JP2001054946A - Ink-jet head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a highly reliable ink-jet head, capable of arranging piezoelectric elements in a high density at a low cost. SOLUTION: A piezoelectric element is provided by forming a dry piezoelectric material as superfine particles and a conductive material alternately deposited directly on a head substrate 11 by drawing, heating and baking the same so as to form a piezoelectric layer 14 and an internal electrode layer 15. The piezoelectric element can be formed by forming a dry piezoelectric material as superfine particles and a conductive material alternately deposited directly on a vibration plate by drawing, heating and baking the same.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head, and more particularly to an ink jet head using a piezoelectric element.

[0002]

2. Description of the Related Art Generally, an ink jet head used as a recording head in an ink jet recording apparatus used as an image forming apparatus (image recording apparatus) such as a printer, a facsimile, a copying machine, a plotter, etc. has a plurality of nozzles for ejecting ink droplets, A flow path forming member that forms an ink liquid chamber (also referred to as a discharge chamber, a pressurized liquid chamber, an ink flow path, a pressurized chamber, a pressure chamber, etc.) communicating with each nozzle, and ink in each ink liquid chamber. Electromechanical conversion elements such as piezoelectric elements that generate energy for ejecting ink droplets from nozzles when pressurized, or electrothermal conversion elements such as heaters, or energy generation including electrostatic force generation means such as diaphragms and electrodes Means (actuator means), and the actuator means is driven in accordance with the image information so that ink droplets are emitted from required nozzles. Issued not to record the image.

In the ink jet head, a large number of nozzles, that is, energy generating means must be arranged at a high density in order to meet demands for higher image quality and higher speed. In this case, it is troublesome to bond the piezoelectric elements one by one corresponding to each nozzle, the joining accuracy cannot be obtained, and the manufacturing cost increases.

Therefore, for example, Japanese Patent Application Laid-Open No. 8-252920
As described in the publication, a piezoelectric layer having a predetermined shape is formed by screen printing using a slurry of a piezoelectric material, and an internal electrode layer having a predetermined pattern is formed by screen printing using a conductive paste. In some cases, a laminated piezoelectric element that does not require separation processing is formed.

Further, as described in JP-A-7-54151, a liquid or liquefied solid raw material is vaporized using ultrasonic vibration or the like, and a thin film piezoelectric ceramic layer is deposited and formed by chemical vapor deposition. It is also known. Further, as described in JP-A-6-182998, after bonding a piezoelectric body to a part of one main surface of a holding member with an adhesive, dicing, machining by a wire saw, etching, or laser There is also known a method in which a slit is formed by processing, a combination thereof, and the like to be divided into a plurality of stacked piezoelectric elements.

[0006]

SUMMARY OF THE INVENTION However, first,
In the case of an ink jet head in which a piezoelectric element is divided into a plurality of piezoelectric elements by machining using a dicing machine, a wire saw, or the like, the number of manufacturing steps increases, and the manufacturing cost increases. Further, in the case of machining, since different kinds of materials such as a piezoelectric body and a conductor serving as an electrode are cut at a time, defects such as collapse of the piezoelectric element, chipping (chipping), and generation of burrs on the electrode are likely to occur. However, there is a problem that the yield is low and the manufacturing cost is high in this respect as well.

[0007] In particular, in the case of a laminated piezoelectric element, if the piezoelectric element is formed by being divided by slit grooves formed by machining, the yield is poor because the width of the piezoelectric element is thin and easily broken, and the piezoelectric element is driven due to damage during processing. The reliability is lowered, for example, the piezoelectric element is broken inside.

The problems associated with such machining become more pronounced as the density of the head increases. In addition, such a problem occurs not only in the case of a stacked piezoelectric element but also when a single-layer piezoelectric element is divided into a plurality of piezoelectric elements by mechanical processing such as slit processing.

In the case of machining, slitting is performed after the piezoelectric element is bonded to the substrate with an adhesive. However, since the adhesive is usually applied by screen printing, the amount of the adhesive increases. Bleeding occurs around the periphery of the piezoelectric element, causing contact (insulating the adhesive) in electrical connection between the substrate and the piezoelectric element in a later process, resulting in reduced reliability.

In an ink jet head having a piezoelectric element in which a piezoelectric layer having a predetermined pattern and an internal electrode layer are formed by screen printing using a slurry of the above-described piezoelectric material and a conductive paste, Because the printing method limits the durability of the screen, the screen needs to be rebuilt after a certain period of use, and it takes time to replace the screen.
The cost increases and it becomes difficult to shorten the process.

In the screen printing method, the piezoelectric material and the conductive paste in the form of slurry are exuded from the mesh of the screen to form a pattern. There is also a problem that it is difficult to form, and it is difficult to reduce the pattern thickness after firing due to the limitation of the mesh thickness.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has as its object to provide a highly reliable ink jet head which can arrange piezoelectric elements at high density at low cost. Another object of the present invention is to provide an inkjet head having high reliability even when machining is used.

[0013]

In order to solve the above-mentioned problems, an ink jet head according to the present invention deposits a piezoelectric material which has been made ultra-fine particles by direct drawing on a substrate in a pattern, and fires it. This is a configuration having the formed piezoelectric element.

The ink jet head according to the present invention is formed by depositing a piezoelectric material and a conductive material, which are made into ultra-fine particles by direct drawing on a substrate, in a pattern and alternately depositing the same, and firing them to form the same in the direction of the electric field. This is a configuration including a displaceable laminated piezoelectric element.

An ink jet head according to the present invention is formed by depositing a piezoelectric material and a conductive material, which are made into ultra-fine particles by direct writing on a substrate, in a pattern and alternately depositing them, firing them, and forming them in a direction perpendicular to the direction of the electric field. This is a configuration including a displaceable piezoelectric element.

The ink jet head according to the present invention has a configuration in which a piezoelectric element formed by patterning and depositing a piezoelectric material that has been made into ultrafine particles by direct drawing on a vibration plate and firing it is provided. is there.

The ink jet head according to the present invention is formed by depositing a piezoelectric material and a conductive material, which are made into ultrafine particles by direct drawing on a vibration plate, by patterning them alternately, and baking them, and is formed in the same direction as the direction of the electric field. And a laminated piezoelectric element that can be displaced.

The ink-jet head according to the present invention is formed by depositing a piezoelectric material and a conductive material, which are made into ultrafine particles by direct drawing on a vibration plate, in a pattern and alternately depositing them, firing them, and forming them in a direction perpendicular to the direction of the electric field. And a piezoelectric element which can be displaced.

In each of these ink jet heads according to the present invention, it is preferable that the piezoelectric elements are formed separately corresponding to the pressure chambers.

The ink jet head according to the present invention has a structure in which a material of the same kind as a piezoelectric material, which is ultrafine-particled by direct drawing on a head substrate or a vibration plate, is patterned and deposited, and a piezoelectric element material is stacked thereon and fired. It was done.

Here, the fired piezoelectric element material may be divided into a plurality of piezoelectric elements by slit processing.

[0022]

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is an exploded perspective view showing an example of an inkjet head to which the present invention is applied, and FIG.
FIG. 2 is an enlarged sectional view of a main part of the head in the inter-row direction.

This ink jet head includes a drive unit 1, a liquid chamber unit 2, a head cover 3, and a spacer member 4. The drive unit 1 has a plurality of laminated piezoelectric elements 12 arranged in two rows on a substrate 11 from a rigid material such as a ceramic such as a barium titanate-based ceramic, glass epoxy resin, or alumina. A frame member 13 surrounding the periphery of the piezoelectric element 12 is joined by an adhesive.

