JP2005124122A - Piezoelectric oscillator storing package and piezoelectric device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a highly-reliable piezoelectric oscillator storing package and a piezoelectric device which can reduce a mounting area for an external electric circuit board, and enable a piezoelectric oscillator stored inside to oscillate stably. <P>SOLUTION: A piezoelectric oscillator storing package is provided with an insulation base 1 with a concave portion 3 for storing a flat-shaped piezoelectric oscillator 4 on the top surface, an electrode pad 7 formed in the concave portion 3 and connected to an electrode of the piezoelectric oscillator 4, and a wiring conductor 5 derived from the electrode pad 7 to the external surface of the insulation base 1. The piezoelectric oscillator 4 is provided in the concave portion 3 so that one side is opposed the a bottom of the concave portion 3 with a clearance. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a piezoelectric vibrator housing package and a piezoelectric device for housing a piezoelectric vibrator inside.

  Conventionally, as a piezoelectric vibrator housing package for housing a piezoelectric vibrator, a ceramic package made of an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, glass ceramics, or the like has been used. Yes. As shown in FIGS. 2 (a) and 2 (b), the conventional package has a rectangular parallelepiped recess 13 for accommodating the piezoelectric vibrator 14 at the center of the upper surface, and the corner of the bottom surface of the recess 13 is provided. The insulating substrate 11 is provided with a stepped portion 17 to which the end of the piezoelectric vibrator 14 is attached. A wiring conductor 15 made of a metallized conductor or the like is led out from the upper surface of the stepped portion 17 to the outer surface such as the side surface or the lower surface of the insulating base 11. 2A is a plan view showing an example of a conventional piezoelectric vibrator housing package and a piezoelectric device, and FIG. 2B is a cross-sectional view taken along line BB ′ of FIG. 2A. .

  The piezoelectric vibrator 14 is housed in the concave portion 13 of the insulating base 11 so that the main surface thereof faces the bottom surface of the concave portion 13, and the electrode formed at the end of the piezoelectric vibrator 14 is placed in the concave portion 13. The wiring conductor 15 exposed on the stepped portion 17 is electrically connected through an electrical connecting means such as a conductive adhesive 18, and then the lid 12 is formed around the recess 13 on the upper surface of the insulating base 11. By joining these, a piezoelectric device in which the piezoelectric vibrator 14 is hermetically sealed inside the container composed of the recess 13 of the insulating base 11 and the lid 12 can be configured. The recess 13 is joined to the sealing metallization layer 16 formed at a portion surrounding the recess 13 on the upper surface of the insulating base 11 by a seam weld method or the like through a brazing material such as silver brazing. Is hermetically sealed.

The piezoelectric device thus formed connects the wiring conductor 15 led to the outer surface (the lower surface in FIG. 2) of the insulating base 11 and the electrode pad of the external electric circuit board via a brazing material such as solder. Thus, the piezoelectric vibrator 14 and the external electric circuit are electrically connected via the wiring conductor 15 by being mounted on the external electric circuit board.
JP 2002-33636 A

  In recent years, there has been a strong demand for such a piezoelectric vibrator housing package and a piezoelectric device to be miniaturized, particularly to reduce a mounting area when mounted on an external electric circuit board.

  However, in the conventional package for accommodating a piezoelectric vibrator, the piezoelectric vibrator 14 is housed such that the main surface thereof faces the bottom surface of the recess 13 of the insulating base 11, so that the vibration of the piezoelectric vibrator 14 is not hindered. In order to accommodate in the recess 13, it is necessary to secure a large area of the bottom surface of the recess 13 by an amount corresponding to the main surface of the piezoelectric vibrator 14 having a large area. Further, the wiring conductor 15 exposed on the upper surface of the stepped portion 17 connects the wiring conductor 15 from the end of the piezoelectric vibrator 14 in order to connect the electrode at the end of the piezoelectric vibrator 14 with the conductive adhesive 18 or the like. It was necessary to enlarge it so that it protruded on both sides. Accordingly, it is necessary to make the area of the bottom surface of the recess 13 of the insulating base 11 sufficiently larger than the main surface of the piezoelectric vibrator 14, and as a result, the area of the insulating base 11 in plan view becomes large, and the piezoelectric vibrator is accommodated. There is a problem that it is very difficult to reduce the mounting area of the packaging package and the piezoelectric device with respect to the external electric circuit board.

  The present invention has been devised in view of such problems, and an object of the present invention is to reduce the mounting area of the external electric circuit board and to stably vibrate the piezoelectric vibrator housed inside. It is an object of the present invention to provide a highly reliable piezoelectric vibrator housing package and a piezoelectric device capable of satisfying the requirements.

  The piezoelectric vibrator housing package of the present invention is formed on an upper surface of an insulating base having a concave portion for accommodating a flat plate-like piezoelectric vibrator, and an inner surface of the concave portion, and an electrode of the piezoelectric vibrator is connected to the package. An electrode pad and a wiring conductor led out from the electrode pad to the outer surface of the insulating base are provided, and one side surface of the piezoelectric vibrator faces the bottom surface of the recess with a gap. It is characterized in that it stands upright in the recess.

  In the piezoelectric vibrator housing package according to the present invention, preferably, the recess is a rectangular parallelepiped, and the electrode pad is formed at a corner of the inner surface.

  In the piezoelectric vibrator housing package of the present invention, it is preferable that the depth of the concave portion is shallower than the height of the standing piezoelectric vibrator.

  The piezoelectric device according to the present invention includes the piezoelectric vibrator housing package having the above-described configuration, and the electrode formed on the end portion of the package that is erected and housed in the recess, and is electrically connected to the electrode pad. The piezoelectric vibrator and a lid attached to an upper surface of the insulating base so as to cover the concave portion.

  Since the piezoelectric vibrator housing package of the present invention is erected in the recess so that one side surface of the plate-like piezoelectric vibrator faces the bottom surface of the recess of the insulating base with a gap, The piezoelectric vibrator can be housed in the recess so as not to interfere with the vibration of the vibrator, and the area of the bottom surface of the recess should be secured to meet one side of the piezoelectric vibrator having a small area. The area of the bottom surface of the recess can be further reduced. As a result, the area of the insulating base in plan view can be reduced, and the mounting area for the external electric circuit board can be made extremely small.

  In addition, since the electrode formed on the end of the piezoelectric vibrator can be widely connected to the electrode pad formed on the inner surface of the recess in the vertical direction, the mechanical strength of this connection can be increased. A piezoelectric device having excellent connection reliability can be provided.

  In the piezoelectric vibrator housing package of the present invention, the concave portion has a rectangular parallelepiped shape, and the electrode pad is formed at the corner portion of the inner surface, so that the piezoelectric vibrator can be erected in the diagonal direction of the concave portion. The area of the concave portion in plan view can be further reduced.

  In addition, since the electrode pad formed at the corner of the inner surface of the recess covers the end of the piezoelectric vibrator at a right angle, the connection area between the piezoelectric vibrator and the electrode pad is increased, and the connection reliability is further improved. be able to.

  Furthermore, it is possible to secure a sufficient distance between the central portion of the piezoelectric vibrator, which is an important part when the piezoelectric vibrator vibrates, and the inner surface of the recess, and as a result, the piezoelectric vibrator can be more stable. It can be vibrated accurately.

  Further, in the piezoelectric vibrator housing package of the present invention, since the depth of the recess is shallower than the height of the piezoelectric vibrator to be erected, for example, a pickup portion of an automatic machine such as a mounter When the upper part of the piezoelectric vibrator is held and positioned and housed in the recess, it is effectively prevented that the pickup part mistakenly contacts the upper surface of the insulating base surrounding the recess. This can be easily stored by an automatic machine, improving workability, and accidentally damaging the upper surface of the insulating substrate or the metallized layer formed on the upper surface of the insulating substrate to facilitate the bonding of the lid. The deterioration of the hermetic sealing performance can be prevented.

  In addition, since the length of the end face of the piezoelectric vibrator can be made larger than the length in the height direction of the electrode pad to which the electrode of the piezoelectric vibrator is connected, there is conductivity between the electrode pad and the end face of the piezoelectric vibrator. A large meniscus of a bonding material such as a conductive resin can be formed, and the connection reliability between the piezoelectric vibrator and the connection pad can be further improved.

  In addition, since the piezoelectric vibrator can be protruded toward the lid beyond the bonding surface between the electrode pad and the piezoelectric vibrator, the piezoelectric vibrator can be accommodated with respect to the size of the insulating base, and the piezoelectric vibrator The bonding width in the length direction on the electrode pad side can be reduced, vibration leakage to the insulating substrate can be suppressed, and the crystal impedance (CI) value indicating the degree of vibration loss can be reduced.

