JP3751970B2 - Laser processing equipment - Google Patents

Description

  The present invention relates to a laser processing apparatus used for cutting an object to be processed such as a semiconductor material substrate, a piezoelectric material substrate, or a glass substrate.

  One of laser applications is cutting, and general cutting by laser is as follows. For example, a portion to be cut of a workpiece such as a semiconductor wafer or a glass substrate is irradiated with laser light having a wavelength that is absorbed by the workpiece, and the portion to be cut by the absorption of the laser light is directed from the front surface to the back surface of the workpiece. The workpiece is cut by advancing heating and melting. However, in this method, the periphery of the region to be cut out of the surface of the workpiece is also melted. Therefore, when the object to be processed is a semiconductor wafer, among the semiconductor elements formed on the surface of the semiconductor wafer, the semiconductor elements located in the vicinity of the region may be melted.

As a method for preventing melting of the surface of the workpiece, for example, there is a laser cutting method disclosed in Patent Document 1 or Patent Document 2. In the cutting methods of these publications, a part to be processed is heated by a laser beam, and the object to be processed is cooled to cause a thermal shock at the part to be processed to cut the object to be processed. Disconnect.
JP 2000-219528 A JP 2000-15467 A

  However, in the cutting methods disclosed in Patent Documents 1 and 2 described above, if the thermal shock generated in the workpiece is large, the surface of the workpiece is cracked off the line to be cut or is not irradiated with laser. Unnecessary cracks such as cracks up to places may occur. Therefore, these cutting methods cannot perform precision cutting. In particular, when the object to be processed is a semiconductor wafer, a glass substrate on which a liquid crystal display device is formed, or a glass substrate on which an electrode pattern is formed, this unnecessary crack may damage the semiconductor chip, the liquid crystal display device, or the electrode pattern. is there. Moreover, since these cutting methods have a large average input energy, the thermal damage given to the semiconductor chip or the like is also large.

  An object of the present invention is to provide a laser processing apparatus capable of carrying out a laser processing method in which unnecessary cracks are not generated on the surface of a workpiece and the surface does not melt.

A laser processing apparatus according to the present invention is a laser processing apparatus for forming a modified region that is a starting point of cutting inside a workpiece, and a laser beam is emitted from the mounting table on which the workpiece is placed. The laser light emitted from the laser light source and the laser beam emitted from the laser light source are condensed inside the processing object placed on the mounting table, and the modified region is formed at the position of the laser light collecting point. And a control unit that controls the movement of the mounting table, and the control unit is configured to determine the thickness of the object to be processed on the basis of a predetermined position so that the condensing point of the laser beam is located inside the object to be processed. In the state where the mounting table is moved in the vertical direction by the first movement amount and the mounting table is fixed in the thickness direction of the workpiece, the condensing point of the laser beam is along the planned cutting line of the workpiece. Move the mounting table in a direction perpendicular to the thickness direction of the workpiece so that it moves. Thereafter, the mounting table is moved by the second movement amount in the thickness direction of the processing object with reference to a predetermined position so that the condensing point of the laser beam is located inside the processing object, and the thickness of the processing object The mounting table is moved in a direction perpendicular to the thickness direction of the workpiece so that the focusing point of the laser beam moves along the planned cutting line with the mounting table fixed in the vertical direction. It is characterized by.

  According to the laser processing apparatus according to the present invention, the modified region can be formed inside the processing target by irradiating the processing target with the laser beam while aligning the focusing point inside the processing target. If there is any starting point at the location where the workpiece is to be cut, the workpiece can be cut with a relatively small force. According to the laser processing apparatus according to the present invention, the workpiece can be cut by breaking the workpiece along the scheduled cutting line starting from the modified region. Therefore, since the workpiece can be cut with a relatively small force, it is possible to cut the workpiece without generating unnecessary cracks off the planned cutting line on the surface of the workpiece. In addition, a condensing point is a location which the laser beam condensed. The line to be cut may be a line actually drawn on the surface or inside of the workpiece, or may be a virtual line.

  Moreover, according to the laser processing apparatus which concerns on this invention, the modification | reformation area | region is formed in the inside of a workpiece. Therefore, since the laser beam is hardly absorbed on the surface of the processing object, the surface of the processing object does not melt.

  Further, according to the laser processing apparatus of the present invention, the modified region is changed in the incident direction by changing the position of the condensing point of the laser light in the incident direction of the laser light irradiated to the processed object. A plurality can be formed so as to line up along the line. For this reason, the location used as a starting point when cutting a workpiece can be increased.

  In the laser processing apparatus according to the present invention, the control unit preferably determines the first movement amount and the second movement amount based on at least the thickness and refractive index of the workpiece. Furthermore, in the laser processing apparatus according to the present invention, the predetermined position is preferably the position of the mounting table when the focal point of the predetermined visible light is positioned on the surface of the processing object mounted on the mounting table. . As a result, a plurality of modified regions can be reliably formed inside the object to be processed so as to be aligned along the incident direction of the laser beam.

  According to the laser processing apparatus according to the present invention, it is possible to cut the processing object without causing melting or cracking that is out of the planned cutting line on the surface of the processing object. Therefore, the yield and productivity of a product (for example, a display device such as a semiconductor chip, a piezoelectric device chip, and a liquid crystal) manufactured by cutting the workpiece can be improved.

  Moreover, according to the laser processing apparatus which concerns on this invention, the location used as the starting point at the time of cut | disconnecting a workpiece can be increased by forming a some modification | reformation area | region. Therefore, even when the thickness of the workpiece is relatively large, the workpiece can be cut.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In the laser processing method according to the present embodiment, the modified region is formed by multiphoton absorption. Multiphoton absorption is a phenomenon that occurs when the intensity of laser light is very high. First, multiphoton absorption will be briefly described.

Photon energy hν is smaller than the band gap E _G of absorption of the material becomes transparent. Therefore, a condition under which absorption occurs in the material is hv> E _G. However, even when optically transparent, increasing the intensity of the laser beam very Nhnyu> of _{E G} condition (n = 2, 3, 4, a, ...) absorbed in the material occurs. This phenomenon is called multiphoton absorption. In the case of a pulse wave, the intensity of the laser beam is determined by the peak power density (W / cm ² ) at the condensing point of the laser beam. For example, the multiphoton is obtained under conditions where the peak power density is 1 × 10 ⁸ (W / cm ² ) or more. Absorption occurs. The peak power density is determined by (energy per pulse of laser light at the condensing point) / (laser beam cross-sectional area of laser light × pulse width). In the case of a continuous wave, the intensity of the laser beam is determined by the electric field intensity (W / cm ² ) at the condensing point of the laser beam.

  The principle of laser processing according to this embodiment using such multiphoton absorption will be described with reference to FIGS. FIG. 1 is a plan view of a workpiece 1 during laser processing, FIG. 2 is a cross-sectional view taken along line II-II of the workpiece 1 shown in FIG. 1, and FIG. 3 is a workpiece after laser processing. 4 is a plan view of the workpiece 1, FIG. 4 is a cross-sectional view taken along line IV-IV of the workpiece 1 shown in FIG. 3, and FIG. 5 is taken along line VV of the workpiece 1 shown in FIG. FIG. 6 is a plan view of the cut workpiece 1.

  As shown in FIGS. 1 and 2, the surface 3 of the workpiece 1 has a planned cutting line 5. The planned cutting line 5 is a virtual line extending linearly. In the laser processing according to the present embodiment, the modified region 7 is formed by irradiating the processing object 1 with the laser beam L by aligning the condensing point P inside the processing object 1 under the condition that multiphoton absorption occurs. In addition, a condensing point is a location where the laser beam L is condensed.

  The condensing point P is moved along the planned cutting line 5 by relatively moving the laser light L along the planned cutting line 5 (that is, along the direction of the arrow A). Thereby, as shown in FIGS. 3 to 5, the modified region 7 is formed only inside the workpiece 1 along the planned cutting line 5. The laser processing method according to the present embodiment does not form the modified region 7 by causing the workpiece 1 to generate heat by causing the workpiece 1 to absorb the laser light L. The modified region 7 is formed by transmitting the laser beam L to the workpiece 1 and generating multiphoton absorption inside the workpiece 1. Therefore, since the laser beam L is hardly absorbed by the surface 3 of the workpiece 1, the surface 3 of the workpiece 1 is not melted.

  In the cutting of the workpiece 1, if there is a starting point at the location to be cut, the workpiece 1 is broken from the starting point, so that the workpiece 1 can be cut with a relatively small force as shown in FIG. 6. Therefore, the processing object 1 can be cut without causing unnecessary cracks on the surface 3 of the processing object 1.

  In addition, the following two kinds of cutting | disconnection of the processing target object from the modification | reformation area | region can be considered. One is a case where, after the modified region is formed, an artificial force is applied to the workpiece, so that the workpiece is cracked and the workpiece is cut from the modified region as a starting point. This is, for example, cutting when the thickness of the workpiece is large. When artificial force is applied, for example, bending stress or shear stress is applied to the workpiece along the planned cutting line of the workpiece, or thermal stress is generated by giving a temperature difference to the workpiece. It is to let you. The other is that when the modified region is formed, the modified region starts as a starting point, and naturally breaks in the cross-sectional direction (thickness direction) of the workpiece, resulting in the workpiece being cut. It is. For example, when the thickness of the workpiece is small, even one modified region is possible, and when the workpiece is large, a plurality of modified regions can be formed in the thickness direction. . In addition, even when this breaks naturally, on the surface of the portion to be cut, the crack does not run to the part where the modified region is not formed, and only the part where the modified part is formed can be cleaved, The cleaving can be controlled well. In recent years, since the thickness of a semiconductor wafer such as a silicon wafer tends to be thin, such a cleaving method with good controllability is very effective.

  As modified regions formed by multiphoton absorption in this embodiment, there are the following (1) to (3).

(1) In the case where the modified region is a crack region including one or a plurality of cracks The laser light is focused on the inside of the object to be processed (for example, a piezoelectric material made of glass or LiTaO ₃ ), Irradiation is performed under conditions where the electric field strength is 1 × 10 ⁸ (W / cm ² ) or more and the pulse width is 1 μs or less. The magnitude of the pulse width is a condition that a crack region can be formed only inside the workpiece without causing extra damage to the workpiece surface while causing multiphoton absorption. As a result, a phenomenon of optical damage due to multiphoton absorption occurs inside the workpiece. This optical damage induces thermal strain inside the workpiece, thereby forming a crack region inside the workpiece. The upper limit value of the electric field strength is, for example, 1 × 10 ¹² (W / cm ² ). The pulse width is preferably 1 ns to 200 ns, for example. The formation of the crack region by multiphoton absorption is described in, for example, “Inside of glass substrate by solid-state laser harmonics” on pages 23-28 of the 45th Laser Thermal Processing Research Papers (December 1998). It is described in “Marking”.

  The inventor obtained the relationship between the electric field strength and the size of the cracks by experiment. The experimental conditions are as follows.

(A) Workpiece: Pyrex (registered trademark) glass (thickness 700 μm)
(B) Laser
Light source: Semiconductor laser pumped Nd: YAG laser
Wavelength: 1064nm
Laser light spot cross-sectional area: 3.14 × 10 ⁻⁸ cm ²
Oscillation form: Q switch pulse
Repeat frequency: 100 kHz
Pulse width: 30ns
Output: Output <1mJ / pulse
Laser light quality: TEM ₀₀
Polarization characteristics: Linearly polarized light (C) Condensing lens
Transmittance with respect to laser beam wavelength: 60% (D) Moving speed of mounting table on which workpiece is mounted: 100 mm / second

Note that the laser light quality TEM ₀₀ means that the light condensing performance is high and the light can be condensed up to the wavelength of the laser light.

FIG. 7 is a graph showing the results of the experiment. The horizontal axis represents the peak power density. Since the laser beam is a pulsed laser beam, the electric field strength is represented by the peak power density. The vertical axis represents the size of a crack portion (crack spot) formed inside the workpiece by one pulse of laser light. Crack spots gather to form a crack region. The size of the crack spot is the size of the portion having the maximum length in the shape of the crack spot. Data indicated by black circles in the graph is for the case where the magnification of the condenser lens (C) is 100 times and the numerical aperture (NA) is 0.80. On the other hand, the data indicated by the white circles in the graph is when the magnification of the condenser lens (C) is 50 times and the numerical aperture (NA) is 0.55. From the peak power density of about 10 ¹¹ (W / cm ² ), it can be seen that a crack spot is generated inside the workpiece, and the crack spot increases as the peak power density increases.

  Next, in the laser processing according to the present embodiment, a mechanism for cutting a workpiece by forming a crack region will be described with reference to FIGS. As shown in FIG. 8, the laser beam L is irradiated to the workpiece 1 by aligning the condensing point P inside the workpiece 1 under the condition that multiphoton absorption occurs, and a crack region is formed along the planned cutting line. 9 is formed. The crack region 9 is a region including one or a plurality of cracks. As shown in FIG. 9, the crack further grows starting from the crack region 9, and the crack reaches the front surface 3 and the back surface 21 of the workpiece 1 as shown in FIG. 10, and the workpiece 1 as shown in FIG. 11. The workpiece 1 is cut by cracking. Cracks that reach the front and back surfaces of the workpiece may grow naturally or may grow when a force is applied to the workpiece.

(2) When the modified region is a melt-processed region A laser beam is focused on the inside of an object to be processed (for example, a semiconductor material such as silicon), and the electric field intensity at the focused point is 1 × 10 ⁸ (W / Cm ² ) or more and the pulse width is 1 μs or less. As a result, the inside of the workpiece is locally heated by multiphoton absorption. By this heating, a melt processing region is formed inside the workpiece. The melting treatment region means at least one of a region once solidified after melting, a region in a molten state, and a region in a state of being resolidified from melting. Further, it can be said that the melt-processed region is a phase-changed region or a region where the crystal structure is changed. The melt treatment region can also be said to be a region in which one structure is changed to another structure in a single crystal structure, an amorphous structure, or a polycrystalline structure. In other words, for example, a region changed from a single crystal structure to an amorphous structure, a region changed from a single crystal structure to a polycrystalline structure, or a region changed from a single crystal structure to a structure including an amorphous structure and a polycrystalline structure. To do. When the object to be processed has a silicon single crystal structure, the melt processing region has, for example, an amorphous silicon structure. In addition, as an upper limit of an electric field strength, it is 1 * 10 < ¹² > (W / cm < ² >), for example. The pulse width is preferably 1 ns to 200 ns, for example.

  The inventor has confirmed through experiments that a melt-processed region is formed inside a silicon wafer. The experimental conditions are as follows.

(A) Workpiece: silicon wafer (thickness 350 μm, outer diameter 4 inches)
(B) Laser
Light source: Semiconductor laser pumped Nd: YAG laser
Wavelength: 1064nm
Laser light spot cross-sectional area: 3.14 × 10 ⁻⁸ cm ²
Oscillation form: Q switch pulse
Repeat frequency: 100 kHz
Pulse width: 30ns
Output: 20μJ / pulse
Laser light quality: TEM ₀₀
Polarization characteristics: Linearly polarized light (C) Condensing lens
Magnification: 50 times
NA: 0.55
Transmittance with respect to laser beam wavelength: 60% (D) Moving speed of mounting table on which workpiece is mounted: 100 mm / second

  FIG. 12 is a view showing a photograph of a cross section of a part of a silicon wafer cut by laser processing under the above conditions. A melt processing region 13 is formed inside the silicon wafer 11. In addition, the size in the thickness direction of the melt processing region formed under the above conditions is about 100 μm.

  The fact that the melt processing region 13 is formed by multiphoton absorption will be described. FIG. 13 is a graph showing the relationship between the wavelength of the laser beam and the transmittance inside the silicon substrate. However, the reflection components on the front side and the back side of the silicon substrate are removed to show the transmittance only inside. The above relationship was shown for each of the silicon substrate thicknesses t of 50 μm, 100 μm, 200 μm, 500 μm, and 1000 μm.

  For example, when the thickness of the silicon substrate is 500 μm or less at the wavelength of 1064 nm of the Nd: YAG laser, it can be seen that the laser light is transmitted by 80% or more inside the silicon substrate. Since the thickness of the silicon wafer 11 shown in FIG. 12 is 350 μm, the melt processing region by multiphoton absorption is formed near the center of the silicon wafer, that is, at a portion of 175 μm from the surface. In this case, the transmittance is 90% or more with reference to a silicon wafer having a thickness of 200 μm. Therefore, the laser beam is hardly absorbed inside the silicon wafer 11 and almost all is transmitted. This is not because the laser beam is absorbed inside the silicon wafer 11 and the melt processing region is formed inside the silicon wafer 11 (that is, the melt processing region is formed by normal heating with laser light). It means that the processing region is formed by multiphoton absorption. The formation of the melt processing region by multiphoton absorption is described in, for example, “Evaluation of processing characteristics of silicon by picosecond pulse laser” on pages 72 to 73 of the 66th Annual Meeting of the Japan Welding Society (April 2000). Are listed.

  In addition, a silicon wafer is cut | disconnected as a result by generating a crack toward a cross-sectional direction starting from the melt processing region and reaching the front and back surfaces of the silicon wafer. The cracks that reach the front and back surfaces of the silicon wafer may grow naturally or may grow by applying force to the workpiece. In addition, the crack grows naturally from the melt processing area to the front and back surfaces of the silicon wafer when the crack grows from the area once solidified after being melted, or when the crack grows from the melted area. And at least one of the cases where cracks grow from a region in a state of being resolidified from melting. In either case, the cut surface after cutting is formed with a melt treatment region only inside as shown in FIG. In the case where the melt processing region is formed inside the object to be processed, since the unnecessary cracks that are off the planned cutting line are not easily generated at the time of cleaving, cleaving control is facilitated.

(3) When the modified region is a refractive index changing region The laser beam is focused on the inside of the object to be processed (eg, glass), and the electric field strength at the focused point is 1 × 10 ⁸ (W / cm ² ). Irradiation is performed under the above conditions with a pulse width of 1 ns or less. When the pulse width is made extremely short and multiphoton absorption occurs inside the workpiece, the energy due to the multiphoton absorption is not converted into thermal energy, and the ion valence change and crystallization occur inside the workpiece. Alternatively, a permanent structural change such as polarization orientation is induced to form a refractive index change region. The upper limit value of the electric field strength is, for example, 1 × 10 ¹² (W / cm ² ). For example, the pulse width is preferably 1 ns or less, and more preferably 1 ps or less. The formation of the refractive index changing region by multiphoton absorption is described in, for example, “The Femtosecond Laser Irradiation to the Inside of Glass” on pages 105 to 111 of the 42nd Laser Thermal Processing Research Institute Proceedings (November 1997). Photo-induced structure formation ”.

  As described above, according to the present embodiment, the modified region is formed by multiphoton absorption. In this embodiment, a plurality of modified regions are arranged along the incident direction by changing the position of the condensing point of the laser light in the incident direction of the laser light irradiated to the processed object. Forming.

  The formation of a plurality of modified regions will be described using a crack region as an example. FIG. 14 is a perspective view of the workpiece 1 in which two crack regions 9 are formed inside the workpiece 1 using the laser machining method according to the present embodiment.

  A method for forming the two crack regions 9 will be briefly described. First, the focused point of the pulse laser beam L is aligned with the vicinity of the back surface 21 inside the workpiece 1, and the workpiece 1 is irradiated with the pulsed laser beam L while moving the focused point along the planned cutting line 5. . Thereby, the crack region 9 (9A) is formed in the vicinity of the back surface 21 inside the workpiece 1 along the planned cutting line 5. Next, the focused point of the pulse laser beam L is aligned with the vicinity of the surface 3 inside the workpiece 1, and the workpiece 1 is irradiated with the pulsed laser beam L while moving the focused point along the planned cutting line 5. To do. By this irradiation, a crack region 9 (9B) is formed in the vicinity of the surface 3 inside the workpiece 1 along the planned cutting line 5.

  And as shown in FIG. 15, the crack 91 grows naturally from the crack area | region 9A, 9B. Specifically, the crack 91 naturally grows from the crack region 9A to the back surface 21 direction, from the crack region 9A (9B) to the crack region 9B (9A) direction, and from the crack region 9B to the front surface 3 direction. Thereby, the crack 9 extended long in the thickness direction of the workpiece 1 can be formed on the surface of the workpiece 1 along the planned cutting line 5, that is, the surface to be cut. Therefore, it is possible to naturally cut the workpiece 1 along the planned cutting line 5 with or without applying a relatively small force artificially.

  As described above, according to the present embodiment, a plurality of crack regions 9 are formed to increase the number of locations that serve as starting points when cutting the workpiece 1. Therefore, according to the present embodiment, the workpiece 1 is cut even when the thickness of the workpiece 1 is relatively large, or when the material of the workpiece 1 is difficult to grow the crack 91 after the crack region 9 is formed. Is possible.

  If it is difficult to cut with only two crack regions 9, three or more crack regions 9 are formed. For example, as shown in FIG. 16, a crack region 9C is formed between the crack region 9A and the crack region 9B. Moreover, if it is the incident direction of a laser beam, it can cut | disconnect also in the direction orthogonal to the thickness direction of the workpiece 1 as shown in FIG.

  In this embodiment, it is preferable to form the plurality of crack regions 9 in order from the far side with respect to the incident surface (for example, the surface 3) of the workpiece on which the pulse laser beam L is incident. For example, in FIG. 14, the crack region 9A is formed first, and then the crack region 9B is formed. When the crack region 9 is formed in order from the side closer to the incident surface, the pulse laser beam L irradiated when the crack region 9 to be formed later is formed is scattered by the crack region 9 formed first. As a result, the size of the crack portion (crack spot) formed by one shot of the pulsed laser light L constituting the crack region 9 to be formed later varies. Therefore, the crack region 9 to be formed later cannot be formed uniformly. On the other hand, when the crack region 9 is formed in order from the far side with respect to the incident surface, the above-mentioned scattering does not occur, so that the crack region 9 to be formed later can be formed uniformly.

  However, in the present embodiment, the order of forming the plurality of crack regions 9 is not limited to the above, and may be formed in order from the side closer to the incident surface of the workpiece, or may be formed randomly. . Random formation means, for example, in FIG. 16, first, the crack region 9C is formed, then the crack region 9B is formed, and finally the crack region 9A is formed with the incident direction of the laser light reversed.

  The formation of the plurality of modified regions has been described in the case of the crack region, but the same can be said for the melt-treated region and the refractive index change region. Further, the pulse laser beam has been described, but the same can be said for the continuous wave laser beam.

  Next, an example of a laser processing apparatus used in the laser processing method according to this embodiment will be described. FIG. 18 is a schematic configuration diagram of the laser processing apparatus 100. The laser processing apparatus 100 includes a laser light source 101 that generates laser light L, a laser light source control unit 102 that controls the laser light source 101 to adjust the output and pulse width of the laser light L, and the reflection function of the laser light L. And a dichroic mirror 103 arranged to change the direction of the optical axis of the laser light L by 90 °, a condensing lens 105 for condensing the laser light L reflected by the dichroic mirror 103, and a condensing lens A mounting table 107 on which the workpiece 1 to be irradiated with the laser beam L condensed by the lens 105 is mounted; an X-axis stage 109 for moving the mounting table 107 in the X-axis direction; A Y-axis stage 111 for moving in the Y-axis direction orthogonal to the X-axis direction, and a Z-axis stage 1 for moving the mounting table 107 in the Z-axis direction orthogonal to the X-axis and Y-axis directions Comprising a 3, and a stage controller 115 for controlling the movement of these three stages 109, 111 and 113, a.

The laser light source 101 is an Nd: YAG laser that generates pulsed laser light. Other lasers that can be used for the laser light source 101 include an Nd: YVO ₄ laser, an Nd: YLF laser, and a titanium sapphire laser. In the case of forming a crack region or a melt treatment region, it is preferable to use an Nd: YAG laser, an Nd: YVO ₄ laser, or an Nd: YLF laser. When forming the refractive index changing region, it is preferable to use a titanium sapphire laser.

  The converging point P is moved in the X (Y) axis direction by moving the workpiece 1 in the X (Y) axis direction by the X (Y) axis stage 109 (111). Since the Z-axis direction is a direction perpendicular to the surface 3 of the workpiece 1, the Z-axis direction is the direction of the focal depth of the laser light L incident on the workpiece 1. Therefore, by moving the Z-axis stage 113 in the Z-axis direction, the condensing point P of the laser light L can be adjusted inside the workpiece 1. That is, the position of the condensing point P in the thickness direction of the workpiece 1 is adjusted by the Z-axis stage 113. Thereby, for example, the condensing point P is adjusted to a position closer to or farther from the incident surface (surface 3) than the half position of the thickness in the thickness direction of the workpiece 1 or to a position approximately half the thickness. Can be. In addition, by moving the condensing lens 105 in the Z-axis direction, these adjustments and the condensing point of the laser beam can be adjusted to the inside of the object to be processed.

  Here, adjustment of the position of the condensing point P in the thickness direction of the workpiece by the Z-axis stage will be described with reference to FIGS. 19 and 20. In this embodiment, the position of the condensing point of the laser beam in the thickness direction of the workpiece is adjusted to a desired position inside the workpiece with reference to the surface (incident surface) of the workpiece. FIG. 19 shows a state where the condensing point P of the laser beam L is located on the surface 3 of the workpiece 1. As shown in FIG. 20, when the Z-axis stage is moved z toward the condensing lens 105, the condensing point P moves from the surface 3 to the inside of the workpiece 1. The amount of movement of the condensing point P inside the workpiece 1 is Nz (N is the refractive index of the workpiece 1 with respect to the laser beam L). Therefore, by moving the Z-axis stage in consideration of the refractive index of the workpiece 1 with respect to the laser light L, the position of the condensing point P in the thickness direction of the workpiece 1 can be controlled. That is, a desired position in the thickness direction of the processing target 1 of the condensing point P is defined as a distance (Nz) from the surface 3 to the inside of the processing target 1. The workpiece 1 is moved in the thickness direction by the movement amount (z) obtained by dividing the distance (Nz) by the refractive index (N). Thereby, the condensing point P can be adjusted to the desired position.

  The laser processing apparatus 100 further includes an observation light source 117 that generates visible light to illuminate the workpiece 1 placed on the mounting table 107 with visible light, and the same light as the dichroic mirror 103 and the condensing lens 105. A visible light beam splitter 119 disposed on the axis. A dichroic mirror 103 is disposed between the beam splitter 119 and the condensing lens 105. The beam splitter 119 has a function of reflecting about half of visible light and transmitting the other half, and is arranged so as to change the direction of the optical axis of visible light by 90 °. About half of the visible light generated from the observation light source 117 is reflected by the beam splitter 119, and the reflected visible light passes through the dichroic mirror 103 and the condensing lens 105, and the line 5 to be cut of the workpiece 1 or the like. Illuminate the surface 3 containing

  The laser processing apparatus 100 further includes an imaging element 121 and an imaging lens 123 disposed on the same optical axis as the beam splitter 119, the dichroic mirror 103, and the condensing lens 105. As the image sensor 121, for example, there is a CCD (charge-coupled device) camera. The reflected light of the visible light that illuminates the surface 3 including the planned cutting line 5 passes through the condensing lens 105, the dichroic mirror 103, and the beam splitter 119, is imaged by the imaging lens 123, and is imaged by the imaging device 121. And becomes imaging data.

  The laser processing apparatus 100 further includes an imaging data processing unit 125 to which imaging data output from the imaging element 121 is input, an overall control unit 127 that controls the entire laser processing apparatus 100, and a monitor 129. The imaging data processing unit 125 calculates focus data for focusing the visible light generated by the observation light source 117 on the surface 3 based on the imaging data. The stage control unit 115 controls the movement of the Z-axis stage 113 based on the focus data so that the visible light is focused on the surface 3. Therefore, the imaging data processing unit 125 functions as an autofocus unit. The laser processing apparatus 1 is adjusted so that the focal point P of the laser light L is also located on the surface 3 at the position of the Z-axis stage 113 where the focus of visible light is located on the surface 3. The imaging data processing unit 125 calculates image data such as an enlarged image of the surface 3 based on the imaging data. This image data is sent to the overall control unit 127, where various processes are performed by the overall control unit, and sent to the monitor 129. Thereby, an enlarged image or the like is displayed on the monitor 129.

  Data from the stage controller 115, image data from the imaging data processor 125, and the like are input to the overall controller 127. Based on these data, the laser light source controller 102, the observation light source 117, and the stage controller By controlling 115, the entire laser processing apparatus 100 is controlled. Therefore, the overall control unit 127 functions as a computer unit. The overall control unit 127 receives and stores the data of the movement amount (z) described with reference to FIGS. 19 and 20.

  Next, the laser processing method according to the present embodiment will be described with reference to FIGS. FIG. 21 is a flowchart for explaining this laser processing method. The workpiece 1 is a silicon wafer.

  First, the light absorption characteristics of the workpiece 1 are measured with a spectrophotometer or the like (not shown). Based on the measurement result, the laser light source 101 that generates the laser light L having a wavelength transparent to the workpiece 1 or a wavelength with little absorption is selected (S101). Next, the thickness of the workpiece 1 is measured. Based on the measurement result of the thickness and the refractive index of the workpiece 1, the amount of movement (z) in the Z-axis direction of the workpiece 1 is determined (S 103). This is because the focusing point P of the laser beam L positioned on the surface 3 of the workpiece 1 in order to position the focusing point P of the laser beam L inside the workpiece 1, This is the amount of movement in the Z-axis direction. That is, the position of the condensing point P in the thickness direction of the workpiece 1 is determined. The position of the condensing point P is determined in consideration of the thickness, material, etc. of the workpiece 1. In the present embodiment, the first movement amount data for positioning the focusing point P near the back surface inside the workpiece 1 and the second movement amount data for positioning the focusing point P near the front surface 3 are provided. used. The melting processing region to be formed first is formed using the first movement amount data. The melt processing region to be formed next is formed using the second movement amount data. These movement amount data are input to the overall control unit 127.

  The workpiece 1 is mounted on the mounting table 107 of the laser processing apparatus 100. Then, visible light is generated from the observation light source 117 to illuminate the workpiece 1 (S105). The imaging device 121 images the surface 3 of the workpiece 1 including the illuminated cutting line 5. This imaging data is sent to the imaging data processing unit 125. Based on this imaging data, the imaging data processing unit 125 calculates focus data such that the visible light focus of the observation light source 117 is located on the surface 3 (S107).

  This focus data is sent to the stage controller 115. The stage controller 115 moves the Z-axis stage 113 in the Z-axis direction based on the focus data (S109). Thereby, the focal point of the visible light of the observation light source 117 is located on the surface 3. At this position of the Z-axis stage 113, the condensing point P of the pulse laser beam L is located on the surface 3. The imaging data processing unit 125 calculates enlarged image data of the surface 3 of the workpiece 1 including the planned cutting line 5 based on the imaging data. This enlarged image data is sent to the monitor 129 via the overall control unit 127, whereby an enlarged image near the planned cutting line 5 is displayed on the monitor 129.

  Data of the first movement amount previously determined in step S <b> 103 is input to the overall control unit 127, and this movement amount data is sent to the stage control unit 115. The stage control unit 115 moves the workpiece 1 in the Z-axis direction by the Z-axis stage 113 to a position where the condensing point P of the laser light L is inside the workpiece 1 based on the movement amount data. (S111). This internal position is near the back surface of the workpiece 1.

  Next, the laser light L is generated from the laser light source 101, and the laser light L is irradiated onto the planned cutting line 5 on the surface 3 of the workpiece 1. Since the condensing point P of the laser beam L is located inside the workpiece 1, the melting region is formed only inside the workpiece 1. Then, the X-axis stage 109 and the Y-axis stage 111 are moved along the planned cutting line 5 to form a melt processing region inside the workpiece 1 along the planned cutting line 5 (S113). The melt processing region is formed in the vicinity of the back surface inside the workpiece 1.

  Next, in the same manner as in step S111, based on the second movement amount data, the processing target is processed by the Z-axis stage 113 at a position where the condensing point P of the laser light L is near the inner surface 3 of the processing target 1. The object 1 is moved in the Z-axis direction (S115). Then, in the same manner as in step S113, a melting processing region is formed inside the workpiece 1 (S117). In this step, a melt processing region is formed near the inner surface 3 of the workpiece 1.

  Finally, the workpiece 1 is cut by bending the workpiece 1 along the planned cutting line 5 (S119). Thereby, the workpiece 1 is divided into silicon chips.

  The effect of this embodiment will be described. According to the present embodiment, the pulsed laser light L is applied to the planned cutting line 5 under conditions that cause multiphoton absorption and the focusing point P is aligned inside the workpiece 1. Then, by moving the X-axis stage 109 and the Y-axis stage 111, the condensing point P is moved along the scheduled cutting line 5. As a result, a modified region (for example, a crack region, a melt processing region, a refractive index change region) is formed inside the workpiece 1 along the planned cutting line 5. If there is any starting point at the location where the workpiece is to be cut, the workpiece can be cut with a relatively small force. Therefore, the workpiece 1 can be cut with a relatively small force by dividing the workpiece 1 along the scheduled cutting line 5 starting from the modified region. Thereby, the processing target object 1 can be cut | disconnected without generating the unnecessary crack which remove | deviated from the cutting planned line 5 on the surface 3 of the processing target object 1. FIG.

  Further, according to the present embodiment, the cutting laser beam L is irradiated on the planned cutting line 5 under conditions that cause multi-photon absorption in the workpiece 1 and the focusing point P is set inside the workpiece 1. ing. Therefore, the pulse laser beam L passes through the workpiece 1 and the pulse laser beam L is hardly absorbed by the surface 3 of the workpiece 1, so that the surface 3 is damaged by melting due to the formation of the modified region. There is no.

  As described above, according to the present embodiment, the processing object 1 can be cut without causing unnecessary cracks and melting off the cutting line 5 on the surface 3 of the processing object 1. Therefore, when the workpiece 1 is, for example, a semiconductor wafer, the semiconductor chip can be cut out from the semiconductor wafer without causing unnecessary cracking or melting of the semiconductor chip off the line to be cut. The same applies to a workpiece on which an electrode pattern is formed on the surface, and a workpiece on which an electronic device is formed on the surface, such as a glass substrate on which a display device such as a piezoelectric element wafer or liquid crystal is formed. Therefore, according to the present embodiment, it is possible to improve the yield of products (for example, display devices such as semiconductor chips, piezoelectric device chips, and liquid crystals) manufactured by cutting the workpiece.

