JP5273950B2 - Flowmeter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flowmeter allowing a fluid measurement part to be detached without breaking a sensor by protecting a sensor part, in a flowmeter allowing a fluid measurement part to be detached. <P>SOLUTION: This flowmeter is provided with a sensor unit 9 having a flow sensor 6 detecting a measurement object fluid, and measuring a flow rate of the measurement object fluid based on the detection result of a flow velocity sensor 6 and is also provided with a body part 9a forming a main passage 9b for running the measurement object fluid therethrough, and having diversion passages 9d and 9e diverging the measurement object fluid, and a plate-like passage structure part 3 arranged between the body part 9a and the sensor unit 9, covering the flow sensor 6, and communicating with the diversion passages 9d and 9e. The passage structure part 3 and the sensor unit 9 are constituted detachably from the body part 9a. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  The present invention relates to a flow meter for measuring a gas flow rate, and more particularly to a flow meter used for measuring a gas flow rate in a pipe in a factory or the like.

  As shown in FIG. 8, the flow channel structure used in the conventional flowmeter is measured at the center portion with a base 90 integrally formed with a sub flow channel block 92 that forms a sub flow channel on the outer peripheral surface of the main flow pipe 91. A seal plate 94 which has a hole 93 and seals the opening of the sub-flow channel block 92; a circuit board 95 which has a flow rate detecting element inserted into the measurement hole 93 on the lower surface and is stacked on the seal plate 94; The cover 96 covers the opening of the block 92. The seal plate 94 and the circuit board 95 are fixed to the auxiliary flow path block 92 via screws (see, for example, Patent Document 1).

JP 2006-308518 A

  However, in the flow meter disclosed in Patent Document 1 described above, the flow rate detection element that is a sensor is exposed, and the sensor is damaged when the sensor part is removed from the sub-flow path block for adjustment during maintenance or abnormality. There was a problem of damage.

  The present invention has been made to solve the above-described problems, and in a flow meter that can be removed by the fluid measurement unit, the flow rate that can remove the fluid measurement unit without damaging the sensor by protecting the sensor portion. The purpose is to provide a total.

The flowmeter according to the present invention includes a sensor that detects a measurement fluid, forms a fluid measurement unit that measures a flow rate of the fluid to be measured based on a detection result of the sensor, and a main channel through which the fluid to be measured flows, A body portion including a first branch channel and a second branch channel for branching a fluid to be measured, and a plate-like member provided between the body unit and the fluid measurement unit, and is divided through the first branch channel. A first flow path formed on the surface of the body portion side into which the measured fluid to be measured flows, a second flow path formed on the surface of the fluid measurement section side, the first flow path, and the A first communication hole portion communicating with the second flow channel, a third flow channel formed on a surface of the body portion side through which the fluid to be measured flows out to the main flow channel through the second branch flow channel, A second communication hole portion that communicates the second flow path and the third flow path, and the surface on the body portion side is the first. A flow path structure portion having a partition member that is divided into a flow path and a third flow path, wherein the sensor is disposed to face the second flow path, and the first flow path and the third flow path The flow path includes a commutator that adjusts the flow of the fluid to be measured, and the second flow path includes a vector adjustment member that equalizes a flow velocity vector of the fluid to be measured, and the flow path structure with respect to the body portion And the fluid measuring unit are detachable .

