記各試料に係る誘電体セラミック原料粉末を用いて、実験例1の場合と同じ工程を経て、試料101〜147の各々に係る積層セラミックコンデンサを得た。これら各試料に係る積層セラミックコンデンサについて、実験例1の場合と同じ項目について評価を行なった。その結果を表3に示す。 And using the dielectric ceramic raw material powder which concerns on each said sample, the same process as the case of Experimental example 1 was followed, and the multilayer ceramic capacitor concerning each of the samples 101-147 was obtained. For the multilayer ceramic capacitors according to these samples, the same items as in Experimental Example 1 were evaluated. The results are shown in Table 3.
表3を表2と比較すればわかるように、実験例2において作製した試料のうち、少なくとも、この発明の範囲内の試料については、それぞれ、実験例1おいて作製した試料1〜47と比較して、より大きなBDVの値が得られている。 As can be seen by comparing Table 3 with Table 2, among the samples prepared in Experimental Example 2, at least the samples within the scope of the present invention are compared with Samples 1 to 47 prepared in Experimental Example 1, respectively. Thus, a larger BDV value is obtained.
[実験例3]
実験例3は、実験例1における各試料と同じ組成としながら、出発原料の混合方法を実験例2とはさらに別の方法に変更した場合について実験したものである。実験例3において作製した試料201〜247は、それぞれ、実験例1における試料1〜47と同じ組成である。[Experiment 3]
Experimental Example 3 is an experiment in which the starting material mixing method is changed to a method different from Experimental Example 2 while the composition is the same as each sample in Experimental Example 1. Samples 201 to 247 prepared in Experimental Example 3 have the same composition as Samples 1 to 47 in Experimental Example 1, respectively.
まず、主成分の出発原料として、BaCO3、CaCO3およびTiO2の各粉末、また、副成分の出発原料として、Y2O3、La2O3、CeO2、Pr6O11、Nd2O3、Sm2O3、Eu2O3、Gd2O3、Tb2O3、Ho2O3、Er2O3、Tm2O3、Yb2O3およびLu2O3といった希土類元素の酸化物粉末を用意するとともに、MgO、MnOおよびSiO2の各粉末を用意した。First, BaCO 3 , CaCO 3 and TiO 2 powders are used as starting materials for the main components, and Y 2 O 3 , La 2 O 3 , CeO 2 , Pr 6 O 11 , Nd 2 are used as starting materials for the subcomponents. Rare earth elements such as O 3 , Sm 2 O 3 , Eu 2 O 3 , Gd 2 O 3 , Tb 2 O 3 , Ho 2 O 3 , Er 2 O 3 , Tm 2 O 3 , Yb 2 O 3 and Lu 2 O 3 In addition to the oxide powders, MgO, MnO and SiO 2 powders were prepared.
次に、BaCO3粉末、CaCO3粉末、TiO2粉末、希土類元素の酸化物粉末およびMgO粉末のみを秤量し、MnおよびSiを除いては実験例1の場合と同じ組成となるよう調合し、調合粉末を得た。Next, only BaCO 3 powder, CaCO 3 powder, TiO 2 powder, rare earth element oxide powder and MgO powder are weighed and prepared to have the same composition as in Experimental Example 1 except for Mn and Si, A blended powder was obtained.
この調合粉末を、直径2mmのPSZ製メディアを用いて、ボールミルにより水中で16時間混合し、十分に分散させたスラリーを得た。このスラリーを乾燥したものに対して、900〜1100℃の温度にて仮焼を行ない、仮焼粉末を得た。 This prepared powder was mixed in water for 16 hours with a ball mill using PSZ media having a diameter of 2 mm to obtain a sufficiently dispersed slurry. The dried slurry was calcined at a temperature of 900 to 1100 ° C. to obtain a calcined powder.
次に、仮焼粉末に、副成分であるMnOおよびSiO2の各粉末を、実験例1の場合と同じ組成になるよう添加し、直径2mmのPSZ製メディアを用いて、ボールミルにより水中で16時間混合し、十分に分散させたスラリーを得た。このスラリーを乾燥し、各試料に係る誘電体セラミックの原料粉末を得た。Next, MnO and SiO 2 powders, which are subcomponents, are added to the calcined powder so as to have the same composition as in Experimental Example 1, and using a PSZ media having a diameter of 2 mm, Mixing for a time, a well dispersed slurry was obtained. This slurry was dried to obtain a dielectric ceramic raw material powder according to each sample.
そして、上記各試料に係る誘電体セラミック原料粉末を用いて、実験例1の場合と同じ工程を経て、試料201〜247の各々に係る積層セラミックコンデンサを得た。これら各試料に係る積層セラミックコンデンサの試料について、実験例1の場合と同じ項目について評価を行なった。その結果を表4に示す。 And the dielectric ceramic raw material powder which concerns on each said sample was used, the same process as the case of Experimental example 1 was followed, and the multilayer ceramic capacitor concerning each of the samples 201-247 was obtained. For the multilayer ceramic capacitor samples according to these samples, the same items as in Experimental Example 1 were evaluated. The results are shown in Table 4.
表4を表2と比較すればわかるように、実験例3において作製した試料のうち、少なくとも、この発明の範囲内の試料については、それぞれ、実験例1おいて作製した試料1〜47と比較して、より大きなBDVの値が得られている。 As can be seen by comparing Table 4 with Table 2, among the samples prepared in Experimental Example 3, at least the samples within the scope of the present invention are compared with Samples 1 to 47 prepared in Experimental Example 1, respectively. Thus, a larger BDV value is obtained.
Claims (2)
前記内部電極の特定のものに電気的に接続されるように前記積層体の外表面上に形成された外部電極と
を備え、
前記誘電体セラミック層は、(Ba1−xCax)mTiO3(0.30≦x≦0.50、0.950≦m≦1.025)を主成分とし、さらに、Y、La、Ce、Pr、Nd、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、YbおよびLuから選ばれる少なくとも1種の希土類元素を、前記主成分100モル部に対して、1〜14モル部含むとともに、Mn、MgおよびSiを、それぞれ、前記主成分100モル部に対して、0.1〜3.0モル部、0.5〜5.0モル部および1.0〜5.0モル部含む、誘電体セラミックからなり、
前記内部電極はNiを主成分とする、
積層セラミックコンデンサ。 A laminate comprising a plurality of laminated dielectric ceramic layers and internal electrodes formed along a particular interface between the dielectric ceramic layers;
An external electrode formed on an outer surface of the laminate so as to be electrically connected to a specific one of the internal electrodes;
With
The dielectric ceramic layer is mainly composed of (Ba 1-x Ca x ) m TiO 3 (0.30 ≦ x ≦ 0.50, 0.950 ≦ m ≦ 1.025), and further, Y, La At least one rare earth element selected from Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu, Mn, Mg and Si are contained in 0.1 to 3.0 mol parts, 0.5 to 5.0 mol parts, and 1.0 to 5. mol, respectively, with respect to 100 mol parts of the main component. It consists of a dielectric ceramic containing 0 mole part ,
The internal electrode has Ni as a main component,
Multilayer ceramic capacitor.
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