FR1483391A - Method and apparatus for forming deposits under high vacuum - Google Patents

Method and apparatus for forming deposits under high vacuum

Info

Publication number
FR1483391A
FR1483391A FR65535A FR65535A FR1483391A FR 1483391 A FR1483391 A FR 1483391A FR 65535 A FR65535 A FR 65535A FR 65535 A FR65535 A FR 65535A FR 1483391 A FR1483391 A FR 1483391A
Authority
FR
France
Prior art keywords
under high
high vacuum
deposits under
forming deposits
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR65535A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Physics Corp
Original Assignee
Ion Physics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Physics Corp filed Critical Ion Physics Corp
Priority to FR65535A priority Critical patent/FR1483391A/en
Application granted granted Critical
Publication of FR1483391A publication Critical patent/FR1483391A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
FR65535A 1966-06-15 1966-06-15 Method and apparatus for forming deposits under high vacuum Expired FR1483391A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR65535A FR1483391A (en) 1966-06-15 1966-06-15 Method and apparatus for forming deposits under high vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR65535A FR1483391A (en) 1966-06-15 1966-06-15 Method and apparatus for forming deposits under high vacuum

Publications (1)

Publication Number Publication Date
FR1483391A true FR1483391A (en) 1967-06-02

Family

ID=8610979

Family Applications (1)

Application Number Title Priority Date Filing Date
FR65535A Expired FR1483391A (en) 1966-06-15 1966-06-15 Method and apparatus for forming deposits under high vacuum

Country Status (1)

Country Link
FR (1) FR1483391A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2218652A1 (en) * 1973-02-20 1974-09-13 Thomson Csf
FR2472619A1 (en) * 1979-12-18 1981-07-03 Ulvac Corp VACUUM SPRAY COATING APPARATUS
DE3511141A1 (en) * 1985-03-27 1986-10-23 Siemens AG, 1000 Berlin und 8000 München ION BEAM MATERIAL MACHINING SYSTEM WITH NEUTRALIZATION DEVICE

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2218652A1 (en) * 1973-02-20 1974-09-13 Thomson Csf
FR2472619A1 (en) * 1979-12-18 1981-07-03 Ulvac Corp VACUUM SPRAY COATING APPARATUS
DE3511141A1 (en) * 1985-03-27 1986-10-23 Siemens AG, 1000 Berlin und 8000 München ION BEAM MATERIAL MACHINING SYSTEM WITH NEUTRALIZATION DEVICE

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