JP4793683B2 - Calculation method, adjustment method, exposure method, image forming state adjustment system, and exposure apparatus - Google Patents

Description

  The present invention relates to a calculation method, an adjustment method, an exposure method, an image formation state adjustment system, and an exposure apparatus, and more particularly, calculates adjustment data for adjusting optical characteristics of an optical system that forms an image of a pattern with an energy beam. Calculation method, adjustment method for adjusting the optical characteristics of the optical system, exposure method using the adjustment method, image formation state adjustment system for adjusting the formation state of an image of a pattern formed through an optical system by an energy beam, and The present invention relates to an exposure apparatus including the system.

  In the case of manufacturing a semiconductor element or the like, it is necessary to form different circuit patterns by stacking several layers on an object such as a wafer or a glass plate (hereinafter collectively referred to as “wafer”). In order to perform this superposition accurately, it is necessary to adjust the imaging performance of the projection optical system of an exposure apparatus (so-called stepper, scanning stepper, etc.) used for manufacturing the semiconductor element to a desired state. It is essential.

  For adjustment of the imaging performance of the projection optical system, for example, an imaging performance adjustment mechanism that adjusts the position and inclination of an optical element such as a lens element constituting the projection optical system is used. However, the imaging performance varies depending on exposure conditions such as illumination conditions and patterns used.

  However, due to the absorption of illumination light (exposure light) during exposure, the imaging performance of the projection optical system (including various aberrations) gradually changes, and further exceeds the required specification range due to long exposure. End up. For this reason, in order to reduce the influence of fluctuations (irradiation fluctuations) in imaging performance (for example, focus, distortion, etc.) due to absorption of illumination light of the projection optical system during exposure, the measurement marks formed on the reticle are For example, an aerial image of a line-and-space pattern (hereinafter referred to as an L / S pattern) having a line width (half pitch) of 150 nm on a wafer is measured, and the imaging performance of the projection optical system is changed based on the measurement result. The amount is calculated to adjust the focus error, distortion error, and the like (see, for example, Patent Document 1).

  However, when an actual device pattern having a line width different from that of the measurement mark, for example, an image of an L / S pattern having a line width of 60 nm, 70 nm or the like is formed on the wafer under various illumination conditions such as dipole illumination conditions. Recently, it has been found that it is difficult to reduce the focus error and the distortion error even after the above adjustment.

Japanese Patent Laid-Open No. 2003-218024

The present invention has been made under the circumstances described above. From a first viewpoint, the present invention is a calculation method for calculating adjustment data for adjusting optical characteristics of an optical system that forms an image of a plurality of patterns with an energy beam. And calculating the fluctuation information of the wavefront aberration of the optical system accompanying the irradiation of the energy beam; and based on the calculated fluctuation information of the wavefront aberration and information on the plurality of patterns . In order to correct the change in the optical characteristics of the optical system due to irradiation so as to be optimal for the second pattern among the first pattern included in the plurality of patterns and the second pattern different from the first pattern. And calculating the adjustment data.

According to this, the fluctuation information of the wavefront aberration of the optical system accompanying the irradiation of the energy beam is calculated, and based on the calculated fluctuation information of the wavefront aberration and the information related to the pattern, the optical system of the optical system by the irradiation of the energy beam is calculated . Since adjustment data for correcting an optical characteristic change so as to be optimal with respect to the second pattern among the first pattern and the second pattern included in the plurality of patterns is calculated, Adjustment data of optical characteristics of the optical system based on the information can be calculated. Therefore, it is possible to calculate the adjustment data of the optical characteristics of the optical system with higher accuracy than in the case where the change in the imaging performance of the optical system is obtained using the measurement mark as in the prior art. By adjusting the optical characteristics of the optical system using the adjustment data, it is possible to adjust the optical characteristics with high accuracy.

The present invention is, to a second aspect, a plurality of patterns to a method of adjusting the optical characteristics of the optical system for forming an image of, variation information of the wavefront aberration issued calculated with an energy beam, said plurality Change in the optical characteristics of the optical system due to the irradiation of the energy beam based on the information on the pattern of the first pattern and the second pattern different from the first pattern included in the plurality of patterns. Adjusting the two patterns so as to be optimal .

According to this, a change in the optical characteristics of the optical system due to the absorption of the energy beam based on the information on the pattern to be imaged is compared with the second pattern among the first pattern and the second pattern included in the plurality of patterns. from being adjusted to optimize Te, as compared with the case of obtaining the change in the imaging performance of optical system using a conventional measurement marks, it is possible to adjust the high-precision optical properties.

  According to a third aspect of the present invention, there is provided a step of adjusting an optical characteristic of the optical system using the adjustment method of the present invention; and exposing an object with an energy beam through the optical system having the adjusted optical characteristic. And a step of forming an image of a pattern on the object.

  According to this, an object is exposed with an energy beam through an optical system whose optical characteristics are adjusted with high accuracy according to the pattern, and an image of the pattern is formed on the object. An image can be formed.

According to a fourth aspect of the present invention, there is provided an image forming state adjusting system for adjusting an image forming state of a plurality of patterns formed by an energy beam through an optical system, wherein the image forming state adjusting system accompanies the irradiation of the energy beam. A first calculation device that calculates fluctuation information of the wavefront aberration of the optical system; and based on the calculated fluctuation information of the wavefront aberration and information on the plurality of patterns , the optical of the optical system by irradiation of the energy beam The change in characteristics is corrected so as to be optimal with respect to the second pattern among the first pattern included in the plurality of patterns and the second pattern different from the first pattern, and the change is made via the optical system. And a second calculation device that calculates adjustment data for adjusting an image formation state of a pattern to be formed .

According to this, the fluctuation information of the wavefront aberration of the optical system accompanying the irradiation of the energy beam is calculated by the first calculation device, and the fluctuation information of the calculated wavefront aberration and the information regarding the pattern are calculated by the second calculation device. Based on this, the optical characteristic change of the optical system due to the irradiation of the energy beam is corrected so as to be optimal for the second pattern among the first pattern and the second pattern included in the plurality of patterns. Adjustment data for adjusting the formation state of the pattern image formed through the system is calculated. For this reason, it is possible to calculate adjustment data of the optical characteristics of the optical system based on the information related to the pattern of the image formation target, compared with the case where the change in the imaging performance of the optical system is obtained using a conventional measurement mark. Therefore, it is possible to calculate the adjustment data of the optical characteristics of the optical system with higher accuracy. Therefore, by adjusting the optical characteristics of the optical system using this calculated data, it is possible to adjust the optical characteristics with high accuracy.

  According to a fifth aspect of the present invention, there is provided an exposure apparatus that forms an image of a pattern on an object via an optical system by an energy beam, and the image forming state adjustment according to the present invention that adjusts optical characteristics of the optical system. An exposure apparatus comprising: a system; and a beam source that irradiates an energy beam through the optical system to expose the object.

  According to this, the optical characteristics of the optical system are adjusted with high accuracy by the image forming state adjustment system, and the object is exposed by irradiating the energy beam from the beam source via the optical system. Therefore, a pattern image can be accurately formed on the object.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 1 shows a schematic configuration of an exposure apparatus 10 according to an embodiment. The exposure apparatus 10 is a step-and-scan type scanning projection exposure apparatus, that is, a so-called scanning stepper (also called a scanner).

  The exposure apparatus 10 includes an illumination system including a light source 14 and an illumination optical system 12, a reticle stage RST that holds a reticle R, a projection optical system PL, and a wafer stage WST that holds a wafer W and can move freely in an XY plane. And a control system for controlling them. In addition, although not shown in the drawings, the components other than the light source 14 and the control system among the above components are actually not shown in which environmental conditions such as internal temperature and pressure are maintained with high accuracy. It is housed in an environmental control chamber (environmental chamber).

  As the light source 14, an ArF excimer laser light source that emits pulsed laser light LB having a wavelength of 193 nm is used here as an example. The light source 14 is connected to the illumination optical system 12 inside the environment control chamber via a light transmission optical system (not shown). The light source 14 is controlled by the main controller 50 to turn on / off the laser emission, the center wavelength, the spectral half width, the repetition frequency, and the like.

  The illumination optical system 12 includes a beam expander (not shown), a diffractive optical element unit 20, a shaping optical system 24 including an optical integrator (fly eye lens in this embodiment) 22, relay optical systems 28A and 28B, a reticle blind. 30, a mirror M, a condenser lens 32, and the like. As the optical integrator, a rod type (internal reflection type) integrator, a diffractive optical element, or the like can be used.

  The diffractive optical element unit 20 is composed of a turret substrate that is rotatable around a predetermined axis parallel to the optical axis IX of the illumination optical system 12, and a plurality of, for example, six diffractive optical elements are arranged on the turret substrate at substantially equal angular intervals. 18A to 18F (two diffractive optical elements (18A and 18D are shown in FIG. 1) are disposed in FIG. 1. The diffractive optical element 18A is a diffractive optical element for normal illumination (circular illumination), The diffractive optical element 18B is a diffractive optical element for annular illumination, the diffractive optical element 18C is a diffractive optical element for quadrupole illumination, and the diffractive optical element 18D is X-polar dipole illumination (dipole X illumination). The diffractive optical element 18E is a diffractive optical element for Y-direction dipole illumination (dipole Y illumination), and the remaining diffractive optical element 18F is diffracted light for so-called small σ. The diffractive optical element unit 20 is rotated by a driving device 40 such as a motor controlled by the main control device 50, whereby a desired diffractive optical element 18A-18F is selected. Since the diffractive optical element can be positioned in the illumination optical path, a desired illumination condition can be realized in this embodiment.

  An afocal lens (relay optical system) and a zoom lens (magnification variable optical system) (not shown) in which a conical axicon or the like is disposed in the internal optical path, and a fly-eye lens 22 are disposed in the molding optical system 24. Has been. The afocal lens is set so that the front focal position of the afocal lens substantially coincides with the position of the diffractive optical element installed on the optical axis IX, and the rear focal position substantially coincides with the front focal position of the zoom lens. It is a focal system (non-focus optical system). Accordingly, the substantially parallel light beam incident on the diffractive optical element forms a light intensity distribution having a shape corresponding to the illumination condition set on the pupil plane of the afocal lens, and then is emitted as a substantially parallel light beam from the afocal lens. Then, the light enters the fly-eye lens 22 through a zoom lens (variable magnification optical system). In this case, the entrance surface of the fly-eye lens 22 is disposed in the vicinity of the rear focal position of the zoom lens 22. Accordingly, an illumination field of a light intensity distribution having a shape corresponding to the set illumination condition is formed on the entrance surface of the fly-eye lens 22 in the same manner as the pupil surface of the afocal lens. Here, the overall shape of the illumination field changes in a similar manner depending on the focal length of the zoom lens. The change in the focal length of the zoom lens is controlled by the main controller 50 via a drive system (not shown).

  The fly-eye lens 22 forms a surface light source consisting of a number of point light sources (light source images), that is, a secondary light source in order to illuminate the reticle R with a uniform illuminance distribution. In this specification, the laser light LB emitted from the secondary light source is also referred to as “illumination light IL”.

  In the present embodiment, the reticle R is obtained by changing the intensity distribution of illumination light on the pupil plane of the illumination optical system 12 (ie, the shape and size of the secondary light source) by using a diffractive optical element, a conical axicon, and a zoom lens. An optical system that can arbitrarily set the illumination conditions is configured. Although not shown in FIG. 1, it is disclosed in a phase shifter (for example, a λ / 4 plate, a λ / 2 plate, or an optical rotator), or International Publication No. 2005/036619. An optical unit including a plurality of wedge-shaped prisms and capable of arbitrarily setting the polarization state of the illumination light, which is one of the illumination conditions, is also provided as a part of the molding optical system described above or separately from it.

  A beam splitter 26 having a small reflectance and a large transmittance is disposed on the optical path of the illumination light IL emitted from the fly-eye lens 22, and further, a relay optical system (28A) is interposed on the optical path behind the reticle splitter 30. , 28B) are arranged. The light beam from the secondary light source formed on the rear focal plane of the fly-eye lens 22 illuminates the reticle blind 30 as an illumination field stop in a superimposed manner via the first relay lens 28A.

  Here, the reticle blind 30 of the present embodiment defines the illumination area IAR irradiated with the illumination light IL on the reticle R as a slit extending in the X-axis direction, and at least the Y-axis direction of the illumination area IAR. A fixed reticle blind 30A that defines the width of the reticle R, and a movable reticle blind 30B disposed on a conjugate plane with respect to the pattern surface of the reticle R. In the movable reticle blind 30B, the shape of the opening can be changed to an arbitrary rectangular shape. The movable reticle blind 30B is driven by a blind drive system that operates based on an instruction from the main controller 50. By driving the movable reticle blind 30B at the start and end of scanning exposure to further limit the illumination area IAR, unnecessary exposure is prevented. In the present embodiment, the movable reticle blind 30 </ b> B is also used for setting an illumination area in a later-described aerial image measurement.

  The light beam that has passed through the reticle blind 30 is reflected on the reticle R held on the reticle stage RST via the condenser lens 32 after the optical path is bent vertically downward by the mirror M via the second relay lens 28B. The slit-shaped illumination area IAR is illuminated in a superimposed manner with a uniform illuminance distribution.

  On the other hand, on the optical path of the illumination light IL reflected by the beam splitter 26 in the illumination optical system 12, the condenser lens 44 and the sensitivity in the far ultraviolet region are good, and the pulse light emission of the light source 14 is detected. An integrator sensor 46 composed of a light receiving element such as a PIN photodiode having a high response frequency is disposed. Therefore, the illumination light IL reflected by the beam splitter 26 is received by the integrator sensor 46 via the condenser lens 44, and the photoelectric conversion signal of the integrator sensor 46 is converted into a hold circuit (not shown) such as a peak hold circuit and A The signal is supplied to the main controller 50 via a signal processor 80 having a / D converter.

  On reticle stage RST, reticle R is fixed by, for example, vacuum suction (or electrostatic suction). Here, reticle stage RST is two-dimensionally (in the X-axis direction and a Y-axis orthogonal thereto) in an XY plane perpendicular to optical axis AX of projection optical system PL by reticle stage drive system 56R including a linear motor or the like. Direction and a rotational direction (θz direction) around the Z axis orthogonal to the XY plane, and can be driven on the reticle base RBS at a scanning speed specified in the Y axis direction.

  On the + Y side of reticle R of reticle stage RST, a reticle fiducial mark plate (hereinafter abbreviated as “reticle mark plate”) RFM made of a glass substrate having a reference surface (in this embodiment, the lower surface of the glass substrate). Is extended in the X-axis direction. The reticle mark plate RFM is made of the same glass material as that of the reticle R, for example, synthetic quartz, fluorite, lithium fluoride, or other fluoride crystals, and is fixed to the reticle stage RST. The reference surface of the reticle mark plate RFM is set to the same height as the pattern surface of the reticle R by design, and is approximately the same size as the slit-shaped illumination area IAR, and the reference surface has projection optics. Marks for measuring imaging performance such as distortion of the system PL, curvature of field, wavefront aberration, and the like are formed.

  Although not shown in the drawing, the reference surface of the reticle mark plate RFM has, for example, a pattern including a plurality of line width (half pitch) L / S patterns having different periodic directions as, for example, wavefront aberration measurement marks. Has been.

  In reticle stage RST, openings serving as passages for illumination light IL are respectively formed below reticle R and reticle mark plate RFM. In addition, a rectangular opening larger than the illumination area IAR, which is a passage for the illumination light IL, is formed in a portion almost directly above the projection optical system PL of the reticle base RBS.

  A movable mirror 52R that reflects a laser beam from a reticle laser interferometer (hereinafter referred to as “reticle interferometer”) 54R is fixed on the reticle stage RST, and the position (Z-axis) of the reticle stage RST in the XY plane is fixed. Rotational rotation (including θz rotation) is always detected by the reticle interferometer 54R with a resolution of about 0.5 to 1 nm, for example. For example, the end surface of the reticle stage RST may be mirror-finished to form a reflecting surface (corresponding to the reflecting surface of the movable mirror 52R).

  Position information of reticle stage RST from reticle interferometer 54R is sent to stage controller 70 and main controller 50 via this. The stage control device 70 controls the movement of the reticle stage RST via the reticle stage drive system 56R in accordance with an instruction from the main control device 50.

  The projection optical system PL is disposed below the reticle stage RST in FIG. 1, and the direction of the optical axis AX is the Z-axis direction. Here, the projection optical system PL is a double-sided telecentric reduction system, and is predetermined along the optical axis AX direction. A refractive optical system composed of a plurality of lens elements 13 arranged at intervals is used. The projection magnification of the projection optical system PL can be set to 1/4, 1/5, or 1/8, for example.

Among the plurality of lens elements constituting the projection optical system PL, a part of the plurality of lens elements (hereinafter also referred to as “movable lens”) has an optical axis AX by a driving element (not shown) (for example, a piezo element). It is configured to be capable of minute driving in the direction and the direction of inclination with respect to the XY plane. In the present embodiment, it is assumed that the five lens elements 13 ₁ , 13 ₂ , 13 ₃ , 13 ₄ , and 13 ₅ on the reticle side are movable lenses. The drive voltage of each drive element (drive amount of the drive element) is controlled by the imaging performance correction controller 78 in accordance with a command from the main controller 50, and thereby the imaging performance of the projection optical system PL, for example, the image plane Curvature, distortion, magnification, spherical aberration, astigmatism, coma, and the like are corrected.

  The wafer stage WST includes an XY stage 42 and a Z tilt stage 38 mounted on the XY stage 42.

  The XY stage 42 is levitated and supported by an air bearing (not shown) above the upper surface of the wafer base 16 and is orthogonal to the Y axis direction which is the scanning direction by a linear motor (not shown) constituting the wafer stage drive system 56W. The two-dimensional drive is possible in the X-axis direction. A Z tilt stage 38 is mounted on the XY stage 42, and the wafer holder 25 is mounted on the Z tilt stage 38. The wafer W is held by the wafer holder 25 by vacuum suction or the like.

  The Z tilt stage 38 has three points on the XY stage 42 by three Z position driving units (not shown) each including an actuator (for example, a voice coil motor) and an encoder such as an optical type or a capacitance type. It is supported by. In the present embodiment, the Z tilt stage 38 is rotated by the actuators of the three Z position driving units with respect to the optical axis AX direction (Z axis direction) and the tilt direction (rotation about the X axis) with respect to the plane (XY plane) perpendicular to the optical axis. In the θx direction, which is the direction, and the θy direction, which is the rotational direction around the Y axis). Further, the drive amount (displacement amount from the reference point) of each support point by each actuator measured by each encoder is supplied to the stage control device 70 and the main control device 50 through this, and is supplied to the main control device 50. The position and leveling amount (θx rotation amount, θy rotation amount) of the Z tilt stage 38 in the Z-axis direction are calculated by the control device 50. In FIG. 1, a wafer stage drive system 56 </ b> W including a linear motor and the like that drives the XY stage 42 and three Z position drive units is shown.

  A movable mirror 52W that reflects a laser beam from a wafer laser interferometer (hereinafter referred to as a “wafer interferometer”) 54W is fixed on the Z tilt stage 38. Stage 38 (wafer stage WST) X, Y position, rotation (yawing (θz rotation around Z axis)), pitching (θx rotation around X axis), rolling (rotation around Y axis) θy rotation)) is always detected with a resolution of about 0.5 to 1 nm, for example. For example, the end surface of the Z tilt stage 38 may be mirror-finished to form a reflecting surface (corresponding to the reflecting surface of the movable mirror 52W).

  The position information (or speed information) of the Z tilt stage 38 (wafer stage WST) is supplied to the stage control device 70 and the main control device 50 via this. The stage controller 70 controls the position of the Z tilt stage 38 (wafer stage WST) in the XY plane via the wafer stage drive system 56W in accordance with an instruction from the main controller 50.

  Further, inside the Z tilt stage 38, a part of the optical system constituting the aerial image measuring device 59 used for measuring the optical characteristics of the projection optical system PL is arranged. This aerial image measuring device 59 includes a stage side component provided on the Z tilt stage 38 (that is, a slit plate 90, an optical system disposed inside the Z tilt stage 38 (relay optical system, optical path bending mirror, transmission path). And an external stage component (such as a mirror 96 and a light receiving unit 92) provided outside the wafer stage WST.

  More specifically, as shown in FIG. 1, the slit plate 90 is formed from the upper side in a state of closing the opening with respect to the projecting portion 58 having an upper opening provided on the upper surface of one end of the wafer stage WST. It is inserted. The slit plate 90 has a reflective film that also serves as a light-shielding film formed on an upper surface of a rectangular light receiving glass (synthetic quartz, fluorite, etc.) in plan view (viewed from above), and a slit-like film is formed on a part of the reflective film. An opening pattern (hereinafter referred to as “slit”) is formed by multiple patterning.

  In this embodiment, it is assumed that aberrations represented by Zernike polynomials up to a predetermined order (for example, the 37th order) exceeding 9th order are measured. For this purpose, it is necessary to measure aerial images of various periodic marks having different directions and pitches as aerial images. For this purpose, it is necessary to form slits (opening patterns) arranged in a plurality of directions on the slit plate 90 as well.

  FIG. 2 shows the arrangement of a plurality of slits formed in the slit plate 90. In FIG. 2, on the slit plate 90, a slit 122b having a slit width 2D extending in the Y-axis direction and a length L, and a slit 122a extending in the X-axis direction formed by rotating the slit 122b by 90 ° are formed. ing. Further, four slits 9C, 9D, 9E, 9F each having a width 2D and a length L1 are formed on the slit plate 90. The four slits 9B to 9F are substantially at the positions of the four apexes of the square, and the two slits 122a and 122b constitute two adjacent sides of the square. In the aerial image measurement, the illumination light that has passed through the slits 122a, 122b, 9B to 9F is received by the optical sensor. In this case, in order to individually detect the illumination light that has passed through the slits 122a, 122b, and 9B to 9F, for example, a liquid crystal panel as a slit selection member is provided on the bottom surface of the slit plate 90 and passes through one selected slit. Only the illuminated light may be incident on the optical sensor.

  As an example, the slit width 2D of each slit image is about 100 to 150 nm, the length L of the slits 122a and 122b is 18 μm, and the length L1 of the slits 9C, 9D, 9E, and 9F is 3 μm. In this case, the slits 122a and 122b are both used to calibrate the best focus position and measure the position of the mark image.

  The slits 9C, 9D, 9E, and 9F are used for measuring wavefront aberrations. In the present embodiment, the slits 122a and 122b also serve as wavefront aberration measuring slits 9B and 9A, respectively. At this time, the longitudinal direction (arrangement direction) of the slit 9A (122b), the slit 9E, the slit 9C, the slit 9B (122a), the slit 9D, and the slit 9F is 90 ° and 120 ° counterclockwise with respect to the X axis, respectively. The directions intersect at degrees, 135 degrees, 0 degrees, 30 degrees, and 45 degrees, and these arrangement directions are different from each other. In the present embodiment, at the time of aerial image measurement, each of the slits 9A to 9F is scanned relative to a corresponding aerial image in a direction (measurement direction) orthogonal to the longitudinal direction. In other words, the measurement directions of the six slits 9A, 9E, 9C, 9B, 9D, and 9F are 0 °, 30 °, 45 °, 90 °, 120 °, and counterclockwise with respect to the X axis, respectively. Cross at 135 °.

  As described above, the six slits 9A to 9F (opening patterns) of the present embodiment are sequentially scanned in the corresponding measurement directions, so that the periodic directions are 0 °, 30 °, 45 °, and 90 with respect to the X axis, respectively. It is possible to measure the light intensity distribution information of the aerial image of the L / S pattern in six directions intersecting at °, 120 °, and 135 °.

  Returning to FIG. 1, the illumination light IL sent out of the wafer stage WST by the light sending lens is guided by the mirror 96 to the light receiving unit 92 provided outside the wafer stage WST. The light receiving unit 92 includes a light receiving lens having a diameter larger than that of the light transmitting lens, a light sensor (not shown) disposed above the light receiving lens, and a case 93 for storing them while maintaining a predetermined positional relationship. The case 93 is fixed in the vicinity of the upper end of a support column 97 planted on the upper surface of the base 16 via an attachment member.

  As the optical sensor, a photoelectric conversion element (light receiving element) capable of accurately detecting weak light, for example, a photomultiplier tube (PMT, photomultiplier tube) or the like is used. The photoelectric conversion signal P from the optical sensor is sent to the main control device 50 via the signal processing device 80 of FIG.

  The detailed configuration of the aerial image measurement device similar to the aerial image measurement device 59 is disclosed in, for example, International Publication No. 2004/0597101 pamphlet.

  Returning to FIG. 1, an off-axis alignment system ALG for detecting an alignment mark (alignment mark) on the wafer W is provided on the side surface of the projection optical system PL. In this embodiment, as this alignment system ALG, an image processing type alignment sensor, a so-called FIA (Field Image Alignment) system is used. The detection signal of the alignment system ALG is supplied to the main controller 50.

