JP2003334458A - Anion exchange resin, its manufacturing method, and manufacturing method for purified hydrogen peroxide solution using the resin - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method which enables a reduction in the content of impurities, especially metal components such as iron, in a hydrogen peroxide solution to about 1 wt.ppt by a simple way to obtain an extremely highly purified hydrogen peroxide solution. <P>SOLUTION: A carbonate or bicarbonate type anion exchange resin has an iron content of ≤500 pg/mL-resin (DRY). In the manufacturing method for the purified hydrogen peroxide solution, the hydrogen peroxide solution is brought into contact with an anion exchange resin layer containing the above resin. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an anion exchange resin, a method for producing the same, and a method for producing hydrogen peroxide water using the same. More specifically, the present invention relates to an anion exchange resin having an extremely low content of impurities, a method for producing the anion exchange resin, and a method for producing a highly pure hydrogen peroxide solution (purified hydrogen peroxide solution) using the anion exchange resin.

[0002]

BACKGROUND ART There are several known methods for producing hydrogen peroxide, but most of them are currently produced by the anthraquinone autoxidation method. As this production method, for example, 2-alkylanthraquinone is first dissolved in a water-insoluble solvent to give a working liquid, which is hydrogenated in the presence of a catalyst to give 2
-Alkylanthrahydroquinone. Then, after separating the catalyst, it is oxidized to the original 2-alkylanthraquinone by air, and the produced hydrogen peroxide is extracted with water. The crude hydrogen peroxide solution thus obtained is generally purified by distillation or the like to adjust the degree of purification and concentration (usually 5 to 70% by weight) to obtain a hydrogen peroxide solution having a desired purity and concentration. .

In the hydrogen peroxide water obtained by such a method, anthraquinones and organic impurities derived from the working fluid, and various metal impurities (Fe , Cr, Ni, Al, N
a, Si, etc.), and may further contain an acid such as phosphoric acid, a sodium stannate or the like as a stabilizer. Generally, the content of such impurities is several to several tens of ppm by weight as metal impurities, and the organic impurities are 20 to several hundreds of weight pp as total organic carbon amount (TOC).
m.

Such hydrogen peroxide solution is used after being purified according to the quality requirements of the purpose of use and the purpose of use. The purpose of use / application is, for example, bleaching of paper, pulp, fiber, etc., and use in chemical polishing liquids, etc., and in recent years, cleaning agents in silicon wafers and device manufacturing processes on these wafers, so-called semiconductor device manufacturing processes. For example, high-purity purified hydrogen peroxide water is actively used in the electronic industrial field.

As described above, the purified hydrogen peroxide solution used in the field of electronics industry has a high degree of integration of devices, and therefore, all impurities (metal impurity components, organic impurities, fine particles, etc.) in the hydrogen peroxide solution are minimized. There is a demand for reduced, extremely high purity product quality. Various methods have been proposed for obtaining such purified hydrogen peroxide water. For example, ion exchange method (cation exchange resin, anion exchange resin, chelate resin, etc.), adsorption method (synthetic adsorbent, activated carbon, etc.) , Distillation method, membrane method (microfiltration membrane, ultrafiltration membrane, reverse osmosis membrane, etc.), crystallization / melting method, and foam separation method have been proposed. Then, of these, it has been proposed to remove various impurities by a single method or by combining them. (JP-A-7-33408, JP-A-8-231208, and JP-A-8-245204; U.S. Pat. No. 4,999,1
79, U.S. Pat. No. 4,985,228; WO92 / 0.
69818, etc.).

In recent years, there has been proposed a method for producing a hydrogen peroxide solution having a higher degree of purity, specifically, an impurity content reduced to a level of 10's weight ppt. For example, JP-A-10-259008 and JP-A-10-2590
No. 09 and Japanese Patent Application Laid-Open No. 9-205205 describe a purified hydrogen peroxide solution having an impurity content of 10 to several tens of weight ppt.

However, in the purification methods described in these, the content of impurities such as iron in the purified hydrogen peroxide solution obtained is 1 or less.
The weight ppt cannot be cut. It is considered that iron contained in the ion exchange resin base material used in the refining process is eluted. That is, even if the ion exchange resin is washed with high-purity hydrochloric acid or the like before its use, iron may be attached to the ion exchange resin when the ion exchange resin is converted into the bicarbonate type.

Further, as described in Japanese Patent Application Laid-Open No. 10-259090, even if the elution of iron into the hydrogen peroxide solution is suppressed by shortening the contact time between the hydrogen peroxide solution and the ion exchange resin, When the content of iron in the raw material is high, the ion adsorption zone becomes long and iron leaks, so that the degree of purification of the hydrogen peroxide solution may reach the ceiling.

Therefore, recently, for example, Japanese Patent Laid-Open No. 11-17
1508, JP-A-2002-80207, JP-A-200
2-80208, JP-A-2002-80209, etc., a method for producing a purified hydrogen peroxide solution having an impurity content of 1 weight ppt or less is proposed.

[0010]

However, even in these methods, the impurity content of the purified hydrogen peroxide solution is reduced, but an excessive load is applied to the pretreatment of the ion exchange resin used in the purification step. was there. Further, in the hydrogen peroxide water purification step, there is also a problem that a multi-step complicated purification step is required, and it is industrially advantageous to efficiently increase the concentration of impurities existing in hydrogen peroxide water, particularly the concentration of metal impurities, and It was not always sufficient as a method of making it extremely low.

In view of the present situation, the present inventors have reduced the content of impurities existing in hydrogen peroxide water, particularly metal impurities such as iron, to about 1 wt. The inventors have made earnest studies on a method for obtaining highly purified hydrogen peroxide solution.

[0012]

Means for Solving the Problems As a result of intensive studies made by the present inventors, the anion exchange resin mainly removes metallic impurities such as iron in hydrogen peroxide solution, and the purification step by the ion exchange resin. Therefore, in the case of a purification configuration having a cation exchange resin tower as the final stage, it was found that the ion exchange resin needs to be extremely highly purified in order to suppress elution of metal impurities such as iron from this final stage. It was

Such a high-purity anion exchange resin does not cause precipitation of metallic impurities such as iron, and has a specific p
It was found that it can be obtained by using an aqueous carbonate solution and / or an aqueous bicarbonate solution adjusted to the H-oxidation / reduction potential to convert the OH type into a carbonate type or a bicarbonate type. Further, by using an anion exchange resin layer containing such an anion exchange resin that contributes to the removal of metallic impurities such as iron with high purity, preferably as a mixed bed layer of a cation exchange resin and an anion exchange resin, When the metal impurities such as iron in the entire exchange resin layer are reduced to a specific amount or less, it is preferable to obtain purified hydrogen peroxide obtained by setting the space velocity of hydrogen peroxide solution passing through the exchange resin layer to a certain level or less. The inventors have found that the content of metallic impurities such as iron in water can be made extremely low, and have completed the present invention.

At this time, since at least the anion exchange resin is highly purified, the H-type cation exchange resin used together as a mixed bed is a commercially available cation exchange resin (for example, a metal impurity content of about 100 to 200 parts by weight ppb). ), Even if the mixed bed is used, hydrogen peroxide water containing metal impurities such as iron of 1 wt. The inventors have found that an extremely high-purity purified hydrogen peroxide solution having a content of 1 weight ppt or less can be used, and completed the present invention.

That is, the gist of the present invention is that the iron content is 5
It exists in a high purity carbonate type or bicarbonate type anion exchange resin having an extremely low impurity content of less than 00 pg / ml-resin (DRY). Another feature of the present invention is that the OH type strongly basic anion exchange resin is treated with an aqueous carbonate solution and / or an aqueous bicarbonate solution having a pH of less than 8 and an oxidation-reduction potential of 250 mV or less. And the iron content is 5
A method of producing an anion exchange resin having a concentration of 00 pg / ml-resin (DRY) or less.

Still another subject matter of the present invention resides in a method for producing a purified hydrogen peroxide solution, which comprises bringing the hydrogen peroxide solution into contact with the anion exchange resin layer containing the high-purity anion exchange resin.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below. (1) Anion exchange resin and method for producing the same The carbonate type or bicarbonate type anion exchange resin of the present invention (hereinafter sometimes simply referred to as "anion exchange resin").
, The content of iron, wetted with an ion exchange resin layer volume 1ml per state no, 500 pico (10 ¹²⁾ grams or less, or less or "500pg / ml-resin (DRY)",
It is a high-purity anion exchange resin with extremely low impurity content.

