JP2012227998A - Manufacturing method and manufacturing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology for reducing variation in displacement of objects moved by SMA wires, among individual actuators manufactured.SOLUTION: A driving device has an actuator that moves an object by utilizing shape restoring force generated by a temperature change in a shape memory alloy wire tightly stretched from a first fixing part to a second fixing part. A method for manufacturing the driving device comprises the steps of: maintaining the shape memory alloy wire to be in an extended state before fixing the shape memory alloy wire to the first fixing part and second fixing part; heating the shape memory alloy wire in the extended state in the extending step; and fixing the shape memory alloy wire at the first fixing part and second fixing part in the state where tensile force given to the shape memory alloy wire in the extending step is adjusted so that the shape memory alloy wire made into a predetermined heated state in the heating step can keep the object at a predetermined position.

Description

  The present invention relates to a manufacturing technique capable of manufacturing a drive device including an actuator on which a shape memory alloy is stretched.

  In recent years, there has been a dramatic increase in image quality, such as an increase in the number of pixels in an image sensor mounted on a camera-equipped mobile phone, etc. In addition to this, in addition to the basic function of image shooting, a focus function and zoom function Etc. are required.

  In order to add these functions, a lens driving device that moves the lens in the optical axis direction is necessary. Recently, a lens driving device using a shape memory alloy (SMA) as an actuator has been devised. Yes. This device heats the SMA by energizing it, generates a contraction force by heating, and uses the contraction force as a lens driving force. It is easy to reduce the size and weight, and has a relatively large driving force. There is an advantage that can be obtained. As an actuator using this SMA, for example, there is an actuator that moves an object by extending or contracting a stretched SMA wire.

  For example, Patent Document 1 discloses a product manufacturing apparatus including an actuator using such an SMA wire. In the manufacturing apparatus, when the SMA wire is stretched in the assembly of the actuator, the SMA wire stretched between the two fixed portions is set to the austenite phase, that is, the elastic coefficient (elastic value) is high, and then the SMA wire is By setting the initial tension applied to the wire to a predetermined value, the variation in the displacement of the object moved by the temperature change of the SMA wire is suppressed.

JP 2006-220063 A

  However, individual actuator products are affected by variations in SMA performance, variations in the dimensions of components constituting the drive system, variations in component assembly accuracy, and the like. For this reason, even with the manufacturing apparatus of Patent Document 1, there is still a problem that the variation of the displacement of the object moved by the SMA wire with respect to the temperature state of the SMA cannot be solved in each manufactured actuator product.

  The present invention has been made to solve such a problem, and an object of the present invention is to provide a technique capable of reducing variation in displacement of an object moved by an SMA wire between manufactured individual actuators. To do.

  In order to solve the above-described problem, the manufacturing method according to the first aspect uses the shape restoring force due to the temperature change of the shape memory alloy wire stretched from the first fixing portion to the second fixing portion. A method of manufacturing a drive device including an actuator for moving, wherein the shape memory alloy wire is held in a stretched state before the shape memory alloy wire is fixed to the first fixing portion and the second fixing portion. The object by the tensioning step, the heating step of heating the shape memory alloy wire in the tensioned state by the tensioning step, and the shape memory alloy wire set in the heating state preset by the heating step. In a state where the tension applied to the shape memory alloy wire is adjusted in the stretching step so that the shape memory alloy wire is moved in front of the first fixing portion. Characterized by comprising a fixing step of fixing the second fixing section.

  The manufacturing method according to the second aspect is the manufacturing method according to the first aspect, wherein in the heating step, the shape memory alloy wire in the transformation process from the austenite phase to the martensite phase is brought into the heating state. It is characterized by that.

  The manufacturing method according to the third aspect is the manufacturing method according to the second aspect, wherein, in the stretching step, the tension applied to the shape memory alloy wire is adjusted while being weakened. .

  The manufacturing method which concerns on a 4th aspect is a manufacturing method which concerns on a 3rd aspect, Comprising: In the said heating process, the said shape memory alloy wire is heated by supplying with electricity, It is characterized by the above-mentioned.

  The manufacturing method which concerns on a 5th aspect is a manufacturing method which concerns on a 4th aspect, Comprising: In the said heating process, when the said preset current is supplied to the said shape memory alloy wire, the said shape memory alloy wire becomes The heating state is set.

  The manufacturing method according to the sixth aspect is the manufacturing method according to any one of the first to fifth aspects, wherein the heating means in the heating step and the fixing means in the fixing step are realized by the same means. It is characterized by that.

  A manufacturing method according to a seventh aspect is the manufacturing method according to any one of the first to sixth aspects, wherein, in the fixing step, the shape memory alloy wire is fixed to the first fixing portion and the second fixing portion. It is characterized by being fixed to a part simultaneously.

  The manufacturing apparatus according to the eighth aspect is capable of manufacturing an actuator that moves an object using a shape restoring force due to a temperature change of a shape memory alloy wire stretched from the first fixing portion to the second fixing portion. In this manufacturing apparatus, before the shape memory alloy wire is fixed to the first fixing portion and the second fixing portion, the shape memory alloy wire is held in a stretched state and applied to the shape memory alloy wire. A tensioning means capable of adjusting the tension to be stretched, a heating means for heating the shape memory alloy wire in a tensioned state by the tensioning means, and the shape memory alloy that has been brought into a heating state preset by the heating means In a state where the tension applied to the shape memory alloy wire by the stretching means is adjusted so that the object is held at a preset position by the wire, the shape memory alloy wire is Characterized in that a fixing means for fixing serial with the first fixing portion and the second fixing part.

  According to any of the first to eighth aspects of the invention, the shape memory is stretched and set in a preset heating state so that the object is held at the preset position by the shape memory alloy wire. The tension applied to the alloy wire is adjusted. In the adjusted state, the shape memory alloy wire is fixed to the fixing portion. Therefore, variation in the displacement of the object moved by the shape memory alloy wire among the individual actuators can be reduced.

It is a top view which shows roughly the structural example of the lens drive device which uses a SMA actuator as a drive source. It is a side view which shows roughly the structure of the lens drive device of FIG. It is a side view which shows roughly the structure of the lens drive device of FIG. It is a top view which shows roughly the example of a structure of the manufacturing apparatus of the SMA actuator which concerns on embodiment. It is a side view which shows the structure of the manufacturing apparatus of FIG. 4 roughly. It is a front view which shows the structure of the manufacturing apparatus of FIG. 4 schematically. It is a figure which shows typically an example of the relationship between the position of the carrier moved to an SMA actuator, and the electric current which flows into an SMA actuator. It is a figure which shows typically the relationship between the position of the carrier moved to the SMA actuator of FIG. 7, and the temperature of an SMA actuator. It is a figure which shows typically the example of the dispersion | variation in the relationship between the position of the carrier moved to the SMA actuator by which tension adjustment which concerns on embodiment was carried out, and the electric current supplied to an SMA actuator. It is a figure which shows typically the relationship between the position of the carrier moved to the SMA actuator which has the dispersion | variation of FIG. 9, and the temperature of an SMA actuator. It is a figure which shows typically the example of the dispersion | variation in the relationship between the position of the carrier moved to the SMA actuator by which tension adjustment which concerns on embodiment was carried out, and the electric current supplied to an SMA actuator. It is a figure which shows typically the example of the relationship between the position of the carrier moved to the SMA actuator which has the dispersion | variation of FIG. 11, and the temperature of an SMA actuator. It is a figure which shows an example of the operation | movement flow of the manufacturing apparatus which concerns on embodiment. It is a figure which shows an example of the operation | movement flow of the manufacturing apparatus which concerns on embodiment.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the drawings, parts having the same configuration and function are denoted by the same reference numerals, and redundant description is omitted in the following description. Each drawing is schematically shown. For example, the size and positional relationship of the display object on the image in each drawing are not necessarily shown accurately. For convenience of explanation, FIGS. 4 to 6 are provided with three orthogonal XYZ axes, and FIGS. 7 to 12 are provided with two orthogonal XY axes.

<Configuration of lens driving device:>
Prior to the description of the embodiment of the invention, an application example of an actuator using SMA (SMA actuator) will be described with reference to FIGS.

  1 to 3 schematically show main components of a lens driving device 100 using an SMA actuator as a driving source, and FIG. 1 is a plan view seen from the lens side. FIG. 3 shows a side view as seen from the direction of arrow A1 in FIG. 2 shows a state before driving, and FIG. 3 shows a state after driving.

  The lens driving device 100 mainly includes a lens unit 1 (also referred to as “driven object” or “target object”) and a lever member that moves the lens unit 1 in the optical axis AX direction (first axial direction). 2, the SMA actuator 3, the base member 4, the top plate 5, the parallel plate springs 6 a and 6 b, the bias spring 7, and the like, and the lens unit 1 and the like are assembled to the base member 4. The top plate 5 and the parallel leaf springs 6a and 6b are omitted in FIG. 1 for convenience. The lens driving device 100 is mounted on a battery-driven portable device or the like.

  The base member 4 is fixed to a member to be attached to the lens driving device 100 (for example, a frame or a mount substrate of a mobile phone), and is a non-moving member constituting the bottom side of the lens driving device 100. The base member 4 is formed in a square plate shape in plan view, and is entirely made of a resin material or the like. Although an imaging sensor is attached to the base member 4, illustration is omitted.

  The lens unit 1 has a cylindrical shape, and includes an imaging lens 10, a lens driving frame 12 that holds the imaging lens 10, and a lens barrel 14 that stores the lens driving frame 12. The imaging lens 10 includes an objective lens, a focus lens, a zoom lens, and the like, and constitutes an imaging optical system for a subject image with respect to an imaging element (not shown). The lens driving frame 12 is a so-called ball frame (also referred to as “carrier”), and moves together with the lens barrel 14 in the optical axis AX direction. A pair of support portions 16 project from the outer peripheral edge portion of the lens drive frame 12 at the distal end on the object side with an angular difference of 180 ° in the circumferential direction.

  The lens unit 1 is disposed on the base member 4 in a state of being inserted into an opening formed in the top plate 5. Specifically, the pair of support portions 16 are arranged so as to be positioned in the vicinity of the pair of diagonals of the base member 4 (see FIG. 1).

  Parallel plate springs 6a and 6b are fixed to the base member 4 and the top plate 5, respectively, and the lens unit 1 is fixed to these parallel plate springs 6a and 6b. Accordingly, the lens unit 1 is supported so as to be displaceable with respect to the base member 4 and the like, and the degree of freedom of displacement is restricted in a direction along the optical axis AX. In addition, the top plate 5 may be fixed to the base member 4 through a post or the like (not shown), or may be a structure integrated with the base member 4.

  The lever member 2 applies a driving force in the direction of the optical axis AX to the lens unit 1 by engaging with the lens unit 1 via the support portion 16.

  The lever member 2 is installed on the side of the lens unit 1, specifically, at a corner portion of the base member 4 other than the corner portion where the support portion 16 of the lens unit 1 is located. . The lever member 2 is supported so as to be swingable about an axis that is orthogonal to the optical axis AX and extends in the direction in which the pair of support portions 16 are arranged (the vertical direction in FIG. 1).

  As shown in FIG. 2, the lever member 2 has an inverted L-shape in a side view including an arm portion 21 and an extending portion 22 extending from the base end portion of the arm portion 21 in the optical axis AX direction. In addition, a bent portion serving as a boundary between the arm portion 21 and the extending portion 22 is supported on the base member 4 by being supported by the tip of the support leg 8 erected on the base member 4.

  The tip of the support leg 8 (hereinafter referred to as lever support portion 8a) has a substantially cylindrical shape extending in a direction orthogonal to the optical axis AX direction (a direction orthogonal to the paper surface of FIG. 2). Thus, the lever member 2 is supported so as to be swingable about an axis orthogonal to the optical axis AX direction with the lever support portion 8a as a fulcrum.

  The arm portion 21 is formed in an arc shape in plan view. Specifically, as shown in FIG. 1, the lens unit 1 is bifurcated from the extended portion 22 to both sides of the lens unit 1 and extends evenly in the vicinity of the outer peripheral surface of the lens unit 1. Is formed so as to surround. The tips (both ends) of the arm portion 21 reach the positions of the support portions 16 of the lens unit 1, respectively. Then, the SMA actuator 3 is bridged over the extended portion 22, and the moving force in a direction perpendicular to the optical axis AX direction (second axis direction: left-right direction in FIG. 2) at this bridge position (referred to as the displacement input portion 2 a). When F1 (see FIG. 3) is input, the lever member 2 swings. Along with this swinging, the tip of the arm portion 21 (referred to as the displacement output portion 2b) is displaced in the optical axis AX direction, and the displacement output portion 2b engages with each support portion 16 to cause the lens unit 1 to move in the optical axis AX direction. A driving force is applied.

  The SMA actuator 3 applies a moving force F1 (see FIG. 3) to the lever member 2, and is a linear actuator composed of an SMA wire 3L such as a Ni—Ti alloy. The SMA actuator 3 expands when given a predetermined tension in a state where the elastic modulus is low (martensite phase) at a low temperature. When heat is applied in this extended state, the SMA actuator 3 undergoes phase transformation and has a high elastic modulus (austenite). Phase: parent phase) and return to its original length from its extended state (recover shape). That is, the SMA actuator 3 is an actuator that moves the object using the shape restoring force due to the temperature change of the SMA wire 3L.

  In this example, a configuration is adopted in which the SMA actuator 3 is energized and heated to perform the above-described phase transformation. That is, since the SMA actuator 3 is a conductor having a predetermined resistance value, Joule heat is generated by energizing the SMA actuator 3 itself, and transformation from the martensite phase to the austenite phase is performed by self-heating based on the Joule heat. It is supposed to be configured. For this reason, the first electrode 30 a and the second electrode 30 b for energization heating are fixed to both ends of the SMA actuator 3. These electrodes 30 a and 30 b are fixed to predetermined electrode fixing portions (also referred to as “caulking pins”) 33 a and 33 b provided on the base member 4, respectively.

  As shown in FIG. 1, the SMA actuator 3 is bridged between the electrodes 30a and 30b with a portion engaging with the extending portion 22 of the lever member 2 as a turning point. With this configuration, when the SMA actuator 3 is energized and heated via the electrodes 30a and 30b and is operated (shrinks), the lever member 2 is given a moving force F1 (see FIG. 3), and the moving force F1 causes the lever member to move. 2 will swing.

  The electrodes 30a and 30b are disposed in the vicinity of the support portion 16 of the lens unit 1 in the base member 4, respectively. The lengths of the SMA actuator 3 from the electrodes 30a and 30b to the turn-back point are set to be equal to each other, so that the amount of expansion / contraction of the SMA actuator 3 on both sides of the displacement input portion 2a becomes equal. Rubbing between the lever member 2 and the SMA actuator 3 is prevented. Further, a V-groove 21a (corresponding to the displacement input portion 2a) is formed in the extended portion 22, and the SMA actuator 3 is bridged so as to be fitted into the V-groove 21a, whereby the lever member 2 is On the other hand, the SMA actuator 3 is stably suspended.

  The bias spring 7 biases the lens unit 1 in the direction of the optical axis AX in the direction opposite to the direction in which the displacement output unit 2b moves due to the operation (contraction) of the SMA actuator 3. The bias spring 7 is formed of a compression coil spring having a diameter substantially matching the peripheral size of the lens drive frame 12, and one end side (lower end side) is in contact with the top surface of the lens drive frame 12. The inner wall N is a surface on the base member 4 side of the surface of a frame member (not shown), and the frame member is fixed to the base member 4 by a post (not shown). The frame member is provided with an opening having a diameter substantially matching the diameter of the imaging lens 10, and the other end side (upper end side) of the bias spring 7 is in contact with the peripheral edge portion of the opening on the inner wall N. Is done.

  Note that, when the SMA actuator 3 is not in operation, the line length is set so that the SMA actuator 3 receives tension from the bias spring 7 acting via the lens unit 1 (support portion 16) and the lever member 2 and is tensioned. ing. That is, the line length is set so that the lever member 2 (arm portion 21) is always brought into contact (pressure contact) with the lens unit 1 (support portion 16) regardless of the operating state. With this configuration, in this embodiment, the lever member 2 is swingably supported at the tip of the support leg 8 without directly connecting the support leg 8 and the lever member 2, and when the SMA actuator 3 is operated. The lever member 2 is swung by quickly transmitting the displacement.

<About embodiment:>
<Configuration of manufacturing apparatus 300:>
4 to 6 are configuration examples of main components of the manufacturing apparatus 300 according to the embodiment of the SMA actuator 3 in the lens driving device 100 (FIGS. 1 to 3) using the SMA actuator 3 using SMA as a driving source. Is shown schematically. 4 is a plan view of the manufacturing apparatus 300 viewed from the optical axis direction of the imaging lens 10, FIG. 5 is a side view of the manufacturing apparatus 300 viewed from the direction of arrow A2 in FIG. 4, and FIG. It is the front view which looked at the manufacturing apparatus 300 from the arrow A3 direction in FIG.

  The manufacturing apparatus 300 mainly includes punches 51a and 51b, a displacement meter 52, a slider 53, and a control unit 55. The manufacturing apparatus 300 manufactures the SMA actuator 3 in the workpiece by stretching the SMA wire 3L around the complete lens driving device 100 (also referred to as “work”) in which the SMA wire 3L is not yet stretched. It is a device to do. The SMA actuator 3 is manufactured by the manufacturing apparatus 300 in a state where the work is placed on the adjustment table 56.

○ Control unit 55:
The control unit 55 is a control processing device that controls each functional element of the manufacturing apparatus 300. The control unit 55 is configured by, for example, a general-purpose computer or a dedicated hardware circuit. The control unit 55 processes a signal indicating the displacement of the lens drive frame 12 acquired by the displacement meter 52, and controls the punches 51a and 51b and the slider 53 based on the result of the processing.

○ Slider 53:
The slider 53 is a stretch portion that holds the SMA wire 3L in a stretched state before the SMA wire 3L is fixed to the electrodes 30a and 30b provided in the electrode fixing portions 33a and 33b, respectively. The slider 53 includes SMA wire holding portions 54a and 54b that can hold a part of the SMA wire 3L. A part of the SMA wire 3L held in part by the SMA line holding part 54a passes through the electrode 30a, the V-groove 21a provided in the extended part 22 and the electrode 30b in order, and a part thereof is supplied to the SMA line holding part 54b. Is retained. The slider 53 includes a wheel at the bottom and a drive mechanism for the wheel inside, and is movable on the adjustment table 56 along the arrow Ya. The slider 53 moves along the arrow Ya while the SMA wire 3L is held in a stretched state by the SMA wire holding portions 54a and 54b via the V-groove 21a and the like, thereby moving the slider 53 to the SMA wire 3L. The tension to be applied can be adjusted. The operation of the slider 53 is controlled by the control unit 55 via the communication line CL2.

○ Displacement meter 52:
The displacement meter 52 is configured by, for example, a laser displacement meter or the like, and is held on the lens driving frame 12 of the lens driving device 100 via a post (not shown). The displacement meter 52 measures the distance D1 between the lens driving frame 12 and the displacement meter 52, that is, the displacement of the lens driving frame 12 with respect to the displacement meter 52, and sends a signal indicating the measured distance D1 to the control unit via the communication line CL1. 55. The control unit 55 acquires the displacement of the lens driving frame 12 relative to the base member 4 based on the distance D1 and the distance between the displacement meter 52 and the base member 4 acquired in advance.

  The punches 51a and 51b function as a heating unit for heating the shape memory alloy wire in a state where the SMA wire 3L is stretched by the slider 53, and the SMA wire 3L is provided on the electrode fixing units 33a and 33b, respectively. It also functions as a fixing portion for fixing to the electrodes 30a and 30b.

○ Punches 51a and 51b:
The operations of the punches 51a and 51b are controlled by the control unit 55 via a driving device (not shown). The positions of the punch 51a and the punch 51b can be moved along the Z-axis direction (FIGS. 5 and 6) by the driving device, and the moving force F2 (FIGS. 5 and 6) is changed by the driving device. obtain. It should be noted that the punches 51a and 51b pass through the frame member associated with the inner wall N of the lens driving device 100 and the top plate 5 at the intersections of the respective flow lines along the Z-axis direction of the punches 51a and 51b, respectively. Each possible through hole is provided.

  The punches 51a and 51b can heat the SMA wire 3L by energizing the SMA wire 3L in contact with the electrodes 30a and 30b in a state where the respective tip portions 50a and 50b are in contact with the electrodes 30a and 30b. It is configured. Further, the current relating to the energization is configured to be changeable. In place of the heat treatment of the SMA wire 3L by energizing the SMA wire 3L by the punches 51a and 51b, for example, the SMA wire is generated by the heat generated by the heaters provided at the tip 50a and the tip 50b of the punch 51a and the punch 51b. Even if 3 L of heat treatment is performed, the usefulness of the present invention is not impaired.

  In the process of fixing the SMA wire 3L to the electrodes 30a and 30b by the punches 51a and 51b, first, the control unit 55 sets the heating state of the SMA wire 3L by the punches 51a and 51b to a preset heating state. The energization current to the SMA wire 3L by the punches 51a and 51b is controlled to a preset value. Further, the control unit 55 applies the slider 53 to the SMA wire 3L based on the output signal of the displacement meter 52 so that the lens driving frame 12 is held at a preset position by the heated SMA wire 3L. Adjust the tension. In a state in which the tension is adjusted, the punches 51a and 51b increase the moving force F2 under the control of the control unit 55 to contact the electrode fixing portions 33a and 33b that are in contact with the tip portions 50a and 50b, respectively. By tightening, the SMA wire 3L is fixed to the electrode fixing portions 33a and 33b, respectively. The punches 51a and 51b control the voltage when energizing the SMA wire 3L to a preset value, so that the heating state of the SMA wire 3L by the punches 51a and 51b is changed to a preset heating state. Even if such a configuration is adopted, the usefulness of the present invention is not impaired.

  In a state where the SMA wire 3L is fixed to each of the electrode fixing portions 33a and 33b, the control unit 55 controls a cutting portion (not shown), and the SMA wire holding portion 54a from the electrodes 30a and 30b of the SMA wire 3L. And the SMA actuator 3 in the lens drive device 100 is manufactured by cutting each part protruding to the 54b side.

  Here, in the lens driving device 100 (FIGS. 1 to 3), the variation in the dimensions of the lever member 2 and the like, the variation in the force of the bias spring 7 itself, the variation in the performance of the SMA wire 3L, and the friction coefficient between components. There are various variation factors (error factors) for the displacement of the lens driving frame 12 and the imaging lens 10 such as variations. For this reason, even if the heating state of the SMA wire 3L is constant and the tension applied to the SMA wire 3L is adjusted to be constant, the final displacement of the lens driving frame 12 is usually individual lens driving. It will vary from device 100 to device 100.

  However, according to the manufacturing apparatus 300 according to the embodiment, the lens driving frame 12 (target object) moved by the SMA actuator 3 is held at a preset position including the effects of various variations. The tension applied to the SMA wire 3L that is stretched and set in a preset heating state is adjusted. In the adjusted state, the SMA wire 3L is fixed to the electrode fixing portions 33a and 33b. Therefore, if the heating state of the SMA wire 3L is constant, variation in the displacement of the object moved by the SMA actuator 3 between the individual lens driving devices 100 to be manufactured can be reduced.

  In the manufacturing apparatus 300, for example, the operator performs heating processing of the SMA wire 3L by the punches 51a and 51b, recognition processing of the output signal of the displacement meter 52, and adjustment processing of the tension applied by the slider 53 to the SMA wire 3L. Even if the control of at least one of the fixing process of the SMA wire 3L to the electrode fixing parts 33a and 33b by the punches 51a and 51b is performed instead of the control part 55, the usefulness of the present invention is impaired. is not.

<About carrier position hysteresis:>
FIG. 7 is a diagram schematically illustrating an example of the relationship between the position of the carrier moved by the SMA actuator 3 and the current flowing through the SMA actuator 3. FIG. 8 is a diagram schematically showing the relationship between the position of the carrier moved by the SMA actuator 3 in FIG. 7 and the temperature of the SMA actuator 3. Point 41a to point 41e in FIG. 7 correspond to point 42a to point 42e in FIG. 8, respectively, and the state of the SMA actuator 3 for each corresponding relationship is the same.

  More specifically, the point 41a (point 42a) corresponds to an initial state in which energization of the SMA actuator 3 to the SMA is started. In the initial state, the SMA is in a martensitic phase. The current of the value KO is supplied (energized) to the SMA, the temperature thereof is T0, and the position of the lens driving frame 12 is a position Q1 corresponding to a focus position on a subject at infinity.

  The position Q1 is the position of the lens driving frame 12 when the imaging lens 10 held by the lens driving frame 12 is focused on an infinite subject. In this state, the SMA actuator 3 is not in operation, and the SMA of the SMA actuator 3 is most extended due to the pressing force of the bias spring 7. The position Q1 is also the end (infinite side) of the driveable range of the lens drive frame 12. More precisely, the position at which the imaging lens 10 is focused at infinity is normally set slightly closer to the macro imaging side (lens extension side) than the end. However, in the description of FIGS. 7 to 12, for convenience, the focusing distance of the imaging lens 10 is described as being infinite when the lens driving frame 12 is located at the end.

