GB0030622D0 - Deposition apparatus - Google Patents

Deposition apparatus

Info

Publication number
GB0030622D0
GB0030622D0 GB0030622A GB0030622A GB0030622D0 GB 0030622 D0 GB0030622 D0 GB 0030622D0 GB 0030622 A GB0030622 A GB 0030622A GB 0030622 A GB0030622 A GB 0030622A GB 0030622 D0 GB0030622 D0 GB 0030622D0
Authority
GB
United Kingdom
Prior art keywords
deposition apparatus
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0030622A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Priority to GB0030622A priority Critical patent/GB0030622D0/en
Publication of GB0030622D0 publication Critical patent/GB0030622D0/en
Ceased legal-status Critical Current

Links

GB0030622A 2000-12-15 2000-12-15 Deposition apparatus Ceased GB0030622D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0030622A GB0030622D0 (en) 2000-12-15 2000-12-15 Deposition apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0030622A GB0030622D0 (en) 2000-12-15 2000-12-15 Deposition apparatus

Publications (1)

Publication Number Publication Date
GB0030622D0 true GB0030622D0 (en) 2001-01-31

Family

ID=9905162

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0030622A Ceased GB0030622D0 (en) 2000-12-15 2000-12-15 Deposition apparatus

Country Status (1)

Country Link
GB (1) GB0030622D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)