JP5134449B2 - Water-based photosensitive resin composition, method for manufacturing water-based photosensitive resin composition, and method for manufacturing printed wiring board - Google Patents

Description

  The present invention is a water-based photosensitive resin composition that can be developed with water or a dilute alkaline solution, and is used for manufacturing printed wiring boards, flexible printed wiring boards, lead frames, gravure roll engraving, etc. The present invention relates to an ink useful as an etching resist ink.

  The present invention also relates to a method for producing the aqueous photosensitive resin composition and a method for producing a printed wiring board using the aqueous photosensitive resin composition.

  In recent years, a photoresist ink that can be developed with a dilute alkaline solution has been actively used particularly in the field of manufacturing a printed wiring board and a flexible printed wiring board (see Patent Documents 1 and 2).

  Conventional photoresist inks are generally prepared by dissolving or dispersing various components in various organic solvents. The photoresist ink is uniformly applied to the substrate surface to form a photo-curable dry film, and the substrate is subjected to an exposure and development process to produce a printed wiring board.

  However, since this photoresist ink contains an organic solvent, prior to exposure, the organic solvent must be removed by drying or the like. For this reason, various problems such as occupational safety and health problems, environmental pollution problems, and risk of fires occur due to the volatilization of organic solvents at the production site of printed wiring boards.

  In order to solve these problems, an attempt has been made to develop an aqueous photosensitive resin composition containing water as a solvent. The aqueous photosensitive resin composition is prepared by, for example, dissolving or dispersing this carboxyl group-containing resin in water by adding water containing an amine compound to a carboxyl group-containing resin having a polymerizable unsaturated bond and heating. It is prepared by adding a polymerizable unsaturated compound and a photopolymerization initiator.

  However, a dry film formed from a conventional water-based photosensitive resin composition or a cured film obtained by exposure-curing this dry film has high hardness and lacks adhesion to a substrate such as this dry film. When the substrates on which the etc. are formed are stacked or wound up in a roll shape, there is a problem that the coating is likely to be cracked or peeled off.

On the other hand, when trying to reduce the hardness of the dried film or cured film, the tackiness of the surface of the dried film or cured film increases, and the substrate on which the dried film or the like is formed is stacked or rolled up. In addition, the surface of the coating is stuck to the back surface of another substrate and the releasability is deteriorated. In this case, it becomes difficult to preserve | save in the state which piled up the board | substrate with which the film was formed, or was wound up in roll shape, and the problem that handling property and workability | operativity will worsen will arise.
Japanese Patent Laid-Open No. 5-224413 JP-A-5-241340

  The present invention has been made in view of the above points, and includes water as a solvent, can form a film that can be developed with water or a dilute alkaline solution, and has sufficiently high flexibility and releasability. In addition, a water-based photosensitive resin composition that can form a dry film and a cured film having both adhesion to a substrate and is particularly useful as a resist ink, a method for producing the water-based photosensitive resin composition, and the water-based photosensitive resin It aims at providing the manufacturing method of the printed wiring board using a composition.

The aqueous photosensitive resin composition according to the present invention is:
(A) a carboxyl group-containing resin having a polymerizable unsaturated bond,
(B) a carboxyl group-containing resin having a weight average molecular weight of 100,000 to 10,000,000 and having no polymerizable unsaturated bond,
(C) an amine compound,
(D) a polymerizable unsaturated compound,
(E) contains a photopolymerization initiator and (F) water,
Content of the said carboxyl group-containing resin (A) is 10-60 mass% with respect to the composition whole quantity, and content of the said carboxyl group-containing resin (B) is 0.1-10 mass with respect to the composition whole quantity. %.

  According to the present invention, the polymerizable unsaturated compound (D) and the photopolymerization initiator in the aqueous photosensitive resin composition are obtained by using the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) in combination. The emulsification and dispersion of (E) are promoted, and particularly excellent developability is imparted to the non-exposed portion after the dry film is exposed. Moreover, the dry film formed from this water-based photosensitive resin composition and the cured film formed by exposure-curing this dry film have excellent flexibility and high adhesion to the substrate, Moreover, the tackiness of the surface of these coatings is reduced.

  In this invention, it is preferable that the said carboxyl group containing resin (A) contains carboxyl group containing resin (A-1) which has a polymerizable unsaturated bond. This carboxyl group-containing resin (A-1) is a polymer in a polymer produced by a polymerization reaction between an ethylenically unsaturated compound (a) having a carboxyl group and an ethylenically unsaturated compound (b) having no carboxyl group. It produces | generates when a part of carboxyl group reacts with the ethylenically unsaturated compound (c) which has an epoxy group.

  In this case, the carboxyl group-containing resin (A-1) provided with a hydrophilic group and a hydrophobic group functions as a surfactant, and the emulsification and dispersion of the components in the aqueous photosensitive resin composition are further promoted, High developability is imparted to the aqueous photosensitive resin composition. Further, since the carboxyl group-containing resin (A-1) has high photoreactivity, particularly excellent developer resistance and etching resistance are imparted to the cured film.

  The carboxyl group-containing resin (A-1) preferably has an acid value (mg KOH / g) in the range of 20 to 500 and a weight average molecular weight in the range of 10,000 to 100,000.

  In this case, the emulsifying power and dispersing power of the components in the aqueous photosensitive resin composition by the carboxyl group-containing resin (A-1) are further improved, and the polymerizable unsaturated compound ( D) and the photopolymerization initiator (E) can be further finely dispersed. In addition, it is possible to form a resist film having a fine resist pattern by further improving the removability of a non-exposed portion after exposure of a dry film by a developer and the developer resistance and etching resistance of a cured film. In addition, the alkali peelability of the resist film is further improved.

  Moreover, in this invention, it is also preferable that the said carboxyl group-containing resin (A) contains the carboxyl group-containing resin (A-2) which has a polymerizable unsaturated bond. This carboxyl group-containing resin (A-2) is a polymer produced by a polymerization reaction between an ethylenically unsaturated compound (d) having an epoxy group and an ethylenically unsaturated compound (e) having no epoxy group. It reacts with the ethylenically unsaturated compound (f) having a carboxyl group and the hydroxyl group produced by this reaction reacts with the acid anhydride (g).

  In this case, the carboxyl group-containing resin (A-2) provided with a hydrophilic group and a hydrophobic group functions as a surfactant, and the emulsification and dispersion of the components in the aqueous photosensitive resin composition are further promoted, High developability is imparted to the aqueous photosensitive resin composition. Further, since the carboxyl group-containing resin (A-2) has high photoreactivity, particularly excellent developer resistance and etching resistance are imparted to the cured film.

  The carboxyl group-containing resin (A-2) preferably has an acid value (mg KOH / g) in the range of 20 to 500 and a weight average molecular weight in the range of 1000 to 50000.

  In this case, the emulsifying power and dispersing power of the components in the aqueous photosensitive resin composition by the carboxyl group-containing resin (A-2) are further improved, and the polymerizable unsaturated compound ( D) and the photopolymerization initiator (E) can be further finely dispersed. In addition, it is possible to form a resist film having a fine resist pattern by further improving the removability of a non-exposed portion after exposure of a dry film by a developer and the developer resistance and etching resistance of a cured film. In addition, the alkali peelability of the resist film is further improved.

  Moreover, it is also preferable that carboxyl group-containing resin (B) contains carboxyl group-containing resin (B-1). This carboxyl group-containing resin (B-1) is produced by a polymerization reaction between an ethylenically unsaturated compound (h) having a carboxyl group and an ethylenically unsaturated compound (i) having no carboxyl group.

  In this case, the carboxyl group-containing resin (B-1) provided with a hydrophilic group and a hydrophobic group functions as a surfactant, and the emulsification and dispersion of the components in the aqueous photosensitive resin composition are further promoted, Higher developability is imparted to the non-exposed portion after the dry film is exposed. Further, the high molecular weight carboxyl group-containing resin (B-1) reduces the tackiness of the dry film, improves the adhesion to the substrate, and imparts higher flexibility to the film.

  The acid value (mg KOH / g) of the carboxyl group-containing resin (B-1) is preferably in the range of 50 to 800.

  In this case, the removability of the non-exposed portion after exposure of the dry film by the developer and the developer resistance of the cured film are further improved, and a resist film having a fine resist pattern can be formed.

  Moreover, in this invention, it is preferable that the said carboxyl group-containing resin (A) and carboxyl group-containing resin (B) are neutralized with the amine compound (C).

  In this case, the water-dispersibility or water-solubility of the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) in the aqueous photosensitive resin composition is further improved, and further higher developer resistance is imparted to the cured film. Further, it becomes possible to form a resist film having a finer resist pattern.

  The amine compound (C) preferably contains a tertiary amine.

  In this case, the viscosity stability, storage stability, and dry film storage stability of the water-based photosensitive resin composition are improved.

  Moreover, content of this amine compound (C) is the range of 0.2-1.0 equivalent with respect to 1 mol of carboxyl groups contained in carboxyl group-containing resin (A) and carboxyl group-containing resin (B). It is preferable that

  In this case, the water-dispersibility or water-solubility of the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) in the aqueous photosensitive resin composition is further improved, and further higher developer resistance is imparted to the cured film. Further, it becomes possible to form a resist film having a finer resist pattern.

  Moreover, the manufacturing method of the aqueous photosensitive resin composition which concerns on this invention is a manufacturing method of the said aqueous photosensitive resin composition, Comprising: A carboxyl group-containing resin (A) and a carboxyl group-containing resin (B) are amine compounds ( The polymerizable unsaturated compound (D) and the photopolymerization initiator (E) are added to the aqueous solution containing the neutralized carboxyl group-containing resin (A) and the carboxyl group-containing resin (B). The process is characterized by including the process.

  For this reason, the water dispersibility or water solubility of the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) is improved, and the function as a surfactant is also improved, resulting in excellent emulsifying power and dispersing power. In the composition, the polymerizable unsaturated compound (D) and the photopolymerization initiator (E) can be further finely dispersed.

Moreover, it is preferable that the manufacturing method of this aqueous photosensitive resin composition includes the following steps (1) to (6).
(1) Step of synthesizing carboxyl group-containing resin (A) and carboxyl group-containing resin (B) in an organic solvent (2) The carboxyl group-containing resin (A) and carboxyl group-containing prepared in step (1) Step (3) Adding an amine compound (C) to the mixed solution and mixing the organic solvent solution of the resin (B). (3) While stirring the solution prepared in the step (2), water (F) is added to the solution. (4) Step of removing the organic solvent from the solution prepared in the step (3) by distillation under reduced pressure (5) Step of dissolving the photopolymerization initiator (E) in the polymerizable unsaturated compound (D) (6) A step of adding the solution prepared in the step (5) to the aqueous solution while stirring the aqueous solution prepared in the step (4). In this case, polymerizable unsaturated in the aqueous photosensitive resin composition Compound (D) and photopolymerization initiator (E) can be further finely dispersed.

Moreover, the manufacturing method of the printed wiring board which concerns on this invention is a method of manufacturing a printed wiring board using the said aqueous photosensitive resin composition, Comprising: The following process (1) to (4) is included, It is characterized by the above-mentioned. And
(1) Step (2) in which the aqueous photosensitive resin composition is applied to the metal layer of the insulating substrate having a metal layer on the outer surface and then dried to form a photocurable dry film. Step of forming a resist film having a predetermined pattern by developing with water or a dilute alkaline solution after the photocurable film is exposed (3) The metal layer is coated with the resist film Steps in which unexposed portions are removed by etching treatment (4) Steps in which the resist film is peeled off by treatment with an alkaline solution. This reduces occupational safety and health problems, environmental pollution problems, and the risk of fire. However, a fine conductor wiring pattern can be formed on the printed wiring board.

  According to the present invention, the water-based photosensitive resin composition contains water as a solvent, and can form a film that can be developed with water or a dilute alkaline solution. Therefore, an appropriate pattern is formed using the water-based photosensitive resin composition. In forming the coating film, various problems such as occupational safety and health problems caused by organic solvents, environmental pollution problems, and risk of fire occurrence are solved. In addition, the developability of the non-exposed portion after exposing the dry film becomes very excellent, and a fine pattern can be formed. Furthermore, sufficiently high flexibility, releasability, and adhesion to the substrate are imparted to the dry film formed from the aqueous photosensitive resin composition and the cured film obtained by curing the dry film. Therefore, it is possible to prevent the occurrence of defects such as cracking, peeling, and sticking to other substrates when the substrate on which a dry film or a cured film is formed is stacked or rolled up. . Therefore, this water-based photosensitive resin composition is suitably used for forming a resist film during the production of a printed wiring board, particularly a flexible printed wiring board. By using this water-based photosensitive resin composition, a fine conductor pattern can be obtained. The printed wiring board having the above is manufactured, and the yield and workability at the time of manufacturing the printed wiring board are improved.

  Hereinafter, the best mode for carrying out the present invention will be described. In the present specification, “(meth) acryl” is a general term for “acryl” and “methacryl”. For example, “(meth) acrylic acid” means “acrylic acid” and “methacrylic acid”. Is a generic term.

  The aqueous photosensitive resin composition according to the present invention (hereinafter sometimes abbreviated as “composition”) has a carboxyl group-containing resin (A) having a polymerizable unsaturated bond and a polymerizable unsaturated bond. Carboxyl group-containing resin (B), amine compound (C), polymerizable unsaturated compound (D), photopolymerization initiator (E), and water (F) are contained as essential components.

  Hereinafter, each component will be described in detail.

[Carboxyl group-containing resin (A)]
Since the carboxyl group-containing resin (A) has a polymerizable unsaturated bond, an unsaturated group is introduced into the aqueous photosensitive resin composition. For this reason, when photocurability is provided to the water-based photosensitive resin composition, and the dry film formed from this composition is partially exposed, it is between the non-exposed part and the exposed part (cured film). Thus, there is a sufficient difference in solubility, dispersibility, swellability, etc. in a developer such as water or a dilute alkaline solution. For this reason, a fine resist pattern can be formed.

  The content of the carboxyl group-containing resin (A) with respect to the total amount of the composition needs to be in the range of 10 to 60% by mass. In this range, excellent photocurability and developability are imparted to the composition.

  As the carboxyl group-containing resin (A), an appropriate one is used, but it is preferable to contain at least one of the following carboxyl group-containing resin (A-1) and carboxyl group-containing resin (A-2).

  The carboxyl group-containing resin (A-1) is a carboxyl in a polymer produced by a polymerization reaction between an ethylenically unsaturated compound (a) having a carboxyl group and an ethylenically unsaturated compound (b) having no carboxyl group. It produces | generates by making a part of group react with the ethylenically unsaturated compound (c) which has an epoxy group.

  As the ethylenically unsaturated compound (a), an appropriate monomer or prepolymer having a carboxyl group is used. Specific examples of the ethylenically unsaturated compound (a) include, for example, acrylic acid, methacrylic acid, acrylic acid dimer, cinnamic acid, etc .; succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydro anhydride Dibasic acid anhydrides such as phthalic acid, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, endomethylenetetrahydrophthalic anhydride, methylendomethylenetetrahydrophthalic anhydride, itaconic anhydride and hydroxyethyl (meth) acrylate, hydroxy Propyl (meth) acrylate, hydroxybutyl (meth) acrylate, polyethylene glycol mono (meth) acrylate, glycerin di (meth) acrylate, trimethylolpropane di (meth) acrylate, pentaerythritol tri (meth) acrylate Half esters obtained by reacting a compound having an ethylenically unsaturated group containing one hydroxyl group in one molecule, such as a rate, dipentaerythritol penta (meth) acrylate, tripentaerythritol hepta (meth) acrylate; Dibasic acids such as succinic acid, maleic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, methyltetrahydrophthalic acid, methylhexahydrophthalic acid, endomethylenetetrahydrophthalic acid, methylendomethylenetetrahydrophthalic acid, itaconic acid and the like One ester per molecule such as glycidyl (meth) acrylate, β-methylglycidyl (meth) acrylate, (3,4-epoxycyclohexyl) methyl (meth) acrylate, 4-hydroxybutyl (meth) acrylate monoglycidyl ether, etc. Examples thereof include half esters obtained by reacting a compound having an ethylenically unsaturated group containing a poxy group. These compounds are used individually by 1 type, or multiple types are used together.

  As the ethylenically unsaturated compound (b), an appropriate ethylenically unsaturated monomer having no carboxyl group and copolymerizable with the ethylenically unsaturated compound (a) is used. Specific examples of the ethylenically unsaturated compound (b) include, for example, methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, tertiary butyl ( (Meth) acrylate, 2-ethylhexyl (meth) acrylate, n-octyl (meth) acrylate, n-decyl (meth) acrylate, isodecyl (meth) acrylate, lauryl (meth) acrylate, myristyl (meth) acrylate, cetyl (meth) Linear, branched or alicyclic alkyl (meth) acrylates such as acrylate, stearyl (meth) acrylate, cyclohexyl (meth) acrylate, and isobornyl (meth) acrylate; 2-hydroxyethyl (meth) acrylate Hydroxy compounds such as 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 3-hydroxybutyl (meth) acrylate and 4-hydroxybutyl (meth) acrylate Alkyl (meth) acrylates; polyalkylene glycols such as polyethylene glycol and polypropylene glycol (the number of alkylene glycol units is, for example, 2 to 23) mono (meth) acrylates; methoxyethyl (meth) acrylate, ethoxyethyl (meth) acrylate, Ethylene glycol esters such as diethylene glycol mono (meth) acrylate, triethylene glycol mono (meth) acrylate, methoxydiethylene glycol (meth) acrylate ( ) Acrylates and similar propylene glycol (meth) acrylates, butylene glycol mono (meth) acrylates; dimethylaminomethyl (meth) acrylate, diethylaminomethyl (meth) acrylate, 2-dimethylaminoethyl (meth) Amino group-containing (meth) acrylates such as acrylate; aromatic (meth) acrylates such as benzyl (meth) acrylate; (meth) acrylamide, N-methyl (meth) acrylamide, N-propyl (meth) acrylamide Acrylamides such as N-tertiary butyl (meth) acrylamide, N-tertiary octyl (meth) acrylamide and diacetone (meth) acrylamide; styrene, o-vinyltoluene, m-vinyltoluene, p-vinyltolue , Α-methylstyrene, o-hydroxystyrene, m-hydroxystyrene, p-hydroxystyrene, o-hydroxy-α-methylstyrene, m-hydroxy-α-methylstyrene, p-hydroxy-α-methylstyrene, p -Vinyl aromatic compounds such as vinyl benzyl alcohol; Maleimides such as maleimide, N-benzylmaleimide, N-phenylmaleimide, N-cyclohexylmaleimide; 2- (meth) acrylamide ethanesulfonic acid, 2- (meth) acrylamidepropane Sulfonic acid group-containing (meth) acrylates such as sulfonic acid and 3- (meth) acrylamidepropanesulfonic acid; glycerol mono (meth) acrylate, vinyl acetate, vinyl ethers, (meth) allyl alcohol, vinylidene cyanide, chloride Cycloalkenyl, vinylidene chloride, vinyl pyrrolidone, and (meth) acrylonitrile. In addition to these compounds, ethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) as necessary Acrylate, trimethylolpropane di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, divinylbenzene, diisopropenylbenzene, trivinylbenzene, etc. A compound having two or more ethylenically unsaturated groups in one molecule is also used. These compounds are used individually by 1 type, or multiple types are used together.

  As the ethylenically unsaturated compound (c), an appropriate monomer or prepolymer having an epoxy group is used. Specific examples of the ethylenically unsaturated compound (c) include glycidyl (meth) acrylate, (3,4-epoxycyclohexyl) methyl (meth) acrylate, β-methylglycidyl (meth) acrylate, 4-hydroxybutyl (meth) ) Acrylate glycidyl ether, allyl glycidyl ether, epoxidized stearyl acrylate (manufactured by Shin Nippon Rika Co., Ltd .; product number “Rikaresin ESA”) and the like. These compounds are used individually by 1 type, or multiple types are used together. Among these compounds, glycidyl acrylate and glycidyl methacrylate are particularly preferable because they are widely used and easily available.

  The reaction of the ethylenically unsaturated compound (a) and the ethylenically unsaturated compound (b) proceeds by an appropriate polymerization method. As this polymerization method, a known method such as a solution polymerization method may be employed.

  When the solution polymerization method is adopted, a method of heating and stirring in an appropriate organic solvent in which the ethylenically unsaturated compound (a), the ethylenically unsaturated compound (b) and the polymerization initiator are mixed, under a nitrogen atmosphere, An azeotropic polymerization method or the like is employed.

  Examples of the organic solvent include alcohols such as methanol and ethanol, ketones such as methyl ethyl ketone and cyclohexanone, and aromatic hydrocarbons such as toluene and xylene; ethyl acetate, butyl acetate, cellosolve acetate, butyl cellosolve acetate, butyl Examples thereof include acetic esters such as carbitol acetate and propylene glycol monomethyl ether acetate; dialkyl glycol ethers and the like. These solvents are used alone or in combination.

  Examples of the polymerization initiator include hydroperoxides such as diisopropylbenzene hydroperoxide; dialkyl peroxides such as dicumyl peroxide and 2,5-dimethyl-2,5-di- (t-butylperoxy) -hexane. Diacyl peroxides such as isobutyryl peroxide; ketone peroxides such as methyl ethyl ketone peroxide; alkyl peresters such as t-butyl peroxybivalate; peroxydicarbonates such as diisopropyl peroxydicarbonate; Examples include azo compounds such as azobisisobutyronitrile. These polymerization initiators are used individually by 1 type, or multiple types are used together. A redox initiator may also be used as the polymerization initiator.

  The ratio of the ethylenically unsaturated compound (a) to the ethylenically unsaturated compound (b) is appropriately adjusted, but the molar ratio of the former to the latter is preferably in the range of 10:90 to 90:10.

  The reaction between a part of the carboxyl groups in the polymer of the ethylenically unsaturated compound (a) and the ethylenically unsaturated compound (b) and the ethylenically unsaturated compound (c) proceeds by an appropriate method. As this method, a known method can be adopted. For example, a thermal polymerization inhibitor and a catalyst are added to an organic solvent solution containing a polymer of an ethylenically unsaturated compound (a) and an ethylenically unsaturated compound (b) produced by the above solution polymerization method, While stirring and mixing the organic solvent solution, a part of the carboxyl group in the polymer can be reacted with the ethylenically unsaturated compound (c) by heating by an ordinary method. As the thermal polymerization inhibitor, hydroquinone, hydroquinone monomethyl ether, or the like is used. As the catalyst, tertiary amines such as dimethylbenzylamine and triethylamine; quaternary ammonium salts such as trimethylbenzylammonium chloride and methyltriethylammonium chloride; triphenylstibine and the like are used. The reaction temperature is preferably 60 to 150 ° C, more preferably 80 to 120 ° C.

  The amount of ethylenically unsaturated compound (c) used is ethylenically unsaturated with respect to 1 mol of carboxyl groups present in the polymer of ethylenically unsaturated compound (a) and ethylenically unsaturated compound (b). The amount of the epoxy group present in the compound (c) is preferably in the range of 0.1 to 0.8 mol, more preferably in the range of 0.3 to 0.6 mol. Within this range, a particularly excellent developability with a developer (water or dilute alkaline solution) is imparted to a non-exposed portion after exposure of a dry coating formed from the composition, and an exposed portion of the coating (cured coating) ) Is particularly excellent in developer resistance.

  The acid value of this carboxyl group-containing resin (A-1) is preferably in the range of 20 to 500, more preferably in the range of 50 to 200. Moreover, the weight average molecular weight of this carboxyl group-containing resin (A-1) is preferably in the range of 10,000 to 100,000, more preferably in the range of 20,000 to 50,000.

  When the acid value of the carboxyl group-containing resin (A-1) is too small, the carboxyl group-containing resin (A-1) is sufficient even if the carboxyl group-containing resin (A-1) is neutralized with the amine compound (C). Thus, there is a possibility that removal of the non-exposed portion after the exposure of the dry film with a developer and peeling of the resist film with an alkaline solution may be difficult. On the other hand, when the acid value is too large, the water solubility of the carboxyl group-containing resin (A-1) neutralized with the amine compound (C) becomes too high, and the developer resistance and etching resistance of the cured film are increased. May not be sufficiently obtained, and as a result, it may be difficult to form a fine resist pattern.

  In addition, when the weight average molecular weight of the carboxyl group-containing resin (A-1) is too small, the dry film may have tackiness, and the handleability of the substrate on which the dry film is formed may deteriorate during exposure, Moreover, there exists a possibility that the developing solution resistance and etching solution resistance of a cured film may not be obtained sufficiently. On the other hand, when the weight average molecular weight is too large, the viscosity of the composition becomes excessively high, and it becomes difficult for the carboxyl group-containing resin (A-1) to be finely dispersed in the composition. There is a risk that it is difficult to form a fine resist pattern.

  The acid value of the carboxyl group-containing resin (A-1) depends on the type of raw material used for the synthesis of the carboxyl group-containing resin (A-1), and the ethylenically unsaturated compound (a) and the ethylenically unsaturated compound By adjusting the ratio of the amount used with (b) and the amount of ethylenically unsaturated compound (c) used for the polymer of ethylenically unsaturated compound (a) and ethylenically unsaturated compound (b), Adjust as appropriate.

  The weight average molecular weight of the carboxyl group-containing resin (A-1) depends on the type of raw materials used for the synthesis of the carboxyl group-containing resin (A-1), the reaction conditions, and the like. It adjusts suitably by preparing the usage-amount of the polymerization initiator etc. which are used for the polymerization reaction of an ethylenically unsaturated compound (b).

  The carboxyl group-containing resin (A-2) is a polymer in a polymer produced by a polymerization reaction between an ethylenically unsaturated compound (d) having an epoxy group and an ethylenically unsaturated compound (e) having no epoxy group. An epoxy group reacts with an ethylenically unsaturated compound (f) having a carboxyl group, and a hydroxyl group produced by this reaction reacts with an acid anhydride (g).

  As the ethylenically unsaturated compound (d), an appropriate monomer or prepolymer having an epoxy group is used. Specific examples of the ethylenically unsaturated compound (d) include the same compounds as the above specific examples of the ethylenically unsaturated compound (c) used for the synthesis of the carboxyl group-containing resin (A-1). . These compounds are used individually by 1 type, or multiple types are used together. Among these compounds, glycidyl acrylate and glycidyl methacrylate are particularly preferable because they are widely used and easily available.

  As the ethylenically unsaturated compound (e), an appropriate ethylenically unsaturated monomer having no epoxy group and copolymerizable with the ethylenically unsaturated compound (d) is used. Specific examples of the ethylenically unsaturated compound (e) include the same compounds as the above specific examples of the ethylenically unsaturated compound (b) used for the synthesis of the carboxyl group-containing resin (A-1). . These compounds are used individually by 1 type, or multiple types are used together.

  As the ethylenically unsaturated compound (f), an appropriate monomer or prepolymer having a carboxyl group is used. Specific examples of the ethylenically unsaturated compound (f) include the same compounds as the above specific examples of the ethylenically unsaturated compound (a) used for the synthesis of the carboxyl group-containing resin (A-1). . These compounds are used individually by 1 type, or multiple types are used together.

  An appropriate compound is used as the acid anhydride (g). Specific examples of the acid anhydride (g) include succinic anhydride, methyl succinic anhydride, maleic anhydride, citraconic anhydride, glutaric anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, and methyltetrahydrophthalic anhydride. Dibasic acid anhydrides such as acid, methyl nadic anhydride, hexahydrophthalic anhydride, methylhexahydrophthalic anhydride; trimellitic anhydride, pyromellitic anhydride, benzophenone tetracarboxylic anhydride, methylcyclohexene tetracarboxylic anhydride, Examples of the acid anhydride include tribasic acids or more such as cyclohexanetricarboxylic acid anhydride. These compounds are used individually by 1 type, or multiple types are used together.

