ES378259A1 - Ion source having a uniform radial density - Google Patents

Ion source having a uniform radial density

Info

Publication number
ES378259A1
ES378259A1 ES378259A ES378259A ES378259A1 ES 378259 A1 ES378259 A1 ES 378259A1 ES 378259 A ES378259 A ES 378259A ES 378259 A ES378259 A ES 378259A ES 378259 A1 ES378259 A1 ES 378259A1
Authority
ES
Spain
Prior art keywords
ion source
anode
uniform radial
radial density
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES378259A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of ES378259A1 publication Critical patent/ES378259A1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • H01J27/12—Duoplasmatrons ; Duopigatrons provided with an expansion cup

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

The source comprises an ionization chamber into which the gas to be ionized is introduced, a cathode placed at the center of an intermediate electrode provided within an orifice for the passage of electrons, an anode provided with a hole for the passage of ions, a plasma-expansion control electrode which is electrically insulated from the anode and brought to a negative potential with respect to the anode potential, and an ion extraction electrode.
ES378259A 1969-04-04 1970-04-04 Ion source having a uniform radial density Expired ES378259A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6910569A FR2061809A5 (en) 1969-04-04 1969-04-04

Publications (1)

Publication Number Publication Date
ES378259A1 true ES378259A1 (en) 1973-03-16

Family

ID=9031993

Family Applications (1)

Application Number Title Priority Date Filing Date
ES378259A Expired ES378259A1 (en) 1969-04-04 1970-04-04 Ion source having a uniform radial density

Country Status (8)

Country Link
US (1) US3702416A (en)
BE (1) BE747725A (en)
CH (1) CH508979A (en)
DE (1) DE2016038B2 (en)
ES (1) ES378259A1 (en)
FR (1) FR2061809A5 (en)
GB (1) GB1263043A (en)
NL (1) NL7004792A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845300A (en) * 1973-04-18 1974-10-29 Atomic Energy Commission Apparatus and method for magnetoplasmadynamic isotope separation
US3924134A (en) * 1974-11-29 1975-12-02 Ibm Double chamber ion source
DE2610165C2 (en) * 1976-03-11 1983-11-10 Gesellschaft für Schwerionenforschung mbH, 6100 Darmstadt Duoplasmatron ion source for generating multiply charged ions
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
DE3480449D1 (en) * 1983-08-15 1989-12-14 Applied Materials Inc APPARATUS FOR ION IMPLANTATION
GB8607222D0 (en) * 1986-03-24 1986-04-30 Welding Inst Charged particle collection
US4841197A (en) * 1986-05-28 1989-06-20 Nihon Shinku Gijutsu Kabushiki Kaisha Double-chamber ion source
US6250070B1 (en) * 2000-05-09 2001-06-26 Hughes Electronics Corporation Ion thruster with ion-extraction grids having compound contour shapes

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285354A (en) * 1961-12-11
FR1366023A (en) * 1963-05-02 1964-07-10 Csf Improvements to neutralized ion beam propulsion devices
US3287598A (en) * 1964-01-02 1966-11-22 High Voltage Engineering Corp Ion source having an expansion cup for effecting beam divergence
US3238414A (en) * 1965-07-28 1966-03-01 George G Kelley High output duoplasmatron-type ion source

Also Published As

Publication number Publication date
FR2061809A5 (en) 1971-06-25
US3702416A (en) 1972-11-07
NL7004792A (en) 1970-10-06
BE747725A (en) 1970-08-31
DE2016038B2 (en) 1972-12-07
GB1263043A (en) 1972-02-09
DE2016038A1 (en) 1970-10-08
CH508979A (en) 1971-06-15

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