JP2002021851A - Magnetic bearing control device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic baring control device simplifying management of a control device and equipment to be controlled capable of indicating a type of the connected equipment to be controlled and allowing a user to easily confirm the type of the equipment to be controlled to be driven or currently being driven. SOLUTION: A type judgment circuit 7 receives an identification signal from a connected pump main body (equipment to be controlled) 2 and judges at least a type of the connected pump main body 2 based on the identification signal. DSP(digital process means) 13 controls a magnetic bearing 23 and a motor 24 of the connected pump main body 2 based on the judgment result of the type judgment circuit 7 and indicates the type of the pump main body 2 judged by the type judgment circuit 7 on an operation indication panel (indication means) 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a turbo molecular pump (TMP) having a rotating body rotated at a high speed by a motor.
The present invention relates to a magnetic bearing control device for controlling at least a motor and a magnetic bearing that supports the rotating body in a non-contact manner while magnetically levitating the rotating body.

[0002]

2. Description of the Related Art As a bearing for a rotating body that rotates at a high speed, a magnetic bearing that supports the rotating body in a non-contact manner has been known. Devices using such magnetic bearings include turbo molecular pumps (Turbo pumps) used in, for example, semiconductor manufacturing equipment.
Molecular Pump) (hereinafter also referred to as “TMP”). In this turbo-molecular pump, a mechanical body (pump body) in which a rotating body (rotor) constituting the pump is non-contact supported by a control type magnetic bearing and rotated by a motor, and a controller (magnetic bearing control device) for controlling the machine body. Are known.

[0003] In the turbo molecular pump as described above, a magnetic bearing control device of an analog control system dedicated to the pump body and configured according to the performance required by the user has conventionally been used. In other words, this conventional magnetic bearing control device is manufactured for each of a plurality of types of pump bodies having different motors, magnetic bearings, etc., and has a circuit configuration corresponding to the control characteristics of each component of the pump body. And so on. Specifically, for example, for a motor, an inverter having a circuit constant determined according to the number of rotations of a rotating body by the motor or a supply current value to a motor winding at the time of rotation has been used. . In addition, for the magnetic bearing, the above-mentioned type of rotating body (weight, natural frequency, position of center of gravity, etc.) supported by the magnetic bearing in a non-contact manner, the type of electromagnet included in the magnetic bearing, etc. Circuits such as a magnetic bearing drive circuit for supplying an exciting current to the electromagnet and magnetically levitating the rotating body have been constructed and used.

Further, in the turbo molecular pump, since the pump body and the magnetic bearing control device are usually installed separately from each other and connected by a cable, a control signal to the pump body, for example, is proportional to the cable length. Signal level has decreased due to transmission loss in the cable, and the control signal has been affected by noise. For this reason, when the conventional magnetic bearing control device is used, it is necessary to change or adjust the gain of an amplifier provided at an output unit for the control signal or the like according to the cable length.

[0005] In recent years, the magnetic bearing control device for TMP as described above is a so-called multi-type magnetic bearing control device capable of controlling a plurality of types of pump bodies due to the digitization of the control device with the advance of digital technology. Has been developed and put into practical use. Such a multi-type conventional TM
The magnetic bearing controller for P automatically determines the model and cable length of the connected pump body, selects control parameters and the like based on the determination result, and controls the connected pump body. (See, for example, JP-A-9-189)
326, JP-A-9-189327, and JP-A-11-294454).

[0006]

However, in the conventional magnetic bearing control device for TMP as described above, the model and cable length of the connected pump body (control target device) are automatically determined. The control parameters and the like are appropriately changed without notifying the user of the model of the connected pump body or the like. For this reason, this conventional TM
When the magnetic bearing control device for P is used, the user cannot easily confirm the model of the pump main body that is currently or is to be driven, and it takes time and effort to manage the control device and the pump main body. There was a problem that. Specifically, for example, in order to grasp the model of the pump body that is currently being driven, it is necessary for the user to follow a cable connected to the control device and go to a pump body that is installed in a remote place. Was. Also, for example, when the model of the pump body is changed in response to a change in the type of semiconductor product to be manufactured, even if the cable is incorrectly connected to the pump body other than the model to be connected, the pump body that is connected incorrectly Since the drive is normally performed, erroneous connection of the cable and erroneous operation of the pump body due to the erroneous connection cannot be immediately found, which may hinder production of the semiconductor product.

