JP2003332096A - Static electricity eliminating control device - Google Patents
Static electricity eliminating control deviceInfo
- Publication number
- JP2003332096A JP2003332096A JP2002135059A JP2002135059A JP2003332096A JP 2003332096 A JP2003332096 A JP 2003332096A JP 2002135059 A JP2002135059 A JP 2002135059A JP 2002135059 A JP2002135059 A JP 2002135059A JP 2003332096 A JP2003332096 A JP 2003332096A
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- Prior art keywords
- voltage
- polarity
- positive
- static electricity
- static
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Elimination Of Static Electricity (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、走行するフィルム
や紙や半導体等の帯電物体を除電する静電気除去装置、
特に、除電電極へ印加する高電圧をフィードバック制御
する静電気除去制御装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a static electricity removing device for removing static electricity from a charged object such as a running film, paper or semiconductor.
In particular, the present invention relates to a static electricity removal control device that feedback-controls a high voltage applied to a static elimination electrode.
【0002】[0002]
【従来の技術】特公平5−15040号公報には、帯電
している走行物体を高周波除電器による高周波コロナ放
電で除電処理した後、その高周波除電処理後の走行物体
の残留電位と極性を電位検出器で検出し、その検出電位
及び極性に従って直流除電器を自動制御、つまり検出極
性が正のときは直流除電器に負の直流電圧を印加し、検
出極性が負のときは直流除電器に正の直流電圧を印加し
て、残留電位と相殺する直流コロナ放電を生じさせるこ
とにより中和除電する除電方法が開示されている。2. Description of the Related Art In Japanese Patent Publication No. 5-15040, a charged moving object is neutralized by a high-frequency corona discharge by a high-frequency static eliminator, and then the residual potential and polarity of the moving object after the high-frequency static neutralization are set to a potential. It is detected by the detector and the DC static eliminator is automatically controlled according to the detected potential and polarity.In other words, when the detection polarity is positive, a negative DC voltage is applied to the DC static eliminator, and when the detection polarity is negative, the DC static eliminator is applied. A static neutralization method is disclosed in which a positive DC voltage is applied to generate a DC corona discharge that cancels the residual potential, thereby neutralizing and discharging.
【0003】[0003]
【発明が解決しようとする課題】しかし、この方法では
次のような問題があり、帯電物体が樹脂フィルム等のよ
うに、正負の帯電極性が微細に混在しているような場合
には、その表面電位を適切に除電することができない。However, this method has the following problems, and when a charged object has a finely mixed positive and negative charging polarities such as a resin film, the problem is The surface potential cannot be properly removed.
【0004】樹脂フィルムの場合、コーティングの濡れ
性改善のために、コロナ放電により表面処理することが
多いが、その処理表面を静電気的に細かく観察すると、
正負の帯電極性が複雑な模様を呈して微細に混在してい
る。このような樹脂フィルムの電位と極性を電位検出器
で測定した場合、樹脂フィルムの表面の帯電極性が全体
として正の極性が優勢なときには、電位検出器で検出さ
れる極性は正の極性となり、逆に全体として負の極性が
優勢なときには、電位検出器で検出される極性は負の極
性となる。In the case of a resin film, in order to improve the wettability of the coating, surface treatment is often carried out by corona discharge.
The positive and negative charging polarities have a complicated pattern and are finely mixed. When measuring the potential and polarity of such a resin film with a potential detector, when the positive polarity as a whole of the charging polarity of the surface of the resin film is dominant, the polarity detected by the potential detector becomes a positive polarity, On the contrary, when the negative polarity is dominant as a whole, the polarity detected by the potential detector is the negative polarity.
【0005】電位検出器で検出される極性は、このよう
に優勢な一方の帯電極性を示しているだけであるのに、
その正負に従って直流除電器に印加する電圧の極性が逆
になるように、上記のように極性を切り替えて、電位検
出器による検出極性と逆極性となる一方の極性のイオン
のみを生成する除電方法では、その生成したイオンと同
極性の帯電部分の電荷が残ることになり、正負の帯電極
性が複雑な模様を呈して微細に混在している帯電につい
ては、充分な除電ができない。また、帯電電位が零に近
い場合には、電位検出器で検出される極性が不安定とな
って、正負が頻繁に反転する状況となるが、それに応じ
て直流除電器に印加する電圧の極性を切り替えるとなる
と、その制御が複雑となり、安定した除電効果をあげる
ことができない。Although the polarity detected by the potential detector shows only one of the dominant charging polarities as described above,
The static elimination method that switches the polarities as described above so that the polarity of the voltage applied to the DC static eliminator is reversed according to the positive or negative polarity and generates only ions of one polarity opposite to the polarity detected by the potential detector. Then, the charge of the charged portion having the same polarity as that of the generated ions remains, and it is not possible to sufficiently remove the static charge of the positive and negative charge polarities that are present in a complicated pattern and are minutely mixed. Also, when the charged potential is near zero, the polarity detected by the potential detector becomes unstable, and the positive and negative polarities are frequently inverted. However, the polarity of the voltage applied to the DC static eliminator is changed accordingly. When it is switched, the control becomes complicated and a stable static elimination effect cannot be obtained.
【0006】そこで、本発明の目的は、正負の帯電極性
が複雑な模様を呈して微細に混在している帯電について
も、適切に除電できるとともに、帯電電位が零に近い場
合にも安定した動作で緻密に除電できる静電気除去制御
装置を提供することにある。Therefore, an object of the present invention is to appropriately eliminate static electricity even when the positive and negative electrification polarities have a complicated pattern and are minutely mixed, and to perform stable operation even when the electrification potential is close to zero. An object of the present invention is to provide a static electricity elimination control device capable of precisely eliminating static electricity.
【0007】[0007]
【課題を解決するための手段】本発明による静電気除去
制御装置は、正及び負の高電圧を除電電極に同時に印加
して、正及び負のイオンを同時に生成して除電すること
を基本とし、静電気測定器から帯電物体の極性の電位に
応じた極性の検出電圧を得て、それが零又はほぼ零にな
るまで、正及び負のイオンを同時に生成しながら除電電
極への印加電圧を正負別々に増減制御するようにしたも
のである。The static electricity elimination control device according to the present invention is based on the fact that positive and negative high voltages are simultaneously applied to the static elimination electrodes to simultaneously generate positive and negative ions to eliminate static electricity. Obtain the detection voltage of the polarity according to the polarity potential of the charged object from the static electricity measurement device, and generate positive and negative ions at the same time until the voltage becomes zero or almost zero. The increase and decrease are controlled.