  Further, in the exposure apparatus 10 of the present embodiment, as shown in FIG. 1, a light beam for forming images of a large number of pinholes or slits on the optical axis AX toward the image plane of the projection optical system PL. On the other hand, there is provided an oblique incidence type multi-point focal position detection system comprising an irradiation system 60a for irradiating from an oblique direction and a light receiving system 60b for receiving a reflected light beam on the surface of the wafer W. The detailed configuration of a multipoint focal position detection system similar to the multipoint focal position detection system (60a, 60b) of the present embodiment is disclosed in, for example, Japanese Patent Laid-Open No. Hei 6-283403.

  In main controller 50, during scanning exposure or the like, via wafer stage drive unit 56W so that the focus shift becomes zero based on a defocus signal (defocus signal) from light receiving system 60b, for example, an S curve signal. A stage that controls the movement of the Z tilt stage 38 in the Z-axis direction and two-dimensional tilt (that is, rotation in the θx and θy directions), that is, based on the output of the multipoint focus position detection system (60a, 60b). By controlling the Z tilt stage 38 via the control device 70 and the wafer stage drive system 56W, the imaging plane of the projection optical system PL is exposed in the exposure area (irradiation area of the illumination light IL) IA conjugate with the illumination area IAR. Focus leveling control is executed to substantially match the surface of the wafer W.

  The control system is configured to include a stage controller 70 and the like under the main controller 50 in FIG. The main controller 50 includes a so-called workstation (or microcomputer) including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. In addition to performing the above control operation, the entire apparatus is controlled in an integrated manner.

  The main controller 50 includes, for example, a storage device 32 including a hard disk, an input device 34 including a pointing device such as a keyboard and a mouse, a display device 36 such as a CRT display (or liquid crystal display), and a CD. A drive device 37 of an information recording medium such as (compact disc), DVD (digital versatile disc), MO (magneto-optical disc) or FD (flexible disc) is connected externally.

  The information recording medium includes an optimization program for optimizing a formation state of a projected image of a pattern on an object under an arbitrary target exposure condition, and a first database and a second database attached to the optimization program. It is recorded.

  In the storage device 32, the optimization program is installed, and the first database and the second database are copied and stored.

  The first database is a database of wavefront aberration change tables of the projection optical system PL provided in the exposure apparatus 10. Here, the wavefront aberration change table is simulated using a model substantially equivalent to the projection optical system PL, and the formation state of the pattern projection image on the object obtained as a result of the simulation is optimized. Change of the unit adjustment amount of the adjustment parameter that can be used to convert the image, and imaging performance corresponding to each of a plurality of measurement points in the field of the projection optical system PL, specifically, wavefront data, for example, the first of the Zernike polynomial It is a change table which consists of the data group which arranged the data which show the relationship with the variation | change_quantity of the coefficient of a term-the 37th term according to the predetermined rule.

In the present embodiment, the adjustment parameters include the driving amounts z ₁ , θx ₁ , θy ₁ , z ₂ , θx ₂ of the movable lenses 13 ₁ , 13 ₂ , 13 ₃ , 13 ₄ , 13 _{5 in} the three degrees of freedom direction. , Θy ₂ , z ₃ , θx ₃ , θy ₃ , z ₄ , θx ₄ , θy ₄ , z ₅ , θx ₅ , θy ₅ and the driving amount Wz in the three-degree-of-freedom direction of the wafer W surface (Z tilt stage 38). , Wθx, Wθy, and a total of 19 adjustment parameters (PARA1 to PARA19) of the wavelength shift amount Δλ of the illumination light IL are used.

  In the present embodiment, a wavefront aberration change table for each of 19 adjustment parameters as represented by the following expression (1) for one adjustment parameter PARA1 is stored in the storage device 32 as a first database. Has been. P1 to Pn mean n measurement points (for example, 33 points). The method for creating the wavefront aberration change table is disclosed in detail in, for example, the pamphlet of International Publication No. 03/065428, and the description thereof is omitted here.

  The second database stores different exposure conditions, that is, optical conditions (exposure wavelength, numerical aperture NA of the projection optical system (maximum NA, NA set during exposure, etc.), and illumination conditions. (Illumination NA (numerical aperture NA of illumination optical system)) or illumination σ (coherence factor), setting state of diffractive optical element unit 20 (light quantity distribution of illumination light on pupil plane of illumination optical system 12 That is, the shape of the secondary light source)))), evaluation items (mask type, line width, evaluation amount, pattern information, etc.), and a plurality of exposure conditions determined by a combination of these optical conditions and evaluation items, respectively. The obtained imaging performance of the projection optical system, such as various aberrations (or their index values), Zernike sensitivity (Zernike Sensitivity), which is the amount of change per 1λ in each term of the Zernike polynomial, for example, the first to 37th terms, respectively. From) That Table, i.e. a database that contains a Zernike sensitivity table.

  In the following description, Zernike sensitivity is also referred to as Zernike Sensitivity or ZS, and the Zernike sensitivity table is also referred to as a ZS file.

In the present embodiment, each Zernike sensitivity table includes the following 12 types of aberration as imaging performance, that is, index values of distortion Dis _x and Dis _y in the X-axis direction and Y-axis direction, and four types of coma aberration. Line width abnormal values CM _V , CM _H , CM _R , CM _L , four types of curvature of field CF _V , CF _H , CF _R , CF _L , and two types of spherical aberration SA _V , SA _H , include.

  Next, with respect to the exposure processing operation in the exposure apparatus 10 of the present embodiment, the processing algorithm of the main controller 50 (inside the CPU) is simplified and shown in the flowchart of FIG. 3 and with reference to other drawings as appropriate. I will explain.

The flowchart of FIG. 3 starts when a reticle R having a circuit pattern formed on the reticle stage RST is loaded via a reticle loader (not shown), and preparation operations such as reticle alignment and baseline measurement are completed. Is the time. Further, it is assumed that the count value n of the first counter (not shown) indicating the wafer number is initially set to “1”. Further, by using the reticle reference plate RFM and the aerial image measurement device 59 described above, wavefront aberration of the projection optical system PL, for example, coefficients of each term of the Zernike polynomial, for example, coefficients Z ₁ to Z ₁ to 37 Z ₃₇ is measured with high precision, data of the wavefront aberration, and what is stored in the table data format in a predetermined area of the memory (RAM). For wavefront aberration measurement, a Shack-Hartman wavefront aberration measuring instrument disclosed in the above-mentioned pamphlet of International Publication No. 03/065428 may be used.

  First, in step 100, a ZS file corresponding to the current exposure condition (optimized exposure condition) is retrieved from the second database and read into the memory. Here, it is assumed that a ZS file corresponding to the current exposure condition (optimized exposure condition) exists in the second database. Here, the optimized exposure condition means the N.D. of the current projection optical system of the exposure apparatus. A. , Illumination conditions (illumination NA or illumination σ, aperture stop type, etc.), and information on the target pattern. The target pattern information includes the type of pattern, the number of patterns, the pattern arrangement direction, and the like. The types of patterns include, for example, the type of blank pattern or remaining pattern, the type of dense pattern or isolated pattern, the pitch in the case of dense lines (line and space, etc.), the line width, the duty ratio, and the line in the case of isolated lines. Width, vertical width in case of contact hole, horizontal width, distance between hole patterns (pitch, etc.), phase shift pattern (including halftone type) or phase shift reticle and its type (for example, spatial frequency modulation type, half Tone type).

  When the ZS file does not exist in the second database, it can be calculated by a predetermined calculation (for example, interpolation calculation).

  In the next step 101, an imaging performance change table for each adjustment parameter is created using the wavefront aberration change table for each adjustment parameter in the first database and the ZS file. This can be expressed by the following equation (2).

Imaging performance change table = Wavefront aberration change table / ZS file (2)
Since the calculation of equation (2) is a multiplication of the wavefront aberration change table (matrix with 33 rows and 37 columns) and the ZS file (matrix with 37 rows and 12 columns), the obtained imaging performance change table B1 is, for example, This is a matrix of 33 rows and 12 columns represented by the following equation (3).

かかる結像性能変化表を１９個の調整パラメータ毎に算出する。この結果、それぞれが３３行１２列のマトリックスから成る１９個の結像性能変化表Ｂ１〜Ｂ１９が得られる。

The imaging performance change table is calculated for each of 19 adjustment parameters. As a result, 19 image formation performance change tables B1 to B19 each having a matrix of 33 rows and 12 columns are obtained.

  Next, in step 102, the imaging performance change table for each of the 19 adjustment parameters created in step 101 is two-dimensionalized. Here, the two-dimensionalization of the imaging performance change table refers to 19 types of imaging performance change tables, each of which is a matrix of 33 rows and 12 columns, and images of each evaluation point (measurement point) for one adjustment parameter. It means that the performance change is made into one column and the format is converted to 396 rows and 19 columns. The imaging performance change table after the two-dimensionalization is, for example, B shown in the following equation (4).

In the next step 103, as described above, using the reticle reference plate RFM and the aerial image measuring device 59, wavefront aberration, here, even function aberration (coefficients Z ₄ , Z ₅ , Z of predetermined terms of the Zernike polynomial) is used. _6, the _{Z 9, Z 12, Z 13} , Z 16, Z 21, Z 22, Z 25, Z 28, Z 29, Z 32, Z 33, Z 36, measurement of the Z _37), as follows Do.

  First, the main controller 50 uses a specific slit (here, the slit 9D is used) by a known slit scanning method using the reticle reference plate RFM and the aerial image measuring device 59, and Wavefront measurement marks formed on reticle reference plate RFM (here, marks that are periodically arranged in a direction that intersects counterclockwise at 30 ° with respect to the X axis (referred to as mark d)) And the light intensity distribution information corresponding to the aerial image is acquired.

  The main controller 50 performs a Fourier analysis on the light intensity distribution information to thereby obtain a spatial frequency component of a predetermined order with reference to the pitch of the wavefront aberration measurement mark on the wafer W (here, the first-order fundamental wave component). ) (Contrast information), the amplitude of the third-order harmonic component, and the amplitude of the fifth-order harmonic component.

  Then, the operation of obtaining the light intensity distribution of the aerial image of the wavefront aberration measurement mark d is changed by a predetermined amount with respect to the optical axis direction (Z-axis direction) of the projection optical system PL by the position of the aerial image measurement device 59 (slit plate). Execute repeatedly. By this operation, the main controller 50 detects the spatial frequency component of the predetermined order included in the light intensity distribution based on the focus position of the slit 9D with respect to the projection optical system PL and the light source conversion signal P from the aerial image measuring device 59. The contrast, that is, the contrast of the first fundamental wave component, the contrast of the third harmonic component, and the contrast curve of the fifth harmonic component are obtained, and the information of the contrast curve is stored in the memory. .

  In this case, when there is even function aberration in the projection optical system PL, the focus position at which the contrast curve of the first-order fundamental component becomes maximum, and the focus position at which the contrast curve of the third-order harmonic component becomes maximum There is a position shift, a so-called focus difference.

  The aberration amount of the even function aberration and the focus difference between the best focus positions are proportional to each other. If this focus difference is measured, the aberration amount of the even function aberration at that time can be obtained. It is assumed that such a relationship between the focus difference and the aberration amount of the even function aberration is obtained by aerial image simulation using a mathematical model of the projection optical system PL and is stored in the memory.

  Therefore, main controller 50 obtains the contrast curve of the first-order fundamental wave component and the contrast curve of the third-order harmonic component, finds the best focus position from these contrast curves, and focuses at the best focus position. After obtaining the difference, the aberration amount of the even function aberration corresponding to the focus difference is calculated with reference to the characteristics of the focus difference and the aberration amount of the even function aberration stored in the memory 51. Since the focus difference is obtained with a sign, this method can simultaneously obtain the polarity as well as the magnitude of the aberration.

For example, low order spherical aberration (Z ₉ ) up to Z ₉ from the measured aberration amount of even function aberration is separated from higher order spherical aberration (Z ₁₆ , Z ₂₅ , Z ₃₆ , Z ₃₇ ). In order to do so, it is necessary to measure aerial images of a plurality of L / S patterns having different pitches. For this reason, in the present embodiment, a plurality of periodic patterns having different pitch directions (half pitches) on the reticle mark plate RFM (for example, the pitch of each aerial image is 0.5 μm, 0.7 μm, and Wavefront aberration measurement marks including a plurality of L / S patterns such as 1.0 μm are arranged at 3 × 11 = 33 locations.

  Then, for each of the 33 marks, the aerial image measurement is performed for each L / S pattern as described above, and the aberration amount of the even function aberration is calculated based on the measurement result.

  Depending on the pitch of the L / S pattern, the contribution to the focus difference between the low-order spherical aberration and the high-order spherical aberration, that is, the Zernike sensitivity to the focus difference (hereinafter also referred to as “focus difference sensitivity”) varies. Therefore, it is possible to separate low-order spherical aberration and high-order spherical aberration.

The focus difference sensitivity described above can be obtained by aerial image simulation using a mathematical model of the projection optical system PL. For example, in order to separate five spherical aberrations Z ₉ , Z ₁₆ , Z ₂₅ , Z ₃₆ , and Z ₃₇ , a combination of the pitch of the L / S pattern and the harmonic order, and at least five combinations The focus difference δF between the fundamental wave component and the harmonic component of the predetermined order (third or fifth order) is calculated, and the focus difference δF and the Zernike sensitivity in the combination shown in Table 2 below are used. Create simultaneous equations and solve them. Note that when the number of obtained focus differences is larger than the number of spherical aberrations to be obtained, the aberration amount of each even function aberration may be obtained by using the least square method. Further, since there is basically no even-order spatial frequency component in the 50% duty L / S pattern, it is desirable to use an odd-order spatial frequency component as the spatial frequency component of a predetermined order.

  Various wavefront aberration measurement methods using the aerial image measurement device, including the method described above, are disclosed in detail in, for example, International Publication No. 2004/0597101. Instead of the above method, another method disclosed in the above-mentioned WO 2004/0597101 pamphlet may be adopted.

Proceeding to the next step 104, the wavefront data is corrected based on the measurement result. Thus, even function aberrations of the 37th term or less of the Zernike polynomial, that is, 0θ component (Z ₄ , Z ₉ , Z ₁₆ , Z ₃₆ , Z ₃₇ ), 2θ component (Z ₅ , Z ₆ , Z ₁₂ , Z ₁₃ , Z ₂₁ , Z ₂₂ , Z ₃₂ , Z ₃₃ ) and the 4θ component (Z ₁₇ , Z ₁₈ , Z ₂₈ , Z ₂₉ ) are updated. However, the odd function aberration remains the value calculated and updated at the time of timer interruption processing described later with reference to the aberration amount measured in advance.

  In the next step 106, timer interruption is permitted. At the same time, a flag F described later is reset (F ← 0). As a result, after this time point, timer interruption processing including prediction calculation of the irradiation fluctuation amount of the wavefront aberration is repeatedly executed at intervals of Δt. This timer interruption process will be described later.

  In the next step 108, the nth (here, the first) wafer W is loaded onto wafer stage WST via a wafer loader (not shown). In the next step 110, wafer alignment such as EGA (Enhanced Global Alignment) disclosed in detail in, for example, Japanese Patent Application Laid-Open No. 61-44429 is performed, and all shot areas on the wafer W (here, M The array coordinates of the shot areas) are obtained. In this wafer alignment, wafer alignment marks of a predetermined plurality (at least three) of sample shots selected from a plurality of shot areas on the wafer W are measured using the alignment system ALG.

  In the next step 112, the count value m of a second counter (not shown) indicating the shot number on the wafer W is initialized to “1” (m ← 1).

  In the next step 114, the positional information sent from the wafer interferometer 54W and the reticle interferometer 54R is monitored based on the array coordinates of each shot area on the wafer W obtained in step 110 and the baseline amount obtained in advance. However, wafer stage WST is positioned at the scan start position (acceleration start position) for exposure of the mth (here, m = 1) shot area (here, the first shot area) on wafer W. Then, the reticle stage RST is positioned at the scanning start position.

  In the next step 116, scanning exposure is performed on the mth, here, first shot area, and the circuit pattern of the reticle R is reduced and transferred to the first shot area on the wafer W via the projection optical system PL.

  When this scanning exposure is completed, the process proceeds to the next step 118, where it is determined whether m ≧ M (M: number of all shots), thereby determining whether exposure to all shot areas on the wafer W has been completed. to decide. Here, the exposure to the first shot area has only been completed. Since m = 1, the determination here is denied, and the routine proceeds to step 120 where the count value m of the second counter is incremented by 1. After that, the process returns to step 114, and the processing and determination of the loop of steps 114 → 116 → 118 → 120 are repeated until the determination of step 118 is affirmed. When the exposure on the M shot areas on the wafer W is completed and the determination in step 118 is affirmed, the process proceeds to step 122, and the nth sheet (here, the first one) is passed through a wafer unloader (not shown). The first wafer W is unloaded from the wafer stage WST.

  In the next step 124, it is determined whether or not a condition that the count value of the first counter is n = N (N: the number of wafers to be exposed) and that an instruction to end exposure is given by the operator is satisfied. By determining, it is determined whether or not the exposure is completed. Here, since the exposure for the first wafer has only been completed, the determination at step 124 is denied, and the routine proceeds to step 126 to prohibit timer interruption. As a result, the timer interrupt process that has been repeatedly executed at intervals of Δt is not performed.

  In the next step 128, after the count value n of the first counter is incremented by 1, the process returns to step 103, and thereafter, the processing and determination after step 103 are repeated.

  As a result, the same processing as that for the first wafer described above is performed on the second and subsequent wafers W. In this way, step-and-steps for each shot area on the N-th wafer are performed. If any of the conditions that the pattern transfer of the reticle R in the scanning mode is completed or an exposure end instruction is given in the middle of the scanning is satisfied, the determination in step 124 is affirmed, and this routine A series of processing ends.

  Next, the above-described timer interruption process performed at the sampling time Δt will be described. FIG. 4 shows a flowchart of this interrupt processing routine. In this case, as described above, the flag F is reset (F = 0).

In this interrupt processing routine, first, in step 200, it is determined whether or not it is the first processing by determining whether or not the flag F = 0. Here, in the case of the first processing, since the flag F = 0 as described above, the determination here is affirmed, and the routine proceeds to step 202 where the flag F is set (F ← 1). Thereafter, in step 206, the new wavefront data updated in the above-described step 104 (the coefficients Z ₁ to 37 of the first term of the Zernike polynomial that expands the wavefront corresponding to the first to nth measurement points) Coefficient Z ₃₇ ) and necessary information related thereto, specifically, the value of the adjustment amount (adjustment parameter) at the time of calculating the wavefront aberration, that is, the position information of the movable lenses 13 _{1 to} 13 _{5 in} the three degrees of freedom direction, etc. Get the current value.

  Next, in step 210, the current imaging performance is calculated based on the following equation (5).

f = Wa · ZS (5)
Here, f is the imaging performance represented by the following equation (6), and ZS is the data of the ZS file represented by the following equation (8) acquired in step 100 described above. Wa is the data of the wavefront (wavefront aberration) represented by the following equation (7) acquired in step 206.

In Equation (6), f _{i, 1} (i = _{1 to} 33) is Dis _{x at the} i-th measurement point, f _{i, 2} is Dis _{y at the} i-th measurement point, and f _{i, 3} is the i-th measurement point. CM _V and fi _{, 4} at the measurement point are CM _{H at the} i-th measurement point, fi _{, 5} are CM _{R at the} i-th measurement point, and fi _{, 6} are CM _L and fi at the _i- th measurement point. _{, 7} is CF _{V at the} i-th measurement point, f _{i, 8} is CF _{H at the} i-th measurement point, f _{i, 9} is CF _{R at the} i-th measurement point, and fi _{, 10} are the i-th measurement point. CF _L , f _{i, 11 in FIG. 4} indicate SA _{V at the} i-th measurement point, and f _{i, 12} indicate SA _H at the i-th measurement point, respectively.

In Equation (7), Z _{i, j} represents the coefficient of the j-th term (j = 1 to 37) of the Zernike polynomial that expands the wavefront at the i-th measurement point.

In the equation (8), b _{p, q} (p = 1 to 37, q = 1 to 12) represents each element of the ZS file, among which b _{p, 1} is a Zernike polynomial in which wavefront aberration is developed. Change of Dis _x per 1λ of p-term, b _{p, 2} is change of Dis _y per 1λ of p-term, b _{p, 3} is change of CM _V per 1λ of p-term, b _{p, 4} Is the change in CM _H per 1λ of the p term, b _{p, 5} is the change in CM _R per 1λ of the p term, b _{p, 6} is the change in CM _L per 1λ of the p term, b _{p, 7} is the change in CF _V per 1λ of the p term, b _{p, 8} is the change in CF _H per 1λ of the p term, b _{p, 9} is the change in CF _R per 1λ of the p term, b _{p , 10} change in CF _L per 1λ of the p sections, b _{p, 11} changes in SA _V per 1λ of the p sections, b _{p, 12} is a variation of the SA _H per 1λ of the p sections respectively Show.

In the next step 212, the imaging performance f calculated in step 210 and its target ft are _aligned (one-dimensional). The target f _t is represented by a matrix of 33 rows and 12 columns as in the following equation (9). Usually, it is desirable that the target value of the imaging performance (aberration) is zero, and therefore, each element of the matrix on the right side of the equation (20) is usually zero.

In the next step 216, a change amount (adjustment amount) of the adjustment parameter is calculated. Hereinafter, the processing in step 216 will be described in detail. And target f _t of the imaging performance after a row of the foregoing, the imaging performance f after a row of, between the imaging performance change table B after two-dimensional described above, the adjustment amount dx of the adjustment parameters Is related by the following equation (10).

(F _t −f) = B · dx (10)
Here, dx is a matrix of 19 rows and 1 column represented by the following expression (11) having the adjustment amount of each adjustment parameter as an element. Further, ( _ft− f) is a 396 × 1 matrix expressed by the following equation (12).

上式（１０）を最小自乗法で解くと、次式のようになる。

When the above equation (10) is solved by the least square method, the following equation is obtained.

dx = (B ^T · B) ⁻¹ · B ^T · ( _ft −f) (13)
Here, B ^T is a transposed matrix of the aforementioned imaging performance change table B, and (B ^T · B) ⁻¹ is an inverse matrix of (B ^T · B).

In the next step 218, based on the obtained adjustment amounts of the 19 adjustment parameters, each adjustment unit (Z position and inclination of the movable lenses 13 _{1 to} 13 ₅ and the wafer W, and at least the wavelength shift amount of the illumination light). One). As a result, the exposure apparatus is optimized, and the formation state of the projected image of the reticle pattern on the wafer W during exposure is optimized.

In the next step 220, based on the output DS of the integrator sensor 46 and the output DS, the pulse energy (exposure amount) per unit area of the illumination light IL in the irradiation area (exposure area) IA of the illumination light IL on the image plane ), That is, the energy (irradiation power) of the illumination light irradiated to the projection optical system PL using a predetermined arithmetic expression including the correlation coefficient α for estimating the pulse energy density [mJ / cm ² ] on the image plane. calculate. Note that the method for calculating the irradiation power is the same as the method for calculating the irradiation amount disclosed in detail in, for example, Japanese Patent Application Laid-Open No. 11-258498, and detailed description thereof will be omitted.

In the next step 222, an irradiation fluctuation amount of wavefront aberration based on the value of the wavefront aberration stored in the memory at that time is calculated and stored in the memory. Specifically, the irradiation power calculated in step 220 is substituted into a prediction calculation formula for wavefront aberration variation obtained in advance by simulation or experiment, and wavefront aberration (corresponding to the first measurement point to the nth measurement point). The irradiation fluctuation amount of the first term coefficient Z ₁ to the 37th term coefficient Z ₃₇ ) of the Zernike polynomial in which the wavefront is expanded is calculated. Here, the calculation formula for predicting the irradiation fluctuation of the wavefront aberration is an expression of the following form.

δX (t) = δX (t−Δt) · exp (−Δt / τ)
+ C · W (t) · [1-exp (−Δt / τ)] (14)
Here, δX (t) on the left side of the above equation (14) is an irradiation fluctuation amount of wavefront aberration (coefficient of each term of the Zernike polynomial), the first term on the right side is the relaxation term, and the second term on the right side is the irradiation term. The meaning of each variable is as follows.
τ: a time constant of fluctuation of wavefront aberration of the projection optical system, which is a constant obtained in advance for each exposure condition and stored as a parameter in the memory. Here, the exposure conditions are the optical conditions described above (exposure wavelength, numerical aperture NA of the projection optical system (maximum NA, NA set during exposure, etc.), and illumination conditions (illumination). NA (the numerical aperture NA of the illumination optical system) or illumination σ (coherence factor), the light quantity distribution of illumination light on the pupil plane of the illumination optical system, that is, the shape of the secondary light source), etc. .
C: Fluctuation rate of wavefront aberration of the projection optical system, which is a constant obtained in advance for each exposure condition and stored as a parameter in the memory.

  Further, the function W (t) in the equation (14) is the irradiation power described above.

  After calculating the irradiation fluctuation amount of the wavefront aberration, the processing of this interrupt processing routine is finished.

  On the other hand, in the second and subsequent processes, since the flag F = 1, the determination in step 200 is negative, the process proceeds to step 208, and the wavefront stored in the memory at that time The reading of the aberration fluctuation amount δX (t−Δt) is performed, and the latest wavefront data is calculated, and then the processing of steps 210 to 220 described above is performed.

  As described above, according to the exposure apparatus 10 according to the present embodiment, the main controller 50 causes the wavefront aberration variation information (in the projection optical system PL associated with the irradiation of the illumination light IL) by the processing of the interrupt processing routine described above ( The illumination light IL is calculated based on the calculation of the irradiation fluctuation amount (step 222), the fluctuation information of the calculated wavefront aberration, and the ZS file (information on the pattern) corresponding to the current exposure condition (optimized exposure condition). Thus, calculation of adjustment data (steps 208 to 216) for adjusting the optical characteristics of the projection optical system PL that forms the pattern image is repeatedly executed at intervals of time Δt. Thereby, adjustment data (adjustment amount) of the optical characteristics of the projection optical system PL based on the ZS file (or ZS) can be calculated. Therefore, the optical characteristics of the projection optical system PL with higher accuracy (more precisely, the pattern via the projection optical system PL is compared with the conventional case where the change in the imaging performance of the optical system is obtained using the measurement mark. It is possible to calculate adjustment data of the image formation state.

Further, according to the exposure apparatus 10 according to the present embodiment, calculation of fluctuation information (irradiation fluctuation amount) of the wavefront aberration of the projection optical system PL accompanying irradiation of the illumination light IL is performed by the processing of the above-described interrupt processing routine (step 222). And adjustment of the optical characteristics of the projection optical system PL based on the calculated wavefront aberration variation information and the ZS file (information on the pattern) corresponding to the current exposure condition (optimized exposure condition) (steps 208 to 216) ) Is repeatedly executed at intervals of time Δt. Therefore, since the optical characteristics of the projection optical system PL are adjusted based on the information related to the pattern to be imaged, the optical characteristics of the projection optical system PL can be adjusted with high accuracy. Here, in the present embodiment, the adjustment of the optical characteristics of the projection optical system PL is performed by driving the Z tilt stage 38 in addition to the adjustment by driving the movable lenses 13 _{1 to} 13 ₅ via the imaging performance correction controller 78. Since adjustment and adjustment by shifting the wavelength of the illumination light IL are included, the adjustment of the optical characteristics of the projection optical system PL strictly means adjustment of the formation state of the pattern image formed by the projection optical system PL.

In the present embodiment, even in the above-described step 103, even function aberrations (Z ₄ , Z ₅ , Z ₆ , Z ₉ , Z ₁₂ , Z ₁₃ , Z ₁₆ , Z ₂₁ , Z ₂₂ , Z ₂₅ , Z ₂₈ , Z ₂₉ , Z ₃₂ , Z ₃₃ , Z ₃₆ , Z ₃₇ ) are measured and updated in step 104. Then, in the timer interruption process that is permitted thereafter, the new wavefront data after the update is used, so that a specific component of the optical characteristics of the projection optical system PL, in this case even function aberration, is changed to another component (odd). Adjustment data for adjusting with higher accuracy than (function aberration) is calculated.

  Further, according to the exposure apparatus 10 of the present embodiment, the projection optical system PL in which the optical characteristics are adjusted with high accuracy according to the pattern of the image formation target (device pattern on the reticle R) by the processing of the interrupt processing routine described above. Then, the wafer is exposed to the illumination light IL, and a device pattern image is formed in each shot area on the wafer (see step 116). Therefore, a pattern image can be accurately formed in each shot area on the wafer.

  In the present embodiment, the time constant τ in the prediction calculation formula of the irradiation fluctuation amount δX (t) of the wavefront aberration (the coefficient of each term of the Zernike polynomial) is obtained in advance for each exposure condition. Even if the illumination condition, for example, the light amount distribution of illumination light on the pupil plane of the illumination optical system, that is, the shape of the secondary light source is changed, the irradiation fluctuation amount of the wavefront aberration of the projection optical system PL corresponding to this is calculated. By using the calculated irradiation fluctuation amount of the wavefront aberration and the ZS file corresponding to the changed illumination condition, the optical characteristics of the projection optical system PL (more Precisely, the adjustment data of the pattern image formation state via the projection optical system PL can be calculated with high accuracy.

  In the above-described embodiment, the case where a ZS file or ZS is used as the information on the pattern has been described. However, the present invention is not limited to this, and the type of pattern formed on the reticle R used for actual exposure, the number of patterns, Information including at least one of the pattern arrangement directions may be used in place of the ZS file or ZS. In this case, the adjustment data for adjusting the optical characteristics of the projection optical system is calculated based on the fluctuation information of the wavefront aberration calculated in the same manner as in the above embodiment and the information related to the pattern, as in the conventional case. In the case of using the measurement mark, in other words, the optical characteristics of the projection optical system with higher accuracy (or the image of the pattern via the projection optical system) than in the case where the pattern used for exposure (pattern for image formation) is not considered. Adjustment data) can be calculated.

  In the above embodiment, when a plurality of types of patterns, for example, a plurality of types of L / S patterns having different line widths (half pitches) are formed in the pattern region on the reticle R, one of the patterns (optimization) For example, when it is desired to optimize the image formation conditions of the target pattern) as compared to the image formation conditions of other patterns, the ZS file or ZS corresponding to the optimization target pattern is converted into the optimization calculation ( As used in steps 210 to 216), the processing algorithm (software program) may be changed so that the operator can instruct the main controller 50 via the input device 34 in advance. In this way, as a result of the above-described optimization calculation, the image formation condition of the pattern to be optimized can be optimized more appropriately than the image formation conditions of other pattern images. Formation state adjustment data can be obtained.

  Further, in the above case, when it is desired to optimize all the formation conditions of the images of the plurality of types of patterns to the same extent, the ZS file or ZS corresponding to each pattern is converted into the optimization calculation (steps 210 to 210). 216), the processing algorithm (software program) may be changed in advance so that the operator can instruct the main controller 50 via the input device 34.

  In the above embodiment, only the even function aberration is measured in Step 103 and only the even function aberration is updated in Step 104. This is for the following reason.

  In other words, the effect of irradiation variation only shifts the image plane and does not affect the imaging performance. For this reason, adjustment data for the optical characteristics of the projection optical system PL is calculated so that the amount of aberration in the irradiation area on the wafer is uniform even if the amount of wavefront aberration due to irradiation fluctuation remains. That's why. Here, the adjustment data refers to data that the wavefront aberration amount is not zero, but that the aberration amount in the irradiation area is substantially uniform, that is, data that changes the position of the image plane shifted by irradiation fluctuation. Including.

In the exposure apparatus of the above-described embodiment, as the condition setting related to the optimization calculation, as disclosed in, for example, International Publication No. 03/065428, optical characteristics (imaging performance (aberration, etc.) of the projection optical system. It is also possible to set a tolerance value, a constraint condition, and a weight of optical characteristics (including imaging performance (including aberration)). For example, by making it possible to set the weight of the optical characteristics, adjustment data that adjusts the specific component of the optical characteristics of the projection optical system more optimally than other components can be calculated using the aforementioned optimization calculation. Can be obtained at For example, adjustment data for mainly adjusting distortion can be obtained by setting the weights of distortions Dis _x and Dis _y to be greater than 1 and setting the weights of the other 10 types of imaging performance to 1. Also, the adjustment for mainly adjusting the spherical aberration and the defocus is made by setting the weights of the two types of spherical aberrations SA _V and SA _H to be larger than 1 and the other 10 types of imaging performance weights to 1. Data can be obtained.

In addition, all elements other than the elements b _{p, 1} and b _{p., 2} (p = 1 to 37) in the first row and the second row of the matrix on the right side of the above equation (8) are all zero. By preparing a file in advance and allowing the operator to instruct from the outside that this ZS file should be used in the optimization calculation, adjustment data mainly for adjusting distortion can be obtained. Similarly, a ZS file is prepared in advance, in which the elements b _{p, 11} and b _{p., 12} other than the elements b _{p, 11} and b _{p., 12 in} the matrix on the right side of the above equation (8) are all zero _. By allowing the operator to instruct the use of the ZS file in the optimization calculation from the outside, adjustment data for mainly adjusting the spherical aberration and the defocus can be obtained.

In the above embodiment, the case where the wavefront aberration is measured using the aerial image measurement device 59 in step 103 has been described. This is done in order to prevent the measurement time from becoming longer than necessary. If a certain amount of time may be taken for measurement, the wavefront aberration of the projection optical system may be measured using the aforementioned Shack-Hartman wavefront aberration measuring instrument. In this case, all coefficients (aberration components) in the 37th term or less of the Zernike polynomial may be obtained, and in step 104, all of Z _{1 to} Z ₃₇ may be updated based on the measurement result. In this way, it is possible to adjust the optical characteristics of the projection optical system with higher accuracy than in the embodiment described above.

  Further, in the above embodiment, the wavefront aberration is calibrated by measuring the wavefront aberration of the projection optical system and updating the wavefront data immediately before each wafer is loaded. The wavefront aberration may be calibrated every time the wafer exposure is completed or at a predetermined time interval.

  In addition, by the measurement in step 103, not only the even function aberration of the Zernike polynomial in the 37th term but also the odd function aberration up to the 37th term may be obtained. Only the coefficient of the term may be obtained. In addition, for example, the coefficients of at least some of the terms from the first term to the 81st term may be obtained, or the coefficients of at least some of the terms up to any n terms of the Zernike polynomial may be obtained. In any case, adjustment data for adjusting the optical characteristics of the projection optical system may be calculated using a calculation formula corresponding to the n term.

  In the above embodiment, as illumination light, for example, erbium (or both erbium and ytterbium) is doped with, for example, a single wavelength laser beam oscillated from a DFB semiconductor laser or a fiber laser. A harmonic wave amplified by a fiber amplifier and wavelength-converted to ultraviolet light using a nonlinear optical crystal may be used.

The light source is not limited to an ArF excimer laser light source, but a KrF excimer laser light source that generates laser light with a wavelength of 248 nm, an F ₂ laser light with a wavelength of 157 nm, a Kr ₂ laser light with a wavelength of 146 nm, or an Ar ₂ laser with a wavelength of 126 nm. A light source that generates vacuum ultraviolet light such as light may be used.

  The magnification of the projection optical system may be not only a reduction system but also an equal magnification or an enlargement system. The projection optical system may be not only a refractive system but also a reflective system or a catadioptric system, and the projected image may be an inverted image or an erect image.

  In the above embodiment, the case where the present invention is applied to the step-and-scan type scanning exposure apparatus has been described. However, the present invention is not limited to this, and the present invention is not limited to the step-and-repeat type exposure apparatus ( The present invention can also be suitably applied to a so-called stepper) or step-and-stitch type exposure apparatus.

  In addition, the present invention may be applied to an immersion type exposure apparatus in which a liquid is filled between the projection optical system PL and the wafer, which is disclosed in, for example, pamphlet of International Publication No. 2004/053955.

  In the above embodiment, a light transmission type mask (reticle) in which a predetermined light shielding pattern (or phase pattern / dimming pattern) is formed on a light transmissive substrate is used. Instead of this mask, for example, As disclosed in US Pat. No. 6,778,257, an electronic mask (variable molding mask) that forms a transmission pattern, a reflection pattern, or a light emission pattern based on electronic data of a pattern to be exposed is used. May be.

  Further, the use of the exposure apparatus is not limited to the exposure apparatus for semiconductor manufacturing, but for example, an exposure apparatus for liquid crystal that transfers a liquid crystal display element pattern to a square glass plate, a thin film magnetic head, a micromachine, and DNA The present invention can be widely applied to an exposure apparatus for manufacturing a chip or the like. Further, in order to manufacture reticles or masks used in not only microdevices such as semiconductor elements but also light exposure apparatuses, EUV exposure apparatuses, X-ray exposure apparatuses, electron beam exposure apparatuses, etc., glass substrates or silicon wafers, etc. The present invention can also be applied to an exposure apparatus that transfers a circuit pattern. Note that the object to be exposed is not limited to a wafer, and may be a glass plate, for example.

  In addition, for example, in the case of a semiconductor device, a step of designing the function and performance of the device, a step of manufacturing a reticle based on this design step, a step of manufacturing a wafer from a silicon material, and a reticle pattern by the exposure apparatus of the above-described embodiment. Manufactured through a wafer transfer step, a device assembly step (including a dicing process, a bonding process, and a package process), an inspection step, and the like.

  As described above, the calculation method and adjustment method of the present invention are suitable for adjusting the optical characteristics of the optical system. The exposure method of the present invention is suitable for forming a pattern image on an object. The image forming state adjusting system of the present invention is suitable for adjusting the image forming state of the pattern. The exposure apparatus of the present invention is suitable for forming a pattern image on an object.

It is a figure which shows schematically the structure of the exposure apparatus which concerns on one Embodiment. It is a figure which shows arrangement | positioning of the some slit formed in the slit board. It is a flowchart which simplifies and shows the processing algorithm of the main controller 50 about exposure processing operation. It is a flowchart of an interrupt processing routine.

Explanation of symbols

10 ... exposure apparatus, _{131-134 5} ... movable lens, 38 ... Z · tilt stage, 14 ... light source (radiation source), 50 ... main control unit, 78 ... imaging performance correction controller, IL ... illumination light (energy beam ), PL: projection optical system (optical system), W: wafer (object).

Claims (17)

A calculation method for calculating adjustment data for adjusting optical characteristics of an optical system that forms an image of a plurality of patterns by an energy beam,
Calculating fluctuation information of wavefront aberration of the optical system accompanying the irradiation of the energy beam;
Based on the calculated fluctuation information of the wavefront aberration and information on the plurality of patterns, a change in optical characteristics of the optical system due to irradiation of the energy beam is included in the first pattern and the plurality of patterns. Calculating the adjustment data for correcting the second pattern different from the first pattern so as to be optimal with respect to the second pattern .   The calculation method according to claim 1, wherein the variation information includes prediction information of wavefront aberration of the optical system that varies due to irradiation of the energy beam when the pattern is formed.   The calculation method according to claim 1, wherein the information about the pattern includes at least one of a pattern type, a number of patterns, and a pattern arrangement direction. Before SL adjustment data, before Symbol claim 1, characterized in that it comprises a data for optimizing the formation conditions of the image of the second pattern in comparison with the conditions for forming the image of the first pattern The calculation method described in 1.   The calculation method according to claim 1, wherein the adjustment data is data for adjusting a specific component of the optical characteristics of the optical system.   The calculation method according to claim 5, wherein the specific component includes at least one of a distortion component and a focus component. An adjustment method for adjusting optical characteristics of an optical system that forms an image of a plurality of patterns with an energy beam,
And fluctuation information calculated out the above wavefront aberration, based on the information regarding the plurality of patterns, a change in the optical properties of the optical system due to irradiation of the energy beam, the first pattern and included in the plurality of patterns It said first pattern and of the different second pattern, the adjustment method comprising the step of adjusting to be optimal with respect to the second pattern. Adjusting the optical characteristics of the optical system using the adjustment method according to claim 7;
Exposing an object with an energy beam through an optical system whose optical characteristics are adjusted, and forming an image of a pattern on the object. An image formation state adjustment system that adjusts an image formation state of a plurality of patterns formed by an energy beam through an optical system,
A first calculation device for calculating fluctuation information of the wavefront aberration of the optical system accompanying the irradiation of the energy beam;
Based on the calculated fluctuation information of the wavefront aberration and information on the plurality of patterns, a change in optical characteristics of the optical system due to irradiation of the energy beam is included in the first pattern and the plurality of patterns. Among the second patterns different from the first pattern, correction is made so as to be optimal with respect to the second pattern, and adjustment data for adjusting the image forming state of the pattern formed through the optical system is calculated. An image forming state adjustment system comprising: a second calculation device;   The image forming state adjusting system according to claim 9, wherein the fluctuation information includes prediction information of wavefront aberration of the optical system that fluctuates due to irradiation of the energy beam when the pattern is formed.   11. The image forming state adjustment system according to claim 9, wherein the variation information includes a change in intensity distribution of the energy beam on a pupil plane of the optical system.   12. The image forming state adjustment system according to claim 9, wherein the information about the pattern includes at least one of a pattern type, a number of patterns, and a pattern arrangement direction. Before SL adjustment data, any one of claims 9 to 12, characterized in that pre-Symbol compared to the conditions for forming the image of the first pattern comprising the data to optimize the conditions for forming the image of the second pattern The image forming state adjusting system according to 1.   The image formation state adjustment system according to claim 9, wherein the adjustment data is data for adjusting a specific component of the optical characteristics of the optical system.   15. The image forming state adjustment system according to claim 14, wherein the specific component includes at least one of a distortion component and a focus component.   The image formation state adjustment system according to any one of claims 9 to 15, further comprising an adjustment device that adjusts optical characteristics of the optical system based on the calculated adjustment data. An exposure apparatus that forms an image of a pattern on an object via an optical system with an energy beam,
The image forming state adjusting system according to any one of claims 9 to 16, which adjusts optical characteristics of the optical system;
A beam source that irradiates the object with an energy beam through the optical system.

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