[0007] In view of the above-mentioned conventional problems, the present invention can display the model of the connected control target device, so that the user can easily determine the model of the control target device that is scheduled to be driven or is currently being driven. It is an object of the present invention to provide a magnetic bearing control device capable of simplifying management of the control device and control target devices.

[0008]

SUMMARY OF THE INVENTION A magnetic bearing control device according to the present invention is a magnetic bearing control device for controlling a device to be controlled comprising a magnetic bearing for supporting a rotating body in a non-contact manner and a motor for rotating the rotating body. A model determination circuit for inputting an identification signal from the connected control target device and determining at least a model of the connected control target device based on the input identification signal; and A display connected to the circuit and displaying at least a model of the controlled device determined by the model determining circuit; a memory storing at least a plurality of control characteristics respectively corresponding to a plurality of types of controlled devices; Digital processing means for controlling a magnetic bearing and a motor of the connected device to be controlled in accordance with the result of the judgment by the circuit is provided.

In the magnetic bearing control device configured as described above, the model determining circuit determines the model based on the identification signal from the connected device to be controlled, and displays the determined model of the controlled device. , The user can easily confirm the model of the device to be controlled or the currently driven device to be controlled. In addition, since the memory stores a plurality of control characteristics corresponding to a plurality of types of controlled devices, the digital processing means optimizes the controlled device according to the model of the controlled device determined by the model determination circuit. Drive control is possible.

Further, in the magnetic bearing control device described above (claim 1), the digital processing means may include a function of the model determination circuit (claim 2). In this case, the circuit scale of the control device is smaller than when the digital processing means and the model determination circuit are separately provided.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the magnetic bearing control device of the present invention will be described below with reference to the drawings. In the following description, an example in which a magnetic bearing control device for TMP used in a turbo-molecular pump is configured will be described.

FIG. 1 is an explanatory view showing a schematic configuration of a magnetic bearing control device and a turbo-molecular pump using the same according to an embodiment of the present invention. FIG. 2 is a magnetic bearing control device and a pump shown in FIG. FIG. 3 is a block diagram illustrating a configuration of a main body.
In FIG. 2, the bold line in the figure indicates a power supply cable,
Others indicate communication lines for control signals. As shown in FIG. 1, the turbo-molecular pump includes a magnetic bearing control device 1, a pump body 2, and a cable 15 connecting these components to each other. The magnetic bearing control device 1
Is a housing 1 as an outer container made of, for example, metal.
a. The housing 1a is provided with a mounting portion 1b for mounting the operation display panel 10 configured to be detachable from the housing 1a, and an input / output port 1c to which a cable 18 is connected. The cable 18
Is for connecting the operation display panel 10 to an electric circuit such as the DSP 13 in the housing 1a, and the connectors 18a and 18b at one end and the other end are connected to the input / output port 1
c and a connector 10a provided on the operation display panel 10
Connected to. Also, the operation display panel 10 is attached to the mounting portion 1b.
In this case, the connector 10a is directly connected to the input / output port 1c. In addition, in FIG. 1, for simplification of the drawing, illustrations other than the main configuration of the present invention, such as internal wiring in the housing 1a, are omitted.