  At point 41b (point 42b), the value of the current supplied to the SMA along the arrow Y1 from the initial state increases to the value K2, and after the SMA begins to transform from the martensite phase to the austenite phase, This corresponds to a state in which the lens driving frame 12 has started to move in the −Z direction (FIG. 5). At the point 41b (point 42b), the temperature of the SMA is T2. Further, during the transition from the initial state to the point 41b (point 42b) state, the lens driving frame 12 is at the position Q1 as in the initial state regardless of the temperature rise of the SMA.

  The point 41c (point 42c) corresponds to a state in which the value of the current supplied to the SMA further increases to the value K3 along the arrow Y2, and the position of the lens driving frame 12 reaches the predetermined position Q2. . The focusing state of the imaging lens 10 when the lens driving frame 12 is at the position Q2 is a focusing state that is more suitable for macro photography than when the lens driving frame 12 is at the position Q1. At the point 41c (the point 42c), the SMA is normally in a state of being transformed from the martensite phase to the austenite phase, and the temperature thereof is T3. Even if the SMA is completely transformed into the austenite phase at the point 41c (point 42c), the usefulness of the present invention is not impaired.

  At the point 41d (point 42d), the current supplied to the SMA from the state at the point 41c (point 42c) decreases to the value K4 along the arrow Y3, and the lens driving frame 12 moves in the + Z direction (FIG. 5). Corresponds to the state of starting. At point 41d (point 42d), the transformation of the SMA to the martensite phase is started, and the temperature is T4. In the path from the point 41c (point 42c) to the point 41d (point 42d), the position of the lens driving frame 12 is maintained at the position Q2 regardless of the temperature drop of the SMA actuator 3.

  Point 41e (point 42e) corresponds to a state in which the current supplied to the SMA further decreases to the value K1 along the arrow Y4, and the position of the lens driving frame 12 becomes the position Q1 again. At the point 41e (point 42e), the SMA is usually in a state before the transformation into the martensite phase is completely completed, and the temperature is T1.

  As described above with reference to FIGS. 7 and 8, the relationship between the current supplied to the SMA actuator 3 and the temperature of the SMA and the position of the lens drive frame 12 (carrier) that is the object moved by the SMA actuator 3 is a hysteresis. have. The same relationship is also shown in FIGS. 9 to 12 described later. When the position of the lens drive frame 12 is each of the positions Q1 to Q2, the pressing force of the bias spring 7 and the moving force of the displacement output unit 2b based on the contraction force (shape restoring force) of the SMA actuator 3 are balanced. ing. Further, the contraction force of the SMA actuator 3 varies depending on the temperature change path of the SMA actuator 3 and the initial tension applied to the SMA of the SMA actuator 3 by the manufacturing apparatus 300.

  The substantially parallelogram formed by the points 41b to 41e (points 42b to 42e) shows the above-described hysteresis, and the shape varies depending on each lens driving device 100. The difference in shape is the lens driving frame such as the hysteresis characteristics of the SMA wire itself in each lens driving device 100, the dimensions of the lever member 2, etc., the force of the bias spring 7 itself, the coefficient of friction between components, and the assembly accuracy between components. This is caused by variations in various factors that affect the 12 displacements.

  Of the various factors described above, the lens driving device 100 is designed so that variations in factors other than the hysteresis characteristics of the SMA wire itself are usually as small as possible. For this reason, the difference in the hysteresis characteristics of the SMA wire itself is the most dominant factor in the difference in the shape of the substantially parallelogram showing the hysteresis.

  In addition, when the initial tension applied to the SMA actuator 3 by the manufacturing apparatus 300 changes when the SMA actuator 3 is formed, the substantially parallelogram that shows the hysteresis changes in the initial tension while maintaining its shape. Correspondingly, it is translated in the X-axis direction in FIGS.

  Therefore, in the manufacturing apparatus 300, the initial tension applied to the SMA actuator 3 is adjusted according to the characteristics of each component of the SMA actuator 3 and the lens driving apparatus 100 for each lens driving apparatus 100. The initial tension is a tension applied to the SMA wire 3L that is stretched by the slider 53 and set in a preset heating state when the SMA wire 3L is fixed to the electrode fixing portions 33a and 33b by the manufacturing apparatus 300. is there. By this adjustment, variation in displacement of the object (lens drive frame 12) moved by the SMA actuator 3 can be reduced between the individual SMA actuators 3 manufactured by the manufacturing apparatus 300.

  9 and 11 show variations in the relationship between the position of the carrier (lens drive frame 12) moved to the SMA actuator 3 whose initial tension has been adjusted by the manufacturing apparatus 300 and the current supplied to the SMA actuator 3, respectively. FIG. 10 and 12 are diagrams schematically showing the relationship between the position of the carrier moved by the SMA actuator 3 having the same variation as in FIGS. 9 and 11 and the temperature of the SMA actuator 3. FIG. In the initial tension adjustment process, as described above, the SMA wire 3L is not yet fixed to the electrode fixing portions 33a and 33b, and after the initial tension adjustment is completed, the SMA wire 3L is fixed. Then, the SMA wire 3L is cut and the SMA actuator 3 is manufactured.

<Regarding the adjustment of the initial tension applied to the SMA actuator 3>
[Adjustment of initial tension in transformation process from martensite phase to austenite phase A:]
In the adjustment examples of the initial tension shown in FIGS. 9 and 10, the initial tension applied to the SMA wire 3L of the SMA actuator 3 by the manufacturing apparatus 300 in the process in which the SMA of the SMA actuator 3 is transformed from the martensite phase to the austenite phase. Adjustment A is performed.

  When the initial tension adjustment A is performed, the point 41t (FIG. 9) and the point 42t (FIG. 10) are supplied with a current of the value Kt to the SMA actuator 3, and the temperature becomes the value Tt. It shows that the position of the lens driving frame 12 is the position Qt. Note that the point 41t (42t) indicates the correlation between the current value Kt (temperature Tt) and the position Qt, and the point 41t (42t) is on the path from the point 41b (42b) to the point 41c (42c). This is the point.

  In the initial tension adjustment A, first, a current of value Kt is supplied to the SMA wire 3L from a state where the temperature of the SMA wire 3L (SMA actuator 3) is lower than the temperature Tt, and the temperature of the SMA wire 3L is equal to the temperature Tt. It is made stable. More specifically, for example, after a current having a value K1 (K1 <Kt) is supplied to the SMA wire 3L, a current having a value Kt is supplied, and a stable state at the temperature Tt is realized. Then, the initial tension applied to the SMA wire 3L is adjusted by moving the position of the slider 53 along the arrow Ya direction (FIG. 4) so that the lens driving frame 12 is positioned at a preset position Qt. .

  When the adjustment A of the initial tension at the point 41t (42t) is performed, the current value supplied to the SMA in the process of transforming the SMA into the martensite phase in each lens driving device 100 to be manufactured. The paths indicating the position of the lens drive frame 12 with respect to (SMA temperature) are usually different paths. Examples of these routes are shown in routes L1 and L2, for example. These path differences are caused by variations in the hysteresis characteristics of the SMA itself, performance variations in the components of the lens driving device 100, and the like.

  On the other hand, in the process in which the SMA of each SMA actuator 3 is transformed into the austenite phase, when the value of the current supplied to the SMA actuator 3 becomes the value K2 (Kt, K3), the temperature of the SMA is T2 (Tt, The position of the lens driving frame 12 can be controlled to the position Q1 (Qt, Q2). Therefore, when the initial tension adjustment A is performed, the variation in the displacement of the lens driving frame 12 with respect to the current supplied to the SMA between the individual lens driving devices 100 to be manufactured, regardless of various variation factors. Can be reduced.

  Here, in the process of transforming the SMA into the martensite phase, one of the end points of the path L2 among the above-described paths indicating the position of the lens driving frame 12 with respect to the temperature of the SMA (current value to be energized) (FIG. 10). At the point 42g, the lens driving frame 12 is positioned at the position Q1 when the temperature of the SMA is the temperature Tg. Therefore, in the SMA actuator 3 related to the path L2, if the environmental temperature is equal to or lower than the temperature Tg (Tg <T1), the position of the lens driving frame 12 can be controlled to the position Q1 corresponding to the object at infinity. As described above, when the environmental temperature is equal to or lower than the lower limit value of the variation range of the temperature Tg between the SMA actuators 3, the position of the lens drive frame 12 is infinite regardless of the performance variation of the SMA actuators 3. The position Q1 corresponding to the subject can be controlled.

  As described above, even if the initial tension of each SMA actuator 3 is adjusted in the process of transformation from the martensite phase to the austenite phase of SMA, the usefulness of the present invention is not impaired. The main factor of the hysteresis in the relationship between the SMA temperature (energization current) and the position of the lens driving frame 12 is usually the hysteresis characteristic of the SMA itself. Therefore, the adjustment of the initial tension with the position of the lens driving frame 12 as the position Qt is performed in the process of increasing the tension applied to the SMA wire 3L, or in the process of decreasing the tension. However, it does not impair the usefulness of the present invention.

[Adjustment of initial tension in the transformation process from austenite phase to martensite phase B:]
11 and 12, the initial tension adjustment B applied to the SMA wire 3L of the SMA actuator 3 is changed in the process in which the SMA of the SMA actuator 3 is transformed into the martensite phase. Has been done.

  At the point 41u (FIG. 11) and the point 42u (FIG. 12), the initial tension applied to the SMA actuator 3 is adjusted in the process in which the SMA of the SMA actuator 3 is transformed into the martensite phase. At the point 41u (point 42u), the current Ku is supplied to the SMA actuator 3, the temperature is the value Tu, and the position of the lens driving frame 12 is the position Qt. A point 41u (42u) indicates the correlation between the current value Ku (temperature Tu) and the position Qt, and the point 41u (42u) is a point on the path from the point 41d (42d) to the point 41e (42e). It is.

  In the application of the initial tension (adjustment B), first, a current of a value Ku is supplied to the SMA wire 3L from a state where the temperature of the SMA wire 3L (SMA actuator 3) is higher than the temperature Tu, and the temperature of the SMA wire 3L. Is stabilized at the temperature Tu. More specifically, for example, after a current having a value K3 (K3> Ku) is supplied to the SMA wire 3L, a current having a value Ku is supplied, and a stable state at the temperature Tu is realized. Next, adjustment B of the initial tension applied to the SMA wire 3L by moving the slider 53 along the arrow Ya direction (FIG. 4) so that the lens driving frame 12 is located at a preset position Qt. Is done.

  When the initial tension adjustment B at the point 41u (42u) is performed, the current value supplied to the SMA (the temperature of the SMA) in the process of transforming the SMA into the austenite phase in each manufactured lens driving device 100. The relationship of the position of the lens driving frame 12 with respect to () is normally different in path. Examples of these routes are shown in routes L3 and L4, for example. These path differences are caused by variations in the hysteresis characteristics of the SMA itself, performance variations in the components of the lens driving device 100, and the like.

  On the other hand, in the process in which the SMA of each SMA actuator 3 transforms from the austenite phase to the martensite phase, when the value of the current flowing to the SMA actuator 3 becomes the value K1 (Ku, K4), the temperature of the SMA is It can be controlled to T1 (Tu, T4), and the position of the lens driving frame 12 can be controlled to the position Q1 (Qt, Q2). Therefore, when the initial tension adjustment B is performed, the displacement of the lens driving frame 12 with respect to the supply current (temperature) to the SMA between the individual lens driving devices 100 to be manufactured, regardless of various variation factors. Variation can be reduced.

  When the temperature of the initial tension adjustment environment is equal to or lower than the value T1, if the current value supplied to the SMA is equal to or lower than the value K1, the position of the lens driving frame 12 is always the position Q1 regardless of various variations. It becomes. That is, when the initial tension applied to the SMA wire 3L is adjusted in the process of transformation from the martensite phase to the austenite phase, the lens drive frame 12 is positioned at infinity if the environmental temperature is equal to or lower than the temperature T1. It can be controlled to a position Q1 corresponding to the subject. In addition, as temperature T1, the temperature of the range, such as 60 degreeC-70 degreeC, is employ | adopted according to the required specification with respect to the lens drive device 100, for example. Also for SMA, the one having the performance at which the transformation end temperature to the martensite phase matches the adopted temperature T1 is employed.

  As described above, even when the initial tension adjustment A is adopted, the ambient temperature is sufficiently lower than the temperature T1 in consideration of the distribution range of the temperature Tg (FIG. 10) between the SMA actuators 3. Since the position of the lens driving frame 12 can be controlled to the position Q1, the usefulness of the present invention is not impaired.

  However, when the initial tension adjustment B is adopted, the lens drive is performed regardless of the variation in the performance of each SMA actuator 3 even at a higher environmental temperature than when the initial tension adjustment A is adopted. The frame 12 can be controlled to a position Q1 corresponding to a subject at infinity.

  As described above, the main factor of the hysteresis in the relationship between the temperature (current) of the SMA and the position of the lens driving frame 12 is usually the hysteresis characteristic of the SMA itself. Therefore, even if the initial tension adjustment B is performed in the process of increasing the tension applied to the SMA wire 3L, the usefulness of the present invention is not impaired. Similarly, even if the adjustment B of the initial tension is performed in the process of decreasing the tension applied to the SMA wire 3L, the usefulness of the present invention is not impaired.

  However, when the adjustment B of the initial tension is performed in the process of decreasing the tension, the direction in which the lens driving frame 12 moves due to the phase change of the SMA and the tension applied to the SMA wire 3L. Due to the decrease, the direction in which the lens drive frame 12 moves coincides. Therefore, if the environmental temperature around the SMA actuator 3 is equal to or lower than the temperature T1, the position of the imaging lens 10 is infinite via the lens driving frame 12 regardless of the magnitude of backlash generated in the driving system of the imaging lens 10. It can be set to a position for focusing on a distant subject. Note that the size of the backlash depends on variations in the dimensions of the lever member 2 and the like in each lens driving device 100, variations in the amount of force of the bias spring 7 itself, variations in the friction coefficient between components, and assembly accuracy of each component. It varies depending on variations.

<Operation of Manufacturing Apparatus 300>
13 and 14 are diagrams illustrating an example of an operation flow of the manufacturing apparatus 300 according to the embodiment. Hereinafter, the operation of the manufacturing apparatus 300 will be described with reference to FIGS. 13 and 14.

  First, prior to the adjustment processing of the tension of the SMA actuator 3 by the manufacturing apparatus 300, the adjustment of the slider 53 with the lens driving device 100 (also referred to as “work”) in an incomplete state where the SMA wire 3L is not stretched. Installation on the table 56 is performed (step S110 in FIG. 13). In the installation, specifically, for example, the workpiece is first installed at a preset position on the adjustment table 56, and then the slider 53 can move relative to the workpiece to a position away from the workpiece. Installed in a safe state.

  When the installation of the workpiece and the slider 53 on the adjustment stand 56 is completed, a stretching process is performed in which the SMA wire (SMA wire 3L) is loosely stretched between the workpiece and the slider 53 (step S120 in FIG. 13). Specifically, first, a part of the SMA wire is fixed to the SMA wire holding portion 54a at one end of the slider 53, and the SMA wire is further connected to the groove portion of the electrode 30a of the electrode fixing portion 33a and the V groove of the extended portion 22. 21a and the groove portion of the electrode 30b of the electrode fixing portion 33b are stretched in order. Then, another part of the SMA line is fixed to the SMA line holding part 54 b at the other end of the slider 53.

  When the SMA wire is fixed to the SMA wire holding portions 54a and 54b, the punches 51a and 51b are moved downward from above the electrodes 30a and 30b until the tips 50a and 50b come into contact with the electrodes 30a and 30b, respectively ( It is moved in the + Z direction in FIG. During the movement, the punches 51 a and 51 b pass through through holes provided in the frame member related to the inner wall N of the lens driving device 100 and the top plate 5, respectively. When the tips 50a and 50b come into contact with the electrodes 30a and 30b, respectively, the punches 51a and 51b move the workpiece against the adjustment table 56 by suppressing the electrodes 30a and 30b with a moving force F2 (FIG. 6) of about 10 N, for example. And fix. Even when a pressing force is applied by a moving force F2 of 10N, each groove portion of the electrodes 30a and 30b has a strength that is not caulked. When this stretching process is completed, the SMA line is loosely stretched between the workpiece and the slider 53.

  When the loose stretching process of the SMA line is completed, the SMA line is subjected to an initial stretching process (step S130 in FIG. 13). Specifically, for example, a current of 60 mA is supplied from the punches 51a and 51b to the SMA line using the tip portions 50a and 50b of the punches 51a and 51b as electrodes. By supplying the current, the SMA wire is in a state of being transformed from the martensite phase to the austenite phase. In this state, no tension is applied to the SMA wire. In addition, even if the initial elongation of the SMA wire is performed in a state where the SMA wire is completely transformed into the austenite phase, the usefulness of the present invention is not impaired.

  In the lens driving device 100 of the product, the lens driving frame 12 is moved by supplying current from the electrodes 30a and 30b. On the other hand, according to the manufacturing apparatus 300, the current at the time of adjusting the initial tension is supplied to the SMA wire using the tip portions 50a and 50b of the punches 51a and 51b as electrodes. Therefore, according to the manufacturing apparatus 300, the resistance value of the SMA wire and the state of heat conduction between the SMA wire and the outside can be made the same during actual use and during adjustment. Therefore, the initial tension can be adjusted more accurately.

  In addition, the initial elongation treatment stabilizes the stress state inside the SMA wire and stabilizes the temperature of the SMA wire by balancing the heat generation of the SMA wire and the heat radiation from the SMA wire to the outside air. Done as a purpose. Therefore, the initial stretching process is continued for a predetermined time when the temperature of the SMA line is expected to be stable.

  When the initial extension of the SMA line is completed, the slider 53 is moved in a direction away from the workpiece, and a stronger tension is applied to the SMA line. By applying the tension, the lens driving frame 12 is moved to the designed maximum displacement position, for example, about 300 μm away from the base member 4 toward the macro imaging side (the −Z side in FIG. 5) (step in FIG. 13). S140). The movement of the lens drive frame 12 to the maximum displacement position by the SMA line is performed for the purpose of, for example, confirming whether or not the designed drive stroke of the lens drive frame 12 is actually secured. . On the other hand, after the lens driving frame 12 is driven from the target displacement position at the time of adjusting the initial tension to, for example, a displacement position that is at least as large as the backlash of the driving system of the imaging lens 10, the lens driving frame 12 moves to the target displacement position. If so, the movement is performed with the backlash eliminated. Therefore, even if the position of the lens driving frame 12 is adjusted to the target displacement position from the state where the lens driving frame 12 is driven to the macro side at least by the backlash amount from the target displacement position, the usefulness of the present invention is not impaired. Absent.

  Next, the punch 51a and the punch 51b are supplied with a predetermined current for adjusting the initial tension that can stabilize the SMA wire in the middle of the transformation process from the austenite phase to the martensite phase, thereby stabilizing the state of the SMA wire. (Step S150 in FIG. 13). As the predetermined current, for example, a current of about 50 mA is adopted. In a state where the current for adjusting the initial tension is supplied to the SMA wire, the apparatus waits for a time until the temperature of the SMA wire is expected to be stabilized (equilibrium) due to the balance between heat generation and heat dissipation. The current value for adjusting the initial tension is changed according to the wire diameter of the SMA wire, the environmental temperature at the time of adjusting the tension, or the like. More specifically, the wire diameter of the SMA wire is measured, for example, for each production lot of the SMA wire, and is reflected in the change in the current value for adjusting the initial tension. Further, for example, 25 ° C. is adopted as the reference temperature of the environmental temperature at the time of tension adjustment, and the current value for initial tension adjustment is changed according to the deviation of the environmental temperature at the time of tension adjustment with respect to the reference temperature. As already described in the explanation of the adjustment of the initial tension applied to the SMA wire, even if stabilization of the state of the SMA wire is achieved in the middle of the martensite phase to the austenite phase, this It does not detract from the usefulness of the invention.

  When the state of the SMA line is stabilized in the middle of the transformation process from the austenite phase to the martensite phase, the slider 53 starts to move so that the slider 53 approaches the workpiece relatively (FIG. 14). Step S160).

  By starting the movement, the tension applied to the SMA line decreases, and the position of the lens driving frame 12 decreases in the + Z direction in FIG. Then, it is confirmed by the control unit 55 whether or not the position of the lens driving frame 12 (carrier) has reached the target position for adjusting the initial tension of the SMA actuator 3 (step S170 in FIG. 14). As the target position, for example, a position 100 um above (−Z direction) from the base member 4 is employed.

  As a result of the confirmation in step S170, if the lens drive frame 12 has not reached the target position, the process of reducing the tension applied to the SMA line by the slider 53 is continued (step S180 in FIG. 14), and the process proceeds to step S170. Is returned.

  As a result of the confirmation in step S170, if the lens drive frame 12 has reached the target position, the process of reducing the tension applied to the SMA line is stopped (step S190 in FIG. 14). In the processes of steps S160 to S190, the tension is adjusted so that the tension applied to the SMA line is reduced, but the tension is adjusted while the tension applied to the SMA line is increased. However, it does not impair the usefulness of the present invention.

  When the adjustment process of the initial tension applied to the SMA wire is completed, the groove portions of the electrodes 30a and 30b passed through the SMA line by the respective leading end portions 50a and 50b of the punches 51a and 51b in a state where the initial tension is adjusted. Each is caulked. By the caulking process, the SMA lines are fixed to the electrodes 30a and 30b of the electrode fixing portions 33a and 33b, respectively (step S200).

  It should be noted that the caulking processing of the electrodes 30a and 30b in step S200 is performed simultaneously by the tip portions 50a and 50b, for example, by applying a moving force F2 of 200 N to each of the electrodes 30a and 30b. By performing the caulking process on the electrodes 30a and 30b at the same time, the influence between the caulking processes can be suppressed and the processing time can be shortened.

  When the SMA line is fixed to each of the electrode fixing parts 33a and 33b, the control part 55 controls a cutting part (not shown), and the SMA line holding parts 54a and 54b side from the electrodes 30a and 30b of the SMA line, respectively. A process of cutting each part that protrudes is performed (step S210 in FIG. 14). The cutting process completes the manufacture of the SMA actuator 3 in the lens driving device 100 to be adjusted and the manufacturing of the lens driving device 100.

  As described above, according to the manufacturing apparatus 300 according to the embodiment, the lens driving frame 12 (target object) moved by the SMA actuator 3 is held at a preset position including the effects of various variations. As described above, the tension applied to the SMA wire 3L (SMA wire) that is stretched and heated in advance is adjusted. In the adjusted state, the SMA wire 3L is fixed to the electrode fixing portions 33a and 33b. Therefore, variation in the displacement of the lens driving frame 12 moved by the SMA actuator 3 between the individual lens driving devices 100 to be manufactured can be reduced.

DESCRIPTION OF SYMBOLS 1 Lens unit 2 Lever member 2a Displacement input part 2b Displacement output part 3 Shape memory alloy (SMA) actuator 3L Shape memory alloy (SMA) wire 4 Base member 6a, 6b Parallel leaf | plate spring 8 Support leg 8a Lever support part 10 Imaging lens 51a , 51b Punch 52 Displacement meter 53 Slider 55 Control unit 56 Adjustment stand 100 Lens driving device 300 Manufacturing device

Claims (8)

A manufacturing method of a drive device including an actuator that moves an object using a shape restoring force due to a temperature change of a shape memory alloy wire stretched from a first fixing portion to a second fixing portion,
A tensioning step of holding the shape memory alloy wire in a stretched state before fixing the shape memory alloy wire to the first fixing part and the second fixing part;
A heating step of heating the shape memory alloy wire in a stretched state by the stretching step;
Tension applied to the shape memory alloy wire in the stretching step so that the object is held at a preset position by the shape memory alloy wire that has been heated in a preset state by the heating step. A fixing step of fixing the shape memory alloy wire to the first fixing portion and the second fixing portion, in a state where is adjusted,
A manufacturing method comprising: A manufacturing method according to claim 1,
In the heating step,
The manufacturing method, wherein the shape memory alloy wire in a transformation process from an austenite phase to a martensite phase is brought into the heated state. A manufacturing method according to claim 2, comprising:
In the stretching step,
The manufacturing method characterized by adjusting while the tension | tensile_strength provided to the said shape memory alloy wire is weakened. A manufacturing method according to claim 3, wherein
In the heating step,
The manufacturing method, wherein the shape memory alloy wire is heated by being energized. A manufacturing method according to claim 4,
In the heating step,
A manufacturing method, wherein the shape memory alloy wire is brought into the heating state by passing a preset current through the shape memory alloy wire. A manufacturing method according to any one of claims 1 to 5,
The manufacturing method, wherein the heating means in the heating step and the fixing means in the fixing step are realized by the same means. A manufacturing method according to any one of claims 1 to 6, comprising:
In the fixing step, the shape memory alloy wire is simultaneously fixed to the first fixing portion and the second fixing portion. A manufacturing apparatus capable of manufacturing an actuator that moves an object using a shape restoring force due to a temperature change of a shape memory alloy wire stretched from a first fixing portion to a second fixing portion,
Before the shape memory alloy wire is fixed to the first fixing portion and the second fixing portion, the shape memory alloy wire is held in a stretched state, and the tension applied to the shape memory alloy wire is adjustable. A rack means;
Heating means for heating the shape memory alloy wire in a tension state by the tension means;
The tension applied by the stretching means to the shape memory alloy wire is such that the object is held at a preset position by the shape memory alloy wire brought into a heating state set in advance by the heating means. Fixing means for fixing the shape memory alloy wire to the first fixing portion and the second fixing portion in an adjusted state;
A manufacturing apparatus comprising:

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