  According to the present invention, the fluid measuring unit that measures the flow rate of the fluid to be measured based on the detection result of the sensor that detects the fluid to be measured, and the main flow path through which the fluid to be measured flows are formed, and the first fluid is divided A first flow path formed on a surface of the body section side into which the fluid to be measured flows, which is flown through the first branch flow path, and a body section including a first flow path and a second flow path. The fluid to be measured passes through the second flow channel formed on the surface on the measurement unit side, the first communication hole that communicates the first flow channel and the second flow channel, and the second flow channel. A flow channel structure having a third flow channel formed on the surface of the body portion flowing out to the surface, a second flow channel, and a second communication hole communicating the third flow channel. Provided between the measurement units, the sensor is placed facing the second flow channel, and the flow channel structure unit and fluid measurement unit can be attached to and detached from the body unit. Since it is configured, even if you remove the fluid measuring portion from the body portion, and functions as a lid channel structure unit to the sensor, the sensor can be prevented from being damaged or scratched exposed. Also, the first flow path, the second flow path, the third flow path, the first communication hole, and the second communication hole are provided, the flow path is folded back, and the flow path through which the fluid to be measured flows is provided long. With this configuration, the fluid to be measured can be sufficiently rectified, accurate flow measurement can be realized, and the fluid measuring unit can be further downsized.

  According to this invention, the partition member that divides the flow path structure portion into the first flow path and the third flow path is provided on the surface on the body portion side, and the first flow path and the third flow path are respectively covered. Since the commutator for adjusting the flow of the measurement fluid is provided, the measured fluid rectified in the first flow path flows out into the third flow path, and the measured fluid rectified in the third flow path However, it is possible to obtain a rectification effect in the backflow that flows out to the first flow path, and to accurately measure the flow rate of the fluid to be measured.

Embodiment 1 FIG.
1 is an exploded perspective view of a flow meter according to Embodiment 1 of the present invention. As shown in FIG. 1, the flow meter 1 includes a filter 2, a flow path structure portion 3, a metal mesh 4, a rubber packing 5 having an elliptical fracture surface, a flow rate sensor 6, a measurement portion 7, support plates 7 a and 7 b, and a display portion 8. The sensor unit (fluid measuring unit) 9 is provided.
The filter 2 is detachably attached to the flow path structure portion 3 and removes dust (foreign matter) of the fluid to be measured introduced from the body portion described later. In addition, you may comprise without providing a filter as needed. The flow path structure portion 3 is fixed to the support plate 7a with a double-sided tape, an adhesive, or the like, reduces the flow velocity of the fluid to be measured introduced from the body portion, and rectifies the drift or turbulence of the fluid to be measured, thereby controlling the flow rate sensor 6. It is the adjustment body formed in the ellipse to introduce into. In addition, by providing the flow path structure portion 3, it functions as a lid that covers the flow rate sensor 6 when the sensor unit 9 is removed from the body portion, and the flow rate sensor 6 portion of the sensor unit 9 is exposed and damaged. Can be prevented. In addition to being attached to the support plate 7a with a double-sided tape or an adhesive, the flow path structure unit 3 may be attached so as not to easily fall off the support plate 7a by other methods.

  The metal mesh 4 is a rectifying element for rectifying the drift or turbulence of the fluid to be measured before being introduced into the flow sensor 6, and a plurality of pieces are arranged on the upstream side of the flow sensor 6 at regular intervals. In consideration of the flow velocity of the fluid to be measured supplied to the flow sensor, the number of wire meshes 4 to be arranged, the roughness of the meshes, or the arrangement interval may be changed. The rubber packing 5 is an elastic body and is formed in an ellipse like the flow path structure 3. The flow rate sensor 6 is disposed at the center of the support plate 7a of the sensor unit 9, and the support plate 7b is formed with an elliptical hole similar to the flow path structure 3 and the rubber packing 5. Although the flow path structure 3 and the sensor unit 9 can be attached to and detached from the body part, the flow path structure 3 is not easily removed because it is fixed to the support plate 7a of the sensor unit 9 with a double-sided tape or the like. The flow sensor 6 detects the flow rate of the fluid to be measured rectified by the wire mesh 4 and outputs a detection signal to the measuring unit 7 from a lead wire (not shown) or the like.

FIG. 2 is a front view of the sensor unit of the flowmeter according to Embodiment 1 of the present invention.
The measuring unit 7 has a connector 71 for inserting a network cable or the like for connecting to an external device. The support plates 7a and 7b are provided with screws 72 that are fixed when the sensor unit 9 and the body portion 9a are connected. By screwing the sensor unit 9 and the body portion 9a with the screw 72, the rubber packing 5 comes into contact with the mounting surfaces of the support plate 7a and the body portion 9a to maintain airtightness. The display unit 8 includes a setting switch 81 that performs setting input, and a display 82 that displays the setting content of the setting switch 81 and the like. In the example of FIG. 2, the case where the sensor unit 9 is equipped with the display unit 8 is shown, but a configuration without the display unit may be used.

  FIG. 3 is a diagram showing attachment of the sensor unit according to Embodiment 1 of the present invention to the body portion. The body portion 9a is composed of a main channel 9b, an orifice 9c, a branch channel (first branch channel) 9d, and a branch channel (second branch channel) 9e. Moreover, the arrow described in the main flow path 9b has shown the flow velocity vector of the to-be-measured fluid which flows through the main flow path 9b. The branch channels 9d and 9e are formed so as to communicate with the main channel 9b before and after the orifice 9c. Further, the diversion channels 9d and 9e are formed at positions parallel to the flow velocity vector of the fluid to be measured indicated by arrows in FIG. The fluid to be measured is diverted to the flow channel structure 3 through the flow dividing channel 9d by the differential pressure generated in the orifice 9c, and the fluid to be measured that has passed through the flow channel structural unit 3 flows out to the main flow channel 9b through the flow dividing channel 9e. To do. In the following description, the flow of the fluid to be measured traveling from the branch channel 9d toward the flow channel structure 3 is referred to as forward flow, and the flow of the fluid to be measured from the flow channel 9e toward the flow channel structure 3 is referred to as reverse flow.

4 is a perspective view of a flow path structure portion of the flowmeter according to the first embodiment of the present invention, FIG. 4 (a) is a configuration of a body portion side surface, FIG. 4 (b) is a configuration of a measurement portion side surface, FIG. 4C shows a view in which the channel structure is attached to the hole of the support plate.
The flow path structure 3 is die-cut using resin or the like, and as shown in FIG. 4A, a substantially S-shaped partition wall (partition member) 10 is provided at the center of the body side surface 3a. The upstream channel (first channel) 11, the downstream channel (third channel) 12, and the buffer recesses 13 and 14 partitioned by the partition wall 10. An outer peripheral wall 15 is formed on the outer peripheral portion of the body side surface 3a so as to be connected to the partition wall 10, and the fluid to be measured introduced when the sensor unit 9 is attached to the body portion 9a. Prevent leakage.

  4A, the area of the downstream flow path 12 may be configured to be smaller than that of the upstream flow path 11, or the area of the upstream flow path 11 and the downstream flow path 12 may be configured. You may comprise so that the area of may become equal. In the configuration shown in FIG. 4A, when measuring a fluid to be measured in a reverse flow, the introduced fluid to be measured is rectified in the downstream flow path 12 and then introduced into the flow sensor 6. Since the fluid to be measured introduced into the flow path 12 is a small amount compared to the measurement in the forward flow direction, the area of the downstream flow path 12 is made smaller than that of the upstream flow path 11. If necessary, the area of the downstream channel 12 need not be smaller than the area of the upstream channel 11.

  In the upstream flow path 11, three rectifying pieces (commutators) 11 a, 11 b and 11 c having different lengths and a fluid to be measured are introduced from the body side surface 3 a to the measurement unit side surface (second flow path) 3 b. A channel bending hole (first communication hole) 11d is formed. The rectifying piece 11 a is connected to the outer peripheral wall 15, and is configured such that the height of the rectifying pieces 11 b and 11 c is higher than the rectifying pieces 11 b and 11 c in order to enhance the buffer effect by the buffer recess 13. In addition, the length of each rectifying piece is configured to satisfy 11a <11b <11c so that the fluid to be measured can communicate between the respective rectifying pieces 11a, 11b, and 11c. By making the length of the rectifying piece 11a the shortest, the inlet of the flow path from the buffer recess 13 toward the flow path bending hole 11b widens, and the rectifying pieces 11a, 11b, and 11c formed in the upstream flow path 11 are partitioned. The fluid to be measured can be made to flow as uniformly as possible through each of the three flow paths, and a rectifying effect can be obtained.

