JP2002328309A - Sample support device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample support device which enables an objective lens to be stably focused with respect to an observational sample. SOLUTION: The objective lens 6 is provided with a position adjusting means composed of a fixed base 5, an operation ring 7 and a sample support 8. The sample support 8 is shifted in the direction of the optical axis of the objective lens by means of the rotational operation of the operation ring 7 of the position adjusting means. The relative position of the objective lens 6 to a slide glass (sample) 12 is thereby adjusted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample supporting apparatus which enables stable observation of a sample.

[0002]

2. Description of the Related Art Generally, observation of a sample using a microscope is performed as follows.
The objective lens is brought close to the sample placed on the microscope stage, and the main part of the observation on the sample is enlarged. In this case, since the depth of focus of the objective lens close to the sample becomes smaller as the magnification becomes higher, it is difficult to align the objective lens and the observation sample, and a minute change in the distance between the objective lens and the sample is made. Also, the observation image is greatly deteriorated.

On the other hand, the apparent positions of the objective lens and the observation sample are very close to each other, but their mechanical coupling length is limited by a number of mechanical parts such as a microscope frame, an objective lens moving mechanism, and a revolver. Very large due to intervening.
Since the dimensions of these mechanical parts tend to change due to temperature changes, the larger the number of these mechanical parts, the larger the dimensional change, and the greater the number of mechanical parts, the greater the mechanical coupling length. Indeed, it is weak against vibration, and the vibration amplitude becomes large.

[0004]

For this reason, even when the objective lens is focused on the observation sample at the time of observation of the sample, for example, the ambient temperature changes due to the operation of an air conditioner and the size of each mechanical component is reduced. If it changes, the distance between the objective lens and the sample will change greatly, causing the focus to shift,
Even if some external vibration is applied, the large vibration amplitude
The distance between the objective lens and the sample changes and the focus shifts.

Therefore, various types of auto-focus mechanisms have been conventionally considered to compensate for these defocuses. However, these auto-focus mechanisms require complicated mechanical, electrical, and control systems. However, there is a problem that it is large and expensive, and it is difficult to apply itself when the brightness at the time of observation such as fluorescence observation is extremely low.

On the other hand, separately from this,
No. 30, as disclosed in Japanese Patent Publication No. 30, at least two rods having different thermal expansions are interposed between the rack and the stage of the stage driven in the optical axis direction of the objective lens via the rack and the driving gear. By compensating the thermal expansion direction of one of the rods in the direction opposite to the thermal expansion direction of the other rod, defocus is compensated.

However, in such a method, since the rod is inside the microscope and it takes time until the temperature is compensated for a change in the ambient temperature, the efficiency of the work of observing the sample may be reduced. , By inserting a rod,
Further, since the mechanical coupling length is increased, there is a problem in that the microscope is susceptible to external vibrations, and further, the microscope itself needs to be largely remodeled.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a sample supporting apparatus capable of stably focusing an objective lens on an observation sample.

[0009]

According to a first aspect of the present invention, there is provided an objective lens provided on an outer periphery of the objective lens,
A sample support device comprising: a position adjusting unit that enables an observation sample to move in an optical axis direction of the objective lens.

According to a second aspect of the present invention, an objective lens, a stage movably provided in a direction orthogonal to an optical axis of the objective lens, and an observation sample are held and mounted on the stage. A sample stage, provided on the outer periphery of the objective lens, and position adjustment means for moving the observation sample in the optical axis direction of the objective lens via the sample stage; And a resilient means having a low rigidity in the optical axis direction of the objective lens and a high rigidity in the moving direction of the stage.

According to a third aspect of the present invention, there is provided an objective lens, and a position adjusting means provided on an outer periphery of the objective lens for moving an observation sample in an optical axis direction of the objective lens.
A fine movement mechanism for minutely changing the distance between the observation sample and the objective lens in the optical axis direction, a displacement amount detection means for detecting a displacement amount of the objective lens, and based on a detection output of the displacement amount detection means. A sample support device comprising: a control unit that operates a fine movement mechanism to control a distance between the objective lens and an observation sample to a predetermined distance.

According to a fourth aspect of the present invention, an objective lens, a stage movably provided in a direction orthogonal to an optical axis of the objective lens, and an observation sample are held and mounted on the stage. A sample stage, a position adjusting unit provided on an outer periphery of the objective lens, and a position adjusting means for moving an observation sample in an optical axis direction of the objective lens through the sample stage; Position adjusting means for moving the sample in the optical axis direction of the objective lens, a fine movement mechanism for minutely changing the distance between the observation sample and the objective lens in the optical axis direction, and detecting the displacement of the objective lens A displacement amount detecting means, a control means for operating the fine movement mechanism based on a detection output of the displacement amount detecting means to control a distance between the objective lens and the observation sample to a predetermined distance, and provided on the stage. Together are a sample support apparatus characterized by comprising a high set elastic means rigidity in the moving direction of the optical axis direction the stage low rigidity of the objective lens relative to the sample stage.

According to a fifth aspect of the present invention, in the sample supporting device according to the second or fourth aspect, a mechanical coupling length between the objective lens and the observation sample is provided on an outer periphery of the objective lens. Further, it is determined by each component of the position adjusting means.

According to a sixth aspect of the present invention, in the sample supporting apparatus according to the second or fourth aspect, the elastic means is provided on the stage and arranged along a direction orthogonal to an optical axis of the objective lens. And a magnet provided on the leaf spring and adsorbing the sample stage.

According to a seventh aspect of the present invention, in the sample supporting apparatus of the first aspect, a fine movement mechanism for minutely changing a distance between the observation sample and the objective lens in the optical axis direction, and operating the fine movement mechanism. Control means for finely adjusting the distance between the objective lens and the observation sample.

According to an eighth aspect of the present invention, there is provided a fixed base having an objective lens mounting portion, a sample base for supporting an observation sample, and the sample base provided on the fixed base in the optical axis direction of the objective lens. A sample support device comprising: a position adjusting means for enabling movement.

The present invention according to claim 9 provides the present invention according to claim 1,
8. The sample support device according to any one of 2, 3, 4 or 7, wherein the position adjusting means is fixed to the objective lens, and is screwed to the fixed stage. An operating ring that is moved in the optical axis direction of the objective lens, and a sample that is provided so as to be movable in the optical axis direction of the objective lens, and that adjusts the distance between the observation sample and the objective lens by rotating the operating ring. A sample support device comprising a holding table.

As a result, according to the present invention, the mechanical coupling length between the objective lens and the observation sample is determined only by the position adjusting means provided on the objective lens, and can be set extremely short. Does not substantially change the positional relationship between the objective lens and the observation sample, and is not affected by external vibration, so that stable sample observation can always be performed.

According to the present invention, the observation sample can be moved in a direction orthogonal to the optical axis of the objective lens only by moving the stage after the objective lens is focused on the observation sample. The positioning of the observation sample can be easily performed.

Further, according to the present invention, for each part constituting the position adjusting means, at least two or more kinds of different materials are used, and by selecting the materials and dimensions of these parts, the ambient temperature varies. Even so, the focal position of the objective lens with respect to the observation sample can be kept constant.

Further, according to the present invention, stable observation can be performed for a long time by maintaining the objective lens at a desired position given by a command value.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

(First Embodiment) FIG. 1 shows a schematic configuration of an inverted microscope to which a sample supporting device of the present invention is applied. In the figure, reference numeral 1 denotes a microscope main body, a stage 2 is provided on the microscope main body 1, a revolver 3 is disposed below the stage 2, and a sample support device 4 of the present invention is provided on the revolver 3. .

Next, the optical system of the inverted microscope will be described. Mirror P ₂ on the optical path of the illumination light output from the light source P ₁ is disposed. This reflected light path of the mirror P _2, the condenser lens P ₃ for condensing the slide glass (sample) 12 is provided with illumination light. Further, a mirror P4 is disposed on the optical axis Q of the objective lens 6 in the microscope main body 1, and a relay lens P5 is provided on a reflection optical path of the mirror P4.
An eyepiece 16 is provided through the lens.

FIG. 2 shows a schematic configuration of the sample support device 4, which has a fixed base 5, an operating ring 7, and a sample holding base 8 as position adjusting means. Here, the cylindrical fixed base 5
Has a small-diameter portion 5a formed at one opening end, and an objective screw portion 5b is formed on the peripheral surface of the small-diameter portion 5a. The objective screw portion 5b is provided with an objective mounting hole 3a of the revolver 3.
It is screwed into. Further, a screw portion 5c is also formed on the inner peripheral surface of the one opening end of the fixing base 5. The objective screw 6a of the objective lens 6 is screwed into the screw portion 5c. In this state, the objective lens 6 is integrally fixed along the axis of the hollow portion of the fixing base 5. Further, a screw portion 5 d is formed on the outer peripheral surface of the fixing base 5. Then, one opening end of the cylindrical operation ring 7 is screwed into the screw portion 5d, and by rotating this operation ring 7, the entire operation ring 7 is moved along the screw portion 5d, that is, the objective lens 6 is rotated. Is movable along the optical axis direction of the camera.

