JP4312775B2 - Real-time confocal microscope using dispersive optics - Google Patents

Description

  The present invention configures a confocal microscope without a scanning device to solve a vibration problem, a signal processing problem, a light loss problem, a manufacturing cost problem due to the presence of the scanning device, and to acquire an image in real time. The present invention relates to a real-time confocal microscope using a dispersion optical system.

  The real-time confocal microscope using the dispersion optical system according to the present invention can be applied to inspections requiring high speed such as defect inspection of semiconductor wafers and defect inspection of LCDs.

  Conventionally, confocal scanning microscopes are frequently used for observation of objects in the biomedical field. It is excellent in resolution in the depth direction in the optical axis direction, has the advantage that the shape inside the specimen can be observed, and the three-dimensional shape of the object can be obtained. In addition, since the confocal scanning microscope has a higher resolution in the horizontal direction than the existing optical microscope, it has recently been applied to many measurements and inspections of semiconductor wafers, video output devices, and fine patterns.

  FIG. 1 is a schematic view showing a confocal scanning microscope using a conventional Nipkow disk. As shown in the figure, the prior art includes a light source 1, a collimating lens 2, a spectroscope 3, a Nipcor disk 4, a motor 5, a tube lens 6, an objective lens 7, a specimen 8, a first lens 9, a first lens, It consists of two lenses 10 and a two-dimensional photoelectric detector 11.

  The light emitted from the light source 1 becomes parallel light through the collimating lens 2. The parallel light is reflected by the spectroscope 3 and illuminates the upper surface of the Nipcor disk 4.

  At this time, one form of the Nipcor disk 4 is as shown in FIG. FIG. 2 shows a form of a disk in which a large number of needle-hole-like small openings 4a are distributed on the disk. When parallel light illuminates the disk, light that has passed through the large number of openings 4a in the illuminated area. Only can proceed toward the tube lens 6. The light respectively passing through the opening 4a in the illumination area is propagated at various angles by the diffraction phenomenon, thereby bringing about the effect of arranging a point light source at the position of the opening 4a.

  The tube lens 6 and the objective lens 7 form an image of the opening 4 a on the specimen 8, thereby obtaining an effect that only a large number of point areas in the observation area of the specimen 8 are illuminated. In order to illuminate the entire observation area of the specimen 8, the position of the opening 4a must be changed. For this purpose, the Nipcor disk 4 is mounted on the motor 5 and the opening 4a on the disk is moved by the rotational axis movement. Try to move.

  The light reflected from the illuminated portion on the specimen 8 passes through the objective lens 7 and the tube lens 6 and is imaged on the Nipcor disk 4. At this time, when the specimen 8 is on the focal plane of the objective lens 7, the reflected light passes through the opening 4 a on the Nipcor disk 4, but the specimen 8 is out of the focal plane of the objective lens 7 and is in the optical axis direction. When it moves to, the reflected light cannot pass through the opening 4a. Thereby, a confocal effect is obtained, and a high resolution in the optical axis direction is obtained.

  The reflected light that has passed through the opening 4 a is imaged on the two-dimensional photoelectric detector 11 by the first lens 9 and the second lens 10. The position of the imaged point on the photoelectric detector 11 is also changed by the rotation of the motor 5, and the optical signal is transmitted to the entire area of the two-dimensional photoelectric detector. can get.

  FIG. 3 shows another embodiment of the Nipcor disk 4. In the case of the disk 4 as shown in FIG. 3, the surface has a curved opening 4b. When such an opening is used, the region through which the illumination light passes has a line shape, and therefore, the region illuminated by the objective lens 7 on the specimen 8 also has a line shape. The line for illuminating the specimen is moved by the rotation of the motor 5, and the line imaged on the two-dimensional photoelectric detector 11 is also moved, whereby the two-dimensional shape of the specimen 8 can be obtained.

  A confocal scanning microscope using a rotating disk has an advantage that a higher image acquisition speed can be obtained than a beam deflection confocal scanning microscope that acquires an image in a serial manner using a beam polarizer. The limit of the measurement speed is determined by the image acquisition speed of the two-dimensional photoelectric detector, and generally about 30 images are obtained per second. Recently, the image acquisition speed of the two-dimensional photoelectric detector is increased to 1000 per second. A confocal scanning microscope capable of acquiring a single image has also been realized.

  However, since a large number of points or a wide area are illuminated instead of one point on the specimen for parallel signal processing, the resolution in the optical axis direction is inferior.

  FIG. 4 shows such an effect. When the specimen 8 is located at the focal plane of the objective lens 7, the light reflected by the specimen 8 is accurately condensed on the opening 4a by the tube lens 6, so that a large amount as shown in FIG. Light passes through the opening 4a. In this case, the collected reflected light does not have any influence on the adjacent opening 4a.

  However, when the specimen 8 is out of the focal plane of the objective lens 7, as shown in FIG. 4B, the light collected by the tube lens 6 is accurately collected in the opening 4a from which the illumination light is emitted. Instead of being lighted, the light is condensed at a position moved in the optical axis direction. In this case, the reflected light passes through not only the opening 4a from which the illumination light is emitted but also the adjacent opening 4a, and the effect of improving the resolution in the optical axis direction based on the confocal principle is reduced. .

  FIG. 5 shows changes in the resolution in the optical axis direction according to the size of the aperture for a confocal scanning microscope using a single aperture and a confocal scanning microscope using multiple apertures. In order to obtain the amount of light within the measurable range, the size of the aperture must be increased, but in the case of a confocal scanning microscope using multiple apertures as shown in FIG. 5, as the size of the aperture increases, It can be seen that the performance decreases as the resolution value in the optical axis direction increases.

  As described above, in the confocal scanning microscope using the existing rotating disk, the light reflected from the adjacent aperture is reflected by the specimen and acts as a kind of noise, so that the performance in the optical axis direction is improved. Become inferior.

  Another problem in the conventional invention is a vibration problem and a sampling problem. In order to rotate the Nipkow disk, a motor that rotates, etc. is required, but this induces problems due to vibration in all optical systems. In addition, when a two-dimensional photoelectric detector having a high image acquisition speed is used, the rotation speed of the Nipco disk is not sufficient and image distortion occurs.

  FIG. 6 is a schematic view showing a conventional confocal scanning microscope. As shown in the figure, a conventional confocal scanning microscope 10 includes a light source 12, a beam spatial filter / expansion device 14, a spectroscope 16, a scanning device 18, an objective lens 20, a condenser lens 22, a needle hole-like opening 24, And a photoelectric detector 26.

  The light emitted from the light source 12 passes through the beam spatial filter / expansion device 14 to become parallel light, and the parallel light is reflected by the spectroscope 16 and enters the scanning device 18. The parallel light whose traveling direction has been changed by the scanning device 18 is condensed on the specimen 8 by the objective lens 20. The light reflected from the specimen 8 or fluoresced passes through the objective lens 20 and the scanning device 18, passes through the spectroscope 16, and is condensed on the needle hole-shaped opening 24 by the condenser lens 22. Is done. At this time, the light reflected and fluorescent on the focal plane of the objective lens 20 among the light reflected and fluorescently emitted by the specimen 8 is focused on the needle hole-like opening 24. Then, the light is measured by the photoelectric detector 26 through the needle hole-shaped opening 24. Light that is reflected or fluorescent in an area outside the focal plane is focused in front or behind the needle hole opening 24 so that a large portion of the light does not pass through the needle hole opening 24, resulting in photoelectric The light intensity measured by the detector 26 becomes inferior.

  By using such a principle, only the information output from the focal plane of the objective lens 20 can be obtained, and the tissue inside the object can be observed. In addition, even if it is on the focal plane, the light emitted from a point away from the focal point is filtered by the needle hole-shaped aperture, so that the resolution in the horizontal direction is improved.

  However, the confocal scanning microscope 10 using the needle hole-shaped opening 24 has a problem that it takes a lot of time to obtain one two-dimensional image due to the limit of the scanning speed of the scanning device 18. In order to solve such problems, a high measuring speed may be obtained by using an acousto-optic deflector in the scanning device. In this case, however, a large computational load is applied to the signal processing, and a computer is always required. It has the disadvantage of being.

  FIG. 7 is a schematic diagram showing a spectrally-encoded confocal microscope in which one of the two-dimensional planes of a specimen is encoded with a color using a diffraction grating (Diffraction grating). As shown in the figure, the conventional technique includes an optical fiber 71, a lens 72, a diffraction grating 73, and a specimen 74.

  Light emitted from one end of the optical fiber 71 is converged by the lens 72. At this time, the light emitted from the optical fiber 71 uses a broad-band light source having various wavelengths. Since the diffraction grating 73 has different angles at which the primary beam travels depending on the wavelength of the light, the light of wavelength 1, wavelength 2, and wavelength 3 is imaged on the specimen 74 at different points as shown in the figure. It becomes like this. In this case, the light reflected from the specimen 74 again passes through the diffraction grating 73 and the lens 72 and is collected on one end of the optical fiber 71, and the collected light is transmitted to the other end of the optical fiber 71. Thus, in the plane of the specimen 74, light having different wavelengths in one direction can be matched with the coordinates on the specimen 74, and there is an advantage that it is not necessary to perform scanning in the matched direction.

  However, in order to obtain all of the two-dimensional images of the specimen 74, one end of the optical fiber 71 is moved in a direction perpendicular to the matched direction (direction perpendicular to the ground in FIG. 7), or A beam deflector must be mounted between the diffraction grating 73 and the light must be deflected in an unmatched direction.

  When the transfer unit is mounted in this way, vibrations of the system due to the movement of the transfer unit are generated, and such vibrations act as a factor that degrades the reliability of measurement. In addition, it takes a long time because it acquires a line of information in the matched direction, and in addition, it takes time to process the signal in series while moving the beam in the vertical direction. It becomes a factor to make. In addition, the beam deflector or the optical fiber transfer device used is expensive, which increases the cost of the measuring instrument. Further, as a conventional confocal scanning microscope, for example, the one shown in Patent Document 1 is disclosed. However, the problem caused by the vibration accompanying the movement of the scanning mechanism 80 in Patent Document 1 is solved at all. Not.

JP-A-5-297279

  Accordingly, the present invention is for solving the above-mentioned conventional problems, that is, the vibration problem due to the scanning device, the signal processing problem, the cost increase problem of the measuring instrument, and the like. It is an object of the present invention to provide a real-time confocal microscope using a dispersion optical system capable of acquiring a dimensional sectional image in real time.

A specific means of the present invention for achieving the above object is a real-time confocal microscope using a dispersion optical system, a broadband light source for supplying light, and a slit aperture for condensing the light emitted from the light source. An illumination optical system that illuminates upward, a spectroscope that reflects light emitted from the illumination optical system to illuminate the slit opening, and that reflects light reflected by a specimen and passes through the slit opening; , said slit opening for passing only slit region of the illumination light from the illumination optical system, and a tube lens for collimating light the light passing through the slit aperture, the wavelength of the parallel light emitted from the tube lens passing a first dispersion optical system, an objective lens for illuminating light emitted from the first dispersion optical system on the specimen, the slit opening being reflected by the specimen is to proceed at different angles A first imaging lens that converts the parallel light into parallel light, a second dispersion optical system that causes the parallel light that has passed through the first imaging lens to travel at different angles depending on the wavelength, and the second dispersion optical system. A second imaging lens for imaging the emitted light, and a two-dimensional photoelectric detector for switching the light imaged by the second imaging lens to an electrical signal.

  According to the present invention, the first and second dispersion optical systems can be constituted by prisms.

  According to the invention, the first and second dispersion optical systems can be constituted by diffraction gratings.

  Furthermore, according to the present invention, a polarizing plate disposed between the broadband light source and the illumination optical system, a wave plate disposed between the first dispersion optical system and the objective lens, and the first And a polarizing plate disposed between the imaging lens and the second dispersion optical system, and instead of the spectroscope, the light illuminated from the illumination optical system is imaged with the slit aperture. It further includes a polarization spectrometer that separates each of the lenses.

  According to the invention, the illumination optical system comprises a cylindrical lens.

