JP2007010450A - Electron beam irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a more compactible and cost-reducible electron beam irradiation device than a conventional electron beam irradiation device. <P>SOLUTION: This electron beam irradiation device including a vacuum chamber 20 and an electron beam source 10 installed in the vacuum chamber 20 is equipped with an electron beam irradiation window part 30 on an opening frame part 21 of the vacuum chamber 20. The electron beam irradiation window part 30 has a window frame member 31, a window foil 33 covering an opening part 31 for electron beam transmission of the window frame member 31, and a window foil pressing member 32. The window foil pressing member 32 has a nozzle 322 for spraying cooling gas to the window foil 33. In the electron beam irradiation device A, a duct part 5 communicated with the nozzle 322, for supplying the cooling gas to the nozzle is formed integrally inside the window frame member 31. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an electron beam irradiation apparatus.

  Electron beam irradiation equipment is used to modify polymer materials such as wire coating materials by electron beam irradiation (crosslinking, etc.), cure coating films by electron beam irradiation, and sterilize medical products by electron beam irradiation. ing.

  There are several types of electron beam irradiation devices, including a vacuum chamber and an electron beam source installed in the vacuum chamber, and electrons emitted from the electron beam source to the vacuum chamber. Some of them are provided with an electron beam irradiation window for transmitting the rays and irradiating the irradiated object outside the vacuum chamber.

As such an electron beam irradiation window portion, a window frame member attached to an opening facing an electron beam source of a vacuum chamber, and a window foil member capable of transmitting an electron beam covering an electron beam transmitting opening of the window frame member; In addition, there is known one having a window foil pressing member that sandwiches and holds the window foil member between the window frame member (see, for example, JP-A-2002-243899).
In addition, a window foil pressing member having a nozzle for blowing a cooling gas onto the window foil member is also known (see, for example, Japanese Patent No. 3580387).

Here, a conventional example of an electron beam irradiation apparatus in which the window foil pressing member has a nozzle for blowing a cooling gas to the window foil member will be described with reference to FIGS.
FIG. 5 is a sectional view of a conventional electron beam irradiation apparatus A ′. An electron beam irradiation apparatus A ′ shown in FIG. 5 includes a vacuum chamber 20, an electron beam source 10 installed in the vacuum chamber 20, and an electron beam irradiation window 30 ′ attached to the vacuum chamber 20.

  The electron beam source 10 includes a filament 11 for emitting thermoelectrons and an electron extraction electrode 12 provided on the filament 11. Further, a shield electrode 13 which surrounds the filament 11 and the electron extraction electrode 12 and has an electron extraction opening 132 at a position facing the electron extraction electrode 12 and an electron acceleration electrode plate 14 attached to the shield electrode opening 132 are provided. is doing.

  The vacuum chamber 20 has a cylindrical shape with a circular cross section with both ends closed. The chamber 20 has an opening for passing an electron beam emitted from the electron beam source 10 and attaching an electron beam irradiation window 30 ′ to the lower part of the chamber along the chamber longitudinal direction (chamber depth direction) (see FIG. In the example shown, it has a frame-shaped opening frame portion) 21 '.

  When viewed from below, the opening frame portion 21 ′ has a rectangular shape as shown in FIG. 6, and a support portion 211 ′ of the electron beam irradiation window portion 30 ′ is integrally formed at the center portion. The support portion 211 ′ extends in the same direction as the longitudinal direction of the vacuum chamber 20, and divides the opening of the opening frame portion 21 ′ into two opening portions 212 and 212 having the same size.

  As shown in FIG. 6, the filaments 11 of the electron beam source 10 are arranged in a plurality of rows (four rows in the illustrated example) in the longitudinal direction (depth direction) of the vacuum chamber 20. In each row, the plurality of filaments 11 are arranged in parallel to each other, and the filaments in any row are arranged in the same plane. Four electron extraction electrodes 12 are provided corresponding to the filament groups in each row.

  The shield electrode 13 has a box-like shape in which the portion where the electron accelerating electrode plate 14 is provided is an opening 132 as a whole. Both ends of the tunnel-like portion 131 extending in the longitudinal direction (depth direction) of the vacuum chamber (front side in the drawing). The side end and the back end) are closed with a side plate (not shown).

The electron extraction electrode 12 and the electron acceleration electrode plate 14 are formed with a large number of through holes through which the electrons e pass.
Although not shown, the electron beam irradiation device includes a power supply device for energizing the filament 11 and the like, an exhaust device for reducing the pressure in the vacuum chamber 20, and the like.

The electron beam irradiation window 30 ′ is a window for transmitting an electron beam emitted from the electron beam source 10 and irradiating an object to be irradiated (traveling object W in the illustrated example) outside the vacuum chamber. .
The window portion 30 'is attached to the electron beam irradiation opening frame portion 21' of the vacuum chamber 20 with a bolt B1, and is attached to the window frame member 31 ', also called a grid window, with the bolt B2 to the window frame member 31'. The window foil pressing member 32 'and the window foil 33 sandwiched between the window frame pressing member 32' and the window foil pressing member 32 'are provided.

  One window frame member 31 ′ is disposed for each opening 212 of the opening frame 21 ′ of the vacuum chamber 20. As shown in FIG. 7, each window frame member 31 ′ has an annular and rectangular shape as shown in FIG. 7, and a central portion 311 extending in the same direction as the longitudinal direction of the vacuum chamber 20 at the center. Are integrally formed. The central part 311 divides the opening of the window frame member into two openings 312 and 312 having the same size. In each opening 312, crosspiece members 313 in the same direction as the filament 11 are provided at predetermined intervals.

In FIG. 7, reference numeral 314 denotes a bolt through hole through which the bolt B1 is passed. Further, reference numeral 213 in the vacuum chamber opening frame portion 21 ′ in FIG. 6 denotes a screw hole into which the bolt B1 is screwed.
Each window frame member 31 ′ is also provided with a coolant passage 315 through which a coolant (usually cooling water) is passed to suppress the temperature rise of the window frame member 31 ′ due to electron beam irradiation.

  The window foil 33 is a film-like member made of a foil material that can transmit electron beams, such as titanium foil and aluminum foil, and is stretched so as to cover each opening 312 of each window frame member 31 ′. The member 32 ′ is sandwiched and held between the member 32 ′ and the member 31 ′.

  The crosspiece member 313 in the window frame member 31 ′ is used to prevent the window foil 33 from being damaged by being pressed toward the inside of the chamber at an external pressure when the inside of the vacuum chamber 20 is depressurized when the electron beam irradiation apparatus is used. It functions as a window foil support.

  One window foil pressing member 32 'is provided for each window frame member 31'. As shown in FIG. 8, each pressing member 32 ′ has an annular shape and a rectangular shape when viewed from below, and has an opening 321. The opening 321 has an opening area corresponding to both of the two openings 312 of the window frame member 31 ′.

Each window foil pressing member 32 ′ has nozzles 322 that are dispersedly formed at predetermined intervals on the left and right portions extending in the same direction as the longitudinal direction of the vacuum chamber 20.
The window foil pressing member 32 ′ is fastened to the window frame member 31 ′ with the bolt B2 as described above with the window foil 33 sandwiched between the window frame member 31 ′. In FIG. A hole through which the bolt B2 passes, and 316 in the window frame member 31 ′ in FIG. 7 is a screw hole into which the bolt B2 is screwed.

As shown in FIG. 5, an airtight seal member S is disposed between the window frame member 31 ′ and the window foil pressing member 32 ′. Further, the coolant passage 324 is also formed in the window foil pressing member 32 ′.
Further, as shown in FIG. 5, a duct 4 for supplying a cooling gas such as nitrogen gas to each nozzle 322 of the window foil pressing member 32 ′ is attached to the electron beam irradiation window portion 30 ′.
The duct 4 is attached to the outside of one of the two window frame members 31 ′, the outside of the other, and between the two.

The duct 4 outside the window frame member 31 ′ is fixed to the opening frame portion 21 ′ of the vacuum chamber 20 with a bolt B 3. Reference numeral 214 in the opening frame portion 21 ′ in FIG. 6 is a screw hole into which the bolt B3 is screwed.
The duct 4 between the two window frame members 31 ′ is fixed to the central support portion 211 ′ of the vacuum chamber opening frame portion 21 ′ by a fixing means (not shown).
Each duct 4 is provided along with the window frame member 31 ′ and the window foil pressing member 32 ′, and communicates with each nozzle 322 in the member 32 ′.

