GB1197070A - Electron-ion Stream Device - Google Patents
Electron-ion Stream DeviceInfo
- Publication number
- GB1197070A GB1197070A GB32363/67A GB3236367A GB1197070A GB 1197070 A GB1197070 A GB 1197070A GB 32363/67 A GB32363/67 A GB 32363/67A GB 3236367 A GB3236367 A GB 3236367A GB 1197070 A GB1197070 A GB 1197070A
- Authority
- GB
- United Kingdom
- Prior art keywords
- crucible
- electron
- july
- anode
- conical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000002826 coolant Substances 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000005350 fused silica glass Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 239000011819 refractory material Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
1,197,070. Electron-beam apparatus. SANDERS ASSOCIATES Inc. 13 July, 1967 [13 July, 1966], No. 32363/67. Heading H1D. Electrons are focused on to a crucible 10 by means of a conical member 16 made e.g. of heat-resistant glass or fused quartz. The crucible is at a much higher potential than the emissive cathode 15 and hence constitutes an anode. The hollow cathode may be filled with a coolant and has a concave emissive surface having a focal point at the anode. By means of an exhaust pump 22 and gas supply 23 a constant pressure of argon between 10-100 micron Hg. is maintained. Gas evolved by the contents of the crucible 10 is removed by the pump. The cone 16 may be replaced by two overlapping cones, that nearest the crucible being made of a more refractory material. Alternatively, to achieve the same effect, a single cone may have portions made of different materials. The apparatus may be used as a source of ultra-violet or infra-red radiation, or for etching or machining materials, in which case the conical member may be movable.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US564957A US3412196A (en) | 1966-07-13 | 1966-07-13 | Electron beam vacuum melting furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1197070A true GB1197070A (en) | 1970-07-01 |
Family
ID=24256603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB32363/67A Expired GB1197070A (en) | 1966-07-13 | 1967-07-13 | Electron-ion Stream Device |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3412196A (en) |
| GB (1) | GB1197070A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2148049A (en) * | 1983-10-14 | 1985-05-22 | Multi Arc Vacuum Syst | Physical vapor deposition apparatus |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3914637A (en) * | 1974-04-29 | 1975-10-21 | Us Air Force | Method and apparatus for focusing an electron beam |
| US4079285A (en) * | 1975-02-10 | 1978-03-14 | Simulation Physics, Inc. | Dielectric guide for electron beam transport |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US848600A (en) * | 1906-10-04 | 1907-03-26 | Siemens Ag | Production of homogeneous bodies from tantalum or other metals. |
| DE903017C (en) * | 1951-01-31 | 1954-02-01 | Sueddeutsche Lab G M B H | Manufacture of small balls from high-fusible materials |
| US2899556A (en) * | 1952-10-17 | 1959-08-11 | Apparatus for the treatment of substances | |
| FR919297A (en) * | 1959-09-04 | 1947-04-01 | ||
| US3202794A (en) * | 1963-02-18 | 1965-08-24 | Thermionics Lab Inc | Permanent magnet transverse electron beam evaporation source |
| US3311746A (en) * | 1964-06-03 | 1967-03-28 | Melpar Inc | Electron beam device for measuring the displacement of one body relative to another |
-
1966
- 1966-07-13 US US564957A patent/US3412196A/en not_active Expired - Lifetime
-
1967
- 1967-07-13 GB GB32363/67A patent/GB1197070A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2148049A (en) * | 1983-10-14 | 1985-05-22 | Multi Arc Vacuum Syst | Physical vapor deposition apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| US3412196A (en) | 1968-11-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |