JP2005315583A - Sensor device for ultrasonic inspection - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sensor device for ultrasonic inspection capable of detecting a reflected echo of an ultrasonic wave accurately and efficiently by transmitting/receiving the ultrasonic wave from/by an ultrasonic sensor smoothly, and having improved detection performance and accuracy. <P>SOLUTION: This sensor device for ultrasonic inspection is equipped with the ultrasonic sensor 11 wherein a plurality of piezoelectric elements 22 for transmitting/receiving the ultrasonic wave are arrayed matrically or in an array shape, and a shoe means 21 for holding a liquid medium provided on the sensor surface side of the ultrasonic sensor 11. The shoe means 21 has a cylindrical attachment 40 bonded with a screw to the ultrasonic sensor 11, a holding cap 43 fastened together with the attachment 40 so as to hold a thin film 44 covering the tip aperture of the attachment 40, and a sound propagation liquid medium (water) 47 filled in the attachment 40. The thin film 44 is constituted with flexibility capable of being swelled from an opening part 45 of the holding cap 43. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an ultrasonic flaw detection technique that performs nondestructive inspection of the internal structure of an inspection object, the state of internal defects, and the state of joints with ultrasonic waves, and in particular, internal defects of inspection objects and weld defects of joints. The present invention relates to an ultrasonic inspection sensor device used in an ultrasonic imaging apparatus that visualizes a state three-dimensionally.

  There is an ultrasonic flaw detection technique as one of the techniques for nondestructive inspection of the welded state and the state of internal defects of the joints between the flat structural members that are inspection objects.

  As an ultrasonic inspection apparatus employing this ultrasonic flaw detection technology, there are those described in Japanese Patent Application Laid-Open No. 2003-149213 (Patent Document 1) and Japanese Patent Application Laid-Open No. 2004-53360 (Patent Document 2).

  These ultrasonic inspection apparatuses use an ultrasonic transducer as an ultrasonic sensor in which a large number of piezoelectric elements are arranged in a matrix for transmission / reception of ultrasonic waves, and are oscillated from the piezoelectric elements of this ultrasonic transducer. Ultrasound is sent inside the inspection object, the reflected echo reflected from the inside of the inspection object is received by the ultrasonic transducer, and this received echo signal is sent to the signal processing part via the signal detection circuit, and this signal processing part Parallel calculation processing is performed, and the welded portion of the inspection object is imaged. The ultrasonic image of the welded portion that has been imaged is displayed on a display device, and by visually observing the ultrasonic image, the state of the welded portion and the state of the weld defect can be inspected nondestructively.

  In a conventional ultrasonic inspection apparatus, an ultrasonic sensor in which piezoelectric elements that transmit and receive ultrasonic waves are arranged in a matrix or in an array of rows is used as an ultrasonic transducer. A shoe material, which is an acoustic propagation medium, is attached by bolting, and the shoe material is brought into close contact with the inspection object to transmit ultrasonic waves to the inspection object.

  The ultrasonic waves transmitted into the inspection object are partially reflected by internal defects and boundary surfaces of the inspection object to be reflected echoes, which are received by the ultrasonic sensor, and each piezoelectric sensor of the ultrasonic sensor An electric signal generated by vibrating the element is processed to form a three-dimensional image inside the inspection object.

In addition, if an air layer is present between the ultrasonic sensor and the inspection object, the ultrasonic wave will not propagate, so the ultrasonic acoustic wave between the ultrasonic sensor and the shoe material and between the shoe material and the inspection object. Apply or interpose a matching coupling agent. This coupling agent is a gel-like liquid or solid with low volatility. Bubbles are likely to be generated in the coated or intervening portion of the coupling agent due to a temperature difference or the like, and it is necessary to confirm the presence or absence of bubbles before the inspection by the ultrasonic inspection apparatus. When air bubbles are found, the shoe material is removed and the coupling is reapplied.
JP 2003-149213 A JP 2004-53360 A

  In conventional ultrasonic inspection equipment, bubbles are likely to enter between the ultrasonic sensor and the shoe material. When bubbles are generated, the fastening bolts are removed and the shoe material is removed from the ultrasonic sensor each time, and the coupling is applied. I had to fix it.

  Further, when the surface of the inspection object has irregularities, it is difficult to close the gap with only the coupling and to bring the shoe material and the inspection object into close contact with each other.

  In an ultrasonic inspection device, if bubbles exist between the ultrasonic sensor and the inspection object, or if a gap occurs, the ultrasonic wave from the ultrasonic sensor is smoothly incident on the inspection object or a reflected echo is picked up. There is a problem that ultrasonic waves and reflected echoes are not accurately propagated, detection performance is deteriorated, and three-dimensional imaging processing inside the inspection object cannot be performed accurately and smoothly.

  The present invention has been made in consideration of the above-mentioned circumstances, and propagates ultrasonic waves and reflected echoes accurately and smoothly to improve the detection performance, and the three-dimensional imaging processing inside the inspection object is accurately and accurately performed. An object of the present invention is to provide an ultrasonic inspection sensor device that can be efficiently performed.

  Another object of the present invention is to provide an ultrasonic inspection sensor device in which the shoe means can be easily and easily detached from the ultrasonic sensor, the working time can be shortened, and ultrasonic inspection can be performed quickly and efficiently. In offer.

  In order to solve the above-described problems, an ultrasonic inspection sensor device according to the present invention includes an ultrasonic sensor in which a plurality of piezoelectric elements that transmit and receive ultrasonic waves are arranged in a matrix or an array. An ultrasonic sensor, and a liquid medium holding shoe means provided on the sensor surface side of the ultrasonic sensor. The shoe means includes a cylindrical attachment detachably provided to the ultrasonic sensor by screw connection, A holding cap that fastens the thin film covering the opening of the attachment together with the attachment; and an acoustic propagation liquid medium filled in the cylindrical attachment, and the thin film can bulge from the opening of the holding cap. The structure has flexibility.

  Further, in order to solve the above-described problems, the ultrasonic inspection sensor device according to the present invention includes a plurality of piezoelectric elements that transmit and receive ultrasonic waves arranged in a matrix or an array. Ultrasonic sensor, flexible shoe means provided on the sensor surface side of the ultrasonic sensor, and sensor position adjusting means which includes the flexible shoe means and holds the ultrasonic sensor movably forward and backward from the inspection object It is equipped with.

  Furthermore, in order to solve the above-described problems, the ultrasonic inspection sensor device according to the present invention includes a plurality of piezoelectric elements that transmit and receive ultrasonic waves arranged in a matrix or an array. An ultrasonic sensor, a liquid medium holding shoe means provided on the sensor surface side of the ultrasonic sensor, and a sensor holder including a medium storage tank capable of supplying an ultrasonic propagation liquid medium to the shoe means. It is a thing.

  Furthermore, in order to solve the above-described problems, an ultrasonic inspection sensor device according to the present invention includes an ultrasonic sensor in which a plurality of piezoelectric elements that transmit and receive ultrasonic waves are aligned, as described in claim 8. A tank-type shoe means provided on the sensor surface side of the ultrasonic sensor, wherein the shoe means covers the tank holding the ultrasonic sensor at the top of the tank and the bottom opening of the tank in a liquid-tight manner. A storage tank for the ultrasonic propagation liquid medium is constituted by the inspection object to be installed.

  Further, in order to solve the above-described problem, the ultrasonic inspection sensor device according to the present invention includes a plurality of piezoelectric elements that transmit and receive ultrasonic waves arranged in a matrix or an array. An ultrasonic sensor, a shoe means provided on the sensor surface side of the ultrasonic sensor, and a one-touch type attaching means capable of detachably attaching the shoe means to the ultrasonic sensor with one touch. The shoe means is held in close contact with the ultrasonic sensor by the attaching means.

  The ultrasonic inspection sensor device according to the present invention can detect ultrasonic reflection echoes accurately and efficiently by transmitting and receiving ultrasonic waves smoothly and smoothly from the ultrasonic sensor, and can improve detection performance and accuracy. By accurately detecting the electrical signal of this reflected echo, the inside of the inspection object can be processed with high resolution and high precision 3D ultrasonic imaging, and the ultrasonic inspection by the non-destructive inside of the inspection object can be accurately performed. Accurate and efficient.

  Further, according to this ultrasonic inspection sensor device, the shoe means of the ultrasonic sensor can be easily and easily attached and detached, and the working time can be shortened. In addition, the ultrasonic inspection can be performed quickly and efficiently.

  An embodiment of a sensor device for ultrasonic inspection according to the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a configuration diagram showing an embodiment of a three-dimensional ultrasonic inspection apparatus provided with the ultrasonic inspection sensor device according to the present invention.

  The three-dimensional ultrasonic inspection apparatus 10 functions as an ultrasonic camera that can finely image the internal structure and defect shape of an inspection object. The three-dimensional ultrasonic inspection apparatus 10 includes an ultrasonic transducer 11 that mutually converts ultrasonic vibrations and electrical signals and transmits / receives ultrasonic waves of a required frequency, and a signal generator that generates a drive signal that drives the ultrasonic transducer 11. 12, a drive signal from the signal generation unit 12, a drive element selection unit 13 that selectively drives the piezoelectric elements of the ultrasonic transducer 11, and an ultrasonic wave oscillated from the ultrasonic transducer 11, the inspection object 14 And a signal detection circuit 16 that detects the reflected echo signal from the joint 15 via the ultrasonic transducer 11 and the reflected echo detected by the signal detection circuit 16. A signal processing unit 17 for generating a three-dimensional (3D) ultrasonic image by parallel processing of electrical signals, and processing by the signal processing unit 17 Display processing for processing data of the ultrasonic flaw detection image obtained to obtain a high-resolution three-dimensional ultrasonic flaw detection image, automatically determining the state of the joint 15 and the state of the welding defect 16 with high accuracy, and displaying the determination result And a processing device 18.

  The three-dimensional ultrasonic inspection apparatus 10 can quickly inspect the internal structure of the inspection object 14 as a high-sensitivity, high-resolution three-dimensional ultrasonic image, and can perform a high-speed inspection of 1 to several tens of seconds per image. The ultrasonic inspection sensor device 20 is provided. This ultrasonic inspection sensor device 20 includes an ultrasonic transducer 11 as an ultrasonic sensor for transmitting and receiving ultrasonic waves, and an acoustic wave as a liquid medium holding shoe means on a transmitting and receiving surface which is a sensor surface of the ultrasonic transducer 11. The propagation medium 21 is brought into close contact.

  This three-dimensional ultrasonic inspection apparatus 10 can be applied to the inspection state of welded parts in the automobile industry, aviation industry, and railway industry, flaw detection for the presence or absence of weld defects, and state observation of welded parts in the plant industry and shipbuilding industry.

  The ultrasonic transducer 11 is configured as an ultrasonic sensor including a matrix sensor in which a large number of piezoelectric elements 22 such as piezoelectric vibrators are arranged in a matrix of m rows and n columns. By using an ultrasonic camera (three-dimensional ultrasonic inspection apparatus 10) equipped with this ultrasonic sensor 11, ultrasonic waveforms of thousands to tens of thousands of reflected echoes are instantaneously collected, and image inspection processing of the inspection object 14 is performed. The internal structure, the state of the joint 15 and the presence / absence or state of a welding defect can be imaged at high speed.

  A drive signal generated by the signal generator 12 is selected and applied to each piezoelectric element 22 of the ultrasonic transducer 11 by the drive element selector 13. The driving order of each piezoelectric element 22 is determined one by one or a plurality by the selection of the driving element selection unit 13, and each piezoelectric element 22 is driven at a required driving timing. Instead of being arranged in a matrix, the piezoelectric elements 22 may be arranged in a line or a cross line to constitute an array sensor. The ultrasonic sensor constituting the ultrasonic transducer 11 may be a matrix sensor or an array sensor.

  The ultrasonic transducer 11 has a transmitting / receiving surface which is an ultrasonic sensor surface, specifically, a liquid or solid acoustic propagation medium 21 in close contact as a shoe material on the inspection object 14 side. Between the acoustic propagation medium 21 and the inspection object 14, a coupling 24 that achieves acoustic matching of ultrasonic waves is provided as necessary. The coupling 24 is formed of a gel-like liquid or solid with low volatility.

  The acoustic propagation medium 21 as a shoe material has a box-like shape as a whole, and the opening area thereof is formed according to the size of the joint 15 that is the inspection region (target region) of the inspection object 14, and the acoustic propagation. The height of the medium 21 is determined by the oscillation angle (spreading angle) of the ultrasonic wave oscillated from the piezoelectric element 22.

  The inspection object 14 is, for example, two plate-like structures 14a and 14b joined by spot welding, and the spot welded portions of the plate-like structures 14a and 14b are formed by the three-dimensional ultrasonic inspection apparatus 10. Internally inspected non-destructively using ultrasound. The inspection object 14 may be one in which three or more plate-like structures are overlapped and welded. The inspection object 14 may be a metal material, a resin material, or a subject.

