JP4009726B2 - Apparatus and method for measuring modulation frequency characteristic of photodetector - Google Patents

Apparatus and method for measuring modulation frequency characteristic of photodetector Download PDF

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JP4009726B2
JP4009726B2 JP2003380808A JP2003380808A JP4009726B2 JP 4009726 B2 JP4009726 B2 JP 4009726B2 JP 2003380808 A JP2003380808 A JP 2003380808A JP 2003380808 A JP2003380808 A JP 2003380808A JP 4009726 B2 JP4009726 B2 JP 4009726B2
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正裕 吉岡
宗純 佐藤
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National Institute of Advanced Industrial Science and Technology AIST
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光通信や光測定において用いられる光検出器の変調周波数特性を正確に測定する測定装置及びその測定方法に関するものである。   The present invention relates to a measuring apparatus and a measuring method for accurately measuring a modulation frequency characteristic of a photodetector used in optical communication and optical measurement.

光通信や光計測においては、強度変調という形で光に乗せられた信号を光検出器や受光器と呼ばれる光・電気変換器によって電気信号に戻すことが行われる。光検出器の特性として重要なものは、光の波長に対する感度特性と変調周波数特性(以下、単に周波数特性)である。   In optical communication and optical measurement, a signal placed on light in the form of intensity modulation is returned to an electric signal by an optical / electrical converter called a photodetector or a light receiver. What is important as a characteristic of the photodetector is a sensitivity characteristic with respect to the wavelength of light and a modulation frequency characteristic (hereinafter simply referred to as frequency characteristic).

波長に対する感度特性は、使用する光の波長に対して適切な動作をする光変調器を選ぶために利用される。一方後者は、光に載せられた信号を忠実に電気信号に変換する能力を表しており、光通信や光計測において、信頼性の高いシステムを構築するための重要なパラメータである。   The sensitivity characteristic with respect to the wavelength is used to select an optical modulator that operates appropriately with respect to the wavelength of light to be used. On the other hand, the latter represents the ability to faithfully convert a signal placed on light into an electrical signal, and is an important parameter for constructing a highly reliable system in optical communication and optical measurement.

光通信や光計測の一般的な流れを図1に示す。光通信においては、光変調器を用いて伝送したい電気信号を光の強弱という光信号に直して、光ファイバ等を通して遠隔地に送る。受信地では、光信号に乗せられてきた電気信号を光検出器によって取り出す。この時、光伝送される前の電気信号と送られてきた電気信号の波形がどの程度類似しているかは、光変調器の周波数特性と光検出器の周波数特性に大きく依存する。   A general flow of optical communication and optical measurement is shown in FIG. In optical communication, an electrical signal desired to be transmitted using an optical modulator is converted into an optical signal of light intensity and sent to a remote place through an optical fiber or the like. At the reception place, the electric signal carried on the optical signal is taken out by the photodetector. At this time, the degree of similarity between the waveform of the electrical signal before the optical transmission and the transmitted electrical signal largely depends on the frequency characteristic of the optical modulator and the frequency characteristic of the photodetector.

一方、光計測においては、元の信号とは測定対象の物理量であり、それを何らかのセンサ(あるいは測定システム)を用いて光信号へ変換する。それを光検出器を用いて電気信号として取り出す。この光計測においても、センサの周波数特性と光検出器の周波数特性が、測定の信頼性、精度を決定する大きな要素となる。   On the other hand, in optical measurement, the original signal is a physical quantity to be measured, and is converted into an optical signal using some sensor (or measurement system). It is extracted as an electrical signal using a photodetector. Also in this optical measurement, the frequency characteristics of the sensor and the frequency characteristics of the photodetector are major factors that determine the reliability and accuracy of the measurement.

光通信や光測定は、光という信号伝送手段を用いることで、電気信号のみによる通信や計測に比べて種々の利点を有するが、そのシステム性能を決める重要な要素の一つが、光検出器の周波数特性である。   Optical communication and optical measurement have various advantages compared to communication and measurement using only electrical signals by using signal transmission means called light. One of the important factors that determine system performance is It is a frequency characteristic.

