JP2008093637A - Apparatus for discharging liquid droplet, method for manufacturing electo-optical apparatus, electo-optical apparatus and electronic equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To quickly reflect a measured result of the discharged amount of a functional liquid droplet in the electric power of driving a head for discharging the functional liquid droplet. <P>SOLUTION: An apparatus for discharging a liquid droplet is provided with: a plotting means for discharging a functional liquid from the ink-jet head 17 for discharging the functional liquid droplet to do the plotting while moving the ink-jet head 17 for discharging the functional liquid droplet relatively to a workpiece; a weight measuring means 51 which is arranged adjacently to the plotting means and used for measuring the discharged amount of the functional liquid droplet by using the weight of the functional liquid discharged from the ink-jet head 17 for discharging the functional liquid droplet; and a control means 5 for controlling the electric power of driving the ink-jet head 17 for discharging the functional liquid droplet on the basis of the measured result input from the weight measuring means 51. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a droplet discharge device that performs drawing by discharging a functional liquid from an inkjet-type functional droplet discharge head to a work, an electro-optical device manufacturing method, an electro-optical device, and an electronic apparatus.

Conventionally, a drawing means (discharge means) for drawing by drawing a functional liquid from the functional liquid droplet ejection head while moving the functional liquid droplet ejection head relative to the workpiece (substrate), and adjacent to the drawing means And a weight measuring device for measuring the droplet discharge amount from the weight of the functional liquid discharged from the functional droplet discharge head, and the driving power of the functional droplet discharge head based on the measurement result of the weight measurement device There is known a liquid droplet ejection apparatus that performs drawing and performs drawing (see Patent Document 1).
JP 2004-177262 A

  However, in the conventional droplet discharge device, the user adjusts the driving power based on the measurement result. For this reason, in order to reflect the measurement result on the driving power, it takes time for adjustment by the user, and it is impossible to take prompt action. Further, the adjustment work is troublesome for the user.

  The present invention provides a droplet discharge device, a method of manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus that can quickly reflect the measurement result of the droplet discharge amount on the driving power of a functional droplet discharge head. With the goal.

  A liquid droplet ejection apparatus according to the present invention includes a drawing unit that performs drawing by ejecting a functional liquid from a functional liquid droplet ejection head while relatively moving an ink jet type functional liquid droplet ejection head with respect to a workpiece, and a drawing unit And a weight measuring means for measuring a droplet discharge amount from the weight of the functional liquid discharged from the functional droplet discharge head, and a functional droplet discharge head based on the measurement result input from the weight measurement means And a control means for controlling the driving power.

  According to this configuration, the driving power of the functional liquid droplet ejection head is controlled based on the measurement result input from the weight measuring means, not the user. For this reason, compared with the configuration in which the user adjusts the drive power based on the measurement result, the measurement result of the droplet discharge amount can be reflected in the drive power of the functional droplet discharge head more quickly.

  In this case, the drawing means mounts the workpiece and moves the workpiece in the X-axis direction, and the Y-axis table that mounts the functional droplet discharge head and moves the functional droplet discharge head in the Y-axis direction. And a cleaning means that is disposed on the movement locus of the functional liquid droplet ejection head in the Y-axis direction and that sucks and wipes the functional liquid droplet ejection head. It is preferable that it is disposed between the X-axis table and the cleaning means on the movement trajectory of the droplet discharge head.

  According to this configuration, the functional liquid droplet discharge head (discharge nozzle thereof) can be made to face the weight measuring unit after being cleaned by the cleaning unit. For this reason, it is possible to effectively prevent weight measurement failure and weight measurement failure due to ejection failure of the functional liquid droplet ejection head. Further, the tact time of a series of steps consisting of suction / wiping, weight measurement and drawing can be shortened.

  In this case, a plurality of functional liquid droplet ejection heads are provided, and the weight measuring means includes an electronic container for receiving the functional liquid ejected from any one functional liquid droplet ejection head and the weight of the functional liquid in the container. It is preferable to have a balance and a flushing box which is disposed around the container and receives waste discharge from another functional liquid discharge head when measuring discharge from one functional liquid droplet discharge head to the container. .