  A piezoelectric device according to the present invention includes a piezoelectric vibrator housing package having the above-described structure, a piezoelectric vibrator that is erected and housed in a recess, and an electrode formed at an end portion is electrically connected to an electrode pad. In addition, since the upper surface of the insulating base is provided with a lid attached so as to cover the recess, the mounting area for the external electric circuit board can be reduced, and the piezoelectric vibrator housed inside can be stabilized. Thus, it can be made highly reliable that can be vibrated.

  Next, a piezoelectric vibrator housing package and a piezoelectric device according to the present invention will be described with reference to the accompanying drawings. FIG. 1A is a plan view showing an example of an embodiment of a piezoelectric vibrator housing package and a piezoelectric device according to the present invention, and FIG. 1B is a cross-sectional view taken along line AA ′ of FIG. It is sectional drawing. In the figure, 1 is an insulating substrate, 2 is a lid, 4 is a piezoelectric vibrator, 5 is a wiring conductor, and 7 is an electrode pad. The insulating substrate 1, the wiring conductor 5, and the electrode pad 7 constitute the piezoelectric vibrator housing package of the present invention. The piezoelectric device of the present invention is configured by housing the piezoelectric vibrator 4 in this piezoelectric vibrator housing package and sealing it with the lid 2.

  The insulating substrate 1 is made of a ceramic or a resin such as an aluminum oxide sintered body (alumina ceramic), an aluminum nitride sintered body, a mullite sintered body, or a glass ceramic, and has a side length of about 2 to 20 mm. It has a rectangular parallelepiped shape with a thickness of about 0.5 to 3 mm.

  Further, a concave portion 3 having, for example, a rectangular parallelepiped shape for accommodating the piezoelectric vibrator 4 is formed on the upper surface of the insulating base 1. Such an insulating substrate 1 is manufactured as follows. First, in the case of an aluminum oxide sintered body, an appropriate organic binder, solvent, plasticizer, etc. are added to and mixed with raw material powders such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide to form a mud. This is formed into a sheet shape by a conventionally known doctor blade method, calendar roll method, or the like to obtain a plurality of ceramic green sheets. Thereafter, the ceramic green sheet is appropriately punched to form a square shape and a frame shape, and the frame shape is positioned in the upper layer so that the square shape is positioned in the lower layer. Thus, a laminated body having a concave portion 3 formed on the upper surface is formed by stacking up and down, and the laminated body is baked at a high temperature (about 1600 ° C.) to form the insulating substrate 1.

  The electrode pad 7 formed on the inner surface of the recess 3 of the insulating base 1 functions as a pad for electrically connecting the electrodes of the piezoelectric vibrator 4 housed in the recess 3.

  The piezoelectric vibrator 4 is, for example, a crystal, a surface acoustic wave element, or the like. Usually, the outer shape of the piezoelectric vibrator 4 is a rectangular flat plate shape, and an electrode is formed at an end thereof. Further, in order to vibrate accurately without being disturbed by vibration, it is preferable that the side surface of the concave portion 3 is erected so as to face the bottom surface of the concave portion 3 with a gap of 20 to 50 μm. .

  In the piezoelectric vibrator housing package of the present invention, the piezoelectric vibrator 4 is stood and housed in the concave portion 3 such that one side surface thereof faces the bottom surface of the concave portion 3 with a gap. Accordingly, the piezoelectric vibrator 4 can be accommodated in the concave portion 3 so as not to disturb the vibration of the piezoelectric vibrator 4, and the bottom surface of the concave portion 3 corresponding to one side surface of the piezoelectric vibrator 4 having a small area. The area of the bottom surface of the recess 3 can be further reduced. As a result, the area of the insulating substrate 1 in plan view can be reduced, and the mounting area on the external electric circuit board can be reduced.

  Further, since the electrode formed on the end portion of the piezoelectric vibrator 4 can be widely connected to the electrode pad 7 formed on the inner surface of the recess 3 in the vertical direction, the mechanical strength of the connecting portion is increased. Therefore, a piezoelectric device having excellent connection reliability can be provided.

  In addition, the connection between the electrode formed at the end of the piezoelectric vibrator 4 and the electrode pad 7 is performed by an electrical connection means 8 such as solder or conductive resin.

  The electrode of the piezoelectric vibrator 4 connected to the electrode pad 7 is led to the outer surface of the insulating substrate 1 (the lower surface in the example of FIG. 1B) via the wiring conductor 5, and the lead-out portion is connected to the solder or the like. By connecting to the external electric circuit board, the electrode of the piezoelectric vibrator 4 is electrically connected to the external electric circuit.

  The electrode pad 7 and the wiring conductor 5 are made of a metal material such as tungsten, molybdenum, manganese, copper, or silver. The produced conductive paste is formed by printing a predetermined pattern on the surface of a green sheet to be the insulating substrate 1.

  The exposed surfaces of the electrode pad 7 and the wiring conductor 5 prevent oxidative corrosion of the electrode pad 7 and the wiring conductor 5, connect the electrode pad 7 with each electrode of the piezoelectric vibrator 4, In order to strengthen the connection with the external electric circuit board, for example, a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.1 to 3 μm are preferably sequentially deposited. .

  Further, around the recess 3 on the upper surface of the insulating base 1, for example, if the lid 2 is made of metal, tungsten or molybdenum is provided so as to surround the recess 3 in order to facilitate the joining with the lid 2. A square frame-shaped metallization layer 6 made of metal powder metallization of copper, silver or the like is formed. The metallized layer 6 has a thickness of about 10 to 30 μm and a width of each side of about 0.2 to 0.5 mm, and functions as a base metal for joining the lid 4.

  The metallized layer 6 may be brazed with a metal frame for sealing via a brazing material such as silver brazing. When a metal frame is brazed to the surface of the metallized layer 6, for example, a nickel plating layer having a thickness of about 0.5 to 5 μm is previously formed on the surface of the metallized layer 6 in order to improve the wettability with the brazing material. It should be attached.

  The metal frame is made of a metal material such as an iron-nickel alloy or iron-nickel-cobalt alloy, and functions as a base metal member for welding the lid 2 to the insulating base 1. The inner circumference of this metal frame is the same size as the outer dimensions of the recess 3, the thickness is about 0.1 to 0.5 mm, and the width of each side is about 0.15 to 0.45 mm.

  As a method of joining the metal lid 2 to the metallized layer 6, a silver solder having a thickness of 20 to 50 μm is previously applied to the lower surface of the lid 2, and the lower surface to which this silver solder is applied is metallized. By placing on the layer 6 and heating by seam welding, electron beam or the like, the lid 2 and the metallized layer 6 can be easily brazed with good airtightness.

  Then, the piezoelectric vibrator 4 is housed in the recess 3 of the insulating base 1, and an electrode (not shown) formed at the end of the piezoelectric vibrator 4 is electrically connected to the electrode pad 7 formed on the inner surface of the recess 3. The connection is made through an electrical connection means 8 such as an adhesive. Next, the lid 2 is joined to the upper surface of the metallized layer 6 by a welding method such as a seam welding method or an electron beam method, a brazing method, or the like, so that the piezoelectric vibrator 4 is a container composed of the insulating base 1 and the lid 2. Is hermetically sealed to complete the piezoelectric device.

  When the lid 2 is made of ceramics or resin, in order to be able to join the lid 2 to the metallized layer 6 by a brazing method or a welding method, the joint surface of the lid 2 is metalized or plated. It is preferable to form a metal layer.

  The shape of the lid 2 is a shape suitable for hermetically sealing the recess 3 by joining the outer periphery of the lower surface thereof to the periphery of the recess 3 on the upper surface of the insulating base 1. It has a quadrangular shape with a recess. When the lid 2 is bonded directly to the metallized layer 6, it is preferable to use a rectangular shape having a concave portion on the lower surface in order to easily secure a space for accommodating the piezoelectric vibrator 4.

  The piezoelectric vibrator housing package of the present invention is erected in the recess 3 so that one side surface of the flat piezoelectric vibrator 4 faces the bottom surface of the recess 3 of the insulating substrate 1 with a gap. Therefore, the piezoelectric vibrator 4 can be accommodated in the concave portion 3 so as not to disturb the vibration of the piezoelectric vibrator 4, and the bottom surface of the concave portion 3 can be accommodated to one side of the piezoelectric vibrator having a small area. It is sufficient to ensure the area, and the area of the bottom surface of the recess 3 can be further reduced. As a result, the area of the insulating substrate 1 in plan view can be reduced, and the mounting area on the external electric circuit board can be reduced.

  Further, since the electrode formed on the end portion of the piezoelectric vibrator 4 can be widely connected to the electrode pad 7 formed on the inner surface of the recess 3 in the vertical direction, the mechanical strength of the connecting portion is increased. Therefore, a piezoelectric device having excellent connection reliability can be provided.

  In this case, it is preferable that the recessed part 3 is a rectangular parallelepiped shape, and the electrode pad 7 is formed in the corner | angular part of an inner surface. Accordingly, for example, the recess 3 is formed in a rectangular parallelepiped shape and the electrode pad 7 is provided at two diagonal corners thereof, whereby the piezoelectric vibrator 4 is erected in the diagonal direction of the recess 3 to form the recesses. 3, the area of the concave portion 3 in plan view can be further reduced, and the central portion of the piezoelectric vibrator 4 and the concave portion 3 which are important parts when the piezoelectric vibrator 4 vibrates. A sufficient distance from the inner surface of the piezoelectric vibrator 4 can be ensured, and as a result, the piezoelectric vibrator 4 can be vibrated more stably and accurately. In addition, since the electrode pad 7 formed at the corner of the inner surface of the recess 3 can cover the end of the piezoelectric vibrator 4 at a right angle, the connection area between the piezoelectric vibrator 4 and the electrode pad 7 is increased. Connection reliability can be further improved.

  As a result, it is possible to provide a piezoelectric vibrator housing package and a piezoelectric device having a smaller mounting area and excellent reliability.

  When the piezoelectric vibrator 4 is erected in the recess 3, the end of the piezoelectric vibrator 4 is aligned with the corner of the recess 3 so that the electrode of the piezoelectric vibrator 4 and the electrode pad 7 can be easily aligned. can do.

  Further, in the piezoelectric vibrator housing package of the present invention, as shown in FIGS. 3A and 3B, the recess 3 is formed so that the depth thereof is shallower than the height of the piezoelectric vibrator 4 to be erected. It is preferable that

  Thus, for example, when the upper portion of the piezoelectric vibrator 4 is held by the pickup portion of an automatic machine such as a mounter and positioned in the recess 3, the pickup portion is placed on the upper surface of the insulating base 1 surrounding the recess 3. Since accidental contact is effectively prevented, storage by an automatic machine such as a mounter is facilitated, workability is improved, and the upper surface portion of the insulating base 1 or the metallized layer 6 is accidentally damaged. It is possible to prevent the deterioration of the hermetic sealing that occurs.

  Further, since the length of the end face of the piezoelectric vibrator 4 can be made larger than the length of the electrode pad 7 to which the electrode of the piezoelectric vibrator 4 is connected, the end face of the electrode pad 7 and the piezoelectric vibrator 4 can be increased. A large meniscus of a bonding material such as a conductive resin can be formed between the piezoelectric vibrator 4 and the connection pad 7.

  Further, since the piezoelectric vibrator 4 can protrude toward the lid body 2 beyond the joint surface between the electrode pad 7 and the piezoelectric vibrator 4, the piezoelectric vibrator 4 that is larger than the size of the insulating base 1 is accommodated. In addition, the bonding width of the piezoelectric vibrator 4 in the length direction on the electrode pad 7 side can be reduced, the vibration leakage to the insulating substrate 1 can be suppressed, and the crystal impedance (CI) value indicating the degree of vibration loss can be reduced. .

  Moreover, it is desirable that the inner side surface of the recess 3 in which the electrode pad 7 is formed is inclined outward so that the width of the recess 3 increases from the lower end to the upper end. As described above, since the opening area of the recess 3 is increased by inclining the inner surface of the recess 3, the plate-like piezoelectric vibrator 4 can be easily brought into the recess 3 without colliding with the insulating substrate 1. It can be accommodated, and it is possible to effectively prevent the insulating substrate 1 from being damaged or broken.

  The shape of the recess 3 in plan view is preferably a square. The angle formed between both main surfaces of the piezoelectric vibrator 4 and the inner surface of the recess 3 is equal to 45 degrees, and a desired accurate vibration mode can be obtained, and an extra sub-vibration mode other than the main vibration mode is hardly generated.