  Further, according to the present embodiment, since the planned cutting line 5 on the surface 3 of the workpiece 1 is not melted, the width of the planned cutting line 5 (this width is, for example, in the case of a semiconductor wafer, between regions to be semiconductor chips) (This is the interval.) Thereby, the number of products produced from one piece of processing object 1 increases, and productivity of a product can be improved.

  Further, according to the present embodiment, since laser light is used for cutting the workpiece 1, more complicated processing than dicing using a diamond cutter becomes possible. For example, even if the planned cutting line 5 has a complicated shape as shown in FIG. 23, the cutting process can be performed according to this embodiment.

  In addition, according to the present embodiment, a plurality of modified regions are formed so as to be aligned in the incident direction, thereby increasing the number of locations that are the starting points when cutting the workpiece 1. For example, when the dimension of the laser beam incident direction of the workpiece 1 is relatively large, or when the workpiece 1 is made of a material in which cracks hardly grow from the modified region, the modified region along the planned cutting line 5 is formed. It is difficult to cut the workpiece 1 with only one piece. Therefore, in such a case, the workpiece 1 can be easily cut by forming a plurality of modified regions as in this embodiment.

It is a top view of the processing target object during laser processing by the laser processing method concerning this embodiment. It is sectional drawing along the II-II line of the workpiece shown in FIG. It is a top view of the processing target after laser processing by the laser processing method concerning this embodiment. It is sectional drawing along the IV-IV line of the processing target shown in FIG. It is sectional drawing along the VV line of the workpiece shown in FIG. It is a top view of the processing object cut by the laser processing method concerning this embodiment. It is a graph which shows the relationship between the electric field strength and the magnitude | size of a crack in the laser processing method which concerns on this embodiment. It is sectional drawing of the process target object in the 1st process of the laser processing method which concerns on this embodiment. It is sectional drawing of the process target object in the 2nd process of the laser processing method which concerns on this embodiment. It is sectional drawing of the process target object in the 3rd process of the laser processing method which concerns on this embodiment. It is sectional drawing of the process target object in the 4th process of the laser processing method which concerns on this embodiment. It is a figure showing the photograph of the section in the part of silicon wafer cut by the laser processing method concerning this embodiment. It is a graph which shows the relationship between the wavelength of the laser beam and the transmittance | permeability inside a silicon substrate in the laser processing method which concerns on this embodiment. It is a perspective view of an example of the processing object in which the crack field was formed inside the processing object using the laser processing method concerning this embodiment. It is a perspective view of the processing target object in which the crack extended from the crack area | region shown in FIG. 14 was formed. It is a perspective view of the other example of the processing target object in which the crack area | region was formed inside the processing target object using the laser processing method which concerns on this embodiment. It is a perspective view of the further another example of the processing target object in which the crack area | region was formed inside the processing target object using the laser processing method which concerns on this embodiment. It is a schematic block diagram of an example of the laser processing apparatus which can be used for the laser processing method concerning this embodiment. It is a figure which shows the state which the condensing point of a laser beam is located in the surface of a workpiece. It is a figure which shows the state in which the condensing point of a laser beam is located inside the workpiece. It is a flowchart for demonstrating the laser processing method which concerns on this embodiment. It is a top view of the processed object for demonstrating the pattern which can be cut | disconnected by the laser processing method which concerns on this embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Work object, 3 ... Surface, 5 ... Planned cutting line, 7 ... Modified area | region, 100 ... Laser processing apparatus, 101 ... Laser light source, 105 ... Condensing lens, 107 ... Mounting stand, 115 ... Stage control part (Control part) 127 ... Overall control part (control part), L ... Laser beam, P ... Condensing point.

Claims (3)

A laser processing apparatus that forms a modified region that is a starting point of cutting inside a workpiece,
A mounting table on which the workpiece is mounted;
A laser light source for emitting laser light;
A condensing lens that condenses the laser light emitted from the laser light source inside the workpiece mounted on the mounting table and forms a modified region at the position of the condensing point of the laser light. When,
A control unit for controlling the movement of the mounting table,
The controller is
The workpiece is moved by the first movement amount in the thickness direction of the workpiece with a predetermined position as a reference so that a condensing point of the laser beam is located inside the workpiece, In a state in which the mounting table is fixed with respect to the thickness direction of the workpiece, the laser beam condensing point is perpendicular to the thickness direction of the workpiece so that the laser beam focusing point moves along the cutting line of the workpiece. After moving the mounting table in the direction to
The mounting table is moved by a second movement amount in the thickness direction of the object to be processed with reference to the predetermined position so that a condensing point of laser light is located inside the object to be processed, and the object to be processed In a state in which the mounting table is fixed with respect to the thickness direction of the object, the laser beam condensing point moves in a direction orthogonal to the thickness direction of the object to be processed so as to move along the planned cutting line. A laser processing apparatus, wherein the mounting table is moved.   The laser processing apparatus according to claim 1, wherein the control unit determines the first movement amount and the second movement amount based on at least a thickness and a refractive index of the workpiece. The said predetermined position is a position of the said mounting base at the time of the focus of a predetermined visible light being located in the surface of the said workpiece mounted on the said mounting base. Laser processing equipment.

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