JP2017186204A - Welding method of silica glass - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a welding method of silica glass that is easy to position a laser beam and hardly causes welding defects.SOLUTION: A welding method of silica glass to weld welding planes 1a-4b of a plurality of silica glass pieces 1-4 using a laser beam includes a laminating step for laminating a plurality of the silica glass pieces 1-4 in the vertical direction so that the welding planes 1a-4b face each other, and a cutting and welding step for cutting a plurality of silica glass pieces 1-4 by irradiating the vicinity of the welding planes 1a-4b from above or below a plurality of the silica glass pieces 1-4 laminated in the laminating step and for welding the welding planes 1a-4b making use of heat transmission of the laser beam in cutting.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a silica glass welding method using laser light.

  As a silica glass welding method using laser light, for example, a method described in Patent Document 1 is known. In the silica glass welding method described in Patent Document 1, two silica glasses are laminated in the vertical direction, and two silica glasses are welded by irradiating laser light from the side of the laminated silica glass. is there.

JP 2004-292247 A

  The conventional silica glass welding method has a problem that it is difficult to position the laser beam because the laser beam is irradiated from the side of the laminated silica glass. Further, depending on the intensity of the laser beam, there is a problem that a portion other than the welded portion is melted or the welded portion is not sufficiently melted, resulting in poor welding.

  This invention is made | formed in view of the said situation, The place made into the subject is providing the silica glass welding method which the positioning of a laser beam is easy and it is hard to produce a welding defect.

In order to solve the above problems, the silica glass welding method according to the present invention is:
It is a silica glass welding method for welding a plurality of silica glass weld surfaces using laser light,
A laminating step of laminating the plurality of silica glasses in the vertical direction so that the welding surfaces face each other;
Laser light is irradiated from above or below the plurality of silica glasses laminated in the laminating step to the vicinity of the welding surface to cut the plurality of silica glasses and use heat transfer of the laser light at the time of cutting. And a cutting welding step of welding the weld surfaces to each other.

The silica glass welding method is:
It is preferable that a flattening step of polishing and flattening the welding surface is included before the laminating step.

The silica glass welding method is:
In the cutting and welding step, it is preferable that the plurality of silica glasses are clamped from above and below by a clamp member and pressure is applied to the welding surface.

  ADVANTAGE OF THE INVENTION According to this invention, the positioning of a laser beam can be performed easily and the silica glass welding method which cannot produce a welding defect easily can be provided.

(A) It is a figure which shows the silica glass before welding with the silica glass welding method which concerns on this invention. (B) It is a figure which shows the silica glass after welding with the silica glass welding method which concerns on this invention. It is a figure which shows the modification of the silica glass before welding with the silica glass welding method which concerns on this invention.

  Hereinafter, an embodiment of a silica glass welding method according to the present invention will be described with reference to FIG. In addition, the silica glass in this invention is a glass which has silicon dioxide as a main component, and contains not only quartz glass but the glass whose content of silicon dioxide is smaller than quartz glass.

  The silica glass welding method according to an embodiment of the present invention welds a plurality of (in the present embodiment, four) silica glass 1 to 4 welding surfaces 1a to 4b using laser light, and is flat. Including a forming step, a laminating step, and a cutting and welding step.

  The flattening step is a step of polishing and flattening the weld surfaces 1a to 4b of the silica glasses 1 to 4. The reason why the flattening process is necessary is that when the welding surfaces 1a to 4b are not flat, for example, when unevenness is formed on the surface like ground glass, heat transfer becomes insufficient in the cutting and welding process, resulting in poor welding. This is because. Therefore, when the welding surfaces 1a to 4b are flat, the flattening step can be omitted.

  The laminating step is a step of laminating the silica glasses 1 to 4 in the vertical direction so that the welding surfaces 1a to 4b face each other. In this embodiment, as shown in FIG. 1 (A), the silica glasses 2 and 3 are laminated on the silica glass 1 so that the welding surfaces 1a and 2a face each other and the welding surfaces 1b and 3a face each other. At the same time, the silica glass 4 is laminated on the silica glasses 2 and 3 so that the weld surfaces 2b and 4a face each other and the weld surfaces 3b and 4b face each other.

  The cutting and welding process is a process of cutting the silica glasses 1 to 4 with a laser beam and welding the welding surfaces 1a to 4b using the heat transmission of the laser beam at the time of cutting. As the laser beam, for example, a laser beam of a carbon dioxide laser used for cutting quartz glass can be used.

  In the cutting and welding process, first, laser light is irradiated on the vicinity (outside) of the welding surfaces 1a to 4b from above or below (in this embodiment, above) the silica glasses 1 to 4 laminated in the lamination process, and then laser The light is moved in the depth direction of the drawing. Thereby, the cutting | disconnection and welding of the silica glass 1-4 are performed simultaneously.

  When irradiating the silica glass 1 to 4 with the laser beam, it is preferable to position the laser beam so that the center of the laser beam is slightly outside the cutting line. This is because the center of the laser beam has a large thermal energy, and if the center of the laser beam coincides with the cutting line, the welding surfaces 1a to 4b may be sublimated by the thermal energy. On the other hand, since the thermal energy in the vicinity of the center of the laser beam is smaller than the thermal energy at the center of the laser beam, the possibility that the welding surfaces 1a to 4b sublimate is low even if it hits the welding surfaces 1a to 4b.

  That is, in the cutting and welding process, the silica glasses 1 to 4 are cut (sublimated) by the thermal energy at the center of the laser beam, and the welding surfaces 1a to 4b are welded together by the thermal energy near the center of the laser beam. The thermal energy in the vicinity of the center of the laser beam transmits the welding surfaces 1a to 4b and melts the welding surfaces 1a to 4b without sublimating. The product (silica glass 1 to 4) after the cutting and welding process is as shown in FIG.

  Moreover, in a cutting welding process, it is preferable to clamp silica glass 1-4 from a vertical direction with a clamp member, and to apply a pressure to welding surface 1a-4b. Thereby, since the adhesiveness of the welding surfaces 1a-4b improves and the thermal energy of a laser beam becomes easy to transmit the welding surfaces 1a-4b, it becomes difficult to produce a welding defect.

  After all, according to the silica glass welding method according to the present embodiment, it is only necessary to irradiate the laser light from above or below the silica glass 1 to 4, so that the positioning of the laser light is easy as compared with the conventional method. Become. In the conventional method, positioning is facilitated by using a dedicated jig, but the cost increases accordingly.

  Further, in the silica glass welding method according to the present embodiment, the welding is not performed by directly irradiating the welded portion with the laser beam as in the conventional method but using the heat transfer of the laser beam at the time of cutting. . For this reason, according to the silica glass welding method which concerns on this embodiment, compared with the conventional method, it becomes difficult to produce a welding defect.

  As mentioned above, although embodiment of the silica glass welding method which concerns on this invention was described, this invention is not limited to the said embodiment.

  If the welding surface is flat, the silica glass welding method according to the present invention can be applied to the welding of silica glass in which a portion other than the welding surface is curved. For example, the present invention can also be applied to welding of silica glasses 2, 3, 5, and 6 shown in FIG. The silica glass 5 has flat weld surfaces (or weld surfaces flattened in the flattening step) 5a and 5b, and the silica glass 6 is a flat weld surface (or flattened weld surface in the flattening step). ) 6a, 6b.

  When the silica glasses 2, 3, 5, and 6 shown in FIG. 2 are welded, the laminating step is performed on the silica glass 5 so that the weld surfaces 2a and 5a face each other and the weld surfaces 3a and 5b face each other. The silica glasses 2 and 3 are laminated, and the silica glass 6 is laminated on the silica glasses 2 and 3 so that the weld surfaces 2b and 6a face each other and the weld surfaces 3b and 6b face each other. In the cutting and welding process, the silica glass 2, 3 is cut at the cutting line by irradiating laser light from above or below the laminated silica glass 2, 3, 5, 6 and the heat of the laser light at the time of cutting is cut. The welding surfaces 2a to 3b and 5a to 6b of the silica glasses 2, 3, 5, and 6 are welded to each other using transmission.

  As the laser beam, a laser beam other than a carbon dioxide laser can be used as long as the silica glass can be welded and cut simultaneously. For example, a YAG laser beam can be used.

  In the above embodiment, four silica glasses 1 to 4 are welded, but the silica glass welding method according to the present invention is welding of two silica glasses, welding of three silica glasses, or five or more. It can also be applied to welding of silica glass.

  Moreover, the silica glass welding method according to the present invention can weld silica glass having any shape and thickness by appropriately adjusting the intensity of laser light, the moving speed of laser light, the focal length of laser light, and the like. it can.

1-6 Silica glass 1a-6b Welding surface

Claims (3)

It is a silica glass welding method for welding a plurality of silica glass weld surfaces using laser light,
A laminating step of laminating the plurality of silica glasses in the vertical direction so that the welding surfaces face each other;
Laser light is irradiated from above or below the plurality of silica glasses laminated in the laminating step to the vicinity of the welding surface to cut the plurality of silica glasses and use heat transfer of the laser light at the time of cutting. And a cutting welding step of welding the weld surfaces to each other. The silica glass welding method according to claim 1, further comprising a flattening step of polishing and flattening the welding surface before the laminating step. The silica glass welding method according to claim 1 or 2, wherein in the cutting and welding step, the plurality of silica glasses are clamped from above and below by a clamp member, and pressure is applied to the welding surface.

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