By using such a highly purified anion exchange resin, a purified hydrogen peroxide solution having an impurity content of 1 ppt or less can be obtained. The content of iron in the anion exchange resin of the present invention is 500 pg / ml-resin (DRY)
The lower the following, the better. Especially, 450 pg / ml-re
It is preferably sin (DRY) or less. Although the method for producing the anion exchange resin of the present invention is arbitrary, for example, when producing a carbonate type or bicarbonate type anion exchange resin, once the O 2
When the H-type anion exchange resin is converted into a carbonate type or a bicarbonate type, the pH is less than 8 and the redox potential is 250.
Treatment with an aqueous carbonate solution and / or an aqueous bicarbonate solution having a mV or less is preferable because an anion exchange resin with extremely reduced metal impurities can be obtained.

The pH of the carbonate aqueous solution or the bicarbonate aqueous solution used when the anion exchange resin is converted to the carbonate type or the bicarbonate type is naturally higher than 7, but if the pH is too high, iron hydroxide will be used. May be deposited. Therefore, the closer the pH is to neutrality (pH = 7), the more preferable it is.
It is particularly preferably 7.5 or less. Any value may be selected as long as the redox potential is 250 mV or less. If this value is too high, the content of metal impurities such as iron in the anion exchange resin increases due to, for example, precipitation of iron hydroxide, which is not preferable.

However, as a property of iron, the redox potential is 0.
Since it becomes difficult to ionize in an aqueous solution that has dropped to mV or less, the redox potential of the bicarbonate aqueous solution used is 0.
Is more than 250 mV and preferably 20 to 220 mV. Carbonate and bicarbonate solutions are
As such, it often exhibits such a redox potential, so that when the aqueous carbonate solution or bicarbonate aqueous solution is used in the method for producing an anion exchange resin of the present invention, the redox potential of the aqueous solution is 250 mV or less. If they are present, they may be used as they are, or those obtained by dissolving hydrochloric acid, carbon dioxide gas or the like in these aqueous solutions to reduce the redox potential may be used.

Examples of the carbonate or bicarbonate include alkali metal salts such as sodium and potassium, alkaline earth metal salts such as calcium and magnesium salts, and ammonium salts. Generally, as a method of reducing the redox potential, for example, there is a method of adding hydrochloric acid or the like to an aqueous solution of carbonate or an aqueous solution of bicarbonate so that the pH does not become 7 or less.

However, when the anion exchange resin is treated with this aqueous solution, the presence of chlorine inhibits the formation of bicarbonate, and chlorine may be trapped in the anion exchange resin. And when the hydrogen peroxide solution is purified using such an anion exchange resin, chlorine ions are mixed in the purified hydrogen peroxide solution, so a step for removing this is required, etc.
It may be an industrially complicated process.

Therefore, in order to adjust the pH of the aqueous solution used for carbonation or bicarbonate of the anion exchange resin to pH = 8 or less and redox potential = 220 mV or less: Choose a carbonate or bicarbonate that meets this condition). : After the aqueous solution is prepared, a substance that does not inhibit carbonate formation or bicarbonate formation is added to adjust the aqueous solution, and then the pH or the redox potential is adjusted. There are two possible methods.

It is preferable to use ammonium salt, and carbon dioxide gas is blown into the carbonate or bicarbonate aqueous solution, or dry ice is introduced to forcibly dissolve carbon dioxide gas in the aqueous solution to lower the pH. In addition, there is a method of reducing the redox potential. For the purpose of preventing the deposited metal impurities such as iron from adhering to the anion exchange resin, both are preferable, but from the viewpoint of preventing the inclusion of metal impurities, it is preferable not to use a metal salt. The method using a salt is more preferable.

If the conditions of pH and redox potential as described above are satisfied, the concentration of the aqueous carbonate solution or bicarbonate solution and the content of metallic impurities such as iron are arbitrary. The content of metal impurities such as iron is preferably as low as possible, but the carbonate aqueous solution or bicarbonate aqueous solution used in the present invention may contain metal impurities of about 50 ppb as long as the above conditions are satisfied. sell. Therefore, a commercially available general industrial grade reagent can be used as it is without performing a high-purification purification that requires a load, which is industrially very preferable.

(2) Method for producing purified hydrogen peroxide solution In the method for producing purified hydrogen peroxide solution according to the present invention, hydrogen peroxide solution is used in which the iron content is 500 pg / ml-resin (DRY) or less. It is characterized in that it is brought into contact with the anion exchange resin layer containing the anion exchange resin. Above all, the iron content is 300pg
It is preferable to contact with an ion exchange resin layer having a volume of / ml-resin (DRY) or less, and it is particularly preferable to contact with a liquid passing condition having a space time (SV) of 10 [/ hr] or less. The ion exchange resin layer used in the present invention has an iron content of 300 pico (10 ^-12 ) grams or less per 1 ml volume of the ion exchange resin layer in a non-wet state, that is, "300 pg / ml-resin (D
RY) ”or less. At this time, if the iron content is too large, the elution amount may exceed the ion exchange removal capacity, which is not preferable.

In the present invention, the lower the iron content in the ion-exchange resin layer used, the higher the purity of purified hydrogen peroxide water is obtained, which is preferable. However, if an attempt is made to obtain an ion-exchange resin layer having an excessively high purity, the ion-exchange resin layer is overloaded with too much load.
00pg / ml-resin (DRY), especially 10-290pg / ml-resi
It is preferably n (DRY), particularly 50 to 280 pg / ml-resin (DRY).

In the present invention, SV means the amount of liquid passed through the ion-exchange resin volume 1 for 1 hour, and for example, the space velocity (SV) when 1000 ml of resin is passed in 1 hour is: It is 10 [/ hr]. In the present invention, the SV is preferably 10 [/ hr] or less. S
If V is too low, the decomposition of hydrogen peroxide increases, so it may be appropriately selected according to the operating conditions (system internal pressure / temperature). Generally 0.1 to 10 [/ hr], especially 0.3 to
It is preferably 8 [/ hr], particularly preferably 0.5 to 5 [/ hr].

The raw material hydrogen peroxide solution used in the present invention may have any concentration of hydrogen peroxide and any content of impurities (amount of metal impurities, TOC), but it is usually purified to some extent according to a standard method. Hydrogen peroxide solution is used. The hydrogen peroxide concentration in the hydrogen peroxide solution used in the present invention is generally 5 to 70% by weight, but it is 20 to 50% by weight, especially 25 to 40% by weight for electronic industrial applications.
Are preferred.

TOC may be present in the amount of several tens of ppm by weight, but if there are many ionic organic impurities, it may affect the competitive reaction during ion exchange, so 10 wtpp
It is preferably m or less. In the present invention, by using a high-purity anion exchange resin layer containing a specific high-purity anion exchange resin, preferably by passing under a low SV condition, iron and the like in the raw material hydrogen peroxide solution before purification can be obtained. Even when the metal impurity content is 1 weight ppb or more, the effect is remarkably exhibited. In general, it is preferable that the content of such metals and the metal impurities ionized by these metals is small. For example, the content of iron is preferably 1 to 50 ppb, particularly 1 to 40 ppb.

As described above, the anion exchange resin layer used in the present invention preferably has an iron content of 300 pg / ml-resin (DRY) or less. The anion exchange resin layer may be composed of only the anion exchange resin, or may be in the form of a mixed bed mixed with the cation exchange resin. Above all, a mixed bed with a cation exchange resin is preferable because iron eluted from the cation exchange resin can be removed in the layer.

As the cation exchange resin used in combination, any one such as a strongly acidic cation exchange resin and a weakly acidic cation exchange resin can be used. Among them, for the reason of neutral salt removal,
A mixed bed with a strongly acidic cation exchange resin is preferred. When the anion exchange resin layer used in the present invention is a mixed bed of a cation exchange resin and an anion exchange resin, it is preferable that the content of metal impurities in the cation exchange resin used is as small as possible. However, in the present invention, the iron content in the entire anion exchange resin layer is preferably 300 pg / ml-resin (DRY).
Since it should be the following, when mixing with an extremely high-purity anion exchange resin as described above, the content of metal impurities such as iron in the cation exchange resin is 100 pg / ml-resin (DR
Y) The above may be contained. Such a cation exchange resin can be obtained, for example, by washing a commercially available so-called unpurified cation exchange resin with pure water.

As the anion exchange resin used in the method for producing purified hydrogen peroxide solution of the present invention, any one such as OH type, carbonate type, bicarbonate type (bicarbonate type), ammonium salt type and the like is used. Among them, the carbonate type and the bicarbonate type are preferable from the viewpoints that the metal impurities such as iron can be extremely reduced and the amount of decomposition of the hydrogen peroxide solution to be contacted can be reduced. The conditions other than those described above in the method for producing a purified hydrogen peroxide solution of the present invention may be appropriately selected and determined from conventional techniques. For example, as an operating condition of an anion exchange resin column having an anion exchange resin layer, in order to stably produce purified hydrogen peroxide solution by dissolving carbon dioxide gas and oxygen generated in this column in hydrogen peroxide water. , 1 hydrogen peroxide solution in the tower
Cool to 0 ° C or lower, preferably 7 ° C or lower, 0.5 to 5k
It is preferable to supply the hydrogen peroxide solution as a raw material with a back pressure of gf / cm ² .

[0034]

EXAMPLES Next, the present invention will be described concretely by showing Examples. The present invention is not limited to the following examples unless it exceeds the gist. In the examples, the iron content in hydrogen peroxide water was measured using an ICP mass spectrometer. The pH was measured using a pH meter "D-24" manufactured by HORIBA and a pH electrode "type S005". The redox potential was measured using the above-mentioned pH meter and the electrode "9300-10D".

[Example 1] A chloride type anion exchange resin (manufactured by Mitsubishi Chemical Co., Ltd., Diaion PA316L: "Diaion" is a registered trademark of Mitsubishi Chemical Co., Ltd.) was packed in a fluororesin column inner wall, and 2N- The NaOH aqueous solution was down-flowed with SV = 2.5 for 2 hours and then washed with water.

Next, the iron content is 40 weight parts ppb, p
1N-ammonium bicarbonate aqueous solution (7.9% by weight, iron content: 40, H: 7.5, redox potential: 100 mV)
1.27 kg of weight ppb) was contacted by downflow at SV = 2 to form a bicarbonate (this corresponds to contacting 1000 g of ammonium bicarbonate per liter of wet resin). Then, the bicarbonate type anion exchange resin was washed with 50 times the amount of pure water. The iron content in the obtained bicarbonate type anion exchange resin was 440 pg / ml-resin (DRY). The results are shown in Table 1.

Comparative Example 1 A commercially available reagent grade sodium bicarbonate was diluted with ultrapure water to prepare an aqueous sodium bicarbonate solution having a concentration of 6% by weight. Using this, the ion exchange resin was bicarbonated as in Example 2. The results are shown in Table 1.
The iron content in the aqueous sodium bicarbonate solution used was 5 weight ppb.
However, the iron content in the obtained bicarbonate type anion exchange resin was 990 pg / ml-resin (DRY).

[0038]

[Table 1]

As is clear from Table 1, the iron content in the bicarbonate aqueous solution used in Comparative Example 1 was lower than that in Example 1, but the aqueous solution used in Example 1 was more ionic. This indicates that the amount of iron taken into the exchange resin is small, and high purity is possible. The reason for this is not clear, but from the pH-oxidation-reduction potential diagram, iron in the aqueous solution used in Comparative Example 1 exists as a hydroxide, and iron in the aqueous solution used in Example 1 is an oxide (cation It is considered that iron as a hydroxide is deposited and physically adheres to the surface of the anion exchange resin to be incorporated. On the other hand, Example 1
In the aqueous solution, most of iron is present as cations, and it is difficult for the iron to be captured by the anion exchange resin, and most of it is washed away as it is. Therefore, it is considered that the resin can be highly purified.

[Example 2] A cation exchange resin prepared in H type (manufactured by Mitsubishi Chemical Corporation, Diaion SKT20L),
A bicarbonate type anion exchange resin prepared in the same manner as in Example 1 was mixed at a volume ratio of 1: 1 to form an ion exchange resin layer (mixed bed).
The ion exchange resin used for was prepared. The content of iron in this ion exchange resin for mixed beds is 270 pg / ml-resin (DRY)
Met.

An ion exchange resin column having an inner wall made of a fluororesin was filled with 1000 ml of this mixed bed ion exchange resin to form an ion exchange resin layer. Next, 25
A 35 wt% hydrogen peroxide solution containing ppb by weight is cooled to 5 ° C., and 3.5 kgf / c at SV = 1 [/ hr]
Liquid was passed through the ion exchange resin layer described above under the condition of m ² . The purified hydrogen peroxide solution obtained has an iron content of 0.5 weight pp.
For other elements, as shown in Table 2 below,
It was an extremely high-purity purified hydrogen peroxide solution. For elements that could not be detected (below the detection limit), "ND"
I wrote.

[0042]

[Table 2]

[Comparative Example 2] A cation exchange resin prepared in H form (manufactured by Mitsubishi Chemical Corporation, Diaion PK228) and a bicarbonate type anion exchange resin prepared in the same manner as in Comparative Example 1 were used at a volume ratio of 1 :. Example 2 was repeated except that the mixed bed resin mixed in 1 was used. Iron in mixed bed resin is 800 pg / ml-resi
n (DRY), which was not highly purified. The purified hydrogen peroxide solution obtained had a high iron content of 3 wt.

[Example 3] In the conversion of the anion-exchange resin into bicarbonate type, the amount of ammonium bicarbonate to be contacted was set to swelling resin 1.
Example 1 except that the amount was increased to 3000 g per liter
I went the same way. The iron content in the obtained bicarbonate type anion exchange resin was 500 pg / ml-resin (DRY). As is apparent from the results of Example 1, in the present invention, even if a large amount of ammonium bicarbonate aqueous solution and the anion exchange resin are brought into contact with each other, the content of metal impurities (iron) hardly changes. It can be seen that the increase in the content of metal impurities is suppressed.

As described above, the high-purity anion exchange resin obtained by the method for producing an anion exchange resin of the present invention is
A highly purified purified hydrogen peroxide solution can be obtained by preferably using a mixed bed with a conventional high purity cation exchange resin.

Example 4 1 volume of dry ice was added to 10 volumes of a 6 wt% sodium bicarbonate aqueous solution, and the mixture was allowed to stand at room temperature until the solid completely disappeared. The pH of the obtained aqueous solution was 7.4 and the redox potential was 200 mV. A bicarbonate type anion exchange resin was prepared in the same manner as in Example 2 except that this aqueous solution was used. This was mixed with a commercially available H-type cation exchange resin (manufactured by Mitsubishi Chemical Corporation, Diaion SKT20L) at a volume ratio of 1: 1 to prepare a mixed bed. The iron content in the obtained mixed bed resin layer is 300 pg
It was as low as / ml-resin (DRY).

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Makoto Ishikawa             1-1 Kurosaki Shiroishi, Hachiman Nishi Ward, Kitakyushu City, Fukuoka Prefecture               Within Mitsubishi Chemical Corporation

Claims (11)

[Claims] 1. A carbonate type or bicarbonate type anion exchange resin having an iron content of 500 pg / ml-resin (DRY) or less. 2. An OH-type strongly basic anion exchange resin is added with p
The method for producing an anion exchange resin according to claim 1, which comprises treating with an aqueous carbonate solution and / or an aqueous bicarbonate solution having H of less than 8 and an oxidation-reduction potential of 250 mV or less. 3. A method for producing purified hydrogen peroxide water, which comprises bringing hydrogen peroxide water into contact with the anion exchange resin layer containing the anion exchange resin according to claim 1. 4. The iron content of the anion exchange resin layer is 30.
The method for producing purified hydrogen peroxide water according to claim 3, wherein the concentration is 0 pg / ml-resin (DRY) or less. 5. A hydrogen peroxide solution having a space time (SV) of 1
The method for producing purified hydrogen peroxide solution according to claim 3 or 4, wherein the method is brought into contact with the anion exchange resin layer under a liquid passing condition of 0 [/ hr] or less. 6. The production of purified hydrogen peroxide solution according to any one of claims 3 to 5, wherein hydrogen peroxide solution having an iron content of 1 weight ppb or more is brought into contact with the anion exchange resin layer. Method. 7. The content of each metal in the purified hydrogen peroxide solution is 1 weight ppt or less.
7. The method for producing purified hydrogen peroxide water according to any one of items 1 to 6. 8. The purified peroxide according to claim 3, wherein the anion exchange resin in the anion exchange resin layer is a strongly basic anion exchange resin and further contains a strongly acidic cation exchange resin. Method for producing hydrogen water. 9. The purified hydrogen peroxide solution according to claim 3, wherein the anion exchange resin layer is a mixed bed of a strongly acidic cation exchange resin and a strongly basic anion exchange resin. Production method. 10. The strongly basic anion exchange resin is a carbonate type and / or a bicarbonate type.
Or the method for producing purified hydrogen peroxide water according to item 9. 11. A strong basic anion exchange resin having a pH of less than 8 and an oxidation-reduction potential of 250 mV or less is treated with an aqueous carbonate solution and / or an aqueous bicarbonate solution of the OH type strong basic anion exchange resin. The method for producing purified hydrogen peroxide solution according to any one of claims 3 to 10, characterized in that