【0008】すなわち、放電により正負のイオンを発生
させて帯電物体を除電するための除電電極と、この除電
電極に正負それぞれの高電圧を同時に印加するととも
に、その印加電圧を入力電圧に応じて可変できる正高電
圧発生回路及び負高電圧発生回路と、除電電極による除
電領域を通過してきた帯電物体の電位をその極性ととも
に非接触に検出して、その極性の電位に応じた極性の検
出電圧を生ずる静電気測定器と、該静電気測定器から出
力される極性の検出電圧に応じ、それが零又はほぼ零に
なるまで正高電圧発生回路及び負高電圧発生回路への入
力電圧を正負別々に増減制御する制御回路とを備えてな
ることを特徴とする。That is, a discharging electrode for discharging positive and negative ions by discharging to discharge a charged object and a high positive and negative voltage are simultaneously applied to the discharging electrode, and the applied voltage is varied according to the input voltage. Positive and negative high voltage generation circuits that can be performed, and the potential of the charged object that has passed through the static elimination area by the static elimination electrode is detected in a non-contact manner with its polarity, and a detection voltage of the polarity corresponding to the potential of that polarity is generated. The input voltage to the positive high voltage generation circuit and the negative high voltage generation circuit is controlled to increase or decrease separately according to the static electricity measurement device and the polarity detection voltage output from the static electricity measurement device until it becomes zero or almost zero. And a control circuit.
【0009】静電気測定器からの検出電圧が零(又はほ
ぼ零)になっても、除電電極には正及び負の最低の基準
電圧が印加されて、正負のイオンが最低量以上は常に生
成されるようにするため、制御回路は、正高電圧発生回
路及び負高電圧発生回路への入力電圧を、それぞれ常に
最低基準電圧以上としてそれ以上の電圧で増減制御す
る。Even if the detected voltage from the electrostatic measuring device becomes zero (or almost zero), the minimum positive and negative reference voltages are applied to the static elimination electrode, and positive and negative ions are always generated in the minimum amount or more. In order to do so, the control circuit always controls the input voltage to the positive high voltage generation circuit and the negative high voltage generation circuit to be the minimum reference voltage or higher, and controls the increase and decrease at voltages higher than that.
【0010】制御回路としては、アナログ制御式とデジ
タル制御式とがあり、前者の場合には、静電気測定器か
ら出力される極性の検出電圧を入力し、比例動作と積分
動作を行うことで、入力された極性の検出電圧の極性変
化及び電圧変化分に応じた極性の電圧を出力するPI制
御部と、このPI制御部からの出力を正高電圧発生回路
と負高電圧発生回路へそれぞれ分配し、PI制御部から
の出力が負の電圧のときはその電圧の増減分だけ正高電
圧発生回路への入力電圧を増減させ、PI制御部からの
出力が正の電圧のときはその電圧の増減分だけ負高電圧
発生回路への入力電圧を増減させる電圧分配部とを有す
る。The control circuit is classified into an analog control type and a digital control type. In the former case, by inputting the polarity detection voltage output from the static electricity measuring device and performing the proportional operation and the integral operation, A PI control unit that outputs a polarity voltage corresponding to the polarity change and voltage change amount of the input polarity detection voltage, and an output from this PI control unit is distributed to a positive high voltage generation circuit and a negative high voltage generation circuit, respectively. , When the output from the PI control unit is a negative voltage, the input voltage to the positive high voltage generation circuit is increased or decreased by the increase or decrease in that voltage, and when the output from the PI control unit is a positive voltage, the increase or decrease in the voltage is increased or decreased. And a voltage distribution unit that increases or decreases the input voltage to the negative high voltage generation circuit.
【0011】デジタル制御式の場合には、静電気測定器
から出力される極性の検出電圧をアナログ/デジタル変
換するAD変換部と、その変換されたデジタル信号を入
力し、変化した極性の電圧変化分から、正高電圧発生回
路と負高電圧発生回路のうちの制御すべき極性の高電圧
発生回路に対する制御量を求め、それをデジタル信号と
して出力し、その動作を静電気測定器から出力される極
性の検出電圧が零又はほぼ零になるまで繰り返すマイク
ロコンピュータと、該マイクロコンピュータからの出力
をデジタル/アナログ変換して、制御すべき極性の高電
圧発生回路への入力電圧を増減するD/A変換部とを有
する。In the case of the digital control type, an AD converter for analog / digital converting the polarity detection voltage output from the static electricity measuring device and the converted digital signal are input, and the voltage change of the changed polarity is calculated. , The control amount for the high-voltage generation circuit of the polarity to be controlled among the positive high-voltage generation circuit and the negative high-voltage generation circuit is calculated, and it is output as a digital signal, and its operation is detected by the polarity output from the static electricity measuring device A microcomputer that repeats until the voltage becomes zero or almost zero, and a D / A conversion unit that performs digital / analog conversion on the output from the microcomputer to increase / decrease the input voltage to the high voltage generation circuit of the polarity to be controlled. Have.
【0012】静電気測定器としては、帯電物体と検出電
極との間に生じた静電容量を機械的手段により周期的に
変化させて交流電圧を生じ、これをチョッパ処理した
後、整流及び直流増幅することで帯電物体の極性及び電
位に応じた極性の検出電圧を生ずるものが良い。As the static electricity measuring device, the electrostatic capacitance generated between the charged object and the detection electrode is periodically changed by mechanical means to generate an AC voltage, which is chopper-processed, and then rectified and DC amplified. By doing so, it is preferable to generate a detection voltage having a polarity according to the polarity and potential of the charged object.
【0013】静電気測定器から出力される極性の検出電
圧が異常な値になったときの対策のために、その異常を
検出する異常検出回路を備えると良い。異常検出回路
は、静電気測定器から出力される極性の検出電圧の絶対
値が所定の設定範囲を超えたときに警報信号を出力する
か、又は、静電気測定器から出力される極性の検出電圧
の絶対値が所定の制限範囲を超えたときに正高電圧発生
回路及び負高電圧発生回路からの出力を停止する。As a countermeasure when the polarity detection voltage output from the static electricity measuring device has an abnormal value, an abnormality detection circuit for detecting the abnormality may be provided. The abnormality detection circuit outputs an alarm signal when the absolute value of the polarity detection voltage output from the static electricity measurement device exceeds a predetermined setting range, or it outputs the alarm voltage of the polarity detection voltage output from the static electricity measurement device. When the absolute value exceeds the predetermined limit range, the outputs from the positive high voltage generation circuit and the negative high voltage generation circuit are stopped.
【0014】制御回路にて正高電圧発生回路及び負高電
圧発生回路を制御されて正負のイオン量を制御する前記
除電電極の他に、それ以前に帯電物体を予備除電する予
備除電電極を備えても良い。In addition to the static elimination electrode which controls the positive high voltage generation circuit and the negative high voltage generation circuit by the control circuit to control the amount of positive and negative ions, a preliminary static elimination electrode for preliminary static elimination of the charged object is provided before that. Is also good.
【0015】[0015]
【発明の実施の形態】次に、本発明の実施の形態を図面
に基づいて詳細に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described in detail with reference to the drawings.
【0016】図1に、アナログ制御式とした場合の本発
明の実施例を示す。除電対象物である樹脂フィルム等の
帯電物体1は矢印方向に走行され、除電電極2からの正
負のイオンで除電された後、静電気測定器3で帯電電位
とともにその極性を検出される。静電気測定器3は、除
電電極2による除電領域を通過してきた帯電物体1の電
位をその極性とともに非接触に検出して、その極性の電
位に応じた極性の検出電圧を生ずる。この静電気測定器
3から出力される極性の検出電圧は、制御装置Aに入力
され、この制御装置Aにて除電電極2への印加電圧が後
述のようにフィードバック制御される。同図では、除電
電極2として正負共通のものを示しているが、正負別々
のものでもよい。FIG. 1 shows an embodiment of the present invention in the case of analog control type. A charged object 1 such as a resin film, which is an object of static elimination, travels in the direction of the arrow, is neutralized by positive and negative ions from the static elimination electrode 2, and then the electrostatic potential is detected by the static electricity measuring device 3 together with the charge potential. The static electricity measuring device 3 non-contactly detects the potential of the charged object 1 which has passed through the static elimination region by the static elimination electrode 2 together with its polarity, and generates a detection voltage of the polarity corresponding to the potential of the polarity. The polarity detection voltage output from the static electricity measuring device 3 is input to the controller A, and the voltage applied to the static elimination electrode 2 is feedback-controlled by the controller A as described later. In the same figure, the positive and negative electrodes are shown as the static elimination electrodes 2, but the positive and negative electrodes may be separated.
【0017】図2及び図3に静電気測定器3の構成例を
示す。静電気測定器3は、検出孔4を有するセンサケー
ス5内に、一対の圧電素子6を付設した音叉型振動子7
及び検出電極8を内蔵しており、検出孔4を通じて検出
電極8へ向かう被測定物からの電気力線を音叉型振動子
7の振動によりチョッピングし、インピーダンス変換部
9を通じてバンドパスフィルタ交流増幅部10により交
流電圧として取り出すようになっている。その交流電圧
は、検出電極8での検出極性の正負で位相が180度ず
れたものとなるので、これを整流部11にて直流電圧に
整流した後、直流増幅部12にて増幅することにより、
図4に示すように、帯電物体1の極性の電位に応じた極
性の直流の検出電圧として静電気測定器3から出力され
る。すなわち、帯電物体1が正の帯電電位の場合には、
検出電圧は、正の帯電電位の変化に比例して正の電圧で
直線的に変化し、帯電物体1が負の帯電電位の場合に
は、検出電圧は、負の帯電電位の変化に比例して負の電
圧で直線的に変化する。2 and 3 show a configuration example of the static electricity measuring device 3. The static electricity measuring device 3 includes a tuning fork type vibrator 7 in which a pair of piezoelectric elements 6 are attached in a sensor case 5 having a detection hole 4.
Also, the detection electrode 8 is built in, and the electric force line from the object to be measured, which is directed to the detection electrode 8 through the detection hole 4, is chopped by the vibration of the tuning fork vibrator 7, and the bandpass filter AC amplification unit is passed through the impedance conversion unit 9. It is designed to be taken out as an AC voltage by 10. The AC voltage has a phase difference of 180 degrees depending on whether the detection polarity of the detection electrode 8 is positive or negative. Therefore, the AC voltage is rectified by the rectification unit 11 and then amplified by the DC amplification unit 12. ,
As shown in FIG. 4, the static electricity measuring device 3 outputs a DC detection voltage having a polarity corresponding to the polarity potential of the charged object 1. That is, when the charged object 1 has a positive charging potential,
The detection voltage changes linearly with the positive voltage in proportion to the change in the positive charging potential, and when the charged object 1 has the negative charging potential, the detection voltage is proportional to the change in the negative charging potential. Changes linearly with negative voltage.
【0018】音叉型振動子7は、その圧電素子6に圧電
音叉発振部13からの発振電圧(自励発振)を印加され
ることにより振動する。この自励発振による発振信号は
監視され、異常があるときは故障表示部14にて表示さ
れる。The tuning fork type vibrator 7 vibrates when an oscillating voltage (self-excited oscillation) from the piezoelectric tuning fork oscillator 13 is applied to the piezoelectric element 6. The oscillation signal due to this self-excited oscillation is monitored, and when there is an abnormality, it is displayed on the failure display unit 14.
【0019】バンドパスフィルタ交流増幅部10、整流
部11、直流増幅部12、圧電音叉発振部13には、安
定化電源部15にて安定化させた電源が供給される。バ
ンドパスフィルタ交流増幅部10は、レンジ切替スイッ
チ16にてレンジを段階的に切り替えることができ、ま
た直流増幅部12は、零調整部17にて出力である検出
電圧の零調整ができるようになっている。The band-pass filter AC amplification section 10, rectification section 11, DC amplification section 12, and piezoelectric tuning fork oscillation section 13 are supplied with power stabilized by the stabilizing power supply section 15. The band-pass filter AC amplification unit 10 can change the range stepwise by the range change switch 16, and the DC amplification unit 12 enables the zero adjustment unit 17 to perform zero adjustment of the detection voltage which is the output. Has become.
【0020】静電気測定器3から出力された正又は負の
検出電圧は、図1において、制御装置Aへその入力端子
18から入力される。制御装置Aは、除電電極2への印
加電圧をフィードバック制御するために、PI制御回路
19、電圧分配回路20、正高電圧発生回路21、負高
電圧発生回路22を有するほか、異常電圧のときの制御
のために、絶対値回路23、比較器24・25、タイマ
26、異常時制御回路27、表示器28を有する。The positive or negative detection voltage output from the static electricity measuring device 3 is input to the control unit A from its input terminal 18 in FIG. The control device A has a PI control circuit 19, a voltage distribution circuit 20, a positive high voltage generation circuit 21, a negative high voltage generation circuit 22 in order to perform feedback control of the voltage applied to the static elimination electrode 2, and also has an abnormal voltage. For control, it has an absolute value circuit 23, comparators 24 and 25, a timer 26, an abnormal time control circuit 27, and a display 28.
【0021】PI制御回路19は、比例制御器29と積
分制御器30と加算器31とで構成され、静電気測定器
3からの正又は負の検出電圧に対し、比例した動作を行
う比例制御器29よりの出力と、積分動作を行う積分制
御器30よりの出力とを加算器31で加算することによ
って、静電気測定器3からの検出電圧の極性変化及び電
圧変化分に応じた極性の電圧を出力する。The PI control circuit 19 is composed of a proportional controller 29, an integral controller 30, and an adder 31, and performs a proportional operation with respect to the positive or negative detection voltage from the static electricity measuring device 3. By adding the output from 29 and the output from the integration controller 30 that performs the integration operation with the adder 31, the polarity change of the detection voltage from the electrostatic measuring instrument 3 and the voltage of the polarity corresponding to the voltage change amount are obtained. Output.
【0022】このような電圧を入力される電圧分配回路
20は、正負それぞれの極性に対応するフィルタ回路3
2・33及び一対の加算器34・35で構成されてい
る。正側のフィルタ回路32は、静電気測定器3の検出
電圧が負のときに、その電圧変化に比例して直線的に変
化する電圧を取り出し、負側のフィルタ回路33は、静
電気測定器3の検出電圧が正のときに、その電圧変化に
比例して直線的に変化する電圧を取り出す。加算器34
・35には最低基準電圧が入力されており、正側の加算
器34は、フィルタ回路32にて取り出された電圧に最
低基準電圧を加算した電圧を正高電圧発生回路21へ入
力し、負側の加算器35は、フィルタ回路33にて取り
出された電圧に最低基準電圧を加算した電圧を負高電圧
発生回路22に入力する。The voltage distribution circuit 20 to which such a voltage is input has a filter circuit 3 corresponding to positive and negative polarities.
It is composed of 2.33 and a pair of adders 34 and 35. The filter circuit 32 on the positive side takes out a voltage that linearly changes in proportion to the voltage change when the detection voltage of the static electricity measuring device 3 is negative, and the filter circuit 33 on the negative side extracts the voltage of the static electricity measuring device 3. When the detected voltage is positive, a voltage that linearly changes in proportion to the voltage change is extracted. Adder 34
The lowest reference voltage is input to 35, and the adder 34 on the positive side inputs the voltage obtained by adding the lowest reference voltage to the voltage extracted by the filter circuit 32 to the positive high voltage generation circuit 21, and the negative side. The adder 35 inputs the voltage obtained by adding the lowest reference voltage to the voltage extracted by the filter circuit 33 to the negative high voltage generation circuit 22.
【0023】従って、正高電圧発生回路21及び負高電
圧発生回路22には、静電気測定器3からの正又は負の
検出電圧が零のときでも、最低基準電圧以上の電圧は常
に印加されており、静電気測定器3からの検出電圧が負
のときには、正高電圧発生回路21への入力電圧(最低
基準電圧以上)が、負の検出電圧の増減に比例して増減
し、静電気測定器3からの検出電圧が正のときには、負
高電圧発生回路22への入力電圧(最低基準電圧以上)
が、正の検出電圧の増減に比例して増減する。Therefore, even when the positive or negative detection voltage from the static electricity measuring device 3 is zero, the positive high voltage generating circuit 21 and the negative high voltage generating circuit 22 are always applied with a voltage higher than the minimum reference voltage. When the detection voltage from the static electricity measuring device 3 is negative, the input voltage to the positive high voltage generating circuit 21 (minimum reference voltage or higher) increases / decreases in proportion to the increase / decrease in the negative detection voltage. When the detection voltage is positive, the input voltage to the negative high voltage generating circuit 22 (minimum reference voltage or higher)
However, it increases / decreases in proportion to the increase / decrease in the positive detection voltage.
【0024】図5に、正高電圧発生回路21及び負高電
圧発生回路22に対する電圧分配回路20のこのような
制御特性を示す。同図において、今、cの直線上で除電
後の電位が零、つまり静電気測定器3の検出電圧が零に
なり、このとき正高電圧発生回路21からの正の出力電
圧は(1)点の値、負高電圧発生回路22からの負の出
力電圧は(2)点の値である最低電圧にそれぞれ制御さ
れて、正のイオン量が負のイオン量よりも多い状態で安
定しているとする。この状態から、静電気測定器3の検
出電圧が正側に移行すると、制御点はdで示す直線上に
移動し、正高電圧発生回路21からの正の出力電圧は
(3)点の値まで減少するのに対し、負高電圧発生回路
22からの負の出力電圧は(4)点の値である最低電圧
を維持し、正のイオン量のみが減少する。FIG. 5 shows such control characteristics of the voltage distribution circuit 20 for the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22. In the figure, now, the potential after static elimination is zero on the straight line of c, that is, the detection voltage of the static electricity measuring device 3 becomes zero, and at this time, the positive output voltage from the positive high voltage generating circuit 21 is at point (1). Value, the negative output voltage from the negative high voltage generation circuit 22 is controlled to the minimum voltage, which is the value at point (2), and is stable in a state in which the positive ion amount is larger than the negative ion amount. To do. From this state, when the detection voltage of the static electricity measuring device 3 shifts to the positive side, the control point moves on the straight line indicated by d, and the positive output voltage from the positive high voltage generation circuit 21 decreases to the value at the point (3). On the other hand, the negative output voltage from the negative high voltage generation circuit 22 maintains the minimum voltage which is the value at point (4), and only the amount of positive ions decreases.
【0025】静電気測定器3の検出電圧が更に正側に移
行すると、制御点はeで示す直線上に移動し、正高電圧
発生回路21からの正の出力電圧は(5)点の値である
最低電圧になるのに対し、負高電圧発生回路22からの
負の出力電圧は(6)点の値へと上昇し、今度は正のイ
オン量よりも負のイオン量が多くなる。このような制御
は、正側のVpmaxから負側のVnmaxの範囲で行
われる。When the detected voltage of the static electricity measuring device 3 further shifts to the positive side, the control point moves on the straight line indicated by e, and the positive output voltage from the positive high voltage generating circuit 21 is the value at point (5). In contrast to the lowest voltage, the negative output voltage from the negative high voltage generation circuit 22 rises to the value at point (6), and this time the negative ion amount becomes larger than the positive ion amount. Such control is performed in the range from Vpmax on the positive side to Vnmax on the negative side.
【0026】図1において、絶対値回路23は、静電気
測定器3からの検出電圧の絶対値を出力して2つの比較
器24・25に入力する。一方の比較器24には、異常
電圧設定器36で設定した異常とする規準電圧が入力さ
れ、他方の比較器25には、異常とする規準電圧を電圧
調整器37で調整したその例えば80%の電圧、つまり
警報するための規準電圧が入力されている。図6にその
関係を示す。In FIG. 1, the absolute value circuit 23 outputs the absolute value of the detected voltage from the static electricity measuring device 3 and inputs it to the two comparators 24 and 25. An abnormal reference voltage set by the abnormal voltage setting device 36 is input to one comparator 24, and the other reference voltage adjusted to an abnormal reference voltage by the voltage adjuster 37 is input to the other comparator 25, for example, 80% thereof. Voltage, that is, the reference voltage for alarm is input. FIG. 6 shows the relationship.
【0027】異常時制御回路27は、静電気測定器3か
らの検出電圧の絶対値が、警報するための規準電圧を超
えたときに警報信号を発して警報を行い、更に、静電気
測定器3からの検出電圧の絶対値が、異常とする規準電
圧、つまり制限範囲を超えたときには、タイマ26によ
る設定時間後に正高電圧発生回路21及び負高電圧発生
回路22に対し出力を停止させる。The abnormal condition control circuit 27 gives an alarm by issuing an alarm signal when the absolute value of the detected voltage from the static electricity measuring device 3 exceeds the reference voltage for issuing an alarm, and further, from the static electricity measuring device 3 When the absolute value of the detected voltage exceeds the reference voltage to be abnormal, that is, the limit range, the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22 are stopped from outputting after the time set by the timer 26.
【0028】表示器28は、静電気測定器3の検出電圧
をその極性とともに表示し、また表示切替スイッチ38
を切り替えることにより、異常電圧設定器36の設定電
圧を表示する。The display 28 displays the detected voltage of the static electricity measuring device 3 together with its polarity, and the display changeover switch 38.
The set voltage of the abnormal voltage setting device 36 is displayed by switching.
【0029】次に、図7に、デジタル制御式とした場合
の本発明の実施例を示す。静電気測定器3から出力され
る極性の検出電圧は、電圧変換回路39によりアナログ
/デジタル変換に適する正負別々のアナログデータに整
形後、A/D変換回路40によりデジタルデータに変換
してマイクロコンピュータ41に入力される。また、最
低出力電圧設定器42及び異常電圧設定器43による電
圧も、A/D変換回路40でデジタルデータに変換して
マイクロコンピュータ41に入力される。Next, FIG. 7 shows an embodiment of the present invention in the case of a digital control type. The detection voltage of the polarity output from the static electricity measuring device 3 is shaped by the voltage conversion circuit 39 into separate positive and negative analog data suitable for analog / digital conversion, and then converted into digital data by the A / D conversion circuit 40 to be converted into the microcomputer 41. Entered in. Further, the voltages output from the lowest output voltage setting device 42 and the abnormal voltage setting device 43 are also converted into digital data by the A / D conversion circuit 40 and input to the microcomputer 41.
【0030】マイクロコンピュータ41は、静電気測定
器3より出力された正又は負の検出電圧のデジタルデー
タから、その極性及び電位の変化分に基づき、正高電圧
発生回路21と負高電圧発生回路22のうちの制御すべ
き極性の高電圧発生回路に対する制御量を求め、それを
デジタル信号として出力する。このデジタル信号は、正
負それぞれの極性のためのD/A変換回路44・45に
てアナログに変換されてから、正高電圧発生回路21と
負高電圧発生回路22に入力され、除電電極2に印加さ
れる正の高電圧と負の高電圧が上記と同様に制御され
る。The microcomputer 41 detects the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22 from the digital data of the positive or negative detection voltage output from the static electricity measuring device 3 based on the change in polarity and potential. The control amount for the high-voltage generating circuit of the polarity to be controlled is calculated and output as a digital signal. This digital signal is converted to analog by the D / A conversion circuits 44 and 45 for positive and negative polarities, and then input to the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22 and applied to the static elimination electrode 2. The positive high voltage and the negative high voltage are controlled in the same manner as above.
【0031】また、マイクロコンピュータ41は、静電
気測定器3より出力された正又は負の検出電圧のデジタ
ルデータから、その絶対値が、警報するための規準値を
超えているか否か、更には異常とする制限範囲を超えて
いるか否かを判断し、前者と後者のそれぞれを超えたと
きに異常時制御回路46へ信号を出力する。異常時制御
回路46は、前者のときは警報動作を行い、後者のとき
は正高電圧発生回路21及び負高電圧発生回路22に対
し出力を停止させる。Further, the microcomputer 41 determines whether or not the absolute value of the digital data of the positive or negative detection voltage output from the static electricity measuring device 3 exceeds the reference value for issuing an alarm, and further abnormalities. It is determined whether or not the limit range is exceeded, and a signal is output to the abnormal time control circuit 46 when the former and the latter are exceeded. The abnormal time control circuit 46 performs an alarm operation in the former case, and stops the output to the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22 in the latter case.
【0032】次に、本発明のようなフィードバック制御
を行わない従来の場合との比較実験例について説明す
る。Next, an explanation will be given of a comparative experiment example with a conventional case where feedback control as in the present invention is not performed.
【0033】図8は、実験に用いたシステムの構成図
で、帯電物体として樹脂フィルム1を用い、これを繰り
出しロール50から繰り出し、多数の案内ローラを経由
させて巻き取りロール51に巻き取ることで走行させな
がら、帯電電極52による強制帯電、帯電電位測定用セ
ンサ53による帯電電位の測定、除電電極54による除
電、残留電位測定用センサ55による残留電位の測定を
行った。FIG. 8 is a block diagram of the system used in the experiment, in which the resin film 1 is used as a charged object, and the resin film 1 is unwound from the unwinding roll 50 and wound around the winding roll 51 via a number of guide rollers. While traveling at, the charging electrode 52 was forcibly charged, the charging potential measuring sensor 53 was used to measure the charging potential, the static elimination electrode 54 was used for static elimination, and the residual potential measuring sensor 55 was used to measure the residual potential.
【0034】図9は、樹脂フィルム1の走行速度は10
0m/minに一定にして、帯電電極52の印加電圧を
+10kV、−10kV、+20kV、−20kV、+
30kV、−30kVと変え、それぞれの場合におい
て、樹脂フィルム1に対する除電電極54の距離(以
下、除電距離という)Lを変化させて残留電位測定用セ
ンサ55で残留電位を測定し、除電距離Lと残留電位と
の関係を測定した実験データのグラフである。除電電極
54には正負の直流高電圧を印加した。また、図10
は、樹脂フィルム1の走行速度を200m/minにし
て、同様に測定したグラフである。In FIG. 9, the traveling speed of the resin film 1 is 10
The voltage applied to the charging electrode 52 was kept constant at 0 m / min, and the applied voltage was +10 kV, -10 kV, +20 kV, -20 kV, +.
30 kV and -30 kV, and in each case, the distance (hereinafter, referred to as static elimination distance) L of the static elimination electrode 54 to the resin film 1 is changed, the residual potential is measured by the residual potential measuring sensor 55, and the static elimination distance L It is a graph of the experimental data which measured the relationship with a residual potential. A positive and negative DC high voltage was applied to the static elimination electrode 54. In addition, FIG.
Is a graph similarly measured with the traveling speed of the resin film 1 set to 200 m / min.
【0035】図9の結果では、除電後の残留電位が零に
なるのは、除電距離Lが100mmの場合で、その距離
を近づけて例えば70mmにすると、残留電位は±1k
Vで、逆帯電した測定値になっている。また、図10の
結果では、除電後の残留電位が零になるのは、除電距離
Lが約95mmで、その距離を近づけて例えば70mm
にすると、残留電位は±2kVで、逆帯電した測定値に
なっている。In the result of FIG. 9, the residual potential after static elimination becomes zero when the static elimination distance L is 100 mm, and when the distance is reduced to 70 mm, the residual potential is ± 1 k.
At V, the measured value is oppositely charged. Further, in the result of FIG. 10, the residual potential after static elimination becomes zero when the static elimination distance L is about 95 mm, and the distance is close to, for example, 70 mm.
When set to, the residual potential is ± 2 kV, which is a measured value of reverse charging.
【0036】図11は、除電電極54に8.5kVの交
流高電圧を印加し、帯電電極52の印加電圧を+20k
V、−20kVと変え、樹脂フィルム1の走行速度を1
00m/minとした場合と300m/minとした場
合について、除電距離Lを変化させて残留電位測定用セ
ンサ55で残留電位を測定した実験データのグラフであ
る。また、図12は、除電電極54を5000時間使用
した後に同様に測定したグラフである。In FIG. 11, a high alternating voltage of 8.5 kV is applied to the static elimination electrode 54 and the voltage applied to the charging electrode 52 is +20 kV.
V, -20kV, changing the running speed of resin film 1 to 1
6 is a graph of experimental data obtained by measuring the residual potential with the residual potential measuring sensor 55 while changing the static elimination distance L for the cases of 00 m / min and 300 m / min. In addition, FIG. 12 is a graph similarly measured after using the static elimination electrode 54 for 5000 hours.
