JP2012038955A - Method of forming compound semiconductor layer - Google Patents

Method of forming compound semiconductor layer Download PDF

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JP2012038955A
JP2012038955A JP2010178484A JP2010178484A JP2012038955A JP 2012038955 A JP2012038955 A JP 2012038955A JP 2010178484 A JP2010178484 A JP 2010178484A JP 2010178484 A JP2010178484 A JP 2010178484A JP 2012038955 A JP2012038955 A JP 2012038955A
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semiconductor layer
compound semiconductor
main surface
dislocation
oxide film
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JP5598149B2 (en
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Ken Sato
憲 佐藤
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Sanken Electric Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a method of forming a compound semiconductor layer in which a compound semiconductor layer with low dislocation can be formed epitaxially while limiting increase in the number of steps and the time of manufacturing process.SOLUTION: The method of forming a compound semiconductor layer includes a step for forming an oxide film in a dislocation region within a first compound semiconductor layer along a principal surface and a dislocation which elongates from the principal surface to the inside of the first compound semiconductor layer by oxidizing the principal surface of the first compound semiconductor layer, a step for removing an oxide film formed on the principal surface without removing an oxide film formed in the dislocation region, and a step for growing a second compound semiconductor layer epitaxially on the principal surface to cover a part exposed to the principal surface of the oxide film formed in the dislocation region.

Description

本発明は、エピタキシャル成長を用いた化合物半導体層の形成方法に関する。   The present invention relates to a method for forming a compound semiconductor layer using epitaxial growth.

半導体レーザや発光ダイオード（ＬＥＤ）等の発光素子やフォトダイオード等の受光素子、或いは高耐圧パワーデバイス等に、例えばIII−Ｖ族窒化物半導体等からなる、化合物半導体装置が使用されている。代表的なIII−Ｖ族窒化物半導体は、ＡｌxＩｎyＧａ1-x-yＮ（０≦ｘ≦１、０≦ｙ≦１、０≦ｘ＋ｙ≦１）で表され、例えば窒化アルミニウム（ＡｌＮ）、窒化ガリウム（ＧａＮ）、窒化インジウム（ＩｎＮ）等である。 A compound semiconductor device made of, for example, a group III-V nitride semiconductor or the like is used for a light emitting element such as a semiconductor laser or a light emitting diode (LED), a light receiving element such as a photodiode, or a high voltage power device. A typical group III-V nitride semiconductor is represented by Al x In y Ga 1-xy N (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, 0 ≦ x + y ≦ 1). For example, aluminum nitride (AlN) Gallium nitride (GaN), indium nitride (InN), and the like.

エピタキシャル成長によって化合物半導体層上に他の化合物半導体層を形成することができる。例えば、異種基板上に化合物半導体層をヘテロエピタキシャル成長させて、化合物半導体基板として使用する方法が用いられている。しかし、種基板上に形成された化合物半導体層には、種基板と化合物半導体層の格子不整合や熱膨張係数差のために転位が発生する。化合物半導体層に転位がある場合、その化合物半導体層上に成長させた他の化合物半導体層に転位が伝搬する。また、同種基板上に化合物半導体層をホモエピタキシャル成長させる場合、種基板の転位が化合物半導体層に伝搬する。このため、転位の少ない化合物半導体層を成長させる方法が望まれている。   Another compound semiconductor layer can be formed on the compound semiconductor layer by epitaxial growth. For example, a method in which a compound semiconductor layer is heteroepitaxially grown on a heterogeneous substrate and used as a compound semiconductor substrate is used. However, dislocations occur in the compound semiconductor layer formed on the seed substrate due to lattice mismatch between the seed substrate and the compound semiconductor layer and a difference in thermal expansion coefficient. When there is a dislocation in the compound semiconductor layer, the dislocation propagates to another compound semiconductor layer grown on the compound semiconductor layer. Further, when the compound semiconductor layer is homoepitaxially grown on the same kind of substrate, dislocations of the seed substrate propagate to the compound semiconductor layer. For this reason, a method of growing a compound semiconductor layer with few dislocations is desired.

例えば、種基板上に形成した第１の窒化物半導体層の転位発生箇所にエッチングによってエッチピットを形成し、このエッチピット内に保護膜を形成する方法が提案されている（例えば、特許文献１参照。）。保護膜を選択成長マスクにして第２の窒化物半導体層を成長させることにより、転位密度の低い窒化物半導体基板を形成できる。   For example, a method has been proposed in which an etch pit is formed by etching at a dislocation occurrence position of a first nitride semiconductor layer formed on a seed substrate, and a protective film is formed in the etch pit (for example, Patent Document 1). reference.). By growing the second nitride semiconductor layer using the protective film as a selective growth mask, a nitride semiconductor substrate having a low dislocation density can be formed.

特許第３８３２３１３号公報Japanese Patent No. 3832313

しかしながら、上記方法で形成されるエッチピットの大きさには制約がある。また、貫通転位は刃状転位、螺旋転位、混合転位の３種類に分類され、貫通転位の種類によってエッチピットの大きさが異なることが知られている。このため、エッチピットが小さすぎる場合にエピタキシャル成長工程を追加したり、十分長い時間をかけてエッチピットを形成する必要がある。一方、エッチピットが大きくなると選択成長マスクが大きくなり、化合物半導体層を成長させる工程において横方向の成長速度を速くする必要がある。このため、縦方向の成長速度が遅くなり、成長時間が長くなる。即ち、所望の厚みの化合物半導体層を成長させるために、工程数の増大、工程の長時間化を伴うという問題があった。   However, the size of the etch pit formed by the above method is limited. Further, threading dislocations are classified into three types, edge dislocations, screw dislocations, and mixed dislocations, and it is known that the size of etch pits varies depending on the type of threading dislocation. For this reason, when the etch pit is too small, it is necessary to add an epitaxial growth process or to form the etch pit over a sufficiently long time. On the other hand, when the etch pit becomes larger, the selective growth mask becomes larger, and it is necessary to increase the lateral growth rate in the process of growing the compound semiconductor layer. For this reason, the growth rate in the vertical direction becomes slow and the growth time becomes long. That is, in order to grow a compound semiconductor layer having a desired thickness, there is a problem that the number of processes is increased and the process time is increased.

上記問題点に鑑み、本発明は、工程数の増大及び工程の長時間化が抑制された、転位の少ない化合物半導体層をエピタキシャル成長できる化合物半導体層の形成方法を提供することを目的とする。   In view of the above problems, an object of the present invention is to provide a method for forming a compound semiconductor layer capable of epitaxially growing a compound semiconductor layer with few dislocations, in which an increase in the number of steps and a long process time are suppressed.

本発明の一態様によれば、（イ）第１の化合物半導体層の主面を酸化して、主面、及び主面から第１の化合物半導体層内部に延伸する転位に沿った第１の化合物半導体層内部の転位領域に、酸化膜を形成するステップと、（ロ）転位領域に形成された酸化膜を除去せずに、主面に形成された酸化膜を除去するステップと、（ハ）転位領域に形成された酸化膜の主面に露出した部分を覆うように、主面上に第２の化合物半導体層をエピタキシャル成長させるステップとを含む化合物半導体層の形成方法が提供される。   According to one aspect of the present invention, (b) the first surface along the dislocation extending from the main surface and the main surface to the inside of the first compound semiconductor layer is oxidized by oxidizing the main surface of the first compound semiconductor layer. (B) forming an oxide film in the dislocation region inside the compound semiconductor layer; (b) removing the oxide film formed on the main surface without removing the oxide film formed in the dislocation region; And a step of epitaxially growing a second compound semiconductor layer on the main surface so as to cover a portion exposed on the main surface of the oxide film formed in the dislocation region.

本発明によれば、工程数の増大及び工程の長時間化が抑制された、転位の少ない化合物半導体層をエピタキシャル成長できる化合物半導体層の形成方法を提供できる。   ADVANTAGE OF THE INVENTION According to this invention, the formation method of the compound semiconductor layer which can epitaxially grow the compound semiconductor layer with few dislocations which the increase in the number of processes and the lengthening of the process were suppressed can be provided.

本発明の実施形態に係る化合物半導体層の形成方法を説明するための模式的な工程図である（その１）。It is a typical process diagram for explaining the formation method of the compound semiconductor layer concerning the embodiment of the present invention (the 1). 本発明の実施形態に係る化合物半導体層の形成方法を説明するための模式的な工程図である（その２）。It is a typical process drawing for explaining the formation method of the compound semiconductor layer concerning the embodiment of the present invention (the 2).

次に、図面を参照して、本発明の実施形態を説明する。以下の図面の記載において、同一又は類似の部分には同一又は類似の符号を付している。ただし、図面は模式的なものであり、厚みと平面寸法との関係、各部の長さの比率等は現実のものとは異なることに留意すべきである。したがって、具体的な寸法は以下の説明を参酌して判断すべきものである。又、図面相互間においても互いの寸法の関係や比率が異なる部分が含まれていることはもちろんである。   Next, an embodiment of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the relationship between the thickness and the planar dimensions, the ratio of the lengths of the respective parts, and the like are different from the actual ones. Therefore, specific dimensions should be determined in consideration of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.

又、以下に示す実施形態は、この発明の技術的思想を具体化するための装置や方法を例示するものであって、この発明の技術的思想は、構成部品の形状、構造、配置等を下記のものに特定するものでない。この発明の実施形態は、特許請求の範囲において、種々の変更を加えることができる。   The following embodiments exemplify apparatuses and methods for embodying the technical idea of the present invention, and the technical idea of the present invention includes the shape, structure, arrangement, etc. of components. It is not specified to the following. The embodiment of the present invention can be variously modified within the scope of the claims.

本発明の実施形態に係る化合物半導体層の形成方法は、第１の化合物半導体層の主面を酸化して、主面、及び主面から第１の化合物半導体層内部に延伸する転位に沿った第１の化合物半導体層内部の転位領域に酸化膜を形成するステップと、転位領域に形成された酸化膜を除去せずに、主面に形成された酸化膜を除去するステップと、転位領域に形成された酸化膜の主面に露出した部分を覆うように、主面上に第２の化合物半導体層をエピタキシャル成長させるステップとを含む。以下では、第１の化合物半導体層が、図１（ａ）に示すような、主面１１から内部に延伸する転位１０１〜１０２を有する種基板１０である場合について例示的に説明する。転位１０１〜１０２は、例えば種基板１０を貫通する貫通転位である。   The method for forming a compound semiconductor layer according to an embodiment of the present invention is along the dislocation that oxidizes the main surface of the first compound semiconductor layer and extends from the main surface to the inside of the first compound semiconductor layer. Forming an oxide film in the dislocation region inside the first compound semiconductor layer; removing the oxide film formed on the main surface without removing the oxide film formed in the dislocation region; And epitaxially growing a second compound semiconductor layer on the main surface so as to cover a portion exposed on the main surface of the formed oxide film. Below, the case where the 1st compound semiconductor layer is the seed substrate 10 which has the dislocations 101-102 extended inside from the main surface 11 as shown to Fig.1 (a) is demonstrated exemplarily. The dislocations 101 to 102 are threading dislocations that penetrate the seed substrate 10, for example.

種基板１０には、例えば窒化ガリウム（ＧａＮ）基板などのIII−Ｖ族窒化物半導体基板などが使用される。或いは、半絶縁性基板や絶縁性基板の上に化合物半導体層を形成したテンプレート基板を、種基板１０に採用してもよい。   As the seed substrate 10, for example, a group III-V nitride semiconductor substrate such as a gallium nitride (GaN) substrate is used. Alternatively, a template substrate in which a compound semiconductor layer is formed on a semi-insulating substrate or an insulating substrate may be adopted as the seed substrate 10.

種基板１０の主面１１を酸化することにより、図１（ｂ）に示すように、主面１１に酸化膜（以下において、「表面酸化膜」という。）２２が形成される。このとき、主面１１から種基板１０内部に延伸する転位１０１〜１０２に沿った転位領域１１１〜１１２は、種基板１０の転位が発生していない他の領域に比べて、酸化レートが速い。このため、転位領域１１１〜１１２においては、転位１０１〜１０２に沿って種基板１０の膜厚方向に深く酸化が進む。その結果、図１（ｂ）に示すように、主面１１から種基板１０の内部に延伸する酸化膜（以下において、「転位領域酸化膜」という。）２１１〜２１２が転位領域１１１〜１１２に形成される。   By oxidizing the main surface 11 of the seed substrate 10, an oxide film (hereinafter referred to as “surface oxide film”) 22 is formed on the main surface 11 as shown in FIG. At this time, the dislocation regions 111 to 112 along the dislocations 101 to 102 extending from the main surface 11 to the inside of the seed substrate 10 have a higher oxidation rate than other regions where the dislocation of the seed substrate 10 is not generated. For this reason, in the dislocation regions 111 to 112, oxidation proceeds deeply in the film thickness direction of the seed substrate 10 along the dislocations 101 to 102. As a result, as shown in FIG. 1B, oxide films (hereinafter referred to as “dislocation region oxide films”) 211 to 212 extending from the main surface 11 to the inside of the seed substrate 10 become dislocation regions 111 to 112. It is formed.

一般的に、転位の無い単結晶領域よりも、転位（粒界）領域において転位に沿う方向に原子が拡散しやすいことが知られている。特に低温において、単結晶領域での原子の拡散係数は転位領域での原子の拡散係数よりも小さい。   Generally, it is known that atoms are more likely to diffuse in the direction along the dislocations in the dislocation (grain boundary) region than in the single crystal region without dislocations. Particularly at low temperatures, the diffusion coefficient of atoms in the single crystal region is smaller than the diffusion coefficient of atoms in the dislocation region.

したがって、上記に述べたように、転位領域１１１〜１１２において転位１０１〜１０２に沿って種基板１０の膜厚方向に深く酸化が進み、転位領域１１１〜１１２に転位領域酸化膜２１１〜２１２が形成される。   Therefore, as described above, in the dislocation regions 111 to 112, oxidation proceeds deeply in the film thickness direction of the seed substrate 10 along the dislocations 101 to 102, and dislocation region oxide films 211 to 212 are formed in the dislocation regions 111 to 112. Is done.

表面酸化膜２２及び転位領域酸化膜２１１〜２１２の形成には、ウェット酸化法、ドライ酸化法、加圧酸化法などの熱酸化法を採用可能である。例えば種基板１０がＧａＮ基板の場合、酸化ガリウム（Ｇａ2Ｏ3）膜である表面酸化膜２２及び転位領域酸化膜２１１〜２１２が形成される。 For the formation of the surface oxide film 22 and the dislocation region oxide films 211 to 212, a thermal oxidation method such as a wet oxidation method, a dry oxidation method, or a pressure oxidation method can be employed. For example, when the seed substrate 10 is a GaN substrate, the surface oxide film 22 and the dislocation region oxide films 211 to 212 that are gallium oxide (Ga 2 O 3 ) films are formed.

或いは、ケミカル酸化法やプラズマ酸化法を用いて表面酸化膜２２及び転位領域酸化膜２１１〜２１２を形成してもよい。   Alternatively, the surface oxide film 22 and the dislocation region oxide films 211 to 212 may be formed using a chemical oxidation method or a plasma oxidation method.

なお、転位領域酸化膜２１１〜２１２の主面１１に露出した部分の面積は、できるだけ小さいことが好ましい。例えば、転位領域酸化膜２１１〜２１２の主面１１に露出した部分の主面１１に沿った長さｗは、数ｎｍ〜数十ｎｍ程度である。一般的に、転位領域酸化膜２１１〜２１２の主面１１に露出した部分の主面１１に沿った長さは、表面酸化膜２２の膜厚と同程度である。したがって、表面酸化膜２２の膜厚が数ｎｍ〜数十ｎｍ程度になるように、酸化の条件を設定する。   In addition, it is preferable that the area of the part exposed to the main surface 11 of the dislocation region oxide films 211 to 212 is as small as possible. For example, the length w along the main surface 11 of the portion exposed to the main surface 11 of the dislocation region oxide films 211 to 212 is about several nm to several tens of nm. Generally, the length along the main surface 11 of the portion exposed to the main surface 11 of the dislocation region oxide films 211 to 212 is approximately the same as the film thickness of the surface oxide film 22. Therefore, the oxidation conditions are set so that the thickness of the surface oxide film 22 is about several nm to several tens of nm.

例えば、酸素流量５ｍリットル／分、酸化温度９００℃、加熱時間３０分の条件で窒化アルミニウムガリウム（ＡｌＧａＮ）膜を酸化すると、膜厚１０ｎｍ程度の酸化膜が形成される。したがって、例えば、膜厚が数十ｎｍの表面酸化膜２２を形成するためには、加熱時間を９０分程度に設定する。即ち、転位領域酸化膜２１１〜２１２の長さｗを数十ｎｍ程度にするためには、加熱時間を９０分程度に設定すればよい。ただし、転位領域１１１〜１１２での原子の拡散係数が転位の無い領域での原子の拡散係数に比べて大きいことから、拡散係数の差を考慮して酸化膜形成時の加熱時間を短縮することも可能である。   For example, when an aluminum gallium nitride (AlGaN) film is oxidized under conditions of an oxygen flow rate of 5 ml / min, an oxidation temperature of 900 ° C., and a heating time of 30 minutes, an oxide film having a thickness of about 10 nm is formed. Therefore, for example, in order to form the surface oxide film 22 having a film thickness of several tens of nanometers, the heating time is set to about 90 minutes. That is, in order to make the length w of the dislocation region oxide films 211 to 212 about several tens of nm, the heating time may be set to about 90 minutes. However, since the diffusion coefficient of atoms in the dislocation regions 111 to 112 is larger than the diffusion coefficient of atoms in the region without dislocations, the heating time for forming the oxide film should be shortened in consideration of the difference in diffusion coefficient. Is also possible.

次に、図１（ｃ）に示すように、種基板１０の主面１１に形成された表面酸化膜２２を、機械的研磨法や化学的機械的研磨（ＣＭＰ）法などにより除去する。表面酸化膜２２のみを選択的に除去し、転位領域酸化膜２１１〜２１２を残すために、化学的研磨法よりも機械的研磨法を採用することが好ましい。なお、表面酸化膜２２を完全に除去するために、オーバーエッチングによって種基板１０の上部の一部まで除去してもよい。   Next, as shown in FIG. 1C, the surface oxide film 22 formed on the main surface 11 of the seed substrate 10 is removed by a mechanical polishing method, a chemical mechanical polishing (CMP) method, or the like. In order to selectively remove only the surface oxide film 22 and leave the dislocation region oxide films 211 to 212, it is preferable to employ a mechanical polishing method rather than a chemical polishing method. In order to completely remove the surface oxide film 22, a part of the upper portion of the seed substrate 10 may be removed by overetching.

表面酸化膜２２を除去した後、転位領域酸化膜２１１〜２１２を選択成長マスクとして、種基板１０の主面１１上に第２の化合物半導体層として化合物半導体層３０をエピタキシャル成長させる。   After removing the surface oxide film 22, the compound semiconductor layer 30 is epitaxially grown as a second compound semiconductor layer on the main surface 11 of the seed substrate 10 using the dislocation region oxide films 211 to 212 as a selective growth mask.

エピタキシャル成長開始直後においては、図２（ａ）に示すように、種基板１０の主面１１の転位領域酸化膜２１１〜２１２が形成されていない領域にエピタキシャル層が成長し、転位領域酸化膜２１１〜２１２上にはエピタキシャル層は形成されない。つまり、転位領域酸化膜２１１〜２１２は、種基板１０の主面１１の転位１０１〜１０２が生じている位置にエピタキシャル層を成長させないマスクである。このため、化合物半導体層３０に、転位１０１〜１０２に起因する転位は形成されない。   Immediately after the start of epitaxial growth, as shown in FIG. 2A, an epitaxial layer grows in a region where the dislocation region oxide films 211 to 212 of the main surface 11 of the seed substrate 10 are not formed, and the dislocation region oxide films 211 to No epitaxial layer is formed on 212. That is, the dislocation region oxide films 211 to 212 are masks that do not allow epitaxial layers to grow at positions where dislocations 101 to 102 of the main surface 11 of the seed substrate 10 are generated. For this reason, dislocations resulting from the dislocations 101 to 102 are not formed in the compound semiconductor layer 30.

そして、化合物半導体層３０の膜厚が厚くなるにつれて、横方向にもエピタキシャル成長が進む。その結果、図２（ｂ）に示すように、転位領域酸化膜２１１〜２１２の主面１１に露出した部分が化合物半導体層３０によって覆われる。   And as the film thickness of the compound semiconductor layer 30 increases, the epitaxial growth also proceeds in the lateral direction. As a result, as shown in FIG. 2B, the exposed portion of the dislocation region oxide films 211 to 212 on the main surface 11 is covered with the compound semiconductor layer 30.

転位領域酸化膜２１１〜２１２の主面１１に露出した部分の面積は小さく、例えば主面１１に沿った長さｗは数ｎｍ〜数十ｎｍ程度である。このため、転位領域酸化膜２１１〜２１２の主面１１に露出した部分を覆うよう成長させる化合物半導体層３０のエピタキシャル成長条件は、膜厚方向にエピタキシャル層を成長させる一般的な条件でもよい。ただし、化合物半導体層３０の所望の膜厚が薄い場合には、膜厚方向の成長速度に対する膜厚方向に垂直な横方向の成長速度の比率を大きくすることが好ましい。これにより、化合物半導体層３０の膜厚が比較的薄い場合にも、転位領域酸化膜２１１〜２１２の主面１１に露出した部分を化合物半導体層３０によって覆うことができる。一方、化合物半導体層３０の膜厚が厚い場合には、膜厚方向の成長速度に対する横方向の成長速度の比率を小さくすることにより、化合物半導体層３０の成長時間の増大を抑制できる。   The area of the part of the dislocation region oxide film 211 to 212 exposed on the main surface 11 is small. For example, the length w along the main surface 11 is about several nm to several tens of nm. For this reason, the epitaxial growth conditions of the compound semiconductor layer 30 grown so as to cover the portion exposed to the main surface 11 of the dislocation region oxide films 211 to 212 may be general conditions for growing the epitaxial layer in the film thickness direction. However, when the desired film thickness of the compound semiconductor layer 30 is thin, it is preferable to increase the ratio of the growth rate in the lateral direction perpendicular to the film thickness direction to the growth rate in the film thickness direction. Thereby, even when the film thickness of the compound semiconductor layer 30 is relatively thin, a portion of the dislocation region oxide films 211 to 212 exposed on the main surface 11 can be covered with the compound semiconductor layer 30. On the other hand, when the thickness of the compound semiconductor layer 30 is large, an increase in the growth time of the compound semiconductor layer 30 can be suppressed by reducing the ratio of the lateral growth rate to the growth rate in the film thickness direction.

化合物半導体層３０は、例えば、ＧａＮ層などのIII−Ｖ族窒化物半導体である。エピタキシャル成長によって種基板１０上に化合物半導体層３０を形成するため、所望の化合物半導体層３０の材料に応じて、種基板１０の材料は適宜選択される。化合物半導体層３０のエピタキシャル成長には、例えばハイドライド気相成長（ＨＶＰＥ）法、有機金属気相成長（ＭＯＶＰＥ）法、分子線エピタキシー（ＭＢＥ）法、ナトリウム（Ｎａ）フラックス法、アモノサーマル法などを採用可能である。   The compound semiconductor layer 30 is, for example, a group III-V nitride semiconductor such as a GaN layer. Since the compound semiconductor layer 30 is formed on the seed substrate 10 by epitaxial growth, the material of the seed substrate 10 is appropriately selected according to the desired material of the compound semiconductor layer 30. For epitaxial growth of the compound semiconductor layer 30, for example, hydride vapor phase epitaxy (HVPE) method, metal organic vapor phase epitaxy (MOVPE) method, molecular beam epitaxy (MBE) method, sodium (Na) flux method, ammonothermal method, etc. It can be adopted.

化合物半導体層３０から種基板１０を除去することにより、図２（ｃ）に示すように、化合物半導体基板として化合物半導体層３０が得られる。例えば、化合物半導体層３０が露出するまで、種基板１０を研磨して除去する。これにより、化合物半導体層３０をフリースタンディングの低転位基板として使用できる。或いは、化合物半導体層３０から種基板１０を除去せずに、低転位の化合物半導体層３０をテンプレートとして使用してもよい。   By removing the seed substrate 10 from the compound semiconductor layer 30, as shown in FIG. 2C, the compound semiconductor layer 30 is obtained as a compound semiconductor substrate. For example, the seed substrate 10 is polished and removed until the compound semiconductor layer 30 is exposed. Thereby, the compound semiconductor layer 30 can be used as a free-standing low dislocation substrate. Alternatively, the low dislocation compound semiconductor layer 30 may be used as a template without removing the seed substrate 10 from the compound semiconductor layer 30.

以上に説明したように、本発明の実施形態に係る化合物半導体層の形成方法では、種基板１０の主面１１の転位１０１〜１０２が生じている位置をマスクするように、転位領域酸化膜２１１〜２１２が形成される。転位領域酸化膜２１１〜２１２が形成された主面１１に化合物半導体層３０を成長させることによって、種基板１０の転位１０１〜１０２の影響を受けずに、化合物半導体層３０が形成される。これにより、転位の少ない化合物半導体層を得ることができる。   As described above, in the method for forming a compound semiconductor layer according to the embodiment of the present invention, the dislocation region oxide film 211 is formed so as to mask the positions where the dislocations 101 to 102 of the main surface 11 of the seed substrate 10 are generated. ~ 212 are formed. By growing the compound semiconductor layer 30 on the main surface 11 on which the dislocation region oxide films 211 to 212 are formed, the compound semiconductor layer 30 is formed without being affected by the dislocations 101 to 102 of the seed substrate 10. Thereby, a compound semiconductor layer with few dislocations can be obtained.

ＧａＮ膜にエッチピットを形成することは容易でないが、本発明の実施形態に係る化合物半導体層の形成方法によれば、エッチピットを形成することなく、転位の少ない化合物半導体層３０を形成することができる。   Although it is not easy to form etch pits in the GaN film, according to the method for forming a compound semiconductor layer according to the embodiment of the present invention, the compound semiconductor layer 30 with few dislocations can be formed without forming etch pits. Can do.

上記のように、本発明の実施形態に係る化合物半導体層の形成方法によれば、工程数の増大及び工程の長時間化が抑制された、転位の少ない化合物半導体層３０をエピタキシャル成長することができる。   As described above, according to the method for forming a compound semiconductor layer according to the embodiment of the present invention, the compound semiconductor layer 30 with few dislocations can be epitaxially grown in which the increase in the number of steps and the lengthening of the steps are suppressed. .

なお、上記では種基板１０に化合物半導体層３０を成長される例を示したが、転位の少ない化合物半導体層３０を成長させる下地が種基板に限られないことはもちろんである。例えば、化合物半導体層を積層して製造される半導体レーザやＬＥＤなどの発光素子、フォトダイオードなどの受光素子についても、転位の少ない化合物半導体層を有するデバイス構造を実現できる。   Although an example in which the compound semiconductor layer 30 is grown on the seed substrate 10 has been described above, it is needless to say that the base on which the compound semiconductor layer 30 with few dislocations is grown is not limited to the seed substrate. For example, a device structure having a compound semiconductor layer with few dislocations can be realized for a light emitting element such as a semiconductor laser or LED manufactured by stacking compound semiconductor layers and a light receiving element such as a photodiode.

（その他の実施形態）
上記のように、本発明は実施形態によって記載したが、この開示の一部をなす論述及び図面はこの発明を限定するものであると理解すべきではない。この開示から当業者には様々な代替実施形態、実施例及び運用技術が明らかとなろう。 (Other embodiments)
As mentioned above, although this invention was described by embodiment, it should not be understood that the description and drawing which form a part of this indication limit this invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

既に述べた実施形態の説明においては、ＧａＮ層などのIII−Ｖ族窒化物半導体層を化合物半導体層３０として形成する場合を説明した。しかし、エピタキシャル成長により形成されるエピタキシャル層であれば、化合物半導体層３０としてIII−Ｖ族窒化物半導体層以外の化合物半導体層を形成してもよい。表面を酸化できる種基板であれば、種基板上に転位の発生が抑制されたエピタキシャル層を成長させることができる。   In the description of the embodiment already described, the case where a III-V nitride semiconductor layer such as a GaN layer is formed as the compound semiconductor layer 30 has been described. However, a compound semiconductor layer other than the group III-V nitride semiconductor layer may be formed as the compound semiconductor layer 30 as long as it is an epitaxial layer formed by epitaxial growth. If it is a seed substrate which can oxidize the surface, the epitaxial layer by which generation | occurrence | production of the dislocation was suppressed on the seed substrate can be grown.

このように、本発明はここでは記載していない様々な実施形態等を含むことは勿論である。したがって、本発明の技術的範囲は上記の説明から妥当な特許請求の範囲に係る発明特定事項によってのみ定められるものである。   As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

１０…種基板
１１…主面
２２…表面酸化膜
３０…化合物半導体層
１０１〜１０２…転位
１１１〜１１２…転位領域
２１１〜２１２…転位領域酸化膜 DESCRIPTION OF SYMBOLS 10 ... Seed substrate 11 ... Main surface 22 ... Surface oxide film 30 ... Compound semiconductor layer 101-102 ... Dislocation 111-112 ... Dislocation area 211-212 ... Dislocation area oxide film

Claims (6)

第１の化合物半導体層の主面を酸化して、前記主面、及び前記主面から前記第１の化合物半導体層内部に延伸する転位に沿った前記第１の化合物半導体層内部の転位領域に、酸化膜を形成するステップと、
前記転位領域に形成された前記酸化膜を除去せずに、前記主面に形成された前記酸化膜を除去するステップと、
前記転位領域に形成された前記酸化膜の前記主面に露出した部分を覆うように、前記主面上に第２の化合物半導体層をエピタキシャル成長させるステップと
を含むことを特徴とする化合物半導体層の形成方法。 A main surface of the first compound semiconductor layer is oxidized to form a dislocation region inside the first compound semiconductor layer along the dislocation extending from the main surface and the main surface into the first compound semiconductor layer. Forming an oxide film; and
Removing the oxide film formed on the main surface without removing the oxide film formed in the dislocation region;
Epitaxially growing a second compound semiconductor layer on the main surface so as to cover a portion exposed to the main surface of the oxide film formed in the dislocation region. Forming method. 熱酸化法によって前記第１の化合物半導体層の主面を酸化することを特徴とする請求項１に記載の化合物半導体層の形成方法。   The method for forming a compound semiconductor layer according to claim 1, wherein the main surface of the first compound semiconductor layer is oxidized by a thermal oxidation method. 機械的的な研磨法によって前記主面に形成された酸化膜を除去することを特徴とする請求項１又は２に記載の化合物半導体層の形成方法。   3. The method of forming a compound semiconductor layer according to claim 1, wherein the oxide film formed on the main surface is removed by a mechanical polishing method. 前記主面に形成された酸化膜を除去する場合に、前記第１の化合物半導体層の上部の一部まで除去することを特徴とする請求項１乃至３のいずれか１項に記載の化合物半導体層の形成方法。   4. The compound semiconductor according to claim 1, wherein when the oxide film formed on the main surface is removed, a part of the upper portion of the first compound semiconductor layer is removed. 5. Layer formation method. 前記化合物半導体層が、III−Ｖ族窒化物半導体層であることを特徴とする請求項１乃至４のいずれか１項に記載の化合物半導体層の形成方法。   The method for forming a compound semiconductor layer according to claim 1, wherein the compound semiconductor layer is a group III-V nitride semiconductor layer. 前記第２の化合物半導体層から前記第１の化合物半導体層を除去するステップを更に含むことを特徴とする請求項１乃至５のいずれか１項に記載の化合物半導体層の形成方法。   The method for forming a compound semiconductor layer according to claim 1, further comprising a step of removing the first compound semiconductor layer from the second compound semiconductor layer.
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