  Similarly, the downstream flow path 12 has three flow straightening pieces (commutators) 12a, 12b and 12c having different lengths and flow path bending holes (first flow paths) for introducing the fluid to be measured from the measurement unit side surface 3b to the body side surface 3a. 2 communication holes) 12d. The rectifying piece 12 a is connected to the outer peripheral wall 15, and is configured such that the height of the rectifying pieces 12 b and 12 c is higher than that of the rectifying pieces 12 b and 12 c in order to enhance the buffer effect by the buffer recess 14. Further, the length of each rectifying piece is configured to satisfy 12a <12b <12c so that the fluid to be measured can communicate between the respective rectifying pieces 12a, 12b, and 12c. By making the length of the rectifying piece 12a the shortest, the inlet of the flow path extending from the buffer recess 14 toward the flow path bending hole 12b widens, and the rectifying pieces 12a, 12b and 12c formed in the downstream flow path 12 are partitioned. The fluid to be measured can be made to flow as uniformly as possible through each of the three flow paths, and a rectifying effect can be obtained.

  The downstream channel 12 is different from the upstream channel 11 in that the rectifying pieces 12b and 12c are formed so as to straddle the channel folding hole 12d, and the channel folding hole 12d is divided into three. . The flow path bending hole can improve the flow straightening effect of the fluid to be measured more if it is not divided by the flow straightening piece, but the flow path bending hole of the downstream flow path 12 has little influence on the flow rate measurement of the fluid to be measured in the forward flow direction. The rectifying pieces 12b and 12c may be formed so as to straddle 12d.

  The fluid to be measured that has flowed into the buffer recesses 13 and 14 from the branch channels 9d and 9e is temporarily stored (buffered) in the buffer recesses 13 and 14. Thereby, since the flow velocity of the fluid to be measured is lowered, the amount of dust taken into the filter 2 is increased. That is, by reducing the flow rate of the fluid to be measured at the buffer recesses 13 and 14, the dustproof effect of the filter 2 is improved as compared with the case where the flow rate of the fluid to be measured is maintained.

  Next, the structure of the measurement part side surface 3b is demonstrated using FIG.4 (b). Flow path bending holes 11d and 12d shown in the description of FIG. 4A are formed at both ends of the measurement unit side surface 3b. In addition, at the center of the measurement unit side surface 3b, four wire mesh locking pieces 16, 2 wall portions (vector adjustment members) 17a, 17b, and two sill pieces (vector adjustment members) 18a, 18b is provided. In the present embodiment, the measurement range of the forward flow fluid measurement is wider than the measurement range of the forward flow fluid measurement, and thus the wire mesh is provided in the flow path in order to obtain a further rectifying effect.

By inserting the wire mesh 4 between the ends of the sill pieces 18a and 18b on the flow path bending hole 11d side and the four wire mesh locking pieces 16, as shown in FIG. A plurality of wire meshes 4 are arranged at regular intervals. The walls 17a and 17b and the sill pieces 18a and 18b can uniformly adjust the flow velocity vector of the fluid to be measured introduced into the flow sensor 6 and can obtain a rectifying effect. The sill pieces 18a, 18b are formed so as to straddle the flow path bending hole 12d. The distance between the flow sensor 6 and the flow path wall facing the flow sensor 6 is about 1 mm in this embodiment, and a rectifying effect can be obtained by narrowing the flow path width through which the fluid to be measured flows. In addition, the fluid can be measured with higher accuracy.
[Reference 1]
JP 2007-121036 A

  Next, the flow sensor 6 will be described. As the flow sensor 6, for example, the one having a semiconductor diaphragm configuration disclosed by the applicant of the present application in the specification of Japanese Patent Application No. 3-106528 can be used. FIG. 5 is a diagram showing the configuration of the flow sensor of the flow meter according to the first embodiment of the present invention. FIG. 5 (a) is a perspective view of the flow sensor, and FIG. 5 (b) is a diagram of FIG. 5 (a). It is AA sectional drawing. The flow sensor 6 has a heater 61, an upstream temperature sensor 62, a downstream temperature sensor 63, an ambient temperature sensor on the surface of a base 60 made of a base material such as a silicon chip having a side of 1.7 mm and a thickness of 0.5 mm. 64 is formed as a thin film using a pattern such as platinum and covered with an insulating film layer 65. The resistance value of the platinum thin film changes depending on the temperature and functions as a resistance temperature detector.

  The heater 61 is disposed at the center of the base 60, an upstream temperature sensor 62 is disposed upstream of the heater 61 with respect to the fluid flow direction, and a downstream temperature sensor 63 is disposed downstream of the opposite side. Yes. In addition, the ambient temperature sensor 64 is disposed in the upstream peripheral portion of the base 60. In the central portion of the base 60, a part of the base material is removed by a process such as anisotropic etching to form a cavity (recessed space) 66, and a heater 61, an upstream temperature sensor 62, and a downstream temperature are formed. The sensor 63 is formed on a diaphragm 67 that is thermally insulated from the base 60.

  The operation principle of the flow sensor 6 is that the fluid is heated by the heater 61 so as to be higher than the fluid temperature measured by the ambient temperature sensor 64 by a certain temperature, for example, several tens of degrees centigrade, and a predetermined temperature distribution is generated. By measuring with the upstream temperature sensor 62 and the downstream temperature sensor 63, the fluid flow rate is measured. When the fluid is stationary, the temperature distribution obtained by the upstream temperature sensor 62 and the downstream temperature sensor 63 is symmetric. However, when the fluid is flowing, the symmetry is lost and compared with the upstream temperature sensor 62. Thus, the temperature obtained by the downstream temperature sensor 63 increases. By detecting this temperature difference with a bridge circuit, a fluid flow rate can be obtained based on physical properties such as the thermal conductivity of the fluid.

  The flow sensor 6 is not only small in size but also has the features of high sensitivity analysis, high speed response and low power consumption because it employs an extremely thin diaphragm structure that is thermally insulated. Moreover, since the arrangement of the upstream temperature sensor 62 and the downstream temperature sensor 63 with the heater 61 interposed therebetween is symmetrical, not only forward flow but also reverse flow can be measured.

FIG. 6 is a diagram showing the operation of the flow meter according to Embodiment 1 of the present invention. FIG. 6A is a front view of the side surface of the body portion of the flow path structure portion showing the forward flow of the fluid to be measured, and FIG. 6B is a flow path structure portion showing the forward flow of the fluid to be measured. It is a front view of the measurement part side. In FIG. 6, the solid line arrows indicate the flow of the fluid to be measured before the flow rate measurement, and the broken line arrows indicate the flow of the fluid to be measured after the flow rate measurement.
First, the fluid to be measured introduced from the branch channel 9d indicated by the solid line arrow in FIG. 6A to the buffer recess 13 has a certain angle spread and is introduced into the upstream channel 11. The fluid to be measured to be introduced is introduced with a constant angle spread because the gap between the partition wall 10 and the rectifying piece 11a is wide, so that the flow velocity is suppressed. The introduced fluid to be measured has its flow direction changed by the partition wall 10 and passes between the rectifying pieces 11a, 11b and 11c to be rectified. The flow of the rectified fluid to be measured is changed in the flow path bending hole 11d and introduced into the measurement unit side surface 3b.

  As shown by the solid line arrow in FIG. 6 (b), the fluid to be measured introduced from the body side surface 3a is rectified by the wire mesh 4, and then the flow-in area is determined by the walls 17a and 17b. 18b, the flow velocity vector of the fluid to be measured flowing into the flow sensor 6 is made uniform, and the flow rate is detected by the flow sensor 6. A detection signal detected by the flow sensor 6 is output to the measurement unit 7. Thereafter, the direction of the flow of the fluid to be measured is changed again in the flow path bending hole 12d and introduced into the body side surface 3a. As shown by the dotted arrows in FIG. 6A, the fluid to be measured introduced from the measurement unit side surface 3b passes between the rectifying pieces 12a, 12b and 12c and is rectified. The rectified fluid to be measured joins the gas flow from the branch flow path 9e to the main flow path 9b via the buffer recess 14 and the filter 2.

Next, the operation of the flow meter that measures the flow rate of the fluid to be measured in the reverse flow direction will be described.
FIG. 7 is a diagram showing the operation of the flow meter according to the first embodiment of the present invention. FIG. 7A is a perspective view of the side of the body portion of the flow channel structure showing the back flow of the fluid to be measured, and FIG. 7B is the flow path structure showing the back flow of the fluid to be measured. It is a perspective view of the measurement part side surface. In FIG. 7, the solid line arrows indicate the flow of the fluid to be measured before the flow rate measurement, and the broken line arrows indicate the flow of the fluid to be measured after the flow rate measurement.

  First, the fluid to be measured introduced into the buffer recess 14 from the branch channel 9e indicated by the solid line arrow in FIG. 7A has a certain angle spread and is introduced into the downstream channel 12. Since the introduced fluid to be measured has a wide space between the partition wall 10 and the rectifying piece 12a, the flow velocity is suppressed and the fluid to be measured is introduced with a certain angular spread. The introduced fluid to be measured has its flow direction changed by the partition wall 10 and passes between the rectifying pieces 12a, 12b and 12c to be rectified. The flow of the rectified fluid to be measured is changed in the flow path bending hole 12d, and is introduced into the measurement unit side surface 3b.

  As shown by the solid line arrow in FIG. 7B, the fluid to be measured introduced from the body side surface 3a is the fluid to be measured that flows into the flow sensor 6 through the walls 17a and 17b and the sill pieces 18a and 18b. The flow velocity vector is made uniform, and the flow rate is detected by the flow rate sensor 6. A detection signal detected by the flow sensor 6 is output to the measurement unit 7. After that, the fluid to be measured is rectified by the wire mesh 4, and then the flow direction is changed again at the flow path bending hole 11d and introduced into the body side surface 3a. As shown by the dotted arrows in FIG. 6A, the fluid to be measured introduced from the measurement unit side surface 3b passes between the rectifying pieces 11a, 11b, and 11c and is rectified. The rectified fluid to be measured joins the gas flow in the main channel 9b from the branch channel 9d via the buffer recess 13 and the filter 2.

  As described above, according to the first embodiment, the flow path structure portion is provided at a position covering the flow sensor, and the flow path structure portion and the sensor unit can be attached to and detached from the body portion. Since it is configured so that it does not easily come off from the sensor unit, the flow path structure functions as a lid for the flow sensor even when the sensor unit is removed from the body, and the flow sensor is exposed and damaged or damaged. Can be prevented.

  Furthermore, according to the first embodiment, a plurality of rectifying pieces are provided on the side surface of the body portion of the flow path structure portion, and after reducing the flow velocity of the fluid to be measured introduced from the branch flow path of the body portion, Since the flow of the fluid to be measured is rectified, the flow rate of the fluid to be measured can be stably measured.

  Furthermore, according to the first embodiment, the flow path structure portion is provided with the flow path folding hole so that the flow path is folded back, so that a flow path for sufficient rectification of the fluid to be measured can be secured and the flow rate measurement can be performed. A part can be reduced in size.

  Further, according to the first embodiment, a plurality of rectifying pieces and a flow path bending hole are provided in the downstream flow path on the side surface of the body portion of the flow path structure section, and a flow sensor having a bilaterally symmetric structure is provided. Therefore, it is possible to accurately measure the flow rate of the reverse flow that is the flow of the fluid to be measured from the downstream channel toward the flow rate sensor.

  In the first embodiment, an example in which the flow path structure portion, the rubber packing, and the hole portions of the support plate are formed in an elliptical shape is shown. However, the shape is not limited to the elliptical shape, and the body into which the fluid to be measured is introduced You may comprise according to the shape of the partial flow path of a part.

  In the first embodiment, a configuration is shown in which a wire mesh is provided in the vicinity of the flow path folding hole 11d. However, a wire mesh is also provided immediately after the flow path bending hole 12d, so that a reverse flow introduced from the downstream flow path 12 is prevented. The fluid to be measured may be supplied to the flow sensor 6 after being rectified by the wire mesh.

It is a disassembled perspective view of the flowmeter which concerns on Embodiment 1 of this invention. It is a front view of the sensor unit of the flowmeter which concerns on Embodiment 1 of this invention. It is a figure which shows the attachment to the body part of the sensor unit which concerns on Embodiment 1 of this invention. It is a perspective view of the flow-path structure part of the flowmeter which concerns on Embodiment 1 of this invention. It is a figure which shows the structure of the flow sensor of the flowmeter which concerns on Embodiment 1 of this invention. It is a figure which shows operation | movement of the flowmeter which concerns on Embodiment 1 of this invention. It is a figure which shows operation | movement of the flowmeter which concerns on Embodiment 1 of this invention. It is a disassembled perspective view of the conventional flowmeter.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Flowmeter 2 Filter 3 Flow path structure part 3a Body part side surface 3b Measurement part side surface 4 Wire mesh 5 Rubber packing 6 Flow sensor 7 Measurement part 7a, 7b Support plate 8 Display part 9 Sensor unit 9a Body part 9b Main flow path 9c Orifice 9d, 9e Dividing channel 10 Partition wall 11 Upstream channel 12 Downstream channel 11a, 11b, 11c, 12a, 12b, 12c , 16d Wire mesh locking piece 17a, 17b Wall 18a, 18b Sill piece 60 Base 61 Heater 62 Upstream temperature sensor 63 Downstream temperature sensor 64 Ambient temperature sensor 65 Insulating film layer 66 Cavity (recessed space)
67 Diaphragm 71 Connector 72 Screw 81 Setting switch 82 Display 90 Base 91 Main flow pipe 92 Subflow block 93 Measurement hole 94 Seal plate 95 Circuit board 96 Cover

Claims (1)

A fluid measuring unit having a sensor for detecting a fluid to be measured, and measuring a flow rate of the fluid to be measured based on a detection result of the sensor;
Forming a main flow path through which the fluid to be measured flows, and a body portion including a first branch flow path and a second branch flow path for diverting the fluid to be measured;
A first channel formed on a surface of the body portion side into which the fluid to be measured flows, which is made up of a plate-like member provided between the body portion and the fluid measurement unit, and into which the fluid to be measured divided through the first branch channel flows. Through the second flow path formed on the surface of the fluid measuring section, the first communication hole section communicating the first flow path and the second flow path, and the second branch flow path. A third flow path formed on the surface of the body part side through which the fluid to be measured flows out to the main flow path, a second communication hole portion communicating the second flow path and the third flow path, A flow path structure having a partition member that divides the body side surface into a first flow path and a third flow path ;
The sensor is disposed facing the second flow path;
The first flow path and the third flow path include a commutator for adjusting the flow of the fluid to be measured,
The second flow path includes a vector adjustment member that equalizes the flow velocity vector of the fluid to be measured,
The flowmeter, wherein the flow path structure section and the fluid measurement section are detachable with respect to the body section.

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