  When the two plate-like structures 14a and 14b, which are the inspection object 14, are overlapped and joined by spot welding, the plate-like structure 14 is formed on the outer surface of the joint 15 with a recess 25 as a dent portion by a welding electrode. Is formed, and the thickness T of the joint portion 15 is smaller than the non-joint portion 26 around the joint portion 15 by the formation of the recess 25.

  Reference numeral 27 denotes a welded solidified portion of the joint portion 15, and reference numeral 28 denotes a welding defect such as a blow hole generated in the joint portion 15.

  On the other hand, the signal generator 12 that applies a drive signal to the ultrasonic transducer 11 generates a pulsed or continuous drive signal by applying an external voltage to drive the piezoelectric body of the piezoelectric element 22 to generate an ultrasonic wave. Let When the piezoelectric transducer 22mn in the m-th row and the n-th column to be driven by the drive element selection unit 13 is selected from the generated drive signal, the drive signal is applied to the selected piezoelectric transducer 22mn at a required timing. The drive element selection unit 13 sequentially selects one or more piezoelectric vibrators 22mn to be driven at a required timing, and when a drive signal from the signal generation unit 12 is applied to the selected piezoelectric vibrators 22mn. The piezoelectric vibrator 22mn is driven to oscillate the ultrasonic wave U.

  The ultrasonic waves sequentially oscillated from the piezoelectric elements 22 of the ultrasonic transducer 11 pass through the acoustic propagation medium 21 as a shoe material, enter the inside of the inspection object 14 through the coupling 24, and inspect the inspection object 14. The region 15 (the non-joined portion 26, the weld solidified portion 27, the weld defect portion 28 such as a blowhole, and the bottom surface 29) is reached and reflected by each boundary layer.

  The reflected echoes of the ultrasonic waves reflected from the boundary layers of the bottom surface 29, the non-joint portion 26, the weld solidification portion 27, and the weld defect portion 28 of the inspection object 14 are transmitted from the inspection object 14 through the acoustic propagation medium 23 to the ultrasonic sensor. Each piezoelectric element 22 of the ultrasonic transducer 11 is received with a time difference, and each piezoelectric element 22 is vibrated and converted into an electric signal. The electrical signal of the reflected echo is then input to the signal detection circuit 16 where the electrical signal of the reflected echo is detected for each piezoelectric element 22.

  When a driving signal is applied to the piezoelectric element 22 mn of the m-th row and the n-th column selected by the driving element selection unit 13 among the piezoelectric elements 22 of the ultrasonic transducer 11, the three-dimensional ultrasonic inspection apparatus 10 receives this piezoelectric element. The element 22mn operates to oscillate the ultrasonic wave U. The oscillated ultrasonic wave U is applied to the inspection region which is the joint 15 of the inspection object 14 through the acoustic propagation medium 21 and a coupling 24 provided as necessary. A part of the ultrasonic wave U irradiated to the inspection region 15 of the inspection object 14 is reflected from the density boundary layer of the inspection region 15 to be a reflection echo. The reflection echo is transmitted through the coupling 24 and the acoustic propagation medium 21. Then, it returns to the matrix sensor (ultrasonic transducer 11) and is received by each piezoelectric element 22 with a time difference. Due to the piezoelectric conversion by each piezoelectric element 22, the reflected echo is converted into an electric signal and sent to the signal detection circuit 16 for detection.

  The ultrasonic transducer 11 causes the piezoelectric elements 22 to sequentially act on the piezoelectric elements 22 by the drive signal selection unit 13, so that the piezoelectric elements 22 are sequentially driven at a required timing and are oscillated from the piezoelectric elements 22. The reflected echoes of the sound waves are received two-dimensionally by the matrix sensor 11 that is an ultrasonic sensor. In the ultrasonic sensor 11, assuming that the m rows and n columns of the piezoelectric elements 22 are, for example, 10 × 10, 100 piezoelectric elements 22 are arranged in a matrix, and each piezoelectric element 22 mn is moved by the drive element selection unit 13. Driven sequentially. When a drive signal is sequentially applied to each piezoelectric element 22, ultrasonic waves U are sequentially oscillated from each piezoelectric element 22 at the drive timing. The reflected echoes of the ultrasonic waves sequentially oscillated from the piezoelectric elements 22 are sequentially received by the matrix sensor 11 that is an ultrasonic sensor, and the electrical signals of the reflected echoes that are the received signals are sent to the signal detection circuit 16 each time. ing.

  For this reason, the signal detection circuit 16 receives two-dimensionally the reflected echoes of the ultrasonic waves oscillated from the individual piezoelectric elements 22 in a matrix arrangement by the operation of the ultrasonic transducer 11. The matrix sensor 11 receives reflected echoes for 20 mn of individual ultrasonic transducers that oscillate ultrasonic waves, and sends them to the signal detection circuit 16 as electrical signals of the reflected echoes. The signal processing unit 17 passes through this signal detection circuit 16. Sent to.

  The signal detection circuit 16 detects an electrical signal of a reflected echo generated by the matrix sensor 11. Among the detected electrical signals, a plurality of necessary electrical signals are led to amplifiers 31a, 31b,..., 31i in the signal processing unit 17, respectively.

  The amplifiers 31a, 31b,..., 31i amplify the guided reflected echo electrical signals to a decibel (dB) value capable of signal processing by about 10,000 times, respectively, and A / D converters 32a, 32b, ..., 32i, respectively. The A / D converters 32a, 32b,..., 32i perform A / D conversion on the derived electrical signals and guide them to the parallel processors 33a, 33b,.

  The parallel processor 33 in the signal processing unit 17 performs arithmetic processing on the digital signals derived from the A / D converters 32a, 32b,..., 32i in parallel and quickly, and each of them is applied to the inspection area (imaging area). The reflection intensity from each sectioned mesh is specified. The identified reflection intensity for each mesh is integrated by the three-dimensional image generation unit 34 that is an integrated processor to become three-dimensional imaging information (data), and is sent to the display processing device 18. The display processing device 18 processes the derived three-dimensional imaging data in the intermediate data processing unit 35 and the bottom surface data processing unit 36, and determines whether the inspection area (measurement unit) 15 of the inspection object 14 is good or bad. On the other hand, the quality determination result and the three-dimensional ultrasonic image from the three-dimensional image generation unit 35 are displayed on the display unit 38 as an ultrasonic flaw detection image.

  The parallel processor 33 and the three-dimensional (3D) image generation unit 34 of the signal processing unit 17 process the digital signal derived from the A / D converters 32a, 32b,. The three-dimensional ultrasonic imaging data I for visualizing the state of the 14 joint portions 15 is generated. Three-dimensional imaging data is generated corresponding to each mesh in the three-dimensional imaging region set in the inspection object 14 by aperture synthesis processing from the electrical signal of the reflected echo detected by the signal detection circuit 16. .

  The three-dimensional image generation unit 34 has a direction in the front (XY plane) when viewed from the ultrasonic transducer 11 that is an ultrasonic sensor, and two side surfaces (YZ plane) orthogonal to the front, (ZX The three-dimensional imaging data I is seen through from a total of three directions perpendicular to the plane), and the three-dimensional imaging data I in each of the three directions has the highest value among the imaging data overlapping in the perspective direction. By projecting large data onto a plane, three plane (two-dimensional) images are generated through each direction. The three-dimensional imaging data I generated by the three-dimensional image generation unit 34 is output to the display processing device 18.

  The intermediate data processing unit 35 of the display processing device 18 extracts a transmission front image of the intermediate layer area in the vicinity of the joint 15 of the two plate-like structures 14a and 14b from the intensity distribution of the three-dimensional imaging data I and joins them. The joining state of the part 15 is detected, and the bottom part data processing part 36 extracts the transmission front image of the bottom part 29 from the intensity distribution of the three-dimensional imaging data I to detect the size of the melt-solidified part 27, and the judging part 37 compares and determines the results obtained from the intermediate data processing unit 35 and the bottom surface data processing unit 36. The display unit 38 displays the comparison determination results obtained from the intermediate data processing unit 35, the bottom surface data processing unit 36, and the determination unit 37 and the three-dimensional imaging data I from the three-dimensional image generation unit 34.

  The intermediate data processing unit 35 of the display processing device 18 extracts the three-dimensional imaging data I of the intermediate joint that is the intermediate layer of the joint 15 from the three-dimensional imaging data I generated from the signal processing unit 17, A transmission plane image of the intermediate joint surface is generated, and the plate thickness t of the plate-like structure 14a is measured.

  Further, the intermediate part data processing unit 35 measures the center position of the intermediate joint part, the size and position of the joint part 15 and the size and position of the welding defect 28 such as a blow hole from the generated transmission plane image of the intermediate joint surface. .

  On the other hand, the bottom surface data processing unit 36 of the display processing device 18 generates a transmission plane image of the bottom surface 29 of the inspection object 14 from the three-dimensional imaging data I generated from the signal processing unit 17 and the thickness of the joint 15. Measure T.

  Further, the bottom surface data processing unit 36 measures the size and position of the melted and solidified portion 27 from the transmission plane image of the bottom surface 29 of the inspection object 14 and the center position of the intermediate joint captured from the intermediate data processing unit 35. .

  Further, the determination unit 37 of the display processing device 18 calculates the minimum size of the melted and solidified part 27 required from the plate thickness t of the plate-like structure 14a taken in from the intermediate part data processing unit 35, and this melted and solidified part. The determination criterion for obtaining the portion 27 is set, and comparison with the determination reference value in which the size and position of the melted and solidified portion 27 taken in from the bottom surface data processing portion 36 is compared and collated to perform pass / fail determination.

  The display unit 38 is a transmission plane image of the intermediate joint surface used in the intermediate part data processing unit 35, the center position of the intermediate joint part measured from now on, the size and position of the joint part 15, and the size of the welding defect 28 such as a blow hole. The position, the transmission plane image of the bottom surface 29 used in the bottom surface data processing unit 36, the size and position of the measured melted and solidified portion, and the determination reference value set by the determination unit 37 and the quality determination result are displayed.

  Incidentally, the ultrasonic inspection sensor device 20 used in the three-dimensional ultrasonic inspection device 10 is configured as shown in the first embodiment of FIG.

  The ultrasonic inspection sensor device 20 is provided on the ultrasonic sensor 11 in which a large number of piezoelectric elements 22 that transmit and receive ultrasonic waves are arranged and arranged on the ultrasonic wave transmitting / receiving surface side that is the sensor surface of the ultrasonic sensor 11. Liquid medium holding shoe means 21. The ultrasonic sensor 11 constitutes an ultrasonic transducer. The ultrasonic sensor 11 may be a matrix sensor in which a large number of piezoelectric elements 22 are arranged in m rows and n columns, or an array sensor in which a plurality of piezoelectric elements 22 are arranged in a row or in a cross shape.

  The external appearance of the ultrasonic sensor 11 is formed in a columnar shape or a cylindrical shape, and a cylindrical attachment 40 constituting the liquid medium holding shoe means 21 is detachably screwed to the ultrasonic sensor 11 and integrated into an O-ring. It is kept liquid-tight by the liquid-tight means 41 such as. Although FIG. 2 shows an example in which the attachment 40 is externally fitted to the ultrasonic sensor 11, the attachment 40 may be fitted to the ultrasonic sensor 11 from the inside.

  A holding cap 43 is detachably provided on the distal end side of the cylindrical attachment 40 by screw connection, and the thin film 44 covering the distal end opening of the attachment 40 is liquid-tightly held by the holding cap 43. The holding cap 43 is formed with an opening 45 for exposing the thin film 44 at the top of the cap. The thin film 44 is sandwiched and held between the attachment 40 and the holding cap 43. By tightening the holding cap 43, the thin film 44 is also tightened, and by tightening the holding cap 43, the thin film 44 is also fastened together with the attachment 40.

  In order to liquid-tightly attach the thin film 44 to the attachment 40, a liquid-tight means 45 such as an O-ring is interposed between the attachment 40 and the holding cap 43. Various modifications of the mounting position of the liquid-tight means 45 are conceivable. The attachment 40 to which the thin film 44 is attached is filled with water 47 as an ultrasonic propagation liquid medium, and the liquid medium holding shoe means 21 is configured by being filled.

  The thin film 44 of the shoe means 21 is manufactured as a soft medium with a rubber material or a resin material, and is formed to have a film thickness of ¼ or less of the ultrasonic wavelength λ propagating in the thin film 44, for example, about several μm to several tens μm. Is done. By setting the film thickness of the thin film 44 to ¼ wavelength λ or less, for example, several tens of μm or less, it is possible to prevent detection performance deterioration due to waveform deformation, scattering, and multiple reflection of ultrasonic waves transmitted through the thin film 44.

  Then, the ultrasonic sensor 11 is provided on one side of the attachment 40, the thin film 44 is provided in a liquid-tight manner on the other side, and the inside of the attachment 40 is filled with water, whereby the ultrasonic inspection sensor device 20 is configured.

  The ultrasonic inspection sensor device 20 is configured by attaching the attachment 40 to the ultrasonic sensor 11 by screw connection, and providing the attachment 40 with a holding cap 43 that holds and holds the thin film 44, and water 47 is contained in the attachment 40. Before filling, the ultrasonic wave emitting / receiving surface of the ultrasonic sensor 11 and the thin film 44 are kept parallel.

  The procedure for assembling the ultrasonic inspection sensor device 20 is to lightly screw the attachment 40 into the ultrasonic sensor 11 and fill the attachment 40 with water 47 with the ultrasonic sensor 11 facing downward.

  Next, the thin film 44 is covered so as to cover the opening of the tip of the attachment 40, and the holding cap 43 is placed on the attachment 40 from above and fixed to the attachment 40 by screwing. By screwing the holding cap 43, the thin film 44 is sandwiched between the holding cap 43 and the attachment 40 in a liquid-tight manner and fastened together.

  Finally, the attachment 40 is screwed into the ultrasonic sensor 11 with the thin film 44 held between the holding caps 43. Due to the screwing of the attachment 40, the water pressure in the attachment 40 increases, and the thin film 44 swells so as to swell from the opening 45 of the holding cap 43.

  Due to the bulging action of the thin film 44, the surface shape of the inspection object 14 is not completely flat, and even if a curved surface such as an uneven surface exists, the thin film 44 follows the surface shape of the inspection object 14, so that the inspection object 14 The thin film 44 is effectively and effectively adhered to the surface of the object 14.

  For this reason, in the ultrasonic inspection sensor device 20, the water 47 is filled between the ultrasonic sensor 11 and the thin film 44, thereby eliminating the need for a conventional shoe material or coupling agent. Even when the surface of the inspection region (ultrasonic incident portion) of the inspection object 14 is not a perfect plane, image processing using ultrasonic waves is possible.

  In the case where there are irregularities on the surface of the inspection area of the inspection object 14, a low-volatile gel coupling agent may be applied between the inspection object 14 and the thin film 44 of the shoe means 21. .

  Reference numeral 48 denotes an electric cable or a signal cable connected to the ultrasonic sensor 11, which transmits a drive signal to each piezoelectric element 22 of the ultrasonic sensor 11 or receives an electric signal of a reflected echo received by the ultrasonic sensor 11. It is sent to the detection circuit.

  FIG. 3 shows a second embodiment of the ultrasonic inspection sensor device provided in the three-dimensional ultrasonic inspection device.

  In the description of the ultrasonic inspection sensor device 20A shown in FIG. 3, the same components as those of the ultrasonic inspection sensor device 20 of the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  The ultrasonic inspection sensor device 20A shown in the second embodiment includes an ultrasonic sensor 11 in which a large number of piezoelectric elements 22 are arranged in a matrix or array, and an ultrasonic transmission / reception surface of the ultrasonic sensor 11. A flexible shoe means 50 closely attached to the side, and a sensor position adjusting means 51 as an elevating means for finely adjusting the ultrasonic sensor 11 so as to advance and retreat with respect to the inspection object 14 are provided.

  The ultrasonic sensor 11 is composed of a matrix sensor or an array sensor, like the ultrasonic transducer shown in FIG.

  The flexible shoe means 50 provided on the ultrasonic wave transmitting / receiving surface of the ultrasonic sensor 11 is composed of a soft shoe material 52. On the surface of the soft shoe material 52, a low-volatility gel-like coupling agent is applied between the ultrasonic sensor 11 and the inspection object 14.

  The soft shoe material 51 is formed of a soft resin material such as silicon rubber or polystyrene. When the flexible shoe material 50 is composed of the soft shoe member 52, the soft shoe member 52 can be directly fixed with a bolt or the like. In this ultrasonic inspection sensor device 20A, the flexible shoe means 50 is contained in the sensor position adjusting means 51, which is a holding jig, so that the flexible shoe means 50 is held in an immobile state with the shoe shape kept constant. Can do.

  The sensor position adjusting means 51 for moving the ultrasonic sensor 11 back and forth with respect to the inspection object 14 includes a frame-shaped holding frame 53 that holds the ultrasonic sensor 11 from the outside, and bosses 54 near the four corners of the holding frame 53. And a leg bolt 55 as a support adjusting bolt screwed together. Three or more, for example, four leg bolts 55 are provided on the holding frame 53.

  Then, by rotating the bolt head 56 around the bolt axis while pressing the leg bolt 55 against the inspection object 14, the holding frame 53 is moved back and forth (lifted / lowered) with respect to the inspection object 14 so as to be finely adjusted. Can be kept in a state. The leg bolt 55 can be automatically operated by connecting the bolt head 56 to a drive motor (not shown) and controlling the drive of each drive motor individually or entirely by a controller (not shown).

  The ultrasonic inspection sensor device 20A rotates the leg bolt 55 of the sensor position adjusting means 51 around the bolt axis while pressing the leg bolt 55 against the inspection target 14, thereby allowing the degree of parallelism between the ultrasonic sensor 11 and the inspection target 14 to be increased. The distance (interval) can be finely adjusted, and the adhesion and adhesion area between the inspection object 14 and the ultrasonic sensor 11 and the flexible shoe member 52 can be adjusted.

  The soft shoe means 50 may be a flexible shoe member in which a liquid medium such as water is filled between thin films made of rubber or resin instead of the soft shoe member 52 made of silicon rubber or the like.

  The soft shoe member 52 is fixed to be sandwiched between three or more of the sensor position adjusting means 51, for example, the four leg bolts 55, the ultrasonic sensor 11, and the inspection object 14, and unless an external force is applied. It is stably held in an immobile state. For this reason, the positional relationship between the ultrasonic sensor 11 and the inspection object 14 is constant.

  The ultrasonic inspection sensor device 20A shown in FIG. 3 uses the flexible shoe member 52 as the flexible shoe means 50 on the ultrasonic wave transmitting / receiving surface side of the ultrasonic sensor 11, so that the surface of the inspection object 14 is flat. In addition, even in the case of a curved surface, the flexible shoe member 52 can be stably adhered to the inspection object 14, and an ultrasonic layer U can be stably and smoothly applied to the inspection object 14 without forming an air layer therebetween. Can be made incident.

  FIG. 4 shows a third embodiment of the sensor device for ultrasonic inspection.

  Components having the same configurations as those of the ultrasonic inspection sensor device described in the first and second embodiments are denoted by the same reference numerals and description thereof is omitted.

  The ultrasonic inspection sensor device 20B shown in the third embodiment includes an ultrasonic sensor 11 in which a large number of piezoelectric elements 22 are arranged in a matrix or array, and an ultrasonic sensor surface of the ultrasonic sensor 11. A medium accumulation (liquid medium retention) shoe means 60 for holding water, which is an acoustic propagation medium, so as to be able to accumulate, is disposed on the acoustic wave transmitting / receiving surface, and an ultrasonic wave is disposed on the medium accumulation shoe means 60 around the ultrasonic sensor 11. And a sensor holder 62 having a water tank 61 that is a storage tank capable of supplying water as a propagating liquid medium.

  The medium storage shoe means 60 includes a sponge-like or porous flexible shoe member 63 provided on the sensor surface (ultrasonic wave transmitting / receiving surface) side of the ultrasonic sensor 11, and the shoe member 63 is an ultrasonic sensor. 11 and an inspection object 14 have a storage space large enough to store a sufficient amount of water (ultrasonic propagation liquid medium).

  For this reason, when the shoe member 63 is attached to the ultrasonic sensor 11, the shoe member 63 bulges largely toward the object 14 to be inspected from the support portion that is a connecting portion with the water tank 61.

  The shoe member 63 is supported so as to be wrapped in a torus-shaped or sleeve-shaped water tank 61. The water tank 61 as a storage tank is provided with an air vent valve 64 for venting the air in the tank at the top of the tank. In the water tank 61, a sleeve-like or skirt-like tank guide 65 covers the peripheral side surface of a sponge-like or porous-like flexible shoe member 63. The water tank 61 is configured integrally with the ultrasonic sensor 11, adjusts the excess or deficiency of water contained in the flexible shoe member 63, and is always filled with water.

  Good propagation of the ultrasonic wave U can be maintained by always filling the flexible shoe member 63 with water.

  Furthermore, the flexible sponge-like or porous shoe member 61 can be brought into close contact with the curved surface shape of the surface of the inspection object 14, and the water supplied to the flexible shoe member 61 is soft with the inspection object 14. By being filled between the shoe members 61, the transmission of ultrasonic waves into the inspection object 14 and the transmission of reflected echoes of ultrasonic waves reflected from boundary layers such as internal defects of the inspection object 14 are efficient. It can be done well.

  For this reason, the water tank 61 communicates with the top of the shoe member 62 so that the ultrasonic wave transmitting / receiving surface which is the sensor surface of the ultrasonic sensor 11 is in direct contact with the flexible shoe member 62. An attachment portion (installation portion) 66 of the sensor holder 62 holding the water tank 61 to the inspection object 14 is also formed so that the flexible shoe member 63 and the inspection object 14 are in direct contact with each other.

  The mounting portion 66 of the sensor holder 62 is formed in parallel with the ultrasonic wave transmitting / receiving surface of the ultrasonic sensor 11, and the ultrasonic wave generating / receiving surface of the ultrasonic sensor 11 and the inspection surface of the inspection object 11 are also parallel to each other. Composed.

  Next, the assembly procedure and operation of the ultrasonic inspection sensor device 20B will be described.

  In the ultrasonic inspection sensor device 20B, a flexible shoe member 63 is attached to the ultrasonic sensor 11, and before the shoe member 63 is brought into contact with the inspection object 14, water is sufficiently contained in the shoe member 63. .

  When the ultrasonic sensor 11 is placed on the inspection object 14, the flexible shoe member 63 is adapted to the surface shape of the inspection object 14, and the shoe member 63 is filled with water between the inspection object 14 and the ultrasonic sensor 11. The water in the shoe member 63 flows into the water tank 61 as much as the pressure is deformed.

  Further, since the water tank 61 is formed in a flow path structure that extends upward from the flexible shoe member 63, bubbles generated in the shoe member 63 between the ultrasonic sensor 11 and the inspection object 14 are directed toward the water tank 61. Guided.

  When the ultrasonic sensor 11 is applied to the inspection object 14, the pressure in the water tank 63 increases due to the water and bubbles that flow into the water tank 63. This increase in pressure is caused by opening the air vent valve 64. Can be suppressed. The air vent valve 64 is closed when the inside of the water tank 61 becomes equal to the atmospheric pressure.

  In this ultrasonic inspection sensor device 20B, a flexible shoe member 63 filled with water is provided between the ultrasonic sensor 11 and the inspection object 14, and the water held by the flexible shoe member 63 is filled. In this state, an ultrasonic inspection action is performed, and an internal inspection of the inspection object 14 is performed using ultrasonic waves. In this internal inspection, ultrasonic waves are oscillated from the ultrasonic sensor 11 and image processing is performed.

  When the ultrasonic inspection operation of the internal structure of the inspection region of the inspection object 14 is finished by the operation of the ultrasonic inspection sensor device 20B, the ultrasonic sensor 11 is moved to the next inspection region. When the ultrasonic sensor 11 is moved, the ultrasonic sensor 11 is moved away from the inspection object 14 and moved to the next inspection target location, and then the ultrasonic inspection sensor device 20B is pressed to perform continuous image processing. Can be done. In this ultrasonic inspection sensor device 20B, since the flexible shoe member filled with water is provided, it is not necessary to apply the coupling agent, and the coupling agent is unnecessary.

  This ultrasonic inspection sensor device 20B uses a flexible sponge-like shoe member 52 attached to the ultrasonic wave emitting / receiving surface side of the ultrasonic sensor 11, so that even when performing image processing of a plurality of inspection target portions, By simply pressing the shoe member 63 of the ultrasonic sensor 11 against the object 14 to be inspected, an ultrasonic inspection action can be performed continuously, and continuous ultrasonic image processing becomes possible.

  FIG. 5 is a configuration diagram illustrating a fourth embodiment of the ultrasonic inspection sensor device in a simplified manner.

  The ultrasonic inspection sensor device 20C shown in this embodiment includes an ultrasonic sensor 11 in which a large number of piezoelectric elements 22 are arranged in a matrix or array, and an ultrasonic wave that is a sensor surface of the ultrasonic sensor 11. And water tank type shoe means 70 provided on the transmitting and receiving surface side. The ultrasonic sensor 11 is not different from the ultrasonic sensors used in the first to fourth embodiments.

  The aquarium shoe means 70 includes a skirt-like or sleeve-like tank 71 that is liquid-tightly attached to the outer peripheral surface of the ultrasonic sensor 11, and this tank 71 is liquid-tightly attached to the measurement region of the inspection object 14. In a state where the tank 71 is liquid-tightly mounted on the inspection object 14, the tank 71 is filled with water 72 as an acoustic propagation liquid medium to form a water tank.

  In order to attach the tank 71 to the inspection object 14 in a liquid-tight manner, a liquid-tight means 73 such as an O-ring is provided on the installation surface of the tank 71. Instead of the liquid-tight means 73, a suction cup may be provided on the installation surface of the tank 71, and the tank liquid-tight structure may be configured by this suction cup. Further, in order to attach the tank 71 to the ultrasonic sensor 11 in a liquid-tight manner, a liquid-tight means 73 such as an O-ring may be similarly provided.

  The tank 71 of the water tank shoe means 70 is provided with a water supply port 74 and a drain port 75 on the side of the tank, and a circulation type liquid medium (water) supply means 76 is provided. The circulation type water supply means 76 has a closed liquid medium (water) loop 77 extending from the discharge port 75 to the inflow port 74, and a pump 79 whose operation is controlled by a control device 78 is provided in the middle of the water loop 77. It is done. Reference numeral 80 denotes a supply valve provided in the liquid medium supply pipe (water supply pipe) on the suction side of the pump 79, and reference numeral 81 denotes a drain valve provided in a drain pipe branched from the water loop 77 on the pump suction side.

  Further, an ultrasonic wave transmitting / receiving surface of the ultrasonic sensor 11 is provided at the top of the tank of the water tank shoe means 70 so as to protrude into the tank, and an air vent port 83 formed above the ultrasonic wave transmitting / receiving surface. An air vent pipe 84 is connected to the air vent pipe 84, and an air vent valve 85 is provided in the air vent pipe 84.

  In this ultrasonic inspection sensor device 20C, the ultrasonic wave transmitting / receiving surface of the ultrasonic sensor 11 and the attachment portion (installation portion) of the tank 71 to the inspection object 14 are formed in parallel. Thereby, the distance and parallelism of the front surface (ultrasonic wave transmission / reception surface) of the ultrasonic sensor 11 and the test object 14 can be maintained.

  Further, the tank 71 is entirely open, and when the tank 71 to which the ultrasonic sensor 11 is attached is installed on the inspection object 14, the water 72 in the tank 71 causes the ultrasonic waves of the inspection object 14 and the ultrasonic sensor 11 to be superposed. The water 72 in the tank 71 does not leak out from the water tank even when the water tank is filled with the liquid-tight means 73, 73.

  In this ultrasonic inspection sensor device 20C, a tank 71 constituting a water tank is attached to the ultrasonic sensor 11, and the ultrasonic sensor 11 integrated with the tank 71 is pressed against the inspection object 14, thereby Even if water is sent into the tank 71, water leakage is prevented.

  The ultrasonic sensor 11 with a tank constituting the water tank is installed in the inspection area of the inspection object 14 and pressed from above, and the air vent valve 85 of the tank 71 is opened. In this valve open state, the drain valve 81 is closed, the pump water supply valve 80 is opened, and water flowing through the water loop 77 is injected. The operation of the pump 79 is controlled by the control device 78 while injecting water guided to the water loop 77 from the pump water supply port.

  The pump 79 is operated, and it is confirmed that the space between the ultrasonic transmission / reception unit of the ultrasonic sensor 11 and the inspection target 14 is filled with water 72 and that air bubbles are eliminated from the water 77 in the tank 71. 84 is closed and the operation of the pump 79 is stopped.

  After the water tank constituted by the tank 71 and the surface of the inspection object 14 is filled with water, the ultrasonic inspection sensor device 20C is activated. By the operation of the ultrasonic inspection sensor device 20C, ultrasonic waves are transmitted and received from each piezoelectric element 22 of the ultrasonic sensor 11, the internal structure of the inspection object 14 is inspected with ultrasonic waves, and image processing is performed.

  At that time, since the ultrasonic transmission / reception part of the ultrasonic sensor 11 and the attachment part of the inspection object 14 of the tank 71 are configured in parallel, as in the case of using a shoe member having a block-like parallel flat surface, The sound wave is incident on the inspection object 14 perpendicularly.

  When the ultrasonic wave from the ultrasonic sensor 11 is incident on the inspection object 14, the reflected echo is received by the ultrasonic sensor 11, and the image processing by the ultrasonic inspection for processing the electrical signal of the reflected echo is completed, the water loop 77 is completed. The drain valve 81 and the water vent valve 85 of the water tank are opened, the pump 79 is operated, and the water is drained to drain the water in the water tank and the water loop 77.

  When the water extraction process is completed, the process moves to the next inspection target location, where an ultrasonic image is obtained by ultrasonic inspection.

  According to the ultrasonic inspection sensor device 20C, the water tank attached to the ultrasonic sensor 11 is filled with water by the operation in the pump 79, so that the conventional block-like shoe member and the coupling become unnecessary. Since the tank 71 constituting the water tank is open to the inspection object side, if the water tank is filled with the water 72, the water 72 having good ultrasonic propagation characteristics is in direct contact with the surface of the inspection area of the inspection object 14. Even when the surface of the inspection object 14 is not a perfect plane, image processing using ultrasonic waves can be performed without using a coupling agent.

  FIG. 6 is a simplified configuration diagram showing a fifth embodiment of the ultrasonic inspection sensor device.

  The ultrasonic inspection sensor device 20D shown in the fifth embodiment includes an ultrasonic sensor 11 in which a large number of piezoelectric elements 22 are arranged in a matrix or array, and an ultrasonic transmission / reception surface of the ultrasonic sensor 11. Shoe means 91 formed by a block-like shoe member 90 closely attached to the side, and one-touch type attachment means 92 for detachably attaching the shoe means 91 to the ultrasonic wave transmitting / receiving surface side of the ultrasonic sensor 11. . The shoe member 90 of the shoe means 91 is made of a material having excellent acoustic propagation characteristics such as reinforced polystyrene, epoxy resin, ceramic, etc., and is formed in a parallel plane shape in which the ultrasonic wave transmitting / receiving surface and the opposite surface are parallel to each other.

  The one-touch type attachment means 92 includes an attachment 94 that is attached to the opposite side walls of the shoe member 91 from the outside, a lock member 95 that is rotatably supported by the attachment 94, and a free end side of the lock member 95. Spring means 98 for urging the engagement hook 96 provided on the side toward the engagement hole 97 of the ultrasonic sensor 11. By engaging the engagement hook 96 of the lock member 95 with the engagement hole 97, the lock member 95 is fixed, and the shoe member 91 is attached with one touch so as to contact the ultrasonic wave transmitting / receiving surface of the ultrasonic sensor 11. Fixed. Instead of the engagement hole 97 formed in the ultrasonic sensor 11, a fixture that can engage with the engagement hook 96 may be attached to the ultrasonic sensor 11.

  The ultrasonic inspection sensor device 20D is configured such that a shoe member 90 having a block shape and a parallel plane is detachably attached to the ultrasonic sensor 11 by a one-touch attachment means 92. A certain shoe member 90 can be easily attached and detached with one touch.

  According to this ultrasonic inspection sensor device 20D, the shoe means 91 can be removed with a single touch, and bubbles should temporarily enter the sensor surface of the shoe member 90 and the ultrasonic sensor 11 and the surface of the inspection object. However, by removing the shoe means 91 from the ultrasonic sensor 11 and applying a low-volatility glue-like coupling agent to the surface of the shoe member 90 of the shoe means 91, it is easy to make adjustments so that bubbles do not enter.

The block diagram which shows one Embodiment of the three-dimensional ultrasonic inspection apparatus provided with the sensor apparatus for ultrasonic inspection which concerns on this invention. BRIEF DESCRIPTION OF THE DRAWINGS The block diagram which shows simply 1st Example of the sensor apparatus for ultrasonic inspection which concerns on this invention. The block diagram which shows simply 2nd Example of the sensor apparatus for ultrasonic inspection which concerns on this invention. The block diagram which shows simply 3rd Example of the sensor apparatus for ultrasonic inspection which concerns on this invention. The block diagram which shows simply the 4th Example of the sensor apparatus for ultrasonic inspection which concerns on this invention. The block diagram which shows simply the 5th Example of the sensor apparatus for ultrasonic inspection which concerns on this invention.

Explanation of symbols

10 3D Ultrasonic Inspection Equipment 11 Ultrasonic Transducer (Ultrasonic Sensor)
12 Signal generator 13 Drive element selector 14 Test object (subject)
15 Joint (Inspection)
16 Signal Detection Circuit 17 Signal Processing Unit 18 Display Processing Device 20, 20A, 20B, 20C, 20D Ultrasonic Inspection Sensor Device 21 Acoustic Propagation Medium (Liquid Medium Holding Shoe Means)
22 (22mn) Piezoelectric element (piezoelectric vibrator)
25 Concave portion 26 Non-joined portion 27 Weld solidified portion 28 Weld defect (blow hole)
29 Bottom surface 31a, 31b, ..., 31i Amplifier 32a, 32b, ..., 32i A / D converter 33 Parallel block 34 Three-dimensional image forming unit (overall processor)
35 Intermediate data processing unit 36 Bottom surface data processing unit 37 Pass / fail judgment unit 38 Display unit 40 Attachment 41, 46 Liquid tight means 43 Holding cap 44 Thin film 45 Opening 47 Water (acoustic propagation liquid medium)
48 Electric cable (signal cable)
50 Flexible shoe means 51 Sensor position adjusting means (lifting means)
52 Soft shoe member 53 Holding frame 54 Boss portion 55 Leg bolt (support adjustment bolt)
56 Bolt head 60 Liquid medium storage (liquid medium holding) shoe means 61 Water tank 62 Sensor holder 63 Flexible shoe member 64 Air vent valve 65 Tank guide 70 Water tank shoe means 71 Tank 72 Water 73 Liquid tightness means 74 Inlet 75 Outlet 76 Circulating water (liquid medium) supplying means 77 Water loop 78 Control device 79 Pump 83 Air venting port 84 Air venting pipe 85 Air venting valve 90 Shoe member 91 Shoe means 92 One-touch type attaching means 94 Mounting tool 95 Locking member 96 Engagement Hook 97 engagement hole (fixing tool)

Claims (10)

An ultrasonic sensor in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are arranged in a matrix or array; and
A liquid medium holding shoe means provided on the sensor surface side of the ultrasonic sensor,
The shoe means includes a cylindrical attachment that is detachably attached to the ultrasonic sensor by screw connection;
A holding cap for fastening the thin film covering the tip opening of the attachment together with the attachment;
An acoustic propagation liquid medium filled in the cylindrical attachment;
A sensor device for ultrasonic inspection, characterized in that the thin film is swellable from an opening of a holding cap and has flexibility. 2. The ultrasonic inspection according to claim 1, wherein the acoustic propagation liquid medium is water, and the thin film is formed to have a film thickness equal to or less than ¼ of a wavelength λ of ultrasonic waves propagating in the thin film. Sensor device. An ultrasonic sensor in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are arranged in a matrix or array; and
Flexible shoe means provided on the sensor surface side of the ultrasonic sensor;
A sensor apparatus for ultrasonic inspection, comprising: a flexible shoe means; and sensor position adjusting means for holding the ultrasonic sensor movably forward and backward from an inspection object. While the flexible shoe means has a soft shoe member such as silicon rubber excellent in ultrasonic propagation characteristics,
The sensor position adjusting means includes a holding frame that holds an ultrasonic sensor;
Supporting adjustment bolts screwed to the holding frame at at least three locations around the ultrasonic sensor,
4. The ultrasonic inspection sensor device according to claim 3, wherein the position of the ultrasonic sensor can be freely adjusted by rotating the support adjusting bolt around a bolt axis. An ultrasonic sensor in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are arranged in a matrix or array; and
A liquid medium holding shoe means provided on the sensor surface side of the ultrasonic sensor;
A sensor apparatus for ultrasonic inspection, comprising: a sensor holder including a medium storage tank capable of supplying an ultrasonic propagation liquid medium to the shoe means. The liquid medium holding shoe means includes a sponge-like or porous flexible shoe member,
The ultrasonic inspection sensor device according to claim 5, further comprising an ultrasonic wave propagation liquid medium that is injected into the shoe member from the liquid medium storage tank by natural dropping and accumulated and held. The ultrasonic inspection sensor device according to claim 5, wherein the storage tank is provided with an air vent valve at the top, and a sleeve-shaped or skirt-shaped tank guide that covers a peripheral side surface of the flexible shoe member. An ultrasonic sensor in which a plurality of piezoelectric elements for transmitting and receiving ultrasonic waves are aligned;
Water tank type shoe means provided on the sensor surface side of this ultrasonic sensor,
The shoe means includes a tank that holds the ultrasonic sensor on the top of the tank;
An ultrasonic inspection sensor device, wherein a storage tank for an ultrasonic propagation liquid medium is configured by an inspection object installed so as to liquid-tightly cover a bottom opening of the tank. The water tank type shoe means includes a circulation type liquid medium supply means for circulating the ultrasonic wave propagation liquid medium in the tank,
The ultrasonic inspection sensor device according to claim 8, further comprising an air extraction valve for extracting air from the tank top side. An ultrasonic sensor in which a plurality of piezoelectric elements that transmit and receive ultrasonic waves are arranged in a matrix or array; and
Shoe means provided on the sensor surface side of the ultrasonic sensor;
One-touch type attachment means that can be attached to the ultrasonic sensor with a single touch so as to be detachable,
An ultrasonic inspection sensor device, wherein the shoe means is held in close contact with an ultrasonic sensor by the one-touch attachment means.

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