Here, as shown in FIG. 2, the piezoelectric element 12 has a thickness of 10 to 50 μm / 1 and is made of a piezoelectric layer 14 made of a piezoelectric material such as lead zirconate titanate (PZT).
And a laminated piezoelectric element in which silver and palladium (AgPd) internal electrodes 15 having a thickness of several μm / 1 layer are alternately laminated. Then, the internal electrode layer 15 of each piezoelectric element 12 is connected to the left and right end face electrodes 16 and 17 every other layer,
Each pattern of the common electrode 18 and the individual electrode 19 formed on the substrate 11 is connected via a conductive adhesive 20.

Thus, by applying a drive voltage to the piezoelectric element 12, an electric field is generated in the stacking direction, and a displacement in the stacking direction in the same direction as the electric field direction (displacement in the direction d33) is generated.

On the other hand, the liquid chamber unit 2 includes a diaphragm 21
A liquid chamber partition member 22 having a two-layer structure formed of a photosensitive resin layer formed of a dry film resist (DFR), and a nozzle plate 23 formed with a nozzle 24 formed of a metal material or the like.
Are sequentially laminated and heat-sealed. Thereby, the pressure chamber 25 pressurized through the vibration plate 21, common liquid chambers 26, 26 located on both sides of the pressure chamber 25 for introducing ink to be supplied to the pressure chamber 25, Ink supply paths 27, 27 communicating with the common liquid chambers 26, 26 are formed.

The substrate 11 and the frame member 13 of the drive unit 1 are joined by an adhesive 29 and assembled, and the liquid chamber unit 2 is processed and assembled separately from the drive unit 1, and then the liquid chamber unit 2 is assembled. The vibration plate 31 of the chamber unit 2 and the piezoelectric element 12 and the frame member 13 of the drive unit 1 are joined with an adhesive to form an ink jet head.

Then, the substrate 11 is supported and held on a spacer member (head holder) 4 which is a head support member,
A PCB substrate mounted with a head drive IC (drive circuit) provided in the spacer member 4 is connected to each electrode 18, 19 connected to each piezoelectric element 12 of the drive unit 1 via FPC cables 31, 31. are doing.

The nozzle cover 3 is made of a box-shaped metal material that covers the periphery of the nozzle plate 23 and the side surface of the head, and is joined to the periphery of the nozzle plate 23 with an adhesive. Further, in order to supply the ink from the ink cartridge (not shown) to the liquid chamber, the ink supply holes 32 to the spacer member 4, the substrate 11, the frame member 13, and the vibration plate 21 are provided.
35 are provided.

In the ink jet head configured as described above, when a driving waveform (pulse voltage of 10 to 50 V) is applied to the piezoelectric element 12 in accordance with a recording signal, displacement in the stacking direction occurs, and Pressure chamber 2
5 is pressurized to increase the pressure, and ink droplets are ejected from the nozzle 24.

The piezoelectric element 12 in this ink jet head is a dry piezoelectric material (PZT: lead zirconate titanate) which is formed into ultrafine particles by direct drawing on a head substrate 11 on which a common electrode 18 and a prescribed number of individual electrodes 19 are formed. In addition, conductive materials (AgPb) to be used as the internal electrodes 15 are alternately deposited and stacked, and then heated and fired.

The principle of the pattern forming apparatus using the ultrafine particle material will be described with reference to FIG. In principle, dry raw material powder 41 that has been turned into ultrafine particles is charged into a mixing container 42. On the other hand, a nozzle 44 having a pattern width is provided in the film forming chamber 43, and a transport pipe 4 is provided between the mixing container 42 and the nozzle 44 of the film forming chamber 43.
5 is connected. The work W is set on the substrate holder 46. This substrate holder 46 can be moved in the XY directions.

Here, the valve 48 between the vacuum pump 47 connected to the film formation chamber 43 is opened, and the gas introduction valve 49 of the mixing vessel 42 is opened, so that the film formation chamber 43 is depressurized. Then, the gas is sucked into the mixing container 49 and the raw material powder 61 soars into a sol state, and is injected from the nozzle 44 onto the work W through the conveying pipe 45 by a pressure difference, and the ultrafine particles are deposited. Therefore, by moving the work W on the substrate holder 46 in the X and Y directions, the pattern of the ultrafine particle film can be directly formed on the work W by drawing. Note that a mask can be used.

FIGS. 4 and 5 show a process for forming the piezoelectric element 12 using the pattern forming apparatus using ultrafine particles.
This will be described with reference to FIG. First, as a raw material powder 41, a PZT raw material powder (average particle size: 1.3 μm) composed without using a binder is set in a mixing container. On the substrate holder 46 of the film forming chamber 43, the head substrate 11, which is a work on which the common electrode 18 and the specified number of individual electrodes 19 are formed, is placed.

Then, the valve 48 is opened and the vacuum pump 4
7, the film forming chamber 43 is depressurized, the valve 49 at the inlet of the mixing container 43 is opened, and gas (air) is introduced into the mixing container 42. As a result, the PZT raw material powder 41 in the mixing container 42 rises and passes through the transport pipe 45 due to a pressure difference between the PZT raw material powder 41 and the nozzle 4 of the film forming chamber 43.
4, PZT is ejected straight from the nozzle 44 and PZT is patterned and deposited on the head substrate 11 by direct writing without a mask.

Therefore, referring also to FIG. 5, first, as shown in FIG. 4A, a dummy (inactive) layer 51 is patterned on the head substrate 11 with PZT ultrafine particles. As shown in (), an Ag-Pb film serving as the internal electrode 15a is continuously deposited on the dummy layer 51 in the same formation chamber 43 as PZT by the evaporative gas deposition method. Further, as shown in FIG. 3C, PZ serving as a first active layer is formed.
A T layer (piezoelectric layer) 14 is deposited to a specified thickness. Next, as shown in FIG. 1D, an internal electrode 15b is formed on the first active layer 14. Then, as shown in FIG. 3E, this is repeated for a predetermined number of layers, and the PZT layers 14 and the internal electrodes 15a and 15b are alternately laminated to form a dummy layer 51 on the uppermost portion.

In this way, for example, an active layer (piezoelectric layer)
The piezoelectric element 12 having 14 layers, the internal electrode 15 having 15 layers, and the dummy layer 51 having two layers is formed separately and independently while moving the substrate holder 46 in the XY directions. In addition,
The film thickness is, for example, 35 μm for the active layer 14 and the dummy layer 51.
Is 35 μm, and the electrode 15 is 3 μm.

Thereafter, after the predetermined number of stacked sheets is completed, for example, 70
By firing at 0 ° C., a laminated piezoelectric element 12 made of piezoelectric ceramics is obtained.

In actual production, the nozzle 44 has a slit shape with a width of 2.6 mm and a gap of 0.5 mm. The pattern size is the same as the nozzle size. To reduce the side length, two rows of 50 piezoelectric elements 1 were formed using a mask having an opening of 50 μm.
2 was produced.

As a result, the piezoelectric element 12 was obtained in which the piezoelectric element 12 did not fall down and had no defects such as chipping and electrode burrs.

To confirm this, 2.6 × 0.09 m
1. a head in which 50 m-sized piezoelectric elements are arranged;
A head in which 50 piezoelectric elements each having a size of 6 × 0.05 mm were arranged was manufactured by the present invention (Example) and the conventional dividing method by machining (Comparative Example), and the number of falls was counted. Table 1 shows the results.

[0042]

[Table 1]

As is apparent from Table 1, the length is 2.6.
× In the case of the width of 0.09 mm, no tilt occurred, but in the case of the 2.6 × 0.05 mm size, the head manufactured according to the present invention did not tilt, whereas the conventional method of machining was used. 40% for heads made with
(20/50) collapse occurred. Therefore, according to the present invention, a head having a particularly small width size (width in the nozzle arrangement direction), that is, a multi-nozzle head having a high density arrangement can be manufactured at low cost and with high yield.

As described above, the piezoelectric material and the conductive material, which are made into ultra-fine particles by direct writing on the substrate, are patterned and alternately deposited, fired, and formed, and can be displaced in the same direction as the electric field. With the provision of the piezoelectric element, a highly reliable inkjet head can be obtained at low cost, with good yield. In addition, instead of the head substrate side,
A piezoelectric material and a conductive material in the form of ultrafine particles are patterned and alternately deposited on the vibration plate side, and then fired to form a laminated piezoelectric element.

Next, another ink jet head according to the present invention will be described with reference to FIGS. In addition,
FIG. 6 is an explanatory sectional view of the head, and FIG. 7 is an explanatory plan view showing FIG. 6 in a transparent state.

This ink jet head is, for example, SU
A through hole (through hole) 62 serving as an opening for forming a discharge chamber is formed in a liquid chamber substrate 61 made of an S substrate or the like, and a vibration plate 63 formed of zirconia, silicon, or the like is formed on the lower surface of the liquid chamber substrate 61. A piezoelectric element 64 including a piezoelectric layer 65 and electrodes 66 and 66 sandwiching the piezoelectric layer 65 is provided on an outer surface of the vibration plate 63 via an inactive layer (dummy layer) 51 to form an actuator unit. The liquid chamber substrate 61 and the diaphragm 63 are
For example, an impurity diffusion layer of boron or the like can be formed over a single crystal silicon substrate, and anisotropic etching can be performed using the diffusion layer as an etching stop layer to be integrally formed.

On the liquid chamber substrate 61, a fluid resistance forming plate 67, a common ink flow path forming plate 68 and a nozzle plate 69 are sequentially laminated and bonded with an adhesive such as a polyimide adhesive or an epoxy adhesive. By joining, a plurality of nozzles 7
0, a plurality of ejection chambers 71 with which the respective nozzles 70 communicate, a common ink channel (common ink chamber) 72 for supplying ink to the plurality of ejection chambers 71, and ink from the common ink channel 72 to the ejection chamber 71. And an ink flow path such as a nozzle communication path 74 that connects the nozzle 70 and the ejection chamber 71.

In this ink jet head, when a driving voltage is applied to the piezoelectric element 64, the piezoelectric element 64 is displaced in a direction perpendicular to the direction of the electric field, and the diaphragm 63 bends toward the discharge chamber 71 and discharges. The internal volume of the chamber 71 decreases, the pressure in the discharge chamber 71 increases, and the nozzle communication path 7 increases.
Ink droplets are ejected from the nozzles 70 through 4.

The piezoelectric element 64 in this ink jet head is prepared by mounting a diaphragm 63 as a work on the substrate holder 46 of the film forming chamber 43 by using the apparatus shown in FIG. After the dummy layer 51 is formed on the back surface (the surface opposite to the discharge chamber 71) of the vibration plate 64 corresponding to the position 71, the PZT raw material powder 41 serving as the piezoelectric layer 65 is formed in the same manner as in the above embodiment. Ag-P to be the electrode 66
It is formed by alternately depositing b films and baking them by heating.

By directly bonding the piezoelectric element to the diaphragm in this manner, the displacement of the piezoelectric element 64 is efficiently transmitted to the diaphragm 63. That is, when the piezoelectric element is bonded to the diaphragm via the adhesive, unevenness in the bonding and displacement of the adhesive due to the adhesive are absorbed and the transmission efficiency is reduced, but the piezoelectric element is directly bonded to the diaphragm without the adhesive. By doing so, such a problem does not occur. In particular, by directly drawing ultrafine particles on the vibration plate, the piezoelectric element and the vibration plate can be reliably integrated, and the transmission efficiency is further improved.

Next, another embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIGS. This embodiment is an example in which slit processing and direct drawing with ultrafine particles are combined, and the bonding of the piezoelectric element to the head substrate is performed by using an ultrafine piezoelectric material instead of the adhesive.

That is, as shown in FIG. 8, a common electrode pattern 81 and an individual electrode pattern 8 are formed on a head substrate 80.
2, a dummy layer 83 made of the same material as the piezoelectric material is formed in the piezoelectric element arrangement region of the head substrate 80 in the same manner as in the above-described embodiment, and the dummy layer 83 is formed on the dummy layer 83 as shown in FIG. A piezoelectric element member 86 having an internal electrode layer 85 and a piezoelectric layer 84 separately manufactured are superimposed on each other, and the dummy layer 83 and the piezoelectric element material 86 are baked together to form a piezoelectric element member 86, a dummy layer 83, and a head substrate. 8
Join 0.

Thereafter, as shown in FIG. 9, the piezoelectric element member 86 is mechanically slit using a dicing blade 88 or the like, and divided into a plurality of piezoelectric elements 89 by a slit groove 80a reaching the head substrate 80. ing.

In this way, an adhesive is applied to the head substrate by screen printing, and the piezoelectric elements are bonded and joined. If this is divided into a plurality of piezoelectric elements by machining, the amount of the adhesive in screen printing is reduced. Bleeding that protrudes around the periphery of the piezoelectric block occurs and the problem of causing contact (insulating the adhesive) at the time of electrical connection between the head substrate and the piezoelectric element is eliminated, thereby improving the reliability of the head.

Although the above embodiment has been described with reference to the case where the number of nozzles for injecting ultrafine particles of a piezoelectric material or the like is one, by providing a plurality of nozzles, for example, two rows of piezoelectric elements can be simultaneously formed. Each of them can be formed by patterning in a separate and independent state, and cost can be reduced.

[0056]

As described above, according to the ink jet head according to the present invention, a piezoelectric material formed by patterning and depositing a piezoelectric material which has been made into ultrafine particles by direct drawing on a substrate is formed by firing. Since the elements are provided, the piezoelectric elements can be arranged at a high density at a low cost, and the reliability is improved.

According to the ink jet head according to the present invention, the piezoelectric material and the conductive material in the form of fine particles are patterned and alternately deposited on the substrate, formed by firing, and displaced in the same direction as the electric field direction. With a possible stacked piezoelectric element, high-density arrangement of piezoelectric elements is possible at low cost.
Reliability is also improved.

According to the ink jet head of the present invention, a piezoelectric material and a conductive material in the form of ultrafine particles are patterned and alternately deposited on a substrate and formed by firing, and are displaced in the direction perpendicular to the direction of the electric field. Since possible piezoelectric elements are provided, high-density arrangement of piezoelectric elements is possible at low cost, and reliability is improved.

According to the ink jet head of the present invention, a piezoelectric element formed by patterning and depositing a piezoelectric material that has been made into ultrafine particles by direct drawing on a vibration plate and baking this is provided. The piezoelectric elements can be arranged at a high density at a low cost, the reliability is improved, and the transmission efficiency of the piezoelectric element displacement is also improved.

According to the ink jet head of the present invention, the piezoelectric material and the conductive material in the form of fine particles are patterned and alternately deposited on the vibration plate, and are formed by firing, and are formed in the same direction as the electric field direction. With a stackable piezoelectric element that can be displaced, high-density piezoelectric elements can be arranged at low cost.
The reliability is improved, and the transmission efficiency of the displacement of the piezoelectric element is also improved.

According to the ink jet head of the present invention, the piezoelectric material and the conductive material in the form of fine particles are patterned and alternately deposited on the vibrating plate, and are formed by baking them. The provision of the displaceable piezoelectric element enables high-density arrangement of the piezoelectric element at low cost, improves reliability, and further improves the transmission efficiency of the displacement of the piezoelectric element.

In each of these ink jet heads according to the present invention, it is preferable that the piezoelectric elements are formed separately corresponding to the pressure chambers, so that machining becomes unnecessary and reliability is further improved. .

According to the ink jet head of the present invention, the same kind of material as the microparticulated piezoelectric material is patterned and deposited on the head substrate or the vibration plate, and the piezoelectric element material is stacked thereon and fired. The performance is improved. Here, the piezoelectric element material after firing can be divided by division processing, and a multi-nozzle head can be easily obtained.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing an example of an inkjet head according to the present invention.

FIG. 2 is an explanatory sectional view showing an example of an ink jet head to which the present invention is applied.

FIG. 3 is a diagram illustrating the principle of a device for forming a piezoelectric element using ultrafine particles.

FIG. 4 is an explanatory diagram of a step of forming a piezoelectric element using ultrafine particles.

FIG. 5 is an explanatory view of a piezoelectric element.

FIG. 6 is an explanatory cross-sectional view illustrating another inkjet head according to the invention.

FIG. 7 is an explanatory plan view of the head.

FIG. 8 is a perspective explanatory view illustrating another embodiment of the present invention.

FIG. 9 is an explanatory perspective view of the piezoelectric element of the embodiment after being divided.

FIG. 10 is an explanatory sectional view of a main part of the embodiment.

DESCRIPTION OF SYMBOLS 1 ... drive unit, 2 ... liquid chamber unit, 11 ... head substrate, 12 ... piezoelectric element, 13 ... frame member, 14 ... piezoelectric layer, 15, 15a, 15b ... internal electrode, 21 ... diaphragm
22: liquid chamber partition member, 23: nozzle plate, 24: nozzle, 25: discharge chamber.

Claims (9)

[Claims] 1. An ink jet head having a piezoelectric element, wherein the piezoelectric element is formed by patterning and depositing a piezoelectric material that has been made into ultrafine particles by direct drawing on a substrate, and baking this. Inkjet head. 2. An ink jet head comprising a piezoelectric element in which piezoelectric layers and internal electrode layers are alternately laminated, wherein the piezoelectric element is formed by patterning a piezoelectric material and a conductive material which are ultrafine-particled by direct drawing on a substrate. An ink jet head, which is formed by alternately depositing and firing this, and is displaceable in the same direction as an electric field. 3. An ink jet head having a piezoelectric element having an electrode layer sandwiching a piezoelectric layer, wherein the piezoelectric element is formed by patterning and alternately depositing a piezoelectric material and a conductive material which are made into ultrafine particles by direct drawing on a substrate. An ink jet head formed by baking this and being displaceable in a direction perpendicular to the direction of the electric field. 4. An ink jet head provided with a piezoelectric element, wherein the piezoelectric element is formed by patterning and depositing a piezoelectric material that has been made into ultrafine particles by direct drawing on a vibration plate, and firing the material. Inkjet head. 5. An ink jet head comprising a piezoelectric element in which piezoelectric layers and internal electrode layers are alternately laminated, wherein the piezoelectric element is formed by patterning a piezoelectric material and a conductive material which are ultrafine-particled by direct drawing on a diaphragm. An ink jet head formed by alternately depositing and firing the same, and being displaceable in the same direction as the electric field direction. 6. An ink jet head having a piezoelectric element having an electrode layer sandwiching a piezoelectric layer, wherein the piezoelectric element is formed by patterning a piezoelectric material and a conductive material which are ultrafine-particled by direct drawing on a vibration plate and alternately. An ink jet head formed by depositing and firing this, and capable of being displaced in a direction perpendicular to an electric field direction. 7. The ink jet head according to claim 1, wherein said piezoelectric element is formed separately corresponding to a pressure chamber. 8. In an ink jet head in which a piezoelectric element is bonded to a head substrate and / or a vibration plate, a material of the same kind as a piezoelectric material that is ultra-fine-particled by direct drawing on the head substrate or the vibration plate is patterned and deposited. An ink jet head comprising a piezoelectric element material stacked thereon and fired. 9. The ink jet head according to claim 8, wherein the fired piezoelectric element material is divided into a plurality of piezoelectric elements by slit processing.