JP2001148436A - Ceramic package and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a ceramic package for increasing junction strength with a seal ring and for suppressing outer shape failure and sealing failure, and its manufacturing method. SOLUTION: A ceramic package 1 is provided with a sealing surface 1A and a metallization layer 5 being formed on the sealing surface 1A. The metallization layer 5 is formed nearly in a frame shape at the periphery of a cavity 3 and is wider than a seal ring SR being joined to it. Also, an opposite part 5B that opposes the seal ring SR in joining out of the metallization layer 5 is provided with a recessed groove 5A that is formed along the peripheral direction of the metallization layer 5 and is narrower than the seal ring SR.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic package having a sealing surface and a method of manufacturing the ceramic package, and more particularly to a ceramic having a metallized layer formed on the sealing surface for brazing and joining a seal ring. The present invention relates to a method for manufacturing a package and a ceramic package.

[0002]

2. Description of the Related Art Heretofore, there has been known a ceramic package for enclosing electronic components such as a crystal unit, a surface acoustic wave filter, and an integrated circuit chip, which can be hermetically sealed. . Specifically, there is a ceramic package 101 shown in FIG. FIG. 8A is a plan view of the ceramic package 101 as viewed from the sealing surface 101A side, and FIG. 8B is a cross-sectional view taken along the line PP ′ of FIG. 8A.

The ceramic package 101 is formed by laminating a plurality of ceramic layers, has a sealing surface 101A, and has a substantially rectangular parallelepiped shape. Ceramic package 101
In order to house electronic components and hermetically seal them, a step-shaped cavity (vacant space) opened on the sealing surface 101A side
103 is formed. Also, on the sealing surface 101A,
In order to braze and join a metal seal ring SL indicated by a broken line in FIG. 8B, a metallized layer 105 wider than the seal ring SL is formed in a substantially frame shape on the periphery of the cavity 103.

The metallized layer 105 secures a sufficient amount of brazing material between the metallized layer 105 and the seal ring SL when brazing and joining the seal ring SL, and increases the joining strength of these members. A part thereof is formed in a convex shape. Specifically, the metallization layer 10
In the width direction of No. 5, the vicinity of the center near the inner side (cavity 103 side) is raised in a convex shape, and a convex portion 105A formed in a ring shape is formed along the circumferential direction of the metallized layer 105 so as to make one round. I have.

FIG. 9 is a partially enlarged cross-sectional view showing a state in which a seal ring SL is brazed to the metallized layer 105 of the ceramic package 101.
When the seal ring SL is joined at a predetermined position with high positional accuracy, the brazing material 107 for joining the seal ring SL and the metallized layer 105 slightly swells inside the joint (on the cavity 103 side), and Form fillets on the outside. The metallization layer 105 has a protrusion 105
By providing A, the distance RMJ between the seal ring SL and the vicinity of the inner peripheral edge and the vicinity of the outer peripheral edge of the metallized layer 105 increases, so that a large amount of the brazing material 107 is held inside and outside the convex portion 105A. You. Therefore, in this state, the bonding strength between the seal ring SL and the metallized layer 105 is sufficiently higher than that of the ceramic package in which the metallized layer without the convex portion 105A is formed.

[0006]

However, when the seal ring SL is joined to the metallized layer 105 by brazing, as shown in FIG. 10, the seal ring SL may be laterally shifted and joined. When joined in this manner, in a portion (left side in the drawing) where the seal ring SL is shifted inward (to the side of the cavity 103), the brazing material 107 joining the two is largely biased inside the metallized layer 105, and conversely. Outside the metallization layer 105, the amount becomes extremely small. More specifically, when the seal ring SL laterally shifts inward, the brazing material 107 that is easily wetted by the seal ring SL also moves inward, and swells greatly toward the inside of the metallization layer 105. Conversely, outside the metallized layer 105, the amount of the brazing material 107 is extremely reduced due to the inward movement of the brazing material 107, and as shown in FIG.
07A can be done.

On the other hand, in a portion where the seal ring SL is shifted laterally outward (rightward in the figure), a brazing material 10 for joining the two is used.
7 is largely biased to the outside of the metallization layer 105, and conversely,
The number is extremely small inside the metallization layer 105 (on the side of the cavity 103). Specifically, when the seal ring SL laterally shifts outward, the brazing material 1 together with the seal ring SL is used.
07 also moves outward, and is largely biased to the outside of the metallized layer 105. Conversely, since the brazing material 107 moves to the outside inside the metallized layer 105, the amount thereof becomes extremely small, and as shown in the drawing, a partial recess 107B may be formed.

The seal ring S joined in such a state
L has a lower bonding strength than the case where the bonding is performed at a predetermined position with high positional accuracy (see FIG. 9), and the appearance of the brazing material 107
Is not preferred because the amount of the skewing is uneven or the recesses 107A and 107B are present. Further, when a metal lid member is joined onto the seal ring SL to hermetically seal the cavity 103, a poor sealing may occur between the seal ring SL and the metallized layer 105. As described above, the above-described ceramic package 101 has the convex portions 1 of the metallized layer 105.
By holding the brazing material 107 on both sides of the seal ring 05A, the bonding strength with the seal ring SL can be improved, but when the seal ring SL is bonded in a laterally displaced state, the bonding strength decreases, resulting in poor appearance and sealing. Poor stopping occurs.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and it is possible to increase the bonding strength with a seal ring and to suppress the appearance failure and sealing failure, and to manufacture a ceramic package. The aim is to provide a method.

[0010]

Means for Solving the Problems, Actions and Effects The solution is to provide a sealing surface and a metallized layer for brazing and joining a seal ring to the sealing surface, which is wider than the seal ring. , A substantially frame-shaped metallization layer,
A ceramic package having at least one concave groove formed in the metallized layer at a portion facing the seal ring at the time of bonding and formed along the circumferential direction of the metallized layer and narrower than the seal ring. It is.

According to the present invention, the facing portion of the metallization layer facing the seal ring at the time of bonding has a concave groove formed along the circumferential direction of the metallization layer and narrower than the seal ring. . When a seal ring is joined to such a metallized layer by brazing, a large amount of brazing material is held in a concave groove formed in the metallized layer. That is, a large amount of brazing material is held between the seal ring and the metallized layer. Therefore, the bonding strength between the seal ring and the metallized layer can be improved as compared with a ceramic package in which a metallized layer having no concave groove or convex portion is formed.

Further, this ceramic package can have a higher bonding strength with the seal ring than, for example, a ceramic package in which two rows of metallized layers are formed along the circumferential direction of the sealing surface. In other words, when the two rows of metallized layers are formed, the brazing material can be held between the two rows, but since the ceramic is exposed between the two rows, a very high bonding strength can be obtained. I can't. On the other hand, in the present invention, since the metallized layer is also provided on the bottom surface of the concave groove, it is possible to join the brazed material with high strength even in this portion. In addition, this ceramic package is unlikely to cause poor appearance such as uneven brazing material. further,
Even if the lid member is joined on the joined seal ring and hermetically sealed, the sealing strength between the seal ring and the metallized layer is high, so that poor joining hardly occurs at these joints.

Further, in the ceramic package of the present invention, when the seal ring is brazed and joined, the joint strength between the seal ring and the metallized layer is sufficiently increased even when the seal ring is shifted in the lateral direction. be able to. In addition, poor appearance and poor sealing are unlikely to occur. That is, in the portion where the seal ring is shifted inward, the brazing material for joining the two is only slightly biased to the inside of the metallized layer, so that the amount of brazing material outside the metallized layer is not so small. Specifically, when the seal ring is shifted inward, the brazing material that is easily wetted by the seal ring also moves inward. However, the distance between the seal ring and the vicinity of the inner peripheral edge and the vicinity of the outer peripheral edge of the metallized layer is smaller than the distance between the seal ring of the conventional metallized layer having a convex portion and the inner peripheral edge and the vicinity of the outer peripheral edge of the metallized layer. Because it is small, the amount of brazing material that moves inward is also small.

[0014] For this reason, since the brazing material is sufficiently left outside the metallized layer, the bonding strength between the seal ring and the metallized layer can be sufficiently increased. In addition, since the amount of movement of the brazing material is small, poor appearance such as uneven distribution of the brazing material does not easily occur. Furthermore, even when the lid member is joined on the joined seal ring to perform hermetic sealing, the sealing strength between the seal ring and the metallized layer is high, so that poor sealing does not occur between them.

On the other hand, even in the portion where the seal ring is shifted laterally outward, since the brazing material is only slightly biased to the outside of the metallized layer, the amount of brazing material inside the metallized layer is not so reduced. Specifically, when the seal ring laterally shifts outward, the brazing material moves outward together with the seal ring. However, the distance between the inner peripheral edge and the outer peripheral edge of the seal ring and the metallized layer is smaller than the distance between the inner peripheral edge and the outer peripheral edge of the conventional metallized layer having the convex portion. Because of the small size, the amount of the brazing material that moves outward also decreases. Therefore, as in the case where the seal ring is laterally shifted inward, a sufficient amount of the brazing material remains inside the metallized layer, so that the bonding strength between the seal ring and the metallized layer can be sufficiently increased. In addition, poor appearance and poor sealing are unlikely to occur.

Here, the concave groove formed in the opposed portion of the metallized layer may be formed along the circumferential direction of the metallized layer and narrower than the seal ring. Other, intermittently formed,
Partially formed ones are exemplified. Further, a plurality of such concave grooves may be formed so as to form a row in the width direction of the metallized layer.

The above-mentioned ceramic package has a cavity opened on the sealing surface side, and the metallized layer is formed on the periphery of the cavity on the sealing surface. It is preferable to use a ceramic package. This is because if such a space is provided, electronic components such as a crystal oscillator, a surface acoustic wave filter, and an integrated circuit chip can be stored in the space.

Another solution is a metallized layer for brazing and joining a seal ring to the sealing surface, and the metallized layer is wider than the seal ring and has a substantially frame shape. And, of the above metallized layers,
In the facing portion facing the seal ring at the time of joining, the metallized layer is formed along the circumferential direction of the metallized layer, and the metallized layer is formed of a ceramic package having at least one concave groove narrower than the seal ring. And a ring joining step of brazing and joining the seal ring to the facing portion of the ceramic package.

The present invention includes a step of brazing and joining a seal ring to the opposed portion of the metallized layer. By joining the seal ring in this manner, a large amount of brazing material is held in the concave groove formed in the facing portion, and this brazing material can improve the joining strength between the seal ring and the metallized layer. it can. Further, even if the seal ring is laterally displaced and joined to the metallized layer in the ring joining step, the amount of the brazing material that moves with the lateral displacement of the seal ring is small because the distance between the seal ring and the metallized layer is small. Therefore, even if the seal ring is shifted laterally, the unevenness of the brazing material is reduced, so that the bonding strength between the seal ring and the metallized layer can be increased. Furthermore, since the brazing material is less deviated, appearance defects due to this are less likely to occur. Further, since the bonding strength between the seal ring and the metallized layer is high, it is possible to suppress poor sealing that occurs at these bonded portions.

Another solution is a metallized layer for brazing and joining a sealing surface, a cavity opened on the sealing surface side, and a seal ring. A substantially frame-shaped metallized layer formed on the periphery of the cavity and wider than the seal ring; and in the metallized layer, the facing portion facing the seal ring at the time of joining includes the metallized layer. Formed along the circumferential direction of the layer,
A method for manufacturing a ceramic package having at least one or more concave grooves narrower than the seal ring, wherein the sealing surface-side ceramic green sheet corresponding to the sealing surface-side ceramic layer having the sealing surface has the concave portion. An unfired metallized layer forming step of forming an unfired metallized layer corresponding to the metallized layer having a corresponding concave groove having a shape corresponding to the groove, and a plurality of ceramic green sheets corresponding to the ceramic package are stacked and pressed, A laminate forming step of forming a laminate having the void and the unfired metallized layer, and a firing step of firing the laminate to form the ceramic package having the void and the metallized layer. This is a method for manufacturing a ceramic package.

In the production of a ceramic package comprising a plurality of ceramic layers, when the ceramic green sheets are pressed together to form a laminate in the laminate forming step, the ceramic green sheets are relatively soft.
Easy to deform due to pressure during crimping. Especially around the empty space,
Since there is an empty space in the vicinity, the pressure is likely to be applied in the horizontal direction as well, so it will be greatly deformed in the horizontal direction (planar direction) so that the periphery of the opening of the empty space will dent toward the empty space side or bulge outward The opening shape of the void is easily deformed. Such deformation of the opening shape of the void remains as it is even when the laminate is fired thereafter.

Therefore, when a part or the whole of the unfired metallized layer is formed after the step of forming the laminate, if the shape of the opening of the cavity is deformed during the pressing, a uniform width is formed along the periphery of the opening of the cavity. This makes it difficult to form an unfired metallized layer. In the case where the unsintered metallized layer is formed after the laminate is sintered, the unsintered metallized layer is similarly formed with a uniform width along the periphery of the opening because the shape of the opening in the empty space is deformed. Is difficult to form.

On the other hand, in the present invention, the unfired metallized layer is formed in the unfired metallized layer forming step before the laminated body forming step. If the unfired metallized layer forming step is performed in advance, even if the opening shape of the void is deformed in the laminated body forming step, the unfired metallized layer formed in advance is also deformed along with this deformation. The unfired metallized layer and further the metallized layer can be formed with a uniform width along the periphery of the opening.

In a conventional ceramic package having a metallized layer having a convex portion formed thereon, if the metallized layer forming step is performed before the laminated body forming step as in the present invention, when the laminated body is formed, pressure is not applied. In the fired metallized layer, a portion corresponding to the convex portion may be partially crushed and its height may be reduced. When the temperature is reduced in this manner, the protrusions of the metallized layer after firing also become lower, so that when a seal ring is joined to the metallized layer, it is not possible to secure a sufficient amount of brazing material on both sides of the protrusions. .

On the other hand, in the present invention, in the unfired metallized layer step, a metallized layer having a corresponding concave groove corresponding to the metallized layer having the concave groove is formed. In such an unsintered metallized layer, even if the unsintered metallized layer is pressure-bonded together with the ceramic green sheets in the subsequent laminate forming step, the depth of the corresponding groove formed in the unsintered metallized layer does not become so small. For this reason, even if this laminate is fired to form a ceramic package, the depth of the groove in the metallized layer does not become so small. Therefore, when the seal ring is joined to the ceramic package, a sufficient amount of brazing material can be secured in the concave groove of the metallized layer, so that the joint strength between the seal ring and the metallized layer can be increased.

Further, in the above-described method for manufacturing a ceramic package, the step of forming the unfired metallized layer includes the following steps:
A first printing step of printing a first unfired metallized layer on at least a position corresponding to the metallized layer in the sealing surface-side ceramic green sheet; A second printing step of printing an unsintered metallized layer in an overlapping manner and forming the unsintered metallized layer comprising the first unsintered metallized layer and the second unsintered metallized layer and having the corresponding groove. And a method for manufacturing a ceramic package characterized by the following.

According to the present invention, in the first printing step, the first unfired metallized layer is formed, and in the second printing step, the second unfired metallized layer is printed so as to overlap a part thereof. An unfired metallized layer having a groove is formed. If the unsintered metallization is printed twice in this manner, the first unsintered metallized layer serving as the bottom of the corresponding groove is formed in the first printing step, and the first unsintered metallization layer is formed in the second printing step. The corresponding concave groove can be easily formed only by forming the second unsintered metallized layer to be the peripheral portion.

Another solution is to provide a sealing surface, a void opening on the sealing surface side, and a substantially frame-shaped metallized layer formed on the periphery of the void in the sealing surface. And a method of manufacturing a ceramic package comprising: a sealing surface-side ceramic green sheet corresponding to a sealing surface-side ceramic layer having the sealing surface; A first printing step of printing a fired metallized layer, and printing a second unfired metallized layer on a part of the first unfired metallized layer,
A second printing step of forming an unsintered metallized layer comprising an unsintered metallized layer and a second unsintered metallized layer and having at least a portion having a convex or concave cross section; and a plurality of ceramics corresponding to the ceramic package. Stacking green sheets and pressing them together to form a laminate having the voids and the unfired metallized layer; and firing the laminate to form the ceramic package having the voids and the metallized layer. And a sintering step.

In the production of a ceramic package composed of a plurality of ceramic layers, when the ceramic green sheets are stacked and pressed in the laminate forming step, as described above, particularly, the periphery of the void is deformed by the pressure at the time of pressing. The shape of the opening in the void is easily deformed. Further, the deformation of the shape of the opening of the void remains even after the laminate is fired. For this reason, when forming a part or the whole of the unfired metallized layer after the laminate forming step, if the shape of the opening of the void is deformed at the time of press-bonding, the unformed metallized layer has a uniform width along the periphery of the opening of the void. It becomes difficult to form a fired metallized layer. Also, when forming an unfired metallized layer after firing, it is similarly difficult to form the unfired metallized layer with a uniform width along the periphery of the opening of the void.

On the other hand, in the present invention, the first printing step and the second printing step are performed before the laminate forming step to form an unfired metallized layer having a convex or concave cross section at least in part. . If the unsintered metallized layer is formed first in this manner, even if the opening shape of the void in the laminate is deformed in the laminate forming step, the unsintered metallized layer formed in advance is also deformed along with this deformation. The unfired metallized layer can be formed with a uniform width along the periphery of the opening.

[0031]

(Embodiment 1) Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1A shows a plan view of the ceramic package 1 of the present embodiment as viewed from the sealing surface 1A side, and FIG.
FIG. This ceramic package 1
Are the sealing surface side ceramic layer 11 having the sealing surface 1A, the back surface side ceramic layer 13 having the back surface 1B parallel to the sealing surface 1A, and between the sealing surface side ceramic layer 11 and the back side ceramic layer 13. Of the intermediate ceramic layer 12 located at
3.80mm ×
It has a substantially rectangular parallelepiped shape of 3.80 mm x 1.40 mm.

The ceramic package 1 is formed with a step-like cavity (vacant space) 3 opened on the sealing surface 1A side for housing electronic components such as a quartz oscillator and hermetically sealing them. In addition, a metal seal ring SR (shown by a broken line in FIG. 1B) is brazed to and joined to the sealing surface 1A so that the seal ring SR (width SRW = 0.30 m)
m) wider than the metallized layer 5 (width 5W = 0.40m)
m) is formed in a substantially frame shape (substantially square shape) around the periphery of the cavity (vacant space) 3.

In the metallized layer 5, substantially at the center of an opposing portion 5B (shown by hatching in FIG. 1A) which faces the seal ring SR at the time of joining, along the circumferential direction of the metallized layer 5. And seal ring SR (width SRW = 0.3
5A (width 5AW = 0.10m) narrower than 0mm)
m) is formed in a ring shape continuously for one round. In addition, the thickness of the metallization layer 5 is 20 to 35 μm,
The depth of the concave groove 5A is about 15 μm.

When a seal ring SR is brazed to the ceramic package 1 and joined to a predetermined position (opposing portion 5B) on the metallized layer 5 with high positional accuracy, FIG. Is displayed. That is, the brazing material 7 that joins the seal ring SR and the metallized layer 5 slightly swells inside the joint portion (at the cavity 3 side) and forms a fillet outside the joint portion. Further, since the metallized layer 5 has the concave groove 5A, a large amount of the brazing material 7 is held in the concave groove 5A. Therefore, the bonding strength between the seal ring SR and the metallized layer 5 can be improved as compared with a ceramic package in which a metallized layer having no concave groove or convex portion is formed.

Further, such a ceramic package 1
Since the metallized layer 5 is also provided on the bottom surface 5AC of the concave groove 5A, it is possible to join the brazing material 7 with high strength even in this portion. Therefore, for example, the bonding strength with the seal ring SR can be increased as compared with a ceramic package in which only two rows of metallized layers are formed along the circumferential direction of the sealing surface 1A. Further, when the seal ring SR is joined with good positional accuracy, appearance defects such as the brazing material 7 being biased inward and outward are less likely to occur. Furthermore, even if the metallic cover member FT shown by a broken line in the figure is joined onto the joined seal ring SR to hermetically seal the cavity 3, the joining strength between the seal ring SR and the metallized layer 5 is high. In addition, poor sealing hardly occurs at these joints.

On the other hand, when the seal ring SR is joined to the ceramic package 1 by brazing, if the seal ring is displaced in the horizontal direction, a partially enlarged sectional view is shown in FIG. That is, in the portion (left side in the figure) where the seal ring SR is shifted inward (to the side of the cavity 3), the brazing material 7 for joining the two is only slightly biased to the inside of the metallized layer 5 (toward the cavity 3). The amount of the brazing material 7 outside the metallized layer 5 (left side in the figure) does not decrease so much. Specifically, when the seal ring SR laterally shifts inward, the brazing material 7 that easily wets the seal ring SR also moves inward. However, the distance RM between the seal ring SR and the vicinity of the inner peripheral edge 5S and the vicinity of the outer peripheral edge 5T of the metallized layer 5 is substantially equal to the distance between the seal ring SL of the conventional metallized layer 105 having the convex portion 105A and the inner peripheral edge of the metallized layer 105. Since the distance RMJ from the vicinity of the peripheral edge is small (see FIG. 10), the amount of the brazing material 7 moving inward is also reduced.

As a result, since the brazing material 7 sufficiently remains outside the metallized layer 5, the bonding strength between the seal ring SR and the metallized layer 6 can be sufficiently increased.
Further, since the amount of movement of the brazing material 7 is small, poor appearance is unlikely to occur. Furthermore, even if the lid member FT shown by the broken line in the figure is joined on the joined seal ring SR and hermetically sealed,
Since the bonding strength between the seal ring SR and the metallized layer 5 is high, poor sealing is less likely to occur between them.

Similarly, even in the portion where the seal ring SR is shifted laterally outward (right side in FIG. 3), the brazing material 7 for joining the two is only slightly biased to the outside of the metallized layer 5 (right side in FIG. 3). , Inside the metallization layer 5 (on the cavity 3 side)
Of the brazing material 7 does not decrease so much. Specifically, when the seal ring SR laterally shifts outward, the seal ring SR
At the same time, the brazing material 7 also moves outward. However, the distance RM between the seal ring SR and the vicinity of the inner peripheral edge 5S and the vicinity of the outer peripheral edge 5T of the metallized layer 5 is substantially equal to the distance between the seal ring SL of the conventional metallized layer 105 having the convex portion 105A and the inner peripheral edge of the metallized layer 105. Distance RMJ from the periphery
(See FIG. 10), the amount of the brazing material 7 that moves to the outside is also reduced.

Therefore, the brazing material 7 is formed inside the metallized layer 5 similarly to the portion where the seal ring SR is laterally shifted.
, The bonding strength between the seal ring SR and the metallized layer 5 can be sufficiently increased. Also, poor appearance and poor sealing are unlikely to occur. As described above, in the ceramic package 1 of the present embodiment, when the seal ring SR is joined to the metallization layer 5 by brazing, even if the seal ring SR is shifted in the lateral direction,
The bonding strength between the seal ring SR and the metallized layer 5 can be sufficiently increased. In addition, poor appearance and poor sealing are unlikely to occur.

Next, a method of manufacturing the ceramic package 1 will be described with reference to FIGS. First, in the unfired metallized layer forming step, a sealing surface side ceramic green sheet 81 corresponding to the sealing surface side ceramic layer 11 is prepared. Then, in the first printing step, FIG.
As shown in (a), a substantially unframed first unfired metallized layer 85 is formed on the sealing surface side ceramic green sheet 81.

