JP3835710B2 - Method for manufacturing composite semiconductor device - Google Patents

Method for manufacturing composite semiconductor device Download PDF

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Publication number
JP3835710B2
JP3835710B2 JP23134396A JP23134396A JP3835710B2 JP 3835710 B2 JP3835710 B2 JP 3835710B2 JP 23134396 A JP23134396 A JP 23134396A JP 23134396 A JP23134396 A JP 23134396A JP 3835710 B2 JP3835710 B2 JP 3835710B2
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Japan
Prior art keywords
insulating case
external lead
semiconductor device
adhesive
composite semiconductor
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Expired - Fee Related
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JP23134396A
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Japanese (ja)
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JPH1065098A (en
Inventor
永吾 福田
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日本インター株式会社
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Priority to JP23134396A priority Critical patent/JP3835710B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は、絶縁ケースの外部に導出される外部導出端子の位置決め構造を備えた複合半導体装置製造方法に関するものである。
【0002】
【従来の技術】
この種の複合半導体装置の構造を図6乃至図9を参照して説明する。
まず、図6において、銅などからなる放熱板1上に、両面に導体層が形成されたセラミック等の絶縁基板2が半田固着されている。この絶縁基板2上には半導体ペレット3、外部導出端子4などの回路構成部品が半田固着されている。 なお、これらの回路構成部品を半田固着する場合には図示を省略した位置決め治具を用いている。
【0003】
次に、図7に示すように放熱板1の外周部に接着剤5を塗布する。
次いで、図8に示すように両端開口の絶縁ケース6を用意し、該絶縁ケース6の下端面を、接着剤5を塗布した放熱板1の外周部に当接して接着する。
次に、該絶縁ケース6内に樹脂7を充填して硬化させた後、蓋体8を絶縁ケース6の一方の開口端に被せて目的とする複合半導体装置9を完成する。
【0004】
【発明が解決しようとする課題】
従来の複合半導体装置は概略上記のように構成されているので、次のような解決すべき課題があった。接着剤5を放熱板1の外周部上面に塗布し、絶縁ケース6を接着しているので、該絶縁ケース6に外部導出端子4の係止部を設け、外部導出端子4の位置決め治具を兼用させて半田付けするということができない。すなわち、接着剤5は一般に半田付け温度に耐えられないために、放熱板1への各回路構成部品の半田付け工程と絶縁ケース6の該放熱板1への接着工程とを別工程として行う必要があった。このため、作業工数が削減できず、複合半導体装置の製造コストの低減に十分寄与できなかった。
【0005】
【発明の目的】
本発明は、上記のような課題を解決するためになされたもので、外部導出端子の半田付けの際に絶縁ケースを該外部導出端子の位置決め治具としても兼用でき、作業工数の減少により十分製造コストの低減に寄与し得る複合半導体装置製造方法を提供することを目的とするものである。
【0006】
【課題を解決するための手段】
請求項1に記載の発明によれば、導体層が形成された絶縁基板を放熱板上に半田固着する工程と、
前記導体層上に半導体ペレットを半田固着する工程と、
前記導体層上に外部導出端子を半田固着する工程と、
両端が開口した絶縁ケースの下端部と前記放熱板の外周部とを接着剤によって固着する工程とを含む複合半導体装置の製造方法において、
前記外部導出端子に形成された係止部によって前記外部導出端子を前記絶縁ケースに対して仮止めし、次いで、
前記絶縁ケースを前記放熱板上に載置し、次いで、
前記導体層と前記外部導出端子の下端とを半田固着し、次いで、
前記絶縁ケースの下端部の内周面と前記放熱板の外周部の側面とによって画定される接着剤溜り用溝内に接着剤を充填することにより、前記絶縁ケースと前記放熱板とを固着することを特徴とする複合半導体装置の製造方法が提供される。
【0007】
【発明の実施の形態】
以下に、本発明の実施の形態を図1乃至図4を参照して説明する。
図1は絶縁ケースの平面図、図2はその正面図である。
本発明の複合半導体装置の1つの特徴は、絶縁ケース16自体に外部導出端子4を仮止めするための係止部を設けたことである。この係止部は、本実施例では外部導出端子挿入孔17内に実現されている。
【0008】
すなわち、図3に示すように、外部導出端子挿入孔17はその一部が相対的に口の広い幅広の角穴17aとなっており、小径の角穴17bとの連通部に形成される段部18に外部導出端子4の係止部4aを係止させることで、外部導出端子4の仮止めができるようにしてある。なお、実際に係止させる手順としては、図3における下方の角穴17b側から外部導出端子4を挿入し、係止部4aの位置では外側に広がろうとするばね力に抗してさらに挿入することにより、角穴17bを通過した段階で該係止部4aが幅広の角穴17a内で広がり、段部18と角穴17aの内壁により規制されて仮止めがなされる。
【0009】
上記の外部導出端子4の下端は絶縁基板2の所定の位置に位置決めしなければならないが、この位置決め手段として図2に示すように絶縁ケース16の上部から下方に向かって突出する位置決めピン19が設けられている。この位置決めピン19は、その先端部19aを図2では図示を省略した放熱板の表面に設けた小孔に挿入することにより位置決めがなされる構成となっている。
【0010】
次に、本発明の第2の特徴は、図2に示すように絶縁ケース16の一方の開口部外周に沿って傾斜溝部20を設けたことである。この傾斜溝部20を設けることにより、次の製造方法の説明で詳細が明らかになるように、該傾斜溝部20に接着剤を塗布して放熱板と絶縁ケース16との固着が可能となる。
【0011】
に上記のように構成された複合半導体装置の製造方法について説明する。図4において、放熱板1の所定位置に外部導出端子4を半田固着するに当たり、絶縁ケース16の外部導出端子挿入孔17に外部導出端子4を挿入し、係止部4aにより仮止めをする。
【0012】
次いで、上記外部導出端子4を仮止めした絶縁ケース16の全体を放熱板1上に載置する。この際に、前記のように絶縁ケース16に設けた位置決めピン19(図2参照)の先端部19aを放熱板の小孔(図示せず)に挿入することで位置決めがなされる。上記の状態で加熱し、予め外部導出端子4の下端に塗布した半田を溶融させ、半田固着させる。
【0013】
次に、図5に示すように、絶縁ケース16全体を反転させ、該絶縁ケース16の傾斜溝部20に接着剤塗布ノズル21等により接着剤5を充填・硬化させる。その後の工程は従来通りの工程を経て目的とする複合半導体装置を完成させる。
【0014】
【発明の効果】
本発明は以上のように、絶縁ケースと放熱板とを固定するための接着剤を放熱板の裏面側から塗布できるようにしたので、絶縁ケースと放熱板とを嵌合させた後においても接着作業が可能となる。このため、絶縁ケースを半田の溶融温度まで加熱することが許容され、該絶縁ケース自体を外部導出端子の仮止め乃至位置決め治具として兼用ることができる。以上の結果、従来のように手作業による接着剤塗布及び絶縁ケースの接着作業を経ることなく、自動機による接着剤塗布工程により絶縁ケースを放熱板に固定することができ、作業工数の減少によりこの種の複合半導体装置の製造原価を低減し得る。
【図面の簡単な説明】
【図1】本発明の複合半導体装置に使用する絶縁ケースの平面図である。
【図2】上記絶縁ケースの正面図である。
【図3】上記絶縁ケースに設けた外部導出端子挿入孔を拡大して示した断面図である。
【図4】上記絶縁ケースを使用して外部導出端子を仮止めした状態の一部を切り欠いた断面図である。
【図5】本発明における接着剤塗布工程を説明するための断面図である。
【図6】従来の複合半導体装置の製造工程を示し、回路構成部品を放熱板に固着させた状態の説明図である。
【図7】同じく従来の製造工程を示し、放熱板に絶縁ケースを接着させるために、放熱板の外周部に接着剤を塗布した状態の説明図である。
【図8】同じく従来の製造工程を示し、放熱板に絶縁ケースを接着させて所定の処理工程を経て完成させた複合半導体装置の断面図である。
【符号の説明】
1 放熱板
2 絶縁基板
3 半導体ペレット
4 外部導出端子
4a 係止部
5 接着剤
8 蓋体
16 絶縁ケース
17 外部導出端子挿入孔
17a 角穴
17b 角穴
18 段部
19 位置決めピン
20 傾斜溝部
21 接着剤塗布ノズル
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a compound semiconductor device having a positioning structure of the external lead terminals are led to the outside of the insulating case.
[0002]
[Prior art]
The structure of this type of composite semiconductor device will be described with reference to FIGS.
First, in FIG. 6, an insulating substrate 2 made of ceramic or the like having a conductor layer formed on both sides is soldered onto a heat sink 1 made of copper or the like. On the insulating substrate 2, circuit components such as the semiconductor pellet 3 and the external lead-out terminal 4 are fixed by soldering. When these circuit components are fixed by soldering, a positioning jig (not shown) is used.
[0003]
Next, as shown in FIG. 7, an adhesive 5 is applied to the outer peripheral portion of the heat radiating plate 1.
Next, as shown in FIG. 8, an insulating case 6 having both end openings is prepared, and the lower end surface of the insulating case 6 is brought into contact with and adhered to the outer peripheral portion of the heat radiating plate 1 coated with the adhesive 5.
Next, after filling the insulating case 6 with the resin 7 and curing, the cover 8 is put on one opening end of the insulating case 6 to complete the target composite semiconductor device 9.
[0004]
[Problems to be solved by the invention]
Since the conventional composite semiconductor device is generally configured as described above, there are the following problems to be solved. Since the adhesive 5 is applied to the upper surface of the outer peripheral portion of the heat radiating plate 1 and the insulating case 6 is adhered, a locking portion for the external lead-out terminal 4 is provided on the insulation case 6 and a positioning jig for the external lead-out terminal 4 is provided. It cannot be used for soldering. That is, since the adhesive 5 generally cannot withstand the soldering temperature, the soldering process of each circuit component to the heat sink 1 and the bonding process of the insulating case 6 to the heat sink 1 need to be performed as separate processes. was there. For this reason, the number of work steps cannot be reduced, and the manufacturing cost of the composite semiconductor device cannot be sufficiently reduced.
[0005]
OBJECT OF THE INVENTION
The present invention has been made to solve the above-described problems, and when soldering the external lead-out terminal, the insulating case can also be used as a positioning jig for the external lead-out terminal. An object of the present invention is to provide a method of manufacturing a composite semiconductor device that can contribute to a reduction in manufacturing cost.
[0006]
[Means for Solving the Problems]
According to the invention described in claim 1, the step of solder fixing the insulating substrate on which the conductor layer is formed on the heat sink;
A step of solder-fixing a semiconductor pellet on the conductor layer;
Soldering an external lead-out terminal on the conductor layer;
In a method for manufacturing a composite semiconductor device, including a step of fixing a lower end portion of an insulating case having both ends opened and an outer peripheral portion of the heat sink with an adhesive,
The external lead terminal is temporarily fixed to the insulating case by a locking portion formed on the external lead terminal, and then
Placing the insulating case on the heat sink;
Soldering the conductor layer and the lower end of the external lead-out terminal, then,
The insulating case and the heat radiating plate are fixed by filling the adhesive reservoir groove with an adhesive defined by the inner peripheral surface of the lower end portion of the insulating case and the side surface of the outer peripheral portion of the heat radiating plate. A method of manufacturing a composite semiconductor device is provided.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to FIGS.
FIG. 1 is a plan view of the insulating case, and FIG. 2 is a front view thereof.
One feature of the composite semiconductor device of the present invention is that a locking portion for temporarily fixing the external lead-out terminal 4 is provided on the insulating case 16 itself. This locking portion is realized in the external lead-out terminal insertion hole 17 in this embodiment.
[0008]
That is, as shown in FIG. 3, a part of the external lead-out terminal insertion hole 17 is a wide square hole 17a having a relatively wide opening, and is formed at a communication portion with the small-diameter square hole 17b. part 18 an engagement portion 4a of the externally drawn terminals 4 that engaged in are also available is temporarily fixed external leadout terminals 4. As an actual locking procedure, the external lead-out terminal 4 is inserted from the lower square hole 17b side in FIG. 3, and further inserted against the spring force that tends to spread outward at the position of the locking portion 4a. By doing so, the locking portion 4a expands in the wide square hole 17a when it passes through the square hole 17b, and is regulated by the step portion 18 and the inner wall of the square hole 17a to be temporarily fixed.
[0009]
The lower end of the external lead-out terminal 4 must be positioned at a predetermined position on the insulating substrate 2. As shown in FIG. 2, positioning pins 19 projecting downward from the upper portion of the insulating case 16 are provided as positioning means. Is provided. The positioning pin 19 is configured to be positioned by inserting the tip 19a into a small hole provided on the surface of the heat radiating plate (not shown in FIG. 2).
[0010]
Next, the second feature of the present invention is that an inclined groove 20 is provided along the outer periphery of one opening of the insulating case 16 as shown in FIG. By providing the inclined groove portion 20, the heat radiation plate 1 and the insulating case 16 can be fixed by applying an adhesive to the inclined groove portion 20, as will be clarified in the following description of the manufacturing method.
[0011]
A method for manufacturing the following to the above configured composite semiconductor device as. In FIG. 4, when the external lead-out terminal 4 is soldered to a predetermined position of the heat sink 1, the external lead-out terminal 4 is inserted into the external lead-out terminal insertion hole 17 of the insulating case 16 and temporarily fixed by the locking portion 4a.
[0012]
Next, the entire insulating case 16 with the external lead terminal 4 temporarily fixed is placed on the heat sink 1. At this time, the positioning is performed by inserting the tip 19a of the positioning pin 19 (see FIG. 2) provided on the insulating case 16 into the small hole (not shown) of the heat radiating plate 1 as described above. By heating in the above state, the solder previously applied to the lower end of the external lead-out terminal 4 is melted and fixed with solder.
[0013]
Next, as shown in FIG. 5, the entire insulating case 16 is inverted, and the adhesive 5 is filled and cured in the inclined groove portion 20 of the insulating case 16 by the adhesive application nozzle 21 or the like. Subsequent processes complete the target composite semiconductor device through conventional processes.
[0014]
【The invention's effect】
As described above, since the adhesive for fixing the insulating case and the heat radiating plate can be applied from the back side of the heat radiating plate as described above, the adhesive can be bonded even after the insulating case and the heat radiating plate are fitted. Work becomes possible. Therefore, be allowed to heat the insulating case to solder melt temperature, can you to alternate the insulating case itself as a temporary fixing to the positioning jig external leadout terminals. As a result of the above, the insulating case can be fixed to the heat sink by the adhesive application process by an automatic machine without the manual application of the adhesive and the insulating case. The manufacturing cost of this type of composite semiconductor device can be reduced.
[Brief description of the drawings]
FIG. 1 is a plan view of an insulating case used in a composite semiconductor device of the present invention.
FIG. 2 is a front view of the insulating case.
FIG. 3 is an enlarged cross-sectional view of an external lead-out terminal insertion hole provided in the insulating case.
FIG. 4 is a cross-sectional view in which a part of a state in which an external lead terminal is temporarily fixed using the insulating case is cut out.
FIG. 5 is a cross-sectional view for explaining an adhesive application step in the present invention.
FIG. 6 is an explanatory diagram showing a manufacturing process of a conventional composite semiconductor device, in a state where circuit components are fixed to a heat sink.
FIG. 7 is an explanatory view showing a state in which an adhesive is applied to the outer peripheral portion of the heat radiating plate in order to adhere the insulating case to the heat radiating plate, similarly showing a conventional manufacturing process.
FIG. 8 is a cross-sectional view of a composite semiconductor device that shows a conventional manufacturing process and is completed through a predetermined processing process by bonding an insulating case to a heat sink.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Heat sink 2 Insulating substrate 3 Semiconductor pellet 4 External lead-out terminal 4a Locking part 5 Adhesive 8 Cover body 16 Insulating case 17 External lead-out terminal insertion hole 17a Square hole 17b Square hole 18 Step part 19 Positioning pin 20 Inclined groove part 21 Adhesive Application nozzle

