IL178321A0 - Optical inspection system - Google Patents

Optical inspection system

Info

Publication number
IL178321A0
IL178321A0 IL178321A IL17832106A IL178321A0 IL 178321 A0 IL178321 A0 IL 178321A0 IL 178321 A IL178321 A IL 178321A IL 17832106 A IL17832106 A IL 17832106A IL 178321 A0 IL178321 A0 IL 178321A0
Authority
IL
Israel
Prior art keywords
inspection system
optical inspection
optical
inspection
Prior art date
Application number
IL178321A
Other versions
IL178321A (en
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Priority to IL178321A priority Critical patent/IL178321A/en
Publication of IL178321A0 publication Critical patent/IL178321A0/en
Priority to KR20070089249A priority patent/KR20080028278A/en
Priority to JP2007231102A priority patent/JP2008083044A/en
Priority to TW96133429A priority patent/TW200815746A/en
Priority to CN200710153935.3A priority patent/CN101153854B/en
Publication of IL178321A publication Critical patent/IL178321A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
IL178321A 2006-09-26 2006-09-26 Optical inspection system IL178321A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IL178321A IL178321A (en) 2006-09-26 2006-09-26 Optical inspection system
KR20070089249A KR20080028278A (en) 2006-09-26 2007-09-04 Optical inspection system
JP2007231102A JP2008083044A (en) 2006-09-26 2007-09-06 Optical inspection system and optical inspection method
TW96133429A TW200815746A (en) 2006-09-26 2007-09-07 System and method for optical inspection of electrical circuit devices
CN200710153935.3A CN101153854B (en) 2006-09-26 2007-09-14 Optical detection system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL178321A IL178321A (en) 2006-09-26 2006-09-26 Optical inspection system

Publications (2)

Publication Number Publication Date
IL178321A0 true IL178321A0 (en) 2007-02-11
IL178321A IL178321A (en) 2014-08-31

Family

ID=39255622

Family Applications (1)

Application Number Title Priority Date Filing Date
IL178321A IL178321A (en) 2006-09-26 2006-09-26 Optical inspection system

Country Status (5)

Country Link
JP (1) JP2008083044A (en)
KR (1) KR20080028278A (en)
CN (1) CN101153854B (en)
IL (1) IL178321A (en)
TW (1) TW200815746A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201716167A (en) * 2011-08-18 2017-05-16 奧寶科技有限公司 Inspection/repair/reinspection system for electrical circuits and laser writing system
CN113378665A (en) 2019-11-27 2021-09-10 奥特斯科技(重庆)有限公司 Method for handling a component carrier, optical inspection apparatus and computer-readable medium
CN111307817B (en) * 2020-02-12 2021-04-09 武汉大学 Online detection method and system for PCB production process of intelligent production line
JP7507669B2 (en) 2020-11-25 2024-06-28 新光電気工業株式会社 Complex oxide and ultraviolet detection device
US11921052B2 (en) 2022-03-31 2024-03-05 Kla Corporation Inspection with previous step subtraction
US11922619B2 (en) * 2022-03-31 2024-03-05 Kla Corporation Context-based defect inspection

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758888A (en) * 1987-02-17 1988-07-19 Orbot Systems, Ltd. Method of and means for inspecting workpieces traveling along a production line

Also Published As

Publication number Publication date
JP2008083044A (en) 2008-04-10
TW200815746A (en) 2008-04-01
KR20080028278A (en) 2008-03-31
CN101153854A (en) 2008-04-02
IL178321A (en) 2014-08-31
CN101153854B (en) 2015-08-19

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Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees