IL107865A - מבנה ושיטה ליצור התקנים מיקרואלקטרוניים בסביבה אולטרה-נקייה - Google Patents
מבנה ושיטה ליצור התקנים מיקרואלקטרוניים בסביבה אולטרה-נקייהInfo
- Publication number
- IL107865A IL107865A IL10786593A IL10786593A IL107865A IL 107865 A IL107865 A IL 107865A IL 10786593 A IL10786593 A IL 10786593A IL 10786593 A IL10786593 A IL 10786593A IL 107865 A IL107865 A IL 107865A
- Authority
- IL
- Israel
- Prior art keywords
- clean rooms
- clean
- central enclosure
- rooms
- ultra
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Ventilation (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/121,621 US5344365A (en) | 1993-09-14 | 1993-09-14 | Integrated building and conveying structure for manufacturing under ultraclean conditions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL107865A0 IL107865A0 (en) | 1994-04-12 |
| IL107865A true IL107865A (he) | 1996-12-05 |
Family
ID=22397833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL10786593A IL107865A (he) | 1993-09-14 | 1993-12-03 | מבנה ושיטה ליצור התקנים מיקרואלקטרוניים בסביבה אולטרה-נקייה |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US5344365A (he) |
| EP (1) | EP0719450A1 (he) |
| JP (1) | JPH09502792A (he) |
| KR (1) | KR960705346A (he) |
| CN (1) | CN1106887A (he) |
| AU (1) | AU5677194A (he) |
| IL (1) | IL107865A (he) |
| MY (1) | MY109363A (he) |
| SG (1) | SG52495A1 (he) |
| TW (1) | TW293923B (he) |
| WO (1) | WO1995008184A1 (he) |
Families Citing this family (82)
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| JP3196719B2 (ja) | 1998-03-31 | 2001-08-06 | 日本電気株式会社 | 汚染防御用隔離ラインを有する半導体製造ライン、ウエハ搬送機構および半導体の製造方法 |
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-
1993
- 1993-09-14 US US08/121,621 patent/US5344365A/en not_active Expired - Fee Related
- 1993-11-24 KR KR1019960701324A patent/KR960705346A/ko not_active Application Discontinuation
- 1993-11-24 SG SG1996005181A patent/SG52495A1/en unknown
- 1993-11-24 WO PCT/US1993/011427 patent/WO1995008184A1/en not_active Application Discontinuation
- 1993-11-24 AU AU56771/94A patent/AU5677194A/en not_active Abandoned
- 1993-11-24 EP EP94902381A patent/EP0719450A1/en not_active Withdrawn
- 1993-11-24 JP JP7509143A patent/JPH09502792A/ja active Pending
- 1993-12-03 IL IL10786593A patent/IL107865A/he not_active IP Right Cessation
- 1993-12-03 TW TW082110208A patent/TW293923B/zh active
- 1993-12-30 MY MYPI93002878A patent/MY109363A/en unknown
-
1994
- 1994-04-18 CN CN94104367A patent/CN1106887A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| SG52495A1 (en) | 1998-09-28 |
| CN1106887A (zh) | 1995-08-16 |
| TW293923B (he) | 1996-12-21 |
| AU5677194A (en) | 1995-04-03 |
| US5344365A (en) | 1994-09-06 |
| WO1995008184A1 (en) | 1995-03-23 |
| MY109363A (en) | 1997-01-31 |
| JPH09502792A (ja) | 1997-03-18 |
| KR960705346A (ko) | 1996-10-09 |
| IL107865A0 (en) | 1994-04-12 |
| EP0719450A1 (en) | 1996-07-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FF | Patent granted | ||
| KB | Patent renewed | ||
| RH | Patent void |