More specifically, the first unfired metallized layer 85 is formed in a substantially frame shape at the position corresponding to the metallized layer 5 of the ceramic package 1 and at the inner peripheral edge (the inner peripheral edge of the frame) at the position corresponding to the metallized layer 5. Print and form. The first unfired metallized layer 85 may be formed in a substantially frame shape only at the position corresponding to the metallized layer 5, or may be formed at the position corresponding to the metallized layer 5 and the position corresponding to the metallized layer 5. May be formed in a substantially rectangular shape all over the inside of the.

Next, in the second printing step, FIG.
As shown in FIG. 5, a part of the first unfired metallized layer 85 includes:
The second unsintered metallized layer 86 is overprinted and printed, and the unsintered metallized layer 8 including the first unsintered metallized layer 85 and the second unsintered metallized layer 86 and having the corresponding groove 87A
7 is formed. Specifically, the first unfired metallized layer 8
5, a second unfired metallized layer 86 is formed by printing on all parts other than the part corresponding to the concave groove 5A of the metallized layer 5, and an unfired metallized metal having a corresponding concave groove 87A having a shape corresponding to the concave groove 5A A layer 87 is formed.

Next, in the punching step, as shown in FIG. 4C, a portion of the ceramic green sheet 81 on the sealing surface side corresponding to the cavity 3 is punched by a press to form a through hole 89. At this time, of the unfired metallized layer 87, a portion formed on the inner peripheral edge (frame inner peripheral edge) at a position corresponding to the metallized layer 5 is also punched out together.
As a result, an unfired metallized layer 87 having a shape corresponding to the metallized layer 5 is formed. In this way, the unfired metallized layer 87 having the corresponding concave groove 87A is formed on the sealing surface side ceramic green sheet 81 in the unfired metallized layer forming step. If the unsintered metallized layer 87 is formed by printing twice in this embodiment as in the present embodiment, the first unsintered metallized layer 85 serving as the bottom of the corresponding groove 87A is formed in the first printing step, and the second unsintered metallized layer 87 is formed. In the printing process, the corresponding groove 87A
The corresponding concave groove 87A can be easily formed only by forming the second unfired metallized layer 86 which becomes the inner peripheral portion of the groove.

Next, in the step of forming a laminate, FIG.
As shown in (a), in addition to the sealing-side ceramic green sheet 81 on which the unfired metallized layer 87 is formed, an intermediate ceramic green sheet 82 corresponding to the intermediate ceramic layer 12, and a back surface corresponding to the back-side ceramic layer 13. A side ceramic green sheet 83 is prepared. The through holes 91 corresponding to the cavities 3 are formed in the intermediate ceramic green sheet 82 by press working.

Then, as shown in FIG. 5 (b), these three layers of ceramic green sheets are aligned, overlapped, and pressed. Thereby, a laminate 93 having the cavity 3 and the unfired metallized layer 87 is formed. At this time, despite the fact that the unfired metallized layer 87 is pressed together with the ceramic green sheet, the depth of the corresponding concave groove 87A formed in the unfired metallized layer 87 is the same as that of the conventional metallized layer having a convex portion. Not much smaller than what was done.

Next, in the firing step, the laminate 93
Is fired, the above-described ceramic package 1 having the cavity 3 and the metallized layer 5 is completed (see FIG. 1). Note that, in the present embodiment, the depth of the corresponding groove 87A is not so small at the time of pressure bonding in the lamination step, so that the depth of the groove 5A of the metallized layer 5 after firing is also sufficiently deep.

Thereafter, in the ring joining step, when the seal ring SR is brazed and joined to the facing portion 5B of the metallized layer 5, the ceramic package shown in FIG. 2 is obtained. At that time, as described above, in the concave groove 5A of the metallized layer 5,
A large amount of brazing material 7 is retained, and this improves the bonding strength between seal ring SR and metallized layer 5. Further, even if the seal ring SR is shifted sideways and joined, the seal ring S
Since the distance RM between R and the metallized layer 5 is small, the amount of movement of the brazing material 7 is small. For this reason, even if the seal ring SR is laterally displaced, the bonding strength between the seal ring SR and the metallized layer 5 can be increased, and poor appearance and poor sealing can be suppressed. The fired ceramic package 1 has a metallized layer 5 having a sufficiently deep groove 5A.
Is formed, a sufficient amount of the brazing material 7 can be secured in the concave groove 5A when the seal ring SR is joined, and the joining strength between the seal ring SR and the metallized layer 5 is increased. Can be.

Incidentally, in the laminate forming step, the laminate 93 is formed.
Is formed, the ceramic green sheet is relatively soft, so that it is easily deformed by pressure at the time of pressure bonding. In particular, since the portion constituting the periphery of the cavity 3 has a small dimension in the plane direction (left-right direction in the figure), the opening shape of the cavity 3, that is, the shape of the opening peripheral edge 3C is easily deformed greatly. Such deformation of the shape of the opening peripheral edge 3C remains as it is even if the laminated body 93 is subsequently fired. For this reason, if the unfired metallized layer 87 is formed after the laminate forming step, if the shape of the opening periphery 3C of the laminate 93 is deformed at the time of press bonding, the unformed metallized layer 87 has a uniform width along the opening periphery 3C. It becomes difficult to form the fired metallized layer 87. Similarly, it is also difficult to form the unfired metallized layer 87 after firing the laminate 93.

However, in this embodiment, the unfired metallized layer 87 is formed in the unfired metallized layer forming step before the laminated body forming step. For this reason, even if the shape of the opening periphery 3C of the laminate 93 is deformed in the laminate formation step, the unsintered metallized layer 87 formed in advance is also deformed along with this deformation, so that the uniformity is formed along the opening periphery 3C of the cavity 3. The unfired metallized layer 87 can be formed with an appropriate width.

