JP2009095725A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2009095725A5 JP2009095725A5 JP2007268141A JP2007268141A JP2009095725A5 JP 2009095725 A5 JP2009095725 A5 JP 2009095725A5 JP 2007268141 A JP2007268141 A JP 2007268141A JP 2007268141 A JP2007268141 A JP 2007268141A JP 2009095725 A5 JP2009095725 A5 JP 2009095725A5
- Authority
- JP
- Japan
- Prior art keywords
- droplet
- nozzle
- ejection
- droplets
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 16
- 238000007689 inspection Methods 0.000 claims 10
- 238000003384 imaging method Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 7
- 238000000034 method Methods 0.000 claims 3
- 238000000059 patterning Methods 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
Claims (14)
前記ステージと並設され、前記ステージとは独立して主走査方向に移動する検査ユニットを設け、
前記検査ユニットを前記液滴吐出ヘッドの直下を通過させながら、前記液滴吐出ヘッドの各ノズルから液滴を吐出して、前記検査ユニットに配置した被吐出媒体に前記各ノズルからの液滴を着弾させ、
前記被吐出媒体に着弾した前記各ノズルの液滴を撮像装置にて撮像し、
前記撮像装置が撮像した前記各ノズルの液滴の画像データに基づいて、前記各ノズルの液滴の着弾径を測定し、
測定した各ノズルの液滴の着弾径に基づいて、前記各ノズルの液滴の吐出重量を求め、
その求めた各ノズルの液滴の吐出重量に基づいて、前記各ノズルの液滴の吐出重量が予め定めた値になるように、前記各ノズルの駆動素子の駆動力をそれぞれ調整して、その調整した駆動力で前記各ノズルの駆動素子を駆動させることを特徴とする液滴吐出量調整方法。 While moving the substrate placed on the stage in the main scanning direction, ejecting the functional liquid from the nozzles of the droplet discharge head and a droplet, patterning for forming a pattern based on a predetermined drawing data on the substrate in the droplet discharge amount adjusting process of equipment,
Wherein the stage and parallel, provided the test unit to move independently in the main scanning direction and the stage,
While passing the inspection unit directly under the liquid droplet ejection head, the liquid droplets are ejected from the nozzles of the liquid droplet ejection head, and the liquid droplets from the nozzles are applied to the ejection target medium disposed in the inspection unit. Landed,
The droplets of the nozzles that have landed on the ejection medium are imaged with an imaging device,
Based on the image data of the droplets of each nozzle imaged by the imaging device, the landing diameter of the droplets of each nozzle is measured,
Based on the measured impact diameter of each nozzle droplet, the discharge weight of each nozzle droplet is determined,
Based on the determined droplet discharge weight of each nozzle, the driving force of the drive element of each nozzle is adjusted so that the droplet discharge weight of each nozzle becomes a predetermined value. droplet discharge amount adjusting how to characterized by driving the driving elements of the respective nozzles in adjusted driving force.
前記画像データに基づいて測定した液滴の着弾径から求めた吐出重量が予め定めた範囲外にあるときに、前記駆動素子の駆動力を調整することを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to claim 1,
When located outside the range of discharge weight obtained from landing diameter of the droplets was measured based on the image data is determined in advance, the droplet discharge amount adjusting how to and adjusting the driving force of the drive element .
前記各ノズルは、前記検査ユニットに配置した被吐出媒体に、一滴の液滴を吐出することを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to claim 1 or 2,
Wherein each nozzle, the ejection receiving medium disposed in the inspection unit, the droplet ejection rate adjustment method you characterized by ejecting a drop of liquid droplets.
前記各ノズルは、前記検査ユニットに配置した被吐出媒体に、複数の液滴を吐出することを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to claim 1 or 2,
Wherein each nozzle, the ejection receiving medium disposed in the inspection unit, the droplet ejection rate adjustment method you characterized by discharging a plurality of droplets.
前記液滴吐出ヘッドの各ノズルから吐出された液滴の吐出重量をノズル毎に求め、その求めた吐出重量に基づいて同液滴吐出ヘッドのノズル毎に、駆動素子の駆動力をそれぞれ調整したことを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to claim 3 or 4,
The ejection weight of the droplets ejected from each nozzle of the droplet ejection head was obtained for each nozzle, and the driving force of the driving element was adjusted for each nozzle of the same droplet ejection head based on the obtained ejection weight. droplet discharge amount adjusting how to characterized in that.
前記各液滴吐出ヘッドの全ノズルから吐出された液滴の吐出重量の平均値を液滴吐出ヘッド毎に求め、その求めた吐出重量の平均値に基づいて、前記液滴吐出ヘッド毎に各ノズルの駆動素子の駆動力を調整したことを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to claim 3 or 4,
An average value of the discharge weight of the droplets discharged from all nozzles of each droplet discharge head is obtained for each droplet discharge head, and each of the droplet discharge heads is determined based on the obtained average value of the discharge weight. droplet discharge amount adjusting how to characterized in that to adjust the driving force of the driving element of the nozzle.
前記画像データに基づいて、前記液滴吐出ヘッドの各ノズルの吐出不良検査を行うことを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to any one of claims 1 to 6,
The image data on the basis of droplet discharge amount adjusting how to and performing ejection failure inspection of the nozzles of the droplet discharge head.
前記吐出不良検査に基づいて、前記液滴吐出ヘッドのメンテナンスを行うことを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to claim 7,
On the basis of the ejection failure inspection, the droplet discharge amount adjusting how to and performing maintenance of the liquid drop ejecting head.
前記吐出不良検査に基づいて、前記描画データをデータ補正することを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to claim 7,
Based on the ejection failure inspection, the droplet discharge amount adjusting how to characterized in that said drawing data is data correction.
前記駆動素子の駆動力は、前記基板に前記パターンを形成する直前に調整されることを特徴とする液滴吐出量調整方法。 In the droplet discharge amount adjustment method according to any one of claims 1 to 9,
Driving force of the driving element, the droplet discharge amount adjusting how to characterized in that it is adjusted immediately prior to forming the pattern on the substrate.
前記被吐出媒体は、フィルムコーティングされた紙であることを特徴とする液滴吐出量調整方法。 The droplet ejection rate adjustment method according to any one of claims 1 to 10,
The ejection receiving medium is film-coated droplet discharge amount adjusting how to being a paper.
前記被吐出媒体は、粘着材が塗布されていることを特徴とする液滴吐出量調整方法。 To any one of claims 1 to 11 in the droplet discharge amount adjustment method described in paragraph (1)
The ejection receiving medium shall be the wherein the adhesive is applied droplet discharge amount adjusting process.
前記ステージと並設され、前記ステージとは独立して主走査方向に移動する検査ユニットを設け、
前記検査ユニットを前記液滴吐出ヘッドの直下を通過させながら、前記液滴吐出ヘッドの各ノズルから液滴を吐出して、前記検査ユニットに配置した被吐出媒体に前記各ノズルからの液滴を着弾させ、
前記被吐出媒体に着弾した前記各ノズルの液滴を撮像装置にて撮像し、
前記撮像装置が撮像した前記各ノズルの液滴の画像データに基づいて、前記各ノズルの液滴の着弾径を測定し、
測定した各ノズルの液滴の着弾径に基づいて、前記各ノズルの液滴の吐出重量を求め、
求めた各ノズルの液滴の吐出重量から、前記各ノズルの液滴の吐出重量の変化傾向を重量傾向検出手段にて検出し、
前記変化傾向に基づいて、前記各ノズルの液滴の吐出重量が予め定めた閾値を超えたとき、前記検査ユニットに設けた重量測定ユニットの受液容器を前記液滴吐出ヘッドの直下に配置して、同液滴吐出ヘッドの各ノズルから前記受液容器に液滴を吐出して吐出重量を
測定し、
前記重量測定ユニットで測定した吐出重量に基づいて、駆動素子の駆動力をそれぞれ調整して、その調整した駆動力で前記各ノズルの駆動素子を駆動させることを特徴とする液滴吐出量調整方法。 While moving the substrate placed on the stage in the main scanning direction, ejecting the functional liquid from the nozzles of the droplet discharge head and a droplet, patterning for forming a pattern based on a predetermined drawing data on the substrate in the droplet discharge amount adjusting process of equipment,
Wherein the stage and parallel, provided the test unit to move independently in the main scanning direction and the stage,
While passing the inspection unit directly under the liquid droplet ejection head, the liquid droplets are ejected from the nozzles of the liquid droplet ejection head, and the liquid droplets from the nozzles are applied to the ejection target medium disposed in the inspection unit. Landed,
The droplets of the nozzles that have landed on the ejection medium are imaged with an imaging device,
Based on the image data of the droplets of each nozzle imaged by the imaging device, the landing diameter of the droplets of each nozzle is measured,
Based on the measured impact diameter of each nozzle droplet, the discharge weight of each nozzle droplet is determined,
From the obtained droplet discharge weight of each nozzle, the change tendency of the droplet discharge weight of each nozzle is detected by the weight trend detecting means,
Based on the change tendency, when the discharge weight of the droplets of each nozzle exceeds a predetermined threshold value, a liquid receiving container of a weight measurement unit provided in the inspection unit is disposed immediately below the droplet discharge head. Te measures the ejection exit weight by ejecting droplets to the liquid receiving containers from the respective nozzles of the droplet discharge head,
On the basis of the ejection exit weight was measured by weight measuring unit, to adjust the driving force of the driving element, respectively, the droplet discharge you characterized by driving the driving elements of the respective nozzles at the adjusted driving force Quantity adjustment method.
液滴吐出ヘッドと、
前記液滴吐出ヘッドの各駆動素子を駆動制御してノズルから液滴を吐出し、パターンを描画させる制御手段と、を備え、
前記ステージを主走査方向に移動させながら、前記基板に、描画データに基づいて予め定められたパターンを描画するパターン形成装置において、
前記ステージと並設され、前記ステージに対して独立して前記主走査方向に移動する被吐出媒体と、
前記被吐出媒体に吐出された液滴を撮像する撮像装置と、
前記撮像装置によって撮像された画像を画像処理して、前記液滴の吐出重量を算出する重量算出手段と、
前記重量算出手段の算出した液滴の吐出重量に基づいて、前記各ノズルから吐出される液滴の吐出重量を、予め定めた値になるように、前記各駆動素子の駆動力を算出し、該算出した駆動力を前記制御手段に出力する駆動力算出手段と、
を備えたことを特徴とするパターン形成装置。 While reciprocating in the main scanning direction, a stage for placing a substrate ;
And the liquid droplet ejection head,
Ejecting droplets from a nozzle by driving controls each driving element of the liquid drop ejecting head, and a control means for drawing a pattern,
While moving the stage in the main scanning direction, on the substrate, in a pattern forming apparatus for drawing a predetermined pattern on the basis of the drawing image data,
A discharge medium that is arranged in parallel with the stage and moves in the main scanning direction independently of the stage ;
An imaging device for imaging the droplets ejected before Symbol ejection receiving medium,
A weight calculating unit that performs image processing on an image captured by the imaging device and calculates a discharge weight of the droplet;
Based on the discharge weight of the droplets calculated by the weight calculation means, the driving force of each driving element is calculated so that the discharge weight of the droplets discharged from each nozzle becomes a predetermined value, Driving force calculating means for outputting the calculated driving force to the control means;
A pattern forming apparatus comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007268141A JP5131450B2 (en) | 2007-10-15 | 2007-10-15 | Droplet discharge amount adjusting method and pattern forming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007268141A JP5131450B2 (en) | 2007-10-15 | 2007-10-15 | Droplet discharge amount adjusting method and pattern forming apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009095725A JP2009095725A (en) | 2009-05-07 |
| JP2009095725A5 true JP2009095725A5 (en) | 2010-11-11 |
| JP5131450B2 JP5131450B2 (en) | 2013-01-30 |
Family
ID=40699242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007268141A Active JP5131450B2 (en) | 2007-10-15 | 2007-10-15 | Droplet discharge amount adjusting method and pattern forming apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5131450B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI511794B (en) | 2011-08-05 | 2015-12-11 | Sumitomo Heavy Industries | A film pattern forming apparatus, a film pattern forming method, and a device adjusting method |
| JP6338507B2 (en) * | 2014-10-16 | 2018-06-06 | 東京エレクトロン株式会社 | Droplet ejection apparatus, droplet ejection method, program, and computer storage medium |
| KR102514229B1 (en) | 2016-03-04 | 2023-03-24 | 도쿄엘렉트론가부시키가이샤 | Droplet inspection apparatus, droplet inspection method, and computer storage medium |
| JP6876470B2 (en) * | 2017-03-07 | 2021-05-26 | 東京エレクトロン株式会社 | Work processing equipment, work processing methods, programs and computer storage media |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005119139A (en) * | 2003-10-16 | 2005-05-12 | Seiko Epson Corp | Method and device for measuring discharge amount of functional liquid droplet jet head, method of controlling driving of functional liquid droplet jet head, liquid droplet jet device, method of manufacturing electrooptical device, electrooptical device, and electronic device |
| JP2005238787A (en) * | 2004-02-27 | 2005-09-08 | Ricoh Printing Systems Ltd | Ink ejection amount measuring method, and ink ejection amount control method and ink-jet device using the same |
| JP2007075767A (en) * | 2005-09-15 | 2007-03-29 | Sharp Corp | Delivery weight measuring method, delivery weight measuring device, color filter manufacturing method and color filter manufacturing equipment |
| JP2007130536A (en) * | 2005-11-09 | 2007-05-31 | Seiko Epson Corp | Method, tool and apparatus for measuring amount of liquid droplet to be discharged, method for adjusting amount of liquid droplet to be discharged, plotting apparatus, device, electro-optical device and electronic equipment |
| JP2007152340A (en) * | 2005-11-11 | 2007-06-21 | Seiko Epson Corp | Ejection amount measurement method, pattern formation method, device, electro-optical device and electronic equipment |
-
2007
- 2007-10-15 JP JP2007268141A patent/JP5131450B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4331760B2 (en) | Droplet discharge head inspection device and droplet discharge device | |
| JP2012126030A5 (en) | Inkjet recording device | |
| JP2009542318A5 (en) | ||
| WO2006137971A3 (en) | Drop analysis system | |
| JP2013075490A5 (en) | ||
| WO2006022217A1 (en) | Ink jet printer discharge amount control method, ink droplet spread check method, and orientation film formation method | |
| JP2009528927A5 (en) | ||
| JP2007030508A (en) | Improved control method of inkjet printer, and inkjet printer | |
| US20150191021A1 (en) | Liquid discharge apparatus and liquid supply path state detection method | |
| JP2009095725A5 (en) | ||
| EP3378563A3 (en) | Droplet dispensing apparatus | |
| EP2502749A3 (en) | Fluid droplet ejection device and ejection inspection method | |
| JP2009095740A5 (en) | ||
| JPWO2010044429A1 (en) | Droplet application method and apparatus | |
| JP2012501883A5 (en) | ||
| JP2012206093A (en) | Coating method and coating apparatus | |
| JP7068395B2 (en) | Tablet printing equipment | |
| JP2015196381A5 (en) | ||
| JP2009268995A (en) | Method for managing ink jet head and ink jet device using the same | |
| JP6516503B2 (en) | Ink jet recording device | |
| JP2007030507A (en) | Method for deciding liquid droplet size of ink liquid droplet emitted by inkjet printer | |
| JP2013078853A5 (en) | ||
| KR102276026B1 (en) | Ink droplet inspecting apparatus and method, inkjet print system having the same | |
| JP7404984B2 (en) | Inkjet recording device and nozzle surface abnormality detection method | |
| JP2009255093A5 (en) |