Claims (1)

導体層が形成された絶縁基板を放熱板上に半田固着する工程と、A step of solder fixing the insulating substrate on which the conductor layer is formed on the heat sink;
前記導体層上に半導体ペレットを半田固着する工程と、A step of solder-fixing a semiconductor pellet on the conductor layer;
前記導体層上に外部導出端子を半田固着する工程と、Soldering an external lead-out terminal on the conductor layer;
両端が開口した絶縁ケースの下端部と前記放熱板の外周部とを接着剤によって固着する工程とを含む複合半導体装置の製造方法において、In the method of manufacturing a composite semiconductor device, including a step of fixing the lower end portion of the insulating case having both ends opened and the outer peripheral portion of the heat sink with an adhesive,
前記外部導出端子に形成された係止部によって前記外部導出端子を前記絶縁ケースに対して仮止めし、次いで、The external lead terminal is temporarily fixed to the insulating case by a locking portion formed on the external lead terminal, and then
前記絶縁ケースを前記放熱板上に載置し、次いで、Placing the insulating case on the heat sink;
前記導体層と前記外部導出端子の下端とを半田固着し、次いで、Soldering the conductor layer and the lower end of the external lead-out terminal, then,
前記絶縁ケースの下端部の内周面と前記放熱板の外周部の側面とによって画定される接着剤溜り用溝内に接着剤を充填することにより、前記絶縁ケースと前記放熱板とを固着することを特徴とする複合半導体装置の製造方法。The insulating case and the heat radiating plate are fixed by filling the adhesive reservoir groove with an adhesive defined by the inner peripheral surface of the lower end portion of the insulating case and the side surface of the outer peripheral portion of the heat radiating plate. A method of manufacturing a composite semiconductor device.
JP23134396A 1996-08-13 1996-08-13 Method for manufacturing composite semiconductor device Expired - Fee Related JP3835710B2 (en)

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JP3835710B2 true JP3835710B2 (en) 2006-10-18

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DE102007034847B4 (en) * 2007-07-26 2019-06-13 Semikron Elektronik Gmbh & Co. Kg Power semiconductor module with a plastic housing with connecting devices
JP5211942B2 (en) * 2008-08-29 2013-06-12 Tdk株式会社 Electronic component module and method of manufacturing electronic component module
WO2012066833A1 (en) * 2010-11-16 2012-05-24 富士電機株式会社 Semiconductor device
CN103733333B (en) * 2011-09-28 2017-04-12 富士电机株式会社 Semiconductor device and method for producing semiconductor device
JP6060619B2 (en) * 2012-02-09 2017-01-18 富士電機株式会社 Semiconductor device assembly jig and semiconductor device manufacturing method using the assembly jig

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