JP2020044844A - Joint structure - Google Patents

Joint structure Download PDF

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JP2020044844A
JP2020044844A JP2019219020A JP2019219020A JP2020044844A JP 2020044844 A JP2020044844 A JP 2020044844A JP 2019219020 A JP2019219020 A JP 2019219020A JP 2019219020 A JP2019219020 A JP 2019219020A JP 2020044844 A JP2020044844 A JP 2020044844A
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light
opening
absorbing member
welded portion
transmitting member
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JP6857705B2 (en
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山岸 裕幸
Hiroyuki Yamagishi
裕幸 山岸
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Fujikura Ltd
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Abstract

To provide a joint structure and a manufacturing method of the same, in which both members to be mutually bonded are uniformly and surely brought into close contact with each other without using a glass plate.SOLUTION: A joint structure 100 comprises: a light absorbable member 102 having at least one opening O; and a light transmissive member 106 superposed on the light absorbable member 102 so as to cover the opening O, and joined to the light absorbable member 102 via an annular welding part 104 surrounding the opening O, in which the light transmissive member 106 is formed into a thin plate shape adhered to the light absorbable member 102 by deforming it when the inside of the opening O is decompressed before the annular welded part 104 is formed.SELECTED DRAWING: Figure 1

Description

本発明は、相互に重ね合わされ、その境界面または境界面近傍に形成された溶着部を介して互いに接合された光吸収性部材及び光透過性部材を備える接合構造体、及びその製造方法に関する。   The present invention relates to a joint structure including a light-absorbing member and a light-transmitting member that are overlapped with each other and joined to each other via a welded portion formed at or near a boundary surface thereof, and a method of manufacturing the same.

従来、複数の部材を接合する方法として、レーザ光の照射による接合方法があり、その中でも最近では、局所的な加熱であり製品への熱ダメージが少ないとともに、溶着部の、外観への影響が少ないレーザ透過溶着法(Laser Transmission Welding)が注目されている。この接合方法は、接合部材の一方にレーザ光に対して透過性を有する部材(光透過性部材)を用い、他方にレーザ光に対して吸収性を有する部材(光吸収性部材)を用い、これらを互いに重ね合わせて加圧した状態で、レーザ光を光透過性部材側から照射することで、照射されたレーザ光のエネルギが光吸収性部材の境界面付近で吸収されて発熱し、その熱が光透過性部材にも伝達して両部材が溶融し、最後にその溶融部が冷却、固化されることで両部材が接合される方法である。   Conventionally, as a method of joining a plurality of members, there is a joining method by laser beam irradiation, and recently, among these, local heating is performed, so that heat damage to the product is small, and the effect of the welded portion on the appearance is reduced. Attention has been paid to a small number of laser transmission welding methods (Laser Transmission Welding). In this bonding method, a member having a property of transmitting laser light (a light transmitting member) is used as one of the bonding members, and a material having a property of absorbing the laser light (a light absorbing member) is used as the other of the bonding members. By irradiating the laser light from the light transmitting member side in a state where these are superimposed on each other and pressurized, the energy of the irradiated laser light is absorbed near the boundary surface of the light absorbing member and generates heat. In this method, both members are melted by transmitting heat to the light transmissive member, and finally, the melted portion is cooled and solidified to join the two members.

このレーザ透過溶着法には、いくつかの重要なポイントがあるが、とりわけ重要なのが接合される部材同士を加圧して確実に密着させることである。接合される部材間に隙間が存在すると、レーザ照射によって光吸収性部材で発生した熱が相手側である光透過性部材にうまく伝達されず、局所的な温度上昇によって隆起、膨張、爆発といった溶着不良となるからである。   The laser transmission welding method has several important points, and particularly important is to press the members to be bonded to each other to ensure close contact. If there is a gap between the members to be joined, the heat generated by the light absorbing member due to the laser irradiation will not be transmitted well to the opposing light transmitting member, and welding such as bulging, expansion and explosion will occur due to local temperature rise. This is because it becomes defective.

この加圧は、一般的には、レーザ光に対して透過性を有するガラス板を光透過性部材上に配置し、このガラス板を介して両部材に押し圧を加える方法によって実現される(下記特許文献1参照)。しかし、この方法の場合、接合部材の加熱、溶融時に発生する煤や難燃剤の気化成分によってガラス板が汚れ、レーザ光に対するガラス板の吸収率が上がってガラス板自体が加熱されて割れに至るという問題がある。また、汚れたガラス板は、レーザ光を遮り、光吸収性部材に十分な光が届かなくなる結果、溶着強度の低下をも引き起こす。   This pressurization is generally realized by a method in which a glass plate having transparency to laser light is disposed on a light-transmitting member, and a pressing force is applied to both members via the glass plate ( See Patent Document 1 below). However, in the case of this method, the glass plate is contaminated by soot and a vaporization component of the flame retardant generated when the joining member is heated and melted, and the absorption rate of the glass plate with respect to laser light is increased, and the glass plate itself is heated and cracked. There is a problem. In addition, the dirty glass plate blocks the laser beam and prevents sufficient light from reaching the light-absorbing member, resulting in a decrease in welding strength.

これに対して、下記特許文献2では、ガラス板を用いず、接合される部材同士を吸引により密着させる方法が提案されている。具体的には、特許文献2に記載の方法は、接合される部材の一方に溝部を形成しておき、この溝部の空間を減圧することで両部材同士を密着させるものである。しかし、レーザ照射により溶着する際に接合される部材の一方又は双方に熱変形が生じたり、成形時に接合される部材に反りが生じたりする結果、接合される部材間に隙間が発生し、これにより吸引密着性が低下する場合がある。   On the other hand, Patent Document 2 below proposes a method in which members to be joined are brought into close contact with each other by suction without using a glass plate. Specifically, in the method described in Patent Document 2, a groove is formed in one of the members to be joined, and the two members are brought into close contact with each other by reducing the pressure in the space of the groove. However, as a result of thermal deformation of one or both of the members to be joined when welding by laser irradiation or warping of the members to be joined at the time of molding, a gap is generated between the members to be joined. May lower the suction adhesion.

特開昭62−142092号公報JP-A-62-142092 国際公開第2010/035696号パンフレットWO 2010/035696 pamphlet

それ故本発明の目的は、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させるのに適した接合構造体を提供するとともに、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させることができる接合構造体の製造方法を提供することにある。   Therefore, an object of the present invention is to provide a joint structure suitable for uniformly and surely adhering members to be joined to each other without using a glass plate, and without using a glass plate. It is an object of the present invention to provide a method for manufacturing a joined structure in which members to be joined can be uniformly and surely brought into close contact with each other.

上述した課題を解決するための本発明の接合構造体は、少なくとも1つの開口部を有する光吸収性部材と、開口部を覆うように光吸収性部材上に配置された光透過性部材と、を備え、開口部を囲繞するとともに光吸収性部材と光透過性部材とを接合する環状の溶着部が形成され、光透過性部材は、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して、光吸収性部材に密着する薄板状に形成されていることを特徴とするものである。   A joint structure of the present invention for solving the above-mentioned problem, a light-absorbing member having at least one opening, a light-transmitting member disposed on the light-absorbing member so as to cover the opening, An annular welded portion surrounding the opening and joining the light absorbing member and the light transmissive member is formed, and the light transmissive member is located inside the opening before the annular welded portion is formed. Are deformed when depressurized, and are formed in a thin plate shape closely adhering to the light absorbing member.

この場合、光透過性部材は、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材に密着する厚みに形成されていることが好ましい。   In this case, the light transmissive member is deformed when the inside of the opening is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion is formed, and the light transmissive member adheres to the light absorbing member. Preferably, it is formed to a thickness.

また、本発明の接合構造体にあっては、環状の溶着部に隣接して位置し、光吸収性部材と光透過性部材とを接合する点状の溶着部を備えることが好ましい。   Further, the joint structure of the present invention preferably includes a point-like welded portion located adjacent to the annular welded portion and joining the light-absorbing member and the light-transmitting member.

上述した課題を解決するための本発明の接合構造体は、少なくとも1つの開口部を有する光吸収性部材と、開口部を覆うように光吸収性部材上に配置された光透過性部材と、を備え、開口部を囲繞するとともに光吸収性部材と光透過性部材とを接合する環状の溶着部が形成され、光透過性部材は、環状の溶着部よりも外側に、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して光吸収性部材に密着する薄肉片を有することを特徴とするものである。   A joint structure of the present invention for solving the above-mentioned problem, a light-absorbing member having at least one opening, a light-transmitting member disposed on the light-absorbing member so as to cover the opening, And an annular welded portion surrounding the opening and joining the light absorbing member and the light transmissive member is formed, and the light transmissive member has an annular welded portion outside the annular welded portion. It is characterized in that it has a thin piece that deforms when the inside of the opening is decompressed in a state before it is formed and adheres to the light absorbing member.

この場合、薄肉片は、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して光吸収性部材に密着する厚みに形成されていることが好ましい。   In this case, the thin piece is deformed when the inside of the opening is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion is formed, and the thin piece is formed to have a thickness that is in close contact with the light absorbing member. It is preferred that

また、本発明の接合構造体にあっては、薄肉片は、光吸収性部材の周縁部に沿って形成されていることが好ましい。   In the joint structure of the present invention, it is preferable that the thin piece is formed along the peripheral edge of the light absorbing member.

さらに、本発明の接合構造体にあっては、環状の溶着部に隣接して位置し、光吸収性部材と光透過性部材とを接合する点状の溶着部を備えることが好ましい。   Further, the joint structure of the present invention preferably includes a point-like welded portion that is located adjacent to the annular welded portion and joins the light-absorbing member and the light-transmitting member.

上述した課題を解決するための本発明の接合構造体の製造方法は、少なくとも1つの開口部を有する光吸収性部材に、開口部を覆うように光透過性部材を重ね合わせ、光透過性部材側からレーザ光を照射することにより開口部を囲繞するよう環状の溶着部を形成して光吸収性部材と光透過性部材とを接合する接合構造体の製造方法であって、光透過性部材を、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して、光吸収性部材に密着する薄板状に形成しておき、環状の溶着部を形成するにあたり、開口部内を減圧することにより光透過性部材を変形させ光吸収性部材に密着させた状態で光透過性部材側からレーザ光を照射することを特徴とするものである。   In order to solve the above-mentioned problem, a method of manufacturing a bonded structure according to the present invention includes a step of superimposing a light-transmitting member on a light-absorbing member having at least one opening so as to cover the opening. A method of manufacturing a joining structure for joining a light absorbing member and a light transmitting member by forming an annular welded portion so as to surround an opening by irradiating a laser beam from a side, comprising: Is deformed when the inside of the opening is depressurized before the annular welded portion is formed, and is formed in a thin plate shape that is in close contact with the light absorbing member, and the annular welded portion is formed. In this case, the light transmitting member is deformed by depressurizing the inside of the opening, and the laser light is irradiated from the light transmitting member side in a state in which the light transmitting member is in close contact with the light absorbing member.

この場合、光透過性部材を、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材に密着する厚みに形成しておくことが好ましい。   In this case, the light transmissive member is deformed when the inside of the opening is reduced to a pressure of −80 kPa or more and −20 kPa or less with a gauge pressure before the annular welded portion is formed, and the light transmissive member adheres to the light absorbing member. It is preferable to form it to a thickness.

上述した課題を解決するための本発明の接合構造体の製造方法は、少なくとも1つの開口部を有する光吸収性部材に、開口部を覆うように光透過性部材を重ね合わせ、光透過性部材側からレーザ光を照射することにより開口部を囲繞するよう環状の溶着部を形成して光吸収性部材と光透過性部材とを接合する接合構造体の製造方法であって、光透過性部材の、環状の溶着部よりも外側に、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して光吸収性部材に密着する薄肉片を形成しておき、環状の溶着部を形成するにあたり、開口部内を減圧することにより薄肉片を変形させ光吸収性部材に密着させた状態で光透過性部材側からレーザ光を照射することを特徴とするものである。   In order to solve the above-mentioned problem, a method of manufacturing a bonded structure according to the present invention includes a step of superimposing a light-transmitting member on a light-absorbing member having at least one opening so as to cover the opening. A method of manufacturing a joining structure for joining a light absorbing member and a light transmitting member by forming an annular welded portion so as to surround an opening by irradiating a laser beam from a side, comprising: Outside the annular welded portion, a thin piece that is deformed and adheres to the light absorbing member when the inside of the opening is depressurized before the annular welded portion is formed is formed. In forming an annular welded portion, a laser beam is irradiated from the light transmitting member side in a state in which the thin piece is deformed by reducing the pressure in the opening and brought into close contact with the light absorbing member. is there.

この場合、薄肉片を、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して光吸収性部材に密着する厚みに形成しておくことが好ましい。   In this case, the thin piece is deformed when the inside of the opening is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion is formed, and the thin piece is formed to have a thickness that is in close contact with the light absorbing member. It is preferable to keep it.

また、本発明の接合構造体の製造方法にあっては、薄肉片を、光吸収性部材の周縁部に沿って形成しておくことが好ましい。   In the method for manufacturing a joined structure according to the present invention, it is preferable that the thin piece is formed along the peripheral edge of the light-absorbing member.

また、本発明の接合構造体の製造方法にあっては、光透過性部材を光吸収性部材に重ね合わせた後であってかつ環状の溶着部を形成する前に、光透過性部材側からレーザ光を照射して光吸収性部材と光透過性部材とを接合する点状の溶着部を形成することが好ましい。   Further, in the method for manufacturing a joined structure according to the present invention, after the light-transmitting member is overlapped with the light-absorbing member and before forming the annular welded portion, from the light-transmitting member side. It is preferable to form a point-like welded portion for joining the light absorbing member and the light transmitting member by irradiating the laser beam.

さらに、本発明の接合構造体の製造方法にあっては、光吸収性部材に、開口部につながるとともに外部の減圧装置に連通する吸引開口を形成しておくことが好ましい。   Furthermore, in the method for manufacturing a joined structure according to the present invention, it is preferable that a suction opening connected to the opening and communicating with an external decompression device is formed in the light absorbing member.

さらに、本発明の接合構造体の製造方法にあっては、環状の溶着部の形成後に、開口部内の減圧を維持したまま光透過性部材側からレーザ光を照射することによって吸引開口を溶融、閉塞させることが好ましい。   Furthermore, in the method for manufacturing a joint structure of the present invention, after forming the annular welded portion, the suction opening is melted by irradiating laser light from the light transmitting member side while maintaining the reduced pressure in the opening, It is preferred to occlude.

さらに、本発明の接合構造体の製造方法にあっては、開口部内の減圧を、該開口部内にパージガスを供給しながら行うことが好ましい。   Further, in the method for manufacturing a joined structure according to the present invention, it is preferable that the pressure in the opening is reduced while supplying a purge gas into the opening.

この場合、開口部内の減圧と該開口部内へのパージガスの供給とを、二重配管を用いて吸引開口を通じて行うことが好ましい。   In this case, it is preferable that the pressure reduction in the opening and the supply of the purge gas into the opening are performed through the suction opening using a double pipe.

また、本発明の接合構造体の製造方法にあっては、環状の溶着部を形成した後に引き続き開口部内の減圧を保持し、または開口部内を加圧し、あるいは減圧と加圧を交互に行い、その際の単位時間当たりの圧力の変化を測定することによって環状の溶着部の気密性試験を行うことが好ましい。   Further, in the method for manufacturing a joined structure of the present invention, after forming the annular welded portion, continuously holding the reduced pressure in the opening, or pressurizing the inside of the opening, or alternately performing reduced pressure and pressurized, At that time, it is preferable to conduct an airtightness test of the annular welded portion by measuring a change in pressure per unit time.

さらに、本発明の接合構造体の製造方法にあっては、開口部内の圧力を常時検出し、その圧力の変化に基づき、光吸収性部材と光透過性部材との間の密着、環状の溶着部の形成開始、及び環状の溶着部の形成完了の判別を行うことが好ましい。   Further, in the method for manufacturing a joined structure according to the present invention, the pressure in the opening is constantly detected, and based on the change in the pressure, the close contact between the light absorbing member and the light transmitting member and the annular welding are performed. It is preferable to determine the start of the formation of the portion and the completion of the formation of the annular welded portion.

本発明にあっては、接合構造体の製造において、互いに接合される光吸収性部材と光透過性部材を、開口部内を減圧することによって薄板状に形成された光透過性部材又は光透過性部材に設けられた薄肉片を変形させ、光吸収性部材に密着させることができるので、光吸収性部材及び光透過性部材同士の優れた吸引密着性を得ることができる。   According to the present invention, in the production of the joined structure, the light absorbing member and the light transmitting member that are joined to each other are formed in a thin plate shape by reducing the pressure in the opening. Since the thin piece provided on the member can be deformed and brought into close contact with the light absorbing member, excellent suction adhesion between the light absorbing member and the light transmitting member can be obtained.

しがたって本発明によれば、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させるのに適した接合構造体を提供することができるとともに、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させることができる接合構造体の製造方法を提供することができる。   Therefore, according to the present invention, it is possible to provide a joint structure suitable for uniformly and surely adhering members joined to each other without using a glass plate, and to use a glass plate. Without this, it is possible to provide a method of manufacturing a joined structure in which members joined to each other can be uniformly and surely brought into close contact with each other.

図1は、本発明の一実施形態の接合構造体を示し、(a)は斜視図であり、(b)は(a)中のA−A線に沿う断面図である。1A and 1B show a joint structure according to an embodiment of the present invention, wherein FIG. 1A is a perspective view, and FIG. 1B is a cross-sectional view taken along line AA in FIG. 図2は、本発明の他の実施形態の接合構造体し、(a)は斜視図であり、(b)は(a)中のB−B線に沿う断面図である。2A and 2B show a joint structure according to another embodiment of the present invention, wherein FIG. 2A is a perspective view, and FIG. 2B is a cross-sectional view taken along line BB in FIG. 図3は、本発明のさらに他の実施形態の接合構造体を示し、(a)は斜視図であり、(b)は(a)中のC−C線に沿う断面図である。3A and 3B show a joint structure according to still another embodiment of the present invention, wherein FIG. 3A is a perspective view, and FIG. 3B is a cross-sectional view taken along line CC in FIG. 図4(a),(b)はそれぞれ、図3に示した接合構造体における薄肉片の変形例を示す断面図である。4A and 4B are cross-sectional views each showing a modified example of a thin piece in the joint structure shown in FIG. 図5は、本発明の一実施形態の接合構造体の製造方法に用いる光吸収性部材を示し、(a)は平面図、(b)は(a)中のD−D線に沿う断面図である。5A and 5B show a light-absorbing member used in the method for manufacturing a joint structure according to one embodiment of the present invention, wherein FIG. 5A is a plan view, and FIG. 5B is a cross-sectional view taken along line DD in FIG. It is. 図6は、本発明の一実施形態の接合構造体の製造方法を示し、(a)は配置工程を示し、(b)は吸引密着工程を示す断面図である。FIGS. 6A and 6B are cross-sectional views illustrating a method for manufacturing a joint structure according to an embodiment of the present invention, wherein FIG. 6A illustrates an arrangement step, and FIG. 図7は、本発明の一実施形態の接合構造体の製造方法に用いる圧力調整装置及びレーザ照射装置を示す概略図である。FIG. 7 is a schematic diagram illustrating a pressure adjusting device and a laser irradiation device used in the method for manufacturing a bonded structure according to one embodiment of the present invention. 図8(a)〜(d)は、本発明の一実施形態の接合構造体の製造方法において、光吸収性部材の環状溝にレーザを照射して環状の溶着部を形成する様子を順に示した断面図である。FIGS. 8A to 8D sequentially show a state in which the annular groove of the light-absorbing member is irradiated with a laser to form an annular welded portion in the method of manufacturing the joined structure according to the embodiment of the present invention. FIG. 図9は、本発明の接合構造体の製造方法に適用可能な他の環状溝の例を示した断面図である。FIG. 9 is a cross-sectional view showing an example of another annular groove applicable to the method for manufacturing a joint structure of the present invention. 図10は、本発明の実施形態に従う実施例のコネクタを示し、(a)は斜視図であり、(b)は断面図である。10A and 10B show a connector according to an example according to the embodiment of the present invention, wherein FIG. 10A is a perspective view and FIG. 10B is a cross-sectional view. 図11は、本発明の実施形態に従う実施例のセンサを示し、(a)は斜視図であり、(b)は断面図である。11A and 11B show a sensor according to an example according to the embodiment of the present invention, wherein FIG. 11A is a perspective view and FIG. 11B is a cross-sectional view.

以下、本発明の実施の形態を図面に基づき詳細に説明する。なお、各図において同様の
部材または部分には、符号に「100」又は「200」のいずれかを加えた符号を付し、
重複する説明は省略する。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, similar members or portions are denoted by reference numerals obtained by adding either “100” or “200” to the reference numerals,
Duplicate description will be omitted.

図1は、本発明の一実施形態の接合構造体100を示しており、(a)は斜視図、(b)は(a)中のA−A線に沿う断面図である。この図に示すように、本実施形態の接合構造体100は、開口部Oを有する光吸収性部材102と、該開口部Oを覆うように光吸収性部材102に重ねられ、開口部Oを囲繞する環状の溶着部104を介して該光吸収性部材102に接合された光透過性部材106とを備えている。なお、「環状」とは、輪のような円い形だけを意味するのではなく、連続的に閉じた形状(無端形状)を意味する。よって、「環状」には、円形や楕円形だけではなく、矩形、多角形、その他の閉鎖形状が含まれる。溶着部104は、光透過性部材106と光吸収性部材102の境界面F上に形成されており、後で詳細に説明するが、このような溶着部104は、光透過性部材106側から光吸収性部材102へ向けてレーザ光を照射し、光吸収性部材102をまず発熱させて溶融し、その熱で光透過性部材106をも溶融させ、その後溶融部を固化させることで形成することができる。   1A and 1B show a joint structure 100 according to an embodiment of the present invention, wherein FIG. 1A is a perspective view, and FIG. 1B is a cross-sectional view taken along line AA in FIG. As shown in this figure, the joint structure 100 of the present embodiment has a light-absorbing member 102 having an opening O and a light-absorbing member 102 that covers the light-absorbing member 102 so as to cover the opening O. A light-transmitting member 106 joined to the light-absorbing member 102 via a surrounding annular welded portion 104. It should be noted that the term “annular” means not only a circular shape like a ring, but also a continuously closed shape (endless shape). Therefore, “annular” includes not only a circle and an ellipse but also a rectangle, a polygon, and other closed shapes. The welding portion 104 is formed on the boundary surface F between the light transmitting member 106 and the light absorbing member 102, and will be described later in detail. The light absorbing member 102 is irradiated with a laser beam to first generate heat and melt the light absorbing member 102, thereby melting the light transmitting member 106 with the heat, and then solidifying the melted portion. be able to.

光吸収性部材102は、レーザ光に対する吸収率が光透過性部材106の同レーザ光に対する吸収率よりも高い部材であり、主として熱可塑性樹脂又は熱可塑性エラストマーからなり、射出成形等により形成することができる。具体的には、波長193〜10600nmの範囲内に発振波長の中心を有するレーザ光から選択されたレーザ光に対して10%以上の吸収率を有するものが好ましい。レーザとしては、例えば、炭酸ガスレーザ(波長約10600nm)、Nd:YAGレーザ(波長約1064nm)、Nd:YVO4レーザの第2次高調波であるグリーンレーザ(波長約532nm)、ダイオードレーザ(波長約800nm,840nm,または950nm)、エキシマレーザ(波長約193nm)等が挙げられる。光吸収性部材102の吸収率を調整するため、熱可塑性樹脂又は熱可塑性エラストマーにカーボンブラック等の黒色着色剤や顔料、染料等を混練することができる。   The light absorptive member 102 is a member having a higher absorptance for laser light than the absorptivity for the same laser light of the light transmissive member 106, and is mainly made of a thermoplastic resin or a thermoplastic elastomer, and is formed by injection molding or the like. Can be. Specifically, a material having an absorptance of 10% or more with respect to laser light selected from laser light having an oscillation wavelength center within a wavelength range of 193 to 10600 nm is preferable. Examples of the laser include a carbon dioxide laser (wavelength: about 10600 nm), a Nd: YAG laser (wavelength: about 1064 nm), a green laser (wavelength: about 532 nm), which is the second harmonic of a Nd: YVO4 laser, and a diode laser (wavelength: about 800 nm). , 840 nm, or 950 nm), an excimer laser (wavelength: about 193 nm), and the like. In order to adjust the absorptance of the light absorbing member 102, a black colorant such as carbon black, a pigment, a dye, or the like can be kneaded with a thermoplastic resin or a thermoplastic elastomer.

熱可塑性樹脂としては、例えば、ポリアミド樹脂、ポリエチレン樹脂、ポリプロピレン樹脂、ポリエチレンテレフタレート樹脂、ポリブチレンテレフタレート樹脂、ポリフェニルエーテル樹脂、ポリスチレン樹脂、ハイインパクトポリスチレン樹脂、水添ポリスチレン樹脂、ポリアクリルスチレン樹脂、ABS樹脂、AS樹脂、AES樹脂、ASA樹脂、SMA樹脂、ポリアルキルメタクリレート樹脂、ポリメチルメタクリレート樹脂、ポリカーボネート樹脂、ポリエステル樹脂、ポリフェニレンスルファイド、液晶ポリマー等が挙られる。熱可塑性エラストマーとしては、例えばスチレン系熱可塑性エラストマー、オレフィン系熱可塑性エラストマー、ポリエステル系熱可塑性エラストマー、ポリウレタン系熱可塑性エラストマー、PVC系熱可塑性エラストマー等が挙げられる。熱可塑性樹脂には、強化材としてガラスファイバやミネラル等を混練してもよい。   As the thermoplastic resin, for example, polyamide resin, polyethylene resin, polypropylene resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyphenyl ether resin, polystyrene resin, high impact polystyrene resin, hydrogenated polystyrene resin, polyacrylstyrene resin, ABS Resin, AS resin, AES resin, ASA resin, SMA resin, polyalkyl methacrylate resin, polymethyl methacrylate resin, polycarbonate resin, polyester resin, polyphenylene sulfide, liquid crystal polymer and the like. Examples of the thermoplastic elastomer include a styrene-based thermoplastic elastomer, an olefin-based thermoplastic elastomer, a polyester-based thermoplastic elastomer, a polyurethane-based thermoplastic elastomer, and a PVC-based thermoplastic elastomer. Glass fiber, mineral, or the like may be kneaded with the thermoplastic resin as a reinforcing material.

図示例において光吸収性部材102は主として、開口部Oを区画する周壁108と、周壁108の下端部を閉塞する底壁110とからなる。周壁108の横断面形状は略矩形であるが、これに限らず、円形、楕円形、台形、多角形、ひょうたん形状等如何なる形状としてもよい。周壁108には、後述するように開口部Oに繋がり該開口部O内を減圧状態とするのに適した吸引開口112が形成されている。吸引開口112は、底壁110に形成してもよい。あるいは、底壁110を設けずに周壁109の下端を開放し、該下端開口を吸引開口112として用いてもよい。   In the illustrated example, the light absorbing member 102 mainly includes a peripheral wall 108 that defines the opening O, and a bottom wall 110 that closes a lower end of the peripheral wall 108. The cross-sectional shape of the peripheral wall 108 is substantially rectangular, but is not limited thereto, and may be any shape such as a circle, an ellipse, a trapezoid, a polygon, and a gourd. The peripheral wall 108 is formed with a suction opening 112 that is connected to the opening O and is suitable for reducing the pressure inside the opening O as described later. The suction opening 112 may be formed in the bottom wall 110. Alternatively, the lower end of the peripheral wall 109 may be opened without providing the bottom wall 110, and the lower end opening may be used as the suction opening 112.

光透過性部材106はレーザ光に対する吸収率が同レーザ光に対する光吸収性部材102の吸収率よりも低い部材であり、主として熱可塑性樹脂又は熱可塑性エラストマーからなり、射出成形等により形成することができる。具体的には、波長193〜10600nmの範囲内に発振波長の中心を有するレーザ光から選択されたレーザ光に対して、光吸収性部材102の吸収率よりも低い吸収率を有するものが好ましい。   The light transmissive member 106 is a member having a lower absorptivity for the laser light than the absorptivity of the light absorptive member 102 for the laser light, and is mainly made of a thermoplastic resin or a thermoplastic elastomer, and can be formed by injection molding or the like. it can. Specifically, a laser beam having a lower absorptance than that of the light-absorbing member 102 with respect to a laser beam selected from laser beams having an oscillation wavelength center within a wavelength range of 193 to 10600 nm is preferable.

光透過性部材106を構成する熱可塑性樹脂としては、例えば、ポリアミド樹脂、ポリエチレン樹脂、ポリプロピレン樹脂、ポリエチレンテレフタレート樹脂、ポリブチレンテレフタレート樹脂、ポリフェニルエーテル樹脂、ポリスチレン樹脂、ハイインパクトポリスチレン樹脂、水添ポリスチレン樹脂、ポリアクリルスチレン樹脂、ABS樹脂、AS樹脂、AES樹脂、ASA樹脂、SMA樹脂、ポリアルキルメタクリレート樹脂、ポリメチルメタクリレート樹脂、ポリカーボネート樹脂、ポリエステル樹脂、ポリフェニレンスルファイド、液晶ポリマー等が挙られる。熱可塑性エラストマーとしては、例えばスチレン系熱可塑性エラストマー、オレフィン系熱可塑性エラストマー、ポリエステル系熱可塑性エラストマー、ポリウレタン系熱可塑性エラストマー、PVC系熱可塑性エラストマー等が挙げられる。なお、熱可塑性樹脂には、強化材としてガラスファイバやミネラル等を混練させてもよい。熱可塑性樹脂又は熱可塑性エラストマーには、光吸収性部材の吸収率よりも低い吸収率を得られる限り、例えば、白色顔料や黄色、緑色、赤色等の有彩色着色剤を混練してもよい。   As the thermoplastic resin constituting the light transmitting member 106, for example, polyamide resin, polyethylene resin, polypropylene resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyphenyl ether resin, polystyrene resin, high impact polystyrene resin, hydrogenated polystyrene Resin, polyacryl styrene resin, ABS resin, AS resin, AES resin, ASA resin, SMA resin, polyalkyl methacrylate resin, polymethyl methacrylate resin, polycarbonate resin, polyester resin, polyphenylene sulfide, liquid crystal polymer and the like. Examples of the thermoplastic elastomer include a styrene-based thermoplastic elastomer, an olefin-based thermoplastic elastomer, a polyester-based thermoplastic elastomer, a polyurethane-based thermoplastic elastomer, and a PVC-based thermoplastic elastomer. The thermoplastic resin may be kneaded with glass fiber, mineral, or the like as a reinforcing material. The thermoplastic resin or the thermoplastic elastomer may be kneaded with, for example, a white pigment or a chromatic colorant such as yellow, green, or red as long as an absorptivity lower than the absorptivity of the light absorbing member can be obtained.

そして、光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内が減圧状態とされた場合に変形して、その周縁部が光吸収性部材102の周壁108の上端面に密着する薄板状に形成されている。これにより、光透過性部材106を光吸収性部材102に重ね合わせた際に、光吸収性部材102の周壁108の上端面と光透過性部材106との間に隙間が生じている場合でも、吸引開口112を通じて開口部O内を減圧した際に光透過性部材106を光吸収性部材102の周壁108の上端面に密着させることができるため、真空漏れを防止し光透過性部材106及び光吸収性部材102の相互間で優れた吸引密着性を得ることができる。   The light transmissive member 106 is deformed when the inside of the opening O is depressurized before the annular welded portion 104 is formed, and its peripheral edge is formed by the peripheral wall 108 of the light absorbing member 102. Is formed in a thin plate shape that is in close contact with the upper end surface of the. Accordingly, even when a gap is formed between the upper end surface of the peripheral wall 108 of the light absorbing member 102 and the light transmitting member 106 when the light transmitting member 106 is superimposed on the light absorbing member 102, When the pressure in the opening O is reduced through the suction opening 112, the light transmitting member 106 can be brought into close contact with the upper end surface of the peripheral wall 108 of the light absorbing member 102, so that vacuum leakage is prevented and the light transmitting member 106 and light Excellent suction adhesion between the absorbent members 102 can be obtained.

これをより確実にするため、光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材102に密着する易変形性を発揮する厚みに形成されていることが好ましい。具体的には、十分な変形による密着性を確保するため、光透過性部材106の厚みは、0.005mm〜0.2mmとすることが好ましく、成形性を考慮すると0.01mm〜0.1mmとすることがより好ましい。   In order to ensure this, the light transmissive member 106 is deformed when the inside of the opening O is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion 104 is formed. In addition, it is preferable that it is formed to have a thickness that exhibits easy deformability in close contact with the light absorbing member 102. Specifically, in order to secure adhesion by sufficient deformation, the thickness of the light transmitting member 106 is preferably set to 0.005 mm to 0.2 mm, and 0.01 mm to 0.1 mm in consideration of moldability. Is more preferable.

光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材102に密着するよう引張弾性係数(ヤング率)を0.01〜18GPaの範囲内の材料を選定又は調整するのが好ましい。光透過性部材106の引張弾性係数(ヤング率)を18GPaよりも大きくした場合には、開口部O内を減圧したときに変形し易くするために極めて薄く形成する必要があり、設計どおりに成形することが難しくなり、例えば、射出成形により光透過性部材106を形成する場合には、薄い部分に樹脂が流れず成形不良の原因となる。一方、光透過性部材106の引張弾性係数(ヤング率)が0.01GPaを下回ると、材料自体の剛性が低くなるため、自身の形状を保持することが難しくなり、目的の位置に目的の形状で位置決めすることが難しくなる。光透過性部材106の易変形性、成形性、位置決め性をより高次元でバランスさせるため、光透過性部材106の材料は、引張弾性係数(ヤング率)が6〜10GPaの範囲内となるよう選定又は調整することがより好ましい。この引張弾性係数(ヤング率)は、JIS K7161の規定に準拠し、JIS K7162に記載の試験片を引張試験機に装着し応力とひずみ(変形量)から応力―ひずみ曲線を作図し、その傾きから求めることができる。この際、応力―ひずみ曲線が直線状にならず傾きを求め難い場合には、ヤング率の代替係数としてセカント係数(応力―ひずみ曲線上の点と原点とを結ぶ直線の傾き)などを用いることができる。   The light transmissive member 106 is deformed when the inside of the opening O is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion 104 is formed. It is preferable to select or adjust a material having a tensile elastic modulus (Young's modulus) in the range of 0.01 to 18 GPa so as to make close contact. When the tensile elastic modulus (Young's modulus) of the light transmitting member 106 is set to be larger than 18 GPa, it is necessary to form the light transmitting member 106 extremely thin so as to be easily deformed when the inside of the opening O is depressurized. For example, when the light transmitting member 106 is formed by injection molding, the resin does not flow into a thin portion, which causes a molding failure. On the other hand, if the tensile elastic modulus (Young's modulus) of the light transmitting member 106 is less than 0.01 GPa, the rigidity of the material itself becomes low, and it becomes difficult to maintain its own shape, and the target shape is placed at a target position. Positioning becomes difficult. The material of the light-transmitting member 106 has a tensile modulus of elasticity (Young's modulus) within the range of 6 to 10 GPa in order to balance the easy-deformability, moldability, and positioning properties of the light-transmitting member 106 at a higher level. It is more preferable to select or adjust. This tensile elastic modulus (Young's modulus) conforms to the provisions of JIS K7161, and a test specimen described in JIS K7162 is attached to a tensile tester, and a stress-strain curve is drawn from stress and strain (deformation amount), and the slope is plotted. Can be obtained from In this case, if the stress-strain curve is not linear and it is difficult to calculate the slope, use a secant coefficient (slope of the straight line connecting the point on the stress-strain curve and the origin) as an alternative coefficient of Young's modulus. Can be.

また、本実施形態の接合構造体100では、図1(a)に示すように、環状の溶着部104に隣接した位置に、光吸収性部材102と光透過性部材106とを接合する点状の溶着部114が設けられている。これにより、光吸収性部材102及び光透過性部材106同士の接合強度はより一層高められている。   In addition, in the joint structure 100 of the present embodiment, as shown in FIG. 1A, a point-shaped joint between the light absorbing member 102 and the light transmitting member 106 is provided at a position adjacent to the annular welded portion 104. Is provided. Thereby, the bonding strength between the light absorbing member 102 and the light transmitting member 106 is further increased.

点状の溶着部114は、環状の溶着部104と同様、レーザ光を光透過性部材106側から光吸収性部材102へ向けて照射することにより形成することができる。点状の溶着部114は、光透過性部材106が略矩形の場合にはコーナー部に隣接して形成することが好ましく、これによれば、点状の溶着部114が、環状の溶着部104を形成する際の光透過性部材106の熱変形による反りを効果的に抑制して、開口部O内の減圧時に、薄板状の光透過性部材106の易変形による密着効果と相俟って、光透過性部材106及び光吸収性部材102同士のより一層優れた吸引密着性を得ることができる。   As in the case of the annular welded portion 104, the dotted welded portion 114 can be formed by irradiating laser light from the light transmissive member 106 side to the light absorbing member 102. When the light-transmitting member 106 is substantially rectangular, it is preferable that the dot-shaped welded portion 114 is formed adjacent to the corner portion. The warp due to thermal deformation of the light transmissive member 106 during the formation of the surface is effectively suppressed, and when the pressure in the opening O is reduced, the thin plate-shaped light transmissive member 106 is easily deformed in combination with the adhesion effect. Thus, even better suction adhesion between the light transmitting member 106 and the light absorbing member 102 can be obtained.

また、本実施形態の接合構造体100では、図1(b)中の拡大図で示すように、環状の溶着部104の延在方向に対する垂直断面でみて、溶着部104の光透過性部材106側の部分(当該図において境界面Fよりも上の部分であり、以下「第1部分」ともいう。)の面積S1に対する、光吸収性部材102側の部分(当該図において境界面Fよりも下の部分であり、以下、「第2部分」ともいう。)の面積S2の比は、12〜35の範囲内としている。当該比が12未満の場合には、光透過性部材106を光吸収性部材102から引き剥がすような力が加わった際に環状の溶着部104の境界を起点とした剥離(界面剥離)や溶着部104の光吸収性部材102側の部分の少なくとも一部が光透過性部材106に一体化した状態での剥離が発生する虞がある。また、この種の剥離は工業生産において非破壊で検査することは困難である。面積S1に対する面積S2の比率が12以上では、溶着部104に剥離は生じ難く、光透過性部材106を光吸収性部材102から引き剥がすような力が加わった場合には、光透過性部材106又は光吸収性部材102自体が破壊する「部材破壊」となるため、溶着強度を設計(設定)するにあたり、部材102,106の強さを管理すればよく、安定して生産することができる。一方、上記比率が35を超えると光吸収性部材102の深くまでレーザ光を届かせるために、パワーを上げるかあるいは照射時間を長くする必要があるため、光透過性部材106への熱影響(隆起や気泡、表面上の溶け、焼けに伴う炭化や変色の発生)や光吸収性部材102への熱影響(焼けに伴う炭化、気泡の発生)が顕在化する虞がある。これらの熱影響の回避と溶着部104における剥離の抑制、防止をより高次元で実現するためには、面積S1に対する面積S2の比率は19〜26の範囲内とすることがより好ましい。   Further, in the joint structure 100 of the present embodiment, as shown in an enlarged view in FIG. 1B, the light transmitting member 106 of the welded portion 104 is viewed in a cross section perpendicular to the extending direction of the annular welded portion 104. A portion on the light-absorbing member 102 side (the portion above the boundary surface F in the figure) with respect to the area S1 of the portion on the side (the portion above the boundary surface F in the drawing, also referred to as the “first portion” hereinafter). The ratio of the area S2 of the lower part (hereinafter also referred to as “second part”) is in the range of 12 to 35. When the ratio is less than 12, peeling (interfacial peeling) or welding starting from the boundary of the annular welded portion 104 when a force for peeling the light transmissive member 106 from the light absorbing member 102 is applied. There is a possibility that peeling may occur when at least a part of the portion of the portion 104 on the light absorbing member 102 side is integrated with the light transmitting member 106. Also, this type of delamination is difficult to inspect nondestructively in industrial production. If the ratio of the area S2 to the area S1 is 12 or more, peeling is unlikely to occur in the welded portion 104, and when a force for peeling the light transmissive member 106 from the light absorbing member 102 is applied, the light transmissive member 106 Alternatively, since the light absorbing member 102 itself breaks down, the member 102, 106 can be stably produced by designing (setting) the welding strength by controlling the strength of the members 102, 106. On the other hand, if the above ratio exceeds 35, it is necessary to increase the power or lengthen the irradiation time in order to reach the laser beam to the depth of the light absorbing member 102, so that the thermal effect on the light transmitting member 106 ( There is a possibility that bulges, bubbles, melting on the surface, carbonization or discoloration due to burning) or thermal effects on the light absorbing member 102 (carbonization due to burning, generation of bubbles) may become apparent. In order to avoid these heat effects and to suppress and prevent peeling at the welded portion 104 with higher dimensions, the ratio of the area S2 to the area S1 is more preferably in the range of 19 to 26.

このように溶着部104の光透過性部材側部分の面積S1に対する、光吸収性部材側部分の面積S2の比を上記範囲内とすることで、接合強度を確保しつつ、環状の溶着部104の形成に伴う光透過性部材106への熱影響を小さくし光透過性部材106の熱歪みを抑制することができるため、開口部O内の減圧時に、薄板状の光透過性部材106の易変形による密着効果と相俟って光透過性部材106及び光吸収性部材102同士のより一層優れた吸引密着性を得ることができる。   As described above, by setting the ratio of the area S2 of the light absorbing member side portion to the area S1 of the light transmitting member side portion of the welding portion 104 within the above range, the annular welding portion 104 can be secured while maintaining the bonding strength. Since the thermal effect on the light transmitting member 106 due to the formation of the light transmitting member 106 can be reduced and the heat distortion of the light transmitting member 106 can be suppressed, the thin plate-shaped light transmitting member 106 can easily be formed when the pressure in the opening O is reduced. In addition to the adhesion effect due to the deformation, it is possible to obtain more excellent suction adhesion between the light transmitting member 106 and the light absorbing member 102.

なお、上記比率下の面積S1,S2を有する溶着部104は、図8を参照して後述する接合構造体の製造方法により形成することができる。また、面積S1及びS2を算出するにあたり、溶着部104の範囲(境界)は、接合構造体100を溶着部104の延在方向に対する直交方向にカットして試験片を作成し、その断面を光学顕微鏡または電子顕微鏡で観察することや、X線CTを用いた断層画像を確認することで判断することができる。   Note that the welded portion 104 having the areas S1 and S2 under the above ratio can be formed by a method for manufacturing a joint structure described later with reference to FIG. In calculating the areas S1 and S2, the range (boundary) of the welded portion 104 is cut in a direction perpendicular to the extending direction of the welded portion 104 to form a test piece, and the cross section of the test piece is optically obtained. The determination can be made by observing with a microscope or an electron microscope, or by confirming a tomographic image using X-ray CT.

ところで、光透過性部材106を射出成形により製造する場合、ゲートの位置や溶融樹脂の流れ方、金型から取り出した後の冷却不均一等を起因として、光透過性部材106に下面側へ凸となる反り又は上面側へ凸となる反りが発生することがある。下面側へ凸となる反りは、光透過性部材106を光吸収性部材102に重ね合わせた際に光透過性部材106の周縁部と光吸収性部材102の周壁108の上端面との間に隙間を生じさせることになるため好ましくない。そこで、本実施形態では、光透過性部材106の下面(光吸収性部材102側の面)に板厚を減じた凹部116を環状の溶着部104の内側領域の50%以上に亘って形成し、これにより反りの方向を上面側へ凸となる方向に誘導している。凹部116の形成領域が、環状の溶着部104の内側領域の50%未満の場合には、反りの原因である樹脂材料の収縮に関して、光透過性部材106全体の反りを誘導するほどの十分な力を得ることができない虞がある。また、反りの量が過大となるのを防ぐため、凹部116の深さは板厚の50%以下とすることが好ましい。凹部116の深さが板厚の50%を超える場合には、反りの原因である樹脂材料の収縮に関して、光透過性部材106の剛性が低下してねじれが発生するため、吸引密着させる際に光透過性部材106及び光吸収性部材102間に隙間が生じて密着が不十分な状態となり、位置ずれや溶着不具合(熱が伝わらないことによる過度な温度上昇や未溶融)が発生する虞がある。   When the light-transmitting member 106 is manufactured by injection molding, the light-transmitting member 106 projects downward from the mold due to the position of the gate, the flow of the molten resin, uneven cooling after being taken out of the mold, and the like. Or a warp that is convex toward the upper surface side may occur. The warpage convex to the lower surface side is caused between the peripheral edge of the light transmitting member 106 and the upper end surface of the peripheral wall 108 of the light absorbing member 102 when the light transmitting member 106 is superimposed on the light absorbing member 102. It is not preferable because a gap is generated. Therefore, in the present embodiment, the concave portion 116 having a reduced thickness is formed on the lower surface (the surface on the light absorbing member 102 side) of the light transmitting member 106 over 50% or more of the inner region of the annular welded portion 104. Thereby, the direction of the warp is guided in a direction protruding toward the upper surface. When the area where the concave portion 116 is formed is less than 50% of the inner area of the annular welded portion 104, the shrinkage of the resin material which causes the warpage is sufficient to induce the warpage of the entire light transmitting member 106. There is a possibility that power cannot be obtained. Further, in order to prevent the amount of warpage from becoming excessive, the depth of the concave portion 116 is preferably set to 50% or less of the plate thickness. If the depth of the concave portion 116 exceeds 50% of the plate thickness, the rigidity of the light-transmitting member 106 is reduced due to the contraction of the resin material, which is a cause of warpage, and twisting occurs. A gap is formed between the light transmitting member 106 and the light absorbing member 102, resulting in insufficient adhesion, which may cause misalignment or welding failure (excessive temperature rise or unmelting due to non-transmission of heat). is there.

図2を参照し、本発明に従う他の実施形態の接合構造体200について説明する。この
実施形態の接合構造体200は、光吸収性部材202に複数の開口部Oが形成されている
点で先の実施形態の接合構造体100とは異なる。
With reference to FIG. 2, a description will be given of a joint structure 200 according to another embodiment of the present invention. The joint structure 200 of this embodiment differs from the joint structure 100 of the previous embodiment in that a plurality of openings O are formed in the light absorbing member 202.

具体的には、光吸収性部材202は、周壁208の上端部に繋がる天壁218を有し、該天壁218には同一方向へ延在する複数のスリット220が穿設されて開口部Oが区画されている。天壁218は、光透過性部材206の上面に外部から衝撃や荷重が加わった場合において光透過性部材206の撓み変形を規制するため、光透過性部材206や溶着部204,214が破損されるのを防ぐことができる。さらに天壁218は梁のように作用するため、光吸収性部材202の周壁208を補強することができる。   Specifically, the light absorbing member 202 has a top wall 218 connected to the upper end of the peripheral wall 208, and a plurality of slits 220 extending in the same direction are formed in the top wall 218 so that the opening O Is partitioned. The top wall 218 restricts the bending deformation of the light transmitting member 206 when an impact or a load is applied to the upper surface of the light transmitting member 206 from the outside, so that the light transmitting member 206 and the welded portions 204 and 214 are damaged. Can be prevented. Further, since the top wall 218 acts like a beam, the peripheral wall 208 of the light absorbing member 202 can be reinforced.

また、光透過性部材206の凹部216は、上述のように光透過性部材206の反りの方向及び量を制御する効果をもたらすが、これに加えて、光透過性部材206と天壁218の間に隙間を維持し、開口部Oを減圧した際に光透過性部材206が天壁218に接触して陰圧の受圧面積が減少するのを防止することができる。陰圧の受圧面積が減少すると、光透過性部材206を真空圧で十分に変形させることができなくなり、光透過性部材206及び光吸収性部材202間の吸引密着性が損なわれる虞がある。これを防止する観点においても、光透過性部材206に形成する凹部216の形成領域は、環状の溶着部104の内側領域の50%以上とすることが好ましい。   The concave portion 216 of the light transmitting member 206 has an effect of controlling the direction and amount of warpage of the light transmitting member 206 as described above. In addition, the concave portion 216 of the light transmitting member 206 and the top wall 218 have the same effect. By maintaining a gap therebetween, it is possible to prevent the light transmissive member 206 from contacting the top wall 218 when the opening O is depressurized, thereby preventing the negative pressure receiving area from decreasing. When the negative pressure receiving area decreases, the light transmitting member 206 cannot be sufficiently deformed by the vacuum pressure, and there is a possibility that the suction adhesion between the light transmitting member 206 and the light absorbing member 202 may be impaired. Also from the viewpoint of preventing this, it is preferable that the formation area of the concave portion 216 formed in the light transmitting member 206 be 50% or more of the inner area of the annular welded portion 104.

本実施形態の接合構造体200においても、先の実施形態の接合構造体100と同様、環状の溶着部204は、その延在方向に対する垂直断面でみて、光透過性部材206側の部分の面積S1に対する光吸収性部材202側の部分の面積S2の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   Also in the joint structure 200 of the present embodiment, similarly to the joint structure 100 of the previous embodiment, the annular welded portion 204 has an area of a portion on the light transmitting member 206 side when viewed in a cross section perpendicular to the extending direction. The ratio of the area S2 of the portion on the light absorbing member 202 side to S1 is in the range of 12 to 35, and more preferably in the range of 19 to 26.

図3を参照し、本発明に従う他の実施形態の接合構造体300について説明する。この実施形態の接合構造体300は、光透過性部材300の、環状の溶着部304よりも外側位置に、環状の溶着部304が形成される前の状態で開口部O内が減圧状態とされた場合に変形して光吸収性部材302の周壁308の上端面に密着する薄肉片324を設けた点で先の実施形態の接合構造体100,200とは異なる。これにより、光透過性部材306を光吸収性部材302に重ね合わせた際に、光吸収性部材302の周壁308の上端面と光透過性部材306との間に隙間が生じている場合でも、吸引開口312を通じて開口部O内を減圧した際に光透過性部材306の薄肉片324を光吸収性部材302の周壁308の上端面に引き寄せて密着させることができるため、空気漏れによる真空破壊を防止し光透過性部材306及び光吸収性部材302同士で優れた吸引密着性を得ることができる。   Referring to FIG. 3, a description will be given of a joint structure 300 according to another embodiment of the present invention. In the joint structure 300 of this embodiment, the inside of the opening O is decompressed at a position outside the annular welded portion 304 of the light transmitting member 300 before the annular welded portion 304 is formed. This is different from the joint structures 100 and 200 of the previous embodiment in that a thin piece 324 is provided which is deformed in the case where the thin portion 324 is brought into close contact with the upper end surface of the peripheral wall 308 of the light absorbing member 302. Accordingly, when the light transmitting member 306 is superimposed on the light absorbing member 302, even when a gap is formed between the upper end surface of the peripheral wall 308 of the light absorbing member 302 and the light transmitting member 306, When the inside of the opening O is depressurized through the suction opening 312, the thin piece 324 of the light transmitting member 306 can be drawn to and adhered to the upper end surface of the peripheral wall 308 of the light absorbing member 302, so that vacuum breakage due to air leakage can be prevented. Thus, excellent suction adhesion can be obtained between the light transmitting member 306 and the light absorbing member 302.

これをより確実にするため、薄肉片324は、環状の溶着部304が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材302に密着する易変形性を発揮する厚みに形成されていることが好ましい。具体的には、十分な変形による密着性を確保するため、薄肉片の厚みは、0.005mm〜0.2mmとすることが好ましく、成形性を考慮すると0.01mm〜0.1mmとすることがより好ましい。   In order to ensure this, the thin piece 324 deforms when the inside of the opening O is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion 304 is formed, It is preferable that it is formed to a thickness that exhibits easy deformability in close contact with the light absorbing member 302. Specifically, the thickness of the thin piece is preferably set to 0.005 mm to 0.2 mm in order to secure adhesion due to sufficient deformation, and 0.01 mm to 0.1 mm in consideration of formability. Is more preferred.

図3に示す例では、薄肉片324は、光透過性部材306の周縁部下端から光吸収性部材302の周壁308の上端面に沿うように水平に形成されているが、これに限らず、図4(a)に示すように周壁308の外周面に沿うように光透過性部材306の周縁部下端から垂下させてもよく、あるいは図4(b)に示すように、光吸収性部材302の周壁308の上端面に環状溝326を形成するとともに、光透過性部材306の下面から薄肉片324を垂下させ環状溝326内に挿入するようにしてもよい。   In the example shown in FIG. 3, the thin piece 324 is formed horizontally so as to extend along the upper end surface of the peripheral wall 308 of the light absorbing member 302 from the lower end of the peripheral portion of the light transmitting member 306, but is not limited thereto. As shown in FIG. 4A, the light-transmissive member 306 may hang down from the lower end of the peripheral edge along the outer peripheral surface of the peripheral wall 308, or as shown in FIG. An annular groove 326 may be formed on the upper end surface of the peripheral wall 308, and the thin piece 324 may be hung down from the lower surface of the light transmitting member 306 and inserted into the annular groove 326.

本実施形態の接合構造体300においても、先の実施形態の接合構造体100,200と同様、環状の溶着部304は、その延在方向に対する垂直断面でみて、光透過性部材306側の部分の面積S1に対する光吸収性部材302側の部分の面積S2の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   Also in the joint structure 300 of the present embodiment, like the joint structures 100 and 200 of the previous embodiment, the annular welded portion 304 has a portion on the light transmitting member 306 side when viewed in a cross section perpendicular to the extending direction. The ratio of the area S2 of the portion on the light absorbing member 302 side to the area S1 is within the range of 12 to 35, and more preferably within the range of 19 to 26.

次に、図5〜図9を参照して、本発明に従う一実施形態の接合構造体の製造方法について説明する。なお、ここでは図1に示した接合構造体100を製造する方法を例にとり説明するが、この製造方法は、図2〜図4に示した接合構造体200,300を製造する場合にも適用することができる。   Next, with reference to FIGS. 5 to 9, a description will be given of a method for manufacturing a joint structure according to an embodiment of the present invention. Here, a method for manufacturing the joint structure 100 shown in FIG. 1 will be described as an example, but this manufacturing method is also applied to a case where the joint structures 200 and 300 shown in FIGS. can do.

まず、第1の工程は部材準備工程であり、この工程では光吸収性部材102及び光透過性部材106を準備する。光吸収性部材102及び光透過性部材106の材料及び基本的な構造については、接合構造体100について図1を参照して説明したとおりであるため、重複する説明は省略する。   First, the first step is a member preparing step, in which the light absorbing member 102 and the light transmitting member 106 are prepared. The material and the basic structure of the light absorbing member 102 and the light transmitting member 106 are as described with reference to FIG. 1 for the joint structure 100, and thus the overlapping description will be omitted.

図5は、光透過性部材106との接合前の光吸収性部材102を示し、(a)は平面図であり、(b)は(a)中のD−D線に沿う断面図である。この図に示すように、光吸収性部材102の周壁108の上端面(光透過性部材106と当接する面)であって、環状の溶着部104の形成予定部位には環状溝130を予め形成しておく。環状溝130の幅は、そこに照射されるレーザ光の径よりも大きくしておくことが好ましく、例えば、0.1mm〜3mmとすることが好ましい。環状溝130の幅が0.1mm未満の場合には、そこに形成される環状の溶着部104の幅を十分に確保できず、溶着強度が低下するため、外力や圧力変動によって空気や水、埃が浸透し気密性能等を維持できなくなる虞がある。一方、環状溝130の幅が3mmを超えると、溶着時の熱によって環状の溶着部104以外の部分が熱の影響を受けて変形したり、環状の溶着部104が固化する際の熱収縮によって部品に過度のひずみが残り、変形したりする虞がある。また、環状溝130の深さ(境界面Fから溝底までの距離)は、環状溝130の幅をL(mm)として、L/20(mm)以上L(mm)以下とすることが好ましく、このようにすれば、図8を参照して後述するように、環状溝130へのレーザ光照射により溝底に発生した溶融池を十分に膨張させることができとともに、その熱を過不足なく光透過性部材106へ伝達させることができ、良好な溶着部104を形成することができる。さらに、環状溝130の深さは、L/10(mm)以上L/3(mm)以下とすることが、溶着部104の強度及び気密性を確保する点で好ましい。例えば、環状溝130は、溝幅Lを0.3mm、溝深さを0.05(=L/6)mmとすることができる。溶着部130の深さがL/20(mm)未満であり浅すぎると、環状溝130の溝底へのレーザ光の照射後直ぐに、膨張した溶融池が光透過性部材106に接触するとともに熱が拡散し、溶融池を十分に横方向へ広げることができず、溶着不良となる(環状溝130の一部が残ったままとなる)虞がある。溶着部130の深さがL(mm)を超え深すぎると、環状溝130の溝底で発生した溶融池が膨張するものの光透過性部材106まで到達できず、その場で焼けに伴う炭化や変色が発生し、溶着不良となる虞がある。なお、図示例において環状溝130の断面形状は矩形であるが、半円形状または半楕円形状であってもよい。また、周壁108の上端面には、環状溝130と開口部O内とを連通する少なくとも1つ(図示例では各辺に対応して4つ)の連通溝132を予め形成しておく。   5A and 5B show the light absorbing member 102 before being bonded to the light transmitting member 106, wherein FIG. 5A is a plan view, and FIG. 5B is a cross-sectional view along line DD in FIG. . As shown in this figure, an annular groove 130 is formed in advance on the upper end surface of the peripheral wall 108 of the light absorbing member 102 (the surface that comes into contact with the light transmitting member 106), where the annular welded portion 104 is to be formed. Keep it. It is preferable that the width of the annular groove 130 be larger than the diameter of the laser beam applied thereto, and for example, it is preferable that the width be 0.1 mm to 3 mm. When the width of the annular groove 130 is less than 0.1 mm, the width of the annular welded portion 104 formed there cannot be sufficiently secured, and the welding strength is reduced. There is a possibility that the dust may penetrate and the hermetic performance or the like cannot be maintained. On the other hand, when the width of the annular groove 130 exceeds 3 mm, portions other than the annular welded portion 104 are deformed under the influence of heat due to heat at the time of welding, or due to heat shrinkage when the annular welded portion 104 is solidified. There is a possibility that excessive strain remains in the part and the part is deformed. Further, it is preferable that the depth of the annular groove 130 (the distance from the boundary surface F to the groove bottom) is L / 20 (mm) or more and L (mm) or less, where L is the width of the annular groove 130 (mm). In this way, as described later with reference to FIG. 8, the molten pool generated at the bottom of the annular groove 130 by irradiating the annular groove 130 with the laser beam can be sufficiently expanded, and the heat can be sufficiently and sufficiently supplied. The light can be transmitted to the light transmissive member 106, and a good welded portion 104 can be formed. Further, it is preferable that the depth of the annular groove 130 is not less than L / 10 (mm) and not more than L / 3 (mm) in terms of securing the strength and the airtightness of the welded portion 104. For example, the annular groove 130 can have a groove width L of 0.3 mm and a groove depth of 0.05 (= L / 6) mm. If the depth of the welded portion 130 is less than L / 20 (mm) and is too shallow, the expanded molten pool comes into contact with the light transmitting member 106 immediately after the laser beam is irradiated to the groove bottom of the annular groove 130 and heat is generated. Is diffused, and the molten pool cannot be sufficiently expanded in the lateral direction, which may result in poor welding (a part of the annular groove 130 remains). If the depth of the welded portion 130 exceeds L (mm) and is too deep, the molten pool generated at the groove bottom of the annular groove 130 expands, but cannot reach the light transmitting member 106, and carbonization due to burning on the spot may occur. Discoloration may occur, resulting in poor welding. Although the cross-sectional shape of the annular groove 130 is rectangular in the illustrated example, it may be semicircular or semi-elliptical. At least one (four in the illustrated example, four corresponding to each side) communication groove 132 that connects the annular groove 130 and the inside of the opening O is formed in advance on the upper end surface of the peripheral wall 108.

第2の工程は、図6(a)に示すように、光吸収性部材102の上に光透過性部材106を開口部Oを覆うように配置する配置工程である。   The second step is an arrangement step of disposing a light transmitting member 106 on the light absorbing member 102 so as to cover the opening O, as shown in FIG.

第3の工程は、互いに重ね合わされた光吸収性部材102と光透過性部材106を吸引密着させる吸引密着工程であり、かかる吸引密着は開口部O内を減圧することにより行う。図6(b)の左図に光透過性部材106を光吸収性部材102に重ねた後の様子を示すように、光透過性部材106と光吸収性部材102との間には、光透過性部材106の成形時の反りや後述するレーザ光による溶着時の熱変形等に起因して隙間が生じる場合があるが、光透過性部材106を薄板状に形成したことから、図6(b)の右図に示すように、開口部O内を減圧することにより光透過性部材106の周縁部を周壁108の上端面に引き寄せるように変形させ、該上端面に密着させることができる。   The third step is a suction and adhesion step in which the light-absorbing member 102 and the light-transmitting member 106 that are superimposed on each other are suction-adhered, and the suction adhesion is performed by reducing the pressure in the opening O. As shown in the left view of FIG. 6B after the light transmitting member 106 is overlaid on the light absorbing member 102, light transmitting between the light transmitting member 106 and the light absorbing member 102. In some cases, a gap may be formed due to warpage during molding of the transparent member 106 or thermal deformation during welding by laser light, which will be described later. However, since the light-transmitting member 106 is formed in a thin plate shape, FIG. As shown in the right diagram of FIG. 7), by reducing the pressure in the opening O, the peripheral portion of the light transmitting member 106 can be deformed so as to be drawn toward the upper end surface of the peripheral wall 108 and can be brought into close contact with the upper end surface.

開口部O内の減圧は、具体的には、図7に示すような外部の圧力調整装置Dを用い、光吸収性部材102に予め形成した吸引開口112を通じて行うことができる。   Specifically, the pressure in the opening O can be reduced through the suction opening 112 formed in the light absorbing member 102 using an external pressure adjusting device D as shown in FIG.

圧力調整装置Dは主として、減圧装置D1と、加圧装置D2と、制御器D3と、吸引開口112に接続される二重配管Pとからなる。   The pressure adjusting device D mainly includes a pressure reducing device D1, a pressurizing device D2, a controller D3, and a double pipe P connected to the suction opening 112.

減圧装置D1は、開口部O内の空気を吸引排気するための真空ポンプと電動のリークバルブとを有している(図示省略)。減圧装置D1の吸引ラインL1には、圧力センサPG1が設けられており、これにより減圧時の開口部O内の圧力を検出することができる。   The pressure reducing device D1 has a vacuum pump for sucking and discharging air in the opening O and an electric leak valve (not shown). A pressure sensor PG1 is provided on the suction line L1 of the decompression device D1, so that the pressure in the opening O at the time of decompression can be detected.

加圧装置D2は、空気又は窒素やアルゴン等の不活性ガスからなるパージガスを供給するための加圧タンクと供給バルブとを有している(図示省略)。加圧装置D2の供給ラインL2には、圧力センサPG2が設けられており、これにより加圧時において開口部O内の圧力を検出することができる。   The pressurizing device D2 has a pressurizing tank for supplying a purge gas composed of air or an inert gas such as nitrogen or argon, and a supply valve (not shown). The supply line L2 of the pressurizing device D2 is provided with a pressure sensor PG2, which can detect the pressure in the opening O during pressurization.

制御器D3は、PLC(プログラマブルロジックコントローラ)やパーソナルコンピュータ等によって構成され、供給バルブ及びリークバルブの開度を調整する。また、圧力センサPG1,PG2も制御器D3に接続し、圧力センサPG1,PG2の検出信号に基づき上記供給バルブ及びリークバルブを制御することもできる。   The controller D3 is configured by a PLC (programmable logic controller), a personal computer, or the like, and adjusts the opening of the supply valve and the leak valve. Further, the pressure sensors PG1 and PG2 can also be connected to the controller D3 to control the supply valve and the leak valve based on the detection signals of the pressure sensors PG1 and PG2.

二重配管Pは、外側に配置された吸引配管p1と内側に配置された供給配管p2からなる。吸引配管p1は開口部O内と減圧装置D1とを連通し、開口部O内の空気を吸引する。供給配管p2は、開口部O内と加圧装置D2とを連通し、開口部O内にパージガスを供給する。図示は省略するが、二重配管Pの外側の配管を供給配管とし、内側の配管を吸引配管とすることもできるが、図示例のように、外側に吸引配管p1を配置する方が、溶着時に発生するガスを効率的に除去できる点で好ましい。   The double pipe P includes a suction pipe p1 arranged outside and a supply pipe p2 arranged inside. The suction pipe p1 communicates the inside of the opening O with the decompression device D1, and sucks the air in the opening O. The supply pipe p2 communicates the inside of the opening O with the pressurizing device D2, and supplies the purge gas into the opening O. Although illustration is omitted, the outer pipe of the double pipe P can be used as a supply pipe, and the inner pipe can be used as a suction pipe. This is preferable in that the gas generated sometimes can be efficiently removed.

第4の工程は、図7に示すように、光吸収性部材102と光透過性部材106とを吸引密着した状態で、レーザ光LBを光透過性部材106側から光吸収性部材102の周壁108の上端面へ向けて照射し、光吸収性部材102と光透過性部材106の境界面Fまたはその近傍に環状の溶着部104及び点状の溶着部114(図1参照)を形成して光吸収性部材102及び光透過性部材106同士を接合する接合工程である。   In the fourth step, as shown in FIG. 7, in a state where the light absorbing member 102 and the light transmitting member 106 are in close contact with each other by suction, the laser beam LB is applied from the light transmitting member 106 side to the peripheral wall of the light absorbing member 102. Irradiation is performed toward the upper end surface of the light-absorbing member 108 to form an annular welded portion 104 and a dot-like welded portion 114 (see FIG. 1) at or near the boundary surface F between the light absorbing member 102 and the light transmitting member 106. This is a joining step of joining the light absorbing member 102 and the light transmitting member 106 to each other.

この接合工程においても引き続き開口部O内の減圧状態は維持するが、少なくとも環状の溶着部104を形成する間は、供給配管p2を介して開口部O内にパージガスを供給することが好ましい。このようにすれば、開口部O内に空気の流れを発生させることができ、溶着時に生じる煤や難燃剤の気化成分vを吸引配管p1を通じて効率的に外部に排出、除去することができる。   In this joining step, the pressure-reduced state in the opening O is maintained, but it is preferable to supply a purge gas into the opening O via the supply pipe p2 at least while the annular welded portion 104 is formed. In this way, a flow of air can be generated in the opening O, and soot and the vaporized component v of the flame retardant generated at the time of welding can be efficiently discharged and removed to the outside through the suction pipe p1.

そして、溶着部104,114を形成するにあたっては、まず点状の溶着部114を形成し、その後に、環状の溶着部104を形成する。これは、光透過性部材106への熱負荷が比較的小さい点状の溶着部114により光透過性部材106を光吸収性部材102に仮接合することで、その後に熱負荷の比較的大きい環状の溶着部104を形成した際の光透過性部材106の熱変形を抑制し、該熱変形に起因した空気漏れによる真空破壊を防止するためである。環状の溶着部104の溶着が進むにつれて、真空の受圧面積が減るため、その陰圧分を補う点では点状の溶着部114は平面を形成できる3点以上設けることが好ましい。この例では、点状の溶着部114は、光透過性部材106のコーナー部に隣接して4箇所に形成する。   Then, in forming the welded portions 104 and 114, first, a dot-shaped welded portion 114 is formed, and then the annular welded portion 104 is formed. This is because the light-transmitting member 106 is temporarily joined to the light-absorbing member 102 by a point-like welded portion 114 having a relatively small heat load on the light-transmitting member 106, and thereafter, an annular shape having a relatively large heat load is applied. This is for suppressing thermal deformation of the light transmissive member 106 when the welded portion 104 is formed and preventing vacuum breakage due to air leakage caused by the thermal deformation. As the welding of the annular welding portion 104 progresses, the pressure receiving area of the vacuum decreases, so that in order to compensate for the negative pressure, it is preferable to provide three or more point welding portions 114 that can form a plane. In this example, the dot-shaped welded portions 114 are formed at four locations adjacent to the corners of the light transmitting member 106.

点状の溶着部114は、光学ヘッドH(図7)を光透過性部材106の上方で停止させた状態でレーザ光LBを光吸収性部材102の周壁108の上端面に照射することで形成される。点状の溶着部114の径は、約0.3〜0.7mmとすることが好ましく、約0.5mmとすることがより好ましい。環状の溶着部104は、光学ヘッドHを光透過性部材106の上方において光吸収性部材102の周壁108に沿って移動させながらレーザ光LBを周壁108上端面に照射することで形成される。環状の溶着部104の幅は、約0.3〜0.7mmとすることが好ましく、約0.5mmとすることがより好ましい。なお、レーザ光LBの発信器としては、例えば、ファイバレーザ(波長:1070nm)やYAGレーザ(波長:1064nm)、半導体レーザ(波長:808nm,840nmまたは940nm)、CO2レーザ(波長:10600nm)などを用いることができる。   The point-like welded portion 114 is formed by irradiating the laser beam LB to the upper end surface of the peripheral wall 108 of the light absorbing member 102 with the optical head H (FIG. 7) stopped above the light transmitting member 106. Is done. The diameter of the spot-shaped welded portion 114 is preferably about 0.3 to 0.7 mm, and more preferably about 0.5 mm. The annular welded portion 104 is formed by irradiating the upper end surface of the peripheral wall 108 with the laser beam LB while moving the optical head H along the peripheral wall 108 of the light absorbing member 102 above the light transmitting member 106. The width of the annular welded portion 104 is preferably about 0.3 to 0.7 mm, and more preferably about 0.5 mm. As a transmitter of the laser beam LB, for example, a fiber laser (wavelength: 1070 nm), a YAG laser (wavelength: 1064 nm), a semiconductor laser (wavelength: 808 nm, 840 nm or 940 nm), a CO2 laser (wavelength: 10600 nm), or the like is used. Can be used.