【0037】図11の結果では、走行速度を100m/
minとした場合に除電後の残留電位が零になるのは、
除電距離Lが110mm、走行速度を300m/min
とした場合に除電後の残留電位が零になるのは、除電距
離Lが約70mmとなっている。また、図12の結果で
は、走行速度を100m/minとした場合に除電後の
残留電位が零になるのは、除電距離Lが70mm、走行
速度を300m/minとした場合に除電後の残留電位
が零になるのは、除電距離Lが約30mmで、図11の
場合と比べ除電電極54を長時間(5000時間)使用
した分だけ距離が短くなっている。In the result of FIG. 11, the traveling speed is 100 m /
The residual potential after static elimination becomes zero when min is set,
Static elimination distance L is 110 mm, traveling speed is 300 m / min
In this case, the residual potential after static elimination becomes zero when the static elimination distance L is about 70 mm. Further, in the result of FIG. 12, the residual potential after static elimination becomes zero when the traveling speed is 100 m / min because the static elimination distance L is 70 mm and the residual potential after static elimination is set when the traveling speed is 300 m / min. The potential becomes zero when the static elimination distance L is about 30 mm, which is shorter than that in the case of FIG. 11 by the time the static elimination electrode 54 is used for a long time (5000 hours).
【0038】これらの結果から、本発明のようなフィー
ドバック制御を行わない場合に、除電後の残留電位が零
になるようにするには、帯電電位や樹脂フィルム1の走
行速度や除電電極の使用時間や樹脂フィルムの材質など
に応じて、除電距離Lをそのつど可変しなければならな
い。From these results, in the case where the feedback control as in the present invention is not carried out, in order to make the residual potential after static elimination become zero, the charging potential, the running speed of the resin film 1 and the use of the static elimination electrode are used. The static elimination distance L has to be changed each time according to the time and the material of the resin film.
【0039】一方、図8のシステムに本発明を適用し
て、除電電極54(図1の除電電極2に対応)による除
電後の残留電位を、フィードバック用センサである静電
気測定器3で測定し、除電電極54に印加する電圧を、
図1に示した本発明の実施例の装置でフィードバック制
御した場合の実験データを図13と図14に示す。On the other hand, by applying the present invention to the system of FIG. 8, the residual potential after static elimination by the static elimination electrode 54 (corresponding to the static elimination electrode 2 of FIG. 1) is measured by the static electricity measuring device 3 which is a feedback sensor. , The voltage applied to the static elimination electrode 54 is
Experimental data when feedback control is performed by the apparatus of the embodiment of the present invention shown in FIG. 1 are shown in FIGS. 13 and 14.
【0040】図13は、樹脂フィルム1の走行速度は1
00m/minに一定にして、帯電電極52の印加電圧
を+10kV、−10kV、+20kV、−20kV、
+25kV、−25kVと変え、それぞれの場合におい
て、フィードバック制御しながら除電距離Lを変化させ
て残留電位測定用センサ55で残留電位を測定した実験
データのグラフである。また、図14は、樹脂フィルム
1の走行速度を200m/minにして、同様に測定し
たグラフである。In FIG. 13, the traveling speed of the resin film 1 is 1.
The voltage applied to the charging electrode 52 is kept constant at 00 m / min, and the applied voltage is +10 kV, -10 kV, +20 kV, -20 kV,
9 is a graph of experimental data obtained by measuring the residual potential with the residual potential measuring sensor 55 while changing the static elimination distance L while performing feedback control while changing to +25 kV and −25 kV. Further, FIG. 14 is a graph similarly measured with the traveling speed of the resin film 1 set to 200 m / min.
【0041】この結果、除電距離Lが100mm以下で
あれば、樹脂フィルム1の走行速度や帯電電位が変わっ
てもそれに左右されることなく、除電後の残留電位を常
に零にできることになる。当然、除電電極の使用時間が
長くなれば、電極の汚れ等の原因で正負のイオン生成量
が減少するが、本発明による装置の場合、正高電圧発生
回路21及び負高電圧発生回路22の一次側の電圧を監
視することで、除電電極のメンテナンス時期の警報を発
生することも可能となる。As a result, if the static elimination distance L is 100 mm or less, the residual potential after static elimination can be always zero without being affected by the running speed of the resin film 1 and the charging potential. Naturally, if the static elimination electrode is used for a long period of time, the amount of positive and negative ions generated will decrease due to contamination of the electrode, but in the case of the device according to the present invention, the primary high voltage generation circuit 21 and the negative high voltage generation circuit 22 By monitoring the voltage on the side, it is possible to generate an alarm for the maintenance time of the static elimination electrode.
【0042】また、図1における除電電極2の上流側
に、フィードバック制御を行わない通常の除電電極を予
備除電電極として設置して、フィードバック制御を行う
除電電極2による除電以前にある程度まで除電しておけ
ば、除電精度を一層向上させることができる。Further, a normal static elimination electrode not performing feedback control is installed as a preliminary static elimination electrode on the upstream side of the static elimination electrode 2 in FIG. 1, and static elimination is performed to some extent before static elimination by the static elimination electrode 2 performing feedback control. If so, the static elimination accuracy can be further improved.
【0043】[0043]
【発明の効果】以上詳述したように本発明によれば、正
及び負の高電圧を除電電極に同時に印加して、正及び負
のイオンを同時に生成して除電することを基本とし、静
電気測定器から帯電物体の極性の電位に応じた極性の検
出電圧を得て、それが零又はほぼ零になるまで、正及び
負のイオンを同時に生成しながら除電電極への印加電圧
を正負別々に増減制御するので、帯電物体の移動速度や
帯電電位等が変わってもそれに左右されることなく、正
負の帯電極性が複雑な模様を呈して微細に混在している
帯電についても、適切に除電できるとともに、帯電電位
が零に近い場合にも安定した動作で緻密に除電できる。As described above in detail, according to the present invention, a positive and negative high voltage is simultaneously applied to the static elimination electrode to simultaneously generate positive and negative ions to eliminate static electricity. Obtain the detection voltage with the polarity according to the polarity potential of the charged object from the measuring instrument, and separately generate the positive and negative voltages to the static elimination electrode while simultaneously generating positive and negative ions until it becomes zero or almost zero. Since the increase / decrease control is performed, it is not affected by changes in the moving speed or charging potential of the charged object, and it is possible to properly eliminate static charges even if the positive and negative charging polarities have a complicated pattern and are minutely mixed. At the same time, even when the charging potential is close to zero, the static charge can be removed precisely by the stable operation.
【図1】アナログ制御式とした場合の本発明の実施例を
示すブロック図である。FIG. 1 is a block diagram showing an embodiment of the present invention in the case of an analog control type.
【図2】本発明で用いる静電気測定器の構成例を示す概
要斜視図である。FIG. 2 is a schematic perspective view showing a configuration example of a static electricity measuring device used in the present invention.
【図3】そのブロック図である。FIG. 3 is a block diagram thereof.
【図4】同静電気測定器の出力特性図である。FIG. 4 is an output characteristic diagram of the static electricity measuring device.
【図5】図1中の電圧分配回路の制御特性図である。5 is a control characteristic diagram of the voltage distribution circuit in FIG. 1. FIG.
【図6】検出電圧に対する異常電圧設定関係を示す図で
ある。FIG. 6 is a diagram showing an abnormal voltage setting relationship with respect to a detected voltage.
【図7】デジタル制御式とした場合の本発明の実施例を
示すブロック図である。FIG. 7 is a block diagram showing an embodiment of the present invention in the case of a digital control type.
【図8】フィードバック制御を行わない従来による除電
との比較実験に用いたシステムの構成図である。FIG. 8 is a configuration diagram of a system used in a comparative experiment with conventional static elimination without feedback control.
【図9】その実験データで、樹脂フィルムの走行速度を
100m/minと一定にしてその帯電電位を変え、そ
れに従来による除電を行った場合の除電距離と残留電位
との関係を示すグラフである。FIG. 9 is a graph showing the relationship between the static elimination distance and the residual potential when the static charge of the resin film is kept constant at 100 m / min and the static charge is changed according to the conventional experimental data. .
【図10】樹脂フィルムの走行速度を200m/min
と一定にしてその帯電電位を変え、それに従来による除
電を行った場合の同様のグラフである。FIG. 10: Running speed of resin film is 200 m / min
6 is a graph similar to the case where the charging potential is changed to be constant and the conventional static elimination is performed.
【図11】除電電極に交流高電圧を印加して従来による
除電を行った場合の同様のグラフである。FIG. 11 is a similar graph in the case where conventional high voltage is applied by applying an AC high voltage to the charge removing electrode.
【図12】同上において、除電電極を5000時間使用
後のデータを示す同様のグラフである。FIG. 12 is a similar graph showing the data after using the static elimination electrode for 5000 hours in the same as above.
【図13】樹脂フィルムの走行速度を100m/min
と一定にしてその帯電電位を変え、それに本発明による
除電を行った場合の除電距離と残留電位との関係を示す
グラフである。FIG. 13: Running speed of resin film is 100 m / min
6 is a graph showing the relationship between the static elimination distance and the residual potential when the static potential is changed to be constant and static elimination according to the present invention is performed.
【図14】樹脂フィルムの走行速度を200m/min
と一定にしてその帯電電位を変え、それに本発明による
除電を行った場合の同様のグラフである。FIG. 14: Running speed of resin film is 200 m / min
6 is a graph similar to the case where the charging potential is changed to be constant and charge elimination according to the present invention is performed.
A 制御装置 1 帯電物体 2 除電電極 3 静電気測定器 4 検出孔 5 センサケース 6 圧電素子 7 音叉型振動子 8 検出電極 9 インピーダンス変換部 10 バンドパスフィルタ交流増幅部 11 整流部 12 直流増幅部 13 圧電音叉発振部 14 故障表示部 15 安定化電源部 16 レンジ切替スイッチ 17 零調整部 18 入力端子 19 PI制御回路 20 電圧分配回路 21 正高電圧発生回路 22 負高電圧発生回路 23 絶対値回路 24・25 比較器 26 タイマ 27 異常時制御回路 28 表示器 29 比例制御器 30 積分制御器 31 加算器 32・33 フィルタ回路 34・35 加算器 36 異常電圧設定器 37 電圧調整器 38 表示切替スイッチ 39 電圧変換回路 40 A/D変換回路 41 マイクロコンピュータ 42 最低出力電圧設定器 43 異常電圧設定器 44・45 D/A変換回路 46 異常時制御回路 A control device 1 charged object 2 Static elimination electrode 3 static electricity measuring instrument 4 detection holes 5 sensor case 6 Piezoelectric element 7 Tuning fork vibrator 8 detection electrodes 9 Impedance converter 10 Bandpass filter AC amplifier 11 Rectifier 12 DC amplifier 13 Piezoelectric tuning fork oscillator 14 Fault display 15 Stabilized power supply section 16 Range switch 17 Zero adjuster 18 input terminals 19 PI control circuit 20 voltage distribution circuit 21 Positive high voltage generation circuit 22 Negative high voltage generator 23 Absolute value circuit 24 ・ 25 comparator 26 timer 27 Abnormal control circuit 28 Display 29 Proportional controller 30 Integral controller 31 adder 32/33 filter circuit 34/35 adder 36 Abnormal voltage setting device 37 Voltage regulator 38 Display changeover switch 39 Voltage conversion circuit 40 A / D conversion circuit 41 Microcomputer 42 Minimum output voltage setting device 43 Abnormal voltage setting device 44/45 D / A conversion circuit 46 Abnormal control circuit
───────────────────────────────────────────────────── フロントページの続き (72)発明者 堀切 賢治 神奈川県横須賀市追浜東町3−78−11− 204 (72)発明者 中島 和朗 神奈川県津久井郡津久井町太井821−25 Fターム(参考) 5G067 AA23 AA42 DA01 DA18 EA01 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Kenji Horikiri 3-78-11-Oppama Higashi-cho, Yokosuka City, Kanagawa Prefecture 204 (72) Inventor Kazuro Nakajima 821-25 Tai, Tsukui-cho, Tsukui-gun, Kanagawa Prefecture F term (reference) 5G067 AA23 AA42 DA01 DA18 EA01
Claims (8)
物体を除電するための除電電極と、この除電電極に正負
それぞれの高電圧を同時に印加するとともに、その印加
電圧を入力電圧に応じて可変できる正高電圧発生回路及
び負高電圧発生回路と、前記除電電極による除電領域を
通過してきた帯電物体の電位をその極性とともに非接触
に検出して、その極性の電位に応じた極性の検出電圧を
生ずる静電気測定器と、該静電気測定器から出力される
極性の検出電圧に応じ、それが零又はほぼ零になるまで
前記正高電圧発生回路及び負高電圧発生回路への入力電
圧を正負別々に増減制御する制御回路とを備えてなるこ
とを特徴とする静電気除去制御装置。1. A static elimination electrode for generating positive and negative ions by discharge to neutralize a charged object, and high positive and negative voltages are simultaneously applied to the static elimination electrode, and the applied voltage is variable according to the input voltage. Positive high voltage generation circuit and negative high voltage generation circuit that can be, and the potential of the charged object that has passed through the static elimination region by the static elimination electrode is detected in a non-contact manner with its polarity, and the detection voltage of the polarity according to the potential of that polarity is detected. The input voltage to the positive high voltage generating circuit and the negative high voltage generating circuit are increased or decreased separately according to the generated static electricity measuring device and the polarity detection voltage output from the static electricity measuring device until it becomes zero or almost zero. A static electricity elimination control device comprising a control circuit for controlling.
圧発生回路への入力電圧を、それぞれ常に最低基準電圧
以上としてそれ以上の電圧で増減制御することを特徴と
する請求項1に記載の静電気除去制御装置。2. The control circuit according to claim 1, wherein the input voltage to the positive high voltage generation circuit and the negative high voltage generation circuit is always higher than or equal to the minimum reference voltage, and is controlled to increase or decrease at voltages higher than the minimum reference voltage. Static electricity removal control device.
極性の検出電圧を入力し、比例動作と積分動作を行うこ
とで、入力された極性の検出電圧の極性変化及び電圧変
化分に応じた極性の電圧を出力するPI制御部と、この
PI制御部からの出力を正高電圧発生回路と負高電圧発
生回路へそれぞれ分配し、PI制御部からの出力が負の
電圧のときはその電圧の増減分だけ正高電圧発生回路へ
の入力電圧を増減させ、PI制御部からの出力が正の電
圧のときはその電圧の増減分だけ負高電圧発生回路への
入力電圧を増減させる電圧分配部とを有することを特徴
とする請求項1又は2に記載の静電気除去制御装置。3. The control circuit inputs the detection voltage of the polarity output from the static electricity measuring device, and performs proportional operation and integration operation to respond to the polarity change and the voltage change amount of the input detection voltage of the polarity. A PI control unit that outputs a voltage of different polarity, and the output from this PI control unit is distributed to the positive high voltage generation circuit and the negative high voltage generation circuit, respectively, and when the output from the PI control unit is a negative voltage, that voltage is output. A voltage distribution unit that increases / decreases the input voltage to the positive high voltage generation circuit by an increase / decrease amount, and increases / decreases the input voltage to the negative high voltage generation circuit by an increase / decrease amount of the voltage when the output from the PI control unit is a positive voltage. The static electricity removal control device according to claim 1 or 2, further comprising:
極性の検出電圧をアナログ/デジタル変換するAD変換
部と、その変換されたデジタル信号を入力し、変化した
極性の電圧変化分から、正高電圧発生回路と負高電圧発
生回路のうちの制御すべき極性の高電圧発生回路に対す
る制御量を求め、それをデジタル信号として出力し、そ
の動作を静電気測定器から出力される極性の検出電圧が
零又はほぼ零になるまで繰り返すマイクロコンピュータ
と、該マイクロコンピュータからの出力をデジタル/ア
ナログ変換して、制御すべき極性の高電圧発生回路への
入力電圧を増減するD/A変換部とを有することを特徴
とする請求項1又は2に記載の静電気除去制御装置。4. The control circuit inputs an AD conversion unit for analog / digital conversion of the polarity detection voltage output from the static electricity measuring device and the converted digital signal, and detects the positive / high voltage from the voltage change amount of the changed polarity. Obtain the control amount for the high-voltage generation circuit of the polarity to be controlled between the voltage generation circuit and the negative high-voltage generation circuit and output it as a digital signal. It has a microcomputer that repeats until it becomes zero or almost zero, and a D / A conversion unit that performs digital / analog conversion of the output from the microcomputer to increase / decrease the input voltage to the high voltage generation circuit of the polarity to be controlled. The static electricity elimination control device according to claim 1 or 2, characterized in that.
間に生じた静電容量を機械的手段により周期的に変化さ
せて交流電圧を生じ、これをチョッパ処理した後、整流
及び直流増幅することで帯電物体の極性及び電位に応じ
た極性の検出電圧を生ずることを特徴とする請求項1、
2、3又は4に記載の静電気除去制御装置。5. A static electricity measuring device, wherein a capacitance generated between a charged object and a detection electrode is periodically changed by mechanical means to generate an AC voltage, which is chopper-processed, and then rectified and rectified. 2. Amplification produces a detection voltage having a polarity depending on the polarity and potential of the charged object.
2. The static electricity removal control device described in 2, 3 or 4.
圧を入力し、その絶対値が所定の設定範囲を超えたとき
に警報信号を出力する異常検出回路を備えたことを特徴
とする請求項1、2、3、4又は5に記載の静電気除去
制御装置。6. An abnormality detection circuit for inputting a detection voltage of a polarity output from the static electricity measuring device and outputting an alarm signal when its absolute value exceeds a predetermined setting range. Item 11. The static electricity elimination control device according to item 1, 2, 3, 4 or 5.
圧を入力し、その絶対値が所定の制限範囲を超えたとき
に正高電圧発生回路及び負高電圧発生回路からの出力を
停止する異常検出回路を備えたことを特徴とする請求項
1、2、3、4又は5に記載の静電気除去制御装置。7. An abnormality in which the polarity detection voltage output from the static electricity measuring device is input and the output from the positive high voltage generation circuit and the negative high voltage generation circuit is stopped when the absolute value exceeds a predetermined limit range. The static electricity removing control device according to claim 1, 2, 3, 4, or 5, comprising a detection circuit.
圧発生回路を制御されて正負のイオン量を制御する前記
除電電極の他に、それ以前に帯電物体を予備除電する予
備除電電極を備えたことを特徴とする請求項1、2、
3、4、5、6又は7に記載の静電気除去制御装置。8. In addition to the static elimination electrode for controlling a positive high voltage generation circuit and a negative high voltage generation circuit by a control circuit to control the amount of positive and negative ions, a preliminary static elimination electrode for preliminary static elimination of a charged object is provided before that. Claims 1 and 2 characterized by comprising
The static electricity elimination control device according to 3, 4, 5, 6 or 7.
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Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002135059A JP2003332096A (en) | 2002-05-10 | 2002-05-10 | Static electricity eliminating control device |
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ID=29697482
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KR100606433B1 (en) | 2004-04-29 | 2006-08-01 | 박광옥 | System for control the removal of static electricity and method therof |
JP2007317463A (en) * | 2006-05-25 | 2007-12-06 | Dainippon Screen Mfg Co Ltd | Static eliminator, static eliminating method, and substrate processing apparatus including the static eliminator |
JP2008256545A (en) * | 2007-04-05 | 2008-10-23 | Kasuga Electric Works Ltd | Discharge performance detector |
JP2009003876A (en) * | 2007-06-25 | 2009-01-08 | Fujitsu Ltd | Paper sheet stacking mechanism |
JP2009158375A (en) * | 2007-12-27 | 2009-07-16 | Hitachi Plant Technologies Ltd | Antistatic device and antistatic method |
JP2010062159A (en) * | 2009-12-07 | 2010-03-18 | Panasonic Electric Works Co Ltd | Ion generating device |
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2002
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Publication number | Priority date | Publication date | Assignee | Title |
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KR100606433B1 (en) | 2004-04-29 | 2006-08-01 | 박광옥 | System for control the removal of static electricity and method therof |
JP2006112809A (en) * | 2004-10-12 | 2006-04-27 | Fab Solution Kk | Monitoring device of human body potential, and potential monitoring method for human body |
JP2007317463A (en) * | 2006-05-25 | 2007-12-06 | Dainippon Screen Mfg Co Ltd | Static eliminator, static eliminating method, and substrate processing apparatus including the static eliminator |
JP2008256545A (en) * | 2007-04-05 | 2008-10-23 | Kasuga Electric Works Ltd | Discharge performance detector |
JP2009003876A (en) * | 2007-06-25 | 2009-01-08 | Fujitsu Ltd | Paper sheet stacking mechanism |
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JP2010062159A (en) * | 2009-12-07 | 2010-03-18 | Panasonic Electric Works Co Ltd | Ion generating device |
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