  According to the electron beam irradiation apparatus A ′ described above, the electrons e emitted from the filament 11 are extracted by the extraction electrode 12, accelerated by the acceleration electrode plate 14, and directed from the electron beam source 10 to the irradiation window 30 ′. Through the window foil 33, the irradiated object W arranged below the window 30 'is irradiated.

  During this electron beam irradiation process, a coolant is supplied to each coolant passage 315 of each window frame member 31 ′ by a coolant supply means (not shown), thereby increasing the temperature of the window frame member 31 ′ that touches the electron beam. And the temperature rise of the part of the window foil 33 and the part of the sealing member S which are contacting this window frame member 31 'is suppressed. Further, the cooling liquid is also caused to flow in each cooling liquid passage 324 of each window foil pressing member 32 ′, thereby raising the temperature of the member 32 ′ and the portion of the window foil 33 that is in contact with the member 32 ′ and the sealing member. The temperature rise in the portion S is also suppressed.

Further, a cooling gas (for example, nitrogen gas) is supplied to each duct 4 from a cooling gas supply means (not shown), and the duct 4 communicates with the nozzle 322 of the window foil pressing member 32 ′ that communicates with the duct 4. Gas is supplied and blown from the nozzle 322 to the window foil 33. As shown in FIG. 8, the nozzles 322 are arranged in the left and right portions of the window foil pressing member 32 ′ extending in the longitudinal direction of the vacuum chamber. A cooling gas is blown to each window foil portion covering each of the openings 312 (and thus receiving the electron beam irradiation).
Thus, the window foil 33 to be heated by the electron beam irradiation is cooled down entirely, although it is irradiated with the electron beam.

As the window foil 33 is cooled in this manner, the window foil 33 is prevented from being damaged due to the temperature rise.
In addition, since the members 31 ′ and 32 ′ and the portions of the window foil and the sealing material S that are in contact with the members are cooled by the coolant, the airtightness of the vacuum chamber 20 caused by the expansion of these members is reduced. The decrease is also suppressed.

JP 2002-243899 A Japanese Patent No. 3580387

  However, according to the electron beam irradiation apparatus A ′ shown in FIGS. 5 to 8, the duct 4 for supplying the cooling gas to the nozzle 322 for cooling the window foil 33 includes the window frame member 31 ′ and the window foil pressing member. Since 32 'and the window foil 33 are manufactured separately and are attached to them from the outside, there are the following problems.

(1) The number of parts that must be handled when the electron beam irradiation window portion 30 'is provided in the vacuum chamber 20 is large, and the work of assembling and mounting the electron beam irradiation window portion 30' on the vacuum chamber 20 is complicated. The irradiation device is expensive.

(2) The duct 4 is disposed at least outside the window frame member 31 ′ so that the cooling gas can be supplied to the nozzle 322 and in order to avoid unnecessary irradiation of the electron beam to the duct 4. Therefore, as shown in FIG. 5, the width dimension of the electron beam irradiation window portion 30 ′ including the duct 4 in the direction crossing the longitudinal direction of the vacuum chamber becomes large as L ′, and the electron beam irradiation apparatus is made compact. Be disturbed.

(3) When arranging the duct 4 on the outside of the window frame member 31 ′, in order to arrange the duct as compactly as possible, as shown in FIG. 4 is arranged in the duct 4 and attached to the vacuum chamber opening frame portion 21 ′, the gas passage cross-sectional area in the duct 4 is narrowed by that amount. The amount of cooling gas supplied to the nozzle 322 is reduced, and if the duct is increased in size in order to solve this problem, the dimension L ′ becomes larger.

(4) In order to obtain an electron beam irradiation apparatus having a large electron beam irradiation capability, as shown in FIG. 5, when a plurality of window frame members 31 ′ are employed, the duct 4 is also formed between adjacent window frame members 31 ′. In order to support the duct 4 and the like, a support portion 211 ′ as shown in FIG. 5 must be provided in the vacuum chamber opening frame portion 21 ′. This obstructs the simplification of the structure of the vacuum chamber opening frame portion 21 'and the reduction in cost.

(5) Further, in the case where a plurality of window frame members 31 ′ are employed, for example, when two adjacent window frame members 31 ′ shown in FIG. The arrangement of the duct 4 disposed between the two becomes difficult, and as a result, it is difficult to integrate the two window frame members 31 ′.