One end of an opening of a cylindrical sample holder 8 is placed in contact with the operation ring 7. This sample holder 8
The guide ring 8a is formed along the moving direction of the operation ring 7, and a detent pin 9 planted on the side of the fixed base 5 is inserted into the guide hole 8a. By operation, it is possible to move only along the optical axis direction of the objective lens 6 together with the operation ring 7 while being guided by the guide holes 8a. The other open end of the sample holder 8 is bent in the direction of the central axis, and a magnet 10 is provided in the bent portion 8b.

A sample table 11 made of magnetically adsorbed stainless steel is arranged so as to be attracted to the magnet 10. The sample stage 11 has an observation hole 11a formed at a position corresponding to the optical axis of the objective lens 6, and a slide glass (sample) 12 is placed on the observation hole 11a.

In the drawings, reference numeral 2 denotes a stage on the microscope main body 1 side.

Returning to FIG. 1, the microscope main body 1 is provided with a focusing handle 13. This focus handle 13
Rotates the revolver 3 to which the sample support device 4 is attached in the up-down direction by performing a rotating operation.

The observation image of the slide glass (sample) 12 on the sample stage 11 of the sample support device 4 is
Is projected onto an observation optical system (not shown) inside the microscope main body 1 via the eyepiece lens 16 so as to be observable.

Next, the operation of the embodiment configured as described above will be described.

In this case, it is assumed that the revolver 3 is provided with a plurality of sample support devices 4 having objective lenses 6 having different magnifications.

First, the focusing handle 13 is operated to move the revolver 3 downward, and the revolver 3 is rotated to position the sample support device 4 having the objective lens 6 of a desired magnification on the optical path. Let it. In addition, revolver 3
Is moving downward, the sample stage 11 is released from the attraction of the magnet 10 of the sample holding stage 8, separates from the sample support device 4, and remains on the stage 2 of the microscope main body 1.

Next, the revolver 3 is moved upward by operating the focusing handle 13 and the sample support device 4 positioned on the optical path is moved upward, so that the sample stage 11 is moved to the sample holding stage 8.
To the magnet 10.

Then, the operation ring 7 is rotated to position the slide glass (sample) 12 with the focal point of the objective lens 6. In this case, when the operation ring 7 is rotated, the operation ring 7 is moved by the pitch of the threaded portion 5 d of the fixed base 5 by the objective lens 6.
Along with the operation ring 7, the sample holder 8 is also moved along the optical axis of the objective lens 6 while being guided by the guide holes 8a. As a result, the sample table 11 adsorbed to the sample holding table 8 via the magnet 10 is
Is moved together with the sample holding table 8 to change the relative positional relationship between the slide glass (sample) 12 and the objective lens 6 so that the focal points of the slide glass (sample) and the objective lens 6 can be matched.

Then, the observation image of the sample is projected onto the observation optical system (not shown) inside the microscope main body 1 through the objective lens 6 in such a state that the focus of the sample and the objective lens 6 are matched. , The observation with the eyepiece 16 is performed.

Therefore, in this way, the objective lens 6
The mechanical coupling length between the slide ring (sample) 12 and the slide ring (sample) 12 is determined only by the fixed base 5, the operation ring 7 and the sample holding table 8 as the position adjusting means, and can be set extremely short. In a state in which the position of the slide glass (sample) 12 and the focal point of the objective lens 6 are aligned by rotating, even when the ambient temperature changes, the alignment of the focal point of the sample and the objective lens 6 hardly changes. , And is no longer affected by external vibration,
A stable sample observation can always be performed.

If the material of the fixing table 5 and the sample holding table 8 is made of the same material as the metal parts constituting the objective lens 6 or a material having a slightly small linear expansion coefficient (for example, brass), the ambient temperature becomes lower. Even if it changes, the dimensional change of the objective lens 6 and the dimensional change of the fixed base 5 and the sample holder 8 can be made substantially equal, so that the change in the relative position between the sample and the objective lens can be minimized.

The smaller the pitch of the threaded portion 5 d of the fixed base 5, the smaller the pitch of the screw ring 5 d.
Since the relative movement amount in the direction of the optical axis can be made minute, when the high-magnification objective lens 6 is used, if the screw pitch of the screw portion 5d is made small, the alignment between the sample and the focal point of the objective lens can be easily performed.

(Second Embodiment) FIG. 3 shows a schematic configuration of a second embodiment of the present invention, and the same parts as those in FIG. 2 are denoted by the same reference numerals.

In this case, the operation ring 7 is omitted, and one open end of the cylindrical sample holder 8 is screwed into the screw portion 5 d of the fixed table 5, and the sample holder 8 is rotated to operate the sample holder. The entire table 8 is movable along the screw portion 5d, that is, along the optical axis direction of the objective lens 6.

In this case, the same effect as that of the first embodiment can be expected. In addition, the number of parts can be reduced, so that the configuration can be further simplified and the cost can be reduced. .

(Third Embodiment) FIG. 4 shows a schematic configuration of a third embodiment of the present invention, and the same parts as those in FIG. 3 are denoted by the same reference numerals.

In this case, the objective lens 6 is fixed to the fixed base 5, and the objective screw 6 a of the objective lens 6 is screwed into the objective mounting hole 3 a of the revolver 3.

In this case, the same effect as in the first embodiment can be expected. In addition, since the objective screw 6a of the objective lens 6 is directly screwed into the objective mounting hole 3a of the revolver 3, the objective lens 6 The height of the objective lens 6 can be easily adjusted without changing the height of the objective lens 6. Further, since it is not necessary to form a screw portion for fixing the objective lens 6 to the fixing base 5 and a screw portion for fixing to the revolver 3, the configuration can be simplified and the cost can be reduced.

(Fourth Embodiment) FIG. 5 shows a schematic configuration of a fourth embodiment of the present invention, and the same parts as those in FIG. 3 are denoted by the same reference numerals.

In this case, an annular rotation stopper 21 is disposed above the sample holder 8, a hollow disk-shaped center seat 22 is disposed above the rotation stopper 21, and A pin 23 is implanted in the vertical direction, the tip of the pin 23 is inserted into the hole 21a of the rotation stopper 21, the sample holder 8 is rotated, and the entire sample holder 8 is moved along the screw 5d. By moving the rotation stopper 21, the rotation stopper 21 can be moved along the optical axis direction of the objective lens 6.

In such a configuration, the position of the slide glass (sample) 12 and the focal point of the objective lens 6 are aligned by rotating the sample holder 8. In this case, when the sample holder 8 is rotated, the sample holder 8 moves along the optical axis direction of the objective lens 6 by the pitch of the threaded portion 5 d of the fixed table 5. 21 is also moved in the optical axis direction of the objective lens 6 while being guided by the pins 23. Thereby, the middle seat 22 on the rotation stopper 21
Is moved together with the rotation stopper 21, the relative positional relationship between the slide glass (sample) 12 and the objective lens 6 is changed, and the focus of the slide glass (sample) 12 and the objective lens 6 can be matched.

Therefore, even in this case, the same effect as in the first embodiment can be expected. In addition, since the middle seat 22 is rotatable with respect to the rotation stopper 21, the middle seat 22 can be rotated.
By rotating, the slide glass (sample) 12 can be rotated in an arbitrary direction.

(Fifth Embodiment) FIG. 6 and FIG.
This shows a schematic configuration of the fifth embodiment of the present invention, and the same parts as those in FIGS. 3 and 1 are denoted by the same reference numerals.
The optical system of the inverted microscope is the same as that of FIG.
Here, it is omitted.

In this case, the outer periphery of the fixed table 5 and the sample holder 8
Are fitted to each other, a friction member 24 is interposed between the fitting portions, and the sample holding table 8 is held on the fixed table 5 by the frictional force of the friction member 24.

The stage 2 of the microscope main body 1 is provided with a sample holding table gripping mechanism 25. The sample holder holding mechanism 25 is for holding and holding the sample holder 8 as necessary, and the fixing force at this time is the friction member 2.
It is assumed to be larger than the friction force of No. 4.

In such a configuration, the positioning between the slide glass (sample) 12 and the focal point of the objective lens 6 is performed by first holding and holding the sample holder 8 by the sample holder holding mechanism 25. By operating the focus handle 13, the fixed base 5 is moved together with the revolver 3 in the optical axis direction of the objective lens 6. Then, since the fixing force of the sample holder 8 at this time is larger than the frictional force of the friction member 24, the operation of the focusing handle 13 does not move the sample holder 8, and the fixing table 5 does not move.
Only the movement is performed, the relative positional relationship between the slide glass (sample) 12 and the objective lens 6 is changed, and the focus of the slide glass (sample) 12 and the objective lens 6 can be matched. After the alignment with the focal point, the fixing of the sample holder 8 by the sample holder gripping mechanism 25 is released.

Therefore, even in this case, the same effect as that of the first embodiment can be expected. In addition, since it is not necessary to form a screw portion requiring accuracy, manufacturing and assembling can be simplified.

(Sixth Embodiment) FIG. 8 shows a schematic configuration of a sixth embodiment of the present invention, and the same parts as those in FIG. 3 are denoted by the same reference numerals.

In this case, the temperature sensor 2
6 and a temperature controller 27 are arranged, and the temperature controller 27 adjusts the temperature of the fixed base 5 and the sample holder 8 to be always constant based on the detection output of the temperature sensor 26 in accordance with the change of the ambient temperature. Like that.

In such a configuration, when the ambient temperature changes and the temperature of the sample holder 8 changes, a temperature difference occurs between the sample holder 8 and the objective lens 6. Then, only the sample holder 8 changes its dimensions, and the sample and the focal point of the objective lens 6 may be displaced. In this case, the ambient temperature is detected by the temperature sensor 26 disposed on the fixed base 5, and the temperature of the sample holding base 8 is adjusted by the temperature controller 27 based on the detected output so as to be always constant. Even if a change occurs in the temperature, it is possible to prevent a displacement between the sample and the focal point of the objective lens 6, and to always perform stable microscope observation. Further, when the observation target is a living cell or the like, the temperature is kept by the warmer, but there is a problem that heat is taken away by the objective lens 6.
By keeping the temperature of the sample holder 8 at the same temperature as the temperature of the warmer by the temperature controller 6 and the temperature controller 27, such a problem can be avoided.

(Seventh Embodiment) FIG. 9 shows a schematic configuration of a seventh embodiment of the present invention, and the same parts as those in FIG. 3 are denoted by the same reference numerals.

In this case, a sample table 29 is mounted on the sample holder 8 via a piezoelectric actuator 28, and a slide glass (sample) 12 is mounted on the sample table 29. The sample holding table 8 is provided with a capacitance sensor 30 to measure the amount of movement of the sample table 29.

In such a configuration, the sample stage 29 can be finely moved in the optical axis direction of the objective lens 6 by driving the piezoelectric actuator 28. Then, the amount of movement of the sample table 29 at this time can be detected by the capacitance sensor 30. Therefore, when the sample has a height in the optical axis direction,
By moving the sample stage 29 in the optical axis direction, observation at an arbitrary height on the sample can be performed. In addition, if a laser beam introducing means that can scan the objective lens 6 is used, the objective lens 6 can be used as a laser scanning microscope.

(Eighth Embodiment) FIG. 10 shows a schematic configuration of an eighth embodiment of the present invention, and the same parts as those in FIG. 3 are denoted by the same reference numerals.

In this case, the outer periphery of the fixed table 5 and the sample holder 8
Are fitted to each other, so that the sample holder 8 can be smoothly moved in the optical axis direction of the objective lens 6. Further, a flange 501 is formed on the fixed base 5, and a flange 801 corresponding to the flange 501 of the fixed base 5 is formed on the sample holder 8. A feed screw portion 31 having a feed shaft 31a that enables minute feed such as a micrometer head is provided on a flange portion 801 of the sample holding table 8, and a tip of the feed shaft 31a of the feed screw portion 31 is fixed to a fixing table. 5 collar 5
01 is provided so as to be in contact with the dent 502 provided.

In such a configuration, the position of the slide glass (sample) 12 and the focal point of the objective lens 6 are adjusted by rotating the feed screw portion 31 so that the tip of the feed shaft 31 a is fixed to the fixed base 5.
The sample holder 8 moves because the flange 501 is pressed. At this time, since the position of the feed screw portion 31 is regulated by the recess 502 of the flange portion 501, the sample holding table 8 does not rotate and moves only in the optical axis direction of the objective lens 6. Thereby, the relative positional relationship between the slide glass (sample) 12 and the objective lens 6 is changed, and the focus of the slide glass (sample) 12 and the objective lens 6 can be matched. In addition, if such a feed screw portion 31 is used, it is possible to perform extremely minute alignment in the optical axis direction without rotating the observation sample side. For example, when the high-magnification objective lens 6 is used. However, focusing can be easily performed.

(Ninth Embodiment) FIG. 11 shows a schematic configuration of a ninth embodiment of the present invention, and the same parts as those in FIG. 3 are denoted by the same reference numerals.

In this case, the sample holder 8 is provided with a leaf spring 32 by a screw 33. This leaf spring 32
The slide glass (sample) 12 is fixed on the sample holder 8.

In this way, the slide glass (sample) 12 is fixed on the sample holder 8 by the leaf spring 32, so that the stability against external vibrations can be further improved. Further, even when the positional relationship between the objective lens 6 and the sample is upside down, the positional relationship between the sample and the objective lens 6 can be stably maintained, so that the present invention can be applied to an erecting microscope.

The leaf spring 32 may be fixed to the stage 2 of the microscope main body 1 shown in FIG. In this case, as described in the fourth embodiment, the rotation stopper 2
1. Even when the middle seat 22 is separated, it can be stably held on the stage 2.

(Tenth Embodiment) In the structure described in the above embodiment, the sample holder 8 is moved in the optical axis direction of the objective lens. ) May need to be positioned in the direction orthogonal to the optical axis of the objective lens 6, that is, in the XY directions that are the moving directions of the stage 2.

Therefore, in the tenth embodiment, the sample can be positioned in the XY directions of the moving direction of the stage 2.

FIGS. 12 and 13 show a schematic configuration of a tenth embodiment of the present invention. The same parts as those in FIGS. 1 and 2 are denoted by the same reference numerals.

In FIG. 12, reference numeral 1 denotes a microscope main body. The microscope main body 1 is provided with a stage 2 movable in the X and Y directions, and a revolver 3 is disposed below the stage 2. A device 4 is provided. Note that the optical system of the inverted microscope is the same as that of FIG.

FIG. 13 shows a schematic configuration of the sample support device 4, which has a fixing base 5, an operation ring 7, and a sample holding base 8 as position adjusting means. Here, the cylindrical fixed base 5
Has a small-diameter portion 5a formed at one opening end, and an objective screw portion 5b is formed on the peripheral surface of the small-diameter portion 5a. The objective screw portion 5b is provided with an objective mounting hole 3a of the revolver 3.
It is screwed into. Further, a screw portion 5c is also formed on the inner peripheral surface of the one opening end of the fixing base 5. The objective screw 6a of the objective lens 6 is screwed into the screw portion 5c. In this state, the objective lens 6 is integrally fixed along the axis of the hollow portion of the fixing base 5. Further, a screw portion 5 d is formed on the outer peripheral surface of the fixing base 5. Then, one opening end of the cylindrical operation ring 7 is screwed into the screw portion 5d, and by rotating this operation ring 7, the entire operation ring 7 is moved along the screw portion 5d, that is, the objective lens 6 is rotated. Is movable along the optical axis direction of the camera.

One end of an opening of a cylindrical sample holder 8 is placed in contact with the operation ring 7. This sample holder 8
The guide ring 8a is formed along the moving direction of the operation ring 7, and a detent pin 9 planted on the side of the fixed base 5 is inserted into the guide hole 8a. By operation, it is possible to move only along the optical axis direction of the objective lens 6 together with the operation ring 7 while being guided by the guide holes 8a. The other open end of the sample holder 8 is bent in the direction of the central axis, and a magnet 10 is provided in the bent portion 8b.

A sample table 11 is attracted onto the magnet 10 as a sample holder made of a magnetic material, for example, a magnetically adsorbed stainless steel. The sample stage 11 holds an observation sample. An observation hole 11a is formed at a position corresponding to the optical axis of the objective lens 6, and a slide glass (sample) 12 is placed on the observation hole 11a. It is placed.

In the drawings, reference numeral 2 denotes a stage on the microscope main body 1 side. The stage 2 has a hole 2 a at a position corresponding to the sample support device 4 on the optical axis of the objective lens 6.
Are formed. On such a stage 2, a sample table 11 is placed on the periphery of the hole 2a.

On the lower surface of the stage 2, a plurality of leaf springs 14 are provided as elastic means along the periphery of the hole 2a. Each of these leaf springs 14 has a hole 2a at its tip.
Are arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6 so as to face the center of the objective lens 6, the respective base ends are fixed to the periphery of the hole 2a, and a magnet 15 is attached to the tip. These magnets 15 are for attracting the sample table 11, and the holes 2 of the stage 2 are
The sample table 11 is supported on a. here,
The reason why the sample table 11 is attracted by the magnet 15 is as follows.
This is because the sample table 11 can be easily removed.

Returning to FIG. 12, the microscope body 1 is provided with a focusing handle 13. This focus handle 13
Rotates the revolver 3 to which the sample support device 4 is attached in the up-down direction by performing a rotating operation.

The observation image of the slide glass (sample) 12 on the sample stage 11 of the sample support device 4 is
Is projected onto an observation optical system (not shown) inside the microscope main body 1 via the eyepiece lens 16 so as to be observable.