従来の光検出器の周波数特性測定方法は、変調された光出力を基準として用いる方法と、基準となる光検出器と比較する方法に大別される。   Conventional methods for measuring frequency characteristics of photodetectors are roughly divided into a method using a modulated light output as a reference and a method comparing with a reference photodetector.

図2に光検出器の周波数特性測定のための基本構成例を示す。まず、強度変調された光を出力できる光源1を用意する。光源としては、直接変調可能な半導体レーザ2、もしくは変調機能を持たないレーザ3と外部光変調器4の組合せが考えられる。この時、光源1には、変調感度や変調器の周波数特性が既知であることを要求される。外部光変調器の周波数特性を正確に測定する装置は公知である(特許文献1参照。)。
特公平8−20333
FIG. 2 shows an example of a basic configuration for measuring the frequency characteristic of the photodetector. First, a light source 1 that can output intensity-modulated light is prepared. As a light source, a semiconductor laser 2 that can be directly modulated, or a combination of a laser 3 that does not have a modulation function and an external light modulator 4 can be considered. At this time, the light source 1 is required to have known modulation sensitivity and frequency characteristics of the modulator. An apparatus for accurately measuring the frequency characteristic of an external optical modulator is known (see Patent Document 1).
Japanese Patent Publication No. 8-20333

図2の構成で、発振器5によって供給される変調周波数を変えながら、光検出器6からの電気出力に含まれる変調周波数と同じ周波数成分の強度を、周波数分析装置7によって測定することで、光検出器6の周波数特性が測定できる。   In the configuration of FIG. 2, the intensity of the same frequency component as the modulation frequency included in the electrical output from the photodetector 6 is measured by the frequency analyzer 7 while changing the modulation frequency supplied by the oscillator 5. The frequency characteristic of the detector 6 can be measured.

従来の光検出器の周波数特性方法では次のような問題がある。外部光変調器を用いる場合、その正確な周波数特性を公知の装置(特許文献1参照。)を用いて予め測定しておく必要があり、手間が増える。   The conventional photodetector frequency characteristic method has the following problems. When an external optical modulator is used, it is necessary to measure the accurate frequency characteristics using a known device (see Patent Document 1) in advance, which increases labor.

また、半導体レーザの直接変調特性を正確に測定する手段はない。このため、通常は、十分高い周波数まで変調可能な光源を用いて、対象とする周波数範囲では周波数特性は平坦であろうと仮定して測定を行っている。   There is no means for accurately measuring the direct modulation characteristics of the semiconductor laser. For this reason, measurement is usually performed using a light source that can be modulated to a sufficiently high frequency and assuming that the frequency characteristics are flat in the target frequency range.

一方、光源の変調特性が不明な場合には、基準となる光検出器7を用いる方法が使われる。まず、被測定光検出器6の代わりに基準光検出器7を接続し、光源1の変調周波数を変えながら基準光検出器8の出力を測定する。   On the other hand, when the modulation characteristic of the light source is unknown, a method using the reference photodetector 7 is used. First, a reference light detector 7 is connected instead of the measured light detector 6, and the output of the reference light detector 8 is measured while changing the modulation frequency of the light source 1.

ついで、被測定光検出器6に取り替えて、同様な測定を繰り返す。基準光検出器7の周波数特性が既知であれば、その特性との比較で、被測定光検出器6の周波数特性が分かる。この場合も、基準光検出器の周波数特性を正確に測定する手段がないため、使用できる周波数範囲が十分広く、対象周波数範囲では特性が平坦であろうと考えられる光検出器を基準として用いるのが通例である。   Next, the measured light detector 6 is replaced and the same measurement is repeated. If the frequency characteristic of the reference photodetector 7 is known, the frequency characteristic of the measured photodetector 6 can be found by comparison with the characteristic. Also in this case, since there is no means for accurately measuring the frequency characteristics of the reference photodetector, it is necessary to use a photodetector that has a sufficiently wide frequency range and that is expected to be flat in the target frequency range as a reference. It is customary.

以上のように、光検出器の周波数特性を測定するためには、光源の変調特性を知らなくてはならず、光源の変調特性を知るためには光検出器の特性を知らなくてはならない関係にある。   As described above, in order to measure the frequency characteristics of the photodetector, the modulation characteristics of the light source must be known, and in order to know the modulation characteristics of the light source, the characteristics of the photodetector must be known. There is a relationship.

また外部変調器を用いる場合でも、前述の手間が増えるという欠点は、測定を繰り返すことに伴う測定時間の増大及び測定精度の低下をもたらす。そこで、変調周波数特性が平坦であろうと考えられる光源や光検出器を基準として用いて測定される場合が多い。しかし、この場合は、基準の精度が不明なため、測定結果の信頼性に疑問がある。   Further, even when an external modulator is used, the above-described disadvantage that the labor is increased causes an increase in measurement time and a decrease in measurement accuracy due to repeated measurement. Therefore, the measurement is often performed using a light source or a photodetector that is considered to have a flat modulation frequency characteristic as a reference. However, in this case, since the accuracy of the reference is unknown, the reliability of the measurement result is questionable.

本発明は、上記従来の問題点を解決すること目的とするものであり、基準となる光検出器を用いなくとも被測定光検出器の周波数特性を正確に測定する方法並びにその測定装置を実現することを課題とする。   The present invention aims to solve the above-mentioned conventional problems, and realizes a method and an apparatus for accurately measuring the frequency characteristics of a measured photodetector without using a reference photodetector. The task is to do.

本発明は上記課題を解決するために、変調半導体レーザからの強度変調光を、該変調半導体レーザの変調周波数とは異なる変調周波数で再度強度変調する外部光変調器と、電気信号を測定する周波数分析装置とを備えており、被測定対象である光検出器に前記再度強度変調した光を受光させて変換した電気信号を、前記周波数分析装置で前記二つの異なる変調周波数の和と差である周波数成分を取り出して測定し、前記二つの変調周波数を変えることで任意の変調周波数の特性を測定できることを特徴とする変調周波数特性測定装置を提供する。 In order to solve the above-mentioned problems, the present invention provides an external optical modulator that intensity-modulates intensity-modulated light from a modulation semiconductor laser again at a modulation frequency different from the modulation frequency of the modulation semiconductor laser, and a frequency at which an electric signal is measured. An electric signal obtained by receiving again the intensity-modulated light by the photodetector that is the object to be measured, and converting the electric signal into the sum and difference of the two different modulation frequencies in the frequency analyzer. There is provided a modulation frequency characteristic measuring apparatus characterized in that characteristics of an arbitrary modulation frequency can be measured by taking out and measuring frequency components and changing the two modulation frequencies .

本発明は上記課題を解決するために、変調機能を持たないレーザの光を連続して各々異なる変調周波数で二重に強度変調する2台の外部光変調器と、電気信号を測定する周波数分析装置とを備えており、被測定対象である光検出器に前記二重に強度変調した光を受光させて変換した電気信号を、前記周波数分析装置で前記二つの異なる変調周波数の和と差である周波数成分を取り出して測定し、前記二つの変調周波数を変えることで任意の変調周波数の特性を測定できることを特徴とする変調周波数特性測定装置を提供する。 In order to solve the above-described problems, the present invention provides two external optical modulators that continuously and intensity-modulate laser light having no modulation function at different modulation frequencies, and frequency analysis that measures electrical signals. And an electric signal obtained by receiving the double intensity-modulated light by the photodetector to be measured and converting the light signal by the sum and difference of the two different modulation frequencies by the frequency analyzer. There is provided a modulation frequency characteristic measuring apparatus characterized in that a characteristic of an arbitrary modulation frequency can be measured by taking out and measuring a certain frequency component and changing the two modulation frequencies .

本発明は上記課題を解決するために、変調半導体レーザからの強度変調光を、該変調半導体レーザの変調周波数とは異なる変調周波数で外部光変調器を用いて再度強度変調し、該再度強度変調した光を、被測定対象である光検出器で受光させて電気信号に変換し、該電気信号を周波数分析装置により前記二つの異なる変調周波数の和と差である周波数成分を取り出して測定し、前記二つの変調周波数を変えることで任意の変調周波数の特性を測定することを特徴とする変調周波数特性測定方法を提供する。 In order to solve the above-mentioned problems, the present invention performs intensity modulation on the intensity-modulated light from the modulation semiconductor laser again using an external optical modulator at a modulation frequency different from the modulation frequency of the modulation semiconductor laser, and the intensity modulation again. The received light is received by a light detector to be measured and converted into an electrical signal, and the electrical signal is measured by extracting a frequency component that is the sum and difference of the two different modulation frequencies with a frequency analyzer, A modulation frequency characteristic measuring method is provided, wherein characteristics of an arbitrary modulation frequency are measured by changing the two modulation frequencies .

本発明は上記課題を解決するために、変調機能を持たないレーザの光に2台の外部光変調器を用いて連続して各々異なる変調周波数で二重に強度変調し、該二重に強度変調した光を、被測定対象である光検出器で受光させて電気信号に変換し、該電気信号を周波数分析装置により前記二つの異なる変調周波数の和と差である周波数成分を取り出して測定し、前記二つの変調周波数を変えることで任意の変調周波数の特性を測定することを特徴とする変調周波数特性測定方法を提供する。 In order to solve the above-described problems, the present invention continuously modulates the intensity of a laser beam having no modulation function by using two external optical modulators at two different modulation frequencies. The modulated light is received by a photodetector to be measured and converted into an electrical signal, and the electrical signal is measured by extracting a frequency component that is the sum and difference of the two different modulation frequencies with a frequency analyzer. The present invention provides a modulation frequency characteristic measuring method characterized by measuring characteristics of an arbitrary modulation frequency by changing the two modulation frequencies .

本発明の構成によると、光検出器の周波数特性を正確に測定する目的のために、測定に使用する他の機器の特性を正確に知っておく必要がなく測定を簡便に行うことができる。   According to the configuration of the present invention, for the purpose of accurately measuring the frequency characteristics of the photodetector, it is not necessary to know the characteristics of other devices used for the measurement accurately, and the measurement can be easily performed.

従来例では、光検出器の周波数特性を測定するためには、光変調器の周波数特性を知っていなければならず、逆に、光変調器の周波数特性を測定するためには、光検出器の周波数特性が必要であるという堂々巡りが生じていたが、本発明によれば、光変調器の周波数特性を知らなくても、光検出器の周波数特性を正確に測定できるので、上記のような問題は解決できる。   In the conventional example, in order to measure the frequency characteristic of the optical detector, the frequency characteristic of the optical modulator must be known. Conversely, in order to measure the frequency characteristic of the optical modulator, the optical detector However, according to the present invention, the frequency characteristic of the photodetector can be accurately measured without knowing the frequency characteristic of the optical modulator. Can solve this problem.

本発明を実施するための最良の形態を実施例に基づいて図面を参照して、以下に説明する。   The best mode for carrying out the present invention will be described below with reference to the drawings based on the embodiments.

図3は、本発明の実施例1の構成を示す図である。光源9からの光を、外部変調器10を用いて、発信機12から外部変調器10に与える電気信号の周波数で強度変調する。この外部変調器10を用いて強度変調された光を、外部変調器11を用いて、発信機13から外部変調器11に与える電気信号の周波数で再度強度変調する。被測定光検出器14は、外部変調器10、11により二重に強度変調された光を受けて電気信号を出力する。15は、被測定光検出器14から出力される電気信号を測定する周波数分析装置である。   FIG. 3 is a diagram showing the configuration of the first embodiment of the present invention. The intensity of the light from the light source 9 is modulated using the external modulator 10 at the frequency of the electrical signal supplied from the transmitter 12 to the external modulator 10. The intensity-modulated light using the external modulator 10 is intensity-modulated again using the external modulator 11 at the frequency of the electric signal supplied from the transmitter 13 to the external modulator 11. The measured light detector 14 receives light that has been doubly intensity-modulated by the external modulators 10 and 11 and outputs an electrical signal. Reference numeral 15 denotes a frequency analyzer that measures an electrical signal output from the measured photodetector 14.

光源9は、被測定光検出器14の対象とする波長の光を安定に出力できるものを使用する。周波数分析装置は被測定光検出器14からの電気信号に含まれる周波数成分ごとの強度を測定するものであり、その一例がスペクトラムアナライザである。周波数分析装置は目的とする周波数の信号強度を測定できるものであればよい。   As the light source 9, a light source that can stably output light having a wavelength to be measured by the measured light detector 14 is used. The frequency analyzer measures the intensity of each frequency component contained in the electrical signal from the measured photodetector 14, and an example thereof is a spectrum analyzer. The frequency analyzer may be any device that can measure the signal intensity of the target frequency.

さらに、実施例1の構成をその動作を中心にして説明する。まず、外部変調器10を発振器12からの角周波数ω1の正弦波信号で駆動する。光源9の光角周波数をω0とすれば、外部変調器の出力は、次の数式1で表わされる。 Further, the configuration of the first embodiment will be described focusing on the operation. First, the external modulator 10 is driven by a sine wave signal having an angular frequency ω 1 from the oscillator 12. If the optical angular frequency of the light source 9 is ω 0 , the output of the external modulator is expressed by the following formula 1.

Figure 0004009726
Figure 0004009726

ここに、mAは、光変調器10の角周波数ω1における変調深さである。   Here, mA is the modulation depth of the optical modulator 10 at the angular frequency ω1.

さらに、外部変調器11を発振器13からの角周波数(ω1+ω2)の正弦波周波数で駆動する。この時、外部変調器11の出力、すなわち被測定光検出器14の入力は、次の数式2で表される。   Further, the external modulator 11 is driven at a sine wave frequency of the angular frequency (ω1 + ω2) from the oscillator 13. At this time, the output of the external modulator 11, that is, the input of the measured photodetector 14 is expressed by the following formula 2.

Figure 0004009726
Figure 0004009726

ここに、mBは、外部光変調器11の角周波数(ω1+ω2)における変調深さである。   Here, mB is the modulation depth of the external optical modulator 11 at the angular frequency (ω1 + ω2).

この出力光を光検出器14で受光したとき、ω0は非常に高い周波数であるので、光検出器14はその平均パワーに応答した信号を出力する。従って、光検出器14の出力は次の数式3で表される。   When this output light is received by the photodetector 14, since ω0 has a very high frequency, the photodetector 14 outputs a signal in response to the average power. Therefore, the output of the photodetector 14 is expressed by the following Equation 3.

Figure 0004009726
Figure 0004009726

ここに、F(ω)は、角周波数ωにおける光検出器14の周波数特性を表す関数である。   Here, F (ω) is a function representing the frequency characteristic of the photodetector 14 at the angular frequency ω.

この出力信号の中で、角周波数ω2と2ω1+ω2の成分に着目する。これらの成分の大きさの比は次のようになり、これは光変調器12、13の特性であるmAやmBに無関係な値である。 In this output signal, attention is focused on components of angular frequencies ω2 and 2ω1 + ω2 . The ratio of the sizes of these components is as follows, which is a value unrelated to mA and mB, which are characteristics of the optical modulators 12 and 13.

周波数分析装置は、入力信号に含まれる周波数成分を分析し、成分毎の大きさを測定できるため、次の数式4の値は周波数分析装置15によって測定できる。   Since the frequency analyzer can analyze the frequency component included in the input signal and measure the size of each component, the value of the following Equation 4 can be measured by the frequency analyzer 15.

Figure 0004009726
Figure 0004009726

ここで改めてω2をωL、(2ω1+ω2)をωHとおく。発振器12の角周波数をω1=(ωH−ωL)/2、発振器13の角周波数をω1+ω2=(ωH−ωL)/2、として、ωLを一定に保ったまま、ωHを順次変えていけば、周波数分析装置15によって測定された角周波数との成分の大きさの比F(ωH)/F(ωL)から、ωLにおける特性を基準としたときの光変調器14の周波数特性が、不明な値であるmAやmBに影響されずに正確に測定できることになる。つまり、光変調器の周波数特性を知らなくとも、光変調器の周波数特性が正確に求められる。   Here, ω2 is again set to ωL, and (2ω1 + ω2) is set to ωH. If the angular frequency of the oscillator 12 is ω1 = (ωH−ωL) / 2, the angular frequency of the oscillator 13 is ω1 + ω2 = (ωH−ωL) / 2, and ωH is sequentially changed while keeping ωL constant, From the ratio F (ωH) / F (ωL) of the magnitude of the component with the angular frequency measured by the frequency analyzer 15, the frequency characteristic of the optical modulator 14 when the characteristic at ωL is used as a reference is an unknown value. Therefore, it can be measured accurately without being affected by mA and mB. That is, the frequency characteristic of the optical modulator can be accurately obtained without knowing the frequency characteristic of the optical modulator.

光検出器の周波数特性は、基準となる周波数(直流あるいは、適当な代表周波数)を基準として得られればよい。本発明の方法では、厳密には直流を基準とした値は測定できないが、ωLの値を小さくして測定を行えば、十分な精度で直流を基準とした周波数特性が得られる。   The frequency characteristic of the photodetector may be obtained based on a reference frequency (DC or an appropriate representative frequency). Strictly speaking, the method of the present invention cannot measure a value based on direct current, but if the measurement is performed with a small value of ωL, a frequency characteristic based on direct current can be obtained with sufficient accuracy.

図4は、本発明の実施例2の構成を示す図である。図2の構成における光源9と外部光変調器11を、直接変調が可能な半導体レーザ16に置き換えたものであり、動作は実施例1と同じである。   FIG. 4 is a diagram showing the configuration of the second embodiment of the present invention. The light source 9 and the external light modulator 11 in the configuration of FIG. 2 are replaced with a semiconductor laser 16 capable of direct modulation, and the operation is the same as in the first embodiment.

本発明によれば、容易に光検出器の正確な周波数特性を測定できるので、光通信分野や光計測分野での光検出器の測定に適用可能である。   According to the present invention, an accurate frequency characteristic of a photodetector can be easily measured, and thus can be applied to measurement of a photodetector in the optical communication field and the optical measurement field.

光学システムによる測定例の概略図である。It is the schematic of the example of a measurement by an optical system. 光検出器の周波数特性測定に一般的な構成図である。It is a general block diagram for measuring frequency characteristics of a photodetector. 本発明の実施例1を説明する図である。It is a figure explaining Example 1 of the present invention. 本発明の実施例2を説明する図である。It is a figure explaining Example 2 of this invention.

符号の説明Explanation of symbols

1 光源
2 直接変調半導体レーザ
3 レーザ
4 光変調器
5 発振器
6 光検出器
7、15、21 周波数分析装置
8 基準光検出器
9 レーザ
10 光変調器
11 光変調器
12 発振器
13 発振器
14 光検出器
16 直接変調半導体レーザ
17 光変調器
18 発振器
19 発振器
20 光検出器
DESCRIPTION OF SYMBOLS 1 Light source 2 Direct modulation semiconductor laser 3 Laser 4 Optical modulator 5 Oscillator 6 Optical detector 7, 15, 21 Frequency analyzer 8 Reference optical detector 9 Laser 10 Optical modulator 11 Optical modulator 12 Oscillator 13 Oscillator 14 Optical detector 16 Direct Modulation Semiconductor Laser 17 Optical Modulator 18 Oscillator 19 Oscillator 20 Photodetector

Claims (4)

変調半導体レーザからの強度変調光を、該変調半導体レーザの変調周波数とは異なる変調周波数で再度強度変調する外部光変調器と、電気信号を測定する周波数分析装置とを備えており、
被測定対象である光検出器に前記再度強度変調した光を受光させて変換した電気信号を、前記周波数分析装置で前記二つの異なる変調周波数の和と差である周波数成分を取り出して測定し、前記二つの変調周波数を変えることで任意の変調周波数の特性を測定できることを特徴とする変調周波数特性測定装置。
An external optical modulator that intensity-modulates the intensity-modulated light from the modulation semiconductor laser again at a modulation frequency different from the modulation frequency of the modulation semiconductor laser, and a frequency analyzer that measures an electrical signal,
An electrical signal obtained by receiving and converting the intensity-modulated light again into the light detector to be measured, and measuring the frequency component which is the sum and difference of the two different modulation frequencies by the frequency analyzer , A modulation frequency characteristic measuring apparatus capable of measuring characteristics of an arbitrary modulation frequency by changing the two modulation frequencies .
変調機能を持たないレーザの光を連続して各々異なる変調周波数で二重に強度変調する2台の外部光変調器と、電気信号を測定する周波数分析装置とを備えており、
被測定対象である光検出器に前記二重に強度変調した光を受光させて変換した電気信号を、前記周波数分析装置で前記二つの異なる変調周波数の和と差である周波数成分を取り出して測定し、前記二つの変調周波数を変えることで任意の変調周波数の特性を測定できることを特徴とする変調周波数特性測定装置。
Two external optical modulators that continuously and intensity-modulate laser light having no modulation function at different modulation frequencies, and a frequency analyzer that measures an electrical signal,
The frequency signal, which is the sum and difference of the two different modulation frequencies, is extracted from the electrical signal obtained by receiving and converting the double intensity-modulated light by the photodetector that is the object to be measured. And a modulation frequency characteristic measuring apparatus capable of measuring characteristics of an arbitrary modulation frequency by changing the two modulation frequencies .
変調半導体レーザからの強度変調光を、該変調半導体レーザの変調周波数とは異なる変調周波数で外部光変調器を用いて再度強度変調し、該再度強度変調した光を、被測定対象である光検出器で受光させて電気信号に変換し、該電気信号を周波数分析装置により前記二つの異なる変調周波数の和と差である周波数成分を取り出して測定し、前記二つの変調周波数を変えることで任意の変調周波数の特性を測定することを特徴とする変調周波数特性測定方法。 The intensity-modulated light from the modulation semiconductor laser is intensity-modulated again using an external optical modulator at a modulation frequency different from the modulation frequency of the modulation semiconductor laser, and the light whose intensity has been modulated again is detected by the light to be measured. The light signal is received and converted into an electric signal, and the electric signal is measured by extracting a frequency component which is the sum and difference of the two different modulation frequencies by a frequency analyzer , and changing the two modulation frequencies A modulation frequency characteristic measuring method , characterized by measuring a characteristic of a modulation frequency. 変調機能を持たないレーザの光に2台の外部光変調器を用いて連続して各々異なる変調周波数で二重に強度変調し、該二重に強度変調した光を、被測定対象である光検出器で受光させて電気信号に変換し、該電気信号を周波数分析装置により前記二つの異なる変調周波数の和と差である周波数成分を取り出して測定し、前記二つの変調周波数を変えることで任意の変調周波数の特性を測定することを特徴とする変調周波数特性測定方法。 Laser light having no modulation function is continuously intensity-modulated at two different modulation frequencies using two external light modulators, and the double intensity-modulated light is light to be measured. Light is received by a detector and converted into an electrical signal, and the electrical signal is measured by extracting a frequency component that is the sum and difference of the two different modulation frequencies with a frequency analyzer and changing the two modulation frequencies. A method for measuring a modulation frequency characteristic, comprising measuring a characteristic of a modulation frequency.
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