(Modification) Next, a modification of the first embodiment will be described with reference to FIG. In the ceramic package 21, two rows (inside grooves 2) of ring-shaped grooves 25A that are continuous around the circumference are formed in the width direction of the metallized layer 25.
5A1 and the outer groove 25A2) are different from the ceramic package 1 of the first embodiment. Other parts are the same as those in the first embodiment, and thus different parts will be mainly described, and description of the same parts will be omitted or simplified.

FIG. 6A is a plan view of the ceramic package 21 according to the present modification as viewed from the sealing surface 21A side, and FIG. 6B is a sectional view taken along the line PP ′ of FIG. 6A.
As in the first embodiment, the ceramic package 21 is formed with a step-like cavity (vacant space) 23 that opens to the sealing surface 21A side. Also, this sealing surface 21
A has a metallized layer 2 wider than the seal ring SR.
5 is formed in a substantially frame shape (substantially square shape) on the periphery of the cavity 23.

The facing portion 25B of the metallization layer 25 which faces the seal ring SR at the time of joining (FIG. 6A)
Shown by hatching. ), An inner concave groove 25A1 and an outer concave groove 25A2 are formed along the circumferential direction of the metallized layer 25, respectively. The inner concave groove 25A1 and the outer concave groove 25A2 are arranged in a row in the width direction of the metallized layer 25, and are formed in a ring shape continuously around one circumference.

Such a ceramic package 21 also has
When the seal ring SR is brazed and joined, similarly to the first embodiment, the inner concave groove 25A1 and the outer concave groove 25A2
(See FIG. 2), the bonding strength between the seal ring SR and the metallized layer 25 can be improved. In addition, poor appearance and poor sealing are unlikely to occur. Furthermore, even if the seal ring SR is shifted in the lateral direction at the time of brazing, the amount of the brazing material that moves with the seal ring SR is small, and the unevenness of the brazing material is small (FIG. 3).
reference). Therefore, the seal ring SR and the metallized layer 25
Bonding strength can be maintained sufficiently high. In addition, poor appearance and poor sealing are unlikely to occur.

Next, a method of manufacturing the ceramic package 21 of the present modification will be described. This ceramic package 21 is manufactured in the same manner as in the first embodiment. That is, in the first printing step of the unfired metallized layer forming step, the sealing surface side ceramic green sheet 81
A first unsintered metallized layer 85 having a substantially frame shape is formed (FIG. 4).
(A)). Then, in the second printing step, the second unsintered metallized layer is superimposed on a part of the first unsintered metallized layer 85 and printed, so that the inner groove 25A1 and the outer groove 25 are formed.
An unfired metallized layer having an inner corresponding groove and an outer corresponding groove respectively corresponding to A2 is formed (see FIG. 4B).

Thereafter, in a punching step, through holes 89 corresponding to the cavities 23 are formed in the ceramic green sheet 81 on the sealing surface side.
To form an unsintered metallized layer having a shape corresponding to FIG.
(C)). Also in this modification, since the unsintered metallized layer is formed by printing twice, the unsintered metallized layer having the inner corresponding groove and the outer corresponding groove can be easily formed.

Next, in a laminate forming step, each ceramic green sheet is prepared (see FIG. 5A), and these are stacked and pressed to form a laminate (see FIG. 5A). Next, in the firing step, if the laminate is fired,
The above ceramic package 21 is completed. Then, in the ring joining step, the facing portion 2 of the metallized layer 25 is formed.
When the seal ring SR is brazed to 5B, a ceramic package with a seal ring is obtained.

Also in the present modification, the depths of the inner corresponding groove and the outer corresponding groove are not so small at the time of forming the laminated body, and the depth of the inner groove 25A1 and the outer groove 25A2 after firing. Is deep enough. Therefore, when the seal ring SR is joined, a sufficient amount of brazing material can be secured in these concave grooves, and the joining strength between the seal ring SR and the metallized layer 25 can be increased. Further, since the unfired metallized layer is formed before the laminated body forming step, even if the opening shape of the cavity 23 is deformed in the laminated body forming step, the unfired metallized layer is also deformed together. The unfired metallized layer can be formed with a uniform width along the periphery.

Embodiment 2 Next, a ceramic package 41 of Embodiment 2 and a method of manufacturing the ceramic package 41 will be described with reference to FIG. The ceramic package 41 has an outer shape smaller than that of the ceramic packages 1 and 21 of the first embodiment, the metallized layer 45 is formed on substantially the entire sealing surface 41A, and the concave groove 45A is formed around the metallized layer 45. This embodiment differs from the first embodiment in that it is partially formed along the direction.
Other parts are the same as in the first embodiment. Therefore, the following description focuses on portions that are different from the first embodiment, and description of similar portions is omitted or simplified.

As shown in FIG. 7A, which is a plan view from the sealing surface 41A side, and FIG. 7B, which is a cross-sectional view taken along the line PP 'of FIG. 7A, this ceramic package 41 has three layers. A ceramic layer is laminated, has a sealing surface 41A, and is 3.00.
It has a substantially rectangular parallelepiped shape of mm × 3.00 mm × 1.00 mm. The ceramic package 41 is formed with a step-like cavity (vacant space) 43 that opens to the sealing surface 41A side. In addition, a metallized ring wider than the seal ring ST (width STW = 0.25 mm) is bonded to the sealing surface 41A by brazing a metal seal ring ST indicated by a broken line in FIG. 7B. Layer 45 (width 45W = 0.35m
m) is formed in a substantially frame shape around the periphery of the cavity 43 over the entire sealing surface 41A.

The facing portion 45B of the metallization layer 45 facing the seal ring ST at the time of joining (FIG. 7A)
Shown by hatching. ) Substantially in the center of the seal ring ST (width STW =
0.25 mm) narrower than the groove 45A (width 45AW =
0.10 mm) is partially formed. Specifically, this concave groove 45A is formed by a four-sided groove parallel to each side of the sealing surface 41A.
45A1, 45A2, 45A3, 45A
4, and four arc-shaped grooves 45A5, 45A6, 45A7, 4 formed in four corners of the sealing surface 41A in a substantially arc shape in plan view.
5A8. Note that the thickness of the metallized layer 45 is 2
The depth of each of the grooves 45A1 is about 15 μm.

When the seal ring ST is brazed and joined to the ceramic package 41, when the seal ring ST is joined with good positional accuracy, the brazing material is placed inside the joint portion (on the cavity 43 side) as in the first embodiment. Bulge slightly to form a fillet outside the joint (see FIG. 2). The metallized layer 45 has a plurality of grooves 45A.
Is formed, a large amount of brazing material is held in each of the concave grooves 45A. Therefore, even in the metallized layer 45 in which the concave groove 45A is partially formed as in the present embodiment, the bonding strength between the seal ring ST and the metallized layer 45 can be improved. Further, since the ceramic package 41 also has the metallized layers 45 on the bottom surfaces of the concave grooves 45A, it is possible to join the brazing material with high strength even at these portions. In addition, there is no appearance defect such as uneven brazing material, and even if the cavity 43 is hermetically sealed, poor sealing hardly occurs.

On the other hand, when the seal ring ST is brazed to the ceramic package 41, the seal ring ST
Embodiment 1 can also be used in the case where
Similarly to the above, the brazing material is not largely biased inward or outward. For example, in the portion where the seal ring ST is shifted inward (to the side of the cavity 43), the brazing material is only slightly biased to the inside of the metallized layer 45, and the amount of the brazing material outside the metallized layer 45 is not so small (FIG. 3). Further, even in the portion where the seal ring ST is shifted laterally outward, the brazing material is only slightly biased to the outside of the metallized layer 45, and the amount of the brazing material inside the metallized layer 45 does not decrease so much.

As described above, the movement amount of the brazing material is small.
As in the first embodiment, the distance between the seal ring ST and the vicinity of the inner peripheral edge and the vicinity of the outer peripheral edge of the metallized layer 45 is
This is because it is smaller than in the case of a conventional metallized layer having a convex portion. Therefore, even if the seal ring ST is shifted laterally, the bonding strength between the seal ring ST and the metallized layer 45 can be maintained sufficiently high. At this time, appearance defects are unlikely to occur. Furthermore, even if the cavity 43 is hermetically sealed, poor sealing hardly occurs.

Next, a method of manufacturing the ceramic package 41 of the present embodiment will be described. This ceramic package 41 is also manufactured in the same manner as in the first embodiment. That is, in the first printing step of the unfired metallized layer forming step, a substantially frame-shaped first unfired metallized layer is formed on the sealing surface side ceramic green sheet (see FIG. 4A). In this embodiment, the first unfired metallized layer is formed up to the outer periphery of the sealing surface side ceramic green sheet.

Then, in the second printing step, the second unfired metallized layer is superimposed and printed on a part of the first unfired metallized layer, that is, the entire part other than the part corresponding to the concave groove 45A of the metallized layer 45. Then, an unfired metallized layer having a corresponding groove corresponding to the groove 45A is formed (see FIG. 4B). Thereafter, in a punching step, a portion corresponding to the cavity 43 is punched out in the sealing surface side ceramic green sheet, and an unfired metallized layer having a shape corresponding to the metallized layer 45 is formed (FIG. 4).
(C)). Also in this embodiment, since the unsintered metallized layer is formed by printing twice, the unsintered metallized layer having each corresponding groove can be easily formed.

Next, in a laminate forming step, each ceramic green sheet is prepared (see FIG. 5A), these are aligned, stacked and pressed to form a laminate (FIG. 5A). )reference). Next, in the firing step, the ceramic package 41 is completed by firing the laminate. After that, in a ring bonding step, when the seal ring ST is brazed and bonded to the facing portion 45B of the metallized layer 45, a ceramic package with a seal ring is obtained.

Also in the manufacturing method of the present embodiment, the depth of each corresponding groove formed in the unfired metallized layer in the step of forming the laminated body is not so small.
The 5A depth is not very small. Therefore, when the seal ring ST is joined, a sufficient amount of brazing material can be secured in the concave groove 45A, and the seal ring ST
Bonding strength between the metallization layer 45 and the metallized layer 45 can be increased. Further, since the unfired metallized layer is formed before the laminated body forming step, even if the opening shape of the cavity 43 is deformed in the laminated body forming step, the unfired metallized layer is also deformed along with this deformation. The unfired metallized layer can be formed with a uniform width along the periphery of the opening.

In the above, the present invention has been described with reference to the respective embodiments. However, the present invention is not limited to the above embodiments, and may be appropriately modified and applied without departing from the gist thereof. Needless to say. For example, the ceramic packages 1, 21, 41 of the first and second embodiments are used.
Has cavities (vacancies) 3, 23, and 43 that open to the sealing surfaces 1A, 21A, and 41A, respectively, but may be a ceramic package without the cavities 3. For example, a high sealing ring may be brazed to a ceramic package having no cavity 3 to secure a space for accommodating electronic components and the like.

In each of the first and second embodiments, the groove 5
A, ceramic packages 1 and 2 including metallized layers 5, 25 and 45 having 25A1, 25A2 and 45A, respectively.
1 and 41, and further described their production methods. However, the manufacturing method of the present invention can be applied to, for example, a conventional ceramic package (see FIG. 8) including a metallized layer having a convex portion. That is,
The unfired metallized layer having a convex portion is preferably formed before the step of forming a laminate. Even if the opening shape of the cavity is deformed in the laminate forming step, the unfired metallized layer is also deformed along with this deformation, so that the unfired metallized layer can be formed with a uniform width along the periphery of the opening of the cavity. is there.

Further, in the unfired metallized layer forming step of each of the first and second embodiments, after the unfired metallized layer 87 is formed by printing, the through holes 89 corresponding to the cavities 3 and the like are formed. It is also possible to form the through holes 89 in the sealing surface side ceramic green sheet 81 and then form the unfired metallized layer 87. However, when the metallized layer 5 and the like are formed up to the outer periphery of the cavity 3 and the like as in the ceramic package 1 and the like of the first and second embodiments, the through holes 89 are punched out after the unfired metallized layer 87 is formed. It is more preferable to form the unfired metallized layer 87 to the outer periphery of the cavity 3 without fail.

[Brief description of the drawings]

FIG. 1 is a diagram showing a ceramic package according to a first embodiment, where (a) is a plan view seen from a sealing surface side,
(B) is a sectional view taken along the line PP 'in (a).

FIG. 2 is a view showing a ceramic package according to the first embodiment, and is a partially enlarged cross-sectional view showing a state where a seal ring is bonded to a metallized layer with high positional accuracy.

FIG. 3 is a view showing the ceramic package according to the first embodiment, and is a partially enlarged cross-sectional view showing a state in which a seal ring is laterally shifted and joined to a metallization layer.

4A and 4B are diagrams illustrating a method of manufacturing the ceramic package according to the first embodiment, and FIG. 4A is an explanatory diagram illustrating a state in which a first unfired metallized layer is formed on a sealing surface side ceramic green sheet; (b) is an explanatory view showing a state in which a second unfired metallized layer is formed on the first unfired metallized layer, and (c) is an explanatory view showing a state in which a through hole corresponding to a cavity is formed.

5A and 5B are diagrams illustrating a method of manufacturing the ceramic package according to the first embodiment, wherein FIG. 5A is a diagram illustrating ceramic green sheets corresponding to each ceramic layer of the ceramic package, and FIG. It is explanatory drawing which shows the state which performed.

6A and 6B are diagrams showing a ceramic package according to a modification of the first embodiment, where FIG. 6A is a plan view as viewed from a sealing surface side, and FIG. 6B is a cross-sectional view of FIG. .

7A and 7B are diagrams showing a ceramic package according to a second embodiment, wherein FIG. 7A is a plan view seen from a sealing surface side,
(B) is a sectional view taken along the line PP 'in (a).

8A and 8B are diagrams showing a ceramic package according to the related art, wherein FIG. 8A is a plan view seen from a sealing surface side,
(B) is a sectional view taken along the line PP 'in (a).

FIG. 9 is a view showing a ceramic package according to a conventional technique, and is a partially enlarged cross-sectional view showing a state where a seal ring is joined to a metallized layer with high positional accuracy.

FIG. 10 is a view showing a ceramic package according to the related art, and is a partially enlarged cross-sectional view showing a state where a seal ring is laterally shifted and joined to a metallized layer.

[Explanation of symbols]

1,21,41 Ceramic package 1A, 21A, 41A Sealing surface 3,23,43 Cavity (vacant space) 5,25,45 Metallized layer 5A, 45A Groove 25A1 Inner groove 25A2 Outer groove 5B, 25B, 45B Opposing portion 7 brazing material 11 sealing surface side ceramic layer 81 sealing surface side ceramic green sheet 85 first unfired metallized layer 86 second unfired metallized layer 87 unfired metallized layer 87A corresponding groove 93 laminated body FT lid member SR , ST sealing ring

Claims (5)

[Claims] 1. A metallization layer for brazing a seal ring to the sealing surface and bonding the seal ring to the sealing surface, the metallization layer being wider than the seal ring and having a substantially frame shape. A ceramic package having at least one concave groove formed in a peripheral portion of the metallized layer facing the seal ring in the metallized layer along the circumferential direction of the metallized layer at the time of bonding. 2. A metallization layer for brazing a seal ring to the sealing surface, the metallization layer being wider than the seal ring and having a substantially frame-like shape. In the metallized layer, a facing portion of the ceramic package facing the seal ring at the time of joining is formed along the circumferential direction of the metallized layer and has at least one or more concave groove narrower than the seal ring. A method of manufacturing a ceramic package, comprising a ring joining step of brazing and joining the seal ring to a portion facing the metallized layer. 3. A metallization layer for brazing and joining a sealing ring to a sealing surface, a space opened on the sealing surface side, and a seal ring, and formed on a peripheral edge of the space in the sealing surface. A substantially frame-shaped metallized layer that is wider than the seal ring, and an opposing portion of the metallized layer facing the seal ring at the time of joining is formed along a circumferential direction of the metallized layer. A ceramic package having at least one concave groove narrower than the seal ring, the sealing surface-side ceramic green sheet corresponding to the sealing surface-side ceramic layer having the sealing surface. An unsintered metallized layer forming step of forming an unsintered metallized layer having a corresponding concave groove having a shape corresponding to the concave groove and corresponding to the metallized layer; Stacking and pressing a number of ceramic green sheets to form a laminate having the voids and unfired metallized layers; and firing the laminate to form the ceramics having the voids and the metallized layers. A baking process for forming a package;
A method for manufacturing a ceramic package, comprising: 4. The method of manufacturing a ceramic package according to claim 3, wherein the step of forming the unfired metallized layer comprises: at least a position corresponding to the metallized layer in the sealing surface side ceramic green sheet; A first printing step of printing a first unfired metallized layer; and printing by superposing a second unfired metallized layer on a part of the first unfired metallized layer. A second printing step of forming an unfired metallized layer having the corresponding concave grooves, the method comprising a fired metallized layer. 5. A ceramic package comprising: a sealing surface; a void opening on the sealing surface side; and a substantially frame-shaped metallized layer formed on a periphery of the void in the sealing surface. In a manufacturing method, a first unfired metallized layer is printed at least at a position corresponding to the metallized layer in a sealing surface-side ceramic green sheet corresponding to the sealing surface-side ceramic layer having the sealing surface. A first printing step, a second unfired metallized layer is superimposed on a part of the first unfired metallized layer and printed, and at least one of the first unfired metallized layer and the second unfired metallized layer is formed. A second printing step of forming an unsintered metallized layer having a convex or concave cross section at a portion; and superimposing and pressing a plurality of ceramic green sheets corresponding to the ceramic package. A stack forming step of forming a laminate having a green metallizing layer, and a firing step of firing the above laminated body to form the ceramic package having the cavity and the metallized layer,
A method for manufacturing a ceramic package, comprising: