GB201700804D0 - Mems device - Google Patents

Mems device

Info

Publication number
GB201700804D0
GB201700804D0 GBGB1700804.6A GB201700804A GB201700804D0 GB 201700804 D0 GB201700804 D0 GB 201700804D0 GB 201700804 A GB201700804 A GB 201700804A GB 201700804 D0 GB201700804 D0 GB 201700804D0
Authority
GB
United Kingdom
Prior art keywords
mems device
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB1700804.6A
Other versions
GB2557367A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cirrus Logic International Semiconductor Ltd
Original Assignee
Cirrus Logic International Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US15/363,798 external-priority patent/US9900707B1/en
Priority claimed from US15/363,863 external-priority patent/US9813831B1/en
Application filed by Cirrus Logic International Semiconductor Ltd filed Critical Cirrus Logic International Semiconductor Ltd
Publication of GB201700804D0 publication Critical patent/GB201700804D0/en
Priority to US15/826,255 priority Critical patent/US20180152792A1/en
Priority to PCT/GB2017/053606 priority patent/WO2018100373A1/en
Publication of GB2557367A publication Critical patent/GB2557367A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
GB1700804.6A 2016-11-29 2017-01-17 Mems device Withdrawn GB2557367A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US15/826,255 US20180152792A1 (en) 2016-11-29 2017-11-29 Mems device
PCT/GB2017/053606 WO2018100373A1 (en) 2016-11-29 2017-11-29 Mems device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15/363,798 US9900707B1 (en) 2016-11-29 2016-11-29 Biasing of electromechanical systems microphone with alternating-current voltage waveform
US15/363,863 US9813831B1 (en) 2016-11-29 2016-11-29 Microelectromechanical systems microphone with electrostatic force feedback to measure sound pressure
US201662438144P 2016-12-22 2016-12-22

Publications (2)

Publication Number Publication Date
GB201700804D0 true GB201700804D0 (en) 2017-03-01
GB2557367A GB2557367A (en) 2018-06-20

Family

ID=58463252

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1700804.6A Withdrawn GB2557367A (en) 2016-11-29 2017-01-17 Mems device

Country Status (2)

Country Link
GB (1) GB2557367A (en)
WO (1) WO2018100373A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3705861B1 (en) * 2019-03-08 2021-05-12 Infineon Technologies AG Sensor with a membrane electrode, a counterelectrode, and at least one spring

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6944008B2 (en) * 2002-12-18 2005-09-13 Lucent Technologies Inc. Charge dissipation in electrostatically driven devices
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
WO2005087391A2 (en) * 2004-03-11 2005-09-22 Georgia Tech Research Corporation Asymmetric membrane cmut devices and fabrication methods
JP4486863B2 (en) * 2004-08-18 2010-06-23 株式会社オーディオテクニカ Condenser microphone unit
JP2008147863A (en) * 2006-12-07 2008-06-26 Toyota Central R&D Labs Inc Microphone
JP5105949B2 (en) * 2007-04-27 2012-12-26 キヤノン株式会社 Sensor
JP5432440B2 (en) * 2007-07-04 2014-03-05 キヤノン株式会社 Oscillator device
US8175293B2 (en) * 2009-04-16 2012-05-08 Nokia Corporation Apparatus, methods and computer programs for converting sound waves to electrical signals
JP5368214B2 (en) * 2009-08-24 2013-12-18 日本電信電話株式会社 Micro electromechanical element
US9380380B2 (en) * 2011-01-07 2016-06-28 Stmicroelectronics S.R.L. Acoustic transducer and interface circuit
US8723277B2 (en) * 2012-02-29 2014-05-13 Infineon Technologies Ag Tunable MEMS device and method of making a tunable MEMS device
WO2014035530A2 (en) * 2012-06-15 2014-03-06 Gong Songbin Microelectronic structures with suspended lithium-based thin films
US10183857B2 (en) * 2012-08-21 2019-01-22 Robert Bosch Gmbh MEMS pressure sensor with multiple membrane electrodes
US9660170B2 (en) * 2012-10-26 2017-05-23 Fujifilm Dimatix, Inc. Micromachined ultrasonic transducer arrays with multiple harmonic modes
GB2515836B (en) * 2013-07-05 2016-01-20 Cirrus Logic Int Semiconductor Ltd MEMS device and process
US8934649B1 (en) * 2013-08-29 2015-01-13 Solid State System Co., Ltd. Micro electro-mechanical system (MEMS) microphone device with multi-sensitivity outputs and circuit with the MEMS device
DE102013224718A1 (en) * 2013-12-03 2015-06-03 Robert Bosch Gmbh MEMS microphone component and device having such a MEMS microphone component
US9609410B2 (en) * 2014-02-20 2017-03-28 Stmicroelectronics S.R.L. Processing circuit for a multiple sensing structure digital microelectromechanical sensor having a broad dynamic range and sensor comprising the processing circuit
US9686617B2 (en) * 2014-04-01 2017-06-20 Robert Bosch Gmbh Microphone system with driven electrodes
US9540226B2 (en) * 2015-05-20 2017-01-10 Infineon Technologies Ag System and method for a MEMS transducer

Also Published As

Publication number Publication date
WO2018100373A1 (en) 2018-06-07
GB2557367A (en) 2018-06-20

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)