JP2005140258A - Mechanical seal device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mechanical seal device easily mounted to a housing and exhibiting sealing ability to a chemical fluid to be sealed. <P>SOLUTION: This mechanical seal device is provided with a first seal part S1 having a first seal face 2A disposed on the sealed fluid L side of a rotary shaft 50 and fixed to a seal housing 32, and a first facing seal face 20A fixed to the rotary shaft 50 in close contact with the first seal face 2A; and a second seal part S2 disposed on the exterior A side of the first seal part S1 to seal a clearance between the seal housing 32 and the rotary shaft 50. A buffer chamber 15 is provided between the first seal part S1 and the second seal part S2, and a partition fluid region 16 is provided on the sealed fluid L side of the first seal part S1. A partition fluid N led into the partition fluid region 16 is to be lower in pressure than a buffer fluid 01 led into the buffer chamber 15 and higher in pressure than the sealed fluid L. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

The present invention relates to a mechanical seal device that seals chemical fluids such as acids, salts, and alkalis. More particularly, the present invention relates to a useful mechanical seal device attached to a compressor using a chemical fluid having a particularly high polymerization property, such as a liquid containing a slurry, acids, salts, alkalis and the like.

Technical background

  In a conventional mechanical seal device, a tandem seal or double seal is used to seal fluid that adheres to the seal ring and solidifies, highly volatile fluid, fluid containing slurry, etc. It has been. Furthermore, a method of flushing and cleaning the seal portion of the sealing ring has been adopted. In such a chemical fluid, there is a problem that the equipment cost of the mechanical seal device becomes expensive because additional equipment must be added to the mechanical seal. Moreover, if this incidental equipment becomes effective, the problem that the profit as a mechanical seal apparatus does not match will arise. Further, the mechanical seal device is provided with an O-ring so that one of the pair of seal rings can move, so that the fluid to be sealed does not leak between the sliding movements of the seal rings. Since the fluid to be sealed enters the mounting groove for attaching the O-ring, the fluid to be sealed adheres to the sliding surfaces of the O-ring and the sealing ring to solidify, and the sliding of the sealing ring is deteriorated. For this reason, it is insufficient to respond so that the sealing surfaces of the pair of sealing rings come into close contact with each other, and the mechanical seal device reduces the sealing ability. In addition, the fluid to be sealed solidifies and adheres to the spring that presses one of the sealing rings, which deteriorates the elasticity of the spring. Furthermore, when the sealed fluid is polymerized and adheres to the sealing surface as a solid adhesive, there is a problem that the sealing performance of the sealing surface is reduced (see, for example, Patent Document 1).

  FIG. 4 shows a mechanical seal device related to the present invention. This shaft seal device is a shaft seal device for sealing a chemical liquid such as liquid ammonia (for example, see Patent Document 2). In this shaft seal device, two first and second mechanical seals 111 and 121 are arranged in parallel in the axial direction, and a buffer fluid G such as an inert gas is placed between the first and second mechanical seals 111 and 121. There is disclosed a tandem mechanical seal that supplies and seals a sealed fluid by sealing means of the first and second mechanical seals 111 and 121 and pressure sealing with a buffer fluid G.

  Among these, in the first mechanical seal 111 on the sealed fluid side A, the fixed ring 107 is fixed to the step portion of the sleeve 108 fitted to the rotating shaft 116. A rotating seal ring 112 is attached to the fixed ring 107. Further, a fixing seal ring 113 that is in close contact with the rotation seal ring 112 is disposed. The fixing sealing ring 113 is fitted to the holding ring 106. The retaining ring 106 is slidably attached to the case 105. The case 105 is fitted into the housing 115 in a sealed state. An O-ring 109 is disposed between the holding ring 106 and the case 105. The O-ring 109 is configured to prevent the sealed fluid that acts on the back surface of the holding ring 106 from leaking to the purge fluid region C and to allow the sealed fluid to act on the back surface of the sealing ring 106. Further, the holding ring 106 is elastically pressed by the spring 114 toward the rotation sealing ring 112 side. The spring 114 and the O-ring 109 are arranged on the side that becomes in contact with the sealed fluid and becomes defective. Further, the flushing liquid or the quenching liquid is jetted toward the first mechanical seal from a passage provided in the upper portion of the first mechanical seal. This flushing solution or quenching solution requires equipment to be recirculated by a pump or the like in order to flush the pair of sealing rings 112 and 113.

  As described above, the first mechanical seal 111 includes the fixed ring 107, the rotation sealing ring 112, the case 105, the holding ring 106, the fixing sealing ring 113, the O-ring 109, the spring 114, and the sleeve 108. Is the main configuration. When the fluid to be sealed is a fluid containing a slurry or an adhesive fluid, the fluid causes leakage of the fluid to be sealed from the periphery of the O-ring when the fluid is restarted. Furthermore, since chemical liquids such as acids or salts are mixed in the flushing liquid when circulating the flushing liquid, a problem of rust occurs in the apparatus for pumping the flushing liquid. For this reason, reprocessing which removes a chemical liquid from a flushing liquid is needed.

  Next, the second mechanical seal 121 disposed on the atmosphere side B from the first mechanical seal 111 is movably fitted to the second case and the second rotating seal ring 122 held by the second fixed ring. The second rotating seal ring 123 coupled to the second holding ring is in close contact with the purge fluid G supplied from the flow passage. The second fixed ring is fitted to the rotating shaft 116 via the sleeve 108. Further, the second holding ring coupled to the second rotation sealing ring 123 is pressed by the second spring 124. A dynamic pressure generating groove 122 a is formed on the seal surface of the second rotating seal ring 122. That is, the second mechanical seal 121 is a non-contact type gas seal. And if an adhesive sealing fluid adheres to the sealing surface of the 1st mechanical seal 111, a sealing capability will fall. For this reason, the sealed fluid flows into the purge fluid region C. When the sealed fluid that has flowed into the purge fluid region C adheres to the seal surface having the dynamic pressure generating groove of the second mechanical seal 121, the sealing ability of the seal surface is reduced. Moreover, since the fluid to be sealed adheres to the second O-ring and deteriorates the operation of the second holding ring, the sealing ability of the second mechanical seal 121 is lowered.

  In order to seal a volatile fluid or an adhesive fluid, it is necessary to configure a double type or tandem type mechanical seal. In the tandem mechanical seal, a purge gas higher than atmospheric pressure must be supplied to the purge fluid region C by a pump. For this reason, the construction of these two mechanical seals increases the manufacturing cost. Further, since an auxiliary facility such as a pump is required to supply the purge fluid, the cost is increased. As described above, in order to seal a chemical liquid such as an adhesive fluid, a volatile fluid, and a fluid containing slurry with a conventional mechanical seal device, the above-described problems must be solved.

Japanese Patent Laid-Open No. 2001-141149 (FIGS. 1, 2 to 7) Japanese Patent Publication No. 7-69018 (Figs. 1, 2 to 3)

  The present invention has been made in view of the above problems. The problem to be solved by the invention is to prevent the chemical liquid from adhering to the sliding surface of the mechanical seal device when sealing a sealed fluid of a chemical fluid such as an adhesive fluid, a viscous fluid, a fluid containing a slurry. It is to improve the sealing ability. Another object is to reliably seal the fluid to be sealed by the combination of the buffer fluid and the pair of sealing rings. Another object is to reduce the cost of the mechanical seal device.

The present invention has been made to solve the technical problems as described above. The technical solution is configured as follows.
A mechanical seal device according to a first aspect of the present invention is a mechanical seal device for sealing a chemical liquid between a seal housing through which a rotary shaft passes and a rotary shaft, and is disposed on the sealed fluid side of the rotary shaft. A first seal portion having a first seal surface fixed to the seal housing and a first opposing seal surface fixed to the rotary shaft in close contact with the first seal surface and disposed closer to the atmosphere than the first seal portion. A second seal portion that seals between the seal housing and the rotation shaft; a buffer chamber between the first seal portion and the second seal portion; and a buffer supply passage that communicates with the buffer chamber; In addition, the first seal portion has a partition fluid region on the sealed fluid side and a partition fluid passage communicating with the partition fluid region, and the partition fluid introduced into the partition fluid region is introduced into the buffer chamber. As well as a lower pressure than Ffa fluids are those that are configured pressure higher than the pressure of the sealed fluid.

  According to a second aspect of the present invention, the mechanical seal device of the present invention has a third seal portion on the sealed fluid side of the first seal portion, and a partition fluid region is formed between the first seal portion and the third seal portion. It is what.

  According to a third aspect of the present invention, the mechanical seal device of the present invention is in close contact with the first counter seal surface, and the rotary seal ring having the first seal portion firmly fixed to the rotary shaft and having the first counter seal surface on one end surface. A rotary seal ring having a first sealing ring having a first seal surface, the second seal portion being hermetically fixed to the rotary shaft and having a second opposing seal surface on the other end surface; and the rotary seal ring A second fixing sealing ring having a second sealing surface in close contact with the second opposing sealing surface.

  In the mechanical seal device of the present invention according to claim 4, the third seal portion is configured as a labyrinth seal.

  In the mechanical seal device according to the fifth aspect of the present invention, the buffer fluid uses lubricating oil.

  In the mechanical seal device according to the first aspect of the present invention, the partition fluid having a pressure higher than that of the sealed fluid is supplied from the first seal portion to the partition fluid region on the sealed fluid side. For this reason, the sealed fluid does not easily enter the first seal portion side. Even if the sealed fluid enters the first seal portion, the buffer fluid introduced into the buffer chamber is configured to have a higher pressure than the partition fluid. For this reason, both the sealed fluid and the partition fluid are prevented from entering the seal surface of the first seal portion. Therefore, even if the fluid to be sealed is a chemical fluid such as an adhesive fluid, a viscous fluid, or a fluid containing slurry, the chemical fluid adheres to the seal surface of the first seal portion and the ability of the first seal portion is reduced. Can be prevented. Further, since the partition fluid region can be formed in the passage without specially manufacturing the partition fluid region, the structure of the mechanical seal device can be made compact. In addition, since a seal housing, which is a mechanical seal device, may be fitted into the housing, manufacturing and assembly costs can be reduced.

  In the mechanical seal device according to the second aspect of the present invention, by providing the third seal portion on the sealed fluid side of the first seal portion, the mixture of the sealed fluid and the partition fluid is prevented, thereby further increasing the coverage. It becomes possible to improve the sealing ability of the sealing fluid.

  In the mechanical seal device according to the third aspect of the present invention, the first opposed seal surface and the second opposed seal surface are provided at both ends of the rotary seal ring, and the respective seal surfaces are provided in close contact with the opposed seal surfaces. Thus, the mechanical seal device can be made compact. In addition, since a buffer chamber can be provided on the outer periphery of the rotation sealing ring, the sealed fluid is prevented from adhering to the rotation sealing ring while cooling the first seal portion and the second seal portion with the buffer fluid. it can. Furthermore, the configuration of the passage for introducing the buffer fluid into the buffer chamber can be simplified.

  In the mechanical seal device according to the fourth aspect of the present invention, since the third seal portion is configured as a labyrinth seal, the structure of the third seal portion is simplified, and the sealed fluid adheres to the labyrinth seal. It is possible to prevent the sealing ability from being lowered.

  In the mechanical seal device according to the fifth aspect of the present invention, since the buffer fluid is a lubricating liquid, the gap between the seal surfaces of the seal surface and the opposed seal surface is prevented from being worn. At the same time, the sealed fluid is prevented from entering between the sealing surfaces. Furthermore, even if the relatively rotating seal surface slides and rotates at high speed, the seal surface is cooled by the buffer fluid. For this reason, the durability of the sealing surface is improved.

  DESCRIPTION OF EMBODIMENTS Hereinafter, a mechanical seal device according to an embodiment of the present invention will be described in detail with reference to the drawings. Each drawing described below is based on a design drawing.

  FIG. 1 is a mechanical seal device 1 showing a first preferred embodiment according to the present invention. The mechanical seal device 1 is attached to seal the sealed fluid L flowing in the passage 11 between the rotary shaft 50 and the housing 60. This sealed fluid L is butadiene + HC gas. This gas has the property of being polymerized and adhering to the sliding surface when heated on the sliding surface. The stainless steel housing 60 is provided with a hole 60A from the end surface side, and a rotary shaft 50 for power passes through the inside B of the hole 60A from the outside. The fitting surface 32A of the seal housing 32 made of stainless steel is fitted into the hole 60A on the end surface of the housing 60 while sealing with two packings. At the same time, the seal housing 32 is fixed to the end surface of the housing 62 with bolts. The seal housing 32 incorporates a mechanical seal and is easily attached to the end of the housing 60.

  In the empty space in the inner peripheral surface 32B of the seal housing 32, a mechanical seal type first seal portion S1 and a mechanical seal type second seal portion S2 configured as an outside type mechanical seal with respect to the sealed fluid L are provided. And place. The first fixing sealing ring 2 of the first seal portion S1 is fixed to the seal housing 32 in a sealed manner. The first fixing seal ring 2 has a first support portion 3 and a first holding portion 4 made of stainless steel at one end of the first bellows 5 and the other end of the metal first bellows 5 in order to be fixed to the seal housing 32. Connect together. The fitting surface of the first support end 3 is fitted to the inner peripheral surface 32B of the seal housing 32 via an O-ring, and the first flange portion on the outer peripheral side is attached to the step surface 32E of the seal housing 32 by a bolt 47. Fixed. Further, the first fixing sealing ring 2 is integrally fitted to the step portion of the first holding portion 4. The first fixing sealing ring 2 has a convex portion on the end surface of the cylindrical body. A first seal surface 2A is provided on the end surface of the convex portion. The first fixing sealing ring 2 is made of SiC or a carbon material.

  A second seal portion S2 is disposed at a position symmetrical to the first seal portion S1. The second fixing sealing ring 20 of the second seal portion S2 is formed of the same material and the same shape as the first fixing sealing ring 2 of the first seal portion S1. A second seal surface 20A that is in close contact with the second opposed seal surface 10B is provided on the end surface of the convex portion. Further, the second holding part 24 holding the second fixing sealing ring 20, the second bellows 25, and the second support part 23 are integrally coupled. The second flange portion on the outer peripheral side of the second support portion 23 is fixed to the step surface 32 </ b> D of the seal housing 32 with a bolt 46. The second fixing seal ring 20 is integrally coupled to the step portion of the second holding portion 24. The structure for fixing the first fixing seal ring 2 and the second fixing seal ring 20 to the seal housing 32 can be the same as the structure for holding the seal ring of a mechanical seal used in the related art.

  A sleeve 40 is fitted to the outer peripheral surface of the step portion of the rotating shaft 50 via an O-ring. Further, the sleeve 40 is fixed between the step portion of the rotating shaft 50 by a fixing tool 43. The fixture 43 is fixed to the rotary shaft 50 by a set screw 44. Further, a locking groove is provided at the end of the sleeve 40. The engaging groove is engaged with a drive pin 50A provided on the rotating shaft 50 so that the rotating shaft 50 and the sleeve 40 can rotate together. A flange portion is provided on the outer peripheral surface of the sleeve 40, and one of the flange portions is formed on the outer peripheral surface 40A. Moreover, the other outer peripheral surface of this flange part is formed in the opposing surface 40B. Furthermore, a screw is provided on the end side of the outer peripheral surface 40A. The rotary seal ring 10 is fitted to the outer peripheral surface 40A by abutting against the flange portion of the sleeve 40 via an O-ring. The rotary seal ring 10 is fixed by a nut 42 that is screwed with a screw via a spacer 41. The first opposed seal surface 10A of the rotary seal ring 10 and the first seal surface 2A of the first fixing seal ring 2 are in close contact to constitute the first seal portion S1. Further, the second opposing seal surface 10B of the rotary seal ring 10 and the second seal surface 20A of the second fixing seal ring 20 are in close contact to constitute the second seal portion S2.

  As described above, the first opposed seal surface 10 </ b> A and the second opposed seal surface 10 </ b> B are provided on each end face of the rotary seal ring 10. This rotary seal ring 10 is made of carbonized carbon material. For this purpose, a reinforcing metal ring-shaped band 45 is fitted on the outer peripheral surface of the rotary seal ring 10. The first sealing surface 2A is in close contact with the first opposing sealing surface 10A to seal the sealed fluid L and the partition fluid N. Further, the second seal surface 20A is in close contact with the second opposing seal surface 10B to seal the buffer fluid.

  A third seal portion 30 is provided on the inner peripheral surface of the case 31 attached to the end side of the seal housing 32. The third seal portion 30 is a sealing means for further enhancing the sealing effect. The third seal portion 30 is provided on the inner side B from the first seal portion S1. The third seal portion 30 is configured as a labyrinth seal. The labyrinth seal 30 is provided with an uneven labyrinth surface 30A in the axial direction on the inner peripheral surface. The labyrinth surface 30A is fitted in close proximity to the facing surface 40B of the sleeve 40. The labyrinth seal 30 seals the sealed fluid L from entering the outside A from the inlet 11 and, on the contrary, reliably seals the partition fluid N from entering the inlet 11. The material of the labyrinth seal 30 is preferably a fluororesin (PTFE) when a resin material is used, and stainless steel or the like is suitable for a metal. The third seal portion 30 is not limited to the labyrinth seal 30 and other sealing methods can be used. For example, O-rings made of a fluororesin material can be arranged alone or in a plurality.

  Please refer to FIG. 1 and FIG. A buffer chamber 15 is provided between the first seal portion S1 and the second seal portion S2. A rotation sealing ring 10 is disposed on the inner peripheral side of the buffer chamber 15. Further, a buffer supply passage 36 penetrates from the outside A of the housing 60. The buffer supply passage 36 communicates with eight equal radial communication passages 36 A and 36 B provided in the seal housing 32 through a filter 37. Further, the communication paths 36 </ b> A and 36 </ b> B communicate with the buffer chamber 15. The buffer chamber 15 is further provided with an outflow path 36C. Then, turbine oil or spindle oil or the like as the buffer fluid 01 is supplied from the buffer supply passage 36. The turbine oil 01 has a pressure higher than the pressure of the sealed fluid L, and is higher than the partition fluid N higher than the pressure of the sealed fluid L. The buffer fluid 01 which is the turbine oil 01 prevents the sealed fluid L and the partition fluid N from entering the space between the seal surface 2A and the opposing seal surface 10A in the buffer chamber 15, and the first seal portion S1 and the first fluid. 2 The heat generated on the sliding surface with the seal portion S1 is cooled. In particular, the butadiene of the sealed fluid L + butadiene of HC gas is easily polymerized by heat, and when polymerized, it adheres to the seal surface 2A and the opposed seal surface 10A and reduces the sealing ability. Since the surface 10A is cooled, it is prevented from overlapping and adhering to the seal surface 2A and the opposing seal surface 10A.

The attachment plate 34 provided at the end of the seal housing 32 is provided with a partition fluid passage 16A that can communicate with a pipe (not shown). The seal housing 32 and the attachment plate 34 are coupled by connecting a coupling ring 33 coupled to the fitting portion 32 </ b> C of the seal housing 32 into a coupling hole of the attachment plate 34. Further, the partition fluid passage 16 </ b> A and the partition fluid region 16 are connected by a passage joint 19 so as to communicate with each other. The partition fluid passage 16A communicates with the partition fluid region 16 provided in the seal housing 32 in an L shape from the axial direction to the inner diameter direction. The partition fluid region 16 communicates with the partition fluid region 16 between the inner periphery of the first seal portion S1 and the third seal portion 30. The partition fluid N supplied from the partition fluid passage 16A to the partition fluid region 16 supplies nitrogen gas (N ₂ ) having a pressure higher than the pressure of the sealed fluid. The partition fluid N may be any fluid that does not cause a problem even when mixed with the fluid to be sealed. In particular, N2 gas, air, etc. are suitable.

  The flow of the partition fluid N and the buffer fluid 01 will be described in detail. The sealed fluid L uses butadiene + HC gas as a working fluid of an automobile compressor, a turbo compressor, and a plant compressor. When this gas is heated, it adheres to the seal surface and the like by a polymerization reaction. On the other hand, the partition fluid N whose pressure is higher than that of the sealed fluid L is supplied to the partition fluid region 16 from the partition fluid passage 16A. The supplied partition fluid N is sealed by a labyrinth seal 30. The partition fluid N having a higher pressure than the sealed fluid L prevents the sealed fluid L from entering the first seal portion S1 by the labyrinth seal 30. The labyrinth seal 30 acts as an auxiliary seal among the entire seals. That is, since the partition fluid N having a pressure higher than the pressure of the sealed fluid L is supplied to the partition fluid region 16 to block the partition fluid region 16, the sealed fluid L flows into the first seal portion S1 side. To prevent. And even if the to-be-sealed fluid L adheres to the labyrinth surface 30A, the labyrinth seal 30 hardly shows a decrease in sealing ability.

  Next, the buffer fluid 01 supplied from the buffer supply passage 36 is supplied to the buffer chamber 15 through the radially formed communication passages 36A and 36B. Since the buffer fluid 01 has a higher pressure than the partition fluid N, the partition fluid N is prevented from entering the buffer chamber 15 from between the first seal surface 2A and the first opposing seal surface 10A, and the first seal The buffer fluid 01 acts between the surface 2A and the first opposed seal surface 10A to provide a lubricating action. At the same time, the buffer fluid 01 acts as a cooling effect on the first seal portion S1 and the second seal portion S2. The buffer fluid 01 is discharged as the discharged fluid 02 from the outflow passage 36C when the temperature rises to produce a cooling effect. The discharged fluid 02 is cooled and circulated and supplied from the buffer supply passage 36 again. For this reason, the first seal portion S1 can surely seal the sealed fluid L having any characteristics.

The mechanical seal device 1 of FIG. 3 shows a second embodiment of the present invention. The mechanical seal device 1 of the second embodiment is configured in substantially the same manner as the mechanical seal device 1 of FIG. A significant difference is the first seal portion S1. The first seal portion S1 is provided with a spiral groove on the first opposed seal surface 10A of the rotary seal ring 10. In the spiral groove 13, dynamic pressure is generated with the rotation of the rotation sealing ring 10, so that the first seal surface 2 </ b> A and the first opposed seal surface 20 </ b> A are not in contact with each other. For this reason, generation of frictional heat between both the sealing surfaces 2A and 20A is prevented. The depth of the spiral groove 13 provided on the first opposed seal surface 20A is shallower than that of a general spiral groove, and the depth of the spiral groove is 1 × 10 ⁻⁶ m to 10 × 10 ⁻⁶ m. It is small. As a result, the non-contact state between the first seal surface 2A and the second opposing seal surface 20A is configured at a minute interval at which friction does not occur on the sliding surface between the first seal surface 2A and the second opposing seal surface 20A. The

In the second embodiment, the buffer fluid 01 may be a gas such as nitrogen gas in the first embodiment. The high / low pressure relationship among the pressure of the sealed fluid L, the pressure of the partition fluid N, and the pressure of the buffer fluid 01 is the same as that in the first embodiment. Further, the other components having the same reference numerals in FIG. 1 and FIG.
Since the second seal portion S2 of the first embodiment and the second embodiment does not seal the sealed fluid L, it is not limited to the configuration of the mechanical seal described above, and other mechanical seals may be used. good. Further, the second seal portion S2 may be configured as a packing. That is, the second seal portion S2 may be any sealing means that seals the buffer fluid.

  As described above, the mechanical seal device of the present invention is useful as a mechanical seal device for sealing an adhesive liquid corresponding to a chemical liquid, a viscous fluid, a fluid containing slurry, etc., used in a chemical device, a compressor, or the like. . It is also useful as a mechanical seal device that facilitates assembly as a cartridge-type structure.

It is sectional drawing of the mechanical seal apparatus concerning 1st Embodiment of this invention. It is a front view of the mechanical seal apparatus of FIG. It is sectional drawing of the mechanical seal apparatus concerning 2nd Embodiment of this invention. It is sectional drawing of the mechanical seal apparatus shown as a related technique of this invention.

Explanation of symbols

1 Mechanical seal device
2 Seal ring for first fixing
2A First seal surface
3 1st support part
4 1st holding part
5 First bellows
10 Sealing ring for rotation
10A First opposing seal surface
10B Second opposing seal surface
11 Inlet
13 Spiral groove
15 Buffer room
19 Passage coupling
16 Partition fluid passage
20 Seal ring for second fixing
20A Second seal surface
23 Second support
24 Second holding part
25 Second Bellows
30 Labyrinth seal
30A labyrinth surface
31 cases
32 Seal housing
32A mating surface
32B Inner peripheral surface
32C fitting part
32D cross section
32E cross section
33 connecting rings
34 Attached plate
36 Buffer supply passage
36A, 36B communication path
36C Outflow channel
37 Filter
40 sleeves
40A outer peripheral surface
40B facing surface
41 Spacer
42 nuts
43 Fixture
44 Set screw
45 bands
46 volts
47 Volts
50 axis of rotation
50A drive pin
60 housing
60A hole
01 Buffer fluid
02 Exhaust fluid
S1 1st seal part
S2 Second seal part
A Outside
B inside
L Sealed fluid
N partition fluid

Claims (5)

A mechanical seal device for sealing a chemical liquid between a seal housing through which a rotary shaft passes and a rotary shaft, the first seal surface being arranged on the sealed fluid side of the rotary shaft and fixed to the seal housing; A first seal portion having a first opposed seal surface that is in close contact with the first seal surface and fixed to the rotation shaft; and is disposed on the atmosphere side of the first seal portion and between the seal housing and the rotation shaft. A second seal portion that seals the buffer chamber, and has a buffer chamber between the first seal portion and the second seal portion, a buffer supply passage communicating with the buffer chamber, and the first seal portion. The partition portion has a partition fluid region on the sealed fluid side of the seal portion, and has a partition fluid passage communicating with the partition fluid region, and the partition fluid introduced into the partition fluid region is introduced into the buffer chamber. As well as a lower pressure than Ffa fluid, the mechanical seal device, characterized in that configured pressure higher than the pressure of the sealed fluid. The first seal portion has a third seal portion on the sealed fluid side, and a partition fluid region is formed between the first seal portion and the third seal portion. The mechanical seal device described in 1. The first seal portion is hermetically fixed to the rotating shaft and has a first sealing surface that is in close contact with the first opposing sealing surface and a first sealing surface that is in close contact with the first opposing sealing surface. A rotary ring having a second opposed seal surface on the other end surface, and a second opposed seal surface of the rotary seal ring, the second sealed part being tightly fixed to the rotary shaft and having a second opposed seal surface The mechanical seal device according to claim 1, further comprising a second sealing ring having a second sealing surface. The mechanical seal device according to claim 2, wherein the third seal portion is configured as a labyrinth seal. The mechanical seal device according to claim 1, claim 2, claim 3, or claim 4, wherein the buffer fluid is lubricating oil.

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