  In addition, the corner of the recess 3 to which the piezoelectric vibrator 4 is not connected is preferably a curved surface. It is possible to suppress the vibration transmitted from the piezoelectric vibrator 4 from being reflected by the corners of the recess 3 and returning to the piezoelectric vibrator 4 to disturb the vibration mode.

  Furthermore, the distance between the side surface connected to the electrode pad 7 by the electrical connection means 8 of the piezoelectric vibrator 4 and the electrode pad 7 is preferably about 0.1 to 0.5 mm. The electrical connection means 8 such as solder between them is less likely to inherently vibrate, and can be prevented from disturbing the main vibration mode.

  The electrode pad 7 of the present invention is preferably formed on the inner surface of a cutout portion such as a U shape, a V shape, a quadrangular shape or the like in a plan view formed at the corner of the recess 3. In that case, the piezoelectric vibrator 4 and the electrode pad 7 can be easily and more accurately aligned, and the bonding area between the electrode pad 7 and the electrical connection means 8 is increased, so that the electrode pad 7 And bonding strength between the electrical connection means 8 are increased. Further, since the end portion of the piezoelectric vibrator 4 is fitted into the notch and is erected, a bonding area between the piezoelectric vibrator 4 and the electrical connection means 8 can be secured with a small amount of the electrical connection means 8. The part of the piezoelectric vibrator 4 that vibrates can be enlarged while maintaining the bonding strength. Moreover, the leakage to the part other than the connection part of the electrical connection means 8 can be reduced, and a good meniscus can be formed.

  Note that the recess 3 does not need to be a completely rectangular parallelepiped, and the inner corner of the recess 3 is formed in an arc shape to effectively prevent mechanical breakdown such as cracks in the insulating base 1 at the corner. You may make it do. Further, a part of the upper surface surrounding the recess 3 of the insulating base 1 is projected toward the inside of the recess 3 to the extent that the vibration of the piezoelectric vibrator 4 is not hindered. A larger bonding area may be secured, and the bonding between the lid 2 and the insulating base 1 may be made stronger.

  In addition, this invention is not limited to the example of the above-mentioned embodiment, A various deformation | transformation is possible. For example, the insulating substrate 1 may be formed by laminating three or more ceramic layers.

  Further, in FIG. 1A, the electrode pad 7 is formed at the two corners on the inner surface of the concave portion 3 in FIG. 1A.

  Furthermore, the electrode pad 7 may be formed on the inner surface other than the corner of the recess.

(A) is a top view which shows an example of embodiment of the package for piezoelectric vibrator accommodation of this invention, (b) is sectional drawing in the A-A 'line of the package for piezoelectric vibrator accommodation of (a). (A) is a plan view of a conventional piezoelectric vibrator housing package, and (b) is a cross-sectional view taken along line B-B ′ of the piezoelectric vibrator housing package of (a). (A) is a top view which shows the other example of embodiment of the piezoelectric vibrator accommodation package of this invention, (b) is sectional drawing in the AA 'line of the piezoelectric vibrator accommodation package of (a). is there.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Insulation base | substrate 2 ... Cover body 3 ... Recessed part 4 ... Piezoelectric vibrator 5 ... Wiring conductor 7 ... Electrode pad

Claims (4)

An insulating base having a recess for accommodating a plate-like piezoelectric vibrator on the upper surface, an electrode pad formed on the inner surface of the recess and connected to an electrode of the piezoelectric vibrator, and the insulating base from the electrode pad The piezoelectric vibrator is erected in the recess so that one side surface of the piezoelectric vibrator faces the bottom surface of the recess with a gap. A package for storing a piezoelectric vibrator. 2. The package for housing a piezoelectric vibrator according to claim 1, wherein the recess has a rectangular parallelepiped shape, and the electrode pad is formed at a corner of the inner surface. 3. The package for housing a piezoelectric vibrator according to claim 1, wherein the recess has a depth shallower than a height of the standing piezoelectric vibrator. The piezoelectric vibrator housing package according to any one of claims 1 to 3, and an electrode that is erected and housed in the recess and formed at an end thereof are electrically connected to the electrode pad. A piezoelectric device comprising: the piezoelectric vibrator; and a lid attached to an upper surface of the insulating base so as to cover the concave portion.

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