  According to this configuration, since a plurality of functional liquid droplet ejection heads are provided, when one functional liquid droplet ejection head performs measurement ejection, the other functional liquid droplet ejection heads finish the measurement ejection. However, it is possible to cause the functional liquid droplet ejection head in the “waiting” state to discard and perform ejection. Therefore, the nozzle is not dried during the “waiting” state, and the measurement discharge can be performed well after the “waiting” state, and an appropriate measurement result can be obtained.

  In this case, it is preferable that the plurality of functional liquid droplet ejection heads constitute a head group side by side in the X-axis direction, and further include a sub-table for moving the weight measuring means in the X-axis direction.

  According to this configuration, when a plurality of functional liquid droplet ejection heads are provided, the operation of causing each functional liquid droplet ejection head to face the weight measuring means can be easily performed.

  In this case, it is preferable to further include a windproof cover that is disposed on the movement trajectory of the sub-table and covers the upper space of the container when the weight is measured by the electronic balance.

  According to this configuration, when the weight is measured, the electronic balance can accurately measure the weight without being influenced by the airflow by moving the weight measuring means under the windproof cover by the sub table.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film forming portion is formed by a functional liquid on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used, and a film-forming portion made of a functional liquid is formed on a workpiece.

  According to these configurations, a high-quality electro-optical device can be efficiently produced by using the droplet discharge device that can quickly reflect the measurement result of the droplet discharge amount on the driving power of the functional droplet discharge head. Can be manufactured. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  According to another aspect of the invention, there is provided an electronic apparatus including the electro-optical device manufactured by the above-described electro-optical device manufacturing method or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is incorporated in a flat panel display production line. For example, a liquid droplet display using a functional liquid droplet ejection head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced. A color filter of the device, a light emitting element that becomes each pixel of the organic EL device, and the like are formed (printing by an ink jet method).

  As shown in FIGS. 1 and 2, the droplet discharge device 1 includes a drawing device 2 equipped with a plurality of functional droplet discharge heads 17, a cleaning device 3 extending in the Y-axis direction, a drawing device 2, and a cleaning device. The weight measuring unit 4 provided between the apparatus 3 and the control apparatus 5 (refer FIG. 8) are provided. The control device 5 is composed of a PLC, for example, and has a CPU, a memory, and the like. The droplet discharge device 1 is accommodated in a chamber room (not shown) capable of forming an atmosphere of dry air, for example.

  The drawing apparatus 2 is movably suspended from an X-axis table 11 installed on an X-axis support base 10 (stone surface plate), a Y-axis table 12 orthogonal to the X-axis direction, and the Y-axis table 12. A plurality of (ten) carriages 13.

  The X-axis table 11 includes a set table 21 on which a substrate W is mounted, an X-axis slider 22 that slidably supports the set table 21, and an X-axis moving mechanism 23 (linear motor) that moves the X-axis slider 22 in the X-axis direction. ). The set table 21 (substrate W) can be reciprocated in the X-axis direction with respect to the functional liquid droplet ejection head 17 by the X-axis moving mechanism 23 via the X-axis slider 22.

  The X-axis table 11 further includes a maintenance slider 24 that slidably supports an inspection stage 43 and a regular flushing unit 45 described later. The X-axis slider 22 and the maintenance slider 24 can be moved individually.

  The Y-axis table 12 is supported by the support 31 and extends so as to straddle the X-axis table 11 and the cleaning device 3. The Y-axis table 12 includes a plurality (ten) of bridge plates 32 in which the carriages 13 are suspended, and a pair of (10 sets) of Y-axis sliders 33 that slidably support both ends of each bridge plate 32. And a pair of Y-axis moving mechanisms 34 (linear motors) that move each Y-axis slider 33 in the Y-axis direction. A plurality of carriages 13 can be individually moved in the Y-axis direction via each pair of Y-axis sliders 33 by the pair of Y-axis moving mechanisms 34. That is, the Y-axis table 12 moves each carriage 13 between the X-axis table 11, the weight measuring unit 4, and each unit (described later) of the cleaning device 3.

  As shown in FIG. 3, each carriage 13 is mounted with a plurality (12 pieces) of functional liquid droplet ejection heads 17 via a carriage plate 36. The twelve functional liquid droplet ejection heads 17 are divided into two groups in the Y-axis direction, and six heads are arranged side by side in the X-axis direction to form the head group 16. A drawing line continuous in the Y-axis direction is formed by all-function liquid droplet ejection heads 17 (12 × 10) mounted on a plurality of carriages. The length of the drawing line corresponds to the width of the maximum size substrate W that can be mounted on the set table 21.

  Each functional liquid droplet ejection head 17 is supplied with a functional liquid from a functional liquid pack (not shown) or the like, and ejects the functional liquid by an ink jet method (for example, piezoelectric element driving). Then, by applying driving power from a head driver 38 (see FIG. 8) described later, functional liquid is discharged from a plurality of nozzles (for example, 180 × 2 rows). The driving power is controlled by the control device 5 based on the measurement result input from the weight measuring device 51 described later (details will be described later).

  The drawing apparatus 2 configured in this manner performs drawing by discharging functional liquid onto the substrate W while being controlled by the control device 5. That is, the drawing apparatus 2 reciprocates the substrate W with respect to the functional liquid droplet ejection head 17 by the X-axis table 11 and drives the functional liquid droplet ejection head 17 in synchronization with this to draw on the substrate W. Perform the action.

  As shown in FIGS. 1 and 2, the cleaning device 3 includes a plurality of (ten) suction units 41 arranged in the Y-axis direction and one wiping unit 42 in order from the X-axis table 11. . The plurality of suction units 41 and the wiping unit 42 are provided on the movement locus of the functional liquid droplet ejection head 17 by the Y-axis table 12 so that the carriage 13 can face each unit.

  A plurality of suction units 41 are provided corresponding to the plurality of carriages 13. Each suction unit 41 sucks a functional liquid from the nozzle of the functional liquid droplet ejection head 17 via a head cap (not shown) that seals the nozzle surface of each functional liquid droplet ejection head 17 to perform a cleaning operation or function. The initial filling of the liquid is performed. The wiping unit 42 wipes the nozzle surface of each functional liquid droplet ejection head 17 that has been contaminated by the functional liquid by a cleaning operation or the like using the wiping sheet 42a in units of the carriage 13.

  As described above, the inspection slider 43 and the regular flushing unit 45 are supported on the maintenance slider 24. The inspection stage 43 receives inspection discharge for inspecting the presence or absence of discharge failure of the functional liquid droplet discharge head 17. The discharged inspection pattern is imaged by the inspection camera 44, and the control device 5 recognizes the image and determines whether there is a discharge defect. Further, the regular flushing unit 45 is for receiving the waste discharge that is performed so that the nozzles of the functional liquid droplet discharge head 17 are not dried when the substrate W is replaced.

  As shown in FIGS. 4 and 5, the weight measuring unit 4 includes a plurality of (four) weight measuring devices 51, a sub table 52 that moves the plurality of weight measuring devices 51 in the X-axis direction, A windproof cover is provided on the movement path.

  The sub-table 52 includes a support frame 56 that collectively supports a plurality of weight measuring devices 51, and a weight measurement slider 57 that supports the plurality of weight measuring devices 51 slidably in the X-axis direction via the support frame 56. And a motor-driven weight measuring moving mechanism 58 for sliding the weight measuring slider 57 in the X-axis direction.

  The plurality of weight measuring devices 51 are juxtaposed in the Y-axis direction, and one weight measuring device 51 corresponds to one head group 16. In other words, the weight measurement is performed for each of the two carriages 13 by the four weight measuring devices 51.