Next, the operation of the embodiment configured as described above will be described.

In this case, it is assumed that the revolver 3 is provided with a plurality of sample support devices 4 having objective lenses 6 having different magnifications.

First, the focusing handle 13 is operated to move the revolver 3 downward, and the revolver 3 is rotated to position the sample supporting device 4 having the objective lens 6 of a desired magnification on the optical path. Let it. In addition, revolver 3
Is moving downward, the sample stage 11 is released from the attraction of the magnet 10 of the sample holding stage 8, separates from the sample support device 4, and remains on the stage 2 of the microscope main body 1. In this case, the sample stage 11 is attracted to the magnet 15 and is supported on the stage 2 via the leaf spring 14.

Next, the focusing handle 13 is operated to move the revolver 3 upward, the sample support device 4 located on the optical path is moved upward, and the sample stage 11 is moved to the sample holding stage 8.
To the magnet 10. Here, from the state where the sample table 11 is attracted to the magnet 10 of the sample holding table 8,
When the revolver 3 is further moved upward, the sample stage 11 merely placed on the periphery of the hole 2a of the stage 2 is pushed up by about several mm away from the stage 2 and further upward. In this case, the plate spring 14 supporting the sample stage 11 is disposed in a horizontal direction orthogonal to the optical axis of the objective lens 6 and has low rigidity in the optical axis direction of the objective lens 6. It can move without resistance due to deformation.

From this state, the operating ring 7 is rotated to
The slide glass (sample) 12 and the focus of the objective lens 6 are aligned. In this case, when the operating ring 7 makes one rotation, the operating ring 7 moves along the optical axis direction of the objective lens 6 by the pitch of the screw portion 5d of the fixed base 5, and together with the operating ring 7, the sample holding table 8 also moves. The objective lens 6 is moved in the optical axis direction while being guided by the guide holes 8a.

Thus, the magnet 1 is mounted on the sample holder 8.
The sample stage 11 adsorbed via the sample holder 11 moves together with the sample holding stage 8 to change the relative positional relationship between the slide glass (sample) 12 and the objective lens 6. Focus can be matched.

Thus, the slide glass (sample) 1
The observation image of the sample is projected onto the observation optical system (not shown) inside the microscope main body 1 through the objective lens 6 in a state where the focus of the sample 2 and the focus of the objective lens 6 are made coincident with each other, so that observation with the eyepiece lens 14 is performed. Will be

On the other hand, the entire slide glass (sample) 12 is moved in a direction orthogonal to the optical axis of the objective lens 6, that is, in the XY directions, from a state where the focus of the slide glass (sample) 12 and the focus of the objective lens 6 are matched. If it is desired to move, the stage 2 of the microscope main body 1 is moved in the XY directions. Then, since the leaf spring 14 supporting the sample stage 11 at this time is disposed in a horizontal direction orthogonal to the optical axis of the objective lens 6, the rigidity against the movement of the stage 2 in the XY directions is high. The sample stage 11 is also integrally moved via the leaf spring 14. In this case, the sample stage 11 is attracted to the magnet 10 on the sample holding stage 8 side.
Since the moving direction of 1 is a direction orthogonal to the attraction force of the magnet 10, the movement can be performed without resistance while maintaining the attraction state.

In the above description, the sample support device 4 having the objective lens 6 of the desired magnification is positioned on the optical path by rotating the revolver 3 to align the slide glass (sample) 12 with the focal point of the objective lens 6. Was described, but when the sample support device 4 having the objective lens 6 of another magnification is located on the optical path, the slide glass (sample) 12 and the focal point of the objective lens 6 are set in the same manner as described above. Can be adjusted.

Therefore, even in this case, the same effects as those of the first embodiment can be expected. In addition, the sample stage 11 holding the slide glass (sample) 12 can be moved in the optical axis direction of the objective lens 6. Since the rigidity is low and the stage 2 is supported by the stage 2 via the leaf spring 14 whose rigidity in the moving direction is set high, the focusing of the objective lens 6 on the slide glass (sample) 12 is performed. Is moved in the X and Y directions, the slide glass (sample) 1 is moved via the leaf spring 14 whose rigidity in the moving direction of the stage 2 is set high.
2 can be moved in a direction orthogonal to the optical axis of the objective lens 6, and the positioning of the slide glass (sample) 12 in the XY directions can be easily performed.

(Eleventh Embodiment) FIG. 14 shows a schematic configuration of an eleventh embodiment of the present invention based on the same concept as the above-described tenth embodiment. The same parts are denoted by the same reference numerals.

In this case, a hole 2a is formed in the stage 2 on the microscope main body 1 side at a position corresponding to the sample support device 4 on the optical axis of the objective lens 6, and a sample table 11 is provided around the hole 2a. It is placed. A plurality of leaf springs 14 are provided on the lower surface of the stage 2 along the periphery of the hole 2a. These leaf springs 14 are arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6 such that their respective distal ends are directed toward the center of the hole 2a, and their base ends are fixed to the periphery of the hole 2a. A magnet 15 is attached to the tip. The magnets 15 attract the sample stage 11 and support the sample stage 11 on the hole 2 a of the stage 2 via the leaf spring 14. Others are shown in Fig. 3.
Is the same as

Therefore, even in this case, the same effect as in the second embodiment can be expected. In addition, when the stage 2 is moved in the X and Y directions after the objective lens 6 is focused on the slide glass (sample) 12, the slide glass is moved via the leaf spring 14 whose rigidity in the movement direction of the stage 2 is set high. Since the (sample) 12 can be moved in a direction orthogonal to the optical axis of the objective lens 6, the positioning of the slide glass (sample) 12 in the XY directions can be easily performed.

(Twelfth Embodiment) FIG. 15 shows a schematic configuration of a twelfth embodiment of the present invention based on the same concept as the above-described tenth embodiment. The same parts are denoted by the same reference numerals.

Also in this case, the stage 2 on the microscope main body 1 side
A hole 2a is formed at a position corresponding to the sample support device 4 on the optical axis of the objective lens 6, and a sample stage 11 is mounted on the periphery of the hole 2a. Also, on the lower surface of stage 2,
A plurality of leaf springs 14 are provided along the periphery of the hole 2a. These leaf springs 14 are arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6 such that their respective distal ends are directed toward the center of the hole 2a, and their base ends are fixed to the periphery of the hole 2a. A magnet 15 is attached to the tip. The magnets 15 attract the sample stage 11 and support the sample stage 11 on the hole 2 a of the stage 2 via the leaf spring 14. Others are shown in Fig. 4.
Is the same as

Therefore, even in this case, the same effect as in the third embodiment can be expected. In addition, when the stage 2 is moved in the X and Y directions after the objective lens 6 is focused on the slide glass (sample) 12, the slide glass is moved via the leaf spring 14 whose rigidity in the movement direction of the stage 2 is set high. Since the (sample) 12 can be moved in a direction perpendicular to the optical axis of the objective lens 6, the positioning of the slide glass (sample) 12 in the XY directions can be easily performed.

(Thirteenth Embodiment) FIG. 16 shows a schematic configuration of a thirteenth embodiment of the present invention based on the same concept as the tenth embodiment described above. The same parts are denoted by the same reference numerals.

Also in this case, the stage 2 on the microscope main body 1 side
A hole 2a is formed at a position corresponding to the sample support device 4 on the optical axis of the objective lens 6, and a sample table 11 is mounted on the periphery of the hole 2a. Also, on the lower surface of stage 2,
A plurality of leaf springs 14 are provided along the periphery of the hole 2a. These leaf springs 14 are arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6 such that their respective distal ends are directed toward the center of the hole 2a, and their base ends are fixed to the periphery of the hole 2a. A magnet 15 is attached to the tip. The magnets 15 attract the sample stage 11 and support the sample stage 11 on the hole 2 a of the stage 2 via the leaf spring 14. Others are shown in FIG.
Is the same as

Therefore, even in this case, the same effect as that of the fourth embodiment can be expected. In addition, when the stage 2 is moved in the X and Y directions after the objective lens 6 is focused on the slide glass (sample) 12, the slide glass is moved via the leaf spring 14 whose rigidity in the movement direction of the stage 2 is set high. Since the (sample) 12 can be moved in a direction perpendicular to the optical axis of the objective lens 6, the positioning of the slide glass (sample) 12 in the XY directions can be easily performed.

(Fourteenth Embodiment) FIG. 17 shows a schematic configuration of a fourteenth embodiment of the present invention based on the same idea as in the tenth embodiment described above. The same parts are denoted by the same reference numerals.

Also in this case, the stage 2 on the microscope main body 1 side
A hole 2a is formed at a position corresponding to the sample support device 4 on the optical axis of the objective lens 6, and a sample table 11 is mounted on the periphery of the hole 2a. Also, on the lower surface of stage 2,
A plurality of leaf springs 14 are provided along the periphery of the hole 2a. These leaf springs 14 are arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6 such that their respective distal ends are directed to the center of the hole 2a, and their base ends are fixed to the periphery of the hole 2a. A magnet 15 is attached to the tip. The magnets 15 attract the sample stage 11 and support the sample stage 11 on the hole 2 a of the stage 2 via the leaf spring 14. Others are shown in FIG.
Is the same as

Therefore, even in this case, the same effect as in the fifth embodiment can be expected. In addition, when the stage 2 is moved in the X and Y directions after the objective lens 6 is focused on the slide glass (sample) 12, the slide glass is moved via the leaf spring 14 whose rigidity in the movement direction of the stage 2 is set high. Since the (sample) 12 can be moved in a direction perpendicular to the optical axis of the objective lens 6, the positioning of the slide glass (sample) 12 in the XY directions can be easily performed.

(Fifteenth Embodiment) FIG. 18 shows a schematic configuration of a fifteenth embodiment of the present invention based on the same concept as the tenth embodiment described above. The same parts are denoted by the same reference numerals.

Also in this case, the stage 2 on the microscope main body 1 side
A hole 2a is formed at a position corresponding to the sample support device 4 on the optical axis of the objective lens 6, and a sample table 11 is mounted on the periphery of the hole 2a. Also, on the lower surface of stage 2,
A plurality of leaf springs 14 are provided along the periphery of the hole 2a. These leaf springs 14 are arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6 such that their respective distal ends are directed toward the center of the hole 2a, and their base ends are fixed to the periphery of the hole 2a. A magnet 15 is attached to the tip. The magnets 15 attract the sample stage 11 and support the sample stage 11 on the hole 2 a of the stage 2 via the leaf spring 14. Others are shown in FIG.
Is the same as

Therefore, even in this case, the same effect as in the sixth embodiment can be expected. In addition, when the stage 2 is moved in the X and Y directions after the objective lens 6 is focused on the slide glass (sample) 12, the slide glass is moved via the leaf spring 14 whose rigidity in the movement direction of the stage 2 is set high. Since the (sample) 12 can be moved in a direction perpendicular to the optical axis of the objective lens 6, the positioning of the slide glass (sample) 12 in the XY directions can be easily performed.

(Sixteenth Embodiment) FIG. 19 shows a schematic configuration of a sixteenth embodiment of the present invention based on the same concept as the tenth embodiment described above. The same parts are denoted by the same reference numerals.

Also in this case, the stage 2 on the microscope main body 1 side
A hole 2a is formed at a position corresponding to the sample support device 4 on the optical axis of the objective lens 6, and a sample table 11 is mounted on the periphery of the hole 2a. Also, on the lower surface of stage 2,
A plurality of leaf springs 14 are provided along the periphery of the hole 2a. These leaf springs 14 are arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6 such that their respective distal ends are directed toward the center of the hole 2a, and their base ends are fixed to the periphery of the hole 2a. A magnet 15 is attached to the tip. The magnets 15 attract the sample stage 11 and support the sample stage 11 on the hole 2 a of the stage 2 via the leaf spring 14. Others are shown in FIG.
Is the same as

Therefore, even in this case, the same effect as that of the seventh embodiment can be expected. In addition, when the stage 2 is moved in the X and Y directions after the objective lens 6 is focused on the slide glass (sample) 12, the slide glass is moved via the leaf spring 14 whose rigidity in the movement direction of the stage 2 is set high. Since the (sample) 12 can be moved in a direction perpendicular to the optical axis of the objective lens 6, the positioning of the slide glass (sample) 12 in the XY directions can be easily performed.

(Seventeenth Embodiment) FIG. 20 shows a schematic configuration of a seventeenth embodiment of the present invention based on the same idea as in the tenth embodiment described above. The same parts are denoted by the same reference numerals.

Also in this case, the stage 2 on the microscope main body 1 side
A hole 2a is formed at a position corresponding to the sample support device 4 on the optical axis of the objective lens 6, and a sample table 11 is mounted on the periphery of the hole 2a. Also, on the lower surface of stage 2,
A plurality of leaf springs 14 are provided along the periphery of the hole 2a. These leaf springs 14 are arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6 such that their respective distal ends are directed to the center of the hole 2a, and their base ends are fixed to the periphery of the hole 2a. A magnet 15 is attached to the tip. The magnets 15 attract the sample stage 11 and support the sample stage 11 on the hole 2 a of the stage 2 via the leaf spring 14. Others are shown in Fig. 1.
Same as 0.

Therefore, even in this case, the same effect as in the eighth embodiment can be expected. In addition, when the stage 2 is moved in the X and Y directions after the objective lens 6 is focused on the slide glass (sample) 12, the slide glass is moved via the leaf spring 14 whose rigidity in the movement direction of the stage 2 is set high. Since the (sample) 12 can be moved in a direction perpendicular to the optical axis of the objective lens 6, the positioning of the slide glass (sample) 12 in the XY directions can be easily performed.

(Eighteenth Embodiment) By the way, after the position of the slide glass (sample) 12 and the focal point of the objective lens 6 are adjusted, if the ambient temperature changes, the dimensional change of the mechanical parts and the dimensional size of the optical parts will change. The position of the slide glass (sample) 12 and the focal point of the objective lens 6 relatively change due to changes in the refractive index and the like, which may cause deterioration of the observed image.

Therefore, in the eighteenth embodiment, even if the ambient temperature changes, deterioration of the observed image can be eliminated.

FIG. 21 shows a schematic configuration of the eighteenth embodiment of the present invention, and the same parts as those in FIG. 2 are denoted by the same reference numerals.

In this case, the operation ring 7 and the sample holder 8 disposed in contact with the operation ring 7 use materials having different linear expansion coefficients. Others are the same as FIG.

In such a configuration, when the ambient temperature changes and the lens size, the lens interval, and the lens refractive index of the objective lens 6 change, the WD changes. The change amount WD of the WD can be obtained by the following expression, where WD is a change amount per unit temperature and WD is a change in ambient temperature.

When the ambient temperature changes by ΔT, the amount of change δ0b in the optical axis direction at the tip of the objective lens 6 with respect to the threaded body surface of the revolver 3 of the fixed base 5 is the linear expansion coefficient of the fixed base 5. Is α1, the linear expansion coefficient of the objective lens 6 is α4, the dimension of the fixed base 5 in the optical axis direction that affects the variation δ0b at this time is Le, and the dimension of the objective lens 6 in the optical axis direction is L0b. δ0b = (α1Le + α4L0b) ΔT (2)

Further, when the ambient temperature changes by ΔT, the amount of change δs in the optical axis direction of the upper surface of the sample base 11 with respect to the surface of the screw mount of the revolver 3 of the fixed base 5 is linear expansion of the fixed base 5. The coefficient is α1, the coefficient of linear expansion of the operation ring 7 is α2, the coefficient of linear expansion of the sample holder 8 is α3, and the coefficient of linear expansion of the sample table 11 is α5.
In this case, the dimension of the fixed base 5 in the optical axis direction which affects the change amount δs at this time is La, the dimension of the operation ring 7 in the optical axis direction is Lb,
Assuming that the dimension of the sample holder 8 in the optical axis direction is Lc and the dimension of the sample stage 11 in the optical axis direction is Ld, δs = (α1La + α2Lb + α3Lc + α5Ld) ΔT (3) Thereby, the slide glass (sample) 1
The relative positional change amount δ between the lens 2 and the focal point of the objective lens 6 is obtained by the following equation: δ = δWD + δ0b−δS (4)

As a result, in order to eliminate the deterioration of the observed image, a condition that δ = 0 in the above equation may be given. Therefore,
If δS = δWD + δ0b is rewritten using the equations (1) to (3), α1La + α2Lb + α3Lc + α5Ld = αWD + α1Le + α4L0b (5) is obtained. Are almost the same, it is necessary to satisfy La + Lb + Lc + Ld ≒ WD + Le + Lob (6).

Therefore, if the materials and dimensions of each part are selected so as to satisfy the equations (5) and (6), the position of the slide glass (sample) 12 and the focal point of the objective lens 6 can be maintained even when the ambient temperature changes. Can be kept constant, and deterioration of the observed image can be prevented.

By the way, for example, La = 2 mm, Ld = 2
mm, Le = 8mm, L0b = 44.8mm, WD = 0.2
mm, αWD = 0.1 × 10 ⁻³ mm / K, α1 = α5 = 1
0.1 × 10 ^-6 / K (iron material), α3 = 23.5 × 10 ^-6
/ K (aluminum material), α2 = α4 = 20.8 × 10 ⁻⁶ / (brass), operation ring 7 for eliminating deterioration of observed image
When the dimension Lb of the sample holder 8 and the dimension Lc of the sample holder 8 are obtained, the equation (5) can be rewritten as follows.

20.8Lb + 23.5Lc = 1072.24 Further, equation (6) can be rewritten as follows.

Lb + Lc = 49 As a result, Lb = 29.4 and Lc = 19.6 are obtained. Therefore, if the operating ring 7 and the sample holder 8 having these dimensions are selected and used, even if the ambient temperature changes, The deterioration of the observation image can be prevented.

Accordingly, by selecting the materials and dimensions of the operation ring 7 and the sample holder 8 in this manner, even if the ambient temperature changes, the slide glass (sample) 12 can be selected.
Since the position of the object and the focal point of the objective lens 6 can always be kept constant, it is possible to reliably prevent the observation image from deteriorating.

Further, since the fixing base 5 and the operation ring 7 are made of different materials, the engagement of the screw portions of both is made.
Smooth rotation can be expected.

(Nineteenth Embodiment) FIG. 22 shows a schematic configuration of a nineteenth embodiment of the present invention based on the same concept as the above-described eighteenth embodiment. The same parts are denoted by the same reference numerals.

In this case, an auxiliary member 41 is arranged between the operation ring 7 and the sample holder 8, and the sample holder 8 and the auxiliary member 41 are arranged.
Use materials having different linear expansion coefficients. Others are the same as FIG.

Even in such a configuration, when the ambient temperature changes and the lens size, the lens interval, and the lens refractive index of the objective lens 6 change, the WD changes. The change amount WD of the WD can be obtained by the following equation, where WD is a change amount per unit temperature and WD is a change in ambient temperature.

When the ambient temperature changes by ΔT, the amount of change δ0b in the optical axis direction at the tip of the objective lens 6 with respect to the threaded body surface of the revolver 3 of the fixed base 5 is the linear expansion coefficient of the fixed base 5. Is α1, the linear expansion coefficient of the objective lens 6 is α4, the dimension of the fixed base 5 in the optical axis direction that affects the variation δ0b at this time is Le, and the dimension of the objective lens 6 in the optical axis direction is L0b. δ0b = (α1Le + α4L0b) ΔT (8)

Further, when the ambient temperature changes by ΔT, the amount of change δs in the optical axis direction of the upper surface of the sample base 11 with respect to the surface of the screw base of the revolver 3 of the fixed base 5 is linear expansion of the fixed base 5. The coefficient is α1, the linear expansion coefficient of the operating ring 7 is α2, the linear expansion coefficient of the auxiliary member 41 is α6, the linear expansion coefficient of the sample holder 8 is α3, and the linear expansion coefficient of the sample table 11 is α5. The dimension of the fixed base 5 in the optical axis direction that affects the amount δs is La,
The dimension of the operation ring 7 in the optical axis direction is Lb, the dimension of the auxiliary member 41 in the optical axis direction is Lc, and the dimension of the sample holder 8 in the optical axis direction is L.
d, assuming that the dimension of the sample stage 11 in the optical axis direction is Lf, δs = (α1La + α2Lb + α6Lc + α3Ld + α5Lf) ΔT (9) Thereby, the slide glass (sample) 1
The relative position change amount δ between the lens 2 and the focal point of the objective lens 6 is obtained by the following equation: δ = δWD + δ0b−δS (10)

As a result, in order to eliminate the deterioration of the observed image, it is sufficient to provide a condition such that δ = 0 in the above equation. Therefore,
If δS = δWD + δ0b is rewritten using the equations (7) to (9), α1La + α2Lb + α6Lc + α3Ld + α5Lf = αWD + α1Le + α4L0b (11) is obtained. Are almost the same, it is necessary to satisfy La + Lb + Lc + Ld + Lf ≒ WD + Le + Lob (12)

Therefore, if the materials and dimensions of the respective parts are selected so as to satisfy the equations (11) and (12), the position of the slide glass (sample) 12 and the focal point of the objective lens 6 even when the ambient temperature changes. Can be kept constant, and deterioration of the observed image can be prevented.

Incidentally, for example, La = 2 mm, Lb = 1
0 mm, Lf = 2 mm, Le = 8 mm, L0b = 44.8 m
m, WD = 0.2 mm, αWD = 0.1 × 10 ⁻³ mm / K,
α1 = α5 = 10.1 × 10 ⁻⁶ / K (iron material), α2 = α6 =
α4 = 20.8 × 10 ⁻⁶ / K (brass), α3 = 23.5 ×
In the case of 10 ⁻⁶ / (aluminum material), the dimension Lc of the auxiliary member 41 and the dimension Ld of the sample holder 8 for eliminating deterioration of the observation image are set.
Equation (11) can be rewritten as follows:

20.8Lc + 23.5Ld = 864.24 Equation (12) can be rewritten as follows.

Lc + Ld = 39 As a result, Lc = 19.4 and Ld = 19.6 are obtained. Therefore, if the auxiliary member 41 and the sample holder 8 having these dimensions are selected and used, even if the ambient temperature changes, Since the deterioration of the observed image can be prevented, the first
The same effect as that of the eighth embodiment can be expected. In addition, since there is no need to change the dimensions of the operation ring 7 having a complicated shape in which the screw portion is provided, the processing cost can be reduced, and it is economically advantageous. Can be.

(Twentieth Embodiment) FIG. 23 is a schematic structural view of an inverted microscope to which the sample supporting device of the present invention is applied. The microscope main body 1 is provided with a stage 2, a revolver 3 is arranged below the stage 2, and the revolver 3 is provided with a sample support device 4 of the present invention.

The optical system of the inverted microscope will be described. A mirror 101 is provided on the optical path of the illumination light output from the light source 100.
Is arranged. A condensing lens 102 for condensing illumination light on a slide glass (sample) 12 is provided on a reflection optical path of the mirror 101. Further, a mirror 103 is arranged on the optical axis Q of the objective lens 6 in the microscope main body 1, and an eyepiece 16 is provided on a reflection optical path of the mirror 103 via a relay lens 104.

FIG. 24 is a schematic structural view of the sample supporting device 4. As shown in FIG. A fixed base 50 is attached to the revolver 3. This mounting is performed by the screw 5 formed on the revolver 3.
1 and a screw portion 52 formed at the lower portion of the fixed base 50. The fixed base 50 is formed in a cylindrical shape so that the objective lens 6 is provided inside. This fixed base 50
A movable stage 53 is supported via a parallel spring 54 so as to be movable in the direction of the optical axis Q. The objective lens 6 is attached to the moving stage 53. An opening 55 for securing an optical path of an image from the objective lens 6 is formed at the bottom of the moving stage 53. Attachment of the objective lens 6 to the moving stage 53 is performed by screwing a screw portion 56 formed on the moving stage 53 and a screw portion 57 formed on the objective lens 6.

A piezoelectric actuator 58 is provided between the fixed base 50 and the moving stage 53. The direction of expansion and contraction of the piezoelectric actuator 58 is parallel to the optical axis Q. Therefore, when the piezoelectric actuator 58 expands and contracts, the objective lens 6 mounted on the moving stage 53 moves slightly in the optical axis Q direction.

The fine movement mechanism is constituted by the moving stage 53, the parallel spring 54 and the piezoelectric actuator 58.

On the fixed base 50, a displacement sensor 59 is provided as displacement amount detecting means. The displacement sensor 59 is mounted on the fixed base 5 facing the bottom of the moving stage 53.
0. The displacement sensor 59 detects the amount of displacement of the objective lens 6 in the optical axis Q direction and outputs a displacement signal. As the displacement sensor 59, for example, a capacitance sensor is used.

A fixed cylinder 60 of the fixed base 50 is formed. A screw portion 61 is formed on the outer periphery of the fixed cylinder 60. An annular operation ring 62 is screwed into the screw portion 61. That is, a screw portion 63 is formed on the inner periphery of the operation ring 62, and the screw portion 63 is screwed with the screw portion 61 of the fixed cylinder 60.

Accordingly, when the operating ring 62 is rotated with respect to the fixed cylinder 60, the operating ring 62 moves up and down by a distance corresponding to the pitch between the screw portions 61 and 63. This vertical movement direction is parallel to the optical axis Q direction.

The operating ring 62 has a cylindrical sample holder 6.
4 are placed. The sample stage 11 is provided on the sample stage 64. A slide glass (sample) 12 is placed on the sample table 11. A guide hole 65 is formed in the wall surface of the sample holder 64. The guide hole 65 is formed, for example, as a long hole parallel to the optical axis Q direction. The guide hole 65 is provided with the fixed cylinder 6.
The guide pin 66 provided at the position 0 is inserted.

Accordingly, when the operating ring 62 is rotated and moved in the vertical direction, the sample holding table 64 is moved in the vertical direction, and the slide glass (sample) 12 is moved in the vertical direction via the sample table 11. Moving. Thereby, the relative distance between the objective lens 6 and the slide glass (sample) 12 changes.

The operation ring 62, the sample holding table 64, the sample table 11, the guide hole 65, and the guide pin 66 constitute a position adjusting means.

The controller 67 includes the displacement sensor 59
And outputs a control signal to the piezoelectric actuator 58 for moving the objective lens 6 to the position specified by the command value in accordance with the deviation. It has a function as control means. This control signal is transmitted to the piezoelectric actuator 58
Indicates the voltage value to be applied.

The command value can be given by an operation dial configured to generate a different command value by a rotation operation, a personal computer having a program for automatically generating a desired command value, or the like. ing.

Next, the operation of the embodiment configured as described above will be described.

Objective lens 6 and slide glass (sample) 1
Focusing on 2 is performed by rotating the operation ring 62. When the operation ring 62 makes one rotation, the operation ring 62 moves up and down in the direction of the optical axis Q by a distance corresponding to the pitch between the screw portions 61 and 63.

When the operation ring 62 moves up and down,
Accompanying this, the sample holder 64 moves in the vertical direction. Further, along with the vertical direction of the sample holding table 64, the sample table 1
1 and a slide glass (sample) 12 placed on the sample stage 11 move in the vertical direction.

Accordingly, the relative distance between the objective lens 6 and the slide glass (sample) 12 changes. Then, the focus of the objective lens 6 and the slide glass (sample) 12 are aligned.

On the other hand, the displacement sensor 59 detects the amount of displacement of the objective lens 6 in the optical axis Q direction and outputs a displacement signal. This displacement signal is sent to the controller 67.

The controller 67 includes a displacement sensor 59
And outputs a control signal to the piezoelectric actuator 58 for moving the objective lens 6 to the position specified by the command value in accordance with the deviation. .

The piezoelectric actuator 58 expands and contracts in a direction parallel to the optical axis Q according to a control signal given from the controller 67. When the piezoelectric actuator 58 expands and contracts, the objective lens 6 mounted on the moving stage 53 moves minutely in the optical axis Q direction.

Therefore, by changing the command value,
Fine adjustment of the electric focus can be performed by the fine movement mechanism and the control means. As described above, the command value is given by an operation dial configured to generate a different command value by a rotation operation, a personal computer having a program for automatically generating a desired command value, or the like. That is, fine adjustment of electric focus can be easily performed after focusing by the position adjusting means.

Even when the ambient temperature changes greatly, the controller 67 performs feedback control of the fine movement mechanism so as to eliminate the deviation of the displacement signal from the command value. It is maintained in the position. When the objective lens 6 is maintained at a desired position, the slide glass (sample) 12 can be stably observed.

The switching of the objective lens 6 will be described. When the focusing handle 13 is rotated, the revolver 3 is lowered, for example. As the revolver 3 descends, the sample stage 11 also descends. At this time, the sample stage 11 gradually approaches and comes into contact with the stage 2. When the revolver 3 is lowered even after the contact between the sample stage 11 and the stage 2, the sample stage 11 and the sample holding stage 64 are separated and separated. After a while, revolver 3
Is rotated, the objective lens 6 can be switched with another type of objective lens 6.

In such a sample support device 4, the mechanical coupling length between the objective lens 6 and the slide glass (sample) 12 is determined only by the fixed base 50, the operation ring 62, and the sample holding base 64. Since the operation ring 62 can be set to be extremely short, the position of the slide glass (sample) 12 and the focus of the objective lens 6 is adjusted by rotating the operation ring 62. The alignment of the focal point is hardly changed, and is not affected by external vibration, so that a stable and favorable sample observation can always be performed.

Since fine adjustment of the electric focus can be performed using the fine movement mechanism, for example, a plurality of command values corresponding to the position of the objective lens 6 are stored in advance, and the command value corresponding to a desired position is stored. If given to the controller 67, the objective lens 6
Can be controlled to a desired position with good reproducibility.

The displacement sensor 59 detects the amount of displacement of the objective lens 6 in the direction of the optical axis Q, compares this displacement signal with a command value, and expands and contracts the piezoelectric actuator 58 according to the deviation. The lens 6 can be maintained at a desired position given by the command value, and observation of the slide glass (sample) 12 can be performed stably over a long period of time.

Further, since the parallel spring 54 and the piezoelectric actuator 58 are arranged symmetrically with respect to the optical axis Q, unnecessary movements such as tilting of the objective lens 6 during fine movement of the objective lens 6 are reduced.

Furthermore, since independent voltages can be applied to the piezoelectric actuators 58, individual differences in displacement of the piezoelectric actuators 58 can be adjusted by adjusting the applied voltages.

In the present embodiment, the displacement sensor 59 may be omitted, and the fine movement mechanism may be used as an “electric fine focus adjustment mechanism”. In the present embodiment (the present invention), since the mechanical coupling length between the objective lens and the slide glass is shortened, the focus shift due to the temperature change is inherently small. Therefore, substantially stable sample observation can be performed without performing feedback control using the displacement sensor.

(Twenty-First Embodiment) FIG. 25 is a schematic structural view of a twenty-first embodiment of the present invention. Note that FIG.
The same parts as those described above are denoted by the same reference numerals, and detailed description thereof will be omitted.

On the lower surface of the stage 2, a plurality of leaf springs 14 are provided along the periphery of the hole 2a as elastic means. These leaf springs 14 are arranged in a horizontal direction orthogonal to the optical axis Q of the objective lens 6 such that their respective distal ends are directed toward the center of the hole 2a, and their respective base ends are fixed to the periphery of the hole 2a. A magnet 15 is attached to the tip. The magnets 15 attract the sample stage 11 and support the sample stage 11 on the hole 2 a of the stage 2 via the leaf spring 14. Here, the sample table 11 is attracted by the magnet 15 so that the sample table 11 can be easily removed.

Next, the operation of the embodiment configured as described above will be described.

It is assumed that the revolver 3 is provided with a plurality of sample support devices 4 having objective lenses 6 having different magnifications.

First, the revolver 3 is moved downward by operating the focusing handle 13, and the revolver 3 is rotated to position the sample support device 4 having the objective lens 6 of a desired magnification on the optical path. When the revolver 3 is moving downward, the sample stage 11 is
Is left on stage 2. In this case, the sample stage 11
Is attracted to the magnet 15 and supported on the stage 2 via the leaf spring 14.

Next, when the revolver 3 is moved upward by operating the focusing handle 13 and the sample supporting device 4 located on the optical path is moved upward, the periphery of the hole 2a of the stage 2 is moved. The sample stage 11 that has just been placed is lifted away from above the stage 2 by about several mm upward.

However, the leaf spring 1 supporting the sample stage 11
Numeral 4 is arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6, and the rigidity of the objective lens 6 in the optical axis direction is low.
The sample stage 11 can move without resistance due to the deformation of the leaf spring 14.

On the other hand, the entire slide glass (sample) 12 is moved in the direction orthogonal to the optical axis of the objective lens 6, that is, in the XY directions, from the state where the focus of the slide glass (sample) 12 and the focus of the objective lens 6 are matched. If it is desired to move, the stage 2 of the microscope main body 1 is moved in the XY directions.

The leaf spring 1 supporting the sample stage 11 at this time
Since the stage 4 is arranged in a horizontal direction orthogonal to the optical axis of the objective lens 6, the stage 2 has high rigidity against movement in the XY directions. Move.

Therefore, according to the twenty-first embodiment, the sample stage 11 holding the slide glass (sample) 12
Is reduced in rigidity of the objective lens 6 in the optical axis direction.
The slide glass (sample) 1 is supported on the stage 2 through the leaf spring 14 having a high rigidity in the moving direction of the slide glass.
When the stage 2 is moved in the X and Y directions after the focusing of the objective lens 6 with respect to the stage 2, the slide glass (sample) 12 is moved through the objective lens 6 via a leaf spring 14 whose rigidity in the moving direction of the stage 2 is set high. The slide glass (sample) 12 can be easily positioned in the X and Y directions.

The present invention is not limited to the above-described first to twenty-first embodiments, and various modifications can be made in the implementation stage without departing from the spirit of the invention.

Further, the above-described embodiment includes various stages of the invention, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent features. For example, even if some components are deleted from all the components shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and the problem described in the column of the effect of the invention can be solved. In the case where the effect is obtained, a configuration from which this configuration requirement is deleted can be extracted as an invention.

For example, in the eighteenth embodiment, different materials are used for the operation ring 7 and the sample holder 8, and in the nineteenth embodiment, different materials are used for the auxiliary member 41 and the sample holder 8. Although the case has been described, these are merely examples, and at least two or more kinds of different materials are used for the elements constituting the position adjusting means of the sample support device 4, and the materials and dimensions of these elements are selected. In this way, the above-mentioned effects can be expected.

In the eighteenth and nineteenth embodiments described above, only the configuration applied to the configuration shown in FIG. 2 of the first embodiment is described.
It is needless to say that the present invention can also be applied to the configuration shown in the embodiments to the seventeenth embodiment.

Next, another feature of the present invention will be described.

According to the present invention, in the sample support device according to the fourth aspect, the control means compares the displacement of the objective lens detected by the displacement detection means with a command value, and responds to the deviation. And controlling the fine movement mechanism to maintain the objective lens at a position designated by the command value.

Further, according to the present invention, in the sample support device according to the fourth aspect, the fine movement mechanism includes a fixed stage, a moving stage provided with the objective lens, and the moving stage is moved with respect to the fixed stage. An actuator for minutely moving in the optical axis direction.

According to a ninth aspect of the present invention, in the sample supporting apparatus according to the ninth aspect, the position adjusting means uses at least two or more kinds of different materials for the components including the fixed base, the operating ring and the sample holding base. In addition, the material and dimensions of these components can be selected.

According to a tenth aspect of the present invention, in the sample supporting apparatus according to the tenth aspect, the position adjusting means uses different materials for the operation ring and the sample holding table, and allows respective dimensions to be selected. It is characterized by.

According to a tenth aspect of the present invention, in the sample supporting apparatus according to the tenth aspect, the position adjusting means further has an auxiliary member as a constituent element, and different materials are used for the auxiliary member and the sample holder. In addition, each dimension can be selected.

The present invention also provides an objective lens, a sample stage for supporting an observation sample, and an outer periphery of the objective lens.
A sample support device, comprising: a position adjusting means for moving the sample stage in the optical axis direction of the objective lens.

[0184]

As described above, according to the present invention, the mechanical coupling length between the objective lens and the observation sample is determined only by the position adjusting means provided on the objective lens.
Since it can be set extremely short, the positional relationship between the objective lens and the observation sample hardly changes even when the ambient temperature changes, and it is not affected by external vibration, so that stable sample observation is always performed. be able to.

Also, after the objective lens is focused on the observation sample, the observation sample can be moved in a direction perpendicular to the optical axis of the objective lens only by moving the stage, so that the positioning of the observation sample in the stage moving direction is easy. Can be done.

Further, at least two or more kinds of different materials are used for the elements constituting the position adjusting means of the sample support apparatus, and the ambient temperature is changed by selecting the materials and dimensions of these elements. This can also prevent deterioration of the observed image.

Further, the mechanical coupling length between the objective lens and the sample to be observed is set short, and the operation of the fine movement mechanism is controlled according to the deviation between the displacement amount of the objective lens and the command value, so that the objective lens can be commanded. Move to the position indicated by the value,
Even when the ambient temperature changes, the positional relationship between the objective lens and the observation sample hardly changes, and it is not affected by external vibration, and the objective lens is maintained at a desired position given by a command value. Thus, observation of the observation sample can be performed stably for a long time.

[Brief description of the drawings]

FIG. 1 is a diagram showing a schematic configuration of an inverted microscope to which a first embodiment of the present invention is applied.

FIG. 2 is a diagram showing a schematic configuration of the first embodiment of the present invention.

FIG. 3 is a diagram showing a schematic configuration of a second embodiment of the present invention.

FIG. 4 is a diagram showing a schematic configuration of a third embodiment of the present invention.

FIG. 5 is a diagram showing a schematic configuration of a fourth embodiment of the present invention.

FIG. 6 is a diagram showing a schematic configuration of a fifth embodiment of the present invention.

FIG. 7 is a diagram showing a schematic configuration of a microscope applied to a fifth embodiment.

FIG. 8 is a diagram showing a schematic configuration of a sixth embodiment of the present invention.

FIG. 9 is a diagram showing a schematic configuration of a seventh embodiment of the present invention.

FIG. 10 is a diagram showing a schematic configuration of an eighth embodiment of the present invention.

FIG. 11 is a diagram showing a schematic configuration of a ninth embodiment of the present invention.

FIG. 12 is a diagram showing a schematic configuration of an inverted microscope to which a tenth embodiment of the present invention is applied.

FIG. 13 is a diagram showing a schematic configuration of a tenth embodiment of the present invention.

FIG. 14 is a diagram showing a schematic configuration of an eleventh embodiment of the present invention.

FIG. 15 is a diagram showing a schematic configuration of a twelfth embodiment of the present invention.

FIG. 16 is a diagram showing a schematic configuration of a thirteenth embodiment of the present invention.

FIG. 17 is a diagram showing a schematic configuration of a fourteenth embodiment of the present invention.

FIG. 18 is a diagram showing a schematic configuration of a fifteenth embodiment of the present invention.

FIG. 19 is a diagram showing a schematic configuration of a sixteenth embodiment of the present invention.

FIG. 20 is a view showing a schematic configuration of a seventeenth embodiment of the present invention.

FIG. 21 is a view showing a schematic configuration of an eighteenth embodiment of the present invention.

FIG. 22 is a view showing a schematic configuration of a nineteenth embodiment of the present invention.

FIG. 23 is a diagram showing a schematic configuration of an inverted microscope to which the twentieth embodiment of the present invention is applied.

FIG. 24 is a view showing a schematic configuration of a sample support device according to a twentieth embodiment of the present invention.

FIG. 25 is a diagram showing a schematic configuration of a twenty-first embodiment of the present invention.

[Explanation of symbols]

 1: microscope main body 2: stage 3: revolver 3a: hole 4: sample support device 5: fixed base 5a: small diameter portion 5b, 5c, 5d: screw portion 501: flange portion 6: objective lens 7: operation ring 8: sample Holder 8a: Guide hole 8b: Bend 801: Collar 9: Detent pin 10: Magnet 11: Sample stand 11a: Observation hole 12: Slide glass (sample) 13: Focusing handle 14: Leaf spring 15: Magnet 16: Eyepiece 21: Detent part 21a: Hole 22: Middle seat 23: Pin 24: Friction member 25: Sample holder gripping mechanism 26: Temperature sensor 27: Temperature controller 28: Piezoelectric actuator 29: Sample table 30 : Capacitance sensor 31: Feed screw part 31a: Feed shaft 32: Leaf spring 33: Screw 41: Auxiliary member 50: Fixed base 51, 52, 56, 57, 61, 6 : Screw part 53: Moving stage 54: Parallel spring 55: Opening 58: Piezoelectric actuator 59: Displacement sensor 60: Fixed cylinder 62: Operation ring 64: Sample holder 65: Guide hole 67: Controller 100: Light source 101, 103: Mirror 102: condenser lens 104: relay lens

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Claims (9)

[Claims] 1. A sample supporting apparatus comprising: an objective lens; and a position adjusting means provided on an outer periphery of the objective lens and capable of moving an observation sample in an optical axis direction of the objective lens. 2. An objective lens, a stage movably provided in a direction orthogonal to an optical axis of the objective lens, a sample stage holding an observation sample and mounted on the stage, and the objective lens A position adjusting means provided on the outer periphery of the objective lens so that the observation sample can be moved in the optical axis direction of the objective lens via the sample stage; and A sample support device, comprising: an elastic means having a low rigidity in the optical axis direction and a high rigidity in the moving direction of the stage. 3. An objective lens, position adjusting means provided on an outer periphery of the objective lens, and capable of moving an observation sample in an optical axis direction of the objective lens, and adjusting a distance between the observation sample and the objective lens. A fine movement mechanism for making a minute change in the direction of the optical axis; a displacement amount detecting means for detecting a displacement amount of the objective lens; and the objective lens and the observation sample by operating the fine movement mechanism based on a detection output of the displacement amount detecting means. And control means for controlling the distance between the sample and the sample to a predetermined distance. 4. An objective lens, a stage movably provided in a direction orthogonal to an optical axis of the objective lens, a sample stage holding an observation sample and mounted on the stage, and the objective lens Position adjustment means provided on the outer periphery of the observation sample so that the observation sample can be moved in the optical axis direction of the objective lens, and a fine movement mechanism for minutely changing the distance between the observation sample and the objective lens in the optical axis direction, Displacement amount detection means for detecting the displacement amount of the objective lens; and control for operating the fine movement mechanism based on the detection output of the displacement amount detection means to control the distance between the objective lens and the observation sample to a predetermined distance. And an elastic means provided on the stage and having a low rigidity in the optical axis direction of the objective lens with respect to the sample stage and a high rigidity in the moving direction of the stage. Sample support apparatus according to claim. 5. The mechanical coupling length between the objective lens and the observation sample is determined by each component of the position adjusting means provided on the outer periphery of the objective lens. Item 5. The sample supporting device according to item 2 or 4. 6. A plate spring provided on the stage and arranged along a direction orthogonal to an optical axis of the objective lens, and a plate spring provided on the plate spring and adsorbing the sample stage. 5. The sample supporting apparatus according to claim 2, wherein the apparatus comprises a magnet. 7. The sample supporting apparatus according to claim 1, wherein: a fine movement mechanism for minutely changing a distance between the observation sample and the objective lens in the optical axis direction; Control means for finely adjusting the distance to the observation sample. 8. A fixed table provided with an objective lens mounting portion, a sample table for supporting an observation sample, and a position adjusting means provided on the fixed table so as to move the sample table in the optical axis direction of the objective lens. And a sample supporting device. 9. The sample support device according to claim 1, wherein the position adjusting means includes: a fixed base on which the objective lens is fixed; An operation ring which is screwed and is moved in the optical axis direction of the objective lens by a rotation operation thereof, and is provided movably in the optical axis direction of the objective lens, and the observation sample and the A sample support device, comprising: a sample holding table that adjusts a distance from an objective lens.