JP2010199562A - Projection optical system, projection method, exposure apparatus, and method of manufacturing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve improvement throughput for scanning exposure. <P>SOLUTION: This exposure apparatus includes: a projection optical system (PL); a first stage mechanism (PS) for moving a photosensitive substrate (P) while holding it; and a second stage mechanism (MS) for moving an object (M) having a pattern while holding it. The projection optical system formes a first image forming region (ER1) optically conjugate with an illuminated region (IR) on the object on a substrate, and forms a second image forming region (ER2) optically conjugate with the illuminated region with a spacing from the first image forming region in a predetermined direction (Y direction). <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a projection optical system used in, for example, a scanning exposure apparatus that transfers a pattern onto a photosensitive substrate.

  The liquid crystal display panel is manufactured by patterning a transparent thin film electrode on a plate by a photolithography technique. A scanning exposure apparatus is used as an apparatus for projecting and exposing a mask pattern onto a plate in this photolithography process (see, for example, Patent Document 1). In this type of exposure apparatus, the operation of scanning and exposing one pattern area on the mask to one partitioned area on the plate is repeated.

US Patent Application Publication No. 2008/0165333

  In recent years, as a liquid crystal display panel is increased in size, a plate as a photosensitive substrate tends to be increased in size, and it is required to improve throughput for scanning exposure without being affected by the increase in size of the substrate. .

  Aspects of the present invention have been made in view of the above-described problems. For example, a projection optical system, a projection method, and an exposure apparatus that can be applied to, for example, a scanning exposure apparatus to achieve an improvement in throughput of scanning exposure. And a device manufacturing method.

According to a first aspect of the present invention, a first imaging system that receives light from the first surface and forms a first projection image of the first surface in a first imaging region of the second surface;
A part of the first imaging system is shared, light from the first surface is received, and a second projected image of the first surface is at least predetermined from the first imaging region along the second surface. There is provided a projection optical system comprising: a second imaging system formed in a second imaging region spaced in the direction.

According to the second aspect of the present invention, the first image forming area optically conjugate with the illumination area on the first surface by the light irradiated on the first surface is formed on the second surface. An imaging system;
A second imaging region that shares a part with the first imaging system and is optically conjugate with the illumination region is formed on the second surface at least in a predetermined direction from the first imaging region. A projection optical system comprising a second imaging system is provided.

  According to the third aspect of the present invention, light from the first surface is received to form a first projection image of the first surface in the first imaging region of the second surface, A projection method is provided in which a second projection image is formed on a second imaging region spaced from the first imaging region along the second surface at least in a predetermined direction.

  According to the fourth aspect of the present invention, a first imaging region optically conjugate with an illumination region on the first surface by light irradiated on the first surface is formed on the second surface, A projection method is provided in which a second imaging region optically conjugate with the illumination region is formed on the second surface at a predetermined distance from the first imaging region.

According to a fifth aspect of the present invention, there is provided a projection optical system according to the first or second aspect of the present invention,
A first stage mechanism that holds a photosensitive substrate, places a photosensitive surface of the substrate on the second surface, and moves in a crossing direction intersecting the predetermined direction;
An exposure apparatus is provided that includes a second stage mechanism that holds an object having a pattern and places a pattern surface of the object on the first surface.

According to a sixth aspect of the present invention, using the exposure apparatus according to the fifth aspect of the present invention, the step of transferring the pattern to the substrate;
Developing the substrate to which the pattern is transferred, and forming a transfer pattern layer having a shape corresponding to the pattern;
Processing the substrate via the transfer pattern layer;
A device manufacturing method is provided.

  When the projection optical system according to the aspect of the present invention is applied to a scanning exposure apparatus, for example, a first projection image of a mask pattern is formed in the first imaging region, and a second projection image of the pattern is first imaging. It is formed in a second imaging region that is spaced from the region in a direction that intersects the scanning direction of the photosensitive substrate. In other words, a pair of imaging regions spaced apart in the direction intersecting the scanning direction of the substrate, that is, a pair of imaging regions parallel to the scanning direction of the substrate is formed. As a result, in the exposure apparatus equipped with the projection optical system according to the aspect of the present invention, the pattern of one pattern area can be simultaneously scanned and exposed to a pair of partitioned areas spaced apart on the substrate. Such throughput can be improved.

It is a figure which shows schematically the structure of the exposure apparatus concerning embodiment of this invention. It is a figure which shows schematically the structure of the projection optical system concerning this embodiment. It is a figure explaining the effect | action of a group of deflection | deviation members. It is a figure which shows a mode that a 1st image formation area and a 2nd image formation area are formed in position shift. It is a figure showing signs that the 1st image formation field and the 2nd image formation field are formed in alignment. It is a figure explaining the structure and effect | action of the division | segmentation reflection part in this embodiment. It is a figure explaining the correspondence of the some reflection part of a division | segmentation reflection part, and the some light source in an illumination pupil. It is a 1st figure explaining operation | movement of the scanning exposure with respect to the shot area | region on a plate. It is a 2nd figure explaining operation | movement of the scanning exposure with respect to the shot area | region on a plate. It is a figure explaining the structure and effect | action of the division | segmentation reflection part concerning a 1st modification. It is a figure explaining the structure and effect | action of the division | segmentation reflection part concerning a 2nd modification. It is a figure explaining the structure and effect | action of the division | segmentation reflection part concerning a 3rd modification. It is a figure explaining the operation | movement of the scanning exposure with respect to the shot area | region on a plate using a pair of image formation area | region which shifted position. It is a figure which shows a mode that the some pattern area | region formed in a line on the mask is transcribe | transferred to the some division area located in a line on the plate. It is a figure which shows a mode that the dimension and space | interval of a pair of image formation area are changed according to device size. It is a flowchart which shows the manufacturing process of a semiconductor device. It is a flowchart which shows the manufacturing process of a liquid crystal device.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a drawing schematically showing a configuration of an exposure apparatus according to an embodiment of the present invention. In the present embodiment, as shown in FIG. 1, a scanning type exposure apparatus that projects (transfers) the pattern of the mask M onto the plate P while moving the mask M and the plate P relative to the projection optical system PL. The present invention is applied. In FIG. 1, the Z axis is in the normal direction of the transfer surface (photosensitive surface; exposed surface) of the plate P as a photosensitive substrate, and the direction parallel to the paper surface of FIG. 1 is set in the direction perpendicular to the paper surface of FIG. 1 in a plane parallel to the transfer surface of the plate P.

  The exposure apparatus of this embodiment includes an illumination optical system IL that illuminates the pattern area of the mask M, a mask stage MS that moves while holding the mask M, and a projection that forms an enlarged image of the pattern of the mask M on the plate P. Main control system that controls the overall operation of the optical system PL, the substrate stage PS that holds and moves the plate P, the stage drive system DR that drives the mask stage MS and the substrate stage PS, and the stage drive system DR With CR. The plate P is a rectangular and flat glass plate coated with a photoresist (photosensitive material) for manufacturing a liquid crystal display element.

  Illumination light (exposure light) for exposure is supplied from the light source LS to the illumination optical system IL. As exposure light, for example, light of i-line (wavelength 365 nm) selected from light emitted from an ultra-high pressure mercury lamp, pulsed light composed of third harmonic of YAG laser (wavelength 355 nm), KrF excimer laser light (wavelength 248 nm) Etc. can be used. The illumination optical system IL includes a collimator lens 20, a fly-eye lens 21, a condenser optical system 22, a mask blind 23 as a variable field stop, an illumination imaging optical system 24 (24a, 24b), and the like in the order of light incidence. .

  The light emitted from the light source LS illuminates the illumination area IR on the mask M via the illumination optical system IL. The illumination region IR has a predetermined outer shape that is elongated along the X direction. The light from the illumination area IR of the mask M forms a first projection image of the pattern in the illumination area IR in the first imaging area (first projection area) ER1 via the projection optical system PL, and the first result. A second projected image of the pattern in the illumination area IR is formed in a second imaging area (second projection area) ER2 spaced from the image area ER1 in the Y direction. In other words, the projection optical system PL moves the first imaging region ER1 in which the first projection image of the pattern is formed and the second imaging region ER2 in which the second projection image of the pattern is formed in the Y direction on the plate P. Formed at intervals.

  The projection optical system PL is telecentric on the mask M side and the plate P side, and has an enlargement magnification from the mask M side to the plate P side. The shapes of the imaging regions ER1 and ER2 are shapes obtained by enlarging the shape of the illumination region IR with the projection magnification β of the projection optical system PL. Hereinafter, in order to facilitate the understanding of the description, the illumination region IR is assumed to be a rectangular region that is elongated along the X direction. In this case, as will be described later, the first imaging region ER1 and the second imaging region ER2 are rectangular regions extending elongated along the Y direction perpendicular to the X direction, which is the longitudinal direction of the illumination region IR. However, the shape of the illumination region IR, and thus the shapes of the imaging regions ER1 and ER2, are variably set according to the shape of the variable opening (light transmission portion) of the mask blind 23 in the illumination optical system IL.

  The mask M is sucked and held on the mask stage MS via a mask holder (not shown). On the mask stage MS, a mask side laser interferometer (not shown) having a known configuration is arranged. The mask side laser interferometer measures the position of the mask stage MS in the X direction, the position in the Y direction, and the rotation angle around the Z axis, and supplies the measurement result to the main control system CR. The main control system CR controls the position of the mask stage MS in the X direction, the position and speed in the Y direction as the scanning direction, and the rotation angle around the Z axis through the stage drive system DR based on the measurement values. To do.

  The plate P is sucked and held on the substrate stage PS via a substrate holder (not shown). A substrate-side laser interferometer (not shown) having a known configuration is disposed on the substrate stage PS. The substrate-side laser interferometer measures the position in the X direction, the position in the Y direction, and the rotation angle around the Z axis of the substrate stage PS, and supplies the measurement result to the main control system CR. Based on the measurement value, the main control system CR controls the X direction and speed as the scanning direction of the substrate stage PS, the position in the Y direction, and the rotation angle around the Z axis via the stage drive system DR. At the time of scanning exposure, the substrate stage PS is driven at the speed V in the X direction in synchronization with the mask stage MS being driven at the speed V / β in the Y direction.

  FIG. 2 is a diagram schematically showing the configuration of the projection optical system according to the present embodiment. Referring to FIG. 2, the projection optical system PL includes an intermediate imaging optical system GM that forms a first intermediate image I1 and a second intermediate image I2 of a pattern illuminated by the illumination area IR in the pattern area of the mask M, and A first imaging optical system G1 that forms a first projection image of a pattern in the first imaging region ER1 on the plate P based on the light from the first intermediate image I1, and the light from the second intermediate image I2. A second imaging optical system G2 that forms a second projected image of the pattern in the second imaging region ER2 on the plate P;

  That is, the intermediate imaging optical system GM optically conjugates the position of the pattern area of the mask M with the formation position of the first intermediate image I1 and the formation position of the second intermediate image I2. The first imaging optical system G1 optically conjugates the formation position of the first intermediate image I1 and the position of the first imaging region ER1. The second imaging optical system G2 optically conjugates the formation position of the second intermediate image I2 and the position of the second imaging region ER2.

  The mask M is arranged on the mask stage MS so that the pattern area substantially coincides with the object plane OBJ of the projection optical system PL. The plate P is disposed on the substrate stage PS so that its surface (photosensitive surface) substantially coincides with the image plane IMG of the projection optical system PL. The intermediate imaging optical system GM is different from the positive lens group Lp on which light from the pattern area illuminated by the illumination area IR is incident, and the light from the positive lens group Lp is different from each other across the optical axis AXp of the positive lens group Lp. A split reflector 10 that splits the first light and the second light traveling in the direction and reflects the first light and the second light toward the positive lens group Lp is provided. The specific configuration and operation of the split reflection unit 10 will be described later.

  In the optical path between the intermediate imaging optical system GM and the first imaging optical system G1, the first deflecting member M1, the second deflecting member M2, and the third deflecting member M3 are arranged in the light incident order. Yes. In the optical path between the intermediate imaging optical system GM and the second imaging optical system G2, a fourth deflection member M4, a fifth deflection member M5, and a sixth deflection member M6 are arranged in the light incident order. Yes. The deflecting members M1 to M6 are, for example, reflecting mirrors having a planar reflecting surface. Hereinafter, in order to facilitate understanding of the configuration of the projection optical system PL, the operation of the deflecting members M1 to M6 will be described by focusing on the light L1 emitted from the illumination region IR along the optical axis AXp.

  Referring to FIG. 2, the light L1 emitted from the illumination region IR along the optical axis AXp is reflected by the split reflector 10 through the positive lens group Lp, and is obliquely upper left in the plane of FIG. The first light L11 traveling in the direction) and the second light L12 traveling in the diagonally upper right direction (second direction). The first light L11 reflected by the split reflection unit 10 enters the deflection member M1 along the + Z direction after passing through the positive lens group Lp, and is deflected in the −Y direction by the deflection member M1.

  The first light L11 deflected in the −Y direction by the deflecting member M1 forms, as the first intermediate image I1, for example, an image that is approximately the same size as the mask pattern. As shown in FIG. 3, the first light traveling along the −Y direction from the first intermediate image I1 is deflected in the + X direction by the deflecting member M2, and deflected in the −Z direction by the deflecting member M3. The first imaging region ER1 on the plate P is reached via the one imaging optical system G1. An enlarged image of the mask pattern is formed as the first projection image in the first imaging region ER1 that is elongated in the Y direction. In FIG. 3, only the lens LP1 arranged closest to the mask side in the positive lens group Lp is shown.

  On the other hand, the second light L12 reflected by the split reflection unit 10 passes through the positive lens group Lp, enters the deflection member M4 along the + Z direction, and is deflected in the + Y direction by the deflection member M4. The second light L12 deflected in the + Y direction by the deflecting member M4 forms an image that is approximately the same size as the mask pattern, as the first intermediate image I1, as the second intermediate image I2. As shown in FIG. 3, the second light traveling from the second intermediate image I2 along the + Y direction is deflected in the −X direction by the deflecting member M5, deflected in the −Z direction by the deflecting member M6, and then the second light. The second imaging region ER2 on the plate P is reached via the two imaging optical system G2. An enlarged image of the mask pattern is formed as the second projection image in the second imaging region ER2 that is elongated in the Y direction.

  The first projection image and the second projection image have shapes obtained by enlarging the mask pattern at the projection magnification β of the projection optical system PL, and are rotated by −90 degrees around the Z axis as clearly shown in FIG. Formed with. That is, the first projection image and the second projection image have the same shape and the same size. A line pattern image along the X direction (Y direction) is formed on the plate P based on light from a line pattern provided along the Y direction (X direction) among the patterns on the mask M. .

  Here, as shown in FIG. 4, the position C1 of the light beam emitted from the illumination region IR along the optical axis AXp and deflected in the −Z direction by the third deflecting member M3 and the light of the first imaging optical system G1 The position C2 of the light beam that is aligned with the axis AX1 and is emitted from the illumination region IR along the optical axis AXp and deflected in the −Z direction by the sixth deflecting member M6 and the optical axis AX2 of the second imaging optical system G2 , The first imaging region ER1 and the second imaging region ER2 are formed so as to be displaced from each other along the X direction without being aligned in the Y direction.

  However, as shown in FIG. 5, the optical axis AX1 of the first imaging optical system G1 is set at a position separated by a predetermined distance D on the −X direction side from the position C1 of the light beam, and more than the position C2 of the light beam. The first imaging region ER1 and the second imaging region ER2 are aligned in the Y direction by setting the optical axis AX2 of the second imaging optical system G2 at a position separated by a predetermined distance D on the + X direction side. Can do. 4 and 5, the broken-line circle IF0 indicates the incident-side field of the projection optical system PL, the broken-line circles IF1 and IF2 indicate the incident-side field of the imaging optical systems G1 and G2, and the broken-line circles EF1 and EF2. Indicates the field of view on the exit side of the imaging optical systems G1 and G2.

  Hereinafter, in order to facilitate understanding of the explanation of the scanning exposure, in the present embodiment, the first imaging region ER1 and the second imaging region ER2 are formed in alignment in the Y direction according to the configuration shown in FIG. Shall be. The interval along the Y direction between the rectangular first imaging region ER1 and the rectangular second imaging region ER2 is the length of the long side of each imaging region ER1, ER2 (along the Y direction). Dimension).

  As shown in FIG. 6, the split reflection unit 10 includes a plurality of first reflection units 10 a and a plurality of second reflection units 10 b arranged at or near the focal position of the positive lens unit Lp. The first reflecting portion 10a and the second reflecting portion 10b are arranged along a concave curved surface (for example, a spherical surface) toward the positive lens group Lp, and are alternately provided along the Y direction. Alternatively, the first reflecting portion 10a and the second reflecting portion 10b are arranged along a plane parallel to the XY plane, and are alternately provided along the Y direction. The first reflecting portion 10a has, for example, a flat reflecting surface, and the normal extending outward from the reflecting surface is directed obliquely to the upper left in FIG. The second reflecting portion 10b has, for example, a flat reflecting surface, and the normal extending outward from the reflecting surface is directed obliquely to the upper right in FIG.

  Therefore, the light incident on the first reflecting portion 10a parallel to the optical axis of the positive lens unit Lp (and hence the optical axis of the intermediate imaging optical system GM) AXp is reflected toward the upper left obliquely in FIG. The The light reflected by the plurality of first reflecting portions 10a becomes the above-described first light, and forms the first intermediate image I1 through the positive lens group Lp and the first deflecting member M1. On the other hand, the light incident on the second reflecting portion 10b parallel to the optical axis AXp is reflected toward the upper right in FIG. 6 by the reflecting surface. The light reflected by the plurality of second reflecting portions 10b becomes the second light described above, and forms the second intermediate image I2 through the positive lens group Lp and the fourth deflecting member M4. That is, in the split reflection unit 10, the plurality of first reflection units 10a reflect the light incident from the positive lens unit Lp in the first direction (the upper left direction in FIG. 6) to generate the first light, The plurality of second reflecting portions 10b are reflected in the second direction (the oblique upper right direction in FIG. 6) to generate the second light.

  The plurality of reflecting portions 10a and 10b of the divided reflecting portion 10 are disposed at or near the focal position of the positive lens group Lp (that is, at or near the pupil position of the projection optical system PL), and thus in the illumination optical system IL. The fly-eye lens 21 is disposed at or near a position optically conjugate with the rear focal position of the fly-eye lens 21 (that is, the position of the illumination pupil of the illumination optical system IL). As shown in the upper diagram of FIG. 7, the fly-eye lens 21 is an optical element composed of a plurality of lens elements 21 a having positive refracting power that are arranged vertically and horizontally and densely, for example. Each lens element 21a has a rectangular cross-sectional shape that is also elongated in the X direction, corresponding to the rectangular illumination region IR that is elongated in the X direction. The rectangular incident surface of each lens element 21a constitutes a unit wavefront division surface of the fly-eye lens 21 as a wavefront division type optical integrator.

  A light beam incident on the fly-eye lens 21 is two-dimensionally divided by a plurality of lens elements 21a, and is 1 in each of the rear focal plane of each lens element 21a (and hence the rear focal plane of the fly-eye lens 21) or its vicinity. Two light sources 21b are formed. In the exposure apparatus of the present embodiment, a substantial surface light source composed of a plurality of light sources 21b formed on the rear focal plane of the fly-eye lens 21 or the illumination pupil in the vicinity thereof is used as a secondary light source, and the illumination optical system IL is covered. A mask M (and consequently a plate P arranged on the image plane of the projection optical system PL) arranged on the irradiation surface (object plane of the projection optical system PL) is Koehler illuminated.

  In this way, images of the plurality of light sources 21b are formed on the reflecting surfaces of the plurality of reflecting portions 10a and 10b of the divided reflecting portion 10 disposed at or near the focal position of the positive lens unit Lp. In order to increase the reflection efficiency in the reflection parts 10a and 10b of the divided reflection part 10, it is configured such that images of a plurality of light sources 21b arranged in a line in the X direction are formed on the reflection surfaces of the reflection parts 10a and 10b. It is desirable to do. In other words, the illumination optical system IL corresponds to the arrangement of the plurality of first reflection units 10a and the plurality of second reflection units 10b at the position of the illumination pupil that is optically conjugate with the position of the divided reflection unit 10. It is desirable to form a plurality of light sources 21b. In other words, it is desirable that the reflecting portions 10a and 10b have a reflecting region having a size including a conjugate image on the reflecting portions 10a and 10b of the light source 21b. The pupil position of the projection optical system PL described above corresponds to a position conjugate with the exit pupil (incidence pupil) of the projection optical system PL, and the position of the illumination pupil of the illumination optical system IL described above is the illumination optical system. This corresponds to a position conjugate with the exit pupil (incident pupil) of IL.

  Hereinafter, the scanning exposure operation for the shot region SR on the plate P (not shown in FIG. 9) will be described with reference to FIGS. 8 and 9, as an example of the scanning exposure operation, the pattern of the first pattern area PA1 on the mask M is scanned and exposed to the first partition area SR1 in the shot area SR on the plate P, and the second pattern area PA2 is exposed. The second pattern area SR2 and the fourth partition area SR4 are simultaneously scanned and exposed, the pattern of the second pattern area PA2 is simultaneously scanned and exposed to the third partition area SR3 and the fifth partition area SR5, and the third pattern area PA3 is exposed. In this example, the above pattern is subjected to scanning exposure on the sixth partition region SR6.

  Referring to FIG. 8, on the mask M, there are provided three rectangular pattern regions PA1 to PA3 that are elongated along the Y direction. In the first pattern area PA1 and the third pattern area PA3, for example, a pattern corresponding to the peripheral part (drive circuit or the like) of the liquid crystal display panel is formed. In the second pattern area PA2, for example, a pattern corresponding to the pixel of the liquid crystal display panel is formed.

  Referring to FIG. 9, the shot region SR on the plate P is virtually divided into six rectangular partition regions SR1 to SR6 that are elongated along the X direction. Here, the first partitioned region SR1 and the sixth partitioned region SR6 are exposure regions in which a pattern corresponding to the peripheral portion is to be formed. Further, the second partitioned area SR2 to the fifth partitioned area SR5 are exposure areas in which a repetitive pattern corresponding to the pixels of the display unit is to be formed.

  In the present embodiment, the illumination area IR is the first pattern area PA1 in a state where the + X direction side of the rectangular illumination area IR is substantially coincident with the + X direction side of the rectangular first pattern area PA1. The mask is so arranged that the first pattern area PA1 is scanned by the illumination area IR in accordance with the arrow F11 in FIG. 8 from the start position located at the end on the + Y direction side to the end position reaching the end on the −Y direction side. M (and thus the mask stage MS) is moved in the + Y direction at a required speed.

  In synchronization with the movement of the mask M in the + Y direction, the side on the + Y direction side of the rectangular first imaging region ER1 is substantially matched with the side on the + Y direction side of the rectangular first partition region SR1. From the starting position where the first imaging region ER1 is located at the end portion on the −X direction side of the first partition region SR1 to the end position where the first imaging region ER1 reaches the end portion on the + X direction side, the first section is formed according to the arrow F21 in FIG. The plate P (and thus the substrate stage PS) is moved at a required speed in the −X direction so that the region SR1 is scanned by the first imaging region ER1. At this time, for example, by inserting a second shutter (not shown) in the optical path in the vicinity of the formation position of the second intermediate image I2 to block the imaging light flux, the second imaging area ER2 (broken line in FIG. 9) Is not formed on the third partition region SR3. Thus, the pattern of the first pattern area PA1 is transferred to the first partition area SR1.

  Next, the mask M is moved stepwise in the −X direction so that the illumination area IR moves from the −Y direction end of the first pattern area PA1 to the −Y direction end of the second pattern area PA2. Further, the plate P is moved stepwise in the −Y direction so that the first imaging region ER1 moves from the + X direction end of the first partition region SR1 to the + X direction end of the second partition region SR2. . Further, by retracting the second shutter from the optical path, a rectangular second imaging region ER2 is formed at the end on the + X direction side of the fourth partition region SR4. Then, in a state where both sides on the X direction side of the illumination region IR are substantially coincided with both sides on the Y direction side of the second pattern region PA2, the + Y direction side from the starting position of the −Y direction side end of the second pattern region PA2 The mask M is moved at a required speed in the −Y direction so that the second pattern area PA2 is scanned by the illumination area IR according to the arrow F12 in FIG. 8 to the end position of the end.

  In synchronization with the movement of the mask M in the -Y direction, both sides on the Y direction side of the first imaging region ER1 are substantially coincided with both sides on the Y direction side of the second partition region SR2, and as a result, the second imaging region ER2 In a state where both sides on the Y direction side of each of the fourth partition regions SR4 substantially coincide with both sides on the Y direction side of the fourth partition region SR4, the start position of the end portion on the + X direction side of the partition regions SR2 and SR4 is the end position of the end portion on the −X direction side Until the second partition region SR2 is scanned by the first imaging region ER1 and the fourth partition region SR4 is scanned by the second imaging region ER2 according to the arrow F22 in FIG. Move towards the desired speed. Thus, the pattern of the second pattern area PA2 is simultaneously transferred to two partitioned areas spaced apart in the Y direction, that is, the second partitioned area SR2 and the fourth partitioned area SR4.

  Next, the first imaging region ER1 moves from the + X direction end of the second partition region SR2 to the + X direction end of the third partition region SR3, and the second imaging region ER2 moves to the fourth partition region SR4. The plate P is moved stepwise in the −Y direction so as to move from the + X direction end of the fifth partition region SR5 to the + X direction end. However, since the illumination area IR is located at the end on the + Y direction side of the second pattern area PA2 at the end of scanning to the second partition area SR2 and the fourth partition area SR4, it is necessary to move the mask M in steps. Absent. In this way, from the start position of the + Y direction side end of the second pattern area PA2 to the end position of the −Y direction side end of the second pattern area PA2 in the state at the end of scanning to the second partition area SR2 and the fourth partition area SR4, FIG. The mask M is moved at a required speed in the + Y direction so that the second pattern area PA2 is scanned by the illumination area IR according to the arrow F13 in the middle.

  In synchronization with the movement of the mask M in the + Y direction, both sides on the Y direction side of the first imaging region ER1 are substantially coincided with both sides on the Y direction side of the third partition region SR3, and consequently the second imaging region ER2 From the start position of the −X direction side end of the partition areas SR3 and SR5 to the end position of the + X direction side end of the partition areas SR3 and SR5, with both sides on the Y direction side substantially matching both sides on the Y direction side of the fifth partition area SR5 , The plate P is moved in the −X direction so that the third partition region SR3 is scanned by the first imaging region ER1 and the fifth partition region SR5 is scanned by the second imaging region ER2 according to the arrow F23 in FIG. Move towards the desired speed. Thus, the pattern of the second pattern area PA2 is simultaneously transferred to the third partitioned area SR3 and the fifth partitioned area SR5 spaced in the Y direction.

  Finally, the mask M is step-moved in the −X direction so that the illumination area IR moves from the −Y direction end of the second pattern area PA2 to the −Y direction end of the third pattern area PA3. . Further, the plate P is moved stepwise in the −Y direction so that the second imaging region ER2 moves from the + X direction end of the fifth partition region SR5 to the + X direction end of the sixth partition region SR6. . Further, at the end of the scanning exposure to the third partitioned region SR3 and the fifth partitioned region SR5, for example, a first shutter (not shown) is inserted in the optical path in the vicinity of the formation position of the first intermediate image I1 or in the vicinity thereof. By blocking the light beam, the first imaging region ER1 (shown by a broken line in FIG. 9) is not formed on the fourth partition region SR4.

  Then, in a state in which the −X direction side of the illumination area IR is substantially coincident with the −X direction side of the third pattern area PA3, + Y from the start position of the −Y direction end of the third pattern area PA3. The mask M is moved at a required speed in the −Y direction so that the third pattern area PA3 is scanned by the illumination area IR along the arrow F14 in FIG. 8 to the end position of the direction side end. In synchronization with the movement of the mask M in the −Y direction, the sixth imaging region SR6 is aligned with the −Y direction side of the second imaging region ER1 substantially in the −Y direction side of the sixth partition region SR6. The sixth partitioned region SR6 is scanned by the second imaging region ER2 in accordance with the arrow F24 in FIG. 9 from the start position at the + X direction side end of the partitioned region SR6 to the end position at the −X direction end. The plate P is moved in the + X direction at a required speed. Thus, the pattern of the third pattern area PA3 is transferred to the sixth partition area SR6, and the scanning exposure sequence for the shot area SR of the plate P is completed.

  In the projection optical system PL of the present embodiment, the intermediate imaging optical system GM, the group of deflecting members M1 to M3, and the first imaging optical system G1 transfer the first projection image of the pattern of the mask M on the plate P. A first imaging system formed in one imaging region ER1 is configured. The intermediate imaging optical system GM, the group of deflecting members M4 to M6, and the second imaging optical system G2 are spaced apart from the first imaging region ER1 in the Y direction on the plate P by the second projection image of the pattern of the mask M. The second image forming system formed in the second image forming region ER2 spaced apart from each other is configured.

  That is, the intermediate imaging optical system GM is common to the first imaging system (GM, M1 to M3, G1) and the second imaging system (GM, M4 to M6, G2). Then, the first imaging system (GM, M1 to M3, G1) is configured to plate the first imaging region ER1 optically conjugate with the illumination region IR formed in the pattern region of the mask M by the illumination optical system IL. Form on top. The second imaging system (GM, M4 to M6, G2) has a second imaging area ER2 optically conjugate with the illumination area IR on the plate P spaced from the first imaging area ER1 in the Y direction. Form.

  In other words, the projection optical system PL of the present embodiment receives light from the pattern surface (first surface) of the mask M and generates a first projection image of the pattern on the first photosensitive surface (second surface) on the plate P. A second projected image of the pattern is formed in the second imaging region ER2 spaced from the first imaging region ER along the photosensitive surface in the Y direction. In other words, the projection optical system PL of the present embodiment is a first imaging region ER1 that is optically conjugate with the illumination region IR formed on the pattern surface of the mask M by the light emitted from the illumination optical system IL. Is formed on the photosensitive surface on the plate P, and a second imaging region ER2 optically conjugate with the illumination region IR is formed on the photosensitive surface on the plate P with an interval in the Y direction from the first imaging region ER1. To do.

  Thus, in this embodiment, a pair of imaging regions aligned in the Y direction perpendicular to the X direction that is the scanning direction of the plate P, that is, parallel to the X direction that is the scanning direction of the plate P. A pair of imaging regions ER1 and ER2 are formed. As a result, in the exposure apparatus of the present embodiment, the pattern of one pattern region on the mask M can be simultaneously scanned and exposed to a pair of partition regions spaced apart in the Y direction in the shot region SR on the plate P. Throughput for scanning exposure can be improved.

  In the present embodiment, based on the above-described configuration of the projection optical system PL, the first projection image and the second projection image, which are enlarged images of the pattern of the mask M, are converted into the optical axes (AXp, AX1) of the projection optical system PL. , AX2) and a posture rotated by −90 degrees around the Z axis parallel to AX2). That is, the projection optical system PL plates the line pattern image along the X direction (Y direction) based on the light from the line pattern provided along the Y direction (X direction) among the patterns on the mask M. Form on P.

  As described above, the projection optical system PL displays the projection image of the pattern of the mask M on the plate P so that the X direction (Y direction) on the mask M and the Y direction (X direction) on the plate P optically correspond to each other. Form on top. In other words, the projection optical system PL makes the direction on the projection image optically corresponding to the X direction (Y direction) on the pattern area of the mask M coincide with the Y direction (X direction). Here, the “optically corresponding directions” are directions corresponding to each other in the relationship between the pattern on the pattern region and the projection image that is a conjugate image thereof. Therefore, the mask stage MS that holds the mask M and the substrate stage PS that holds the plate P are moved in a direction orthogonal to each other, and the pattern of the mask M is scanned and exposed (transferred) to the shot region SR on the plate P. become. In other words, the scanning direction of the mask M (and hence the mask stage MS) and the scanning direction of the plate P (and thus the substrate stage PS) are orthogonal to each other.

  In the present embodiment, scanning exposure is performed while moving the mask stage MS and the substrate stage PS in directions orthogonal to each other. Therefore, a moving direction that can occur during acceleration / deceleration of the substrate stage PS that moves while holding the enlarged plate P. Even if the vibration in the (scanning direction) increases, the vibration direction and the movement direction (scanning direction) of the mask stage MS intersect each other, so the vibration accompanying the movement (scanning) of the substrate stage PS and the mask stage MS. It is possible to improve the control accuracy of each stage by minimizing the mutual interference with the vibration accompanying the movement (scanning). As a result, in the exposure apparatus of this embodiment, the synchronization accuracy between the substrate stage PS and the mask stage MS during scanning exposure can be improved, and the pattern of the mask M can be accurately transferred to the plate P.

  In the above-described embodiment, the present invention is described based on the projection optical system PL having the specific configuration shown in FIGS. However, various configurations of the configuration of the projection optical system are possible. Specifically, in the above-described embodiment, the divided reflector 10 including the plurality of first reflectors 10a and the plurality of second reflectors 10b that are fixedly disposed at or near the focal position of the positive lens unit Lp. Used. However, the spatial light modulator 11 is not limited to this, and has a plurality of mirror elements 11a that are two-dimensionally arranged and individually changeable in posture as shown in FIG. Can be used.

  The spatial light modulator 11 is connected to a plurality of mirror elements 11a two-dimensionally arranged at or near the focal position of the positive lens group Lp, a base 11b that holds the plurality of mirror elements 11a, and a base 11b. And a drive unit 11c that individually drives the postures of the plurality of mirror elements 11a via cables (not shown). The drive unit 11c individually controls the postures of the plurality of mirror elements 11a in accordance with instructions from the main control system CR.

  The plurality of mirror elements 11a have, for example, a planar reflection surface, and are arranged along a plane parallel to the XY plane. Alternatively, the plurality of mirror elements 11a are arranged along a concave curved surface (for example, a spherical surface) toward the positive lens group Lp. In the modification of FIG. 10, the postures of the plurality of mirror elements 11a are illustrated in the scanning exposure on the second partition region SR2 and the fourth partition region SR4 and the scanning exposure on the third partition region SR3 and the fifth partition region SR5. 10 is set to the state shown in the partial detail view A in FIG.

  In the state shown in the partial detail view A, the mirror element 11aa whose posture is controlled so that the normal extending outward from the reflecting surface faces obliquely upper left in FIG. 10, and the normal extending outward from the reflecting surface is oblique upper right in FIG. The mirror elements 11ab whose postures are controlled so as to face are set so as to be alternately arranged along the Y direction. Therefore, the light incident on the mirror element 11aa as the first reflecting portion in parallel with the optical axis AXp of the positive lens unit Lp is reflected toward the upper left in FIG. 10 by the reflecting surface. The light reflected by the plurality of mirror elements 11aa becomes the first light, and forms the first intermediate image I1 through the positive lens group Lp and the first deflection member M1. On the other hand, the light that is incident on the mirror element 11ab serving as the second reflecting portion in parallel with the optical axis AXp is reflected diagonally to the upper right in FIG. The light reflected by the plurality of mirror elements 11ab becomes the second light, and forms the second intermediate image I2 through the positive lens group Lp and the fourth deflection member M4.

  Further, at the time of scanning exposure to the sixth partition region SR6, the postures of all the mirror elements 11a are set to the state shown in the partial detail view B in FIG. In the state shown in the partial detail view B, the postures of all the mirror elements 11a are uniformly set so that the normal extending outward from the reflecting surface is directed obliquely to the upper right in FIG. In this case, all the mirror elements 11a function as a second reflecting portion that reflects light incident parallel to the optical axis AXp of the positive lens group Lp toward the diagonal upper right in FIG. Accordingly, all the light reflected by the spatial light modulator 11 becomes the second light, and forms the second intermediate image I2 through the positive lens group Lp and the fourth deflection member M4. As a result, for example, it is not necessary to provide the first shutter in the optical path in the vicinity of the position where the first intermediate image I1 is formed or to block the imaging light flux.

  Although illustration is omitted, at the time of scanning exposure on the first partition region SR1, the postures of all the mirror elements 11a are uniformly controlled so that the normal extending outward from the reflecting surface faces obliquely upper left in FIG. In this case, all the mirror elements 11a function as a first reflecting portion that reflects light incident parallel to the optical axis AXp of the positive lens group Lp toward the upper left in FIG. Accordingly, all the light reflected by the spatial light modulator 11 becomes the first light, and forms the first intermediate image I1 through the positive lens group Lp and the first deflecting member M1. As a result, for example, it is not necessary to provide the second shutter in the optical path in the vicinity of the position where the second intermediate image I2 is formed or to block the imaging light flux.

  In the modification of FIG. 10, for example, the posture of each mirror element 11a is individually set according to the shape of the light intensity distribution (pupil intensity distribution) formed on the rear focal plane of the fly-eye lens 21 or the illumination pupil in the vicinity thereof. Thus, selection of the mirror element 11a to be used, selection of the orientation of reflected light from the mirror element 11a, distribution of the amount of reflected light from the mirror element 11a, and the like can be changed as appropriate. As a result, for example, the light intensity distribution at the pupil position of the projection optical system PL is adjusted, the formation positions of the imaging regions ER1, ER2 are finely adjusted, the light amount distribution in the imaging regions ER1, ER2 is adjusted, The aberration of the projection optical system PL can be corrected.

  Also in the modification of FIG. 10, in order to increase the reflection efficiency of the plurality of mirror elements 11a of the spatial light modulator 11, an image of one light source 21b is formed on the reflection surface of each mirror element 11a. It is desirable. As the spatial light modulator 11, for example, Japanese translations of PCT publication No. 10-503300 and corresponding European Patent Publication No. 779530, Japanese Patent Application Laid-Open No. 2004-78136, and US Pat. No. 6,900,915 corresponding thereto. The spatial light modulator disclosed in Japanese Laid-Open Patent Publication No. 2006-524349 and US Pat. No. 7,095,546 corresponding thereto and Japanese Patent Laid-Open No. 2006-113437 can be used.

  In addition, as shown in FIG. 11, a split reflection unit 12 including a polarization beam splitter 12 a and a pair of concave reflecting mirrors 12 b and 12 c can be used instead of the split reflection unit 10. The polarizing beam splitter 12a as a splitting unit splits the light L1 from the positive lens group Lp into S-polarized reflected light (first light) L11 and P-polarized transmitted light (second light) L12. The S-polarized light L11 reflected by the polarizing beam splitter 12a is reflected by the first concave reflecting mirror 12b disposed at or near the focal position of the positive lens group Lp, and enters the polarizing beam splitter 12a.

  The S-polarized light L11 incident on the polarization beam splitter 12a is reflected by the polarization beam splitter 12a, and then forms a first intermediate image I1 through the positive lens group Lp and the first deflection member M1. On the other hand, the P-polarized light L12 transmitted through the polarizing beam splitter 12a is reflected by the second concave reflecting mirror 12c disposed at or near the focal position of the positive lens group Lp, and enters the polarizing beam splitter 12a. The P-polarized light L12 incident on the polarizing beam splitter 12a passes through the polarizing beam splitter 12a, and then forms a second intermediate image I2 through the positive lens group Lp and the fourth deflecting member M4.

  Instead of the configuration of FIG. 11, the P-polarized light transmitted through the polarization beam splitter becomes the first light forming the first intermediate image I1, and the S-polarized light reflected by the polarization beam splitter is the second intermediate light. A configuration in which the second light forming the image I2 is also possible. In this case, the P-polarized light transmitted through the polarizing beam splitter is reflected by one concave reflecting mirror, and then forms a first intermediate image I1 through the polarizing beam splitter, the positive lens group Lp, and the first deflecting member M1. . The S-polarized light reflected by the polarizing beam splitter is reflected by the other concave reflecting mirror, and then forms a second intermediate image I2 through the polarizing beam splitter, the positive lens group Lp, and the fourth deflecting member M4.

  In addition, as shown in FIG. 12, a divided reflection unit 13 having a reflective diffraction grating can be used instead of the divided reflection unit 10. The split reflection section 13 has a diffractive optical surface 13a formed along, for example, a plane parallel to the XY plane (or along a concave curved surface (for example, a spherical surface) toward the positive lens group Lp). The diffractive optical surface 13a reflects the light Li incident along the optical axis AXp of the positive lens unit Lp, and the + 1st-order diffracted light L (+1) heading diagonally to the upper left in FIG. 12 and heading diagonally to the upper right in FIG. The first-order diffracted light L (−1) is dominantly generated, and the zero-order reflected light is not substantially generated.

  In the above-described embodiment, the first deflection member M1 is disposed in the optical path between the intermediate imaging optical system GM and the formation position of the first intermediate image I1, and the second deflection member M2 is the first intermediate image I1. The third deflection member M3 is disposed in the optical path between the second deflection member M2 and the first imaging optical system G1, and is disposed in the optical path between the formation position of the first imaging optical system G1. Yes. The fourth deflection member M4 is disposed in the optical path between the intermediate imaging optical system GM and the formation position of the second intermediate image I2, and the fifth deflection member M5 is disposed between the formation position of the second intermediate image I2 and the second formation position. The sixth deflection member M6 is disposed in the optical path between the imaging optical system G2 and the sixth deflection member M6 is disposed in the optical path between the fifth deflection member M5 and the second imaging optical system G2.

  The first deflecting member M1 deflects the first light from the positive lens group Lp in the Y direction, which is the scanning direction of the mask M, and the second deflecting member M2 redirects the light from the first deflecting member M1 to the plate P. The third deflection member M3 deflects the light from the second deflection member M2 in the Z direction parallel to the optical axis AXp of the intermediate imaging optical system GM. Similarly, the fourth deflecting member M4 deflects the second light from the positive lens unit Lp in the Y direction, and the fifth deflecting member M5 deflects the light from the fourth deflecting member M4 in the X direction, and the sixth deflecting. The member M6 deflects the light from the fifth deflecting member M5 in the Z direction.

  Further, the fourth deflecting member M4 deflects the light in the direction opposite to the light deflecting direction (−Y direction) by the first deflecting member M1 (+ Y direction), and the fifth deflecting member M5 transmits the light by the second deflecting member M2. The light from the fourth deflection member M4 is deflected in the direction opposite to the deflection direction (+ X direction) (−X direction), and the sixth deflection member M6 is the same as the direction of light deflection (−Z direction) by the third deflection member M3. The light from the fifth deflecting member M5 is deflected in the direction (−Z direction). However, the first group of deflection members disposed in the optical path between the intermediate imaging optical system GM and the first imaging optical system G1, and the intermediate imaging optical system GM and the second imaging optical system G2 Various configurations are possible for the configuration of the second group of deflecting members disposed in the optical path between them.

  For example, a first deflection member that deflects the first light from the positive lens unit Lp in the X direction that is the scanning direction of the plate P, and the light from the first deflection member in the Y direction that is the scanning direction of the mask M. The first deflecting member is constituted by the second deflecting member that deflects and the third deflecting member that deflects light from the second deflecting member in the Z direction parallel to the optical axis AXp of the intermediate imaging optical system GM. You can also Similarly, a fourth deflection member that deflects the second light from the positive lens unit Lp in the X direction, a fifth deflection member that deflects the light from the fourth deflection member in the Y direction, and the fifth deflection member. The second group of deflecting members can also be constituted by the sixth deflecting member that deflects the light from the Z direction.

  In this way, the first group deflecting member is configured to deflect the first light from the positive lens unit Lp in the order of the Y direction, the X direction, and the Z direction, or in the order of the X direction, the Y direction, and the Z direction. By configuring, a projected image of the pattern of the mask M is formed on the plate P so that the X direction (Y direction) on the mask M and the Y direction (X direction) on the plate P optically correspond to each other. Can do. Similarly, the second group deflecting member is configured to deflect the second light from the positive lens group Lp in the order of the Y direction, the X direction, and the Z direction, or in the order of the X direction, the Y direction, and the Z direction. By doing so, a projected image of the pattern of the mask M can be formed on the plate P so that the X direction (Y direction) on the mask M and the Y direction (X direction) on the plate P optically correspond to each other. it can.

  That is, the first group deflecting member is configured to sequentially deflect the first light from the positive lens group Lp in the X direction, the Y direction, and the Z direction, and the second light from the positive lens group Lp is converted to X. The second group of deflecting members can be configured to sequentially deflect in the direction, the Y direction, and the Z direction. Here, “sequentially deflect” means not only the above described order but also sequentially deflect in each direction. Specifically, the order of the deflection in the X direction and the deflection in the Y direction is determined. It means that it may be replaced. Therefore, the first group of deflecting members deflect in the order of the X direction (Y direction), the Y direction (X direction), and the Z direction, and the second group of deflecting members have the Y direction (X direction) and the X direction ( A configuration of deflecting in the order of (Y direction) and Z direction can also be mixed.

  Further, for example, a lens constituting a part of the intermediate imaging optical system GM is disposed in the optical path between the first deflection member M1 and the position where the first intermediate image I1 is formed, and the fourth deflection member M4 and the second A configuration is also possible in which a lens constituting a part of the intermediate imaging optical system GM is disposed in the optical path between the formation position of the intermediate image I2. In this configuration, a part of the intermediate imaging optical system GM, not the whole, is common to the first imaging system and the second imaging system.

  Further, in the above-described embodiment, as shown in FIG. 5, the projection optical system PL that forms the first imaging region ER1 and the second imaging region ER2 in alignment in the Y direction is used. The operation of simultaneously scanning and exposing a pattern of two pattern areas to a pair of partitioned areas spaced in the Y direction in the shot area SR on the plate P is described. However, even if a configuration in which the first imaging region ER1 and the second imaging region ER2 are formed to be displaced in the X direction as shown in FIG. The pattern of one pattern region on the mask M can be simultaneously scanned and exposed to a pair of partition regions spaced in the Y direction in the shot region SR on the plate P. This point will be briefly described with reference to FIG.

  In FIG. 13, the repetitive pattern of the pattern area PA on the mask M is simultaneously scanned and exposed to the first partition area SR1 and the third partition area SR3 in the shot area SR on the plate P, and the pattern of the pattern area PA is changed to the second section. An example is shown in which scanning exposure is performed simultaneously on the region SR2 and the fourth partition region SR4. In the modification of FIG. 13, the illumination region IR is at the end of the pattern region PA on the −Y direction side in a state where both sides on the X direction side of the illumination region IR are substantially matched with both sides on the X direction side of the pattern region PA. The mask M (and thus the mask stage MS) is −Y so that the pattern area PA is scanned by the illumination area IR in accordance with the arrow F11 in FIG. 13 from the start position to the end position that reaches the end on the + Y direction side. Move in the direction at the required speed.

  In synchronization with the movement of the mask M in the -Y direction, both sides on the Y direction side of the first imaging region ER1 are substantially coincided with both sides on the Y direction side of the first partition region SR1, and as a result, the second imaging region ER2 The second imaging region ER2 is located at the + X direction side end of the third partition region SR3 in a state where both sides on the Y direction side of the second region substantially coincide with both sides on the Y direction side of the third partition region SR3. From the first image formation region ER1 to the end position where the first image formation region ER1 reaches the end of the first division region SR1 on the −X direction side, the first image formation region SR1 is scanned by the first image formation region ER1 according to the arrow F21 in FIG. Further, the plate P (and thus the substrate stage PS) is moved at a required speed in the + X direction so that the third partition region SR3 is scanned by the second imaging region ER2. In this way, the pattern of the pattern area PA is simultaneously transferred to two partitioned areas spaced in the Y direction, that is, the first partitioned area SR1 and the third partitioned area SR3.

  Next, the plate P is stepped in the −Y direction so that the first imaging region ER1 moves from the −X direction end of the first partition region SR1 to the −X direction end of the second partition region SR2. Move. However, for example, in the case of a repetitive pattern corresponding to the pixels of the display unit, the illumination region IR is located at the end of the pattern region PA on the + Y direction side at the end of scanning of the first partition region SR1 and the third partition region SR3. Therefore, it is not necessary to move the mask M stepwise. In this way, from the start position of the + Y direction side end of the pattern area PA to the end position of the −Y direction side end of the pattern area PA in the state at the end of scanning to the first partition area SR1 and the third partition area SR3 in FIG. The mask M is moved at a required speed in the + Y direction so that the pattern area PA is scanned by the illumination area IR according to the arrow F12.

  In synchronization with the movement of the mask M in the + Y direction, both sides of the first imaging region ER1 on the Y direction side are substantially coincided with both sides of the second partition region SR2 on the Y direction side, and as a result, the second imaging region ER2 The starting position at which the first imaging region ER1 is located at the end of the second partition region SR2 on the −X direction side in a state where both sides on the Y direction side substantially coincide with both sides on the Y direction side of the fourth partition region SR4. From the first image forming region ER1 to the second image forming region ER1, the second image forming region ER2 is scanned by the first image forming region ER1 according to the arrow F22 in FIG. The plate P is moved at a required speed in the −X direction so that the fourth partition region SR4 is scanned by the second imaging region ER2. Thus, the pattern of the pattern area PA is simultaneously transferred to the second partitioned area SR2 and the fourth partitioned area SR4 spaced apart in the Y direction, and the scanning exposure sequence on the shot area SR of the plate P is completed.

  Further, in the above-described embodiment, the rectangular illumination region IR is formed on the mask M, and the rectangular imaging regions ER1 and ER2 are formed on the plate P, and the shot region SR on the plate P is formed. In the scanning exposure to a pair of adjacent divided areas, a pair of corresponding image forming areas are subjected to joint exposure without overlapping each other. However, the present invention is not limited to this. For example, a trapezoidal illumination region IR is formed on the mask M, and the trapezoidal imaging regions ER1 and ER2 are formed on the plate P. It is also possible to perform overlapping exposure in which the ends of a pair of corresponding imaging regions overlap each other during scanning exposure.

  In the above-described embodiment, the shape of the illumination region IR formed on the mask M is defined by the action of the mask blind 23 in the illumination optical system IL, and as a result, the imaging regions ER1, 1 formed on the plate P. It defines the shape of ER2. However, instead of the mask blind 23, for example, a first variable field stop (not shown) is disposed at or near the formation position of the first intermediate image I1, and the second variable is formed at or near the formation position of the second intermediate image I2. A configuration in which a field stop (not shown) is arranged is also possible.

  In this case, the shape of the mask side projection field of the projection optical system PL is defined by the first variable field stop and the second variable field stop, and this mask side projection field is an illumination formed on the mask M. It does not necessarily coincide with the region IR. For example, the illumination area IR is set to a shape that secures a required margin area and includes the mask side projection visual field. The first variable field stop defines the first imaging region ER1 that is the first projection field on the plate side of the projection optical system PL as a region optically conjugate with the mask-side projection field. Similarly, the second variable field stop defines the second imaging region ER2, which is the second projection field on the plate side of the projection optical system PL, as a region optically conjugate with the mask side projection field.

  In addition to the mask blind 23, for example, a first variable field stop is disposed at or near the formation position of the first intermediate image I1, and a second variable field stop is disposed at or near the formation position of the second intermediate image I2. It is also possible to configure. In the configuration in which the first variable field stop and the second variable field stop are arranged, the arrangement of the first shutter and the second shutter described above becomes unnecessary, and the opening / closing operation of the openings of the first variable field stop and the second variable field stop is performed. Can fulfill the shutter function.

  In the above-described embodiment, the direction on the projected image that optically corresponds to the second direction on the pattern area of the mask M is matched with the first direction orthogonal to the second direction. However, the present invention is not limited to this, and the direction on the projected image that optically corresponds to the second direction on the pattern area of the mask M is the first direction that intersects the second direction (perpendicular to the second direction). Even in the case of adopting a configuration that matches the first direction), the mutual interference between the vibration accompanying the movement (scanning) of the substrate stage PS and the vibration accompanying the movement (scanning) of the mask stage MS, as in the above-described embodiment. Can be obtained.

  In the present specification, the term “first direction” means that the second direction on the pattern region of the mask M and the first direction on the projection image optically corresponding to the second direction are “perpendicular”. The “second direction” is perpendicular to the photosensitive surface (exposed surface) of the substrate (plate P) in a plan view, and the “first direction” and the “second direction” are the substrates of the substrate stage PS. It means that they are orthogonal to each other in plan view parallel to the holding surface, and that both the “first direction” and the “second direction” are orthogonal to the optical axis (AXp, AX1, AX2) of the projection optical system PL. To do. Further, the expression “perpendicular” includes “substantially orthogonal”.

  In addition, since the above-described exposure apparatus can simultaneously scan and expose one pattern onto two partitioned areas, it is suitable for efficiently producing a display pattern for a small display panel or a medium display panel. Specifically, as shown in FIG. 14, the pattern Q of a plurality of pattern regions formed in a line on the mask M is spaced apart on the plate P by a single scanning operation along one direction. Transfer to a plurality of partitioned areas arranged in two rows is possible. In FIG. 14, reference symbol Q1 is a pattern transferred to the plate P by scanning exposure using the first imaging region ER1, and reference symbol Q2 is a pattern transferred to the plate P by scanning exposure using the second imaging region ER2. is there. FIG. 14 shows, as an example, how patterns are transferred to a plurality of partitioned areas arranged in four rows by two scanning operations.

  In the above-described exposure apparatus, as shown in FIG. 15, the Y-direction dimension LY of the imaging regions ER1 and ER2 is changed to LY ′ according to the device size, and the Y-direction of the imaging regions ER1 and ER2 The interval along the line may also be changed from LY (generally LY × n: n is an integer) to LY ′ (generally LY ′ × n: n is an integer). In this case, the first imaging optical system G1 and the pair of deflection members M2 and M3 are integrally moved along the Y direction, and the second imaging optical system G2 and the pair of deflection members M5 and M6 are moved in the Y direction. It is conceivable to move them together along the line. Further, instead of or in addition to the method of integrally moving the imaging optical system and the deflecting member, only the pair of deflecting members M2 and M3 are moved integrally along the Y direction and the pair of deflecting members M5 and M5 are moved. A method of moving only M6 along the Y direction can be considered.

  At this time, the image plane of the projection optical system PL moves in the Z direction by the integral movement of the imaging optical system and the deflection member or the integral movement of the deflection member, so that the position of the holding surface of the plate P is along the Z direction. Need to be moved. Alternatively, a focus correction mechanism is incorporated in the optical path of the projection optical system PL, and the action of this focus correction mechanism prevents the image plane position of the projection optical system PL from moving in the Z direction even if the above-described integral movement is performed ( (Alternatively, adjustment can be made so that the amount of movement of the image plane position becomes small). As this type of focus correction mechanism, for example, an image plane adjustment device 14 including a pair of wedge-shaped prisms arranged in an optical path near the mask M is known. As the image plane adjusting device 14, for example, an image plane adjusting device disclosed in Japanese Patent Laid-Open No. 2003-309053 can be used.

  In the above-described embodiment, the present invention is applied to an exposure apparatus equipped with a projection optical system PL having an enlargement magnification. However, the present invention is not limited to this, and the present invention can be similarly applied to, for example, an exposure apparatus provided with a projection optical system having the same magnification or a projection optical system having a reduction magnification. In the projection optical system PL having the magnification, it is preferable that the magnification is 2 times or more. That is, as described above, the intermediate imaging optical system GM forms the first intermediate image I1 and the second intermediate image I2 having substantially the same magnification, so that the magnification of the projection optical system PL is set to 2 times or more. Thus, the first imaging optical system G1 and the second imaging optical system G2 have an enlargement magnification of approximately 2 times or more, and the mechanical configuration of the projection optical system PL becomes easy.

  Note that the size of the imaging magnification of the intermediate imaging optical system GM from the pattern surface (first surface) of the mask M to the first intermediate image I1 is not limited to being approximately equal (approximately 1). The imaging magnification of the first imaging optical system G1 from the first intermediate image I1 to the photosensitive surface (second surface) on the plate P is preferably smaller. Similarly, the magnitude of the imaging magnification of the intermediate imaging optical system GM from the pattern surface of the mask M to the second intermediate image I2 is not limited to about 1 time, but the second intermediate image I2 to the plate P It is preferable that the image forming magnification of the second image forming optical system G2 on the upper photosensitive surface is smaller than that.

  In the above-described embodiment, the present invention is applied to an exposure apparatus that forms two projected images on one plate P held by the substrate stage PS. However, the present invention is not limited to this, and the substrate stage may hold two plates as photosensitive substrates and project one projected image on each substrate. At this time, a configuration in which the substrate stage includes one stage that holds and moves one substrate and another stage that moves while holding the other substrate is also possible.

  In the above-described embodiment, the direction of the pattern on the mask M and the direction of the projection image formed on the pair of imaging regions ER1 and ER2 on the plate P are orthogonal to each other. However, what is important in the present invention is to form a pair of imaging regions spaced apart in the direction intersecting the scanning direction of the substrate. The direction of the projected image may intersect at an angle other than 90 degrees, and the direction of the pattern may coincide with the direction of the projected image formed in the pair of imaging regions.

  In the above-described embodiment, a variable pattern forming apparatus that variably forms a predetermined pattern based on predetermined electronic data can be used instead of a normal fixed pattern mask (Cr pattern mask). By using such a variable pattern forming apparatus, the influence on the synchronization accuracy can be minimized even if the pattern surface is placed vertically. As the variable pattern forming apparatus, for example, a DMD (digital micromirror device) including a plurality of reflecting elements driven based on predetermined electronic data can be used. An exposure apparatus using DMD is disclosed in, for example, Japanese Patent Application Laid-Open No. 2004-304135 and International Patent Publication No. 2006/080285. In addition to a non-light-emitting reflective spatial light modulator such as DMD, a transmissive spatial light modulator may be used, or a self-luminous image display element may be used. For example, a transmissive spatial light modulator such as a liquid crystal display element, a spatial light modulator having a plurality of mirror elements that are two-dimensionally arranged and individually changeable in posture can be used.

  Generally, a variable pattern forming apparatus includes a plurality of pixel units that are two-dimensionally arranged and individually controllable on / off, and a pixel control unit that performs on / off control of the plurality of pixel units to form a pattern. And have. In scanning exposure, the pixel control unit performs on / off control in synchronization with the movement of the substrate stage in the scanning direction to change the pattern. Note that a pattern formed by the variable pattern forming apparatus can also be used fixedly during scanning exposure.

  The exposure apparatus of the above-described embodiment is manufactured by assembling various subsystems including the respective constituent elements recited in the claims of the present application so as to maintain predetermined mechanical accuracy, electrical accuracy, and optical accuracy. Is done. In order to ensure these various accuracies, before and after assembly, various optical systems are adjusted to achieve optical accuracy, various mechanical systems are adjusted to achieve mechanical accuracy, and various electrical systems are Adjustments are made to achieve electrical accuracy. The assembly process from the various subsystems to the exposure apparatus includes mechanical connection, electrical circuit wiring connection, pneumatic circuit piping connection and the like between the various subsystems. Needless to say, there is an assembly process for each subsystem before the assembly process from the various subsystems to the exposure apparatus. When the assembly process of the various subsystems to the exposure apparatus is completed, comprehensive adjustment is performed to ensure various accuracies as the entire exposure apparatus. The exposure apparatus is preferably manufactured in a clean room where the temperature, cleanliness, etc. are controlled.

  A semiconductor device, a liquid crystal device, and the like can be manufactured using the exposure apparatus according to the above-described embodiment. FIG. 16 is a flowchart showing a manufacturing process of a semiconductor device. As shown in FIG. 16, in the semiconductor device manufacturing process, a metal film is vapor-deposited on a wafer to be a semiconductor device substrate (step S40), and a photoresist, which is a photosensitive material, is applied onto the vapor-deposited metal film ( Step S42). Subsequently, using the exposure apparatus of the above-described embodiment, the pattern formed on the mask M is transferred to each shot area on the wafer (step S44: exposure process), and the development of the wafer after the transfer, that is, the pattern is transferred. The transferred photoresist is developed (step S46: development step).

  Thereafter, the resist pattern generated on the surface of the wafer in step S46 is used as a mask for wafer processing, and processing such as etching is performed on the surface of the wafer (step S48: processing step). Here, the resist pattern is a photoresist layer (transfer pattern layer) in which unevenness having a shape corresponding to the pattern transferred by the exposure apparatus of the above-described embodiment is generated, and the recess penetrates the photoresist layer. It is what you are doing. In step S48, the surface of the wafer is processed through this resist pattern. The processing performed in step S48 includes, for example, at least one of etching of the wafer surface or film formation of a metal film or the like. In step S44, the exposure apparatus according to the above-described embodiment performs pattern transfer using the photoresist-coated wafer as a photosensitive substrate.

  FIG. 17 is a flowchart showing a manufacturing process of a liquid crystal device such as a liquid crystal display element. As shown in FIG. 17, in the liquid crystal device manufacturing process, a pattern formation process (step S50), a color filter formation process (step S52), a cell assembly process (step S54), and a module assembly process (step S56) are sequentially performed. In the pattern forming step in step S50, predetermined patterns such as a circuit pattern and an electrode pattern are formed on the glass substrate coated with a photoresist as the photosensitive substrate, using the exposure apparatus of the above-described embodiment. The pattern forming process includes an exposure process in which a pattern is transferred to a photoresist layer using the exposure apparatus of the above-described embodiment, and development of a photosensitive substrate to which the pattern is transferred, that is, development of a photoresist layer on a glass substrate. And a development step for generating a photoresist layer (transfer pattern layer) having a shape corresponding to the pattern, and a processing step for processing the surface of the glass substrate through the developed photoresist layer.

  In the color filter forming process in step S52, a large number of sets of three dots corresponding to R (Red), G (Green), and B (Blue) are arranged in a matrix or three R, G, and B A color filter is formed by arranging a plurality of stripe filter sets in the horizontal scanning direction. In the cell assembly process in step S54, a liquid crystal panel (liquid crystal cell) is assembled using the glass substrate on which the predetermined pattern is formed in step S50 and the color filter formed in step S52. Specifically, for example, a liquid crystal panel is formed by injecting liquid crystal between a glass substrate and a color filter. In the module assembling process in step S56, various components such as an electric circuit and a backlight for performing the display operation of the liquid crystal panel are attached to the liquid crystal panel assembled in step S54.

  The present invention is not limited to application to an exposure apparatus for manufacturing a semiconductor device or a liquid crystal device. For example, an exposure apparatus for a display device such as a plasma display, an image sensor (CCD or the like), a micromachine, The present invention can be widely applied to an exposure apparatus for manufacturing various devices such as a thin film magnetic head and a DNA chip. In addition, the present invention is not limited to a glass substrate and a semiconductor wafer. For example, a flexible sheet-like substrate (a substrate having a smaller thickness ratio than the glass substrate and the semiconductor wafer) is subject to exposure. It can be set as a photosensitive substrate. Furthermore, the present invention can also be applied to an exposure process (exposure apparatus) when manufacturing a mask (photomask, reticle, etc.) on which mask patterns of various devices are formed using a photolithography process.

10, 11, 12, 13 Split reflector 21 Fly eye lens 23 Mask blind LS Light source IL Illumination optical system IR Illumination area ER1, ER2 Imaging area M Mask MS Mask stage PL Projection optical system GM, G1, G2 Imaging optical system P plate PS Substrate stage DR Stage drive system CR Main control system

Claims (35)

A first imaging system that receives light from the first surface and forms a first projection image of the first surface in a first imaging region of the second surface;
A part of the first imaging system is shared, light from the first surface is received, and a second projected image of the first surface is at least predetermined from the first imaging region along the second surface. A projection optical system comprising: a second imaging system formed in a second imaging region spaced in the direction. A first imaging system for forming on the second surface a first imaging region optically conjugate with an illumination region on the first surface by light irradiated on the first surface;
A second imaging region that shares a part with the first imaging system and is optically conjugate with the illumination region is formed on the second surface at least in a predetermined direction from the first imaging region. A projection optical system comprising: a second imaging system. The projection optical system according to claim 1, wherein the first imaging region and the second imaging region are provided so as to be aligned in the predetermined direction. The direction on the first surface optically corresponding to the predetermined direction on the second surface and the predetermined direction are orthogonal to each other. Projection optics. Line pattern images formed in the first imaging region and the second imaging region based on the light from the line pattern provided on the first surface along the predetermined direction are orthogonal to the predetermined direction. The projection optical system according to claim 1, wherein the projection optical system is a projection optical system. An intermediate imaging optical system, at least a part of which is provided in common with respect to the first imaging region and the second imaging region, and forms a first intermediate image and a second intermediate image of the first surface;
A first imaging optical system that receives the light from the first intermediate image and forms the first projection image;
The projection optical system according to claim 1, further comprising: a second imaging optical system that receives the light from the second intermediate image and forms the second projection image. An intermediate imaging optical system that is at least partially provided in common to the first imaging region and the second imaging region to form a first intermediate image and a second intermediate image of the illumination region;
A first imaging optical system that optically conjugates the first intermediate image and the first imaging region;
The projection optical system according to claim 2, further comprising: a second imaging optical system that optically conjugates the second intermediate image and the second imaging region. The magnitude of the imaging magnification of the intermediate imaging optical system from the first surface to the first intermediate image is determined by the imaging of the first imaging optical system from the first intermediate image to the second surface. 8. The projection optical system according to claim 6, wherein the projection optical system is smaller than the magnification. The magnitude of the imaging magnification of the intermediate imaging optical system from the first surface to the second intermediate image is determined by the image formation of the second imaging optical system from the second intermediate image to the second surface. The projection optical system according to claim 6, wherein the projection optical system is smaller than the magnification. The intermediate imaging optical system includes a positive lens group on which the light from the first surface is incident and a first lens that advances the light from the positive lens group in different directions across the optical axis of the positive lens group. And a split reflection section that splits the first light and the second light toward the positive lens group. The projection optical system according to any one of the above. The divisional reflector is disposed at or near the focal position of the positive lens group, and reflects the light incident from the positive lens group in a first direction to generate the first light. 11. The projection optical system according to claim 10, further comprising: a reflecting portion and a plurality of second reflecting portions that generate the second light by reflecting in a second direction. The projection optical system according to claim 11, wherein the first reflection unit and the second reflection unit are alternately provided along the predetermined direction. The projection according to claim 11 or 12, wherein the plurality of first reflection units and the plurality of second reflection units have a plurality of mirror elements that are two-dimensionally arranged and individually changeable in posture. Optical system. The projection according to any one of claims 11 to 13, wherein the plurality of first reflection portions and the plurality of second reflection portions are arranged in a concave shape toward the positive lens group. Optical system. The split reflector is disposed at a focal point of the positive lens group or in the vicinity thereof, a split unit that splits the light from the positive lens group into the first light and the second light, and the split The projection optical system according to claim 10, further comprising: a reflection unit that reflects the light from the unit and re-enters the positive lens group through the division unit. The dividing unit has a polarization beam splitter,
The reflection unit reflects the first light generated through the polarization beam splitter toward the polarization beam splitter and the first member generated by reflecting the polarization beam splitter. The projection optical system according to claim 15, further comprising: a second reflecting member that reflects the second light toward the polarizing beam splitter. A first group of deflecting members for sequentially deflecting the first light in the predetermined direction, a crossing direction intersecting the predetermined direction, and a direction parallel to the optical axis of the intermediate imaging optical system;
11. A second group of deflecting members that sequentially deflect the second light in the predetermined direction, the intersecting direction, and a direction parallel to the optical axis of the intermediate imaging optical system. The projection optical system according to any one of -16. A first group of deflecting members disposed in an optical path between the intermediate imaging optical system and the first imaging optical system;
The deflection member of the 2nd group arrange | positioned in the optical path between the said intermediate | middle imaging optical system and the said 2nd imaging optical system, It has any one of Claims 10-16 characterized by the above-mentioned. The projection optical system described. The first group of deflecting members includes a first deflecting member that deflects the first light in the predetermined direction, and a second deflecting member that deflects the first light from the first deflecting member in the intersecting direction. And a third deflecting member for deflecting the first light from the second deflecting member in a direction parallel to the optical axis of the intermediate imaging optical system. The projection optical system described. The first group of deflection members includes a first deflection member that deflects the first light in the intersecting direction, and a second deflection member that deflects the first light from the first deflection member in the predetermined direction. And a third deflecting member for deflecting the first light from the second deflecting member in a direction parallel to the optical axis of the intermediate imaging optical system. The projection optical system described. The second group of deflection members includes a fourth deflection member that deflects the second light in the predetermined direction, and a fifth deflection member that deflects the second light from the fourth deflection member in the intersecting direction. And a sixth deflecting member for deflecting the second light from the fifth deflecting member in a direction parallel to the optical axis of the intermediate imaging optical system. The projection optical system according to any one of the above. The second group of deflection members includes a fourth deflection member that deflects the second light in the intersecting direction, and a fifth deflection member that deflects the second light from the fourth deflection member in the predetermined direction. And a sixth deflecting member for deflecting the second light from the fifth deflecting member in a direction parallel to the optical axis of the intermediate imaging optical system. The projection optical system according to any one of the above. The second group of deflection members includes a fourth deflection member that deflects the second light in a direction opposite to a deflection direction of the first light by the first deflection member, and the first deflection member by the second deflection member. A fifth deflecting member for deflecting the second light from the fourth deflecting member in a direction opposite to the deflecting direction of the light, and the same direction as the deflecting direction of the first light by the third deflecting member. The projection optical system according to claim 19, further comprising: a sixth deflecting member that deflects the second light from the five deflecting members. The first deflection member is disposed in an optical path between the intermediate imaging optical system and the formation position of the first intermediate image, and the second deflection member is disposed between the formation position of the first intermediate image and the first intermediate image. The third deflection member is disposed in an optical path between the second imaging member and the first imaging optical system, and the third deflection member is disposed in an optical path between the second deflection member and the first imaging optical system. The projection optical system according to claim 19 or 20. The fourth deflection member is disposed in an optical path between the intermediate imaging optical system and the formation position of the second intermediate image, and the fifth deflection member is disposed between the formation position of the second intermediate image and the second intermediate image. The sixth deflection member is disposed in an optical path between the second imaging optical system and the sixth deflection member is disposed in an optical path between the fifth imaging member and the second imaging optical system. The projection optical system according to any one of claims 21 to 23. Light from the first surface is received to form a first projection image of the first surface in the first imaging region of the second surface, and the second projection image of the first surface is converted to the first imaging region. A projection method comprising: forming in a second imaging region spaced from each other at least in a predetermined direction along the second surface. A first imaging region optically conjugate with the illumination region on the first surface is formed on the second surface by the light irradiated on the first surface, and a second imaging optically conjugate with the illumination region is formed. A projection method comprising forming an area on the second surface at least in a predetermined direction from the first imaging area. 28. The projection method according to claim 26, wherein the first imaging region and the second imaging region are provided in alignment with the predetermined direction. 29. The projection method according to claim 26, wherein a direction on the first surface optically corresponding to the predetermined direction on the second surface is orthogonal to the predetermined direction. The line pattern image along a direction orthogonal to the predetermined direction is formed on the second surface based on the light from the line pattern provided on the first surface along the predetermined direction. Item 29. The projection method according to any one of Items 26 to 28. The projection optical system according to any one of claims 1 to 25;
A first stage mechanism that holds a photosensitive substrate, places a photosensitive surface of the substrate on the second surface, and moves in a crossing direction intersecting the predetermined direction;
An exposure apparatus comprising: a second stage mechanism that holds an object having a pattern and places a pattern surface of the object on the first surface. 32. The exposure apparatus according to claim 31, wherein the second stage mechanism moves in the predetermined direction in synchronization with the movement of the first stage mechanism in the intersecting direction. The object includes a plurality of pixel units that are two-dimensionally arranged and individually controllable on / off, and a pixel control unit that performs the on / off control of the plurality of pixel units to form the pattern. 32. The exposure apparatus according to claim 31, further comprising: an exposure apparatus. 34. The exposure apparatus according to claim 33, wherein the pixel control unit changes the pattern by performing the on / off control in synchronization with the movement of the first stage mechanism in the intersecting direction. A step of transferring the pattern to the substrate using the exposure apparatus according to any one of claims 31 to 34;
Developing the substrate to which the pattern is transferred, and forming a transfer pattern layer having a shape corresponding to the pattern;
Processing the substrate via the transfer pattern layer;
A device manufacturing method comprising:

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