ここで図8(a)〜(d)を参照し、光吸収性部材102の周壁108の上端面に予め形成した環状溝130にレーザ光LBを照射することにより、図1で説明した第1部分の面積S1に対する第2部分の面積S2の比率が12〜35となる環状の溶着部104を形成するプロセスについて説明する。   Here, with reference to FIGS. 8A to 8D, by irradiating the annular groove 130 formed in advance on the upper end surface of the peripheral wall 108 of the light absorbing member 102 with the laser light LB, the first groove illustrated in FIG. A process for forming the annular welded portion 104 in which the ratio of the area S2 of the second portion to the area S1 of the portion is 12 to 35 will be described.

図8(a)に示すように、光吸収性部材102と光透過性部材106を互いに吸引密着させた状態で、光透過性部材106側から環状溝130の溝底にレーザ光を照射すると、図8(b)に示すように環状溝130の溝底が発熱して溶融し、溶融池内で発泡が開始される。引き続きレーザ光を照射すると、図8(c)に示すように発泡が成長して溶融池が成長する。このとき、環状溝130の存在により、光吸収性部材102の溶融池は直ぐには光透過性部材106に接触せず、溶融池は十分な幅及び深さとなるまで成長させることができる。図8(d)には、溶融池が光透過性部材106に到達した後にレーザ光の照射を停止し、環状の溶着部104の形成が完了した状態を示している。   As shown in FIG. 8A, when the light-absorbing member 102 and the light-transmitting member 106 are brought into close contact with each other by suction, laser light is applied to the groove bottom of the annular groove 130 from the light-transmitting member 106 side. As shown in FIG. 8B, the groove bottom of the annular groove 130 generates heat and melts, and foaming starts in the molten pool. When the laser beam is subsequently irradiated, foaming grows and a molten pool grows as shown in FIG. At this time, due to the presence of the annular groove 130, the molten pool of the light absorbing member 102 does not immediately contact the light transmitting member 106, and the molten pool can be grown to a sufficient width and depth. FIG. 8D shows a state in which the irradiation of the laser beam is stopped after the molten pool reaches the light transmitting member 106, and the formation of the annular welded portion 104 is completed.

また、本実施形態では、光吸収性部材102の周壁108の上端面に環状溝130と開口部Oとを連通する連通溝132を設けているため、環状の溶着部104の形成過程で生じる煤や難燃剤の気化成分vは、環状溝130及び連通溝132を通って開口部O内に吸引、排出され、最終的には、吸引配管p1により外部に排出される。   In the present embodiment, since the communication groove 132 that connects the annular groove 130 and the opening O is provided on the upper end surface of the peripheral wall 108 of the light-absorbing member 102, the soot generated in the process of forming the annular welded portion 104 is formed. The vaporized component v of the flame retardant is sucked and discharged into the opening O through the annular groove 130 and the communication groove 132, and finally discharged to the outside through the suction pipe p1.

第5の工程は、環状の溶着部104を形成した後に引き続き開口部O内の減圧を保持し、または開口部O内を加圧し、あるいは減圧と加圧を交互に行い、その際の単位時間当たり圧力の変化を測定することによって環状の溶着部104の気密性試験を行う気密性検査工程である。開口部O内の圧力は、図7に示した圧力センサPG1,PG2で測定し、その単位時間当たりの圧力の変化は制御部D3で演算し、必要に応じて外部に出力ないし表示させることができる。あるいは、図示しない流量センサを吸引ラインL1又は供給ラインL2に設けておき、単位時間当たりの流量の変化を測定することにより、環状の溶着部104の気密性試験を行うこともできる。   The fifth step is to maintain the reduced pressure in the opening O after forming the annular welded portion 104, or to pressurize the inside of the opening O, or alternately perform the reduced pressure and the increased pressure, and perform the unit time at that time. This is an airtightness inspection step of performing an airtightness test of the annular welded portion 104 by measuring a change in the contact pressure. The pressure in the opening O is measured by the pressure sensors PG1 and PG2 shown in FIG. 7, and the change in pressure per unit time is calculated by the control unit D3, and can be externally output or displayed as necessary. it can. Alternatively, a flow rate sensor (not shown) may be provided in the suction line L1 or the supply line L2, and the airtightness test of the annular welded portion 104 may be performed by measuring a change in flow rate per unit time.

図示しない第6の工程は、環状の溶着部104の形成後に、開口部O内の減圧を維持したまま、光透過性部材106側からレーザ光LBを吸引開口112の内部又はその周囲に照射することによって吸引開口112を閉塞させる吸引開口閉鎖工程である。これにより、開口部O内の真空を保ったまま開口部O内を密閉することができる。勿論、吸引開口112は開放したままでもよい。   In a sixth step (not shown), after the formation of the annular welded portion 104, the laser beam LB is irradiated from the light transmitting member 106 side to the inside or around the suction opening 112 while maintaining the reduced pressure in the opening O. This is a suction opening closing step of closing the suction opening 112. Thus, the inside of the opening O can be sealed while the vacuum in the opening O is maintained. Of course, the suction opening 112 may be left open.

本実施形態の接合構造体の製造方法によれば、光吸収性部材102に開口部Oを設けておき、この開口部O内を減圧することによって光吸収性部材102と光透過性部材106を吸引密着させる構成としたので、両部材102,106を加圧密着するための従来のガラス板を不要とすることができ、上述したようなガラス板に起因する種々の問題を解消することができる。   According to the method for manufacturing a joint structure of the present embodiment, the light absorbing member 102 is provided with the opening O, and the pressure in the opening O is reduced so that the light absorbing member 102 and the light transmitting member 106 are separated. Since the suction and contact structure is adopted, the conventional glass plate for press-contacting the two members 102 and 106 can be eliminated, and the various problems caused by the glass plate as described above can be solved. .

また、開口部Oの減圧に伴い光透過性部材106を容易に変形可能に構成したことから、光透過性部材106を光吸収性部材102に重ね合わせた際にこれらの間に隙間が生じる場合でも開口部O内を減圧することにより光透過性部材106でこの隙間を閉鎖することができ、優れた吸引密着性を得ることができる。   In addition, since the light transmitting member 106 is configured to be easily deformable as the pressure of the opening O is reduced, a gap may be generated between the light transmitting member 106 and the light absorbing member 102 when the light transmitting member 106 is superimposed on the light absorbing member 102. However, by reducing the pressure in the opening O, the gap can be closed by the light transmitting member 106, and excellent suction adhesion can be obtained.

さらに、環状の溶着部104を形成するのに先立って、点状の溶着部114を形成して仮接合する構成としたことから、環状の溶着部104の形成途中での光透過性部材106の熱変形を抑制することができ、当該熱変形に起因した吸引密着性の低下を防止することができる。   Further, prior to the formation of the annular welded portion 104, the point-like welded portion 114 is formed and temporarily joined, so that the light transmitting member 106 is formed during the formation of the annular welded portion 104. Thermal deformation can be suppressed, and a decrease in suction adhesion due to the thermal deformation can be prevented.

さらに、光吸収性部材102の周壁108の上端面に環状溝130を形成し、この環状溝130にレーザ光LBを照射して環状の溶着部104を形成する構成としたことから、十分な幅及び深さの溶着部104を形成して高い接合強度を得ることができるのに加えて、光透過性部材106への熱影響を小さくし、溶着過程における光透過性部材106の熱変形を抑制することができ、当該熱変形に起因した吸引密着性の低下を防止することができる。   Further, an annular groove 130 is formed on the upper end surface of the peripheral wall 108 of the light absorbing member 102, and the annular groove 130 is irradiated with the laser beam LB to form the annular welded portion 104. In addition to being able to obtain high bonding strength by forming the welded portion 104 having a small depth and depth, the thermal effect on the light transmissive member 106 is reduced, and thermal deformation of the light transmissive member 106 during the welding process is suppressed. It is possible to prevent a decrease in suction adhesion due to the thermal deformation.

さらに、光吸収性部材102の周壁108の上端面に環状溝130と開口部Oを連通する連通溝132を設ける構成としたことから、環状の溶着部104の形成過程で生じる煤や難燃剤の気化成分vを、環状溝130及び連通溝132と介して開口部O内に吸引し、最終的には、吸引配管p1を介して外部に排出することができる。   Further, since the communication groove 132 communicating the annular groove 130 and the opening O is provided on the upper end surface of the peripheral wall 108 of the light absorbing member 102, soot and flame retardant generated in the process of forming the annular welded portion 104 are removed. The vaporized component v can be sucked into the opening O via the annular groove 130 and the communication groove 132, and finally discharged to the outside via the suction pipe p1.

さらに、開口部O内の減圧を該開口部O内にパージガスを供給しながら行う構成としたことにより、開口部O内に空気の流れを発生させ、煤や難燃剤の気化成分vを効率的に排出、除去することができる。   Further, by employing a configuration in which the pressure in the opening O is reduced while supplying the purge gas into the opening O, a flow of air is generated in the opening O, and the vaporized component v of soot and a flame retardant is efficiently removed. Can be discharged and removed.

さらに、環状の溶着部104を形成した後に引き続き開口部O内の減圧を保持し、または開口部O内を加圧し、あるいは減圧と加圧を交互に行い、その際の単位時間当たりの圧力又は流量の変化を測定することによって環状の溶着部104の気密性試験を行う場合には、製造設備を簡略化することができるのに加えて、製造時間を大幅に短縮することができる。   Further, after the annular welded portion 104 is formed, the pressure in the opening O is continuously maintained, or the pressure in the opening O is increased, or the pressure is reduced and increased alternately. When the airtightness test of the annular welded portion 104 is performed by measuring the change in the flow rate, the manufacturing equipment can be simplified and the manufacturing time can be greatly reduced.

さらに、開口部O内の圧力を圧力センサPG1で常時検出し、その圧力の変化に基づき、光吸収性部材102と光透過性部材106との密着、環状の溶着部104の形成開始、及び環状の溶着部104の形成完了の判別を行うようにした場合には、通常生産時の加工時間の短縮と、異常発生時の早期対応が可能となる。   Further, the pressure in the opening O is constantly detected by the pressure sensor PG1, and based on the change in the pressure, the light absorbing member 102 and the light transmitting member 106 are brought into close contact, the formation of the annular welded portion 104 is started, and When the completion of the formation of the welded portion 104 is determined, it is possible to reduce the processing time during normal production and to quickly respond to the occurrence of an abnormality.

以上、図示例に基づき本発明について説明したが、本発明は上述の実施形態に限定されず、特許請求の範囲の記載内で種々の変更、追加等を行うことが可能である。例えば、上述の実施形態の接合構造体の製造方法においては、溝底が平坦な環状溝130を図示したが、これに限らず、図9(a)に示すように、環状溝の溝底に隆起部134を設けてもよい。また、環状溝130は一つに限らず、図9(b)に示すように隣接して2つ設け、溶着時に合体して一つの幅広の溶着部104を形成するようにしてもよく、図9(c)に示すように、光透過性部材106側にも環状溝136を設けてもよい。   As described above, the present invention has been described based on the illustrated examples. However, the present invention is not limited to the above embodiments, and various changes, additions, and the like can be made within the scope of the claims. For example, in the method of manufacturing the joint structure according to the above-described embodiment, the annular groove 130 having a flat groove bottom is illustrated. However, the present invention is not limited to this. As illustrated in FIG. A raised portion 134 may be provided. Further, the number of the annular grooves 130 is not limited to one, and two annular grooves 130 may be provided adjacent to each other as shown in FIG. As shown in FIG. 9C, an annular groove 136 may be provided also on the light transmitting member 106 side.

(第1実施例)
本発明をコネクタに適用した例について説明する。図10は、図2に示した実施形態の接合構造体200の一実施例としてのコネクタを示し、(a)は斜視図であり、(b)は嵌合方向Xに沿った断面図である。図中、対応する部材又は部分には符号に「’」を加えて示し、重複した説明は省略する。
(First embodiment)
An example in which the present invention is applied to a connector will be described. 10A and 10B show a connector as one example of the joint structure 200 of the embodiment shown in FIG. 2, wherein FIG. 10A is a perspective view, and FIG. 10B is a cross-sectional view along the fitting direction X. . In the drawings, corresponding members or portions are indicated by adding “′” to the reference numerals, and redundant description will be omitted.

このコネクタ200’は、携帯機器や情報機器などの電子機器内の基板に固定され、嵌合方向Xに沿って挿入される図示しない相手方のコネクタに接続されるレセプタクルコネクタであり、主として、光吸収性部材202としてのハウジング202’と、それぞれ嵌合方向Xに延在しかつ嵌合方向Xに対して直交する方向に配列される複数のコンタクト203と、ハウジング202’の開口部O’を覆うとともに封止する、光透過性部材206としての薄板状のカバー206’とを備えるものである。   The connector 200 ′ is a receptacle connector that is fixed to a substrate in an electronic device such as a portable device or an information device, and is connected to a mating connector (not shown) inserted along the fitting direction X, and is mainly a light-absorbing connector. A housing 202 'as the conductive member 202, a plurality of contacts 203 each extending in the fitting direction X and arranged in a direction orthogonal to the fitting direction X, and covering the opening O' of the housing 202 '. And a thin plate-shaped cover 206 ′ as a light-transmitting member 206 for sealing.

ハウジング202’は、光吸収性かつ絶縁性の熱可塑性樹脂から形成されており、前方に相手方のコネクタが挿入される嵌合口212’を有する周壁208’と、底壁210’と、天壁218’とを有している。   The housing 202 ′ is made of a light-absorbing and insulating thermoplastic resin, and has a peripheral wall 208 ′ having a fitting opening 212 ′ into which a mating connector is inserted, a bottom wall 210 ′, and a top wall 218. 'And have.

ハウジング202’の天壁218’には、嵌合方向Xに沿って形成された複数のスリット220’が形成されており、該スリット220’により開口部O’が区画されている。各スリット220’内にはコンタクト203が配置されている。各コンタクト203の前方端部は相手方のコネクタとの接続のため天壁218’の内面より下方に突出し、その後方端部が電子機器の基板または他の配線板との接続のためハウジング202’から露出している。   A plurality of slits 220 'are formed in the top wall 218' of the housing 202 'along the fitting direction X, and the slits 220' define openings O '. A contact 203 is arranged in each slit 220 '. The front end of each contact 203 protrudes below the inner surface of the top wall 218 'for connection with the mating connector, and the rear end thereof is connected to the board of the electronic device or another wiring board from the housing 202'. It is exposed.

カバー206’は、ハウジング202’の開口部O’を覆うようにハウジング202’に重ね合わされ、すべてのスリット220’をまとめて囲繞するように形成された環状の溶着部204’を介して周壁208’の上端面に全周に亘って接合されている。これにより、嵌合口212’から電子機器内部へのスリット220’を介した空気や埃、水の浸水ルートは、カバー206’及び環状の溶着部204’によって遮断されている。また、環状の溶着部204’の外側には、カバー206’のコーナー部に隣接して4つの点状の溶着部214’が形成されている。   The cover 206 ′ is overlapped with the housing 202 ′ so as to cover the opening O ′ of the housing 202 ′, and the peripheral wall 208 ′ is formed through an annular welding portion 204 ′ formed so as to surround all the slits 220 ′. 'Is joined to the upper end surface over the entire circumference. Thus, the infiltration route of air, dust, and water through the slit 220 'from the fitting opening 212' to the inside of the electronic device is blocked by the cover 206 'and the annular welded portion 204'. Outside the annular welded portion 204 ', four dotted welded portions 214' are formed adjacent to the corners of the cover 206 '.

コネクタ200’において、環状の溶着部204’は、その延在方向に対する垂直断面でみて、カバー206’側の部分の面積S1’に対するハウジング202’側の部分の面積S2’の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   In the connector 200 ', the ratio of the area S2' of the portion on the housing 202 'side to the area S1' of the portion on the side of the cover 206 'is 12 to 35 when viewed in a cross section perpendicular to the extending direction of the annular welded portion 204'. And more preferably in the range of 19 to 26.

このようなコネクタ200’は、嵌合口212’を吸引開口212として、図5〜図8を参照して説明した実施形態の製造方法に従って製造することができる。   Such a connector 200 'can be manufactured according to the manufacturing method of the embodiment described with reference to FIGS. 5 to 8 using the fitting opening 212' as the suction opening 212.

(第2実施例)
本発明をセンサに適用した例について説明する。図11は、図4(a)に示した実施形態の接合構造体300の一実施例としてのセンサを示し、(a)は斜視図であり、(b)は断面図である。
(Second embodiment)
An example in which the present invention is applied to a sensor will be described. FIGS. 11A and 11B show a sensor as one example of the joint structure 300 of the embodiment shown in FIG. 4A, where FIG. 11A is a perspective view and FIG. 11B is a cross-sectional view.

このセンサ300’は、加速度センサ、振動センサ、角速度センサ、距離センサ、位置センサなど如何なる形式のセンサとすることができる。センサ300’は、主として、光吸収性部材302としての筐体302’と、筐体302’の開口部O’を覆うとともに封止する光透過性部材306としてのカバー306’とを備えるものであり、筐体302’内部に図示しない検出器本体(センサチップ)を収容する。   The sensor 300 'can be any type of sensor, such as an acceleration sensor, a vibration sensor, an angular velocity sensor, a distance sensor, a position sensor, and the like. The sensor 300 ′ mainly includes a housing 302 ′ as a light absorbing member 302 and a cover 306 ′ as a light transmitting member 306 that covers and seals the opening O ′ of the housing 302 ′. In addition, a detector main body (sensor chip) (not shown) is accommodated in the housing 302 ′.

筐体302’は、光吸収性の熱可塑性樹脂から形成されており、開口部O’を区画するとともに前方に向けて吸引筒312’を突設する周壁308’と、底壁310’とを有している。   The housing 302 ′ is formed of a light-absorbing thermoplastic resin, and includes a peripheral wall 308 ′ that partitions the opening O ′ and protrudes the suction cylinder 312 ′ forward, and a bottom wall 310 ′. Have.

カバー306’は、筐体302’の開口部O’を覆うように筐体302’の周壁308’に被せられ、点状の溶着部314’及び環状の溶着部304’を介して全周に亘って接合されている。カバー306’の周縁部には、周壁308’の外面に沿って薄肉片324’が垂設されている。この薄肉片324’は吸引筒312’を通じて開口部O’内を減圧した際に周壁308’側に引き寄せられて密着するよう形成されている。   The cover 306 ′ is placed on the peripheral wall 308 ′ of the housing 302 ′ so as to cover the opening O ′ of the housing 302 ′, and is provided on the entire circumference via a dotted welding portion 314 ′ and an annular welding portion 304 ′. It is joined over. A thin piece 324 'is suspended from the peripheral edge of the cover 306' along the outer surface of the peripheral wall 308 '. This thin piece 324 'is formed so as to be drawn toward the peripheral wall 308' side and closely adhered when the pressure in the opening O 'is reduced through the suction tube 312'.

センサ300’において、環状の溶着部304’は、その延在方向に対する垂直断面でみて、カバー306’側の部分の面積S1’に対する筐体302’側の部分の面積S2’の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   In the sensor 300 ', the annular welded portion 304' has a ratio of the area S2 'of the portion on the housing 302' side to the area S1 'of the portion on the cover 306' side as viewed in a cross section perpendicular to the extending direction thereof of 12 to 12. It is in the range of 35, more preferably in the range of 19-26.

このようなセンサ300’は、吸引筒312’を吸引開口312として、図5〜図8を参照して説明した実施形態の製造方法に従って製造することができる。   Such a sensor 300 'can be manufactured according to the manufacturing method of the embodiment described with reference to FIGS. 5 to 8 using the suction tube 312' as the suction opening 312.

なお、吸引筒312’の基端部は開口したままであるが、上述した製造方法の第6工程に従い、環状の溶着部304’の形成後に、開口部O’内の減圧を維持したままの状態でカバー306’側からレーザ光を吸引筒312’の基端部の開口周辺に照射することにより、吸引筒312’の基端部の開口を閉塞してもよい。これにより、センサ300’の内部空間を真空に保ったまま密閉することができる。   Although the base end of the suction tube 312 'remains open, the reduced pressure in the opening O' is maintained after the formation of the annular welded portion 304 'according to the sixth step of the above-described manufacturing method. The opening at the base end of the suction tube 312 'may be closed by irradiating the laser beam from the cover 306' side to the vicinity of the opening at the base end of the suction tube 312 'in this state. Thus, the sensor 300 'can be hermetically sealed while keeping the internal space at a vacuum.

かくして本発明によれば、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させるのに適した接合構造体を提供するとともに、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させることができる接合構造体の製造方法を提供することができる。   Thus, according to the present invention, it is possible to provide a joint structure suitable for uniformly and surely adhering members to be joined to each other without using a glass plate, and to join each other without using a glass plate. It is possible to provide a method for manufacturing a joined structure in which members to be bonded can be uniformly and surely brought into close contact with each other.

100,200,300 接合構造体
102,202,302 光吸収性部材
104,204,304 環状の溶着部
106,206,306 光透過性部材
108,208,308 周壁
112,212,312 吸引開口
114,214,314 点状の溶着部
130 環状溝
132 連通溝
324 薄肉片
D 圧力調整装置
D1 減圧装置
D2 加圧装置
D3 制御器
F 境界面
H 光学ヘッド
L1 吸引ライン
L2 供給ライン
O 開口部
PG1,PG2 圧力センサ
S1 環状の溶着部の第1部分(光透過性部材側)の面積
S2 環状の溶着部の第2部分(光吸収性部材側)の面積
100, 200, 300 Joint structure 102, 202, 302 Light absorbing member 104, 204, 304 Annular welded portion 106, 206, 306 Light transmitting member 108, 208, 308 Peripheral wall 112, 212, 312 Suction opening 114, 214,314 Point-like welding portion 130 Annular groove 132 Communication groove 324 Thin piece D Pressure regulator D1 Depressurizer D2 Pressurizer D3 Controller F Boundary surface H Optical head L1 Suction line L2 Supply line O Opening PG1, PG2 Pressure Sensor S1 Area of first portion (light transmitting member side) of annular welded portion S2 Area of second portion (light absorbing member side) of annular welded portion

本発明は、相互に重ね合わされ、その境界面または境界面近傍に形成された溶着部を介して互いに接合された光吸収性部材及び光透過性部材を備える接合構造体関する。 The present invention is superimposed on each other, about the joined structure comprising a light-absorbing member and the light transmitting member that are joined together via a weld portion formed near the boundary surface or interface.

従来、複数の部材を接合する方法として、レーザ光の照射による接合方法があり、その中でも最近では、局所的な加熱であり製品への熱ダメージが少ないとともに、溶着部の、外観への影響が少ないレーザ透過溶着法(Laser Transmission Welding)が注目されている。この接合方法は、接合部材の一方にレーザ光に対して透過性を有する部材(光透過性部材)を用い、他方にレーザ光に対して吸収性を有する部材(光吸収性部材)を用い、これらを互いに重ね合わせて加圧した状態で、レーザ光を光透過性部材側から照射することで、照射されたレーザ光のエネルギが光吸収性部材の境界面付近で吸収されて発熱し、その熱が光透過性部材にも伝達して両部材が溶融し、最後にその溶融部が冷却、固化されることで両部材が接合される方法である。   Conventionally, as a method of joining a plurality of members, there is a joining method by laser beam irradiation, and recently, among these, local heating is performed, so that heat damage to the product is small, and the effect of the welded portion on the appearance is reduced. Attention has been paid to a small number of laser transmission welding methods (Laser Transmission Welding). In this bonding method, a member having a property of transmitting laser light (a light transmitting member) is used as one of the bonding members, and a material having a property of absorbing the laser light (a light absorbing member) is used as the other of the bonding members. By irradiating the laser light from the light transmitting member side in a state where these are superimposed on each other and pressurized, the energy of the irradiated laser light is absorbed near the boundary surface of the light absorbing member and generates heat. In this method, both members are melted by transmitting heat to the light transmissive member, and finally, the melted portion is cooled and solidified to join the two members.

このレーザ透過溶着法には、いくつかの重要なポイントがあるが、とりわけ重要なのが接合される部材同士を加圧して確実に密着させることである。接合される部材間に隙間が存在すると、レーザ照射によって光吸収性部材で発生した熱が相手側である光透過性部材にうまく伝達されず、局所的な温度上昇によって隆起、膨張、爆発といった溶着不良となるからである。   The laser transmission welding method has several important points, and particularly important is to press the members to be bonded to each other to ensure close contact. If there is a gap between the members to be joined, the heat generated by the light absorbing member due to the laser irradiation will not be transmitted well to the opposing light transmitting member, and welding such as bulging, expansion and explosion will occur due to local temperature rise. This is because it becomes defective.

この加圧は、一般的には、レーザ光に対して透過性を有するガラス板を光透過性部材上に配置し、このガラス板を介して両部材に押し圧を加える方法によって実現される(下記特許文献1参照)。しかし、この方法の場合、接合部材の加熱、溶融時に発生する煤や難燃剤の気化成分によってガラス板が汚れ、レーザ光に対するガラス板の吸収率が上がってガラス板自体が加熱されて割れに至るという問題がある。また、汚れたガラス板は、レーザ光を遮り、光吸収性部材に十分な光が届かなくなる結果、溶着強度の低下をも引き起こす。   This pressurization is generally realized by a method in which a glass plate having transparency to laser light is disposed on a light-transmitting member, and a pressing force is applied to both members via the glass plate ( See Patent Document 1 below). However, in the case of this method, the glass plate is contaminated by soot and a vaporization component of the flame retardant generated when the joining member is heated and melted, and the absorption rate of the glass plate with respect to laser light is increased, and the glass plate itself is heated and cracked. There is a problem. In addition, the dirty glass plate blocks the laser beam and prevents sufficient light from reaching the light-absorbing member, resulting in a decrease in welding strength.

これに対して、下記特許文献2では、ガラス板を用いず、接合される部材同士を吸引により密着させる方法が提案されている。具体的には、特許文献2に記載の方法は、接合される部材の一方に溝部を形成しておき、この溝部の空間を減圧することで両部材同士を密着させるものである。しかし、レーザ照射により溶着する際に接合される部材の一方又は双方に熱変形が生じたり、成形時に接合される部材に反りが生じたりする結果、接合される部材間に隙間が発生し、これにより吸引密着性が低下する場合がある。   On the other hand, Patent Document 2 below proposes a method in which members to be joined are brought into close contact with each other by suction without using a glass plate. Specifically, in the method described in Patent Document 2, a groove is formed in one of the members to be joined, and the two members are brought into close contact with each other by reducing the pressure in the space of the groove. However, as a result of thermal deformation of one or both of the members to be joined when welding by laser irradiation or warping of the members to be joined at the time of molding, a gap is generated between the members to be joined. May lower the suction adhesion.

特開昭62−142092号公報JP-A-62-142092 国際公開第2010/035696号パンフレットWO 2010/035696 pamphlet

それ故本発明の目的は、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させた接合構造体を提供することにある。 It is therefore an object of the present invention, without the use of the glass plate is to provide a joined structure obtained by uniformly and reliably contact the members to each other to be joined together.

上述した課題を解決するための本発明の接合構造体は、少なくとも1つの開口部を有する光吸収性部材と、開口部を覆うように光吸収性部材上に配置された光透過性部材と開口部を囲繞するように延在するとともに光吸収性部材およびそれに密着した光透過性部材を相互に接合する環状の溶着部と、を備え、光透過性部材は、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して周縁部が光吸収性部材に密着する薄板状に形成されていることを特徴とするものである。 A joint structure of the present invention for solving the above-mentioned problem, a light-absorbing member having at least one opening, a light-transmitting member disposed on the light-absorbing member so as to cover the opening , with extending so as to surround the opening portion, comprises an annular weld portion for joining the light absorbing member and the light transmitting member in close contact therewith mutually, the light transmitting member, the welding portion of the annular formation When the inside of the opening is decompressed in a state before being performed, the opening is deformed and the peripheral portion is formed in a thin plate shape closely contacting the light absorbing member.

この場合、光透過性部材は、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して周縁部が光吸収性部材に密着する厚みに形成されていることが好ましい。 In this case, the light transmissive member deforms when the inside of the opening is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion is formed, and the peripheral portion becomes a light absorbing member. It is preferable that it is formed to a thickness that allows close contact.

また、本発明の接合構造体にあっては、環状の溶着部に隣接して位置し、光吸収性部材および光透過性部材を相互に接合する点状の溶着部を備えることが好ましい。 Further, the joint structure of the present invention preferably includes a point-like welded portion located adjacent to the annular welded portion and joining the light-absorbing member and the light-transmitting member to each other .

上述した課題を解決するための本発明の接合構造体は、少なくとも1つの開口部を有する光吸収性部材と、開口部を覆うように光吸収性部材上に配置された光透過性部材と開口部を囲繞するように延在するとともに、光吸収性部材およびそれに密着した光透過性部材を相互に接合する環状の溶着部と、を備え、光透過性部材は、光吸収性部材の周縁部に沿って形成され、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して光吸収性部材に密着する薄肉片を有することを特徴とするものである。 A joint structure of the present invention for solving the above-mentioned problem, a light-absorbing member having at least one opening, a light-transmitting member disposed on the light-absorbing member so as to cover the opening , with extending so as to surround the opening portion includes a welded portion of the annular joining the light absorbing member and the light transmitting member in close contact therewith mutually, the light transmitting member, the periphery of the light-absorbing member Formed along the portion, having a thin piece that is deformed and closely adheres to the light absorbing member when the inside of the opening is depressurized before the annular welded portion is formed. is there.

この場合、薄肉片は、環状の溶着部が形成される前の状態で開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して光吸収性部材に密着する厚みに形成されていることが好ましい。   In this case, the thin piece is deformed when the inside of the opening is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion is formed, and the thin piece is formed to have a thickness that is in close contact with the light absorbing member. It is preferred that

さらに、本発明の接合構造体にあっては、環状の溶着部に隣接して位置し、光吸収性部材および光透過性部材を相互に接合する点状の溶着部を備えることが好ましい。 Further, the joint structure of the present invention preferably includes a point-like welded portion located adjacent to the annular welded portion and joining the light-absorbing member and the light-transmitting member to each other .

本発明の接合構造体にあっては、光透過性部材が、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して周縁部が光吸収性部材に密着する薄板状に形成され、または光吸収性部材の周縁部に沿って形成され、環状の溶着部が形成される前の状態で開口部内が減圧状態とされた場合に変形して光吸収性部材に密着する薄肉片を有することから、接合構造体の製造工程において、開口部内を減圧することによって薄板状に形成された光透過性部材又は光吸収性部材の周縁部に沿って形成された薄肉片を変形させて光透過性部材の周縁部又は薄肉片を光吸収性部材に密着させることができるので、光吸収性部材及び光透過性部材の相互の優れた吸引密着性を得ることができる。 In the joint structure of the present invention, the light transmissive member is deformed when the inside of the opening is decompressed before the annular welded portion is formed, and the peripheral portion becomes a light absorbing member. It is formed in the shape of a thin plate that adheres, or is formed along the periphery of the light-absorbing member, and deforms when the inside of the opening is depressurized before the annular welded portion is formed, and absorbs light. Because it has a thin piece that adheres to the member, in the manufacturing process of the joint structure, by reducing the pressure in the opening , it is formed along the peripheral edge of the light transmitting member or the light absorbing member formed in a thin plate shape. Deforming the thin-walled piece so that the peripheral portion of the light-transmitting member or the thin- walled piece can be in close contact with the light-absorbing member, thereby obtaining excellent mutual suction adhesion between the light-absorbing member and the light-transmitting member. Can be.

たがって本発明の接合構造体によれば、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させた接合構造体を提供することができる。 According to the but I the bonding structure of the present invention, it is possible without using a glass plate, to provide a joined structure obtained by uniformly and reliably contact the members to each other to be joined together.

図1は、本発明の一実施形態の接合構造体を示し、(a)は斜視図であり、(b)は(a)中のA−A線に沿う断面図である。1A and 1B show a joint structure according to an embodiment of the present invention, wherein FIG. 1A is a perspective view, and FIG. 1B is a cross-sectional view taken along line AA in FIG. 図2は、本発明の他の実施形態の接合構造体し、(a)は斜視図であり、(b)は(a)中のB−B線に沿う断面図である。2A and 2B show a joint structure according to another embodiment of the present invention, wherein FIG. 2A is a perspective view, and FIG. 2B is a cross-sectional view taken along line BB in FIG. 図3は、本発明のさらに他の実施形態の接合構造体を示し、(a)は斜視図であり、(b)は(a)中のC−C線に沿う断面図である。3A and 3B show a joint structure according to still another embodiment of the present invention, wherein FIG. 3A is a perspective view, and FIG. 3B is a cross-sectional view taken along line CC in FIG. 図4(a),(b)はそれぞれ、図3に示した接合構造体における薄肉片の変形例を示す断面図である。4A and 4B are cross-sectional views each showing a modified example of a thin piece in the joint structure shown in FIG. 図5は、上記実施形態の接合構造体を製造するための製造方法に用いる光吸収性部材を示し、(a)は平面図、(b)は(a)中のD−D線に沿う断面図である。5 shows a light absorbing member used in the production method for manufacturing a joined structure of the above embodiment, (a) is a plan view, (b) is a cross section taken along line D-D in (a) FIG. 図6は、上記実施形態の接合構造体を製造するための製造方法を示し、(a)は配置工程を示し、(b)は吸引密着工程を示す断面図である。6 shows a method for manufacturing a joined structure of the above embodiment, (a) shows the arrangement step, a cross-sectional view showing a (b) suction adhesion process. 図7は、上記実施形態の接合構造体を製造するための製造方法に用いる圧力調整装置及びレーザ照射装置を示す概略図である。Figure 7 is a schematic diagram showing a pressure regulating device and a laser irradiation apparatus used in the production method for manufacturing a joined structure of the above embodiment. 図8(a)〜(d)は、上記実施形態の接合構造体を製造するための製造方法において、光吸収性部材の環状溝にレーザを照射して環状の溶着部を形成する様子を順に示した断面図である。Figure 8 (a) ~ (d) is the manufacturing method for manufacturing a joined structure of the above embodiment, a state of irradiating a laser to the annular groove of the light-absorbing member forming the welded portion of the annular turn FIG. 図9は、上記接合構造体の製造方法に適用可能な他の環状溝の例を示した断面図である。Figure 9 is a sectional view showing an example of applicable additional annular groove on the method for manufacturing the joined structure. 図10は、上記実施形態に従う実施例のコネクタを示し、(a)は斜視図であり、(b)は断面図である。Figure 10 shows the connector of an embodiment in accordance with the above embodiment, (a) is a perspective view, (b) is a sectional view. 図11は、上記実施形態に従う実施例のセンサを示し、(a)は斜視図であり、(b)は断面図である。11A and 11B show a sensor according to an example according to the above embodiment, wherein FIG. 11A is a perspective view and FIG. 11B is a cross-sectional view.

以下、本発明の実施の形態を図面に基づき詳細に説明する。なお、各図において同様部材または部分には、符号に「100」又は「200」のいずれかを加えた符号を付し重複する説明は省略する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Incidentally, the same members or portions in the respective drawings, denoted by reference numerals obtained by adding either "100" or "200" to the code, without redundant description.

図1は、本発明の一実施形態の接合構造体100を示しており、(a)は斜視図、(b)は(a)中のA−A線に沿う断面図である。この図に示すように、本実施形態の接合構造体100は、開口部Oを有する光吸収性部材102と、該開口部Oを覆うように光吸収性部材102に重ねられ、開口部Oを囲繞する環状の溶着部104を介して該光吸収性部材102に接合された光透過性部材106とを備えている。なお、「環状」とは、輪のような円い形だけを意味するのではなく、連続的に閉じた形状(無端形状)を意味する。よって、「環状」には、円形や楕円形だけではなく、矩形、多角形、その他の閉鎖形状が含まれる。溶着部104は、光透過性部材106と光吸収性部材102の境界面F上に形成されており、後で詳細に説明するが、このような溶着部104は、光透過性部材106側から光吸収性部材102へ向けてレーザ光を照射し、光吸収性部材102をまず発熱させて溶融し、その熱で光透過性部材106をも溶融させ、その後溶融部を固化させることで形成することができる。   1A and 1B show a joint structure 100 according to an embodiment of the present invention, wherein FIG. 1A is a perspective view, and FIG. 1B is a cross-sectional view taken along line AA in FIG. As shown in this figure, the joint structure 100 of the present embodiment has a light-absorbing member 102 having an opening O and a light-absorbing member 102 that covers the light-absorbing member 102 so as to cover the opening O. A light-transmitting member 106 joined to the light-absorbing member 102 via a surrounding annular welded portion 104. It should be noted that the term “annular” means not only a circular shape like a ring, but also a continuously closed shape (endless shape). Therefore, “annular” includes not only a circle and an ellipse but also a rectangle, a polygon, and other closed shapes. The welding portion 104 is formed on the boundary surface F between the light transmitting member 106 and the light absorbing member 102, and will be described in detail later. The light absorbing member 102 is irradiated with a laser beam to first generate heat and melt the light absorbing member 102, and also melt the light transmitting member 106 by the heat, and then solidify the melted portion. be able to.

光吸収性部材102は、レーザ光に対する吸収率が光透過性部材106の同レーザ光に対する吸収率よりも高い部材であり、主として熱可塑性樹脂又は熱可塑性エラストマーからなり、射出成形等により形成することができる。具体的には、波長193〜10600nmの範囲内に発振波長の中心を有するレーザ光から選択されたレーザ光に対して10%以上の吸収率を有するものが好ましい。レーザとしては、例えば、炭酸ガスレーザ(波長約10600nm)、Nd:YAGレーザ(波長約1064nm)、Nd:YVO4レーザの第2次高調波であるグリーンレーザ(波長約532nm)、ダイオードレーザ(波長約800nm,840nm,または950nm)、エキシマレーザ(波長約193nm)等が挙げられる。光吸収性部材102の吸収率を調整するため、熱可塑性樹脂又は熱可塑性エラストマーにカーボンブラック等の黒色着色剤や顔料、染料等を混練することができる。   The light absorptive member 102 is a member having a higher absorptance for laser light than the absorptivity for the same laser light of the light transmissive member 106, and is mainly made of a thermoplastic resin or a thermoplastic elastomer, and is formed by injection molding or the like. Can be. Specifically, a material having an absorptance of 10% or more with respect to laser light selected from laser light having an oscillation wavelength center within a wavelength range of 193 to 10600 nm is preferable. As the laser, for example, a carbon dioxide laser (wavelength: about 10600 nm), a Nd: YAG laser (wavelength: about 1064 nm), a green laser (wavelength: about 532 nm) which is the second harmonic of Nd: YVO4 laser, a diode laser (wavelength: about 800 nm) , 840 nm, or 950 nm), an excimer laser (wavelength: about 193 nm), and the like. In order to adjust the absorptance of the light absorbing member 102, a black colorant such as carbon black, a pigment, a dye, or the like can be kneaded with a thermoplastic resin or a thermoplastic elastomer.

熱可塑性樹脂としては、例えば、ポリアミド樹脂、ポリエチレン樹脂、ポリプロピレン樹脂、ポリエチレンテレフタレート樹脂、ポリブチレンテレフタレート樹脂、ポリフェニルエーテル樹脂、ポリスチレン樹脂、ハイインパクトポリスチレン樹脂、水添ポリスチレン樹脂、ポリアクリルスチレン樹脂、ABS樹脂、AS樹脂、AES樹脂、ASA樹脂、SMA樹脂、ポリアルキルメタクリレート樹脂、ポリメチルメタクリレート樹脂、ポリカーボネート樹脂、ポリエステル樹脂、ポリフェニレンスルファイド、液晶ポリマー等が挙られる。熱可塑性エラストマーとしては、例えばスチレン系熱可塑性エラストマー、オレフィン系熱可塑性エラストマー、ポリエステル系熱可塑性エラストマー、ポリウレタン系熱可塑性エラストマー、PVC系熱可塑性エラストマー等が挙げられる。熱可塑性樹脂には、強化材としてガラスファイバやミネラル等を混練してもよい。   As the thermoplastic resin, for example, polyamide resin, polyethylene resin, polypropylene resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyphenyl ether resin, polystyrene resin, high impact polystyrene resin, hydrogenated polystyrene resin, polyacrylstyrene resin, ABS Resin, AS resin, AES resin, ASA resin, SMA resin, polyalkyl methacrylate resin, polymethyl methacrylate resin, polycarbonate resin, polyester resin, polyphenylene sulfide, liquid crystal polymer and the like. Examples of the thermoplastic elastomer include a styrene-based thermoplastic elastomer, an olefin-based thermoplastic elastomer, a polyester-based thermoplastic elastomer, a polyurethane-based thermoplastic elastomer, and a PVC-based thermoplastic elastomer. Glass fiber, mineral, or the like may be kneaded with the thermoplastic resin as a reinforcing material.

図示例において光吸収性部材102は主として、開口部Oを区画する周壁108と、周壁108の下端部を閉塞する底壁110とからなる。周壁108の横断面形状は略矩形であるが、これに限らず、円形、楕円形、台形、多角形、ひょうたん形状等如何なる形状としてもよい。周壁108には、後述するように開口部Oに繋がり該開口部O内を減圧状態とするのに適した吸引開口112が形成されている。吸引開口112は、底壁110に形成してもよい。あるいは、底壁110を設けずに周壁109の下端を開放し、該下端開口を吸引開口112として用いてもよい。   In the illustrated example, the light absorbing member 102 mainly includes a peripheral wall 108 that defines the opening O, and a bottom wall 110 that closes a lower end of the peripheral wall 108. The cross-sectional shape of the peripheral wall 108 is substantially rectangular, but is not limited thereto, and may be any shape such as a circle, an ellipse, a trapezoid, a polygon, and a gourd. The peripheral wall 108 is formed with a suction opening 112 that is connected to the opening O and is suitable for reducing the pressure inside the opening O as described later. The suction opening 112 may be formed in the bottom wall 110. Alternatively, the lower end of the peripheral wall 109 may be opened without providing the bottom wall 110, and the lower end opening may be used as the suction opening 112.

光透過性部材106はレーザ光に対する吸収率が同レーザ光に対する光吸収性部材102の吸収率よりも低い部材であり、主として熱可塑性樹脂又は熱可塑性エラストマーからなり、射出成形等により形成することができる。具体的には、波長193〜10600nmの範囲内に発振波長の中心を有するレーザ光から選択されたレーザ光に対して、光吸収性部材102の吸収率よりも低い吸収率を有するものが好ましい。   The light transmissive member 106 is a member having a lower absorptivity for the laser light than the absorptivity of the light absorptive member 102 for the laser light, and is mainly made of a thermoplastic resin or a thermoplastic elastomer, and can be formed by injection molding or the like. it can. Specifically, a laser beam having a lower absorptance than that of the light-absorbing member 102 with respect to a laser beam selected from laser beams having an oscillation wavelength center within a wavelength range of 193 to 10600 nm is preferable.

光透過性部材106を構成する熱可塑性樹脂としては、例えば、ポリアミド樹脂、ポリエチレン樹脂、ポリプロピレン樹脂、ポリエチレンテレフタレート樹脂、ポリブチレンテレフタレート樹脂、ポリフェニルエーテル樹脂、ポリスチレン樹脂、ハイインパクトポリスチレン樹脂、水添ポリスチレン樹脂、ポリアクリルスチレン樹脂、ABS樹脂、AS樹脂、AES樹脂、ASA樹脂、SMA樹脂、ポリアルキルメタクリレート樹脂、ポリメチルメタクリレート樹脂、ポリカーボネート樹脂、ポリエステル樹脂、ポリフェニレンスルファイド、液晶ポリマー等が挙られる。熱可塑性エラストマーとしては、例えばスチレン系熱可塑性エラストマー、オレフィン系熱可塑性エラストマー、ポリエステル系熱可塑性エラストマー、ポリウレタン系熱可塑性エラストマー、PVC系熱可塑性エラストマー等が挙げられる。なお、熱可塑性樹脂には、強化材としてガラスファイバやミネラル等を混練させてもよい。熱可塑性樹脂又は熱可塑性エラストマーには、光吸収性部材の吸収率よりも低い吸収率を得られる限り、例えば、白色顔料や黄色、緑色、赤色等の有彩色着色剤を混練してもよい。   As the thermoplastic resin constituting the light transmitting member 106, for example, polyamide resin, polyethylene resin, polypropylene resin, polyethylene terephthalate resin, polybutylene terephthalate resin, polyphenyl ether resin, polystyrene resin, high impact polystyrene resin, hydrogenated polystyrene Resin, polyacryl styrene resin, ABS resin, AS resin, AES resin, ASA resin, SMA resin, polyalkyl methacrylate resin, polymethyl methacrylate resin, polycarbonate resin, polyester resin, polyphenylene sulfide, liquid crystal polymer and the like. Examples of the thermoplastic elastomer include a styrene-based thermoplastic elastomer, an olefin-based thermoplastic elastomer, a polyester-based thermoplastic elastomer, a polyurethane-based thermoplastic elastomer, and a PVC-based thermoplastic elastomer. The thermoplastic resin may be kneaded with glass fiber, mineral, or the like as a reinforcing material. The thermoplastic resin or the thermoplastic elastomer may be kneaded with, for example, a white pigment or a chromatic colorant such as yellow, green, or red as long as an absorptivity lower than the absorptivity of the light absorbing member can be obtained.

そして、光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内が減圧状態とされた場合に変形して、その周縁部が光吸収性部材102の周壁108の上端面に密着する薄板状に形成されている。これにより、光透過性部材106を光吸収性部材102に重ね合わせた際に、光吸収性部材102の周壁108の上端面と光透過性部材106との間に隙間が生じている場合でも、吸引開口112を通じて開口部O内を減圧した際に光透過性部材106を光吸収性部材102の周壁108の上端面に密着させることができるため、真空漏れを防止し光透過性部材106及び光吸収性部材102の相互間で優れた吸引密着性を得ることができる。   The light transmissive member 106 is deformed when the inside of the opening O is depressurized before the annular welded portion 104 is formed, and its peripheral edge is formed by the peripheral wall 108 of the light absorbing member 102. Is formed in a thin plate shape that is in close contact with the upper end surface of the. Accordingly, even when a gap is formed between the upper end surface of the peripheral wall 108 of the light absorbing member 102 and the light transmitting member 106 when the light transmitting member 106 is superimposed on the light absorbing member 102, When the pressure in the opening O is reduced through the suction opening 112, the light transmitting member 106 can be brought into close contact with the upper end surface of the peripheral wall 108 of the light absorbing member 102, so that vacuum leakage is prevented and the light transmitting member 106 and light Excellent suction adhesion between the absorbent members 102 can be obtained.

これをより確実にするため、光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材102に密着する易変形性を発揮する厚みに形成されていることが好ましい。具体的には、十分な変形による密着性を確保するため、光透過性部材106の厚みは、0.005mm〜0.2mmとすることが好ましく、成形性を考慮すると0.01mm〜0.1mmとすることがより好ましい。   In order to ensure this, the light transmissive member 106 is deformed when the inside of the opening O is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion 104 is formed. In addition, it is preferable that it is formed to have a thickness that exhibits easy deformability in close contact with the light absorbing member 102. Specifically, in order to secure adhesion by sufficient deformation, the thickness of the light transmitting member 106 is preferably set to 0.005 mm to 0.2 mm, and 0.01 mm to 0.1 mm in consideration of moldability. Is more preferable.

光透過性部材106は、環状の溶着部104が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材102に密着するよう引張弾性係数(ヤング率)を0.01〜18GPaの範囲内の材料を選定又は調整するのが好ましい。光透過性部材106の引張弾性係数(ヤング率)を18GPaよりも大きくした場合には、開口部O内を減圧したときに変形し易くするために極めて薄く形成する必要があり、設計どおりに成形することが難しくなり、例えば、射出成形により光透過性部材106を形成する場合には、薄い部分に樹脂が流れず成形不良の原因となる。一方、光透過性部材106の引張弾性係数(ヤング率)が0.01GPaを下回ると、材料自体の剛性が低くなるため、自身の形状を保持することが難しくなり、目的の位置に目的の形状で位置決めすることが難しくなる。   The light transmissive member 106 is deformed when the inside of the opening O is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion 104 is formed. It is preferable to select or adjust a material having a tensile elastic modulus (Young's modulus) in the range of 0.01 to 18 GPa so as to make close contact. When the tensile elastic modulus (Young's modulus) of the light transmitting member 106 is set to be larger than 18 GPa, it is necessary to form the light transmitting member 106 extremely thin so as to be easily deformed when the inside of the opening O is depressurized. For example, when the light transmitting member 106 is formed by injection molding, the resin does not flow into a thin portion, which causes a molding failure. On the other hand, if the tensile elastic modulus (Young's modulus) of the light transmitting member 106 is less than 0.01 GPa, the rigidity of the material itself becomes low, and it becomes difficult to maintain its own shape, and the target shape is placed at a target position. Positioning becomes difficult.

光透過性部材106の易変形性、成形性、位置決め性をより高次元でバランスさせるため、光透過性部材106の材料は、引張弾性係数(ヤング率)が6〜10GPaの範囲内となるよう選定又は調整することがより好ましい。この引張弾性係数(ヤング率)は、JIS K7161の規定に準拠し、JIS K7162に記載の試験片を引張試験機に装着し応力とひずみ(変形量)から応力―ひずみ曲線を作図し、その傾きから求めることができる。この際、応力―ひずみ曲線が直線状にならず傾きを求め難い場合には、ヤング率の代替係数としてセカント係数(応力―ひずみ曲線上の点と原点とを結ぶ直線の傾き)などを用いることができる。   The material of the light-transmitting member 106 has a tensile modulus of elasticity (Young's modulus) within the range of 6 to 10 GPa in order to balance the easy-deformability, moldability, and positioning properties of the light-transmitting member 106 at a higher level. It is more preferable to select or adjust. This tensile elastic modulus (Young's modulus) conforms to the provisions of JIS K7161, and a test specimen described in JIS K7162 is attached to a tensile tester, and a stress-strain curve is drawn from stress and strain (deformation amount), and the slope is plotted. Can be obtained from In this case, if the stress-strain curve is not linear and it is difficult to calculate the slope, use a secant coefficient (slope of the straight line connecting the point on the stress-strain curve and the origin) as an alternative coefficient of Young's modulus. Can be.

また、本実施形態の接合構造体100では、図1(a)に示すように、環状の溶着部104に隣接した位置に、光吸収性部材102と光透過性部材106とを接合する点状の溶着部114が設けられている。これにより、光吸収性部材102及び光透過性部材106同士の接合強度はより一層高められている。   In addition, in the joint structure 100 of the present embodiment, as shown in FIG. 1A, a point-shaped joint between the light absorbing member 102 and the light transmitting member 106 is provided at a position adjacent to the annular welded portion 104. Is provided. Thereby, the bonding strength between the light absorbing member 102 and the light transmitting member 106 is further increased.

点状の溶着部114は、環状の溶着部104と同様、レーザ光を光透過性部材106側から光吸収性部材102へ向けて照射することにより形成することができる。点状の溶着部114は、光透過性部材106が略矩形の場合にはコーナー部に隣接して形成することが好ましく、これによれば、点状の溶着部114が、環状の溶着部104を形成する際の光透過性部材106の熱変形による反りを効果的に抑制して、開口部O内の減圧時に、薄板状の光透過性部材106の易変形による密着効果と相俟って、光透過性部材106及び光吸収性部材102同士のより一層優れた吸引密着性を得ることができる。   As in the case of the annular welded portion 104, the dotted welded portion 114 can be formed by irradiating laser light from the light transmissive member 106 side to the light absorbing member 102. When the light-transmitting member 106 is substantially rectangular, it is preferable that the dot-shaped welded portion 114 is formed adjacent to the corner portion. The warp due to thermal deformation of the light transmissive member 106 during the formation of the surface is effectively suppressed, and when the pressure in the opening O is reduced, the thin plate-shaped light transmissive member 106 is easily deformed in combination with the adhesion effect. Thus, even better suction adhesion between the light transmitting member 106 and the light absorbing member 102 can be obtained.

また、本実施形態の接合構造体100では、図1(b)中の拡大図で示すように、環状の溶着部104の延在方向に対する垂直断面でみて、溶着部104の光透過性部材106側の部分(当該図において境界面Fよりも上の部分であり、以下「第1部分」ともいう。)の面積S1に対する、光吸収性部材102側の部分(当該図において境界面Fよりも下の部分であり、以下、「第2部分」ともいう。)の面積S2の比は、12〜35の範囲内としている。当該比が12未満の場合には、光透過性部材106を光吸収性部材102から引き剥がすような力が加わった際に環状の溶着部104の境界を起点とした剥離(界面剥離)や溶着部104の光吸収性部材102側の部分の少なくとも一部が光透過性部材106に一体化した状態での剥離が発生する虞がある。また、この種の剥離は工業生産において非破壊で検査することは困難である。面積S1に対する面積S2の比率が12以上では、溶着部104に剥離は生じ難く、光透過性部材106を光吸収性部材102から引き剥がすような力が加わった場合には、光透過性部材106又は光吸収性部材102自体が破壊する「部材破壊」となるため、溶着強度を設計(設定)するにあたり、部材102,106の強さを管理すればよく、安定して生産することができる。一方、上記比率が35を超えると光吸収性部材102の深くまでレーザ光を届かせるために、パワーを上げるかあるいは照射時間を長くする必要があるため、光透過性部材106への熱影響(隆起や気泡、表面上の溶け、焼けに伴う炭化や変色の発生)や光吸収性部材102への熱影響(焼けに伴う炭化、気泡の発生)が顕在化する虞がある。これらの熱影響の回避と溶着部104における剥離の抑制、防止をより高次元で実現するためには、面積S1に対する面積S2の比率は19〜26の範囲内とすることがより好ましい。   Further, in the joint structure 100 of the present embodiment, as shown in an enlarged view in FIG. 1B, the light transmitting member 106 of the welded portion 104 is viewed in a cross section perpendicular to the extending direction of the annular welded portion 104. A portion on the light-absorbing member 102 side (the portion above the boundary surface F in the figure) with respect to the area S1 of the portion on the side (the portion above the boundary surface F in the drawing, also referred to as the “first portion” hereinafter). The ratio of the area S2 of the lower part (hereinafter also referred to as “second part”) is in the range of 12 to 35. When the ratio is less than 12, peeling (interfacial peeling) or welding starting from the boundary of the annular welded portion 104 when a force for peeling the light transmissive member 106 from the light absorbing member 102 is applied. There is a possibility that peeling may occur when at least a part of the portion of the portion 104 on the light absorbing member 102 side is integrated with the light transmitting member 106. Also, this type of delamination is difficult to inspect nondestructively in industrial production. If the ratio of the area S2 to the area S1 is 12 or more, peeling is unlikely to occur in the welded portion 104, and when a force for peeling the light transmissive member 106 from the light absorbing member 102 is applied, the light transmissive member 106 Alternatively, since the light absorbing member 102 itself breaks down, the member 102, 106 can be stably produced by designing (setting) the welding strength by controlling the strength of the members 102, 106. On the other hand, if the above ratio exceeds 35, it is necessary to increase the power or lengthen the irradiation time in order to reach the laser beam to the depth of the light absorbing member 102, so that the thermal effect on the light transmitting member 106 ( There is a possibility that bulges, bubbles, melting on the surface, carbonization or discoloration due to burning) or thermal effects on the light absorbing member 102 (carbonization due to burning, generation of bubbles) may become apparent. In order to avoid these heat effects and to suppress and prevent peeling at the welded portion 104 with higher dimensions, the ratio of the area S2 to the area S1 is more preferably in the range of 19 to 26.

このように溶着部104の光透過性部材側部分の面積S1に対する、光吸収性部材側部分の面積S2の比を上記範囲内とすることで、接合強度を確保しつつ、環状の溶着部104の形成に伴う光透過性部材106への熱影響を小さくし光透過性部材106の熱歪みを抑制することができるため、開口部O内の減圧時に、薄板状の光透過性部材106の易変形による密着効果と相俟って光透過性部材106及び光吸収性部材102同士のより一層優れた吸引密着性を得ることができる。   As described above, by setting the ratio of the area S2 of the light absorbing member side portion to the area S1 of the light transmitting member side portion of the welding portion 104 within the above range, the annular welding portion 104 can be secured while maintaining the bonding strength. Since the thermal effect on the light transmitting member 106 due to the formation of the light transmitting member 106 can be reduced and the heat distortion of the light transmitting member 106 can be suppressed, the thin plate-shaped light transmitting member 106 can easily be formed when the pressure in the opening O is reduced. In addition to the adhesion effect due to the deformation, it is possible to obtain more excellent suction adhesion between the light transmitting member 106 and the light absorbing member 102.

なお、上記比率下の面積S1,S2を有する溶着部104は、図8を参照して後述する接合構造体の製造方法により形成することができる。また、面積S1及びS2を算出するにあたり、溶着部104の範囲(境界)は、接合構造体100を溶着部104の延在方向に対する直交方向にカットして試験片を作成し、その断面を光学顕微鏡または電子顕微鏡で観察することや、X線CTを用いた断層画像を確認することで判断することができる。   Note that the welded portion 104 having the areas S1 and S2 under the above ratio can be formed by a method for manufacturing a joint structure described later with reference to FIG. In calculating the areas S1 and S2, the range (boundary) of the welded portion 104 is cut in a direction perpendicular to the extending direction of the welded portion 104 to form a test piece, and the cross section of the test piece is optically obtained. The determination can be made by observing with a microscope or an electron microscope, or by confirming a tomographic image using X-ray CT.

ところで、光透過性部材106を射出成形により製造する場合、ゲートの位置や溶融樹脂の流れ方、金型から取り出した後の冷却不均一等を起因として、光透過性部材106に下面側へ凸となる反り又は上面側へ凸となる反りが発生することがある。下面側へ凸となる反りは、光透過性部材106を光吸収性部材102に重ね合わせた際に光透過性部材106の周縁部と光吸収性部材102の周壁108の上端面との間に隙間を生じさせることになるため好ましくない。そこで、本実施形態では、光透過性部材106の下面(光吸収性部材102側の面)に板厚を減じた凹部116を環状の溶着部104の内側領域の50%以上に亘って形成し、これにより反りの方向を上面側へ凸となる方向に誘導している。凹部116の形成領域が、環状の溶着部104の内側領域の50%未満の場合には、反りの原因である樹脂材料の収縮に関して、光透過性部材106全体の反りを誘導するほどの十分な力を得ることができない虞がある。また、反りの量が過大となるのを防ぐため、凹部116の深さは板厚の50%以下とすることが好ましい。凹部116の深さが板厚の50%を超える場合には、反りの原因である樹脂材料の収縮に関して、光透過性部材106の剛性が低下してねじれが発生するため、吸引密着させる際に光透過性部材106及び光吸収性部材102間に隙間が生じて密着が不十分な状態となり、位置ずれや溶着不具合(熱が伝わらないことによる過度な温度上昇や未溶融)が発生する虞がある。 When the light-transmitting member 106 is manufactured by injection molding, the light-transmitting member 106 projects downward from the mold due to the position of the gate, the flow of the molten resin, uneven cooling after being taken out of the mold, and the like. Or a warp that is convex toward the upper surface side may occur. The warpage convex to the lower surface side is caused between the peripheral edge of the light transmitting member 106 and the upper end surface of the peripheral wall 108 of the light absorbing member 102 when the light transmitting member 106 is superimposed on the light absorbing member 102. It is not preferable because a gap is generated. Therefore, in this embodiment, the lower surface of the light transmitting member 106 (the surface of the light-absorbing member 102 side), a concave portion 116 obtained by subtracting the thickness, for over 50% of the inner area of the annular welds 104 Thus, the direction of the warp is guided in a direction protruding toward the upper surface side. When the area where the concave portion 116 is formed is less than 50% of the inner area of the annular welded portion 104, the shrinkage of the resin material which causes the warpage is sufficient to induce the warpage of the entire light transmitting member 106. There is a possibility that power cannot be obtained. Further, in order to prevent the amount of warpage from becoming excessive, the depth of the concave portion 116 is preferably set to 50% or less of the plate thickness. If the depth of the concave portion 116 exceeds 50% of the plate thickness, the rigidity of the light-transmitting member 106 is reduced due to the contraction of the resin material, which is a cause of warpage, and twisting occurs. A gap is formed between the light transmitting member 106 and the light absorbing member 102, resulting in insufficient adhesion, which may cause misalignment or welding failure (excessive temperature rise or unmelting due to non-transmission of heat). is there.

図2を参照し、本発明に従う他の実施形態の接合構造体200について説明する。この実施形態の接合構造体200は、光吸収性部材202に複数の開口部Oが形成されている点で先の実施形態の接合構造体100とは異なる。   With reference to FIG. 2, a description will be given of a joint structure 200 according to another embodiment of the present invention. The joint structure 200 of this embodiment differs from the joint structure 100 of the previous embodiment in that a plurality of openings O are formed in the light absorbing member 202.

具体的には、光吸収性部材202は、周壁208の上端部に繋がる天壁218を有し、該天壁218には同一方向へ延在する複数のスリット220が穿設されて開口部Oが区画されている。天壁218は、光透過性部材206の上面に外部から衝撃や荷重が加わった場合において光透過性部材206の撓み変形を規制するため、光透過性部材206や溶着部204,214が破損されるのを防ぐことができる。さらに天壁218は梁のように作用するため、光吸収性部材202の周壁208を補強することができる。   Specifically, the light absorbing member 202 has a top wall 218 connected to the upper end of the peripheral wall 208, and a plurality of slits 220 extending in the same direction are formed in the top wall 218 so that the opening O Is partitioned. The top wall 218 restricts the bending deformation of the light transmitting member 206 when an impact or a load is applied to the upper surface of the light transmitting member 206 from the outside, so that the light transmitting member 206 and the welded portions 204 and 214 are damaged. Can be prevented. Further, since the top wall 218 acts like a beam, the peripheral wall 208 of the light absorbing member 202 can be reinforced.

また、光透過性部材206の凹部216は、上述のように光透過性部材206の反りの方向及び量を制御する効果をもたらすが、これに加えて、光透過性部材206と天壁218の間に隙間を維持し、開口部Oを減圧した際に光透過性部材206が天壁218に接触して陰圧の受圧面積が減少するのを防止することができる。陰圧の受圧面積が減少すると、光透過性部材206を真空圧で十分に変形させることができなくなり、光透過性部材206及び光吸収性部材202間の吸引密着性が損なわれる虞がある。これを防止する観点においても、光透過性部材206に形成する凹部216の形成領域は、環状の溶着部104の内側領域の50%以上とすることが好ましい。   The concave portion 216 of the light transmitting member 206 has an effect of controlling the direction and amount of warpage of the light transmitting member 206 as described above. In addition, the concave portion 216 of the light transmitting member 206 and the top wall 218 have the same effect. By maintaining a gap therebetween, it is possible to prevent the light transmissive member 206 from contacting the top wall 218 when the opening O is depressurized, thereby preventing the negative pressure receiving area from decreasing. When the negative pressure receiving area decreases, the light transmitting member 206 cannot be sufficiently deformed by the vacuum pressure, and there is a possibility that the suction adhesion between the light transmitting member 206 and the light absorbing member 202 may be impaired. Also from the viewpoint of preventing this, it is preferable that the formation area of the concave portion 216 formed in the light transmitting member 206 be 50% or more of the inner area of the annular welded portion 104.

本実施形態の接合構造体200においても、先の実施形態の接合構造体100と同様、環状の溶着部204は、その延在方向に対する垂直断面でみて、光透過性部材206側の部分の面積S1に対する光吸収性部材202側の部分の面積S2の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   Also in the joint structure 200 of the present embodiment, similarly to the joint structure 100 of the previous embodiment, the annular welded portion 204 has an area of a portion on the light transmitting member 206 side when viewed in a cross section perpendicular to the extending direction. The ratio of the area S2 of the portion on the light absorbing member 202 side to S1 is in the range of 12 to 35, and more preferably in the range of 19 to 26.

図3を参照し、本発明に従う他の実施形態の接合構造体300について説明する。この実施形態の接合構造体300は、光透過性部材300の、環状の溶着部304よりも外側位置に、環状の溶着部304が形成される前の状態で開口部O内が減圧状態とされた場合に変形して光吸収性部材302の周壁308の上端面に密着する薄肉片324を設けた点で先の実施形態の接合構造体100,200とは異なる。これにより、光透過性部材306を光吸収性部材302に重ね合わせた際に、光吸収性部材302の周壁308の上端面と光透過性部材306との間に隙間が生じている場合でも、吸引開口312を通じて開口部O内を減圧した際に光透過性部材306の薄肉片324を光吸収性部材302の周壁308の上端面に引き寄せて密着させることができるため、空気漏れによる真空破壊を防止し光透過性部材306及び光吸収性部材302同士で優れた吸引密着性を得ることができる。   Referring to FIG. 3, a description will be given of a joint structure 300 according to another embodiment of the present invention. In the joint structure 300 of this embodiment, the inside of the opening O is decompressed at a position outside the annular welded portion 304 of the light transmitting member 300 before the annular welded portion 304 is formed. This is different from the joint structures 100 and 200 of the previous embodiment in that a thin piece 324 is provided which is deformed in the case where the thin portion 324 is brought into close contact with the upper end surface of the peripheral wall 308 of the light absorbing member 302. Accordingly, when the light transmitting member 306 is superimposed on the light absorbing member 302, even when a gap is formed between the upper end surface of the peripheral wall 308 of the light absorbing member 302 and the light transmitting member 306, When the inside of the opening O is depressurized through the suction opening 312, the thin piece 324 of the light transmitting member 306 can be drawn to and adhered to the upper end surface of the peripheral wall 308 of the light absorbing member 302, so that vacuum breakage due to air leakage can be prevented. Thus, excellent suction adhesion can be obtained between the light transmitting member 306 and the light absorbing member 302.

これをより確実にするため、薄肉片324は、環状の溶着部304が形成される前の状態で開口部O内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、光吸収性部材302に密着する易変形性を発揮する厚みに形成されていることが好ましい。具体的には、十分な変形による密着性を確保するため、薄肉片の厚みは、0.005mm〜0.2mmとすることが好ましく、成形性を考慮すると0.01mm〜0.1mmとすることがより好ましい。   In order to ensure this, the thin piece 324 deforms when the inside of the opening O is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion 304 is formed, It is preferable that it is formed to a thickness that exhibits easy deformability in close contact with the light absorbing member 302. Specifically, the thickness of the thin piece is preferably set to 0.005 mm to 0.2 mm in order to secure adhesion due to sufficient deformation, and 0.01 mm to 0.1 mm in consideration of formability. Is more preferred.

図3に示す例では、薄肉片324は、光透過性部材306の周縁部下端から光吸収性部材302の周壁308の上端面に沿うように水平に形成されているが、これに限らず、図4(a)に示すように周壁308の外周面に沿うように光透過性部材306の周縁部下端から垂下させてもよく、あるいは図4(b)に示すように、光吸収性部材302の周壁308の上端面に環状溝326を形成するとともに、光透過性部材306の下面から薄肉片324を垂下させ環状溝326内に挿入するようにしてもよい。   In the example shown in FIG. 3, the thin piece 324 is formed horizontally so as to extend along the upper end surface of the peripheral wall 308 of the light absorbing member 302 from the lower end of the peripheral portion of the light transmitting member 306, but is not limited thereto. As shown in FIG. 4A, the light-transmissive member 306 may hang down from the lower end of the peripheral edge along the outer peripheral surface of the peripheral wall 308, or as shown in FIG. An annular groove 326 may be formed on the upper end surface of the peripheral wall 308, and the thin piece 324 may be hung down from the lower surface of the light transmitting member 306 and inserted into the annular groove 326.

本実施形態の接合構造体300においても、先の実施形態の接合構造体100,200と同様、環状の溶着部304は、その延在方向に対する垂直断面でみて、光透過性部材306側の部分の面積S1に対する光吸収性部材302側の部分の面積S2の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   Also in the joint structure 300 of the present embodiment, like the joint structures 100 and 200 of the previous embodiment, the annular welded portion 304 has a portion on the light transmitting member 306 side when viewed in a cross section perpendicular to the extending direction. The ratio of the area S2 of the portion on the light absorbing member 302 side to the area S1 is within the range of 12 to 35, and more preferably within the range of 19 to 26.

次に、図5〜図9を参照して、上記実施形態の接合構造体を製造するための製造方法について説明する。なお、ここでは図1に示した接合構造体100を製造する方法を例にとり説明するが、この製造方法は、図2〜図4に示した接合構造体200,300を製造する場合にも適用することができる。 Next, a manufacturing method for manufacturing the joint structure of the above embodiment will be described with reference to FIGS. Here, a method for manufacturing the joint structure 100 shown in FIG. 1 will be described as an example, but this manufacturing method is also applied to a case where the joint structures 200 and 300 shown in FIGS. can do.

まず、第1の工程は部材準備工程であり、この工程では光吸収性部材102及び光透過性部材106を準備する。光吸収性部材102及び光透過性部材106の材料及び基本的な構造については、接合構造体100について図1を参照して説明したとおりであるため、重複する説明は省略する。   First, the first step is a member preparing step, in which the light absorbing member 102 and the light transmitting member 106 are prepared. The material and the basic structure of the light absorbing member 102 and the light transmitting member 106 are as described with reference to FIG. 1 for the joint structure 100, and thus the overlapping description will be omitted.

図5は、光透過性部材106との接合前の光吸収性部材102を示し、(a)は平面図であり、(b)は(a)中のD−D線に沿う断面図である。この図に示すように、光吸収性部材102の周壁108の上端面(光透過性部材106と当接する面)であって、環状の溶着部104の形成予定部位には環状溝130を予め形成しておく。環状溝130の幅は、そこに照射されるレーザ光の径よりも大きくしておくことが好ましく、例えば、0.1mm〜3mmとすることが好ましい。環状溝130の幅が0.1mm未満の場合には、そこに形成される環状の溶着部104の幅を十分に確保できず、溶着強度が低下するため、外力や圧力変動によって空気や水、埃が浸透し気密性能等を維持できなくなる虞がある。一方、環状溝130の幅が3mmを超えると、溶着時の熱によって環状の溶着部104以外の部分が熱の影響を受けて変形したり、環状の溶着部104が固化する際の熱収縮によって部品に過度のひずみが残り、変形したりする虞がある。   5A and 5B show the light absorbing member 102 before being bonded to the light transmitting member 106, wherein FIG. 5A is a plan view, and FIG. 5B is a cross-sectional view along line DD in FIG. . As shown in this figure, an annular groove 130 is formed in advance on the upper end surface of the peripheral wall 108 of the light absorbing member 102 (the surface that comes into contact with the light transmitting member 106), where the annular welded portion 104 is to be formed. Keep it. It is preferable that the width of the annular groove 130 be larger than the diameter of the laser beam applied thereto, and for example, it is preferable that the width be 0.1 mm to 3 mm. When the width of the annular groove 130 is less than 0.1 mm, the width of the annular welded portion 104 formed there cannot be sufficiently secured, and the welding strength is reduced. There is a possibility that the dust may penetrate and the hermetic performance or the like cannot be maintained. On the other hand, when the width of the annular groove 130 exceeds 3 mm, portions other than the annular welded portion 104 are deformed under the influence of heat due to heat at the time of welding, or due to heat shrinkage when the annular welded portion 104 is solidified. There is a possibility that excessive strain remains in the part and the part is deformed.

また、環状溝130の深さ(境界面Fから溝底までの距離)は、環状溝130の幅をL(mm)として、L/20(mm)以上L(mm)以下とすることが好ましく、このようにすれば、図8を参照して後述するように、環状溝130へのレーザ光照射により溝底に発生した溶融池を十分に膨張させることができとともに、その熱を過不足なく光透過性部材106へ伝達させることができ、良好な溶着部104を形成することができる。   Further, it is preferable that the depth of the annular groove 130 (the distance from the boundary surface F to the groove bottom) is L / 20 (mm) or more and L (mm) or less, where L is the width of the annular groove 130 (mm). In this way, as described later with reference to FIG. 8, the molten pool generated at the bottom of the annular groove 130 by irradiating the annular groove 130 with the laser beam can be sufficiently expanded, and the heat can be sufficiently and sufficiently supplied. The light can be transmitted to the light transmissive member 106, and a good welded portion 104 can be formed.

さらに、環状溝130の深さは、L/10(mm)以上L/3(mm)以下とすることが、溶着部104の強度及び気密性を確保する点で好ましい。例えば、環状溝130は、溝幅Lを0.3mm、溝深さを0.05(=L/6)mmとすることができる。溶着部130の深さがL/20(mm)未満であり浅すぎると、環状溝130の溝底へのレーザ光の照射後直ぐに、膨張した溶融池が光透過性部材106に接触するとともに熱が拡散し、溶融池を十分に横方向へ広げることができず、溶着不良となる(環状溝130の一部が残ったままとなる)虞がある。溶着部130の深さがL(mm)を超え深すぎると、環状溝130の溝底で発生した溶融池が膨張するものの光透過性部材106まで到達できず、その場で焼けに伴う炭化や変色が発生し、溶着不良となる虞がある。なお、図示例において環状溝130の断面形状は矩形であるが、半円形状または半楕円形状であってもよい。また、周壁108の上端面には、環状溝130と開口部O内とを連通する少なくとも1つ(図示例では各辺に対応して4つ)の連通溝132を予め形成しておく。   Further, it is preferable that the depth of the annular groove 130 is not less than L / 10 (mm) and not more than L / 3 (mm) in terms of securing the strength and the airtightness of the welded portion 104. For example, the annular groove 130 can have a groove width L of 0.3 mm and a groove depth of 0.05 (= L / 6) mm. If the depth of the welded portion 130 is less than L / 20 (mm) and is too shallow, the expanded molten pool comes into contact with the light transmitting member 106 immediately after the laser beam is irradiated to the groove bottom of the annular groove 130 and heat is generated. Is diffused, and the molten pool cannot be sufficiently expanded in the lateral direction, which may result in poor welding (a part of the annular groove 130 remains). If the depth of the welded portion 130 exceeds L (mm) and is too deep, the molten pool generated at the groove bottom of the annular groove 130 expands, but cannot reach the light transmitting member 106, and carbonization due to burning on the spot may occur. Discoloration may occur, resulting in poor welding. Although the cross-sectional shape of the annular groove 130 is rectangular in the illustrated example, it may be semicircular or semi-elliptical. At least one (four in the illustrated example, four corresponding to each side) communication groove 132 that connects the annular groove 130 and the inside of the opening O is formed in advance on the upper end surface of the peripheral wall 108.

第2の工程は、図6(a)に示すように、光吸収性部材102の上に光透過性部材106を開口部Oを覆うように配置する配置工程である。 The second step is an arrangement step of disposing a light-transmitting member 106 on the light-absorbing member 102 so as to cover the opening O, as shown in FIG.

第3の工程は、互いに重ね合わされた光吸収性部材102と光透過性部材106を吸引密着させる吸引密着工程であり、かかる吸引密着は開口部O内を減圧することにより行う。図6(b)の左図に光透過性部材106を光吸収性部材102に重ねた後の様子を示すように、光透過性部材106と光吸収性部材102との間には、光透過性部材106の成形時の反りや後述するレーザ光による溶着時の熱変形等に起因して隙間が生じる場合があるが、光透過性部材106を薄板状に形成したことから、図6(b)の右図に示すように、開口部O内を減圧することにより光透過性部材106の周縁部を周壁108の上端面に引き寄せるように変形させ、該上端面に密着させることができる。   The third step is a suction and adhesion step in which the light-absorbing member 102 and the light-transmitting member 106 that are superimposed on each other are suction-adhered, and the suction adhesion is performed by reducing the pressure in the opening O. As shown in the left view of FIG. 6B after the light transmitting member 106 is overlaid on the light absorbing member 102, light transmitting between the light transmitting member 106 and the light absorbing member 102. In some cases, a gap may be formed due to warpage during molding of the transparent member 106 or thermal deformation during welding by laser light, which will be described later. However, since the light-transmitting member 106 is formed in a thin plate shape, FIG. As shown in the right diagram of FIG. 7), by reducing the pressure in the opening O, the peripheral portion of the light transmitting member 106 can be deformed so as to be drawn toward the upper end surface of the peripheral wall 108 and can be brought into close contact with the upper end surface.

開口部O内の減圧は、具体的には、図7に示すような外部の圧力調整装置Dを用い、光吸収性部材102に予め形成した吸引開口112を通じて行うことができる。   Specifically, the pressure in the opening O can be reduced through the suction opening 112 formed in the light absorbing member 102 using an external pressure adjusting device D as shown in FIG.

圧力調整装置Dは主として、減圧装置D1と、加圧装置D2と、制御器D3と、吸引開口112に接続される二重配管Pとからなる。   The pressure adjusting device D mainly includes a pressure reducing device D1, a pressurizing device D2, a controller D3, and a double pipe P connected to the suction opening 112.

減圧装置D1は、開口部O内の空気を吸引排気するための真空ポンプと電動のリークバルブとを有している(図示省略)。減圧装置D1の吸引ラインL1には、圧力センサPG1が設けられており、これにより減圧時の開口部O内の圧力を検出することができる。   The pressure reducing device D1 has a vacuum pump for sucking and discharging air in the opening O and an electric leak valve (not shown). A pressure sensor PG1 is provided on the suction line L1 of the decompression device D1, so that the pressure in the opening O at the time of decompression can be detected.

加圧装置D2は、空気又は窒素やアルゴン等の不活性ガスからなるパージガスを供給するための加圧タンクと供給バルブとを有している(図示省略)。加圧装置D2の供給ラインL2には、圧力センサPG2が設けられており、これにより加圧時において開口部O内の圧力を検出することができる。   The pressurizing device D2 has a pressurizing tank for supplying a purge gas composed of air or an inert gas such as nitrogen or argon, and a supply valve (not shown). The supply line L2 of the pressurizing device D2 is provided with a pressure sensor PG2, which can detect the pressure in the opening O during pressurization.

制御器D3は、PLC(プログラマブルロジックコントローラ)やパーソナルコンピュータ等によって構成され、供給バルブ及びリークバルブの開度を調整する。また、圧力センサPG1,PG2も制御器D3に接続し、圧力センサPG1,PG2の検出信号に基づき上記供給バルブ及びリークバルブを制御することもできる。   The controller D3 is configured by a PLC (programmable logic controller), a personal computer, or the like, and adjusts the opening of the supply valve and the leak valve. Further, the pressure sensors PG1 and PG2 can also be connected to the controller D3 to control the supply valve and the leak valve based on the detection signals of the pressure sensors PG1 and PG2.

二重配管Pは、外側に配置された吸引配管p1と内側に配置された供給配管p2からなる。吸引配管p1は開口部O内と減圧装置D1とを連通し、開口部O内の空気を吸引する。供給配管p2は、開口部O内と加圧装置D2とを連通し、開口部O内にパージガスを供給する。図示は省略するが、二重配管Pの外側の配管を供給配管とし、内側の配管を吸引配管とすることもできるが、図示例のように、外側に吸引配管p1を配置する方が、溶着時に発生するガスを効率的に除去できる点で好ましい。   The double pipe P includes a suction pipe p1 arranged outside and a supply pipe p2 arranged inside. The suction pipe p1 communicates the inside of the opening O with the decompression device D1, and sucks the air in the opening O. The supply pipe p2 communicates the inside of the opening O with the pressurizing device D2, and supplies the purge gas into the opening O. Although illustration is omitted, the outer pipe of the double pipe P can be used as a supply pipe, and the inner pipe can be used as a suction pipe. This is preferable in that the gas generated sometimes can be efficiently removed.

第4の工程は、図7に示すように、光吸収性部材102と光透過性部材106とを吸引密着した状態で、レーザ光LBを光透過性部材106側から光吸収性部材102の周壁108の上端面へ向けて照射し、光吸収性部材102と光透過性部材106の境界面Fまたはその近傍に環状の溶着部104及び点状の溶着部114(図1参照)を形成して光吸収性部材102及び光透過性部材106同士を接合する接合工程である。   In the fourth step, as shown in FIG. 7, in a state where the light absorbing member 102 and the light transmitting member 106 are in close contact with each other by suction, the laser beam LB is applied from the light transmitting member 106 side to the peripheral wall of the light absorbing member 102. Irradiation is performed toward the upper end surface of the light-absorbing member 108 to form an annular welded portion 104 and a dot-like welded portion 114 (see FIG. 1) at or near the boundary surface F between the light absorbing member 102 and the light transmitting member 106. This is a joining step of joining the light absorbing member 102 and the light transmitting member 106 to each other.

この接合工程においても引き続き開口部O内の減圧状態は維持するが、少なくとも環状の溶着部104を形成する間は、供給配管p2を介して開口部O内にパージガスを供給することが好ましい。このようにすれば、開口部O内に空気の流れを発生させることができ、溶着時に生じる煤や難燃剤の気化成分vを吸引配管p1を通じて効率的に外部に排出、除去することができる。   In this joining step, the pressure-reduced state in the opening O is maintained, but it is preferable to supply a purge gas into the opening O via the supply pipe p2 at least while the annular welded portion 104 is formed. In this way, a flow of air can be generated in the opening O, and soot and the vaporized component v of the flame retardant generated at the time of welding can be efficiently discharged and removed to the outside through the suction pipe p1.

そして、溶着部104,114を形成するにあたっては、まず点状の溶着部114を形成し、その後に、環状の溶着部104を形成する。これは、光透過性部材106への熱負荷が比較的小さい点状の溶着部114により光透過性部材106を光吸収性部材102に仮接合することで、その後に熱負荷の比較的大きい環状の溶着部104を形成した際の光透過性部材106の熱変形を抑制し、該熱変形に起因した空気漏れによる真空破壊を防止するためである。環状の溶着部104の溶着が進むにつれて、真空の受圧面積が減るため、その陰圧分を補う点では点状の溶着部114は平面を形成できる3点以上設けることが好ましい。この例では、点状の溶着部114は、光透過性部材106のコーナー部に隣接して4箇所に形成する。   Then, in forming the welded portions 104 and 114, first, a dot-shaped welded portion 114 is formed, and then the annular welded portion 104 is formed. This is because the light-transmitting member 106 is temporarily joined to the light-absorbing member 102 by a point-like welded portion 114 having a relatively small heat load on the light-transmitting member 106, and thereafter, an annular shape having a relatively large heat load is applied. This is for suppressing thermal deformation of the light transmissive member 106 when the welded portion 104 is formed and preventing vacuum breakage due to air leakage caused by the thermal deformation. As the welding of the annular welding portion 104 progresses, the pressure receiving area of the vacuum decreases, so that in order to compensate for the negative pressure, it is preferable to provide three or more point welding portions 114 that can form a plane. In this example, the dot-shaped welded portions 114 are formed at four locations adjacent to the corners of the light transmitting member 106.

点状の溶着部114は、光学ヘッドH(図7)を光透過性部材106の上方で停止させた状態でレーザ光LBを光吸収性部材102の周壁108の上端面に照射することで形成される。点状の溶着部114の径は、約0.3〜0.7mmとすることが好ましく、約0.5mmとすることがより好ましい。環状の溶着部104は、光学ヘッドHを光透過性部材106の上方において光吸収性部材102の周壁108に沿って移動させながらレーザ光LBを周壁108上端面に照射することで形成される。環状の溶着部104の幅は、約0.3〜0.7mmとすることが好ましく、約0.5mmとすることがより好ましい。なお、レーザ光LBの発信器としては、例えば、ファイバレーザ(波長:1070nm)やYAGレーザ(波長:1064nm)、半導体レーザ(波長:808nm,840nmまたは940nm)、CO2レーザ(波長:10600nm)などを用いることができる。   The point-like welded portion 114 is formed by irradiating the laser beam LB to the upper end surface of the peripheral wall 108 of the light absorbing member 102 with the optical head H (FIG. 7) stopped above the light transmitting member 106. Is done. The diameter of the spot-shaped welded portion 114 is preferably about 0.3 to 0.7 mm, and more preferably about 0.5 mm. The annular welded portion 104 is formed by irradiating the upper end surface of the peripheral wall 108 with the laser beam LB while moving the optical head H along the peripheral wall 108 of the light absorbing member 102 above the light transmitting member 106. The width of the annular welded portion 104 is preferably about 0.3 to 0.7 mm, and more preferably about 0.5 mm. As a transmitter of the laser beam LB, for example, a fiber laser (wavelength: 1070 nm), a YAG laser (wavelength: 1064 nm), a semiconductor laser (wavelength: 808 nm, 840 nm or 940 nm), a CO2 laser (wavelength: 10600 nm), or the like is used. Can be used.

ここで図8(a)〜(d)を参照し、光吸収性部材102の周壁108の上端面に予め形成した環状溝130にレーザ光LBを照射することにより、図1で説明した第1部分の面積S1に対する第2部分の面積S2の比率が12〜35となる環状の溶着部104を形成するプロセスについて説明する。   Here, with reference to FIGS. 8A to 8D, by irradiating the annular groove 130 formed in advance on the upper end surface of the peripheral wall 108 of the light absorbing member 102 with the laser light LB, the first groove illustrated in FIG. A process for forming the annular welded portion 104 in which the ratio of the area S2 of the second portion to the area S1 of the portion is 12 to 35 will be described.

図8(a)に示すように、光吸収性部材102と光透過性部材106を互いに吸引密着させた状態で、光透過性部材106側から環状溝130の溝底にレーザ光を照射すると、図8(b)に示すように環状溝130の溝底が発熱して溶融し、溶融池内で発泡が開始される。引き続きレーザ光を照射すると、図8(c)に示すように発泡が成長して溶融池が成長する。このとき、環状溝130の存在により、光吸収性部材102の溶融池は直ぐには光透過性部材106に接触せず、溶融池は十分な幅及び深さとなるまで成長させることができる。図8(d)には、溶融池が光透過性部材106に到達した後にレーザ光の照射を停止し、環状の溶着部104の形成が完了した状態を示している。   As shown in FIG. 8A, when the light-absorbing member 102 and the light-transmitting member 106 are brought into close contact with each other by suction, laser light is applied to the groove bottom of the annular groove 130 from the light-transmitting member 106 side. As shown in FIG. 8B, the groove bottom of the annular groove 130 generates heat and melts, and foaming starts in the molten pool. When the laser beam is subsequently irradiated, foaming grows and a molten pool grows as shown in FIG. At this time, due to the presence of the annular groove 130, the molten pool of the light absorbing member 102 does not immediately contact the light transmitting member 106, and the molten pool can be grown to a sufficient width and depth. FIG. 8D shows a state in which the irradiation of the laser beam is stopped after the molten pool reaches the light transmitting member 106, and the formation of the annular welded portion 104 is completed.

また、図5に示した製造方法では、光吸収性部材102の周壁108の上端面に環状溝130と開口部Oとを連通する連通溝132を設けているため、環状の溶着部104の形成過程で生じる煤や難燃剤の気化成分vは、環状溝130及び連通溝132を通って開口部O内に吸引、排出され、最終的には、吸引配管p1により外部に排出される。 Further, in the manufacturing method shown in FIG. 5, since the communication groove 132 that connects the annular groove 130 and the opening O is provided on the upper end surface of the peripheral wall 108 of the light absorbing member 102, the formation of the annular welded portion 104 is performed. The soot and the vaporized component v of the flame retardant generated in the process are sucked and discharged into the opening O through the annular groove 130 and the communication groove 132, and finally discharged to the outside by the suction pipe p1.

第5の工程は、環状の溶着部104を形成した後に引き続き開口部O内の減圧を保持し、または開口部O内を加圧し、あるいは減圧と加圧を交互に行い、その際の単位時間当たり圧力の変化を測定することによって環状の溶着部104の気密性試験を行う気密性検査工程である。開口部O内の圧力は、図7に示した圧力センサPG1,PG2で測定し、その単位時間当たりの圧力の変化は制御部D3で演算し、必要に応じて外部に出力ないし表示させることができる。あるいは、図示しない流量センサを吸引ラインL1又は供給ラインL2に設けておき、単位時間当たりの流量の変化を測定することにより、環状の溶着部104の気密性試験を行うこともできる。   The fifth step is to maintain the reduced pressure in the opening O after forming the annular welded portion 104, or to pressurize the inside of the opening O, or alternately perform the reduced pressure and the increased pressure, and perform the unit time at that time. This is an airtightness inspection step of performing an airtightness test of the annular welded portion 104 by measuring a change in the contact pressure. The pressure in the opening O is measured by the pressure sensors PG1 and PG2 shown in FIG. 7, and the change in pressure per unit time is calculated by the control unit D3, and can be externally output or displayed as necessary. it can. Alternatively, a flow rate sensor (not shown) may be provided in the suction line L1 or the supply line L2, and the airtightness test of the annular welded portion 104 may be performed by measuring a change in flow rate per unit time.

図示しない第6の工程は、環状の溶着部104の形成後に、開口部O内の減圧を維持したまま、光透過性部材106側からレーザ光LBを吸引開口112の内部又はその周囲に照射することによって吸引開口112を閉塞させる吸引開口閉鎖工程である。これにより、開口部O内の真空を保ったまま開口部O内を密閉することができる。勿論、吸引開口112は開放したままでもよい。   In a sixth step (not shown), after the formation of the annular welded portion 104, the laser beam LB is irradiated from the light transmitting member 106 side to the inside or around the suction opening 112 while maintaining the reduced pressure in the opening O. This is a suction opening closing step of closing the suction opening 112. Thus, the inside of the opening O can be sealed while the vacuum in the opening O is maintained. Of course, the suction opening 112 may be left open.

上記の接合構造体の製造方法によれば、光吸収性部材102に開口部Oを設けておき、この開口部O内を減圧することによって光吸収性部材102と光透過性部材106を吸引密着させる構成としたので、両部材102,106を加圧密着するための従来のガラス板を不要とすることができ、上述したようなガラス板に起因する種々の問題を解消することができる。 According to the above-described method for manufacturing a joint structure, the light absorbing member 102 is provided with the opening O, and the light absorbing member 102 and the light transmitting member 106 are brought into close contact with each other by reducing the pressure in the opening O. With such a configuration, a conventional glass plate for press-fitting the two members 102 and 106 can be eliminated, and the various problems caused by the glass plate as described above can be solved.

また、開口部Oの減圧に伴い光透過性部材106を容易に変形可能に構成したことから、光透過性部材106を光吸収性部材102に重ね合わせた際にこれらの間に隙間が生じる場合でも開口部O内を減圧することにより光透過性部材106でこの隙間を閉鎖することができ、優れた吸引密着性を得ることができる。   In addition, since the light transmitting member 106 is configured to be easily deformable as the pressure of the opening O is reduced, a gap may be generated between the light transmitting member 106 and the light absorbing member 102 when the light transmitting member 106 is superimposed on the light absorbing member 102. However, by reducing the pressure in the opening O, the gap can be closed by the light transmitting member 106, and excellent suction adhesion can be obtained.

さらに、環状の溶着部104を形成するのに先立って、点状の溶着部114を形成して仮接合する構成としたことから、環状の溶着部104の形成途中での光透過性部材106の熱変形を抑制することができ、当該熱変形に起因した吸引密着性の低下を防止することができる。   Further, prior to the formation of the annular welded portion 104, the point-like welded portion 114 is formed and temporarily joined, so that the light transmitting member 106 is formed during the formation of the annular welded portion 104. Thermal deformation can be suppressed, and a decrease in suction adhesion due to the thermal deformation can be prevented.

さらに、光吸収性部材102の周壁108の上端面に環状溝130を形成し、この環状溝130にレーザ光LBを照射して環状の溶着部104を形成する構成としたことから、十分な幅及び深さの溶着部104を形成して高い接合強度を得ることができるのに加えて、光透過性部材106への熱影響を小さくし、溶着過程における光透過性部材106の熱変形を抑制することができ、当該熱変形に起因した吸引密着性の低下を防止することができる。   Further, an annular groove 130 is formed on the upper end surface of the peripheral wall 108 of the light absorbing member 102, and the annular groove 130 is irradiated with the laser beam LB to form the annular welded portion 104. In addition to being able to obtain high bonding strength by forming the welded portion 104 having a small depth and depth, the thermal effect on the light transmissive member 106 is reduced, and thermal deformation of the light transmissive member 106 during the welding process is suppressed. It is possible to prevent a decrease in suction adhesion due to the thermal deformation.

さらに、光吸収性部材102の周壁108の上端面に環状溝130と開口部Oを連通する連通溝132を設ける構成としたことから、環状の溶着部104の形成過程で生じる煤や難燃剤の気化成分vを、環状溝130及び連通溝132と介して開口部O内に吸引し、最終的には、吸引配管p1を介して外部に排出することができる。   Further, since the communication groove 132 communicating the annular groove 130 and the opening O is provided on the upper end surface of the peripheral wall 108 of the light absorbing member 102, soot and flame retardant generated in the process of forming the annular welded portion 104 are removed. The vaporized component v can be sucked into the opening O via the annular groove 130 and the communication groove 132, and finally discharged to the outside via the suction pipe p1.

さらに、開口部O内の減圧を該開口部O内にパージガスを供給しながら行う構成としたことにより、開口部O内に空気の流れを発生させ、煤や難燃剤の気化成分vを効率的に排出、除去することができる。   Further, by employing a configuration in which the pressure in the opening O is reduced while supplying the purge gas into the opening O, a flow of air is generated in the opening O, and the vaporized component v of soot and a flame retardant is efficiently removed. Can be discharged and removed.

さらに、環状の溶着部104を形成した後に引き続き開口部O内の減圧を保持し、または開口部O内を加圧し、あるいは減圧と加圧を交互に行い、その際の単位時間当たりの圧力又は流量の変化を測定することによって環状の溶着部104の気密性試験を行う場合には、製造設備を簡略化することができるのに加えて、製造時間を大幅に短縮することができる。   Further, after the annular welded portion 104 is formed, the pressure in the opening O is continuously maintained, or the pressure in the opening O is increased, or the pressure is reduced and increased alternately. When the airtightness test of the annular welded portion 104 is performed by measuring the change in the flow rate, the manufacturing equipment can be simplified and the manufacturing time can be greatly reduced.

さらに、開口部O内の圧力を圧力センサPG1で常時検出し、その圧力の変化に基づき、光吸収性部材102と光透過性部材106との密着、環状の溶着部104の形成開始、及び環状の溶着部104の形成完了の判別を行うようにした場合には、通常生産時の加工時間の短縮と、異常発生時の早期対応が可能となる。   Further, the pressure in the opening O is constantly detected by the pressure sensor PG1, and based on the change in the pressure, the light absorbing member 102 and the light transmitting member 106 are brought into close contact, the formation of the annular welded portion 104 is started, and When the completion of the formation of the welded portion 104 is determined, it is possible to reduce the processing time during normal production and to quickly respond to the occurrence of an abnormality.

以上、図示例に基づき本発明について説明したが、本発明は上述の実施形態に限定されず、特許請求の範囲の記載内で種々の変更、追加等を行うことが可能である。例えば、上述の実施形態の接合構造体おいては、溝底が平坦な環状溝130を図示したが、これに限らず、図9(a)に示すように、環状溝の溝底に隆起部134を設けてもよい。また、環状溝130は一つに限らず、図9(b)に示すように隣接して2つ設け、溶着時に合体して一つの幅広の溶着部104を形成するようにしてもよく、図9(c)に示すように、光透過性部材106側にも環状溝136を設けてもよい。 As described above, the present invention has been described based on the illustrated examples. However, the present invention is not limited to the above embodiments, and various changes, additions, and the like can be made within the scope of the claims. For example, Oite the connection structure of the embodiment described above, although the groove bottom is shown a flat annular groove 130 is not limited to this, as shown in FIG. 9 (a), raised the groove bottom of the annular groove A portion 134 may be provided. Further, the number of the annular grooves 130 is not limited to one, and two annular grooves 130 may be provided adjacent to each other as shown in FIG. As shown in FIG. 9C, an annular groove 136 may be provided also on the light transmitting member 106 side.

(第1実施例)
本発明をコネクタに適用した例について説明する。図10は、図2に示した実施形態の接合構造体200の一実施例としてのコネクタを示し、(a)は斜視図であり、(b)は嵌合方向Xに沿った断面図である。図中、対応する部材又は部分には符号に「’」を加えて示し、重複した説明は省略する。
(First embodiment)
An example in which the present invention is applied to a connector will be described. 10A and 10B show a connector as one example of the joint structure 200 of the embodiment shown in FIG. 2, wherein FIG. 10A is a perspective view, and FIG. 10B is a cross-sectional view along the fitting direction X. . In the drawings, corresponding members or portions are indicated by adding “′” to the reference numerals, and redundant description will be omitted.

このコネクタ200’は、携帯機器や情報機器などの電子機器内の基板に固定され、嵌合方向Xに沿って挿入される図示しない相手方のコネクタに接続されるレセプタクルコネクタであり、主として、光吸収性部材202としてのハウジング202’と、それぞれ嵌合方向Xに延在しかつ嵌合方向Xに対して直交する方向に配列される複数のコンタクト203と、ハウジング202’の開口部O’を覆うとともに封止する、光透過性部材206としての薄板状のカバー206’とを備えるものである。   The connector 200 ′ is a receptacle connector that is fixed to a substrate in an electronic device such as a portable device or an information device, and is connected to a mating connector (not shown) inserted along the fitting direction X, and is mainly a light-absorbing connector. A housing 202 'as the conductive member 202, a plurality of contacts 203 each extending in the fitting direction X and arranged in a direction orthogonal to the fitting direction X, and covering the opening O' of the housing 202 '. And a thin plate-shaped cover 206 ′ as a light-transmitting member 206 for sealing.

ハウジング202’は、光吸収性かつ絶縁性の熱可塑性樹脂から形成されており、前方に相手方のコネクタが挿入される嵌合口212’を有する周壁208’と、底壁210’と、天壁218’とを有している。   The housing 202 ′ is made of a light-absorbing and insulating thermoplastic resin, and has a peripheral wall 208 ′ having a fitting opening 212 ′ into which a mating connector is inserted, a bottom wall 210 ′, and a top wall 218. 'And have.

ハウジング202’の天壁218’には、嵌合方向Xに沿って形成された複数のスリット220’が形成されており、該スリット220’により開口部O’が区画されている。各スリット220’内にはコンタクト203が配置されている。各コンタクト203の前方端部は相手方のコネクタとの接続のため天壁218’の内面より下方に突出し、その後方端部が電子機器の基板または他の配線板との接続のためハウジング202’から露出している。   A plurality of slits 220 'are formed in the top wall 218' of the housing 202 'along the fitting direction X, and the slits 220' define openings O '. A contact 203 is arranged in each slit 220 '. The front end of each contact 203 protrudes below the inner surface of the top wall 218 'for connection with the mating connector, and the rear end thereof is connected to the board of the electronic device or another wiring board from the housing 202'. It is exposed.

カバー206’は、ハウジング202’の開口部O’を覆うようにハウジング202’に重ね合わされ、すべてのスリット220’をまとめて囲繞するように形成された環状の溶着部204’を介して周壁208’の上端面に全周に亘って接合されている。これにより、嵌合口212’から電子機器内部へのスリット220’を介した空気や埃、水の浸水ルートは、カバー206’及び環状の溶着部204’によって遮断されている。また、環状の溶着部204’の外側には、カバー206’のコーナー部に隣接して4つの点状の溶着部214’が形成されている。   The cover 206 ′ is overlapped with the housing 202 ′ so as to cover the opening O ′ of the housing 202 ′, and the peripheral wall 208 ′ is formed through an annular welding portion 204 ′ formed so as to surround all the slits 220 ′. 'Is joined to the upper end surface over the entire circumference. Thus, the infiltration route of air, dust, and water through the slit 220 'from the fitting opening 212' to the inside of the electronic device is blocked by the cover 206 'and the annular welded portion 204'. Outside the annular welded portion 204 ', four dotted welded portions 214' are formed adjacent to the corners of the cover 206 '.

コネクタ200’において、環状の溶着部204’は、その延在方向に対する垂直断面でみて、カバー206’側の部分の面積S1’に対するハウジング202’側の部分の面積S2’の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   In the connector 200 ', the ratio of the area S2' of the portion on the housing 202 'side to the area S1' of the portion on the side of the cover 206 'is 12 to 35 when viewed in a cross section perpendicular to the extending direction of the annular welded portion 204'. And more preferably in the range of 19 to 26.

このようなコネクタ200’は、嵌合口212’を吸引開口212として、図5〜図8を参照して説明した製造方法に従って製造することができる。   Such a connector 200 'can be manufactured according to the manufacturing method described with reference to FIGS. 5 to 8 using the fitting opening 212' as the suction opening 212.

(第2実施例)
本発明をセンサに適用した例について説明する。図11は、図4(a)に示した実施形態の接合構造体300の一実施例としてのセンサを示し、(a)は斜視図であり、(b)は断面図である。
(Second embodiment)
An example in which the present invention is applied to a sensor will be described. FIGS. 11A and 11B show a sensor as one example of the joint structure 300 of the embodiment shown in FIG. 4A, where FIG. 11A is a perspective view and FIG. 11B is a cross-sectional view.

このセンサ300’は、加速度センサ、振動センサ、角速度センサ、距離センサ、位置センサなど如何なる形式のセンサとすることができる。センサ300’は、主として、光吸収性部材302としての筐体302’と、筐体302’の開口部O’を覆うとともに封止する光透過性部材306としてのカバー306’とを備えるものであり、筐体302’内部に図示しない検出器本体(センサチップ)を収容する。   The sensor 300 'can be any type of sensor, such as an acceleration sensor, a vibration sensor, an angular velocity sensor, a distance sensor, a position sensor, and the like. The sensor 300 ′ mainly includes a housing 302 ′ as a light absorbing member 302 and a cover 306 ′ as a light transmitting member 306 that covers and seals the opening O ′ of the housing 302 ′. In addition, a detector main body (sensor chip) (not shown) is accommodated in the housing 302 ′.

筐体302’は、光吸収性の熱可塑性樹脂から形成されており、開口部O’を区画するとともに前方に向けて吸引筒312’を突設する周壁308’と、底壁310’とを有している。   The housing 302 ′ is formed of a light-absorbing thermoplastic resin, and includes a peripheral wall 308 ′ that partitions the opening O ′ and protrudes the suction cylinder 312 ′ forward, and a bottom wall 310 ′. Have.

カバー306’は、筐体302’の開口部O’を覆うように筐体302’の周壁308’に被せられ、点状の溶着部314’及び環状の溶着部304’を介して全周に亘って接合されている。カバー306’の周縁部には、周壁308’の外面に沿って薄肉片324’が垂設されている。この薄肉片324’は吸引筒312’を通じて開口部O’内を減圧した際に周壁308’側に引き寄せられて密着するよう形成されている。   The cover 306 ′ is placed on the peripheral wall 308 ′ of the housing 302 ′ so as to cover the opening O ′ of the housing 302 ′, and is provided on the entire circumference via a dotted welding portion 314 ′ and an annular welding portion 304 ′. It is joined over. A thin piece 324 'is suspended from the peripheral edge of the cover 306' along the outer surface of the peripheral wall 308 '. This thin piece 324 'is formed so as to be drawn toward the peripheral wall 308' side and closely adhered when the pressure in the opening O 'is reduced through the suction tube 312'.

センサ300’において、環状の溶着部304’は、その延在方向に対する垂直断面でみて、カバー306’側の部分の面積S1’に対する筐体302’側の部分の面積S2’の比が12〜35の範囲内にあり、19〜26の範囲内にあることがより好ましい。   In the sensor 300 ', the annular welded portion 304' has a ratio of the area S2 'of the portion on the housing 302' side to the area S1 'of the portion on the cover 306' side as viewed in a cross section perpendicular to the extending direction thereof of 12 to 12. It is in the range of 35, more preferably in the range of 19-26.

このようなセンサ300’は、吸引筒312’を吸引開口312として、図5〜図8を参照して説明した製造方法に従って製造することができる。   Such a sensor 300 'can be manufactured according to the manufacturing method described with reference to FIGS. 5 to 8 using the suction tube 312' as the suction opening 312.

なお、吸引筒312’の基端部は開口したままであるが、上述した製造方法の第6工程に従い、環状の溶着部304’の形成後に、開口部O’内の減圧を維持したままの状態でカバー306’側からレーザ光を吸引筒312’の基端部の開口周辺に照射することにより、吸引筒312’の基端部の開口を閉塞してもよい。これにより、センサ300’の内部空間を真空に保ったまま密閉することができる。   Although the base end of the suction tube 312 'remains open, the reduced pressure in the opening O' is maintained after the formation of the annular welded portion 304 'according to the sixth step of the above-described manufacturing method. The opening at the base end of the suction tube 312 'may be closed by irradiating the laser beam from the cover 306' side to the vicinity of the opening at the base end of the suction tube 312 'in this state. Thus, the sensor 300 'can be hermetically sealed while keeping the internal space at a vacuum.

かくして本発明によれば、ガラス板を用いることなしに、互いに接合される部材同士を均一かつ確実に密着させた接合構造体を提供することができる。 Thus, according to the present invention, it is possible to provide a joint structure in which members to be joined to each other are uniformly and surely adhered to each other without using a glass plate.

100,200,300 接合構造体
102,202,302 光吸収性部材
104,204,304 環状の溶着部
106,206,306 光透過性部材
108,208,308 周壁
112,212,312 吸引開口
114,214,314 点状の溶着部
130 環状溝
132 連通溝
324 薄肉片
D 圧力調整装置
D1 減圧装置
D2 加圧装置
D3 制御器
F 境界面
H 光学ヘッド
L1 吸引ライン
L2 供給ライン
O 開口部
PG1,PG2 圧力センサ
S1 環状の溶着部の第1部分(光透過性部材側)の面積
S2 環状の溶着部の第2部分(光吸収性部材側)の面積
100, 200, 300 Joint structure 102, 202, 302 Light absorbing member 104, 204, 304 Annular welded portion 106, 206, 306 Light transmitting member 108, 208, 308 Peripheral wall 112, 212, 312 Suction opening 114, 214,314 Point-like welding portion 130 Annular groove 132 Communication groove 324 Thin piece D Pressure regulator D1 Depressurizer D2 Pressurizer D3 Controller F Boundary surface H Optical head L1 Suction line L2 Supply line O Opening PG1, PG2 Pressure Sensor S1 Area of first portion (light transmitting member side) of annular welded portion S2 Area of second portion (light absorbing member side) of annular welded portion

Claims (16)

少なくとも1つの開口部を有する光吸収性部材と、
前記開口部を覆うように前記光吸収性部材上に配置された光透過性部材と、を備え、
前記開口部を囲繞するように延在するとともに前記光吸収性部材と前記光透過性部材とを接合する環状の溶着部が形成され、
前記光透過性部材は、前記環状の溶着部が形成される前の状態で前記開口部内が減圧状態とされた場合に変形して、前記光吸収性部材に密着する薄板状に形成されていることを特徴とする接合構造体。
A light absorbing member having at least one opening;
A light-transmitting member disposed on the light-absorbing member so as to cover the opening,
An annular welded portion extending to surround the opening and joining the light absorbing member and the light transmitting member is formed,
The light transmissive member is formed in a thin plate shape that is deformed when the inside of the opening is depressurized before the annular welded portion is formed, and is in close contact with the light absorbing member. A joint structure characterized by the above-mentioned.
前記光透過性部材は、前記環状の溶着部が形成される前の状態で前記開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、前記光吸収性部材に密着する厚みに形成されていることを特徴とする請求項1に記載の接合構造体。   The light-transmissive member is deformed when the inside of the opening is reduced to a pressure of −80 kPa or more and −20 kPa or less with a gauge pressure before the annular welded portion is formed, and closely adheres to the light-absorbent member. The joining structure according to claim 1, wherein the joining structure is formed to have a thickness. 少なくとも1つの開口部を有する光吸収性部材と、
前記開口部を覆うように前記光吸収性部材上に配置された光透過性部材と、を備え、
前記開口部を囲繞するとともに前記光吸収性部材と前記光透過性部材とを接合する環状の溶着部が形成され、
前記光透過性部材は、前記環状の溶着部よりも外側に、前記環状の溶着部が形成される前の状態で前記開口部内が減圧状態とされた場合に変形して前記光吸収性部材に密着する薄肉片を有することを特徴とする接合構造体。
A light absorbing member having at least one opening;
A light-transmitting member disposed on the light-absorbing member so as to cover the opening,
An annular welded portion surrounding the opening and joining the light absorbing member and the light transmitting member is formed,
The light transmissive member is deformed when the inside of the opening is decompressed in a state before the annular welded portion is formed outside the annular welded portion, and the light transmissive member is deformed to the light absorbing member. A bonded structure having a thin piece that is in close contact.
前記薄肉片は、前記環状の溶着部が形成される前の状態で前記開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して前記光吸収性部材に密着する厚みに形成されていることを特徴とする請求項3に記載の接合構造体。   The thin piece is deformed when the inside of the opening is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less in a state before the annular welded portion is formed, and has a thickness that closely adheres to the light absorbing member. The joint structure according to claim 3, wherein the joint structure is formed. 前記薄肉片は、前記光吸収性部材の周縁部に沿って形成されていることを特徴とする請求項3または4に記載の接合構造体。   The joint structure according to claim 3, wherein the thin piece is formed along a peripheral portion of the light absorbing member. 前記環状の溶着部に隣接して位置し、前記光吸収性部材と前記光透過性部材とを接合する点状の溶着部を備えることを特徴とする請求項1から5までのいずれか一項に記載の接合構造体。   6. A spot-like welded portion which is located adjacent to the annular welded portion and joins the light absorbing member and the light transmitting member is provided. 3. The joint structure according to 1. 少なくとも1つの開口部を有する光吸収性部材に、前記開口部を覆うように光透過性部材を重ね合わせ、前記光透過性部材側からレーザ光を照射することにより前記開口部を囲繞するよう環状の溶着部を形成して前記光吸収性部材と前記光透過性部材とを接合する接合構造体の製造方法であって、
前記光透過性部材を、前記環状の溶着部が形成される前の状態で前記開口部内が減圧状態とされた場合に変形して、前記光吸収性部材に密着する薄板状に形成しておき、
前記環状の溶着部を形成するにあたり、前記開口部内を減圧することにより前記光透過性部材を変形させ光吸収性部材に密着させた状態で前記光透過性部材側からレーザ光を照射することを特徴とする接合構造体の製造方法。
A light transmitting member is superimposed on the light absorbing member having at least one opening so as to cover the opening, and a laser beam is irradiated from the light transmitting member side so as to surround the opening. A method of manufacturing a joining structure for joining the light absorbing member and the light transmitting member by forming a welded portion of
The light transmissive member is formed in a thin plate shape that is deformed when the inside of the opening is depressurized before the annular welded portion is formed, and is in close contact with the light absorbing member. ,
In forming the annular welded portion, the laser light is irradiated from the light transmitting member side in a state in which the light transmitting member is deformed by reducing the pressure in the opening and is brought into close contact with the light absorbing member. A method of manufacturing a joint structure, which is characterized by the following.
前記光透過性部材を、前記環状の溶着部が形成される前の状態で前記開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して、前記光吸収性部材に密着する厚みに形成しておくことを特徴とする請求項7に記載の接合構造体の製造方法。   The light transmissive member is deformed when the inside of the opening is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less before the annular welded portion is formed, and the light transmissive member adheres to the light absorbing member. The method for manufacturing a joined structure according to claim 7, wherein the joining structure is formed to have a thickness. 少なくとも1つの開口部を有する光吸収性部材に、前記開口部を覆うように光透過性部材を重ね合わせ、前記光透過性部材側からレーザ光を照射することにより前記開口部を囲繞するよう環状の溶着部を形成して前記光吸収性部材と前記光透過性部材とを接合する接合構造体の製造方法であって、
前記光透過性部材の、前記環状の溶着部よりも外側に、前記環状の溶着部が形成される前の状態で前記開口部内が減圧状態とされた場合に変形して前記光吸収性部材に密着する薄肉片を形成しておき、
前記環状の溶着部を形成するにあたり、前記開口部内を減圧することにより前記薄肉片を変形させ前記光吸収性部材に密着させた状態で前記光透過性部材側からレーザ光を照射することを特徴とする接合構造体の製造方法。
A light transmitting member is superimposed on the light absorbing member having at least one opening so as to cover the opening, and a laser beam is irradiated from the light transmitting member side so as to surround the opening. A method of manufacturing a joining structure for joining the light absorbing member and the light transmitting member by forming a welded portion of
The light transmissive member, outside the annular welded portion, deforms when the inside of the opening is depressurized in a state before the annular welded portion is formed, and is deformed by the light absorbing member. Form a thin piece that adheres,
In forming the annular welded portion, a laser beam is irradiated from the light transmitting member side in a state in which the thin piece is deformed by reducing the pressure in the opening portion and is brought into close contact with the light absorbing member. A method for manufacturing a joined structure.
前記薄肉片を、前記環状の溶着部が形成される前の状態で前記開口部内がゲージ圧で−80kPa以上−20kPa以下に減圧された場合に変形して前記光吸収性部材に密着する厚みに形成しておくことを特徴とする請求項9に記載の接合構造体の製造方法。   The thin piece is deformed when the inside of the opening is reduced to a gauge pressure of −80 kPa or more and −20 kPa or less in a state before the annular welded portion is formed, and has a thickness that is closely adhered to the light absorbing member. The method for manufacturing a joined structure according to claim 9, wherein the joint structure is formed. 前記薄肉片を、前記光吸収性部材の周縁部に沿って形成しておくことを特徴とする請求項9または10に記載の接合構造体の製造方法。   The method according to claim 9, wherein the thin piece is formed along a peripheral edge of the light absorbing member. 前記光透過性部材を前記光吸収性部材に重ね合わせた後であってかつ前記環状の溶着部を形成する前に、前記光透過性部材側からレーザ光を照射して前記光吸収性部材と前記光透過性部材とを接合する点状の溶着部を形成することを特徴とする請求項7から11までのいずれか一項に記載の接合構造体の製造方法。   After the light transmitting member is superimposed on the light absorbing member and before forming the annular welded portion, the light absorbing member is irradiated with laser light from the light transmitting member side, and The method for manufacturing a joined structure according to any one of claims 7 to 11, wherein a point-like welded portion for joining the light-transmissive member is formed. 前記光吸収性部材に、前記開口部につながるとともに外部の減圧装置に連通する吸引開口を形成しておくことを特徴とする請求項7から12までのいずれか一項に記載の接合構造体の製造方法。   The joint structure according to claim 7, wherein a suction opening connected to the opening and communicating with an external pressure reducing device is formed in the light absorbing member. Production method. 前記環状の溶着部の形成後に、前記開口部内の減圧を維持したまま前記光透過性部材側からレーザ光を照射することによって前記吸引開口を溶融、閉塞させることを特徴する請求項13に記載の接合構造体の製造方法。   14. The suction opening according to claim 13, wherein the suction opening is melted and closed by irradiating a laser beam from the light transmitting member side while maintaining the reduced pressure in the opening after forming the annular welded portion. A method for manufacturing a joint structure. 前記開口部内の減圧を、該開口部内にパージガスを供給しながら行うことを特徴する請求項13または14に記載の接合構造体の製造方法。   The method according to claim 13 or 14, wherein the pressure in the opening is reduced while supplying a purge gas into the opening. 前記開口部内の減圧と該開口部内へのパージガスの供給とを、二重配管を用いて前記吸引開口を通じて行うことを特徴とする請求項15に記載の接合構造体の製造方法。
The method according to claim 15, wherein the pressure reduction in the opening and the supply of the purge gas into the opening are performed through the suction opening using a double pipe.
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