JP2001053363A - Gas laser oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a small microwave pumped gas laser oscillator having high oscillation efficiency. SOLUTION: This gas laser oscillator comprises a microwave power supply 1 outputting microwaves, a square waveguide 2 of width D for introducing a microwave of wavelength λ from the microwave power supply 1, and a resonator 3 provided with mirrors 4, 5 at the opposite ends thereof and filled with a laser gas 6. The resonator 3 is provided with a coupling window 7, made of a material transmitting microwave and isolating the interior of the resonator 3 from the atmosphere. The square waveguide 2 is coupled with the coupling window 7 of the resonator 3 and the intersection angle θbetween the optical axis of the resonator 3 and the axis of the waveguide is set θ=90-arcsin(λ/2D).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas laser oscillating device for exciting microwave discharge.

[0002]

2. Description of the Related Art The concept of an example of a gas laser device using a microwave is described in [APPLIED PHYSICS LETTER, 37 (8), p.673].
(1980)], and since many merits can be expected, various proposals for practical use have been made.

In order to obtain a laser output using an excited laser gas as an amplification source, a gas laser in principle uniformly excites a laser gas in a discharge space, and laser oscillation occurs as the discharge space length (hereinafter referred to as "discharge length") increases. Efficiency and maximum power can be increased. However, in the case of discharge excitation using microwaves, it is basically difficult to uniformly discharge the discharge space and obtain a long discharge length because the wavelength of the microwaves is as short as tens of cm.

FIG. 10 shows a microwave discharge-excited gas laser oscillation device (JP-A-7-102860) studied by the present inventors to increase the discharge length.

In FIG. 1, reference numeral 101 denotes a discharge tube formed of a dielectric such as glass. Reference numeral 102 denotes a microwave power supply that outputs a microwave to the discharge tube 101 via a rectangular waveguide 103. FIG. 10 (b) shows the details of the discharge portion. The rectangular waveguide 103 has a width D (actual size of about 10 cm), the tip is on the same plane, and the upper and lower surfaces of the waveguide are angle φ (= arcsin).
(Λ / 2D)) and converted into a parallel flat plate 104 having a width W and connected. λ is the wavelength.

The parallel plate intersects the discharge tube 101 at a position interposing the discharge tube 101 at right angles. Discharge tube 1
01 is a discharge space 105 which penetrates the parallel flat plate 104 and has a different electric field distribution.
In this case, it can be several times larger than the waveguide 103.

A total reflection mirror 106 is provided on the end face of the discharge tube 101.
However, a partial reflection mirror 107 is disposed on the other end surface to form an optical resonator. Laser beam 108 is emitted from partial reflecting mirror 107. An air supply pipe 109 is connected to both ends of the discharge tube 101, and an intake pipe 110 is further connected to the center of the discharge tube 101. The heat for lowering the temperature of the laser gas whose temperature has been increased by the discharge and the blower in the discharge space 105. Exchangers 111 and 112 and a blower 113 for circulating the laser gas are connected. Arrow 114 indicates the direction in which the laser gas flows.

The operation of the gas laser oscillating device configured as described above will be described.

First, both discharge spaces 105 in the discharge tube 101
Microwave power is injected from the microwave power supply 102 through the rectangular waveguide 103 to generate a glow discharge in the discharge space 105. In this case, by converting the rectangular waveguide 103 into the parallel plate 104 at the angle φ, the microwave transmission efficiency was the best and the length of the discharge space 105 could be maximized. The laser gas passing through the discharge space 105 is excited by obtaining the discharge energy, and the excited laser gas is brought into a resonance state between the optical resonator formed by the total reflection mirror 106 and the partial reflection mirror 107, so that the partial reflection mirror 107 And a laser beam 108 is emitted.

FIG. 11 shows Japanese Patent Publication No. 23431/1992 as an example utilizing other features of microwave discharge. In the figure, 120 is a metal resonator, 121 is a cooling fluid for cooling the metal resonator 120, 122 is an inlet, and 123 is an outlet.

[0013] A metal resonator 120 in which laser gas is completely sealed
In the inside, a discharge is generated by a microwave power supply 102, and the heated laser gas is cooled by a cooling fluid 121 via a metal resonator 120, and a laser output is taken out.

[0012]

In the former microwave-excited gas laser device which we have studied, (1)
Although the discharge length was several times longer than when a rectangular waveguide was adopted,
Microwave leakage occurred and a shield was required.

(2) Since the laser gas flows in the optical axis direction along the discharge tube, a gas pressure difference occurs in the optical axis direction, and a complicated shape is required to obtain a uniform injection energy distribution.

(3) A large blower is required to flow a laser gas into a discharge tube having a small sectional area.

In the latter type of the microwave-excited gas laser oscillating system disclosed in Japanese Patent Publication No. Hei 4-23431, (1) the discharge length cannot be long and it is difficult to increase the output, (2) the volume of the laser gas is small and the laser gas is deteriorated. Are required to be improved.

It is an object of the present invention to realize such an improvement and to provide a small-sized microwave-excited gas laser oscillation device having high oscillation efficiency.

[0017]

According to a first aspect of the present invention, there is provided a gas laser oscillator comprising: a microwave power supply for outputting a microwave; and a rectangular waveguide having a width D for guiding a microwave having a wavelength λ from the microwave power supply. A waveguide provided with a waveguide at both ends, a mirror provided at both ends, and a cavity filled with a laser gas, and a resonator provided with a coupling window made of a material that blocks the atmosphere and the inside of the resonator and transmits microwaves; Is connected to the coupling window of the resonator, and the intersection angle θ between the optical axis of the resonator and the waveguide axis is set to θ = 9.
0-arcsin (λ / 2D).

According to the gas laser oscillation device of the first aspect, a long discharge length is obtained by connecting the waveguide to the resonator at an angle θ. Further, since no gas flows, uniform discharge can be easily achieved. As a result, microwave excitation with a small size and high oscillation efficiency can be realized, and high output can be achieved.

According to a second aspect of the present invention, in the gas laser oscillation device of the first aspect, the case of the resonator or the outside thereof is formed of metal.

According to the gas laser oscillation device of the second aspect, in addition to the same effects as those of the first aspect, the cooling ability can be improved by using metal for the resonator.

According to a third aspect of the present invention, there is provided a gas laser oscillation device comprising: a microwave power supply device for outputting a microwave; and a width D for guiding a microwave having a wavelength λ from the microwave power supply device.
A rectangular waveguide and a resonator filled with laser gas inside with mirrors at both ends, a partition plate is provided inside the resonator, and microwaves are transmitted to one of the resonators partitioned by the partition plate. A coupling window made of a material for shutting off the atmosphere from the interior of the resonator is provided. A rectangular waveguide is connected to the coupling window of the resonator.
−arcsin (λ / 2D).

According to the gas laser oscillation device of the third aspect, a long discharge length and a uniform discharge can be obtained by connecting the waveguide to the resonator at an angle of θ and not flowing the laser gas. Further, by providing a partition plate inside the resonator, necessary discharge space and non-discharge space can be separated, natural circulation can be achieved, and the volume of the laser gas can be increased, so that the rate of laser gas deterioration due to contamination with impurities can be improved.

According to a fourth aspect of the present invention, in the gas laser oscillation device according to the third aspect, the partition plate is provided with a plurality of holes.

According to the gas laser oscillation device of the fourth aspect, in addition to the same effect as the third aspect, natural circulation can be further achieved by using a partition plate having a plurality of holes as the partition plate.

According to a fifth aspect of the present invention, in the gas laser oscillation device according to the third or fourth aspect, the inside of the resonator is partitioned by a partition plate in the direction of gravity, and a lower space in the direction of gravity among the partitioned spaces. Is provided with a coupling window.

According to the fifth aspect of the present invention, in addition to the same effects as those of the third and fourth aspects, the heated laser gas can be effectively provided by providing the coupling window below the partition plate in the direction of gravity. Natural circulation can be achieved.

According to a sixth aspect of the present invention, there is provided a gas laser oscillating apparatus comprising: a microwave power supply for outputting a microwave; and a width D for guiding a microwave having a wavelength λ from the microwave power supply.
A rectangular waveguide and a resonator filled with laser gas inside with mirrors at both ends, a partition plate is provided inside the resonator, and microwaves are transmitted to one of the resonators partitioned by the partition plate. A coupling window made of a material that shuts off the atmosphere and the inside of the resonator is provided, a laser gas cooler is provided on the other side separated by the partition plate, a rectangular waveguide is connected to the coupling window of the resonator, and the optical axis of the resonator is connected. And the waveguide axis intersection angle θ = θ =
90-arcsin (λ / 2D).

According to the gas laser oscillation device of the sixth aspect, a long discharge length and a uniform discharge can be obtained by connecting the waveguide to the resonator at an angle θ and not flowing the laser gas. In addition, by providing a partition plate inside the resonator, the required discharge space and non-discharge space can be separated, natural circulation can be achieved, and the laser gas volume can be increased. By providing a laser gas cooler in the section, the laser gas cooling capacity can be greatly improved.

According to a seventh aspect of the present invention, in the gas laser oscillation device according to the sixth aspect, the partition plate is provided with a plurality of holes.

According to the gas laser oscillating device of the seventh aspect, in addition to the same effects as those of the sixth aspect, the partition plate having a plurality of holes in the partition plate further improves the laser gas cooling ability by natural convection. Can be achieved.

In the gas laser oscillator according to the eighth aspect, in the sixth or seventh aspect, the inside of the resonator is partitioned in the direction of gravity by a partition plate, and of the partitioned spaces, the lower space in the direction of gravity. Are provided, and a laser gas cooler is provided in an upper space in the direction of gravity.

According to the gas laser oscillating device of the eighth aspect, in addition to the same effect as the sixth or seventh aspect, by providing the coupling window below the partition plate in the direction of gravity, the laser gas cooling capacity by natural convection can be reduced. Improvement can be achieved.

A gas laser oscillation device according to a ninth aspect of the present invention provides a microwave power supply device for outputting a microwave, and a width D for guiding a microwave having a wavelength λ from the microwave power supply device.
A rectangular waveguide and a resonator filled with laser gas inside with mirrors at both ends, a partition plate is provided inside the resonator, and microwaves are transmitted to one of the resonators partitioned by the partition plate. Provide a coupling window of a material that shuts off the atmosphere and the inside of the resonator, provide a laser gas blower on the other side separated by the partition plate, connect the rectangular waveguide to the coupling window of the resonator, and The intersection angle θ of the waveguide axis is θ =
90-arcsin (λ / 2D).

According to the gas laser oscillation device of the ninth aspect, a long discharge length can be obtained by connecting the waveguide to the resonator at an angle θ. By providing a partition plate inside the shaker, necessary discharge space and non-discharge space can be separated, and by providing a laser gas blower in the non-discharge portion, laser gas deterioration can be prevented and cooling ability can be significantly improved.

The gas laser oscillation device according to claim 10 is
In claim 9, a plurality of holes are provided in the partition plate.

According to the gas laser oscillation device of the tenth aspect, in addition to the same effect as the ninth aspect, by arranging the partition plate with a plurality of holes, it is possible to circulate the laser gas properly. In addition, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

The gas laser oscillation device according to claim 11 is
In the ninth or tenth aspect, the laser gas blower is disposed in a direction intersecting the air blowing direction of the laser gas blower.

According to the gas laser oscillation device of the eleventh aspect, in addition to the same effects as those of the ninth and tenth aspects,
By making the blowing direction of the laser gas intersect with the optical axis, a change in discharge due to the blowing of the laser gas can be prevented, and the discharge can be made uniform.

The gas laser oscillation device according to claim 12 is
In the eleventh aspect, the air blowing direction of the laser gas blower is arranged in a direction perpendicular to the optical axis.

According to the twelfth aspect of the present invention, in addition to the same effects as those of the eleventh aspect, by changing the blowing direction of the laser gas perpendicular to the optical axis, it is possible to prevent the discharge from being changed by the blowing of the laser gas and to prevent the discharge. Can be uniform.

A gas laser oscillation device according to claim 13 is
In any one of the ninth, tenth, eleventh, and twelfth aspects, the interior of the resonator is partitioned by a partition plate in the direction of gravity, and the partitioned space corresponds to a lower space in the direction of gravity. In this case, a coupling window is provided, and a laser gas blower is provided in an upper space in the direction of gravity.

According to the gas laser oscillating device of the thirteenth aspect, in addition to the effects similar to the ninth, tenth, eleventh and twelfth aspects, a laser gas blower is provided on the upper part of the partition plate so as to cool the laser gas. The ability can be improved.

The gas laser oscillation device according to claim 14 is
A microwave power supply device for outputting microwaves, a rectangular waveguide having a width D for guiding microwaves of wavelength λ from the microwave power supply device, and a resonator provided with mirrors at both ends and filled with laser gas inside. A partition plate is provided in the resonator, and one of the resonators partitioned by the partition plate is provided with a coupling window of a material that transmits microwaves and shuts off the atmosphere and the inside of the resonator, and is partitioned by the partition plate. On the other side, a laser gas blower and a cooler are provided, the rectangular waveguide is connected to the coupling window of the resonator, and the intersection angle θ between the optical axis of the resonator and the waveguide axis is θ = 90−arcsin (λ / 2D). It is what it was.

According to the gas laser oscillation device of the present invention, a long discharge length can be obtained by connecting the waveguide to the resonator at an angle θ. Further, by providing a partition plate inside the resonator, necessary discharge space and non-discharge space can be separated, and by providing a laser gas blower and a gas cooler in a non-discharge part, laser gas deterioration can be largely prevented and cooling ability can be improved.

A gas laser oscillation device according to claim 15 is
In claim 14, a plurality of holes are provided in the partition plate.

According to the gas laser oscillating device of the present invention, in addition to the same effects as those of the present invention, it is possible to improve the laser gas cooling capacity by forming the partition plate having a plurality of holes.

The gas laser oscillation device according to claim 16 is:
According to a fourteenth or fifteenth aspect, the laser gas blower is arranged in a direction crossing the air axis with respect to the optical axis.

According to the gas laser oscillating device of the sixteenth aspect, in addition to the same effects as those of the fourteenth and fifteenth aspects, the flow of the laser gas intersects the optical axis to prevent a change in discharge due to the blowing of the laser gas. In addition, the discharge can be made uniform.

The gas laser oscillation device according to claim 17 is:
According to a fourteenth aspect, the air blow of the laser gas blower is arranged in a direction crossing at right angles to the optical axis.

According to the gas laser oscillation device of the seventeenth aspect, in addition to the same effect as the fourteenth aspect, the discharge can be made uniform by making the flow of the laser gas orthogonal to the optical axis.

The gas laser oscillation device according to claim 18 is:
In any one of claims 14, 15, 16, and 17, the inside of the resonator is partitioned in the direction of gravity by a partition plate, and the partitioned space corresponds to a lower space in the direction of gravity. In this case, a coupling window is provided, and a laser gas blower and a cooler are provided in a space above the gravity direction.

According to the gas laser oscillating device of claim 18, claim 14, claim 15, claim 16, claim 1
In addition to the same effects as in 7, the laser gas cooling capacity can be improved by providing a laser gas blower above the gravity direction.

The gas laser oscillation device according to claim 19,
A microwave power supply device for outputting microwaves, a rectangular waveguide for guiding microwaves from the microwave power supply device, and a resonator provided with mirrors at both ends and filled with a laser gas inside; Providing two partition plates with a plurality of holes inside, providing a coupling window of a material that blocks the atmosphere and the inside of the resonator and transmits microwaves between the partition plates,
A laser gas blower is provided in a resonator, and a rectangular waveguide is connected to a coupling window of the resonator.

According to the gas laser oscillation device of the nineteenth aspect, by using a partition plate having two or more holes in the inside of the resonator and a laser gas blower, it is possible to separate necessary discharge space and non-discharge space. In addition, a uniform discharge can be easily generated by the flow of the laser gas suitable for the discharge. Further, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

A gas laser oscillation device according to claim 20 is:
A microwave power supply device for outputting microwaves, a rectangular waveguide for guiding microwaves from the microwave power supply device, and a resonator provided with mirrors at both ends and filled with a laser gas inside; Providing two partition plates with a plurality of holes inside, providing a coupling window of a material that blocks the atmosphere and the inside of the resonator and transmits microwaves between the partition plates,
A laser gas blower and a cooler are provided in a resonator, and a rectangular waveguide is connected to a coupling window of the resonator.

According to the gas laser oscillation device of the present invention, the required discharge space and the non-discharge space can be obtained by using a partition plate having a plurality of holes in the resonator, a laser gas blower and a cooler. And a uniform discharge can be easily generated by the flow of the laser gas suitable for the discharge. Further, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

A gas laser oscillation device according to claim 21 is
A microwave power supply device for outputting microwaves, a rectangular waveguide having a width D for guiding microwaves of wavelength λ from the microwave power supply device, and a resonator provided with mirrors at both ends and filled with laser gas inside. The resonator is provided with two partition plates having a plurality of holes, a coupling window of a material that blocks the atmosphere and the inside of the resonator and that transmits microwaves is provided between the partition plates, and a laser gas is provided in the resonator. An air blower is provided, a rectangular waveguide is connected to a coupling window of a resonator, and an intersection angle θ between the optical axis of the resonator and the waveguide axis is set to θ = 90−arcsin (λ / 2D).

According to the gas laser oscillation device of the present invention, since the waveguide is connected to the resonator at an angle of θ, a long discharge length can be obtained, and a partition having two or more holes formed inside the resonator. By using the plate and the laser gas blower, a uniform discharge can be easily generated by a flow of the laser gas suitable for the discharge. Further, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

A gas laser oscillation device according to claim 22 is:
A microwave power supply device for outputting microwaves, a rectangular waveguide having a width D for guiding microwaves of wavelength λ from the microwave power supply device, and a resonator provided with mirrors at both ends and filled with laser gas inside. The resonator is provided with two partition plates having a plurality of holes, a coupling window of a material that blocks the atmosphere and the inside of the resonator and that transmits microwaves is provided between the partition plates, and a laser gas is provided in the resonator. A blower and a cooler are provided, the rectangular waveguide is connected to the coupling window of the resonator, and the crossing angle θ between the optical axis of the resonator and the waveguide axis is θ = 90−arcsin (λ / 2D).
It is what it was.

According to the gas laser oscillation device of the present invention, since the waveguide is connected to the resonator at an angle θ, a long discharge length can be obtained, and a partition having two or more holes formed inside the resonator. By using the plate, the laser gas blower, and the cooler, a uniform discharge can be easily generated with the flow of the laser gas appropriate for the discharge. Further, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

A gas laser oscillation device according to claim 23,
Claim 19, Claim 20, Claim 21 or Claim 22
Wherein a partition plate in which a plurality of holes are arranged at positions corresponding to the optical axis of the resonator is used.

According to the gas laser oscillation device of the twenty-third aspect, in addition to the effects similar to the nineteenth, twentieth, twenty-first and twenty-second aspects, a plurality of holes are formed in the partition plate on the optical axis. By using the partition plate, an optimal laser gas flow can be created, and the discharge can be easily made uniform.

[0063]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment
The embodiment will be described with reference to FIG. In the following, the same portions are denoted by the same reference symbols throughout, and description thereof will be omitted.

FIG. 1 is a schematic configuration diagram of a microwave discharge excitation gas laser oscillation device according to a first embodiment of the present invention. 1 is a microwave power supply for outputting microwaves of the present invention, 2 is a rectangular waveguide having a width D for guiding microwaves from the microwave power supply 1, and 3 is an output mirror 4 which is a mirror at both ends. A resonator provided with a step mirror 5 and filled with a laser gas 6 therein, a coupling window 7 made of a material that blocks the atmosphere and the interior of the resonator 3 and transmits microwaves, a discharge space 8 that is discharged by microwaves, Reference numeral 9 denotes a laser beam output from the resonator 3, and the optical axis of the resonator 3 (= the direction in which the laser beam is irradiated).
And the waveguide axis of the waveguide 2 has an angle θ (hereinafter θ = 90−arcsin).
(Λ / 2D)).

The microwave output from the microwave power supply 1 is transmitted through the rectangular waveguide 2, irradiates the resonator 3, and generates a discharge 8. In this case, it was found that when the rectangular waveguide was coupled to a large cavity (in this case, the resonator 3), the behavior of the microwave in the cavity was almost converted to a parallel plate waveguide. As a result, a discharge space length W much longer than the discharge space length of the rectangular waveguide 2 in the resonator 3 was obtained. When the rectangular waveguide 2 having the width D is connected to the resonator 3, the best transmission efficiency is obtained when the rectangular waveguide 2 is connected at an angle θ with respect to the optical axis, and the discharge space is surrounded by the resonator 3. Since there was no leakage of microwaves and the laser gas 6 was stationary, a uniform discharge was easily obtained.

Further, if the resonator 3 is made of a metal having good heat conductivity, for example, the case or the outside thereof is made of a metal, the cooling effect is enhanced and the efficiency of the device can be improved.

A second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a schematic configuration diagram of a microwave discharge excitation gas laser oscillation device according to a second embodiment of the present invention. Reference numeral 10 denotes a partition plate having a plurality of holes. That is, in the first embodiment,
A partition plate 10 is provided in the resonator 3, and a coupling window 7 made of a material that transmits microwaves and cuts off the atmosphere and the inside of the resonator 3 is provided to one of the resonator cases of the resonator 3 partitioned by the partition plate 10. The rectangular waveguide 2 is connected to the coupling window 7, and the intersection angle θ between the optical axis of the resonator 3 and the waveguide axis is set to θ = 9.
0-arcsin (λ / 2D). In this case, the inside of the resonator 3 is partially partitioned in the direction of gravity by a partition plate 10 as shown in the figure, and a coupling window 7 is provided in the partitioned space corresponding to a lower space in the direction of gravity. I have. The partition plate 10 has a plurality of holes. Other configurations are the same as those of the first embodiment.

By providing the resonator 3 with the partition plate 10,
The discharge space 8 and the non-discharge space 11 could be separated, and the required size of the discharge space 8 could be realized. Further, a rectangular waveguide 2 having a width D
Is connected to the resonator 3 at an angle θ with respect to the optical axis, a long discharge length is obtained, and a uniform discharge is easily obtained because the laser gas 6 is stationary. Further, by forming the partition plate 10 having a plurality of holes, the natural circulation 12 of the laser gas 6 heated in the discharge space 8 could be promoted. Also, since the capacity of the laser gas 6 could be increased, the rate of deterioration of the laser gas 6 due to contamination with impurities and the like could be reduced, and the cooling effect could be increased.

A third embodiment of the present invention will be described with reference to FIG. FIG. 3 is a schematic configuration diagram of a microwave discharge excitation gas laser oscillation device according to a third embodiment of the present invention. 13 is a cooler. That is, in the second embodiment, a laser gas cooler 13 is provided on the other side divided by the partition plate 10. In this case, the coupling window 7 is provided below the partition plate 10 in the direction of gravity, and the laser gas cooler 13 is provided in a space above the partition plate 10 in the direction of gravity.
Other configurations are the same as those of the first embodiment.

Therefore, by providing the partition plate 10 in the resonator 3, the discharge space 8 and the non-discharge space 11 can be separated.
The required size of the discharge space 8 was realized. Further, by connecting the rectangular waveguide 2 having the width D to the resonator 3 at an angle θ with respect to the optical axis, a long discharge length was easily obtained because the laser gas 6 was stationary. In addition, since the capacity of the laser gas 3 could be increased, the deterioration rate of the laser gas due to impurities and the like could be reduced, and the provision of the laser gas cooler 13 improved the laser gas cooling ability in natural circulation.

A fourth embodiment according to the ninth aspect of the present invention will be described with reference to FIG. FIG. 4 is a schematic configuration diagram of a microwave discharge excited gas laser oscillation device according to a fourth embodiment of the present invention. 14 is a laser gas blower. That is, a laser gas blower 14 is provided in place of the laser gas cooler 13 of the third embodiment. In this case, as shown in FIG. 4A, the laser gas blower 14 is disposed in a direction intersecting the blowing direction of the laser gas blower 14 with respect to the optical axis, for example, in a direction intersecting at right angles. Other configurations are the same as those of the third embodiment.

By providing the resonator 3 with the partition plate 10,
The discharge space 8 and the non-discharge space 11 could be separated, and the required size of the discharge space 8 could be realized. Forcibly circulating the laser gas 6 in the direction of the arrow by the laser gas blower 14 has an effect on the discharge, but by setting the direction of the laser gas blow to the direction intersecting the optical axis, the influence can be minimized. By connecting the rectangular waveguide 2 having a width D to the resonator 3 at an angle θ with respect to the optical axis, a uniform discharge with a relatively long discharge length was obtained. Also, the remarkable improvement of the laser gas cooling capacity was achieved. Here, by making the flow direction of the laser gas perpendicular to the optical axis, the discharge change due to the gas flow could be further reduced, and a more uniform discharge could be realized. The laser gas blower 14 can reduce the blower power as compared with the related art.

A fifth embodiment of the present invention will be described with reference to FIG. FIG. 5 is a schematic configuration diagram of a microwave discharge excitation gas laser oscillation device according to a fifth embodiment of the present invention. 15 is a laser gas blower, 16 is a cooler. That is, instead of the laser gas blower 14 of the fourth embodiment, the laser gas blower 1
5 and a cooler 16. Other configurations are the same as those of the fourth embodiment.

By providing the resonator 3 with the partition plate 10,
The discharge space 8 and the non-discharge space 11 could be separated, and the required size of the discharge space 8 could be realized. Forcibly circulating and cooling the laser gas 6 in the direction of the arrow by the laser gas blower 14 and the cooler 15 has an effect on discharge,
By setting the laser gas blowing direction to the direction intersecting with the optical axis, the influence can be minimized, and by connecting the rectangular waveguide 2 having a width D to the resonator 3 at an angle θ with respect to the optical axis, it is relatively long. A uniform discharge with a discharge length was obtained. Also, the remarkable improvement of the laser gas cooling capacity was achieved.

Here, if the flow direction of the laser gas is perpendicular to the optical axis, the discharge change due to the gas flow can be further reduced, and a more uniform discharge can be realized.

A sixth embodiment of the present invention will be described with reference to FIG. FIG. 6 is a schematic configuration diagram of a microwave discharge excitation gas laser oscillation device according to a sixth embodiment of the present invention. Reference numeral 17 denotes a partition plate provided with a plurality of holes at two upper and lower positions in the resonator 3, and reference numeral 18 denotes a laser gas blower. That is, the microwave power supply device 1, the rectangular waveguide 2, and the resonator 3 are provided, and two partition plates 17 each having a plurality of holes are provided inside the resonator 3, and the atmosphere and the resonator are provided between the partition plates 17. A coupling window 7 made of a material that blocks the inside of the resonator 3 and transmits microwaves is provided, and a laser gas blower 18 is provided between the resonator case and a partition plate 17 provided in the resonator 3, for example, a part of the resonator 3. And the rectangular waveguide 2 is connected to the coupling window 7 of the resonator 3. The partition plate 17 has a plurality of holes 30 at positions corresponding to the optical axis 9a of the resonator 3.

The discharge space 8 was generated between the two partition plates 17, and the discharge space 8 and the non-discharge space 11 could be separated, and the required size of the discharge space 8 could be realized. Although the rectangular waveguide 2 is connected to the resonator 3 at an arbitrary angle, the microwave transmission efficiency is somewhat poor and the discharge length is short, but the laser gas 6 is forcibly moved up and down with respect to the discharge space 8 by the laser blower 18. Since the gas circulates in the direction of the arrow, there is no change in the discharge due to the flow of the gas, a uniform discharge can be realized, and at the same time, the cooling capacity of the laser gas is remarkably improved. The laser gas blower 18 can reduce the blower power as compared with the conventional one.

A seventh embodiment according to the present invention will be described with reference to FIG. FIG. 7 is a schematic configuration diagram of a microwave discharge excitation gas laser oscillation device according to a seventh embodiment of the present invention. Reference numeral 19 denotes a partition plate provided with a plurality of holes provided at two upper and lower positions in the resonator 3, 20 denotes a laser gas blower, and 21 denotes a cooler. That is, in the sixth embodiment, a laser gas blower 20 and a cooler 21 are provided instead of the laser gas blower 18. In this case, the cooler 21 is the laser gas blower 2
It is on the lower side in the blowing direction indicated by the arrow 0, and is provided above the laser gas blower 20 in the figure. Others are the same as the sixth embodiment.

The discharge space 8 was generated between the two partition plates 17, and the discharge space 8 and the non-discharge space 11 could be separated, so that the required size of the discharge space 8 could be realized. Although the rectangular waveguide 2 is connected to the resonator 3 at an arbitrary angle, the microwave transmission efficiency is somewhat poor and the discharge length is short, but the laser gas 6 is forcibly moved up and down by the laser blower 20 and the cooler 21. Circulating and cooling in the direction of, there is no discharge change due to gas flow,
A uniform discharge was realized, and at the same time, a remarkable improvement in the cooling capacity of the laser gas was achieved.

An eighth embodiment of the present invention will be described with reference to FIG. FIG. 8 is a schematic configuration diagram of a microwave discharge excitation gas laser oscillation device according to an eighth embodiment of the present invention. Reference numeral 22 denotes a partition plate having a plurality of holes provided at two upper and lower positions in the resonator 3, and reference numeral 23 denotes a laser gas blower. That is, in the first embodiment, the resonator 3 is provided with two partition plates 22 each having a plurality of holes, intercepting the atmosphere and the inside of the resonator 3 between the partition plates 22 and transmitting microwaves. A coupling window 7 of a material is provided, a laser gas blower 23 is provided in the resonator 3, and the rectangular waveguide 2 is connected to the coupling window 7 of the resonator 3, and the optical axis 9a of the resonator 3 and the waveguide axis are connected. The intersection angle θ is set to θ = 90−arcsin (λ / 2D). The laser gas blower 23 is provided, for example, between a partition plate 17 provided in a part of the resonator 3 and the resonator case. The partition plate 22 has a plurality of holes 30 at positions corresponding to the optical axis 9a of the resonator 3. Others are the same as in the first embodiment.

The discharge space 8 was generated between the two partition plates 22, and the discharge space 8 and the non-discharge space 11 could be separated, and the required size of the discharge space 8 could be realized. By connecting the rectangular waveguide 2 to the resonator 3 at an angle θ and forcibly circulating the laser gas 6 up and down by the laser blower 23 in the direction of the arrow,
The effect of the discharge caused by the gas flow was eliminated, and a uniform discharge with a long discharge length was realized. In addition, the laser gas cooling capacity was significantly improved.

A ninth embodiment of the present invention will be described with reference to FIG. FIG. 9 is a schematic configuration diagram of a microwave discharge excitation gas laser oscillation device according to a ninth embodiment of the present invention. Reference numeral 24 denotes a partition plate provided with a plurality of holes at two upper and lower positions in the resonator, 25 denotes a laser gas blower, and 26 denotes a cooler. That is, in the eighth embodiment,
Instead of the laser gas blower 23, a laser gas blower 25
And a cooler 26. In this case, the cooler 21 is located on the lower side in the blowing direction indicated by the arrow of the laser gas blower 20, and is provided above the laser gas blower 20 in the figure. Others are the same as in the eighth embodiment.

The discharge space 8 was generated between the two partition plates 24, and the discharge space 8 and the non-discharge space 11 could be separated, and the required size of the discharge space 8 could be realized. The rectangular waveguide 2 is connected to the resonator 3 at an angle θ and the laser blower 25 and the cooler 26 forcibly circulate the laser gas 6 up and down in the direction of the arrow to cool it, thereby changing the discharge due to the gas flow. And a uniform discharge with a long discharge length was realized. Also, the remarkable improvement of the laser gas cooling capacity was achieved. It is important that the laser gas flows up and down, and either direction may be used.

In the above embodiment, the basic configuration has been described. However, a plurality of the above basic configurations can be combined, and the effects are the same.

[0085]

According to the gas laser oscillation device of the first aspect, a long discharge length can be obtained by connecting the waveguide to the resonator at an angle θ. Further, since no gas flows, uniform discharge can be easily achieved. As a result, microwave excitation with a small size and high oscillation efficiency can be realized, and high output can be achieved.

According to the gas laser oscillation device of the second aspect, in addition to the same effects as those of the first aspect, the cooling ability can be improved by using metal for the resonator.

According to the gas laser oscillation device of the third aspect, a long discharge length and a uniform discharge can be obtained by connecting the waveguide to the resonator at an angle θ and not flowing the laser gas. Further, by providing a partition plate inside the resonator, necessary discharge space and non-discharge space can be separated, natural circulation can be achieved, and the volume of the laser gas can be increased, so that the rate of laser gas deterioration due to contamination with impurities can be improved.

According to the gas laser oscillation device of the fourth aspect, in addition to the same effect as the third aspect, the natural circulation can be further enhanced by using a partition plate having a plurality of holes.

According to the gas laser oscillation device of the fifth aspect, in addition to the same effects as those of the third and fourth aspects, the heated laser gas can be effectively provided by providing the coupling window below the partition plate in the direction of gravity. Natural circulation can be achieved.

According to the gas laser oscillation device of the sixth aspect, a long discharge length and a uniform discharge can be obtained by connecting the waveguide to the resonator at an angle θ and not flowing the laser gas. In addition, by providing a partition plate inside the resonator, the required discharge space and non-discharge space can be separated, natural circulation can be achieved, and the laser gas volume can be increased. By providing a laser gas cooler in the section, the laser gas cooling capacity can be greatly improved.

According to the gas laser oscillating device of the seventh aspect, in addition to the same effects as in the sixth aspect, the partition plate having a plurality of holes formed in the partition plate further improves the laser gas cooling ability by natural convection. Can be achieved.

According to the gas laser oscillation device of the eighth aspect, in addition to the same effect as the sixth or seventh aspect, by providing the coupling window below the partition plate in the direction of gravity, the laser gas cooling capacity by natural convection can be reduced. Improvement can be achieved.

According to the gas laser oscillation device of the ninth aspect, a long discharge length can be obtained by connecting the waveguide to the resonator at an angle θ. By providing a partition plate inside the shaker, necessary discharge space and non-discharge space can be separated, and by providing a laser gas blower in the non-discharge portion, laser gas deterioration can be prevented and cooling ability can be significantly improved.

According to the gas laser oscillation device of the tenth aspect, in addition to the same effect as the ninth aspect, the circulation plate can be appropriately circulated by using a partition plate having a plurality of holes. In addition, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

According to the gas laser oscillation device of the eleventh aspect, in addition to the same effect as the ninth or tenth aspect,
By making the blowing direction of the laser gas intersect with the optical axis, a change in discharge due to the blowing of the laser gas can be prevented, and the discharge can be made uniform.

According to the gas laser oscillating device of the twelfth aspect, in addition to the same effect as the eleventh aspect, by changing the blowing direction of the laser gas to be orthogonal to the optical axis, it is possible to prevent a change in the discharge due to the blowing of the laser gas, and Can be uniform.

According to the gas laser oscillation device of the thirteenth aspect, in addition to the effects similar to the ninth, tenth, eleventh, and twelfth aspects, the laser gas cooling device is provided with a laser gas blower above the partition plate. The ability can be improved.

According to the gas laser oscillation device of the present invention, a long discharge length can be obtained by connecting the waveguide to the resonator at an angle θ. Further, by providing a partition plate inside the resonator, necessary discharge space and non-discharge space can be separated, and by providing a laser gas blower and a gas cooler in a non-discharge part, laser gas deterioration can be largely prevented and cooling ability can be improved.

According to the gas laser oscillator of the fifteenth aspect, in addition to the same effects as the fourteenth aspect, the partition plate having a plurality of holes formed in the partition plate can improve the laser gas cooling capacity.

According to the gas laser oscillation device of the sixteenth aspect, in addition to the same effects as those of the fourteenth and fifteenth aspects, the flow of the laser gas intersects with the optical axis to prevent a change in discharge due to the blowing of the laser gas. In addition, the discharge can be made uniform.

According to the gas laser oscillation device of the seventeenth aspect, in addition to the same effects as the fourteenth aspect, the discharge can be made uniform by making the flow of the laser gas orthogonal to the optical axis.

According to the gas laser oscillation device described in claim 18, claim 14, claim 15, claim 16, or claim 1
In addition to the same effects as in 7, the laser gas cooling capacity can be improved by providing a laser gas blower above the gravity direction.

According to the gas laser oscillation device of the nineteenth aspect, the required discharge space and the non-discharge space can be separated by using a partition plate having a plurality of holes in the resonator and a laser gas blower. In addition, a uniform discharge can be easily generated by the flow of the laser gas suitable for the discharge. Further, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

According to the gas laser oscillation device of the twentieth aspect, the required discharge space and non-discharge space can be obtained by using a partition plate having two or more holes inside the resonator, a laser gas blower and a cooler. And a uniform discharge can be easily generated by the flow of the laser gas suitable for the discharge. Further, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

According to the gas laser oscillation device of the present invention, since the waveguide is connected to the resonator at an angle θ, a long discharge length can be obtained, and a partition having two or more holes formed inside the resonator. By using the plate and the laser gas blower, a uniform discharge can be easily generated by a flow of the laser gas suitable for the discharge. Further, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

According to the gas laser oscillation device of the present invention, since the waveguide is connected to the resonator at an angle θ, a long discharge length can be obtained, and a partition having two or more holes formed inside the resonator. By using the plate, the laser gas blower, and the cooler, a uniform discharge can be easily generated with the flow of the laser gas appropriate for the discharge. Further, it is possible to prevent deterioration of the laser gas and improve the cooling capacity.

According to the gas laser oscillation device of the twenty-third aspect, in addition to the same effects as the nineteenth, twentieth, twenty-first and twenty-second aspects, a plurality of holes are formed in the partition plate on the optical axis. By using the partition plate, an optimal laser gas flow can be created, and the discharge can be easily made uniform.

[Brief description of the drawings]

FIG. 1 shows a schematic configuration of a gas laser oscillation device according to a first embodiment of the present invention, where (a) is a cross-sectional view and (b)
Is a longitudinal front view, and (c) is a longitudinal right side view thereof.

FIGS. 2A and 2B show a schematic configuration of a gas laser oscillation device according to a second embodiment of the present invention, wherein FIG.
Is a longitudinal sectional view.

FIGS. 3A and 3B show a schematic configuration of a gas laser oscillation device according to a third embodiment of the present invention, where FIG.
Is a longitudinal sectional view.

FIG. 4 shows a schematic configuration of a gas laser oscillation device according to a fourth embodiment of the present invention, where (a) is a cross-sectional view and (b)
Is a longitudinal sectional view.

FIGS. 5A and 5B show a schematic configuration of a gas laser oscillation device according to a fifth embodiment of the present invention, where FIG.
Is a longitudinal sectional view.

FIG. 6 shows a schematic configuration of a gas laser oscillation device according to a sixth embodiment of the present invention, where (a) is a cross-sectional view and (b)
Is a longitudinal sectional view.

FIGS. 7A and 7B show a schematic configuration of a gas laser oscillation device according to a seventh embodiment of the present invention, wherein FIG.
Is a longitudinal sectional view.

8A and 8B show a schematic configuration of a gas laser oscillation device according to an eighth embodiment of the present invention, wherein FIG. 8A is a cross-sectional view, and FIG.
Is a longitudinal sectional view.

FIGS. 9A and 9B show a schematic configuration of a gas laser oscillation device according to a ninth embodiment of the present invention, wherein FIG.
Is a longitudinal sectional view.

FIG. 10 shows a gas laser device studied by the inventors,
(A) is a schematic diagram of a configuration, and (b) is a diagram showing details of a discharge unit.

FIG. 11 is a schematic configuration diagram of another conventional gas laser oscillation device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Microwave power supply device 2 Rectangular waveguide 3 Resonator 4 Output mirror 5 Final mirror 6 Laser gas 7 Coupling window 8 Discharge space 9 Laser light 10 Partition plate 12 Laser gas circulation direction 13 Cooler 14 Laser gas blower 15 Laser gas blower 16 Cooler REFERENCE SIGNS LIST 17 partition plate 18 laser gas blower 19 partition plate 20 laser gas blower 21 cooler 22 partition plate 23 laser gas blower 24 partition plate 25 laser gas blower 26 cooler

 ──────────────────────────────────────────────────の Continuing on the front page (72) Minoru Kimura 1006 Kazuma Kadoma, Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. Terms (reference) 5F071 DD08 EE02 EE04 JJ01 JJ02 5F072 AA00 JJ01 JJ02 KK02 KK30 PP05 TT00 TT22

Claims (23)