According to the present invention, in a real-time confocal microscope using a dispersion optical system, a broadband light source that supplies light, a cylindrical lens that collects light emitted from the light source, and the cylindrical lens An illumination lens that makes the slit pattern parallel light, a spectroscope that reflects the light emitted from the illumination lens, and that transmits the light reflected by the specimen and passed through the slit opening, and exits the illumination lens. the parallel light reflected by the spectroscope, the first imaging lens that condenses on the slit opening, said slit opening said first imaging lens to pass only slit area of the light imaged A tube lens that collimates the light that has passed through the slit opening, a first dispersion optical system that causes the collimated light emitted from the tube lens to travel at different angles depending on the wavelength, and the first An objective lens that illuminates the sample on the specimen with light emitted from the diffuse optical system, and parallel light that is reflected by the specimen and passes through the first imaging lens and the spectroscope proceeds at different angles depending on the wavelength. The second dispersion optical system, a second imaging lens that images light emitted from the second dispersion optical system, and a two-dimensional switch that switches the light imaged by the second imaging lens to an electrical signal. And a photoelectric detector.

Further, according to the present invention may further comprise a second slit opening to filter the light collected by the arrangement has been the cylindrical lens between the cylindrical lens and the illumination lens.

  According to the present invention, by configuring the confocal microscope without any scanning device, (1) vibration problems caused by the presence of the scanning device can be eliminated, and (2) an expensive beam deflection device, signal processing By not using the device, the manufacturing cost of the measuring instrument can be reduced, (3) it is possible to obtain an image at high speed without any time delay due to signal processing, and (4) the size is reduced because there is no scanning device. Has the advantage of being easy.

  Therefore, the present invention can be applied to an inspection process in a semiconductor production line that requires high-resolution measurement at a high speed, an inspection process in an LCD production line, etc., and when applied, (1) to reduce manufacturing cost and production time. (2) The quality of high value-added products can be improved through 100% inspection, and (3) it can be widely applied to observation of parts that are difficult to access due to downsizing.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 8 is a schematic view showing a confocal microscope according to an embodiment of the present invention.

  As shown in FIG. 8, the present invention includes a broadband light source 801, a wavelength filter 802, an illumination optical system 803, a spectrometer 804, a slit aperture 805, a tube lens 806, a first dispersion optical system 807 (dispersion optics), an objective lens 808, A first imaging lens 810, a second imaging lens 812, a second dispersion optical system 811, and a two-dimensional photoelectric detector 813 are included.

  The light emitted from the broadband light source 801 narrows the wavelength range while passing through the wavelength filter 802. When the wavelength range is too wide, chromatic aberration occurs for light of various wavelengths. When the wavelength range of the broadband light source 801 is small, the wavelength filter 802 may not be used to improve the light efficiency.

The light that has passed through the wavelength filter 802 is converged on the slit opening 805 by the illumination optical system 803. The spectroscope 804 reflects the light emitted from the illumination optical system 803 to illuminate the slit opening 805, and transmits the light reflected by the specimen 809 and passed through the slit opening 805. Light passing through the slit opening 805 travels like a point light source at each point on the slit due to diffraction. A tube lens 806 that is separated from the slit opening 805 by a focal length turns the light that has passed through the slit opening 805 into parallel light traveling at various angles in a direction perpendicular to the ground in FIG.

  This bundle of parallel lights enters the first dispersion optical system 807. The first dispersion optical system 807 is an optical system that travels at different angles depending on the wavelength of light. Since light incident on the first dispersion optical system 807 has various wavelengths, light having different wavelengths branches and travels at different angles. The branched light is collected on the specimen 809 by the objective lens 808. At this time, the pattern in which the specimen 809 is illuminated is as shown in FIG. Light of a specific wavelength is illuminated on the specimen 809 in a slit shape, and different wavelengths of light illuminate different areas in the direction perpendicular to the longitudinal direction of the slit. As described above, the present invention is characterized in that the two-dimensional region of the specimen 809 is illuminated at a time.

  The light reflected by the specimen 809 is combined into one while passing through the objective lens 808 and the first dispersion optical system 807, and is condensed on the slit opening 805 by the tube lens 806. At this time, the light reflected only when the specimen 809 is placed on the focal plane of the objective lens 808 passes through the slit opening 805, and the specimen 809 is placed above or below the focal plane. In this case, a large part of the reflected light is removed by the slit opening 805. The light that has passed through the slit further becomes a bundle of parallel light by the first imaging lens 810, which enters the second dispersion optical system 811 and branches in a direction horizontal to the ground depending on the wavelength. The branched light is focused on the two-dimensional photoelectric detector 813 by the second imaging lens 812. If a mirror is used as the specimen 809 and the specimen 809 is located in the focal plane of the objective lens, the image observed on the two-dimensional photoelectric detector 813 has a form similar to the illumination pattern of FIG. Will have.

  FIGS. 10a to 10c show an illumination region and an image observed on the two-dimensional photoelectric detector when the specimen is actually observed. As shown in FIG. 10a, in the sample 809 having a height difference, when the upper surface is located at the focal plane of the objective lens 808, the signal reflected from the lower surface is removed by the slit opening and the amount of light is extremely high. become weak. At this time, the light pattern illuminated on the specimen 809 is as shown in FIG. Accordingly, an image as shown in FIG. 10c can be observed by the two-dimensional photoelectric detector 813.

  Thus, since the image of the specimen can be obtained without any scanning device, the configuration is simple and the cost and time for signal processing can be saved. Further, it can be used in the same manner as an existing general optical microscope, and has an advantage that an image that can be divided more than an existing optical microscope can be obtained.

  The dispersion optical system 807 capable of traveling light at different angles depending on the wavelength can be implemented by various methods.

  FIG. 11 shows a case where the dispersion optical system 807 includes the prism 110. As shown in FIG. 11, when one light is incident, the light is branched and emitted at various angles. This is because the refractive index of the substance constituting the prism 110 has a different value depending on the wavelength, so that a difference in refraction angle occurs.

  FIG. 12 shows an example in which a dispersion optical system is configured using the diffraction grating 120. As shown in FIG. 12, when one light is incident, the light is branched and emitted at various angles depending on the wavelength. When diffraction occurs by the grating, the traveling angle of the primary light is proportional to the size of the wavelength, so that light having different wavelengths travels in different directions.

  FIG. 13 shows an example in which a dispersion optical system is configured by using a VPH (Volume Phase Holographic) diffraction grating 130. The VPH diffraction grating 13 is a diffraction grating manufactured by using a volume hologram, and the primary light. The efficiency of the system is maximized. In the case of the prism, the degree of the angle branched depending on the wavelength is not so large, and a light source having an extremely wide wavelength is required to illuminate a wide area of the specimen. However, if the wavelength region is too wide, chromatic aberration will occur. In the case of the existing diffraction grating, it is possible to increase the branch angle of the primary light by reducing the interval between the diffraction gratings, but has a disadvantage that the efficiency with respect to the primary light is inferior. On the other hand, the VPH diffraction grating 13 has an advantage that the angle is greatly changed according to the change of the wavelength and the efficiency of the primary light is increased.

  FIG. 14 shows another embodiment of the present invention. In FIG. 14, the same or equivalent parts as those in FIG. As shown in FIG. 14, a polarizing plate 140 is provided between the wavelength filter 802 and the illumination optical system 803, and a polarization spectrometer 141 is used instead of the spectrometer 804, and the first dispersion optical system 807 and the objective lens 808 are A wave plate 142 is provided therebetween, and a polarizing plate 143 is provided between the first imaging lens 810 and the second dispersion optical system 811.

  In the present embodiment, the light incident on the slit opening 805 is polarized, and the light reflected without passing through the slit opening 805 is prevented from being detected by the two-dimensional photoelectric detector 813. Since the light reflected by the slit opening 805 has the same polarization state as the incident light, the light is reflected without passing through the polarization spectrometer 141. Therefore, the light reflected from the surface of the slit opening 805 is not detected by the two-dimensional photoelectric detector 813.

  As a result, the light that has passed through the slit aperture 805, passed through the tube lens 806, the dispersive optical system 807, and the objective lens 808 and is reflected by the specimen 809 passes through the wave plate 142 twice. After passing through 805, it passes without being reflected by the polarization spectrometer 141 and is detected by the two-dimensional photoelectric detector 813. This embodiment can reduce the influence of the miscellaneous light reflected by the reflecting surface on the plane of the slit opening 805 and various optical components, and can improve the signal-to-noise ratio.

  FIG. 15 shows another embodiment of the present invention, wherein the illumination optical system includes a cylindrical lens 150. When the light emitted from the light source is converged using the cylindrical lens 150, the light condensing effect is generated only in one direction, and the light in the gathered portion becomes a slit shape. In the case of illuminating the slit opening 805 with such light, the amount of light reflected without passing through the slit opening 805 can be reduced, light efficiency can be increased, and deterioration of the image quality due to reflected light can be prevented. It has the advantages of

  FIG. 16 shows another embodiment of the present invention. The illumination optical system is composed of a cylindrical lens 150, an illumination lens 160, and a first imaging lens 810.

  Therefore, a method is used in which the light collected in the slit shape by the cylindrical lens 150 is further imaged on the slit opening 805 using the illumination lens 160 and the first imaging lens 810. At this time, the light passing through the illumination lens 160 becomes a bundle of parallel lights having different traveling directions, and this is imaged on the slit opening 805 by the first imaging lens 810. When such an optical system is used, the light passing through the spectroscope 804 becomes parallel light, and there is an advantage that aberrations that can be generated when the light is convergent light or divergent light can be removed.

  FIG. 17 shows another embodiment of the present invention, and the illumination optical system includes a cylindrical lens 150, a second slit aperture 170, an illumination lens 160, and a first imaging lens 810. .

  Therefore, only the light that has passed through the second slit opening 170 among the light condensed in a slit shape by the cylindrical lens 150 is illuminated on the slit opening 805 via the illumination lens 160 and the first imaging lens 810. Become. Since only the light that has passed through the second slit opening 170 is illuminated on the slit opening 805, there is no light reflected from the slit opening 805, so that it is possible to prevent deterioration in image quality due to miscellaneous light.

  As described above, even though the present invention has been described with reference to the embodiments and the drawings, the present invention is not limited to this, and those skilled in the art to which the present invention belongs have the knowledge of the present invention. It is clear that various modifications and variations can be made within the technical idea and the equivalent scope of the claims.

It is the schematic which shows the confocal scanning microscope using the conventional rotating disk. It is the schematic which shows the rotating disk in which the multiple pinhole opening is formed. It is the schematic which shows the rotating disk in which the slit pinhole opening is formed. It is a figure which shows the influence of the reflected light condensed with the tube lens by the movement to the optical axis direction of the test piece in the confocal scanning microscope using a multiple aperture. It is a graph which shows the extent to which the resolution | decomposability to the optical axis direction by the increase in size of an opening is changed with respect to the confocal scanning microscope using a multi-aperture, and the confocal scanning microscope using a single aperture. It is the schematic which shows the conventional confocal scanning microscope using a beam deflector. It is the schematic which shows the conventional confocal scanning microscope wavelength-encoded uniaxially. It is a figure which shows 1st Embodiment of this invention. It is the schematic which shows the form with which a test piece is illuminated. When actually observing a specimen, it is the schematic which shows the form with which a specimen is illuminated, and the form observed with a two-dimensional photoelectric detector. It is the schematic which shows that light is disperse | distributed from a prism. It is the schematic which shows that light is disperse | distributed from a diffraction grating. It is the schematic which shows that light is disperse | distributed from a VPH diffraction grating. It is a figure which shows 2nd Embodiment of this invention. It is a figure which shows 3rd Embodiment of this invention. It is a figure which shows 4th Embodiment of this invention. It is a figure which shows 5th Embodiment of this invention.

Explanation of symbols

110 Prism 120 Diffraction Grating 130 VPH Diffraction Grating 140, 143 Polarizing Plate 142 Wavelength Plate 150 Cylindrical Lens 160 Illumination Lens 170 Second Slit Aperture 801 Broadband Light Source 802 Wavelength Filter 803 Illumination Optical System 804 Spectroscope (Polarization Spectroscope)
805 Slit opening 806 Tube lens 807 First dispersion optical system 808 Objective lens 809 Specimen 810 First imaging lens 811 Second dispersion optical system 812 Second imaging lens 813 Two-dimensional photoelectric detector

Claims (7)

In a real-time confocal microscope using a dispersion optical system,
A broadband light source (801) for supplying light;
An illumination optical system (803) for condensing the light emitted from the light source (801) and illuminating the light on the slit opening (805) ;
The light emitted from the illumination optical system (803) is reflected and illuminated on the slit opening (805), and the light reflected by the specimen (809) and passed through the slit opening (805) is transmitted. A spectroscope (804);
And said slit aperture for passing only slit region of the illumination light from the illumination optical system (803) (805),
A tube lens (806) that collimates the light that has passed through the slit opening (805);
A first dispersion optical system (807) for causing parallel light emitted from the tube lens (806) to travel at different angles depending on the wavelength;
An objective lens (808) for illuminating light emitted from the first dispersion optical system (807) to said on specimen (809),
A first imaging lens (810) that collimates the light reflected by the specimen (809) and passed through the slit opening (805);
A second dispersion optical system (811) configured to allow the parallel light that has passed through the first imaging lens (810) to travel at different angles depending on the wavelength;
A second imaging lens (812) for imaging light emitted from the second dispersion optical system (811);
A real-time confocal microscope using a dispersion optical system, comprising: a two-dimensional photoelectric detector (813) that switches light imaged by the second imaging lens (812) to an electrical signal. . The real-time confocal microscope using a dispersion optical system according to claim 1, wherein the first and second dispersion optical systems (807, 811) include prisms (110). The real-time confocal microscope using a dispersion optical system according to claim 1, wherein the first and second dispersion optical systems (807, 811) are constituted by diffraction gratings (120). A polarizing plate (140) disposed between the broadband light source (801) and the illumination optical system (803);
A wave plate (142) disposed between the first dispersion optical system (807) and the objective lens (808);
A polarizing plate (143) disposed between the first imaging lens (810) and the second dispersion optical system (811),
Instead of the spectroscope (804), it further includes a polarization spectroscope (141) that splits the light illuminated from the illumination optical system (803) into the slit aperture (805) and the imaging lens (810), respectively. A real-time confocal microscope using the dispersion optical system according to claim 1. The real-time confocal microscope using a dispersion optical system according to claim 1, wherein the illumination optical system (803) is composed of a cylindrical lens (150). In a real-time confocal microscope using a dispersion optical system,
A broadband light source (801) for supplying light;
A cylindrical lens (150) for condensing the light emitted from the light source (801);
An illumination lens (160) that collimates the slit pattern collected by the cylindrical lens (150);
A spectroscope (804) that reflects the light emitted from the illumination lens (160) and transmits the light reflected by the specimen (809) and passed through the slit opening (805);
The exits from the illumination lens (160), the parallel light reflected by the spectroscope (804), a first imaging lens for condensing onto said slit aperture (805) (810),
The slit aperture (805) for allowing only the slit region of the light imaged by the first imaging lens (810) to pass;
A tube lens (806) that collimates the light that has passed through the slit opening (805);
A first dispersion optical system (807) for causing parallel light emitted from the tube lens (806) to travel at different angles depending on the wavelength;
An objective lens (808) for illuminating the specimen (809) with light emitted from the first dispersion optical system (807);
A second dispersion optical system (811) for causing the parallel light reflected by the specimen (809) and passing through the first imaging lens (810) and the spectroscope (804) to travel at different angles depending on the wavelength. When,
A second imaging lens (812) for imaging light emitted from the second dispersion optical system (811);
A real-time confocal microscope using a dispersion optical system, comprising: a two-dimensional photoelectric detector (813) that switches light imaged by the second imaging lens (812) to an electrical signal. . And further comprising a second slit opening to filter the light collected (170) by arranged with the cylindrical lens (150) between said cylindrical lens (150) and said illumination lens (160) A real-time confocal microscope using the dispersion optical system according to claim 6.