JP2865012B2 - Magnetic head device and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head device and a method of manufacturing the same, and more particularly to a magnetic head device for reading and writing recorded information of a magnetic recording device and a method of manufacturing the same.

[0002]

2. Description of the Related Art As a conventional magnetic head device, for example, Kazhiko Yamada et al., Journal of Applied Physics (Vol. 55, No. 6, 1984, 2
235) "). This is shown in FIG. The conventional magnetic head device shown in FIG.
A lower magnetic material pattern, an insulating film, a thin-film conductor coil pattern, an insulating film, an upper magnetic material pattern, and a protective film, which constitute the head main body 52, are sequentially laminated on a ceramic substrate.

In the magnetic head device described above, after the head body 52 is formed, the ceramic substrate is
The slider 59 is provided with a suspension 56 having an appropriate rigidity. This conventional magnetic head device includes a magnetic recording medium 5
Reading or writing is performed in a state of floating at a predetermined distance from 7.

A magnetic head device used in contact with a magnetic recording medium is disclosed in Japanese Patent Application Laid-Open No. 57-133512. In this magnetic head device, a material having high hardness such as ferrite is used as a substrate for the slider, and a suspension is attached to the substrate similarly to the above-described magnetic head devices. Reading recorded information,
Writing is performed by moving over the rotating magnetic recording medium 7 via the suspension.

[0005]

However, in each of the above embodiments, the magnetic head device for reading and writing while the slider is floating from the magnetic recording medium is provided with a ceramic slider. The slider and the magnetic recording medium collide with each other due to an impact from the slider or the magnetic recording medium being attracted to the slider, thereby damaging the magnetic recording medium and losing recorded information. Such disadvantages tend to increase as the distance between the slider and the magnetic recording medium is reduced to improve the recording density.

Further, in the case of the magnetic head device disclosed in Japanese Patent Application Laid-Open No. 57-133512, reading and writing of recorded information are performed in a state where the head body is in contact with the magnetic recording medium. However, the hardness of the material constituting the slider on which the head body is mounted is high, so that the slider and the magnetic recording medium are likely to collide with an inadvertent impact, and the magnetic recording medium may be similarly damaged.

Further, there is a disadvantage that the head body is in contact with the magnetic recording medium, and the suction generated between them is more likely to occur than in the floating state. As disclosed in Japanese Patent No. 159329, fine processing of a slider has been proposed.

However, regarding the fine processing,
Actually, it is difficult to increase the processing accuracy, and there has been a disadvantage that the magnetic recording medium may be damaged by the finely processed portion.

[0009]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a magnetic head device which solves the disadvantages of the prior art, and in particular, which prevents a magnetic recording medium from being damaged, and a method of manufacturing the same.

[0010]

In order to achieve the above object, according to the first aspect of the present invention, a thin film organic film having an appropriate strength and a thin film organic film sequentially laminated on the thin film organic film via an insulating film are provided. A coil section, a head magnetic pole section, and an upper coil section are provided. A contact hole filled with a conductive material for connecting the upper coil portion and the lower coil portion is provided.
The thin film organic film is formed on the insulating film described above, and a part of the thin film organic film is gently bowed toward the recording medium to form a projecting portion, and the projecting portion is provided with a medium contact region that comes into contact with the recording medium.

Further, a through hole for a magnetic pole penetrating the thin film organic film is provided in a medium contact area of the thin film organic film, and the magnetic pole member integrated with the magnetic pole portion for the head is filled in the through hole for the magnetic pole. The configuration is adopted.

In the invention according to the second aspect, a first step of detachably attaching a thin film organic film on a conductive support substrate, and forming a lower coil pattern forming a lower coil portion on the thin film organic film. A second step of forming a through-hole for a magnetic pole near one end of the lower coil portion, and a head shaft through the insulating film on the central axis portion of the lower coil portion including the through-hole portion for the magnetic pole. A third step of laminating a magnetic pole pattern and filling a magnetic pole member in a magnetic pole through-hole, forming an upper coil pattern forming an upper coil portion on the head magnetic pole pattern via an insulating film, and Prior to the formation of the pattern, a contact hole for connecting both ends of each unit coil of the upper coil portion and the lower coil portion is provided in the insulating film described above .
And the conductive support substrate and the thin film organic film were peeled off
Later, a thin organic film is applied to the recording medium in the area around the through hole for the magnetic pole.
To be fixed in a state of protruding gently bowing toward the fifth
And a step of:

In the present invention, the above-mentioned objects are achieved by these means.

[0014]

According to the present invention, the magnetic head device has a thin organic film having an appropriate strength, and the entire magnetic head device is moved through the thin organic film. In other words, the magnetic head device is moved to a predetermined position on the rotating magnetic recording medium, and the periphery of the magnetic pole through hole that penetrates one end of the head magnetic pole portion provided on the thin film organic film contacts the magnetic recording medium. In this state, recording information is read and written.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. Here, FIG. 1 is a partial plan view of the present embodiment with a part omitted, and FIG. 2 is a schematic sectional view of a coil portion in the present embodiment.

In this embodiment, a thin-film organic film 1 having an appropriate strength, a lower coil portion 2A, a magnetic pole portion 4 for a head, which are sequentially laminated on the thin-film organic film 1 via an insulating film (not shown).
And an upper coil portion 2B, and a contact hole (not shown) filled with a conductive material for connecting the upper coil portion 2B and the lower coil portion 2A.
A magnetic pole through hole 3 penetrating the thin film organic film 1 is provided at one end of the thin film organic film 1.
And a magnetic pole member integrated therewith.

More specifically, the thin film organic film 1 has a thickness of 3 mm.
This thin film organic film 1 is disposed in opposition to the magnetic recording medium 7, and a contact area with the magnetic recording medium 7 is formed by using a thin film of a 00 [μm] polyimide film. It has a shape gently protruding to the side (in FIG. 2, it is curved downward in a gentle mountain shape). On the back surface of the projecting portion of the thin film organic film 1, a coil 2, a head magnetic pole portion 4 and the like are provided near the projecting portion.

The coil 2 is a member made of Cu spirally formed around the head magnetic pole 4 as a central axis. The spiral coil 2 is vertically divided on a plane including the head magnetic pole 4. And a lower coil portion 2A and an upper coil portion 2B. The lower coil portion 2A and the upper coil portion 2B are integrally formed in the process of forming the magnetic head device, and are electrically connected to each other by a contact hole filled with a conductive material. Function.

The magnetic pole portion 4 for the head is disposed at the center axis position of the spiral coil 2 as described above, and its front end portion faces the magnetic recording medium 7 at the projecting portion of the thin film organic film 1. It is connected to the magnetic pole through hole 3 penetrating the position. The magnetic pole through hole 3 is filled with a permalloy material as a magnetic pole member.

Next, a description will be given of a manufacturing method of the present embodiment having the above-described configuration. The manufacturing method of this embodiment includes a first step of detachably attaching the thin film organic film 1 on the conductive support substrate and a second step of forming a lower coil pattern forming the lower coil portion 2A on the thin film organic film 1. Step 2, a magnetic pole through hole 3 is provided near one end of the lower coil portion 2A, and a magnetic pole for a head is provided on the central shaft portion of the lower coil portion 2A through an insulating film, including the through hole 3 for the magnetic pole. A third step of laminating a pattern and filling the magnetic pole through-hole 3 with a magnetic pole member, and forming an upper coil pattern forming the upper coil portion 2B on the magnetic pole pattern for the head via an insulating film; the prior insulating film formation of the coil pattern, and a fourth step of providing a contact hole for connecting the ends of each unit coil of the upper coil portion 2B and the lower coil portion 2A, the conductive support substrate and the thin film organic
After peeling off the film, the thin film organic film is
A gently bowed projection toward the recording medium in the side area
And a fifth step of fixing in a state . Hereinafter, this will be described in detail with reference to FIG.

(First Step): First, the thin film organic film 1 is stretched and attached on a conductive support substrate (not shown) so that it can be removed later.

(Second Step): On the thin film organic film 1, a lower coil portion 2A of the coil 2 for generating an induction magnetic field in the head magnetic pole portion 4 of the magnetic head device, and an electrode for the electrode connected to the coil 2 A pad pattern is formed.

The thin-film organic film 1 has a thickness of 300
[Μm] thick polyimide film is used. As a method for manufacturing the coil 2, first, a mold of the lower coil portion 2 </ b> A of the coil 2 is formed on the thin film organic film 1 by using a photoresist pattern by ordinary ultraviolet exposure. In this method, a photoresist having sensitivity to ultraviolet rays is applied to the thin film organic film 1 and is patterned into a desired thin film conductor pattern. In this embodiment, a line and space pattern is formed using AZ1350J manufactured by Shipley.

This photoresist has a thickness of 2 μm.
m] and the pattern width was 0.5 [μm]. From above, a film of copper (Cu) was formed with a thickness of 1 [μm] by using an evaporation method. After that, remove the resist pattern with a remover,
The pattern of the lower coil portion 2A of the coil 2 was left on the thin film organic film 1 by a lift-off method.

Here, as a method for forming the Cu film, any method such as a metal organic chemical vapor deposition growth method, an electrolytic or electroless plating method, and a sputtering method can be used as long as the method does not damage the thin film organic film 1. May be used.

(Third Step): Next, the Cu pattern in the lower half of the coil 2 is covered with an insulating material. Then, a coating type imide resin was applied at a thickness of 1.5 [μm], and was completely baked and baked by baking. As a result,
The upper part of the pattern of the lower coil part 2A is simultaneously flattened.

The polyimide film and the thin film organic film 1
And the focused ion beam (FI)
A permalloy material, which is a magnetic pole member, was electrolytically plated using the conductive support substrate on which the thin film organic film 1 was attached as an electrode to fill the magnetic pole through-hole 3. The permalloy material filled in the magnetic pole through-holes 3 is brought into contact with and integrated with the head magnetic pole portion 4 formed in a subsequent step.

Here, the FI-beam method is used to form the magnetic pole through-holes 3, but a photoresist coating, ultraviolet exposure, development, and O2 dry etching may be used. Since these methods are general and can be performed in duplicate with the equipment for forming the magnetic head device, they are more suitable for production.

The diameter of the magnetic pole through hole 3 is the track width during magnetic recording. By adjusting this diameter, magnetic recording can be performed with a predetermined track width. In this embodiment, the diameter is 2 [μm].

(Fourth Step): Next, a head magnetic pole portion pattern is formed at the center axis position of the lower coil portion 2A that has already been formed. The above-described magnetic pole through hole 3 is located at the end of the pattern of the head magnetic pole portion 4. As shown in FIG. 1, here, the same photoresist process as in the case of the lower coil portion 2A was performed, and a permalloy material was vapor-deposited in the same manner as in the magnetic pole through hole 3. The film thickness is 1 [μ
m], and the pattern width is 3 μm. As a result, the head magnetic pole portion 4 made of the permalloy material is integrated with the permalloy material filled in the magnetic pole through hole 3.

Further, an imide resin was applied again on the pattern of the magnetic pole portion 4 for the head, flattened, and then fired into polyimide. Then, a contact hole as an electrical contact between the pattern of the lower coil portion 2A and the upper coil portion 2B is formed in advance. The contact hole is made of Cu, which is the same material as that of the coil 2. Thus, an electrolytic plating method using a solution containing Cu as ions can be used with the pad portion as an electrode.

Then, the coil pattern and the electrode pads of the upper coil portion 2B are covered with an insulating material in the same manner as the lower coil portion 2A, so that the magnetic pole portion 4 for the head is centered around the magnetic pole portion 4 for the head. A state in which the coil 2 for generating an induction magnetic field was spirally wound was realized.

The coil 2 and the magnetic pole 4 for the head are covered with an imide resin 5 as a protective layer.

(Fifth Step): Finally, the conductive support substrate (not shown) and the thin-film organic film 1 are peeled off and separated into individual magnetic head devices. In this way, the pad portion for the electrode is finally formed at a position away from the magnetic pole portion 4 for the head and the like, and the permalloy integrated with the magnetic pole portion 4 for the head and filled in the through hole 3 for the magnetic pole. Is a magnetic head device having a structure in which is exposed. When the magnetic head device is used, the thin film organic film 1 is fixed in a pressurized state so as to protrude toward the recording medium 7 in a region around the magnetic pole through hole 3.

The magnetic head device formed by the above-described method is disposed so that the protruding portion faces the magnetic recording medium 7, and when reading and writing, the entire magnetic head device is The user moves on the magnetic recording medium 7 to search for a predetermined track position. Then, at the track position, the recording information is read and written while the area around the magnetic pole through hole 3 of the thin film organic film 1 is in contact with the magnetic recording medium 7.

The inventor of the present invention affixes the above-described embodiment to the suspension 56 shown in the conventional example (see FIG. 3), and brings the magnetic pole through hole 3 of the embodiment into contact with the magnetic recording medium 7. Reading and writing of the recorded information 8 were experimentally performed in the state in which the recording information 8 was placed. The magnetic recording medium 7 used here is made of a Fomblin lubricant, a sputtered carbon protective film, Co
-A material composed of a Cr-based magnetic recording material and a tempered glass substrate was used.

The above-described experiments of reading and writing were performed in an environment without a vibration isolating structure such as a vibration isolation table by violent vibration, but the magnetic head device and the magnetic recording medium 7 of the present invention were used. There was no damage to the media surface as a collision.

Further, when the present inventor artificially shakes the entire evaluation system, the magnetic head part and the medium may collide with each other and may be damaged even though the recording track may jump or move. Did not.

The experimental recording density of this embodiment was 10 [Gb / in 2], which is much higher than that of a conventional recording apparatus having a floating type magnetic head component.

Here, the steps used in the above-described method of manufacturing a magnetic head device are not limited to those described here, and any steps that can realize a similar structure may be used. Further, the material is not limited to the materials such as polyimide, permalloy, and Cu used in the present embodiment, and other materials may be used as long as the basic configuration of the magnetic head component of the present invention can be realized. You may.

Further, a multi-magnetic head device may be configured in which a plurality of head bodies each including a plurality of coils, a magnetic pole portion for a head, a through hole for a magnetic pole, and the like are mounted on a thin film organic film. As a result, the amount of search movement on the magnetic recording medium can be reduced, so that the long-term reliability of the magnetic head device can be improved and the access time to recorded information can be reduced. In particular, when the magnetic heads are formed in parallel according to the number corresponding to the recording density, and the through holes for the magnetic poles in the organic film are formed in accordance with the magnetic heads, the seek operation becomes unnecessary, so that the access time to the recorded information is reduced. Can be greatly reduced.

Here, instead of providing the projecting portion on the magnetic recording medium side, the thin film organic film may have a shape in which the thin film organic film is bowed toward the magnetic recording medium side.

[0043]

As described above, since the magnetic head device of the present invention is basically used in contact with the magnetic recording medium, the distance between the magnetic recording medium and the magnetic recording medium is reduced, so that the recording density rises. It can be improved over the conventional magnetic head device used in the state.

Further, according to the present invention, since the recorded information is read and written on the thin film organic film, there is no need to provide a floating slider as in the conventional example. Damage can be effectively prevented, and wear of the magnetic recording medium and the lubricant on the medium can be reduced.

Further, a protruding portion is provided on the thin film organic film, and reading and writing of recorded information are performed at the protruding portion. Therefore, the magnetic recording medium abuts on the gentle slope of the protruding portion, thereby In addition, it is possible to more effectively prevent damage or the like due to the corner portion of the slider of the conventional example, and to further reduce wear of the magnetic recording medium and the lubricant on the medium.

Further, even when a magnetic recording medium and a magnetic head device collide with each other due to an external factor such as an inadvertent impact, the protruding portion of the thin film organic film is made to be elastic by its elasticity. Since the deflection is generated and the impact can be absorbed, damage due to collision with the magnetic recording medium is effectively eliminated.

Further, since the magnetic head component formed on the organic film is used without machining, it is possible to obtain an extremely high throughput in component production and magnetic recording device production.

Further, since the present invention does not include steps such as cutting of a slider material used in the conventional manufacturing of magnetic head parts, the manufacturing apparatus can be simplified and the steps can be simplified. The manufacturing cost of the slider can be reduced.

As described above, according to the present invention, it is possible to provide an unprecedented excellent magnetic head device having the above-described effects.

[Brief description of the drawings]

FIG. 1 is a partially omitted plan view of an embodiment of the present invention.

FIG. 2 is a partially omitted cross-sectional view of one embodiment of the present invention.

FIG. 3 is a perspective view of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Thin film organic film 2 Coil 2A Lower coil part 2B Upper coil part 3 Magnetic pole through hole 4 Head magnetic pole part 5 Protective film 7 Magnetic recording medium 8 Recording information

Claims (2)

(57) [Claims] 1. A thin film organic film having an appropriate strength, a lower coil portion, a head magnetic pole portion, and an upper coil portion which are sequentially laminated on the thin film organic film via an insulating film. A contact hole filled with a conductive material for connecting the coil portion and the lower coil portion is formed in the insulating film, and a part of the thin film organic film is gently protruded toward a recording medium in a bow shape. And a medium contact area for contacting a recording medium is provided at the projecting portion; and a magnetic pole through hole is provided at the medium contact area of the thin film organic film, the magnetic pole through hole penetrating the thin film organic film. And a magnetic pole member integrated with the head magnetic pole portion. 2. A first step of removably attaching a thin film organic film on a conductive support substrate, and a second step of forming a lower coil pattern forming a lower coil portion on the thin film organic film,
A magnetic pole through-hole is provided in the vicinity of one end of the lower coil part, and a magnetic pole pattern for a head is laminated via an insulating film to a central shaft part of the lower coil part including the through-hole part for the magnetic pole, and A third step of filling the magnetic pole member into the magnetic pole through hole, forming an upper coil pattern forming an upper coil portion on the head magnetic pole pattern via an insulating film,
Prior to the formation of the upper coil pattern,
A fourth step of providing a contact hole connecting both ends of each unit coil of the upper coil section and the lower coil section ;
After separating the conductive support substrate and the thin film organic film
Then, the thin film organic film is fixed in a state where it is gently bowed toward the recording medium in the area around the magnetic pole through hole .
5. A method for manufacturing a magnetic head device, comprising: