JP2008299180A - Method of manufacturing self-forming optical waveguide, and optical device equipped with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of easily manufacturing a self-forming optical waveguide with higher optical coupling efficiency at a low cost by improving the tolerance of positional deviation of optical wiring which requires strict positioning of an optical device such as a PD, and to provide an optical device provided with such the self-forming optical waveguide. <P>SOLUTION: The method of manufacturing the self-forming optical waveguide 3, by which the optical waveguide being an optical coupling means is formed by hardening a part where light 5 is made to pass by irradiating a photocurable resin 40 with the light 5, is characterized in that the self-forming optical waveguide 3 being the optical coupling means and having a substantially tapered form is formed by irradiating the photocurable resin 40 with the light 5 deflected with a lens 35, and the optical device has such the self-forming optical waveguide 3. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method of manufacturing a self-forming optical waveguide and an optical device including the same, and more specifically, optically connects to an optical device such as a VCSEL (Vertical Cavity Surface Emitting Laser) or a PD (Photo Diode). The present invention relates to a method for manufacturing a self-forming optical waveguide, which is an optical connecting means, and an optical device including the same.

  With the rapid development of information and communication technology, communication traffic exchanged over a network is constantly increasing. Along with this, the degree of integration of semiconductor elements mounted on information processing apparatuses such as computers has been dramatically increased. For this reason, the number of wirings in the electronic circuit board that constitutes the information processing apparatus, on which these semiconductor elements are mounted, also increases in proportion to the increase in the degree of integration of the semiconductor. However, in conventional electrical wiring, bottlenecks such as crosstalk and radiation are highlighted as the wiring density increases.

  As means for solving such problems in electrical wiring, there is introduction of optical wiring technology using optical signals. Optical signals have very little mutual interference, and even when the wiring density is increased, there is little noise due to interference between the wirings, so that they are suitable for high-quality and large-capacity information transmission. The wiring in the substrate includes a light source (light emitting element) such as a VCSEL mounted on the substrate, a photodetector (light receiving element) such as a PD, and an optical waveguide serving as a light transmission means. The optical signal emitted from the light source is transmitted through the optical waveguide and reaches the photodetector.

  However, there are many differences between electrical wiring and optical wiring. For example, in the operation of connecting the element and the wiring, if the wiring is an electrical wiring, the connection can be completed easily by using solder or the like. However, in the optical wiring, the connection between the optical element and the optical waveguide or between the optical waveguides Requires very precise alignment (alignment), and its connection is difficult. Therefore, how to perform optical coupling between the optical element and the optical waveguide or between the optical waveguides is an important issue.

  As a technique for solving the above-described alignment problem, there is a connection method using a self-forming optical waveguide technique. As shown in FIG. 1, the self-forming optical waveguide is an end of one side of an optical fiber 100 having a cladding layer 101 around the core layer 103 and is near the end on the side where the self-forming optical waveguide is to be formed. The photo-curable resin 110 is disposed on the substrate (FIG. 1A). Then, light is incident from the opposite end of the optical fiber 100, and the incident light is irradiated so as to pass through the photocurable resin 110 and reach the opening 141 of the VCSEL 140 disposed on the substrate 200. As a result, the refractive index of the portion irradiated with light increases and cures (FIG. 1B). Then, the self-forming optical waveguide 120 can be formed at the end of the optical fiber 100 by removing the uncured photocurable resin (for example, Japanese Patent Application Laid-Open Nos. 2003-131063 and 2003-131164). ). If the self-forming optical waveguide is formed by the light propagating through the existing optical waveguide in this way, the connection between the existing optical waveguide or optical element and the self-forming optical waveguide becomes easy.

  On the other hand, there is a photomask transfer method as one of other self-forming optical waveguide manufacturing methods. A photomask is a film that shields light such as chromium and has several openings for transmitting light, and can be said to be a “type” in the formation of a self-forming optical waveguide. As shown in FIG. 2, the procedure for forming a self-formed optical waveguide by the photomask transfer method first fills the lower portion of the photomask 130 with a curable resin 110 (FIG. 2A). Then, by irradiating light (ultraviolet light) from above the photomask 130, the light passes through a plurality of openings 131 provided in the photomask 130 and is applied to the curable resin 110. The irradiated light is transmitted through the curable resin 110 and is cured at the same time as the refractive index of the curable resin 110 in the transmitted portion is increased (FIG. 2B). Then, the self-forming optical waveguide 120 can be formed by removing the photomask 130 and removing the uncured curable resin 110 (for example, JP-A-2006-078606).

  By using the photomask transfer method, a self-forming optical waveguide of a plurality of channels can be formed by batch transfer in one process, and the height (length) of the self-forming optical waveguide can be formed by using an arbitrary spacer. ) Can be adjusted. Further, by changing the shape of the opening, self-shaped optical waveguides having various shapes can be formed. Therefore, the photomask transfer method can easily cope with the multilayered optical wiring.

  FIG. 3 shows an example in which the self-formed optical waveguide 120 is formed on the opening 141 of the VCSEL 140 that is actually an optical device by using a photomask transfer method. When an optical device is mounted on an opto-electric hybrid board, the opto-electric hybrid board is inevitably a gap between the surface mounted optical device and the optical waveguide provided inside the opto-electric hybrid board. Will occur. For this reason, the light emitted from the VCSEL 140, which is a light emitting element (optical device) as it is, spreads radially, so that the light is largely lost in the gap. In this regard, by forming a self-forming optical waveguide on the optical device, the light emission spread can be suppressed, and the gap between the optical device and the optical wiring can be eliminated, enabling highly efficient optical coupling. To do.

JP 2003-131063 A JP 2003-131064 A JP 2006-078606 A

  However, in a PD (Photo Diode) that is a light receiving element, the light receiving area decreases as the response speed increases. It is said that when the response speed is 10 Gbit class, the light receiving diameter is 20 μm. It is expected that signal processing in the device will be further accelerated. Therefore, on the receiving side of the optical wiring, it is necessary to form a self-forming optical waveguide having a light collecting function with respect to the light receiving surface.

  As described above, in order to connect the optical wiring and the optical device by the self-formed waveguide, strict alignment is required. Therefore, for the spread, it is necessary to increase the positional deviation tolerance in the alignment and to reduce the manufacturing cost of the optical wiring.

  Therefore, the present invention has been made paying attention to such problems on the receiving side, and the purpose thereof is higher optical coupling efficiency in the connection between the optical device on the receiving side and the optical wiring. The purpose is to establish a simple and inexpensive manufacturing method for self-forming optical waveguides.

Specifically, the above two problems can be solved by making the self-formed optical waveguide into a tapered shape represented by a cone or a truncated cone shape whose diameter is reduced toward the light receiving element. In a manufacturing method using an optical fiber or photomask transfer method, light emitted from the optical fiber and the photomask opening is spread radially due to a diffraction phenomenon, so that the diameter of the self-formed optical waveguide is narrowed toward the light receiving element. It was difficult to form.
Accordingly, an object of the present invention is to provide a method of manufacturing a self-forming optical waveguide having a tapered shape whose diameter is gradually reduced toward the PD by using a lens, and an optical device including the same.
The present invention also provides a method of manufacturing a self-formed optical waveguide having a tapered shape in which the diameter is gradually reduced toward various optical devices as well as PD by using such a lens, and light provided with the same. The purpose is to provide a device.

In order to solve the above-mentioned problem, the present invention according to claim 1, the light transmitting portion is cured by irradiating the photocurable resin with light, thereby forming an optical waveguide as an optical connecting means. In the method for manufacturing a self-forming optical waveguide, a light-refracting resin is irradiated with light refracted by a lens to form a self-forming waveguide that is a substantially tapered optical connection means.
When the light refracted by the lens is irradiated onto the photocurable resin, the portion where the refracted light is transmitted is cured into a tapered shape. Thereby, a tapered self-forming optical waveguide can be formed.

  In order to solve the above-mentioned problem, the present invention according to claim 2 includes a step of disposing a lens on an upper side of an optical device mounted on a substrate and performing optical connection, A process of filling a photo-curing resin that is cured by irradiation, and irradiating light from above the lens to refract the light passing through the lens and irradiate the photo-curing resin, thereby light between the optical device A step of forming a self-forming waveguide, which is an optical connection means obtained by curing a curable resin in a substantially tapered shape, and a step of removing the uncured photocurable resin and further removing the lens. A method of manufacturing a self-forming optical waveguide is provided.

  For example, a convex lens is arranged in parallel on an optical device such as a light receiving element mounted on a substrate, and a photocurable resin is filled between the optical device and the lens. Then, by irradiating light from the upper side of the lens, an optical wiring by a self-forming optical waveguide is formed between the lens and the optical device. Then, by removing the photo-curing resin in the uncured portion and removing the lens, a tapered self-forming optical waveguide whose diameter is gradually narrowed from the lens toward the optical device side can be formed. As a result, the alignment accuracy during mounting is improved, and the optical coupling efficiency is increased by the light condensing effect of the tapered self-forming optical waveguide. If the tolerance width of the optical connection to the light receiving surface and the light emitting surface of the optical device is allowed to be wide, a self-formed optical waveguide whose diameter gradually decreases toward the optical device side is formed. Although it is preferable to use it, it is possible to form a tapered self-forming optical waveguide by a concave lens.

In order to solve the above-mentioned problem, the present invention according to claim 3 is the method of manufacturing a self-forming optical waveguide according to claim 1 or 2, wherein the lens arranging step is a plate-like shape having one or more lenses. In this lens plate, the portion other than the lens is formed by arranging a masked lens plate so that the irradiated light is not transmitted.
The lens is placed on a lens plate that is masked by metal vapor deposition except for the lens portion. If the lens plate is placed on the optical device and light is irradiated from the upper side, the light incident from the upper part of the lens passes only through the lens part, and the other light is blocked by the mask. Thereby, the shape of the self-forming optical waveguide becomes a tapered shape in which the diameter is gradually reduced toward the optical device side. Further, by arranging a plurality of lenses at regular intervals, a multi-channel shape self-forming optical waveguide can be collectively formed for an optical device arranged in multi-channel.

In order to solve the above problems, the present invention according to claim 4 is the method of manufacturing a self-forming optical waveguide according to claim 2 or 3, wherein at least the lens aperture, the focal length, or the distance from the lens to the substrate is set as the lens. The shape of the self-forming optical waveguide to be formed is controlled by changing the length within a range shorter than the focal length.
The shape of the self-forming optical waveguide formed can be changed by changing the aperture and focal length of the lens. Also, if the distance between the lens and the substrate is longer than the focal length of the lens, the converged light diffuses again, and the self-forming optical waveguide that is formed becomes a virtue shape, reducing the light collection effect. There is a fear. Therefore, the distance between the lens and the substrate is at least within a range shorter than the focal length of the lens, and the shape of the self-formed optical waveguide can be changed by adjusting the distance within the range. In this case, the taper shape of the self-forming optical waveguide can be controlled by arranging the spacer between the lens and the substrate and appropriately changing the height of the spacer.

In order to solve the above-mentioned problem, the present invention according to claim 5 is characterized in that, in the method of manufacturing a self-forming optical waveguide according to any one of claims 1 to 4, the lens is a microlens. To do.
In a conventional method of manufacturing a self-forming optical waveguide by a photomask transfer method, a self-forming optical waveguide having a tapered shape whose diameter is gradually reduced toward an optical device having a light receiving surface due to the diffraction phenomenon of the mask opening. Although it cannot be formed, a self-forming optical waveguide having a tapered shape whose diameter is gradually reduced toward a small optical device can be formed by using a microlens. In addition, in the conventional photomask transfer method, the optical path of light that has passed through the mask opening is not controlled, so the shape of the self-formed optical waveguide formed varies depending on the irradiation time and irradiation intensity of ultraviolet light. However, by using a microlens, it is possible to form a self-formed optical waveguide having a tapered shape in accordance with the characteristics of the lens without depending on the irradiation time or irradiation intensity.

  In order to solve the above-mentioned problem, the present invention according to claim 6 is the method for producing a self-forming optical waveguide according to any one of claims 1 to 5, wherein the photocurable resin has a wavelength of 200. It is an ultraviolet light curable resin that is cured by ultraviolet light irradiation of ˜400 nm or a dye mixed resin that is cured by green laser irradiation at a wavelength of 532 nm, and the irradiated light is best absorbed by the ultraviolet light curable resin or the dye mixed resin. It is characterized by being light of a wavelength.

  In order to solve the above-mentioned problems, the present invention described in claim 7 provides an optical device including a self-forming optical waveguide manufactured by the method for manufacturing a self-forming optical waveguide according to claims 1 to 6.

According to the manufacturing method of the self-forming optical waveguide and the optical device including the same according to the present invention, since the tapered self-forming optical waveguide can be formed, the diameter is gradually reduced toward the optical device such as a PD. It is possible to provide a self-forming optical waveguide with a tapered shape, which makes it possible to collect the optical signal emitted from the optical wiring toward the optical device, and to obtain high optical coupling efficiency There is. In addition, there is an effect that the tolerance of misalignment between the optical wiring and the self-formed optical waveguide during mounting is increased, and the alignment accuracy is improved.
In addition, by using a microlens in the manufacture of a self-forming optical waveguide, a tapered self-forming optical waveguide optical path that matches the characteristics of the lens can be formed, so it is stable without depending on the intensity or time of ultraviolet light. There is an effect that a self-forming optical waveguide having the shape described above can be formed.
Furthermore, since the shape of the self-forming optical waveguide can be controlled by using lenses having different apertures and focal lengths, there is an effect that it is possible to easily cope with a change in the substrate thickness of the optical wiring, multilayering, and high density.

  A manufacturing method of a self-forming optical waveguide according to the present invention and an optical device including the same will be described below in detail with reference to the drawings. FIG. 4 is a flowchart in a preferred embodiment of a method for manufacturing a self-forming optical waveguide according to the present invention, and FIGS. 5 to 9 are schematic explanatory diagrams in each step.

  First, as shown in FIG. 5, a lens plate 30 having a microlens 35 that is a convex lens is mounted on a substrate 10 on which a PD20 that is an optical device is mounted, and the microlens 35 is a light receiving surface 21 of the PD20. The spacer 15 is placed between the substrate 10 and the microlens 35 (step S1). The lens plate 30 is a member on a flat plate provided with one or a plurality of microlenses 35. As shown in FIGS. 10 and 11, the portion where the microlens 35 is disposed has an opening 31. All portions other than the portion 31 are formed with a mask 33 by metal vapor deposition to prevent light transmission. Therefore, the light passes only through the microlens 35 and is irradiated to the photocurable resin 40 described later. The lens plate 30 shown in the figure has a total of 28 microlenses 35 arranged in 7 rows vertically and 4 rows horizontally. However, the microplates 35 are appropriately provided according to the number and arrangement positions of the PDs 20 arranged on the substrate 10. Can do. When such a lens plate 30 is arranged on the PD 20 and light is irradiated from the upper side, the irradiated light passes only through the microlens 35 and the other light is blocked by the mask 33. Thereby, the shape of the self-forming optical waveguide 3 becomes a tapered shape in which the diameter is gradually reduced toward the PD 20 side.

  By changing the aperture and focal length of the micro lens 35, the shape of the self-forming optical waveguide 3 to be formed can be changed as appropriate. That is, the distance from the PD 20 can be increased by using the microlens 35 having a long focal length, and the self-forming optical waveguide 3 having a large diameter can be formed by using the microlens 35 having a large aperture. The shape of the self-forming optical waveguide 3 can also be changed by appropriately adjusting the distance between the microlens 35 and the substrate 10 within the range of at least a length shorter than the focal length of the microlens 35. For example, if the height of the spacer 15 is adjusted so that the distance between the microlens 35 and the substrate 10 is made shorter, the top of the cone is cut in the bottom direction by the distance between the microlens 35 and the substrate 10 and is self-formed in the shape of a truncated cone. The optical waveguide 3 can be formed. If the distance between the microlens 35 and the substrate 10 is made longer than the focal length of the microlens 35, the converged light is diffused again, and the self-formed optical waveguide to be formed becomes a virtue shape. For example, when a microlens having a focal length of 100 μm is used, it is preferable to use a spacer having a thickness of 100 μm or less.

  Here, in order to arrange the microlens 35 so as to be positioned directly above the light receiving surface of the PD 20, for example, the light receiving surface of the PD 20 is confirmed using a magnifying glass (not shown) such as a microscope and the position is displayed. It can be performed by a positioning device that marks a display (not shown), then attaches the lens plate 30 to a moving device (not shown), and moves the microlens 35 part to the mark position while finely moving the lens plate 30. As described above, by using the lens plate 30, the self-forming optical waveguide 3 having a tapered shape can be easily formed at an arbitrary place.

  Next, as shown in FIG. 6, a photocurable resin 40 that is cured by light irradiation is filled between the substrate 10 and the lens plate 30 (step S2). As an example of the photocurable resin, there is an ultraviolet light curable resin that is cured by irradiation with ultraviolet light, and specifically, there is an acrylic resin such as DVD003 of Nippon Kayaku Co., Ltd. (Chiyoda-ku, Tokyo). Of course, the present invention is not limited to this, and in addition, a photo-curable resin may be mixed with a dye that absorbs light of a specific wavelength, and cured by irradiating light with a wavelength that the dye absorbs most. Some pigment-mixed resins are available. For example, there is an ultraviolet light curable resin that is cured by irradiation with ultraviolet light having a wavelength of 200 to 400 nm, or a dye-mixed resin that is cured by irradiation with a green laser having a wavelength of 532 nm. Irradiate light with a wavelength that is best absorbed by the photo-curing resin or dye-mixed resin.

  Next, as shown in FIG. 7, for example, ultraviolet light 5 is irradiated from above the microlens 35. When the ultraviolet light 5 is irradiated, the ultraviolet light 5 passes through only the microlens 35 of the lens plate 30 and is refracted, and the refracted ultraviolet light 5 passes through the photocurable resin 40 located directly below the microlens 35 and passes through the PD 20. Reach the light receiving surface. As a result, the portion through which the ultraviolet light 5 is transmitted is cured to form a tapered self-forming optical waveguide 3 (step 3). Since the ultraviolet light 5 incident on the microlens 35 is collected, the shape of the self-forming optical waveguide 3 becomes a tapered shape that gradually becomes thinner toward the substrate 10.

  When a collimating lens is used, the light irradiation point is preferably about 1 cm away from the microlens 35 from the viewpoint of manufacturing accuracy. The irradiation intensity of the ultraviolet light 5 depends on the properties of the photocurable resin 40 to be used, but when the above-mentioned DVD003 is irradiated with ultraviolet light having an intensity of about 250 mW / cm 2 for about 2.2 seconds, a lens is obtained. A self-forming optical waveguide having a side diameter of about 84 μm, a substrate side diameter of about 64 μm, and a length of about 112 μm could be formed.

Next, as shown in FIG. 8, the lens plate 30 is removed, and the uncured photocurable resin 40 is removed. Removal of the uncured photocurable resin 40 can be easily performed, for example, by rinsing with ethanol.
As a result, the self-forming optical waveguide 3 having a tapered shape can be formed immediately above the PD 20 that is an optical device. In addition, the microlens 35 can be easily peeled off by applying a release material in advance to the surface of the microlens 35 that contacts the photocurable resin 40.

  Further, as shown in FIG. 9, the tapered self-forming optical waveguide 3 formed using the lens plate 30 has a convex surface portion of the microlens 35 located on the photocurable resin 40 side. The shape is a depressed shape along the surface of the microlens 35. When an optical signal is incident on the self-forming optical waveguide 3 from the optical wiring, there is a concern that this portion forms the effect of a concave lens and the light is diffused, but there is a matching oil between the self-forming optical waveguide 3 and the optical wiring. Etc. can be applied to eliminate the difference in refractive index in the dent and suppress the diffusion of light. The recessed portion serves as a space for storing resin or the like. For example, by applying a transparent adhesive to the recessed portion, it can be mechanically connected, and an improvement in the mechanical strength of the joint portion can be expected. In addition, if a lens plate 30 as shown in FIG. A flat lens plate 30 'as shown in FIG. 12 can also be used. The flat lens plate 30 ′ is formed by, for example, depositing a metal mask for preventing ion diffusion on a flat glass substrate, opening a small window by photolithography on the mask, and ion-exchanging the masked glass substrate. It is immersed in the molten salt so that a refractive index profile can be formed in the vicinity of the opening window. As a result, the diffused ions form a high refractive index and a partial bulge, and a lens effect can be obtained. Even if this flat lens plate 30 ′ is used, the depression of the self-forming optical waveguide 3 can be prevented from being formed.

FIG. 13 shows a mounting model of the PD 20 provided with such a self-forming optical waveguide which is an optical connecting means manufactured by the manufacturing process.
The PD 20 is mounted on the opto-electric hybrid board 50 on which the electric wiring layer 51 and the optical wiring layer 52 are mixed. The opto-electric hybrid board 50 is formed by laminating an optical wiring layer 52 of the optical waveguide 28 on the lower side of the electric wiring layer 51. The electric wiring layer 51 of the opto-electric hybrid board 50 is formed on the through hole 51a into which the self-formed optical waveguide 3 ′ formed on the VCSEL 25 which is an optical device is inserted, and on the light receiving surface side of the PD 20 which is the optical device. The self-forming optical waveguide 3 is provided with a through hole 51b. A 45-degree mirror surface 27 is provided directly below the through holes 51a and 51b. Then, surface mounting is performed by inserting the self-forming optical waveguide 3 formed on the light receiving surface side of the PD 20 into the through hole 51b. Reference numeral 26 denotes an LSI mounted on the electric wiring layer 51.

  In the opto-electric hybrid board 50 described above, the light emitted from the VICSEL 25 is incident on the self-formed optical waveguide 3 ′ formed on the VICSEL opening, is transmitted to the optical wiring layer 52, and is provided in the optical wiring layer 52. The optical path is changed by 90 degrees by the degree mirror 27 and propagates in the optical waveguide 28 in the optical wiring layer 52. Then, the light propagating in the optical waveguide 28 is converted into an optical path by 90 degrees again by the 45-degree mirror 27 installed at the lower part of the PD 20 and is incident on the self-formed optical waveguide 3 formed on the opening of the PD 20. Guided to the light receiving surface.

  In order to demonstrate the effectiveness of the proposed method for manufacturing a self-forming optical waveguide, an optical device with a self-forming optical waveguide manufactured by the method of the present invention and an optical fiber as an optical wiring are modeled and optical coupling is performed by a ray tracing method. Tolerance analysis was performed. FIG. 14 shows the analysis model. The self-formed optical waveguide 3 was analyzed in two types: a tapered shape (a) whose diameter is reduced toward the light receiving surface and a self-formed optical waveguide 3 'having a linear shape (b). The size of the self-forming optical waveguide 3 which is a model of (a) is 100 μm on the optical fiber 60 side and 50 μm on the PD 20 side, and the size of the self-forming optical waveguide 3 ′ which is the model of (b) is shown in FIG. The diameter on the optical fiber 60 side is 50 μm, and the diameter on the PD 20 side is 50 μm. The height was set to 100 μm for both models (a) and (b). The refractive index was set to 1.458 for the clad of the optical fiber 60, 1.459 for the core, and 1.53 for the self-forming optical waveguides 3, 3 '. In the analysis method, the position of the optical fiber 60 was changed every 5 μm in the Y-axis direction, and the change in the optical coupling efficiency was analyzed.

  FIG. 15 shows the result of optical coupling tolerance analysis. The horizontal axis represents the optical fiber displacement, and the vertical axis represents the optical coupling efficiency. The upper circled plot is the analysis result of the model of FIG. 14A, and the lower rhombus plot is the analysis result of the model of FIG. 14B. As is apparent from the graph, the tapered self-forming optical waveguide 3 whose diameter is reduced toward the light receiving surface of the PD 20 has a much wider tolerance width than the linear self-forming optical waveguide 3 ′. I can confirm. Therefore, it can be said that the self-formed optical waveguide 3 manufactured by the method of the present invention has remarkably high alignment accuracy during mounting.

  As described above, according to the method of manufacturing a self-forming optical waveguide and the optical device including the same according to the present invention, the self-forming optical waveguide has a tapered shape whose diameter is gradually reduced toward the optical device. Therefore, the incident light is condensed and high optical coupling efficiency can be obtained. In addition, although mounting of the optical device on the opto-electric hybrid board requires precise alignment, according to the manufacturing method of the self-forming optical waveguide and the optical device including the same according to the present invention, the self-forming optical waveguide is The tapered shape can increase the diameter on the incident side, and there is an advantage that a large loss does not occur even if a slight positional deviation occurs.

  As described above, as a preferred embodiment of the present invention, the tapered self-forming optical waveguide 3 is formed toward the light receiving surface of the PD. However, the present invention is not limited to the above-described embodiment, and the PD is not limited to the PD. Of course, it can be used for connection to various optical devices such as optical connectors, and various modifications and changes are possible within the scope of the gist of the present invention described in the claims. Nor.

(a), (b) is explanatory drawing which shows manufacture of a self-forming optical waveguide. (a), (b) is explanatory drawing which shows manufacture of the self-forming optical waveguide by the photomask transfer method. It is a schematic sectional drawing which shows the self-forming optical waveguide formed on VCSEL. It is a flowchart in one preferable embodiment of the manufacturing method of the self-forming optical waveguide which concerns on this invention based on this invention. It is side surface sectional drawing which shows the state which has arrange | positioned the micro lens plate just above the light-receiving surface of PD. It is side surface sectional drawing which shows the state filled with photocurable resin. It is side surface sectional drawing which shows the state in which a self-forming optical waveguide is formed. It is side surface sectional drawing which shows the state which peeled the micro lens. It is side surface sectional drawing which shows the state which removed the uncured photocurable medium. It is a top view of a micro lens plate. It is a side view of the micro lens plate of FIG. It is a partial cross section perspective view of a flat micro lens. It is side surface sectional drawing which shows the state which mounted the optical device provided with the self-forming optical waveguide 3 formed by the manufacturing method of the self-forming optical waveguide which concerns on this invention on the opto-electric hybrid board | substrate. (a), (b) is a model figure in the optical coupling tolerance analysis by the ray tracing method. It is a figure which shows the analysis result in an optical coupling tolerance analysis.

Explanation of symbols

3 Self-forming optical waveguide 5 Ultraviolet light 10 Substrate 15 Spacer 20 PD
21 Photosensitive surface 30 Lens plate 31 Opening 33 Mask 35 Micro lens 40 Photocurable resin

Claims (7)

In the manufacturing method of the self-forming optical waveguide, the light transmitting resin is cured by irradiating the photocurable resin with the light transmitting portion, thereby forming the optical waveguide as the optical connecting means.
A method of manufacturing a self-forming optical waveguide, comprising forming a self-forming waveguide, which is a substantially tapered optical connecting means, by irradiating the light curable resin with light refracted by a lens. Placing the lens on the upper side of the optical device mounted on the substrate to be optically connected;
Filling a photocurable resin that is cured by light irradiation between the substrate and the lens;
By irradiating light from above the lens, the light passing through the lens is refracted to irradiate the photocurable resin, thereby curing the photocurable resin between the optical device in a substantially tapered shape. Forming a self-formed waveguide which is a connected optical connection means; and
Removing the uncured photocurable resin and further removing the lens;
The manufacturing method of the self-forming optical waveguide comprised by providing. In the manufacturing method of the self-forming optical waveguide according to claim 1 or 2,
The lens arranging step is performed by arranging a lens plate that is a plate-like lens plate having one or a plurality of lenses, and is masked so that the light other than the lens is not transmitted. A method of manufacturing a self-forming optical waveguide provided with an optical connecting means. In the manufacturing method of the self-forming optical waveguide according to claim 2 or 3,
Controlling the shape of the self-forming optical waveguide to be formed by changing the aperture, focal length of the lens or the distance from the lens to the substrate within a range of a length shorter than the focal length of the lens, respectively. A method of manufacturing a self-forming optical waveguide, characterized by: In the manufacturing method of the self-forming optical waveguide according to any one of claims 1 to 4,
The method of manufacturing a self-forming optical waveguide, wherein the lens is a microlens. In the manufacturing method of the self-forming optical waveguide according to any one of claims 1 to 5,
The photocurable resin is an ultraviolet light curable resin that is cured by irradiation with ultraviolet light having a wavelength of 200 to 400 nm, or a dye-mixed resin that is cured by irradiation with a green laser having a wavelength of 532 nm,
The method for producing a self-forming optical waveguide, wherein the light to be irradiated is light having a wavelength that is best absorbed by the resin ultraviolet light curable resin or the dye-mixed resin.   An optical device comprising a self-forming optical waveguide manufactured by the method for manufacturing a self-forming optical waveguide according to claim 1.

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