  Each weight measuring device 51 includes a container 61 that receives a functional liquid discharged from any one of the six functional liquid droplet ejection heads 17 of the six functional liquid droplet ejection heads 17 constituting the head group 16, and the container 61. And an electronic balance 62 (see FIG. 6) for measuring the weight of the functional liquid, a flushing box 63 disposed around the container 61, and a case 64 for accommodating and supporting them. In the flushing box 63, the functional liquid absorbing material 65 is laid in a state where both long sides thereof are pressed by a pair of presser plates 66. The flushing box 63 receives waste discharge from the other five functional liquid droplet ejection heads 17 at the time of measurement ejection from one functional liquid droplet ejection head 17 to the container 61.

  In the present embodiment, since six functional liquid droplet ejection heads 17 perform measurement with one weight measuring device 51, when one functional liquid droplet ejection head 17 performs measurement ejection, the other five liquid droplet ejection heads 17 perform measurement and ejection. The functional liquid droplet ejection head 17 waits for the completion of the measurement ejection, but the functional liquid droplet ejection head 17 in the “waiting” state can be discarded and ejected. Therefore, the nozzle is not dried during the “waiting” state, and the measurement discharge can be performed well after the “waiting” state, and an appropriate measurement result can be obtained.

  With reference to FIGS. 6 and 7, a series of operations in weight measurement will be described. First, from the state in which all the carriages 13 face the suction unit 41, the two carriages 13 closer to the weight measuring unit 4 are moved in the Y-axis direction and wiping is performed by the wiping unit 42. Let it face the measurement unit 4. All the carriages 13 are moved from the suction unit 41 to the inspection stage 43 to perform inspection discharge, and after the normal discharge of all the nozzles is confirmed by the inspection camera 44, the carriages 13 are received two by two. You can make it happen.

  Subsequently, the sub-table 52 causes the container 61 of each weight measuring device 51 to face the first functional liquid droplet ejection head 17 a of each head group 16. Then, measurement discharge is performed on each container 61 from all the nozzles of the first functional liquid droplet discharge head 17 a of each head group 16. At this time, the second to sixth functional liquid droplet ejection heads 17b to 17f of each head group 16 perform waste ejection to the flushing box 63 (see FIG. 7A).

  Next, the sub-table 52 moves each container 61 below the windproof cover 53. In this state, the droplet discharge amount is measured with the electronic balance 62 (see FIG. 7B). According to this, since the air flow (downflow or turbulent flow by the chamber room) is blocked by the windproof cover 53, the electronic balance can accurately measure the weight without being influenced by the airflow.

  After measuring the weight of the droplet discharge amount of the first functional droplet discharge head 17a, the second functional droplet discharge head 17b is made to face the container 61, and measurement discharge is performed in the same manner (see FIG. 7C). ). In the same manner, the droplet discharge amount is sequentially measured for the six functional droplet discharge heads 17 of each head group 16. Here, the droplet discharge amount from all the nozzles of each functional droplet discharge head 17 is measured. However, the present invention is not limited to this. For example, the droplet discharge amount may be measured in units of nozzle rows. In addition, the droplet discharge amount may be measured in units of nozzles.

  FIG. 8 is a control block diagram for explaining the control of the driving power of the functional liquid droplet ejection head based on the measurement result of the weight measuring device 51. The electronic balance 62 outputs the measurement result obtained by measuring the droplet discharge amount as described above to the control device 5. The control device 5 controls the driving power (voltage value) applied from the head driver 38 to the functional liquid droplet ejection head 17 based on the measurement result input from the electronic balance 62. That is, when the weight measurement result is within the target range, drawing on the next substrate W is performed without changing the voltage value. On the other hand, when the weight measurement result is out of the target range, the voltage value is changed based on the resolution data of the applied voltage value and the weight measurement value obtained in advance. Then, the weight is measured again with the changed voltage value. This weight measurement and voltage value change are repeated until the weight measurement result falls within the target range.

  As described above, according to the droplet discharge device 1 of the present embodiment, the driving power of the functional droplet discharge head 17 is controlled based on the measurement result input from the weight measurement device 51 instead of the user. For this reason, compared with the configuration in which the user adjusts the driving power based on the measurement result, the measurement result of the droplet discharge amount can be reflected in the driving power of the functional droplet discharge head 17 quickly.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 9 is a flowchart showing the manufacturing process of the color filter, and FIG. 10 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 10B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 10C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 therebelow serve as a partition wall portion 507b that partitions each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 10 (d), functional droplets are ejected by the functional droplet ejection head 17, and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 11 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 10, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 11 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 12 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 13 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 14 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a (first bank layer) formed of an inorganic material such as SiO, SiO ₂ or TiO ₂ , and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 15, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), and an opposing surface. It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 16, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using tetrafluoromethane as a processing gas, for example. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 18, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 19, a drying process and a heat treatment are performed, the polar solvent contained in the first composition is evaporated, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 20, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 20)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 21, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 22, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 23, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 24 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 25 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 26A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a top view of the droplet discharge device concerning an embodiment. It is a side view of a droplet discharge device. It is a figure of the functional droplet discharge head which comprises a head group. It is a top view of a weight measurement unit. It is a front view of a weight measurement unit. It is a front schematic diagram of a droplet discharge device. It is a figure explaining a series of movements of weight measurement in a droplet discharge device. It is a control block diagram for explaining the control of the driving power of the functional liquid droplet ejection head based on the measurement result of the weight measuring device. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge apparatus 2 ... Drawing apparatus 3 ... Cleaning apparatus 4 ... Weight measuring unit 5 ... Control apparatus 11 ... X-axis table 12 ... Y-axis table 16 ... Head group 17 ... Functional liquid droplet discharge head 51 ... Weight measuring apparatus 52 ... Sub-table 53 ... Windproof cover 61 ... Container 62 ... Electronic balance 63 ... Flushing box W ... Substrate

Claims (8)

A drawing means for performing drawing by discharging a functional liquid from the functional liquid droplet discharge head while relatively moving the functional liquid droplet discharge head of the ink jet method with respect to the workpiece;
A weight measuring unit disposed adjacent to the drawing unit and measuring a droplet discharge amount from a weight of the functional liquid discharged from the functional droplet discharge head;
And a control unit that controls driving power of the functional droplet discharge head based on a measurement result input from the weight measuring unit. The drawing means mounts the workpiece and moves the workpiece in the X-axis direction, and the Y-axis that mounts the functional droplet discharge head and moves the functional droplet discharge head in the Y-axis direction. And a table,
A cleaning unit that is disposed on a movement locus of the functional liquid droplet ejection head in the Y-axis direction, and that sucks and wipes the functional liquid droplet ejection head;
2. The droplet discharge device according to claim 1, wherein the weight measuring unit is arranged between the X-axis table and the cleaning unit on a movement locus of the functional droplet discharge head. 3. . A plurality of the functional liquid droplet ejection heads are provided,
The weight measuring means includes a container that receives a functional liquid discharged from any one of the functional liquid droplet discharging heads;
An electronic balance for measuring the weight of the functional liquid in the container;
A flushing box that is disposed around the container and receives waste discharge from the other functional liquid discharge heads during measurement discharge from the one functional liquid droplet discharge head to the container. The liquid droplet ejection apparatus according to claim 1, wherein the liquid droplet ejection apparatus is a liquid ejection apparatus. The plurality of functional liquid droplet ejection heads constitute a head group side by side in the X-axis direction,
The liquid droplet ejection apparatus according to claim 3, further comprising a sub-table that moves the weight measuring unit in the X-axis direction.   The droplet discharge device according to claim 4, further comprising a windproof cover disposed on a movement trajectory of the sub-table and covering an upper space of the container when the weight is measured by the electronic balance.   6. A method for manufacturing an electro-optical device, wherein the droplet discharge device according to claim 1 is used to form a film forming portion with a functional liquid on the workpiece.   An electro-optical device using the droplet discharge device according to claim 1, wherein a film-forming portion made of a functional liquid is formed on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 6 or the electro-optical device according to claim 7.

Images