[Claims] 1. A microwave power supply device for outputting a microwave, a rectangular waveguide having a width D for guiding a microwave having a wavelength λ from the microwave power supply device, mirrors provided at both ends, and a laser gas filled therein. A resonator made of a material that blocks the atmosphere and the inside of the resonator and transmits the microwave, and connects the rectangular waveguide to the coupling window of the resonator. And the intersection angle θ between the optical axis of the resonator and the waveguide axis is given by θ = 90−arcsin (λ / 2D)
Gas laser oscillation device. 2. The gas laser oscillation device according to claim 1, wherein the case of the resonator or the outside thereof is formed of metal. 3. A microwave power supply device for outputting a microwave, a rectangular waveguide having a width D for guiding a microwave having a wavelength λ from the microwave power supply device, mirrors provided at both ends, and a laser gas filled therein. A resonator provided with a partition plate in the resonator, a coupling window made of a material that transmits microwaves to one of the resonators partitioned by the partition plate and that cuts off the atmosphere and the inside of the resonator. And the rectangular waveguide is connected to the coupling window of the resonator, and the intersection angle θ between the optical axis of the resonator and the waveguide axis is θ = 90−ar
Gas laser oscillation device with csin (λ / 2D). 4. The gas laser oscillation device according to claim 3, wherein a plurality of holes are provided in the partition plate. 5. The resonator according to claim 3, wherein the inside of the resonator is partitioned in the direction of gravity by a partition plate, and a coupling window is provided corresponding to a lower space in the direction of gravity among the partitioned spaces. Gas laser oscillation device. 6. A microwave power supply device for outputting a microwave, a rectangular waveguide having a width D for guiding a microwave having a wavelength λ from the microwave power supply device, mirrors provided at both ends, and a laser gas filled therein. A resonator provided with a partition plate in the resonator, a coupling window made of a material that transmits microwaves to one of the resonators partitioned by the partition plate and that cuts off the atmosphere and the inside of the resonator. A laser gas cooler is provided on the other side partitioned by the partition plate, the rectangular waveguide is connected to the coupling window of the resonator, and an intersection angle between the optical axis of the resonator and the waveguide axis. θ = θ =
A gas laser oscillation device with 90-arcsin (λ / 2D). 7. The gas laser oscillation device according to claim 6, wherein a plurality of holes are provided in the partition plate. 8. The cavity is partitioned in the direction of gravity by a partition plate, a coupling window is provided corresponding to a lower space in the direction of gravity of the partitioned space, and a laser gas is provided in an upper space in the direction of gravity. 8. The cooling device according to claim 6, wherein a cooling device is provided.
The gas laser oscillation device according to any one of the preceding claims. 9. A microwave power supply device for outputting a microwave, a rectangular waveguide having a width D for guiding a microwave having a wavelength λ from the microwave power supply device, mirrors provided at both ends, and a laser gas filled therein. A resonator provided with a partition plate in the resonator, a coupling window made of a material that transmits microwaves to one of the resonators partitioned by the partition plate and that cuts off the atmosphere and the inside of the resonator. A laser gas blower is provided on the other side separated by the partition plate, the rectangular waveguide is connected to the coupling window of the resonator, and an intersection angle θ between the optical axis of the resonator and the waveguide axis. Is θ =
A gas laser oscillation device with 90-arcsin (λ / 2D). 10. The partition plate having a plurality of holes.
The gas laser oscillation device according to any one of the preceding claims. 11. The laser gas blower is arranged in a direction intersecting with the optical axis with respect to a blowing direction of the laser gas blower.
The gas laser oscillation device according to any one of the preceding claims. 12. The gas laser oscillation device according to claim 11, wherein the blowing direction of the laser gas blower is perpendicular to the optical axis. 13. The cavity is partitioned in the direction of gravity by a partition plate, and a coupling window is provided corresponding to a space below the direction of gravity among the partitioned spaces, and a laser gas is provided in a space above the direction of gravity. Claim 9 and Claim 1 provided with a blower.
The gas laser oscillation device according to any one of claims 11 to 12. 14. A microwave power supply device for outputting a microwave, a rectangular waveguide having a width D for guiding a microwave having a wavelength λ from the microwave power supply device, mirrors provided at both ends, and a laser gas filled therein. A resonator provided with a partition plate in the resonator, a coupling window made of a material that transmits microwaves to one of the resonators partitioned by the partition plate and that cuts off the atmosphere and the inside of the resonator. And
A laser gas blower and a cooler are provided on the other side separated by the partition plate, the rectangular waveguide is connected to the coupling window of the resonator, and an intersection angle θ between the optical axis of the resonator and the waveguide axis. Is a gas laser oscillating device where θ = 90−arcsin (λ / 2D). 15. The partition plate according to claim 1, wherein a plurality of holes are provided.
5. The gas laser oscillation device according to 4. 16. The gas laser oscillation device according to claim 14, wherein the gas laser oscillating device is arranged in a direction crossing the air blow of the laser gas blower with respect to the optical axis. 17. The gas laser oscillation device according to claim 14, wherein the air blow of the laser gas blower is arranged at a right angle to the optical axis. 18. A cavity inside the resonator is partitioned by a partition plate in the direction of gravity, and a coupling window is provided corresponding to a lower space in the direction of gravity among the partitioned spaces, and a laser gas is provided in a space above the direction of gravity. 2. A blower and a cooler are provided.
The gas laser oscillation device according to any one of claims 15, 15, 16, and 17. 19. A microwave power supply device for outputting microwaves, a rectangular waveguide for guiding microwaves from the microwave power supply device, and a resonator provided with mirrors at both ends and filled with laser gas inside. Providing two partition plates with a plurality of holes inside the resonator, and providing a coupling window of a material that blocks the atmosphere and the inside of the resonator and transmits microwaves between the partition plates, A gas laser oscillator comprising a laser gas blower provided in the resonator, and the rectangular waveguide connected to the coupling window of the resonator. 20. A microwave power supply device for outputting microwaves, a rectangular waveguide for guiding microwaves from the microwave power supply device, and a resonator provided with mirrors at both ends and filled with laser gas inside. Providing two partition plates with a plurality of holes inside the resonator, and providing a coupling window of a material that blocks the atmosphere and the inside of the resonator and transmits microwaves between the partition plates, A gas laser oscillation device comprising: a laser gas blower and a cooler provided in the resonator; and the rectangular waveguide connected to the coupling window of the resonator. 21. A microwave power supply device for outputting a microwave, a rectangular waveguide having a width D for guiding a microwave having a wavelength λ from the microwave power supply device, mirrors provided at both ends, and a laser gas filled therein. A resonator provided with two partition plates having a plurality of holes, and coupling between the partition plate and the atmosphere and a material that blocks the inside of the resonator and transmits the microwave. A window is provided, a laser gas blower is provided in the resonator, the rectangular waveguide is connected to the coupling window of the resonator, and the intersection angle θ between the optical axis of the resonator and the waveguide axis is θ = A gas laser oscillation device with 90-arcsin (λ / 2D). 22. A microwave power supply device for outputting a microwave, a rectangular waveguide having a width D for guiding a microwave having a wavelength λ from the microwave power supply device, mirrors provided at both ends, and a laser gas filled therein. A resonator provided with two partition plates having a plurality of holes, and coupling between the partition plate and the atmosphere and a material that blocks the inside of the resonator and transmits the microwave. A window is provided, a laser gas blower and a cooler are provided in the resonator, the rectangular waveguide is connected to the coupling window of the resonator, and an intersection angle θ between the optical axis and the waveguide axis of the resonator. To θ = 90−arcsin (λ / 2
D) The gas laser oscillation device described above. 23. A partition plate in which a plurality of holes are arranged at positions corresponding to the optical axis of the resonator.
23. The gas laser oscillation device according to claim 21.