JP2017059582A - Sheet sticking device and sheet sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sheet sticking device and a sheet sticking method that can prevent deterioration of adhesive-sheet sticking performance per unit time as much as possible while enhancing the sticking accuracy of the adhesive sheet.SOLUTION: Pressing means 40 of a sheet sticking device 10 includes first sticking means 43 which holds an initial sticking area from a front end portion AS1 in a feeding direction of an adhesive sheet to an intermediate portion in the feeding direction of the adhesive sheet while a rear end portion AS3 in the feeding direction of the adhesive sheet AS is temporarily stuck to a release sheet RL, and moves relatively to the adherend to stick the entire initial sticking area to the adherend simultaneously, and second sticking means 44 for gradually sticking a late-stage sticking area at least from the intermediate portion in the feeding direction to the rear end portion in the feeding direction to the adherend while the adhesive sheet portion temporarily stuck to the release sheet is released from the release sheet by the peeling means in synchronism with the relative movement to the adherend WF.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method.

  2. Description of the Related Art Conventionally, there has been known an apparatus for temporarily adhering and holding an adhesive sheet with a holding roller and sticking it to a wafer (for example, Patent Document 1).

JP 2006-339607 A

  However, in the apparatus described in Patent Document 1, although the adhesion accuracy of the adhesive sheet is improved, since the entire adhesive sheet is temporarily held by the holding roller and then adhered to the wafer W, it is synchronized with the relative movement with the adherend. In comparison with a device that presses and adheres the adhesive sheet temporarily attached to the release sheet to the adherend while peeling from the release sheet, there is a disadvantage in that the processing capability of attaching the adhesive sheet per unit time is reduced. .

  An object of the present invention is to provide a sheet sticking apparatus and a sheet sticking method capable of preventing a reduction in processing ability of sticking an adhesive sheet per unit time as much as possible while improving the sticking accuracy of the adhesive sheet. It is in.

  In order to solve the above-described problems, the present invention provides a feeding unit that feeds a raw material in which a plurality of adhesive sheets are temporarily attached to a strip-shaped release sheet at a predetermined interval, and the raw material that is fed by the feeding unit. A peeling means that folds the release sheet and peels the adhesive sheet from the release sheet; and a pressing means that presses and adheres the adhesive sheet to an adherend, wherein the pressing means is a feeding direction of the adhesive sheet In a state where the rear end portion is temporarily attached to the release sheet, the initial sticking region from the front end portion in the feeding direction of the adhesive sheet to the intermediate portion in the feeding direction of the adhesive sheet is held and moved relative to the adherend. The first sticking means for sticking the entire initial sticking region to the adherend at the same time, and the adhesive sheet portion temporarily attached to the release sheet in synchronism with relative movement with the adherend. And a second pasting means for gradually pasting at least a late pasting area from the intermediate portion in the feeding direction to the rear end portion in the feeding direction while being peeled off by the peeling means. This is a sheet sticking device.

  The adherend includes a first adherend and a second adherend surrounding the first adherend, and the adhesive sheet includes the first adherend and the second adherend. The first pasting means holding distance from the feeding direction front end portion to the feeding direction intermediate portion is from the pasting start position of the second adherend to the pasting start position of the first adherend. The first adherend may be longer than the non-sticking distance.

  An adherend detection unit capable of measuring the first adherend non-sticking distance may be provided.

  In another aspect of the present invention, a plurality of adhesive sheets are fed back to a strip-shaped release sheet, the feeding step of feeding the original material temporarily attached at a predetermined interval, and the release sheet in the original fabric fed out in the feeding step is folded back. A peeling step of peeling the adhesive sheet from the release sheet, and a pressing step of pressing and sticking the adhesive sheet to an adherend, and the pressing step includes a rear end portion in the feeding direction of the adhesive sheet. In the state temporarily attached to the release sheet, the initial sticking region from the front end portion in the feeding direction of the adhesive sheet to the intermediate portion in the feeding direction of the adhesive sheet is maintained and moved relative to the adherend, so that the initial A first application step of applying the entire application region to the adherend at the same time, and the adhesive sheet portion temporarily attached to the release sheet is released from the release sheet in synchronization with the relative movement with the adherend. Naga A sheet sticking method characterized in that it comprises a second bonding step of affixing gradually to the adherend late attaching area of from at least the feeding direction intermediate portion to the feeding direction rear end.

According to the present invention, instead of holding and sticking the entire adhesive sheet, the initial sticking area of the adhesive sheet is temporarily held and then sticking to the adherend, and the latter sticking area of the adhesive sheet is attached to the adherend. As it is applied to the adherend while being peeled off from the release sheet in synchronization with the relative movement of the adhesive, the processing ability to attach the adhesive sheet per unit time is reduced as much as possible while improving the accuracy of attaching the adhesive sheet. Can be prevented.
Further, by setting the first sticking means holding distance of the adhesive sheet to be longer than the first adherend non-stick distance, the sticking of the adhesive sheet to the sticking start position of the second adherend and the first adherend can be performed. As a result, the adhesive sheet can be affixed to the correct position.
Further, if the first adherend non-sticking distance is measured, the first sticking means holding distance can be shortened as much as possible, and the processing capability of sticking the adhesive sheet per unit time is reduced as much as possible. Can be prevented.

The side view of the sheet sticking apparatus which concerns on embodiment. Explanatory drawing of a to-be-adhered body and an adhesive sheet. FIG. The side view of the sheet sticking apparatus which concerns on a modification.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes within a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the arrow direction of the X axis, “Right” is the opposite direction, “Front” is the front direction orthogonal to the page, and “Rear” is the opposite direction of the Y axis arrow direction.

1 and 2, the sheet sticking device 10 is fed by a feeding unit 20 that feeds a raw fabric RS in which a plurality of adhesive sheets AS are temporarily attached to a strip-like release sheet RL at a predetermined interval, and a feeding unit 20. A peeling plate 30 as a peeling means for folding back the peeling sheet RL in the original fabric RS and peeling the adhesive sheet AS from the peeling sheet RL, and a semiconductor wafer (hereinafter simply referred to as “wafer”) as the first adherend. A pressing unit 40 that presses and adheres to an adherend WK including a WF and a ring frame RF as a second adherend surrounding the wafer WF; and an adhesive sheet AS of the ring frame RF. Camera capable of measuring the first adherend non-sticking distance WD from the sticking start position RF1 to the sticking start position WF1 of the adhesive sheet AS on the wafer WF And a adherend detecting means 50 such as an imaging device and an optical sensor, is disposed above the conveying means 60 for supporting and transferring the adherend WK.
The adhesive sheet AS is a size that can be attached to the wafer WF and the ring frame RF, and has a planar shape that can block the opening RF2 of the ring frame RF.

  The feeding unit 20 is driven by a support roller 21 that supports the original fabric RS, a guide roller 22 that guides the original fabric RS, and a rotation motor 23A as a driving device, and is a drive that sandwiches the release sheet RL between the pinch rollers 24. A roller 23 and a collection roller 25 that is driven by a driving device (not shown) and collects the release sheet RL are provided.

The pressing means 40 is supported by a support frame 42 supported by an output shaft 41A of a linear motion motor 41 as a drive device, a first sticking means 43 supported by the left side of the support frame 42, and a right side of the support frame 42. And a second pasting means 44.
The first sticking means 43 is supported by a direct acting motor 43A as a driving device supported by the support frame 42 and an output shaft 43B of the direct acting motor 43A, and can be held by a decompression means (not shown) such as a decompression pump or a vacuum ejector. And a holding member 43D having a holding surface 43C. With such a configuration, the first sticking means 43 has the adhesive sheet AS from the feeding direction front end portion AS1 of the adhesive sheet AS in a state where the feeding direction rear end portion AS3 of the adhesive sheet AS is temporarily attached to the release sheet RL. By holding the initial sticking area ASF up to the feeding direction intermediate portion AS2 and moving relative to the adherend WK, the entire initial sticking area ASF can be stuck on the adherend WK at the same time.
The second sticking means 44 includes a bracket 44C supported by an output shaft 44B of a linear motion motor 44A as a driving device supported by the support frame 42, and a pressing roller 44D rotatably supported by the bracket 44C. Yes. With such a configuration, the second sticking means 44 peels the adhesive sheet AS part temporarily attached to the release sheet RL from the release sheet RL with the release plate 30 in synchronization with the relative movement with the adherend WK. On the other hand, at least the late application region ASR from the feeding direction intermediate portion AS2 to the feeding direction rear end portion AS3 can be gradually attached to the adherend WK.

  The transport means 60 includes a transport table 62 that is supported by a slider 61A of a linear motor 61 as a driving device and has a support surface 62A that can hold the adherend WK by a decompression means (not shown) such as a decompression pump or a vacuum ejector. Yes.

Next, operation | movement of the sheet sticking apparatus 10 in this embodiment is demonstrated.
First, the operator sets the original fabric RS as shown in the figure on the sheet sticking device 10 indicated by the solid line in FIG. Next, the frame width RFD (see FIG. 2) from the left end to the right end of the ring frame RF, or the adhesive sheet AS when affixed to the ring frame RF via an input means such as an operation panel or a personal computer (not shown). The data such as the sheet width ASD (see FIG. 2) from the left end to the right end is input to a control means (not shown). After that, when an automatic operation start signal is input via the input means, the feeding means 20 drives the rotation motor 23A to feed out the original fabric RS, and as shown in FIG. 1, the leading end in the feeding direction of the leading adhesive sheet AS. When it is detected by an imaging means such as a camera or a detection means (not shown) such as an optical sensor that the part AS1 has reached a predetermined position on the peeling plate 30, the rotation motor 23A stops driving, and the feeding means 20 It will be in a standby state. Next, when a transfer means (not shown) such as a human hand or an articulated robot or a belt conveyor places the wafer WF and the ring frame RF on the support surface 62A, the transfer means 60 drives a decompression means (not shown) to suck and hold them. Thereafter, the linear motor 61 is driven to move the transport table 62 to the left. Then, when the adherend WK passes directly below the adherend detection means 50, the adherend detection means 50 has a distance WKD between adherends from the left end position of the ring frame RF to the left end position of the wafer WF. 2) and outputs the measurement result to a control means (not shown). Here, since the frame width RFD and the sheet width ASD are input in advance to the control means (not shown), the first adherend non-sticking distance WD can be calculated if the distance between the adherends WKD is known. The distance from the left end of the ring frame RF to the attachment start position RF1 of the adhesive sheet AS may be input in advance to a control means (not shown), or the adherend detection means 50 may set the frame width RFD and the opening RF2 The inner diameters may be measured, and the distance may be a half of the difference between them and the sheet width ASD. Any distance may be used as long as the feeding direction front end portion AS1 of the adhesive sheet AS can be stuck in the frame of the ring frame RF.

  When the adherend detection means 50 outputs the measurement result to a control means (not shown), the control means, based on the measurement result, the first sticking means holding distance ASH from the feeding direction front end portion AS1 to the feeding direction intermediate portion AS2. Is calculated. In the case of the present embodiment, the first sticking means holding distance ASH is set to be longer by a predetermined distance MD than the first adherend non-sticking distance WD, as shown in FIG. Next, based on the calculation result of the control means (not shown), the feeding means 20 and the pressing means 40 drive the rotation motor 23A and the pressure reduction means (not shown), and as shown by the two-dot chain line in FIG. The original fabric RS is fed out so that the pasting area ASF is sucked and held by the holding surface 43C. At this time, the feeding direction intermediate portion AS2 is located at the right end edge of the holding surface 43C.

  Next, as shown by a two-dot chain line in FIG. 1, the camera indicates that the sticking start position RF1 of the adhesive sheet AS in the ring frame RF has reached directly below the front end portion AS1 in the feeding direction of the adhesive sheet AS held by suction on the holding surface 43C. When the detection unit (not shown) such as an image pickup unit or an optical sensor detects the conveyance unit 60, the linear motor 61 stops driving. Then, the pressing means 40 drives the linear motor 41, and as shown in FIG. 3A, the holding member 43D is lowered to press the initial pasting area ASF against the wafer WF and the ring frame RF. At this time, the feeding means 20 drives the rotation motor 23A so that the initial sticking area ASF sucked and held by the holding surface 43C of the holding member 43D does not shift within the holding surface 43C, and the raw material RS is set to a predetermined amount. You may pay out.

  Next, after the pressing means 40 stops driving the decompression means (not shown), the linear motion motor 43A is driven to retract the holding member 43D as shown in FIG. 3B, and then the two-dot chain line in FIG. As shown, the linear motion motor 44A is driven, and the adhesive sheet AS is pressed by the pressing roller 44D. In addition, the pressing position which is the lowest part of the pressing roller 44D is set so as to be closer to the feeding direction front end portion AS1 than the feeding direction intermediate portion AS2. Thereafter, the feeding means 20 and the conveyance means 60 drive the rotation motor 23A and the linear motor 61 to move the conveyance table 62 to the left as shown in FIG. 3C, and the movement speed of the conveyance table 62 Then, the raw fabric RS is fed so that the feeding speed of the adhesive sheet AS becomes the same speed. As a result, while the adhesive sheet AS part temporarily attached to the release sheet RL is peeled off from the release sheet RL by the release plate 30, the late application region ASR is gradually pressed against the wafer WF and the ring frame RF by the pressing roller 44D. Affixed to form an integrated object WK1. Thereafter, when the detection means (not shown) detects that the front end portion AS1 in the feeding direction of the next adhesive sheet AS has reached a predetermined position on the peeling plate 30, the feeding means 20 stops driving the rotation motor 23A, The feeding means 20 is again in the standby state. When the integrated object WK1 is formed, the conveying means 60 stops driving the linear motor 61, stops the conveying table 62 at a predetermined position, and then stops driving the decompression means (not shown). The transfer means conveys the integrated object WK1 to the next process. The pressing means 40 and the conveying means 60 drive the linear motion motors 41, 43A, 44A and the linear motor 61 to return the holding member 43D, the pressing roller 44D and the conveying table 62 to the initial positions, and thereafter the same as above. The operation is repeated.

  According to the present embodiment as described above, instead of holding and sticking the entire adhesive sheet AS, the initial sticking area ASF of the adhesive sheet AS is temporarily held and then stuck to the adherend WK, and the bonding is performed. Since the latter sticking area ASR of the sheet AS is attached to the adherend WK while being peeled off from the release sheet RL in synchronization with the relative movement with the adherend WK, the unit time is improved while improving the attaching accuracy of the adhesive sheet AS. It can prevent as much as possible that the processing capability which sticks adhesive sheet AS on a hit falls.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the feeding means is capable of feeding the original fabric temporarily attached to the strip-like release sheet with a predetermined interval, the range of the feeding means in light of the technical common sense at the beginning of the application. If it is in, it will not be limited at all (explanation about other means and processes is omitted).

The feeding unit 20 may include a driving device that rotationally drives the support roller 21, and such a driving device may function as a tension applying unit that applies a predetermined tension to the original fabric RS.
The feeding means 20 may feed out the raw fabric RS in which a belt-like adhesive sheet base material is temporarily attached to one surface of the release sheet RL. In this case, the feeding unit 20 is a cutting unit that forms a closed-loop cut in the adhesive sheet base material on the upstream side in the feed direction of the original fabric RS with respect to the peeling plate 30 and forms the adhesive sheet AS inside the cut. May be provided. Such a cutting means may be constituted by a cutting member such as a cutter blade, cutter roller, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spray of gas or liquid, etc. You may make it cut | disconnect by moving a cutting member with what combined the appropriate drive device.

  As the peeling means, a round bar or a rotatable or non-rotatable peeling roller may be adopted instead of the peeling plate 30.

As shown in FIG. 4, the pressing means replaces the pressing means 40 with a first attaching means 45 having a holding member 45A having a holding surface 45B supported by a drive device (not shown) so as to be movable up and down, and a holding member 45A. The pressing means 40 </ b> A provided with the second sticking means 46 having the pressing roller 46 </ b> A rotatably supported by the motor may be employed. In this case, as shown in FIG. 4A, after the initial sticking area ASF is sucked and held by the holding member 45A and stuck to the adherend WK, as shown by a two-dot chain line in the figure, a driving device (not shown) Then, the holding member 45A is retracted around the rotation center of the pressing roller 46A, and as shown in FIG. 4 (B), the later application region ASR is applied to the adherend WK as in the above embodiment.
The pressing means 40, 40 </ b> A are at least first pasted at a position where the adhesive sheet AS can be adsorbed and held by the holding surfaces 43 </ b> C, 45 </ b> B in a state where the feeding direction front end AS <b> 1 has reached a predetermined position on the peeling plate 30. After the means 43 and 45 are moved by a driving device (not shown), the feeding means 20 synchronizes with the operation of feeding the raw material RS, and at least the first pasting means 43 and 45 are shown by solid lines in FIG. The initial pasting area ASF may be sucked and held by the holding surfaces 43C and 45B by returning to the position shown (the first pasting means 45 is not shown).
The pressing means 40, 40A may raise and lower the first sticking means 43, 45 and the second sticking means 44, 46 with separate driving devices.
When the pressing means 40, 40A sucks and holds the initial sticking area ASF of the adhesive sheet AS on the holding surfaces 43C, 45B, a jet of air such as air or gas that urges the adhesive sheet AS in the direction of the holding surfaces 43C, 45B. An urging means such as an attachment or a guide rod may be provided.
The 1st sticking means 43 and 45 may hold | maintain the adhesive sheet AS with chuck | zipper means, such as a mechanical chuck and a chuck cylinder, Coulomb force, an adhesive agent, an adhesive, magnetic force, Bernoulli adsorption, a drive device.
The first pasting means 43, 45 is an adhesive sheet in which the adherend WK is moved without moving the holding members 43D, 45A, or both the holding members 43D, 45A and the adherend WK are moved. The AS may be pressed against the adherend WK.
The second sticking means 44 may set the pressing position on the pressing roller 44D so as to coincide with the feeding direction intermediate portion AS2, or may be closer to the feeding direction rear end portion AS3 than the feeding direction intermediate portion AS2. It may be set.
The 2nd sticking means 44 and 46 may rotate press roller 44D and 46A with a suitable drive device.
The second sticking means 44, 46 may employ a pressing member made of a blade material, rubber, resin, sponge, or the like, instead of or in combination with the pressing rollers 44D, 46A. The adhesive sheet AS may be adhered to the adherend WK by spraying, or the late pasting region ASR is sucked and held by a decompression means such as a decompression pump or a vacuum ejector, and the latter pasting region ASR is covered by driving the drive device. You may affix on the body WK.
The 2nd sticking means 44 and 46 may comprise the surface of press roller 44D, 46A with the member which can be elastically deformed, such as rubber | gum and resin, and may be comprised with the member which does not elastically deform.
The second pasting means 44 and 46 may move the adherend WK without moving the pressing rollers 44D and 46A, or may be bonded by moving both the pressing rollers 44D and 46A and the adherend WK. The sheet AS may be pressed.

  The adherend detection means 50 (control means not shown) may calculate the first adherend non-sticking distance WD by a calculation method other than the above.

The transport means 60 moves the other means such as the feeding means 20 and the pressing means 40 in an appropriate direction without moving the adherend WK or while moving the adherend WK. A pasting operation may be performed.
The conveyance means 60 may be configured to hold the adherend WK by chuck means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, driving equipment, or the like.
When the adherend WK is transported by another apparatus, the sheet pasting apparatus 10 may or may not include the transport means 60, and the adherend detection means 50 and the like are not described in claim 1 of the present application. What is necessary is just to employ | adopt as needed, respectively, and it may or may not exist.

The feeding direction intermediate portion AS2 in the adhesive sheet AS can be an arbitrary location, and the first sticking means holding distance ASH may be shorter than or the same as the first adherend non-sticking distance WD. .
The sheet sticking device 10 may be configured to stick the adhesive sheet AS to the lower surface or the side surface of the adherend WK by placing it upside down or placing it horizontally.
Furthermore, the material, type, shape, etc. of the adhesive sheet AS, the adherend WK, etc. in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, a heating means such as an appropriate coil heater or a heat pipe heating side for appropriately heating the adhesive sheet AS may be provided. The adhesive sheet AS is, for example, a single layer having only an adhesive layer, a base sheet and an adhesive layer, an intermediate layer between them, or a cover layer on the upper surface of the base sheet. It may be a three-layer or more layer, or a so-called double-sided adhesive sheet that can peel the substrate sheet from the adhesive layer. It may have an intermediate layer, or may be a single layer or multiple layers without an intermediate layer. Further, the adherend WK may be only the wafer WF or only the ring frame RF, and may be a food wafer, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an electrode substrate, an optical disk, etc. An arbitrary member such as an information recording substrate, a glass plate, a steel plate, earthenware, a wooden plate or a resin plate, a non-annular frame, an article, or the like can also be targeted. Note that the adhesive sheet AS can be read in a functional or application manner, and can be any information such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin sheet. Sheets, films, tapes, etc. may be used.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

10 .... Sheet pasting device 20 .... Feeding means 30 ... Peeling plate (peeling means)
40, 40A ··· pressing means 43, 45 ··· first pasting means 44, 46 ··· second pasting means 50 ··· adherend detection means AS ···· adhesive sheet AS1 ··· ... Feeding direction front end AS2... Feeding direction intermediate part AS3... Feeding direction rear end ASF. ASR: Late application area RF: Ring frame (second adherend)
RF1 ... start position RL of the second adherend RL ... release sheet RS ... raw fabric WD ... first adherend non-stick distance WF ..... Wafer (first adherend)
WF1... First adherend pasting start position WK.

Claims (4)

A feeding means for feeding out the original fabric temporarily attached to the strip-shaped release sheet with a predetermined interval between the plurality of adhesive sheets;
A peeling means for folding the release sheet in the original fabric fed by the feeding means and peeling the adhesive sheet from the release sheet;
A pressing means for pressing and adhering the adhesive sheet to an adherend,
The pressing means holds an initial sticking region from a front end portion in the feeding direction of the adhesive sheet to an intermediate portion in the feeding direction of the adhesive sheet in a state where the rear end portion in the feeding direction of the adhesive sheet is temporarily attached to the release sheet. The first sticking means for simultaneously sticking the entire initial sticking region to the adherend by moving relative to the adherend, and the release sheet in synchronization with the relative movement of the adherend. First, a late pasting region from at least the intermediate portion in the feeding direction to the rear end portion in the feeding direction is gradually stuck to the adherend while peeling the temporarily attached adhesive sheet portion from the peeling sheet by the peeling means. A sheet sticking device having two sticking means.   The adherend includes a first adherend and a second adherend surrounding the first adherend, and the adhesive sheet includes the first adherend and the second adherend. The first pasting means holding distance from the feeding direction front end portion to the feeding direction intermediate portion is from the pasting start position of the second adherend to the pasting start position of the first adherend. The sheet sticking apparatus according to claim 1, wherein the sheet sticking apparatus is longer than the first adherend non-sticking distance.   The sheet sticking apparatus according to claim 2, further comprising an adherend detection unit capable of measuring the first adherend non-sticking distance. A feeding step of feeding out the original fabric temporarily attached to the strip-shaped release sheet with a predetermined interval between the plurality of adhesive sheets;
A peeling step in which the peeling sheet in the original fabric fed in the feeding step is folded back and the adhesive sheet is peeled off from the peeling sheet;
A pressing step of pressing and bonding the adhesive sheet to an adherend,
The pressing step maintains an initial sticking region from the front end portion in the feeding direction of the adhesive sheet to the intermediate portion in the feeding direction of the adhesive sheet in a state where the rear end portion in the feeding direction of the adhesive sheet is temporarily attached to the release sheet. The first sticking step of simultaneously sticking the entire initial sticking region to the adherend by moving relative to the adherend, and the relative movement with the adherend are synchronized with the release sheet. A second pasting step of gradually pasting at least a late pasting region from the intermediate portion in the feeding direction to the rear end portion in the feeding direction while peeling the temporarily attached adhesive sheet portion from the release sheet; The sheet sticking method characterized by including.

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