  The reaction of the ethylenically unsaturated compound (d) and the ethylenically unsaturated compound (e) proceeds by an appropriate polymerization method. As this polymerization method, a known method such as a solution polymerization method may be employed. For example, the same technique as in the case of the reaction of the ethylenically unsaturated compound (a) and the ethylenically unsaturated compound (b) can be employed.

  The ratio of the ethylenically unsaturated compound (d) and the ethylenically unsaturated compound (e) is adjusted as appropriate, but the ethylenically unsaturated compound (d) and the ethylenically unsaturated compound (e) are not mixed with the ethylenically unsaturated compound (e). It is preferable that the ratio of the saturated compound (e) exceeds 0 mol% and is 90 mol% or less.

  The reaction between the epoxy group in the polymer of the ethylenically unsaturated compound (d) and the ethylenically unsaturated compound (e) and the ethylenically unsaturated compound (f) proceeds by an appropriate method. As this method, a known method can be adopted. For example, the same technique as in the case of the reaction between the polymer of the ethylenically unsaturated compound (a) and the ethylenically unsaturated compound (b) and the ethylenically unsaturated compound (c) may be employed.

  The amount of the ethylenically unsaturated compound (f) used is ethylenically unsaturated with respect to 1 mol of the epoxy group present in the polymer of the ethylenically unsaturated compound (d) and the ethylenically unsaturated compound (e). The amount of the carboxyl group present in the compound (f) is preferably in the range of 0.7 to 1.2 mol, more preferably in the range of 0.9 to 1.1 mol. In this range, the residual amount of epoxy groups in the carboxyl group-containing resin (A-2) is particularly reduced. For this reason, the thermosetting reaction of the carboxyl group-containing resin (A-2) in the composition is suppressed under weak heat drying conditions (for example, heat drying conditions in the preliminary drying step). For this reason, the thermosetting of a dry film is suppressed and the fall of the developability of this dry film is suppressed. In addition, the remaining unreacted ethylenically unsaturated compound (f) in the composition is also suppressed.

  The amount of acid anhydride (g) used is produced by the reaction of the epoxy group in the polymer of ethylenically unsaturated compound (d) and ethylenically unsaturated compound (e) with ethylenically unsaturated compound (f). The amount is preferably in the range of 0.1 to 0.8 mol, more preferably in the range of 0.3 to 0.6 mol, relative to 1 mol of the hydroxyl group. In this range, the carboxyl group-containing resin (A-2) gives particularly excellent developability to the non-exposed portion after the dry film is exposed and gives particularly excellent developer resistance to the cured film. .

  The acid value of this carboxyl group-containing resin (A-2) is preferably in the range of 20 to 500, more preferably in the range of 50 to 200. The weight average molecular weight of the carboxyl group-containing resin (A-2) is preferably in the range of 1000 to 50000, and more preferably in the range of 5000 to 20000.

  When the acid value of the carboxyl group-containing resin (A-2) is too small, the carboxyl group-containing resin (A-2) is sufficient even if the carboxyl group-containing resin (A-2) is neutralized with the amine compound (C). Thus, there is a possibility that removal of the non-exposed portion after the exposure of the dry film with a developer and peeling of the resist film with an alkaline solution may be difficult. On the other hand, when the acid value is too large, the water solubility of the carboxyl group-containing resin (A-2) neutralized with the amine compound (C) becomes too high, and the developer resistance and etching resistance of the cured film are increased. May not be sufficiently obtained, and as a result, it may be difficult to form a fine resist pattern.

  In addition, when the weight average molecular weight of the carboxyl group-containing resin (A-2) is too small, the tackiness of the dry film is increased, and the handleability of the substrate on which the dry film is formed may deteriorate during exposure. In addition, there is a possibility that sufficient resistance to developing solution and etching solution of the cured film cannot be obtained. On the other hand, when the weight average molecular weight is too large, the viscosity of the composition becomes excessively high, and it becomes difficult to finely disperse the carboxyl group-containing resin (A-2) in the composition. There is a possibility that the formation of the pattern becomes difficult.

  When the carboxyl group-containing resin (A) contains at least one of the carboxyl group-containing resin (A-1) and the carboxyl group-containing resin (A-2), the carboxyl group-containing resin in the carboxyl group-containing resin (A) The content of (A-1) is preferably in the range of 50 to 100% by mass, and the content of the carboxyl group-containing resin (A-2) in the carboxyl group-containing resin (A) is in the range of 50 to 100% by mass. preferable. When the carboxyl group-containing resin (A) contains both the carboxyl group-containing resin (A-1) and the carboxyl group-containing resin (A-2), the carboxyl group-containing resin in the carboxyl group-containing resin (A) The total content of (A-1) and the carboxyl group-containing resin (A-2) is preferably in the range of 50 to 100% by mass. When the carboxyl group-containing resin (A) thus contains at least one of the carboxyl group-containing resin (A-1) and the carboxyl group-containing resin (A-2), the carboxyl group-containing resin (A-1) and the carboxyl group Since the group-containing resin (A-2) has high photoreactivity, a carboxyl group-containing resin (A-) having a particularly excellent developer resistance imparted to the cured film and having a hydrophilic group and a hydrophobic group added thereto. 1) and carboxyl group-containing resin (A-2) function as a surfactant, and the emulsification and dispersion of components in the composition are further promoted, and the polymerizable unsaturated compound (D) and photopolymerization start in the composition The agent (E) is finely dispersed. At this time, the polymerizable unsaturated compound (D) and the photopolymerization initiator (E) are dispersed in the form of fine particles in the composition.

[Carboxyl group-containing resin (B)]
The carboxyl group-containing resin (B) is a carboxyl group-containing resin having no polymerizable unsaturated bond, and its weight average molecular weight is in the range of 100,000 to 10,000,000.

  By including such a carboxyl group-containing resin (B) in the composition, emulsification and dispersion of the polymerizable unsaturated compound (D) and the photopolymerization initiator (E) in the composition are promoted. For this reason, the especially outstanding developability is provided to the non-exposed part after exposing a dry film. Moreover, since the weight average molecular weight of carboxyl group-containing resin (B) is large, the tackiness of a dry film is reduced and the flexibility excellent in a cured film is provided.

  Although an appropriate thing is used as carboxyl group-containing resin (B), it is preferable to contain the following carboxyl group-containing resin (B-1).

  The carboxyl group-containing resin (B-1) is produced by a polymerization reaction between an ethylenically unsaturated compound (h) having a carboxyl group and an ethylenically unsaturated compound (i) having no carboxyl group.

  As the ethylenically unsaturated compound (h), an appropriate monomer or prepolymer having a carboxyl group is used. Specific examples of the ethylenically unsaturated compound (h) include the same compounds as the above specific examples of the ethylenically unsaturated compound (a) used for the synthesis of the carboxyl group-containing resin (A-1). . These compounds are used individually by 1 type, or multiple types are used together.

  As the ethylenically unsaturated compound (i) having no carboxyl group, an appropriate ethylenically unsaturated monomer having no carboxyl group and copolymerizable with the ethylenically unsaturated compound (h) is used. The Specific examples of the ethylenically unsaturated compound (i) include the same compounds as the above specific examples of the ethylenically unsaturated compound (b) used in the synthesis of the carboxyl group-containing resin (A-1). . These compounds are used individually by 1 type, or multiple types are used together.

  The reaction of the ethylenically unsaturated compound (h) and the ethylenically unsaturated compound (i) proceeds by an appropriate polymerization method. As this polymerization method, a known method such as a solution polymerization method may be employed. For example, the same technique as in the case of the reaction of the ethylenically unsaturated compound (a) and the ethylenically unsaturated compound (b) can be employed. The ratio of the usage-amount of an ethylenically unsaturated compound (h) and an ethylenically unsaturated compound (i) is suitably adjusted so that a desired acid value may be provided to carboxyl group-containing resin (B-1).

  The acid value of the carboxyl group-containing resin (B-1) is preferably in the range of 50 to 800, more preferably in the range of 200 to 500. The weight average molecular weight of the carboxyl group-containing resin (B-1) is preferably in the range of 100,000 to 10,000,000, more preferably in the range of 200,000 to 6000000.

  When the acid value of the carboxyl group-containing resin (B-1) is too small, the carboxyl group-containing resin (B-1) is sufficient even if the carboxyl group-containing resin (B-1) is neutralized with the amine compound (C). Thus, there is a possibility that removal of the non-exposed portion after the exposure of the dry film with a developer and peeling of the resist film with an alkaline solution may be difficult. On the other hand, when the acid value is too large, the water solubility of the carboxyl group-containing resin (B-1) becomes too high, and the developer resistance and etching resistance of the cured film cannot be sufficiently obtained. There is a risk that it is difficult to form a fine resist pattern.

  In addition, when the weight average molecular weight of the carboxyl group-containing resin (B-1) is too small, the dry film may have tackiness, and the handleability of the substrate on which the dry film is formed may deteriorate during exposure, Moreover, there exists a possibility that the developing solution resistance and etching solution resistance of a cured film may not be obtained sufficiently. On the other hand, when the weight average molecular weight is too large, the viscosity of the composition becomes excessively high, and it becomes difficult for the carboxyl group-containing resin (B-1) to be finely dispersed in the composition. There is a risk that it is difficult to form a fine resist pattern.

  In particular, when the acid value of the carboxyl group-containing resin (B-1) is 200 to 500 and the weight average molecular weight is in the range of 200,000 to 6000000, the tackiness of the dried film is greatly reduced and the cured film can be used. Flexibility is very excellent.

  When the carboxyl group-containing resin (B) contains the carboxyl group-containing resin (B-1), the content of the carboxyl group-containing resin (B-1) in the carboxyl group-containing resin (B) is 50 to 100% by mass. A range is preferable. When the carboxyl group-containing resin (B) contains the carboxyl group-containing resin (B-1) in such a range, higher developability is imparted to the non-exposed part after the dry film is exposed, Adhesion with the substrate is further improved, and higher flexibility is imparted to the coating.

  The content of the carboxyl group-containing resin (B) with respect to the total amount of the composition is in the range of 0.1 to 10% by mass. If this content is less than 0.1% by mass, there is a risk that the tackiness of the dried film will be reduced, adhesion to the substrate will be improved, and flexibility will not be sufficiently imparted, and if it exceeds 10% by mass. The viscosity of the composition becomes excessively high, and the dispersibility of the polymerizable unsaturated compound (D) and the photopolymerization initiator (E) in the composition may not be sufficiently improved.

[Amine compound (C)]
An appropriate compound is used as the amine compound (C). Specific examples of the amine compound (C) include alkanolamines such as monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine; triethylamine, diethylamine, monoethylamine, diisopropylamine, trimethylamine, Examples include alkylamines such as diisobutylamine; alkylalkanolamines such as dimethylaminoethanol and diethylaminoethanol; alicyclic amines such as cyclohexylamine; and organic amines such as tetramethylammonium hydroxide. These compounds are used alone or in combination of two or more. Of these compounds, tertiary amines such as triethanolamine, triethylamine, dimethylaminoethanol, and diethylaminoethanol are preferably used.

  The content of the amine compound (C) in the composition is that of the amine compound (C) with respect to 1 mol of the carboxyl group contained in the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) in the composition. It is preferable that the equivalent amount be in the range of 0.2 to 1.0. If the equivalent of the amine compound (C) is less than 0.2, the water-solubility of the composition may be reduced and the storage stability may be reduced. There is a possibility that the liquid pattern is not sufficiently imparted and it is difficult to form a fine pattern. Moreover, the content of the amine compound with respect to the total amount of the composition is preferably in the range of 1 to 20% by mass. If this content is less than 1% by mass, the water-solubility of the composition may decrease and the storage stability may decrease. If this content exceeds 20% by mass, the developer resistance of the cured coating will decrease. As a result, it is difficult to form a fine pattern.

[Polymerizable unsaturated compound (D)]
An appropriate compound is used as the polymerizable unsaturated compound (D). Specific examples of the polymerizable unsaturated compound (D) include ethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (Meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, divinylbenzene, diisopropenylbenzene, trivinylbenzene Examples thereof include compounds having two or more ethylenically unsaturated groups in one molecule. These compounds are used alone or in combination of two or more.

  The content of the polymerizable unsaturated compound (D) with respect to the total amount of the composition is preferably in the range of 1 to 20% by mass. If the content is less than 1% by mass, the photopolymerizability of the composition is lowered, and it may be difficult to form a resist pattern. On the other hand, when the content exceeds 20% by mass, the dry film has tackiness, and the handling property of the substrate on which the dry film is formed may be deteriorated.

[Photoinitiator (E)]
An appropriate compound is used as the photopolymerization initiator (E). Specific examples of the photopolymerization initiator (E) include benzoin and its alkyl ethers; acetophenones such as acetophenone and benzyldimethyl ketal; anthraquinones such as 2-methylanthraquinone; 2,4-dimethylthioxanthone, 2,4 -Thioxanthones such as diethylthioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, and 2,4-diisopropylthioxanthone; Benzophenones such as benzophenone and 4-benzoyl-4'-methyldiphenyl sulfide; and 2,4-diisopropylxanthone Xanthones; α-hydroxyketones such as 2-hydroxy-2-methyl-1-phenyl-propan-1-one; 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-1-pro Those containing a nitrogen atom of a non like; and (2,4,6-trimethylbenzoyl) such as diphenyl phosphine oxide, and a photopolymerization initiator for UV curing. Moreover, visible-light sclerosis | hardenability and near-infrared sclerosis | hardenability may be provided to a composition by using photoinitiator (E) for visible light or near-infrared exposure. These compounds are used alone or in combination of two or more.

  Further, in the composition, in addition to the photopolymerization initiator (E), tertiary amines such as p-dimethylbenzoic acid ethyl ester, p-dimethylaminobenzoic acid isoamyl ester, 2-dimethylaminoethylbenzoate, etc. These known photopolymerization accelerators and sensitizers may be contained. Further, a coumarin derivative such as 7-diethylamino-4-methylcoumarin may be contained in the composition as a sensitizer for laser exposure, for example.

  The content of the photopolymerization initiator (E) in the composition is appropriately adjusted. In order to improve the photocurability imparted to the composition and the physical properties imparted to the cured film in a balanced manner, the composition The content of the photopolymerization initiator (E) with respect to the total amount of the product is preferably in the range of 0.1 to 10% by mass.

[Water (F)]
Water (F) is an essential component in the composition. Although content of water (F) in a composition is adjusted suitably, it is preferred that content of water (F) to the composition whole quantity is the range of 30-70 mass%. In this range, the advantages of the composition based on water, such as occupational health and safety, environmental pollution, fire prevention, etc. due to volatilization of the organic solvent in the process of forming a dry film after the composition is applied to the substrate. The problem reduction can be fully achieved.

[Optional ingredients]
The composition may contain an optional component as long as the object of the present invention is not adversely affected.

  For example, the composition may contain a solvent such as an organic solvent other than water. The content of the solvent is preferably 5% by mass or less based on the total amount of the composition.

  As this solvent, not only a solvent that is easily soluble in water, but also an organic solvent that is hardly soluble or insoluble in water can be used. Specific examples of usable organic solvents include ethanol, propanol, 2-propanol, butanol, 2-butanol, hexanol, ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, dipropylene glycol, butylene glycol, trimethylolpropane, Linear, branched, secondary or polyhydric alcohols such as neopentyl glycol, glycerin, 1,2,4-butanetriol, 1,2-butanediol, 1,4-butanediol, diacetone alcohol; ethylene glycol Ethylene glycol alkyl ethers such as monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monobutyl ether; diethylene glycol monomethyl ether, diethylene group Polyethylene glycol alkyl ethers such as coal monoethyl ether and triethylene glycol monomethyl ether; propylene glycol alkyl ethers such as propylene glycol monomethyl ether, polypropylene glycol alkyl ethers such as dipropylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, diethylene glycol Acetic esters such as monomethyl ether acetate, propylene glycol monomethyl ether acetate, dipropylene glycol monomethyl ether acetate, glycerol monoacetate, glycerol diacetate; lactates such as ethyl lactate and butyl lactate; diethyl adipate, dibutyl adipate, etc. Adipic acid esters; phthalic acid Phthal esters such as ethyl and dibutyl phthalate; Dialkyl glycol ethers such as diethylene glycol diethyl ether; Ketones such as methyl ethyl ketone, cyclohexanone and isophorone; Aromatic hydrocarbons such as toluene and xylene; Swazol series (Maruzen Petrochemical Co., Ltd.) Manufactured), Solvesso series (manufactured by Exxon Chemical Co., Ltd.) and the like, and petroleum-based aromatic mixed solvents; n-hexane, cyclohexane, tetrahydrofuran and the like. These solvents are used alone or in combination of two or more.

  Further, the composition may contain a polymer compound into which a photoreactive group other than the above essential components is introduced. Specific examples of the polymer compound include (meth) acrylic acid ester copolymer having an ethylenically unsaturated group introduced, (meth) acrylic acid ester- (meth) acrylic acid copolymer, styrene-acrylic acid ester. Copolymers, polymers such as styrene- (meth) acrylic acid- (meth) acrylic acid ester copolymers, styrene-maleic acid resins; bisphenol A type epoxy resins with added (meth) acrylic acid, phenol novolac type Examples include an epoxy resin, a cresol novolac type epoxy resin, an alicyclic epoxy resin; a resin obtained by further adding a saturated or unsaturated polybasic acid anhydride to the resin; an emulsion of the resin or the like.

  In the composition, for the purpose of adjusting coating properties and other purposes, leveling agents such as silicone, (meth) acrylate copolymer, and fluorosurfactant as necessary; thixotropic agents such as aerosil; hydroquinone Polymerization inhibitors such as hydroquinone monomethyl ether, pyrogallol, tert-butylcatechol, phenothiazine; antihalation agents; flame retardants; plating resistance improvers; antifoaming agents; antioxidants; pigment wetting agents; Dyes; various additives such as natural or synthetic rubber powders may be contained. Further, the composition may contain a surfactant, a polymer dispersant and the like in order to improve dispersion stability.

  Moreover, an inert solid powder may be contained in the composition. Specific examples of the inert solid powder include extender pigments or colored pigments such as talc, silica, aluminum hydroxide, titanium oxide, barium sulfate, kaolin, calcium carbonate, and phthalocyanine; fine organic polymer particles such as polyethylene, nylon, and polyester; Examples include thixotropic agents such as Aerosil. In particular, when an extender is contained in the composition, it is preferable in that the peelability when the cured film is peeled off with an alkaline solution is improved.

[Production of water-based photosensitive resin composition]
The water-based photosensitive resin composition is produced by blending and mixing the above components. During the production of this composition, the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) are neutralized with the amine compound (C), and then the neutralized carboxyl group-containing resin (A) and the carboxyl group are neutralized. It is preferable that a polymerizable unsaturated compound (D) and a photoinitiator (E) are added to the aqueous solution containing the containing resin (B).

  More specifically, it is preferable that the aqueous photosensitive resin composition is produced through the following steps (1) to (6).

  Step (1); First, a carboxyl group-containing resin (A) and a carboxyl group-containing resin (B) are synthesized by a technique such as the solution polymerization method described above.

  Step (2): An organic solvent solution of the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) prepared in Step (1) is mixed to prepare a mixed solution, and a predetermined amount of amine is added to the mixed solution. Compound (C) is added.

  Step (3): While stirring the solution prepared in Step (2), water (F) is added to this solution.

  Step (4); The organic solvent is removed from the solution prepared in Step (3) by distillation under reduced pressure, and the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) neutralized with the amine compound (C) are obtained. An aqueous solution containing is prepared. The conditions for vacuum distillation are appropriately adjusted so that the organic solvent is sufficiently removed and a predetermined amount of water (F) is contained in the aqueous solution. For example, using an oil rotary vacuum pump, The vacuum distillation can be carried out.

  Step (5): Separately from the preparation of the aqueous solution in steps (1) to (4), a solution in which the photopolymerization initiator (E) is dissolved in the polymerizable unsaturated compound (D) is prepared.

  Step (6): The aqueous photosensitive resin composition is produced by adding the solution prepared in Step (5) to this aqueous solution while stirring the aqueous solution prepared in Step (4) at high speed.

[Production of cured product of water-based photosensitive resin composition and printed wiring board]
The water-based photosensitive resin composition according to the present invention is used for various applications, but is particularly preferably used for forming a conductor wiring pattern of a printed wiring board. That is, the water-based photosensitive resin composition according to the present invention is used as a resist ink such as an etching resist ink or a plating resist ink for manufacturing a printed wiring board, and a film-like cured product (resist having an appropriate pattern is formed from this composition. It is preferable that a coating is formed.

  When forming the resist film, for example, first, the aqueous photosensitive resin composition is applied to the substrate, and then the aqueous photosensitive resin composition is dried to form a photocurable dry film. After this dry film is exposed to an appropriate pattern, the exposed portion is photocured to form a cured film, and then the entire film on the substrate is subjected to a development treatment with water or an alkaline solution so that it is not exposed. Part is removed. Thereby, a resist film composed of a cured film remaining on the substrate is formed. The resist film is peeled from the substrate by being etched with an alkaline solution after the substrate is subjected to etching or plating.

  A method for producing a printed wiring board that involves forming an etching resist film using the aqueous photosensitive resin composition will be described in more detail. This printed wiring board is manufactured, for example, through the following steps (1) to (4).

  Step (1): A water-based photosensitive resin composition is applied to the metal layer of the insulating substrate having a metal layer on the outer surface, and then dried to form a photocurable dry film.

  As an insulating substrate, for example, paper base phenol resin, paper base epoxy resin, paper base polyester resin, glass base epoxy resin, glass base Teflon (registered trademark) resin, glass base polyimide resin, composite resin, etc. Synthetic resin substrate formed; Metal-based insulating substrate in which a metal plate formed of iron, stainless steel, aluminum, etc. is coated with an epoxy resin or the like; insulation treatment; alumina ceramic, low-temperature fired ceramic, nitriding Examples thereof include a ceramic substrate formed from aluminum ceramic or the like. Moreover, when a flexible printed wiring board is produced, flexible insulating substrates, such as a polyimide film, are mentioned as an insulating substrate.

  The metal layer is formed from a metal foil such as a copper foil laminated on the insulating substrate, a metal plating layer such as a copper plating layer, or the like. In addition, a metal layer made of copper, aluminum, silver, gold, iron, nickel, chromium, or an alloy of these metals is formed on a flexible insulating substrate by, for example, metalizing method, casting method, laminating method, etc. May be.

  A water-based photosensitive resin composition prepared as a photo-etching resist ink or the like is applied to the surface of the metal layer formed on such an insulating substrate. The water-based photosensitive resin composition is applied by an appropriate method such as an immersion method, a spray method, a spin coater method, a roll coater method, a curtain coater method, or a screen printing method. The aqueous photosensitive resin composition is dried at, for example, 60 to 120 ° C. to form a dry film.

  Step (2): After the dry film is exposed, the resist film having a predetermined pattern is formed by developing with water or a dilute alkaline solution.

  In the exposure of the dry film, for example, a negative mask on which an appropriate pattern is drawn is in direct contact with the surface of the dry film, or the dry film is exposed to the dry film through the negative mask in a state where the negative mask is arranged with a space from the dry film. On the other hand, ultraviolet rays are irradiated from an appropriate light source such as a chemical lamp, a low pressure mercury lamp, a medium pressure mercury lamp, a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a xenon lamp or a metal halide lamp. The exposed portion of the dry film is cured to form a cured film.

  The exposed film is developed by being treated with water or a dilute alkaline solution, and the non-exposed portion of the film is removed. Examples of the diluted alkaline solution include sodium carbonate aqueous solution, potassium carbonate aqueous solution, ammonium carbonate aqueous solution, sodium hydrogen carbonate aqueous solution, potassium hydrogen carbonate aqueous solution, ammonium hydrogen carbonate aqueous solution, sodium hydroxide aqueous solution, potassium hydroxide aqueous solution, ammonium hydroxide aqueous solution, water A lithium oxide aqueous solution or the like is used. Further, an aqueous solution of an organic amine such as monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine, tetramethylammonium hydroxide may be used. These dilute alkaline solutions are used singly or in combination. The solvent contained in the dilute alkaline solution is not limited to water alone, but may be a mixture of water and a hydrophilic organic solvent such as lower alcohols.

  A resist film (etching resist film) is formed by the cured film remaining on the surface of the metal layer after the development treatment.

  Step (3): A portion of the metal layer not covered with the resist film is removed by etching.

  A known appropriate method can be employed for the etching process. For example, a portion of the metal layer made of copper that is not covered with the resist film is removed by being treated with an etching solution such as a ferric chloride aqueous solution or a cupric chloride aqueous solution.

  Step (4): The resist film is peeled off by being treated with an alkaline solution.

  Examples of the alkaline solution include sodium carbonate aqueous solution, potassium carbonate aqueous solution, ammonium carbonate aqueous solution, sodium hydrogen carbonate aqueous solution, potassium hydrogen carbonate aqueous solution, ammonium hydrogen carbonate aqueous solution, sodium hydroxide aqueous solution, potassium hydroxide aqueous solution, ammonium hydroxide aqueous solution, lithium hydroxide An aqueous solution or the like is used. Further, an aqueous solution of an organic amine such as monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, triisopropanolamine, tetramethylammonium hydroxide may be used. These alkaline solutions are used singly or as a mixture of two or more. The solvent contained in the alkaline solution is not limited to water alone, but may be a mixture of water and a hydrophilic organic solvent such as lower alcohols.

  As described above, the water-based photosensitive resin composition according to the present invention is suitably used for the production of printed wiring boards, particularly for the production of flexible printed wiring boards. The present invention can also be applied to various uses such as.

  Hereinafter, the present invention will be described based on examples, but the present invention is not limited thereto. The “parts” and “%” shown below are all based on mass.

Moreover, the weight average molecular weight was performed on condition of the following using the GPC measuring apparatus (SHODEX SYSTEM11) by Showa Denko KK.
-Column: SHODEX KF-800P, KF-805, KF-803, KF-801 in series-Moving bed: THF (tetrahydrofuran)
-Flow rate: 1 ml / min-Column temperature: 45 ° C
・ Detector: RI
・ Conversion: Polystyrene

[Synthesis Example 1]
(Copolymerization reaction)
In a four-necked flask equipped with a reflux condenser, a thermometer, a glass tube for nitrogen substitution and a stirrer, 25 parts of methacrylic acid, 105 parts of methyl methacrylate, 50 parts of n-butyl methacrylate, 20 parts of styrene, 0.5 part of lauryl mercaptan 2,2′-azobis (2,4-dimethylvaleronitrile) 4 parts and ethanol 200 parts were added, heated in a nitrogen stream and polymerized at 65 ° C. for 5 hours to obtain a copolymer solution.

(Addition reaction)
To the above copolymer solution, 0.05 part of hydroquinone, 29 parts of glycidyl methacrylate and 0.2 part of dimethylbenzylamine are added, and an addition reaction is performed at 75 ° C. for 24 hours, and the weight average molecular weight is 15000 and the acid value is 20. A group-containing resin solution was obtained.

(Preparation of aqueous dispersion)
To the above solution, 6 parts of diethylethanolamine was added and stirred, 360 parts of ion-exchanged water was added, and the mixture was further stirred for 30 minutes to obtain a uniform solution. This solution was distilled under reduced pressure at 40 ° C. for 3 hours using an evaporator to remove ethanol as an organic solvent to obtain an aqueous dispersion (A-1-1) of a carboxyl group-containing resin. The neutralization rate of the carboxyl group-containing resin with diethylethanolamine is 60%, and the resin solid content of the aqueous dispersion (A-1-1) is 40% by mass. Moreover, when this water dispersion (A-1-1) was measured with the gas chromatography, the content rate of the organic solvent (ethanol) was 1.1 mass%.

[Synthesis Examples 2 to 5]
In Synthesis Example 1, the raw material components and the amounts used thereof were changed as shown in Table 1, and the rest of the procedure was the same as in Synthesis Example 1 except that water of the carboxyl group-containing resin having the weight average molecular weight and acid value shown in Table 1 was used. Dispersions (A-1-2) to (A-1-5) were prepared. Table 1 shows the resin solid content of these aqueous dispersions (A-1-2) to (A-1-5), the neutralization rate of the carboxyl group-containing resin, and the organic solvent content.

[Synthesis Example 6]
(Copolymerization reaction)
In a four-necked flask equipped with a reflux condenser, a thermometer, a glass tube for nitrogen substitution and a stirrer, 10 parts of methyl methacrylate, 10 parts of styrene, 180 parts of glycidyl methacrylate, 1.5 parts of lauryl mercaptan, 2,2′-azobis 5 parts of (2,4-dimethylvaleronitrile) and 200 parts of methyl ethyl ketone were added, heated in a nitrogen stream, and polymerized at 65 ° C. for 5 hours to obtain a copolymer solution.

(Addition reaction)
To this copolymer solution, 0.05 part of hydroquinone, 91 parts of acrylic acid, and 0.2 part of dimethylbenzylamine were added, followed by an addition reaction at 75 ° C. for 24 hours, followed by 102 parts of trimellitic anhydride, and 75 The mixture was reacted at 0 ° C. for 8 hours to obtain a carboxyl group-containing resin solution having a weight average molecular weight of 3000 and an acid value of 150.

(Preparation of aqueous dispersion)
To this carboxyl group-containing resin solution, 54 parts of triethylamine was added and stirred, and 302 parts of ion-exchanged water was added and stirred for another 30 minutes to obtain a uniform solution. This solution was distilled under reduced pressure at 40 ° C. for 3 hours using an evaporator to remove methyl ethyl ketone, which is an organic solvent, to obtain an aqueous dispersion (A-2-1) of a carboxyl group-containing resin. The neutralization rate of the carboxyl group-containing resin with triethylamine is 50%, and the resin solid content of the aqueous dispersion (A-2-1) is 60% by mass. Moreover, when this water dispersion (A-2-1) was measured with the gas chromatography, the content rate of the organic solvent (methyl ethyl ketone) was 0.01 mass%.

[Synthesis Examples 7 to 10]
In Synthesis Example 6, the raw material components and the amounts used thereof were changed as shown in Table 1, and the rest of the procedure was the same as in Synthesis Example 6 except that water of the carboxyl group-containing resin having the weight average molecular weight and acid value shown in Table 1 was used. Dispersions (A-2-2) to (A-2-5) were prepared. Table 1 shows the resin solid content of these aqueous dispersions (A-2-2) to (A-2-5), the neutralization rate of the carboxyl group-containing resin, and the organic solvent content.

[Synthesis Example 11]
(Copolymerization reaction)
In a four-necked flask equipped with a reflux condenser, a thermometer, a glass tube for nitrogen substitution and a stirrer, 25 parts of methacrylic acid, 94 parts of methyl methacrylate, 60 parts of n-butyl methacrylate, 20 parts of styrene, tetraethylene glycol diacrylate 1 Part, 2,2′-azobis (2,4-dimethylvaleronitrile) 2 parts, ethanol 200 parts, heated in a nitrogen stream, polymerized at 65 ° C. for 5 hours, weight average molecular weight 120,000, acid value A carboxyl group-containing resin solution of 80 was obtained.

(Preparation of aqueous dispersion)
To the above solution, 24 parts of diethylethanolamine was added and stirred, 527 parts of ion-exchanged water was added, and the mixture was further stirred for 30 minutes to obtain a uniform solution. This solution was distilled under reduced pressure at 40 ° C. for 3 hours using an evaporator to remove ethanol, which is an organic solvent, to obtain an aqueous dispersion (B-1-1) of a carboxyl group-containing resin. The neutralization rate of the carboxyl group-containing resin with diethylethanolamine is 70%, and the resin solid content of this aqueous dispersion (B-1-1) is 30% by mass. Moreover, when this water dispersion (B-1-1) was measured with the gas chromatography, the content rate of the organic solvent (ethanol) was 1.5 mass%.

[Synthesis Examples 12 to 17]
In Synthesis Example 11, the raw material components and the amounts used thereof were changed as shown in Table 1, and other than that, in the same manner as in Synthesis Example 11, the water of the carboxyl group-containing resin having the weight average molecular weight and acid value shown in Table 1 Dispersions (B-1-2) to (B-1-7) were prepared. Table 1 shows the resin solid content of these aqueous dispersions (B-1-2) to (B-1-7), the neutralization rate of the carboxyl group-containing resin, and the organic solvent content.

  The details of each component in Table 1 are as follows.

MAA: methacrylic acid AA: acrylic acid MMA: methyl methacrylate BMA: n-butyl methacrylate HEMA: hydroxyethyl methacrylate DEAA: N, N-diethylacrylamide EGDA: tetraethylene glycol diacrylate GMA: glycidyl methacrylate ABN-V: 2, 2 ′ -Azobis (2,4-dimethylvaleronitrile) (polymerization initiator manufactured by Nippon Finechem Co., Ltd., trade name ABN-V)
MEK: methyl ethyl ketone HQ: hydroquinone DMBA: dimethylbenzylamine SA: succinic anhydride

[Examples 1-14, Comparative Examples 1-4]
While maintaining the aqueous dispersion of the carboxyl group-containing resin obtained in each of the above synthesis examples at 60 ° C. and stirring with a homomixer, the polymerizable unsaturated compounds shown in Table 2 in this aqueous dispersion of the carboxyl group-containing resin Then, after adding a photopolymerization initiator, a dye and an additive, an aqueous photosensitive resin composition was prepared by stirring for 30 minutes.

  Details of each component in Table 2 are as follows.

Polymerizable unsaturated compound A: trimethylolpropane EO modified (3 mol) triacrylate Polymerized unsaturated compound B: pentaerythritol EO modified (4 mol) tetraacrylate Photopolymerization initiator A: 2-methyl-1- [4- (Methylthio) phenyl] -2-morpholinopropan-1-one Photopolymerization initiator B: 2,4-diethylthioxanthone Photopolymerization initiator C: (2,4,6-trimethylbenzoyl) diphenylphosphine oxide Dye: Dainippon Colorant manufactured by Ink Chemical Industry Co., Ltd. (trade name Disperse Blue Uni 614)
Additive A: Surface conditioner manufactured by Big Chemie (trade name BYK-348)

〔Evaluation test〕
In order to confirm the performance of the printed wiring board produced using this photo-etching resist ink using the water-based photosensitive resin composition obtained in each example and comparative example as a photo-etching resist ink, the following I to VI are sequentially applied. A test piece was prepared by the above process.

I. Coating process The water-based photosensitive resin composition of each Example and Comparative Example is coated on a polyimide non-adhesive copper-clad laminate (trade name “Upicel N” manufactured by Ube Industries, Ltd .; film thickness 25 μm, electrolytic copper thickness 8 μm). It was applied by a bar coater.

II. Drying step After the coating step, the coating film on the substrate surface was dried by heating at 100 ° C. for 10 minutes to form a dry coating film having a thickness of 10 μm.

III. Exposure Step Next, a reduced pressure contact type double-side exposure machine “ORC HMW680GW” manufactured by Oak Manufacturing Co., Ltd.
A mask depicting a pattern composed of concentric circles each having a line width and a line width of 20 μm is directly applied to the dry film surface, and the dry film is irradiated with ultraviolet rays having an exposure amount shown in Table 3 through this mask. Then, selective exposure of the dry film on the substrate surface was performed.

  The exposure amount of ultraviolet rays shown in Table 3 is a state in which an exposure test mask “Step Tablet PHOTEC 21-stage” manufactured by Hitachi Chemical Co., Ltd. is directly applied to a dry film formed under the same conditions as described above and adhered under reduced pressure. The exposure amount of the ultraviolet rays is such that the remaining step step becomes 7 steps when it is irradiated with ultraviolet rays and subsequently developed using a 1% sodium carbonate aqueous solution as a developer. This exposure amount is a value derived for each aqueous photosensitive resin composition by a preliminary test.

IV. Development process The substrate after the exposure process is treated with a developer (1% sodium carbonate aqueous solution at 30 ° C.) to remove the non-exposed portion of the dry film, and the resist film is formed by the patterned cured film remaining on the substrate. Formed.

V. Etching Step By treating the substrate after the development step with a ferric chloride etchant at 40 ° C., a portion of the copper foil on the substrate that was not covered with the resist film was removed by etching.

VI. Stripping Step The substrate after the etching step was treated with a 3% aqueous sodium hydroxide solution at 40 ° C. to remove the resist film, and a test piece (printed wiring board) was produced.

(Pencil hardness)
The pencil hardness of the dried film formed in the drying step was measured according to JIS K-5600-5-4-1999 using Mitsubishi High Uni (manufactured by Mitsubishi Pencil Co., Ltd.).

(Adhesion)
In accordance with the test method of JIS D 0202, the dry film formed in the above drying process is cross-cut in a grid pattern, and then the state of peeling after the peeling test with a cellophane adhesive tape is visually observed. Evaluated according to.
A: No peeling occurred at the crosscut portion.
○: Partial peeling occurred at the crosscut portion when the tape was peeled off.
X: Swelling or peeling occurred in the resist film without performing a cross-cut test.

(Tackiness)
In a state where the dry films are brought into contact with each other by overlapping the substrates on which the dry films are formed by the drying step, and a load of 98 kPa (1 kgf / cm ² ) is applied in the stacking direction of the substrates, It was left for 1 week in an atmosphere of 55% RH. After the treatment, the substrates were separated from each other, and the appearance of the dried film on the substrate was observed with a 100-fold microscope to confirm that the dried film was peeled off and the surface condition was abnormal. Based on the results, the tackiness of the dried film was evaluated according to the following criteria.
(Double-circle): A dry film does not peel and a contact mark is not recognized.
○: A contact mark is observed on the surface of the dry film.
X: Peeling occurs in the dry film.

(Flexibility of dry film)
The substrate on which the dry film was formed by the drying step was folded 180 ° so that the dry film faced outward, and the bent portion of this dry film was observed with a 50 × optical microscope to confirm the presence or absence of cracks. Based on the results, the flexibility of the dried film was evaluated according to the following criteria.
(Double-circle): A crack is not recognized at all.
○: Slight cracks are observed.
X: Many cracks are recognized.

(Adhesion after bending of dry film)
The substrate on which the dry film was formed by the drying process was folded 180 ° so that the dry film faced outward, and a peel test using a cellophane adhesive tape was performed on the folded portion of the dry film. The presence or absence of peeling at the bent portion of the dried coating after the test was visually observed, and the adhesion after bending of the dried coating was evaluated according to the following criteria.
(Double-circle): Peeling is not recognized at all.
○: Slight peeling is observed.
X: Many peeling is recognized.

(Bendability of resist film)
The substrate on which the resist film was formed by the development process was bent 180 ° so that the resist film was on the outside, and the appearance of the resist film at the bent portion was observed with a 50 × optical microscope to observe the presence or absence of cracks. Based on this result, the flexibility of the resist film was evaluated according to the following criteria.
(Double-circle): A crack is not recognized at all.
○: Slight cracks are observed.
X: Many cracks are recognized.

(Adhesion after bending of resist film)
The substrate on which the resist film was formed by the development step was bent 180 ° so that the resist film was on the outside, and then a peeling test using a cellophane adhesive tape was performed on the bent portion of the resist film. The presence or absence of peeling at the bent portion of the resist film after the test was visually observed, and the adhesion after bending of the resist film was evaluated according to the following criteria.
(Double-circle): Peeling is not recognized at all.
○: Slight peeling is observed.
X: Many peeling is recognized.

(Resolution)
The appearance of the conductor wiring formed on the test piece was observed, and the resolution was evaluated according to the following criteria.
A: The conductor wiring has a clear concentric pattern shape.
○: The conductor wiring has a concentric pattern, but a part of the conductor wiring is missing.
X: The conductor wiring does not have a concentric pattern shape.

(Etch resistance)
The resist film after the etching process was observed, and the etching resistance (acid resistance) was evaluated according to the following criteria.
A: No abnormality is observed in the appearance of the resist film.
○: A slight change in appearance is recognized.
X: Peeling is observed in the resist film.

(Alkali peelability)
The substrate surface after the peeling process was observed, and the alkali peelability of the resist film was evaluated according to the following criteria.
A: No resist film remains on the substrate.
○: A slight residual resist film is observed on the substrate.
X: The resist film remains on the substrate without being removed.

  Table 3 shows the results of the above evaluation tests.

  As described above, in Examples 1 to 14, the obtained resist and the printed wiring board have excellent characteristics, and in particular, have excellent adhesion to the substrate, flexibility, and releasability of the dry film. confirmed.

Claims (13)

(A) a carboxyl group-containing resin having a polymerizable unsaturated bond,
(B) a carboxyl group-containing resin having a weight average molecular weight of 100,000 to 10,000,000 and having no polymerizable unsaturated bond,
(C) an amine compound,
(D) a polymerizable unsaturated compound,
(E) contains a photopolymerization initiator and (F) water,
Content of the said carboxyl group-containing resin (A) is 10-60 mass% with respect to the composition whole quantity,
Content of the said carboxyl group-containing resin (B) is 0.1-10 mass% with respect to the composition whole quantity, The water-based photosensitive resin composition characterized by the above-mentioned. The carboxyl group-containing resin (A) includes a carboxyl group-containing resin (A-1) having a polymerizable unsaturated bond,
The carboxyl group-containing resin (A-1) is a polymer in a polymer produced by a polymerization reaction between an ethylenically unsaturated compound (a) having a carboxyl group and an ethylenically unsaturated compound (b) having no carboxyl group. 2. The aqueous photosensitive resin composition according to claim 1, wherein the aqueous photosensitive resin composition is produced by a reaction between a part of a carboxyl group and an ethylenically unsaturated compound (c) having an epoxy group.   The aqueous photosensitive resin composition according to claim 2, wherein the carboxyl group-containing resin (A-1) has an acid value in the range of 20 to 500 and a weight average molecular weight in the range of 10,000 to 100,000. The carboxyl group-containing resin (A) includes a carboxyl group-containing resin (A-2) having a polymerizable unsaturated bond,
The carboxyl group-containing resin (A-2) is a polymer produced by a polymerization reaction between an ethylenically unsaturated compound (d) having an epoxy group and an ethylenically unsaturated compound (e) having no epoxy group. The epoxy group of the present invention reacts with the ethylenically unsaturated compound (f) having a carboxyl group, and the hydroxyl group produced by this reaction reacts with the acid anhydride (g). The aqueous photosensitive resin composition according to any one of 1 to 3.   The aqueous photosensitive resin composition according to claim 4, wherein the carboxyl group-containing resin (A-2) has an acid value in the range of 20 to 500 and a weight average molecular weight in the range of 1000 to 50000. The carboxyl group-containing resin (B) includes a carboxyl group-containing resin (B-1),
The carboxyl group-containing resin (B-1) is produced by a polymerization reaction between an ethylenically unsaturated compound (h) having a carboxyl group and an ethylenically unsaturated compound (i) having no carboxyl group. The water-based photosensitive resin composition according to any one of claims 1 to 5.   The aqueous photosensitive resin composition according to claim 6, wherein the acid value of the carboxyl group-containing resin (B-1) is in the range of 50 to 800.   The water-based photosensitive composition according to any one of claims 1 to 7, wherein the carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) are neutralized with an amine compound (C). Resin composition.   The water-based photosensitive resin composition according to claim 1, wherein the amine compound (C) contains a tertiary amine.   Content of the said amine compound (C) is the range of 0.2-1.0 equivalent with respect to 1 mol of carboxyl groups contained in carboxyl group-containing resin (A) and carboxyl group-containing resin (B). The water-based photosensitive resin composition according to any one of claims 1 to 9, wherein A method for producing a water-based photosensitive resin composition according to any one of claims 1 to 10,
The carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) are neutralized with the amine compound (C), and the aqueous solution containing the neutralized carboxyl group-containing resin (A) and the carboxyl group-containing resin (B) is added. A method for producing an aqueous photosensitive resin composition, comprising a step of adding a polymerizable unsaturated compound (D) and a photopolymerization initiator (E). It is a manufacturing method of the water-based photosensitive resin composition as described in any one of Claims 1 thru | or 10, Comprising: The manufacturing of the water-based photosensitive resin composition characterized by including the following process (1) to (6). Method.
(1) Step of synthesizing carboxyl group-containing resin (A) and carboxyl group-containing resin (B) in an organic solvent (2) The carboxyl group-containing resin (A) and carboxyl group-containing prepared in step (1) Step (3) Adding an amine compound (C) to the mixed solution and mixing the organic solvent solution of the resin (B). (3) While stirring the solution prepared in the step (2), water (F) is added to the solution. (4) Step of removing the organic solvent from the solution prepared in the step (3) by distillation under reduced pressure (5) Step of dissolving the photopolymerization initiator (E) in the polymerizable unsaturated compound (D) (6) A step of adding the solution prepared in the step (5) to the aqueous solution while stirring the aqueous solution prepared in the step (4). It is a method of manufacturing a printed wiring board using the water-based photosensitive resin composition as described in any one of Claims 1 thru | or 10, Comprising: The following process (1) to (4) is included, It is characterized by the above-mentioned. Manufacturing method of printed wiring board.
(1) The water-based photosensitive resin composition according to any one of claims 1 to 10 is applied to the metal layer of the insulating substrate having a metal layer on the outer surface, and then dried to be photocured. (2) Step of forming a resist film having a predetermined pattern by developing with water or a dilute alkaline solution after the photocurable film is exposed to light (2) A step of removing a portion of the metal layer not covered with the resist film by an etching process (4) A step of peeling the resist film by treating with an alkaline solution