JP2007313550A - Method for joining ceramic, and joined member obtained thereby - Google Patents
Method for joining ceramic, and joined member obtained thereby Download PDFInfo
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- JP2007313550A JP2007313550A JP2006147807A JP2006147807A JP2007313550A JP 2007313550 A JP2007313550 A JP 2007313550A JP 2006147807 A JP2006147807 A JP 2006147807A JP 2006147807 A JP2006147807 A JP 2006147807A JP 2007313550 A JP2007313550 A JP 2007313550A
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Abstract
Description
本発明は、異種材料であるセラミック材料と金属材料を、接着剤あるいは接合剤を用いることなく、かつ常温・大気雰囲気中で強固に接合する方法に関する。
The present invention relates to a method for firmly bonding a ceramic material and a metal material, which are different materials, in a normal temperature / atmosphere atmosphere without using an adhesive or a bonding agent.
電子部品、バイオマテリアル、耐熱耐摩耗性構造部材などに代表されるように、機能、構造特性の両方において、各種セラミック材料の利用が多岐に渡っている。 As represented by electronic parts, biomaterials, heat-resistant and wear-resistant structural members, various ceramic materials are widely used in both functions and structural characteristics.
これらのセラミック材料の利用事例においては、セラミック材料が単独で用いられることはむしろ例外的であり、セラミック材料を金属材料と接合させて用いることが多い。 In the use cases of these ceramic materials, it is rather exceptional that the ceramic material is used alone, and the ceramic material is often used by being bonded to a metal material.
セラミック材料と金属材料との接合方法は、一般にもっとも簡便な方法としては、エポキシ樹脂等からなる接着剤により行う。
例えば、バイモルフ型圧電アクチュエータを構成する圧電セラミック製の圧電素子板と金属製の電極板や補強板とは、接着剤により接合している(特許文献1)。
The bonding method between the ceramic material and the metal material is generally performed by an adhesive made of an epoxy resin or the like as the simplest method.
For example, a piezoelectric ceramic piezoelectric element plate constituting a bimorph piezoelectric actuator and a metal electrode plate or reinforcing plate are joined by an adhesive (Patent Document 1).
一方、エポキシ樹脂の接着強度は25℃のときに比較すると、80℃以上になると半分程度になることが知られている。このため、該接合部材を高温状態で使用する場合や、より高い接合強度を得るためには、エポキシ樹脂等からなる接着剤による接合では対応に限界がある。 On the other hand, it is known that the adhesive strength of epoxy resin is about half when it is 80 ° C. or higher compared to 25 ° C. For this reason, when using this joining member in a high temperature state, or in order to obtain higher joining strength, there is a limit in correspondence with joining with an adhesive made of epoxy resin or the like.
高温状態での使用に対応するため、及び、接着剤による接合よりも高い接合強度を得るための、セラミック材料−金属材料の接合方法として、一般に、ハンダを用いたハンダ付けや、銀ロウに代表される硬ロウを用いたロウ付けによる接合が行われている。 In general, soldering using solder and silver solder are typical methods for joining ceramic materials to metal materials in order to cope with use in high temperature conditions and to obtain higher joint strength than joining with adhesives. Joining is performed by brazing using a hard brazing.
ハンダを用いたセラミック材料と金属材料の接合方法においては、セラミック材料や高融点金属材料の接合部分の表面に、予め、金属めっきを施しておき、この金属めっき部分にハンダを付着させた後に、当該のセラミック材料及び金属材料を加熱しハンダ付けを行う方法が用いられている。(特許文献2) In the joining method of the ceramic material and the metal material using the solder, the surface of the joint portion of the ceramic material or the high melting point metal material is preliminarily subjected to metal plating, and after the solder is attached to the metal plating portion, A method of heating and soldering the ceramic material and the metal material is used. (Patent Document 2)
一方、硬ロウを用いたセラミック材料−金属材料接合方法においては、
前述と同様に予め表面に金属層を形成したセラミック材料や高融点金属材料の接合部分に、銀ロウ等の、融点が450℃以上の硬ロウを付着させ、当該セラミック材料及び金属材料を高温に加熱しロウ付けを行う方法、
セラミック部材の接合表面に、表面処理を施した後にロウ付けを行う方法(特許文献3)、
が知られている。
In the same manner as described above, a hard solder having a melting point of 450 ° C. or higher such as silver solder is attached to a joint portion of a ceramic material or a refractory metal material having a metal layer formed on the surface in advance, and the ceramic material and the metal material are heated to a high temperature. Heating and brazing,
A method of performing brazing after performing surface treatment on the bonding surface of the ceramic member (Patent Document 3),
It has been known.
エポキシ樹脂等からなる接着剤によるセラミック材料−金属材料の接合は、接合強度が低く、また耐熱温度が低い。このため、セラミック材料−金属材料接合体が産業上利用することができる条件範囲は、おのずと限定される。 Bonding of a ceramic material to a metal material with an adhesive made of an epoxy resin or the like has a low bonding strength and a low heat resistance temperature. For this reason, the condition range in which the ceramic material-metal material assembly can be used industrially is naturally limited.
一方、硬ロウ、粉末ハンダやハンダペーストを用いてハンダを付着させるロウ接法においては、金属部材とロウ材あるいはハンダは共に金属材料であるので、金属部材とロウ材あるいはハンダとの接合強度は高いが、セラミック部材とロウ材あるいはハンダとが異種材料であることから、セラミック部材とロウ材あるいはハンダとの接合強度が低く、低い接合強度しか得られない場合が多い。 On the other hand, in the soldering method in which solder is attached using hard solder, powder solder or solder paste, since the metal member and the brazing material or solder are both metal materials, the bonding strength between the metal member and the brazing material or solder is However, since the ceramic member and the brazing material or solder are different materials, the bonding strength between the ceramic member and the brazing material or solder is low, and only a low bonding strength is often obtained.
このため、セラミック部材の表面を水酸化カリウムなどのアルカリ溶液でエッチング処理してセラミック部材の表面を粗面化した後に、セラミック部材と金属部材とをロウ付けする方法、
セラミックや金属の接合部分の表面に、予め金属めっきを施しておき、この金属めっき部分にハンダを付着させた後に、加熱しハンダ付けを行う方法、
チタンをベースとした活性金属を塗布し高温処理することでチタンをセラミックス中に拡散あるいはセラミックスと反応させ、セラミックスの表面に金属層を形成させるメタライズ処理を施した後にセラミック部材と金属部材を接合する方法、などの
各種接合法の適用が提唱されている。
For this reason, the method of brazing the ceramic member and the metal member after etching the surface of the ceramic member with an alkaline solution such as potassium hydroxide to roughen the surface of the ceramic member,
A method of performing soldering by heating after applying metal plating to the surface of the ceramic or metal joint part in advance and attaching solder to the metal plating part,
The ceramic member and the metal member are joined after metallization treatment is performed in which a titanium-based active metal is applied and subjected to high temperature treatment to diffuse titanium in the ceramic or react with the ceramic to form a metal layer on the surface of the ceramic. Application of various joining methods such as methods has been proposed.
しかし、いずれの方法も、工程が複雑となりプロセス完了までに長時間を要する、
雰囲気制御容器内でのプロセスであることなどから生産性に劣る、
あるいは、加熱冷却に伴う熱応力の発生/残留が接合体の強度低下をもたらす、
などの難点を有する。
However, in both methods, the process becomes complicated and it takes a long time to complete the process.
Productivity is inferior because it is a process in an atmosphere control vessel.
Alternatively, the generation / residue of thermal stress accompanying heating and cooling results in a decrease in strength of the joined body.
Have such difficulties.
本発明は、前記課題を解決するため、機械的な摩擦発熱により、接合部材全体ではなく、接合界面近傍のみを局所的に軟化、塑性流動させた金属材料を直接セラミック材料に押しつけることにより接合させる、まったく新規の接合方法である。 In order to solve the above-mentioned problems, the present invention makes it possible to bond by directly pressing a metal material that is locally softened and plastically flowed in the vicinity of the bonded interface, not the entire bonded member, by mechanical frictional heat generation, and directly pressed against the ceramic material. This is a completely new joining method.
本接合方法では、金属部材に、1000rpm以上の高速で回転するロッドを、加圧挿入することにより該ロッドと金属材料間に摩擦熱を発生させる。 In this joining method, a frictional heat is generated between the rod and the metal material by press-inserting a rod rotating at a high speed of 1000 rpm or more into the metal member.
該ロッドと金属材料間に発生した摩擦熱により軟化、塑性流動状態になった金属材料を、セラミック材料に押しつけることにより接合を行う。(図1)
Joining is performed by pressing the metal material softened and plastically flowed by frictional heat generated between the rod and the metal material against the ceramic material. (Figure 1)
本発明の接合方法では、セラミック部材、金属部材ともに表面への前処理を行う必要がないため、工程を簡素化することができる。 In the joining method of the present invention, it is not necessary to perform pretreatment on the surface of both the ceramic member and the metal member, so that the process can be simplified.
また、常温で接合を行うため、セラミック部材と金属部材との熱膨張率の違いに起因する熱応力が生じることなく、接合強度が低下する恐れがない。 Further, since the bonding is performed at normal temperature, there is no fear that the bonding strength is lowered without causing thermal stress due to the difference in thermal expansion coefficient between the ceramic member and the metal member.
さらに本接合プロセスは、大気解放雰囲気中で行うことが可能であり、かつ、ロッド材の加圧保持時間が10秒程度以内の極めて短時間で完結することから、制御雰囲気中、高温にて長時間保持を要する既存の拡散接合法などとは比較にならないほど簡便なプロセスである。
Furthermore, this bonding process can be performed in an open atmosphere, and the pressure holding time of the rod material is completed in an extremely short time of about 10 seconds or less. It is a process that is so simple that it cannot be compared with existing diffusion bonding methods that require time retention.
セラミック部材上にアルミニウム、銅等を代表とする軟質金属材料(厚さ5mm以下が望ましい)を重ね、金属材料上部から回転ロッドを加圧挿入し、摩擦攪拌により塑性流動させた金属材料をセラミック部材に押しつけ、セラミック材料と金属材料の接合を行う。このとき、回転ロッドの回転数は通常2000〜3000rpmが望ましい。 A ceramic material is made of a metal material that is made of plastic material such as aluminum and copper (preferably 5 mm or less in thickness) superimposed on a ceramic member, and a rotating rod is inserted under pressure from the top of the metal material and plastically fluidized by friction stirring. The ceramic material and the metal material are joined. At this time, the rotation speed of the rotating rod is preferably 2000 to 3000 rpm.
このとき、セラミック部材の破損を避けるため、金属材料中に挿入した回転ロッド先端とセラミック部材表面との間には、隙間をあけ、直接接触させない状態で接合を行う。 At this time, in order to avoid breakage of the ceramic member, a gap is formed between the tip of the rotating rod inserted in the metal material and the surface of the ceramic member, and the bonding is performed without direct contact.
上記回転ロッド先端とセラミック部材表面との隙間は、回転ロッド直径の20〜30%が望ましい。 The clearance between the tip of the rotating rod and the surface of the ceramic member is preferably 20 to 30% of the diameter of the rotating rod.
対象とするセラミック材料は、アルミナ等の酸化物系、窒化珪素などの窒化物系、炭化珪素などの炭化物系などのすべてを含み、特に材質としての制限を持たない。 The target ceramic materials include all oxides such as alumina, nitrides such as silicon nitride, carbides such as silicon carbide, and the like, and are not particularly limited as a material.
一方、対象とする金属材料は、通常の工具鋼ロッド材での軟化が容易に行える銅、Alを代表とする軟質金属を主対象とするが、軟化塑性流動が可能な金属材料であれば、特に材質を制限するものではない。
On the other hand, the target metal material is mainly a soft metal typified by copper and Al, which can be easily softened with a normal tool steel rod material, but if it is a metal material capable of softening plastic flow, The material is not particularly limited.
実際のセラミック−金属接合体の一例を示す。(図2)本発明の方法を用いて、セラミック材料と金属材料が接合していることがわかる。 An example of an actual ceramic-metal joint is shown. (FIG. 2) It can be seen that the ceramic material and the metal material are bonded using the method of the present invention.
図3に、A5052Al合金と窒化珪素接合体について、接合後せん断試験により破断した界面を示す。 FIG. 3 shows the interface fractured by the post-joining shear test for the A5052Al alloy and the silicon nitride joined body.
図より、Al合金側には窒化珪素の一部が付着しており、また対応する窒化珪素側にその部分の剥離陥没が認められる。 From the figure, a part of silicon nitride is adhered to the Al alloy side, and a part of the silicon nitride is peeled and depressed on the corresponding silicon nitride side.
このことより本接合体では、窒化珪素母材以上の接合強度が両材料間の接合界面において形成されていたことがわかる。
From this, it can be seen that in this bonded body, a bonding strength higher than that of the silicon nitride base material was formed at the bonding interface between the two materials.
一般的な利用法としては、セラミック部材と金属部材を接合することにより、耐食、耐摩耗などのセラミック材の特徴と、高い靱性を有する金属材料の両者の利点を活かすことにより、接合部材としての高い構造,機能特性の発現が期待され、各種構造,機能用部材としての広範な利用が可能である。 As a general application method, by joining ceramic members and metal members, by utilizing the advantages of both ceramic materials such as corrosion resistance and wear resistance and metal materials having high toughness, High structure and functional characteristics are expected to be expressed, and it can be used widely as various structural and functional members.
本発明を歯科治療に利用し、歯の主成分であるハイドロキシアパタイトと銀合金を接合することが可能である。
これにより、現状では接着剤で行われているクラウンの接着、補綴物の接着をより強固に行うことができる。
By utilizing the present invention for dental treatment, it is possible to join hydroxyapatite which is a main component of teeth and a silver alloy.
Thereby, the adhesion | attachment of the crown currently performed with the adhesive agent and adhesion | attachment of a prosthesis can be performed more firmly.
また今後の技術の進展次第では、治療を行うその場で、患者の歯に銀を直接接合させ、従来の接着剤による接合を補完的に支持する技術へと発展させる可能性としても期待される。 In addition, depending on the progress of future technology, it is expected that it may be developed as a technology that supports silver joints directly to the patient's teeth on the spot where treatment is performed, and that complements conventional joints with adhesives. .
各種電子部品、半導体部品におけるセラミックス/金属材料間の接合への本技術の適用は、もっとも効果的かつ広範囲の適用事例として挙げられる。
Application of the present technology to bonding between ceramics and metal materials in various electronic parts and semiconductor parts can be cited as the most effective and wide range of application examples.
Claims (2)
A ceramic joining member joined by the ceramic joining method according to claim 1.
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JP2012078084A (en) * | 2010-10-04 | 2012-04-19 | Mahle Internatl Gmbh | Cooler |
KR101307634B1 (en) * | 2012-03-02 | 2013-09-12 | 성균관대학교산학협력단 | Method of bonding metal member and ceramic member |
WO2020072196A1 (en) * | 2018-10-03 | 2020-04-09 | Lam Research Corporation | Friction stir welding for ceramic applications |
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JP2002096182A (en) * | 2000-09-20 | 2002-04-02 | Toyota Motor Corp | Bonding method, revolving tool and joining body by friction heating |
JP2002256453A (en) * | 2001-03-05 | 2002-09-11 | Akira Nishihara | Friction stir forming method |
JP2003275876A (en) * | 2002-03-18 | 2003-09-30 | Sumitomo Light Metal Ind Ltd | Member for joining different kinds of metals, and method for joining different metal members |
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JP2002096182A (en) * | 2000-09-20 | 2002-04-02 | Toyota Motor Corp | Bonding method, revolving tool and joining body by friction heating |
JP2002256453A (en) * | 2001-03-05 | 2002-09-11 | Akira Nishihara | Friction stir forming method |
JP2003275876A (en) * | 2002-03-18 | 2003-09-30 | Sumitomo Light Metal Ind Ltd | Member for joining different kinds of metals, and method for joining different metal members |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2012078084A (en) * | 2010-10-04 | 2012-04-19 | Mahle Internatl Gmbh | Cooler |
US9897388B2 (en) | 2010-10-04 | 2018-02-20 | Mahle International Gmbh | Composite exhaust gas recirculation cooler |
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JP2022504156A (en) * | 2018-10-03 | 2022-01-13 | ラム リサーチ コーポレーション | Friction stir welding for ceramic applications |
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