  This problem is not limited to the electron beam irradiation apparatus illustrated in FIG. 5, but includes a vacuum chamber, an electron beam source built in the chamber, and an electron beam irradiation window provided in the chamber (a cooling gas is blown onto the window foil). This is a problem that occurs in an electron beam irradiation apparatus of a type having a nozzle to be attached and a window portion provided with a duct for supplying a cooling gas to the nozzle.

  Therefore, the present invention includes a vacuum chamber and an electron beam source installed in the vacuum chamber, and the vacuum chamber transmits an electron beam emitted from the electron beam source and is irradiated outside the vacuum chamber. A window frame member having an electron beam transmission opening attached to the electron beam irradiation opening of the vacuum chamber; and A window foil member capable of transmitting an electron beam that covers an electron beam transmitting opening of the window frame member, and a window foil holder attached to the window frame member by sandwiching the window foil member between the window frame member The window foil pressing member is an electron beam irradiation apparatus having a nozzle for blowing a cooling gas to the window foil member, and this kind of conventional electron beam irradiation apparatus and Compared to this, we offer an electron beam irradiation device that can be made more compact and less expensive. It is an object of the invention to.

  In order to solve the above problems, the present invention includes a vacuum chamber and an electron beam source installed in the vacuum chamber, and the vacuum chamber transmits an electron beam emitted from the electron beam source to transmit the vacuum chamber. An electron beam irradiation window for irradiating an external object to be irradiated is provided, and the electron beam irradiation window has an electron beam transmission opening attached to the electron beam irradiation opening of the vacuum chamber. A window frame member having an electron beam transmitting opening covering the electron beam transmitting opening of the window frame member, and the window foil member sandwiched between the window frame member and attached to the window frame member A window foil pressing member, and the window foil pressing member is an electron beam irradiation device having a nozzle for blowing a cooling gas to the window foil member, and the inside of the window frame member A duct portion communicating with the nozzle and supplying a cooling gas to the nozzle Providing an electron beam irradiation device are integrally formed.

  According to the electron beam irradiation apparatus according to the present invention, the duct portion for supplying the cooling gas to the nozzle provided in the window foil pressing member is attached to the outside of the window frame member and the window foil pressing member as in the conventional case. Instead, it is integrally formed inside the window frame member so as to communicate with the nozzle and supply the cooling gas to the nozzle, and thus has the following advantages.

(1) The number of parts that must be handled when installing the electron beam irradiation window in the vacuum chamber is smaller than before, and the work of assembling and attaching to the vacuum chamber can be performed more easily and cheaper than before. As a result, the electron beam irradiation apparatus can be provided at a lower cost.

(2) Conventionally, the duct arranged outside the window frame member becomes unnecessary, and accordingly, the width dimension of the electron beam irradiation window in the direction crossing the vacuum chamber longitudinal direction can be reduced. Further, it can be reduced so that the cooling gas supply to the nozzle of the window foil pressing member is not hindered, and the electron beam irradiation apparatus can be made compact accordingly.

(3) For example, when a plurality of window frame members (31 ′) are employed as in the conventional apparatus shown in FIG. 5, the duct (4) must also be arranged between adjacent window frame members (31 ′). After all, since such a duct is not necessary, at least one pair of adjacent window frame members can be integrated and downsized, and the conventional example in the opening portion of the vacuum chamber for attaching the electron beam irradiation window portion can be obtained. Support portions such as the window frame member (31 ′) and the support portion (211 ′) for supporting the duct (4) between the members can be omitted, and thus the opening for attaching the electron beam irradiation window of the vacuum chamber. The simplification of the structure and the compactness of the window frame member constituting the electron beam irradiation window part can be realized, and the electron beam irradiation apparatus can be provided at a low cost.

As a result, it is possible to provide an electron beam irradiation apparatus that can be made more compact and less expensive than conventional electron beam irradiation apparatuses of the same type.
In addition, about the number of the window frame members and window foil pressing members which comprise an electron beam irradiation window part, each may be one or more. Even when multiple devices are used, it is possible to make them more compact than before.

  As described above, according to the present invention, it includes a vacuum chamber and an electron beam source installed in the vacuum chamber, and the vacuum chamber transmits the electron beam emitted from the electron beam source to transmit the vacuum chamber. An electron beam irradiation window for irradiating an external object to be irradiated is provided, and the electron beam irradiation window has an electron beam transmission opening attached to the electron beam irradiation opening of the vacuum chamber. A window frame member having an electron beam transmitting opening covering the electron beam transmitting opening of the window frame member, and the window foil member sandwiched between the window frame member and attached to the window frame member A window foil pressing member, and the window foil pressing member is an electron beam irradiation apparatus having a nozzle for blowing a cooling gas to the window foil member, and this kind of conventional Compared to electron beam irradiation equipment, it is possible to reduce the size and price. It is possible to provide a child beam irradiation apparatus.

Hereinafter, an example A of an electron beam irradiation apparatus according to the present invention will be described with reference to FIGS.
FIG. 1 is a cross-sectional view of the electron beam irradiation apparatus A. An electron beam irradiation apparatus A shown in FIG. 1 includes a vacuum chamber 20, an electron beam source 10 installed in the vacuum chamber 20, and an electron beam irradiation window 30 attached to the vacuum chamber 20.

  The electron beam source 10 has the same configuration and operation as the electron beam source 10 in the apparatus A ′ shown in FIG. 5. The same parts and portions as those of the electron beam source shown in FIG.

  The vacuum chamber 20 is the same as the vacuum chamber 20 of the apparatus A ′ except for the opening 21 (in this example, a frame-shaped opening frame) 21 to which the electron beam irradiation window 30 is attached. FIG. 2 is a view of the opening frame portion 21 as viewed from below. As shown in FIGS. 1 and 2, the opening frame portion 21 has an annular shape as a whole and has one large opening portion 210 facing the electron beam source 10. Unlike the opening frame portion 21 ′ in the apparatus A ′, the central support portion 211 ′ is not provided, and the structure is simplified accordingly. In FIG. 2, reference numeral 11 denotes a filament of the electron beam source 10.

  Although not shown, the electron beam irradiation apparatus A also includes a power supply device for energizing the filament 11 and the like, an exhaust device for reducing the pressure in the vacuum chamber 20, and the like.

  The electron beam irradiation window 30 includes a window frame member (grid window) 31 attached to the opening frame 21 of the vacuum chamber 20 with a bolt B1, and a window foil pressing member 32 attached to the window frame member 31 with a bolt B2. A window foil 33 sandwiched between the window frame member 31 and the window foil pressing member 32 is provided.

  The window frame member 31 has a form in which two adjacent window frame members 31 'in the apparatus A' shown in FIG. That is, in the device A, the window frame member 21 is a single compact.

  When viewed from below, the window frame member 31 has a rectangular shape as a whole as shown in FIG. 3, and a thick central portion 310 extending in the same direction as the longitudinal direction of the vacuum chamber 20 is integrally formed at the center. There are openings on both sides of the central portion 310, and each opening is a member 311 provided at the center and extending in the same direction as the longitudinal direction of the vacuum chamber 20. 312 and 312 are divided. In each opening 312, crosspiece members 313 in the same direction as the filament 11 are provided at predetermined intervals.

  The central portion 310 of the window frame member 31 is formed by integrating adjacent portions of the two adjacent window frame members 31 ′ in the apparatus A ′, that is, adjacent portions with the central duct 4 in between. The left and right coolant passages 315 are formed in the same direction as the longitudinal direction of the vacuum chamber 20, and the duct portion 5 is formed between them. The central duct portion 5 corresponds to the central duct 4 in the apparatus A ′ and is integrally formed inside the window frame member 31.

  A coolant passage 315 is formed in each of the left side portion and the right side portion in FIG. 1 of the window frame member 31, and the duct portion 5 is formed outside thereof. These left and right duct portions 5 correspond to the ducts 4 arranged outside the window frame member 31 ′ in the device A ′.

The two openings 312 on the left side in FIG. 1 of the central portion 310 of the window frame member 31 correspond to the two openings 312 of the left window frame member 31 ′ in the device A ′.
The two openings 312 on the right side in FIG. 1 of the central portion 310 of the window frame member 31 correspond to the two openings 312 of the right window frame member 31 ′ in the device A ′.
That is, this window frame member 21 has a total of four electron beam transmission openings 312, as with the two window frame members 31 ′ of the apparatus A ′.

  In FIG. 3, reference numeral 314 denotes a bolt through hole through which the bolt B1 is passed. Further, reference numeral 213 in the vacuum chamber opening frame portion 21 in FIG. 2 denotes a screw hole into which the bolt B1 is screwed.

  The window foil 33 is a film-like member made of a foil material that can transmit electron beams, such as titanium foil and aluminum foil. The window foil 33 is stretched so as to cover each opening 312 of the window frame member 31, and the window foil pressing member 32. And is held between the member 32 and the member 31.

  The crosspiece member 313 in the window frame member 31 is a window foil for preventing the window foil 33 from being damaged by being pressed toward the inside of the chamber at an external pressure when the inside of the vacuum chamber 20 is depressurized when the electron beam irradiation apparatus is used. Acts as a support.

  The window foil pressing member 32 is one for the two openings 312 adjacent to each other on the left side in FIG. 1 and one for the two openings 312 adjacent to each other on the right side in FIG. A total of two are provided. As shown in FIG. 4, each pressing member 32 has an annular shape and a rectangular shape as shown in FIG. 4, and has an opening 321.

Each window foil pressing member 32 has nozzles 322 that are dispersedly formed at predetermined intervals on each of left and right portions extending in the same direction as the longitudinal direction of the vacuum chamber 20.
Thus, the window foil pressing member 32 has substantially the same structure as the window foil pressing member 32 ′ in the apparatus A ′.

  The window foil pressing member 32 is fastened to the window frame member 31 with the bolt B2 as described above with the window foil 33 sandwiched between the window frame member 31. In FIG. 3 is a screw hole into which the bolt B2 is screwed.

  As shown in FIG. 3, the window frame member 31 is formed with an array of vent holes 51 that allow the duct portion 5 to communicate with the nozzle 322 of the window foil pressing member 32. When the window foil pressing member 32 is attached to the window frame member 31 with bolts B <b> 2 so as to sandwich the window foil 33 between the window frame member 31, the duct portion 5 communicates with the nozzle 322 via the vent hole 51. Then, the cooling gas can be supplied from the duct portion 5 to the nozzle 322, and the gas can be blown from the nozzle 322 to the window foil 33. In the illustrated example, the air holes 51 are dispersedly formed in a row, but the air holes 51 may be continuously communicated with the nozzle 322 in a slit shape.

  As shown in FIG. 1, an airtight seal member S is disposed between the window frame member 31 and the window foil pressing member 32 as in the case of the device A ′. Further, a coolant passage 324 is also formed in the window foil pressing member 32.

  According to the electron beam irradiation apparatus A described above, the electrons e emitted from the filament 11 are extracted by the extraction electrode 12, accelerated by the acceleration electrode plate 14, and directed from the electron beam source 10 to the irradiation window portion 30, and the window. The light passes through the foil 33 and is irradiated to the irradiation object W arranged below the window 30.

  During the electron beam irradiation process, a coolant is supplied to each coolant passage 315 of the window frame member 31 by a coolant supply means (not shown), thereby increasing the temperature of the window frame member 31 that touches the electron beam and the window. The temperature rise of the portion of the window foil 33 and the portion of the seal member S that are in contact with the frame member 31 is suppressed. In addition, the coolant flows through each coolant passage 324 of each window foil pressing member 32, whereby the temperature of the member 32 and the portion of the window foil 33 and the portion of the seal member S that are in contact with the member 32 are increased. Is also suppressed.

  Further, a cooling gas (for example, nitrogen gas) is supplied to each duct portion 5 from a cooling gas supply means (not shown), and from each duct portion 5 to the nozzle 322 of the window foil pressing member 32 that communicates therewith. In the same manner as in the case of the apparatus A ′, the nozzle 322 blows onto the portion of the window foil 33 irradiated with the electron beam. Thus, the window foil 33 to be heated by electron beam irradiation is cooled by electron beam irradiation.

As the window foil 33 is cooled in this manner, the window foil 33 is prevented from being damaged due to the temperature rise.
In addition, since the members 31 and 32, and thus the window foil portion and the portion of the seal member S that are in contact with the member are cooled by the coolant, the airtightness of the vacuum chamber 20 is also reduced due to the expansion of the members. It is suppressed.

  According to the electron beam irradiation apparatus A described above, the duct portion 5 for supplying the cooling gas to the nozzle 322 provided in the window foil pressing member 32 is provided with a window frame member and a window foil pressing member as in the conventional case. Since it is integrally formed inside the window frame member 21 so as to communicate with the nozzle and supply the cooling gas to the nozzle, it is not attached to the outside, and has the following advantages. is there.

  The number of parts that must be handled when the electron beam irradiation window 30 is provided in the vacuum chamber 20 is smaller than in the past, and the work of assembling and attaching to the vacuum chamber 20 can be performed more easily and inexpensively than in the past. As a result, the electron beam irradiation apparatus A can be provided at a lower cost.

  Conventionally, since the duct arranged outside the window frame member is not required, the width dimension L (see FIG. 1) of the electron beam irradiation window section 30 in the direction crossing the vacuum chamber longitudinal direction is reduced accordingly. In addition, the window foil pressing member 32 can be reduced so as not to interfere with the cooling gas supply to the nozzle 322, and the electron beam irradiation apparatus A can be made compact accordingly.

  For example, when a plurality of window frame members 31 ′ are employed as in the conventional apparatus shown in FIG. 5, the duct 4 must be disposed between adjacent window frame members 31 ′. Therefore, the adjacent window frame members can be integrated and made compact, and thereby, the structure of the opening frame portion 21 to which the electron beam irradiation window portion 30 of the vacuum chamber 20 is attached and the electron beam irradiation window portion 30 can be simplified. The window frame member 31 to be configured can be made compact, and the electron beam irradiation apparatus A can be provided at a low cost.

  Thus, it is possible to reduce the size and price as compared with the conventional electron beam irradiation apparatus of the same type.

  The electron beam irradiation apparatus according to the present invention can be used for crosslinking of a polymer material such as a wire coating material, curing of a coating film, sterilization of a medical product, and the like.

It is sectional drawing of one example of the electron beam irradiation apparatus which concerns on this invention. It is the figure which looked at the opening frame part of the vacuum chamber in the apparatus of FIG. 1 from the downward direction. It is the figure which looked at the window frame member of the electron beam irradiation window part in the apparatus of FIG. 1 from the downward direction. It is the figure which looked at the window foil pressing member of the electron beam irradiation window part in the apparatus of FIG. 1 from the downward direction. It is sectional drawing of the prior art example of an electron beam irradiation apparatus. It is the figure which looked at the opening frame part of the vacuum chamber in the apparatus of FIG. 5 from the downward direction. It is the figure which looked at the window frame member of the electron beam irradiation window part in the apparatus of FIG. 5 from the downward direction. It is the figure which looked at the window foil pressing member of the electron beam irradiation window part in the apparatus of FIG. 5 from the downward direction.

Explanation of symbols

A, A ′ Electron beam irradiation apparatus 10 Electron beam source 11 Filament 12 Electron extraction electrode 13 Shield electrode 131 Tunnel-like portion 132 of electrode 13 Shield electrode opening 14 Electron acceleration electrode plate 20 Vacuum chamber 21, 21 ′ Opening frame of vacuum chamber Part 210 Opening part 211 ′ Support part 212 in frame part 21 ′ Opening parts 213, 214 Screw holes B1, B2, B3 Bolts 31, 31 ′ Window frame member 310 Central part 311 Opening dividing member 312 for obtaining opening part 312 Opening part 313 Crosspiece member 314 Bolt passage hole 315 Coolant passage 316 Screw hole 32 Window foil pressing member 321 Opening portion 322 Nozzle 323 Bolt passage hole 324 Coolant passage 33 Window foil 4 Duct 5 Duct portion 51 Ventilation hole S Airtight seal members L and L ′ Width dimension of electron beam irradiation window

Claims (1)

  A vacuum chamber; and an electron beam source installed in the vacuum chamber, the vacuum chamber transmitting an electron beam emitted from the electron beam source to irradiate an irradiation object outside the vacuum chamber An electron beam irradiation window part is provided, and the electron beam irradiation window part is attached to the electron beam irradiation opening part of the vacuum chamber, and has a window frame member having an electron beam transmission opening part, and the window frame member A window foil member capable of transmitting an electron beam covering the electron beam transmitting opening, and a window foil pressing member attached to the window frame member with the window foil member sandwiched between the window frame member. The window foil pressing member is an electron beam irradiation device having a nozzle for blowing a cooling gas to the window foil member, and is communicated with the nozzle inside the window frame member. The duct part for supplying the cooling gas to the Electron beam irradiation apparatus according to.