As shown in FIG. 2, the magnetic bearing control device 1 includes a displacement calculation circuit 3, a magnetic bearing drive circuit 4, an inverter 5, a power supply circuit 6, a model judgment circuit 7, a DSP board 8, and a serial communication board 9. , And an operation display panel 10 are provided. The DSP board 8 includes an A / D converter 1
1, D / A converter 12, DS as digital processing means
P13 and a memory 14 are mounted. Further, in the magnetic bearing control device 1, as shown in FIG. 1, among the above-described components, a heat-generating member that generates heat when electric power is supplied, specifically, the power supply circuit 6, the DSP 13, and the like are included. It is attached to a heat sink 1d via an insulating plate 1e. The heat sink 1d is closely attached to the top plate of the housing 1a by, for example, screws 1f as shown in FIG. Thus, the heat sink 1d is connected to the housing 1a.
, The heat from the heat-generating member as described above can be conducted to the housing 1a and can be radiated also from the outer surface of the housing 1a. As a result, the heat radiation efficiency of the heat from the heat generating member can be improved, the dimensions of the heat sink 1d and the housing 1a can be reduced, and the internal temperature of the housing 1a can be easily reduced.

The pump body 2 includes a rotating body 21 constituting a pump and a displacement detecting unit 2 for detecting a displacement of the rotating body 21.
2, a magnetic bearing 23 that supports the rotating body 21 in a magnetically levitated state, a motor 24 that drives the rotating body 21 to rotate, and a rotation speed sensor 25 that detects the rotation speed of the rotating body 21 are provided. The pump body 2 is provided with a touch-down bearing (not shown), which regulates the movable range of the rotating body 21 in the axial and radial directions, and when the pump body 2 is stopped or when the rotating body 21 is stopped. The rotor 21 is supported in contact when the magnetic non-contact support of the rotor 21 becomes impossible.

The magnetic bearing 23 has a plurality of electromagnets (not shown), and includes an axial magnetic bearing and a radial magnetic bearing which support the rotating body 21 in a non-contact manner in the axial and radial directions by the magnetic attraction of the electromagnets. Have. The displacement detection unit 22 includes a rotating body 2 in the axial direction and the radial direction.
A plurality of displacement sensors for detecting one displacement are provided (not shown). The motor 24 rotates the rotating body 21 that is supported in a non-contact manner by the magnetic bearing 23, and is configured by, for example, an induction motor. The rotation speed sensor 25 is for detecting the rotation speed of the rotating body 21, and for example, outputs a pulse signal corresponding to the detected rotation speed to D.
Output to SP13.

In the magnetic bearing control device 1, the displacement calculation circuit 3, magnetic bearing drive circuit 4, inverter 5, and D
A signal line from the SP 13 is connected to a connector section 16 provided on one side surface of the housing 1a. On the other hand, on the side of the pump body 2 which is a device to be controlled, a signal line from a displacement detection unit 22, a magnetic bearing 23, a motor 24, and a rotation speed sensor 25 is connected to the connector unit 17 thereof. The connectors 15a and 15b on one end and the other end of the cable 15 are connected to the connectors 16 and 17, respectively, so that the displacement calculation circuit 3, the magnetic bearing drive circuit 4, the inverter 5, and the DSP 13 are connected to the pump body 2 , A magnetic bearing 23, a motor 24, and a rotation speed sensor 25. As will be described in detail later, the connector 16 and the connector 15a of the cable 15 are provided with an identification signal output for outputting the identification signal for identifying the model of the pump body 2 connected to the connector 15b. Means are provided.

The displacement calculating circuit 3 calculates the axial and radial displacements of the rotating body 21 based on the output signals of the plurality of displacement sensors of the displacement detecting section 22. The displacement calculation circuit 3 generates displacement signals respectively corresponding to the calculated displacements in the axial direction and the radial direction, and outputs the DSP 1 through the A / D converter 11.
Output to 3. The magnetic bearing drive circuit 4 includes a plurality of power amplifiers and the like provided corresponding to a plurality of electromagnets of the magnetic bearing 23, and includes a DSP via the D / A converter 12.
13 based on the control current signal input from
The excitation current is supplied to the corresponding electromagnet. This allows
The rotating body 21 is magnetically levitated to a predetermined target position by a magnetic bearing 23 and is supported in a non-contact manner.

The inverter 5 controls the rotation of the motor 24 based on a rotation speed command signal input from the DSP 13. The power supply circuit 6 is connected to, for example, a commercial AC power supply,
A predetermined power is supplied to an electric circuit of the control device such as the inverter 5 or the DSP 13. Serial communication board 9
Are the memory 14 on the DSP board 8 and the operation display panel 1
0, and functions as a serial interface for performing serial transfer of data between them.
It is also possible to connect an external computer (for example, a PC) to the serial communication board 9 and to input a user's instruction from the computer to manage and control the control device and the pump body 2.

The model determining circuit 7 includes, for example, a CPU and a memory, receives an identification signal from the connected pump body 2, and determines the model of the pump body 2 based on the input identification signal. The result of the determination is notified to the operation display panel 10 and the DSP 13. Here, a specific configuration example of the identification signal output unit that outputs the identification signal to the model determination circuit 7 will be described with reference to FIG.
In the following description, for simplification of the description, for example, four types (model A, model A,
The case corresponding to the pump body 2 of (B, C, D) will be described as an example. As shown in FIG. 3, the connector 15a is provided with electric wires (core wires) 15c for controlling magnetic bearings and the like and pins 15d connected thereto, and four pins 15e, 15f, 15g, 15h are provided. These four pins 15e to 15h are connected to two switches 15j, 15 which can constitute a plurality of contact patterns (details will be described later).
k is connected to a board 15i on which k is mounted as shown in the figure. That is, one contact (upper left) of each of the switches 15j and 15k is connected to the pin 15e, and the other contact (lower left) is connected to the pin 15h.
The k common contacts (right side) are connected to pins 15f and 15g, respectively.

On the other hand, the connector 1 of the magnetic bearing control device 1
6 has a predetermined number of contacts 16 with respect to the pin 15d.
a as well as contacts 16 for pins 15e to 15h
c, 16d, 16e, and 16f are provided. The contacts 16d and 16e are connected to the model determination circuit 7, the contact 16c is connected to a predetermined power supply (for example, 5 V DC) via the resistor 16b, and the contact 16f is grounded. The power supply is connected to a power supply circuit 6. The substrate 15 having the above switches 15j and 15k
i, pins 15e to 15h, resistor 16b, contact 1
6c to 16f and the power supply constitute the identification signal output means.

When the pins 15d and 15e to 15h are connected to the contacts 16a and 16c to 16f, respectively, the pin 15d is connected to the DSP 13 and
A voltage of 5 V DC is applied to the pin 15e, and the pin 15h
Is grounded. The potentials of the pins 15f and 15g are set to the H level (5 level) by the contact patterns of the switches 15j and 15k.
V) or L level (0 V). Switches 15j, 1
The 5k contact pattern is determined, for example, as shown in Table 1 below, corresponding to the model of the pump body 2. Also,
The contents of the table shown in Table 1 are stored in the memory of the model determination circuit 7 as information necessary for determining the model of the pump main body 2, for example, when the control device is installed.

[0022]

[Table 1]

For example, when the model of the pump body 2 is "A", the contacts of the switches 15j and 15k are on the H side and the L side, respectively. 15a can be closed. This connector 15
When “a” is connected to the connector section 16, signals of H level and L level are input to the model determination circuit 7 from the contacts 16 d and 16 e as identification signals from the pump body 2. In the model determination circuit 7, the CPU determines that the model of the connected pump main body 2 is "A" based on the signal levels of the identification signals from the contacts 16d and 16e and the table stored in the memory. do it,
Notify the DSP 13 and the operation display panel 10.

In the above description, the model determination circuit 7 including a CPU and a memory has been described. However, for example, a logic operation is performed using the signal level of the identification signal to determine the model of the pump body 2. The model determination circuit 7 may include the above logic circuit. In the above description, the configuration in which the model determination circuit 7 determines the model of the connected pump body 2 using the identification signal from the identification signal output means provided in the connector section 16 and the connector 15a of the cable 15 has been described. However, the identification signal is not limited to the one described above, and the model determination circuit 7 can determine the model of the pump body 2 without providing the identification signal output means as described above. Specifically, when the control device is connected to the pump body 2 by a cable, for example, DS
P13 outputs a predetermined reference operation signal to the motor 24, and the model determination circuit 7 obtains a response state of the motor 24, such as the number of revolutions, based on the reference operation signal. Can be determined.

The substrate 15i on which the switches 15j and 15k are mounted as the identification signal output means is a common member as hardware regardless of the model of the pump body 2 because it is selectively used depending on the contact pattern. Therefore,
As compared with a configuration in which a circuit element (for example, a resistor) is changed and an identification signal is output for each different model, manufacturing is easier, and members are not attached by mistake. In addition, since the contact pattern can be easily confirmed visually, erroneous setting of the contact pattern hardly occurs. Also, even if an erroneous setting is made, this can be easily corrected at the time of inspection. Further, by using the cable 15 provided with the substrate 15i as described above, the control device can be used without any special modification for outputting an identification signal even for a pump body already installed in a semiconductor factory, for example. Can identify the model of the pump body.

The operation display panel 10 is connected to the model determination circuit 7, and functions as display means for displaying at least the model of the control target device determined by the model determination circuit 7, and inputs a user's instruction. A function as operating means for operating the control device and the pump body 2. Specifically, FIG.
As shown in FIG. 1, a display lamp 10b composed of, for example, a light emitting diode (LED) and a display unit 10c for displaying the model of the pump main body 2 determined by the model determination circuit 7 are provided. The display unit 10c allows the user to easily visually recognize the model of the pump body 2 that is scheduled to be driven or is currently being driven. The operation display panel 10 is provided with a liquid crystal display unit 10d for displaying predetermined information and a push button switch 10e with a lamp for instructing various operations such as starting and stopping. The liquid crystal display 1
On the basis of the command signal from the DSP 13, 0d displays, for example, operation history information of the control device stored in the memory 14, information indicating the operation status of the pump body 2, and the like.

As shown in FIG. 1, the operation display panel 10 is detachable from the housing 1a of the control device, so that the housing 1a is located near the pump body 2 to be controlled. Can be installed. Therefore, the cable 1 that connects the casing 1a of the control device and the pump body 2
5 can be shortened and a predetermined length can be used. As a result, unlike the aforementioned conventional example,
The effects of transmission loss and noise in the cable 15 can be reduced, and the use of the cable 15 of a predetermined length allows a change and adjustment to cope with a change in signal level when the cable length is different. Work can be omitted. Further, for example, connection work and installation work of the cable 15 to the control device in accordance with the model change of the pump main body 2 can be facilitated.

In addition to the above description, the operation display panel 10 may be constituted by a display having a touch panel function or a portable information terminal such as a notebook personal computer. In addition to the above description of connecting the DSP 13 and the operation display panel 10 via the serial communication board 9 (FIG. 2) and the cable 18 (FIG. 1), a wireless format or a wired format exemplified by a telephone line may be used. The DSP 13 and the operation display panel 10 may be connected to each other by using a data communication channel to perform bidirectional data communication.

Returning to FIG. 2, the DSP 13 constitutes digital processing means for controlling the magnetic bearing 23 and the motor 24 of the connected pump main body 2 in accordance with the result of the judgment by the model judgment circuit 7. For details, see DSP 13
Corresponds to the model of the pump body 2 notified from the model determination circuit 7 and stores control characteristics such as control parameters of the magnetic bearing 23 and the motor 24 such as coefficients necessary for executing the above-mentioned processing program in the memory 14. To get from. Further, the DSP 13 reads from the memory 14 a processing program that can be used in common for a plurality of types of the pump main body 2 having different magnetic bearings 23, motors 24, and the like, and reads the processing program and the model of the pump main body 2 The magnetic bearing 23 and the motor 24
Control. Accordingly, the DSP 13 can optimally control each of the pump bodies 2 corresponding to the plurality of types of pump bodies 2.

Specifically, the DSP 13 has an A / D
A control current value for each electromagnet of the magnetic bearing 23 is calculated based on a displacement signal from the displacement calculation circuit 3 input via the converter 11, and a corresponding control current signal is converted via the D / A converter 12. Output to the magnetic bearing drive circuit 4 to control the magnetic bearing 23. The DSP 13 calculates the rotation speed of the motor 24 based on the pulse signal from the rotation speed sensor 25, outputs a rotation speed command signal to the inverter 5 based on the calculated rotation speed, and controls the rotation of the motor 24. Control.

The memory 14 is preferably constituted by a nonvolatile memory such as a flash memory, an EPROM, an EEPROM, and the like. In addition to the above-described processing program for the DSP 13, a plurality of the above-mentioned control characteristics respectively corresponding to a plurality of types of pump bodies 2 are also provided. Is stored. Further, in the memory 14, predetermined information including the operation history information of the control device and the pump main body 2 and the like is appropriately stored in accordance with an instruction from the DSP 13. In addition to the above description, for example, a configuration may be adopted in which the content of the table shown in Table 1 is stored in the memory 14 and the model determination circuit 7 determines the model by referring to the storage content in the memory 14. In such a configuration, the memory provided in the model determination circuit 7 can be omitted. The memory 14 can be configured such that data can be input from, for example, an external computer via the serial communication board 9. For example, when the drive of a pump body that cannot be controlled by the above-described processing program is controlled. Also, by storing necessary information such as a processing program in the memory 14 before driving the pump body, the DSP 13 can perform drive control.

In the magnetic bearing control device 1 configured as described above, when the operation switch is operated and a user's operation instruction is input, the DSP 13 first activates the magnetic bearing via the D / A converter 12. A control current signal is output to the drive circuit 4 to drive the magnetic bearing 23 so that the rotating body 21 is magnetically levitated from the touch-down bearing and is supported in a non-contact manner at the target position. Subsequently, the DSP 13 outputs a rotation speed command signal to the inverter 5, drives the motor 24 to rotate the rotating body 21 at a desired rotation speed, and continues the operation of the pump body 2. Thereafter, when the operation switch is operated and a user's stop instruction is input, the DSP 13 outputs a rotation stop command signal for stopping rotation to the inverter 5 to stop the motor 24 and the rotating body 21. Then, DSP
13 outputs an energization stop signal for stopping energization of the electromagnet of the magnetic bearing 23 to the magnetic bearing drive circuit 4 via the D / A converter 12, and
Is stopped, and the rotating body 21 is supported by the touch-down bearing.

In the magnetic bearing control device 1, when the pump body 2 is connected via the cable 15, the model determining circuit 7 determines at least the pump body 2 based on the identification signal from the pump body 2. The model is determined, the result of the determination is notified to the DSP 13, and the determined model is notified and displayed on the operation display panel 10. Accordingly, the user is notified of the model of the pump body 2 that is scheduled to be driven or is currently being driven, and the management of the control device and the pump body 2 by the user can be simplified. Also, a cable 15 is connected to the pump body 2 other than the model to be connected.
Is incorrectly connected, the model of the pump body 2 that is erroneously connected is displayed on the operation display panel 10, so that erroneous connection of the cable 15 and erroneous operation of the pump body 2 due to this can be immediately found. Further, in the magnetic bearing control device 1 described above, the memory 14 stores a plurality of types of pump main bodies 2.
Are stored at least, and the DSP 13 controls the magnetic bearing 23 and the motor 24 of the connected pump body 2 according to the determination result of the model determination circuit 7, so that the plurality of types of pump bodies 2 A highly versatile control device capable of coping with the above can be configured at low cost.

In the above description, the magnetic bearing control device 1
Has been described as an example using a turbo molecular pump, but the present invention is not limited to this, and a controlled object device including a magnetic bearing that supports the rotating body in a non-contact manner and a motor that rotates the rotating body There is no particular limitation as long as it is a control device that controls. Specifically, machine tools such as lathes, machining centers, and grinders having spindles using magnetic bearings, fluid machines such as compressors and blowers using magnetic bearings, and magnetic bearing control devices used in flywheels and the like As a result, the magnetic bearing control device 1 of the present invention can be suitably applied.

In the above description, the configuration in which the model determination circuit 7 determines the model of the pump body 2 has been described. However, for example, by increasing the number of identification signals from the identification signal output means, the model determination circuit 7 The configuration may be such that the control characteristics of the connected pump main body 2 such as the model of the motor 24, the type of the magnetic bearing 24, or the length of the cable 15 need to be changed, or a determination is made for each cable or cable. Further, in the above description, the example in which the digital processing means is configured by the DSP 13 has been described, but the digital processing means may be any as long as it can control at least the magnetic bearing 23 by a predetermined processing program. Specifically, DSP 1
Instead of 3, for example, an MPU (microprocessor unit) can be used as digital processing means.

In the above description, the configuration in which the model determination circuit 7 is provided separately from the DSP 13 has been described.
Embodiments of the present invention are not limited to this, input an identification signal from a connected control target device, and determine at least the model of the connected control target device based on the input identification signal. That is, the function of the above-described model determination circuit may be implemented by a DSP. Thus, when the function of the model determination circuit is included in the DSP, the circuit scale of the control device can be reduced as compared with the case where the model determination circuit 7 is separately provided.

[0037]

The present invention configured as described above has the following effects. According to the magnetic bearing control device of claim 1,
The model of the control target device is determined based on an identification signal from the control target device to which the model determination circuit is connected, and the determined model of the control target device is displayed by the display means. Thus, the user can easily confirm the model of the device to be controlled or the currently driven device to be controlled. In addition, since the memory stores a plurality of control characteristics corresponding to a plurality of types of controlled devices, the digital processing means optimizes the controlled device according to the model of the controlled device determined by the model determination circuit. Drive control can be performed, and a highly versatile control device that can support a plurality of types of control target devices can be configured at low cost.

According to the magnetic bearing control device of the second aspect, since the model judging circuit is included in the digital processing means, compared with the case where the digital processing means and the model judging circuit are separately provided, The circuit scale can be reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a schematic configuration of a magnetic bearing control device and a turbo molecular pump using the same according to an embodiment of the present invention.

FIG. 2 is a block diagram illustrating a configuration of a magnetic bearing control device and a pump main body illustrated in FIG. 1;

FIG. 3 is a circuit diagram showing a specific configuration example of a model determination circuit shown in FIG. 2 and an identification signal output unit for outputting an identification signal to the model determination circuit.

FIG. 4 is an explanatory diagram illustrating a configuration of a specific example of the operation display panel illustrated in FIG. 2;

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 magnetic bearing control device 2 pump body (control target device) 7 model judgment circuit 9 operation display panel (display means) 13 DSP (digital processing means) 14 memory 21 rotating body 23 magnetic bearing 24 motor

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Takuchi Ueyama 3-5-8 Minamisenba, Chuo-ku, Osaka-shi F-term (reference) in Koyo Seiko Co., Ltd. 3H031 DA02 EA12 FA13 3J102 AA01 BA03 BA17 CA20 DA03 DA09 DB05 DB08 DB10 DB37 GA06

Claims (2)

[Claims] 1. A magnetic bearing control device for controlling a device to be controlled, comprising: a magnetic bearing that supports the rotating body in a non-contact manner; and a motor that rotates the rotating body, wherein the magnetic bearing control device includes: A signal is input, and based on the input identification signal, at least a model determination circuit for determining a model of the connected control target device; and a model determination circuit connected to the model determination circuit and determined by the model determination circuit. Display means for displaying at least the model of the device to be controlled; memory for storing at least a plurality of control characteristics respectively corresponding to a plurality of types of devices to be controlled; and the connected control object according to the determination result of the model determination circuit. Digital processing means for controlling a magnetic bearing and a motor of a device. 2. The magnetic bearing control device according to claim 1, wherein said digital processing means includes a function of said model judgment circuit.